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Onto Innovation

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FY2019 Annual Report · Onto Innovation
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2019

Annual Report + 2020 Proxy

DEAR SHAREHOLDERS

The semiconductor industry plays an increasingly larger role in many of today’s most exciting megatrends. 
Technological breakthroughs are happening all around us as machine learning is being facilitated by high-power 
computing combined with high-bandwidth memory. Massive amounts of data are being generated and uploaded 
to data centers with cloud computing consuming additional processors and memory. In parallel, the anticipated 
5G communication channels are increasing data transfer speeds to satisfy the needs of infrastructure, industrial, 
commercial and consumer systems that will all require more processing power, memory, and wireless (RF 
systems. The increasing complexity and smaller sizes of all these devices requires inclusive, factory-wide 
manufacturing controls to achieve higher yields and the long-term reliability that is needed today.

With this exciting backdrop, this past June, Nanometrics and Rudolph Technologies announced our intention to 
merge as equal companies. We recognized that our complementary technologies and teams would accelerate 
our ability to serve our markets as well as expand our opportunities with strategic customers. Our customers 
now require a more collaborative and inventive supply chain to maintain their rapid pace of innovation. As our 
name suggests, Onto Innovation is advancing manufacturing innovation by providing comprehensive solutions 
to emerging process challenges across the semiconductor value chain.

 Complementary Products: Throughout the Entire Semiconductor Process

ENDTOEND PROCESS CONTROL SOFTWARE

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NANOMETRICS PRODUCTS

RUDOLPH PRODUCTS

BOTH PRODUCTS

WAFER FAB

ADVANCED PACKAGING

Since the merger completed in late October, our integration has been progressing very well. We have already 
identified and implemented $14 million in annualized cost synergies and we are confident in ending the year 
with $20 million in annualized synergies two years ahead of our initial estimate. More importantly, by combining 
our core competencies in software and optics we are now able to accelerate our pace of innovation and expand 
our served available markets. As a result, our new product pipeline is currently expanding, and we expect to see 
several exciting new product releases in 2020. Looking forward, we expect to significantly increase the total 
available markets we will be able to address.

Given the more important role semiconductors are playing in helping to create a smarter, greener, and more 
sustainable planet, we are also focused on our social responsibility and sustainability. We have formed an 
environmental team to focus on raising awareness and implementing sustainable practices and measures at 
each of our offices. Onto Innovation has already increased our human resources team and our focus on 
employees, with employee benefits extending above the level of the two legacy companies. The result has 
been an incredible amount of employee enthusiasm and inter-company collaboration as the two legacy teams 
begin creating “best sustainable and responsible business practices” for Onto Innovation. 

Amid the global pandemic of COVID19, our primary focus is ensuring our worldwide employee base and their 
families are safe. Since the beginning of the year, we have implemented a number of global policies and 
initiated a team to anticipate and react to the evolving situation. We have a strong customer-focused, innovative 
team supported by a balance sheet of over $300 million in cash, which provides us with many options to 
manage through this and position ourselves for continued growth both organically and inorganically. 

Lastly, a sincere thank you and appreciation to our loyal shareholders, customers, employees, suppliers and all 
who contributed to Onto Innovation’s success as we look forward to continued growth in 2020.

Sincerely,

Michael P. Plisinski
Chief Executive Officer

Christopher A. Seams
Chairman of the Board

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
SAFE HARBOR STATEMENT

This Annual Report contains forward-looking statements, including those regarding anticipated growth and trends in our businesses and 
markets, industry outlooks, market share, technology transitions, our business, strategies and financial performance, our development of new 
products, technologies and capabilities, and other statements that are not historical fact, and actual results could differ materially. Risk 
factors that could cause actual results to differ are set forth in the “Risk Factors” section of, and elsewhere in, our 2019 Annual Report on Form 
10K included in this report and other filings with the Securities and Exchange Commission. All forward-looking statements are based on 
management’s estimates, projections and assumptions as of the date hereof, and Onto Innovation undertakes no obligation to update any 
such statements.

1

UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549

FORM 10-K

(Mark One)

☒

☐

ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the Fiscal Year Ended December 31, 2019 

OR

TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 
1934

For the transition period from          to

Commission File No. 001-39110

ONTO INNOVATION INC.

(Exact name of registrant as specified in its charter)

Delaware
(State or other jurisdiction of
incorporation or organization)

94-2276314
(I.R.S. Employer
Identification Number)

16 Jonspin Road, Wilmington, MA 01887
(Address of principal executive offices) (Zip Code)

Registrant’s telephone number, including area code: (978) 253-6200

SECURITIES REGISTERED PURSUANT TO SECTION 12(b) OF THE ACT:

Title of Each Class
Common Stock, $0.001 par value per share

Trading Symbol
ONTO

Name of Exchange on Which Registered
New York Stock
Exchange (NYSE)

SECURITIES REGISTERED PURSUANT TO SECTION 12(g) OF THE ACT:
None

Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Yes ☒     No ☐
Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act. Yes ☐     No ☒
Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange 
Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject 
to such filing requirements for the past 90 days. Yes ☒     No ☐

Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to 
Rule 405  of  Regulation S-T  during  the  preceding  12 months  (or  for  such  shorter  period  that  the  registrant  was  required  to  submit  such 
files). Yes ☒     No ☐

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting 
company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company” and 
“emerging growth company” in Rule 12b-2 of the Exchange Act.:

Large accelerated filer
Non-accelerated filer

☒
☐

Accelerated filer
Smaller reporting company
Emerging growth company

☐
☐
☐

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying 

with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.  ☐

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Act). Yes ☐     No ☒
The aggregate market value of the registrant’s voting Common Stock held by non-affiliates of the registrant was approximately $811,997,653 

based on the closing price of the Common Stock on the Nasdaq Global Select Market on June 28, 2019.

The number of shares of the registrant’s Common Stock outstanding as of February 6, 2020 was 50,282,160.

DOCUMENTS INCORPORATED BY REFERENCE

Items 10, 11, 12, 13 and 14 of Part III of this Annual Report on Form 10-K incorporate by reference information from the definitive proxy 

statement for the registrant’s annual meeting of stockholders scheduled to be held on May 12, 2020.

TABLE OF CONTENTS

PART I

Business..............................................................................................................................................
Risk Factors ........................................................................................................................................
Unresolved Staff Comments...............................................................................................................
Properties............................................................................................................................................
Legal Proceedings ..............................................................................................................................
Mine Safety Disclosures.....................................................................................................................

PART II
Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity 
Securities.........................................................................................................................................
Selected Financial Data ......................................................................................................................
Management’s Discussion and Analysis of Financial Condition and Results of Operations..............
Quantitative and Qualitative Disclosures About Market Risk ............................................................
Financial Statements and Supplementary Data...................................................................................
Changes in and Disagreements with Accountants on Accounting and Financial Disclosure..............
Controls and Procedures.....................................................................................................................
Other Information...............................................................................................................................

PART III

Directors, Executive Officers and Corporate Governance..................................................................
Executive Compensation ....................................................................................................................
Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters
Certain Relationships and Related Transactions, and Director Independence....................................
Principal Accountant Fees and Services .............................................................................................

Exhibits and Financial Statement Schedule........................................................................................

PART IV

Item No.

1.
1A.
1B.
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4.

5.

6.
7.
7A.
8.
9.
9A.
9B.

10.
11.
12.
13.
14.

15.
Signatures

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Explanatory Note

On October 25, 2019, Onto Innovation Inc. (the “Company” or “Onto Innovation,” formerly known as Nanometrics 
Incorporated (“Nanometrics”)) consummated its previously announced merger (the “Merger”) with Rudolph Technologies, 
Inc. (“Rudolph”). Onto Innovation accounts for the Merger as a reverse acquisition using the acquisition method of accounting 
in accordance with generally accepted accounting principles, with Rudolph being treated as the acquiring entity for accounting 
purposes. Because Rudolph is treated as the accounting acquirer in the Merger, the financial statements filed with this annual 
report on Form 10-K include the financial results of Rudolph for all periods presented and the financial results of the former 
Nanometrics for the periods on or after October 26, 2019. As used in this report, unless the context suggests otherwise, the 
terms “we,” “us” or “our” refer to (i) Rudolph and its consolidated subsidiaries for periods through October 25, 2019 and (ii) 
Onto Innovation and its consolidated subsidiaries for periods on or after October 26, 2019. The terms the “Company” and 
“Onto Innovation” refer to the combined company following the consummation of the Merger.

FORWARD-LOOKING STATEMENTS

Certain statements in this Annual Report on Form 10-K of Onto Innovation are forward-looking statements, including 
those concerning our business momentum and future growth, acceptance of our products and services, our ability to deliver 
both products and services consistent with our customers’ demands and expectations and to strengthen our market position, 
our expectations of the semiconductor market outlook, future revenue, gross profits, research and development and engineering
expenses,  selling,  general  and  administrative  expenses,  product  introductions,  technology  development,  manufacturing 
practices, cash requirements, our dependence on certain significant customers and anticipated trends and developments in and 
management plans for our business and the markets in which we operate, our anticipated revenue as a result of acquisitions, 
and our ability to be successful in managing our cost structure and cash expenditures and results of litigation. The statements 
contained in this Annual Report on Form 10-K that are not purely historical are forward-looking statements within the meaning
of  Section 27A  of the  Securities  Act  of  1933  and  Section 21E  of  the  Securities  Exchange  Act  of  1934,  as  amended  (the 
“Exchange Act”), and within the meaning of the Private Securities Litigation Reform Act of 1995. Forward-looking statements 
may be identified by words such as, but not limited to, “anticipate,” “believe,” “continue,” “estimate,” “expect,” “intend,” 
“plan,” “should,” “may,” “could,” “will,” “would,” “forecast,” “project” and words or phrases of similar meaning, as they 
relate to our management or us.

The forward-looking statements contained herein reflect our expectations with respect to future events and are subject 
to  certain  risks,  uncertainties  and  assumptions. Actual  results  may  differ  materially  from  those  included  in  such  forward-
looking statements for a number of reasons including, but not limited to, the following: variations in the level of orders which 
can be affected by general economic conditions; seasonality and growth rates in the semiconductor manufacturing industry 
and  in  the  markets  served  by  our  customers;  the  global  economic  and  political  climates;  difficulties  or  delays  in  product 
functionality or performance; the delivery performance of sole source vendors; the timing of future product releases; failure 
to respond adequately to either changes in technology or customer preferences; changes in pricing by us or our competitors; 
our ability to manage growth; changes in management; risk of nonpayment of accounts receivable; changes in budgeted costs; 
our ability to leverage our resources to improve our position in our core markets, to weather difficult economic environments, 
to open new market opportunities and to target high-margin markets; the strength/weakness of the back-end and/or front-end 
semiconductor market segments; the imposition of tariffs or trade restrictions and costs, burdens and restrictions associated 
with other governmental actions; the ability to successfully integrate the businesses of Rudolph and Nanometrics promptly and 
effectively and to achieve the anticipated synergies and value-creation contemplated by the Merger within the expected time 
frame;  unanticipated  difficulties  or  expenditures  relating  to  the  Merger  and  integration  of the  Rudolph  and  Nanometrics 
businesses; the response of business partners and retention as a result of the Merger; the diversion of management time in 
connection with the integration; the effect of litigation related to the Merger; and the “Risk Factors” set forth in Item 1A. You 
should carefully review the cautionary statements and “Risk Factors” contained in this Annual Report on Form 10-K. You 
should also review any additional disclosures and cautionary statements and “Risk Factors” we include from time to time in 
our quarterly reports on Form 10-Q, current reports on Form 8-K and other filings we make with the Securities and Exchange 
Commission (the “SEC”). The forward-looking statements reflect our position as of the date of this report and we undertake
no obligation to update any forward-looking statements, whether as a result of new information, future events or otherwise, 
except as required by law.

1

Item 1.

Business.

General

PART I 

Onto Innovation is the new entity resulting from the completion on October 25, 2019 of the Merger between Nanometrics 
and  Rudolph,  two  long-time  leaders  in  the  semiconductor  equipment  industry  that  began  operations  in  1975  and  1940, 
respectively. Onto Innovation has been publicly traded since October 2019 (NYSE: ONTO). 

Onto Innovation is a worldwide leader in the design, development, manufacture and support of process control tools that 
perform  macro  defect  inspections  and  metrology,  lithography  systems,  and  process  control  analytical  software  used  by 
semiconductor wafer and advanced packaging device manufacturers. Our products are also used in a number of other high 
technology industries including: silicon wafer substrates; light emitting diode (“LED”); vertical-cavity surface-emitting laser 
(“VCSEL”); micro-electromechanical system (“MEMS”); CMOS image sensor (“CIS”); power device; RF filter; data storage; 
and certain industrial and scientific applications. We have a combined installed base of over 9,000 systems in the majority of 
advanced semiconductor device production factories worldwide.

We provide process and yield management solutions used in bare silicon wafer production and wafer processing facilities, 
often  referred  to  as  “front-end”  manufacturing and  device  packaging  and  test  facilities  (or  “back-end”  manufacturing), 
respectively through a portfolio of standalone systems for macro-defect inspection, packaging lithography, probe card test and 
analysis, as well as transparent and opaque thin film measurements. Our automated and integrated metrology systems measure 
critical dimensions, device structures, topography, shape, and various thin film properties, including three-dimensional features 
and film thickness, as well as optical, electrical and material properties. Our primary area of focus is products that provide 
critical  yield-enhancing  information,  which  is  used  by  microelectronic  device  manufacturers  to  drive  down  costs  and  to 
decrease the time to market their devices. All Onto Innovation systems feature sophisticated software and production-worthy 
automation.  In  addition,  our  advanced  process  control  software  portfolio  includes  powerful  solutions  for  standalone  tools, 
groups of tools, factory-wide, and enterprise-wide suites to enhance productivity and achieve significant cost savings. Onto 
Innovation’s systems are backed by worldwide customer service and applications support.

Nanometrics and Rudolph Merger

On October  25,  2019,  Nanometrics  and  Rudolph  consummated  their  previously  announced  Merger pursuant  to  the 
agreement and plan of merger, dated as of June 23, 2019 (the “Merger Agreement”), by and among Nanometrics, Rudolph and 
PV Equipment Inc.  As a result of the Merger, Rudolph became a direct wholly-owned subsidiary of Nanometrics, which was
renamed “Onto Innovation Inc.” At the effective time of the Merger, each issued and outstanding share of common stock of 
Rudolph, par value $0.001 per share (“Rudolph Common Stock”) (other than shares owned by Rudolph or Nanometrics), was 
automatically converted into the right to receive 0.8042 (the “Exchange Ratio”) shares of Onto Innovation common stock, par 
value  $0.001  per  share  (“Onto  Innovation Common  Stock”),  and  cash  in  lieu  of  any  fractional  shares  of  Onto  Innovation 
Common Stock any former holder of Rudolph Common Stock would otherwise be entitled to receive. Immediately following 
the effective time of the Merger, each of Nanometrics’ and Rudolph’s stockholders owned approximately 50% of the combined 
company, Onto Innovation. Pursuant to the Merger Agreement, Onto Innovation accounts for the Merger as a reverse acquisition 
using the acquisition method of accounting in accordance with generally accepted accounting principles, with Rudolph being 
treated as the acquiring entity for accounting purposes.

Industry Background

We  participate  in  the  sale,  design,  manufacture, marketing  and  support of  process  control  systems  for  optical  critical 
dimension metrology, thin film metrology, wafer inspection, 2D and 3D macro inspection and lithography tools for advanced 
packaging as well as advanced analytical software for semiconductor manufacturing and certain industrial applications and 
scientific research. Our principal market is semiconductors.  Semiconductors, primarily packaged as integrated circuits within 
electronic devices, include consumer electronics, server and enterprise systems, mobile computing (including smart phones 
and  tablets),  data  storage devices,  and  embedded automotive  and  control  systems.  Our core  focus  is  the  measurement  and 
control of the structure, composition, and geometry of the devices as they are fabricated on silicon wafers to improve device 
performance and manufacturing yields. Our end customers manufacture many types of integrated circuits for a multitude of 
applications, each having unique manufacturing challenges. This includes integrated circuits to enable information processing 
and management (logic integrated circuits), memory storage (3D NAND and DRAM), analog devices (e.g., Wi-Fi and 5G radio 
integrated circuits, power devices), MEMS sensor devices (accelerometers, pressure sensors, and microphones), image sensors, 
and components for hard disk drives, LEDs, and power management.

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Current  Trends

Advanced  Nodes  refer  to  leading  edge  integrated  circuits  in  which  the  feature  sizes  of  transistors  and  other 
features continue to shrink in specified steps, or nodes measured in nanometers (nm). Demand for our products continues to
be  driven  by  our customers’  desire  for  higher  overall  chip  performance  without  increasing  the  chip  size,  while
improving  power  efficiency,  logic  processing  capability,  data  storage  volume  and  manufacturing  yield.  To  achieve  these 
goals,  our  customers  have  increased  their  use  of  more  complex  materials  and  processing  methods  in  their  manufacturing
flow. The primary paths for performance gains are geometric scaling, known as node shrinks, or scaling in three dimensions. 
In  some  cases,  our  customers  are  implementing  new  materials  and  methods  in  high  volume  manufacturing,  including
materials  and  device  architectures  to  reduce  power  consumption,  and  stacked  devices.  To  scale  NAND  memory  a 
new  3D  stacking  architecture  has  been  implemented  with  as  many  as  128  device  layers  in  production.  Additional 
innovation continues in Data Storage, Power Devices, MEMS, and Image Sensors. We believe the use of these new materials 
and manufacturing methods has increased demand for our products such as the Atlas III+ that is capable of measuring these
advanced nodes as certain features shrink to 7nm, 5nm and 3nm.

To  shrink  features,  new  methods,  including  multiple  patterning  lithography  and  extreme  ultra-violet  (“EUV”) 
lithography, have been developed. The EUV process is driving significantly higher requirements for the silicon wafers that 
are entering the EUV  chamber.  Small  particles  on  the  backside  of  the  wafer  measuring  a  few  micrometers  (microns)  can 
distort  the  images  being  projected  onto  the  top  side.  Our  NovusEdge  inspection  tool  has  been  installed  at  major  silicon 
wafer  manufacturers  to detect  backside  contamination  and  edge  cracking  as  a  final  quality  control  mechanism  before 
wafers  are  shipped  to  the  semiconductor  fabrication  manufacturers.  The  top  side  of  these  wafers  must  also  be  scanned 
for  any  impurities  contained  in  the  silicon.  This  compositional  analysis  is  measured  using  Onto  Innovation’s  Fourier 
Transform Infrared (“FTIR”) systems.

Advanced Packaging refers to a variety of technologies that enable the miniaturization of electronic products, such as 
portable  consumer  devices,  including  smartphones,  watches,  and  tablets.  In  electronics  manufacturing,  integrated 
circuit packaging is the final stage of semiconductor device fabrication, in which a single circuit made from semiconducting 
material (a  die  or  chip)  is  encased  in  a  molded  package  that  provides  external  connections  to  a  printed  circuit  board  and 
also  prevents  physical damage to the chip and corrosion. Advanced Packaging refers to the conductors and other structures
that often connect multiple  die,  feed  them  with  electric  power  and  create  signal  paths  to  and  from  the  PC  board,  dissipate 
their  heat,  and  protect  them  from  damage.    Today,  the  drive  to  pack  more  functions  into  a  small  space  and  reduce  their 
power requirements demands that chip packages do much more than ever before to combine multiple chips and functions 
into a single molded package.

One  example  of  the  technology  used  in Advanced  Packaging  is  the  3D  integration  of  semiconductors  and  other 
devices. The  technology  involves  stacking  individual  die  in  one  integrated  package.  Through-silicon  vias  (“TSVs”)  are
vertical copper interconnects  that  are  embedded  from  the  bottom  surface  of  a  die  to  the  top  surface,  which  allows  power 
and communication to be shared among the individually stacked components. The processes required for 3D integration vary 
from one manufacturer to another and many continue to be optimized for yield and to ensure the functioning of individual
stacked chips. 

Fan-out  wafer  level  packages  are  another  advanced  packaging  technology  using  copper  pillars/bumps  to 
vertically connect a wide variety of stacked die and are considered the next disruptive technology for several reasons. First, 
fan-out  wafer  level  packages  significantly  reduce  the  space  needed  inside  an  electronic  device,  such  as  a  smartphone,  by 
combining multiple chips/functions into a single package, often called a System-in-Package (“SIP”). Next, it improves the 
system’s  performance by  reducing  power  and  signal  conductor  lengths,  which  previously  were  routed  from  package  to 
package  through  a  printed  circuit  (“PC”)  board.  Using  thin redistribution  layers  (“RDLs”)  to  “fan  out”  power  and  signal 
connections to the larger contacts on the PC board eliminates the need for a ceramic or laminated substrate, which accounts 
for 35 percent of the packaging cost. As a result of the small overall form factor, fan-out wafer level packages provide the 
functionality  needed  in  high-end  mobile  and  wearable  products. We  believe  the  growth  of  advanced  packaging  has 
increased  demand  for  our  products  such  as  the  Dragonfly G2 System that is capable of inspecting two-dimensional (2D) 
features  to  find  flaws/defects  and  detect  unwanted  residual residue as well as measuring and reporting vertical attributes of 
3D pillars and bumps.

Panel Manufacturing. The current process to manufacture advanced packaging involves attaching known good die to 
a 300mm wafer, used as a temporary carrier when adding components such as RDLs and copper pillars.  SIP packages can 
often contain  side-by-side  die,  meaning  the  package  can  be  large  and  limit  the  number  of  packages  being  placed  on  a 
reconstituted wafer.  In  order  to  meet  the  growing  demand  at  reduced  average  selling  prices,  manufacturers  are  looking  to 
scalable technology. Advanced  packaging  facilities  looking  to  improve  cost  of  ownership  and  increase  productivity  are 
transitioning  from  round  300mm  wafers  to  large  rectangular  panels,  which  can  be  as  large  as  600mm  x  600mm.  This 
larger  size  and  shape  enables companies manufacturing large area packages to efficiently increase the number of devices 
being processed at each step as they are no longer limited to operating within the constraints of a round wafer. By responding
to  market  opportunities  and  addressing the  stringent  demands  of  customers’  technical  roadmaps,  we  believe  that  Onto 
Innovation is optimally positioned to capitalize on the emerging market of high-volume panel manufacturing.  For example, 
the  JetStep® S  lithography  system  is  designed  for  processing  RDLs  on  both  glass  and  organic laminate  panels  in  the 
semiconductor  Advanced  Packaging  market.  The  Firefly™S  Series,  designed  for  high  resolution  inspection,  can  provide
metrology and location information to the JetStep S tool for each 

3 

die, which greatly improves lithography throughput using Onto Innovation’s exclusive StepFAST™ process.  The Firefly also 
delivers  a  combination  of  defect  detection  and  substrate  flexibility  in  a  single  platform,  reducing  capital  investment 
requirements and providing a reliable pathway to transition from wafer to panel-based processes.

Technology

We believe that our expertise in our core technologies of optics and software and our combined investment in research 
and development will enable us to rapidly develop new technologies and products in order to quickly respond to emerging 
industry trends and competitive challenges. The breadth of our technology enables us to offer a diverse combination of process 
control  products  and  solutions.  Unique  features  have  been  designed  into  our  lithography  systems  to  meet  our  customers’ 
changing process requirements. Our metrology and inspection technologies provide process control for the majority of wafers 
processed today in a semiconductor wafer fab. In front-end processes, optical critical dimension (“OCD”) metrology, thin film 
metrology,  wafer  stress  metrology  and  macro  defect detection  and  classification  technologies  allow  yield  enhancement  for 
critical processes such as photolithography, diffusion, etch, chemical mechanical planarization (“CMP”) and outgoing quality 
control.  Within  the  final  manufacturing  (back-end)  processes,  our  2D/3D  advanced  macro  defect  inspection  provides  our 
customers with critical quality assurance and process information. Defects may be created during probing, bumping, dicing, 
assembly processes (RDLs, TSVs, copper pillars, etc.) or general handling and can have a major impact on device and process 
quality. Lastly, we turn all of the data gathered into useful knowledge for our customers to make yield-enhancing decisions, 
which lower their cost of goods sold (“COGS”) and improve their margins.

Onto Innovation’s Products

Metrology

Automated Metrology Systems. Our automated systems primarily consist of fully automated metrology systems that are 
employed in semiconductor production environments. The Atlas® family of products represents our line of high-performance 
metrology  systems  providing  OCD  and  thin  film  metrology  and  wafer  stress  metrology  for  transistor  and  interconnect 
metrology applications. The thin film and OCD technology in the Atlas is supported by our NanoCD suite of solutions including 
our NanoDiffract® software, SpectraProbe™ software and NanoGen™ scalable computing engine that enables visualization, 
modeling, and analysis of complex structures.  Additionally, the S3000SX™ System is used for ultra-thin transparent films 
metrology in advanced semiconductor fabrication applications for advanced nodes.

NanoDiffract®  is  a  modeling,  visualization  and  analysis  software  that  takes  signals  from  the  metrology  systems, 
providing critical dimension, thickness, and optical properties from in-line measurements. The software has an intuitive three-
dimensional modeling interface to provide visualization of today’s advanced and complex semiconductor devices. There are 
proprietary fitting algorithms in NanoDiffract that enable very accurate and very fast calculations for signal processing for high 
fidelity model-based measurements. SpectraProbe is a model-less fitting engine that enables fast time to solution for in-line 
excursion detection and control. SpectraProbe complements the high-fidelity modeling of NanoDiffract with a simple machine
learning interface for rapid recipe deployment. The software is supported by NanoGen, an enterprise scale computing hardware 
system that is deployed to run the computing intensive analysis software. NanoGen leverages commercial server chips and 
networking architecture and is optimized to support the workload of NanoDiffract and SpectraProbe analysis.   

Integrated Metrology Systems. Our integrated metrology (“IM”) systems are installed directly onto wafer processing 
equipment to provide near real-time measurements for improved process control and maximum throughput. Our IM systems 
are sold directly to end user customers. The IMPULSE family of products includes the latest technology for OCD, and thin 
film  metrology,  and  have  been  successfully  qualified  on  numerous  independent  Wafer  Fabrication  Equipment  Suppliers’ 
platforms. Our NanoCD suite of software solutions including NanoDiffract and SpectraProbe, is sold in conjunction with our 
IMPULSE systems.

Opaque  Film  Metrology. The  MetaPULSE® systems  allow  customers  to  simultaneously  measure  the  thickness  and 
other properties of metal or non-metallic opaque film layers in a non-destructive manner without physically contacting product 
wafers. PULSE Technology is used in copper or aluminum interconnect processes, as well as various layers in 3D NAND chips 
and thick advanced packaging interconnect applications.  PULSE technology is expanding into new process applications such 
as RF filters and modules, driven by the need for on-product metrology as feature sizes decrease and pattern densities increase.

Inspection & Yield Management

Silicon Wafer All-surface Inspection/Characterization. All-surface refers to inspection of the wafer frontside, edge, 
and backside as well as the locator notch on the wafer. The AWX and NovusEdge tools utilize optical scattering and imaging 
technology  to  inspect  these  surfaces.    A  primary  reason  for  all-surface  wafer  inspection  is  to  detect  and  contain  any

4 

contamination that may spread throughout the wafer fab. For instance, it is critical that the wafer backside be free of defects 
prior to the EUV lithography process to prevent focus and exposure problems on the wafer frontside. 

Epitaxial Thickness and Composition. Our materials characterization products include systems that are used to monitor 
the  physical,  optical,  electrical  and  material  characteristics  of  discrete  electronic  industry,  opto-electronic,  HB-LED  (high 
brightness LEDs), solar PV (solar photovoltaics), compound semiconductor, strained silicon and silicon-on-insulator devices, 
including  composition,  crystal  structure,  layer  thickness,  dopant  concentration,  contamination  and  electron  mobility.  Our 
portfolio of products for materials characterization includes photoluminescence mapping in the RPM Blue and Vertex, and 
Fourier Transform Infrared (“FTIR”) spectroscopy in the QS Family (QS1200, QS2200, QS4300) systems for substrate quality 
and epitaxial thickness metrology. 

Macro Defect Inspection. Chip manufacturers deploy advanced macro defect inspection throughout the production line 
to  monitor  key  process  steps,  gather  process-enhancing  information  and  ultimately,  lower  manufacturing  costs.  Field-
established tools such as the F30™, NSX®, and the latest Dragonfly G2 inspection systems are found in wafer fab (front-end) 
and packaging (back-end) facilities around the world. These high-speed tools incorporate features such as wafer-less recipe 
creation, tool-to-tool correlation and multiple inspection resolutions. Using Discover® yield management software, the vast 
amounts of data gathered through automated inspection can be analyzed and classified to determine trends and locate root 
causes that directly affect yield.

Automated Defect Classification and Pattern Analysis. Automating the defect detection and classification process is 
best done by a system that can mimic, or even extend, the response of the human eye, but at a much higher speed, with higher 
resolution  and  more  consistency.  Our TrueADC  software  performs  this  rapid  comparison  and  classification  enabling  yield
improvement across facilities with consistent results.  

Yield  Analysis. Using  wafer  maps,  charts  and  graphs,  the  massive  amounts  of  data  gathered  through  automated 
inspection  can  be  analyzed  to  determine  trends  across  bumps,  die,  wafers  and  lots.  Discover Yield  and  other  tools  in  the 
Discover  suite  enable  enterprise-wide  analysis.    This  analysis  may  determine  where  a  process  variation  or  deviation  has 
occurred, allowing process engineers to make corrections or enhancements to increase yields. Defect data analysis is performed 
to identify, analyze and locate the source of defects and other manufacturing process excursions. Using either a single wafer
map  or  a  composite  map  created  from  multiple  wafer  maps,  this  analysis  enables  identification  of  defect  patterns  and 
distribution. When combined with inspection data from strategically placed inspection points, this analysis may pinpoint the 
source of the defects so corrective action can be taken.

Industrial,  Scientific,  and  Research  Markets:  4D  Technology.  In November  of  2018,  Nanometrics  acquired  4D 
Technology  Corporation,  based  in  Tucson Arizona.  The  4D  business  unit  offers  a  line  of  interferometry  systems  for  the 
measurement and inspection of high precision surfaces. End markets include high precision optics surfaces and components, 
aerospace and defense components, automotive and powertrain systems, and unique research and scientific instrumentation 
that requires the unique high-speed results of the 4D systems. 

Lithography

Advanced Packaging Lithography.  Our lithography steppers from the JetStep product family, use projection optics to 
expose circuit patterns from a mask or reticle onto a substrate to expose images with optimal fidelity. The JetStep systems are 
used principally for package level interconnect and bump layer patterning.  Our JetStep systems have been specifically designed 
for these layer applications. The JetStep W Series is designed for wafers and other round substrates while the JetStep S Series 
is designed for rectangular substrates (panels). Both systems boast a large printable field to maximize throughput while not 
limiting resolution. High-fidelity optics are able to image the fine features required while at the same time managing the non-
flatness that is typical for advanced packaging applications.  

Flat Panel Display Lithography. In addition to semiconductor device applications with the JetStep S and W products, 
the JetStep G Series is engineered to address the needs of the flat panel display market.  The JetStep G is principally used in 
Gen 4 and Gen 5 panels for displays used in high resolution, smaller form factor devices, such as smart phones and smart 
watches.  

5 

Enterprise Software Solutions

Process Control Software. We provide a wide range of advanced process control solutions, all designed to improve 
factory profitability, including run-to-run control, fault detection, classification and tool automation. Our Advanced Process 
Control  solutions  are  sold  under  the  Discover™  brand  and  include  Discover  Enterprise,  Discover  Run-to-Run and  other 
solutions.  Discover software can automatically detect or predict tool failure (fault detection) as well as calculate recipe settings 
for a process that will drive the yielded output to meet and exceed the target, despite variations in the incoming material and 
minor  instabilities  within  the  process  equipment.    These  process  control  software  solutions  enable  the  factory  to  increase 
capacity and yield while decreasing rework and scrap. 

Yield Management Software. Semiconductor manufacturers use yield management software to obtain valuable process 
yield and equipment productivity information. Our Discover Yield, Discover Enterprise, and Discover Patterns software enables 
fab wide and enterprise wide (multiple factory) yield management based on data analytics from a broad range of sources.  These 
data  sources  include  wafer  fab  inspection  and  metrology  systems,  tool  sensors,  tool  recipes,  electrical  tests  and  the  fab
environment. The  Discover  platform  utilizes  machine  learning,  advanced  analytics,  and  other  analysis  and  visualization  to 
enable  yield  management  and  excursion  prevention,  and  to  maximize  productivity  across  the  entire  semiconductor 
manufacturing value chain.

6 

Products

WAFER AND CHIP MANUFACTURING

Market

Applications

Products

Bare wafer edge and backside inspection

Unpatterned Silicon 
Wafer

Epitaxial Thickness and Composition / Impurity Detection

OCD Metrology

Leading-edge 3D chip manufacturing

NovusEdge™ Wafer System
AWX™ Series

QS1200 System
QS2200 System
QS4300 System
RPM Blue & Vertex Systems

Atlas III+ System
IMPULSE+ System

Metal Film 
Metrology

Transparent Film
Metrology

Macro Defect 
Inspection

Opaque metal and semi-transparent film metrology system

MetaPULSE G System

Transparent thin film metrology system

Front-side macro defect inspection system

ADVANCED PACKAGING

Atlas III+ System
IMPULSE+ System
S3000™ System

DragonFly G2 System
F30™ Inspection Module
NSX® Inspection Systems

Market

Applications

System-in-Package 
Inspection

2D/3D Advanced Packaging inspection and bump 

metrology

Products

Dragonfly™G2 System
NSX® Systems

Sub-micron defect panel inspection

Firefly™ Systems

Fan-out Panel Level 
Packaging

2x reduction step and repeat system for advanced packaging 
lithography on square or rectangular substrates up to 
Gen 3.5 size

JetStep® X700 System

Alignment metrology and lithography optimization

StepFAST Software

INTEGRATED SOFTWARE SOLUTIONS

Market

Applications

Products

Enterprise / Fabwide
Data
Management

Tool Centric 
Analytics

Fabwide yield management system

Tool-centric yield management system

Discover® Enterprise Software
Discover Yield Software
Discover Defect Software
TrueADC® Enterprise Software

Discover® Run-to-Run Software
Discover Patterns Software

Automatic defect classification software

Discover Review Software

7 

Customers

Over 150 microelectronic device manufacturers have purchased Onto Innovation tools and software for installation at 
multiple sites. We support a diverse customer base in terms of both geographic location and type of device manufactured. Our 
customers are located in over 20 countries.

In 2019, sales to Taiwan Semiconductor Manufacturing Co. Ltd. and SK Hynix Inc. accounted for 13.4% and 13.1%,
respectively, of our revenue.  In 2018, sales to SK Hynix Inc. accounted for 12.2% of our revenue.  No individual end user 
customer accounted for more than 10% of our revenue in 2017.  We do not have purchase contracts with any of our customers 
that obligate them to continue to purchase our products. 

Sales, Customer Service and Application Support

We believe that the capability for direct sales and support is beneficial for developing and maintaining close customer 
relationships  and  for  rapidly  responding  to  changing  customer  requirements.  We  provide  local  direct  sales,  service  and 
application support through our worldwide offices located in the United States, South Korea, Japan, Taiwan, China, Singapore 
and  Europe,  and  work  with  selected  dealers  and  sales  representatives  on  a  more  limited  basis  in  various  countries.  Our 
applications  team  is  composed of  technically  experienced sales  engineers  who  are  knowledgeable  in  the  use  of  metrology 
systems generally and the unique features and advantages of our specific products. Supported by our technical applications 
team, our sales and support teams work closely with our customers to offer cost-effective solutions to complex measurement 
and  process  problems. As  of  December 31,  2019,  we  employed  647  sales  and  marketing,  service  and  applications  support 
personnel.

We believe that customer service and technical support for our systems are crucial factors that distinguish us from our 
competitors  and  are  essential  to  building  and  maintaining  close,  long-term  relationships  with  our  customers. We  generally 
provide a warranty for our products which range from twelve to fourteen months to cover defects in material and workmanship. 
We provide system support to our customers through factory technical support and globally deployed field service personnel. 
The factory technical support operations provide customers with telephonic technical support access, direct training programs, 
operating  manuals  and  other  technical  support  information  to  enable  effective  use  of  our  metrology  and  measurement 
instruments and systems. We have field service operations based in various locations throughout the United States, South Korea, 
Taiwan, China, Japan, Singapore, Israel, and European locations. 

Manufacturing

Our  manufacturing  operations  are  in  Milpitas  California, Tucson Arizona, Wilmington  Massachusetts,  Bloomington 
Minnesota, and at various contract manufacturers around the world. It is our strategy to outsource all assemblies that do not 
contain elements that we believe lead to a direct competitive advantage. Most of our automated and integrated products are 
currently manufactured at our Milpitas and Bloomington facilities. We currently do not expect our manufacturing operations 
to require additional major investments in capital equipment. 

We  manufacture  key  modular  assemblies  and  integrated  tools  and  make  reasonable  efforts  to  ensure that  externally 
purchased parts or raw materials are available from multiple suppliers, if possible. Certain components, subassemblies and 
services necessary for the manufacture of our systems are obtained either from a sole supplier or limited group of suppliers. 
We also have long-term supply agreements with strategic suppliers for the supply of key assemblies for use in our products. 

We rely on a number of limited source suppliers for certain parts and subassemblies. This reliance creates a potential 
inability  to  obtain  an  adequate  supply  of  required  components,  and  reduced  control  over  pricing  and  time  of  delivery  of 
components. An inability to obtain adequate supplies would require us to seek alternative sources of supply or might require 
us to redesign our systems to accommodate different components or subassemblies. To date, we have not experienced any 
significant delivery delays. However, if we were forced to seek alternative sources of supply, manufacture such components or 
subassemblies internally, or redesign our products, this could prevent us from shipping our products to our customers on a 
timely  basis,  which  could  have  a  material  adverse  effect  on  our  operations. As  of  December  31,  2019,  we  employed  184 
manufacturing personnel.

Research and Development

We  continue  to  invest  in  research  and  development  to  provide  our  customers  with  products  that  add  value  to  their 
manufacturing processes and that provide a better and differentiated solution than our competitors so that our products stay in 
the  forefront  of  current  and  future  market  demands.  Whether  it  is  for  an  advancement  of  current  technology,  yield  and 
manufacturing improvement, enabling new end device technology, or the development of a new application in our core or 
emerging markets, we are committed to product excellence and longevity. 

8

The markets for equipment and systems for manufacturing semiconductor devices and for performing OCD metrology,
macro-defect inspection, advanced packaging lithography and thin film transparent and opaque process control metrology are 
characterized  by  continuous  technological  development  and  product  innovations.  We  believe  that  the  rapid  and  ongoing 
development  of  new  products  and  enhancements  to  existing  products  is  critical  to  our  success. Accordingly,  we  devote  a 
significant  portion  of  our  technical,  management  and  financial  resources  to  research  and  development  programs. As  of 
December 31, 2019, we employed 376 engineering personnel in research and development.

Intellectual Property

We believe that our success will depend to a great degree upon innovation, technological expertise and our ability to 
adapt our products to new technology. As a result, we have a policy of seeking patents on inventions governing new products 
or technologies as part of our ongoing research, development, and manufacturing activities. As of December 31, 2019, we have 
been granted, or hold exclusive licenses to, 484 U.S. and foreign patents. The patents we own, jointly own or exclusively license 
have expiration dates ranging from 2020 to 2038. We also have 85 pending regular and provisional applications in the U.S. and 
other  countries.  Our  patents  and  applications  principally  cover  various aspects  of  metrology,  macro-defect  detection  and 
classification, altered material characterization, lithography techniques and automation. 

Our pending patents may never be issued, and even if they are, these patents, our existing patents and the patents we 
license may not provide sufficiently broad protection to protect our proprietary rights, or they may prove to be unenforceable. 
To  protect  our  proprietary  rights,  we  also  rely  on  a  combination  of  copyrights,  trademarks,  trade  secret  laws,  contractual 
provisions and licenses and non-disclosure agreements. There can be no assurance (i) that any patents issued to or licensed by 
us will not be challenged, invalidated or circumvented, (ii) that the rights granted thereunder will provide us with a competitive 
advantage or (iii) that we will be able to fully protect our technology. Additionally, others may obtain patents and assert them 
against us. From time to time, we receive communications from third parties asserting that our systems may contain design 
features that such third parties claim may infringe upon their proprietary rights.

The laws of some foreign countries do not protect our proprietary rights to the same degree as do the laws of the United 
States, and many U.S. companies have encountered substantial infringement problems in protecting their proprietary rights 
against infringement in such countries, some of which are countries in which we have sold and continue to sell products. There 
is  a  risk  that  our  means  of  protecting  our  proprietary  rights  may  not  be  adequate.  For  example,  our  competitors  may 
independently develop similar technology or duplicate our products. If we fail to adequately protect our intellectual property, 
it would be easier for our competitors to sell competing products.

Competition

We offer various products for various semiconductor manufacturing process steps, and several of our products extend 
across the same process flow. However, for process control of each of these process steps, we have multiple established and 
potential competitors, some of which may have greater financial, research, engineering, manufacturing and marketing resources 
than we have. We may also face future competition from new market entrants from other overseas and domestic sources. We 
expect  our  competitors to  continue  to  improve  the  design and  performance of  their  current  products  and  processes,  and  to
introduce new products and processes with improved price and performance characteristics. In order to remain competitive, we 
believe that we will require significant financial resources to offer a broad range of products, and to maintain customer service
and support centers worldwide, and to invest in product research and development.  

In every market in which we participate, the global semiconductor equipment industry is intensely competitive, and 
driven  by  rapid  technological  adoption  cycles.  Our  ability  to  effectively  compete  depends  upon  our  ability  to  continually 
improve our products, applications and services, and our ability to develop new products, applications and services that meet 
constantly evolving customer requirements. 

In automated systems for the semiconductor industry, our principal competitors are KLA Corporation (“KLA”) and Nova 
Measuring  Instruments  Ltd.  (“Nova”)  for  thin film  and  critical  dimension  OCD  metrology.  Our  principal  competitor  for 
advanced packaging inspection is Camtek Ltd. (“Camtek”). While the advanced packaging lithography market is served by 
various competitors, our primary competitors are Veeco Instruments, Inc. (“Veeco Instruments”) and, to a lesser extent, Nikon 
Corporation (“Nikon”). Our primary competitor for integrated metrology systems for the semiconductor industry is Nova. The 
opto-electronics, discrete device and industrial and scientific markets are addressed primarily by our material characterization 
and 4D business unit systems, served by numerous competitors, of which no single competitor or group of competitors has 
established a majority position. 

We believe that our competitive position in each of our markets is based on the ability of our products and services to 
address  customer  requirements  related  to  numerous  competitive  factors.  Competitive  selections  are  based  on  many  factors 

9

involving technological innovation, productivity, total cost of ownership of the system, including impact on end of line yield, 
price, product performance and throughput capability, quality, reliability and customer support.

Backlog

We schedule production of our systems based upon order backlog and informal customer forecasts. We use the term 
“backlog” to refer to only those orders to which the customer has been assigned a purchase order number and for which delivery 
is anticipated within 12 months. Because shipment dates may be changed and customers may cancel or delay orders with little 
or no penalty, our backlog as of any particular date may not be a reliable indicator of actual sales for any succeeding period. At 
December 31, 2019, we had a backlog of approximately $71.7 million compared with a backlog of approximately $62.7 million
at December 31, 2018.

Employees

At December 31, 2019, we employed a total of 1,340 persons worldwide with sales, applications and service support in 
key geographic areas aligned with our customer locations. None of our employees are represented by a union and we have 
never experienced a work stoppage because of union actions. We consider our employee relations to be good. Many of our 
employees have specialized skills that are of value to us. Our future success will depend in large part upon our ability to attract, 
retain and motivate highly skilled scientific, technical and managerial personnel, who are in great demand in our industry.

Environmental Matters

Our operations are subject to various federal, state and local environmental protection regulations governing the use, 
storage, handling and disposal of hazardous materials, chemicals, and certain waste products. We believe that compliance with 
federal, state and local environmental protection regulations will not have a material adverse effect on our capital expenditures, 
earnings and competitive and financial position. 

If we fail to comply with such laws and regulations, we could be liable for damages, penalties and fines. We further 
discuss  the  impact  of  environmental  regulation  under  the  risk  factor, “We  are  subject  to  various  environmental  laws  and 
regulations that could impose substantial costs upon us and may harm our business, operating results and financial condition.” 
in Item 1A. 

Available Information

Our Internet website address is http://www.ontoinnovation.com. The information on our website is not incorporated into 
this Annual Report. Our Annual Reports on Form 10-K, Quarterly Reports on Form 10-Q and Current Reports on Form 8-K
(and  any  amendments  to  those  reports)  are  made  available  free  of charge,  on  or  through  our  Internet  website,  as  soon  as 
reasonably practicable after such material is electronically filed with or furnished to the SEC. All filings we make with the SEC 
are also available free of charge via EDGAR through the SEC’s website at http://www.sec.gov. In addition, the historic reports 
and  materials  that  were  filed  by  Nanometrics  and  Rudolph  with  the  SEC  are  available  at  our  investor  relations  website  at 
https://investors.ontoinnovation.com. These filings may also be obtained through the SEC’s website. Documents that are not 
available through the SEC’s website may also be obtained by submitting an online request to the SEC at http://www.sec.gov.

We also make available, free of charge, through our investor relations website, our corporate governance summary, Code 
of Business Conduct and Ethics, charters of the committees of our Board of Directors, and other information and materials, 
including information about how to contact our Board of Directors. 

Investors and others should also note that we announce material financial information to our investors using our investor 
relations website, SEC filings, press releases, public conference calls and webcasts. We use these channels as well as social
media to communicate with the public about the Company, our products and services and other matters. It is possible that the 
information we post on social media could be deemed to be material information. Therefore, we encourage investors, the media, 
and others interested in the Company to review the information we post on the social media channels listed on our investor 
relations website.

10

Item 1A. Risk Factors.

Risks Related to Our Business

Our operating results have varied and will likely continue to vary significantly from quarter to quarter in the future, 
causing volatility in our stock price.

Our quarterly operating results have varied in the past and will likely continue to vary significantly from quarter to quarter 
in the future, causing volatility in our stock price. Some of the factors that may influence our operating results and subject our 
stock to extreme price and volume fluctuations include:

• 

• 

• 

• 

• 

• 

changes in customer demand for our systems, which is influenced by economic conditions in the semiconductor 
device industry, demand for products that use semiconductors, market acceptance of our systems and products of 
our customers and changes in our product offerings;

seasonal variations in customer demand;

the timing, cancellation or delay of customer orders, shipments and acceptance;

the gain or loss of a key customer or significant changes in the financial condition of one or more key customers;

product  development  costs,  including  increased  research,  development,  engineering  and  marketing  expenses 
associated with our introduction of new products and product enhancements; and

the levels of our fixed expenses, including research and development costs associated with product development, 
relative to our revenue levels.

In  light  of  these  factors  and  the  cyclical  nature  of  the  semiconductor  industry,  we  expect  to  continue  to  experience 
significant fluctuations in quarterly and annual operating results. Moreover, many of our expenses are fixed in the short-term 
which, together with the need for continued investment in research and development, marketing and customer support, limits 
our ability to reduce expenses quickly. As a result, declines in net sales could harm our business and the price of our common 
stock could substantially decline.

Our largest customers account for a substantial portion of our revenue, and our revenue and cash flows could decline 
considerably if one or more of these customers were to purchase significantly fewer of our systems or delay or cancel a 
large order.

Sales to end user customers that individually represent at least five percent of our revenue typically account for, in the 
aggregate, a considerable amount of our revenue. We operate in the highly concentrated, capital-intensive semiconductor device 
manufacturing industry. Historically, a substantial portion of our revenue in each quarter and year has been derived from sales 
to relatively few customers, and this trend is expected to continue. If any of our key customers were to purchase significantly 
fewer of our systems in the future, or if they delay or cancel a large order, our revenue and cash flows could meaningfully 
decline. We expect that we will continue to depend on a small number of large customers for a sizable portion of our revenue. 
In addition, as large semiconductor device manufacturers seek to establish closer relationships with their suppliers, we expect 
that our customer base will become even more concentrated.

Our customers may be unable to pay us for our products and services.

Our customers include some companies that may, from time to time, encounter financial difficulties. If a customer’s 
financial difficulties become severe, the customer may be unwilling or unable to pay our invoices in the ordinary course of 
business,  which  could  adversely  affect  collections  of  both  our  accounts  receivable  balance  and  unbilled  services.  The 
bankruptcy of a customer with a substantial account balance owed to us could have a material adverse effect on our financial 
condition and results of operations. In addition, if a customer declares bankruptcy after paying us certain invoices, a court may 
determine that we are not properly entitled to that payment and may require repayment of some or all of the amount we received, 
which could adversely affect our financial condition and results of operations.

Variations in the amount of time it takes for us to sell our systems may cause fluctuations in our operating results, which 
could cause our stock price to decline.

Variations in the length of our sales cycles could cause our revenue and cash flows, and consequently, our business, 
financial condition, operating results and cash flows to fluctuate widely from period to period. This variation could cause our 
stock price to decline. Our customers generally take a long time to evaluate our inspection and/or film metrology systems and 
many people are involved in the evaluation process. We expend significant resources educating and providing information to 

11

our prospective customers regarding the uses and benefits of our systems in the semiconductor fabrication process. The length 
of time it takes for us to make a sale depends upon many factors, including, but not limited to:

• 

• 

• 

• 

• 

the efforts of our sales force;

the complexity of the customer’s fabrication processes;

the internal technical capabilities and sophistication of the customer;

the customer’s budgetary constraints; and

the quality and sophistication of the customer’s current metrology, inspection or lithography equipment.

Because of the number of factors influencing the sales process, the period between our initial contact with a customer 
and the time when we recognize revenue from that customer and receive payment, if ever, varies widely in length. Our sales 
cycles, including the time it takes for us to build a product to customer specifications after receiving an order to the time we 
recognize  revenue,  typically  range  from  three  to  twenty-four months.  Sometimes  our  sales  cycles  can  be  much  longer, 
particularly with customers in Asia. During these cycles, we commit substantial resources to our sales efforts in advance of
receiving any revenue, and we may never receive any revenue from a customer despite our sales efforts. If we do make a sale, 
our customers often purchase only one of our systems, the performance of which they then evaluate for a lengthy period before 
purchasing any more of our systems. The number of additional products a customer purchases, if any, depends on many factors, 
including the customer’s capacity requirements. The period between a customer’s initial purchase and any subsequent purchases 
can vary from three months to a year or longer, and variations in the length of this period could cause further fluctuations in 
our operating results and, possibly, in our stock price.

We are subject to order and shipment uncertainties. Our profitability will decline if we fail to accurately forecast 
customer demand when managing inventory.

We typically plan production and inventory levels based on internal forecasts of customer demand, which can be highly 
unpredictable and can fluctuate substantially, which could lead to excess inventory write-downs and resulting negative impacts 
on gross margin and net income. We have limited visibility into our customers' inventories, future customer demand and the 
product mix that our customers will require, which could adversely affect our production forecasts and operating margins. In 
addition,  innovation  in  our  industry  could  render  significant  portions  of  our  inventory  obsolete.  If  we  overestimate  our 
customers'  requirements,  we  may  have  excess  inventory,  which  could  lead  to  obsolete  inventory  and  unexpected  costs. 
Conversely, if we underestimate our customers' requirements, we may have inadequate inventory, which could lead to foregone 
revenue opportunities, loss of potential market share and damage to customer relationships as product deliveries may not be 
made on a timely basis, disrupting our customers' production schedules. In response to anticipated long lead times to obtain 
inventory and materials from outside suppliers and foundries, we periodically order materials in advance of customer demand. 
This advance ordering has in the past and may in the future result in excess inventory levels or unanticipated inventory write-
downs if expected orders fail to materialize, or other factors make our products less saleable. In addition, any significant future 
cancellation or deferral of product orders could adversely affect our revenue and margins, increase inventory write-downs due 
to obsolete inventory, and adversely affect our operating results and stock price.

Most of our revenue has been derived from customers outside of the United States, subjecting us to operational, financial 
and political risks, such as unexpected changes in regulatory requirements, tariffs, political and economic instability, 
outbreaks of hostilities, natural disasters, climate change and difficulties in managing foreign sales representatives and 
foreign branch operations, as well as risks associated with foreign currency fluctuations.

Due to the significant level of our international sales, we are subject to a number of material risks, including:

Compliance  with  foreign  laws. Our  business  is  subject  to  risks  inherent  in  doing  business  internationally,  including 
compliance  with,  inconsistencies  among,  and  unexpected  changes  in,  a  wide  variety  of  foreign  laws  and  regulatory 
environments  with  which  we  are  not  familiar,  including,  among  other  issues,  with  respect  to  employees,  protection of  our 
intellectual property, and a wide variety of operational regulations and trade and export controls under domestic, foreign, and 
international law.

Unexpected changes in regulatory requirements including tariffs and other market barriers. The semiconductor device 
industry is a high-visibility industry in many of the European and Asian countries in which we sell our products. Because the 
governments  of  these  countries  have  provided extensive  financial  support  to  our  semiconductor  device  manufacturing 
customers in these countries, we believe that our customers could be disproportionately affected by any trade embargoes, excise 
taxes,  tariffs  or  other  restrictions  imposed  by  their  governments  on  trade  with  United  States  companies  such  as  ourselves, 
particularly with respect to the ongoing trade negotiations between the United States and China. As of January 2020, trade 

12

delegations from the United States and China reached partial agreement over tariffs on certain products, but if the United States 
and China do not continue negotiations and reach agreement on a trade policy, tariffs imposed by China may result in lower 
sales to customers in China as the costs of our products become more expensive to such customers. In addition, tariffs imposed 
by the United States will increase the cost of raw materials that we import from China.  Any restrictions of these types could 
result in a reduction in our sales to customers in these countries. In addition, given the relatively fluid regulatory environment 
in China, there could be additional tax or other regulatory changes in the future. Such actions in the future, as well as other 
changes in Chinese laws and regulations, including actions in furtherance of China’s stated policy of reducing its dependence 
on foreign semiconductor manufacturers, could increase the cost of doing business in China, foster the emergence of Chinese-
based competitors, decrease the demand for our customers’ products in China, or reduce the supply of critical materials for our 
customers’ products, which could have a material adverse effect on our business and results of operations.

Political and economic instability. We are subject to various global risks related to political and economic instabilities in 
countries in which we derive sales. If terrorist activities, armed conflict, civil or military unrest or political instability occurs 
outside of the U.S., these events may result in reduced demand for our products. There is considerable political instability in 
Taiwan related to its disputes with China and in South Korea related to its disputes with North Korea. In addition, several Asian 
countries, particularly Japan, have experienced significant economic instability. An outbreak of hostilities or other political 
upheaval  in  China, Taiwan  or  South  Korea,  or  an  economic  downturn  in  Japan  or  other  countries,  would  likely  harm  the 
operations of our customers in these countries. The effect of these types of events on our revenue and cash flows could be 
material  because  we  derive  substantial  revenue  from  sales  to  semiconductor  device  foundries  in  Taiwan  such  as  Taiwan 
Semiconductor Manufacturing Company Ltd., from memory chip manufacturers in South Korea such as Samsung Electronics 
Co., Ltd., and from semiconductor device manufacturers in Japan such as Toshiba Corporation.

Natural disasters and climate change. Natural disasters, changes in climate and geo-political events could materially 
adversely affect our worldwide operations (or those of our business partners). The occurrence of one or more natural disasters 
such as hurricanes, tropical storms, fires, cyclones, earthquakes, tsunamis, flooding, typhoons, volcanic eruptions and weather 
conditions such as major or extended winter storms, droughts and tornadoes, whether as a result of climate change or otherwise, 
may disrupt manufacturing or other operations. For example, our Milpitas operations are located near major earthquake fault 
lines in California. There may also be conflict or uncertainty in the countries in which we operate, including public health issues 
(for example, an outbreak of a contagious disease such as 2019-Novel Coronavirus (2019-nCoV) as described below, avian
influenza,  measles  or  Ebola),  safety  issues,  natural disasters,  fire,  disruptions  of  service from  utilities,  nuclear  power plant 
accidents or general economic or political unrest, including war, civil unrest or terrorist attacks. 

Our  financial  and  operating  performance  may  be  adversely  affected  by  epidemics.  Our  business  and  financial  and 
operating performance could be materially and adversely affected by the outbreak of epidemics including but not limited to 
2019-Novel Coronavirus (2019-nCoV). As a result of the ongoing Novel Coronavirus, the operations of our customers in China 
and Taiwan are expected to experience a slowdown or temporary suspension in production. Our business could be materially 
and adversely affected in the event that the slowdown or suspension continues for a long period of time. During such epidemic 
outbreak, China and Taiwan may adopt certain hygiene measures, including quarantining visitors from places where any of the 
contagious diseases were rampant. Those restrictive measures may adversely affect and slow down economic development 
during that period. Any prolonged restrictive measures in order to control the contagious disease or other adverse public health 
developments  in  China  and Taiwan  may  have  a  material  adverse  effect  on  our business,  financial  condition  and  results  of 
operations.

Difficulties in staffing and managing foreign branch operations. During periods of tension between the governments of 
the United States and certain other countries, it is often difficult for United States companies such as us to staff and manage 
operations in such countries. Language and other cultural differences may also inhibit our sales and marketing efforts and create 
internal communication problems among our U.S. and foreign research and development teams, increasing the difficulty of 
managing multiple remote locations performing various development, quality assurance, and yield ramp analysis projects.

Currency fluctuations as compared to the U.S. Dollar. A substantial portion of our international sales are denominated in 
U.S. dollars. As a result, if the dollar rises in value in relation to foreign currencies, our systems will become more expensive 
to customers outside the United States and less competitive with systems produced by competitors outside the United States. 
These conditions could negatively impact our international sales. Foreign sales also expose us to collection risk in the event it 
becomes more expensive for our foreign customers to convert their local currencies into U.S. dollars. Additionally, in the event 
a larger portion of our revenue becomes denominated in foreign currencies, we would be subject to a potentially significant 
exchange rate risk.

FCPA and Other Anti-Corruption Laws. We are subject to the Foreign Corrupt Practices Act of 1977 ("FCPA"), and other 
laws that prohibit improper payments or offers of payments to foreign governments and their officials and political parties by 
U.S. persons and issuers as defined by the statute, for the purpose of obtaining or retaining business. Also, similar worldwide 

13

anti-bribery  laws,  such  as  the  U.K.  Bribery Act  and  Chinese  anti-corruption  laws,  generally  prohibit  companies  and  their 
intermediaries from making improper payments to non-U.S. officials for the purpose of obtaining or retaining business. Some 
of our distribution partners are located in parts of the world that have experienced governmental corruption to some degree 
and,  in  certain  circumstances,  strict  compliance  with  anti-bribery  laws  may  conflict  with  local  customs  and  practices. The 
policies and procedures we have implemented to discourage these practices by our employees, our existing safeguards and any 
future improvements may prove to be less than effective, and our employees, consultants, sales agents or distributors may 
engage in conduct for which we might be held responsible. Violations of the FCPA or international anti-corruption laws may 
result in severe criminal or civil sanctions, and we may be subject to other liabilities, which could negatively affect our business, 
operating results and financial condition. In addition, the U.S. government may seek to hold us liable for successor liability 
FCPA violations committed by companies in which we invest or that we acquire. We cannot assure you that our internal control 
policies and procedures will protect us from reckless or negligent acts committed by our employees, distributors, partners, 
consultants or agents.

If we deliver systems with defects, our credibility will be harmed and the sales and market acceptance of our systems 
will decrease.

Our systems are complex and have occasionally contained errors, defects and bugs when introduced. Defects may be 
created during probing, bumping, dicing or general handling, and can have a major impact on device and process quality. When 
this occurs, our credibility and the market acceptance and sales of our systems could be harmed. Further, if our systems contain 
errors, defects or bugs, computer viruses or malicious code as a result of cyber-attacks to our computer networks, we may be 
required to expend significant capital and resources to alleviate these problems. Defects could also lead to product liability as 
a result of product liability lawsuits against us or against our customers. We have agreed to indemnify our customers under
certain  circumstances  against  liability  arising  from defects  in  our  systems.  Our  product  liability  insurance  policy  currently 
provides $2.0 million of aggregate coverage, with an overall umbrella limit of $14.0 million. In the event of a successful product 
liability claim, we could be obligated to pay damages significantly in excess of our product liability insurance limits.

If we are not successful in developing new and enhanced products for the semiconductor device manufacturing industry, 
we will lose sales and market share to our competitors.

We  operate  in  an  industry  that  is  highly  competitive  and  subject  to  evolving  industry  standards,  rapid  technological 
changes,  rapid  changes  in  consumer  demands  and  the  rapid  introduction  of  new,  higher  performance  systems  with  shorter 
product life cycles. To be competitive in our demanding market, we must continually design, develop and introduce in a timely 
manner new lithography, inspection and metrology process control systems that meet the performance and price demands of 
semiconductor device manufacturers. We must also continue to refine our current systems so that they remain competitive. We 
expect to continue to make significant investments in our research and development activities. We may experience difficulties 
or delays in our development efforts with respect to new systems, and we may not ultimately be successful in our product 
enhancement efforts to improve and advance products or in responding effectively to technological change, as not all research 
and development activities result in viable commercial products. In addition, we cannot provide assurance that we will be able 
to  develop  new  products  for  the  most  opportunistic  new  markets  and  applications. Any  significant  delay  in  releasing  new 
systems  could cause  our  products  to  become  obsolete,  adversely  affect  our  reputation,  give  a  competitor  a  first-to-market 
advantage or cause a competitor to achieve greater market share.

Some of our competitors have greater financial, engineering, manufacturing, research and development, marketing and 
customer support resources than we do. As a result, our competitors may be able to respond more quickly to new or emerging 
technologies or market developments by devoting greater resources to the development, promotion and sale of products, which 
could  impair  sales  of  our  products.  Moreover,  there  has  been  merger  and  acquisition  activity  among  our  competitors  and 
potential competitors. These transactions by our competitors and potential competitors may provide them with a competitive 
advantage over us by enabling them to rapidly expand their product offerings and service capabilities to meet a broader range 
of customer needs. Many of our customers and potential customers in the semiconductor industry are large companies that
require global support and service for their metrology systems. Some of our larger or more geographically diverse competitors 
might be better equipped to provide this global support and service.

In addition, our competitors may provide innovative technology that may have performance advantages over systems we 
currently offer or may offer in the future. They may be able to develop products comparable or superior to those that we offer
or  may  adapt  more  quickly  to  new  technologies  or  evolving  customer  requirements.  In  particular,  while  we  currently  are 
developing additional product enhancements that we believe will address future customer requirements, we may fail in a timely 
manner to complete the development or introduction of these additional product enhancements successfully, or these product 
enhancements may not achieve market acceptance or be competitive.

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Further, customers that may otherwise desire to purchase our products from us and purchase other products from our 
competitors may nevertheless purchase competing products from our competitors rather than purchase our products due to a 
variety of reasons, including to gain favor or volume pricing from our competitors.

If new products developed by us do not gain general market acceptance, we will be unable to generate revenue and 
recover our research and development costs.

Inspection,  lithography  and  metrology  product  development  is  inherently  risky  because  it  is  difficult  to  foresee 
developments in semiconductor device manufacturing technology, coordinate technical personnel, and identify and eliminate 
system design flaws. Further, our products are complex and often the applications to our customers’ businesses are unique. Any 
new systems we introduce may not achieve or sustain a significant degree of market acceptance and sales.

We expect to spend a significant amount of time and resources developing new systems and refining our existing systems. 
In light of the long product development cycles inherent in our industry, these expenditures will be made well in advance of 
the prospect of deriving revenue from the sale of those systems. Our ability to commercially introduce and successfully market 
new systems are subject to a wide variety of challenges during the development cycle, including start-up bugs, design defects, 
and other matters that could delay introduction of these systems. In addition, since our customers are not obligated by long-
term contracts to purchase our systems, our anticipated product orders may not materialize, or orders that are placed may be 
canceled. As a result, if we do not achieve market acceptance of new products, we may be unable to generate sufficient revenue 
and cash flow to recover our research and development costs and our market share, revenue, operating results or stock price
would be negatively impacted.

Even if we are able to develop new products that gain market acceptance, sales of these new products could impair our 
ability to sell existing products.

Competition from our new systems could have a negative effect on sales of our existing systems and the prices that we 
could  charge  for  these  systems.  We  may  also  divert  sales  and  marketing  resources  from  our  current  systems  in  order  to 
successfully launch and promote our new or next generation systems. This diversion of resources could have a further negative 
effect on sales of our current systems and the value of inventory.

Our integrated metrology systems are integrated with systems sold independently by Wafer Fabrication Equipment 
Suppliers, and a decrease in sales by these suppliers, or the development of competing systems by these suppliers, 
could harm our business.

We believe that sales of integrated metrology systems will continue to be an important source of our net revenues. Sales 
of our integrated metrology systems depend upon the ability of a small number of Wafer Fabrication Equipment Suppliers to 
sell semiconductor manufacturing equipment products that are compatible with our metrology systems as components. If these 
suppliers, such as Applied Materials, Inc., Ebara Corporation, Lam Research Corporation and Tokyo Electron, are unable to 
sell such products, if they choose to focus their attention on products that do not integrate our systems, or if they choose to 
develop competing systems, our business could suffer. 

If  our  relationships  with  our  large  customers  deteriorate,  our  product  development  activities  could  be  adversely 
affected.

The  success  of  our  product  development  efforts  depends  on  our  ability  to  anticipate  market  trends  and  the  price, 
performance and functionality requirements of semiconductor device manufacturers. In order to anticipate these trends and 
ensure that critical development projects proceed in a coordinated manner, we must continue to collaborate closely with our 
largest customers. Our relationships with these and other customers provide us with access to valuable information regarding 
trends in the semiconductor device industry, which enables us to better plan our product development activities. If our current 
relationships with our large customers are impaired, or if we are unable to develop similar collaborative relationships with 
important customers in the future, our product development activities could be adversely affected.

We may fail to adequately protect our intellectual property and, therefore, lose our competitive advantage.

Our future success and competitive position depend in part upon our ability to obtain and maintain proprietary technology 
for our principal product families, and we rely, in part, on patent and trade secret law and confidentiality agreements to protect 
that technology. If we fail to adequately protect our intellectual property, it will give our competitors a significant advantage. 
We  own  or  have  licensed  a number  of  patents relating  to our  transparent  and opaque  thin  film  metrology,  lithography  and 

15

macro-defect inspection systems, and have filed applications for additional patents.  Any of our pending patent applications 
may be rejected, and we may be unable to develop additional proprietary technology that is patentable in the future.

In addition, the patents that we do own or that have been issued or licensed to us may not provide us with competitive 
advantages and may be challenged by third parties. Further, third parties may also design around these patents. In addition to 
patent protection, we rely upon trade secret protection for our confidential and proprietary information and technology. We 
routinely enter into confidentiality agreements with our employees and other third parties. Even though these agreements are 
in place, there can be no assurances that trade secrets and proprietary information will not be disclosed, that others will not 
independently develop substantially equivalent proprietary information and techniques or otherwise gain access to our trade 
secrets, or that we can fully protect our trade secrets and proprietary information. Violations by others of our confidentiality 
agreements and the loss of employees who have specialized knowledge and expertise could harm our competitive position and 
cause our sales and operating results to decline as a result of increased competition. Costly and time-consuming litigation might 
be  necessary  to  enforce  and  determine  the  scope  of  our  proprietary  rights,  and  failure  to  obtain  or  maintain  trade  secret 
protection might adversely affect our ability to continue our research or bring products to market.

Protection of our intellectual property rights, or the efforts of third parties to enforce their own intellectual property 
rights against us, may result in costly and time-consuming litigation, substantial damages, lost product sales and/or the 
loss of important intellectual property rights.

We may be required to initiate litigation in order to enforce any patents issued to or licensed by us or to determine the 
scope or validity of a third party’s patent or other proprietary rights. Any litigation, regardless of outcome, could be expensive 
and time consuming and could subject us to significant liabilities or require us to re-engineer our products or obtain expensive 
licenses  from  third  parties. There  can  be no  assurance  that  any  patents  issued  to  or  licensed  by  us  will  not  be  challenged, 
invalidated or circumvented, or that the rights granted thereunder will provide us with a competitive advantage.

In addition, our commercial success depends in part on our ability to avoid infringing or misappropriating patents or 
other proprietary rights owned by third parties. From time to time, we receive communications from third parties asserting that 
our products or systems infringe, or may infringe, on the proprietary rights of these third parties. These claims of infringement 
may lead to protracted and costly litigation, which could require us to pay substantial damages or have the sale of our products 
or systems stopped by an injunction. Infringement claims could also cause product or system delays or require us to redesign 
our products or systems, and these delays could result in the loss of substantial revenue. We may also be required to obtain a
license from the third party or cease activities utilizing the third party’s proprietary rights. We may not be able to enter into 
such a license or such a license may not be available on commercially reasonable terms. Accordingly, the loss of important 
intellectual property rights could hinder our ability to sell our systems or to make the sale of these systems more expensive.

Our  efforts  to  protect  our  intellectual  property  may  be  less  effective  in  certain  foreign  countries  where  intellectual 
property rights are not as well protected as in the United States.

The laws of some foreign countries, including China, Japan, South Korea and Taiwan, where we do business, do not 
protect  our  proprietary  rights  to  as  great  an  extent  as  do  the  laws  of  the  United  States,  and  many  U.S. companies  have 
encountered substantial problems in protecting their proprietary rights against infringement abroad. For example, Taiwan is not 
a signatory of the Patent Cooperation Treaty, which is designed to specify rules and methods for defending intellectual property 
internationally. The publication of a patent in Taiwan prior to the filing of a patent in Taiwan would invalidate the ability of a 
company  to  obtain  a  patent  in  Taiwan.  Similarly,  in  contrast  to  the  United  States  where  the  contents  of  patents  remain 
confidential during the patent application process, in Taiwan, the contents of a patent are published upon filing, which provides 
competitors an advance view of the contents of a patent application prior to the establishment of patent rights. Similarly, China’s 
protection of intellectual property rights historically has been less stringent and robust compared to other countries such as the 
United States, and consequently intellectual property rights and confidentiality protections in China may not be as effective as
in the United States or other countries.  Monitoring and preventing unauthorized use are also difficult and the measures we take 
to protect our intellectual property rights may not be adequate.  Accordingly, infringement of our intellectual property rights 
poses a serious risk of doing business in China. Consequently, there is a risk that we may be unable to adequately protect our 
proprietary rights in certain foreign countries. If this occurs, it would be easier for our competitors to develop and sell competing 
products in these countries.

16

Some  of  our  current  and  potential  competitors  have  significantly  greater  resources  than  we  do,  and  increased 
competition could impair sales of our products or cause us to reduce our prices.

The market for semiconductor capital equipment is highly competitive. We face substantial competition from established 
companies in each of the markets we serve. We principally compete with KLA Corporation, Nova Measuring Instruments, 
Camtek and Veeco Instruments. We compete to a lesser extent with Nikon. Each of our products also competes with products 
that use different metrology, inspection or lithography techniques. Some of our competitors have greater financial, engineering, 
manufacturing and marketing resources, broader product offerings and service capabilities and larger installed customer bases 
than we do. As a result, these competitors may be able to respond more quickly to new or emerging technologies or market 
developments by devoting greater resources to the development, promotion and sale of products, which, in turn, could impair 
sales of our products. Further, there may be significant merger and acquisition activity among our competitors and potential 
competitors, which, in turn, may provide them with a competitive advantage over us by enabling them to rapidly expand their 
product offerings and service capabilities to meet a broader range of customer needs.

Many of our customers and potential customers in the semiconductor device manufacturing industry are large companies 
that require global support and service for their semiconductor capital equipment. We believe that our global support and service 
infrastructure is sufficient to meet the needs of our customers and potential customers. However, some of our competitors have 
more extensive infrastructures than we do, which could place us at a disadvantage when competing for the business of global 
semiconductor device manufacturers. Many of our competitors are investing heavily in the development of new systems that 
will compete directly with our systems. We have, from time to time, selectively reduced prices on our systems in order to 
protect our market share, and competitive pressures may necessitate further price reductions. We expect our competitors in 
each product area to continue to improve the design and performance of their products and to introduce new products with 
competitive prices and performance characteristics. These product introductions would likely require us to decrease the prices
of our systems and increase the level of discounts that we grant our customers. Price reductions or lost sales as a result of these 
competitive pressures would reduce our total revenue and could adversely impact our financial results.

Because of the high cost of switching equipment vendors in our markets, it is  sometimes difficult for us to win new 
customers from our competitors even if our systems are superior to theirs.

We believe that once a semiconductor device manufacturer has selected one vendor’s capital equipment for a production-
line  application,  the  manufacturer  generally  relies  upon  that  capital  equipment  and,  to  the  extent  possible,  subsequent 
generations of the same vendor’s equipment for the life of the application. Once a vendor’s equipment has been installed in a 
production line application, a semiconductor device manufacturer must often make substantial technical modifications and may 
experience production-line downtime in order to switch to another vendor’s equipment. Accordingly, unless our systems offer 
performance or cost advantages that outweigh a customer’s expense of switching to our systems, it will be difficult for us to 
achieve significant sales to that manufacturer once it has selected another vendor’s capital equipment for an application.

We must attract and retain experienced senior executives and other key personnel with knowledge of semiconductor 
device manufacturing and inspection, metrology or lithography equipment and related software to help support our 
future growth, and competition for such personnel in our industry is high.

Our  success  depends,  to  a  significant  degree,  upon  the  continued  contributions  of  our  key  executive  management, 
engineering,  sales  and  marketing,  customer  support,  finance  and  manufacturing  personnel.  The  loss  of  any  of  these  key 
personnel through resignations, retirement or other circumstances, each of whom would be extremely difficult to replace, could 
harm our business and operating results. Although we have employment and noncompetition agreements with key members of 
our senior management team, these individuals or other key employees may still leave us, which could have a material adverse 
effect on our business. We do not have key person life insurance on any of our executives. In addition, to support our future
growth, we will need to attract and retain additional qualified employees. Competition for such personnel in our industry is 
intense, and we may not be successful in attracting and retaining qualified employees.

In order to attract and retain executives and other key employees, the Company must provide a competitive compensation 
package, including cash and stock-based compensation. If the anticipated value of the Company’s stock-based incentive awards 
does not materialize so that they cease to be viewed as valuable, if the Company’s profits decrease, or if the Company’s total
compensation package is not viewed as competitive, the Company’s ability to attract, retain and motivate executives and key 
employees could be weakened.

17

We obtain some of the components and subassemblies included in our systems from a limited group of suppliers, and 
the partial or complete loss of one of these suppliers could cause production delays and a substantial loss of revenue.

We obtain some of the components and subassemblies included in our systems from a limited group of suppliers and do 
not have long-term contracts with many of our suppliers. Our dependence on limited source suppliers of components and our 
lack of long-term contracts with many of our suppliers expose us to several risks, including a potential inability to obtain an 
adequate supply of components, price increases, late deliveries and poor component quality. Disruption or termination of the 
supply of these components could delay shipments of our systems, damage our customer relationships and reduce our sales. 
From time to time in the past, we have experienced temporary difficulties in receiving shipments from our suppliers. The lead-
time required for shipments of some of our components can be as long as six months. In addition, the lead time required to 
qualify new suppliers for lasers and certain optics could be as long as a year, and the lead time required to qualify new suppliers 
of other components could be as long as nine months. If we are unable to accurately predict our component needs, or if our 
component supply is disrupted, we may miss market opportunities by not being able to meet the demand for our systems. 
Further, a significant increase in the price of one or more of these components or subassemblies could seriously harm our results 
of operations and cash flows.

Any prolonged disruption in the operations of our manufacturing facilities could have a material adverse effect on our 
revenue.

We produce the majority of our systems in our manufacturing facilities located in Milpitas, California and Bloomington, 
Minnesota. We  use  contract  manufacturers  in  China,  Israel,  Japan  and  the  United  States.  Our  manufacturing processes  are 
highly complex and require sophisticated and costly equipment and a specially designed facility. As a result, any prolonged 
disruption  in  the  operations  of  our  manufacturing  facilities,  such  as  those  resulting  from  acts  of  war,  terrorism,  political 
instability, health epidemics, fire, earthquake, flooding or other natural disaster could seriously harm our ability to satisfy our 
customer  order  deadlines.  If  we  cannot  timely  deliver  our  systems,  our  results  from  operations  and  cash  flows  could  be 
materially and adversely affected.

We may outsource select manufacturing activities to third-party service providers, which decreases our control over the 
performance of these functions and may result in lower quality and functionality of our products.

We  may  outsource  product manufacturing  to  third-party  service  providers.  Outsourcing reduces  our  control over  the 
performance  of  the  outsourced  functions.  Dependence  on  outsourcing  may  also  adversely  affect  our  ability  to  bring  new 
products to market. If we do not effectively manage our outsourcing strategy or if third party service providers do not perform 
as anticipated, we may experience operational difficulties, increased costs, manufacturing interruptions or inefficiencies in the 
operation of our supply chain, any or all of which could delay our delivery of products to our customers, and materially and 
adversely affect our business, financial condition, and results of operations.

If our network security measures are breached and unauthorized access is obtained to a customer's data, to our data, 
or to our information technology systems, we may incur significant legal and financial exposure and liabilities.

As part of our business, we store our data and certain data about our customers, vendors and employees in our information 
technology system.  While we have security measures in place that are designed to protect this information and prevent data 
loss and other security breaches, if these measures are breached as a result of third-party action, employee error, malfeasance, 
break-ins or otherwise, and someone obtains unauthorized access to our customers’, vendors’ or employees’ data, we could 
face loss of business, regulatory investigations or court orders, our reputation could be severely damaged, we could be required 
to  expend  significant  capital and  other  resources  to  alleviate  the  problem,  as  well  as  incur  significant costs  and  liabilities, 
including due to litigation, indemnity obligations, damages for contract breach, penalties for violation of applicable laws or 
regulations, and costs for remediation and other incentives offered to customers.

Cyber-attacks and other malicious internet-based activities continue to increase. Because the techniques used to obtain 
unauthorized access or sabotage systems change frequently and generally are not identified until they are launched against a 
target, we may be unable to anticipate these techniques or to implement adequate preventative measures. In addition, third 
parties  may  attempt  to  fraudulently  induce  employees  or users  to  disclose  information  to  gain  access  to  our  data  or  our 
customers’ data. If any of these events occur, our or our customers’ and vendors’ information could be accessed or disclosed 
improperly. Any or all of these issues could negatively affect our ability to attract new customers, cause existing customers to 
choose to purchase from our competitors, result in reputational damage or subject us to third-party lawsuits, regulatory fines or 
other action or liability, which could adversely affect our operating results.

18

The General Data Protection Regulation (GDPR) is a regulation in European Union (EU) law on data protection and 
privacy for all individuals within the EU and the European Economic Area (EEA). It also addresses the export of personal data 
outside the EU and EEA areas. We need to put in appropriate technical and organizational measures to implement these data 
protection principles. The GDPR requirements have been reviewed and are in the process of being implemented. We may also 
be subject to other data privacy laws in the United States and the other countries in which we operate.

Failure to adjust our orders for parts and subcomponents in an accurate and timely manner in response to changing 
market conditions or customer acceptance of our products could adversely affect our financial position and results of 
operations.

Our earnings could be negatively affected and our inventory levels could materially increase if we are unable to predict 
our inventory needs in an accurate and timely manner and adjust our orders for parts and subcomponents in the event that our 
needs  increase  or  decrease materially  due  to  unexpected  increases  or  decreases  in  demand  for  our  products. Any  material 
increase in our inventories could result in an adverse effect on our financial position, while any material decrease in our ability 
to procure needed inventories could result in an inability to supply customer demand for our products, thus adversely affecting 
our revenue.

Our ability to fulfill our backlog may have an effect on our long-term ability to procure contracts and fulfill current 
contracts.

Our ability to fulfill our backlog may be limited by our ability to devote sufficient financial and human capital resources 
and may be limited by available material supplies. If we do not fulfill our backlog in a timely manner, we may experience 
delays in product delivery, which would postpone receipt of revenue from those delayed deliveries. Additionally, if we are 
consistently unable to fulfill our backlog, this may be a disincentive to customers to award large contracts to us in the future 
until they are comfortable that we can effectively manage our backlog.

If we do not manage our supply chain effectively, our operating results may be adversely affected.

We need to continually evaluate our global supply chains and assess opportunities to reduce costs. We must also enhance 
quality, speed and flexibility to meet changing demand for our products and product mix and uncertain market conditions. Our 
success also depends in part on refining our cost structure and supply chains so that we have flexibility and can maintain and
improve profitability. Although the current tariff environment has not had a material adverse effect on our costs to date, further 
deterioration in the tariff environment, or changes in suppliers, may cause our costs to increase, which if we are not able to 
offset by charging higher sales prices, will cause a decline in our margins. To improve our margins on a product, we will need 
to establish high volume supply agreements with our vendors. We cannot be certain that we will be able to timely negotiate 
vendor supply agreements on improved terms and conditions, or at all. Failure to achieve the desired level of cost reductions 
could adversely affect our financial results. Despite our efforts to control costs and increase efficiency in our facilities, changes
in demand could still cause us to realize lower operating margins and profitability.

We may choose to acquire new and complementary businesses, products or technologies instead of developing them 
ourselves, and we may be unable to complete these acquisitions or may not be able to successfully integrate an acquired 
business in a cost-effective and non-disruptive manner.

Our success depends on our ability to continually enhance and broaden our product offerings in response to changing 
technologies, customer demands and competitive pressures. To this end, we have, from time to time, engaged in the process of 
identifying,  analyzing  and  negotiating  possible  acquisition  transactions,  and,  from  time  to  time,  acquiring  one  or  more 
businesses, and we expect to continue to do so in the future. We may choose to acquire new and complementary businesses, 
products, technologies and/or services instead of developing them ourselves. We may, however, face competition for acquisition
targets from larger and more established companies with greater financial resources, making it more difficult for us to complete 
acquisitions. We cannot provide any assurance that we will be successful in consummating future acquisitions on favorable 
terms or that we will realize the benefits that we anticipate from one or more acquisitions that we consummate. Integrating any 
business, product, technology or service into our current operations could be expensive and time-consuming and/or disrupt our 
ongoing business. Further, there are numerous risks associated with acquisitions and potential acquisitions, including, but not 
limited to:

• 

• 

• 

diversion of management’s attention from day-to-day operational matters and current products and customers;

lack of synergy or the inability to successfully integrate the new business or to realize expected synergies;

failure to commercialize the new technology or business;

19

• 

• 

• 

• 

failure to meet the expected performance of the new technology or business;

failure to retain key employees and customer or supplier relationships;

lower-than-expected market opportunities or market acceptance of any new products; and

unexpected reduction of sales of existing products as a result of the introduction of new products.

Our inability to consummate one or more acquisitions on favorable terms, or our failure to realize the intended benefits 
from one or more acquisitions, could have a material adverse effect on our business, liquidity, financial position and/or results
of  operations,  including  as  a  result  of  our  incurrence  of indebtedness  and  related  interest  expense  and  our  assumption  of 
unforeseen contingent liabilities. We might need to raise additional funds through public or private equity or debt financings to 
finance any acquisition. In that event, we could be forced to obtain financing on terms that are not favorable to us and, in the 
case of equity financing, that result in dilution to our stockholders. In addition, any impairment of goodwill or other intangible
assets, amortization of intangible assets,  write-down of other assets or charges resulting  from the costs of acquisitions and 
purchase accounting could harm our business and operating results.

If we cannot effectively manage growth, our business may suffer.

Over the long-term, we intend to grow our business by increasing our sales efforts and completing strategic acquisitions. 

To effectively manage growth, we must, among other things:

• 

• 

• 

• 

• 

engage, train and manage a larger sales force and additional service personnel;

expand the geographic coverage of our sales force;

expand our information systems;

identify and successfully integrate acquired businesses into our operations; and

administer appropriate financial and administrative control procedures.

Growth of our business will likely place a significant strain on our management, financial, operational, technical, sales 
and administrative resources. Any failure to effectively manage our growth may cause our business to suffer and our stock price 
to decline.

Risks Related to Tax Laws, Financial Markets and the Environment

Changes in tax rates or tax liabilities could affect results.

As a global company, we are subject to taxation in the United States and various other countries. Significant judgment is 
required to determine and estimate worldwide tax liabilities. Our future annual and quarterly tax rates could be affected by 
numerous factors, including changes in the (1) applicable tax laws; (2) composition of earnings in countries with differing tax 
rates; or (3) recoverability of our deferred tax assets and liabilities.  In addition, we are subject to regular examination of our 
income tax returns by the Internal Revenue Service and other tax authorities. We regularly assess the likelihood of favorable or 
unfavorable outcomes resulting from these examinations to determine the adequacy of our provision for income taxes. Although 
we  believe  our  tax  estimates  are  reasonable,  there  can  be  no  assurance  that  any  final  determination  will  not  be  materially 
different from the treatment reflected in our historical income tax provisions and accruals, which could materially and adversely 
affect our results of operations.

The Organization for Economic Co-operation and Development (“OECD”), released guidance covering various topics, 
including country-by-country reporting, definitional changes to permanent establishment and Base Erosion and Profit Shifting 
(“BEPS”), an initiative that aims to standardize and modernize global tax policy. Depending on the final form of guidance 
adopted by OECD members and legislation ultimately enacted, if any, there may be significant consequences for us due to our 
international business activities, including, but not limited to, an increase in our tax uncertainty and adverse effects on our 
provision for income taxes.

Turmoil or fluctuations in the credit markets and the financial services industry may negatively impact our business, 
results of operations, financial condition or liquidity, and our factoring arrangements may expose us to additional risks.

In the past, global credit markets and the financial services industry have experienced a period of unprecedented turmoil 
and upheaval characterized by the tightening of the credit markets, the weakening of the global economy and an unprecedented 

20

level of intervention from the United States and other governments. Adverse economic conditions, such as sustained periods 
of economic uncertainty or a crisis in the financial markets may have a material adverse effect on our liquidity and financial
condition if our ability to obtain credit from the capital financial markets, or from trade creditors was impaired. In addition, a 
worsening economy or an economic crisis could also adversely impact our customers’ ability to finance the purchase of systems
from us or our suppliers’ ability to provide us with product, either of which may negatively impact our business and results of 
operations. In addition, we enter into factoring arrangements with certain financial institutions to sell a certain portion of our
trade receivables. If we were to stop entering into these factoring arrangements, our operating results, financial condition and 
cash flows could be adversely impacted by delays or failure to collect the trade receivables. However, by entering into these 
arrangements, we are exposed to additional risks.  If any of these financial institutions experiences financial difficulties or is 
otherwise unable to honor the terms of our factoring arrangements, we may experience material financial losses due to the 
failure of such arrangements, which could have an adverse impact upon our operating results, financial condition and cash 
flows.

We are subject to various environmental laws and regulations that could impose substantial costs upon us and may 
harm our business, operating results and financial condition.

Some of our operations use substances regulated under various federal, state, local, and international laws governing 
the environment, including those relating to the storage, use, discharge, disposal, labeling, and human exposure to hazardous 
and toxic materials. We could incur costs, fines and civil or criminal sanctions, third-party property damage or personal 
injury claims, or could be required to incur substantial investigation or remediation costs, if we were to violate or become 
liable under environmental laws. Liability under environmental laws can be joint and several and without regard to 
comparative fault. Compliance with current or future environmental laws and regulations could restrict our ability to expand 
our facilities or require us to acquire additional expensive equipment, modify our manufacturing processes, or incur other 
significant expenses. We may unintentionally violate environmental laws or regulations in the future as a result of human 
error, equipment failure or other causes.

Risks Related to Our Recently Completed Merger

Combining the businesses of Rudolph and Nanometrics may be more difficult, costly or time-consuming than expected 
and we may fail to realize the anticipated benefits of the Merger, which may adversely affect our business results and 
negatively affect the value of our common stock.

The  success  of  the  Merger  depends  on,  among  other  things,  our  ability  to  combine  the  businesses  of  Rudolph  and 

Nanometrics in a manner that realizes cost savings and facilitates growth opportunities. 

In addition, we must achieve the anticipated growth and cost savings without adversely affecting current revenues and 
investments in future growth. If we are not able to successfully achieve these objectives, the anticipated benefits of the Merger 
may not be realized fully, or at all, or may take longer to realize than expected.

An inability to realize the full extent of the anticipated benefits of the Merger, as well as any delays encountered in the 
integration  process,  could  have  an  adverse  effect  upon  our  revenues,  level  of  expenses  and  operating  results,  which  may 
adversely affect the value of our common stock.

In  addition,  the  integration  may  result  in  additional  and  unforeseen  expenses,  and  the  anticipated  benefits  of  the 
integration plan may not be realized. Actual growth and cost savings, if achieved, may be lower than what we expect and may 
take longer to achieve than anticipated. If we are not able to adequately address integration challenges, we may be unable to 
realize the anticipated benefits of the integration of Rudolph and Nanometrics.

The failure to successfully integrate the businesses and operations of Rudolph and Nanometrics in the expected time 
frame may adversely affect our future results.

Prior to completion of the Merger, Rudolph and Nanometrics operated independently. There can be no assurances that 
their businesses can be integrated successfully. It is possible that the integration process could result in the loss of key Rudolph 
employees or key Nanometrics employees, the loss of customers, the disruption of our ongoing businesses, inconsistencies in 
standards, controls, procedures and policies, unexpected integration issues, higher than expected integration costs or an overall 
post-completion  integration  process  that  takes  longer  than  originally  anticipated.  Specifically,  the  following  issues,  among 
others, must be addressed in integrating the operations of Rudolph and Nanometrics in order to realize the anticipated benefits 
of the Merger so we perform as expected:

21

• combining the companies’ operations and corporate functions;

• combining the businesses of Rudolph and Nanometrics and meeting our capital requirements, in a manner that permits 
us to achieve any cost savings or revenue synergies anticipated to result from the Merger, the failure of which would 
result in the anticipated benefits of the Merger not being realized in the time frame currently anticipated or at all;

• integrating personnel from the two companies;

• integrating and unifying the offerings and services available to customers;

• harmonizing  the  companies’  operating  practices,  employee  development  and  compensation  programs,  internal 
controls and other policies, procedures and processes;

• maintaining existing agreements with customers, distributors, providers and vendors and avoiding delays in entering 
into new agreements with prospective customers, distributors, providers and vendors;

• addressing possible differences in business backgrounds, corporate cultures and management philosophies;

• consolidating the companies’ administrative and information technology infrastructure;

• coordinating distribution and marketing efforts; and

• coordinating geographically dispersed organizations. 

In addition, at times the attention of certain members of management and resources may be focused on the integration of 
the businesses of the two companies and diverted from day-to-day business operations or other opportunities that may have 
been beneficial, which may disrupt our business.

We  may  not  be  able  to  retain  customers  or  suppliers,  or  customers  or  suppliers  may  seek  to  modify  contractual 
obligations with us, which could have an adverse effect on our business and operations. Third parties may terminate or 
alter existing contracts or relationships with Rudolph or Nanometrics.

As a result of the Merger, we may experience impacts on relationships with customers and suppliers that may harm our 
business and results of operations. Certain customers, licensors, business partners or suppliers may seek to terminate or modify 
contractual obligations whether or not contractual rights were triggered as a result of the Merger. There can be no guarantee 
that customers and suppliers of Rudolph or Nanometrics will remain with or continue to have a relationship with us or do so 
on the same or similar contractual terms to those they had with Rudolph or Nanometrics prior to the Merger. If any customers 
or suppliers seek to terminate or modify contractual obligations or discontinue the relationship with us, then our business and 
results  of  operations  may  be harmed.  Furthermore,  we  do  not  have  long-term  arrangements  with  many  of  our  significant 
suppliers. If our suppliers were to seek to terminate or modify an arrangement with us, then we may be unable to procure 
necessary  supplies  from  other  suppliers  in  a  timely  and  efficient manner  and  on  acceptable  terms,  or  at  all. Any  of  the 
aforementioned disruptions could limit our ability to achieve the anticipated benefits of the Merger.

We may be exposed to increased litigation due to the Merger, which could have an adverse effect on our business and 
operations.

We may be exposed to increased litigation from stockholders, customers, suppliers, consumers and other third parties 
due to the combination of Rudolph’s business and Nanometrics’ business. Such litigation may have an adverse impact on our 
business and results of operations or may cause disruptions to our operations.

We may be unable to retain former Rudolph and Nanometrics personnel successfully.

The success of the Merger will depend in part on our ability to retain the talents  and dedication of the professionals 
previously separately employed by Rudolph and Nanometrics. It is possible that these employees may decide not to remain 
with  us.  If  key  employees  terminate  their  employment,  or if  an  insufficient  number  of  employees  are retained  to  maintain 
effective  operations,  our  business  activities  may  be  adversely  affected  and  management’s  attention  may  be  diverted  from 
successfully  integrating  Rudolph  and  Nanometrics  to  hiring  suitable  replacements,  all of  which  may  cause  our business  to 
suffer. In addition, we may not be able to locate suitable replacements for any key employees that leave the Company or offer
employment to potential replacements on reasonable terms.

22

Risks Related to the Global Economy and Semiconductor Industry

Cyclicality in the semiconductor device industry has led to substantial decreases in demand for our systems and may, 
from time to time, continue to do so.

Our operating results are subject to significant variation due to global economic conditions and the cyclical nature of the 
semiconductor device industry. Our business depends upon the capital expenditures of semiconductor device manufacturers, 
which, in turn, depend upon the current and anticipated market demand for semiconductors and products using semiconductors. 
The timing, length and severity of the up-and-down cycles in the semiconductor equipment industry are difficult to predict. In 
recent years, the industry has experienced significant downturns, generally in connection with declines in economic conditions. 
This cyclical nature of the industry in which we operate affects our ability to accurately predict future revenue and, thus, future 
expense levels. When cyclical fluctuations result in lower than expected revenue levels, operating results may be adversely 
affected, and cost reduction measures may be necessary in order for us to remain competitive and financially sound. During a 
down cycle, we must be in a position to adjust our cost and expense structure to prevailing market conditions and to continue 
to  motivate  and  retain  our  key  employees.  In  addition,  during  periods  of  rapid  growth,  we  must  be  able  to  increase 
manufacturing capacity and personnel to meet customer demand. We can provide no assurance that these objectives can be met 
in a timely manner in response to industry cycles. If we fail to respond to industry cycles, our business could be seriously 
harmed.

In addition, demand for our products is highly inelastic which means we have little ability to control product revenues
created by customer demand for more capacity. The market for our products is characterized by constant and rapid technological 
change, price erosion, product obsolescence, evolving standards, short product life cycles and significant volatility in supply 
and demand. Due to the inelastic nature of demand in the semiconductor industry, we may need to take actions to reduce costs 
in  the  future,  which  could  reduce  our  ability  to  significantly  invest  in  research  and  development  at  levels  we  believe  are 
necessary. If we are unable to effectively align our cost structure with prevailing market conditions, our business, financial 
condition and results of operations may be materially and adversely affected.

We may also experience supplier or customer issues as a result of adverse macroeconomic conditions. If our customers 
have difficulties in obtaining capital or financing, this could result in lower sales. Customers with liquidity issues could also 
result in an increase in bad debt expense. These conditions could also affect our key suppliers, which could affect their ability 
to supply parts and result in delays of our customer shipments.

Our future rate of growth is highly dependent on the development and growth of the market for microelectronic device 
inspection, lithography and metrology equipment.

We target our products to address the needs of microelectronic device manufacturers for defect inspection, metrology 
and lithography.  If for any reason the market for microelectronic device inspection, lithography or metrology equipment fails 
to grow in the long term, we may be unable to maintain current revenue levels in the short term and maintain our historical 
growth in the long term. Growth in the inspection market is dependent to a large extent upon microelectronic manufacturers 
replacing manual inspection with automated inspection technology. Growth in the metrology market is dependent to a large 
extent upon new chip designs and capacity expansion of microelectronic manufacturers. Growth in the lithography market is
dependent on the development of cost-effective packaging with high fine pitch RDLs, ultimately migrating to multi-die, large, 
form-factor packages. There can be no assurance that manufacturers will undertake these actions at the rate we expect.

Risks Related to our Stock

Provisions of our charter documents and of Delaware law could discourage potential acquisition proposals and/or delay, 
deter or prevent a change in control of our company.

Provisions of our certificate of incorporation and by-laws may inhibit changes in control of our company not approved 
by our Board of Directors. These provisions also limit the circumstances in which a premium can be paid for our common stock
and in which a proxy contest for control of our board may be initiated. These provisions provide for:

• 

• 

• 

• 

a prohibition on stockholder actions through written consent;

a  requirement  that  special  meetings  of  stockholders  be  called  only  by  our  chief  executive  officer  or  Board  of 
Directors;

advance notice requirements for stockholder proposals and director nominations by stockholders;

limitations on the ability of stockholders to amend, alter or repeal our by-laws; and

23

• 

•

the authority of our board to issue, without stockholder approval, preferred stock with such terms as the board may
determine; and

The authority of our board, without stockholder approval, to adopt a stockholder rights plan.

We are also entitled to avail ourselves of the protections of Section 203 of the Delaware General Corporation Law, which 

could inhibit changes in control of the Company.

Our stock price is volatile.

The market price of our common stock has fluctuated widely. Consequently, the current market price of our common 
stock may not be indicative of future market prices, and we may be unable to sustain or increase the value of an investment in 
our common stock. Factors affecting our stock price may include:

• 

• 

• 

• 

• 

• 

• 

• 

variations in operating results from quarter to quarter;

changes in earnings estimates by analysts or our failure to meet analysts’ expectations;

changes in the market price per share of our public company customers;

market conditions in the semiconductor and other industries into which we sell products;

general economic conditions;

political changes, hostilities or natural disasters such as hurricanes and floods;

low trading volume of our common stock; and

the number of firms making a market in our common stock.

In addition, the stock market has experienced periods of significant price and volume fluctuations. These fluctuations 
have  particularly  affected  the market  prices  of  the  securities  of  high  technology  companies  like  ours. Any  such  market 
fluctuations in the future could adversely affect the market price of our common stock.

There  are  various  risks  related  to  the  legal  and  regulatory  environments  in  which  we  perform  our  operations  and 
conduct our business that may expose us to risk.

We are faced with various risks that may be associated with our compliance with existing, new, different, inconsistent or 
conflicting laws, regulations and rules enacted by governments and/or their regulatory agencies in the countries in which we 
operate as well as rules and policies implemented at our customer sites. These laws, regulations, rules and policies could relate 
to any of an array of issues including, but not limited to, environmental, tax, intellectual property, trade secrets, product liability, 
contracts, antitrust, employment, securities, import/export and unfair competition. In the event that we fail to comply with or 
violate U.S. or foreign laws or regulations or customer policies, we could be subject to civil or criminal claims or proceedings 
that may result in monetary fines, penalties or other costs against us or our employees, which may adversely affect our operating 
results, financial condition, customer relations and ability to conduct our business.

Item 1B. Unresolved Staff Comments.

None.

24

Item 2.

Properties.

Our principal executive office building is located at 16 Jonspin Road in Wilmington, Massachusetts.  We own our Milpitas 
and Richardson facilities and lease facilities for corporate, engineering, manufacturing, sales and service-related purposes in 
the United States and six other countries - China, Japan, South Korea, Singapore, Taiwan and France. The following table 
indicates the location, the general purpose and the square footage of our material facilities. Our leases expire at various times 
through July 1, 2029.

Location
Wilmington, Massachusetts .....
Milpitas, California..................
Budd Lake, New Jersey ...........
Bend, Oregon...........................
Bloomington, Minnesota .........
Hillsboro, Oregon ....................
Richardson, Texas....................
Snoqualmie, Washington .........
Tucson, Arizona .......................
Taiwan .....................................
China........................................
South Korea .............................
Japan ........................................
Singapore .................................

Facility Purpose
Corporate Headquarters, Engineering, Manufacturing and Service
Corporate, Engineering, Manufacturing and Service ............
Corporate, Engineering and Service......................................
Engineering and Service........................................................
Engineering, Manufacturing and Service ..............................
Engineering and Service........................................................
Engineering ...........................................................................
Engineering and Service........................................................
Engineering, Manufacturing and Service ..............................
Sales and Service...................................................................
Sales, Service and Engineering .............................................
Sales and Service...................................................................
Sales and Service...................................................................
Sales and Service...................................................................

Approximate
Square
Footage

50,000
134,000
49,000
19,000
98,500
20,000
21,000
20,500
19,000
43,500
37,500
34,000
20,500
12,000

We also lease office space for other smaller sales and service offices in several locations throughout the world.

We  believe  that  our  existing  facilities  and  capital  equipment  are  adequate  to  meet  our  current requirements  and  that 

suitable additional or substitute space is available on commercially reasonable terms if needed.

Item 3.

Legal Proceedings.

The information set forth under Note 10, “Commitments and Contingencies” to the Consolidated Financial Statements 

is incorporated herein by reference.

Item 4. Mine Safety Disclosures.

None.

25

PART II

Item 5.

Market  for  Registrant’s  Common  Equity,  Related  Stockholder  Matters  and  Issuer  Purchases  of  Equity 
Securities.

Our  common  stock  is  quoted  on  the  New York  Stock  Exchange  (“NYSE”)  under  the  symbol  “ONTO.”  Prior  to  the 
Merger,  Nanometrics’  common  stock  was  quoted  on  the  Nasdaq  Global  Select  Market  under  the  symbol  “NANO”  and 
Rudolph’s common stock was quoted on the NYSE under the symbol “RTEC.” Set forth below is a line graph comparing the 
annual percentage change in the cumulative return to the stockholders of the Company’s common stock with the cumulative 
return of the NYSE Composite Index, the Nasdaq Composite Index and the industry specific index, PHLX Semiconductor 
Index,  for  the  period  commencing  on  December  31,  2014  and  ending  on  December  31,  2019.    Historical  data  for  Onto 
Innovation in the line graph for the period commencing on December 31, 2014 and ending on October 25, 2019 reflects the 
cumulative return to the stockholders of Nanometrics. 

The information contained in the performance graph shall not be deemed to be “soliciting material” or to be “filed” with 
the SEC, nor shall such information be incorporated by reference into any future filing under the Securities Act or the Exchange
Act, except to the extent that the Company specifically incorporates it by reference into such filing.

The graph assumes that $100 was invested on December 31, 2014 in the Company’s common stock and in each index. 
No cash dividends have been declared or paid on the Company’s common stock. Stockholder returns over the indicated period 
should not be considered indicative of future stockholder returns.

COMPARISON OF 5 YEAR CUMULATIVE TOTAL RETURN*
Among Onto Innovation Inc., the NYSE Composite Index, 
the NASDAQ Composite Index, and the PHLX Semiconductor Index

$350

$300

$250

$200

$150

$100

$50

$0

12/14

12/15

12/16

12/17

12/18

12/19

Onto Innovation Inc.

NASDAQ Composite

NYSE Composite

PHLX Semiconductor

*$100 invested on 12/31/14 in stock or index, including reinvestment of dividends.
Fiscal year ending December 31.

Onto Innovation Inc......................................
NYSE Composite..........................................
NASDAQ Composite ...................................
PHLX Semiconductor...................................

12/14
100.00
100.00
100.00
100.00

12/15

90.01
95.91
106.96
98.41

12/16
148.99
107.36
116.45
137.10

12/17
148.16
127.46
150.96
192.69

12/18
162.49
116.06
146.67
181.04

12/19
217.24
145.66
200.49
295.57

26

As of February 3, 2020, there were 153 stockholders of record of our common stock and approximately 16,358 beneficial

stockholders. 

We have never declared or paid a cash dividend on our common stock. The declaration of any future dividends by us is 
within the  discretion  of  our  Board  of  Directors  and  will  be  dependent  on  our  earnings,  financial  condition  and  capital 
requirements as well as any other factors deemed relevant by our Board of Directors.

Following  the  Merger,  we  assumed  the  share  repurchase  authorization  approved  on  March  14,  2019,  by  the  former 
Nanometrics Board of Directors.  This share repurchase authorization allows us to purchase up to $80.0 million worth of shares 
of our common stock. Under the terms of this share repurchase authorization, shares may be repurchased through open market 
or privately negotiated transactions. No shares have been repurchased under this repurchase authorization as of December 31, 
2019.

For further information, see Note 18 in the accompanying Notes to the Consolidated Financial Statements included in 

this Annual Report on Form 10-K.

In addition to our share repurchase program, we withhold common stock shares associated with net share settlements to 
cover  tax  withholding  obligations  upon  the  vesting  of  restricted  stock  unit  awards  and  stock  option  exercises  under  the 
Company’s equity incentive program. During the three and twelve months ended December 31, 2019, we withheld 51 thousand 
and 78 thousand shares through net share settlements, respectively. For the three and twelve month periods ended December 
31, 2019, net share settlements cost $1.8 million and $2.5 million, respectively. Please refer to Note 12 of the Notes to the
Consolidated Financial Statements included in this Annual Report on Form 10-K for further discussion regarding our equity 
incentive plan.

The following table provides details of common stock purchased during the three month period ended December 31, 

2019 (in thousands, except per share data):

Period

October 1, 2019 to October 31, 2019..............................
November 1, 2019 to November 30, 2019......................
December 1, 2019 to December 31, 2019.......................
Three Months Ended December 31, 2019 ......................

1 Includes shares withheld through net share settlements.

Total Number
of Shares
Purchased (1)

42 $
$
7
2
$
51

Average
Price
Paid per
Share

35.56
33.44
33.54

Total Number
of Shares
Purchased as
Part of Publicly
Announced
Program

Maximum
Approximate 
Dollar Value of
Shares that
May Yet Be
Purchased Under
the Program

— $
— $
— $
—

80,000
80,000
80,000

27

Item 6.

Selected Financial Data.

The following selected financial data should be read in conjunction with our Consolidated Financial Statements and the 
related Notes thereto appearing elsewhere in this Annual Report on Form 10-K, and Item 7. “Management’s Discussion and 
Analysis of Financial Condition and Results of Operations.” The Merger has been accounted for as a reverse acquisition under 
which Rudolph was considered the accounting acquirer.  As such, the selected financial data below comprises the operating 
results  of  Rudolph  and  its  consolidated  subsidiaries  for  periods  through  October  25,  2019  and  Onto  Innovation  and  its 
consolidated subsidiaries for periods on or after October 26, 2019. The balance sheet data as of December 31, 2019 and 2018
and the statement of operations data for the years ended December 31, 2019, 2018 and 2017 set forth below were derived from 
our audited Consolidated Financial Statements included elsewhere in this Form 10-K. The balance sheet data as of December 
31, 2017, 2016 and 2015, and the statement of operations data for the years ended December 31, 2016 and 2015 were derived 
from our audited consolidated financial statements not included herein.

Statement of Operations Data:
Revenue .................................................................
Cost of revenue......................................................
Gross profit ............................................................
Operating expenses:

Research and development...............................
Sales and marketing .........................................
General and administrative...............................
Amortization.....................................................
Patent litigation income....................................
Total operating expenses........................................
Operating income (loss).........................................
Interest income (expense), net ...............................
Other income (expense), net ..................................
Income (loss) before provision (benefit) for income
taxes ...................................................................
Provision (benefit) for income taxes......................
Net income.............................................................
Earnings per share:

Basic.................................................................
Diluted..............................................................

Weighted average shares outstanding:

Basic.................................................................
Diluted..............................................................

Balance Sheet Data:
Cash and cash equivalents ....................................
Marketable securities ............................................
Working capital.....................................................
Total assets............................................................
Convertible senior notes .......................................
Accumulated deficit..............................................
Total stockholders’ equity .....................................

2019 (1)

2018 (2)

Year Ended December 31,
2016 (2)
2017 (2)
(In thousands, except per share data)

2015 (2)

$ 305,896
170,868
135,028

$ 273,784
125,505
148,279

$ 255,098
120,503
134,595

$ 232,780
109,229
123,551

$ 221,690
102,284
119,406

48,358
28,251
53,017
10,445
—
140,071
(5,043)
3,666
780

(597)
(2,507)
1,910

0.06
0.06

29,729
30,007

$

$
$

$

$
$

39,953
22,010
33,698
1,534
—
97,195
51,084
2,206
56

53,346
8,250
45,096

1.77
1.74

25,470
25,895

37,694
20,795
27,878
1,940
(13,000)
75,307
59,288
971
(457)

59,802
26,893
32,909

1.30
1.27

25,325
25,865

$

$
$

35,797
18,816
28,913
2,320
(14,643)
71,203
52,348
(2,834)
354

49,868
12,916
36,952

1.48
1.45

25,033
25,566

$

$
$

32,689
17,047
34,732
2,145
—
86,613
32,793
(5,688)
(293)

26,812
8,856
17,956

0.71
0.69

25,258
25,868

$

$
$

2019 (1)

2018

2017

2016

2015

December 31,

$

$

$ 130,673
189,563
555,921
1,448,580
—
(4,863)
1,264,026

$ 112,388
62,684
305,916
418,040
—
(6,773)
361,888

67,770
109,589
279,775
385,922
—
(51,869)
333,154

37,859
87,872
226,668
338,699
—
(84,706)
293,735

$

44,554
116,924
197,266
379,563
57,846
(121,658)
270,678

(1) Selected financial data includes the operating results of the former Nanometrics subsequent to the closing of the Merger on October 25, 
2019.
(2) Statement of Operations data reflects a reclassification within the categories of operating expenses.  Applications engineering expenses 
were reclassified from Research and development to Sales and marketing. Sales and marketing expenses were disaggregated from General 
and administrative expenses.

28

Item 7.

Management’s Discussion and Analysis of Financial Condition and Results of Operations.

Overview

We are a worldwide leader in the design, development, manufacture and support of process control tools that perform 
macro-defect inspection and metrology, lithography systems, and process control analytical software used by semiconductor 
and advanced packaging device manufacturers. We deliver comprehensive solutions throughout the semiconductor fabrication 
process with our families of proprietary products that provide critical yield-enhancing information, enabling microelectronic 
device  manufacturers  to  drive  down  costs  and  time  to  market  of  their  devices. We  provide  process  and yield  management 
solutions used in both wafer processing facilities, often referred to as “front-end” and device packaging and test facilities, or 
“back-end” manufacturing, through a portfolio of standalone systems for macro-defect inspection, lithography, probe card test 
and  analysis,  and  transparent  and  opaque  thin  film  measurements. All  of  our  systems  feature  sophisticated  software  and 
production-worthy automation. In addition, our advanced process control software portfolio includes powerful solutions for 
standalone  tools,  groups  of  tools,  or  factory-wide  suites  to  enhance  productivity  and  achieve  significant  cost  savings.  Our 
systems are backed by worldwide customer service and applications support.

Our business is affected by the annual spending patterns of our customers on semiconductor capital equipment. The 
amount that our customers devote to capital equipment spending depends on a number of factors, including general worldwide 
economic conditions as well  as other economic drivers such as personal computers, mobile devices, data centers, artificial 
intelligence and automotive sales. Current forecasts by industry analysts for the semiconductor device manufacturing industry
project  capital  equipment  spending  to  increase  approximately  5%  to  8%  for  2020  as  compared  to  2019.  Our  revenue  and 
profitability tend to follow the trends of certain segments within the semiconductor market. 

Historically, a significant portion of our revenue in each quarter and year has been derived from sales to relatively few 
customers, and we expect this trend to continue. For the years ended December 31, 2019, 2018 and 2017, aggregate sales to 
customers that individually represented at least five percent of our revenue accounted for 42.7%, 18.3%, and 27.2% of our 
revenue, respectively. 

Merger

On June 23, 2019, Rudolph and Nanometrics, a provider of advanced process control metrology and software analytics, 
entered into the Merger Agreement to combine in an all-stock merger of equals transaction. The Merger was completed on 
October 25, 2019. As a result of the Merger, Rudolph became a direct wholly-owned subsidiary of Nanometrics, which was 
renamed “Onto Innovation Inc.” upon the consummation of the Merger. Shares of common stock of Rudolph (NYSE: RTEC) 
ceased trading on the New York Stock Exchange as of market close on October 25, 2019. Onto Innovation (NYSE: ONTO) 
shares began trading on the NYSE on October 28, 2019.  At the effective time of the Merger, each issued and outstanding share 
of Rudolph Common Stock was converted into the right to receive 0.8042 shares of Onto Innovation Common Stock (NYSE: 
ONTO). Immediately following the effective time of the Merger, each of Nanometrics’ and Rudolph’s stockholders owned 
approximately 50% of the combined company, Onto Innovation. Pursuant to the Merger Agreement, Onto Innovation accounts 
for  the  Merger  as  a  reverse  acquisition  using  the  acquisition  method  of  accounting  in  accordance  with  generally  accepted 
accounting  principles,  with  Rudolph  being  treated  as  the  acquiring  entity  for  accounting  purposes. As  such,  the  results  of 
operations data below comprise the operating results of Rudolph and its consolidated subsidiaries for periods through October
25, 2019 and Onto Innovation and its consolidated subsidiaries for periods on or after October 26, 2019. See Note 3 to the 
Consolidated Financial Statements set forth elsewhere in this Annual Report on Form 10-K for additional information regarding 
the Merger.

29

Results of Operations

The following table sets forth, for the periods indicated, our results of operations as percentages of our revenue. Our 

results of operations are reported as one business segment.

Revenue ............................................................................................
Cost of revenue.................................................................................
Gross profit..................................................................................

Operating expenses:

Research and development..........................................................
Sales and marketing ....................................................................
General and administrative..........................................................
Amortization................................................................................
Patent litigation income...............................................................
Total operating expenses........................................................
Operating income (loss)....................................................................
Interest income, net...........................................................................
Other income (expense), net .............................................................
Income (loss) before provision (benefit) for income taxes..........
Provision (benefit) for income taxes.................................................
Net income........................................................................................

Results of Operations for 2019, 2018 and 2017 

2019

Year Ended December 31,
2018

2017

100.0%
55.9%
44.1%

15.8%
9.2%
17.4%
3.4%
—%
45.8%
(1.7)%
1.2%
0.3%
(0.2)%
(0.8)%
0.6%

100.0%
45.8%
54.2%

14.6%
8.0%
12.3%
0.6%
—%
35.5%
18.7%
0.8%
—%
19.5%
3.0%
16.5%

100.0%
47.2%
52.8%

14.8%
8.1%
10.9%
0.8%
(5.1)%
29.5%
23.3%
0.4%
(0.2)%
23.5%
10.6%
12.9%

Revenue. Our revenue is derived from the sale of our systems and software, spare parts, and services. Our revenue was 
$305.9 million, $273.8 million and $255.1 million for the years ended December 31, 2019, 2018 and 2017, respectively. This 
represents an increase of 11.7% from 2018 to 2019 and an increase of 7.3% from 2017 to 2018.  The increase in revenue from 
2018 to 2019 was primarily due to the inclusion of revenue from legacy Nanometrics business for the period from October 25, 
2019, the effective date of the Merger, through December 31, 2019.  This year-over-year increase in revenue was partially offset 
by overall spending declines in the semiconductor capital equipment industries. The increase in revenue from 2017 to 2018 
was primarily due to an increase in capital spending by front-end memory manufacturers.  

The following table lists, for the periods indicated, the different sources of our revenue in dollars (thousands) and as 

percentages of our total revenue:

Systems and software .........................................................
Parts ....................................................................................
Services...............................................................................
Total revenue............................................................

2019

$255,723
34,892
15,281
$305,896

Year Ended December 31,
2018

2017

84% $234,241
11% 28,658
5% 10,885
100% $273,784

86% $216,884
10% 27,143
4% 11,071
100% $255,098

85%
11%
4%
100%

Total systems and software revenue increased $21.5 million for the year ended December 31, 2019 as compared to the 
year ended December 31, 2018 primarily due to the inclusion of revenue from legacy Nanometrics for the period from the 
effective date of the Merger.  The year-over-year change in systems revenue was driven by an increase of $29.9 million in 
process control systems revenue due to inclusion of $56.0 million of revenue from legacy Nanometrics for the period from the 
effective date  of  the  Merger.  This  increase  was  partially  offset  by  decreased  demand  for  our  products  in  both  advanced 
packaging and front-end systems.  Software licensing, support and maintenance revenue decreased $4.0 million, primarily due 
to a decrease in revenue from our process control and yield management software. The year-over-year increase in parts and
services revenue in absolute dollars from 2018 to 2019 was primarily due to the inclusion of $10.3 million of parts and service 
revenue from legacy Nanometrics for the period from the effective date of the Merger.  Parts and services revenue is generated 
from part sales, maintenance service contracts, system upgrades, as well as time and material billable service calls.

Total systems and software revenue increased for the year ended December 31, 2018 as compared to the year ended 
December 31,  2017  due  to  increased  demand  for  our  products  in  front-end  process  control  systems.  The  year-over-year 
increases in process control systems revenue totaled $12.9 million, primarily due to higher metrology system sales in the 2018 
period.  Lithography system revenue increased $0.7 million, primarily due to the shipment of a JetStep G system offset by 
lower shipments of our JetStep W systems in 2018.  Licensing revenue from software increased $3.7 million primarily due to 

30

an  increase  in revenue  from our  process  control  and  yield  management  software. The  year-over-year  increase  in  parts  and 
services revenue in absolute dollars from 2017 to 2018 was primarily due to increased spending by our customers on repairs of 
existing systems.  Parts and services revenue is generated from part sales, maintenance service contracts, system upgrades, as 
well as time and material billable service calls.

Gross Profit. Our gross profit has been and will continue to be affected by a variety of factors, including  inventory step-
up from purchase accounting, manufacturing efficiencies, provision for excess and obsolete inventory, pricing by competitors 
or suppliers, new product introductions, production volume, customization and reconfiguration of systems, international and 
domestic sales mix, system and software product mix, and parts and services margins. Our gross profit was $135.0 million, 
$148.3 million and $134.6 million for the years ended December 31, 2019, 2018 and 2017, respectively.  Our gross profit 
represented 44.1%, 54.2% and 52.8% for the years ended December 31, 2019, 2018 and 2017, respectively.  The decrease in 
gross profit as a percentage of revenue from 2018 to 2019 was primarily due to charges to cost of goods sold including a $15.4 
million charge for the sale of inventory written-up to fair value upon the Merger and $7.8 million in additional charges related 
to excess and obsolete inventory.  The increase in gross profit as a percentage of revenue from 2017 to 2018 was primarily due 
to a change in our systems and software product sales mix and the sale of a lithography system that had previously been partially 
written down.  

Operating Expenses

Our operating expenses consist of:

• 

• 

• 

• 

Research and Development. The process control defect inspection and metrology, advanced packaging lithography, 
and  data  analysis  systems  and  software  market  is  characterized  by  continuous  technological  development  and 
product innovations. We believe that the rapid and ongoing development of new products and enhancements of 
existing products, including the transition to copper and low-k dielectrics, wafer level packaging, the continuous 
shrinkage  in  critical  dimensions,  and  the  evolution  of  ultra-thin  gate  process  control  is  critical  to  our success. 
Accordingly, we devote a significant portion of our technical, management and financial resources to research and 
development programs. Research and development expenditures consist primarily of salaries and related expenses 
of employees engaged in research, design and development activities. They also include consulting fees, the cost 
of  related  supplies  and  legal  costs  to  defend  our  patents.  Our  research  and  development  expenses  were  $48.4 
million, $40.0 million and $37.7 million in 2019, 2018 and 2017, respectively.  The year-over-year dollar increase 
from 2018 to 2019 was primarily due to increased compensation resulting from the inclusion of $7.4 million in 
research and development expense of legacy Nanometrics resulting from the Merger.  The year-over-year dollar 
increase from 2017 to 2018 was primarily due to increased compensation and development initiatives. These costs 
were partially offset by decreased litigation expenses.  We continue to maintain our commitment to investing in 
new product development and enhancement to existing products.

Sales and Marketing. Sales and marketing expenses are primarily comprised of salaries and related costs for sales 
and  marketing  personnel,  as  well  as  commissions  and  other  non-personnel  related  expenses.    Our  sales  and 
marketing expenses were $28.3 million, $22.0 million and $20.8 million in 2019, 2018 and 2017, respectively.  
The year-over-year dollar increase from 2018 to 2019 was primarily due to the inclusion of $6.9 million in sales 
and marketing expenses of legacy Nanometrics resulting from the Merger.  The year-over-year increase from 2017 
to 2018 was primarily due to compensation costs resulting from headcount and salary increases and an increase in 
sales commissions

General and Administrative. General and administrative expenses are primarily comprised of salaries and related 
costs  for  general  administrative  personnel,  as  well  as  other  non-personnel  related  expenses.  Our  general  and 
administrative expenses were $53.0 million, $33.7 million and $27.9 million in 2019, 2018 and 2017, respectively.  
The year-over-year dollar increase from 2018 to 2019 was primarily due to the inclusion of $4.4 million in general 
and  administrative  expenses of  legacy  Nanometrics  resulting from  the  Merger.   In  addition,  we  incurred  $14.8 
million in merger expenses for bankers fees, legal, accounting, and change in control compensation expenses.  The 
year-over-year  dollar  increase  from  2017  to  2018  was  primarily  due  to  compensation  costs  resulting  from 
headcount and salary increases.  

Amortization of Identifiable Intangible Assets. Amortization of identifiable intangible assets was $10.4 million, 
$1.5 million and $1.9 million in 2019, 2018 and 2017, respectively.  The year-over-year increase in amortization 
expense  from  2018  to  2019  was  due  additional  amortization  recorded  associated  with  additional  purchased 
intangible assets recorded as a result of the Merger.  The year-over-year decreases in amortization expense from 
2017 to 2018 were due to certain intangible assets becoming fully amortized during these periods.

31

• 

Patent  Litigation  Income. During  the  twelve months  ended  December  31,  2019  and  2018,  there  was  no patent 
litigation income.  During the twelve months ended December 31, 2017, we recorded income and received cash of 
$13.0 million from a comprehensive settlement regarding a patent infringement litigation with Camtek.  

Interest income (expense), net.  In 2019, 2018 and 2017, net interest income was $3.7 million, $2.2 million and $1.0 
million, respectively. The increase in net interest income from 2018 to 2019 was due to interest earned on our marketable 
securities and additional interest income on a higher marketable securities balance following the Merger with Nanometrics.  
The increase in net interest income from 2017 to 2018 was due to higher interest earned on our marketable securities.  

Income taxes. The following table provides details of income tax (dollars in millions):

Income before income taxes .............................................................
Provision (benefit) for income taxes.................................................
Effective tax rate...............................................................................

$
$

(0.6)
(2.5)
419.9%

$
$

$
$

53.3
8.3
15.5%

59.8
26.9
45.0%

2019

Year Ended December 31,
2018

2017

The income tax provision differs from the federal statutory income tax rate of 21% for 2019 primarily due to a benefit 
related  to  the  Foreign  Derived  Intangible  Income  Deduction  (“FDII”)  of  $2.3  million  and  tax  benefits  for  research  and 
development credits of $2.1 million, partially offset by non-deductible transaction costs of $1.1 million and Section 162(m) 
limitation on the deductibility of executive compensation of $0.8 million.

The income tax provision differs from the federal statutory income tax rate of 21% for 2018 primarily due to Foreign 
Derived Intangible Income Deduction (“FDII”) from Public law No. 115-97, known as the Tax Cuts and Jobs Act (the “Tax 
Act”) of $2.2 million, tax benefits for research and development credits of $2.3 million, offset by a Section 162(m) limitation 
on the deductibility of executive compensation of $0.5 million and additional Accounting Standards Codification (“ASC”) 740-
10 tax reserves of $0.6 million.

The  income  tax  provision  differs  from  the  federal  statutory  income  tax  rate  of  21%  for  2017  primarily  due  to  new 
regulations  resulting  from  the Tax Act  of  $9.5 million, offset  by tax  benefits  for  research  and  development  credits  of  $1.6 
million, section 199 manufacturing deduction of $1.6 million and excess tax benefits on vesting of restricted stock of $1.6 
million.

The Tax Act, which was enacted and signed into law on December 22, 2017, reduced the U.S. federal corporate tax rate 
from 35% to 21%, effective January 1, 2018. Also, on December 22, 2017, the SEC issued Staff Accounting Bulletin No. 118 
(“SAB 118”), which provides guidance on accounting for tax effects of the Tax Act. SAB 118 provides a measurement period 
of up to one year from the enactment date to complete the accounting. Any adjustments during this measurement period will 
be included in net earnings from continuing operations as an adjustment to income tax expense in the reporting period when 
such adjustments are determined. Based on the information available and current interpretation of the rules, we estimated the 
impact of the reduction in the corporate tax rate and remeasurement of certain deferred tax assets and liabilities. The provisional 
amount recorded in the fourth quarter of 2017 related to the remeasurement of our deferred tax balance resulted in additional 
income tax expense of $8.0 million. During the fourth quarter of 2018, we completed the accounting for such revaluation and 
recorded an additional $0.8 million in tax expense.  The prior year provisional impact and current year finalization of the Tax 
Act summarized below, which is included as a component of the provision from income taxes is further described in Note 12 
in the accompanying Notes to the Consolidated Financial Statements included in this Annual Report on Form 10-K (dollars in 
millions).

Year Ended December 31,

2019

2018

Re-measurement of U.S. deferred tax assets and liabilities ..............
Transition tax on non-U.S. subsidiaries’ earnings.............................
Foreign tax credits applied against transition tax..............................
Valuation allowance for unused foreign tax credits ..........................
Total impact of the Tax Act on the provision for income taxes....

$

$

— $
—
—
1.0
1.0

$

—
0.1
—
0.7
0.8

Our future effective income tax rate depends on various factors, such as future impacts of the Tax Act, possible further 
tax legislation, the geographic composition of our pre-tax income, the amount of our pre-tax income as business activities 
fluctuate,  non-deductible  expenses  incurred  in  connection  with  acquisitions  and  research  and  development  credits  as  a 
percentage of aggregate pre-tax income.

32

Liquidity and Capital Resources

At December 31, 2019, we had $320.2 million of cash, cash equivalents and marketable securities and $555.9 million 
in working capital.  At December 31, 2018, our cash, cash equivalents and marketable securities totaled $175.1 million, while 
working capital amounted to $305.9 million.

Net cash and cash equivalents provided by operating activities for the years ended December 31, 2019, 2018 and 2017 
totaled $18.1 million, $35.1 million and $64.2 million, respectively.  During the year ended December 31, 2019, cash provided 
by operating activities was primarily due to net income, adjusted to exclude the effect of non-cash charges, of $53.5 million, a 
decrease in income taxes of $7.6 million, which were partially offset by a decrease in accounts payable of $12.1 million, a 
decrease in accrued and other liabilities of $6.7 million, an increase in inventories of $9.3 million, an increase in accounts 
receivable of $9.7 million and an increase in prepaid expenses and other assets of $5.1 million.

During  the  year  ended  December 31,  2018,  cash  provided  by  operating  activities  was  primarily  due  to  net  income, 
adjusted to exclude the effect of non-cash charges, of $64.3 million, an increase in accounts payable of $3.5 million, a decrease 
in income taxes of $1.1 million, a decrease in account receivable of $0.7 million and an increase in accrued and other liabilities 
of $0.2 million, which were partially offset by an increase in inventories of $31.5 million, and an increase in prepaid expenses
and other assets of $3.1 million. The increase in inventories of $31.5 million was primarily due to increased sales projections 
of our latest products and new product initiatives. 

During  the  year  ended  December 31,  2017,  cash  provided  by  operating  activities  was  primarily  due  to  net  income, 
adjusted to exclude the effect of non-cash charges, of $65.9 million, an increase in accrued and other liabilities of $5.2 million, 
an increase in accounts payable of $3.2 million and a decrease in account receivable of $0.4 million, which were partially offset 
by an increase in income taxes of $4.7 million, an increase in inventory of $4.2 million, and an increase in prepaid expenses 
and other assets of $1.7 million.

Net cash and cash equivalents provided by investing activities for the years ended December 31, 2019 and 2018 was 
$4.1 million and $33.8 million, respectively.  Net cash and cash equivalents used in investing activities for the year ended 
December 31, 2017 totaled $32.5 million.  During the year ended December 31, 2019, net cash provided by investing activities
included proceeds from maturities and sales of marketable securities of $94.5 million and cash acquired in the Merger of $43.9 
million, which were partially offset by purchases of marketable securities of $127.5 million and purchases of property, plant 
and equipment of $6.8 million.  During the year ended December 31, 2018, net cash provided by investing activities included 
proceeds from sales of marketable securities of $186.3 million, which was partially offset by purchases of marketable securities 
of  $140.0  million,  purchases  of  property,  plant  and  equipment  of  $7.5  million  and  cash  advanced  on  a  convertible  note 
receivable of $5.0 million.  During the year ended December 31, 2017, net cash used in investing activities included purchases 
of  marketable  securities  of  $164.7  million,  purchases  of  property,  plant  and  equipment  of  $10.2  million,  and  purchase  of 
intangible assets of $1.0 million, which were partially offset by proceeds from sales of marketable securities of $143.3 million. 

Net  cash  used  in  financing  activities  was  $4.2  million,  $23.9  million  and  $2.6  million  in  2019,  2018  and  2017, 
respectively.  During the year ended December 31, 2019, financing activities used cash to pay taxes related to shares withheld 
for share based compensation plans of $2.5 million, pay contingent consideration for acquired business of $1.8 million, and 
purchase shares of our common stock under share repurchase authorizations of $0.7 million. These uses of cash were partially 
offset by proceeds from sales of shares through employee stock plans of $0.8 million.  During the year ended December 31, 
2018, financing activities used cash to purchase shares of our common stock under share repurchase authorizations of $21.1 
million,  pay  taxes  related  to  shares  withheld  for  share  based  compensation  plans  of  $1.9  million  and  pay  contingent 
consideration for acquired business of $1.5 million. These uses of cash were partially offset by proceeds from sales of shares 
through employee stock plans of $0.6 million.  During the year ended December 31, 2017, financing activities included the 
redemption of stock warrants of $1.0 million, tax payments related to shares withheld for share-based compensation plans of 
$1.4 million and payment of contingent consideration for acquired businesses of $0.8 million, which were partially offset by 
proceeds from sales of shares through employee stock plans of $0.6 million.  

From time to time, we evaluate whether to acquire new or complementary businesses, products and/or technologies. We 
may fund all of or a portion of the price of these investments or acquisitions in cash, stock, or a combination of cash and stock.

On  May  31,  2018,  we  entered  into  a  convertible  loan  agreement  with  Simax  Precision Technologies  Limited  (“the 
borrower”), which allowed them to borrow up to $15.0 million in multiple promissory notes with an interest rate of 4.25% per 
annum payable on a semi-annual basis.  We expected to be a supplier of lithography modules to Simax, which is used in the 
manufacture, sale and service of lithography systems. At December 31, 2019, we had $5.0 million in outstanding convertible 
notes receivable with the borrower.   

During the fourth quarter of 2019, we began negotiations with the borrower to end our relationship as it pertains to this 
agreement. We determined that it is unlikely that a portion of the convertible note receivable will be collectable, and a reserve 

33

in the amount of $2.0 million was recorded during the period ended December 31, 2019.  In addition, we ceased recognizing 
interest income on these convertible notes receivable as of September 30, 2019. See Note 8 in the accompanying Notes to the 
Consolidated Financial Statements included in this Annual Report on Form 10-K for further information.

Following  the  Merger,  we  assumed  the  share  repurchase  authorization  approved  on  March  14,  2019,  by  the  former 
Nanometrics Board of Directors.  This share repurchase authorization allows us to purchase up to $80.0 million worth of shares 
of our common stock. Under the terms of this share repurchase authorization, shares may be repurchased through open market 
or privately negotiated transactions. No shares have been repurchased under this repurchase authorization. 

For further information regarding our share repurchases, see Note 18 in the accompanying Notes to the Consolidated 

Financial Statements included in this Annual Report on Form 10-K.

We have a credit agreement with a bank that provides for a line of credit that is secured by the marketable securities we 
have with the bank.  We are permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit 
is accessed.  As of December 31, 2019, the available line of credit was approximately $91.3 million with an available interest 
rate of 3.3%.  The credit agreement is available to us until such time that either party terminates the arrangement at its discretion.   
To date, we have not utilized the line of credit.

Our future capital requirements will depend on many factors, including the timing and amount of our revenue and our 
investment  decisions,  which will  affect  our  ability  to  generate  additional  cash.  We  expect  that  our  existing  cash,  cash 
equivalents,  marketable  securities  and  availability  under  our  line  of  credit  will  be  sufficient  to  meet  our  anticipated  cash 
requirements for working capital, capital expenditures and other cash needs for the next 12 months following the filing of this 
Form 10-K. Thereafter, if cash generated from operations and financing activities is insufficient to satisfy our working capital 
requirements, we may seek additional funding through bank borrowings, sales of securities or other means. There can be no 
assurance that we will be able to raise any such capital on terms acceptable to us or at all.

Contractual Obligations

The  following  table  summarizes  our  significant  contractual  obligations  at  December 31,  2019,  and  the  effect  such 
obligations  are  expected  to  have  on  our  liquidity  and  cash  flows  in  future  periods.  This  table  excludes  the liability  for 
unrecognized tax benefits that totaled approximately $10.6 million at December 31, 2019. We are currently unable to provide 
a reasonably reliable estimate of the amount or periods when cash settlement of this liability may occur (dollars in thousands).

Operating lease obligations...................................
Open and committed purchase orders...................
Total.................................................................

Off-Balance Sheet Arrangements

$

Total
29,152
97,877
$ 127,029

Less than 1
year

Payments due by period
1-3
years
12,116
4,172
16,288

$

$

$

$

5,901
93,705
99,606

$

$

3-5
years

More than
5 years

5,856
—
5,856

$

$

5,279
—
5,279

The Company does not have any off-balance sheet arrangements that have or are reasonably likely to have a material 

effect on our financial condition, results of operations or liquidity and capital resources.

Critical Accounting Policies

Management’s  discussion  and  analysis  of  our  financial  condition  and  results  of  operations  are  based  upon  our 
Consolidated Financial Statements included in this Annual Report on Form 10-K, which have been prepared in accordance 
with accounting principles generally accepted in the United States. We review the accounting policies we use in reporting our 
financial results on a regular basis. The preparation of these financial statements requires us to make estimates and judgments 
that  affect  the  reported  amounts  of  assets,  liabilities,  revenue  and  expenses  and related disclosure  of  contingent  assets  and 
liabilities. On an ongoing basis, we evaluate our estimates, including those related to revenue recognition, accounts receivable, 
inventories, business acquisitions, intangible assets, share-based payments, income taxes and warranty obligations. We base 
our  estimates  on  historical  experience  and  on  various  other  assumptions  that  are  believed  to  be  reasonable  under  the
circumstances, the results of which form the basis for making judgments about the carrying value of assets and liabilities that 
are not readily apparent from other sources. Results may differ from these estimates due to actual outcomes being different 
from those on which we based our assumptions. These estimates and judgments are regularly reviewed by management on an 
ongoing basis at the end of each quarter prior to the public release of our financial results. We believe the following critical 
accounting policies affect our more significant judgments and estimates used in the preparation of our Consolidated Financial 
Statements.

34

Revenue Recognition. Effective January 1, 2018, we adopted the requirements of Accounting Standards Update (“ASU”) 

No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” 

Revenue is recognized when control of the promised goods or services are transferred to our customers in an amount 
that reflects the consideration we expect to be entitled to receive in exchange for those goods or services. We account for a 
contract when it has approval and commitment from both parties, the rights of the parties and payment terms are identified, the 
contract has commercial substance and collectability of consideration is probable.

We account for shipping and handling activities as the fulfillment of a promise to transfer goods to the customer and 
therefore record these activities under the caption “Cost of revenue.” Sales tax and any other taxes collected concurrent with 
revenue producing activities are excluded from revenue. Incidental items that are immaterial in the context of the contract are 
recognized as expense.

Contracts with customers may include multiple performance obligations. For such arrangements, we allocate revenue to 
each performance obligation based on its relative standalone selling price. We generally determine standalone selling prices 
based on the prices charged to customers or the expected cost-plus margin.

Revenue from systems is recognized when we transfer control of the product to our customer. To indicate transfer of
control, we must have a present right to payment, legal title must have passed to the customer and the customer must have the 
significant risks and rewards of ownership. We generally transfer control for system sales when the customer or the customer’s 
agent picks up the system at our facility. Payment for the majority of our systems have 80-90% of the invoice amount due 
within 30 days and the remaining amount due upon completion of installation, recalibration and qualification by the customer. 
We provide an assurance warranty on our systems for a period of twelve to fourteen months against defects in material and 
workmanship. We provide for the estimated cost of product warranties at the time revenue is recognized.

Depending on the terms of the systems arrangement, we may also defer the recognition of a portion of the consideration 
expected to be received because we have to satisfy a future obligation (e.g., installation, training and extended warranties). We 
use an observable price to determine the standalone selling price for separate performance obligations or a cost-plus margin 
approach when one is not available.

Revenue from software licenses is recognized upfront at the point in time when the software is made available to the 
customer. Software licenses provide the customer with limited rights to use the software. Revenue from licensing support and 
maintenance is recognized as the support and maintenance are provided, which is over the contract period. Payment for software 
licensing, support and maintenance is generally due in 30 days.

Revenue from parts is recognized when we transfer control of the product, which typically occurs when we ship the 

product from our facilities to the customer. Payment for parts is generally due in 30 days.

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
our assurance warranty on our products, service labor, consulting and training. Revenue from service contracts is recognized 
ratably over the term of the service contract. Revenue from service labor, consulting and training is recognized as services are 
performed. Payment for services is generally due in 30 days.

We record contract liabilities when the customer has been billed in advance of completing our performance obligations. 

These amounts are recorded as deferred revenue in the Consolidated Balance Sheets.

Business  combinations.  We  account  for  business  combinations  under  the  acquisition  method  of  accounting,  which 
requires us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date fair 
values. While we use our best estimates and assumptions to accurately value assets acquired and liabilities assumed at the 
acquisition date as well as contingent consideration, where applicable, our estimates are inherently uncertain and subject to 
refinement. As a result, during the measurement period, which may be up to one year from the acquisition date, we record
adjustments to the assets acquired and liabilities assumed with the corresponding offset to goodwill. Upon the conclusion of 
the measurement period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, 
any subsequent adjustments are recognized in our consolidated statements of operations. Accounting for business combinations 
requires  our  management  to  make  significant  estimates  and  assumptions,  especially  at  the  acquisition  date  including  our 
estimates  for  intangible  assets,  contractual  obligations  assumed,  restructuring  liabilities,  pre-acquisition  contingencies,  and 
contingent consideration, where applicable. Although we believe the assumptions and estimates we have made in the past have 
been  reasonable  and appropriate,  they  are  based,  in  part,  on  historical  experience  and  information  obtained  from  the 
management of the acquired companies and are inherently uncertain. Estimates in valuing certain acquired intangible assets 
under the income approach include growth in future expected cash flows from product sales, acquired technologies, technology 
obsolescence  rates,  estimated  cash  flows  from  the  projects  when  completed  and  discount  rates.  Unanticipated  events  and 
circumstances may occur that may affect the accuracy or validity of such assumptions, estimates or actual results.

35

Excess  and  Obsolete  Inventory. We  maintain  reserves  for  our  excess  and  obsolete  inventory  equal  to  the  difference 
between the cost of inventory and the estimated market value based upon assumptions about future product lifecycles, product 
demand and market conditions. If actual product lifecycles, product demand and market conditions are less favorable than those 
originally projected by management, additional inventory write-downs may be required.

Long-Lived Assets and Acquired Intangible Assets. We periodically review long-lived assets, other than goodwill, for 
impairment whenever changes in events or circumstances indicate that the carrying amount of an asset may not be recoverable. 
Assumptions and estimates used in the determination of impairment losses, such as future cash flows and disposition costs, 
may affect the carrying value of long-lived assets and the impairment of such long-lived assets, if any, could have a material 
effect  on our  consolidated  financial  statements.    During  the  year  ended  December  31, 2019,  we  recognized  a $0.5  million 
impairment loss on long-lived assets.  No such indicators were noted in 2018 or 2017.

Accounting for Income Taxes. As part of the process of preparing our consolidated financial statements, we are required 
to estimate our actual current tax exposure together with our temporary differences resulting from differing treatment of items 
for tax and accounting purposes. These temporary differences result in deferred tax assets and liabilities, which are included 
within our consolidated balance sheet. We must then assess the likelihood that our deferred tax assets will be recovered from 
future  taxable  income  and  to  the  extent  we  believe  that  recovery  is  not  likely,  we  must  establish  a  valuation  allowance. 
Management judgment is required in determining our provision for income taxes and any valuation allowance recorded against 
our deferred tax assets. The need for a valuation allowance is based on our estimates of taxable income by jurisdiction in which 
we operate and the period over which our deferred taxes will be recoverable. In the event that actual results differ from these 
estimates or we adjust these estimates in future periods, we may need to adjust the valuation allowance, which could materially 
impact our financial position and results of operations. At December 31, 2019 and 2018, we had recorded valuation allowances 
of $14.2 million and $3.2 million on certain of our deferred tax assets to reflect the deferred tax assets at the net amount that is 
more likely than not to be realized.  We evaluated the realizability of the deferred tax assets based on positive earnings as well 
as the projected earnings in future years and believe it is more likely than not that the substantial majority of our deferred tax
asset will be realized in the future years.  We will continue to monitor the realizability of the deferred tax assets and evaluate 
the valuation allowance.

We recognize liabilities for uncertain tax positions based on a two-step process. The first step requires us to determine 
if the weight of available evidence indicates that the tax position has met the threshold for recognition; therefore, we must 
evaluate  whether  it  is  more  likely  than  not  that  the  position  will  be  sustained on  audit, including  resolution  of  any  related 
appeals or litigation processes. The second step requires us to measure the tax benefit of the tax position taken, or expected to 
be taken, in an income tax return as the largest amount that is more than 50% likely of being realized when effectively settled. 
This measurement step is inherently difficult and requires subjective estimations of such amounts to determine the probability 
of various possible outcomes. We reevaluate the uncertain tax positions each quarter based on factors including, but not limited 
to, changes in facts or circumstances, changes in tax law, effectively settled issues, and new audit activity. Such a change in 
recognition or measurement could result in the recognition of a tax benefit or an additional charge to the tax provision in the 
period.

Although we believe the measurement of our liabilities for uncertain tax positions is reasonable, no assurance can be 
given that the final outcome of these matters will not be different than what is reflected in the historical income tax provisions 
and accruals. If additional taxes are assessed as a result of an audit or litigation, it could have a material effect on our income 
tax provision and net income in the period or periods for which that determination is made.

Impact of Recent Accounting Pronouncements

Recently Adopted

Effective  January  1,  2019,  we  adopted  ASU  No.  2018-07,  “Compensation  – Stock  Compensation  (Topic  718): 
Improvements  to  Nonemployee  Share-Based  Payment Accounting.”   This ASU  expands  the  scope  of Topic  718  to  include 
share-based  payment  transactions  for  acquiring  goods  and  services  from  nonemployees. An  entity  should  apply  the 
requirements of Topic 718 to nonemployee awards except for specific guidance on inputs to an option pricing model and the 
attribution of cost.  The ASU is effective for the fiscal years beginning after December 15, 2018, including interim periods 
within that fiscal year.  The adoption of ASU No. 2018-07 did not have a material impact on our consolidated financial position, 
results of operations, and cash flows.   

Effective  January  1,  2019,  we  adopted ASU  No.  2018-02,  “Income  Statement  – Reporting  Comprehensive  Income 
(Topic 220): Reclassification of Certain Tax Effects from Accumulated Other Comprehensive Income.”  The new guidance 
allows companies to reclassify stranded tax effects resulting from the Tax Act from accumulated other comprehensive income 
to retained earnings.  The guidance also requires certain new disclosures regardless of a company’s election.  The standard is 
effective for annual periods beginning after December 15, 2018 and for interim periods within those annual periods, with earlier 

36

adoption permitted.  The adoption of ASU No. 2018-02 did not have a material impact on our consolidated financial position, 
results of operations, and cash flows.

In January 2017, the Financial Accounting Standards Board (“FASB”) issued ASU No. 2017-04, “Intangibles – Goodwill 
and  Other  (Topic  350):  Simplifying  the  Test  for  Goodwill  Impairment.”    This ASU  eliminates  Step  2  from  the  goodwill
impairment test.   Accordingly, if the carrying amount of a reporting unit exceeds its fair value, an impairment loss will be 
recognized in an amount equal to the excess, limited to the total amount of goodwill allocated to the reporting unit.  The ASU 
is effective for the fiscal years beginning after December 15, 2019 and for interim periods within those fiscal years, with earlier 
adoption permitted.  The adoption of ASU No. 2017-04 in 2019 did not have a material impact on our consolidated financial 
position, results of operations, and cash flows.

In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” ASU No. 2016-02 requires that lessees 
recognize virtually all of their leases on the balance sheet, by recording a right-of-use asset and lease liability. On January 1, 
2019, we adopted ASU No. 2016-02 using the modified retrospective method which applies the provisions of the standard at 
the effective date without adjusting the comparative periods presented.  We also elected the package of practical expedients.

There was not a cumulative-effect adjustment to our beginning retained earnings as a result of adopting ASU No. 2016-
02. We recognized additional operating lease assets and obligations of $14.4 million as of January 1, 2019. As a result of the 
Merger, operating lease assets and obligations of $9.7 million were assumed from the former Nanometrics.  We elected to not 
reassess  prior  conclusions  related  to the  identification,  classification  and  accounting  for  initial  direct  costs  for  leases  that 
commenced prior to January 1, 2019. For additional disclosure and detail, see Note 7 of the Notes to the Consolidated Financial 
Statements included in this Annual Report on Form 10-K.

Recently Issued

In December 2019, the FASB issued ASU No. 2019-12, “Income Taxes (Topic 740): Simplifying the Accounting for 
Income Taxes.” This standard simplifies the accounting for income taxes by eliminating certain exceptions to the guidance in 
Topic 740 related to the approach for intraperiod tax allocation, the methodology for calculating income taxes in an interim 
period and the recognition of deferred tax liabilities for outside basis differences. The new guidance also simplifies aspects of 
the accounting for franchise taxes and enacted changes in tax laws or rates and clarifies the accounting for transactions that 
result in a step-up in the tax basis of goodwill and allocating consolidated income taxes to separate financial statements of 
entities not subject to income tax. ASU No. 2019-12 is effective for fiscal years beginning after December 15, 2020, with early 
adoption permitted. Upon adoption, we must apply certain aspects of this standard retrospectively for all periods presented 
while other aspects are applied on a modified retrospective basis through a cumulative-effect adjustment to retained earnings 
as  of  the  beginning  of  the  fiscal  year  of  adoption. We  are  currently  evaluating  the  impact  of  this  new  standard  on  our 
consolidated financial position, results of operations, and cash flows. 

In August 2018, the FASB issued ASU No. 2018-13, “Fair Value Measurement (Topic 820): Disclosure Framework –
Changes  to  the  Disclosure  Requirements  for  Fair Value  Measurement.”   This ASU  is  part  of  the  FASB’s  larger  disclosure 
framework project intended to improve the effectiveness of financial statement footnote disclosure.  ASU No. 2018-13 modifies 
required fair value disclosures related primarily to level 3 investments.  This ASU is effective for annual periods beginning
after December 15, 2019 and interim periods within those annual periods.  The adoption of ASU No. 2018-13 is not expected 
to have a material effect on our consolidated financial position, results of operations, and cash flows.

In  May  2017,  the  FASB  issued  ASU  No.  2017-09,  “Compensation  - Stock  Compensation  (Topic  718):  Scope  of 
Modification Accounting.”  This ASU amends the scope of modification accounting for share-based payment arrangements 
and provides guidance on the types of changes to the terms or conditions of share-based payment awards to which an entity 
would be required to apply modification accounting under ASC 718.  The ASU is effective for the fiscal years beginning after 
December 15, 2019 and for interim periods within those fiscal years.  The adoption of ASU No. 2017-09 is not expected to 
have a material effect on our consolidated financial position, results of operations, and cash flows, if any.

In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326): Measurement of 
Credit Losses on Financial Instruments,” which represents a new credit loss standard that will change the impairment model 
for most financial assets and certain other financial instruments. Specifically, this guidance will require entities to utilize a new 
“expected loss” model as it relates to trade receivables, notes receivable and other commitments to extend credit held by a 
reporting entity. In addition, entities will be required to recognize an allowance for estimated credit losses on available-for-sale 
debt securities, regardless of the length of time that a security has been in an unrealized loss position. This guidance will be
effective  for  annual  reporting  periods  beginning  after  December  15,  2019,  including  interim  periods  within  those  annual 
reporting periods, with early adoption permitted. We expect that the adoption of this guidance will not have a material impact 
on our consolidated financial position, results of operations, and cash flows.

37

Recently issued accounting guidance not discussed above is not applicable or did not have, or is not expected to have, a 

material impact to the Company.

Item 7A.  Quantitative and Qualitative Disclosures About Market Risk.

Interest Rate and Credit Market Risk

We are exposed to changes in interest rates and market liquidity including our investments in certain available-for-sale 
securities. Our available-for-sale securities consist of fixed and variable rate income investments, such as municipal notes, 
municipal bonds and corporate bonds. We continually monitor our exposure to changes in interest rates, market liquidity and 
credit ratings of issuers for our available-for-sale securities. It is possible that we are at risk if interest rates, market liquidity or 
credit ratings of issuers change in an unfavorable direction. The magnitude of any gain or loss will be a function of the difference 
between the fixed or variable rate of the financial instrument and the market rate, and our financial condition and results of
operations  could  be  materially  affected.  Based  on  a  sensitivity  analysis  performed  on  our  financial  investments  held  as  of 
December 31, 2019, an immediate adverse change of 10% in interest rates (e.g. 3.00% to 3.30%) would result in a decrease of 
$0.9 million in the fair value of our available-for-sale debt securities and would not have a material impact on our consolidated 
financial position, results of operations or cash flows.

Foreign Currency Risk

A substantial portion of our systems and software sales are denominated in U.S. dollars with the exception of Japan. As 
a result, we have relatively little exposure to foreign currency exchange risk with respect to these sales. Substantially all of our 
sales  in  Japan  are  denominated  in  Japanese  yen.  From  time to  time,  we  may  enter  into  forward  exchange  contracts  to 
economically hedge a portion, but not all, of the existing and anticipated foreign currency denominated transactions expected 
to occur within 12 months. The change in fair value of the forward exchange contracts is recognized under the caption “Other 
(income) expense” in the Consolidated Statements of Operations for each reporting period. As of December 31, 2019 and 2018, 
we had seventeen and twenty-seven outstanding forward contracts with a total notional contract value of $38.9 million and 
$6.7 million, respectively. We do not use derivative financial instruments for trading or speculative purposes.

The Company has branch sales and service offices or subsidiaries in Korea, Japan, China, Taiwan, Singapore and in 
several  countries  in Europe.  Our  international  subsidiaries  and  branches  operate  primarily  using  local  functional 
currencies. Our exposure to foreign currency exchange rate fluctuations arise from intercompany balances between our U.S. 
headquarters and that of our foreign owned entities. Our intercompany balances are denominated in U.S. dollars. Since each 
foreign entity’s functional currency is generally denominated in its local currency, there is exposure to foreign exchange risk 
when the foreign entity’s intercompany balance is remeasured at a reporting date, resulting in transaction gains or losses. The 
intercompany  balance,  exposed  to  foreign  currency  risk,  as  of  December  31,  2019  was  approximately  $24.1  million.  A 
hypothetical  change  of  10%  in  the  relative  value  of  the  U.S.  dollar  versus  local  functional  currencies  could  result  in 
approximately $3.2 million in foreign currency exchange losses / (gains) which would be recorded as non-operating expense 
under the caption “Other income (expense), net” in our Consolidated Statements of Operations.  We cannot accurately predict 
future  exchange  rates  or  the  overall  impact  of  future  exchange  rate  fluctuations  on  our  business,  results  of  operations  and 
consolidated financial condition.

To manage the level of exposure to the risk of foreign currency exchange rate fluctuations, we enter into foreign currency 
forward exchange contracts to protect against a portion of our currency exchange risks associated with existing assets and 
liabilities. A foreign currency forward exchange contract acts as a hedge by increasing in value when underlying assets decrease 
in value or underlying liabilities increase in value due to changes in foreign exchange rates. Conversely, a foreign currency 
forward exchange contract decreases in value when underlying assets increase in value or underlying liabilities decrease in 
value  due  to  changes  in  foreign  exchange  rates.  These  forward  contracts  are  not designated  as  accounting  hedges,  so  the 
unrealized gains and losses are recognized in other income, net, in advance of the actual foreign currency cash flows with the 
fair value of these forward contracts being recorded as accrued liabilities or other current assets.

Item 8. 

Financial Statements and Supplementary Data.

The consolidated financial statements and related information required by this Item are set forth on the pages indicated 

in Item 15(a) of this Annual Report on Form 10-K.

Item 9. 

Changes in and Disagreements with Accountants on Accounting and Financial Disclosure.

None.

38

Item 9A.  Controls and Procedures.

Evaluation of Disclosure Controls and Procedures

We maintain disclosure controls and procedures that are designed to ensure that information we are required to disclose 
in reports that we file or submit under the Exchange Act is recorded, processed, summarized and reported within the time period
specified  in  SEC  rules  and  forms.  These  controls  and  procedures  are  also  designed  to  ensure  that  such  information  is 
accumulated and communicated to our management, including our principal executive officer and principal financial officer, 
as appropriate, to allow timely decisions regarding required disclosure. In designing and evaluating disclosure controls and 
procedures, we have recognized that any controls and procedures, no matter how well designed and operated, can provide only 
reasonable assurance of achieving the desired control objectives. Management is required to apply judgment in evaluating its 
controls and procedures.

We performed an evaluation under the supervision and with the participation of our management, including our principal 
executive officer and principal financial officer, to assess the effectiveness of the design and operation of our disclosure controls 
and procedures under the Exchange Act as of December 31, 2019. Based on that evaluation, our management, including our 
principal executive officer and principal financial officer, concluded that our disclosure controls and procedures were effective 
as of December 31, 2019 at the reasonable assurance level.

In accordance with the SEC’s published guidance, because the merger with Nanometrics closed in the fourth quarter of 
the year ended December 31, 2019, and considering it was a reverse merger with Rudolph as the accounting acquirer, we did 
not  have  sufficient  time  to  fully  incorporate  Nanometrics  into  our  internal  control  over  financial  reporting. Therefore,  we 
excluded Nanometrics from the evaluation of disclosure controls and procedures and the effectiveness of our internal control 
over financial reporting as of December 31, 2019.

Management’s Report on Internal Control Over Financial Reporting

Our management is responsible for establishing and maintaining adequate internal control over financial reporting, as 
such  term  is  defined  in  Exchange Act  Rules 13a-15(f)  and  15d-15(f).  Internal  control  over  financial  reporting  is  a  process 
designed  to  provide  reasonable  assurance  regarding  the  reliability  of  financial  reporting  and  the  preparation  of  financial 
statements for external purposes in accordance with accounting principles generally accepted in the United States of America. 
Under the supervision and with the participation of our management, including our principal executive officer and principal 
financial officer, we conducted an evaluation of the effectiveness of our internal control over financial reporting based on the 
framework in Internal Control — Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway 
Commission (2013 framework) (“COSO”). Based on our evaluation, our management concluded that our internal control over 
financial reporting was effective as of December 31, 2019.

In accordance with the SEC’s published guidance, because the merger with Nanometrics closed in the fourth quarter of 
the  year  ended  December  31,  2019,  management  excluded  Nanometrics  from  its  evaluation  of  the  effectiveness  of  the 
Company’s internal control over financial reporting as of December 31, 2019. Nanometrics constituted 26% of total assets as 
of December 31, 2019 and 22% of revenue for the year then ended. 

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. 
Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may be circumvented or 
deteriorate.

Attestation Report of the Registered Public Accounting Firm

Our consolidated financial statements as of and for the year ended December 31, 2019 have been audited by Ernst &
Young  LLP,  our  independent  registered  public  accounting  firm,  in  accordance  with  the  standards  of  the  Public  Company 
Accounting Oversight Board (United States). Ernst & Young LLP has also audited our internal control over financial reporting 
as of December 31, 2019, as stated in its attestation report included elsewhere in this Annual Report on Form 10-K.

As indicated in the accompanying Management’s Report on Internal Control Over Financial Reporting, management’s 
assessment  of  and  conclusion  on  the  effectiveness  of  internal  control  over  financial  reporting  did  not  include  the  internal 
controls of Nanometrics, which is included in the 2019 consolidated financial statements of the Company and constituted 26% 
of total assets as of December 31, 2019 and 22% of revenue for the year then ended. Our audit of internal control over financial 
reporting of the Company also did not include an evaluation of the internal control over financial reporting of Nanometrics.

39

Changes in Internal Control over Financial Reporting

There have been no changes in the Company’s internal control over financial reporting (as defined in Rule 13a-15(f) 
under the Exchange Act) that occurred during the Company’s quarter ended December 31, 2019 that have materially affected, 
or are reasonably likely to materially affect, its internal control over financial reporting.

Item 9B.  Other Information.

None.

40

PART III

Certain information required by Part III is omitted from this Annual Report on Form 10-K because we expect to file a 
definitive proxy statement within one hundred twenty (120) days after the end of our fiscal year pursuant to Regulation 14A 
(the “Proxy Statement”) for our Annual Meeting of Stockholders currently scheduled for May 12, 2020, and the information 
included in the Proxy Statement is incorporated herein by reference.

Item 10.   Directors, Executive Officers and Corporate Governance.

The information required by this Item with respect to directors and executive officers is included under the headings 
“Proposal One: Election of Directors,” “Executive Officers” and “Corporate Governance Principles and Practices” in the Proxy
Statement, which is incorporated herein by reference. Information regarding compliance with Section 16 of the Exchange Act 
is incorporated by reference to the information under the heading “Delinquent Section 16(a) Reports” in the Proxy Statement.

Code of Business Conduct and Ethics. We have adopted a code of business conduct and ethics that applies to our principal 
executive officer, principal financial officer and controller. This code of business conduct and ethics is posted on our internet 
website  address  at  http://investors.ontoinnovation.com.   We  will  post  on  our  website  any  amendment  to  or waiver  from  a 
provision of our code of business conduct and ethics as may be required, and within the time period specified, by applicable 
SEC rules.

Item 11. 

 Executive Compensation.

The information required by this Item is included under the headings “Executive Compensation,” “Compensation of 
Directors,”  “Compensation  Committee  Report  on  Executive  Compensation,”  “Stock  Ownership/Retention  Guidelines  for 
Directors” and “Compensation Committee Interlocks and Insider Participation” in the Proxy Statement, which is incorporated 
herein by reference.

Item 12. 

 Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters.

The information required by this Item is included under the headings “Security Ownership” and “Equity Compensation 

Plan Information” in the Proxy Statement, which is incorporated herein by reference.

Item 13. 

 Certain Relationships and Related Transactions, and Director Independence.

The information required by this Item is included under the headings “Related Persons Transactions Policy” and “Board 

Independence” in the Proxy Statement, which is incorporated herein by reference.

Item 14. 

 Principal Accounting Fees and Services.

The  information  required  by  this  Item  is  included  under the  heading  “Proposal 5:  Ratification  of Appointment

of Independent Registered Public Accounting Firm” in the Proxy Statement, which is incorporated herein by reference. 

41

Item 15.Exhibits and Financial Statement Schedule.

(a)

The following documents are filed as part of this Annual Report on Form 10-K:

1.

Financial Statements

PART IV

The consolidated financial statements and consolidated financial statement information required by 
this Item are included on pages F-1 through F-10 of this report. The Reports of Independent Registered Public 
Accounting Firm appear on pages F-2 through F-5 of this report.

2.

Financial Statement Schedule

See Index to financial statements on page F-1 of this report.

3.

Exhibits

Exhibits are as set forth in the “Exhibit Index”, provided below. Where so indicated, exhibits, which 

were previously filed, are incorporated by reference.

Exhibit 
No.
2.1

3.1

3.2

4.1+
4.2+
10.1

Exhibit Description

Agreement and Plan of Merger, dated as of 
June 23, 2019, by and among Nanometrics 
Incorporated, Rudolph Technologies, Inc. and 
PV Equipment Inc.
Amended and Restated Certificate of 
Incorporation of Onto Innovation Inc.
Amended and Restated Bylaws of Onto 
Innovation Inc.
Form of Common Stock Certificate
Description of Securities
Nanometrics Incorporated Amended and 
Restated 2003 Employee Stock Purchase Plan

File 
Number
000-13470

Date of First 
Filing
June 24, 2019

Exhibit 
No./Appendix 
Reference
2.1

001-39110 October 28, 2019

001-39110 January 27, 2020

3.2

3.1

Form
8-K

8-K

8-K

―
―
DEF14A

―
―
000-13470

―
―
April 4, 2016

―
―
Appendix 1

10.1.1 Form of Subscription Agreement Under the 

S-8

333-40866

June 24, 2019

4.1

Nanometrics Incorporated Amended and 
Restated 2003 Employee Stock Purchase Plan

10.2* Nanometrics Incorporated Amended and 

DEF14A

000-13470

April 4, 2017

Appendix B

Restated 2005 Equity Incentive Plan
10.2.1* Form of Performance-Based Restricted Stock 

Unit Agreement

8-K

000-13470 March 24, 2015

10.2.2* Nanometrics Incorporated Amended and 

10-K

000-13470 March 13, 2008

99.1

10.8

Restated 2005 Equity Incentive Plan forms of 
Stock Option and Restricted Stock Unit 
Agreements

10.3* Nanometrics Incorporated 2017 Executive

DEF14A

000-13470

April 4, 2017

Appendix A

Performance Bonus Plan

10.4* Rudolph Technologies, Inc. 2009 Stock Plan
10.4.1* Amended form of Employee Restricted Stock

DEFR14A
10-Q

000-27965
001-36226 August 3, 2017

May 8, 2009

Appendix A
10.12

Unit Purchase Agreement pursuant to the 
Rudolph Technologies, Inc. 2009 Stock Plan
10.5* Rudolph Technologies, Inc. 2018 Stock Plan
10.5.1* Form of Employee Performance Stock Unit 

Purchase Agreement pursuant to the Rudolph 
Technologies, Inc. 2018 Stock Plan

8-K
10-Q

001-36226 May 16, 2018
001-36226 August 2, 2018

10.1
10.1

42

Exhibit 
No.
10.5.2* Form of Employee Stock Option Agreement 

Exhibit Description

Form
10-Q

File 
Number
001-36226 August 2, 2018

Date of First 
Filing

Exhibit 
No./Appendix 
Reference
10.2

pursuant to the Rudolph Technologies, Inc. 
2018 Stock Plan

10.6* Compensation Arrangements with Named 

10.7*

Executive Officers
Form of Indemnification Agreement between 
the Nanometrics Incorporated and each of its 
directors and executive officers
Form of Indemnity Agreement
10.8*
10.9*
Form of Indemnification Agreement
10.10* General Severance Benefits and Change in 

Control Severance Benefits Agreement 
between Kevin Heidrich and Nanometrics 
Incorporated, dated May 19, 2015.
10.11* General Severance Benefits and Change in 

Control Severance Benefits Agreement 
between Janet Taylor and Nanometrics 
Incorporated, dated August 27, 2015.
10.12* General Severance Benefits and Change in 

Control Severance Benefits Agreement 
between Rollin Kocher and Nanometrics 
Incorporated, dated November 10, 2016.
Independent Contractor Agreement between 
Nanometrics Incorporated and S. Mark 
Borowicz, dated January 8, 2018.

10.13

8-K

8-K

8-K
8-K
8-K

000-13470 March 1, 2018

5.02

000-13470 February 20, 2013

10.1

June 24, 2019

001-36226
001-39110 November 6, 2019
000-13470 May 22, 2015

10.1
10.1
10.4

10-Q

000-13470 October 30, 2015

10.1

10-K

000-13470 March 3, 2017

10.22

10-K

000-13470 February 26, 2018

10.22

10.14* Employment Agreement between Pierre-Yves 

10-K

000-13470 February 26, 2018

10.20

Lesaicherre and Nanometrics Incorporated, 
dated November 27, 2017.

10.15* Retention Bonus Agreement between 

10-K

000-13470 February 26, 2018

10.23

Nanometrics Incorporated and Greg Swyt, 
dated December 18, 2017.

10.16* Retention Bonus Agreement between 

8-K

000-13470 November 6, 2018

10.1

Nanometrics and Greg Swyt, dated June 25, 
2018.

10.17* General Severance Benefits and Change in 

8-K

000-13470

July 26, 2019

10.1

Control Severance Benefits Agreement, dated 
July 25, 2019, between Nanometrics 
Incorporated and Greg Swyt.

10.18* Retention Bonus Agreement, dated September 

8-K

000-13470 September 9, 2019

10.1

6, 2019, between Nanometrics Incorporated 
and Greg Swyt.

10.19* General Severance Benefits and Change in 

10-Q

000-13470

May 1, 2019

10.1

Control Severance Benefits Agreement 
between Nanometrics Incorporated and James 
Barnhart, dated March 12, 2018.

10.20* Management Agreement, dated as of July 24, 
2000 by and between Rudolph Technologies, 
Inc. and Steven R. Roth as restated and 
amended on July 29, 2014.

10-Q

001-36226 August 6, 2014

10.2

10.21* Employment Agreement, dated as of November 

8-K

001-36226 November 9, 2015

10.1

9, 2015, by and between Rudolph 
Technologies, Inc. and Michael Plisinski.

43

Exhibit No.

Exhibit Description

10.22* Executive Change of Control Agreement, dated 

Form
10-Q

File 
Number
000-27965 November 6, 2009

Date of First 
Filing

Exhibit 
No./Appendix 
Reference
10.3

8-K

000-27965

July 25, 2011

10.5

S-1

333-86821 September 9, 1999

10.1

―
―

―

―

―

―

―
―

―

―

―

―

―
―

―

―

―

―

―
―

―

―

―

―

10.23

10.24

21.1+
23.1+

31.1+

31.2+

32.1+

32.2+

August 20, 2009, by and between Rudolph 
Technologies, Inc. and Robert A. Koch.
Amendment to Confirmation of Issuer Warrant 
Transaction, dated July 22, 2011, by and 
between Rudolph Technologies, Inc. and Credit 
Suisse International.
License Agreement, dated June 28, 1995, 
between the Rudolph Technologies Inc. and 
Brown University Research Foundation.
Subsidiaries.
Consent of Ernst & Young LLP, Independent 
Registered Public Accounting Firm.
Rule 13a-14(a) Certification of Chief 
Executive Officer of the Registrant pursuant to 
Section 302 of the Sarbanes-Oxley Act of 
2002.
Rule 13a-14(a) Certification of Chief Financial 
Officer of the Registrant pursuant to Section 
302 of the Sarbanes-Oxley Act of 2002.
Certification of the Chief Executive Officer 
pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002.
Certification of the Chief Financial Officer 
pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002.

101.INS Inline XBRL Instance Document
101.SCH Inline XBRL Taxonomy Extension Schema 

Document

101.CALInline XBRL Taxonomy Extension Calculation 

Linkbase Document

101.DEF Inline XBRL Taxonomy Extension Definition 

Linkbase Document

101.LABInline XBRL Taxonomy Extension Label 

Linkbase Document

101.PRE Inline XBRL Taxonomy Extension 

104

*

+

Presentation Linkbase Document
Cover Page Interactive Data File (formatted in 
inline XBRL and contained in Exhibit 101)
Management contract, compensatory plan or 
arrangement.
Filed herewith.

44

ONTO INNOVATION INC.

INDEX TO CONSOLIDATED FINANCIAL STATEMENTS AND
FINANCIAL STATEMENT SCHEDULE

Consolidated Financial Statements:

Reports of Independent Registered Public Accounting Firm........................................................................

Consolidated Statements of Operations for the years ended December 31, 2019, 2018 and 2017 ...............

Consolidated Statements of Comprehensive Income for the years ended December 31, 2019, 2018 and 2017

Consolidated Balance Sheets as of December 31, 2019 and 2018................................................................

Consolidated Statements of Cash Flows for the years ended December 31, 2019, 2018 and 2017..............

Consolidated Statements of Stockholders’ Equity for the years ended December 31, 2019, 2018 and 2017

Notes to the Consolidated Financial Statements...........................................................................................

Consolidated Financial Statement Schedule:

Schedule of Valuation and Qualifying Accounts...........................................................................................

Page

F-2

F-6

F-7

F-8

F-9

F-10
F-11

F-44

F-1

Report of Independent Registered Public Accounting Firm

To the Shareholders and the Board of Directors of Onto Innovation Inc.

Opinion on the Financial Statements

We  have  audited  the  accompanying  consolidated  balance  sheets  of  Onto  Innovation  Inc.,  formerly  Rudolph 
Technologies, Inc.  (the  Company),  as  of  December  31,  2019  and  2018,  the  related  consolidated  statements  of  operations, 
comprehensive income, shareholders’ equity and cash flows for each of the three years in the period ended December 31, 2019, 
and  the  related  notes and financial  statement  schedule  listed  in  the  Index  at  Item  15(a) (collectively  referred  to  as  the 
“consolidated financial statements”). In our opinion, the consolidated financial statements present fairly, in all material respects, 
the financial position of the Company at December 31, 2019 and 2018, and the results of its operations and its cash flows for 
each  of  the  three  years  in  the  period  ended  December  31,  2019,  in  conformity  with  U.S.  generally  accepted  accounting 
principles.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United 
States)  (PCAOB),  the  Company’s  internal  control  over  financial  reporting  as  of  December  31,  2019,  based  on  criteria 
established in Internal Control-Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway 
Commission and our report dated February 25, 2020 expressed an unqualified opinion thereon.

Basis for Opinion

These  financial  statements  are  the  responsibility  of  the  Company’s  management. Our  responsibility  is  to  express  an 
opinion on the Company’s financial statements based on our audits. We are a public accounting firm registered with the PCAOB 
and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the 
applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.

We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and 
perform  the  audit  to  obtain  reasonable  assurance  about  whether  the financial  statements  are  free  of  material  misstatement, 
whether due to error or fraud. Our audits included performing procedures to assess the risks of material misstatement of the 
financial statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures 
included examining, on a test basis, evidence regarding the amounts and disclosures in the financial statements. Our audits also 
included evaluating the accounting principles used and significant estimates made by management, as well as evaluating the 
overall presentation of the financial statements. We believe that our audits provide a reasonable basis for our opinion.

Critical Audit Matters

The  critical  audit  matters  communicated  below  are  matters  arising  from  the  current  period  audit  of  the  financial 
statements that were communicated or required to be communicated to the audit committee and that: (1) relate to accounts or 
disclosures that are material to the financial statements and (2) involved our especially challenging, subjective or complex 
judgments. The communication of critical audit matters does not alter in any way our opinion on the consolidated financial 
statements, taken as a whole, and we are not, by communicating the critical audit matters below, providing separate opinions 
on the critical audit matters or on the accounts or disclosures to which they relate.

Excess Inventory Reserve

Description of the 
Matter

As  described  in  Note  9  to  the  consolidated  financial  statements,  the  Company  had  net inventories  of 
$176.1 million as of December 31, 2019, which included materials of $108.5 million, work-in-progress 
of  $42.7  million,  and  finished  goods  of  $24.9  million.  The  valuation  of  certain  of  the  Company’s
inventory  is  subject  to  risks  associated  with  supply  and  demand.  As  described  in  Note  2  to  the 
consolidated  financial  statements,  the  Company  maintains  reserves  for  excess  and  obsolete  inventory 
equal to the difference between the cost of inventory and its estimated net realizable value based upon 
assumptions about historical and future demand for the Company’s products and market conditions.

Auditing  management’s  estimate  of  the  excess  and  obsolete  inventory  reserve  was  subjective  and 
required significant judgment as the excess and obsolete inventory reserve is sensitive to changes in the 
Company’s  operations  and  assumptions  used  to  estimate  the  reserve  including  management’s 
assumptions with regards to product life-cycles, product demand and market conditions, which includes 
historical  usage,  expected  future  usage,  on-hand  quantities  of  individual  materials,  and  anticipated 
engineering design changes or advancements.

F-2

How We 
Addressed the 
Matter in Our 
Audit

We obtained an understanding, evaluated the design and tested the operating effectiveness of controls 
over the Company’s excess and obsolete inventory reserve process, including those over the validity and 
reasonableness of the data and assumptions used in estimating the excess and obsolete inventory reserve.  

To  test  the  adequacy  of  the  Company’s  excess  and  obsolete  inventory  reserve,  we  performed  audit 
procedures  that  included,  among  others,  assessing  methodologies  and  assumptions  used,  testing  the 
completeness  and  accuracy of  the  underlying  data  used  by  management  in  its  analysis  including  the 
usage of historical materials, considering potential product obsolescence, observing physical inventory 
on-hand and inspecting historical gross margins to assess whether any items are being sold at a loss or
lower margins  that  may  need  to  be  included  in  the  reserve.  We  assessed  the  historical  accuracy  of 
management’s estimated excess and obsolete inventory reserve and performed sensitivity analyses to 
evaluate changes in the estimate that result from changes in the Company’s significant assumptions. 

Accounting for Acquisition of Nanometrics Incorporated

Description of the 
Matter

In  October  2019,  Rudolph  Technologies,  Inc.  (Rudolph)  completed  its  acquisition  of  Nanometrics 
Incorporated (Nanometrics) for net consideration of $890.1 million, including identified intangible assets 
of  $374.9  million,  which  principally  consisted  of  developed  technology,  in-process  research  and 
development and customer relationships, as disclosed in Note 3 to the consolidated financial statements. 
The transaction was accounted for as a business combination with Rudolph as the accounting acquirer. 

How We 
Addressed the 
Matter in Our 
Audit

Auditing the fair value of intangible assets was complex due to the sensitivity of the respective fair values 
to  the  significant  underlying assumptions.  The  Company  engaged  a  specialist  that  used  an  income 
approach which is based on a discounted cash flow model to measure the intangible assets. The significant 
assumptions used to estimate the fair value of the intangible assets included discount rates and revenue 
growth  rates.  These  significant  assumptions  are  forward  looking  and  could  be  affected  by  future 
economic  and  market  conditions.  The  determination  of  the  accounting  acquirer  is  a  subjective 
determination  where  management  applied  judgment  in  evaluating  the  relevant  criteria  to  make  this 
determination.

We tested the Company’s controls over its accounting for the Nanometrics acquisition. Our tests included 
controls  over  the  determination  of the  accounting  acquirer  and  the  estimation  process  supporting  the 
recognition and measurement of the intangible assets, including the significant assumptions used. 

To test the estimated fair value of the intangible assets, we performed audit procedures that included, 
among  others,  evaluating  the  Company’s  use  of  the  income  approach  and  testing  the  significant 
assumptions  used  in  the  model,  including  the  completeness  and  accuracy  of  the  underlying  data.  We 
involved our valuation specialists to assist with our evaluation of the methodology used by the Company 
and  significant  assumptions  included  in  the  fair  value estimates.  For  example,  we  compared  the 
significant assumptions to current industry, market and economic trends; to the assumptions used to value 
similar  assets  in  the  marketplace;  and  to  the  historical  results  of  the  acquired  business  and  to  other 
guidelines  used  by  companies  within  the  same  industry.  To  test  the  determination  of  the  accounting 
acquirer, we performed audit procedures that included, among others, inspecting the analysis prepared 
by the Company on this topic and evaluating the accuracy of the information and the judgments made by 
management  considering  historical  information,  the  merger  agreement  and  other  relevant  information 
relating to the terms of the merger and the prospective plans of the Company after the merger.

/s/ Ernst & Young LLP

We have served as the Company’s auditor since 2008.

Iselin, New Jersey
February 25, 2020

F-3

Report of Independent Registered Public Accounting Firm

To the Shareholders and the Board of Directors of Onto Innovation Inc.

Opinion on Internal Control Over Financial Reporting

We have audited Onto Innovation Inc.’s (formerly Rudolph Technologies, Inc.) internal control over financial reporting as of
December  31,  2019,  based  on  criteria  established  in  Internal  Control—Integrated  Framework  issued  by  the  Committee  of 
Sponsoring  Organizations  of  the  Treadway  Commission  (2013  framework) (the  COSO  criteria).  In  our  opinion,  Onto 
Innovation Inc. (the Company) maintained, in all material respects, effective internal control over financial reporting as of 
December 31, 2019, based on the COSO criteria.

As  indicated  in  the  accompanying  Management’s  Report  on  Internal  Control  Over  Financial  Reporting,  management’s 
assessment  of  and  conclusion  on  the  effectiveness  of  internal  control  over  financial  reporting  did  not  include  the  internal 
controls of Nanometrics Incorporated, which is included in the 2019 consolidated financial statements of the Company and 
constituted 26% of total assets as of December 31, 2019 and 22% of revenue for the year then ended. Our audit of internal 
control over financial reporting of the Company also did not include an evaluation of the internal control over financial reporting 
of Nanometrics Incorporated.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB),  the  consolidated  balance  sheets  of  the  Company  as  of  December  31,  2019  and  2018,  the  related  consolidated 
statements of operations, comprehensive income, stockholders’ equity and cash flows for each of the three years in the period 
ended December 31, 2019, and the related notes and financial statement schedule listed in the Index at Item 15(a) and our report 
dated February 25, 2020 expressed an unqualified opinion thereon.

Basis for Opinion

The  Company’s  management  is  responsible  for  maintaining  effective  internal  control  over  financial  reporting  and  for  its 
assessment of the effectiveness of internal control over financial reporting included in the accompanying Management’s Report 
on Internal Control Over Financial Reporting. Our responsibility is to express an opinion on the Company’s internal control 
over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be 
independent  with  respect  to  the  Company  in  accordance  with  the  U.S.  federal  securities  laws  and  the applicable  rules  and 
regulations of the Securities and Exchange Commission and the PCAOB.

We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the 
audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all 
material respects. 

Our audit included obtaining an understanding of internal control over financial reporting, assessing the risk that a material
weakness exists, testing and evaluating the design and operating effectiveness of internal control based on the assessed risk, 
and performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a 
reasonable basis for our opinion.

Definition and Limitations of Internal Control Over Financial Reporting

A  company’s internal  control  over  financial  reporting  is  a  process  designed  to  provide  reasonable  assurance  regarding  the 
reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally 
accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures 
that  (1)  pertain  to  the  maintenance  of  records  that,  in  reasonable  detail,  accurately  and  fairly  reflect  the  transactions  and 
dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit 
preparation  of  financial  statements  in  accordance  with  generally  accepted  accounting  principles,  and  that  receipts  and 
expenditures  of  the  company are  being  made  only  in  accordance  with  authorizations  of  management  and  directors  of  the 
company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or 
disposition of the company’s assets that could have a material effect on the financial statements.

F-4

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, 
projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.

/s/ Ernst & Young LLP

Iselin, New Jersey
February 25, 2020

F-5

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF OPERATIONS
(In thousands, except per share data)

Revenue .....................................................................................
Cost of revenue..........................................................................
Gross profit...........................................................................

Operating expenses:

Research and development...................................................
Sales and marketing .............................................................
General and administrative...................................................
Amortization.........................................................................
Patent litigation income........................................................
Total operating expenses.................................................
Operating income (loss).............................................................
Interest income, net....................................................................
Other income (expense), net ......................................................
Income (loss) before provision (benefit) for income taxes...
Provision (benefit) for income taxes..........................................
Net income.................................................................................
Earnings per share:

Basic.....................................................................................
Diluted..................................................................................

Weighted average number of shares outstanding:

Basic.....................................................................................
Diluted..................................................................................

$

$

$
$

2019

Year Ended December 31
2018

$

305,896
170,868
135,028

$

273,784
125,505
148,279

2017

255,098
120,503
134,595

48,358
28,251
53,017
10,445
—
140,071
(5,043)
3,666
780
(597)
(2,507)
1,910

0.06
0.06

29,729
30,007

$

$
$

39,953
22,010
33,698
1,534
—
97,195
51,084
2,206
56
53,346
8,250
45,096

1.77
1.74

25,470
25,895

$

$
$

37,694
20,795
27,878
1,940
(13,000)
75,307
59,288
971
(457)
59,802
26,893
32,909

1.30
1.27

25,325
25,865

The accompanying notes are an integral part of these consolidated financial statements.

F-6

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME
(In thousands)

Net income.................................................................................
Other comprehensive income (loss), net of tax: ........................
Change in net unrealized gains (losses) on investments.......
Change in currency translation adjustments.........................
Total comprehensive income .....................................................

$

$

2019

Year Ended December 31,
2018

2017

1,910

$

45,096

$

32,909

(44)
709
2,575

$

136
(194)
45,038

$

(89)
1,663
34,483

The accompanying notes are an integral part of these consolidated financial statements.

F-7

ONTO INNOVATION INC.

CONSOLIDATED BALANCE SHEETS
(In thousands, except per share data)

Current Assets:

ASSETS

Cash and cash equivalents.................................................................................
Marketable securities.........................................................................................
Accounts receivable, less allowance of $1,247 in 2019 and $691 in 2018........
Inventories.........................................................................................................
Prepaid expenses and other current assets.........................................................
Total current assets.......................................................................................
Property, plant and equipment, net .........................................................................
Goodwill .................................................................................................................
Identifiable intangible assets, net............................................................................
Deferred income taxes ............................................................................................
Other assets.............................................................................................................
Total assets ...................................................................................................

LIABILITIES AND STOCKHOLDERS’ EQUITY

Current liabilities:

Accounts payable ..............................................................................................
Accrued liabilities .............................................................................................
Deferred revenue ...............................................................................................
Other current liabilities......................................................................................
Total current liabilities .................................................................................
Deferred and other tax liabilities.............................................................................
Other non-current liabilities....................................................................................
Total liabilities .............................................................................................
Commitments and contingencies (Note 10)............................................................
Stockholders’ equity:

Preferred stock, $0.001 par value, 3,000 and 4,021 shares authorized, no shares
issued and outstanding at December 31, 2019 and 2018, respectively. ..........
Common stock, $0.001 par value, 97,000 and 80,420 shares authorized, 50,184

and 24,855 issued and outstanding at December 31, 2019 and 2018,
respectively.....................................................................................................
Additional paid-in capital..................................................................................
Accumulated other comprehensive loss ............................................................
Accumulated deficit ..........................................................................................
Total stockholders’ equity ............................................................................
Total liabilities and stockholders’ equity......................................................

$

$

$

$

December 31,
2019

December 31,
2018

$

$

$

130,673
189,563
123,656
176,134
21,638
641,664
98,420
307,148
371,953
1,456
27,939
1,448,580

27,738
26,204
12,629
19,172
85,743
67,040
31,771
184,554

112,388
62,684
64,194
96,820
14,821
350,907
18,874
22,495
7,448
12,810
5,506
418,040

16,981
13,700
6,767
7,543
44,991
—
11,161
56,152

—

—

50
1,269,437
(598)
(4,863)
1,264,026
1,448,580

$

31
369,893
(1,263)
(6,773)
361,888
418,040

The accompanying notes are an integral part of these consolidated financial statements.

F-8

ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF CASH FLOWS
(In thousands)

Year Ended December 31,
2018

2017

2019

Cash flows from operating activities:

Net income .............................................................................................................................

$

1,910 $ 45,096 $ 32,909

Adjustments to reconcile net income to net cash and cash equivalents provided by operating 
activities:

Depreciation...........................................................................................................................
Amortization of intangibles....................................................................................................
Share-based compensation .....................................................................................................
Acquired inventory step-up amortization...............................................................................
Provision for doubtful accounts and inventory valuation.......................................................
Deferred income taxes ...........................................................................................................
Other, net................................................................................................................................
Change in operating assets and liabilities net of assets acquired and liabilities assumed in merger:

Accounts receivable .........................................................................................................
Income taxes.....................................................................................................................
Inventories........................................................................................................................
Prepaid expenses and other assets ....................................................................................
Accounts payable .............................................................................................................
Accrued and other liabilities.............................................................................................
Net cash and cash equivalents provided by operating activities .................................

Cash flows from investing activities:

Purchases of marketable securities.........................................................................................
Proceeds from sales of marketable securities.........................................................................
Purchases of property, plant and equipment...........................................................................
Cash acquired from merger ....................................................................................................
Cash advance on convertible note receivable.........................................................................
Purchase of intangible assets..................................................................................................
Net cash and cash equivalents provided by (used in) investing activities...................

Cash flows from financing activities:

Redemption of stock warrants.............................................................................................
Purchases of common stock ................................................................................................
Tax payments related to shares withheld for share-based compensation plans ...................
Payment of contingent consideration for acquired business................................................
Issuance of shares through share-based compensation plans ..............................................
Net cash and cash equivalents used in financing activities.........................................
Effect of exchange rate changes on cash and cash equivalents....................................................
Net increase in cash and cash equivalents....................................................................................
Cash and cash equivalents at beginning of year...........................................................................
Cash and cash equivalents at end of year.....................................................................................
Supplemental disclosure of cash flow information:

5,965
10,445
10,585
15,370
11,202
(4,116)
2,098

(9,721)
7,648
(9,338)
(5,079)
(12,138)
(6,685)
18,146

4,848
1,534
6,062
—
3,335
2,163
1,265

706
1,056
(31,545)
(3,101)
3,512
163
35,094

3,990
1,940
5,670
—
3,608
17,207
590

430
(4,727)
(4,218)
(1,686)
3,198
5,260
64,171

(127,462)
94,486
(6,802)
43,882
—
—
4,104

(140,018)
186,332
(7,542)
—
(5,000)
—
33,772

(164,661)
143,349
(10,210)
—
—
(1,000)
(32,522)

—
(744)
(2,540)
(1,758)
844
(4,198)
233
18,285
112,388

(1,025)
—
(1,358)
(792)
623
(2,552)
814
29,911
37,859
$ 130,673 $ 112,388 $ 67,770

—
(21,069)
(1,921)
(1,543)
624
(23,909)
(339)
44,618
67,770

Income taxes paid (received), net...........................................................................................
Litigation settlement received ................................................................................................

$
$

(3,848) $
— $

4,301 $ 14,605
— $ 13,000

The accompanying notes are an integral part of these consolidated financial statements.

F-9

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF STOCKHOLDERS’ EQUITY
For the years ended December 31, 2019, 2018 and 2017 
(In thousands)

Balance at December 31, 2016 .....................
Issuance of shares through share-based

compensation plans, net .......................
Net income ..............................................
Share-based compensation ......................
Cumulative effect of a change in accounting
for share-based compensation .............

Share-based compensation plan

withholdings ........................................
Redemption of stock warrants.................
Currency translation ................................
Unrealized loss on investments ...............
Balance at December 31, 2017 .....................
Issuance of shares through share-based

compensation plans, net .......................
Repurchase of common stock..................
Net income ..............................................
Share-based compensation ......................
Share-based compensation plan

withholdings ........................................
Currency translation ................................
Unrealized gain on investments...............
Balance at December 31, 2018 .....................
Effect of merger.......................................
Issuance of shares through share-based

compensation plans, net .......................
Repurchase of common stock..................
Net income ..............................................
Share-based compensation ......................
Share-based compensation plan

withholdings ........................................
Currency translation ................................
Unrealized loss on investments ...............
Balance at December 31, 2019 .....................

Common Stock

Shares
25,033

Amount
31
$

Additional 
Paid-in
Capital
$ 381,189

Accumulated
Other
Comprehensive
Loss

$

(2,779) $

Accumulated
Deficit
(84,706) $ 293,735

Total

348
—
—

—

(47)
82
—
—
25,416

358
(853)
—
—

(66)
—
—
24,855
25,060

377
(30)
—
—

(78)
—
—
50,184

$

1
—
—

—

—
—
—
—
32

—
(1)
—
—

—
—
—
31
19

—
—
—
—

—
—
—
50

623
—
5,670

72

(1,358)
—
—
—
386,196

624
(21,068)
—
6,062

(1,921)
—
—
369,893
890,112

2,131
(744)
—
10,585

—
—
—

—

—
—
1,663
(89)
(1,205)

—
—
—
—

—
(194)
136
(1,263)
—

—
—
—
—

—
32,909
—

624
32,909
5,670

(72)

—

—
—
—
—
(51,869)

—
—
45,096
—

—
—
—
(6,773)
—

—
—
1,910
—

(1,358)
—
1,663
(89)
333,154

624
(21,069)
45,096
6,062

(1,921)
(194)
136
361,888
890,131

2,131
(744)
1,910
10,585

(2,540)
—
—
$ 1,269,437

$

—
709
(44)
(598) $

—
—
—

(2,540)
709
(44)
(4,863) $ 1,264,026

The accompanying notes are an integral part of these consolidated financial statements

F-10

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS
(In thousands, except per share data)

1.

Organization and Nature of Operations:

Onto  Innovation  Inc.  (“Onto  Innovation”  or  the  “Company”)  is  a  worldwide  leader  in  the  design,  development, 
manufacture and support of process control tools that perform macro-defect inspections and metrology, lithography systems, 
and process control analytical software used by semiconductor and advanced packaging device manufacturers. The Company’s 
products are also used in a number of other high technology industries including: silicon wafer substrates; light emitting diode 
(“LED”); vertical-cavity surface-emitting laser (“VCSEL”); micro-electromechanical system (“MEMS”); CMOS image sensor 
(“CIS”); power device; RF filter; data storage; and certain industrial and scientific applications.  The Company provides process 
and  yield  management  solutions  used  in  bare  silicon  wafer  production  and  wafer processing  facilities,  often  referred  to  as 
“front-end”  manufacturing  and  device  packaging  and  test  facilities, (or  “back-end”  manufacturing),  respectively  through  a 
portfolio of standalone systems for macro-defect inspection, packaging lithography, probe card test and analysis, as well as 
transparent and opaque thin film measurements. Our automated and integrated metrology systems measure critical dimensions, 
device structures, topography, shape, and various thin film properties, including three-dimensional features and film thickness, 
as well as optical, electrical and material properties. Our primary area of focus are products that provide critical yield-enhancing 
information, which is used by microelectronic device manufacturers to drive down costs and to decrease the time to market of 
their devices. All of Onto Innovation’s systems feature sophisticated software and production-worthy automation. In addition, 
the Company’s advanced process control software portfolio includes powerful solutions for standalone tools, groups of tools, 
factory-wide,  and  enterprise-wide  suites  to  enhance  productivity  and  achieve  significant  cost  savings.  Onto  Innovation’s 
systems are backed by worldwide customer service and applications support. The Company has branch sales and service offices 
or subsidiaries in Korea, Japan, China, Taiwan, Singapore and in several countries in Europe. The Company operates in a single 
reportable segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging 
facilities. 

Basis  of  Presentation.  As  further  discussed  in  Note  3  of  Notes  to  the  Consolidated  Financial  Statements,  Rudolph 
Technologies, Inc. (“Rudolph”) and Nanometrics Incorporated (“Nanometrics”) completed a merger effective October 25, 2019 
(the “Merger”).  Upon consummation of the Merger, the combined company was renamed Onto Innovation.  The Merger was 
accounted for as a reverse acquisition where Rudolph was the accounting acquirer and Nanometrics was the legal acquirer in 
accordance with Accounting Standards Codification (“ASC”) Topic 805, “Business Combinations” (“ASC 805”).  Accordingly, 
Rudolph’s historical results of operations replaced the Nanometrics historical results of operations for all periods prior to the 
merger.  Specifically, the accompanying Consolidated Financial Statements for all periods prior to the Merger are those of 
Rudolph and for the period after the Merger, also include Nanometrics.  The Consolidated Financial Statements reflect the 
assets and liabilities of Rudolph at historical cost basis and the assets and liabilities of Nanometrics are reflected at fair value 
under the acquisition method.  While Rudolph applied the acquisition method of accounting to Nanometrics, the legal capital 
in the current and prior periods has been retroactively adjusted to reflect the legal capital of Nanometrics.  Accordingly, earnings 
per share has been retroactively restated for periods prior to the merger date.

Reclassifications. In conjunction with the Merger, the Company assessed the need to realign its financial statement presentation 
and  certain  income  statement  classifications  were  adjusted  with  prior  periods  reclassified  to  conform  with  current  period 
presentation. The changes made were as follows:

• Amounts related to sales and marketing are now presented on a separate line on the Consolidated Statements of 

Operations and were previously reported under the caption “Selling, general and administrative.”

• Amounts related to applications engineering are now presented under the caption, “Sales and marketing” on the 
Consolidated  Statements  of  Operations  and  were  previously  reported  under  the  caption  “Research  and 
development.”
Certain line items on the prior period Consolidated Balance Sheet were combined to conform to current period 
presentation.  For  additional  information  on  the  Company’s  balance  sheet  details,  see  Note  9  of  Notes  to  the 
Consolidated Financial Statements.

•

F-11

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

2.

Summary of Significant Accounting Policies: 

Consolidation. The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries.
All intercompany accounts and transactions have been eliminated.

Revenue Recognition. Revenue is recognized when control of the promised goods or services are transferred to the Company’s
customers in an amount that reflects the consideration the Company expects to be entitled to receive in exchange for those 
goods or services. The Company accounts for a contract when it has approval and commitment from both parties, the rights of 
the  parties  and  payment  terms  are  identified,  the  contract  has  commercial  substance  and  collectability  of  consideration  is 
probable.

The Company has elected to account for shipping and handling activities as the fulfillment of a promise to transfer goods 
to  the  customer  and  therefore  records  these  activities  under  the  caption  “Cost  of  revenue.”  Sales  tax  and  any  other  taxes 
collected concurrent with revenue producing activities are excluded from revenue. Incidental items that are immaterial in the 
context of the contract are recognized as expense. These accounting policy elections are consistent with the manner in which 
the Company has historically recorded these items.

Contracts with customers may include multiple performance obligations. For such arrangements, the Company allocates 
revenue  to  each  performance  obligation  based  on  its  relative  standalone  selling  price. The  Company  generally  determines 
standalone selling prices based on the prices charged to customers or the expected cost-plus margin.

Systems and Software Revenue

Revenue from systems is recognized when the Company transfers control of the product to the customer. To indicate 
transfer of control, the Company must have a present right to payment, legal title must have passed to the customer and the 
customer must have the significant risks and rewards of ownership. The Company generally transfers control for system sales 
when the customer or the customer’s agent picks up the system at the Company’s facility. Payment for the majority of the 
Company’s systems have 80-90% of the invoice amount due within 30 days and the remaining amount due upon completion 
of installation, recalibration and qualification by the customer. The Company provides an assurance warranty on its systems 
for a period of twelve to fourteen months against defects in material and workmanship. The Company provides for the estimated 
cost of product warranties at the time revenue is recognized.

Depending on the terms of the systems arrangement, the Company may also defer the recognition of a portion of the 
consideration expected to be received because the Company has to satisfy a future obligation (e.g., installation, training and 
extended warranties). The Company uses an observable price to determine the standalone selling price for separate performance 
obligations or a cost-plus margin approach when one is not available.

Revenue from software licenses provides the customer with a right to use the software as it exists when made available 
to the customer. Revenue from software licenses are recognized upfront at the point in time when the software is made available 
to the customer. Revenue from licensing support and maintenance is recognized as the support and maintenance are provided, 
which is over the contract period. Payment for software licensing, support and maintenance is generally due in 30 days.

Parts Revenue

Revenue from parts is recognized when the Company transfers control of the product, which typically occurs when the 

Company ships the product from its facilities to the customer. Payment for parts is generally due in 30 days.

Services Revenue

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
the Company’s assurance warranty on its products, service labor, consulting and training. Revenue from service contracts is 
recognized ratably over the term of the service contract. Revenue from service labor, consulting and training is recognized as 
services are performed. Payment for services is generally due in 30 days. Revenue from installation services is recognized at a 
point in time when installation is complete. 

F-12

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Practical Expedients

The Company generally expenses sales commissions when incurred because the amortization period is one year or less. 

These costs are recorded within selling, general and administrative expenses.

The Company does not adjust the amount of consideration for the effects of a significant financing component as the 

payment terms are generally one year or less.

The Company does not disclose the value of remaining performance obligations for contracts with an original expected 
length of one year or less and contracts for which the Company recognizes revenue in the amount to which it has the right to 
invoice.

For additional information on the Company’s revenue recognition, see Note 11 of Notes to the Consolidated Financial 

Statements.

Business Combinations.  We account for business combinations under the acquisition method of accounting, which requires 
us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date fair values. 
While we use our best estimates and assumptions to accurately value assets acquired and liabilities assumed at the acquisition 
date as well as contingent consideration, where applicable, our estimates are inherently uncertain and subject to refinement. As 
a result, during the measurement period, which may be up to one year from the acquisition date, we record adjustments to the 
assets acquired and liabilities assumed with the corresponding offset to goodwill. Upon the conclusion of the measurement 
period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, any subsequent 
adjustments are recognized in our consolidated statements of operations. Accounting for business combinations requires our 
management  to  make  significant  estimates  and  assumptions,  especially  at  the  acquisition  date  including  our  estimates  for 
intangible  assets,  contractual  obligations  assumed,  restructuring  liabilities,  pre-acquisition  contingencies,  and  contingent 
consideration,  where  applicable. Although  we  believe  the  assumptions  and  estimates  we  have  made  in  the  past  have  been 
reasonable and appropriate, they are based, in part, on historical experience and information obtained from the management of 
the acquired companies and are inherently uncertain. Estimates in valuing certain acquired intangible assets under the income 
approach include growth in future expected cash flows from product sales, acquired technologies, technology obsolescence 
rates, estimated cash flows from the projects when completed and discount rates. Unanticipated events and circumstances may 
occur that may affect the accuracy or validity of such assumptions, estimates or actual results.

For additional information on the Company’s business combinations, see Note 3 of Notes to the Consolidated Financial 

Statements.

Estimates.  The preparation of financial statements in conformity with accounting principles generally accepted in the United 
States  of America  requires  management  to  make  estimates  and  assumptions  that  affect  the  reported  amounts  of  assets  and 
liabilities and disclosure of contingent assets and liabilities as of the date of the financial statements and the reported amounts 
of revenue and expenses during the reporting period. Significant estimates made by management include the allowances for 
doubtful accounts and convertible notes receivable, excess and obsolete inventory, fair value of assets acquired and liabilities 
assumed in a business combination, recoverability and useful lives of property, plant and equipment and identifiable intangible 
assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including 
litigation  reserves  and  share-based  payments  and  liabilities  for  tax  uncertainties.  Actual  results  could  differ  from  those 
estimates.

Cash  and  Cash  Equivalents.  Cash  and  cash  equivalents  include  cash  and  highly  liquid  debt  instruments  with  original 
maturities of three months or less when purchased.

Marketable Securities. The Company determined that all of its investment securities are to be classified as available-for-sale. 
Available-for-sale debt securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity 
under the caption “Accumulated other comprehensive loss.” Realized gains and losses and, interest and dividends on available-
for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets 
regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio 
to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether 

F-13

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit 
quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated 
recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-
for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on 
marketable securities.

For additional information on the Company’s marketable securities, see Note 5 of Notes to the Consolidated Financial 

Statements.

Allowance for Doubtful Accounts.  The Company evaluates the collectability of accounts receivable based on a combination 
of factors. Where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial 
obligation, the Company records a specific allowance against amounts due, thereby reducing the net recognized receivable to 
the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances 
for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the 
current business environment and historical experience.

Inventories. Inventories are stated at the lower of cost or net realizable value.  Net realizable value is the estimated selling 
prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  Cost is generally 
determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. The Company reviews 
and sets standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to approximate 
actual costs. 

The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves 
when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions 
about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated 
for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been 
established, it is maintained until the item to which it relates is scrapped or sold. The Company regularly evaluates its ability 
to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted 
sales of usage, product end-of-life dates, estimated current and future market values and new product introductions. When 
recorded, reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual 
demand for the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, 
additional  reserves  may  be  required.    Charges  to  Cost  of  revenue  for  excess  and  obsolete  inventories  totaled  $10,841  in 
2019.
Included  in  this  amount  is  a  charge  of $5,945  recorded  in  the  fourth  quarter  related  to  excess  inventory  from  a 
deemphasized product line and the rationalization of service inventory after the Merger.   In 2018 and 2017, the Company 
recorded charges of $3,042 and $3,833, respectively.

Property,  Plant  and  Equipment. Property,  plant  and  equipment  are  stated  at  cost.  Depreciation  of  property,  plant  and 
equipment is computed using the straight-line method over the estimated useful lives of the assets, which are five to twenty-
two years for buildings, three to ten years for machinery and equipment, three to ten years for furniture and fixtures, three years 
for computer equipment, and three to seven years for software. Leasehold improvements are amortized using the straight-line 
method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are 
expensed as incurred and major renewals and betterments are capitalized.

F-14

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Impairment  of  Long-Lived Assets.    Long-lived  assets,  such  as  property,  plant,  and  equipment,  and  identifiable  acquired 
intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate 
that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a 
comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the 
asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized in the 
amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted 
cash flows. For the year ended December 31, 2019, there was an impairment to an item in property, plant and equipment of 
$507, which was recorded in general and administrative expenses in the Consolidated Statements of Operations.  There were 
no impairments of long-lived assets for the years ended December 31, 2018 and 2017.  

Goodwill and Intangible Assets. Intangible assets with finite useful lives are amortized using the straight-line method over 
their estimated useful lives. Goodwill and indefinite lived assets are tested for impairment on an annual basis or when an event 
or  changes  in  circumstances  indicate  that  its  carrying value  may  not  be  recoverable.  Goodwill  impairment  is  tested  at  the 
reporting unit level, which is defined as an operating segment or one level below the operating segment.  The Company has 
one operating segment. No goodwill impairment occurred in 2019, 2018, or 2017. Goodwill is reviewed for impairment using 
either a qualitative assessment or a quantitative goodwill impairment test. If the Company chooses to perform a qualitative 
assessment and determine the fair value more likely than not exceeds the carrying value, no further evaluation is necessary. 
When the Company performs the quantitative goodwill impairment test, it compares fair value to carrying value, which includes 
goodwill. If fair value exceeds carrying value, the goodwill is not considered impaired. If the carrying value is higher than the 
fair value, the difference would be recognized as an impairment loss.

For  additional  information  on  the  Company’s  goodwill  and  purchased  intangible  assets,  see  Note 6  of  Notes  to  the 

Consolidated Financial Statements.

Concentration of Credit Risk. Financial instruments, which potentially subject the Company to concentrations of credit risk, 
consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing 
credit  evaluations  of  its  customers  and  generally  does  not  require  collateral  for  sales  on  credit.  The  Company  maintains 
allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher 
credit quality issuers and monitors the amount of credit exposure to any one issuer. The Company's investment policy provides 
guidelines  and  limits  regarding  credit  quality,  investment  concentration,  investment  type,  and  maturity  that  the  Company 
believes  will  provide  liquidity  while  reducing  risk  of  loss  of  capital.  Investments  are  of  a  short-term  nature  and  include 
investments in commercial paper, corporate debt securities, asset-backed securities, U.S. Treasury, U.S. Government, and U.S.
Agency debt.

The Company sells its products primarily to end users in the United States, Asia and Europe and, generally, does not 
require its customers to provide collateral or other security to support accounts receivable. Management performs ongoing 
credit evaluations of its customers’ financial condition and maintains an allowance for estimated potential bad debt losses. The 
Company’s customer base is highly concentrated and historically, a relatively small number of customers have accounted for a 
significant portion of its revenues. The Company participates in a dynamic high technology industry and believes that changes 
in any of the following areas could have a material adverse effect on its future financial position, results of operations or cash 
flows: advances and trends in new technologies and industry standards; competitive pressures in the form of new products or 
price reductions on current products; changes in product mix; changes in the overall demand for products offered; changes in 
third-party manufacturers;  changes in  key  suppliers;  changes  in  certain  strategic  relationships  or  customer  relationships; 
litigation or claims against the Company based on intellectual property, patent, product, regulatory or other factors; fluctuations 
in  foreign  currency  exchange  rates; risk  associated  with  changes  in  domestic  and  international  economic  and/or  political 
regulations; availability of necessary components or sub-assemblies; disruption of manufacturing facilities; and its ability to 
attract and retain employees necessary to support its growth.

Certain components and sub-assemblies used in the Company’s products are purchased from a sole supplier or a limited 
group  of  suppliers.  The  Company  currently  purchases  its  spectroscopic  ellipsometer  and  robotics  used  in  its  advanced 
measurement  systems  from  a  sole  supplier  or  a  limited  group  of  suppliers  located  in  the  United  States. Any  shortage  or 
interruption in the supply of any of the components or sub-assemblies used in its products or its inability to procure these 

F-15

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

components or sub-assemblies from alternate sources on acceptable terms could have a material adverse effect on its business, 
financial condition and results of operations.

Warranties. The Company generally provides a warranty on its products for a period of twelve to fourteen months against 
defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue 
is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure 
rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, 
material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations 
would be  required. The  warranty  accrual  represents  the  best  estimate  of  the  amount  necessary  to  settle  future  and  existing 
claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty 
reserve and adjusts the amounts in accordance with changes in these factors.

Income Taxes. The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires 
the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized 
in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax 
asset to that portion which more likely than not will be realized.

For  additional  information  on  the  Company’s  income  taxes,  see  Note 14  of  Notes  to  the  Consolidated  Financial 

Statements.

Translation of Foreign Currencies. The Company has branch operations or wholly-owned subsidiaries in the United States, 
Europe, Japan, China, Taiwan, Singapore and South Korea. Its international subsidiaries and branches operate primarily through 
the use of local functional currencies.  A substantial portion of the Company’s international systems sales are denominated in 
U.S. dollars with the exception of Japan.  Consequently, we have relatively little exposure to foreign currency exchange risk 
with respect to these sales.

Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts 
and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting 
from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-
term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated 
other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The 
Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $564 and 
$1,273 as of December 31, 2019 and 2018, respectively.

Share-based Compensation. The Company measures the cost of employee services received in exchange for the award of 
equity instruments based on the fair value of the award at the date of grant. Compensation expense is recognized using the 
straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments 
recorded for forfeitures as they occur. 

For additional information on the Company’s share-based compensation plans, see Note 12 of Notes to the Consolidated 

Financial Statements.

Research and Development Costs. Expenditures for research and development are expensed as incurred.

Fair Value of Financial Instruments. The carrying amounts of the Company’s financial instruments, including cash and cash 
equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities.  
The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates 
to those rates the Company believes it would reasonably receive upon re-entry into the market.  Judgment is required to estimate 
the fair value using available market information and appropriate valuation methods.

For additional information on the Company’s fair value of financial instruments, see Note 4 of Notes to the Consolidated 

Financial Statements.

F-16

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Derivative Instruments and Hedging Activities. The Company, when it considers it to be appropriate, enters into forward
contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2019 and 
2018, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts 
were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. Post-merger 
with Nanometrics, the Company enters into forward contracts for several other currencies including the Korean Won, Taiwanese 
dollar and Chinese Yuan Renminbi. The forward contracts are not designated as hedges for accounting purposes and therefore, 
the change in fair value is recorded in general and administrative expenses in the Consolidated Statements of Operations.  The 
Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities 
in the Consolidated Balance Sheets.

The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2019 and 2018 were 

as follows:

Notional amount .....................................................................................................
Fair value of asset (liability) ...................................................................................

December 31,

2019

2018

38,887
120

6,746
(32)

During the years ended December 31, 2019 and 2017, the Company recorded gains of $ $343 and $105 on maturities of 
forward contracts, respectively.  During the year ended December 31, 2018, the Company recognized a loss of $81 on maturities 
of forward contracts.  The aggregate notional amounts of matured contracts were $58,522, $8,465 and $9,582 for 2019, 2018 
and 2017, respectively.

Contingencies and  Litigation. The Company is subject to the possibility of losses from various contingencies, including 
certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the 
likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss 
contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are 
probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate 
of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the 
costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See 
Note 10 of the Notes to the Consolidated Financial Statements, “Commitments and Contingencies” for a detailed description.

Recent Accounting Pronouncements.

Recently Adopted

Effective January 1, 2019, the Company adopted Accounting Standards Update (“ASU”) No. 2018-07, “Compensation 
– Stock Compensation (Topic 718): Improvements to Nonemployee Share-Based Payment Accounting.”  This ASU expands 
the scope of Topic 718 to include share-based payment transactions for acquiring goods and services from nonemployees.  An 
entity should apply the requirements of Topic 718 to nonemployee awards except for specific guidance on inputs to an option 
pricing model and the attribution of cost. The ASU is effective for the fiscal years beginning after December 15, 2018, including 
interim periods within that fiscal year.  The adoption of ASU No. 2018-07 did not have a material impact on the Company’s 
consolidated financial position, results of operations, and cash flows.   

Effective January 1, 2019, the Company adopted ASU No. 2018-02, “Income Statement – Reporting Comprehensive 
Income  (Topic  220):  Reclassification  of  Certain Tax  Effects  from Accumulated  Other  Comprehensive  Income.”   The  new
guidance allows companies to reclassify stranded tax effects resulting from the Tax Cuts and Jobs Act (the “Tax Act”) from 
accumulated other comprehensive income to retained earnings.  The guidance also requires certain new disclosures regardless 
of a company’s election.  The standard is effective for annual periods beginning after December 15, 2018 and for interim periods 
within those annual periods, with earlier adoption permitted.  The adoption of ASU No. 2018-02 did not have a material impact 
on the Company’s consolidated financial position, results of operations, and cash flows.

In January 2017, the Financial Accounting Standards Board (“FASB”) issued ASU No. 2017-04, “Intangibles – Goodwill 
and  Other  (Topic  350):  Simplifying  the  Test  for  Goodwill  Impairment.”    This ASU  eliminates  Step  2  from  the  goodwill 
impairment test.   Accordingly, if the carrying amount of a reporting unit exceeds its fair value, an impairment loss will be 

F-17

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

recognized in an amount equal to the excess, limited to the total amount of goodwill allocated to the reporting unit.  The ASU 
is effective for the fiscal years beginning after December 15, 2019 and for interim periods within those fiscal years, with earlier 
adoption  permitted.    The  adoption  of ASU  No.  2017-04  during  2019  did  not have  a  material  impact  on  the  Company’s 
consolidated financial position, results of operations, and cash flows.

In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” ASU No. 2016-02 requires that lessees 
recognize virtually all of their leases on the balance sheet, by recording a right-of-use asset and lease liability. On January 1, 
2019, the Company adopted ASU No. 2016-02 using the modified retrospective method which applies the provisions of the 
standard at the effective date without adjusting the comparative periods presented.  The Company also elected the package of 
practical expedients.

There was not a cumulative-effect adjustment to the Company’s beginning retained earnings as a result of adopting ASU 
No. 2016-02. The Company has recognized additional operating lease assets and obligations of $14,426 as of January 1, 2019. 
As a result of the Merger, operating lease assets and obligations of $9,658 were assumed from the former Nanometrics. The 
Company elected to not reassess prior conclusions related to the identification, classification and accounting for initial direct 
costs for leases that commenced prior to January 1, 2019. For additional disclosure and detail, see Note 7 of the Notes to the 
Consolidated Financial Statements, “Leasing Arrangements.”

Recently Issued

In December 2019, the FASB issued ASU No. 2019-12, “Income Taxes (Topic 740): Simplifying the Accounting for 
Income Taxes.” This standard simplifies the accounting for income taxes by eliminating certain exceptions to the guidance in 
Topic 740 related to the approach for intraperiod tax allocation, the methodology for calculating income taxes in an interim 
period and the recognition of deferred tax liabilities for outside basis differences. The new guidance also simplifies aspects of 
the accounting for franchise taxes and enacted changes in tax laws or rates and clarifies the accounting for transactions that 
result in a step-up in the tax basis of goodwill and allocating consolidated income taxes to separate financial statements of 
entities not subject to income tax. ASU No. 2019-12 is effective for fiscal years beginning after December 15, 2020, with early 
adoption permitted. Upon adoption, the Company must apply certain aspects of this standard retrospectively for all periods
presented while other aspects are applied on a modified retrospective basis through a cumulative-effect adjustment to retained 
earnings as of the beginning of the fiscal year of adoption. The Company is currently evaluating the impact of this new standard
on its consolidated financial position, results of operations, and cash flows. 

In August 2018, the FASB issued ASU No. 2018-13, “Fair Value Measurement (Topic 820): Disclosure Framework –
Changes  to  the  Disclosure  Requirements  for  Fair Value  Measurement.”   This ASU  is  part  of  the  FASB’s  larger  disclosure 
framework project intended to improve the effectiveness of financial statement footnote disclosure.  ASU No. 2018-13 modifies 
required fair value disclosures related primarily to level 3 investments.  This ASU is effective for annual periods beginning 
after December 15, 2019 and interim periods within those annual periods.  The adoption of ASU No. 2018-13 is not expected 
to have a material effect on the Company’s consolidated financial position, results of operations, and cash flows.

In  May  2017,  the  FASB  issued  ASU  No.  2017-09,  “Compensation  - Stock  Compensation  (Topic  718):  Scope  of
Modification Accounting.”  This ASU amends the scope of modification accounting for share-based payment arrangements 
and provides guidance on the types of changes to the terms or conditions of share-based payment awards to which an entity 
would  be  required  to  apply  modification  accounting  under Accounting  Standards  Codification  (“ASC”)  718.   The ASU  is 
effective for the fiscal years beginning after December 15, 2019 and for interim periods within those fiscal years.  The adoption 
of ASU No. 2017-09 is not expected to have a material effect on the Company’s consolidated financial position, results of 
operations, and cash flows, if any.

F-18

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326): Measurement of 
Credit Losses on Financial Instruments,” which represents a new credit loss standard that will change the impairment model 
for most financial assets and certain other financial instruments. Specifically, this guidance will require entities to utilize a new 
“expected loss” model as it relates to trade receivables, notes receivable and other commitments to extend credit held by a 
reporting entity. In addition, entities will be required to recognize an allowance for estimated credit losses on available-for-sale 
debt securities, regardless of the length of time that a security has been in an unrealized loss position. This guidance will be
effective  for  annual  reporting  periods  beginning  after  December  15,  2019,  including  interim  periods  within  those  annual 
reporting  periods,  with  early  adoption permitted. The  Company  expects  that  the  adoption  of  this  guidance  will  not  have a 
material impact on its consolidated financial position, results of operations, and cash flows.

Recently issued accounting guidance not discussed above is not applicable or did not have, or is not expected to have, a 

material impact to the Company.

3.

Business Combination:

Pursuant to the Agreement and Plan of Merger dated as of June 23, 2019 (the “Merger Agreement”), among Rudolph 
Technologies,  Inc.  (“Rudolph”),  Nanometrics  Incorporated,  (“Nanometrics”)  and  PV  Equipment  Inc.,  a  wholly-owned 
subsidiary of Nanometrics, (“Merger Sub”) Merger Sub merged with and into Rudolph, with Rudolph continuing as a wholly-
owned subsidiary of Onto Innovation (formerly Nanometrics) and the surviving corporation of the merger (the “Merger”). The 
Merger was effective on October 25, 2019 (the “Effective Time”). At the Effective Time, each share of Rudolph common stock, 
par value $0.001 per share, issued and outstanding immediately prior to the Effective Time (other than shares owned by Rudolph 
or Nanometrics) was converted into the right to receive 0.8042 (the “Exchange Ratio”) shares of common stock, par value 
$0.001 per share, of Onto Innovation common stock, par value $0.001 per share, and cash in lieu of any fractional shares of 
Onto  Innovation  common  stock  any  former  holder  of  Rudolph  common stock  would  otherwise  be  entitled  to  receive. 
Immediately  following  the  Effective Time  of  the  Merger,  Rudolph’s  and  Nanometrics’  common  stockholders  each  owned 
approximately 50% of the outstanding common stock of the combined company on a fully diluted basis.

The Merger creates a company that is an end-to-end metrology, inspection, process control software, and lithography 
equipment  provider  for  the  semiconductor  industry  and  other  advanced  markets  with  a  global  support  organization  whose 
technology  development  teams,  and  product  portfolio  creates  unique  end-to-end  solutions  across  the  entire  semiconductor 
fabrication  process.  The  company  will  be  able  to  provide  improved  device  yield  at  reduced  manufacturing  cycle  time, 
supporting the accelerated product life cycles in the semiconductor and other advanced markets.

The combined company accounts for the Merger as a reverse acquisition, using the acquisition method of accounting in 
accordance with generally accepted accounting principles, with Rudolph being treated as the acquiring entity for accounting 
purposes.  In  identifying  Rudolph  as  the  accounting  acquiring  entity,  Rudolph  and  Nanometrics  reviewed  the  accounting 
guidance as provided in ASC 805, which takes into account the type of consideration, the structure of the merger and the other 
transactions contemplated by the merger agreement, relative outstanding share ownership, the composition of the combined 
company board of directors, designation of certain senior management positions of the combined company, mainly the Chief 
Executive Officer and the Chief Financial Officer, relative voting rights, relative size as measured by assets, revenue or earnings 
as well as other metrics an investor would use for evaluating the respective company’s current and future financial performance, 
which of the combining entities initiated the combination and where the combined company’s headquarters will be located.

The acquisition method of accounting is based on ASC 805, and uses the fair value concepts defined in ASC Topic 820, 
“Fair Value Measurement” (“ASC 820”). The purchase price allocation described herein is preliminary and is based on the 
information that was available to make estimates of the fair value and may change as further information becomes available 
and  additional  analysis  are  completed. While  the  Company  believes  that  such  information  provides  a  reasonable  basis  for 
estimating  the  fair  values,  more  evidence  and  information  may  be  obtained  during  the  measurement  period  that  results  in 
changes to the estimated fair value amounts. The measurement period ends on the earlier of one year after the Effective Time 
or  the  date  information  about  the  facts  and  circumstances  that  existed  at  the  Effective  Time  becomes  available.  Such 
adjustments, if necessary, will be recognized during the period in which that amounts are determined. These adjustments may 
include: (1) changes in the fair value of certain intangible assets acquired; and (2) changes in deferred tax assets and liabilities 
related to the fair value estimates.

F-19

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

At the Effective Time of the Merger, Nanometrics changed its name to Onto Innovation Inc., and its shares began trading 
on the New York Stock Exchange (the “NYSE”) on October 28, 2019 (NYSE: ONTO). At the close of trading on October 25, 
2019, Rudolph common stock ceased being listed on the NYSE. The accompanying consolidated financial statements for all 
periods presented are those of Rudolph with those of Nanometrics included only from the Effective Time through year-end.

The  acquisition  was  nontaxable  to  the  Company  and  certain  of  the  assets  acquired,  including  goodwill,  will  not  be 
deductible for tax purposes. The acquired assets and liabilities of Nanometrics were recorded at their respective fair values 
including an amount for goodwill, which represents the purchase price paid in excess of the fair value of the net tangible and 
intangible assets acquired and liabilities assumed, and is attributable primarily to expected synergies, economies of scale and 
the assembled workforce of Nanometrics.

ASC 805 requires, among other things, that assets acquired, and liabilities assumed, be recognized at their fair values as 
of the Effective Time. In addition, ASC 805 requires that the consideration transferred be measured at the Effective Time of the 
Merger at the then-current market price. The market price of the shares of Rudolph common stock at the Effective Time was 
$28.50, which was based on the closing price of shares of Rudolph common stock on the NYSE on Friday, October 25, 2019, 
the last day of trading prior to the Effective Time.

ASC 820 defines the term “fair value” and sets forth the valuation requirements for any asset or liability measured at 
fair value, expands related disclosure requirements and specifies a hierarchy of valuation techniques based on the nature of the 
inputs used to develop the fair value measurements. Fair value is defined in ASC 829 as “the price that would be received to 
sell an asset or paid to transfer a liability in an orderly transaction between market participants at the measurement date.” This 
is an exit price concept for the valuation of the asset or liability. In addition, market participants are assumed to be buyers and 
sellers in the principal (or most advantageous) market for the asset or liability. Fair value measurements for an asset assume 
the highest and best use by these market participants, As a result of these standards, the Company may be required to record 
the fair value of assets which are not intended to be used or sold and/or to value assets at fair values that do not reflect the 
Company’s intended use for those assets. Many of these fair value measurements can be highly subjective, and it is possible 
that other professionals, applying reasonable judgment to the same facts and circumstances, could develop and support a range 
of alternative estimated amounts.

The aggregate purchase price of $890,131 consisted of 25,060 shares of common stock valued at $884,801 and the fair 
value of assumed Nanometrics equity awards of $5,330.  Under ASC 805, acquisition-related transaction costs (e.g., advisory, 
legal, investment banking and other professional fees) are not included as a component of consideration transferred but are 
accounted for as expenses in the periods in which such costs are incurred. Total transaction costs incurred by the Company 
were  $9,907  during  the  year  ended  December  31,  2019  and  are  included  in  general  and  administrative  expense  in  the 
Consolidated Statements of Operations.

F-20

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

The following table summarizes the preliminary allocation of the total purchase consideration to the initial estimated 

fair values of the assets acquired and liabilities assumed as of October 25, 2019:

Cash and cash equivalents ...........................................................................................................
Marketable securities ...................................................................................................................
Account receivables.....................................................................................................................
Inventories ...................................................................................................................................
Prepaid expenses and other current assets ...................................................................................
Property, plant and equipment .....................................................................................................
Operating lease right-of-use assets ..............................................................................................
Identifiable intangible assets........................................................................................................
Deferred income taxes .................................................................................................................
Other assets..................................................................................................................................
Total assets acquired .................................................................................................................
Accounts payable.........................................................................................................................
Payroll and related expenses........................................................................................................
Deferred revenue .........................................................................................................................
Other current liabilities ................................................................................................................
Income taxes payable...................................................................................................................
Other non-current liabilities.........................................................................................................
Net assets acquired ...................................................................................................................
Goodwill ......................................................................................................................................
Total purchase consideration ...............................................................................................

$43,882
94,389
49,917
98,478
7,734
77,451
9,658
374,900
1,352
850
758,611
(23,361)
(20,290)
(5,931)
(10,739)
(2,699)
(90,113)
605,478
284,653
$890,131

The fair value of accounts receivable, net, consisted of gross contractual accounts receivable reduced by approximately 
$200 for receivables not expected to be collected as of the acquisition date. The inventory acquired consisted primarily of work 
in process, for which fair value was measured based on determining its net realizable value as such value represents an exit 
price in an orderly transaction between market participants, and raw materials. Factors that required judgment in determining 
the net realizable value for the inventory included determining estimated selling prices, cost to complete, costs to dispose, 
operating profit, and discount rates, among others. The Company recorded a $26,486 step-up of inventory to its fair value as 
of the Merger date based on the preliminary valuation.

The preliminary allocation of the intangible assets subject to amortization is as follows:

Developed technology ......................................................................
In-process research and development ...............................................
Customer relationships .....................................................................
Backlog.............................................................................................
Trademarks and trade names.............................................................
Total intangible assets ....................................................................

Estimated
Fair Value

$260,500
46,600
53,000
6,700
8,100
$374,900

Weighted Average
Useful Life (years)
6.6
indefinite
13.1
1.1
7.5

Acquired intangible assets reported above are being amortized using the straight-line method over their estimated useful 
lives, which approximates the pattern of how the economic life is expected to be used. This includes amounts allocated to 
customer  relationships  because  of  anticipated  high  customer  retention  rates  that  are  common  in  the  semiconductor  capital 
equipment industry.

Developed technology relates to Nanometrics’ product family and was valued using the multi-period excess earnings 
method under the income approach. This method reflects the present value of the projected cash flows that are expected to be 
generated  by  the  developed  technology  less  charges  representing  the  contribution  of  other  assets  to  those  cash  flows. The 

F-21

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

average estimated useful life of developed technologies was determined to be 6.6 years and was based on the technology cycle 
related to each developed technology, as well as the cash flows over the respective forecast period.

The  fair  value  of  the  in-process  research  and  development  (“IPRD”)  was  determined  using  the  multi-period  excess 
earnings  method  under  the  income  approach.  Such  method  reflects  the  present  value  of  the  projected  cash  flows  that  are 
expected to be generated by the IPRD, less costs to complete the development and charges representing the contribution of 
other assets to those cash flows. 

Customer relationships represent the fair value of future projected revenue that will be derived from sales of products to 
new and existing customers and was valued using the distributor method under the income approach. This method reflects the 
present  value  of projected distributor  margins  to be  derived  from  sales  to  existing  customers  less  charges representing  the 
contribution of other assets to those cash flows. The estimated useful life of the customer relationships was determined to be 
13.1 years and was based on historical customer turnover rates.

Order backlog represents the fair value of future projected revenue that will be derived from outstanding orders from 
customers that have not yet been shipped and was valued using the multi-period excess earnings method under the income 
approach, which reflects the present value of such outstanding orders less charges representing the contribution of other assets 
to those cash flows. The estimated useful life of the order backlog was determined to be 1.1 years and was based on historical 
order fulfilment rates.

Trademarks and trade names relate to the “Nanometrics” trademarks and trade names and were fair valued by applying 
the  relief-from-royalty  method  under  the  income  approach.  This  method  is  based  on  the  application  of  a  royalty  rate  to 
forecasted revenue under the trademarks and trade names. The estimated useful life of the trademarks and trade names was 
determined to be 7.5 years and was based on the expected life of the trademarks and trade names and the cash flows anticipated 
over the forecast period.

Factors that required a judgment in determining the fair value for the acquired intangible assets included estimating 
future  cash  flows,  revenue  and  gross  margin  assumptions,  technology  lives,  future  operating  expenses,  and  discount rates, 
among others.

The  Company  has  determined  that  the  estimated  useful  life  of  the  acquired  in-process  research  and  development  is 
currently indeterminate; thus, it has been categorized as indefinite and will be reviewed annually for impairment, along with 
the Company’s other long-lived assets with indefinite lives, unless its estimated useful life is known.

The  Company  believes  the  amounts  of  purchased  intangible  assets  recorded  above  represent  the  fair  values  of  and 

approximate the amounts a market participant would pay for such assets as of the Effective Time.

The  results  of  operations  of  Nanometrics  are  reported  in  the  Company’s  consolidated  financial  statements  from  the 

Effective Time and include $66,261 of total net sales and an operating loss of $7,065 for the year ended December 31, 2019.

Unaudited Pro Forma Financial Information

The following unaudited pro forma financial information summarizes the combined results of operations of Rudolph 
and Nanometrics, on a pro forma basis, as if the companies had combined at the beginning of fiscal year 2018. The pro forma 
financial  information  is presented  for  informational  purposes  only  and  may  not  necessarily  reflect  the  actual  results  of 
operations that would have been achieved if the Merger had taken place on January 1, 2018, nor are they necessarily reflective 
of future results of operations. The pro forma information for all periods presented also includes adjustments to amortization 
charges for acquired intangible assets, depreciation charges for stepped-up fair value of acquired fixed assets, related tax effects 
and other adjustments.

F-22

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

The reported financial information for the year ended December 31, 2019 includes the results of Rudolph for the year 
then-ended  and  the  results  of  Nanometrics  from  the  Effective  Time  through  December  31,  2019.  The  reported  financial 
information for the year ended December 31, 2018 is the historical results of Rudolph:

Year Ended December 31,

2019

2018

Reported

Pro Forma

Reported

Pro Forma

Net revenue...........................................................
Net income attributable to Onto Innovation .........

$

305,896
1,910

$

525,455
901

$

273,784
45,096

$

598,307
36,246

The  pro  forma  results  have  been  adjusted  to  eliminate  $37,900  of  merger-related  costs  incurred  by  Rudolph  and 

Nanometrics that would have been incurred in 2017 had the Merger occurred on January 1, 2018. 

4.

Fair Value Measurements:

The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs 
into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2
inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, 
either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs 
are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial 
asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input 
that is significant to the fair value measurement.

F-23

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 

2019 and December 31, 2018:

Fair Value Measurements Using

Quoted Prices in
Active Markets
for Identical
Assets (Level 1)

Significant
Other
Observable
Inputs (Level 2)

Significant
Unobservable
Inputs (Level 3)

Carrying
Value

December 31, 2019
Assets:

Available-for-sale debt securities:

Municipal notes and bonds ......................................
Asset-backed securities............................................
Certificates of deposit ..............................................
Commercial paper....................................................
Corporate bonds.......................................................
Foreign currency forward contracts...............................
Total assets .........................................................

Liabilities:

Contingent consideration – acquisitions........................
Total liabilities ....................................................

December 31, 2018
Assets:

Available-for-sale debt securities:

Municipal notes and bonds ......................................
Total assets .........................................................

Liabilities:

Contingent consideration – acquisitions........................
Foreign currency forward contracts...............................
Total liabilities ....................................................

$

$

$
$

$
$

$

$

81,108 $
10,779
30,507
30,708
36,461
120
189,683 $

569 $
569 $

62,684 $
62,684 $

2,060 $
32
2,092 $

— $
—
—
—
—
—
— $

— $
— $

— $
— $

— $
—
— $

81,108 $
10,779
30,507
30,708
36,461
120
189,683 $

— $
— $

62,684 $
62,684 $

— $
32
32 $

—
—
—
—
—
—
—

569
569

—
—

2,060
—
2,060

The  Company’s  available-for-sale  debt  securities  classified  as  Level 2  are  valued  using  observable  inputs  to  quoted 
market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of 
price transparency.  The foreign currency forward contracts are primarily measured based on the foreign currency spot and 
forward  rates  quoted  by  the  banks  or  foreign  currency  dealers.    Investment  prices  are  obtained  from  third  party  pricing 
providers, which model prices utilizing the above observable inputs, for each asset class.

Level 3 liabilities consisted of contingent consideration related to an acquisition for which the Company uses a discounted 
cash flow model to value these liabilities.  The Level 3 assumptions used in the discounted cash flow model for the contingent 
consideration included projected revenue, timing of cash flows and estimates of discount rates of 0.0% and 9.2% for the years 
ended December 31, 2019 and 2018, respectively.  A significant decrease in the projected revenue or increase in discount rates 
could result in a significantly lower fair value measurement for the contingent consideration.  

F-24

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

This  table  presents  a  reconciliation  of all  liabilities  measured  at  fair  value  on  a  recurring  basis  using  significant 

unobservable inputs (Level 3) for the year ended December 31, 2019:

Fair Value
Measurements
Using
Significant
Unobservable
Inputs (Level 3)

Balance at December 31, 2018 ........................................................................................................

$

Total loss due to remeasurement included in general and

administrative expense ............................................................................................................
Additions ....................................................................................................................................
Payments ....................................................................................................................................
Transfer into (out of) Level 3 .....................................................................................................
Balance at December 31, 2019 ........................................................................................................

$

2,060

267
—
(1,758)
—
569

See Note 5 for additional discussion regarding the fair value of the Company’s marketable securities.

Fair Value of Other Financial Instruments

The  carrying  value  of  cash  and  cash  equivalents,  accounts  receivable,  accounts  payable  and  accrued  liabilities 
approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations 
is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would 
reasonably  receive  upon  re-entry  into  the  market.  Judgment  is  required  to  estimate  the  fair  value  using  available  market 
information and appropriate valuation methods.

The  carrying  amount  of  the convertible  notes  receivable  approximates  fair  value  based  on  current  interest  rates  for 
instruments with similar characteristics. Convertible notes receivable are initially recognized at fair value. The Company does 
not subsequently adjust the fair value of these convertible notes receivable unless it is determined that the convertible note
receivable is impaired. The Company considers the issuer’s financial condition, payment history, and other relevant factors 
when assessing the collectability of the convertible note and to reserve the portion of such convertible note for which collection
does not appear likely.

5. Marketable Securities:

The  Company  has  evaluated  its  investment  policies  and  determined  that  all  of  its  marketable  securities,  which  are 
comprised of debt securities, are to be classified as available-for-sale. The Company’s available-for-sale debt securities are 
carried at fair value, with the unrealized gains and losses reported in Stockholders’ equity under the caption “Accumulated 
other comprehensive loss.” Realized gains and losses on available-for-sale securities are included in “Other income (expense)” 
on  the  Consolidated  Statements  of  Operations.  The  Company  records  other-than-temporary  impairment  charges  for  its 
available-for-sale debt securities when it intends to sell the securities, it is more-likely-than not that it will be required to sell 
the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities. The cost 
of securities sold is based on the specific identification method.

The Company has determined that the gross unrealized losses on its marketable securities at December 31, 2019 and 2018 
are temporary in nature. The Company reviews its investment portfolio to identify and evaluate marketable securities that have 
indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length 
of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to 
hold the securities for a period of time sufficient to allow for any anticipated recovery in market value.

F-25

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

At December 31, 2019 and 2018, marketable securities are categorized as follows:

December 31, 2019
Municipal notes and bonds .................................................
Asset-backed securities.......................................................
Certificates of deposit .........................................................
Commercial paper...............................................................
Corporate bonds..................................................................
Total marketable securities ............................................

December 31, 2018
Municipal notes and bonds .................................................
Total marketable securities ............................................

Amortized
Cost

Gross
Unrealized
Holding Gains

Gross
Unrealized
Holding Losses

Fair
Value

$

$

$
$

80,926
10,767
30,500
30,707
36,409
189,309

62,681
62,681

$

$

$
$

188
12
7
1
52
260

43
43

$

$

$
$

6
—
—
—
—
6

40
40

$

$

$
$

81,108
10,779
30,507
30,708
36,461
189,563

62,684
62,684

The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, 

regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2019 and 2018:

Due within one year............................................................
Due after one through five years.........................................
Due after five through ten years..........................................
Due after ten years ..............................................................
Total marketable securities ............................................

December 31, 2019

December 31, 2018

Amortized
Cost
152,649
36,660
—
—
189,309

$

$

Fair
Value
152,852
36,711
—
—
189,563

$

$

$

$

Amortized
Cost

Fair
Value

47,767
14,914
—
—
62,681

$

$

47,732
14,952
—
—
62,684

The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, 

aggregated by investment instrument and period of time in an unrealized loss position, at December 31, 2019 and 2018.

December 31, 2019
Municipal notes and bonds .................................................
Total marketable securities ............................................

December 31, 2018
Municipal notes and bonds .................................................
Total marketable securities ............................................

In Unrealized Loss Position
For Less Than 12 Months
Gross
Unrealized
Losses

Fair
Value

In Unrealized Loss Position
For Greater Than 12 Months

Fair
Value

Gross
Unrealized
Losses

$
$

$
$

14,166
14,166

27,952
27,952

$
$

$
$

6
6

30
30

$
$

$
$

— $
— $

4,671
4,671

$
$

—
—

10
10

See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities.

F-26

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

6.

Goodwill and Purchased Intangible Assets:

Goodwill

The changes in the carrying amount of goodwill are as follows:

Balance at December 31, 2017, net of accumulated impairment charge of $192,872 .................
Goodwill acquired during the period......................................................................................
Balance at December 31, 2018 ....................................................................................................
Goodwill acquired during the period (Note 3) .......................................................................
Balance at December 31, 2019 ....................................................................................................

$

$

22,495
—
22,495
284,653
307,148

Purchased Intangible Assets

Purchased intangible assets as of December 31, 2019 and 2018 are as follows:

December 31, 2019

Finite-lived intangible assets:

Developed technology.................................................................
Customer and distributor relationships........................................
Trademarks and trade names .......................................................
Total finite-lived intangible assets..................................................
In-process research and development ............................................
Total identifiable intangible assets .........................................

December 31, 2018

Finite-lived intangible assets:

Developed technology.................................................................
Customer and distributor relationships........................................
Trademarks and trade names .......................................................
Total identifiable intangible assets .........................................

Gross Carrying 
Amount

Accumulated 
Amortization

Net

$

$

$

$

326,726
69,261
12,461
408,448
46,600
455,048

66,177
9,560
4,361
80,098

$

$

$

$

67,861
11,078
4,156
83,095
—
83,095

59,692
9,082
3,876
72,650

$

$

$

$

258,865
58,183
8,305
325,353
46,600
371,953

6,485
478
485
7,448

Intangible asset amortization expense amounted to $10,445, $1,534 and $1,940 for the years ended December 31, 2019, 
2018 and 2017, respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated 
lives,  estimated  amortization  expenses  are  $53,741  for  2020,  $48,009  for  2021,  $47,610  for  2022,  $47,135  for  2023,  and 
$41,450 for 2024.

7.

Leasing Arrangements:

The Company leases space for its corporate headquarters, manufacturing, sales and service operations, vehicles and 
information technology equipment under operating leases. All of the Company’s leases are operating leases. The Company 
elected not to apply Accounting Standard Codification Topic 842 (“ASC 842”) to arrangements with lease terms of less than 
12 months. Operating lease right-of-use assets and obligations are reflected within the captions “Operating lease right-of-use 
assets,” “Current operating lease obligations,” and “Non-current operating lease obligations,” respectively, on the Consolidated 
Balance Sheets.

Operating lease costs were $4,124 during the twelve months ended December 31, 2019. These costs are primarily 
related to long-term operating leases, but also include immaterial amounts for short-term leases less than 12 months. Operating 
lease costs are recognized on a straight-line basis over the terms of the leases.

Additional operating lease right-of-use assets of $2,946 were recognized as non-cash asset additions that resulted from
new  operating  lease  liabilities  as  of  the  twelve  months  ended  December 31,  2019.  Cash  paid  for  amounts  included  in  the 

F-27

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

measurement of operating lease liabilities was $3,872 during the twelve months ended December 31, 2019 and is included in 
operating cash flows.

The Company often has the option to renew lease terms for buildings and other assets. The exercise of lease renewal 
options is generally at the Company’s sole discretion. In addition, certain lease arrangements may be terminated prior to their 
original expiration date at the Company’s discretion. The Company evaluates renewal and termination options at the lease 
commencement date to determine if it is reasonably certain to exercise the option on the basis of economic factors. The weighted 
average of the remaining lease term for operating leases as of December 31, 2019 was 6.7 years. 

The  discount  rate  implicit  within  the  Company’s  leases  is  generally  not  determinable  and  therefore  the  Company 
determines  the  discount  rate  based  on  its  incremental  borrowing  rate.  The  incremental  borrowing  rate  for  our  leases  is 
determined based on the lease term in which lease payments are made. The weighted average discount rate used to measure 
operating lease liabilities as of December 31, 2019 was 4.5%. 

The  following  table  presents  information  about  the  amount  and  timing  of  cash  flows  arising  from  the  Company’s 

operating leases as of December 31, 2019:

Maturity of Lease Liabilities
2020 ........................................................................................................................
2021 ........................................................................................................................
2022 ........................................................................................................................
2023 ........................................................................................................................
2024 ........................................................................................................................
Thereafter................................................................................................................
Total undiscounted operating lease payments......................................................
Less: Imputed interest.............................................................................................
Present value of operating lease liabilities ...........................................................

$

$

Lease Payments

5,901
4,659
4,059
3,398
2,939
8,196
29,152
4,276
24,876

8.

Convertible Notes Receivable:

On May 31, 2018, the Company entered into a convertible loan agreement with Simax Precision Technologies Limited 
(“the borrower”), which allowed them to borrow up to $15,000 in multiple promissory notes with an interest rate of 4.25% per 
annum payable on a semi-annual basis.  The Company expected to be a supplier of lithography modules to Simax, which is 
used  in  the  manufacture,  sale  and  service  of  lithography  systems.  At  December  31,  2019,  the  Company  had  $5,000  in 
outstanding convertible notes receivable with the borrower.   

During the fourth quarter 2019, the Company and the borrower began negotiations to end their relationship as it pertains 
to  this  agreement.  The  Company  determined  that  it  is  unlikely  that  a  portion  of  the  convertible  note  receivable  will be 
collectable, and a reserve in the amount of $2,000 was recorded during the period ended December 31, 2019.  In addition, the 
Company ceased recognizing interest income on these convertible notes receivable as of September 30, 2019.

9.

Balance Sheet Details:

Inventories

Inventories are comprised of the following:

Materials .................................................................................................................
Work-in-process......................................................................................................
Finished goods........................................................................................................
Total inventories................................................................................................

$

$

108,492
42,694
24,948
176,134

$

$

61,025
21,910
13,885
96,820

December 31,

2019

2018

F-28

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Property, Plant and Equipment

Property, plant and equipment, net, is comprised of the following:

Land and building ...................................................................................................
Machinery and equipment ......................................................................................
Furniture and fixtures .............................................................................................
Computer equipment and software .........................................................................
Leasehold improvements ........................................................................................

Accumulated depreciation ......................................................................................
Total property, plant and equipment, net ...........................................................

December 31,

2019

2018

$

$

47,222
56,504
3,968
15,770
13,069
136,533
(38,113)
98,420

$

$

2,584
29,097
3,226
7,906
9,448
52,261
(33,387)
18,874

Depreciation expense amounted to $5,965, $4,848 and $3,990 for the years ended December 31, 2019, 2018 and 2017, 

respectively.

Other assets

Other assets is comprised of the following:

Convertible notes receivable, net of allowance of $2,000 ......................................
Operating lease right-of-use assets .........................................................................
Other .......................................................................................................................
Total other assets ...............................................................................................

Accrued liabilities

Accrued liabilities is comprised of the following:

Payroll and related expenses...................................................................................
Warranty .................................................................................................................
Other .......................................................................................................................
Total accrued liabilities .....................................................................................

Other current liabilities

Other current liabilities is comprised of the following:

Contingent consideration – acquisitions .................................................................
Income tax payable .................................................................................................
Current operating lease obligations ........................................................................
Customer deposits...................................................................................................
Accrued inventory ..................................................................................................
Accrued professional fees.......................................................................................
Other .......................................................................................................................
Total other current liabilities .............................................................................

December 31,

2019

2018

3,000
23,588
1,351
27,939

$

$

5,000
—
506
5,506

December 31,

2019

2018

19,365
6,348
491
26,204

$

$

10,648
2,441
611
13,700

December 31,

2019

2018

569
2,783
4,906
1,994
1,614
1,520
5,786
19,172

$

$

1,422
—
—
1,135
1,103
532
3,351
7,543

$

$

$

$

$

$

F-29

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Other non-current liabilities

Other non-current liabilities is comprised of the following:

Unrecognized tax benefits (including interest) .......................................................
Non-current operating lease obligations .................................................................
Contingent consideration – acquisitions .................................................................
Deferred revenue ....................................................................................................
Other .......................................................................................................................
Total non-current liabilities ...............................................................................

$

$

6,384
19,970
—
2,464
2,953
31,771

$

$

5,409
—
638
1,314
3,800
11,161

December 31,

2019

2018

10. Commitments and Contingencies:

Factoring

The Company maintains arrangements under which eligible accounts receivable in Japan are sold without recourse to 
unrelated third-party financial institutions. These receivables were not included in the consolidated balance sheets as the criteria 
for sale treatment had been met. The Company sold $9,018 of receivables during the year ended December 31, 2019. There 
were no material gains or losses on the sale of such receivables. There were no amounts due from such third-party financial 
institutions at December 31, 2019.

Intellectual Property Indemnification Obligations

The  Company  has  entered  into  agreements  with  customers  that  include  limited  intellectual  property  indemnification 
obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party 
for certain damages and costs incurred as a result of third-party intellectual property claims arising from these transactions. The 
nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the 
maximum  potential  amount  it  could  be  required  to  pay  to  its  customers.  Historically,  the  Company  has  not  made  any 
indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial 
statements with respect to these indemnification guarantees.

Warranty Reserves

The Company generally provides a warranty on its products for a period of 12 to 14 months against defects in material 
and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in 
the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. 
The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. 
Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 14 months prior to the year-
end and warranty accruals are related to sales during the same year.

Changes in the Company’s warranty reserves are as follows:

Balance, beginning of the period ............................................................................
Accruals.............................................................................................................
Warranty liability assumed in Merger ...............................................................
Usage.................................................................................................................
Balance, end of the period ......................................................................................

$

$

2,441
4,265
4,227
(4,585)
6,348

$

$

2,427
3,486
—
(3,472)
2,441

Year Ended December 31,

2019

2018

F-30

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Legal Matters

From  time  to  time,  the  Company  is  subject  to  legal  proceedings  and  claims  in  the  ordinary  course  of  business. The 

following reflects an overview of the material activities with regard to these matters. 

Optical Solutions Inc. v. Nanometrics Incorporated (Case No. 18-cv-00417-BLF): On August 2, 2017, Nanometrics was 
named as defendant in a complaint filed in New Hampshire Superior Court (“Complaint”). The Complaint, brought by Optical 
Solutions, Inc. (“OSI”), alleges claims arising from a purported exclusive purchase contract between OSI and Nanometrics 
pertaining to certain product. On September 18, 2017, Nanometrics removed the action to the United States District Court for 
the District of New Hampshire. On September 25, 2017, Nanometrics moved to transfer the Complaint to the District Court for 
the Northern District of California (the “Court”). On December 20, 2017, Nanometrics filed its complaint against OSI in the 
California Superior Court for the County of Santa Clara alleging claims arising from OSI’s breach of certain purchase orders. 
Nanometrics’ complaint was later removed by OSI to the Northern District of California. On May 29, 2018, the District Court 
of New Hampshire issued an order granting Nanometrics’ motion to transfer the Complaint to the Northern District of California 
and  denying  Nanometrics’  motion  to  dismiss  the  Complaint  without  prejudice.  On  June  14,  2018,  the  Complaint  was 
consolidated with Nanometrics’ complaint against OSI. On August 9, 2018, OSI filed an Amended Complaint. On September 
19, 2018, Nanometrics filed a motion to dismiss OSI’s Amended Complaint for failure to state a claim. Nanometrics’ motion
to dismiss was heard on February 28, 2019. On March 5, 2019, the Court granted Nanometrics’ Motion to Dismiss with 
leave to amend. OSI filed a Second Amended Complaint on March 29, 2019. Nanometrics filed a motion to dismiss OSI’s 
Second Amended Complaint on May 31, 2019. In October of 2019, Nanometrics was renamed Onto Innovation Inc. as a 
result of the Merger.  Thereafter, the Company’s second motion to dismiss was heard on November 14, 2019.  On November 
26, 2019 the Court granted the Company’s Motion to dismiss with leave to amend. OSI filed a Third Amended Complaint 
on January 21, 2020.  Trial has been set for May 16, 2022.  At this time, the Company does not anticipate the outcome of this 
matter to have a material impact on its financial position, results of operations, or cash flows.

Following  the  announcement  of  the  proposed  merger  transaction  between  Nanometrics  Incorporated  and    Rudolph 
Technologies, Inc., two purported class action complaints and three complaints were filed on behalf of Rudolph’s stockholders 
against Rudolph and its directors; of those five complaints, three were filed in the United States District Court for the District 
of Delaware, one in the United States District Court for the District of New Jersey, and one in the United States District Court 
for the District of Massachusetts. One of those five complaints also named Nanometrics and the subsidiary formed to effectuate 
the proposed merger transaction as defendants. A sixth complaint was filed on behalf of a Nanometrics stockholder against 
Nanometrics and its directors in the United States District Court for the Northern District of California. The complaints are 
captioned as follows: Stein v. Rudolph Technologies, Inc., et al. (D. Del.); Rosenblatt et al. v. Rudolph Technologies, Inc., et 
al. (D. Del.); Stein et al. v. Rudolph Technologies, Inc., et al. (D. Del.); Parikh v. Rudolph Technologies, Inc., et al. (D.N.J.); 
Roy v. Rudolph Technologies, Inc., et al. (D. Mass.); and Bryden-Moore v. Nanometrics Inc., et al. (N.D. Cal.). The Company
refers to these actions collectively as the “Shareholder Actions.”  The complaints in the Shareholder Actions generally asserted 
claims under Sections 14(a) and 20(a) of the Exchange Act challenging the adequacy of certain disclosures made in the version
of the joint proxy statement/prospectus filed with the SEC on August 15, 2019, or, solely with respect to the complaint captioned 
Roy v. Rudolph Technologies, Inc., et al. (D. Mass.), the version of the joint proxy statement/prospectus filed with the SEC on 
September 10, 2019. The complaints generally sought, among other relief, an injunction preventing Rudolph from holding the 
Rudolph  special  meeting  or  consummating  the  transaction,  an  injunction preventing  the Company  from  consummating  the 
transaction, damages in the event that the merger is consummated, and attorneys’ fees.  On October 11, 2019, plaintiffs in each 
of the Shareholder Actions agreed in principle to dismiss their claims in connection with the issuance of certain supplemental 
disclosures regarding the transaction and reserved the right to seek attorneys’ fees.  The supplemental disclosures were filed 
with the Securities and Exchange Commission that same day.  Subsequently, each of the plaintiffs filed a Notice of Voluntary 
Dismissal  and  a  negotiation  regarding  the  collective  plaintiffs’  mootness  fee  claims  was  finalized.    The  payment  for  the 
plaintiffs’ mootness fee claims, which was immaterial, was thereafter made and the Shareholder Actions have been closed.

Royalty Agreements

Under various licensing agreements, the Company is obligated to pay royalties based on net sales of products sold. There 
are  no  minimum annual  royalty  payments.  Royalty  expense  amounted  to  $1,429,  $1,904  and  $1,117  for  the  years  ended 
December 31, 2019, 2018 and 2017, respectively.

F-31

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Open and Committed Purchase Orders

The Company has open and committed purchase orders of $97,877 as of December 31, 2019.

Line of Credit

The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable 
securities the Company has with the bank.  The Company is permitted to borrow up to 70% of the value of eligible securities 
held at the time the line of credit is accessed.  The available line of credit as of December 31, 2019 was approximately $91,258 
with an available interest rate of 3.3%.  The credit agreement is available to the Company until such time that either party 
terminates the arrangement at their discretion.  The Company has not utilized the line of credit to date.

11. Revenue

The following table represents a disaggregation of revenue by timing of revenue:

Point-in-time............................................................................................
Over-time.................................................................................................

Total revenue.................................................................................

Year Ended December 31,

2019

2018

286,130
19,766

305,896

$

$

257,124
16,660

273,784

$

$

See  Note  16  of  the  Notes  to  the  Consolidated  Financial  Statements  for  additional  discussion  of  the  Company’s 

disaggregated revenue in detail.

Contract Liabilities

The Company records contract liabilities when the customer has been billed in advance of the Company completing its 

performance obligations. These amounts are recorded as deferred revenue in the Consolidated Balance Sheets.

Changes in deferred revenue were as follows:

Balance, beginning of the period .............................................................
Deferred revenue assumed in Merger.................................................
Deferral of revenue.............................................................................
Recognition of deferred revenue ........................................................
Balance, ending of the period ..................................................................

$

$

Year Ended December 31,

2019

2018

8,080
5,931
28,651
(27,569)
15,093

$

$

7,206
—
19,326
(18,452)
8,080

12.

Share-Based Compensation and Employee Benefit Plans:

Share-Based Compensation Plans

The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive 
for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth 
of  the  Company. The  Company  settles  restricted  stock  unit  awards  and  stock  option  exercises  with  newly  issued  common 
shares.

Rudolph Technologies, Inc. 2018 Stock Plan (the “2018 Plan”). The 2018 Plan provides for the grant of 2,709 stock 
awards and stock options to employees, directors and consultants at an exercise price equal to or greater than the fair market 
value of the common stock on the date of grant. Restricted stock units granted under the 2018 Plan typically vest over a three 
to five-year period for employees and one year for directors; however, other vesting periods are allowable under the 2018 Plan. 
Restricted stock units granted to employees have time based or performance based vesting.  If options were to be granted under 
the  2018  Plan, they  would  typically  grade vest  over  a  five-year period  and expire  ten  years  from  the  date  of  grant.   As  of 

F-32

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

December 31, 2019 and 2018, there were shares of common stock available for issuance pursuant to future grants under the 
2018 Plan totaling 2,478 and 2,680, respectively.

Rudolph Technologies, Inc. 2009 Stock Plan (the “2009 Plan”). The 2009 Plan provided for the grant of 4,711 stock 
options and other stock awards to employees, directors and consultants at an exercise price equal to or greater than the fair 
market value of the common stock on the date of grant. Options granted under the 2009 Plan typically grade vested over a five-
year period and expired ten years from the date of grant. Restricted stock units granted under the 2009 Plan typically vested 
over a three to five-year period for employees and one year for directors; however, other vesting periods were allowable under 
the 2009 Plan. Restricted stock units granted to employees have time based or performance based vesting.  In the second quarter 
of 2018, the 2009 Plan was terminated and therefore as of December 31, 2019 and 2018, there were no shares of common stock 
available for issuance pursuant to future grants under the 2009 Plan.  

Nanometrics  Incorporated  2005  Amended  and  Restated  Equity Incentive  Plan  (the  “2005  Plan”).  The  2005  Plan 
provides for the grant of 4,714 stock options and other stock awards to employees, directors and consultants at an exercise price 
equal to the fair market value of the common stock on the date of grant. Options granted under the 2005 Plan typically grade 
vest over a three-year period and expire ten years from the date of grant. Restricted stock units granted under the 2005 Plan 
typically vest over a three-year period for employees and one year for directors; however, other vesting periods are allowable 
under  the  2005  Plan.  Restricted  stock  units  granted  to  employees  have  time  based  or  performance  based  vesting.   As  of 
December 31, 2019, there were 1,253 shares of common stock available for issuance pursuant to future grants under the 2005 
Plan. 

The following table reflects share-based compensation expense by type of award:

Share-based compensation expense:

Restricted stock units, including all performance and market

based awards ...........................................................................
Stock options and employee stock purchase options...................
Total share-based compensation .......................................................
Tax effect on share-based compensation .....................................
Net effect on net income...................................................................
Effect on earnings per share:

Basic............................................................................................
Diluted.........................................................................................

2019

Year Ended December 31,
2018

2017

$

$

$
$

10,421
164
10,585
2,283
8,302

$

$

6,062
—
6,062
1,362
4,700

$

$

(0.28) $
(0.28) $

(0.18) $
(0.18) $

5,433
237
5,670
2,052
3,618

(0.14)
(0.14)

F-33

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Restricted Stock Unit Activity

A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2019, 2018 

and 2017 follows:

Nonvested at December 31, 2016 ...........................................................................
Granted..............................................................................................................
Vested ................................................................................................................
Forfeited ............................................................................................................
Nonvested at December 31, 2017 ...........................................................................
Granted..............................................................................................................
Vested ................................................................................................................
Forfeited ............................................................................................................
Nonvested at December 31, 2018 ...........................................................................
Granted..............................................................................................................
Assumed in Merger ...........................................................................................
Vested ................................................................................................................
Forfeited ............................................................................................................
Nonvested at December 31, 2019 ...........................................................................

Number of
Shares

Weighted
Average
Grant Date
Fair Value

914
225
(258)
(65)
816
228
(325)
(80)
639
271
598
(366)
(35)
1,107

$
$
$
$
$
$
$
$
$
$
$
$
$
$

15.29
28.23
14.80
17.14
18.50
34.80
17.73
22.12
24.26
29.58
31.43
25.69
26.44
28.89

As of December 31, 2019, there was $22,230 of total unrecognized compensation cost related to restricted stock units 

granted under the plans. That cost is expected to be recognized over a weighted average period of 1.9 years.

F-34

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

Stock Option Activity

A summary of the Company’s stock option activity with respect to the years ended December 31, 2019, 2018 and 2017 

follows:

Weighted
Average
Exercise
Price
Per Share

Weighted
Average
Remaining
Contractual
Term (years)

Aggregate
Intrinsic Value

Shares

Outstanding at December 31, 2016.....................................
Granted..........................................................................
Exercised .......................................................................
Expired ..........................................................................
Forfeited ........................................................................
Outstanding at December 31, 2017.....................................
Granted..........................................................................
Exercised .......................................................................
Expired ..........................................................................
Forfeited ........................................................................
Outstanding at December 31, 2018.....................................
Granted..........................................................................
Assumed in Merger .......................................................
Exercised .......................................................................
Expired ..........................................................................
Forfeited ........................................................................
Outstanding at December 31, 2019.....................................
Vested or expected to vest at December 31, 2019...............
Exercisable at December 31, 2019......................................

173
—
(114)
—
—
59
—
(22)
—
—
37
—
12
(2)
—
—
47
47
47

$

$

$
$
$

12.67
—
11.37
—
—
15.20
—
15.20
—
—
15.20
—
16.27
14.96
—
—
15.49
15.49
15.49

2.4
2.4
2.4

$
$
$

985
985
985

The total intrinsic value of the stock options exercised during 2019, 2018 and 2017 was $51, $384 and $853, respectively.  

As of December 31, 2019, there was no unrecognized compensation cost related to stock options granted under the plans.

The options outstanding and exercisable at December 31, 2019 were in the following exercise price ranges:

Range of Exercise Prices

Shares

$14.08 - $14.08 .......................
$15.20 - $15.20 .......................
$15.61 - $18.22 .......................
$18.79 - $18.79 .......................
$14.08 - $18.79 .......................

1
35
9
1
47

Options Outstanding
Weighted
Average
Remaining
Contractual
Life (years)
0.7
3.0
0.5
1.2
2.4

Weighted
Average
Exercise Price
14.08
$
15.20
$
16.37
$
18.79
$
15.49
$

Options Exercisable

Shares

Weighted
Average
Exercise Price
14.08
$
15.20
$
16.37
$
18.79
$
15.49
$

1
35
9
1
47

Employee Stock Purchase Plan

Rudolph Technologies, Inc. 2018 Employee Stock Purchase Plan (the “2018 ESPP”). The 2018 ESPP was terminated 
in the third quarter of 2019 as a result of the Merger.  Under the terms of the ESPP, eligible employees may have had up to 15% 
of eligible compensation deducted from their pay and applied to the purchase of shares of Company common stock. The price 
the employee would pay for each share of stock was 95% of the fair market value of Company common stock at the end of the 

F-35

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

applicable six-month purchase period. The ESPP was intended to qualify under Section 423 of the Internal Revenue Code and
was a non-compensatory plan as defined by FASB ASC 718, “Stock Compensation.” No stock-based compensation expense 
attributable to the 2018 ESPP was recorded for the years ended December 31, 2019, 2018 and 2017.

Nanometrics Incorporated Amended and Restated 2003 Employee Stock Purchase Plan (the “2003 ESPP”). Under the 
terms of the 2003 ESPP, eligible employees may have up to 10% of eligible compensation deducted from their pay and applied 
to the purchase of shares of Company common stock. The price the employee pays for each share of stock is 85% of the lesser 
of the fair market value of Company common stock at the beginning or the end of the applicable six-month purchase period. 
The 2003 ESPP is intended to qualify under Section 423 of the Internal Revenue Code and is a compensatory plan as defined 
by FASB ASC 718, “Stock Compensation.” Stock-based compensation expense attributable to the 2003 ESPP was $165 for 
the year ended December 31, 2019.  

Through the Company’s employee stock purchase plans, employees purchased 72, 13 and 11 shares during the twelve 
months ended December 31, 2019, 2018 and 2017, respectively.  As of December 31, 2019 and 2018, there were 236 and 1,206, 
shares available for issuance under the Company’s employee stock purchase plans, respectively.

401(k) Savings Plan

The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation 
to the Plan on a pre-tax or after-tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue 
Service. The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary.  Matching 
contributions  to  the  plan  totaled  $1,317,  $1,118  and  $1,047  for  the  years  ended  December 31,  2019,  2018  and  2017, 
respectively.

13. Other Income (Expense), Net:

Other income (expense), net is comprised of the following:

Foreign currency exchange gains (losses), net..................................
Gain on casualty insurance claim .....................................................
Rental income ...................................................................................
Other .................................................................................................
Total other income (expense), net ...............................................

$

$

2019

Year Ended December 31,
2018

2017

676
—
2
102
780

$

$

(255) $
302
—
9
56

$

(457)
—
—
—
(457)

14.

Income Taxes:

The components of income tax expense are as follows:

Current:

Federal.........................................................................................
State.............................................................................................
Foreign ........................................................................................

$

Deferred:

Federal.........................................................................................
State.............................................................................................
Foreign ........................................................................................

Total income tax expense (benefit) ........................................

$

2019

Year Ended December 31,
2018

2017

(27) $
88
1,548
1,609

(4,730)
506
108
(4,116)
(2,507) $

4,423
1,038
626
6,087

1,961
(73)
275
2,163
8,250

$

$

6,020
507
3,159
9,686

17,034
643
(470)
17,207
26,893

F-36

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

The income before tax is comprised of the following:

Domestic operations .........................................................................
Foreign operations ............................................................................

$
$

2019

Year Ended December 31,
2018

(7,087) $
$
6,490

49,089
4,257

$
$

2017

57,079
2,723

The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal 
income tax rate of 21% for the years ended December 31, 2019 and 2018, and 35% for years ended December 31, 2017 to 
income before provision for income taxes as follows:

Federal income tax provision at statutory rate ..................................
State taxes, net of federal effect ........................................................
Foreign taxes, net of federal effect....................................................
Domestic manufacturing benefit.......................................................
Foreign Derived Intangible Income ("FDII") Deduction..................
Global Intangible Low-Taxes Income ("GILTI") inclusion ..............
Non-deductible officer's compensation.............................................
Research & development tax credit ..................................................
Remeasurement of deferred tax balances, related to the Tax Act......
Transition tax on foreign earnings, related to the Tax Act ................
Other .................................................................................................
Provision (benefit) for income taxes ...........................................
Effective tax rate .........................................................................

$

$

Deferred tax assets and liabilities are comprised of the following:

2019

Year Ended December 31,
2018

2017

$

$

(125)
113
(1,277)
—
(2,278)
1,786
826
(2,126)
—
—
574
(2,507)
420%

11,203
747
17
—
(2,217)
113
526
(2,298)
(33)
138
54
8,250

$

$

20,931
573
(238)
(1,569)
—
—
—
(1,559)
8,020
(106)
841
26,893

15%

45%

Deferred Tax Assets:

Reserves and accruals ......................................................................................
Deferred revenue..............................................................................................
Share-based compensation ...............................................................................
Tax credit carryforward....................................................................................
Net operating losses .........................................................................................
Depreciation and amortization .........................................................................
Operating lease right-of-use assets (1)...............................................................
Other ................................................................................................................
Gross deferred tax assets..................................................................................
Less: valuation allowance ................................................................................
Total deferred tax assets after valuation allowance..........................................

Deferred Tax Liabilities:

Depreciation and amortization .........................................................................
Operating lease liabilities (1).............................................................................
Other ................................................................................................................
Gross deferred tax liabilities ............................................................................
Net deferred tax assets (liabilities)......................................................................

$

$

December 31,

2019

2018

8,254
1,219
2,955
11,307
6,008
7,151
4,965
1,128
42,987
(14,160)
28,827

(89,286)
(4,709)
(416)
(94,411)
(65,584)

$

$

4,880
1,201
1,259
2,484
1,692
4,298
—
777
16,591
(3,172)
13,419

(609)
—
—
(609)
12,810

(1) As discussed in Note 7 to the Consolidated Financial Statements, in 2019, the Company adopted an updated accounting standard that 
resulted in the recognition of operating right-of-use assets and lease liabilities.  The Company adopted this standard using a transition 
method that does not require application to periods prior to adoption.  

F-37

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

At December 31, 2019 and 2018, the Company had recorded valuation allowances of $14,160 and $3,172, respectively, 
on a certain portion of the Company’s deferred tax assets to reflect the deferred tax assets at the net amount that is more likely 
than not to be realized.  The Company maintained a full valuation allowance on its remaining foreign tax credits in the amount 
of $2,366, as well as maintaining a full valuation allowances against its China, Switzerland and United Kingdom deferred tax 
assets of $478, $3,434 and $443, respectively.  The Company also maintained a valuation allowance against a portion of its 
California deferred tax assets of $7,439.

In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined 
that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against 
the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the 
periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of 
deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment.  In 
making  the  determination  that  it  is more  likely  than  not  that  the  Company’s  deferred  tax  assets  will  be  realized  as  of 
December 31, 2019, the Company relied primarily on the reversal of deferred tax liabilities as well as projected future taxable 
income.

At December 31, 2019, the Company had federal, state and foreign net operating loss carryforwards of $1,997, $25,630 
and $20,986, respectively. The federal, state and foreign net operating loss carryforwards expire on various dates beginning in 
2020 through 2035.

At  December 31,  2019,  the  Company  had  federal  and  state  research &  development  credits  and  foreign  tax  credit 
carryforwards of $6,859, $9,948 and $2,366, respectively.  The state research & development credits are set to expire at various 
dates beginning in 2025. The foreign tax credit is set to expire at various dates through December 31, 2029.

As  of  December  31, 2019,  the  Company  has provided  U.S.  income  taxes  on  all  its  foreign  earnings.   The  Company 
continues  to  permanently  reinvest  the  cash  held  offshore  to support  its  working  capital  needs.   Accordingly,  no  additional 
foreign withholding taxes that may be required from certain jurisdictions in the event of a cash distribution have been provided
for.  

The total amount of unrecognized tax benefits are as follows:

Balance, beginning of the period ......................................................
Gross increases—tax positions in prior period............................
Gross decreases—tax positions in prior period ...........................
Gross increases—current-period tax positions ............................
Lapse of statute of limitations .....................................................
Balance, end of the period ................................................................

$

$

5,528
9,989
(932)
558
—
15,143

$

$

4,880
496
(61)
213
—
5,528

$

$

4,827
171
(362)
244
—
4,880

2019

December 31,
2018

2017

The unrecognized tax benefit at December 31, 2019 and 2018 were $15,143 and $5,528, respectively, of which $10,649 
and $4,995, respectively, would be reflected as an adjustment to income tax expense if recognized.  The year over year increase 
from 2018 to 2019 is primarily due to additional unrecognized tax benefits related to federal tax exposures.  It is reasonably 
possible that certain amounts of unrecognized tax benefits may reverse in the next 12 months; however, the Company does not 
expect such reversals to have a significant impact on its results of operations or financial position.

The  Company  recognizes  accrued  interest  and  penalties  related  to  unrecognized  tax  benefits  in  income  tax  expense. 
During the years ended December 31, 2019, 2018 and 2017, the Company recognized approximately $236, $199 and $246, 
respectively, in interest and penalties expense associated with uncertain tax positions. As of December 31, 2019 and 2018, the 
Company had accrued interest and penalties expense related to unrecognized tax benefits of $1,681 and $1,445, respectively.

The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions.   The 
Company is subject to ordinary statute of limitation rules of three and four years for federal and state returns, respectively.  

F-38

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

However, due to tax attribute carryforwards, the Company is subject to examination for tax years 2003 forward for U.S. federal
tax purposes.  The Company is also subject to examination in various states for tax years 2002 forward.  The Company is 
subject  to examination  for  tax  years  2011  forward  for  various  foreign  jurisdictions.  The  Company  believes  that  adequate 
amounts have been reserved for any adjustments that may ultimately result from any future examinations of these years.

In the normal course of business, the Company is subject to tax audits in various jurisdictions, and such jurisdictions may 
assess additional income taxes or other taxes against it. Although the Company believes its tax estimates are reasonable, the 
final determination of tax audits and any related litigation could be materially different from the Company’ s historical income 
tax provisions and accruals. The results of an audit or litigation could have a material adverse effect on the Company’ s results 
of operations or cash flows in the period or periods for which that determination is made.

15. Accumulated Other Comprehensive Loss:

Comprehensive  income  includes  net  income,  foreign  currency  translation  adjustments,  and  net  unrealized  gains  and 
losses on available-for-sale debt securities.  See the Consolidated Statements of Comprehensive Income for the effect of the 
components of comprehensive income on the Company’s net income.

The components of accumulated other comprehensive loss, net of tax, are as follows:

Foreign currency
translation
adjustments

Net unrealized
(gains) losses on
marketable
securities

Accumulated
other
comprehensive
loss (income)

Balance at December 31, 2017 .........................................................
Net current period other comprehensive loss ..............................
Reclassifications..........................................................................
Balance at December 31, 2018 .........................................................
Net current period other comprehensive income.........................
Reclassifications..........................................................................
Balance at December 31, 2019 .........................................................

$

$

1,079
194
—
1,273
(709)
—
564

$

$

126
(136)
—
(10)
44
—
34

$

$

1,205
58
—
1,263
(665)
—
598

16.

Segment Reporting and Geographic Information:

The Company is engaged in the design, development, manufacture and support of high-performance control metrology, 
defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. 
The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and 
support of high-performance process control defect inspection and metrology, advanced packaging lithography and process 
control software systems used by microelectronics device manufacturers. Therefore, the Company has one reportable segment. 
The Company’s chief operating decision maker is the Chief Executive Officer (the “CEO”). The CEO allocates resources and 
assesses performance of the business and other activities at the reportable segment level. 

The following table lists the different sources of revenue:

Systems and software .....................................................
Parts ................................................................................
Services...........................................................................
Total revenue........................................................

2019

$255,723
34,892
15,281
$305,896

Year Ended December 31,
2018

2017

84% $234,241
11% 28,658
5% 10,885
100% $273,784

86% $216,884
10% 27,143
4% 11,071
100% $255,098

85%
11%
4%
100%

F-39

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

The Company’s significant operations outside the United States include sales, service and application offices in Asia and 
Europe. For geographical revenue reporting, revenue is attributed to the geographic location to which the product is shipped. 
Revenue by geographic region is as follows:

2019

Year Ended December 31,
2018

2017

Revenue from third parties:

United States .................................................................................
Taiwan ...........................................................................................
South Korea...................................................................................
Singapore.......................................................................................
Japan..............................................................................................
Germany........................................................................................
China .............................................................................................
Other Europe .................................................................................
Other Asia......................................................................................
Total revenue............................................................................

$

$

46,717
66,601
43,997
10,699
29,816
4,899
80,017
18,124
5,026
305,896

$

$

43,944
45,312
51,750
14,371
22,361
14,913
63,243
12,260
5,630
273,784

$

$

36,104
63,079
44,180
12,775
18,943
15,580
35,925
23,768
4,744
255,098

In 2019, sales to Taiwan Semiconductor Manufacturing Co. Ltd and SK Hynix Inc. accounted for 13.4% and 13.1%, 
respectively, of the Company’s revenue.  In 2018, sales to SK Hynix Inc. accounted for 12.2% of the Company’s revenue.  No 
individual end user customer accounted for more than 10% of the Company’s revenue in 2017.  The Company does not have 
purchase contracts with any of its customers that obligate them to continue to purchase its products. 

At December 31, 2019, one customer, Taiwan Semiconductor Manufacturing Co. Ltd., accounted for more than 10% of 
net  accounts  receivable.   At  December  31,  2018,  no  individual  customer  accounted  for  more  than  10%  of  net  accounts 
receivable.

Substantially all of the Company’s long-lived assets are located within the United States of America.

17. Earnings Per Share:

Basic earnings per share is calculated using the weighted average number of shares of common stock outstanding during 
the  period.  Diluted  earnings per  share  is  computed  in  the same  manner  and  also gives effect  to  all dilutive  common  stock 
equivalent shares outstanding during the period.   Potential common shares that would have the effect of increasing diluted 
earnings  per  share  are  considered  to  be anti-dilutive.    In  accordance  with  U.S.  GAAP,  these  shares  were  not  included  in 
calculating diluted earnings per share.

For the year ended December 31, 2019, the weighted average number of restricted stock units and stock options excluded 
from the computation of diluted earnings per share were 69 and 0, respectively.  For the year ended December 31, 2018, the 
weighted average number of restricted stock units and stock options excluded from the computation of diluted earnings per 
share were 52 and 0, respectively.  For the year ended December 31, 2017, the weighted average number of restricted stock 
units and stock options excluded from the computation of diluted earnings per share were 8 and 0, respectively. 

F-40

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

The Company’s basic and diluted earnings per share amounts are as follows:

Numerator:

Net income ..................................................................................

$

1,910

$

45,096

$

32,909

Denominator:

Basic earnings per share - weighted average shares

outstanding ...............................................................................

29,729

25,470

25,325

2019

December 31,
2018

2017

Effect of potential dilutive securities:
Restricted stock units and stock options - dilutive

shares........................................................................................
Warrants - dilutive shares ............................................................
Diluted earnings per share - weighted average shares

outstanding ...............................................................................

Earnings per share:

278
—

426
—

539
1

30,007

25,895

25,865

Basic............................................................................................
Diluted.........................................................................................

$
$

0.06
0.06

$
$

1.77
1.74

$
$

1.30
1.27

F-41

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

18.

Shares Repurchase Authorization:

In October 2018, the Rudolph Board of Directors approved a share repurchase authorization, which allowed Rudolph to 
repurchase up to $40,000 worth of shares of the Rudolph’s common stock.  The authorization provided for repurchases to be 
made  in  the  open  market  or  through  negotiated  transactions  from  time  to  time.  The  share  repurchase  authorization  was 
terminated on October 25, 2019 due to the closing of the Merger. 

The following table summarizes the Company’s stock repurchases:

Shares of common stock repurchased.................................
Cost of stock repurchased ...................................................
Average price paid per share...............................................

$
$

37
744
19.85

$
$

1,061
21,069
19.86

$
$

—
-
-

2019

Year Ended December 31,
2018

2017

Following the Merger, the Company assumed the share repurchase authorization approved on March 14, 2019, by the 
former Nanometrics Board of Directors.  This share repurchase authorization allows for the Company to purchase up to $80,000 
worth of shares of its common stock. Under the terms of this share repurchase authorization, shares may be repurchased through 
open market or privately negotiated transactions. No shares have been repurchased under this repurchase authorization as of 
December 31, 2019.

F-42

ONTO INNOVATION INC.

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS—(Continued)
(In thousands, except per share data)

19. Quarterly Consolidated Financial Data (unaudited):

The  following  tables  present  certain  unaudited  consolidated  quarterly  financial  information  for  the  years  ended 
December 31, 2019 and 2018. In the opinion of the Company’s management, this quarterly information has been prepared on 
the  same  basis  as  the  consolidated  financial  statements  and  includes  all  adjustments  (consisting  only  of  normal  recurring 
adjustments) necessary to present fairly the information for the periods presented. The results of operations for any quarter are 
not necessarily indicative of results for the full year or for any future period.

Year-over-year quarterly comparisons of the Company’s results of operations may not be meaningful, as the sequential 
quarterly  comparisons  set  forth  below  tend  to  reflect  the  cyclical  activity  of  the  semiconductor  industry  as  a  whole. Other
quarterly fluctuations in expenses are related directly to sales activity and volume and may also reflect the timing of operating 
expenses incurred throughout the year, and changes in tax rates.

Revenue ...................................................................
Gross profit ..............................................................
Income (loss) before income taxes ..........................
Net income (loss).....................................................
Income (loss) per share:

Quarters Ended

$

March 31,
2019
60,892
32,019
8,795
7,576

$

June 30,
2019
61,511
31,911
6,121
5,526

September 30,
2019

$

62,935
31,511
6,908
6,560

December 31,
2019
$ 120,558
39,587
(22,421) $
(17,752) $

Total
$ 305,896
$ 135,028
(597)
1,910

Basic...................................................................
Diluted................................................................

$
$

0.31
0.30

$
$

0.22
0.22

$
$

0.26
0.26

$
$

(0.41) $
(0.41) $

0.06
0.06

Weighted average number of shares outstanding:

Basic...................................................................
Diluted................................................................

24,863
25,144

25,032
25,250

25,079
25,305

43,609
43,609

29,729
30,007

Revenue ...................................................................
Gross profit ..............................................................
Income before income taxes ....................................
Net income...............................................................
Income per share:

Quarters Ended

$

March 31,
2018
73,096
42,421
17,674
15,130

$

June 30,
2018
77,476
41,736
17,290
14,697

September 30,
2018

$

60,432
31,454
8,368
7,187

$

December 31,
2018
62,780
32,668
10,014
8,082

Total
$ 273,784
148,279
53,346
45,096

Basic...................................................................
Diluted................................................................

$
$

0.59
0.58

$
$

0.57
0.56

$
$

0.28
0.28

$
$

0.32
0.32

$
$

1.77
1.74

Weighted average number of shares outstanding:

Basic...................................................................
Diluted................................................................

25,463
25,989

25,621
26,086

25,655
26,063

25,146
25,449

25,470
25,895

F-43

ONTO INNOVATION INC. AND SUBSIDIARIES

SCHEDULE OF VALUATION AND QUALIFYING ACCOUNTS
(In thousands)

Column A

Description
Year 2019:

Allowance for doubtful

Column B
Balance at
Beginning of
Period

Column C

Column D

Column E

Charged to (Recovery
of) Costs and Expense

Charged to Other
Accounts (net)

Deductions

Balance at
End of Period

accounts......................

$

691 $

363 $

— $

(193) $

1,247

Deferred tax valuation

allowance....................
Allowance for convertible
notes receivable ..........

Year 2018:

Allowance for doubtful

3,172

—

accounts......................

$

460 $

Deferred tax valuation

allowance....................

Year 2017:

Allowance for doubtful

2,447

942

2,000

293 $

725

10,046

—

—

—

— $

62 $

—

—

accounts......................

$

680 $

(222) $

— $

(2) $

Deferred tax valuation

allowance....................

1,924

626

(103)

—

14,160

2,000

691

3,172

460

2,447

F-44

PURSUANT TO THE REQUIREMENTS OF SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT 
OF 1934, THE REGISTRANT HAS DULY CAUSED THIS REPORT TO  BE  SIGNED ON ITS  BEHALF  BY THE 
UNDERSIGNED, THEREUNTO DULY AUTHORIZED.

SIGNATURES

Onto Innovation Inc.
(Registrant)

By:

/s/ Michael P. Plisinski
Michael P. Plisinski
Chief Executive Officer

Date:

February 25, 2020

PURSUANT TO THE REQUIREMENTS OF THE SECURITIES EXCHANGE ACT OF 1934, THIS REPORT 
HAS BEEN  SIGNED BELOW BY THE FOLLOWING PERSONS ON BEHALF OF THE REGISTRANT AND IN 
THE CAPACITIES AND ON THE DATES INDICATED.

Signature

Title

/s/ Michael P. Plisinski
Michael P. Plisinski

/s/ Steven R. Roth
Steven R. Roth

/s/ Jeffrey A. Aukerman
Jeffrey A. Aukerman

/s/ Leo Berlinghieri
Leo Berlinghieri

/s/ Edward J. Brown, Jr.
Edward J. Brown Jr.

/s/ Vita A Cassese
Vita A. Cassese

/s/ Robert G. Deuster
Robert G. Deuster

/s/  David B. Miller
David B. Miller

/s/ Bruce C. Rhine
Bruce C. Rhine

/s/ Christopher A. Seams
Christopher A. Seams

/s/ Timothy J. Stultz, Ph.D.
Timothy J. Stultz, Ph.D.

/s/ Christine A. Tsingos
Christine A. Tsingos

/s/ John R. Whitten
John R. Whitten

Chief Executive Officer (Principal 
Executive Officer)

Senior Vice President, Chief Financial 
Officer (Principal Financial Officer and 
Principal Accounting Officer)

Director

Director

Director

Director

Director

Director

Director

Director

Director

Director

Director

Date

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

February 25, 2020

SUBSIDIARIES

Name
Rudolph Technologies, Inc.
4D Technology Corporation
Rudolph Technologies Japan K.K.
Nanometrics Japan K.K.
Rudolph Technologies (Shanghai) Trading Co., Ltd.
Nanometrics China Company Ltd.
Rudolph Technologies Germany GmbH
Accent Optical Technologies (Germany) GmbH
Rudolph Technologies Hong Kong Limited
Rudolph Technologies Europe, B.V.
Nanometrics France S.A.S.
Nanometrics (Switzerland) GmbH
Nanometrics U.K. Ltd.
Nanometrics Israel, Ltd.
Nanometrics Korea Limited
Nanometrics Southeast Asia Pte. Limited
Nanometrics Metrology Ireland Limited

Exhibit 21.1

Jurisdiction
U.S.A.
U.S.A.
Japan
Japan
China
China
Germany
Germany
Hong Kong
Netherlands
France 
Switzerland
United Kingdom
Israel
Korea
Singapore
Ireland

Rule 13a-14(a) Certification of Chief Executive Officer
Pursuant to Section 302 of the Sarbanes-Oxley Act of 2002

Exhibit 31.1

I, Michael P. Plisinski, certify that:

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all  material  respects  the  financial  condition,  results  of  operations  and  cash  flows  of  the  registrant  as  of,  and  for,  the 
periods presented in this report;

4. The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

a. Designed  such  disclosure  controls  and  procedures,  or  caused  such  disclosure  controls  and  procedures  to  be 
designed under our supervision, to ensure that material information relating to the registrant, including its consolidated 
subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is 
being prepared;

b. Designed such internal control over financial reporting, or caused such internal control over financial reporting to be 
designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the
preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

c. Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report  our 
conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by 
this report based on such evaluation; and

d. Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during 
the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has
materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting;
and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control  over
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or  persons 
performing the equivalent functions):

a. All significant deficiencies and material weaknesses in the design or operation of internal control over financial 
reporting  which  are  reasonably  likely  to  adversely  affect  the  registrant’s  ability  to  record,  process,  summarize  and 
report financial information; and

b. Any fraud, whether or not material, that involves management or other employees who have a significant role in the 
registrant’s internal control over financial reporting.

Date: February 25, 2020

By:/s/ Michael P. Plisinski
Michael P. Plisinski
Chief Executive Officer

Exhibit 31.2

Rule 13a-14(a) Certification of Chief Financial Officer
Pursuant to Section 302 of the Sarbanes-Oxley Act of 2002

I, Steven R. Roth, certify that:

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all  material  respects  the  financial  condition,  results  of  operations  and  cash  flows  of  the  registrant  as  of,  and  for,  the 
periods presented in this report;

4. The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

a. Designed  such  disclosure  controls  and  procedures,  or  caused  such  disclosure  controls  and  procedures  to  be 
designed under our supervision, to ensure that material information relating to the registrant, including its consolidated 
subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is 
being prepared;

b. Designed such internal control over financial reporting, or caused such internal control over financial reporting to be 
designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the
preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

c. Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report  our 
conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by 
this report based on such evaluation; and

d. Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during 
the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has
materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting;
and

5. The registrant’s other certifying officer  and I have disclosed, based on our most recent evaluation of internal control  over
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or  persons 
performing the equivalent functions):

a. All significant deficiencies and material weaknesses in the design or operation of internal control over financial 
reporting  which  are  reasonably  likely  to  adversely  affect  the  registrant’s  ability  to  record,  process,  summarize  and 
report financial information; and

b. Any fraud, whether or not material, that involves management or other employees who have a significant role in the 
registrant’s internal control over financial reporting.

Date: February 25, 2020

By:/s/ Steven R. Roth
Steven R. Roth
Senior Vice President and Chief Financial Officer

CERTIFICATION OF CHIEF EXECUTIVE OFFICER 
PURSUANT TO 18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Exhibit 32.1

I, Michael P. Plisinski, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley
Act of 2002, that the Annual Report of Onto Innovation Inc. on Form 10-K for the year ended December 31, 2019 fully complies 
with  the  requirements  of  Section  13(a)  or  15(d),  as  applicable,  of  the  Securities  Exchange  Act  of  1934  and  that  the 
information contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition  and 
results of operations of Onto Innovation Inc.

Date: February 25, 2020

By:/s/ Michael P. Plisinski
Michael P. Plisinski
Chief Executive Officer

CERTIFICATION OF CHIEF FINANCIAL OFFICER
PURSUANT TO 18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Exhibit 32.2

I, Steven R. Roth, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act
of 2002, that the Annual Report of Onto Innovation  Inc. on Form 10-K for the year ended December 31, 2019 fully complies 
with  the  requirements  of  Section  13(a)  or  15(d),  as  applicable,  of  the  Securities  Exchange  Act  of  1934  and  that  the 
information contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition  and 
results of operations of Onto Innovation Inc.

Date: February 25, 2020

By:/s/ Steven R. Roth
Steven R. Roth
Senior Vice President and Chief Financial Officer

Forward Looking Statements

This proxy statement contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act 
of 1995 (the “Act”) which include those concerning Onto Innovation’s business momentum and future growth; acceptance of 
Onto Innovation’s products and services; Onto Innovation’s ability to both deliver products and services consistent with its 
customers’ demands and expectations and strengthen its market position; as well as other matters that are not purely historical 
data. Onto Innovation wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results 
may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are 
beyond Onto Innovation’s control.  Such factors include, but are not limited to, the following: variations in the level of orders, 
which  can  be  affected  by  general  economic  conditions;  seasonality  and  growth  rates  in  the  semiconductor  manufacturing 
industry and in the markets served by Onto Innovation’s customers; the global economic and political climates; the impact on 
supply, production, sales and delivery of our products and services due to the global spread of the coronavirus (COVID-19); 
difficulties or delays in product functionality or performance; the delivery performance of sole source vendors; the timing of 
future  product  releases;  failure  to  respond  to  changes  in  technology  or  customer  preferences;  changes  in  pricing  by  Onto 
Innovation or its competitors; Onto Innovation’s ability to leverage its resources to improve its position in its core markets, to 
weather  difficult  economic  environments,  to  open  new  market  opportunities  and  to  target  high-margin  markets;  the 
strength/weakness  of  the  back-end  and/or  front-end  semiconductor  market  segments;  the  imposition  of  tariffs  or  trade 
restrictions and costs, burdens and restrictions associated with other governmental actions; the ability to successfully integrate 
the  businesses  of  Rudolph  and  Nanometrics  promptly  and  effectively  and  to  achieve  the  anticipated  synergies  and  value-
creation contemplated by the Merger within the expected time frame; unanticipated difficulties or expenditures relating to the 
Merger and integration of the Rudolph and Nanometrics businesses; the response of business partners and retention as a result
of the Merger; the diversion of management time in connection with the integration; and the effect of litigation related to the 
Merger. Additional information and considerations regarding the risks faced by Onto Innovation are available in the Company’s
Annual  Report  on  Form  10-K  for  the  year  ended  December  31,  2019  and  other  filings  with  the  Securities  and  Exchange 
Commission. As the forward-looking statements are based on Onto Innovation’s current expectations, the Company cannot 
guarantee any related future results, levels of activity, performance or achievements. Onto Innovation does not assume any 
obligation to update the forward-looking information contained in this proxy statement.

Date:

Time:

Place:

NOTICE OF 2020 ANNUAL MEETING OF STOCKHOLDERS

Tuesday, May 12, 2020

10:00 a.m., Eastern time*

Company principal executive offices located at 16 Jonspin Road, Wilmington, Massachusetts, 01887

Record Date:

Only stockholders of record at the close of business on March 13, 2020 are entitled to vote at the 
meeting and any adjournment or postponement thereof for which no new record date is set.

Items of Business:

1.

To elect the Board’s ten nominees for director to serve until the next annual meeting and until their 
successors are duly elected and qualified;

2.

3.

4.

5.

6.

To approve, on an advisory (non-binding) basis, the compensation of our named executive officers 
as disclosed in this proxy statement;

To approve the Onto Innovation Inc. 2020 Stock Plan;

To approve the Onto Innovation Inc. 2020 Employee Stock Purchase Plan;

To ratify the appointment of Ernst & Young LLP as our independent registered public accounting 
firm for the fiscal year ending December 26, 2020; and

To transact such other business as may properly come before the meeting and any adjournment or 
postponement thereof.

These items of business are described more fully in the accompanying proxy statement.  This year we will be providing 
access  to  our  proxy  materials  via  the internet  in  accordance  with  the  Securities  and  Exchange  Commission’s  “Notice  and 
Access” rules.  On or about April 3, 2020, we will be mailing our Notice of Internet Availability of Proxy Materials to our 
stockholders, which contains instructions for our stockholders’ use of this process, including how to access our 2020 proxy 
statement and 2019 annual report to stockholders and how to vote online.  In addition, the Notice of Internet Availability of 
Proxy materials contains instructions on how you may receive a paper copy of the 2020 proxy statement and 2019 annual report 
to stockholders.

Your vote is important.  As always, but especially now given the uncertainties posed by the Coronavirus (COVID-19) 
pandemic, we encourage you to vote your shares as soon as possible and prior to the Annual Meeting via the internet even if 
you plan to participate in the Annual Meeting.  Voting will ensure your shares are represented at the Annual Meeting, regardless 
of whether you attend the Annual Meeting.  You may cast your vote via the internet, by mail or during the Annual Meeting.  If 
you receive a paper copy of the proxy card by mail, you may also mark, sign, date, and return the proxy card promptly in the 
accompanying postage-prepaid envelope.

*We intend to hold our annual meeting in person. However, we are sensitive to the public health and travel concerns 
our stockholders may have and recommendations that public health officials may issue in light of the evolving coronavirus 
(COVID-19) situation. As a result, we may impose additional procedures or limitations on meeting attendees or may decide to 
hold the meeting in a different location or solely by means of remote communication (i.e., a virtual-only meeting). In such an 
event, we would announce any such updates in additional proxy materials filed with the SEC and in a press release that we 
would make available on our website at https://investors.ontoinnovation.com. We encourage you to check this website prior to 
the meeting if you plan to attend.

IMPORTANT NOTICE REGARDING THE AVAILABILITY OF PROXY MATERIALS FOR THE 

ANNUAL MEETING OF STOCKHOLDERS TO BE HELD MAY 12, 2020:
This notice, the proxy statement, and the 2019 Annual Report to Stockholders are available at:
https://www.ontoinnovation.com/ar-proxy

Wilmington, Massachusetts
April 3, 2020

FOR THE BOARD OF DIRECTORS

Robert A. Koch
Secretary

PROXY SUMMARY

On October 25, 2019 (the “Merger Date”), Rudolph Technologies, Inc. merged with and into Nanometrics Incorporated, which 
was then renamed Onto Innovation Inc. (the “2019 Merger”). Unless otherwise indicated or context otherwise requires, as used 
herein “Nanometrics” refers to Nanometrics Incorporated and its subsidiaries prior to the 2019 Merger and “Rudolph” refers 
to Rudolph Technologies, Inc. and its subsidiaries prior to the 2019 Merger.

This summary highlights information contained elsewhere in the proxy statement. This summary does not contain all of the 
information that you should consider, and you should read the entire proxy statement carefully before voting.

Stockholder Voting Matters

Voting Matter

Board Vote 
Recommendation

Page Reference for 
more information

Proposal 1:   Election of Directors

FOR ALL

Proposal 2:   Advisory Vote on Named Executive Officer Compensation

Proposal 3:   Approval of the Onto Innovation Inc. 2020 Stock Plan

Proposal 4:   Approval of the Onto Innovation Inc. 2020 Employee Stock 

Purchase Plan

Proposal 5:   Ratification of Appointment of Independent Registered 

Public Accounting Firm for the Fiscal Year Ending 
December 26, 2020

FOR

FOR

FOR

FOR

18

30

31

41

44

Corporate Governance Highlights

Snapshot Of Board Composition

The following table presents a snapshot of the expected composition of the Onto Innovation Board of Directors immediately 
following the 2020 Annual Meeting, assuming the election of all nominees named in the proxy statement.

Board Characteristic

Total Number of Directors

Percentage of Independent Directors

Average Age of Directors (years)

Average Tenure of Directors (years)

Separate Chairman and CEO roles

Independent Chairman

Audit Committee Financial Experts

1

Onto 
Innovation

10

90%

61.4

6.3

Yes

Yes

2

Snapshot Of Board Governance And Compensation Policies

The following table presents a snapshot of the Onto Innovation Board Governance and Compensation Policies currently in 
effect.

Policy

Majority Voting for All Directors

Regular Executive Sessions of Independent Directors

Annual Board, Committee and Director Evaluations

Risk Oversight by Full Board and Committees

Independent Audit, Compensation and Nominating & Governance Committees

Code of Business Conduct and Ethics for Employees and Directors

Financial Information Integrity Policy

Stock Ownership Requirement for Directors

Stock Ownership Requirement for CEO

Stock Ownership Requirement for other NEOs

Stock Ownership Requirements for other executives

Anti-Hedging, Anti-Short Sale & Anti-Pledging Policy

Compensation Clawback Policy

No Future Tax Gross-Up Provisions

No Poison Pill

Stock Buyback Program

Double Trigger Change-in-Control Provisions for Executives

2

Onto Innovation

Yes

Yes

Yes

Yes

Yes

Yes

Yes

3x annual retainer

3x base salary

1x base salary

Specified number of 
shares

Yes

Yes

Yes

Yes

Yes

Yes

Snapshot Of Board Governance And Compensation Policies Newly Implemented Or Adjusted In Past Year

The  following  presents  a  snapshot  of  the  Onto  Innovation Board  Governance  and  Compensation  Policies  that  were  newly 
implemented or adjusted in the past year.

•

•

•

•

•

•

As of the Merger Date, the following was established with regard to the Board of Directors:
◦  Board size of twelve (12) Directors.
◦  Board of Directors Chairman: Christopher A. Seams
◦  Audit Committee:

- Five (5) members
- Chairperson:  Christine A. Tsingos

◦  Compensation Committee:
- Five (5) members
- Chairperson:  Edward J. Brown, Jr.
◦  Nominating & Governance Committee:

- Five (5) members
- Chairperson:  Leo Berlinghieri

Prior to the Merger Date, the Nanometrics Board of Directors approved the charters for the Audit, Compensation and 
Nominating  & Governance  Committees, the  Code  of  Business  Conduct  and  Ethics  and  the  Financial  Information 
Integrity Policy and the Summary of Corporate Governance Policies for the Company in order that they be established 
as of the Merger Date in accordance with NYSE listing rules.  Each charter, policy and summary was thereafter ratified 
by the Board of Directors of the Company at the first Board of Directors Meeting following the Merger Date.

Foreign Corrupt Practices Act Policy

At the first Board of Directors meeting following the Merger Date, the Board approved the following policies for Onto 
Innovation:  
◦ 
◦  Related Parties Transaction Policy
◦ 
◦  Director Candidate Policy
◦ 
◦ 
Thereafter, an Incentive Compensation Clawback Policy was approved for the Company.

Insider Trading Compliance Policy
Stockholder Communication Policy

Stock Ownership Policy

The  Company  established  an incentive  compensation  plan for  executives  which  combined  elements  of  the  legacy 
Nanometrics and Rudolph Technologies plans and includes a long-term equity component which utilizes both time-
based and performance-based awards.  The performance-based awards employ a Total Shareholder Return (“TSR”)
calculation  comparing  Company TSR to  a  peer  group  consisting  of  the  thirty  (30)  companies  in  the  Philadelphia 
Semiconductor Index (SOX).

The  Board  of  Directors  determined  that  subsequent  to  the  2020 Annual  Meeting  of  Stockholders  the  size  of  the 
Company Board would be reduced to ten (10) members.

Consistent with Nanometrics’ prior policy, the Board of Directors approved a 52-53-week fiscal year ending on the 
last Saturday in December for the Company.

3

__________________________________________

PROXY STATEMENT
__________________________________________

The  proxy  detailed  herein  is  solicited  on  behalf  of  the  Board  of  Directors  (the  “Board”  or  “Board  of  Directors”)  of  Onto 
Innovation Inc. (“Onto Innovation,” the “Company,” “we,” “us” or “our”) for use at the 2020 Annual Meeting of Stockholders 
to be held May 12, 2020 at 10:00 a.m. Eastern time (the “Annual Meeting”), or at any adjournment or postponement thereof, 
for the purposes set forth herein and in the accompanying Notice of Annual Meeting of Stockholders. The Annual Meeting will 
be held at the Company’s principal executive offices, located at 16 Jonspin Road, Wilmington, Massachusetts 01887. Directions 
to  the  annual  meeting  may  be  found  on  our  website  www.ontoinnovation.com  by  clicking  on  “Company,” “Locations,”
“Massachusetts” and then accessing the interactive map. The Company’s telephone number is (978) 253-6200.

We  intend  to  hold  the Annual  Meeting  in  person.  However,  we  are  sensitive  to  the  public  health  and  travel  concerns  our 
stockholders  may  have  and  recommendations  that  public  health  officials  may  issue  in  light  of  the  evolving  coronavirus 
(COVID-19) situation. As a result, we may impose additional procedures or limitations on meeting attendees or may decide to 
hold the meeting in a different location or solely by means of remote communication (i.e., a virtual-only meeting). In such an 
event, we would announce any such updates in additional proxy materials filed with the SEC and in a press release that would 
be  available  on  our website  at  https://investors.ontoinnovation.com.  We  encourage  you  to  check  this  website  prior  to  the 
meeting if you plan to attend.

On  or  about  Friday, April  3,  2020,  we  will  furnish  a  Notice of  Internet Availability  of  Proxy  Materials  (“Notice”)  to  our 
stockholders containing instructions on how to access the proxy materials online at:

https://www.ontoinnovation.com/ar-proxy

Instructions on how to vote online and to request a printed copy of the proxy materials may be found in the Notice. If you 
received a Notice by mail, you will not receive a paper copy of the proxy materials, unless you request such materials by 
following the instructions contained in the Notice. Your vote is important, regardless of the extent of your holdings. 

QUESTIONS AND ANSWERS ABOUT THE ANNUAL MEETING

What Is The Purpose Of The Annual Meeting?

At the Annual Meeting, stockholders will be asked to vote upon the matters set forth in the accompanying Notice of Annual 
Meeting, including:

•
•
•
•
•

the election of ten (10) directors; 
an advisory resolution on named executive officer compensation;
approval of the Onto Innovation 2020 Stock Plan;
approval of the Onto Innovation 2020 Employee Stock Purchase Plan; and
the ratification of the appointment of our independent registered public accounting firm for fiscal 2020,

all of which are more fully described herein.

Will Other Matters Be Voted On At The Annual Meeting?

We are not currently aware of any other matters to be presented at the Annual Meeting other than those described in this proxy
statement. If any other matters not described in the proxy statement are properly presented at the meeting, any proxies received 
by us will be voted in the discretion of the proxy holders.

4

Who Is Entitled To Vote?

If you were a stockholder of record as of the close of business on March 13, 2020, which is referred to in this proxy statement 
as the “record date,” you are entitled to receive notice of the Annual Meeting and to vote the shares of common stock that you 
held as of the close of business on the record date. Each stockholder is entitled to one (1) vote for each share of common stock 
held by such stockholder on the record date.

May I Attend The Meeting?

All stockholders of record as of the record date may attend the Annual Meeting.

To gain admission, you will need valid picture identification and proof that you are a stockholder of record of the Company as
of the record date, or if you are a beneficial holder, proof from your bank, broker or other record holder of your shares that you
are the beneficial owner of such shares. If you are a beneficial holder and wish to vote your shares at the meeting, you will 
need a legal proxy from your bank, broker or other record holder of your shares. To obtain directions to attend the Annual 
Meeting and vote in person, please contact Investor Relations at 978-253-6200.

What Constitutes A Quorum?

The required quorum for the transaction of business at the Annual Meeting is a majority of the issues and outstanding shares 
of Common Stock of the Company, $0.001 par value per share (“Common Stock”), present in person or by proxy and entitled 
to  vote  at  the Annual  Meeting.    On  the record  date,  50,381,691 shares  of  the  Company’s  Common  Stock  were  issued  and 
outstanding, each entitled to one vote on each matter to be acted upon at the Annual Meeting. Your shares will be counted 
towards the quorum only if you submit a valid proxy (or one is submitted on your behalf by your broker, bank or other nominee) 
or if you vote in person at the meeting.  Abstentions and broker non-votes will be counted to determine whether there is a 
quorum present.  If a quorum is not present, the Annual Meeting may be adjourned or postponed to a later date.

What Are “Broker Non-Votes”?

A broker non-vote occurs when a bank, broker or other registered holder of record holds shares for a beneficial owner, but is 
not empowered to vote on a particular proposal on behalf of such beneficial owner because the proposal is considered “non-
routine” and the beneficial owner has not provided voting instructions on that proposal.  The election of directors, the advisory 
vote on named executive officer compensation, the proposal to approve the Onto Innovation Inc. 2020 Stock Plan, and the 
proposal to approve the Onto Innovation Inc. 2020 Employee Stock Purchase Plan are treated as “non-routine” proposals. This 
means that if a brokerage firm holds your shares on your behalf, those shares will not be voted with respect to any of these 
proposals unless you provide instructions to that firm by voting your proxy.  See below under “What Is the Vote Required for 
Election of Directors?” and “What Is the Vote Required for the Approval of Proposals Other Than Director Elections?” for a 
discussion of the impact of broker non-votes on each of the proposals that will be presented at the Annual Meeting.  In order 
to  ensure  that  any  shares  held  on  your  behalf  by  a  bank,  broker  or  other  registered  holder  of  record  are  voted  in 
accordance with your wishes, we encourage you to provide instructions to that firm or organization in accordance with 
the voting instruction form provided by the broker, bank or other registered holder or to contact your broker, bank or 
other registered holder to request a proxy form.

Who Bears The Cost Of Soliciting Proxies?

The Company will bear the cost of soliciting proxies. In addition, the Company may reimburse brokerage firms and other 
persons representing beneficial owners of shares for their expenses in forwarding solicitation material to such beneficial owners. 
Solicitation of proxies by mail may be supplemented by telephone, facsimile, e-mail or other electronic means or personal
solicitation by directors, officers or regular employees of the Company. No additional compensation will be paid to such persons 
for such services.  We have engaged The Proxy Advisory Group, LLC to assist in the solicitation of proxies and provide related
advice and informational support, for a services fee and the reimbursement of customary disbursements, which are not expected
to exceed $15,000 in total.

Why Did I Receive A “Notice Of Internet Availability Of Proxy Materials” But No Proxy Materials?

We are distributing the Company’s proxy materials to stockholders of record via the internet in accordance with the “Notice 
and Access” approach permitted by rules of the Securities and Exchange Commission (“SEC”). This approach benefits the 
5

environment, while providing a timely and convenient method of accessing the materials and voting.  Accordingly, we have 
sent you a Notice because the Board of Directors of the Company is soliciting your proxy to vote at the 2020 Annual Meeting 
of Stockholders, including at any adjournments or postponements of the meeting.  On or about April 3, 2020, the Company 
will begin mailing the Notice to all stockholders of record entitled to vote at the annual meeting. All stockholders will have 
the ability to access the proxy materials on the website referred to in the Notice or request to receive a printed set of the proxy 
materials. Instructions on how to access the proxy materials over the Internet or to request a printed copy of the proxy materials 
and the Company’s 2019 Annual Report may be found in the Notice.

What Does It Mean If I Received More Than One Notice?

If you receive more than one Notice, your shares may be registered in more than one name or in different accounts. Please 
follow the voting instructions on each of the Notices to ensure that all of your shares are voted.

How Do I Go About Voting?

You may either vote “For” all the nominees to the Board of Directors or you may “Withhold” your vote for any nominee you 
specify.  For each of the other matters to be voted on, you may vote “For” or “Against” or “Abstain” from voting.

Voting For Shares Registered Directly In The Name Of The Stockholder

If you have a stock certificate or hold shares in an account with our transfer agent, you are considered the “stockholder of 
record” with respect to those shares. You can submit your proxy online by following the instructions on the Notice.  You may 
opt to submit your proxy by requesting a full set of proxy materials be mailed to you and completing and returning the proxy 
in the postage-paid envelope provided.  Stockholders of record may also vote in person at the Annual Meeting. Whether or not 
you plan to attend the meeting, we urge you to vote by proxy to ensure your vote is counted. You may still attend the meeting 
and vote in person even if you have already submitted a proxy.

If you are a stockholder of record with shares registered in your name, you can vote by one of the following methods:

In Person - To vote in person, come to the annual meeting and you will receive a ballot when you arrive.

•
• Via the Internet - To submit your proxy by internet, go to www.investorvote.com/ONTO and follow the instructions 
on the secure website. The deadline for proxy submission via the internet is 11:59 p.m. (EDT) on May 11, 2020.
• Via Telephone  – To  submit your  proxy  by  telephone,  call  toll  free  1-800-652-VOTE  (8683)  within  the  USA,  US

•

territories and Canada.
By Mail – Stockholders who receive a paper proxy card may elect to submit a proxy by mail and should complete, 
sign and date their proxy card and mail it in the pre-addressed postage-paid envelope that accompanies the delivery 
of paper proxy cards.  Proxy cards submitted by mail must be received by the time of the annual meeting in order for 
your shares to be voted.

Further instructions on how to submit a proxy online or by mail are contained in the Notice. Even if you plan to attend the 
meeting, we recommend that you submit your proxy in advance so that your vote will be counted if you later decide not to 
attend the meeting.  Each stockholder of record is entitled to one (1) vote for each share of Common Stock owned by such 
stockholder on all matters presented at the Annual Meeting. Stockholders do not have the right to cumulate their votes in the 
election of directors.

If  you  return  a  signed  and  dated  proxy  but  do  not  indicate  how  the  shares  are  to  be  voted,  those  shares  will  be  voted  in 
accordance with Onto Innovation’s Board of Directors’ recommendations. A valid proxy also authorizes the individuals named 
as proxies to vote your shares in their discretion on any other matters, which, although not described in the proxy statement, 
are properly presented for action at our Annual Meeting. If you indicate on your proxy that you wish to “abstain” from voting
on an item, your shares will not be voted on that item.

While internet proxy voting is being provided to allow you to submit your proxy online, with procedures designed to ensure 
the authenticity and correctness of your proxy vote instructions, please be aware that you must bear any costs associated with
your internet access, such as usage charges from Internet access providers and telephone companies.

6

Voting By Proxy For Shares Registered In Street Name

If your shares are held in a stock brokerage account or by a bank or other holder of record, you are considered the “beneficial 
owner” of shares held in “street name.”  In that case, you may receive a separate voting instruction form, or you may need to 
contact your broker, bank, or other stockholder of record to determine whether you will be able to provide voting instructions
electronically via the internet.  As the beneficial owner, you have the right to direct your broker, bank or other holder of record 
on how to vote your shares by submitting voting instructions to such person in accordance with the directions outlined in your
proxy.  In the event you are considered the “beneficial owner” of shares held in “street name” and you wish to vote in person 
at the annual meeting, you must obtain a valid proxy from your broker, bank or another agent. Follow the instructions from 
your broker or bank included with these proxy materials or contact your broker or bank to request a proxy form.

May I Revoke My Proxy Instructions?

Any proxy given pursuant to this solicitation may be revoked by the person giving it at any time before it is voted. If you are a 
stockholder of record, you may change your vote after submitting your proxy by:

•

•
•

•

delivering a written notice of revocation or a duly executed proxy bearing a later date to the Secretary of the Company 
at the Company’s principal executive offices prior to the meeting, if you submitted your proxy by mail;
submitting a timely and valid later proxy online at www.investorvote.com/ONTO, if you submitted your proxy online;
submitting a timely and valid later proxy by telephone call to 1-800-652-VOTE (8683) within the USA, US territories 
and Canada or
attending the meeting and voting in person. 

If you are a beneficial owner of shares, please contact your bank, broker or other holder of record for specific instructions on 
how to change or revoke your voting instructions.

What Happens If I Do Not Vote?

Stockholder Of Record:  Shares Registered In Your Name

If you are a stockholder of record and do not submit a proxy by completing your proxy card, by telephone, through the Internet 
or vote in person at the annual meeting, your shares will not be voted.

Beneficial Owner:  Shares Registered In The Name Of Broker Or Bank

If you are a beneficial owner and do not instruct your broker, bank, or other agent how to vote your shares, the question of 
whether  your  broker  or nominee  will  still  be  able  to  vote  your  shares  depends  on  whether  the  New York  Stock  Exchange 
(“NYSE”)  deems  the  particular  proposal  to  be  a  “routine”  matter.  Brokers  and  nominees  can  use  their  discretion  to  vote 
“uninstructed” shares with respect to matters that are considered to be “routine,” but not with respect to “non-routine” matters. 
Under the rules and interpretations of the NYSE, “non-routine” matters are matters that may substantially affect the rights or 
privileges of stockholders, such as mergers, stockholder proposals, elections of directors (even if not contested), executive 
compensation  (including  any  advisory  stockholder  votes  on  executive  compensation  and  on  the  frequency  of  stockholder 
advisory  votes  on  executive  compensation),  and  certain  corporate  governance  proposals,  even  if  management-supported. 
Accordingly, your broker or nominee may not vote your shares on Proposals 1, 2, 3 or 4 without your instructions but may vote 
your shares on Proposal 5 even in the absence of your instruction.

What If I Return A Proxy Card Or Otherwise Submit a Proxy But Do Not Make Specific Choices?

If you return a signed and dated proxy card or otherwise submit a proxy without marking voting selections, your shares will be 
voted,  as  applicable,  “For”  the  election  of  all  ten  (10) nominees  for  director,  “For”  the  advisory  approval  of  executive 
compensation, “For” approval of the Onto Innovation Inc. 2020 Stock Plan, “For” approval of the Onto Innovation Inc. 2020 
Employee Stock Purchase Plan and “For” the ratification of the appointment by the Audit Committee of the Board of Directors 
of Ernst & Young, LLP as the independent registered public accounting firm of the Company for its fiscal year ending December
26, 2020. If any other matter is properly presented at the meeting, your proxyholder (one of the individuals named on your 
proxy card) will vote your shares using his or her best judgment.

7

What Is The Vote Required For Election Of Directors?

For the election of directors, each director is elected by the vote of the majority of the votes cast (except that if the number of 
nominees exceeds the number of directors to be elected, directors will be elected by a plurality voting standard). This means
that in order for a director nominee to be elected to our Board of Directors, the number of votes cast “for” a director’s election 
must exceed the number of votes cast “against” that director’s election (with “abstentions” and “broker non-votes” not counted 
as a vote cast either “for” or “against” that director’s election, although abstentions and broker non-votes count for quorum 
purposes). Our Amended and Restated Bylaws (“Bylaws”) provide for a for election of directors by a majority of votes cast in 
uncontested  elections,  and  our  Corporate  Governance  Summary provides  that  any  incumbent  director  nominee  in  an 
uncontested election who does not receive an affirmative majority of votes cast must promptly tender such director’s resignation 
to our Board of Directors. Further information regarding the process that will be followed if such an event occurs can be located 
under the heading “Proposal 1 - Election of Directors.”

What Is The Vote Required For The Approval Of Proposals Other Than Director Elections?

The proposal to approve, on an advisory basis, the compensation of our named executive officers, the proposal to approve the 
Onto Innovation Inc. 2020 Stock Plan, the proposal to approve the Onto Innovation Inc. 2020 Employee Stock Purchase Plan 
and the proposal to ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the
fiscal year ending December 26, 2020 require the affirmative vote, in person or by proxy, of a majority of the shares present in 
person or represented by proxy at the meeting and entitled to vote on the matter to be approved. For such proposals, abstentions 
in effect count as negative votes, because they are shares represented in person or by proxy that are entitled to vote on the
matter  and  not  voted  in  the  affirmative.  Broker  non-votes  are  not  counted  as  part  of  the  vote  total  (because  they  are  not 
considered “entitled to vote” on the matter) and have no effect on the outcome of those proposals.

What Is Householding?

The  Company  has  adopted  a procedure  approved  by  the  SEC  called  “householding.”  Under  this  procedure,  when  multiple 
stockholders of record share the same address, we may deliver only one (1) Notice to that address unless we have received 
contrary  instructions  from  one  or  more  of  those  stockholders. The  same  procedure  may  be  followed  by brokers  and  other 
nominees holding shares of our stock in “street name” for more than one (1) beneficial owner with the same address.

If a stockholder holds shares of stock in multiple accounts (e.g., with our transfer agent and/or banks, brokers or other registered 
stockholder), we may be unable to use the householding procedures and, therefore, that stockholder may receive multiple copies
of the Notice. You should follow the instructions on each Notice that you receive in order to vote the shares you hold in different 
accounts.

A stockholder that shares an address with another stockholder, who has received only one (1) Notice may write or call us as 
specified below:

(i)
(ii)

To request a separate copy of such materials, which will be promptly mailed without charge; and
To request that separate copies of these materials be sent to his or her home for future meetings. 

Conversely, a stockholder of record who shares the same address with another stockholder of record may write or call us as 
specified below to request that a single set of the proxy materials be delivered to that address. Such stockholder requests may 
be made to our Investor Relations Department either via phone at 978-253-6200 or by mail directed to:

Investor Relations Department
Onto Innovation Inc.
16 Jonspin Road
Wilmington, Massachusetts  01887

If you are a beneficial owner of shares held in street name, please contact your bank, broker or other holder of record regarding 
such requests.

How Can I Find Out the Results Of The Voting At The Annual Meeting?

Preliminary voting results will be announced at the annual meeting. In addition, final voting results will be published in a 
current report on Form 8-K that we expect to file within four (4) business days after the annual meeting. If final voting results 
are not available to us in time to file a Form 8-K within four (4) business days after the meeting, we intend to file a Form 8‑K 

8

to publish preliminary results and, within four (4) business days after the final results are known to us, file an additional Form 
8-K to publish the final results.

What Are The Deadlines For Submission Of Stockholder Proposals For The 2021 Annual Meeting?

Stockholders of the Company are entitled to present proposals for consideration at forthcoming stockholder meetings provided 
that they comply with the proxy rules promulgated by the SEC, if applicable, and the Bylaws of the Company. Stockholders 
wishing to present a proposal at the Company’s 2021 Annual Stockholder Meeting must submit such proposal in writing to the 
Company Secretary at Onto Innovation Inc., 16 Jonspin Road, Wilmington, Massachusetts 01887 no later than December 1,
2020 in accordance with Rule 14a-8 under the Securities Exchange Act of 1934, as amended (“Exchange Act”), if they wish 
for  it  to  be  eligible for  inclusion  in  the  proxy  statement  and  form  of  proxy  relating  to  that  meeting.  In  addition,  under  the
Company’s Bylaws, a stockholder wishing to nominate a director or make a proposal at the 2021 Annual Stockholder Meeting 
outside of Exchange Act Rule 14a-8 must submit such nomination or proposal in writing to the Company Secretary at the above 
address no earlier than January 12, 2021 and no later than February 11, 2021. The Nominating & Governance Committee will 
also  consider  qualified  director  nominees  recommended  by  stockholders.  Our  process  for  receiving  and  evaluating  Board 
member nominations from our stockholders is described below under the caption “Consideration Of Director Nominees.”

You are also advised to review Company’s Bylaws, which contain additional requirements about advance notice of stockholder 
proposals and director nominations.

9

CORPORATE GOVERNANCE PRINCIPLES AND PRACTICES

Onto Innovation is committed to sound and effective corporate governance practices. Having such principles is essential to 
running our business efficiently and to maintaining our integrity in the marketplace. The major components of our corporate 
governance practices are described below.

Board Leadership Structure

Our Company management is led by Michael P. Plisinski, who has served as our CEO and a director since the Merger Date and 
Christopher A. Seams, who is an independent director and has served as the Chairman of the Company’s Board of Directors 
since the Merger Date.

Prior to the 2019 Merger, Bruce C. Rhine served as the Chairman of the Board of Nanometrics and Pierre-Yves Lesaicherre, 
Ph.D. served as the President, Chief Executive Officer and a director of Nanometrics through the Merger Date. With regard to 
Rudolph, prior to the 2019 Merger, David B. Miller served as the Chairman of the Board of Rudolph and Mr. Plisinski served 
as the Chief Executive Officer of Rudolph and as a director on the Rudolph Board from November 2015 through the Merger 
Date.

Our Board of Directors is currently comprised of two (2) non-independent directors, Mr. Plisinski and Timothy J. Stultz, Ph.D.,
and  ten  (10)  directors  each  of  whom  has  been  affirmatively  determined by  our  Board  of  Directors  to  meet  the  criteria  for 
independence established by the SEC and the NYSE. The independent directors meet periodically in executive session chaired 
by the Chairman without the CEO or other management present. Furthermore, each director is encouraged to suggest items for 
the Board agenda and to raise at any Board meeting subjects that are not on the agenda for that meeting.

In accordance with our sound and effective corporate governance practice, the roles of CEO and Chairman of the Board, as 
cited above, are held by separate individuals, with the independent Chairman of the Board being designated by the Board. The 
Board of Directors believes that, at the current time, the designation of an independent Chairman of the Board facilitates the 
functioning of the Board of Directors, while leaving the CEO responsible for setting the strategic direction for the Company 
and for the day-to-day leadership and performance of the Company.  The independent Chairman of the Board:

•

•

•

•

•

•

•

Presides at all meetings of the stockholders and the Board of Directors at which he or she is present;

Establishes the agenda for each Board of Directors meeting; 

Sets the schedule and annual agenda, to the extent foreseeable; 

Calls and prepares the agenda for and presides over separate executive sessions of the independent directors; 

Acts as a liaison between the independent directors and the Company’s management;

Serves as a point of communications with stockholders; and

Performs such other powers and duties as may from time to time be assigned by the Board of Directors or as may be 
prescribed by the Company’s Bylaws. 

Board Meetings

The Board of Directors of the Company held one (1) meeting during 2019, which 100% of the incumbent directors attended.  
In 2019, the Nanometrics Board of Directors held a total of thirteen (13) meetings as did the Rudolph Board of Directors. All
of Nanometrics’ incumbent directors attended at least 80% of the total number of meetings held by the Nanometrics Board and 
its standing committees upon which such directors served during 2019. All of Rudolph’s incumbent directors attended at least
95% of the total number of meetings held by the Rudolph Board and its standing committees upon which such directors served 
during 2019.  While the Company does not currently have a formal policy regarding the attendance of directors at the annual 
meeting of stockholders, directors are encouraged to attend. All members of both the Nanometrics Board of Directors and the
Rudolph Board of Directors serving at the time attended the 2019 Annual Meeting of Stockholders for the respective companies.

On one (1) occasion during 2019, the Company’s Board met in executive session in which only the independent Board members 
were present.  In 2019, the Nanometrics Board met in executive session on four (4) occasions and the Rudolph Board met in 
executive session on three (3) occasions.

10

Board Independence

The Board of Directors makes an annual determination as to the independence of each of our Board members under the current 
standards for “independence” established by the NYSE and the SEC. The Board has determined that the following nominees 
for election as directors to our Board are independent under the NYSE Corporate Governance Rules: Jeffrey A. Aukerman, Leo 
Berlinghieri, Edward J. Brown, Jr., Vita A. Cassese, Robert G. Deuster, David B. Miller, Bruce C. Rhine, Christopher A. Seams
and Christine A. Tsingos.  Michael P. Plisinski, due to his  position as our Chief Executive Officer, is not considered to be 
independent.  As for the two (2) directors not standing for re-election in 2020, John R. Whiten is independent while Timothy J. 
Stultz,  Ph.D.,  due  to  his  position  as  Nanometrics  President  and  Chief  Executive  Officer  prior  to  his  retirement  from those 
positions in November 2017, is not considered independent.  

From July 2006 to February 2008, Mr. Rhine served as Nanometrics Chief Strategy Officer, and from March 2007 to August 
2007, Mr. Rhine served as Nanometrics Chief Executive Officer. The Nanometrics Board of Directors determined that Mr. 
Rhine became an independent member of the Board effective February 2011 under the Nasdaq Listing Rules due to the passage 
of time subsequent to his previous management role with Nanometrics and this designation was confirmed under the NYSE 
Listing Rules by the Company Board.

During 2019, none of the independent members of our Board was a party to any transactions, relationships or arrangements 
that were considered by the Board to impair his or her independence. 

Oversight Of Risk

One of the Board’s primary responsibilities is reviewing the Company’s strategic plans and objectives, including oversight of
the principal risk exposures of the Company. In particular, the Board is responsible for monitoring and assessing strategic risk 
exposure, including a determination of the nature and level of risk appropriate for the Company. The Board does not have a 
standing risk management committee, but rather administers this oversight function directly through the Board as a whole, as 
well as through various Board standing committees that address risks inherent in their respective areas of oversight. The Audit 
Committee assists the Board in oversight and monitoring of the legal and financial risks facing the Company, management's 
approach to addressing these risks and strategies for risk mitigation and serves as the contact point for employees to report 
corporate compliance issues.  On at least an annual basis, the Audit Committee reviews and discusses with management policies 
and  systems  pursuant  to  which  management  addresses  risk,  including  risks  associated  with  our  audit,  financial  reporting, 
internal  control,  disclosure  control,  cybersecurity,  legal  and  regulatory  compliance,  and  investment  policies.  Our  Audit 
Committee regularly reviews with our Board any issues that arise in connection with such topics and, in accordance with our 
Summary of Corporate Governance Guidelines, our full Board regularly engages in discussions of risk management to assess 
major risks facing our Company and review options for the mitigation of such risks. Our Compensation Committee periodically 
reviews enterprise risks to ensure that our compensation programs do not encourage excessive risk-taking and our Nominating 
& Governance Committee oversees risks related to governance issues, such as succession planning. As a result of the foregoing, 
we believe that our CEO, together with the Chairman of our Audit Committee and our full Board of Directors, provides effective 
oversight of the Company’s risk management function.

Board Committees

The  Board  has  three  standing  committees  with  separate  chairs  - the Audit,  Compensation,  and  Nominating  &  Governance 
Committees. Each of the Board committees is comprised solely of independent directors. The Audit Committee, Compensation
Committee  and  Nominating  &  Governance  Committee  have  each  adopted  a  written  charter  that  sets  forth  the  specific 
responsibilities and qualifications for membership to the respective committees. The charters of each of these committees are
available on our website at https://investors.ontoinnovation.com/governance/governance-documents/.

In 2019, the composition of and number of meetings held by the Company’s Board Committees were as follows:

11

Company

Committee 
Chairperson

Committee Members

# of Meetings
held in 2019

Audit Committee

Onto Innovation2

Christine A. Tsingos

Nanometrics1

Christine A. Tsingos

Rudolph1

Jeffrey A. Aukerman

Jeffrey A. Aukerman
Vita A. Cassese
Christopher A. Seams
John R. Whitten
Bruce C. Rhine
Robert G. Deuster
Christopher A. Seams
Vita A. Cassese
David B. Miller
John R. Whitten

Nominating & Governance Committee

Onto Innovation2

Leo Berlinghieri

Nanometrics1

Christopher A. Seams

Rudolph1

Leo Berlinghieri

David B. Miller
Bruce C. Rhine
Christopher A. Seams
Christine A. Tsingos
Bruce C. Rhine
Edward J. Brown, Jr.
Daniel H. Berry
John R. Whitten

Compensation Committee

Onto Innovation2

Edward J. Brown, Jr.

Nanometrics1

Edward J. Brown, Jr.

Rudolph1

David B. Miller

Jeffrey A. Aukerman
Leo Berlinghieri
Robert G. Deuster
David B. Miller
J. Thomas Bentley
Robert G. Deuster
Christine A. Tsingos
Jeffrey A. Aukerman
Vita A. Cassese
Thomas G. Greig

2

8

5

1

4

4

1

3

5

1

2

Through the Merger Date.
After the Merger Date

Audit Committee

The Audit Committee assists the Board in fulfilling its responsibilities for general oversight of the integrity of our financial 
statements, our accounting policies and procedures and our compliance with legal and regulatory requirements. Among its 
functions, the Audit Committee is responsible for:

•

•

•

•

The appointment, compensation, retention and oversight of the Company’s independent registered public accounting 
firm;

The approval of services performed by the Company’s independent registered public accounting firm;

Reviewing the responsibilities, functions and performance of the Company’s internal audit function;

Reviewing  the  scope  and  results  of  internal  audits  and  ongoing  assessments  of  the  Company’s  risk  management 
processes;

• Monitoring possible transactions between the Company and our officers and directors for any potential conflicts of 

interest; and

•

Evaluating the Company’s system of internal control over financial reporting and disclosure controls and procedures. 

The report of our Audit Committee is found below under the caption “Audit Committee Report.”

12

The Board has determined that each of the Audit Committee members meet the Audit Committee membership requirements 
set forth by the NYSE and the SEC, including that they be “independent.” Furthermore, the Board has determined that each of 
Ms. Tsingos and Mr. Aukerman qualify as an “Audit Committee Financial Expert” as that term is defined under SEC rules.

Compensation Committee

The Compensation Committee is responsible for the establishment of the policies upon which compensation of and incentives 
for the Company’s executive officers will be based, the review and recommendation for approval by the independent members 
of  the  Board  of  the  compensation  of  the  Company’s  executive  officers,  and  the  administration  of  the  Company’s  equity 
compensation plans.

In general, the Compensation Committee reviews and recommends for approval by the independent members of the Board of 
Directors the Company’s compensation policies and practices, including executive salary levels and variable compensation 
programs, both cash-based and equity-based, benefits, severance and equity-based and other compensation plans, policies and 
programs. With respect to the compensation of the Company’s CEO, the Compensation Committee reviews and recommends 
for approval by the independent members of the Board the various elements of the CEO’s compensation. With respect to other 
executive officers, including each of our NEOs, the Compensation Committee reviews the recommendations for compensation 
for such individuals presented to the Compensation Committee by the CEO and the reasons therefor and, in its discretion, may 
modify the compensation packages for any such individuals. The Compensation Committee has delegated to the Company’s 
CEO the  authority,  within  certain  parameters,  to  approve  the  grant  of  restricted  stock  units (“RSUs”) to  employees  and
consultants who are not executive officers for purposes of Section 16 of the Exchange Act and hold positions below the level 
of vice president. All such grants are thereafter reviewed and ratified by the Compensation Committee.

In  accordance  with  its  charter,  the  Compensation  Committee  may  form  and  delegate  its  authority  to  subcommittees  when 
appropriate. Further, the Compensation Committee has the authority to retain, and to terminate, any compensation consultant 
or other advisors to assist in the evaluation of director, CEO or executive compensation or other matters within the scope of the 
Compensation Committee’s responsibilities and is directly responsible for the appointment, compensation and oversight of 
such  consultants  and  other  advisors,  including  their  fees  and  other  retention  terms.  From  time  to  time,  the  Compensation 
Committee engages the services of such outside compensation consultants to provide advice on compensation plans and issues 
related to the Company’s executive and non-executive employees. In 2019, the Company’s Compensation Committee engaged 
Compensia,  Inc.  (“Compensia”)  to  provide  such assistance  to  the  Compensation  Committee.  Prior  to  the  2019  Merger, 
Compensia provided compensation consultancy services to Nanometrics while Rudolph engaged Pay Governance LLC for 
such compensation advice.  The Compensation Committee also has authority to obtain advice and assistance from internal or 
external legal, accounting and other advisors.

Each current member of our Compensation Committee is an “outside” director as defined in Section 162(m) of the Internal 
Revenue Code of 1986, as amended, and a “non-employee” director within the meaning of Rule 16b-3 under the Exchange 
Act.  The  Board  has  determined  that  each  of  the  Compensation  Committee  members  meet  the  Compensation  Committee 
membership requirements set forth by the NYSE and the SEC, including that they be “independent.”

For further discussion of the Compensation Committee and its processes and procedures, please refer to the “Compensation 
Program Objectives, Design and Practices” section in the Compensation Discussion and Analysis below. The Compensation 
Committee Report is included under the caption “Compensation Committee Report on Executive Compensation” in this Proxy 
Statement.

Nominating & Governance Committee

The responsibilities of the Nominating & Governance Committee include:

•

•

•

Identifying prospective director nominees and recommending to the Board director nominees for the next annual 
meeting of stockholders and replacements of a director in the event of a vacancy on the Board;

Recommending to the Board the appointment of directors to Board Committees;

Developing and recommending to the Board, and monitoring compliance with, the corporate governance principles 
and standards applicable to the Company;

• Managing the CEO selection process; and

•

Together with our CEO, overseeing our Company’s management succession planning.

13

The Nominating & Governance Committee also oversees the annual evaluation of the Board, the Committees of the Board and 
the individual directors.  Typically, this evaluation is performed during the first quarter by each of the directors and reflects an 
assessment of the Board, the Committees of the Board and each individual director in the prior year.  Among other topics, the
evaluation in general assesses:

•

•

For both the Board and the Committees:
◦  Their structure and composition;
◦  The format and content of meetings; and
◦  The effectiveness of the Board/Committees.

For each individual director:
◦  Their performance and approach to their directorship;
◦  Their understanding of their role as a director;
◦  Their understanding of critical aspects of the Company’s business, products and strategy; and
◦  Their skills, experience and ongoing training.

In addition, the Board reviews the issues faced during the past year, assesses its response and makes determinations whether 
additional resources or approaches might be applied to further optimize the handling of the issues.  The goal of the evaluation 
is  to  identify  and  address  any  performance  issues  at  the  Board,  committee  or  individual  level,  should  they  exist,  identify 
potential gaps in the boardroom and to assure the maintenance of an appropriate mix of director skills and qualifications.  Upon 
completion of the evaluation, the Nominating & Governance Committee provides feedback to the Board, the committees and 
the individual directors regarding the results of the evaluation and raises any issues that have been identified which may need 
to be addressed.

The Nominating & Governance Committee utilizes a variety of methods for identifying and evaluating nominees. Its general
policy is to assess the appropriate size and needs of the Board of Directors and whether any vacancies are expected due to 
retirement  or  otherwise.  In  addition,  candidates  for  director  nominees  are  typically  reviewed  in  the  context  of  the  current 
composition  of  the  Board,  the  operating  requirements  of  the  Company,  the  current  needs  of  the  Board,  and  the  long-term 
interests of stockholders, with the goal of maintaining a balance of knowledge, experience and capability. In the event those
vacancies are anticipated, or otherwise arise, the Nominating & Governance Committee will consider recommending various 
potential candidates to fill such vacancies. Candidates may come to the attention of the Nominating & Governance Committee 
through its current members, stockholders or other persons.

The  Board  has  determined  that  each  of  the  Nominating  &  Governance  Committee  members  meets  the  Nominating  & 
Governance Committee membership requirements, including the independence requirements of the NYSE.

Other Committees

Our Board of Directors may from time to time establish other special or standing committees to facilitate the management of 
the Company or to discharge specific duties delegated to the committee by the full Board of Directors.

Compensation Committee Interlocks And Insider Participation

In 2019, no member serving on the Company’s Compensation Committee (Edward J Brown, Jr., Jeffrey A. Aukerman, Leo 
Berlinghieri, Robert G. Deuster, David B. Miller), the Nanometrics Compensation Committee (Edward J Brown, Jr., J. Thomas 
Bentley,  Robert  G.  Deuster,  Christine A.  Tsingos)  or  the  Rudolph  Compensation  Committee  (David  B.  Miller,  Jeffrey A. 
Aukerman, Vita A Cassese, Thomas G. Greig) at any time during the year had any form of interlocking relationship as described 
in  Item  407(e)(4)  of  Regulation  S-K with  the  respective  company.    Further,  no  member  of  the  Company’s  Compensation 
Committee as constituted in 2020 (Edward J Brown, Jr., Jeffrey A. Aukerman, Leo Berlinghieri, Robert G. Deuster, David B. 
Miller) has any form of interlocking relationship as described in Item 407(e)(4) of Regulation S-K as of the date of this proxy 
statement.

Board Membership Criteria And Nominee Identification

The Nominating & Governance Committee of the Board determines the required selection criteria and qualifications of director 
nominees based upon the needs of the Company at the time nominees are considered. While the Nominating & Governance
Committee has no specific minimum qualifications for director candidates, persons considered for Board of Directors positions

14

must demonstrate the following qualifications to be recommended by the Nominating & Governance Committee for a position 
on the Board:

•

•

•

•

•

The  candidate  must  exhibit  proven  leadership  capabilities,  high  integrity  and  experience  with  a  high  level  of 
responsibilities within his or her chosen field;

The  candidate  must  possess  the  ability  to  apply  good  business  judgment and  be  of  sound  mind and  high  moral 
character;

The candidate must have no personal or financial interest that would conflict or appear to conflict with the interests 
of the Company;

The candidate must be in a position to properly exercise his or her duties of loyalty and be willing and able to commit 
the necessary time for Board of Directors and committee service; and

The candidate must have the ability to grasp complex principles of business, finance, international transactions and 
semiconductor inspection, metrology, lithography and related software technologies.

The Nominating & Governance Committee retains the right to modify these qualifications from time to time.

The Nominating & Governance Committee has not adopted a formal diversity policy with regard to the selection of director 
nominees. Diversity is one of the factors that the Nominating & Governance Committee considers in identifying nominees for 
director. In selecting director nominees, the Nominating & Governance Committee considers, among other factors:

•

•

•

The competencies and skills that the candidate possesses and the candidate’s areas of qualification and expertise that 
would enhance the composition of the Board and further its ability to offer advice and guidance to management;

How  the  candidate  would  contribute  to  the  Board’s  overall  balance  of  expertise,  perspectives,  backgrounds  and 
experiences in substantive matters pertaining to the Company’s business; and

The candidate’s demonstrated excellence in his or her field and commitment to rigorously representing the long-term 
interests of the Company’s stockholders.

In its identification of director nominees, the Nominating & Governance Committee will consider how the candidate would 
contribute to the Board’s overall balance of diversity of expertise, perspectives, backgrounds and experiences in substantive 
matters pertaining to the Company’s business. When current Board members are considered for nomination for reelection, the 
Nominating & Governance Committee also takes into consideration their prior contributions to and performance on the Board 
and their record of attendance.

The  Nominating  &  Governance  Committee  will  consider  the  above  criteria  for  nominees  identified  by  the  Nominating  & 
Governance Committee itself, by stockholders, or through some other source. The Nominating & Governance Committee uses 
the same process for evaluating all nominees, regardless of the original source of nomination. The Nominating & Governance 
Committee  may  use  the  services  of  a  third-party  search  firm  to  assist  in  the  identification  or  evaluation  of  Board  member 
candidates.

Consideration Of Director Nominees

The  Nominating  &  Governance  Committee  has  a  formal  policy  with  regard  to  consideration  of  director  candidates 
recommended by the Company’s stockholders, the Director Candidate Policy, which may be found on our website at:

https://investors.ontoinnovation.com/governance/governance-documents/

In accordance with the policy, the Nominating & Governance Committee will consider recommendations for candidates to the 
Board of Directors from stockholders of the Company holding no less than 1% of the Company’s securities for at least twelve 
(12)  months  prior  to  the  date  of  the  submission  of  the  recommendation.  Stockholders  wishing  to  recommend  persons  for 
consideration by the Nominating & Governance Committee as nominees for election to the Company’s Board of Directors can 
do so by writing to the Office of the General Counsel of the Company at its principal executive offices giving:

•

•

•

•

Candidate’s name, age, business address and residence address;

Candidate’s  detailed  biographical  data  and  qualifications  including  his/her  principal  occupation  and  employment 
history;

The class and number of shares of the Company which are beneficially owned by the candidate;

The candidate’s written consent to being named as a nominee and to serving as a director, if elected;

15

•

•

•

•

•

•

Information regarding any relationship between the candidate and the Company in the last three (3) years;

Any other information relating to the candidate that is required by law to be disclosed in solicitations of proxies for 
election of directors;

The name and address of the recommending or nominating stockholder;

The class and number of shares of the Company which are beneficially owned by the recommending or nominating 
stockholder;

A description of all arrangements or understandings between such stockholder and each nominee and any other person 
or persons (naming such person or persons) relating to the nomination; and

Any other information specified under Section 2.5 of the Company’s Bylaws. 

Corporate Governance Guidelines

Our  Board  of  Directors  adopted  Corporate  Governance  Guidelines,  a  copy  of  which  is  available  on  our  website  at 
https://investors.ontoinnovation.com/governance/governance-documents/ under “Corporate Governance Summary.”

Codes Of Ethics

We have adopted a Code of Business Conduct and Ethics (applicable to all employees, executive officers and directors) and a 
Financial Information Integrity Policy (applicable to our financial officers, including our CEO and Chief Financial Officer 
(“CFO”)) that set forth principles to guide all employees, executive officers and directors and establish procedures for reporting 
any violations of these principles. Copies of these codes may be found on our website at:

https://investors.ontoinnovation.com/governance/governance-documents/

or may be requested by writing to:

Onto Innovation Inc.
Attention: Investor Relations
16 Jonspin Road
Wilmington, Massachusetts 01887

The Company will disclose any amendment to its code of ethics or waiver of a provision of its code of ethics applicable to its 
officers  or  directors,  including  the  name  of  the  officer  or  director  to  whom  the  waiver  was  granted,  on  our  website  at 
www.ontoinnovation.com, on the Investors page.

Related Person Transactions Policy

There have been no “related person transactions” since the beginning of 2019 to present, nor are there any currently proposed 
“related person transactions,” involving any director, director nominee or executive officer of the Company, any known 5% 
stockholder of the Company or any immediate family member of any of the foregoing persons (which are referred to together 
as “related persons”). A “related person transaction” generally means a transaction involving more than $120,000 in which the
Company (including any of its subsidiaries) is a participant and in which a related person has a direct or indirect material 
interest. 

The Board has adopted policies addressing the Company’s procedures with respect to the review, approval and ratification of 
“related person transactions” that are required to be disclosed pursuant to Item 404(a) of Regulation S-K. Our related person 
practices and policies ensure that our directors, officers and employees are proactively screened from any conflicts of interests 
interfering with their obligations to the Company. Our policies are included in our corporate governance documents, including 
our Code of Business Conduct and Ethics, the Audit Committee Charter and Summary of Corporate Governance Policies, each 
of which is available on the Investors section of our website located at:

https://investors.ontoinnovation.com/governance/governance-documents/

•

Pursuant to our Code of Business Conduct and Ethics, our directors, officers and employees are required to avoid any 
actual  or  apparent  conflicts  of  interest  (other  than  conflicts  of  interest  that  have  received  appropriate  approval  as 
described below), which includes taking actions or having interests that may interfere with the objective or efficient 
performance of such person’s duties to the Company or that may result in such person receiving improper personal 
benefits as a result of their position with the Company. 

16

•

•

Pursuant to our Summary of Corporate Governance Policies, if a director becomes involved in any activity or interest 
that may result in an actual or potential conflict (or the appearance of a conflict) with the interests of the Company, 
that  director  is  required  to disclose  such  information  promptly  to  the  Board,  which  will  determine  an  appropriate 
resolution  on  a  case-by-case basis. This  policy  further reflects  that  all  directors  must  recuse  themselves  from  any 
discussion or decision affecting their personal, business or professional interests. Similarly, our Board will determine 
the appropriate resolution of any actual or potential conflict of interest involving our CEO and our CEO will determine 
the appropriate resolution of any conflict of interest issue involving any other officer of the Company. When necessary 
and appropriate, resolution of such issues may require consideration of the matter by the Audit Committee. 

Pursuant to both the Board’s Summary of Corporate Governance Policies and the Audit Committee Charter, the Audit 
Committee,  which  consists  entirely  of  independent  directors,  will  review  any  proposed  transaction  in  which  the 
Company or its subsidiaries are to participate if the amount involved in the transaction exceeds $120,000 and we are 
aware that any related person may have a direct or indirect material interest in the transaction. The Audit Committee 
will consider the facts and circumstances and will approve or ratify a proposed transaction if the Audit Committee 
considers it appropriate and believes that such transaction will serve the long-term interests of our stockholders. The 
Compensation Committee of the Board reviews and approves compensation decisions for Board members and our 
executive officers (and such other employees of the Company as directed by the Board) pursuant to the Compensation 
Committee Charter.

Communications With The Board Of Directors

We have a formal policy regarding communications with the Board of Directors, our Stockholder Communications Policy, 
which is found on our website at https://investors.ontoinnovation.com/governance/governance-documents/.

Stockholders may communicate with the Board of Directors, any of the Company’s Board Committees (Audit, Compensation 
or Nominating & Governance) or any of the Company’s directors by writing to:

Onto Innovation Inc.
Office of the General Counsel
550 Clark Drive
P.O. Box 860
Budd Lake, New Jersey 07828

and  such  communications  will  be forwarded  to  the  intended  recipient(s)  to  the  extent  appropriate.  Prior  to  forwarding  any 
communication, the General Counsel will review it and, in his or her discretion, will not forward a communication deemed to 
be of a commercial nature or otherwise inappropriate.

17

PROPOSAL 1

ELECTION OF DIRECTORS

Nominees

The  Board  currently  has  twelve  (12)  members.    Effective  subsequent  to  the  2020 Annual  Meeting  of  Stockholders,  the 
authorized number of directors for the Board shall be reduced to ten (10) members. All current directors are standing for election
at the Annual Meeting with the exception of John R. Whitten and Timothy J. Stultz, Ph.D. 

The Company’s Amended and Restated Certificate of Incorporation provides that at each annual meeting of stockholders, each 
director of the Company shall be elected to hold office, and shall serve, until the expiration of the term for which he or she is 
elected and until his or her successor is duly elected and qualified or until his or her death, resignation, or removal; except that 
if any such election shall not be so held, such election shall take place at a stockholders' meeting called and held in accordance 
with the DGCL.

Based on the recommendation of the Nominating & Governance Committee, the ten (10) director nominees approved by the 
Board for inclusion in this proxy statement are:

Jeffrey A. Aukerman

Leo Berlinghieri

Edward J. Brown, Jr. Vita A. Cassese

Robert G. Deuster

David B. Miller

Michael P. Plisinski

Bruce C. Rhine

Christopher A. Seams Christine A. Tsingos

Each  nominee  is  currently  serving  as  a  director  of  Onto  Innovation.  In  making  its  recommendations,  the  Nominating  & 
Governance  Committee  considered  a  number  of  factors,  including  its  criteria  for  Board  membership,  which  include  the 
minimum qualifications that must be possessed by a director candidate in order to be nominated for a position on our Board. 
Each nominee has indicated that he or she will serve if elected. Unless otherwise instructed, the proxy holders will vote the
proxies received by them for the Company’s ten (10) nominees.  In the event that any nominee of the Company becomes unable 
or unavailable to serve as a director at the time of the Annual Meeting (which we do not anticipate), the proxy holders will vote 
the proxies for any substitute nominee who is designated by the current Board of Directors to fill the vacancy.  Alternatively, 
the Board of Directors, in its discretion, may elect to reduce the number of directors serving on the Board. We do not have any 
reason to believe that any of the nominees will be unable or will decline to serve as a director.

Board Composition And Refreshment

A priority of the Nominating & Governance Committee and the Board as a whole is making certain that the composition of the 
Board  reflects  the  desired  professional  experience,  skills  and  backgrounds  in  order  to  present  an  array  of  viewpoints  and 
perspectives and effectively represent the long-term interests of stockholders. Further, the Board recognizes the importance of 
Board refreshment in order to continue to achieve an appropriate balance of tenure, turnover, diversity and skills on the Board.

Vote Required

Pursuant to the Company’s Bylaws, our directors are elected by the affirmative vote of the majority of the votes cast (provided, 
however, that if the number of nominees exceeds the number of directors to be elected, directors will be elected by a plurality 
voting standard). In order for a director in an uncontested election to be elected, the number of votes cast “for” his/her election 
must exceed the number of votes cast “against” his/her election (with “abstentions” and “broker non-votes” not counted as a 
vote cast either “for” or “against” that director’s election). If a nominee for director in an uncontested election receives a greater
number of “Withhold” votes for election than “For” votes and is not elected, our Corporate Governance Summary provides
that such director must promptly tender a resignation to the Board. Our Nominating & Governance Committee would then 
make a recommendation to the Board on whether to accept or reject the tendered resignation, or whether other action should 
be  taken. Within  ninety (90) days  after  the date  of  the  certification  of  the  election  results,  our  Board  will  act  on  any such 
tendered resignation and publicly disclose (in a press release, a filing with the SEC or other broadly disseminated means of 
communication) its decision regarding the tendered resignation and the rationale behind the decision.

18

Information About The Nominees And Continuing Directors

Our Board and its Nominating & Governance Committee believe that all of the directors and nominees are highly qualified and 
have demonstrated leadership skills and have experience and judgment in areas that are relevant to our business. We believe 
that their ability to challenge and stimulate management and their dedication to the affairs of the Company collectively serve 
the interests of the Company and its stockholders.

The ten (10) nominees for director are set forth below. All information is as of the record date.

Name
Nominee Directors:
Jeffrey A. Aukerman
Leo Berlinghieri
Edward J. Brown, Jr.
Vita A. Cassese
Robert G. Deuster
Michael P. Plisinski
David B. Miller
Bruce D. Rhine
Christopher A. Seams
Christine A. Tsingos

Position

Board Tenure(1)

Former Partner, Deloitte & Touche LLP
Former Chief Executive Officer and President, MKS Instruments, Inc.
Former CEO, Cymer Light Source
Chief Executive Officer, Mardon Management Advisors
Former CEO, Collectors Universe, Inc.
Chief Executive Officer, Onto Innovation Inc.
Former President, DuPont Electronics & Communications
Former CEO, Nanometrics Incorporated
Former CEO, Deca Technologies
Former Executive Vice President and CFO, Bio-Rad Laboratories

5.25 years
11.50 years
7.08 years
1.67 years
3.00 years
4.33 years
4.67 years
13.50 years
4.58 years
5.83 years

(1) Board Tenure includes time served on the Rudolph Board of Directors or the Nanometrics Board of Directors prior to the Merger

Date.

Except as discussed below, each nominee and each incumbent director has been engaged in the principal occupation set forth 
above  during  the  past  five  (5)  years. There  are  no  family  relationships  between  any  directors  or  executive  officers  of  the 
Company.  Messrs. Aukerman, Berlinghieri, Miller, Plisinski and Whitten, along with Ms. Cassese, all former members of the 
Rudolph Board of Directors, were appointed to the Board on October 22, 2019 pursuant to the Agreement and Plan of Merger, 
dated  as  of  June  23,  2019  (the  “Merger  Agreement”),  among  Nanometrics,  Rudolph  and  PV  Equipment  Inc.,  after 
recommendation  by  the  previous  Board  of  Directors  of  Rudolph.  The  Nominating  &  Governance  Committee  thereafter 
considered the professional experience, skills and backgrounds of the nominees (including Messrs. Aukerman, Berlinghieri, 
Miller and Plisinski and Ms. Cassese) and recommended the nominees to the full Board.

The  following  reflects  additional  information  regarding  the  background  and  qualifications  of  our  directors,  including  the 
experience and skills that support the Board’s determination that each director should serve on our Board.

19

NOMINEES FOR DIRECTOR

Jeffrey A. Aukerman

Director Since:

December 2014 (formerly with Rudolph)

Age:

54

Independent Status:

Independent Director

Board Committee(s):

Audit, Compensation

Other Boards Served:

Advisory Council to the Lariccia School of Accounting & 
Finance at Youngstown State University (since 2012)

Mr. Aukerman is a certified public accountant and has extensive public accounting and consulting experience, serving many 
public  and  private  equity  sponsored  public  reporting  companies  in  the  manufacturing,  distribution  and  services  industries.  
From July 1987 to May 2014, Mr. Aukerman was employed by Deloitte & Touche LLP, which, together with its affiliates, is 
an audit, consulting, tax and advisory services firm, and served as an audit partner for the most recent fifteen (15) years.  He 
also served in various capacities for the firm, including as an audit function professional practice director for the Cleveland, 
Ohio office and a regional leader of internal control subject matter specialists.  Mr. Aukerman graduated magna cum laude with 
a B.S.B.A. in Accounting from Youngstown State University.
Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served as Partner at Deloitte & Touche LLP.

High Level of Financial Experience

•

Twenty-seven  (27)  years  of  extensive  experience  with  a  wide  range  of  financial  reporting,  accounting,  risk 
management, and compliance matters at Deloitte & Touche LLP.

Leo Berlinghieri

Director Since:

September 2008 (formerly with Rudolph)

Age:

66

Independent Status:

Independent Director

Board Committee(s):

Nominating & Governance (Chair), Compensation

Other Boards Served:

Unipower, LLC (since 2017)
MKS Instruments, Inc. (2005-2013)
Massachusetts High Technology Council, Inc. (2006-2013)

From July 2005 to December 2013, Mr. Berlinghieri served as Chief Executive Officer and President of MKS Instruments, 
Inc., a critical subsystem and instrument provider to the semiconductor industry. From April 2004 to July 2005, Mr. Berlinghieri 
served as President and Chief Operating Officer and prior to that served as Vice President and Chief Operating Officer from 
July 2003 to April 2004 for MKS Instruments, Inc.

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served for over eight (8) years as Chief Executive Officer and President of MKS Instruments, Inc. Additional 
prior experience as Vice President and Chief Operating Officer of the company, among other senior management 
roles.

High Level of Financial Experience

•

Substantial  financial  experience  gained  in  roles  as  Chief  Executive  Officer,  President  and Vice  President  and 
Chief Operating Officer with MKS Instruments, Inc.

20

Broad International Exposure

•

Gained  extensive  international  experience  in  various  roles  with  MKS  Instruments,  including  Chief  Executive 
Officer, Chief Operating Officer and Vice President of Global Sales and Service.

Extensive Knowledge of Company Business/Industry

•

Over thirty-three (33) years of experience in the semiconductor industry, including eight (8) years at the helm of 
MKS Instruments, Inc. a public corporation. Also served on the SEMI North America Advisory Board (NAAB) 
including as its chairman in 2009.

Innovation/Technology Experience

•

Broad array of technological experience with MKS Instruments, Inc., including roles in manufacturing, customer 
support, and sales all in addition to his roles as Chief Executive Officer and Chief Operating Officer.

Edward J. Brown, Jr.

Director Since:

February 2013

Age:

62

Independent Status:

Independent Director

Board Committee(s):

Compensation (Chair)

Other Boards Served:

Astrodyne TDI (2015-present)

From May 2013 until September 2015, Mr. Brown was the Chief Executive Officer of Cymer Light Source, following the 
merger of Cymer, Inc. with ASML Holding Ltd., prior to which Mr. Brown served as President and Chief Operating Officer of 
Cymer, Inc. from September 2005 until May 2013. From 1984 to 2005, Mr. Brown was employed at Applied Materials, Inc., 
where he held numerous high-level management positions including group vice president and senior advisor to the president, 
vice president and general manager of the Intel business unit, as well as managing director heading up their largest product 
division, Global Operations. Prior to Applied Materials Inc., Mr. Brown held key engineering positions at TRW Corporation 
and Burroughs Corporation.  Mr. Brown received a master’s degree in business administration from National University and a 
bachelor’s degree in industrial studies from San Diego State University. 

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served  as  Chief  Executive  Officer  for  Cymer  Light  Source.    Further,  he  served  for  over  seven  (7)  years  as 
President and Chief Operating Officer of Cymer, Inc. as well as held various senior management positions with 
Applied Materials, Inc. and key engineering positions at TRW Corporation and Burroughs Corporation.

High Level of Financial Experience

•

Substantial financial experience gained as Chief Executive Officer of Cymer Light Source, as President and Chief 
Operating Officer of Cymer, Inc. as well as high-level management positions with Applied Materials, Inc., among 
others.

Broad International Exposure

•

Gained extensive international experience as Chief Executive Officer of Cymer Light Source, President and Chief 
Operating Officer of Cymer, Inc. and Global Vice President of Worldwide Business Operations as well as other 
roles including vice president of Applied Material, Inc.’s largest product division, Global Operations.

Extensive Knowledge of Company Business/Industry

•

Over forty (40) years of employment experience within an array of fields in the semiconductor industry. Also 
served on the SEMI North America Advisory Board (NAAB).

Innovation/Technology Experience

•

Expansive scope of technological and innovative experience from over forty (40) years of semiconductor industry 
employment in key management, operations, development and engineering positions.

21

Vita A. Cassese

Director Since:

July 2018 (formerly with Rudolph)

Age:

70

Independent Status:

Independent Director

Board Committee(s):

Other Boards Served:

Audit
Loftware, Inc. (since 2014)
Interactive Health, Inc. (since 2017)
Medical Knowledge Group (2015-2019)
Zitter Health Insights (2015-2019)
Context Matters, Inc. (2016-2017)
Decision Resources Group, Inc. (2010-2012)
College of Mount Saint Vincent Board (Trustee) (since 2007)

Ms. Cassese currently serves as the CEO of Mardon Management Advisors, a technology and analytics advisory firm. Ms. 
Cassese has over 30 years of experience in operating and strategic management roles at Pfizer, Inc., Ms. Cassese’s last held 
position at Pfizer, Inc. was chief information officer of its Worldwide Pharmaceuticals Group.  Ms. Cassese serves as a mentor
for the Masters in Technology program at Columbia University and has been a guest lecturer at New York University's Stern 
School of Business, MIT Sloan School of Business, and Boston University. Ms. Cassese earned a B.A. in Mathematics from 
the College of Mount Saint Vincent and an MBA from New York University’s Stern School of Business.

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Serves as Chief Executive Officer of Mardon Management Advisors.  Additional experience as Vice President, 
Business Development, Strategy and Innovation for Pfizer, Inc. and CIO for Pfizer Worldwide Pharmaceuticals.

High Level of Financial Experience

•

Substantial financial experience gained in serving in executive management roles with Pfizer, Inc. and as chief 
information  officer  of  Pfizer’s Worldwide  Pharmaceuticals  Group with  an  annual  operating  budget  exceeding 
$1.5B.

Broad International Exposure

•

Roles  with  Pfizer  included  management  of nearly  2,000  employees  in  44  countries  as  well  as  serving  on  the 
company’s  Worldwide  Pharmaceuticals  Executive  Leadership  Team  responsible  for  long-term  international 
business strategy.

Innovation/Technology Experience

•

Extensive innovation and technology experience derived from over 30 years of operations experience, service on 
multiple technical advisory boards and leadership of a technology and analytics advisory firm.

Robert G. Deuster

Director Since:

March 2017

Age:

69

Independent Status:

Independent Director

Board Committee(s):

Compensation

Other Boards Served:

Collectors Universe, Inc. (2012-2018)

Ondax Incorporated (2010-2018)

Symmetry Medical Incorporated (2014-2017)

Pico Holdings (2011-2016)

22

Mr. Deuster served as Chief Executive Officer of Collectors Universe, Inc., a public company that provides authentication and 
grading services to the global collectibles market, from 2012 to 2017. Mr. Deuster served as Chairman and Chief Executive 
Officer of Newport Corporation, a public company that is a global supplier of laser, optical and motion control products, from 
May 1996 until his retirement in October 2007. Mr. Deuster served in various senior management positions at Applied Power, 
Inc. (now Actuant Corporation) and General Electric Company’s Medical Systems Division.  Mr. Deuster received a B.S. in 
Electrical Engineering from Marquette University in 1973. Mr. Deuster holds a Masters Professional Director Certification 
from  the  American  College  of  Corporate  Directors (“ACCD”),  a  public  company  director  education  and  credentialing 
organization. 

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served as Chief Executive Officer of both Collectors Universe, Inc. and Newport Corporation.  Further, he served 
in various senior management positions at Applied Power, Inc. and General Electric Company's Medical Systems 
Division.

High Level of Financial Experience

•

Substantial financial experience gained as Chief Executive Officer of Collectors Universe, Inc. for over five (5) 
years,  as  Chief  Executive  Officer  of  Newport  Corporation for  over  eleven  (11)  years  and  in  other  senior 
management positions with Applied Power, Inc. and General Electric Company's Medical Systems Division.

Broad International Exposure

•

Gained  extensive  international  experience  as  Chief  Executive  Officer  of  both  Collectors  Universe,  Inc.  and 
Newport Corporation.

Extensive Knowledge of Company Business/Industry

•

Significant employment experience as Chief Executive Officer of Newport Corporation, a global supplier of laser, 
optical and motion control products to an array of industries including the semiconductor industry.

Innovation/Technology Experience

•

Extensive  innovation  and  technology  experience  derived  from  over  eleven  (11)  years  of  service  as  the  Chief 
Executive Officer of Newport Corporation as well as in various senior management positions at Applied Power, 
Inc. and General Electric Company's Medical Systems Division.

David B. Miller

Director Since:

July 2015 (formerly with Rudolph)

Age:

63

Independent Status:

Independent Director

Board Committee(s):

Compensation, Nominating & Governance

Other Boards Served:

President, University of Virginia School of Engineering & 
Applied Science Foundation (since 2011)
Merrimac Industries, Inc. (2002-2008)
SEMI International (2011-2015)
North Carolina Chamber of Commerce (2010-2015)

Mr. Miller served as the Rudolph non-executive Chairman from August 2018 through the Merger Date.  From June 1981 to 
November  2015,  Mr.  Miller  served  in  various  positions,  most  recently  as  President,  with  DuPont  Electronics  & 
Communications, an electronic materials company. Mr. Miller holds a B.S. in Electrical Engineering from the University of 
Virginia.

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served as President of DuPont Electronics & Communications.

23

High Level of Financial Experience

•

Substantial  financial  experience  gained  in  roles with  DuPont  Electronics  &  Communications  including  as 
President of the company. Oversight of complex financial transactions, profit and loss responsibility and investor 
relations during prior operations and leadership roles with this company.

Broad International Exposure

•

Served as President of DuPont Electronics & Communications, a global electronic materials company.  Served 
on several joint venture boards in the U.S. and Asia while with DuPont Electronics & Communications as well 
as on the board of SEMI International.  Resided in Tokyo, Japan for three (3) years.

Extensive Knowledge of Company Business/Industry

•

Forty  (40)  years  of  experience  within  the  electronics  industry  including  six  (6)  years  at  the  helm  of  DuPont 
Electronics & Communications, which in addition to other markets, served the semiconductor industry.

Innovation/Technology Experience

•

Significant  experience  and  leadership  roles  with  DuPont  Electronics  &  Communications,  overseeing  the 
company’s technology advancement, breadth of process expertise and ongoing innovation.

Michael P. Plisinski

Director Since:

November 2015 (formerly with Rudolph)

Age:

50

Independent Status:

Non-Independent Director

Board Committee(s):

Other Boards Served:

None

None

Mr. Plisinski has served as the Company’s Chief Executive Officer since the Merger Date and was previously Chief Executive 
Officer  of  Rudolph  beginning  in  November  2015.    Prior  to  his  appointment  as  Rudolph’s  CEO,  Mr.  Plisinski  served  as 
Rudolph’s Executive Vice President and Chief Operating Officer from October 2014 to November 2015 and as Vice President 
and  General  Manager,  Data Analysis  and  Review  Business  Unit  from  February  2006  when  Rudolph  merged  with August 
Technology  Corporation (“August Technology”) until  October  2014.  From  February  2004  to  February  2006,  Mr.  Plisinski 
served as August Technology’s Vice President of Engineering and, from July 2003 to February 2004, as its Director of Strategic
Marketing for review and analysis products. Mr. Plisinski joined August Technology as part of the acquisition of Counterpoint
Solutions, a supplier of optical review and automated metrology equipment to the semiconductor industry, where he was both 
sole founder and President from June 1999 to July 2003. Mr. Plisinski has a B.S. in Computer Science from the University of 
Massachusetts and has completed the Advanced Management Program from Harvard Business School.

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Serving  as  Chief  Executive  Officer  of  Onto  Innovation  with  prior  experience  as  Chief  Executive  Officer  of 
Rudolph,  Chief  Operating  Officer  and  Vice  President  of  Rudolph,  General  Manager  of  the  Rudolph’s  Data 
Analysis and Review Business Unit, among other senior management positions.

High Level of Financial Experience

•

Substantial financial experience gained in roles as Chief Executive Officer of the Company and Rudolph and
Chief Operating Officer and Vice President, General Manager of the Data Analysis and Review Business Unit of 
Rudolph.

Broad International Exposure

•

Extensive experience working with the Asian and European customers of the Company through the various roles 
held with Rudolph, August Technology and the Company.

Extensive Knowledge of Company Business/Industry

•

Over fifteen (15) years of dedicated experience with Rudolph and August Technology and an additional four (4) 
years as founder of an optical review and automated metrology start-up company, each serving the semiconductor 
industry.

24

Innovation/Technology Experience

•

Technological and innovative experience includes leadership roles in both engineering and software development 
while with Rudolph and August Technology.  Prior entrepreneurial experience in the founding of optical review 
and automated metrology equipment company, Counterpoint Solutions.

Bruce C. Rhine

Director Since:

Age:

July 2006

62

Independent Status:

Independent Director

Board Committee(s):

Audit (Chairman through July 2018), Nominating & Governance

Other Boards Served:

Snap2Insights (since 2018)

Shaper.io (since 2015)

Columbia Nutritional LLC (since 2014)

Phoseon Technology, Inc. (since 2012)

Jama Software (2008-2018)

NEXX Systems (2002-2012)

Nor-Cal Products, Inc. (2010-2017)

Accent Optical Technologies Inc. (2000-2006)

Mr. Rhine served as the Chairman of the Board of Directors of Nanometrics from August 2009 through the Merger Date. From 
July 2006 to February 2008, Mr. Rhine served as Nanometrics’ Chief Strategy Officer and from March 2007 to August 2007, 
as Nanometrics Chief Executive Officer. From 2000 to 2006, Mr. Rhine served as Chairman and Chief Executive Officer of 
Accent Optical Technologies, Inc. (acquired by Nanometrics in July 2006) and as its President from January 2003 to April 2005
and from August 2000 to September 2001. Prior to 2000 Mr. Rhine was an executive at Applied Materials, Lam Research 
Corporation, Asyst Technologies and Air Products and Chemicals. Mr. Rhine holds a B.S. degree in Chemical Engineering 
and an M.B.A. in Finance from The Pennsylvania State University. Mr.  Rhine is a member of the National Association of 
Corporate Directors (“NACD”) and the ACCD.

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served as Chief Executive Officer of Nanometrics and of Accent Optical Technologies with additional prior senior 
leadership experience with Applied Materials, Lam Research Corporation, Asyst Technologies and Air Products 
and Chemicals.

High Level of Financial Experience

•

Substantial financial experience gained in roles as Chief Executive Officer of Nanometrics and of Accent Optical 
Technologies as well as with executive roles held in several semiconductor industry companies.

Broad International Exposure

•

Gained  extensive  international  experience  as  Chief  Executive  Officer  of  Nanometrics  and  of Accent  Optical 
Technology as well as through array of other executive roles within the semiconductor industry.

Extensive Knowledge of Company Business/Industry

•

Over thirty-seven (37) years of dedicated experience within the semiconductor industry.

Innovation/Technology Experience

•

Broad and comprehensive array of technological experience with multiple companies within the semiconductor 
space including serving as the Chief Strategy Officer of Nanometrics.

25

Christopher A. Seams

Director Since:

August 2015

Age:

57

Independent Status:

Independent Director

Board Committee(s):

Audit, Nominating & Governance

Other Boards Served:

Xperi Corporation (since 2016)

Tessera Technologies, Inc. (2013-2016)

Mr. Seams served as Chief Executive Officer of Deca Technologies from June 2013 to August 2016. Prior to Deca Technologies, 
Mr. Seams served as Executive Vice President of sales and marketing at Cypress Semiconductor and held various technical and 
operational management positions in its manufacturing, development and operations. Prior to joining Cypress in 1990, Mr. 
Seams worked in process development for Advanced Micro Devices and Philips Research Laboratories. Mr. Seams earned his 
bachelor’s degree in electrical engineering from Texas A&M University and his master’s degree in electrical and computer 
engineering from the University of Texas at Austin. Mr. Seams has a Professional Certificate in Advanced Computer Security
from Stanford University and is a senior member of the Institute of Electrical and Electronics Engineers. Mr. Seams is a member 
of the ACCD as well as a member and Certified Director of the NACD.

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served as Chief Executive Officer of Deca Technologies as well as in additional senior leadership roles within 
the semiconductor industry including with Cypress Semiconductor.

High Level of Financial Experience

•

Substantial financial experience gained in roles as Chief Executive Officer of Deca Technologies as well as with 
executive roles held in the semiconductor industry.

Broad International Exposure

•

Extensive international experience as Chief Executive Officer of Deca Technologies, Executive Vice President of 
sales and marketing at Cypress Semiconductor as well as through other management roles with both Cypress and 
other semiconductor companies with which he worked.

Extensive Knowledge of Company Business/Industry

•

Over thirty (30) years of dedicated experience within the semiconductor industry.

Innovation/Technology Experience

•

Technological  and  innovative  experience  gained  through  an  array  of  technical  and  operational  management 
positions  in manufacturing,  development  and  operations  for  Cypress  Semiconductor  as  well  as  in  process 
development for Advanced Micro Devices and Philips Research Laboratories.

Christine A. Tsingos

Director Since:

Age:

May 2014

61

Independent Status:

Independent Director

Board Committee(s):

Audit (Chair), Nominating & Governance

Other Boards Served:

Envista Holdings Corporation (since September 2019)

Varex Imaging Corporation (since February 2017)

Ms. Tsingos served as the Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories from December 2002 
through May 2019. Prior to Bio-Rad, Ms. Tsingos held executive positions at Autodesk, The Cooper Companies, and Attest 
Systems. Ms. Tsingos earned her Bachelor of Arts in International Studies from the American University in Washington D.C. 
and  an  M.B.A  in  International  Business  from  the  George  Washington  University.  In  2010,  Ms.  Tsingos  was  awarded  the 
prestigious Bay Area CFO of the Year. 

26

Specific Qualifications, Attributes, Skills and Experience

Relevant Senior Leadership / CEO Experience

•

Served as Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories.

High Level of Financial Experience

•

Over thirty (30) years of financial and operational experience with a series of companies including sixteen (16)
years of service as Chief Financial Officer of Bio-Rad Laboratories.

Broad International Exposure

•

Comprehensive international experience through service as Chief Financial Officer of Bio-Rad Laboratories.

The Board unanimously recommends voting
“FOR ALL” of the nominees set forth above.

27

Compensation Of Directors

Directors who are employees of the Company receive no compensation for their services as members of the Board of Directors. 
Director compensation for non-employee members of the Board is a mix of cash and equity-based compensation, which is 
largely comprised of the equity component to align the interests of our directors with the Company’s long-term performance 
and stockholder interests.  The components of the compensation for directors who are not employees of the Company are as 
follows:

Board Compensation Element

Annual Retainer

Annual Equity Grant (in RSUs)

Committee Chair Stipend

Audit

Compensation

Nominating & Governance

Committee Member Stipend

Audit

Compensation

Nominating & Governance

Board Chair Stipend

Initial Equity Grant (in RSUs)

Amount/Value

$70,000 1

$150,000 2

$20,000 1
$15,000 1
$10,000 1

$10,000 1

$7,500 1

$5,000 1

$50,000 1

$150,000 3

1

2

3

Paid subsequent to the director election results at the Annual Stockholders Meeting.

Awarded at second quarter Board meeting in a number of shares calculated by dividing the listed amount by the closing stock price 
per share of Company Common Stock on the date of grant, rounded to the nearest 100 shares.

Awarded as of the first Board meeting following election or appointment and calculated in the same manner as the annual equity 
grant above but prorated by the number of quarters between such first meeting and the date on which the next annual equity grant 
is scheduled to be awarded.

Any initial equity grants and/or annual equity grants typically vest on the first anniversary of the grant date.  Equity awards 
granted to Rudolph directors in 2019 were granted under and subject to the terms of the Rudolph Technologies, Inc. 2018 Stock 
Plan.  Equity awards granted to Nanometrics directors in 2019 were granted under and subject to the terms of the Nanometrics 
Incorporated 2005 Equity Incentive Plan.

Prior to the 2019 Merger, Nanometrics non-employee directors received an annual retainer fee of $60,000. In addition, the 
Chairman  of  the  Board, Audit  Committee  Chairman,  Compensation  Committee  Chairman  and  Nominating  & Governance 
Committee Chairman received an incremental $30,000, $20,000, $20,000 and $10,000 annual retainer, respectively, for serving 
in  such  capacities.  Committee  members,  other  than  the  chairpersons,  received  an  incremental  $10,000  annual  retainer  for 
service on the Audit or Compensation Committee and an incremental $7,500 annual retainer for service on the Nominating &
Governance Committee. All retainer fees were paid annually, as of the date of Nanometrics annual stockholders meeting, and 
in advance of the provision of services to which the retainer relates.

Prior  to  the  2019  Merger,  Rudolph  non-employee  directors  received  an  annual  retainer  fee  of  $70,000.    In  addition,  the 
Chairman of the Board and the Chairmen of the Audit Committee, Compensation Committee and Nominating & Governance 
Committee received an incremental $40,000 and $15,000 annual retainer, respectively, for serving in such capacities.  Rudolph 
directors were not paid in 2019 to serve on the committees of the Board of Directors with the exception of those directors 
serving as committee chairs during 2019. The foregoing compensation was paid on a quarterly basis to the Rudolph directors.  
No fees were paid to Rudolph directors for special subcommittee work in 2019.

28

For the year ended December 31, 2019, the directors, excluding the directors who are named executive officers, received total 
compensation indicated in the table below.  There were no option awards, non-equity incentive plan compensation, or pension 
and nonqualified deferred compensation earnings granted to such directors.  They did not earn any type of compensation during 
the year other than what is disclosed in the following table:

Name

J. Thomas Bentley2
Edward J. Brown, Jr.
Robert G. Deuster3
Bruce C. Rhine
Christopher A. Seams
Timothy J. Stultz, Ph.D.3,4
Christine A. Tsingos

Jeffery A. Aukerman5
Leo Berlinghieri5
Vita A. Cassese6
David B. Miller7
John R. Whitten4,6

Fees Earned or
Paid in Cash

Stock
Awards (1)

Nanometrics Non-Executive Directors

All Other
Compensation

$0
$90,000
$80,000
$107,500
$80,000
$60,000
$97,500

$0
$119,654
$119,654
$119,654
$119,654
$119,654
$119,654

Rudolph Non-Executive Directors

$21,250
$21,250
$17,500
$31,250
$17,500

$0
$0
$0
$0
$0

$0
$0
$6,856
$0
$0
$259,944
$0

$0
$0
$0
$0
$0

Total

$0
$209,654
$199,654
$234,010
$199,654
$699,542
$217,154

$21,250
$21,250
$17,500
$31,250
$17,500

(1) Represents the grant date fair value for each share-based compensation award granted during the year, calculated in accordance 
with FASB ASC Topic 718. The assumptions used in determining the grant date fair value of these awards are set forth in Note 9
to our consolidated financial statements, which are included in our Annual Report on Form 10-K for the fiscal year ended December 
31, 2019 filed with the SEC. As of December 31, 2019, our directors had the following stock awards outstanding: Mr. Aukerman 
– 3,297 RSUs; Mr. Berlinghieri – 3,297 RSUs; Mr. Brown, Jr. – 4,041 RSUs, Ms. Cassese – 3,297 RSUs; Mr. Deuster – 4,041 
RSUs; Mr. Miller – 3,297 RSUs; Mr. Rhine – 4,041 RSUs; Mr. Seams – 4,041 RSUs; Dr. Stultz – 21,707 RSUs; Ms. Tsingos –
4,041 RSUs; and Mr. Whitten – 3,297 RSUs.

(2) Mr. Bentley did not stand for re-election to the Nanometrics board of directors on May 22, 2019.
(3) All other compensation for Mr. Deuster and Dr. Stultz includes amounts for health care reimbursements.  All other compensation 

for Dr. Stultz also included payment of $250,645 for merger consultations.
(4) Dr. Stultz and Mr. Whitten are not standing for re-election at the Annual Meeting.
(5) The total compensation earned by each of Messrs. Aukerman and Berlinghieri during 2019 while serving as a Rudolph Director 
when added to the amounts reported in the Director Compensation Table above results in total compensation for the full calendar 
year of $185,327. This adjustment includes increasing fees earned by $63,750 and including the grant date fair value of a time-
based equity award received for Rudolph prior to the 2019 Merger of $100,327.

(6) The total compensation earned by each of Ms. Cassese and Mr. Whitten during 2019 while serving as a Rudolph Director when 
added to the amounts reported in the Director Compensation Table above results in total compensation for the full calendar year of 
$170,327. This adjustment includes increasing fees earned by $52,500 and including the grant date fair value of a time-based equity 
award received for Rudolph prior to the 2019 Merger of $100,327.

(7) The total compensation earned by Mr. Miller during 2019 while serving as a Rudolph Director when added to the amounts reported 
in the Director Compensation Table above results in total compensation for the full calendar year of $225,327. This adjustment
includes increasing  fees  earned  by $93,750  and including  the  grant  date  fair  value  of  a  time-based  equity  award  received  for 
Rudolph prior to the 2019 Merger of $100,327.

Stock Ownership/Retention Guidelines For Directors

The Company has established guidelines related to stock ownership and retention for its non-employee directors. Currently, 
the guidelines require that each non-employee director of the Company own shares of Company Common Stock valued at a 
minimum of three (3) times the amount of the director’s total cash compensation which includes the annual cash retainer as 
well as any additional fee paid to those individuals who are Committee Chairs, Lead Director or Chairman of the Board.  For 
a new director the stock holding requirement is to be attained within five (5) years of his or her initial election or appointment 
to the Board.

29

PROPOSAL 2

ADVISORY VOTE ON EXECUTIVE COMPENSATION

The Dodd-Frank Wall Street Reform and Consumer Protection Act of 2010, or the Dodd-Frank Act, enables our stockholders 
to vote to approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed in this 
proxy  statement  in  accordance  with  SEC  rules.  Consistent  with  the  recommendation  of  the  Board  of  Directors  and  the 
preference of our stockholders as reflected in the non-binding advisory vote on the frequency of future advisory votes on named 
executive officer compensation held at the Nanometrics 2017 Annual Meeting of Stockholders, the Company currently holds 
an annual “say on pay” vote. In accordance with this policy, this year we are requesting our stockholders to approve an advisory 
resolution on the Company’s executive compensation as reported in this Proxy Statement, and as required by Section 14A(a)(1) 
of the Exchange Act.

Our executive compensation arrangements are designed to enhance stockholder value on an annual and long-term basis.  These 
arrangements are consistent with our compensation philosophy and pay-for-performance principles and, as such, have been 
designed to provide competitive compensation packages that enable the Company to attract and retain talented executives, 
motivate executive officers to achieve the Company’s short- and long-term business strategies and objectives,  align the interests 
of  executives  with  those  of  stockholders,  and  are  consistent  with  current  market  practices  and  good  corporate  governance 
principles.  Please read the Compensation Discussion and Analysis beginning on page 49 of this proxy statement and the tabular 
and additional narrative disclosures on executive compensation beginning on page 71 of this proxy statement for additional 
details about our executive compensation arrangements, including information about the fiscal year 2019 compensation of our 
named executive officers.

We  are  asking  our  stockholders  to  indicate  their  support  for  our  compensation  arrangements  as  described  in  this  proxy 
statement.

For the reasons discussed above, the Board recommends that stockholders vote in favor of the following resolution:

“RESOLVED, that the Company’s stockholders APPROVE, on an advisory basis, the compensation paid to 
the Company’s named executive officers, as disclosed in the proxy statement for this meeting pursuant to Item 
402  of  Regulation  S-K,  including  the  Compensation  Discussion  and  Analysis,  compensation  tables  and 
narrative discussion and other related tables and disclosures.”

Because your vote is advisory, it will not be binding upon or overrule any decisions of the Board, nor will it create any additional 
fiduciary duty on the part of the Board.  This advisory vote is not intended to address any specific item of compensation, but 
rather  the  overall  compensation  of  our  named  executive  officers  and  our  compensation  philosophy,  policies  and  practices 
described in this proxy statement, and does not seek to have the Board or Compensation Committee take any specific action. 
However,  the  Board  and  the  Compensation  Committee  value  the  view  expressed  by  our  stockholders  in  their  vote  on  this 
proposal and will take into account the outcome of the vote when considering executive compensation matters in the future.

Vote Required

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to
vote will be required to approve, on an advisory (non-binding) basis, the compensation of our named executive officers as 
disclosed in this proxy statement.

The Board recommends a vote “FOR” the approval of the compensation of the 
named executive officers as disclosed in this proxy statement pursuant to Item 402 
of Regulation S-K as required by Section 14A(a)(1) of the Exchange Act.

30

PROPOSAL 3

APPROVAL OF ONTO INNOVATION INC. 2020 STOCK PLAN

The Board of Directors is requesting that our stockholders approve a new stock plan, the Onto Innovation Inc. 2020 Stock Plan 
(the “2020 Stock Plan”).  The Board has adopted the 2020 Stock Plan, subject to stockholder approval at the Annual Meeting.  
If approved by our stockholders, the 2020 Stock Plan will become effective as of May 12, 2020 and will expire ten (10 years 
from such date, unless terminated earlier.

The 2020 Stock Plan is structured to allow the Board to award equity incentives to eligible directors, officers, employees and 
consultants in order to assist the Company in attracting, retaining and motivating the best available personnel for the successful 
conduct of the Company’s business.  The Company believes that linking compensation to corporate performance motivates 
employees and consultants to improve stockholder value.  The Company has, therefore, consistently included equity incentives 
as a significant component of compensation for its officers, employees, directors and consultants.  With the high demand for 
highly  skilled  employees  and  consultants,  especially  in  the  technology  industries,  management  believes  it  is  critical  to  the 
Company’s success to maintain competitive compensation programs.  The Board believes that the approval of the 2020 Stock 
Plan would be in the best interests of the Company and its stockholders.

We currently maintain the Nanometrics Incorporated 2005 Equity Incentive Plan (the “Nanometrics 2005 Stock Plan”) and the 
Rudolph Technologies, Inc. 2018 Stock Plan (the “Rudolph 2018 Stock Plan”).  The Nanometrics 2005 Stock Plan currently 
expires on May 23, 2023 while the Rudolph 2018 Stock Plan currently expires on May 16, 2028.  We are seeking stockholder 
approval of the 2020 Stock Plan so that we can maintain and administer one equity incentive plan for all eligible participants 
following  the  2019  Merger  and  continue  to  provide  our  officers,  employees,  directors  and  consultants  with  equity-based 
compensation that aligns their interests with the interests of our stockholders.

To ensure that the Company has an adequate number of shares available for compensation to its directors, executive officers 
and other employees and consultants, we are asking our stockholders to approve the 2020 Stock Plan with a total share reserve 
of 3,500,000 shares, as described below under “Share Reserve Under the 2020 Stock Plan”.

Key Governance Highlights Of The 2020 Stock Plan

The following are key governance highlights of the 2020 Stock Plan:

• Minimum Vesting Requirements.  Minimum one-year vesting period for all awards subject to certain limited carve-

outs.

•

•

•

•

•

•

•

No Dividends on Unvested Awards.  Prohibition on payment of dividends and dividend equivalents while an award 
is unvested.

No Liberal Share Recycling.  Shares of common stock not issued as the result of a net settlement of options or stock 
appreciation rights (“SARs”) as well as shares tendered or withheld to pay the exercise price or withholding taxes 
relating to awards will not again be made available for issuance as awards under the 2020 Stock Plan.

Individual Annual Award Limits for Directors.  Limitations apply to the value of awards an individual non-employee 
director (“outside director”) may receive in a given calendar year.

Individual Annual Award Limits for Other Participants.  Limitations apply to the value of awards an individual 
officer, employee or consultant may receive in a given calendar year.

No  Liberal  Change-in-Control Definition.    The  change-in-control definition  under  the  2020  Stock  Plan is  not 
considered “liberal” and, for example, is not triggered by shareholder approval of a transaction.

Clawback.  Awards are subject to potential cancellation or clawback in certain circumstances in accordance with 
the Company’s clawback policy.

No Repricing.  The 2020 Stock Plan prohibits, without stockholder approval, the cancellation of underwater options 
or SARs for cash or other awards, the reduction of the exercise price of options or SARs, or any other action that 
would be treated as a repricing, without stockholder approval.

31

Share Reserve Under The 2020 Stock Plan

Under the 2020 Stock Plan, the number of shares of Company common stock available for issuance to eligible participants will 
be 3,500,000, subject to stockholder approval, plus any shares subject to awards under the Nanometrics 2005 Stock Plan or the
Rudolph 2018 Stock Plan that would again become available for new awards under the terms of either such plan if such plan 
were still in effect and without regard to any termination thereof.

As of the effective date of the 2020 Stock Plan, no additional grants may thereafter be issued under either the Nanometrics 
2005 Stock Plan or the Rudolph 2018 Stock Plan.  As of March 13, 2020, 1,280,597 shares remained available for grant under 
the Nanometrics 2005 Stock Plan and 2,393,656 shares under the Rudolph 2018 Stock Plan.

The following table presents information about the number of shares that were subject to various outstanding equity awards 
under the Nanometrics 2005 Stock Plan or the Rudolph 2018 Stock Plan and the shares remaining available for issuance under 
these two (2) plans.  On March 13, 2020, the total number of shares outstanding was 50,381,691 and our closing stock price 
was $27.98.

Nanometrics 
2005 Stock Plan

Rudolph 2018 
Stock Plan

Number of outstanding stock options as of March 13, 2020.

Weighted average exercise price of the outstanding stock options as of March 13,
2020.

Weighted average remaining contractual term of the outstanding stock options as 
of March 13, 2020.

Number of outstanding serviced-based restricted stock units as of March 13, 2020.

Number of outstanding performance-based restricted stock units as of March 13,
2020.(1)
Shares remaining available as of March 13, 2020.
Number of shares available for issuance under the 2020 Stock Plan(2)

1,230

$18.41

0.98 years

482,414

32,639

1,280,597

3,500,000

-

n/a

n/a

154,969

93,574

2,393,656

(1) Includes  earned  performance-based  restricted  stock  units  that  have  been  earned  and  remain  subject  to  service-based  vesting

requirements.

(2) As may be increased after the effective date of the 2020 Stock Plan as a result of any cancelled shares under the Nanometrics 2005 

Stock Plan or the Rudolph 2018 Stock Plan as described above.

In determining whether to approve the 2020 Stock Plan, including the share reserve under the 2020 Stock Plan, the following 
considerations were taken into account:

• We  expect  the  share  reserve  under  the  2020  Stock  Plan to  provide  us  with  enough  shares  for  awards  for 
approximately 6 years.  However, this expectation assumes that we continue to grant awards consistent with our 
current practices and historical usage and is dependent on our stock price and hiring activity during the next few 
years and forfeitures of outstanding awards.  We cannot predict our future equity grant practices, the future price of 
our stock or future hiring activity with any degree of certainty at this time and, as a result, the share reserve under 
the 2020 Stock Plan could last for a shorter or longer time.

•

•

The potential dilution to our stockholders that may result from the issuance of shares pursuant to outstanding awards:  
our overhang rate as of March 13, 2020 (calculated by dividing (x) the number of shares subject to equity awards
outstanding plus shares remaining available for issuance for future awards by (y) the number of common shares 
outstanding plus the number of shares subject to equity awards outstanding plus the remaining shares available for 
issuance) was 8.1%. Our overhang rate on a pro forma basis, assuming that the 3,500,000 share reserve under the 
2020 Stock Plan was authorized as of that date, would have been 7.8%.

The “burn rate” which measures our usage of shares for the Nanometrics and Rudolph stock plans as a percentage 
of our outstanding shares. For 2019, 2018, and 2017, our burn rate was 0.79%, 0.58%, and 0.63%, respectively, and 
the three-year average was 0.67%. The rates were calculated by dividing the number of shares subject to awards 
granted during the year net of forfeitures and cancellations by the weighted average number of shares outstanding 
during the year. 

32

• Analysis by our compensation consultant, which was based on generally accepted evaluation methodologies used 
by proxy advisory firms, that the number of shares to be reserved under the 2020 Stock Plan is within generally 
accepted standards as measured by an analysis of the 2020 Stock Plan cost relative to industry standards.

Summary Of The 2020 Stock Plan

The following is a summary of the principal features of the 2020 Stock Plan and its operation.  This summary is qualified in its 
entirety by reference to the 2020 Stock Plan itself set forth in Appendix A.

General

The 2020 Stock Plan provides for the grant of equity awards to employees, directors and consultants.  Options granted under 
the 2020 Stock Plan may either be “incentive stock options” as defined in Code Section 422 or nonstatutory stock options, as 
determined by the Board.

Purpose

The general purposes of the 2020 Stock Plan are to attract and retain the best available personnel for positions of substantial 
responsibility, to provide additional incentive to the employees, directors and consultants of the Company and to promote the
success of the Company’s business.

Administration

The 2020 Stock Plan will be administered by the Compensation Committee (“Committee”) or the Board, as applicable (in 
either case, the “Administrator”).

Eligibility

The 2020 Stock Plan provides that nonstatutory stock options, stock appreciation rights (“SARs”), restricted stock, restricted 
stock units, performance units and performance shares may be granted to employees, directors and consultants of the Company 
and any parent or subsidiary.  Incentive stock options may be granted only to employees of the Company and any parent or 
subsidiary.  The Administrator will determine which eligible persons will be granted awards. As of March 13, 2020, there were 
twelve  (12) outside  directors (which  will  be  reduced to  ten  (10) on  the date  of  the Annual  Meeting),  approximately  1,300
employees and consultants eligible to participate in the 2020 Stock Plan.

Shares Available Under The 2020 Stock Plan

The maximum aggregate number of shares that may be awarded and sold under the 2020 Stock Plan is 3,500,000 shares.  If, 
after the effective date of the 2020 Stock Plan, any shares subject to awards granted under the Nanometrics 2005 Stock Plan or 
the Rudolph 2018 Stock Plan would again become available for new awards under the terms of such plan if it were still in 
effect and without regard to any termination of such plan, then those shares will be available for the purpose of granting awards 
under the 2020 Stock Plan. The shares issued pursuant to awards under the 2020 Stock Plan may be authorized but unissued or 
reacquired Common Stock.  No awards have been granted under the 2020 Stock Plan.

If an award terminates, expires or becomes unexercisable without having been exercised in full, or, with respect to restricted 
stock, restricted stock units, performance units or performance shares, is terminated or forfeited in whole or in part due to
failure to vest, the shares (or forfeited shares) which were subject to such terminated, expired, unexercised or forfeited award 
will become available for future issuance under the 2020 Stock Plan.  To the extent that an award under the 2020 Stock Plan is 
paid out in cash, rather than shares, such cash payment will not result in reduction of the shares available for issuance under 
the 2020 Stock Plan.

Shares used to pay the exercise price of an award or to satisfy the tax withholding obligations related to an award will not again 
become available for future grant under the 2020 Stock Plan.  Upon exercise of a SAR settled in shares, all shares subject to 

33

the SAR (not the number of net shares actually issued pursuant to the SAR upon any exercise) will cease to be available under
the 2020 Stock Plan.

Individual Award Limits

For any calendar year, (i) the value of awards granted to an outside director under the 2020 Stock Plan may not exceed $600,000 
and (ii) the value of awards granted to any individual participant other than an outside director under the 2020 Stock Plan may 
not exceed $5,000,000, in each case calculating the value of any such awards based on the grant date fair value of such awards 
for financial reporting purposes.  For purposes of applying this annual limit, any award of performance units, performance 
shares or any other award subject to performance-based vesting criteria will be taken into account assuming target performance 
achievement under the terms of such award.

Minimum Vesting Period

All awards granted to all participants under the 2020 Stock Plan will be subject to a minimum vesting period of not less than 
one (1) year from the date of grant; provided, the Administrator may provide for the grant of awards to participants without 
regard to the minimum vesting requirement with respect to a maximum of five percent (5%) of the total number of shares 
authorized for issuance under the 2020 Stock Plan.

Substitute Awards

In connection with an entity’s merger or consolidation with the Company or any subsidiary or the direct or indirect acquisition 
by the Company or any subsidiary of an entity’s property or stock, the Committee may grant awards in substitution or exchange
for any options or other stock or stock-based awards granted before such merger or consolidation by such entity or its affiliate.  
Substitute awards may be granted on such terms and conditions as the Committee deems appropriate, notwithstanding any 
limitations on awards in the 2020 Stock Plan.  Substitute awards will generally not count against the aggregate share reserve.  
Additionally, in the event that a company acquired by the Company or any subsidiary, or with which the Company or any 
subsidiary otherwise combines, has shares available under a pre-existing plan approved by its stockholders and not adopted in 
contemplation of such acquisition or combination as determined by the Administrator, the shares available for grant pursuant 
to the terms of such pre-existing plan may be used under certain circumstances for awards under the 2020 Stock Plan and shall 
not reduce the shares authorized for grant under the 2020 Stock Plan.

Types Of Awards Under The 2020 Stock Plan

Stock Options

Stock option awards may be granted to employees, directors or consultants of the Company at any time and from time to time 
as determined by the Administrator in its discretion, except incentive stock options may be granted only to employees of the 
Company. The exercise price of options granted under the 2020 Stock Plan is determined by the Administrator and must not 
be less than 100% of the fair market value of the Common Stock at the time of grant.  Options granted under the 2020 Stock 
Plan expire as determined by the Administrator, but in no event later than ten (10) years from date of grant.  No option may be 
exercised by any person after its expiration.  Incentive stock options granted to stockholders owning more than 10% of the 
voting stock of the Company must have an exercise price per share no less than 110% of the fair market value at the time of 
grant and the term of such option may be no more than five years from the date of grant.  The fair market value of the Common
Stock is generally determined with reference to the closing sale price for the Common Stock (or the closing bid if no sales were 
reported) on the day of determination.

Options  become  exercisable at  such  times  as  are  determined  by  the Administrator  and as  set  forth  in  the  individual award 
agreements.  An option is exercised by giving notice to the Company in the form determined by the Administrator, specifying 
the number of full shares of Common Stock to be purchased and tendering payment of the purchase price.  The 2020 Stock 
Plan permits payment to be made by cash, check, other shares of Common Stock, delivery of a properly executed exercise 
notice together with any other documentation as the Administrator and the participant’s broker (if applicable) may require to 
effect an exercise of the option and delivery to the Company of the sale or other proceeds (as permitted by applicable law) 
required to pay the exercise price, withholding shares otherwise issuable in connection with the exercise of the option, such

34

other  consideration  and  method  of  payment  authorized  by  the Administrator  in  its  discretion  or  permitted  by  the  award 
agreement, or any combination thereof.

Restricted Stock

Restricted stock awards may be granted to employees, directors or consultants of the Company at any time and from time to 
time as determined by the Administrator in its discretion.  Each restricted stock grant will be evidenced by an award agreement 
that  will  specify  the  number of  shares  granted  and  such  other  terms  and  conditions  as  the Administrator  will  determine  in 
accordance with the terms of the 2020 Stock Plan.

Subject to the terms of the 2020 Stock Plan, the Administrator will have complete discretion to determine (i) the number of 
shares subject to a restricted stock award granted to any participant, and (ii) any vesting conditions that must be satisfied.  The 
Administrator may provide that awards of restricted stock earn dividends paid with respect to such shares.  Any such dividends 
will be accumulated and credited to an account for the participant, with interest in the Administrator’s discretion, and will be 
subject to the same terms and conditions, including vesting restrictions, as the award with respect to which the dividends are 
credited.  To the extent an award of restricted stock is forfeited in whole or in part, any accrued dividends with respect to such 
award will be forfeited at the same time and to the same extent as such award. No dividends or accrued interest, if any, earned 
with respect to an award of restricted stock may be paid before the underlying award vests.

Restricted Stock Units

Restricted stock units may be granted to employees, directors or consultants of the Company at any time and from time to time 
as determined by the Administrator.  Each restricted stock unit grant will be evidenced by an award agreement that will specify 
such terms and conditions as the Administrator will determine in accordance with the terms of the 2020 Stock Plan.

Restricted stock units result in a payment to a participant only if the vesting criteria the Administrator establishes are satisfied.  
The Administrator  may  set  vesting  criteria  based  on  the  achievement  of  Company-wide,  business  unit,  or  individual  goals 
(including continued employment), or any other basis determined by the Administrator in its discretion.  The restricted stock
units will vest at a rate determined by the Administrator.  Upon satisfying the applicable vesting criteria, the participant will be 
entitled to a payout as specified in the award agreement or as otherwise determined by the Administrator.  The Administrator,
in its sole discretion, may pay earned restricted stock units in shares, cash, or a combination thereof.  On the date set forth in, 
and otherwise subject to the terms and conditions of the award agreement, or as provided by the Administrator, all unearned 
restricted stock units will be terminated and forfeited to the Company.  Additionally, the Administrator is authorized to grant 
participants dividend equivalents based on the dividends declared on shares that are subject to any outstanding restricted stock 
unit.  Any such dividend equivalents will be accumulated and credited to an account for the participant, with interest in the 
Administrator’s discretion, and will be subject to the same terms and conditions, including vesting restrictions, as the award
with respect to which the dividend equivalents are credited.  To the extent an award of restricted stock units is forfeited in whole 
or in part, any accrued dividend equivalents with respect to such award will be forfeited at the same time and to the same extent 
as such award. No dividend equivalents or accrued interest, if any, earned with respect to restricted stock units may be paid 
before the underlying award vests.

Stock Appreciation Rights

SARs may be granted to employees, directors or consultants of the Company at any time and from time to time as determined 
by the Administrator in its discretion.  Each SAR grant will be evidenced by an award agreement that will specify the exercise 
price, the term of the SAR, the conditions of exercise, and such other terms and conditions as the Administrator will determine 
in accordance with the terms of the 2020 Stock Plan.

The Administrator will have discretion to determine the terms and conditions of SARs granted under the 2020 Stock Plan;
provided that no SAR may have a term of more than 10 years from the date of grant and that the exercise price of a SAR may 
not have an exercise price below 100% of the fair market value of the Common Stock on the grant date.  No SAR can be 
exercised by any person after its expiration.

Upon  exercise  of  a  SAR,  the  holder  of  the  SAR  will  be  entitled  to  receive  payment  from  us  in  an  amount  determined  by 
multiplying (i) the difference between the fair market value of a share on the date of exercise over the exercise price, times (ii) 
the number of shares with respect to which the SAR is exercised.

At the discretion of the Administrator and as set forth in the applicable award agreement, payment to the holder of a SAR may 
be in cash, shares of Common Stock or a combination thereof.

35

Performance Units And/Or Performance Shares

Performance units and performance shares may be granted to employees, directors or consultants of the Company at any time 
and  from  time  to  time,  as  determined  by  the Administrator  in  its  sole  discretion.    The Administrator  will  have  complete 
discretion in determining the number of performance units/shares granted to each participant. The Administrator may provide 
that awards of performance shares and performance units earn dividends or dividend equivalents, as applicable, and accrued 
interest in its discretion. To the extent an award of performance units or performance shares is terminated, cancelled or forfeited 
in whole or in part, due to failure to meet performance conditions or otherwise, any dividends, dividend equivalents and accrued 
interest will be terminated, cancelled or forfeited at the same time and to the same extent as such award. No dividends, dividend 
equivalents or accrued interest, if any, earned with respect to a performance unit award or a performance share award may be 
paid before the underlying award vests.

The Administrator will set performance objectives or other vesting provisions (including, without limitation, continued status 
as a service provider to the Company) in its discretion which, depending on the extent to which they are met, will determine 
the number or value of performance units or performance shares that will be paid out.  Each award of performance units and 
performance shares will be evidenced by an award agreement that will specify the time period during which the performance 
objectives  or  other  vesting  provisions  must  be  met  (the  “performance  period”),  vesting  period  and  such  other  terms  and 
conditions  as  the Administrator  will determine  in  its  discretion  in  accordance  with  the  terms  of  the  2020  Stock  Plan.   The 
Administrator may set performance objectives based upon the achievement of Company-wide, divisional, or individual goals, 
or any other basis determined by the Administrator in its discretion.

After the applicable performance period has ended, the holder of performance units or performance shares will be entitled to 
receive a payout of the number of performance units or performance shares earned by the participant over the performance 
period,  to  be  determined  as  a  function  of  the  extent  to  which  the  corresponding  performance  objectives  or  other  vesting 
provisions have been achieved.  The Administrator may pay earned performance units and performance shares in the form of 
cash, in shares, or in a combination thereof.  After the grant of performance units or performance shares, the Administrator may 
reduce or waive any performance objectives or other vesting provisions for such performance unit or performance share.

On the date set forth in, and otherwise subject to the terms and conditions of, the award agreement, or as otherwise provided
by the Administrator, all unearned or unvested performance units and performance shares will be forfeited to the Company.

Other Plan Provisions

Termination Of Employment

The 2020 Stock Plan gives the Administrator the authority to vary the terms of the individual award agreements.  Under the 
2020 Stock Plan, unvested awards granted will generally be forfeited or expire upon a participant’s termination of employment 
unless the Committee exercises its discretion to modify the time at which stock options and SARs may be exercised or any 
restrictions  will  lapse  or  be  removed or  waived,  notwithstanding  any  provision  of  the  2020  Stock  Plan to  the  contrary.
Generally, with respect to stock options and SARs, if a participant ceases to provide ongoing service as an employee, director 
or consultant for any reason other than death or disability or termination for cause, then the participant will generally have the 
right to exercise his or her outstanding options and SARs for three (3) months after the date of termination, but only to the 
extent that the participant was entitled to exercise such option or SAR at the date of such termination.  If such termination is 
due to death or disability, the participant (or the participant’s legal representative) will generally have the right to exercise any 
existing unexercised option or SAR at any time within twelve (12) months following the termination date, but only to the extent 
that the participant was entitled to exercise such option or SAR at the date of such termination.  In no event will an option or 
SAR be exercisable beyond its term.  In the event of a participant’s termination for cause, then the participant’s options and/or 
SARs, whether vested or unvested, will immediately be forfeited upon termination.

36

Recoupment

A participant’s rights with respect to any award granted under the 2020 Stock Plan shall in all events be subject to (i) any right 
that the Company may have under any clawback or recoupment policy as may be in effect from time to time or any other 
clawback or recoupment agreement or arrangement applicable to a participant; or (ii) any right or obligation that the Company
may have regarding the recoupment of incentive-based compensation under Exchange Act Section 10D and any applicable 
rules and regulations issued by the SEC.

Compliance With Code Section 409A

Awards  are  intended  to  operate  in  such  a  manner  that  they  are  either  exempt  from  the  application  of,  or  comply  with,  the 
requirements of Code Section 409A such that the grant, payment, settlement or deferral will not be subject to the additional tax 
or interest applicable under Code Section 409A, except as otherwise determined in the sole discretion of the Administrator,
provided that no warranty of such exemption or compliance is made.  The 2020 Stock Plan and each award Agreement under 
the  2020  Stock  Plan is  intended  to  meet  the  requirements  of  Code  Section  409A and  will  be  construed  and  interpreted  in 
accordance with such intent, except as otherwise determined in the sole discretion of the Administrator.

Non-Transferability Of Awards

Unless determined otherwise by the Administrator, an award granted under the 2020 Stock Plan may not be sold, pledged, 
assigned, hypothecated, transferred, or disposed of in any manner other than by will or by the laws of descent or distribution
or as otherwise permitted in the 2020 Stock Plan and may be exercised, during the lifetime of the participant, only by the 
participant.  If the Administrator makes an award granted under the 2020 Stock Plan transferable, such award shall be subject 
to the terms of the 2020 Stock Plan and the award agreement and will contain such additional terms and conditions as the 
Administrator deems appropriate.  Notwithstanding the foregoing, under no circumstance may unvested or unexercised awards 
be transferred for value or consideration.

Adjustments

In the event that any dividend (other than ordinary cash dividends) or other distribution (whether in the form of cash, shares, 
other securities, or other property), recapitalization, stock split, reverse stock split, reorganization, merger, consolidation, split-
up, spin-off, combination, repurchase, or exchange of shares or other securities of the Company, or other change in the corporate 
structure of the Company affecting the shares occurs, the Administrator, in order to prevent diminution or enlargement of the 
benefits or potential benefits intended to be made available under the 2020 Stock Plan, will adjust, in such equitable manner as 
the Administrator deems appropriate, the number and class of shares issuable under the 2020 Stock Plan and/or the number,
class and, if applicable, exercise price of shares subject to each outstanding award.

Dissolution Or Liquidation

In the event of a liquidation or dissolution, the Administrator will notify each participant as soon as practicable prior to the 
effective date of such proposed transaction.  To the extent that an award has not been previously exercised (with respect to 
options and SARs) or vested (with respect to other awards), an award will terminate immediately prior to the consummation of 
such proposed action.

Change-in-Control

In the event of a Change-in-Control, notwithstanding any other provision of the 2020 Stock Plan or an award, each outstanding 
award  shall  be  treated  as  the Administrator  determines  in  its  discretion  without  a  participant’s  consent,  including,  without 
limitation, that awards may be assumed, or substantially equivalent awards may be substituted, by the acquiring or succeeding
entity or an affiliate thereof (a “successor”) with appropriate adjustments as to the number and kind of shares and prices; upon 
written notice to a participant, the participant’s awards will terminate immediately prior to the consummation of such Change-
in-Control; awards will vest and become exercisable, realizable, or payable, or restrictions applicable to an award will lapse, 

37

in whole or in part, prior to or upon consummation of such Change-in-Control, and, to the extent the Administrator determines, 
terminate upon the effectiveness of such Change-in-Control; awards will terminate in exchange for an amount of cash and/or 
property, if any, equal to the amount (if any) that would have been attained upon the exercise of such award or realization of
the participant’s rights as of the date of the occurrence of the transaction; the replacement of such award with other rights or 
property selected by the Administrator in its sole discretion; or any combination of the foregoing.

In the event of a Change-in-Control, with respect to awards held by participants other than outside directors, if the successor 
elects not to assume or substitute an Award, as determined by the Administrator in accordance with the terms of the 2020 Stock 
Plan, the participant will fully vest in and have the right to exercise all of his or her outstanding stock options and SARs; all
restrictions on restricted stock and restricted stock units will lapse; and, with respect to performance units, performance shares
and any other awards subject to performance-based vesting conditions, all performance goals or other vesting conditions will 
be deemed achieved at target.

With  respect  to  awards  granted  to  an  outside  director  that  are  assumed  or  substituted  by  a  successor,  if,  on  the  date  of  or 
following such assumption or substitution, the participant’s status as a Director or a director of the successor, as applicable, is 
terminated other than upon a voluntary resignation by the participant (unless such resignation is at the request of the successor), 
then the participant will fully vest in and have the right to exercise options and/or SARs as to all of the shares underlying such 
award for a period of one year following such termination (but in no event later than the expiration of the term of such option 
as set forth in the award agreement); all restrictions on restricted stock and restricted stock units will lapse; and, with respect 
to  performance  units,  performance  shares  and  any  other  awards  subject  to  performance-based  vesting  conditions,  all 
performance goals or other vesting conditions will be deemed achieved at target.

Plan Term; Amendment Or Termination Of The 2020 Stock Plan

The 2020 Stock Plan will become effective on the date approved by stockholders and will have a ten-year term commencing 
on that date, subject to any earlier termination by the Board.  The Board may amend, alter, suspend or terminate the 2020 Stock 
Plan or any part thereof from time to time, except that stockholder approval will be required for any amendment to the 2020 
Stock Plan to the extent required by any applicable laws, regulations of the securities exchange on which the shares are then 
listed, or otherwise in the Board’s discretion.  The Administrator may waive any conditions or restrictions of or amend, modify 
or terminate outstanding awards under the 2020 Stock Plan notwithstanding any plan provision to the contrary. As a general 
matter, no amendment, alteration, suspension or termination of the 2020 Stock Plan or an outstanding award may impair the 
rights of any participant under any then outstanding award without the participant’s written consent, with the exception of 
certain compliance amendments.

New Plan Benefits

Future  grants  under  the  2020  Stock  Plan will  be  made  at  the  discretion  of  the Administrator  and,  accordingly,  are  not  yet 
determinable.  In addition, the value of the awards granted under the 2020 Stock Plan will depend on a number of factors, 
including  the  fair  market  value  of  our  common  stock on  future  dates  and  the  exercise  decisions  made  by  the  participants.  
Consequently, it is not possible to determine the benefits that might be received by participants receiving discretionary grants 
under the Plan.

Nanometrics granted awards under the Nanometrics 2005 Stock Plan and Rudolph granted awards under the Rudolph 2018
Stock Plan in 2019 each to the named executive officers, outside directors and to other eligible employees.  The 2019 grants to 
our named executive officers and to our outside directors are reflected in the 2019 Grants of Plan-Based Awards Table and the 
2019 Director Compensation Table, respectively, in this proxy statement.  The closing market price of a share of Company 
common stock as reported on the New York Stock Exchange on December 31, 2019 was $36.54.

38

Equity Compensation Plan Information

The following table sets forth, as of December 31, 2019, certain information related to our equity compensation plans.

Equity compensation plans approved by security holders
Equity compensation plans not approved by security 

holders

Total

(a)

(b)

Number of Securities 
to be Issued Upon Exercise
of Outstanding Options,
Warrants and Rights (1)
1,152,980

Weighted-Average
Exercise Price of
Outstanding Options,
Warrants and Rights
$0.63

(c)
Number of Securities
Remaining Available for
Future Issuance Under
Equity Compensation
Plans (Excluding
Securities Reflected in
Column (a)) (2)
3,966,618

n/a

1,152,980

n/a

$0.63

n/a

3,966,618

(1)

Includes 1,106,177 shares issuable upon vesting of outstanding restricted stock units under the Nanometrics 2005 Stock Plan and the 
Rudolph 2018 Stock Plan.

(2) As of December 31, 2019, 1,252,690 of these shares were available under the Nanometrics 2005 Stock Plan and 2,477,879 of these 
shares were available under the Rudolph 2018 Stock Plan.  As of December 31, 2019 there were 236,049 shares available under the 
2003 ESPP. These shares will no longer remain available if the 2020 Stock Plan and the 2020 ESPP are approved by stockholders at 
the Annual Meeting.

Federal Income Tax Information

Nonstatutory Stock Options

No taxable income is reportable by the recipient when a nonstatutory stock option with an exercise price equal to the fair market 
value of the underlying stock on the date of grant is granted to a participant.  Upon exercise, the participant will recognize
ordinary income in an amount equal to the excess of the fair market value (on the exercise date) of the shares purchased over 
the exercise price of the option.  Any taxable income recognized in connection with an option exercise by an employee of the 
Company is subject to tax withholding by the Company.  Any additional gain or loss recognized upon any later disposition of 
the shares would be capital gain or loss.

Incentive Stock Options

No  taxable  income  is  generally  reportable  by  the  recipient  when  an  incentive  stock  option  is  granted  or  exercised.    If  the 
participant exercises the option and then later sells or otherwise disposes of the shares more than two years after the grant date 
and more than one year after the exercise date, the difference between the sale price and the exercise price will be taxed as
capital gain or loss.  If the participant exercises the option and then later sells or otherwise disposes of the shares before the 
end of the two or one year holding periods described above, he or she generally will have ordinary income at the time of the 
sale equal to the fair market value of the shares on the exercise date (or the sale price, if less) minus the exercise price of the 
option.

Stock Appreciation Rights

No taxable income is reportable by the recipient when a stock appreciation right with an exercise price equal to the fair market 
value of the underlying stock on the date of grant is granted to a participant.  Upon exercise, the participant will recognize
ordinary income in an amount equal to the amount of cash received and the fair market value of any shares received.  Any 
additional gain or loss recognized upon any later disposition of the shares would be capital gain or loss.

39

Restricted Stock And Restricted Stock Units

A participant generally will not have taxable income at the time an award of restricted stock or restricted stock units is granted.  
Instead, with respect to restricted stock, he or she will recognize ordinary income in the first taxable year in which the restricted 
shares are no longer subject to substantial risk of forfeiture in an amount equal to the excess of the fair market value of the 
shares on the vesting date over the amount, if any, the participant paid for the shares.  However, the recipient of a restricted 
stock award may elect to recognize income at the time he or she receives the award in an amount equal to the fair market value 
of the shares underlying the award (less any cash paid for the shares) on the date the award is granted. Upon settlement of a
restricted stock unit, a participant will recognize ordinary income an amount equal to the fair market value of the shares received 
or, if the restricted stock unit is paid in cash, the amount payable.

Performance Units And Performance Shares

A participant generally will not have taxable income at the time an award of performance units or performance shares is granted.  
Instead, with respect to performance shares, he or she will recognize ordinary income in the first taxable year in which his or 
her  interest  in  the  shares underlying  the  award are no  longer  subject  to  substantial risk of  forfeiture. Upon  settlement  of a 
performance unit, a participant will recognize ordinary income an amount equal to the fair market value of the shares received
or, if the performance units are paid in cash, the amount payable.

Tax Effect For The Company

The Company generally will be entitled to a tax deduction in connection with an award under the 2020 Stock Plan in an amount 
equal to the ordinary income realized by a participant and at the time the participant recognizes such income (for example, the 
exercise of a nonstatutory stock option).  Code Section 162(m) places a $1 million limit on the deductibility of compensation 
paid to certain covered employees.  Based on recent legislation effective for tax years commencing after December 31, 2017, 
this limit on deductibility applies to the Company’s chief executive officer, its chief financial officer, its three most highly 
compensated executive officers included as named executive officers in the proxy statement, and any individual who was a 
named  executive  officer  for  fiscal  2017  or  thereafter.    In  addition,  the  legislation  eliminated the  exception  to  the  limit  on 
deductibility for certain performance-based compensation.

THE FOREGOING IS ONLY A SUMMARY OF THE EFFECT OF FEDERAL INCOME TAXATION UPON THE 
PARTICIPANT AND THE COMPANY AS OF THE DATE HEREOF WITH RESPECT TO AWARDS UNDER THE 
2020 STOCK PLAN AND DOES NOT PURPORT TO BE COMPLETE, AND REFERENCE SHOULD BE MADE TO 
THE  APPLICABLE  PROVISIONS  OF  THE  INTERNAL  REVENUE  CODE.  IN  ADDITION,  THIS  SUMMARY 
DOES  NOT  DISCUSS THE TAX  CONSEQUENCES  OF A  PARTICIPANT’S  DEATH  OR THE  PROVISIONS  OF 
THE  INCOME  TAX  LAWS  OF  ANY  MUNICIPALITY,  STATE  OR  FOREIGN  COUNTRY  IN  WHICH  THE 
PARTICIPANT MAY RESIDE. PARTICIPANTS SHOULD CONSULT THEIR OWN TAX ADVISORS.

Vote Required

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to 
vote will be required to approve the adoption of the 2020 Stock Plan.

The Board recommends a vote “FOR” the adoption of
the Onto Innovation Inc. 2020 Stock Plan.

40

PROPOSAL 4

APPROVAL OF THE ONTO INNOVATION INC. 
2020 EMPLOYEE STOCK PURCHASE PLAN

The Board of Directors is requesting that our stockholders approve a new employee stock purchase plan, the Onto Innovation 
Inc. 2020 Employee Stock Purchase Plan (the “2020 ESPP”). The Board has adopted the 2020 ESPP, subject to stockholder 
approval at the Annual Meeting. If approved by our stockholders, the 2020 ESPP will become effective as of July 1, 2020 and 
will expire ten (10) years from such date, unless terminated earlier. The 2020 ESPP is intended to replace the Nanometrics 2003
Employee Stock Purchase Plan (the “2003 ESPP”). If the stockholders approve this Proposal 4, the 2003 ESPP will expire after 
the final share purchase is made on or about June 30, 2020. The Board has determined that it remains in the best interests of 
the  Company  and  its  stockholders  to  have  an  employee  stock  purchase  plan  and  is  asking  the  Company’s  stockholders  to 
approve the 2020 ESPP.

Changes Being Made To The 2020 ESPP

Our 2020 ESPP provides for a maximum share reserve of 1,500,000 shares, which represents 3.0% of our outstanding shares 
as of March 13, 2020. The 2003 ESPP upon amendment and restatement in 2016 provided for a share reserve of 2,450,000 
shares. As of the effective date of the 2020 ESPP, no additional shares will thereafter be sold under the 2003 ESPP.

Summary Of The 2020 Employee Stock Purchase Plan

The following is a summary of the principal features of the 2020 ESPP and its operation. The summary is qualified in its entirety 
by reference to the 2020 ESPP as set forth in Appendix B.

General

The 2020 ESPP was adopted by the Board in March 2020, subject to stockholder approval at the Annual Meeting. The purpose 
of the 2020 ESPP is to provide eligible employees with an opportunity to purchase shares of Common Stock through payroll 
deductions, to enhance the employees’ sense of participation in the Company and its participating subsidiaries, and to provide 
an incentive for continued employment.

Shares Available For Issuance

If the Company’s stockholders approve this proposal, the number of shares of the Company’s Common Stock to be reserved 
for issuance under the 2020 ESPP shall be 1,500,000, as may be adjusted for stock splits, stock dividends or other changes in 
capitalization, mergers, reorganizations and other transactions in accordance with plan terms.

Administration

The 2020 ESPP will be administered by the Board or a committee of members of the Board (in either case, the “Administrator”). 
Subject to the provisions of the 2020 ESPP, all questions of interpretation or application of the 2020 ESPP are determined by 
the Administrator and its decisions are final and binding upon all participants.

Eligibility

Each of the Company’s (or the Company’s participating subsidiaries’) employees who is customarily employed for at least 
twenty (20) hours per week and more than five (5) months in a calendar year by the Company or a designated subsidiary, 
(provided that, in certain jurisdictions outside the United States employees employed for less than twenty (20) hours per week 
or less than five (5) months in a calendar year if so required by local laws, as determined by the Company), on the first trading 
day of the applicable offering period is eligible to participate in the 2020 ESPP. As of March 13, 2020, there were approximately 

41

1,300 employees eligible to participate under the terms of the 2020 ESPP. Notwithstanding the foregoing, no employee will be 
granted an option under the 2020 ESPP (i) to the extent that, immediately after the grant, such employee would own 5% or 
more of the total combined voting power of all classes of the Company’s capital stock or the capital stock of any Company 
parent or subsidiary, or (ii) to the extent that his or her rights to purchase stock under all of the Company’s employee stock 
purchase plans accrues at a rate which exceeds $25,000 worth of stock (determined at the fair market value of the shares at the 
time such option is granted) for each calendar year.

Offering Period & Purchase Price

Each offering period under the 2020 ESPP will have a duration of approximately six (6) months, commencing on the first 
trading day on or after January 1st and July 1st of each year of the 2020 ESPP and terminating on the last trading day of the 
applicable period ending six (6)  months later. On the last trading day of each offering period (the exercise date), shares of 
Common Stock may be purchased on behalf of the participant in accordance with the terms of the 2020 ESPP.

Eligible employees may participate in the 2020 ESPP by delivering a subscription agreement as provided by the Company prior 
to the beginning of an offering period authorizing payroll deductions pursuant to the 2020 ESPP. Such payroll deductions may 
not be less than 1% or exceed 15% of a participant’s compensation during the offering.

Under the terms of the 2020 ESPP, the purchase price of shares under the 2020 ESPP is 85% of the fair market value of a share 
of Common Stock on the exercise date, as may be adjusted in accordance with plan terms.

Merger Or Asset Sale

In the event of a proposed sale of all or substantially all of the assets of the Company, or the merger of the Company with or
into  another  corporation,  each  outstanding  option  under  the  2020  ESPP may be  assumed  or  an  equivalent  option  will  be 
substituted by the successor corporation or a parent or subsidiary of such successor corporation. In the event the successor 
corporation refuses to assume or substitute for the options, any offering period then in progress will be shortened by setting a 
new exercise date on which such offering period will end. The new exercise date will be prior to the proposed sale or merger.
The Administrator will notify each participant in writing at least ten (10) business days prior to the new exercise date that the 
purchase date for the participant’s option has been changed to the new exercise date and that the participant’s option will be
exercised automatically on the new exercise date unless the participant withdraws from the 2020 ESPP prior to such date.

Amendment And Termination Of The 2020 ESPP

The Administrator  may  amend,  terminate  or  suspend  the  2020  ESPP at  any  time  and  for  any  reason.  Generally,  no  such 
termination can adversely affect options previously granted and stockholder approval will be sought for certain changes as 
required by applicable law.

Upon its approval by the stockholders, the 2020 ESPP will continue until the earlier to occur of (i) the termination of the 2020 
ESPP by the Board, or (ii) July 1, 2030 (the date which is ten (10) years from the effective date of the 2020 ESPP).

Federal Income Tax Consequences Relating To The 2020 ESPP

The federal income tax consequences of an employee’s purchases under the 2020 ESPP will vary. The following discussion is 
only a summary of the general federal income tax rules applicable to the 2020 ESPP. Employees should consult their own tax 
advisors since a taxpayer’s particular situation may be such that some variation of the rules described below will apply.

The 2020 ESPP and the right of participants to make purchases thereunder are intended to qualify under the provisions of 
Section 421 and 423 of the Code. Under those provisions, no income will be taxable to a participant at the time of grant of the 
option or purchase of shares.  However, a participant may become liable for tax upon the dispositions of shares acquired under 
the 2020 ESPP (or if he or she dies holding such shares), and the tax consequences will depend on how long a participant has 
held the shares prior to disposition.

If the shares are disposed of at least one (1) year after the shares were acquired under the 2020 ESPP and at least two (2) years 
after the first day of the offering period to which the shares relate, or if the employee dies while holding the shares, the following 
tax consequences will apply.  The lesser of (a) the excess of fair market value of the shares at the time of such disposition over 

42

the purchase price of the shares (the “option price”) or (b) the excess of the fair market value of the shares at the time the option 
was  granted  over  the  option price  will  be  treated  as  ordinary  income  to  the  participant. Any  further  gain  upon  disposition 
generally will be taxed at long-term capital gain rates. If the shares are sold and the sales price is less than the option price, 
there is no ordinary income and the participant has a long-term capital loss equal to the difference. No deduction in respect of 
the disposition of such shares will be allowed to the Company.

If the shares are sold or disposed of (including by way of gift) before the expiration of either the two-year or the one-year 
holding period described above, the following tax consequences will apply. The amount by which the fair market value of the 
shares on the date the option is exercised (which is the last trading day of the offering period and which is hereafter referred to 
as  the  “termination  date”)  exceeds  the option  price  will  be  treated  as  ordinary  income  to  the  participant. This  excess  will 
constitute ordinary income in the year of sale or other disposition even if no gain is realized on the sale or a gratuitous transfer 
of the shares is made. The balance of any gain will be treated as capital gain and will qualify for long-term capital gain treatment 
if the shares have been held for more than one (1) year following the exercise of the option. Even if the shares are sold for less 
than their fair market value on the termination date, the same amount of ordinary income is attributed to a participant and a 
capital loss is allowed equal to the difference between the sales price and the value of such shares on such termination date.
The Company, in the event of an early disposition, will be allowed a deduction for federal income tax purposes equal to the 
ordinary income realized by the disposing employee. 

THE FOREGOING IS ONLY A SUMMARY OF THE EFFECT OF FEDERAL INCOME TAXATION UPON THE 
PARTICIPANT AND THE  COMPANY AS  OF THE  DATE  HEREOF WITH  RESPECT TO THE  2020  ESPP AND
DOES  NOT  PURPORT  TO  BE  COMPLETE, AND  REFERENCE  SHOULD  BE  MADE  TO  THE APPLICABLE 
PROVISIONS OF THE INTERNAL REVENUE CODE.  IN ADDITION, THIS SUMMARY DOES NOT DISCUSS 
THE  TAX  CONSEQUENCES  OF A  PARTICIPANT’S  DEATH  OR  THE  PROVISIONS  OF  THE  INCOME  TAX 
LAWS  OF  ANY  MUNICIPALITY,  STATE  OR  FOREIGN  COUNTRY  IN  WHICH  THE  PARTICIPANT  MAY 
RESIDE.

Vote Required

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to 
vote will be required to approve the 2020 ESPP.

The Board recommends a vote “FOR” the adoption of the
Onto Innovation Inc. 2020 Employee Stock Purchase Plan.

43

PROPOSAL 5

RATIFICATION OF APPOINTMENT OF INDEPENDENT
REGISTERED PUBLIC ACCOUNTING FIRM

Although  ratification  by  stockholders  is  not  required  by  law,  the  Board  of  Directors  is  submitting  the Audit  Committee’s 
selection of Ernst & Young LLP (“E&Y”) as the Company’s independent registered public accounting firm for fiscal year 2020
for ratification as a matter of good corporate governance and recommends that the stockholders vote for ratification of such 
appointment. In the event of a negative vote on such ratification, the Board of Directors will reconsider its selection. Even if 
the selection is ratified, the Audit Committee may appoint a new independent registered public accounting firm at any time 
during  the  year  if  the Audit Committee  believes  that  such  a  change  would  be  in  the best  interests  of  the  Company  and  its 
stockholders.  E&Y has indicated that representatives of E&Y, the independent registered public accounting firm presented 
herein, will be in attendance at the Annual Meeting. Such representatives will have the opportunity to make a statement, if they 
desire to do so, and to respond to appropriate questions.

Change in Independent Registered Public Accounting Firm

Prior to the 2019 Merger, E&Y was the independent registered public accounting firm of Rudolph, and PricewaterhouseCoopers 
LLP (“PwC”) was the independent registered accounting firm of Nanometrics.

As  previously  reported  on  our  Current  Report  on  Form 8-K  filed  with  the  SEC  on  November  13,  2019,  PwC resigned on 
November 11, 2019, and E&Y was engaged by the Company as its independent registered public accounting firm for the year 
ending December 31, 2019. The decision to change the independent registered accounting firm was approved by the Audit 
Committee.

PwC’s reports on Nanometrics’ financial statements for the fiscal years ended December 29, 2018 and December 30, 2017 
contained no adverse opinion or disclaimer of opinion, and were not qualified or modified as to uncertainty, audit scope or 
accounting principle.

During the fiscal years ended December 29, 2018 and December 30, 2017 and the subsequent interim period through November 
11, 2019, there have been no disagreements (as defined in Item 304(a)(1)(iv) of Regulation S-K and the related instructions) 
with PwC on any matter of accounting principles or practices, financial statement disclosure, or auditing scope or procedure, 
which disagreements, if not resolved to the satisfaction of PwC, would have caused PwC to make reference thereto in their 
reports on the financial statements for such years.

During the fiscal years ended December 29, 2018 and December 30, 2017 and subsequent interim period through November 
11, 2019, there have been no reportable events (as defined in S-K 304(a)(1)(v)), except that as disclosed in the Company's 
Quarterly Report on Form 10-Q for the quarterly periods ended April 1, 2017, July 1, 2017 and September 30, 2017 (the “2017 
Form 10-Qs”), management concluded that a material weakness existed related to ineffective controls over the existence of 
inventories  subject  to  the  cycle  count  programs. The  material  weakness  was  remediated  and  described  in  Item  9A  of  the 
Company’s annual report on Form 10-K for the year ended December 30, 2017.

The Company requested that PwC furnish it with a letter addressed to the SEC stating whether or not it agrees with the above 
statements. A copy of the letter from PwC, dated November 12, 2019, is filed as Exhibit 16.1 to such Form 8-K.

During  the  fiscal  years  ended  December  29,  2018  and  December  30,  2017,  and  the  subsequent  interim  periods  through 
November 11, 2019, neither Onto Innovation nor anyone on its behalf consulted with E&Y, regarding either: (i) the application 
of accounting principles to a specific transaction, completed or proposed, or the type of audit opinion that might be rendered
on Onto Innovation’s financial statements, and neither a written report nor oral advice was provided to Onto Innovation that 
EY concluded was an important factor considered by Onto Innovation in reaching a decision as to any accounting, auditing or 
financial reporting issue, or (ii) any matter that was either the subject of a disagreement (as defined in Item 304(a)(1)(iv) of 
Regulation S-K and the related instructions) or a reportable event (as described in Item 304(a)(1)(v) of Regulation S-K).

Independent Registered Public Accounting Firm Selection Process

E&Y served as Rudolph’s independent registered public accounting firm since March 2008 and was selected as the accounting 
firm for the Company after the Merger Date. During this time, the firm has demonstrated:

•

A high degree of independence and professionalism in their audit engagement with Rudolph and the Company;

44

•

•

•

•

A solid record of partner and professional staff continuity;

A knowledge of current and emerging accounting and auditing issues affecting Rudolph and the Company;

A deep and ongoing understanding of Rudolph’s and the Company’s business model and industry; and

A readiness to assist Rudolph and the Company and their respective audit committees in keeping up-to-date with the 
latest accounting and auditing pronouncements and their application to Rudolph’s and the Company’s business.

In making its selection of an independent registered public accounting firm, the Audit Committee assesses, among other factors:

•

•

•

•

The performance of the independent registered public accounting firm in the prior year;

The anticipated needs of the Company and ability of the accounting firm to address them in the coming year;

The proposed fees for the coming year; and

The potential impact of changing auditors for the coming year.

Ultimately, the decision of the independent registered public accounting firm is made with the best interest of the Company 
and its stockholders in mind.

Factors Used To Assess Independent Registered Public Accounting Firm Quality

Members of the Audit Committee have experience in dealing with audits of other public companies as well as experience with 
other  accounting  firms. After  the  Merger  Date,  the Audit  Committee’s  basis  for  the  selection  of  E&Y  as  the  Company’s 
independent  registered  public  accounting  firm  included,  among  other  considerations,  familiarity  of  Rudolph’s  accounting 
practices  as  the  accounting  acquirer  in  the  2019  Merger,  E&Y’s  breadth  of  services  and  international  footprint  as  well  as 
expense considerations. On an ongoing basis, E&Y has been responsive, reliable and professional in their dealings with the 
Audit Committee and has appropriately assisted the Audit Committee in its oversight of the Company’s financial processes and 
financial statements.  In addition, E&Y makes available to the Company specialists within their firm to assist in the audit when 
consultation  on  specific  and  unique  issues  arise. These  processes  appear  to  be  effective  in  assisting  E&Y  with  their  audit 
engagement.

As a part of the Audit Committee’s review of E&Y’s qualifications, E&Y provides the Company with the firm-wide comments 
from the Public Company Accounting Oversight Board (PCAOB) regarding PCAOB’s examinations of E&Y for the prior year. 
E&Y also updates the Company with the quality improvements that the firm has made as a result of the PCAOB comments as 
well as other changes to their quality and risk assessment processes.

Audit Committee’s Involvement In The Lead Partner Selection

In keeping with their independence policy, E&Y employs a regular schedule of rotation of the both the lead engagement partner 
(“Lead Partner”) and the support staff. This rotation provides for sufficient overlap of the new Lead Partner with the outgoing
Lead Partner. This process allows for the members of the Audit Committee and the Company management to become familiar 
with the new Lead Partner and new staff and to introduce them to the Company’s business.  Prior to the new Lead Partner’s 
full engagement, the Audit Committee and Company management meet with E&Y to review and offer feedback on the industry 
experience, financial acumen and anticipated fit of the new Lead Partner with the Company.

Policy On Audit Committee Pre-Approval Of Audit And Permissible Non-Audit Services Of Independent Registered 
Public Accounting Firm

Pursuant to our Audit Committee charter, our Audit Committee must pre-approve all audit and permissible non-audit services 
provided by the Company’s independent registered public accounting firm. These services may include audit services, audit-
related  services,  tax  and other  services.  Pre-approval  is  generally  provided  for up  to  one  (1) year,  and  any  pre-approval  is 
detailed  as  to  the  particular  service  or  category  of  services  and  is  generally  subject  to  a  specific  budget. The  independent 
registered public accounting firm and management are required to periodically report to the Audit Committee regarding the 
extent of services provided by the independent registered public accounting firm in accordance with this pre-approval and the
fees for the services performed to date. The Audit Committee may also pre-approve particular services on a case-by-case basis. 
During 2019, all services provided by Ernst & Young LLP to both Rudolph and the Company were pre-approved by the Audit 
Committee  in  accordance  with  this  policy, and  the Audit  Committee  has  concluded  that  the  provision  of  these  services  is 
compatible with the accountants’ independence.

45

Audit and Non-Audit Fees

The following table sets forth the fees billed for the year ended December 31, 2019 and the fiscal year ended December 29, 
2018 by the Company’s independent registered public accounting firm, Ernst & Young LLP, for 2019, and the independent 
registered public accounting firm, PricewaterhouseCoopers LLP, prior to the Merger.

Fees

Audit
Audit Related
Tax
All Other
Total

E&Y
2019
$1,006,202
-
43,770
2,000
$1,051,972

PwC
2019

$900,800
83,755
114,000
2,700
$1,101,255

PwC
2018
$1,333,197
-
-
2,700
$1,335,897

Audit Fees

Audit fees for the fiscal year ended December 31, 2018 were for the audit of Nanometrics’ annual financial statements including 
management’s  assessment  of  internal  controls  over  financial  reporting,  the  review  of  Nanometrics’ quarterly  financial 
statements and statutory and regulatory audits, consents and other services.  Audit fees for the year ended December 31, 2019 
were  for  the  aggregate  fees  billed  for  professional  services  rendered  to  the  Company  subsequent  to  the  2019  Merger  and 
Nanometrics prior to the 2019 Merger for the audit of the annual financial statements and a review of financial statements 
included in the quarterly reports on Form 10-Q.  These fees may include services that are normally provided by the independent 
registered  public  accounting  firm  in  connection  with  regulatory  filings  or  engagements  including  any  comfort  letters  and 
consents for financings and filings made with the SEC.

Audit Related Fees

Audit related fees for the fiscal year ended December 31, 2018 were for professional services rendered to Nanometrics prior to 
the 2019 Merger that were reasonably related to the performance of the audit or review of Nanometrics’ financial statements. 
This category includes fees related to assistance in financial due diligence related to the 2019 Merger and general assistance 
with implementation of SEC requirements.

Tax Fees

Tax fees may include fees for tax compliance, tax planning and tax advice. Tax fees for the year ended December 31, 2019
were for tax advice.  

All Other Fees

All  other fees  would  consist  of  fees  for  products  and  services  other  than  the  services  described  above.  For  the year  ended 
December 31, 2019, all other fees included payments for an accounting and auditing information tool.

Negotiation of the annual independent registered public accounting firm fees is the responsibility of the Audit Committee with 
the support of the Company’s CFO.  All of the Ernst & Young LLP fees listed in the chart above for 2019 were pre-approved 
by the Audit Committee of Rudolph prior to the 2019 Merger and, after the Merger Date, the Company, each of which concluded 
that the provisions of such services by Ernst & Young LLP were compatible with the maintenance of that firm’s independence 
in the conduct of its audit functions. All of the PricewaterhouseCoopers LLP fees listed above were pre-approved by the Audit 
Committee  of  Nanometrics  prior  to  the  2019  Merger,  each  of  which  concluded  that  the  provisions  of  such  services  by 
PricewaterhouseCoopers LLP were compatible with the maintenance of that firm’s independence in the conduct of its audit 
functions.

46

Vote Required

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to
vote will be required to ratify Ernst & Young LLP as the Company’s independent registered public accounting firm for the year
ending December 26, 2020.

The Company’s Board of Directors unanimously recommends voting “FOR” the
ratification of the appointment of Ernst & Young LLP as the Company’s independent 
registered public accounting firm for the year ending December 26, 2020.

47

AUDIT COMMITTEE REPORT

The following is the Audit Committee’s report submitted to the Board of Directors for the year ended December 31, 2019.

As noted in the Company’s charter, management is responsible for the Company’s internal controls and the financial reporting 
process.  The  independent  registered  public  accounting  firm  is  responsible  for  performing  an  independent  audit  of  the 
Company’s consolidated financial statements in accordance with the standards of the Public Company Accounting Oversight 
Board  (United  States)  and  for  issuing  a  report  thereon. Additionally,  the  independent  registered  public  accounting  firm  is 
responsible for performing an independent audit of the Company’s internal controls over financial reporting and for issuing a
report thereon. The Committee’s responsibility is to monitor and oversee these processes.

In this context, the Audit Committee of the Board of Directors has:

•

•

•

•

reviewed and discussed with management and with Ernst & Young LLP, the Company’s independent registered public 
accounting firm, together and separately, the Company’s audited consolidated financial statements contained in its 
Annual Report on Form 10-K for the year ended December 31, 2019;

discussed with Ernst & Young LLP the matters required to be discussed by Statement on Auditing Standards No. 1301, 
Communications with Audit Committees;

received the written disclosures and the letter from Ernst & Young LLP required by applicable requirements of the 
Public  Company  Accounting  Oversight  Board  regarding  the  independent  registered  public  accounting  firm’s 
communications with the Audit Committee concerning independence, and has discussed with Ernst & Young LLP its 
independence; and

discussed and reviewed with the Company’s manager - internal audit (“Mgr-IA”) and Ernst & Young LLP, with and 
without  management  present,  the  Company’s  work  in  complying  with  the  requirements  of  Section  404  under  the 
Sarbanes-Oxley Act of 2002 regarding internal controls over financial reporting. In connection therewith, the Audit 
Committee also discussed with the Mgr-IA, with and without other members of management present, management’s 
assessment  of  the  effectiveness  of  internal  controls  over  financial  reporting  as  of  December  31,  2019. The Audit 
Committee  also  discussed  Ernst  &  Young  LLP’s  audit  report  on  internal  controls  over  financial  reporting  as  of 
December 31, 2019 with management and Ernst & Young LLP. 

Based on the foregoing review and discussions, the Audit Committee recommended to the Board of Directors that the audited 
financial statements be included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2019.

THE AUDIT COMMITTEE

Christine A. Tsingos (Chairperson)
Jeffrey A. Aukerman
Vita A. Cassese
Christopher A. Seams
John R. Whitten

48

EXECUTIVE COMPENSATION

COMPENSATION DISCUSSION AND ANALYSIS

Introduction

On the Merger Date, Nanometrics and Rudolph combined to create Onto Innovation Inc. As Nanometrics was the legal acquirer 
of  Rudolph,  the  compensation  of  Nanometrics executives  for  periods  prior  to  and  after  the  2019 Merger  is  discussed  and 
analyzed.  The  compensation  of  former  Rudolph executives  who  are  now  executives  of  Onto  Innovation  is  discussed  and 
analyzed for periods subsequent to the 2019 Merger. Therefore, this CD&A primarily addresses legacy Nanometrics executive 
compensation programs and the decisions made by the legacy Nanometrics Compensation Committee, and, where necessary, 
legacy Rudolph executive compensation programs and the decisions made by the legacy Rudolph Compensation Committee. 
We also provide a discussion and analysis of the combined company executive compensation programs going forward, which 
reflect the decisions made by the Company’s Compensation Committee.

This  Compensation Discussion  and Analysis  describes  our  compensation  philosophy,  process,  plans  and  practices  for  our 
executive officers and contains a discussion of the material elements of compensation awarded to, earned by, or paid to the 
Company’s “Named Executive Officers” listed in the table below (“NEOs”), including:

The next three (3) most highly compensated executives of the Company in 2019

• Our principal executive officer
• Our principal financial officer
•
• Nanometrics’ principal executive officer prior to the 2019 Merger
• Nanometrics’ principal financial officer prior to the 2019 Merger
• Up to two (2) individuals for whom disclosure would have been provided pursuant to the third bullet above but for 

the fact they were not serving as an executive officer of Onto Innovation as of December 31, 2019

Based on the foregoing, the Company’s NEOs for 2019 are:

Onto Innovation’s Named Executive Officers (NEOs)

NEO Name

Position

Michael P. Plisinski

CEO

Sr. Vice President & CFO

Legacy 
Company 
Affiliation

Current 
Company 
Affiliation

Rudolph

Onto Innovation

Rudolph

Onto Innovation

Sr. Vice President, Field Operations

Nanometrics

Onto Innovation

Sr. Vice President, Marketing & Corporate 
Development
Sr. Vice President & General Manager, 
Metrology Business Unit
Former President, Chief Executive Officer

Nanometrics

Onto Innovation

Nanometrics

Onto Innovation

Nanometrics

N/A

Vice President, Finance

Nanometrics

Onto Innovation

Former Sr. Vice President, Operations

Former General Counsel

Nanometrics

Nanometrics

N/A

N/A

Steven R. Roth

Rollin Kocher

Kevin Heidrich

Rodney Smedt

Pierre-Yves Lesaicherre, Ph.D.

Greg Swyt

James Barnhart

Janet Taylor

EXECUTIVE SUMMARY

Our Business

We are a global leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that 
include:  unpatterned  wafer  quality;  3D  metrology  spanning  the  chip  from  nanometer-scale  transistors  to  micron-level  die-

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interconnects;  macro  defect  inspection  of  wafers  and  packages;  metal  interconnect  composition;  factory  analytics;  and 
lithography for advanced semiconductor packaging. We also provide services relating to the maintenance and repair of our 
products, installation services and training. Semiconductor capital equipment is our primary served market.

2019 Financial Highlights

On October 25, 2019, Nanometrics Incorporated and Rudolph Technologies, Inc. merged to form Onto Innovation Inc. Onto 
Innovation accounts for the 2019 Merger as a reverse acquisition using the acquisition method of accounting in accordance 
with generally accepted accounting principles, with Rudolph being treated as the acquiring entity for accounting purposes. 
Because Rudolph is treated as the accounting acquirer in the 2019 Merger, the financial statements filed with the SEC in Onto 
Innovation’s Form 10-K include the financial results of Rudolph for all periods presented and the financial results of the former 
Nanometrics for the periods on or after October 26, 2019. Based on the foregoing, Onto Innovation reported revenue of $305.9 
million as of year-end 2019.

Results Of The 2019 Stockholder Votes On Executive Compensation

Our Board recognizes the fundamental interest our stockholders have in the compensation of our executive officers.  At the 
Nanometrics 2019 Annual Meeting, 98% of stockholders present at the meeting voted in favor of its advisory vote on executive 
compensation.  Similarly, at the Rudolph 2019 Annual Meeting, 97% of stockholders present at the meeting voted in favor of 
its advisory vote on executive compensation.

COMPENSATION PROGRAM OBJECTIVES, DESIGN AND PRACTICES

Our Compensation Philosophy And Principles

Rewarding continuous improvement in financial and operating results and the creation of stockholder value are key attributes 
of our compensation philosophy, which serves as the framework for the Company’s executive compensation program.  The 
Compensation Committee of the Board of Directors of the Company (referred to as the “Compensation Committee”), acts on 
behalf of  the  Board  of  Directors  and,  by  extension,  on  behalf  of  our  stockholders,  to  establish,  implement  and  continually 
monitor adherence to our compensation philosophy. Accordingly, the Compensation Committee has developed a set of core 
objectives  and  principles  that  it  has  used  to  develop  the  executive  compensation  program.  The  specific  objectives  of  our 
executive compensation program are to:

•

•

•

Attract, retain, and motivate executive talent;

Align compensation with Company and individual performance; and

Foster an ownership mentality that aligns our executives’ interests with stockholder interests.

Consistent with the foregoing, the Compensation Committee believes that the most effective executive compensation program is 
one that is designed to reward the achievement of specific strategic and operating goals of the Company on both an annual and a
long-term basis, and which aligns our executives’ interests with those of our stockholders.  The Compensation Committee evaluates 
both performance and compensation to ensure that the Company maintains its ability to attract and retain superior employees in
key positions.  Based on that evaluation, the Compensation Committee designs the compensation provided to key employees to 
remain competitive relative to the compensation paid to similarly situated executives at competitor companies. The Compensation 
Committee believes executive compensation packages provided by the Company to its executives, including the NEOs, should 
include  base  salary,  annual  cash  incentive  opportunities,  select  perquisites  and  stock-based  compensation,  including  equity 
incentive opportunities which reward performance as measured against pre-established goals.

The following principles support the objectives and design of the compensation program:

•

•

•

The compensation program is designed to be fair and competitive, from an internal and external perspective, taking 
into account the role, unique qualifications and distinct responsibilities of each executive;

A substantial portion of an executive’s compensation is designed to be at risk and linked to the achievement of both 
corporate and individual financial, management or other performance goals and changes in stockholder value;

A retirement provision which is designed to provide financial stability following employment but will not be the focal 
point of why executives choose to work for the Company;

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•

•

The use of select, limited perquisites and other executive benefits are designed to serve a business purpose; and

All compensation program elements taken as a whole are designed to help focus executives to achieve the Company’s 
financial and strategic goals while supporting our culture and core values.

To  underscore  the  importance  of  “pay-for-performance”  in  our  compensation  philosophy  and  our  Company’s  culture,  the 
Compensation Committee has developed incentive arrangements based on performance standards established at levels which 
the  Compensation  Committee  believes,  at  target  achievement,  will  incentivize  our  executives  to  meet  or  exceed  industry 
performance.   The  incentive  component  of  the  Company’s  executive  compensation  program,  also  referred  to  as  the Tier  I
Incentive Compensation Plan, rewards executives for achieving specific corporate, business unit and individual goals as well 
as strategic and operational measures depending on the executive involved.

Our long-term incentive program includes grants of performance-based stock units (“PSUs”) which are earned based on the 
achievement of TSR performance relative to the top 30 companies in the Philadelphia Stock Exchange Semiconductor Index 
over a two and three-year performance period.   Our long-term incentive program also includes service-based RSUs, which 
vest in equal annual increments over time. All grants are currently made under either of two (2) stockholder approved Company 
stock plans, the Nanometrics 2005 Stock Plan or the Rudolph 2018 Stock Plan, and shares earned and vested are subject to the 
Company’s stock ownership and retention guidelines. If the 2020 Stock Plan is approved by stockholders, equity awards will 
no longer be granted under either of the Nanometrics 2005 Stock Plan or the Rudolph 2018 Stock Plan but will instead be 
awarded under the new 2020 Stock Plan.

The Company strives to promote an ownership mentality among its key leadership and the Board of Directors, in part through 
the guidelines described below under the heading “Stock Ownership/Retention Guidelines.” We believe this “skin in the game” 
approach mitigates the incentive to take on unnecessary risks.  To that end, a stock ownership requirement for independent 
directors has been established such that the minimum number of shares to be held by each director is equivalent in value of 
three (3) times their respective total annual retainer compensation.  For the CEO, the stock ownership requirement reflects a 
minimum share ownership equivalent in value to three (3) times the CEO’s year-end base salary.  As for the NEOs, the stock 
ownership requirement reflects a minimum share ownership equal to the NEO’s current year-end base salary. In further support 
of this approach, our Board of Directors established an anti-pledging and anti-hedging policy to ensure that personal interests 
relating to the stock holdings of officers and directors do not conflict with their duties to the Company.

NEO Compensation Elements

Our executive compensation program is generally comprised of four parts, each intended to address different objectives: base 
salary, annual cash performance incentives, long-term equity incentives, which generally are in the form of both performance-
based vesting and service-based vesting RSU grants, and limited perquisites.

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The table below highlights the foregoing key elements of our executive compensation structure for 2020.

Element

Form

Description

NEO Compensation Elements

Base Salary

Fixed Cash Compensation

Competitive cash compensation that takes into consideration the 
scope and complexity of the role, individual qualifications, 
experience, and internal value to the Company.

Annual Cash
Incentive Plan

Annual Performance-Based 
Cash Compensation

Annual cash incentive contingent on meeting performance criteria 
related to corporate, business unit/department, and individual 
performance objectives.

Long-Term Equity 
Incentive Program

Performance- and Time-Based 
Restricted Stock
Units

A set percentage of PSUs that are earned based on TSR performance 
relative to a designated peer group, with remaining percentage of the 
RSUs vesting incrementally over a fixed period.

Executive
Perquisites

Income tax preparation
Airline club membership

Limited perquisites, consistent with market practice, that promote 
efficient use of executives’ time and attract and retain executive 
talent.

The Compensation Committee aligns the Company’s Tier I Incentive Compensation Plan, which encompasses our annual cash 
incentive  plan  and  long-term  incentive  equity  program,  with  the  Company’s  performance  relative  to  pre-established 
performance goals  based on  the  Company’s  stated  financial  objectives,  historical performance,  and  anticipated  market  and 
economic conditions for the performance period.

In  adopting  this  design,  the  Compensation  Committee  considered  a  number  of  parameters,  including  the  advice  of  its 
independent compensation consultant, comparable practices within the industry and the desire to achieve the goals underlying 
the compensation program. The Compensation Committee believes that as a result of this program the Company has been able 
to  attract,  retain  and  motivate  executives  and reward  the  achievement of  strategic,  operational  and  financial  goals,  thereby 
enhancing stockholder value.

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Our Compensation Practices

The  Compensation  Committee  has  adopted  the  following  practices  and  policies  with  respect  to  the  Company’s  executive 
compensation program:

What We Do

Committee 
Independence

The Compensation Committee consists of independent directors and reserves time at each 
meeting to meet in executive session without management present.

Independent 
Compensation 
Consultant

The Compensation Committee has engaged its own independent compensation consultant and 
annually assesses the consultant’s performance, independence, and whether any potential 
conflicts of interest exist.

Independent Legal 
Advisor

The Compensation Committee may engage its own independent legal advisor specializing in 
corporate compensation issues, as necessary.

CEO Goal Setting 
and Performance
Evaluation

Peer Group

The Compensation Committee, with the input of the full Board, engages in formal goal setting 
and performance evaluation processes with the CEO.

The Compensation Committee has established formal criteria for the selection of peer groups
used as a competitive reference point with respect to executive and director compensation, 
program design and practices, and financial and stock performance.

Share Ownership 
Guidelines

The Company maintains rigorous share ownership guidelines, which apply to executives and 
directors, and serve as a risk-mitigating feature within our compensation structure.

Double Trigger 
Change-in-Control

Employment agreements have been entered into with senior executives, including the CEO, that 
contain change-in-control severance protection.  Executives are entitled to severance in the event 
of both a change-in-control of the Company and a qualifying termination of employment 
(“double trigger”).

Clawback Policy

The Company has adopted a policy that provides for the recovery or adjustment of amounts 
previously awarded or paid to a NEO in the event that financial results or other performance 
measures on which the award or payment were determined are restated or adjusted.

What We Don’t Do

Anti-Hedging and 
Pledging Policies

Tax Gross-Ups on 
Perquisites or 
Severance

The Company’s insider trading policy prohibits our directors, officers and employees from 
entering into hedging transactions related to our Common Stock.  Additionally, under the 
Company’s anti-pledging policy, non-employee directors and executive officers are prohibited 
from making any new pledges of Company securities as collateral for a loan, or otherwise 
making a new transfer of Company securities to a margin account.

The Company does not provide any tax gross-up payments to cover personal income taxes on 
perquisites or severance benefits related to a change-in-control.

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Compensation Consultant

From time to time, the Compensation Committees of the Company and Nanometrics have engaged the services of outside 
compensation  consultants  to  provide  advice  on  compensation  plans  and  issues  related  to  the  executive  and  non-executive 
employees.  During  2019,  the  Nanometrics  Compensation  Committee  engaged  Compensia,  an  independent  executive 
compensation consulting firm, as its compensation consultant. Compensia had advised the committee for several years and was 
very familiar with the industry and geographies in which Nanometrics operated. The Nanometrics Compensation Committee 
requested that Compensia:

•

•

•

evaluate  the  efficacy  of  Nanometrics’  existing  compensation  strategy  and  practices  in  supporting  and  reinforcing 
Nanometrics’ long-term strategic goals;

assist in refining Nanometrics’ compensation strategy and in developing and implementing an executive compensation 
program to execute that strategy; and

provide market information to assist Compensation Committee in establishing 2019 executive compensation.

For 2020, the Compensation Committee also engaged Compensia to provide advice on the Company’s executive compensation 
arrangements.  Compensia  does  not  provide  any  services  other  than  those  related  to  compensation  consulting  and  does  not 
provide any services to Company management or previously to Nanometrics management.  The Compensation Committees of 
both  the  Company  and  Nanometrics  determined  that  Compensia  is  independent  within  the  meaning  of  the  respective 
Compensation Committee Charters, the NASDAQ listing standards for Nanometrics and the NYSE listing standards for the 
Company, and the work of Compensia for the respective Compensation Committee does not raise any conflicts of interest.

Independent Legal Counsel

The Compensation Committee may engage, as necessary, the services of independent outside legal counsel for compensation 
issues.    No  independent  counsel  was  engaged  for  compensation  issues  in  2019 by  the  Nanometrics  or  the  Company 
Compensation Committee or in 2020 by the Company Compensation Committee.

Role Of Executives In Establishing Compensation

The Compensation Committee of the Company, like the Compensation Committee of Nanometrics prior to the 2019 Merger, 
is charged with making all determinations regarding executive compensation subject to approval by the independent members 
of the Board. On an annual basis, the Compensation Committee evaluates the CEO’s performance in light of the goals and 
objectives established for measuring his or her performance at the beginning of the previous fiscal year. The results of this 
evaluation  guide  the  Compensation  Committee  in  setting  the  CEO’s  salary,  cash  incentive  award  opportunity  and  equity 
compensation. The CEO does not participate in the Compensation Committee’s or Board’s deliberations regarding his or her 
compensation.

With  regard  to  compensation  for  executives  other  than  the  CEO,  the  Compensation  Committee  and  the  Compensation 
Committee of Nanometrics prior to the 2019 Merger have sought input from the CEO with the support of the human resources 
department.  Each year, the CEO is responsible for establishing proposed personal and corporate objectives for the Company’s 
(or  Nanometrics’, prior  to  the  2019  Merger)  other  executives,  including  the  other  NEOs.  These  objectives,  subject  to  the 
approval of the Compensation Committee, are reviewed and agreed upon by the CEO with the executive. In addition, as part 
of the annual performance review of the Company’s executives, the CEO assesses the performance of his or her direct reports 
and recommends any merit increase to be proposed for each individual. These recommendations are compiled by the CEO into 
executive compensation plans which include any proposed merit increases, each executive’s personal and corporate objectives, 
proposed annual incentive award opportunities (expressed as a percentage of their base salary) and equity grant proposals, and 
are submitted to the Compensation Committee for review and consideration for approval. At the Compensation Committee 
meeting  during  which  the  executive  compensation  plans  are  reviewed,  the  CEO  attends  the  initial  session  to  present  the 
proposed plans and to answer questions. Thereafter, the Compensation Committee has met without the CEO present to review, 
discuss and recommend for approval all executive compensation plans, subject to any modifications made by the Compensation 
Committee. The Compensation Committee then recommends such compensation packages to the independent members of the 
Board of Directors for approval.

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Compensation Committee Activity

During  2019,  the  Compensation  Committee  of  the  Company  met  one (1)  time,  while  the  Compensation  Committees  of 
Nanometrics and Rudolph met three (3) and five (5) times respectively.

In early 2019, Nanometrics’ CEO met with the Nanometrics Compensation Committee to present the proposed compensation 
plans for each of the Nanometrics’ executives as well as the proposed incentive award opportunities under the Nanometrics 
2019 Executive Performance Bonus Program (“Nanometrics 2019 Bonus Program”) for certain non-executive employees. In
2019, the Nanometrics Compensation Committee met regularly in executive session, without the presence of the CEO or any 
other Company executives, to review the relevant compensation matters.

In 2019, the Nanometrics Compensation Committee took a number of actions. These included reviewing and recommending 
for approval by the independent members of the Board:

•

•

•

•

the annual compensation of the Nanometrics CEO for 2019;

the annual compensation for each of Nanometrics’ other executive officers for 2019;

the incentive compensation plan and Employee Profit Sharing Plan 2019; and

the service-based and performance-based equity incentive awards and related performance targets for Nanometrics’
executives for 2019.

With  regard  to  the  Company,  in  reviewing  and  setting  the  annual  compensation  for  each  executive,  the  Compensation 
Committee considered the amounts payable under each of the elements of their respective compensation plans, including base 
salary, annual cash incentive awards, equity grants and perquisites. The Compensation Committee took into consideration both 
the  Company’s  internal  pay  equity  as  well  as  the  competitive  environment  within  which  the  Company  operates.  In  each 
instance, the Compensation Committee determined that the base salary and annual and long-term incentive award opportunities 
for  the  individual  executives were  at  an  acceptable  level  for 2019 and  that  the  perquisites  were  appropriate  for  the related 
positions.

In late 2019, the Company’s Compensation Committee reviewed our annual and long-term incentive programs for 2020.  At 
this time, measures were again selected that were determined to be consistent with advancing the interests of the Company’s 
stockholders and aligning and supporting the Company’s business strategy. 

Based on the foregoing, in early 2020, the Company’s Compensation Committee met and took a number of actions. These 
included the review and recommendation for approval by the independent members of the Board of:

•

•

•

•

the annual compensation of the Company’s CEO for 2020;

the annual compensation for each of our other executive officers for 2020;

the Tier I Incentive Compensation Plan and Employee Profit Sharing Plan for 2020; and

the service-based and performance-based equity incentive awards and related performance targets for the Company’s 
executives for 2020.

Peer Companies

In order to meet its objective of maintaining competitive executive compensation packages, the Nanometrics and Company 
Compensation Committees have obtained third-party compensation information from time to time and have reviewed executive 
compensation  programs  of  comparable,  publicly  held,  high  technology  companies.    These  independent  compensation 
consultants have assisted the Nanometrics and Company Compensation Committees at various times in the development and 
evaluation of their compensation programs. To the extent that independent compensation consultants are not engaged to consult 
with a Committee with respect to compensation for a position or time period, the Compensation Committee obtains market 
compensation  information  using  internal  resources  at  the  Company. The  Compensation  Committee  reviews  data  related  to 
compensation levels and programs of other similar companies prior to making its decisions, but only considers such information
in a general manner in order to obtain a better understanding of the current compensation practices within our industry. For 
2020,  the  Compensation  Committee  engaged  Compensia  to  provide  peer  group  data  and  perform  an  assessment  of 
compensation  levels  provided  to  executives.    Compensia  had  previously  been  engaged  by  the  Nanometrics  Compensation 
Committee prior to the 2019 Merger.

In Nanometrics’ Compensation Committee’s review of its executive compensation for the 2019 fiscal year, the Nanometrics 
Compensation  Committee  considered  publicly  available  market  data  for  companies  that  typically  include  similarly-sized 

55

semiconductor and semiconductor capital equipment or similar firms for each Nanometrics executive officer in a like or similar
role.  In  November  2018,  for compensation  decisions  for  Nanometrics’  2019  fiscal  year,  Compensia  recommended  and  the 
Nanometrics  Compensation  Committee  approved  the  peer  group  previously  established  for  Nanometrics  which  took  into 
consideration the following factors:

•

primary  focus  on  semiconductor  and  semiconductor  equipment  companies,  and  secondary  focus  on  hardware 
companies; revenue between approximately half and two times Nanometrics four quarter revenue at the time; and

• market capitalization.

In  evaluating  potential  peers,  the  Nanometrics  Compensation  Committee  also  reviewed  secondary  factors  such  as  revenue 
growth, whether potential peers include Nanometrics as a peer, and whether potential peers are included in the compensation 
peer  groups  for  Nanometrics  selected  by  leading  proxy  advisory  firms.  Nanometrics  peer  group  companies  considered  for 
compensation for the 2019 fiscal year are listed below:

Companies Included In Nanometrics’ Compensation Peer Group For 2019

Advanced Energy Industries Inc.

Cabot Microelectronics Corporation

Photronics, Inc.

Axcelis Technologies Inc.

Cohu, Inc.

Rudolph Technologies, Inc.

AXT Inc.

Electro Scientific Industries, Inc.

Veeco Instruments, Inc.

Brooks Automation, Inc.

FormFactor, Inc.

With regard to the Company’s 2020 compensation peer group of companies, data from company proxy disclosures and industry 
compensation surveys was used in conducting this assessment.  The compensation peer group of companies that was utilized 
to assess the 2020 compensation was based generally on the following criteria:

•

•

Semi equipment and other electronics and hardware tech companies;

Revenue between approximately 0.5x and 2x the Company’s revenue run-rate; and

• Market cap between approximately 0.5x and 2x the Company’s revenue run-rate.

The Company’s compensation peer group for the 2020 review (which was used to make decisions regarding the year’s 
compensation) consisted of the following companies.

Companies Included In The Company’s Compensation Peer Group For 2020

Advanced Energy Industries Inc.

Inphi Corporation

Photronics, Inc.

Axcelis Technologies Inc.

Knowles Electronics, LLC.

Power Integrations, Inc.

Brooks Automation, Inc.

Lattice Semiconductor Corporation

Veeco Instruments, Inc.

Cabot Microelectronics Corporation MACOM Technology Solutions Holdings, Inc.

Vishay Precision Group, Inc.

Cohu, Inc.

FormFactor, Inc.

MaxLinear, Inc.

Novanta Inc.

Xperi Corporation

The pay practices of the foregoing Company peer group were analyzed for base salary and short-term and long-term incentives. 
Periodically, peer groups are used to evaluate other programs such as executive retirement, perquisites and severance policies. 
Our peer group data is supplemented by broader technology industry data from compensation surveys to further facilitate the 
evaluation of compensation levels and design. Compensation levels are generally developed at the low (25th percentile), middle 
(50th percentile) and high (75th percentile) end of the market for each pay element (base salary and short-term and long-term 
incentives) and for total compensation.

While the Compensation Committee considers market data for each pay element and in total, the Compensation Committee 
does not specifically target any particular market compensation level. Instead, the Compensation Committee uses its discretion 
in setting the compensation levels as appropriate.

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ELEMENTS OF NANOMETRICS’ 2019 AND THE COMPANY’S 2020 COMPENSATION 
PLANS

Compensation Program Design

Nanometrics’ executive compensation packages for the 2019 fiscal year included three primary components - base salaries, 
cash  bonus  award  opportunities  and  long-term  equity  incentive  awards.  Other  elements  of  compensation  included  limited 
perquisites, other benefits (including retirement (401(k) plan, including matching contributions), health, and welfare benefits), 
and  severance  arrangements.  The  Nanometrics  Compensation  Committee  considered  the  three  primary  components 
individually and in the aggregate to assess their competitiveness and effectiveness in retaining Nanometrics’ executive officers 
and motivating them to create short-term and long-term enhanced stockholder value.  Nanometrics’ Compensation Committee 
chose these components because it believed that each supports achievement of one or more of Nanometrics’ compensation 
objectives, and that together they would be effective in achieving such objectives. The use of each compensation component 
was based on a determination by the Nanometrics Compensation Committee of the importance of each compensation objective 
in  supporting  Nanometrics’  business  and  talent  strategies. These  components  are  commonly  used  for  executive  officers  at 
companies within the Nanometrics peer group and, therefore, the Nanometrics Compensation Committee found these to be 
appropriate  in  its  talent  retention  strategy.  The  Nanometrics  Compensation  Committee’s  determination  varied  for  each 
executive officer depending on a number of factors, including but not limited to, scope of his or her responsibilities, leadership 
skills and values, and individual performance. The Nanometrics Compensation Committee did not apply formulas or assign 
specific  mathematical  weights  to  any  of  these  factors, but rather  exercised  its  business  judgment  and  discretion  to  make a 
subjective determination after considering all of these measures collectively.

For 2020, the compensation program provided to the Company’s executive officers is generally comprised of four parts, each 
intended  to  address  different  objectives:  base  salary,  annual  cash  performance  incentive  awards,  long-term  incentives  that 
generally  are  in  the  form  of  both  performance-based  stock  units  and  service-vesting  RSU  grants,  and  limited  perquisites. 
Executives  are  also  entitled  to  participate  in benefit  programs  available  to  all  Company  employees,  such  as  our ESPP  and 
401(k) Plan. This design was adopted for executives by the Compensation Committee taking into consideration a number of 
parameters  including  the  independent  compensation  consultant’s  advice,  comparable  practices  within  the  industry  and  the 
desire to achieve the goals underlying the compensation program. The Compensation Committee believes that as a result of 
this program the Company can attract, retain and motivate employees and reward the achievement of strategic operational and 
financial goals, thereby enhancing stockholder value.

Annually, the Compensation Committee will review the elements of the compensation package as well as the overall package 
afforded to the executives. At such time, the Compensation Committee, in its discretion, can recommend adjustments to the 
elements of the program to the independent members of the Board of Directors for review and approval. This review would 
typically  be  performed  coincident  with  the  evaluation  of  the  individual  executive’s  performance  in  relation  to  their Tier  I 
Incentive Compensation Plan goals, salary adjustment and equity grants, if any, as discussed below.

The Company’s Compensation  Committee and Board believe that each of the elements as well as the entire compensation 
package  for  Company  executives  is  appropriate  for  the  Company  given  its  performance,  industry,  current  challenges  and 
environment.

Based on the objectives discussed in the foregoing section, the Compensation Committee seeks to structure our equity and cash 
incentive compensation program to motivate executives to achieve the business goals set by the Company and reward the executives 
for achieving such goals, which we believe aligns the financial incentives of our executives with the interests of our stockholders. The 
Compensation Committee primarily uses salary, perquisites and other executive benefits as a means for providing base compensation 
to employees for their knowledge and experience and for fulfilling their basic job responsibilities.

In establishing these components of the executive compensation package, it is the Compensation Committee’s intention to set 
total executive compensation at a sufficient level to attract and retain a strong motivated leadership team, while remaining 
reasonable and in line with stockholder perception of overall fairness of executive compensation.

Base salaries serve as the foundation of the compensation programs detailed herein. The Compensation Committee derives 
other  executive  compensation  elements,  including  annual  short-term  cash  incentives  and  long-term  equity  incentives by 
weighing them against base salary.  Base salary levels for executive officers of the Company are generally established at or 
near the start of each year. The Company’s annual executive cash incentive bonuses are administered through its Tier I Incentive 
Compensation  Plan.  The  plan  provides  guidelines  for  the  calculation  of  annual  non-equity  incentive-based  compensation, 
subject  to  the  Compensation  Committee’s  oversight  and  the  Company’s  and  executive’s  achievement  of  corporate  and 
individual goals. Generally, at its first meeting each year, the Compensation Committee determines final bonuses for executive 
officers earned in the preceding year based on each individual’s performance and the performance of the Company through its 

57

audited financial statements, and also reviews the incentive program to be established for the current year and approves the 
group of executives eligible to participate in the plan for that year.

Each of the Company’s executives, including our NEOs, is eligible to receive equity compensation, which has recently been in 
the form of PSU and RSU grants under the Company’s stockholder approved Nanometrics Incorporated 2005 Equity Incentive 
Plan and Rudolph 2018 Stock Plan. All full-time and part-time employees are eligible for equity grants. The Compensation 
Committee  believes  that  through  the  Company’s  broad-based  equity  compensation  plan,  the  economic  interests  of  all 
employees,  including  the  executives,  are  more  closely  aligned  with  those  of  our  stockholders.  It  is  also  believed  that  this 
approach will allow the Company to use equity as an incentive in a balanced manner that supports the recruitment and retention
of top talent.

The Compensation  Committee  generally  recommends  for approval  by  the  independent members  of  the  Board  the  grant  of 
equity awards at the first regularly scheduled meeting of the Board or upon completion of the Compensation  Committee’s 
review and approval process. The Compensation Committee and the Board do not generally grant equity awards at other times 
during the year, other than in the case of a new hire, promotion or other exceptional circumstances.

Impact Of Performance On Compensation

The performance of the Company and of the executive has a direct impact on the compensation received by such executive 
from the Company. On an annual basis, the CEO reviews the performance and compensation for the Company’s executives to 
determine any potential salary adjustment for each individual. This assessment takes into consideration a number of factors, 
including the Company’s profitability; the performance of applicable business units; the executive’s individual performance 
and measurable contribution to the Company’s success; and pay levels of similar positions with comparable companies in the 
industry and within similar technology industries.

In  addition,  both  Company  and  individual  performance  are  assessed  by  the  CEO  when  proposing  to  the  Compensation
Committee any annual cash incentive payout to the NEOs (other than the CEO) under the annual cash incentive component of 
their Tier  I Incentive  Compensation  Plan. The  plan  includes  various  incentive  level opportunities  based on  the  executive’s 
accountability and impact on Company operations, with target award opportunities that are established as a percentage of base 
salary. Typically, these targets range from 30% to 100% of base salary for the executives in the plan. For our NEOs, 2019 and 
2020 target annual cash bonus opportunities were set as follows:

Target Annual Cash Incentive Percentage

Name
Michael P. Plisinski
Steven R. Roth
Rollin Kocher
Kevin Heidrich
Rodney Smedt
Pierre-Yves Lesaicherre, Ph.D.
Greg Swyt
James Barnhart
Janet Taylor

2020
100.0%
65.0%
60.0%
50.0%
50.0%
N/A
40.0%
N/A
N/A

2019
100.0%
60.0%
60.0%
50.0%
50.0%
100.0%
40.0%
60.0%
55.0%

Under the annual cash incentive component of our Tier I Incentive Compensation Plan, payout is based upon achievement of 
corporate and personal objectives with no payout unless the Company meets the threshold level of at least one of the Board 
approved  corporate  financial  targets  established  as  part  of  the  plan.  Personal  objectives  are  awarded  only  upon  clear 
achievement of the associated goal. Failure to meet the personal objectives thereby has a negative impact on the ultimate bonus 
payout.

In  addition  to  a  review  of  the  prior  year’s  objectives,  the  CEO  and  each  executive  also  confer  to  propose  new  individual 
performance targets for the executives (including the NEOs, other than the CEO) for the current year, which are combined with
the corporate targets into an annual cash incentive opportunity proposal. The personal targets that are established are designed 
to result in additional incremental value to the Company if they are achieved. These personal performance targets in 2019
included  goals  related  to  additional  corporate  and/or  business  unit  financial  measures,  operational  measures  and  activities, 
transactional  activities,  and  marketing  initiatives,  depending  on  the  executive  involved.  The  target  level  of  the  corporate 
component to the bonus goals was set based on the Company’s financial budget established by the Board at the beginning of 
the year. The determination of these goals is made annually to meet the changing nature of the Company’s business.

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Upon  completion  of  the  prior  year’s  results  and  prior  to  implementation  of  the  current  year’s  proposed  Tier  I Incentive 
Compensation Plan, the results for each participating executive employee are submitted to, and reviewed by, the Compensation 
Committee, which considers the CEO’s recommendations for executives other than the CEO and determines the final bonus 
earned by each executive based on Company and individual performance. The Compensation Committee then establishes the 
Company  and  individual  metrics  applicable  to  the  current  year’s  Tier  I Incentive  Compensation  Plan.  Thereafter,  the 
Compensation  Committee’s recommendations  are  presented  to  the  independent  members  of  the  Board  for  approval  of  the 
achieved incentive payment, if any, and of the new plan for the current year. If, during the year, there are changes to the Tier I
Incentive  Compensation  Plan  that  are  proposed,  such  changes  are  presented  to  the  Compensation  Committee  for  its 
consideration. The Compensation Committee may exercise discretion in relation to its recommendation to the independent 
members of the Board regarding an individual’s award under the Tier I Incentive Compensation Plan based upon its review.

An  executive’s  role,  responsibilities,  individual  performance  and  contribution  to  the  Company  are  factors  considered  in 
determining  the  size  of  any  discretionary  equity  grant  that  may  be  recommended  by  the  Compensation  Committee  to  the 
independent members of the Board of Directors for approval as long-term incentive to the individual.

Based upon the foregoing, the compensation that an executive may realize in the course of a year can be impacted by the 
positive  or  negative  performance  of  such  individual  as  well  as  Company  performance.  We  intend  for  an  individual’s 
compensation under the Tier I Incentive Compensation Plan to be proportionate to the Company’s and his or her performance 
against  established  goals.  Similarly,  equity  awards  that  are  performance-based  are  intended  to  be  proportionate  to  the 
Company’s  performance  under  goals  established  for  the  Company.  This  review  and  evaluation  are  more  subjective  when 
applied to salary adjustments. In this case, an executive’s performance is evaluated by taking into consideration the executive’s 
contribution to the Company, the significance of the individual’s achievements in relation to the overall corporate goals and 
mission, and the executive’s effectiveness in his or her role within the Company and then weighed against the performance of 
other executives. Industry norms and reference to comparative company data are considered to the extent appropriate. Thus, 
there is no precise, objective formula that is applied in determining salary adjustments.

Compensation Plan Design And Decisions For 2019 And 2020

For  2019, both  the  Nanometrics and  the  Rudolph Compensation  Committees conducted  reviews of  their  respective 
compensation programs and each determined that their 2019 NEO compensation plan would retain the same basic elements as 
the prior year’s plan as these aligned its programs with their current business strategy and included the pay for performance 
aspect  of  their  respective executive  compensation  programs.    Taking  into  account  their respective 2018  performance  and 
outlook for 2019, each NEO’s performance and responsibilities, and current market compensation rates for each NEO position, 
among other criteria, the Compensation Committee of both Nanometrics and Rudolph recommended, and the associated Boards
approved, the  updated  programs and  compensation  plan  structures for  the  listed  NEOs  employed  by  Nanometrics  and  by 
Rudolph in 2019 as detailed below.

For 2020, the Company’s Compensation Committee determined that the 2020 NEO compensation plan would retain the basic 
elements shared by both Rudolph and Nanometrics in their 2019 plans.  Taking into account the respective company’s 2019
performance  and  the  Company’s  outlook  for  2020,  each  NEO’s  performance  and  responsibilities,  and  current  market 
compensation rates for each NEO position, among other criteria, the Compensation Committee recommended, and the Board 
approved the program and compensation plan structure for our NEOs also as detailed below.

Base Salary

The Company provides executives and other employees with base salary to compensate them for services rendered during the 
fiscal year. Base salaries for executive officers are established considering a number of factors, including the executive’s:

Individual performance;
Unique qualifications;
Role and responsibilities;

•
•
•
• Measurable contribution to the Company’s profitability and success; and
•

The base salary levels of similar positions with comparable companies in the industry. 

The  Compensation  Committee  supports  the  compensation  philosophy  of  moderation  for  elements  such  as  base  salary  and 
perquisites  and  other  executive  benefits. As  noted  above,  under  “Impact  of  Performance  on  Compensation,”  base  salary 
decisions  are  made  as  part  of  the  Company’s  formal  annual  review  process  and  are  influenced  by  the  performance  of  the 
Company and the individual.

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Salary levels are considered annually as part of the performance review process as well as upon a promotion or other change 
in job responsibility. The Compensation Committee reviews and determines salaries after reviewing salary data supplied by the
compensation consultant, including data regarding the peer comparison group, as well as consideration of the compensation 
for the executive officers on a company-wide basis, based on their relative duties and responsibilities and the recommendations 
of the CEO (other than with respect to his or her compensation) as it relates to the executive officers who report to the CEO. 
The Compensation Committee also considers comparisons of peer group compensation to peer group performance as provided 
by the independent compensation consultant. The Compensation Committees of Nanometrics, Rudolph and the Company did 
not apply formulas or assign specific mathematical weights to any of these factors, but rather exercised their business judgment 
and  discretion  to  make  a  subjective  determination  regarding  each  executive  officer's  base  salary  for  2019  and  2020,  as 
applicable, after considering all of these measures collectively.

The  CEO’s  recommendations  for  salary  adjustments  (other  than  his  or  her  own)  are  reviewed  and  modified  as  deemed 
appropriate by the Compensation Committee and presented to the independent members of the Board for approval.

Base Salary For 2019

For Nanometrics in 2019, its Compensation Committee approved a 3.0% increase to the Nanometrics CEO’s base salary and 
increases ranging from 2.5% to 10.7% for the base salaries of each of the listed NEOs employed by Nanometrics in 2019.

For Rudolph in 2019, its Compensation Committee approved a 3.0% increase to the Rudolph CEO’s base salary and increases 
ranging from 2.0% to 3.0% for the base salaries of each of the other the listed NEOs employed by Rudolph in 2019.  

Base Salary For 2020

For 2020, the Company’s Compensation Committee approved a 10% increase to the CEO’s base salary and increases of 3% to 
10% to the base salaries of each of our other NEOs.

Annual Cash Incentive Compensation

Nanometrics’ Compensation Committee viewed cash bonuses as part of its performance-based compensation program designed 
to align the recipient’s interests with  its annual goals and objectives and its  stockholders’ interests. The Nanometrics  2019
Bonus Program was intended to motivate senior executive officers to achieve short-term and long-term corporate objectives 
relating  to  the  performance  of  Nanometrics  or  one  of  its  business  units  as  established  by  the  Nanometrics  Compensation 
Committee and to reward them when those objectives were achieved, thereby tying performance to stockholder value. Bonuses 
were triggered upon Nanometrics’ achievement of target metrics determined by the Nanometrics Compensation Committee.

For the Nanometrics NEO participants in the Nanometrics 2019 Bonus Program, 100% of the target bonus opportunity was 
based  upon  overall  company  financial  performance  objectives  recommended  by  Nanometrics’  CEO  and  approved  by 
Nanometrics Compensation Committee.  

With regard to the Company, an executive’s annual cash incentive award under the 2020 Tier I Incentive Compensation Plan
(the “2020 Plan”) generally depends on the financial performance of the Company relative to profit, revenue and other financial 
targets and the executive’s individual performance. The incentive opportunity is generally set at a higher percentage for more 
senior officers, with the result that such officers have a higher percentage of their potential total cash compensation at risk. 
Executive  employees reporting  to  the CEO,  including  all  of  our  NEOs,  participate  in  the  2020 Plan,  which  is  designed  to 
generate  additional  incentive for  maximizing  the  employee’s  performance  in  realizing  the  corporate  strategic  and  financial 
goals and mission. The Compensation Committee may, but is not required to, establish a Tier I Incentive Compensation Plan 
for any given year.

Upon  completion  of  the  year,  the  individual’s  and  the  Company’s  results  with  respect  to  the  performance  targets  are  then 
assessed  and presented  to  the  Compensation Committee. The  Compensation  Committee reviews  the  proposed  payouts  and 
suggests changes to the extent it deems such action necessary. Tier I Incentive Compensation Plan awards are paid out following 
completion of the annual audit by the Company’s independent registered public accounting firm. This generally occurs in the 
first quarter of each year.

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Annual Cash Incentive Plan For 2019

For Nanometrics, the maximum award that an executive officer could receive under the Nanometrics 2019 Bonus Program was 
two times the target bonus opportunity. Achievement of the bonus opportunity tied to the overall company performance for the 
Nanometrics  2019  Bonus  Program  was  determined  based  on  annual  revenues  and  Non-GAAP  operating  margin.  The 
Nanometrics 2019 Bonus Program provided that the company performance would be measured by comparing actual company 
annual revenues against target revenues of $345.0 million and actual Non-GAAP operating margin against target Non-GAAP 
operating margin of 22.1%.

Nanometrics’ company performance factor would be zero when Non-GAAP operating margin was less than or equal to 0%. 
For the Nanometrics 2019 Bonus Program, Non-GAAP operating margin was defined as operating income/(loss) as reported 
in accordance with generally accepted accounting principles in the United States, plus amortization of intangible assets, and 
any unusual charges, such as restructurings, litigation or acquisition costs, divided by annual revenues.

As a result of the 2019 Merger and the fact that the financial performance measures could not be assessed for the full fiscal 
year, as of the Merger Date, each NEO listed from Nanometrics was deemed by the Nanometrics Compensation Committee to 
have earned their respective goals and targets for fiscal 2019 and was paid their cash-based awards for 2019 pursuant to the 
Nanometrics 2019 Bonus Program established for such NEO.

With regard to the Rudolph NEOs in 2019, Rudolph’s annual cash incentive component of its 2019 Key Executive Incentive 
Compensation Plan (“Rudolph 2019 Plan”) included corporate goals, business unit or department goals (if applicable) and 
personal  goals.    The  Rudolph  2019 Plan  was  established  such  that  each  NEO’s  potential  cash  award  was  subject  to  the 
achievement  of  2019 corporate  financial  objectives  relating  to  corporate  revenue  and  non-GAAP  operating  income.  The 
Rudolph 2019 Plan included a provision that in the event of a change of control of the company, the Rudolph 2019 Plan would 
be deemed to have been achieved at the applicable goal and target levels set forth therein for all of 2019. A “change in control” 
was defined in accordance with the Rudolph 2018 Stock Plan. Therefore, as a result of the 2019 Merger, as of the change in 
control closing, each NEO listed from Rudolph was deemed to have earned their respective goals and targets for 2019 and was
paid their cash-based awards for 2019 Plan Year pursuant to the Rudolph 2019 Plan established for such NEO.

Actual amounts paid to the NEOs under their respective annual cash incentive plans are reported below in the Non-Equity 
Incentive Plan Compensation column of the Summary Compensation Table.

Annual Cash Incentive Plan For 2020

For 2020, the Compensation Committee adopted an annual cash incentive plan as part of the NEO compensation program that 
is structured such that each NEO’s potential cash award is subject to the achievement of 2020 corporate financial objectives
consistent with the Board approved annual operating plan for 2020.  These corporate financial objectives are established at 
levels in excess of the overall industry projections in order that Rudolph drive to outperform the industry.

The annual cash incentive portion of the 2020 Plan has up to three (3) components:  Corporate Goals, Business Unit Goals (if 
applicable) and personal performance goals.

•

•

•

The Corporate Goals of the 2020 Plan relate to corporate revenue and corporate non-GAAP operating income. The 
performance ranges for each metric include a payout level for threshold performance at 50% of target and an established 
target level to achieve the maximum payout by exceeding the corporate performance objectives for each of the corporate 
financial  metrics.  The  cash  bonus  payout  is  contingent  on  meeting  at  least  one  of  the  2020  corporate  revenue  or 
corporate non-GAAP operating income goals.  Should the Company not reach the threshold level for either the 2020 
corporate  revenue  or  corporate  non-GAAP  operating  income  goal,  then  no  payout  under  the  plan  will  be  made  to 
executives.

For those NEOs who were associated with a particular Company business unit or department, a portion of their cash 
bonus  potential  is  allocated  to  business  unit/department  financial  performance  goals.    In  2020,  these  goals  are  the 
achievement of fiscal 2020 business unit revenue and non-GAAP operating income objectives (“Business Unit Goals”). 
Earning of the potential cash award apportioned to the Business Unit Goals would begin upon achieving 80% of the 
business unit revenue target and/or 70% of the business unit non-GAAP operating income target.

The final component of the 2020 Plan is the inclusion of personal performance goals that are specific to the individual 
NEO.  The NEO personal performance goals in 2020 include targets related to senior management planning, additional 
corporate  financial  measures,  operational  measures  and  activities,  product  development  measures  or  marketing 
initiatives, depending on the executive involved.  Cash bonuses arising from the personal performance goals are drafted 
to be awarded on an “each or nothing” basis.

61

Provided that either of the Corporate Goal thresholds is met, the cash bonus potential of the 2020 Plan may again be realized.
The annual cash incentive component of the 2020 Plan was designed and shall be administered as follows:

•

•

•

•

Cash bonuses arising from the Corporate Goals and the Business Unit Goals are to be awarded starting at a 50% level 
at the respective goal threshold and increasing linearly up to the 2020 Plan target amounts.

If the 2020 Plan target is exceeded in either or both Corporate Goal categories, then the cash payout would increase as 
follows:

◦  Corporate Revenue:  From 100% to 120% of target, additional cash compensation would be earned linearly up to 

200% of this target.

◦  Non-GAAP Operating Income: From 100% to 130% of target, additional cash compensation would be earned 

linearly up to 200% of this target.

Upon achieving either of the Corporate Goals, the Business Unit Goals, if applicable, and personal performance goals 
could be earned in full.

Additional cash payout could be realized if either of the Business Unit Goals was exceeded, similar to the Corporate 
goal parameters above.

The following table reflects the structure of the annual cash incentive components of the 2020 Plan.

Tier I Incentive Compensation Plan -
Annual Cash Incentive Provisions
Payout if both financial metric thresholds are not reached
Corporate revenue threshold

Corporate non-GAAP operating income threshold

Payout upon attaining corporate financial metrics' threshold levels
Payout upon attaining corporate financial metrics' target goals
Payout upon attaining corporate financial metrics' maximum goals
Corporate revenue metric upside performance range

Corporate non-GAAP operating income metric upside performance range

Business unit/department goal payout
Personal goal payout

Long-Term Equity Incentive Plan

2020
0%
80% of corporate revenue target
70% of corporate non-GAAP operating 
income target
50%
100%
200%
100%-120% of corporate revenue target
100%-130% of corporate non-GAAP 
operating income target
Variable
Fixed

Our equity compensation plans are an essential tool to link the long-term interests of the Company’s stockholders and our 
employees, particularly our executive officers, and serve to motivate executive officers to make decisions that will, in the long 
run, optimize returns to our stockholders. Equity compensation plans also enable us to provide an opportunity for increased 
equity ownership by executive officers, thereby increasing the link between the incentives of our executive officers and the 
interests of our stockholders and maintain competitive levels of total compensation. 

The Compensation Committee currently administers the Nanometrics Incorporated 2005 Equity Incentive Plan and the Rudolph 
2018 Stock Plan.  At this year’s Annual Meeting, we are asking our stockholders to vote to approve a new 2020 Stock Plan.  If 
approved, equity awards will no longer be granted under either of the Nanometrics Incorporated 2005 Equity Incentive Plan or 
the  Rudolph  2018  Stock  Plan and  will  instead  be  awarded  under  the new  2020  Stock  Plan.    See  Proposal  3  in  this  proxy 
statement for additional information regarding the proposed 2020 Stock Plan.

Employees and members of management, including the Company’s NEOs, generally receive annual equity grants at or about 
the time of their performance reviews each year. The Company’s long-term incentive compensation program seeks to align the 
executives’  interests  with  the  Company’s  stockholders  by  rewarding  successes  in  stockholder  returns.  Additionally,  the 
Compensation Committee desires to foster an ownership mentality among executives by providing stock-based incentives as a 
portion of compensation.

For the Company’s long-term incentive compensation program, the Compensation Committee grants performance-based and 
service-based RSUs.

62

The number of Grants awarded to each executive officer is initially determined on a discretionary rather than formula basis by
the Compensation Committee.

Long-Term Equity Incentive Program For 2019

The long-term equity incentive component of the 2019 Plan was divided service-based RSU grants and, for select Nanometrics 
NEOs, PSU grants.  For 2019, the Compensation Committee established the portion of our NEOs’ long-term incentive awards 
granted in the form of PSUs at 50% and the portion of our long-term incentive awards granted in the form of service-vesting 
RSUs at 50%, reflecting our commitment to pay-for-performance. 

Performance-Based Stock Units: At Nanometrics, PSUs  were granted with a target amount of shares to vest if the target 
performance metrics were met, and additional shares may be received, up to a maximum amount that may be received of 150% 
of the target amount, in the event that the performance metrics were met at the maximum level.

PSUs were granted in 2019 to Dr. Lesaicherre and were to be earned based on Nanometrics’ stock price performance relative 
to the Top 30 companies in the Philadelphia Stock Exchange Semiconductor Index over one, two and three-year performance 
periods. The stock price measure used was TSR which combines price appreciation and dividends paid to show the total return 
to a stockholder as an annualized percentage, thus directly linking executive pay to stock price changes. To earn the target 
number of shares, Nanometrics’ stock price performance was required to be at the 50th percentile of the Index; for stock price 
performance at or above the 75th percentile, the recipient was to earn 150% of the target shares (maximum payout is 150% of 
target). If Nanometrics’ stock price performance for any period was negative, the number of shares earned was capped at target, 
regardless of performance relative to the Index.

As a result of the 2019 Merger and the fact that the financial performance measures could not be assessed for the full fiscal 
year, as of the Merger Date, each NEO listed from Nanometrics was deemed by the Nanometrics Compensation Committee to 
have earned their respective goals and targets for fiscal 2019 and was issued their performance-based equity awards for 2019 
that had been established for such NEO.

With regard to the Rudolph NEOs in 2019, the performance shares under the long-term equity component of the Rudolph 2019 
Plan were designed to assess the company’s TSR performance in relation to nineteen (19) peer group companies.  The Rudolph 
2019 Plan included a provision that in the event of a change of control of the company, the Rudolph 2019 Plan would be deemed 
to have been achieved at the applicable goal and target levels set forth therein for all of 2019. A “change in control” was defined 
in accordance with the Rudolph 2018 Stock Plan. Therefore, as a result of the 2019 Merger, as of the change in control closing, 
each NEO listed from Rudolph was deemed to have earned their respective goals and targets for 2019 and was issued their 
performance equity awards for 2019 Plan Year pursuant to the Rudolph 2019 Plan established for such NEO. Such awards were 
assumed by Onto Innovation in connection with the 2019 Merger and converted into Onto Innovation awards.

Service Vesting Restricted Stock Units: For 2019, each of the NEOs listed for Nanometrics received an equity grant which was 
comprised of  time-based  RSUs.    Each  service-based  RSU  award  is  subject  solely  to  service-based  vesting  in  equal annual 
increments over a three (3) year vesting period.

For the NEOs listed for Rudolph, in 2019, fifty percent (50%) of each NEO’s equity grant was comprised of time-based RSUs.  
Each  service-based  RSU  award  is  subject  solely  to  service-based  vesting  in  equal  annual  increments  over  a  three  (3) year 
vesting period. The service-based RSUs were assumed by Onto Innovation in connection with the 2019 Merger and converted 
into Onto Innovation RSU awards.

Actual number of PSUs and RSUs granted to the NEOs in 2019 and the related value are reported below in the Grants Of Plan-
Based Awards In 2019 Table.

Long-Term Equity Incentive Program For 2020

For the Company, the long-term equity incentive component of the 2020 Plan is divided between PSU grants and service-based 
RSU grants.  The Compensation Committee determined the portion of our NEOs’ long-term incentive awards granted in the 
form of PSUs and service-vesting RSUs shall be split at 50% each.

In 2020, the Compensation Committee granted equity awards to our NEOs with the dollar value allocated to each NEO.  The 
structure of the long-term equity incentive component was determined by the CEO (except in connection with his or her own 
grants) and the Compensation Committee through the consideration of a number of subjective factors, including the executive’s 
position and responsibilities at the Company, the executive’s individual performance, the number of grants held (if any) and 
other factors that they may deem relevant. The 2020 performance-based long-term equity incentive of our NEO compensation 

63

program is based on the metric of TSR.  The following parameters are included in the design of the long-term equity incentive 
program in 2020:

Performance-Based Stock Units: For 2020, fifty percent (50%) of each NEO’s equity grant is comprised of PSUs. The relative 
TSR plan design includes the following features:

•

•

•

•

•

•

•

Fifty percent (50%) of the PSU grant will be assessed at each of two (2) performance periods; at two years and at three
years from the grant date (2020 through 2022 and 2023, for awards granted in early 2020).

Performance will be assessed using TSR, which measures growth in stock price, plus any dividends paid, during the 
performance period.

TSR performance will be compared to the Philadelphia Semiconductor Index (SOX).

The performance and standards to earn the PSU equity awards in 2020 are as follows:

TSR Performance Relative to Peers

PSUs Earned as % of Target

Below 25th Percentile

25th Percentile

55th Percentile

80th Percentile and above

0%

50%

100%

200%

The  PSU  award  payout  will  be  calculated  on  a  straight-line  basis  between  the  25th  &  55th  and  the  55th  &  80th 
percentile levels referenced above.

A negative TSR cap has been instituted which limits any PSUs earned to target level if the Company’s TSR is negative 
over the performance period and our TSR ranks above the target performance level.

Earned PSUs are not subject to additional service-based vesting conditions.

Service Vesting Restricted Stock Units: For 2020, fifty percent (50%) of each NEO’s equity grant is comprised of service-
based RSUs.  The time required for the RSUs to fully vest is three (3) years from the date of grant.  As a result, each service-
based RSU award is subject solely to service-based vesting in equal annual increments over the three (3) year vesting period.

The following table reflects the long-term equity incentive components of the 2020 Plan.

Tier I Incentive Compensation Plan -
Long-Term Equity Incentive Provisions
Performance-based / Service-based grant breakout

Service-based grant vesting period

Performance-based grant evaluation period

Performance-based grant metric(s)
Performance-based grant vesting period
Performance threshold for earning grant
Percent of grant earned at threshold
Measure at which 100% of grant is earned
Maximum grant upside
Measure at which maximum upside of grant is earned

2020
50%-50%
33.3% annually
over 3 years
50% of grant 
at 2 and 3 years
TSR
100% upon earning
25th TSR percentile 
50%
55th TSR percentile 
200%
80th TSR percentile 

Personal Benefits And Perquisites

Benefits

All employees of the Company, including its executives, are eligible to participate in the following benefit plans and programs 
(“Benefit Package”), which were also available to Nanometrics employees and executives prior to the 2019 Merger:

•

Health and dental insurance;

64

•

•

•

•

•

•

•

•

•

Elective vision care program;

Life insurance and accidental death and dismemberment coverage;

401(k) savings plan;

Short- and long-term disability insurance with supplemental income continuation;

Health care and dependent care flexible spending account programs;

Employee assistance program (EAP);

Employee stock purchase plan;

Employee referral bonus program; and

Length of service awards. 

The  Company,  in  its  discretion,  may  offer  to  reimburse  the  expenses  that  an  employee  incurs  as  a  result  of  the  Company 
requiring the individual to relocate their primary residence for employment purposes. The Compensation Committee believes 
that these benefits are consistent with industry practice and are important in recruiting and retaining qualified employees.

Perquisites

In addition to the above Benefit Package, Nanometrics provided certain executive officers with a limited number of perquisites 
that its Compensation Committee believed to be reasonable and consistent with its overall compensation program. Although 
the  Nanometrics  Compensation  Committee  sought  the  advice  of  the  human  resources  department  on  general  market 
competitiveness  for  these  benefits,  it  did  not  use  a  formal  benchmarking  process.  In  2019,  the perquisites  included a  car 
allowance for the Nanometrics CEO and limited participation in an Executive Healthcare Reimbursement plan that provided
for reimbursement of usual and customary costs that may not have been covered under the medical, dental and eye care plans 
available to all other Nanometrics employees.

Further,  based  on  a  review  of  comparable  company  offerings  performed  by  Rudolph  and  its  Compensation  Committee’s 
compensation consultant, Rudolph executive employees, including listed NEOs, received the following in 2019:

•

•

•

A monthly car allowance;

Company-paid tax preparation services; and

Company-paid membership in one (1) airline executive club. 

The foregoing perquisites were determined and evaluated annually as part of the compensation review.

The Company’s Compensation Committee reviewed the perquisites offered by both Nanometrics and Rudolph and determined 
that for 2020, executive perquisites would be limited to Company-paid tax preparation services and Company-paid membership 
in one (1) airline executive club. The Compensation Committee believes that these benefits are reasonable and consistent with 
the  Company’s  overall  compensation  program  and  enable  the  Company  to  attract  and  retain  superior  employees  for  key 
positions.

Executive Perquisites For 2019

In 2019, the Nanometrics CEO received a car allowance and each of the listed Nanometrics NEOs with the exception of Mr. 
Smedt and Mr. Swyt were eligible to participate in the above described Executive Healthcare Reimbursement plan.

In  2019,  executive base  perquisites  provided  to  the  listed NEOs  employed  by  Rudolph  included  a monthly  car  allowance, 
income tax preparation fee payment and airline club membership.  These perquisites remained unchanged from those provided 
to these NEOs in the prior year.

Executive Perquisites For 2020

In 2020, executive base perquisites limited to tax preparation fee payment and airline club membership are to be provided to 
the NEOs.

65

Retirement Provision For Equity Awards

As  part  of  their  review  of  the  overall  compensation  program  for  all  Company  employees,  including  the  NEOs,  the 
Compensation  Committee  determined  that  the  implementation  of  a  retirement  provision  related  to  equity  awards  would 
continue to incentivize individuals as they near the end of their employment with the Company.  The alternative under the 
active Nanometrics and Rudolph stock plans is that upon retirement of an employee any equity grants that had not vested would 
be forfeited. Thus, any incentive realized through the service-vesting schedule for Company equity grants was diminished. As 
a result, the Compensation Committee assessed retirement provision alternatives and recommended to the Board, and the Board 
approved, the following retirement provision:

•

•

•

An employee is “retirement eligible” if they achieve a combination of age plus years of service with the Company 
totaling 70, with a base minimum age of 58 years old and a minimum service requirement of five years. 

Retirement under the provision then would occur when an employee has become retirement eligible and has formally 
notified the Company of his/her intention to retire from the employ of the Company on a date certain and does so 
retire or as otherwise approved by the Compensation Committee.

Upon such retirement by the employee, any equity awards granted by the Company shall vest based on:

◦  The vesting schedule established for service-based equity awards; or

◦  The actual performance results for performance-based equity awards. 

Employee Stock Purchase Plan

The Company (as successor to Nanometrics) has maintained an Employee Stock Purchase Plan since 1986. The Nanometrics 
2003 Employee Stock Purchase Plan was approved by stockholders in 2003 and subsequently amended and restated in 2009 
and 2016 and is currently administered by the Compensation Committee. The Company currently administers its Employee 
Stock Purchase Plan under the terms of the Nanometrics 2003 Employee Stock Purchase Plan. At this year’s Annual Meeting, 
we are asking our stockholders to vote to approve a new 2020 ESPP.  See Proposal 4 in this proxy statement for additional 
information regarding the proposed 2020 ESPP.

Under the terms of our current Employee Stock Purchase Plan, eligible employees may elect to have up to fifteen percent (15%)
of eligible compensation deducted from their base salary and applied to the purchase of shares of Company Common Stock. 
The price the employee pays for each share of stock is eighty-five percent (85%) of the fair market value of the Company 
Common Stock at the end of the applicable six-month purchase period. The Employee Stock Purchase Plan qualifies as a non-
compensatory plan under Code Section 423.

The Company does not offer a non-qualified deferred compensation plan.

CORPORATE AND GOVERNANCE POLICIES

Employment And Change-In-Control Agreements

While the Company utilizes employment agreements on a limited basis, we currently maintain employment agreements or 
arrangements with each of our NEOs.

In 2000, Rudolph entered into a management agreement with Mr. Roth, effective as of July 24, 2000, which was assumed by 
Onto Innovation in connection with the 2019 Merger. Mr. Roth previously had employment agreements with Rudolph when it 
was a private entity, and, at the time of Rudolph’s initial public offering, his agreement was redrafted to reflect terms believed 
to be appropriate for such officer’s service in his capacity with a publicly held corporation.

Upon the appointment of Mr. Plisinski to the position of CEO of Rudolph, he entered into a new employment agreement with 
Rudolph,  which  was  assumed  by  Onto  Innovation  in  connection  with  the  2019  Merger.    This  agreement  superseded  the 
executive employment agreement that Mr. Plisinski had entered into with August Technology Corporation which was assumed 
by Rudolph upon its merger with August Technology in 2006.

Mr. Plisinski’s employment agreement provides for a term of two (2) years with automatic renewals for additional two-year 
terms and Mr. Roth’s agreement provides for a term of one (1) year with automatic renewals for additional one-year terms, 

66

unless the Company or the applicable executive delivers a notice of non-renewal to the other party. Mr. Plisinski’s agreement 
prohibits him from competing with the Company in any way or soliciting its employees during his term of employment and for 
two (2) years after termination of his employment.  Mr. Roth’s agreement prohibits him from competing with the Company in 
any way or soliciting its employees during his term of employment and for one (1) year after termination of his employment.

Certain  of  our  executive  officers  are  also  entitled  to  payments  upon  a  qualifying  termination  of  employment  following  a 
Change-in-Control event. The Compensation Committee believes that providing severance in a Change-in-Control situation is 
beneficial  to  stockholders  so  that  executives  may  remain  objectively  neutral  when  evaluating  a  transaction  that  may  be 
beneficial to stockholders yet could negatively impact the continued employment of the executive. 

The Nanometrics Compensation Committee authorized Nanometrics to enter into a Change-in-Control Agreement with Mr. 
Heidrich in May 2015 and with Mr. Kocher in November 2016. Dr. Lesaicherre, Mr. Barnhart and Ms. Taylor each entered into 
agreements  with  Change-in-Control  provision  with  Nanometrics  during  their  employment  with  Nanometrics. Further,  Mr. 
Plisinski’s and Mr. Roth’s employment agreements also contain Change-in-Control terms.

See  “Potential  Payments  Upon  Termination  of  Employment  or  Change-in-Control”  below  for  a  description  of  these 
arrangements  and potential  payments  that  the  NEOs  would  have  been  entitled  to  receive  upon  applicable  hypothetical 
termination scenarios as of December 31, 2019.

Other Elements Of Post-Termination Compensation

The Company does not have a practice of providing retirement benefits, including any supplemental executive retirement plans 
(SERP), to its executives, other than through its 401(k) plan and the retirement provision for equity grants awarded by the 
Company.  The  Company  retains  the  discretion  to  utilize  the  offer  of severance  and/or  change-in-control  protection  as  an 
incentive in its hiring and retention of executives.

Non-Solicitation And Non-Competition Policy

The Company maintains a policy of entering into an agreement with each of its new executives, which contains both non-
solicitation  and non-competition provisions. The  non-solicitation  provisions  apply for  one  (1)  year  after  termination of  the 
individual’s employment while the non-competition provisions are in effect during the individual’s employment and generally 
for one (1) year thereafter. Each of the Company’s executives had previously entered into these covenants on the foregoing 
terms with either Nanometrics or Rudolph, except Mr. Plisinski, whose non-solicitation and non-competition provisions are in 
place during, and extend for two (2) years after the end of, his employment with the Company. In all cases, these covenants 
have been implemented to protect the confidential information, goodwill and other assets of the Company. For those individuals 
with employment agreements, should a breach of the non-solicitation or non-competition terms of their agreements occur, this 
could give rise to the Company declaring a breach under the agreement and terminating all severance payments thereunder.

General Termination Benefits

Upon termination of an executive’s employment with the Company, the individual is entitled to receive his or her base salary 
earned through the termination date, along with a payout for all accrued but unused vacation time earned though such date. 
Thereafter, further cash compensation to the executives is discontinued, except to the extent that severance or change-in-control 
payments  are  required  to  be made  in  accordance  with  individual  or  Company  severance  protection arrangements.    Certain 
executives with the Company who have entered into employment agreements are entitled to elect to continue group health or 
other group benefits as allowed by COBRA with continued Company co-payments for agreed post-termination periods. The 
Company retains the right to offer severance and/or payment of COBRA benefits to any individual who is terminated from the 
Company at its discretion.

Stock Ownership/Retention Guidelines

The Company has established guidelines related to stock ownership and retention for its executives and its outside directors to 
further align the interest of the executives and non-employee directors with the interests of stockholders, to have a stake in the 
long-term financial future of the Company and to further promote the Company’s commitment to sound corporate governance 
while allowing them to prudently manage their personal financial affairs.

67

After the 2019 Merger, the Board established the Company’s initial stock ownership policy such that the stock ownership and 
retention levels currently in effect are the following:

Company Role

Non-Employee Directors

CEO

Company Common Stock 
Holding Requirement

Effective Date

3x value of the annual 
Board retainer

Within 5 years of initial election 
to Board

3x value of CEO’s
base annual salary

Within 5 years of hire/promotion

Executives Subject to Section 16 
Reporting Requirements

1x value of executive’s
base annual salary

Within 5 years of hire/promotion

In assessing compliance with the foregoing guidelines, the Company takes into consideration only the ownership of Common 
Stock in the Company. To that end, unearned PSUs, unvested service based RSUs and vested or unvested stock options do not 
qualify as shares for purposes of compliance with the Company’s stock ownership and retention guidelines.

Participants are expected to achieve their ownership guideline target within five (5) years of becoming subject to the policy. 
Existing participants were subject to this policy as of the date of the policy and any new participants will be subject to the
policy on their hire, promotion, election or appointment date, as applicable.

Compliance  with  the  Company’s  stock  ownership  and  retention  guidelines  is  reviewed  annually  by  the  Compensation
Committee. At their last review on January 21, 2020, the Compensation Committee determined that all executives and directors 
who were with the Company, Nanometrics or Rudolph and acting in their executive/director capacities for periods in excess of 
one (1) year were in compliance with the ownership requirements. Should any individual in the future not own the minimum 
number of required shares after notice by the Compensation Committee, additional action, including possible removal from the 
executive role or a determination to not nominate the director for election, would be considered by the Board.

The Compensation Committee has scheduled its review of the Company’s stock ownership and retention guidelines for its 
January 2021 meeting and at this annual review will evaluate the appropriateness of the foregoing stock ownership levels for 
2021 based in part on the average closing price of a share of the Company’s stock during the thirty (30) consecutive trading 
days ending on and including the last day of the most recently completed fiscal year, as well as other considerations such as 
market conditions and comparable practices within the industry.

Prohibition On Hedging And Pledging Of Company Stock

In  order  to  ensure  that  our  executives,  including  our  NEOs,  and  our  directors  bear  the  full  risk  of  the  Company’s  stock 
ownership, our  insider  trading  policy  prohibits  directors  and  executive officers  of  the Company from  engaging  in hedging 
transactions related to our Common Stock. Additionally, under the Company’s anti-pledging policy, non-employee directors 
and executive officers are prohibited from making any new pledges of Company securities as collateral for a loan, or otherwise 
making a new transfer of Company securities to a margin account, provided that non-employee directors may pledge their 
securities when obligated to do so to realize the consummation of potential mergers, acquisitions and similar transactions with 
which the Company may be involved from time to time.

Adjustments Or Recovery Of Prior Compensation

The Company adopted a policy which provides for the recovery or adjustment of amounts previously awarded or paid to a 
NEO in the event that financial results or other performance measures on which an award or payment was determined are 
materially restated  or  adjusted.  In  addition,  if  the  Company  is  required  to  restate  its  financial  results  due  to  material 
noncompliance with any financial reporting requirements as a result of misconduct, the Sarbanes-Oxley Act of 2002 requires 
the CEO and CFO to disgorge:

•

•

Any bonus or other incentive-based or equity-based compensation received from the Company during the 12-month 
period following the first public issuance of the non-compliant financial reporting document; and

Any profits realized from the sale of Company stock during that 12-month period. 

In addition, Section 954 of the Dodd-Frank Wall Street Reform and Consumer Protection Act requires the SEC to direct the 
national securities exchanges to prohibit the listing of any security of an issuer that does not develop and implement a clawback 
68

policy. The SEC has not finalized its rules related to these clawback policies. Once the final rules are in place, the Company 
will adjust its policy, as necessary, to comply with SEC regulations.

Compensation Program Risk Assessment

As part of the engagement with the Compensation Committee’s compensation consultant, in association with the development 
of  and  advice  concerning  our  executive  compensation  program  and  practices,  Compensia  takes  into  consideration  whether 
possible compensation design features may have the potential to incentivize the NEOs to take risks that are reasonably likely 
to have a material adverse effect on the Company.  As part of the Compensation Committee’s compensation risk assessment,
potential  risks  and  risk  mitigating  features  are  addressed  in  the  following  areas:  compensation  philosophy  and  pay  mix; 
performance  measures  used  in  incentive  plans;  goal  setting  and  payout  leverage  and  caps;  calculation  and  verification  of 
performance outcomes for incentive payments; and other features.  Based on this framework and the input from Compensia,
the Compensation Committee evaluated our current executive compensation policies, practices and programs and believes they 
do not create risks that are reasonably likely to have a material adverse effect on the Company.

IRS Limits On Deductibility Of Compensation

Prior to the 2018 tax year, Section 162(m) of the IRC limited the tax deductibility of annual compensation paid to any publicly 
held  corporation’s  CEO  and  three  other  highest  compensated  officers  excluding  the  CFO,  to  the  extent  that  the  officer’s 
compensation  (other  than  qualified  performance-based  compensation)  exceeded  $1 million. Although  the  Compensation 
Committee  considers  deductibility  issues  when  approving executive  compensation  elements,  the  Compensation  Committee 
believes that the other compensation objectives, such as attracting, retaining and providing appropriate incentives to executives, 
are important and can supersede the goal of maintaining deductibility. Consequently, the Compensation Committee generally 
makes compensation decisions without regard to deductibility, as the Compensation Committee believes it has appropriately 
structured  its  compensation  programs  to  provide  incentives  to  our  executives  to  increase  Company  return  and  stockholder 
value. Subsequent changes in the tax laws eliminated the “performance-based” exception, and the limitation on deductibility 
was expanded to include all named executive officers. As a result, the Company does not deduct compensation paid to our 
named executive officers in excess of $1 million.

CONCLUSION

In reviewing its compensation programs, the Company has concluded that each element of compensation as well as the total 
compensation opportunities for its NEOs and its other executive officers are reasonable, appropriate and in the interests of the 
Company and its stockholders. The Company believes that this compensation program appropriately satisfies the Company’s 
goals of establishing a compensation package that attracts and retains a strong motivated leadership team, aligns the financial 
incentives of the executives with the interests of the stockholders, and rewards the achievement of specific annual, long-term 
and strategic goals of the Company. The Company believes that the compensation program which has been established and is 
reflected herein has enabled it to recruit and secure a talented and motivated leadership team by which the Company drives 
toward the ultimate objective of improving stockholder value.

69

COMPENSATION COMMITTEE REPORT ON EXECUTIVE COMPENSATION

We, the Compensation Committee of the Board of Directors, have reviewed and discussed the Compensation Discussion and 
Analysis (“CD&A”) within the Executive Compensation section of this proxy statement with the management of the Company. 
Based on such review and discussions, we have recommended to the Board of Directors that the CD&A be included as part of 
this proxy statement.

THE COMPENSATION COMMITTEE

Edward J. Brown, Jr. (Chairman)
Jeffrey A. Aukerman
Leo Berlinghieri
Robert G. Deuster
David B. Miller

70

Summary Compensation Table

The following table summarizes the compensation earned by our NEOs in the fiscal years noted.  For Messrs. Plisinski and 
Roth, this information relates only to compensation paid by Onto Innovation during the period on and after the Merger Date 
(i.e. from October 25, 2019 until December 31, 2019), and does not include compensation that Rudolph paid prior to the 2019 
Merger.

Name and Principal Position

Year

Salary ($)

Bonus ($)

2019

$83,192 —

Michael P. Plisinski (4)
Chief Executive Officer
Steven R. Roth (5)
Senior Vice President, Finance & Administration and 
Chief Financial Officer

Rollin Kocher
Senior Vice President, Field Operations

Kevin Heidrich (6)
Senior Vice President, Marketing &
Corporate Development Leadership
Rodney Smedt (6)
Senior Vice President & General Manager,
Metrology Business Unit

Greg Swyt (7)
Vice President, Business Finance

Former Officers (at December 31, 2019)

Pierre-Yves Lesaicherre, Ph.D.
Former President and Chief Executive Officer

Janet Taylor
Former General Counsel

James Barnhart
Former Senior Vice President, Operations

2019

2019
2018
2017

2019

2019

2019
2018
2017

2019
2018
2017
2019
2018
2017
2019
2018

Non-Equity 
Incentive Plan 
Compensation 
($)(1)

All Other 
Compensation 
($)(2)

Stock Awards 
($)

Total ($)

—(3)

—(3)

$540,750

$1,752,211

$2,376,153

$218,216

$606,995

$881,164

$492,022(3)
$630,085
$410,653

$162,500
$357,120
$247,755

$5,000
$8,641
$6,363

$984,234
$1,305,461
$949,895

$55,953 —

$324,712 —
$309,615 —
$285,124 —

$299,615 —

$292,872(3)

$125,000

$3,800

$721,287

$321,083 —

$388,855(3)

$135,455

—

$249,885 —
$242,094
$235,072 —

$130,000

$146,436(3)
$159,202
$67,128

$83,333
$163,973
$75,400

$5,000
$4,767
$2,821

$479,029
$550,000
$42,308
$262,115
$299,615
$278,923
$279,039
$252,308

—
—
$100,000
—
—
—
—
—

$1,423,717(3)
$1,311,585
$2,232,200
$268,442(3)
$436,608
$318,659
$536,912(3)
$955,256

$566,500
$1,056,000
$52,885
$170,500
$288,000
$122,220
$198,000
$368,640

$4,417,547
$19,300
$1,200
$712,274
$27,046
$7,992
$970,159
$6,467

$845,393

$484,654
$700,036
$380,421

$6,886,793
$2,936,885
$2,428,593
$1,413,331
$1,051,269
$727,794
$1,984,110
$1,582,671

(1) The  amounts  for  a  given  year  represent  the  amount  earned  in  respect  of  that  year  under  Nanometrics’  or  Rudolph’s  annual  cash 
performance bonus awards, as applicable, notwithstanding the year in which it was paid.  See “Compensation Discussion and Analysis 
– Annual Cash Incentive Compensation” for further information.

(2) Refer to the All Other Compensation table for more detailed information about compensation reported in this column.
(3) Amounts reflect the grant date fair value for each share-based compensation award granted to the executive officer during the covered 
year, calculated in accordance with FASB ASC Topic 718. The assumptions used in determining the grant date fair values of awards 
are set forth in Note 2 to our consolidated financial statements, which are included in our Annual Report on Form 10-K filed with the 
SEC on February 25, 2020. For 2019, the amount reported for each NEO includes the grant date fair value attributable to the 2019
awards. Dr. Lesaicherre had 2019 PSUs that vested at target at the Merger Date.

(4) The total compensation earned by Mr. Plisinski during 2019 while serving as Rudolph’s CEO, when added to the amount reported in 
the Summary Compensation Table, results in total compensation for the full calendar year of $3,391,035. This adjustment included (i) 
increasing his salary ($455,741), (ii) including the grant date fair value of a time-based equity award Mr. Plisinski received for Rudolph
prior  to  the  2019 Merger  ($550,021),  (iii)  including  401(k)  matching  contributions earned  prior  to  the  2019  Merger ($8,400) and 
including insurance coverage paid by Rudolph prior to the 2019 Merger ($720).

(5) The total compensation earned by Mr. Roth during 2019 while serving as Rudolph’s CFO, when added to the amount reported in the 
Summary Compensation Table, results in total compensation for the full calendar year of $1,391,819. This adjustment included (i) 
increasing his salary ($306,518), (ii) including the grant date fair value of a time-based equity award Mr. Roth received for Rudolph 
prior  to  the  2019 Merger  ($195,017),  (iii)  including  401(k)  matching  contributions  earned  prior  to  the  2019  Merger ($8,400) and 
including insurance coverage paid by Rudolph prior to the 2019 Merger ($720).

(6) Although employed by Nanometrics prior to 2019, Mr. Heidrich and Mr. Smedt were not NEOs prior to 2019.
(7) Mr. Swyt served as the Principal Financial Officer for Nanometrics from June 26, 2018 until the Merger Date.

71

All Other Compensation

Name
Michael P. Plisinski
Steven R. Roth
Rollin Kocher
Kevin Heidrich
Rodney Smedt
Greg Swyt

Year
2019
2019
2019
2019
2019
2019

Former Officers (at December 31, 2019)
Pierre-Yves Lesaicherre, Ph.D. 2019
2019
Janet Taylor
2019
James Barnhart

Matching
Contribution
to 401(k) ($)
—
—

$5,000
$3,800
—
$5,000

$5,000
$5,000
$3,350

Insurance
($)(1)
$144
$144
—
—
—
—

—
—
—

Perquisites
and Other 
Personal 
Benefits ($)
—(2)
—(2)
—(2)
—(2)
—(2)
—(2)

$12,473
—(2)
—(2)

Value of
Accelerated 
Equity Awards ($)(3)
$1,752,067
$606,851

—
—
—
—

Severance 
Compensation ($)(4)
—
—
—
—
—
—

$3,550,330
$397,274
$636,809

$849,744
$310,000
$330,000

Total
($)

$1,752,211
$606,995
$5,000
$3,800
—
$5,000

$4,417,547
$712,274
$970,159

(1)

Insurance is the premium associated with coverage under the group term life insurance and accidental death 
and dismemberment insurance plans provided to former Rudolph employees. Coverage is equal to the lesser of 
two (2) times salary or $450,000. Former Nanometrics employees did not receive such insurance coverage.

(2) Value  of  aggregate  perquisites  and benefits  for  each  NEO  except  Dr.  Lesaicherre is less  than  $10,000,  and 
therefore, perquisites for these individuals are not required to be disclosed in accordance with SEC rules. Dr. 
Lesaicherre’s perquisites included auto allowance of $12,000 and executive healthcare plan reimbursements.

(3) Reflects  the  value  of  equity  awards  that  vested  upon  the  change  in  control  on  the  Merger  Date.  For  Dr. 
Lesaicherre, Ms. Taylor and Mr. Barnhart, this column does not include the acceleration of the equity grants 
awarded in 2019, as the grant date fair value of such awards is included in the “Stock Awards” column of the 
Summary Compensation Table.

(4) Reflects severance benefits that were paid to or became payable to these NEOs on the Merger Date.

72

Grants Of Plan-Based Awards In 2019

The  following  table  sets  forth  information  with  respect  to  non-equity  and  equity  incentive  plan  awards  that  were 
granted during 2019 to the NEOs.  Except for awards granted under the Rudolph Cash Incentive Compensation Plan, 
for Messrs. Plisinski and Roth, the following table does not include awards granted by Rudolph prior to the 2019 
Merger. No stock option awards were granted to any NEO in 2019.

Estimated Future Payouts Under
Non-Equity Incentive Plan
Awards ($) (1)

Estimated Future Payouts Under
Equity Incentive Plan Awards (#)
(2)

Threshold
$94,631
$38,188
—

Target Maximum Threshold
$540,750
$218,216
$195,000

$1,081,500
$436,432
$390,000

Target Maximum

—

—

—

—

—

—

$150,000

$300,000

$162,546

$325,092

$100,000

$200,000

$566,500

$1,133,000

$170,500

$341,000

$198,000

$396,000

2,471

24,709

37,064

All Other
Stock
Awards:
Number of
Shares of
Stocks or
Units (#) (3)

Grant Date
Fair Value
of Stock
and Option
Awards ($)

16,978

$492,022

10,106

$292,872

13,668

$388,855

5,053

$146,436

24,709

$471,767
$716,067

9,263

$268,442

18,527

$536,912

Name

Michael P. Plisinski
Steven R. Roth

Rollin Kocher

Kevin Heidrich

Rodney Smedt

Greg Swyt

Grant Date
2/6/2019
2/6/2019
3/11/2019
3/11/2019
3/11/2019
3/11/2019
3/11/2019
5/31/2019
3/11/2019
3/11/2019

Former Officers (at December 31, 2019)

Pierre-Yves Lesaicherre, 
Ph.D.

Janet Taylor

James Barnhart

3/11/2019
3/11/2019
3/11/2019
3/11/2019

3/11/2019

3/11/2019
3/11/2019

(1) The  amounts  reported  in  these  columns for  each  NEO except  Mr.  Plisinski  and  Mr.  Roth represent  the  annual  cash  incentive 
opportunities under the Nanometrics Incentive Compensation Plan for each of our Named Executive Officers for the 2019 performance 
period.  Mr.  Plisinski’s  and  Mr.  Roth’s  annual  cash  incentive  opportunities  in  2019  were  under  the  Rudolph  2019  Key  Executive 
Incentive Compensation Plan, which were paid at target by the Company in accordance with the Merger Agreement. The metrics 
against which performance was measured under these plans, as well as other details regarding the plans, are discussed above in the 
Compensation Discussion and Analysis under “Annual Cash Incentive Compensation.” The amounts actually earned by our NEOs
under the applicable plans are reflected in the “Non-Equity Incentive Plan Compensation” column of the Summary Compensation 
Table above.

(2) The amounts reported in these columns represent the award opportunities under the Nanometrics 2019 PSU program. The metrics 
against which performance was measured under this program, as well as other details regarding the plan, are discussed above in the 
Compensation  Discussion  and Analysis  under  the heading  “Long-Term  Equity  Incentive  Plan.” This  award  was  granted  under  the 
Nanometrics 2005 Stock Plan. This award fully vested at target due to change of control at the Merger Date.

(3) The amounts reported in this column represent the awards of RSUs which are subject to service-based vesting conditions, as discussed 
above in the Compensation Discussion and Analysis under the heading “Long-Term Equity Incentive Plan.” This award was granted 
under the Nanometrics 2005 Stock Plan. These RSUs vest in 33.3% increments on each of the first three (3) anniversaries of the grant 
date.

73

Outstanding Equity Awards At 2019 Year-End

The following table sets forth information with respect to outstanding equity awards held by the NEOs at December 31, 2019.
No stock option awards were outstanding at December 31, 2019.

Name

Michael P. Plisinski

Steven R. Roth

Rollin Kocher

Kevin Heidrich

Rodney Smedt

Greg Swyt

Grant
Date (1)
1/28/2015
1/27/2016
2/6/2017
2/8/2018
2/6/2019
1/28/2015
1/27/2016
2/6/2017
2/8/2018
2/6/2019
2/8/2017
2/23/2018
3/11/2019
2/8/2017
2/23/2018
3/11/2019
2/8/2017
2/23/2018
3/11/2019
6/2/2017
6/1/2018
3/11/2019

Stock Awards 

Number of Shares
or Units of Stock
That Have Not
Vested (#)(2)

Market Value of
Units of Stock That
Have Not Vested
($)(3)

7,077
17,013
6,225
12,312
19,685
2,654
5,233
1,979
4,365
6,980
5,233
16,158
16,978
3,270
8,402
10,106
3,127
13,668
1,425
798
2,502
5,053

$258,594
$621,655
$227,462
$449,880
$719,290
$96,977
$191,214
$72,313
$159,497
$255,049
$191,214
$590,413
$620,376
$119,486
$307,009
$369,273
$114,261
$499,429
$52,070
$29,159
$91,423
$184,637

(1) For better understanding of this table, we have included an additional column showing the grant date of each stock award.

(2) Amount includes (i) service-based RSU awards and (ii) PSU awards that have been earned and remain subject to service-based vesting 

requirements. PSUs and RSUs vest in accordance with the schedule below:

Grant Date

Grant Type

Vesting

1/28/2015

1/28/2015

1/27/2016

1/27/2016

Service-based RSU 1/5th per year on the anniversary of the grant date

Earned PSU

1/5th on February 19, 2016 and 1/5th per year on the anniversary of the grant date

Service-based RSU 1/5th per year on the anniversary of the grant date

Earned PSU

1/5th on February 16, 2017 and 1/5th per year on the anniversary of the grant date

2/6/2017 to 3/11/2019

Service-based RSU 1/3rd per year on the anniversary of the grant date

(3) Based on the Company’s common stock closing price of $36.54 per share on December 31, 2019.

74

Stock Vested In 2019

The following table sets forth information with respect to the value realized by the NEOs upon vesting of PSUs and RSUs 
during 2019, and such values reflect the total pre-tax value realized by each NEO.  Share amounts for transactions prior to the 
Merger Date have been adjusted to give effect to the exchange ratio. For Messrs. Plisinski and Roth, this information relates 
only to the PSUs that vested on the Merger Date and does not include RSUs that vested prior to the 2019 Merger. There were 
no stock option exercises by any of the NEOs during 2019.

Name
Michael P. Plisinski
Steven R. Roth
Rollin Kocher
Kevin Heidrich
Rodney Smedt
Greg Swyt

Former Officers (at December 31, 2019)

Pierre-Yves Lesaicherre, Ph.D.
Janet Taylor
James Barnhart

Stock Awards

Number of
Shares Acquired
on Vesting (#)

Value
Realized on
Vesting ($)(1)

50,602
17,485
17,961
10,805
5,369
4,790

204,152
37,261
41,046

$1,801,457
$622,473
$528,042
$317,987
$154,961
$147,925

$7,089,940
$1,240,107
$1,398,507

(1) The aggregate dollar amount realized is based on the fair market value of the shares upon vesting.

Pension And Nonqualified Deferred Compensation

The Company does not have a defined benefit pension program, nor does it offer non-qualified deferred compensation.

Potential Payments Upon Termination Of Employment Or Change-In-Control

This section (including the following tables) summarizes each NEO’s estimated payments and other benefits that would be 
received by the NEO or the NEO’s estate if his or her employment had terminated on December 31, 2019, under the hypothetical 
circumstances set forth below. 

Each of our NEOs would be entitled to certain termination payments upon his or her death or Disability, his or her involuntary
termination without Cause, or his or her voluntary termination with Good Reason as described below.  Although the definitions 
of each of these terms is specific to the NEO’s employment agreement or change-in-control agreement with the Company, the 
terms generally have the following meanings:

•

•

•

“Disability” generally means that the executive, due to physical or mental impairment, is unable to perform his or her 
duties to the Company for a specified period of time.

“Cause” generally means that the executive engaged in a crime, willful gross misconduct or other serious act involving 
moral turpitude; materially breached an agreement between him or her and the Company; or otherwise materially 
breached his or her obligations to the Company.

A voluntary termination for “Good Reason” generally means, depending on the particular executive’s agreement, that 
the executive’s duties, responsibilities or status with the Company or its successor are materially reduced; his or her 
primary place of work is moved to a location outside a predetermined radius; in particular cases, certain reduction in 
compensation;  or  the  Company  materially  breaches  the  terms  of  his  or  her  agreement  with  the  Company  or  any 
successor fails to assume the executive’s change-in-control agreement.

75

NEO Employment Agreements

Mr. Plisinski’s employment agreement provides for the following:

Mr. Plisinski

•

•

In the event of any termination of Mr. Plisinski’s employment, he is entitled to payment of all base salary due and 
owing through the termination date and an amount equal to all earned but unused vacation through the termination 
date.

In the event Mr. Plisinski’s employment is terminated due to his death, his estate would be entitled to:

◦ 

Payment of his then-current base salary as if his employment had continued for three (3) months following his 
death;

◦  Continued co-payment for a period of six (6) months following his death of amounts due under COBRA for 
continuation of Company’s group health and other group benefits for his covered dependents, if the covered 
dependents so elect;

◦ 

◦ 

Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the time 
employed preceding his death, to be paid out with the Company’s annual incentive plan payouts; and

Immediate  vesting  of  stock  options  and  SARs,  and  immediate  vesting  of  RSU  awards  granted  after  his 
appointment as CEO which by their terms would vest within twelve (12) months after death and, if a performance 
award, based on actual performance achievement for such performance period completed within twelve (12) 
months after death.

•

In the event Mr. Plisinski’s employment is terminated due to his Disability, he would be entitled to:

◦ 

Payment of his then-current base salary through the end of the month of such termination;

◦  Continued co-payment for a maximum period of six (6) months following his Disability of amounts due under 
COBRA for continuation of Company’s group health and other group benefits, if he or his covered dependents, 
as appropriate, so elects;

◦ 

◦ 

Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the time 
employed preceding his termination, to be paid out with the Company’s annual incentive plan payouts; and

Immediate  vesting  of  stock  options  and  SARs,  and  immediate  vesting  of  RSU  awards  granted  after  his 
appointment as CEO which by their terms would vest within twelve (12) months after termination for disability 
and, if a performance award, based on actual performance achievement for such performance period completed 
within twelve (12) months after termination.

•

In the event Mr. Plisinski’s employment is terminated by the Company without Cause or Mr. Plisinski terminates his 
employment for Good Reason, he would be entitled to:

◦ 

Payment of two (2) times his then-current base salary for a period of twenty-four (24) months;

◦  Continued co-payment for a period of up to eighteen (18) months of amounts due under COBRA for continuation

of Company’s group health and other group benefits, if he so elects; and

◦  Vesting of any equity incentive awards outstanding as of the termination date that, by their terms:

(1) represent  either  unvested  shares  which  were  earned  based  on  a  completed  performance  period  under  a 
performance-based award granted on or after the employment agreement effective date and which as of the 
termination date are then subject to time-based vesting only, or shares under such an equity incentive award 
granted on or after the employment agreement effective date which will be earned under a performance-based 
award based on actual achievement under a performance period which has been completed on or prior to the 
termination date but as to which performance period the actual number of shares earned against the award 
performance goals has not yet been determined by the Company; and 

(2) would  have  become  vested  based  solely  on  the  passage  of  time  within  the  twelve  (12)  month  period 

immediately following the termination date had Mr. Plisinski continued in employment with the Company.

76

•

If,  within  eighteen  (18)  months  following  the  occurrence  of  a  Change-in-Control1,  Mr.  Plisinski’s  employment  is 
terminated for any reason other than for Cause or Mr. Plisinski terminates his employment for Good Reason, he would 
be entitled to:

◦ 

Payment of two (2) times the sum of his then-current base salary and target annual cash bonus for a period of 
twenty-four (24) months;

◦  Continued co-payment by Company for a period of up to eighteen (18) months of amounts due under COBRA 

for continuation of Company’s group health and other group benefits, if he so elects; and

◦ 

Immediate vesting of all unvested stock options, SARs and all unvested and outstanding performance-based (at 
target) and service-based RSUs and other equity awards.

◦  To the extent that change-in-control termination payments made to Mr. Plisinski under his agreement are subject 
to the excise tax imposed by Section 4999 of the Internal Revenue Code, Mr. Plisinski would either have to pay 
the excise tax or have his benefits reduced so that no portion of his termination payments were subject to the 
excise tax.

◦ 

In order to receive these termination or change-in-control termination payments, Mr. Plisinski would be required 
to sign a general release of all known and unknown claims that he may have against the Company.

◦  As  part  of  his  employment  agreement,  Mr.  Plisinski  is  subject  to  non-solicitation  and  non-competition 
restrictions that limit his ability to compete with the Company during the term of the agreement and for a period 
of two (2) years following his resignation or termination for any reason.

The following table reflects the potential payments to Mr. Plisinski in the event of his termination or his termination following 
a change-in-control:

Potential Payments To Mr. Plisinski Upon Termination Or Change-In-Control

Cash Severance

Termination Circumstance as of 12/31/2019

By the Company without Cause

Executive resignation for Good Reason

Death

Base Salary
$1,081,500
(2x salary)
$1,081,500
(2x salary)
$135,188
(3 mos. salary)

Within 18 months following Change-in-Control:

Disability

$ -

Management
Incentive
Bonus

$ -

$ -

$540,750
(1x bonus)
$540,750
(1x bonus)

Value of
Accelerated
Unvested
Equity

Benefits
Continuation

$1,261,617

$36,265

$1,261,617

$36,265

$1,261,617

$12,088

$1,261,617

$12,088

By the Company without Cause

By the executive with Good Reason

$1,081,500
(2x salary)
$1,081,500
(2x salary)

$1,081,500
(2x bonus)
$1,081,500
(2x bonus)

$2,276,880

$36,265

$2,276,880

$36,265

1 For Mr. Plisinski, a “Change-in-Control” would generally be considered to have occurred if:

•

•
•
•
•

a merger or consolidation of the Company or an acquisition by the Company involving the issuance of its securities as consideration 
for the acquired business results in the stockholders of the Company following such transactions having less than fifty percent (50%) 
of combined voting power of the surviving entity;
any person or persons becomes the beneficial owner of thirty percent (30%) or more of our outstanding shares;
all or substantially all assets of the Company are disposed of pursuant to a plan of liquidation of the Company;
all or substantially all of our assets are sold; or
during any twelve (12) month consecutive period the individuals who presently make up our Board or who become members of our 
Board with the approval of at least a majority of our existing Board cease to constitute at least a majority of the Board; provided any 
transaction or event described above will not constitute a change-in-control under the agreement unless it qualifies as a “change-in-
control” under Section 409A of the Internal Revenue Code.

77

Mr. Roth’s employment agreement provides for the following:

Mr. Roth

•

In the event Mr. Roth’s employment is terminated as a result of his death or Disability, he or his estate would be 
entitled to:

◦ 

◦ 

Payment of all base salary due and owing through the termination date and amount equal to all earned but unused 
vacation through the termination date;

Payment of an amount equal to Mr. Roth’s bonus as was paid or payable for the most recent completed bonus 
period; and

◦  Accelerated vesting of all outstanding and unvested stock options, performance-based and service-based RSUs 

or other equity awards.

•

In the event Mr. Roth’s employment is terminated without Cause or Mr. Roth terminates his employment for Good 
Reason, he would be entitled to:

◦ 

◦ 

Payment of all base salary due and owing through the termination date and an amount equal to all earned but 
unused vacation through the termination date;

Payment for over a period of one (1) year of one (1) times Mr. Roth’s:

* Then-current base salary; and

* Bonus as was paid or payable for the most recent completed bonus period;

◦  Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance  based  and 

service-based RSUs and other equity awards.

•

If, within one (1) year following the occurrence of a change-in-control2, Mr. Roth’s employment is terminated for any 
reason other than for Cause or Mr. Roth terminates his employment for Good Reason, he would be entitled to:

◦ 

◦ 

Payment of all base salary due and owing through the termination date and including an amount equal to all 
earned but unused vacation through the termination date;

Payment over a period of one (1) year of one (1) times Mr. Roth’s:

* Then-current base salary; and

* Bonus as was paid for the most recent completed bonus period;

◦  Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested and  outstanding  performance-based  and 

service-based RSUs and other equity awards; and

◦  Maintenance of Mr. Roth’s and his dependents’ health care benefit coverage to the same extent provided for by 
and with the same Company/Executive payment contribution percentages under Company’s group plans at the 

2 For Mr. Roth, a “Change-in-Control” would generally be considered to have occurred if:

•
•

•

•
•

any person or persons becomes the beneficial owner of twenty-five percent (25) or more of our outstanding voting shares;
during any two (2) consecutive year period individuals who presently make up our Board or who become members of our Board 
with the approval of at least two-thirds of our existing Board (other than a new director who assumes office in connection with an 
actual or threatened election contest) cease to be at least a majority of the Board;
a merger or consolidation of the Company is consummated with another entity (unless outstanding voting securities of the Company 
immediately prior to the termination would continue to represent more than fifty-one percent (51%) of the combined voting power 
of the surviving entity and had the power to elect as least a majority of the board of the surviving entity);
our stockholders approve a plan of liquidation of the company or an agreement for the sale of all or substantially all of our assets; or
any other event occurs of a nature that would be required to be reported as a “change-in-control” under Schedule 14A of the Exchange 
Act, provided any transaction or event described above will not constitute a change-in-control under the agreement unless it qualifies 
as a “change-in-control” under Section 409A of the Internal Revenue Code.

78

time of termination. Such coverage shall extend for a term of one (1) year from the Termination Date unless he 
becomes covered as an insured under another employer’s or spousal health care plan.

•

•

•

To the extent that termination or change-in-control payments made to Mr. Roth under his agreement are subject to the 
excise tax imposed by Section 4999 of the Internal Revenue Code, Mr. Roth would either have to pay the excise tax 
or have his benefits reduced so that no portion of his termination payments were subject to the excise tax.

In order to receive these termination or change-in-control payments, Mr. Roth would be required to sign a general 
release of all known and unknown claim the he may have against the Company.

As part of his employment agreement, Mr. Roth is subject to non-competition and non-solicitation restrictions that 
limit his ability to compete with the Company during the term of the Agreement and for a period of one (1) year 
following his resignation or termination for any reason.

The following table reflects the potential payments to Mr. Roth in the event of his termination or his termination following a
change-in-control:

Potential Payments To Mr. Roth Upon Termination Or Change-In-Control

Cash Severance

Termination Circumstance as of 12/31/2019

By the Company without Cause

Executive resignation for Good Reason

Base Salary
$363,693
(1x salary)
$363,693
(1x salary)

Death

Disability

$ -

$ -

Within 12 months following Change-in-Control:

Management
Incentive
Bonus
$218,216
(1x bonus)
$218,216
(1x bonus)
$218,216
(1x bonus)
$218,216
(1x bonus)

Value of
Accelerated
Unvested
Equity

$775,050

$775,050

$775,050

$775,050

Benefits
Continuation

$ -

$ -

$ -

$ -

By the Company without cause

By the executive with good reason

$363,693
(1x salary)
$363,693
(1x salary)

$218,216
(1x bonus)
$218,216
(1x bonus)

$775,050

$24,177

$775,050

$24,177

Messrs. Kocher, Heidrich, Smedt and Swyt

The executive general severance and change-in-control agreements for Messrs. Kocher, Heidrich, Smedt and Swyt provide for 
the following:

•

In  the  event  Mr.  Kocher’s,  Mr.  Heidrich’s,  Mr.  Smedt’s or  Mr.  Swyt’s  employment  is  terminated  as  a  result  of  a
“Covered Termination”3, the executive or his estate would be entitled to:

◦ 

◦ 

◦ 

Payment of all base salary due and owing through the termination date, any unreimbursed business expenses and 
an amount equal to all earned but unused vacation through the termination date;

Payment of his then-current base salary for a period of six (6) months (paid over a period of six (6) months); and

Provided that the executive is eligible and has made the necessary elections for continuation coverage pursuant 
to COBRA under a health, dental, or vision plan sponsored by the Company, payment of his and his dependent’s 
applicable premiums for such continued benefits. Such coverage shall extend for a term of six (6) months from 
the termination date.

3 For Messrs. Kocher, Heidrich, Smedt and Swyt, a “Covered Termination” would generally be considered to have occurred in the event of 
the executive’s:

•
•

dismissal or discharge by the Company for reasons other than Cause and other than as a result of death or disability; or
resignation for Good Reason within ninety (90) days of the occurrence of the Good Reason action, which occurs outside of twelve 
(12) months of a Change-in-Control event.

79

•

If, within one (1) year following the occurrence of a Change-in-Control4, Mr. Kocher’s, Mr. Heidrich’s, Mr. Smedt’s
or Mr. Swyt’s employment is terminated for any reason other than for Cause or Mr. Kocher, Mr. Heidrich, Mr. Smedt
or Mr. Swyt terminates his employment for Good Reason, the executive would be entitled to:

◦ 

◦ 

Payment of all base salary due and owing through the termination date, any unreimbursed business expenses and 
an amount equal to all earned but unused vacation through the termination date;

Payment in a single lump sum following the effective date for his Release of his:

* Then-current annual base salary; and

* 100% of his target annual bonus in effect for the fiscal year in which the termination date occurs;

◦  Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance-based  and 

service-based RSUs and other equity awards; and

◦ 

Provided that executive is eligible and has made the necessary elections for continuation coverage pursuant to 
COBRA under a health, dental, or vision plan sponsored by the Company, payment of his and his dependent’s 
applicable premiums for such continued benefits. Such coverage shall extend for a term of twelve (12) months
from the termination date.

•

•

To the extent that change-in-control termination payments made to Mr. Kocher, Mr. Heidrich, Mr. Smedt or Mr. Swyt
are subject to the excise tax imposed by Section 4999 of the Internal Revenue Code, Mr. Kocher, Mr. Heidrich, Mr. 
Smedt or Mr.  Swyt would either have to pay the excise tax or have his benefits reduced so that no portion of his 
termination payments were subject to the excise tax.

In order to receive these change-in-control termination payments, Mr. Kocher, Mr. Heidrich, Mr. Smedt or Mr. Swyt
would be required to sign a general release of all known and unknown claims that he may have against the Company.

Each of Mr. Kocher, Mr. Heidrich, Mr. Smedt and Mr. Swyt, have entered into a separate agreement upon employment with 
the Company that subjects the executive to non-competition and non-solicitation restrictions, which limit his ability to compete 
with the Company during his employment and for a period of one (1) year following his resignation or termination for any 
reason.

4 For Messrs. Kocher, Heidrich, Smedt and Swyt, a “Change-in-Control” would generally be considered to have occurred upon any of the 
following:

•

•

•

any person or persons becomes the beneficial owner of fifty percent (50%) or more of the total voting power represented by the 
Company’s then outstanding voting securities;
during any two (2) year, any action or event occurs in which less than a majority of the directors who are either (A) directors of the 
Company as of the date of the executive’s agreement, or (B) elected, or nominated for election, to the Board with the affirmative 
votes of a majority of the Incumbent Directors at the time of such election or nomination (but does not include an individual whose 
election  or  nomination  is  in  connection  with  an  actual  or  threatened  proxy  contest  relating  to  the  election  of  directors  to  the 
Company);
the consummation of a merger or consolidation of the Company with any other corporation, other than a merger or consolidation
which would result in the outstanding voting securities of the Company immediately prior thereto continuing to represent at least 
fifty percent (50%) of the outstanding voting securities of the Company or such surviving or resulting entity immediately after such 
merger or consolidation; or 
the consummation of the sale, lease or other disposition by the Company of all or substantially all the Company’s assets.

•
To the extent required for compliance with Code Section 409A, in no event will a change-in-control be deemed to have occurred if such 
transaction is not also a “change in the ownership or effective control of” the Company or a “change in the ownership of a substantial 
portion of the assets of” the Company, as determined under Treasury Regulations Section 1.409A-3(i)(5)

80

The following table reflects the potential payments to Mr. Kocher in the event of his termination or his termination 

following a change-in-control:

Potential Payments To Mr. Kocher Upon Termination Or Change-In-Control

Termination Circumstance as of 12/31/2019

Within 12 months following Change-in-Control:

By the Company without Cause

Base Salary
$162,500
(6 months 
salary)

Cash Severance

Management
Incentive
Bonus

Value of
Accelerated
Unvested
Equity

Benefits
Continuation

n/a

n/a

$17,664

By the Company without Cause

By the executive with Good Reason

$325,000
(1x salary)
$325,000
(1x salary)

$195,000
(1x bonus)
$195,500
(1x bonus)

$1,402,003

$35,328

$1,402,003

$35,328

The following table reflects the potential payments to Mr. Heidrich in the event of his termination or his termination 

following a change-in-control:

Potential Payments To Mr. Heidrich Upon Termination Or Change-In-Control

Termination Circumstance as of 12/31/2019

By the Company without Cause

Base Salary
$150,000
(6 months 
salary)

Within 12 months following Change-in-Control:

Cash Severance

Management
Incentive
Bonus

Value of
Accelerated
Unvested
Equity

Benefits
Continuation

n/a

n/a

$17,664

By the Company without Cause

By the executive with Good Reason

$300,000
(1x salary)
$300,000
(1x salary)

$150,000
(1x bonus)
$150,000
(1x bonus)

$795,768

$35,328

$795,768

$35,328

The following table reflects the potential payments to Mr. Smedt in the event of his termination or his termination 

following a change-in-control:

Potential Payments To Mr. Smedt Upon Termination Or Change-In-Control

Termination Circumstance as of 12/31/2019

Within 12 months following Change-in-Control:

By the Company without Cause

Base Salary
$162,500
(6 months 
salary)

Cash Severance

Management
Incentive
Bonus

Value of
Accelerated
Unvested
Equity

Benefits
Continuation

n/a

n/a

$17,664

By the Company without Cause

By the executive with Good Reason

$325,000
(1x salary)
$325,000
(1x salary)

$162,500
(1x bonus)
$162,500
(1x bonus)

$665,759

$35,328

$665,759

$35,328

81

The following table reflects the potential payments to Mr. Swyt in the event of his termination or his termination 

following a change-in-control:

Potential Payments To Mr. Swyt Upon Termination Or Change-In-Control

Termination Circumstance as of 12/31/2019

Within 12 months following Change-in-Control:

By the Company without Cause

Base Salary
$125,000
(6 months 
salary)

Cash Severance

Management
Incentive
Bonus

Value of
Accelerated
Unvested
Equity

Benefits
Continuation

n/a

n/a

$13,374

By the Company without Cause

By the executive with Good Reason

$250,000
(1x salary)
$250,000
(1x salary)

$100,000
(1x bonus)
$100,000
(1x bonus)

$305,219

$26,748

$305,219

$26,748

Retention Bonus Agreements

In June 2018, upon Mr. Swyt assuming the role as Principal Financial and Accounting Officer, Nanometrics entered into a 
Retention Bonus Agreement with him pursuant to which Mr. Swyt would receive a retention bonus of $50,000 provided that 
he remained employed by the company and performed his duties and responsibilities in a satisfactory manner, through February 
28, 2019.  Mr. Swyt met the objectives and the retention bonus was paid.

No other NEO entered into a Retention Bonus Agreement with Nanometrics, Rudolph or the Company.

Executive Officers

Set forth below is certain information regarding the executive officers of the Company and their ages as of March 31, 2020.
Information  relating  to  Michael  P.  Plisinski  is  set  forth  above  under  the  caption  “PROPOSAL  1  - ELECTION  OF 
DIRECTORS”    The  Company  is  unaware  of  any  arrangements  or  understandings  between  the  executive  officers  of  the 
Company and other person(s) pursuant to which an executive officer was or is to be selected, except that Mr. Plisinski was 
appointed as CEO of the Company pursuant to the Merger Agreement.

Named Executive Officers (NEOs)

Steven R. Roth    Senior Vice President, Finance and Administration and Chief Financial Officer    Age:  59

• Mr. Roth has served the Company in his current role since the Merger Date and previously served in the same role at

•

Rudolph since February 2002. 
Prior Experience:
◦ 

September 1996 to February 2002: Vice President, Finance and Administration and Chief Financial Officer, Rudolph 
Technologies, Inc.

◦  August 1991 to August 1996:  Director of Corporate Finance, Bell Communications Research.

• Mr. Roth is a C.P.A. and holds a B.S. in Accounting from Villanova University.

Rollin Kocher    Senior Vice President, Field Operations Age:  54

• Mr. Kocher has served the Company in his current role since the Merger Date and previously with Nanometrics as Senior 

•

Vice President, Sales and Marketing since January 2018. 
Prior Experience:
◦ 
◦  March 2013 to September 2016:  Vice President, Global Sales, Nanometrics Incorporated
◦ 

September 2016 to January 2018:  Senior Vice President, Commercial Operations, Nanometrics Incorporated

Prior to joining Nanometrics in 2013, Mr. Kocher spent thirteen (13) years at KLA Tencor Corporation in a variety 
of senior management roles including Director of Business Development for Films and Optical Critical Dimension 
Business  Unit, Senior  Account  Manager  for  Texas  Instruments  Business  Unit, his  last  position  being  General 
Manager of the Samsung Business Unit.

82

• Mr. Kocher holds a B.S. degree in Electrical and Electronic Engineering from the University of North Texas and an A.S. 
degree in Laser Electro Optics Technology from Texas State Technical College, holds a Finance for Senior Executives 
Certification from Harvard Business School and served in the U.S Army from 1983 to 1986.

Kevin Heidrich    Senior Vice President, Marketing & Corporate Development Age:  49

• Mr. Heidrich has served the  Company in his current role since the Merger Date and previously with Nanometrics as 

•

Senior Vice President, Corporate Development since January 2018.
Prior Experience:
◦ 

September 2012 to January 2018: Senior Vice President, Strategic Marketing & Business Development, Nanometrics 
Incorporated

◦  May 2009 to September 2012: Vice President, Business Development & Marketing, Nanometrics Incorporated
◦  May 2007 to May 2009: Sr. Director, Business Development, Nanometrics Incorporated
◦  April 2006 to May 2007: Director, New Product Development, Nanometrics Incorporated
◦ 

Prior to joining Nanometrics in 2006, Mr. Heidrich spent a decade at Intel Corporation in a variety of roles including 
in process research and development at Intel’s Technology Development facility.

• Mr. Heidrich holds a B.S. and M.S. degree from the Colorado School of Mines in Chemical Engineering.

Rodney Smedt    Senior Vice President & General Manager, Metrology Business Unit Age:  57

• Mr. Smedt has served the Company in his current role since the Merger Date and previously with Nanometrics as Senior 

•

Vice President, R&D since March 2018. 
Prior Experience:
◦  November 2014 to March 2018:  Vice President, R&D, Nanometrics Incorporated
◦  April 2005 to November 2014:  Vice President, Engineering, ReVera Incorporated
◦ 

Prior  to  2005,  Mr.  Smedt  served  as Vice  President,  Engineering  for  both Therma-Wave  Corporation  and  Sensys 
Instrument as well as held several senior management and engineering roles with several companies including KLA 
Tencor Corporation and Trigon-Adcotech Industries.   

• Mr. Smedt attended San Jose State University and studied mechanical engineering.

Greg Swyt    Vice President, Finance Age:  59

•

• Mr. Swyt has served the Company in his current role since the Merger Date and previously with Nanometrics in this role 
since August 2016 and as its Principal Financial Officer from December 5, 2017 until February 22, 2018 and from June 
26, 2018 to the Merger Date. 
Prior Experience:
◦ 
◦  April 2011 to June 2014:  Senior Director of Finance, Thin Film Equipment Group, Intevac, Inc.
◦  May 2008 to April 2011:  Senior Director of Finance, Intevac Photonics, Inc.
◦  November 2007 to February 2008:  Senior Director, Finance Operations and Planning, 2Wire, Inc.
◦ 

Prior to 2007, Mr. Swyt held several financial director roles with Hewlett Packard / Mercury Interactive and Applied 
Materials, Inc.

July 2013 to August 2016:  Managing Director of Finance, Global Finance Controller, Intevac, Inc.

• Mr. Swyt holds a B.S. in Finance and a M.S. in Business Administration, both from San Jose State University and served 

in the U.S. Navy from 1980 to 1984 and the U.S. Naval Reserves from 1984 to 1992.

Pierre-Yves Lesaicherre, Ph.D.    Former President, Chief Executive Officer & Director    Age: 56

•

•

•

Dr. Lesaicherre served Nanometrics as its President, Chief Executive Officer and Director from November 2017 until the 
Merger Date.
Prior Experience:
◦ 
◦  Prior to 2012, Dr. Lesaicherre held senior executive positions at NXP Semiconductors N.V. from 2006 to 2012 and 

January 2012 to February 2017:  Chief Executive Officer; Lumileds Holding B.V.

before NXP, Dr. Lesaicherre was with Philips Semiconductors.

Dr. Lesaicherre holds an MBA with a focus on international business and strategy from INSEAD and has MS and Ph.D. 
degrees in Material Science from the National Polytechnic Institute of Grenoble.

83

James Barnhart    Former Senior Vice President, Operations   Age:  57

• Mr. Barnhart served Nanometrics as its Senior Vice President, Operations from March 2018 until the Merger Date.
•

Prior Experience:
◦  April 2010 to March 2018:  Senior Vice President, Global Operations, Cymer Light Sources
◦  Mr. Barnhart left Applied Materials in 2006 to serve in senior operational roles at Johnson & Johnson and AREVA 

Solar as Senior Vice President, Global Operations.

◦  After completing U.S. Naval Nuclear Power postgraduate school, Mr. Barnhart spent 17 years with Applied Materials 
where he held progressively higher positions including Strategic Worldwide Account Operations General Manager, 
Chief Operating Officer of the etch products business group, and Managing Director of corporate asset services.

• Mr. Barnhart holds a B.S. in Electrical Engineering from Washington State University and an MBA from the University 

of California at Berkeley, Walter A. Haas School of Business.

Janet Taylor   Former General Counsel    Age:  62

Prior Experience:
◦ 
◦ 

• Ms. Taylor served Nanometrics as its General Counsel from July 2015 until the Merger Date.
•

June 2005 to June 2015:  Senior Vice President, General Counsel, STATS ChipPAC Ltd.
Prior to joining STATS ChipPAC Ltd., Ms. Taylor was engaged in transactional practices at international law firms 
in New York, Singapore and London.

• Ms. Taylor holds a J.D. from the Harvard Law School and a B.A. in History from the University of Texas at Austin and 

is admitted to practice in New York and in Singapore.

Other Executive Officers

Elvino da Silveira    Vice President & General Manager, Lithography Business Unit Age:  60

• Mr. da Silveira has served the Company in his current role has served the Company in his current role since the Merger 

•

Date and previously served in the same role at Rudolph since June 2019.
Prior Experience:
◦  August 2017 to June 2019:  Vice President, Business Development, Rudolph Technologies, Inc.
◦  November 2015 to July 2017: Vice President, Marketing and Product Management, Rudolph Technologies, Inc.
◦  December 2012 to October 2015:  Vice President and General Manager of the Display Products Lithography Business 

Unit and Chief Technical Officer of the Lithography Systems Group, Rudolph Technologies, Inc.

◦  March 1999 to December 2012:  President and Chief Executive Officer, Azores Corporation.
◦  Other prior roles included various senior management roles with the latest being Vice President of Operations and 
Worldwide Customer Support for MRS Technology, Inc., a former manufacturer of capital equipment for the flat 
panel display industry.

• Mr. da Silveira holds a B.S. in Mechanical Engineering from Northeastern University.

Robert Fiordalice    Vice President & General Manager, Wafer Business Unit    Age:  58

• Mr. Fiordalice has served the Company in his current role since the Merger Date and previously with Nanometrics as 

•

General Manager, Materials Characterization Group since August 2017.
Prior Experience:
◦  October 2013 to July 2017:  General Manager, Advanced Packaging, Nanometrics Incorporated
◦  August 2006 to August 2013:  Vice President, Account Technology, Intermolecular, Inc.
◦ 

Prior to 2006, Mr. Fiordalice held technology management roles with both KLA Tencor Corporation and Motorola 
Inc.

• Mr. Fiordalice holds a B.S. in Genetics from University of California at Berkley and a M.S. in Physics from Syracuse 

University.

Barry Hartunian    Global Vice President Human Resources  Age:  57

• Mr. Hartunian has served the Company in his current role since joining the Company in December 2019.
•

Prior Experience:

84

◦  October 2016 to May 2018:  Vice President, People & Culture, Toast, Inc.
◦  December 2013 to April 2016:  Chief People Officer, Veson Nautical Corporation
◦ 
◦ 

February 2010 to January 2014:  Chief Talent Officer/Advisor, Communispace Corporation
Prior roles since 1989 have included various director and vice-presidential roles in Human Resources for an array of 
companies including GenRad, Inc., Art Technology Group (ATG), Digimarc Corporation, Spotfire, Inc. and Vanue, 
Inc.

• Mr. Hartunian holds a B.A. in Psychology from Boston College and has received a Graduate Business Certification from 
Harvard University and an Executive Program Certification from the Tuck School of Business, Dartmouth College.

Dean Iacopetti    Vice President, Manufacturing Operations    Age:  64

• Mr. Iacopetti has served the Company in his current role since the Merger Date and previously with Nanometrics as Vice 

•

President, Supply Chain since September 2018.
Prior Experience:
◦  May 2013 to October 2015:  Vice President, EUV Operations, Cymer Inc., a subsidiary of ASML Holding N.V.
◦ 
◦  May 2009 to May 2011:  President, Paragon Prime Consulting
◦ 

Prior roles since 1979 have included various vice-presidential and senior vice-presidential roles in Operations and in 
Finance with Ingersoll Rand, Honeywell Aerospace and Mattel as well as other positions in Finance with Mattel.

June 2011 to May 2013:  Vice President, Supply Chain, Cymer Inc.

• Mr. Iacopetti holds a B.S. in Business Administration (Finance/Accounting) from California University at Long Branch.

Ju Jin, Ph.D. Vice President & General Manager, Inspection Business Unit    Age:  55

•
•

•

Dr. Jin has served the Company in his current role since the Merger Date and previously with Rudolph since July 2019.
Prior Experience:
◦  August 2016 to July 2019:  Sr. Director of Marketing & Business Development, Orbotech Ltd., a subsidiary of KLA 

Corporation.

◦  April 2009 to August 2016:  President and CEO, Applied Electro-Optics Inc.
◦  March 2004 to April 2009:  Director and General Manager, Accretech USA
Dr. Jin holds a B.S. from Xian Jiatong University in China, a M.S. from Nagaoka University of Technology in Japan and 
a Ph.D. from the University of Tokyo in Japan, all in Mechanical Engineering.

Robert A. Koch    Vice President & General Counsel    Age:  58

• Mr. Koch has served the Company in his current role since the Merger Date and previously with Rudolph since May 

•

2003.
Prior Experience:
◦  April 1986 to May 2003: In-house counsel, last serving as Director of Legal Affairs, Howmedica Osteonics Corp., 

the subsidiary of Stryker Corporation.

• Mr. Koch holds a B.S. in Chemical Engineering and a M.S. in Biomedical Engineering, both from Rutgers University. 
Mr. Koch earned his J.D. from Rutgers School of Law - Newark in 1991 and is admitted to practice in New Jersey and 
New York.

Leonard LaBua Vice President and General Manager, Enterprise Business Unit Age:  58

• Mr.  LaBua  has  served  the  Company  in  his  current  role  since  the  Merger  Date  and  previously  with  Rudolph  as Vice 

•

President & General Manager for its Integrated Solutions Group since October 2017.
Prior Experience:
◦  March 2013 to September 2017: Director of Customer Solutions, Rudolph Technologies, Inc.
◦ 
◦  Mr. LaBua also previously held positions with several other corporations including IBM, KLA-Tencor, and ADE 

Prior roles with Rudolph since 2006 included Sr. Manager Analysis Applications and Applications Manager.

Corporation. 

• Mr. LaBua holds a B.S. in Chemical Engineering from Worcester Polytechnic Institute and a M.S. in Computer Science 

from Marist College.

85

CEO Pay Ratio

As  required  by  Section  953(b)  of  the  Dodd-Frank  Wall  Street  Reform  and  Consumer  Protection Act,  and  Item  402(u)  of 
Regulation S-K, we are providing the following information about the relationship of the annual total compensation of our 
employees and the annual total compensation of Michael P. Plisinski, our CEO, following the 2019 Merger and former Rudolph 
CEO.

For 2019, our last completed year:

• The median of the annual total compensation of all employees of our Company (other than our CEO), was $97,617; and

• The annual total compensation for our CEO was $2,292,993(1).

(1) We had two individuals in the role of CEO during 2019. We elected to use the compensation of Mr. Plisinski, the active CEO as
of  December  31,  2019,  for  purposes  of  determining  the  CEO pay  ratio.  Mr.  Plisinski  became  CEO  on  the  Merger  Date.  In 
determining Mr.  Plisinski’s  annual  total  compensation,  we used  the  amount  reported  in  the  “Total”  column of  the Summary 
Compensation Table included in this proxy statement as adjusted for amounts earned by Mr. Plisinski during 2019 while serving 
as Rudolph’s CEO and to exclude compensation resulting from accelerated PSUs due to the 2019 Merger.  For further discussion 
refer to the footnotes to the Summary Compensation Table. 

Based  on  this  information,  the  ratio  of  the  annual  total  compensation  of  our  CEO  to  the  median  employee’s  annual  total 
compensation is 23 to 1.

This pay ratio is a reasonable estimate calculated in good faith, in a manner consistent with Item 402(u) of Regulation S-K, 
based on our payroll and employment records and the methodology described below. The Securities and Exchange Commission 
(“SEC”)  rules  for  identifying  the  “median  employee”  and  calculating  the  pay  ratio  based  on  that  employee’s  annual  total 
compensation  allow  companies  to  adopt  a  variety  of  methodologies,  to  apply  certain  exclusions,  and  to  make  reasonable 
estimates and assumptions that reflect their compensation practices. As such, the pay ratios reported by other companies may 
not  be  comparable  to  the pay  ratio  set forth  above,  as  other  companies  may  have different  employment  and  compensation 
practices and may utilize different methodologies, exclusions, estimates and assumptions in calculating their own pay ratios.

To identify the employee with the median of the annual total compensation of all our employees that is used for the year ended 
2019, we used the following methodology and made the following material assumptions, adjustments and estimates:

• We determined that as of December 31, 2019, our employee population consisted of approximately 1,300 individuals 
located  in  the  U.S.  and  in  countries  in  Europe  and  Asia.    This  population  consisted  of  our  full-time,  part-time  and 
temporary employees. We excluded a limited number of temporary agency employees and independent contractors, who 
are employees of, and whose compensation is determined by third parties unaffiliated with the Company and as such are 
not considered our employees for the purposes of the pay ratio calculation.

• To identify the “median employee” from our employee population, we used a consistently applied compensation measure 
which included annual salary as reflected in our payroll records including amounts paid by Rudolph to former Rudolph 
employees,  as  well  as  stock  awards  and  non-equity  incentive  plan  compensation  earned  in  2019,  which  was  our 
measurement period. We applied a foreign currency to U.S. dollar exchange rate to the compensation paid in foreign 
currency  and  we  did not  make  any  cost-of-living  adjustments.    We  selected  this  compensation  measure  because  it  is 
readily available in our existing payroll records and because it is a reasonable proxy for total compensation for purposes 
of determining the “median employee.” 

Once  we  identified  our  “median  employee,”  we  calculated  the  elements  of  such  employee’s  compensation  for  2019  in 
accordance with the requirements of Item 402(c)(2)(x) of Regulation S-K.  The median employee’s annual total compensation 
of $97,617 may include as applicable salary, stock awards and non-equity incentive plan compensation, as well as Company 
matching contributions to the 401(k) employee savings plan, and the cost of Company paid premiums associated with coverage 
under the group term life insurance and accidental death and dismemberment insurance plan. 

86

SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS

The following table sets forth certain information with respect to beneficial ownership of the Company’s Common Stock as of 
March 13, 2020 (except as otherwise indicated), by (i) each individual or group known by the Company to own beneficially 
more than five percent (5%) of the Common Stock; (ii) each of the NEOs; (iii) each of the Company’s directors and director 
nominees; and (iv) all directors, director nominees and executive officers as a group. Except as indicated in the footnotes to 
this table, the persons named in the table have sole voting and investment power with respect to all shares of Common Stock 
shown as beneficially owned by them, subject to community property laws where applicable.

Name and Address of Beneficial Owner
BlackRock, Inc. (3)

55 East 52nd Street, New York, NY 10055

The Wellington Group (4)

c/o Wellington Management Company LLP, 280 Congress Street, Boston, MA 02210

Dimensional Fund Advisors, LP (5)

Building One, 6300 Bee Cave Road, Austin, TX  78746

The Vanguard Group (6)

100 Vanguard Boulevard, Malvern, PA 19355

Michael P. Plisinski
Steven R. Roth
Rollin Kocher
Kevin Heidrich
Rodney Smedt
Greg Swyt
Pierre-Yves Lesaicherre, Ph.D. (7)
Janet Taylor (8)
James Barnhart (8)
Jeffrey A. Aukerman (9)
Leo Berlinghieri
Edward J. Brown, Jr.
Vita A. Cassese
Robert G. Deuster
David B. Miller
Bruce C. Rhine
Christopher A. Seams
Timothy J. Stultz, Ph.D.
Christine A. Tsingos
John R. Whitten
All directors and executive officers as a group (twenty (24) persons)

* Less than 1%

Amount and Nature of 
Beneficial Ownership(1)

Percent of Class(2)

8,099,875

16.1%

3,533,008

3,325,492

3,018,789

262,227
51,161
31,187
26,611
14,850
4,324
108,564
30,110
27,046
20,463
15,279
37,439
3,136
12,476
13,912
665,417
23,229
209,143
30,509
18,618
1,649,387

7.0%

6.6%

6.0%

*
*
*
*
*
*
*
*
*
*
*
*
*
*
*
1.3%
*
*
*
*
3.3%

(1)

Includes 27,543 shares subject to restricted stock units vesting within 60 days of March 13, 2020 for all directors and executive officers 
as a group.

(2) Applicable percentage ownership is based on 50,381,691 shares of Common Stock outstanding as of March 13, 2020. Beneficial 
ownership of shares is determined in accordance with the rules of the SEC and generally includes shares as to which a person holds 
sole or shared voting or investment power. Shares of Common Stock subject to RSUs which will vest within sixty (60) days of March 
13,  2020 are  deemed  to  be  beneficially  owned  by  the  person  holding  such  RSUs  for  the  purpose  of  computing  the  percentage 
ownership of such person but are not treated as outstanding for the purpose of computing the percentage ownership of any other 
person. Unless otherwise noted, the address for the stockholders named in this table is c/o Onto Innovation Inc., 16 Jonspin Road, 
Wilmington, Massachusetts 01887.
Information provided herein is based on the Schedule 13G/A that was filed by BlackRock, Inc. on February 4, 2020.
Information provided herein is based on the Schedule 13G/A that was filed by Wellington Management Group LLP, Wellington Group
Holdings LLP, Wellington Investment Advisors Holdings LLP and Wellington Management Company LLP on January 28, 2020.
Information provided herein is based on the Schedule 13G/A that was filed by Dimensional Fund Advisors LP on February 12, 2020.
Information provided herein is based on the Schedule 13G/A that was filed by The Vanguard Group on February 12, 2020.
Information provided herein is based on the Form 4/A that was filed on November 12, 2019.
Information provided herein is based on the Form 4 that was filed on October 29, 2019.
Includes shares held by Aukerman Investments LLC.

(5)
(6)
(7)
(8)
(9)

(3)
(4)

87

DELINQUENT SECTION 16(A) REPORTS

Section 16(a) of the Exchange Act requires the Company’s executive officers, directors and persons who own more than ten 
percent (10%) of a registered class of the Company’s equity securities to file an initial report of ownership on Form 3 and 
changes in ownership on Form 4 or Form 5 with the SEC. Based solely on its review of Section 16 filings made with the SEC, 
or written representations from certain reporting persons that no Section 16 filings were required, the Company believes that, 
during the year ended December 31, 2019 and through the record date of March 13, 2020, all officers, directors and greater 
than ten percent (10%) beneficial owners complied with all Section 16(a) filing requirements, except that Chun Hoy Chan, Ju 
Jin and Michael Plisinski each filed one Form 4 on October 30, 2019 on an untimely basis to report the conversion of Rudolph 
common stock and equity awards upon the consummation of the 2019 Merger on October 25, 2019

OTHER MATTERS

The Company knows of no other matters to be submitted to the Annual Meeting. If any other matters properly come before the 
Annual Meeting, it is the intention of the persons named in the enclosed Proxy to vote the shares they represent as the Board
of Directors may recommend.

ADDITIONAL INFORMATION

Stockholders may obtain a copy of the Company’s Annual Report on Form 10-K for the fiscal year ended December 31, 2019,
including  financial  statements  and  schedules  included  in  the Annual  Report  on  Form  10-K,  without charge,  by  visiting  the 
Company’s website at https://investors.ontoinnovation.com/ or by writing to:

Michael Sheaffer
Sr. Director, Investor Relations & Market Research
16 Jonspin Road
Wilmington, Massachusetts 01887

Upon written request to the Company, at the above address for Investor Relations, the exhibits set forth on the exhibit index of 
the  Company’s Annual  Report  on  Form  10-K  will  be  made  available  at  reasonable  charge  (which  will  be  limited  to  our 
reasonable expenses in furnishing such exhibits).

BY ORDER OF THE BOARD OF DIRECTORS

Robert A. Koch
Secretary

Dated: April 3, 2020

88

ONTO INNOVATION INC.

2020 STOCK PLAN

Appendix A

1.

Purposes of the Plan.  The purposes of this 2020 Stock Plan are: 

•
•
•

to attract and retain the best available personnel for positions of substantial responsibility, 
to provide additional incentive to Employees, Directors and Consultants, and 
to promote the success of the Company’s business.

The Plan  permits  the  grant  of  Incentive  Stock  Options,  Nonstatutory  Stock  Options,  Stock  Appreciation 

Rights, Restricted Stock, Restricted Stock Units, Performance Units and Performance Shares.

2.

Definitions.  As used herein, the following definitions shall apply:

(a)

“Administrator” means the Committee or the Board, as applicable.

(b)

“Affiliate” means any corporation or any other entity (including, but not limited to, partnerships and 

joint ventures) controlling, controlled by, or under common control with the Company.

(c)

“Applicable Laws” means any applicable law, including without limitation, provisions of the Code, 
the  Securities  Act of  1933,  as  amended,  the  Exchange  Act  and  any  rules  or  regulations  thereunder;  corporate, 
securities, tax or other laws, statutes, rules, requirements or regulations, whether federal, state or local; and rules of 
any  securities  exchange  or  automated  quotation  system  on  which  the  Stock  is  listed,  quoted  or  traded;  and  the 
applicable laws of any foreign country or jurisdiction where Awards are, or will be, granted under the Plan.

(d)

“Award”  means  a  grant  under  the  Plan  of  Options,  Stock  Appreciation  Rights,  Restricted  Stock, 

Restricted Stock Units, Shares pursuant to Section 4(e), Performance Units or Performance Shares.

(e)

“Award Agreement” means the written or electronic agreement setting forth the terms and provisions 
applicable to each Award granted under the Plan.  The Award Agreement is subject to the terms and conditions of 
the Plan.

(f)

“Board” means the Board of Directors of the Company.

(g)

“Cause” means, in the absence of any employment agreement then in effect between a Participant and 

the Company (or the Affiliate employing the Participant) otherwise defining Cause:

(i)

acts of personal dishonesty, gross negligence or willful misconduct on the part of a Participant 

in the course of his or her employment or services;

(ii)

a Participant’s engagement in conduct that results, or could reasonably be expected to result, in 

material injury to the reputation or business of the Company or its Affiliates;

(iii) misappropriation by a Participant of the assets or business opportunities of the Company or its 

Affiliates; 

(iv)

embezzlement or fraud committed by a Participant, or at his or her direction, or with his or her 

personal knowledge; 

A-1

(v)

a Participant’s conviction by a court of competent jurisdiction of, or pleading “guilty” or “no 

contest” to:

(A)

a felony (or its state law equivalent); or 

any  other  criminal  charge  (other  than  minor  traffic  violations)  that  has,  or  could  be 
reasonably expected to have, an adverse impact on the performance of the Participant’s duties to the Company or 
its Affiliates; or 

(B)

(vi)

failure by a Participant to follow the lawful directions of a superior officer or manager or the 

Board.

In the event there is then in effect an employment agreement between a Participant and the Company or Affiliate 
employing Participant defining Cause, “Cause” will have the meaning provided in such agreement.

(h)

“Change-in-Control” means the occurrence of any of the following events:

(i)

A change in the ownership of the Company which occurs on the date that any one person or 
more than one person acting as a group (“Person”) acquires ownership of the stock of the Company that, together 
with the stock held by such Person, constitutes more than fifty percent (50%) of the total voting power of the stock 
of the Company; provided, however, that for purposes of this subsection 2(h)(i), the acquisition of additional stock 
by any Person, who is considered to own more than fifty percent (50%) of the total voting power of the stock of the 
Company, will not be considered a Change-in-Control; or

(ii) A change in the effective control of the Company which occurs on the date that a majority of 
members of the Board is replaced during any twelve (12) month period by Directors whose appointment or election 
is not approved by a majority of the members of the Board prior to the date of the appointment or election.  For 
purposes  of  this  subsection  2(h)(ii),  if  any  Person  is  considered  to  be  in  effective  control  of  the  Company,  the 
acquisition of additional control of the Company by the same Person will not be considered a Change-in-Control; 
or

(iii) A change in the ownership of a substantial portion of the Company’s assets which occurs on the 
date that any Person acquires (or has acquired during the twelve (12) month period ending on the date of the most 
recent acquisition by such Person or Persons) assets from the Company that have a total gross fair market value 
equal to or more than fifty percent (50%) of the total gross fair market value of all of the assets of the Company 
immediately prior to such acquisition; provided, however, that for purposes of this subsection 2(h)(iii), the following 
will not constitute a change in the ownership of a substantial portion of the Company’s assets:

the transfer; or

(A)

a transfer to an entity that is controlled by the Company’s stockholders immediately after 

(B)

a transfer of assets by the Company to:

(1)

a stockholder of the Company (immediately before the asset transfer) in exchange 

for or with respect to the Company’s stock;

(2)

an entity, fifty percent (50%) or more of the total value or voting power of which 

is owned, directly or indirectly, by the Company;

(3)

a Person, that owns, directly or indirectly, fifty percent (50%) or more of the total 

value or voting power of all the outstanding stock of the Company; or

(4)

an entity, at least fifty percent (50%) of the total value or voting power of which is 

owned, directly or indirectly, by a Person described in subsection 2(h)(iii)(B)(3).

A-2

For purposes of this subsection 2(h)(iii), gross fair market value means the value of the assets of the Company, or 
the value of the assets being disposed of, determined without regard to any liabilities associated with such assets.

For purposes of this definition, “group” shall have the meaning under Section 13 of the Exchange Act.

In  the  event  that  this  Section  2(h)  is  inconsistent  with  the  definition  of  Change-in-Control  under 
Section  409A  of  the  Code  and  the  regulations  thereunder,  the  definition  under  Section  409A  of  the  Code  and 
regulations shall apply.

(i)

“Code” means the Internal Revenue Code of 1986, as amended.  Any reference to a section of the 

Code herein will be a reference to any successor or amended section of the Code.

(j)

“Committee” means the Compensation Committee of the Board or other committee appointed by the 
Board to administer the Plan, in either case, the composition of which shall at all times satisfy the provisions of 
Rule 16b-3 and applicable stock exchange rules, except that, if for any reason the Committee does not meet the 
requirements of Rule 16b-3, such noncompliance with the requirements of Rule 16b-3 shall not affect the validity 
of the Awards, interpretations or other actions of the Committee. If no committee of the Board has been established 
to administer the Plan, the Board shall exercise all of the powers of the Committee granted herein, and, in any event, 
the Board may in its discretion exercise any or all of such powers.

(k)

“Common Stock” means the common stock of the Company, $0.001 par value per share.

(l)
assigns. 

“Company” means Onto Innovation Inc., a Delaware corporation, and its Subsidiaries, successors and 

(m)

“Consultant” means any person, including an advisor, engaged by the Company or its Affiliates to 

render services to such entity.

(n)

“Director” means a member of the Board.

(o)

“Disability” means a determination that the Participant or Service Provider is unable to engage in any 
substantial  gainful  activity  by reason  of any medically  determinable physical or  mental impairment that  can  be 
expected to result in death or can be expected to last for a continuous period of not less than twelve (12) months, as 
determined  by  the  Administrator  upon  the  basis  of  such  evidence  as  the  Administrator  deems  appropriate  or 
necessary.  A determination that a Participant or Service Provider is eligible for full long-term disability under any 
long-term disability plan, as may then be in effect at the Company, will be conclusive evidence of Disability.

(p)

“Effective Date” has the meaning set forth in Section 18. 

(q)

“Employee” means any person, including Officers and Directors, employed by the Company or its 
Affiliates.  Neither service as a Director nor payment of a Director’s fee by the Company shall be sufficient to 
constitute “employment” by the Company.

(r)

(s)

“Exchange Act” means the Securities Exchange Act of 1934, as amended.

“Exchange Program” means a program, which may be applicable to a single Award or Participant or 

multiple Awards or Participants, under which, subject to stockholder approval thereof:

(i)

outstanding  Options  or  Stock  Appreciation  Rights  are  surrendered  or  cancelled  when  the 
exercise price per Share exceeds the Fair Market Value of one Share in exchange for Awards of the same type, 
Awards of a different type, and/or cash (other than in connection with a merger, acquisition or similar transaction);

(ii)

the exercise price of an outstanding Option or Stock Appreciation Right is reduced; and/or 

A-3

(iii)

any other action is taken with respect to an Award that would be treated as a repricing under the 

rules and regulations of the national securities exchange on which the Shares are then listed.

(t)

“Fair Market Value” means, as of any date, the value of Common Stock determined as follows:

(i)

If the Common Stock is listed on any established stock exchange or a national market system, 
including without limitation the New York Stock Exchange, its Fair Market Value shall be the closing sales price 
for such stock (or the closing bid, if no sales were reported) on such exchange or system on the day of determination, 
as reported in The Wall Street Journal or such other source as the Administrator deems reliable;

(ii)

If the Common Stock is regularly quoted by a recognized securities dealer but selling prices are 
not reported, the Fair Market Value of a Share of Common Stock shall be the mean between the high bid and low 
asked prices for the Common Stock on the day of determination, as reported in The Wall Street Journal or such 
other source as the Administrator deems reliable; or

(iii)

In the absence of an established market for the Common Stock, the Fair Market Value shall be 

determined in good faith by the Administrator.

(u)

“Family  Member”  means  any  child,  stepchild,  grandchild,  parent,  stepparent,  grandparent,  spouse, 
former spouse, sibling, niece, nephew, mother-in-law, father-in-law, son-in-law, daughter-in-law, brother-in-law, 
or sister-in-law (including adoptive relationships) of the Employee, any person sharing the Employee’s household 
(other than a tenant or employee), a trust in which these persons (or the Employee) have more than fifty percent 
(50%) of the beneficial interest, a foundation in which these persons (or the Employee) control the management of 
assets, and any other entity in which these persons (or the Employee) own more than fifty percent (50%) of the 
voting interests.

(v)

“Fiscal Year” means the fiscal year of the Company.

(w)

“Incentive Stock Option” means an Option intended to qualify as an incentive stock option within the 

meaning of Section 422 of the Code and the regulations promulgated thereunder.

(x)

(y)

“Nonstatutory Stock Option” means an Option not intended to qualify as an Incentive Stock Option.

“Officer” means a person who is an officer of the Company within the meaning of Section 16 of the 

Exchange Act and the rules and regulations promulgated thereunder.

(z)

“Option” means a stock option granted pursuant to the Plan.

(aa)

“Outside Director” means a Director who is not an Employee.

(bb)

“Parent” means a “parent corporation,” whether now or hereafter existing, as defined in Section 424(e) 

of the Code.

(cc)

“Participant” means the holder of an outstanding Award.

(dd)

“Performance Share” means an Award denominated in Shares which may be earned in whole or in 
part upon attainment of performance goals or other vesting criteria as the Administrator may determine pursuant to 
Section 10 and which may be settled for Shares.

(ee)

“Performance Period” shall have the meaning set forth in Section 10(b) of the Plan. 

(ff)

“Performance Unit” means an Award denominated in units, which may be earned in whole or in part 
upon attainment of performance goals or other vesting criteria as the Administrator may determine and which may 
be settled for cash, Shares or other securities or a combination of the foregoing pursuant to Section 10.

A-4

(gg)

“Period of Restriction” means the period during which the transfer of Shares of Restricted Stock is 
subject to restrictions, and therefore, the Shares are subject to a substantial risk of forfeiture.  Such restrictions may 
be based on the passage of time, the achievement of target levels of performance, or the occurrence of other events 
as determined by the Administrator, subject to Section 4(d) of the Plan.

(hh)

“Plan” means this 2020 Stock Plan.

(ii)

“Prior  Plans”  means  the  Nanometrics  Incorporated  2005  Equity  Incentive  Plan  and  the  Rudolph 

Technologies, Inc. 2018 Stock Plan.

(jj)

“Restricted Stock” means shares of Common Stock issued pursuant to Section 7 of the Plan subject to 

certain restrictions and risk of forfeiture.

(kk)

“Restricted  Stock  Unit”  means  a  bookkeeping  entry  representing  one  Share,  granted  pursuant  to 

Section 8.  Each Restricted Stock Unit represents an unfunded and unsecured obligation of the Company.

(ll)

“Rule 16b-3” means Rule 16b-3 of the Exchange Act or any successor to Rule l6b-3.

(mm) “Section 16(b)” means Section 16(b) of the Exchange Act.

(nn)

“Service Provider” means an Employee, Director or Consultant.

(oo)

“Share” means a share of the Common Stock, as may be adjusted in accordance with Section 14 of the 

Plan.

(pp)

“Specified  Employee” is  a  Participant  or  Service  Provider  who,  as  of  the  Participant's  or  Service 
Provider’s date of termination, is a key employee of the Company within the meaning of Section 416(i)(1)(A)(i), 
(ii), or (iii) of the Code (applied in accordance with the regulations thereunder and disregarding Section 416(i)(5)) 
at any time during the twelve (12) month period ending on a Specified Employee Identification Date. If a Participant 
or Service Provider is a key employee as of a Specified Employee Identification Date, the Participant or Service 
Provider is treated as a key employee for purposes of the Plan for the entire twelve (12) month period beginning on 
the Specified Employee Effective Date.  

(qq)

“Specified Employee Effective Date” is the date as set forth in Treasury Regulation Section 1.409A-

1(i)(4).

(rr)

“Specified Employee Identification Date” shall mean December 31 of each year. 

(ss)

“Stock Appreciation Right” means an Award, granted alone or in connection with an Option, that,

pursuant to Section 9, is designated as a Stock Appreciation Right.

(tt)

“Subsidiary”  means  a  “subsidiary  corporation”,  whether  now  or  hereafter  existing,  as  defined  in 

Section 424(f) of the Code.

(uu)

“Substitute Awards” has the meaning set forth in Section 3(e) of the Plan. 

3.

Stock Subject to the Plan.

(a)

Share Reserve. Subject to the provisions of Section 14 of the Plan, the maximum number of Shares 
that may be issued under the Plan is 3,500,000 Shares.  Upon the Effective Date, no further awards shall be granted 
under the Prior Plans. If, after the Effective Date, any Shares subject to awards granted under a Prior Plan would 
again become available for new awards under the terms of such plan if such plan were still in effect and without 
regard to any termination thereof, then those Shares will be available for the purpose of granting Awards under this 

A-5

Plan, thereby increasing the limit in the preceding sentence. The Shares issued pursuant to Awards under the Plan 
may be authorized, but unissued, or reacquired Common Stock.

(b)

Certain Adjustments to Share Reserve.

(i)

To the extent that an Award terminates, expires or becomes unexercisable without having been 
exercised in full, is surrendered pursuant to an Exchange Program approved by stockholders, or, with respect to 
Restricted Stock, Restricted Stock Units, Performance Units or Performance Shares, is terminated or forfeited in 
whole or in part due to failure to vest, the Shares (or for Awards other than Options or Stock Appreciation Rights, 
the forfeited Shares) which were subject to such terminated, expired, unexercised, surrendered or forfeited Award 
shall become available for future grant or issuance under the Plan. To the extent that the full number of Shares
subject  to  an  Award  of  Performance  Units,  Performance  Shares  or  other  Award  subject  to  performance-based 
vesting criteria is not issued by reason of failure to achieve maximum performance goals, the number of Shares not 
issued shall be shall become available for future grant or issuance under the Plan.

(ii) All Shares subject to a Stock Appreciation Right (not the number of net Shares actually issued 
pursuant to a Stock Appreciation Right upon any exercise) will be counted against the number of Shares available
for issuance under Section 3(a). 

(iii)

Shares used to pay the exercise price of an Award or to satisfy the tax withholding obligations 

related to an Award will not again become available for future grant or sale under the Plan. 

(iv) To the extent an Award under the Plan is paid out in cash rather than Shares, such cash payment 

will not result in reducing the number of Shares available for issuance under the Plan.

(v) Any dividend equivalent denominated in Shares will be counted against the number of Shares 
available for issuance under Section 3(a) in such amount and at such time as the dividend equivalent first constitutes 
an unconditional obligation to issue Shares.

(c)

Incentive Stock Option Limit. Notwithstanding the foregoing and, subject to adjustment as provided 
in Section 14, the maximum number of Shares that may be issued upon the exercise of Incentive Stock Options will 
equal the aggregate Share number stated in the first sentence of subsection 3(a) above, plus, to the extent allowable 
under  Section 422  of  the  Code  and  the  Treasury  Regulations  promulgated  thereunder,  any  Shares  that  become 
available for issuance under the Plan pursuant to Sections 3(a) and 3(b) above.

(d)

Individual Award Limits.

(i)

Outside Directors. For any calendar year, the value of Awards granted to an individual Outside 
Director may not exceed $600,000, calculating the value of any such Awards based on the grant date fair value of 
such Awards for financial reporting purposes. 

(ii) All  Service  Providers  Other  than  Outside  Directors.  For  any  calendar  year, the  value  of  all 
Awards granted to any individual Service Provider other than an Outside Director may not exceed $5,000,000, 
calculating the value of any such Awards based on the grant date fair value of such Awards for financial reporting 
purposes.  Notwithstanding the foregoing, any Award of Performance Units or Performance Shares or any other 
Award  subject  to  performance-based  vesting  criteria  shall  be  taken  into  account  assuming  target  performance
achievement under the terms of such Award for purposes of applying this annual limit.

(e)

Substitute Awards.

(i)

In connection with an entity’s merger or consolidation with the Company or any Subsidiary or 
the direct or indirect acquisition by the Company or any Subsidiary of an entity’s property or stock, the Committee 
may grant Awards in substitution or exchange for any options or other stock or stock-based awards granted before 
such merger or consolidation by such entity or its affiliate (“Substitute Awards”). Substitute Awards may be granted 

A-6

on such terms and conditions as the Committee deems appropriate, notwithstanding any limitations on Awards in 
the Plan, including, but not limited to, the limitation under Section 4(d). Substitute Awards will not count against 
the aggregate Share reserve in Section 3(a), except that Shares acquired by exercise of substitute Incentive Stock 
Options will count against the maximum number of Shares that may be issued pursuant to the exercise of Incentive 
Stock Options under the Plan. 

(ii) Additionally, in the event that a company acquired by the Company or any Subsidiary, or with 
which the Company or any Subsidiary combines by merger, consolidation or otherwise, has shares available under 
a  pre-existing  plan  approved  by  its  stockholders  and  not  adopted  in  contemplation  of  such  acquisition  or 
combination as determined by the Administrator, the shares available for grant pursuant to the terms of such pre-
existing plan (as appropriately adjusted to reflect the transaction) may be used for Awards under the Plan and shall 
not reduce the Shares authorized for grant under the Plan under Section 3(a) (and shares subject to such Awards, 
which, for the avoidance of doubt, excludes Substitute Awards, may again become available for Awards under the 
Plan as provided under Section 3(b) above); provided that Awards using such available Shares (or any Shares that 
again  become  available for  issuance  under the  Plan  under  Section 3(b)  above)  shall  not  be made  after the date 
awards  or  grants  could  have  been  made  under  the  terms  of  the  pre-existing  plan  absent  the  acquisition  or 
combination, and shall only be made to individuals who were employees or directors of such acquired or combined 
company or any of its subsidiaries prior to such acquisition or combination.

4.

Administration of the Plan.

(a)

Powers of the Administrator.  Subject to the provisions of the Plan, the Administrator shall have the 

authority, in its discretion:

(i)

to determine the Fair Market Value;

(ii)

to select the Service Providers to whom Awards may be granted hereunder;

(iii)

to determine the number of Shares to be covered by each Award granted hereunder;

(iv)

to approve forms of Award Agreements for use under the Plan;

(v)

to determine the terms and conditions, not inconsistent with the terms of the Plan, of any Award 
granted hereunder.  Such terms and conditions may include, but are not limited to, the exercise price; the vesting 
period of Awards or the time or times when Awards may be exercised (which may be based in whole or in part on 
performance criteria), which shall be established in accordance with Section 4(d); any vesting acceleration or waiver 
of forfeiture restrictions (notwithstanding Section 4(d) to the contrary); any restriction or limitation regarding any 
Award or the Shares relating thereto and any and all other Award terms and conditions;

(vi)

to interpret, construe and administer the Plan and Awards granted pursuant to the Plan, including 
the adoption of rules, modifications, procedures and sub-plans as may be necessary or desirable for administration 
of the Plan, including for purposes of granting Awards to Participants in foreign countries and qualifying any such 
Awards for preferential tax treatment under Applicable Law; the Administrator may correct any defect or supply 
any  omission  or  reconcile  any  inconsistency  in  the  Plan  or  in  any  Award  in  the  manner  and  to  the  extent  the 
Administrator deems necessary or desirable to carry it into effect. Any action or decision of the Administrator in 
the interpretation or administration of the Plan, as described herein, shall be within its sole and absolute discretion 
and shall be final, conclusive and binding on all parties concerned; 

(vii)

to prescribe, amend and rescind rules and regulations relating to the Plan, including rules and 

regulations relating to sub-plans established for the purpose of satisfying applicable foreign laws;

(viii) to modify or amend each Award (subject to Section 19 of the Plan), including, but not limited 
to, the discretionary authority to extend the post-termination exercisability or vesting period of Awards (but in no 
event shall such period of exercisability be extended beyond the expiration of the term of the Award);

A-7

(ix)

to allow Participants to satisfy withholding tax obligations in such a manner as prescribed in 

Section 15;

(x)

to authorize any person to execute on behalf of the Company any instrument required to effect 

the grant of an Award previously granted by the Administrator;

(xi)

delegate  to  a  committee  of  one  or  more  Outside  Directors  or,  to  the  extent  permitted  by 
Applicable Law, to one or more officers or a committee of officers, the authority to grant Awards to, and to cancel 
or  take  any  other  action in  respect  of,  any  Awards  to  Employees  or  Consultants  of  the  Company  who  are  not 
Directors or Officers; 

(xii)

to allow a Participant to defer the receipt of the payment of cash or the delivery of Shares that 
would otherwise be due to such Participant under an Award, subject to compliance with Section 409A of the Code; 
and

(xiii) to make all other determinations deemed necessary or advisable for administering the Plan.

Notwithstanding the foregoing, other than pursuant to Section 14, no Exchange Program may be implemented 

by the Administrator without the prior approval of the Company’s stockholders.  

(b)

Effect of Administrator’s Decision.  All decisions, determinations, interpretations or actions of the 
Administrator  made  or  taken  pursuant  to  grants  of  authority  under  the Plan  shall  be  made  or  taken  in  the  sole 
discretion of the  Administrator and  shall  be final,  conclusive and  binding  on  all persons  for  all  purposes.   The 
Administrator’s decisions and determinations under the Plan need not be uniform and may be made selectively 
among Participants, whether or not such Participants are similarly situated.

(c)

No Liability.  Under no circumstances shall the Company, its Affiliates, the Administrator, the Board, 
any  Director  or  any  Officer  of  the  Company  incur  any  liability,  including  for  any  direct,  indirect,  incidental, 
consequential or special damages (including lost profits) of any form, whether or not foreseeable, with respect to 
the Plan or the Company’s, its Affiliates’, the Administrator’s, the Board’s or any Director’s or Officer’s roles, acts, 
omissions, determinations or interpretations in connection with the Plan or any Award.

(d) Minimum Vesting. All Awards granted to all Participants under the Plan shall be subject to a minimum 
vesting period of not less than one year from the date of grant; provided, however, the Administrator may provide 
for the grant of Awards to Participants without regard to the foregoing minimum vesting requirement with respect 
to a maximum of five percent (5%) of the total number of Shares authorized for issuance under the Plan pursuant 
to Section 3(a), as may be adjusted under Section 14(a).   

5.
Eligibility.  Nonstatutory Stock Options, Restricted Stock, Restricted Stock Units, Performance Units, and 
Performance  Shares  may  be  granted  to  Service  Providers.    Incentive  Stock  Options  may  be  granted  only  to 
employees of the Company or any Parent or Subsidiary of the Company.

6.

Stock Options.

(a)

Limitations.  Each Option shall be designated in the Award Agreement as either an Incentive Stock 
Option or a Nonstatutory Stock Option.  However, notwithstanding such designation, to the extent that the aggregate 
Fair Market Value of the Shares with respect to which Incentive Stock Options are exercisable for the first time by 
the Participant during any calendar year (under all plans of the Company and any Parent or Subsidiary) exceeds one 
hundred thousand dollars ($100,000), such Options shall be treated as Nonstatutory Stock Options.  For purposes 
of this subsection 6(a), Incentive Stock Options shall be taken into account in the order in which they were granted.  
The Fair Market Value of the Shares shall be determined as of the time the Option with respect to such Shares is 

A-8

granted. No dividends or dividend equivalents may be granted in respect of any Option, and holders of Options 
carry no voting rights.

(b)

Term of Option.  The term of each Option shall be stated in the Award Agreement.  In the case of an 
Incentive Stock Option, the term shall be ten (10) years from the date of grant or such shorter term as may be 
provided in the Award Agreement.  Moreover, in the case of an Incentive Stock Option granted to a Participant 
who, at the time the Incentive Stock Option is granted, owns stock representing more than ten percent (10%) of the 
total combined voting power of all classes of stock of the Company or any Parent or Subsidiary, the term of the 
Incentive Stock Option shall be five (5) years from the date of grant or such shorter term as may be provided in the 
Award Agreement.  In the case of a Nonqualified Stock Option, the term shall be ten (10) years from the date of 
grant or such shorter term as may be provided in the Award Agreement.  

(c)

Option Exercise Price and Consideration.

(i)

Exercise Price.  The per share exercise price for the Shares to be issued pursuant to exercise of 
an Option shall be determined by the Administrator, but will be no less than one hundred percent (100%) of the 
Fair Market Value per Share on the date of the grant.  In addition, in the case of an Incentive Stock Option granted 
to an employee of the Company or any Parent or Subsidiary of the Company who, at the time the Incentive Stock 
Option is granted, owns stock representing more than ten percent (10%) of the voting power of all classes of stock 
of the Company or any Parent or Subsidiary, the per Share exercise price shall be no less than one hundred ten 
percent (110%) of the Fair Market Value per Share on the date of grant.

(ii) Vesting Period.  At the time an Option is granted, the Administrator shall fix the period within 
which the Option may be exercised and shall determine any conditions that must be satisfied before the Option may 
be exercised.  Any vesting period shall be established in accordance with Section 4(d) of the Plan.

(d)

Exercise of Option.

(i)

Procedure  for  Exercise;  Rights  as  a  Stockholder.    Any  Option  granted  hereunder  shall  be 
exercisable according to the terms of the Plan and the Award Agreement and at such times and under such conditions
as determined by the Administrator and set forth in the Award Agreement.  An Option may not be exercised for a 
fraction of a Share.

An Option shall be deemed exercised when the Company receives: 

the person entitled to exercise the Option, and

(A)

notice of exercise (in such form as the Administrator may specify from time to time) from 

applicable withholding taxes).  Full payment shall be made:

(B)

full payment for the Shares with respect to which the Option is exercised (together with 

(1)
immediately available funds;

in  cash or  by  personal  check,  certified  check  or  bank  check  or  wire  transfer  of 

other Shares provided that such Shares have a Fair Market Value on the date of 
surrender equal to the aggregate exercise price of the Shares as to which said Option is exercised, provided that 
accepting such Shares will not result in any adverse accounting consequences to the Company, as the Administrator 
determines in its sole discretion;

(2)

by  delivery  of  a  properly  executed  exercise  notice  together  with  any  other 
documentation as the Administrator and the Participant’s broker, if applicable, require to effect an exercise of the 
Option and delivery to the Company of the sale or other proceeds (as permitted by Applicable Law) required to pay 
the exercise price;

(3)

A-9

Option (“net exercise”);

(4)

by withholding  Shares otherwise issuable in connection  with  the exercise  of the 

in its discretion or permitted by the Award Agreement, the Plan and Applicable Law; or

(5)

such other consideration and method of payment authorized by the Administrator 

(6)

any combination of the foregoing methods of payment.

Shares  issued upon  exercise  of  an  Option  shall  be issued  in the name  of  the  Participant  or,  if  requested  by  the 
Participant, in the name of the Participant and his or her spouse.  Until the Shares are issued (as evidenced by the 
appropriate entry on the books of the Company or of a duly authorized transfer agent of the Company), no right to 
vote or receive dividends or any other rights as a stockholder shall exist with respect to the Shares subject to an 
Option, notwithstanding the exercise of the Option.  The Company shall issue (or cause to be issued) such Shares 
promptly after the Option is exercised.  No adjustment will be made for a dividend or other right for which the 
record date is prior to the date the Shares are issued, except as provided in Section 14 of the Plan.

Exercising an Option in any manner shall decrease the number of Shares thereafter available under 

the Option by the number of Shares as to which the Option is exercised.

(ii)

Termination  of  Relationship  as  a  Service  Provider.    If  a  Participant  ceases  to  be  a  Service 
Provider, other than for Cause or due to the Participant’s death or Disability, the Participant may exercise his or her 
Option within such period of time as is specified in the Award Agreement to the extent that the Option is vested on 
the date of termination (but in no event later than the expiration of the term of such Option as set forth in the Award 
Agreement).  In the absence of a specified time in the Award Agreement, any vested portion of the Option shall 
remain  exercisable  for  three  (3)  months  following  the  Participant’s  termination  (but  in  no  event  later  than  the 
expiration of the term of such Option as set forth in the Award Agreement).  Unless otherwise provided by the
Administrator or in the Award Agreement, if on the date of termination, the Participant is not vested as to all or any 
portion of his or her Option, the unvested portion of the Option shall terminate.  If after termination, the Participant 
does not exercise his or her Option within the time period specified by the Administrator or in the Award Agreement, 
the Option shall terminate at the end of such period.

(iii) Disability  of  Participant.    If  a  Participant  ceases  to  be  a  Service  Provider  as  a  result  of  the 
Participant’s Disability, the Participant may exercise his or her Option within such period of time as is specified in 
the Award Agreement to the extent the Option is vested on the date of termination (but in no event later than the 
expiration of the term of such Option as set forth in the Award Agreement).  In the absence of a specified time in 
the Award Agreement, any vested portion of the Option shall remain exercisable for twelve (12) months following 
the Participant’s termination (but in no event later than the expiration of the term of such Option as set forth in the 
Award Agreement).  Unless otherwise provided by the Administrator or in the Award Agreement, if on the date of 
termination the Participant is not vested as to all or any portion of his or her Option, the unvested portion of the 
Option shall terminate.  If after termination the Participant does not exercise his or her Option within the time period
specified by the Administrator or in the Award Agreement, the Option shall terminate at the end of such period.

(iv) Death of Participant.  If a Participant dies while a Service Provider, the Option may be exercised 
following the Participant’s death within such period of time as is specified in the Award Agreement to the extent 
that the Option is vested on the date of death (but in no event later than the expiration of the term of such Option as 
set forth in the Award Agreement).  In the absence of a specified time in the Award Agreement, any vested portion 
of the Option shall remain exercisable for twelve (12) months following the Participant’s death (but in no event 
later than the expiration of the term of such Option as set forth in the Award Agreement).  The Option may be 
exercised  by  the  Participant’s  designated  beneficiary,  provided  such  beneficiary  has  been  designated  prior  to 
Participant’s death in a form acceptable by the Administrator.  If no such beneficiary has been designated by the 
Participant, then such Option may be exercised by the personal representative of the Participant’s estate or by the 
person or persons to whom the Option is transferred pursuant to the Participant’s will or in accordance with the 
laws of descent and distribution.  Unless otherwise provided by the Administrator or in the Award Agreement, if at 
the time of death the Participant is not vested as to all or any portion of his or her Option, the unvested portion of 
A-10

the Option shall terminate.  If the Option is not so exercised within the time period specified by the Administrator 
or in the Award Agreement, the Option shall terminate at the end of such period.

(v)

Termination for Cause.  If a Participant’s status as a Service Provider is terminated for Cause, 

then the Option, whether vested or unvested, will immediately terminate upon such termination.

7.

Restricted Stock.

(a)

Grant of Restricted Stock.  Subject to the terms and provisions of the Plan, the Administrator, at any 
time and from time to time,  may  grant  Shares  of  Restricted  Stock  to  Service  Providers  in  such  amounts as  the 
Administrator, in its sole discretion, will determine.

(b)

Restricted  Stock  Agreement.    Each  Award  of  Restricted  Stock  will  be  evidenced  by  an  Award 
Agreement that will specify the Period of Restriction, which shall be established in accordance with Section 4(d) 
of the Plan; the number of Shares granted; and such other terms and conditions as the Administrator, in its sole 
discretion, will determine. Unless the Administrator determines otherwise, the Company (or its designee) as escrow 
agent will hold Shares of Restricted Stock (or a stop-transfer restriction will be placed on any Shares of Restricted 
Stock issued in book-entry form) until the restrictions on such Shares have lapsed.

(c)

Transferability.  Except as provided in this Section 7 and Section 13, Shares of Restricted Stock may 
not be sold, transferred, pledged, assigned, or otherwise alienated or hypothecated until the end of the applicable 
Period of Restriction.

(d) Other Restrictions.  The Administrator, in its sole discretion, may impose such other restrictions on 

Shares of Restricted Stock as it may deem advisable or appropriate.

(e)

Removal of Restrictions.  Except as otherwise provided in this Section 7, Shares of Restricted Stock 
granted under the Plan will be released from these restrictions as soon as practicable after the last day of the Period 
of Restriction, as provided in the Award Agreement or at such other time as the Administrator may determine.  
Notwithstanding the foregoing, the Administrator is authorized, in its sole discretion, to allow participants to cause 
their  otherwise  vested  Restricted  Stock  to  be  deferred  pursuant  to  the  terms  of  any  nonqualified  deferred 
compensation  program  as  may  be  established  by  the  Company  from  time  to  time  in  its  discretion  for  eligible 
employees or Directors. Notwithstanding any provision of the Plan to the contrary, including but not limited to 
Section 4(d), in the event of the death, Disability, retirement or other termination of service of a Service Provider 
or a Change-in-Control, the Administrator, in its discretion, may accelerate or otherwise modify the time at which 
any restrictions will lapse or be removed.  

(f)

Voting  Rights.    During  the  Period  of  Restriction,  Participants  holding  Shares  of  Restricted  Stock 
granted hereunder may exercise full voting rights with respect to those Shares, unless the Administrator determines 
otherwise.

(g) Dividends. The Administrator may, in its sole discretion, provide that Awards of Restricted Stock 
earn dividends paid with respect to such Shares. Any such dividends shall be accumulated and credited to an account 
for the Participant, settled in cash or shares of Stock as determined by the Administrator, and shall be subject to the 
same terms and conditions, including vesting restrictions, as the Award with respect to which the dividends are 
credited. The Administrator may determine that any dividends so credited to a Participant’s account shall accrue 
interest at a rate per annum specified by the Administrator. Any credited dividends and accrued interest, if any, 
shall be paid as soon as administratively practicable following the time the related shares of Restricted Stock vest 
and are paid to the Participant. For the avoidance of doubt, no dividends or accrued interest, if any, may be paid 
before the underlying Restricted Stock vests, and to the extent an Award of Restricted Stock is terminated, cancelled 
or forfeited in  whole  or  in  part, due  to  failure to meet  performance  conditions or  otherwise, any dividends  and 
accrued interest, if any, credited with respect to such Award shall be terminated, cancelled or forfeited at the same 
time and to the same extent as such Award.

A-11

(h)

Termination of Restricted Stock Award.  On the date set forth in, and otherwise subject to the terms 
and  conditions  of,  the  Award  Agreement  or  as  provided  by  the  Administrator, the  Restricted  Stock  for  which 
restrictions have not lapsed will be forfeited to the Company.

8.

Restricted Stock Units.

(a)

Grant.  Restricted Stock Units may be granted at any time and from time to time as determined by the 
Administrator.  After the Administrator determines that it will grant Restricted Stock Units under the Plan, it will 
advise the Participant in an Award Agreement of the terms, conditions, and restrictions related to the grant, including 
the number of Restricted Stock Units.

(b) Vesting  Criteria  and  Other  Terms.    The  Administrator  will  set  the  vesting  period,  which  shall  be 
established in accordance with Section 4(d) of the Plan, and the vesting criteria in its discretion, which may be 
service-based and/or performance-based vesting criteria.  The Administrator may set vesting criteria based upon 
the  achievement  of  Company-wide,  business  unit,  or  individual  goals  (including,  but  not  limited  to,  continued 
employment), or any other basis determined by the Administrator in its discretion.  

(c)

Earning Restricted Stock Units.  Upon meeting the applicable vesting criteria, the Participant will be 
entitled to receive a payout as determined by the Administrator.  Notwithstanding any provision of the Plan to the 
contrary,  including  but  not  limited  to  Section  4(d),  in  the  event  of  the  death,  Disability,  retirement  or  other 
termination of service of a Service Provider or a Change-in-Control at any time after the grant of Restricted Stock 
Units, the Administrator, in its sole discretion, may reduce or waive any vesting criteria that must be met to receive 
a payout.

(d)

Form and Timing of Payment.  Payment of earned Restricted Stock Units will be made as soon as 
practicable, and in no event later than sixty (60) days, after the date(s) set forth in, and otherwise subject to the 
terms and conditions of, the Award Agreement or as provided by the Administrator.  The Administrator, in its sole 
discretion, may settle earned Restricted Stock Units in cash, Shares, or a combination of both, as provided in the 
Award  Agreement.    Notwithstanding  the  foregoing  to  the  contrary,  the  Administrator  is  authorized,  in  its  sole 
discretion from time to time, to allow participants to further defer receipt of the Shares or cash issued in settlement 
of  Restricted  Stock  Units pursuant  to the  terms  of  any  nonqualified deferred compensation  program as may be 
established by the Company from time to time in its discretion for eligible employees or Directors.  

(e)

Cancellation.  On the date set forth in, and otherwise subject to the terms and conditions of, the Award 
Agreement or as provided by the Administrator, all unearned Restricted Stock Units will be terminated and forfeited 
to the Company.

(f)

Dividend Equivalents. The Administrator is authorized to grant to Participants dividend equivalents 
based  on  the  dividends  declared  on  Shares  that  are  subject  to  any  outstanding  Restricted  Stock  Unit.    Unless 
otherwise provided by the Administrator or in the Award Agreement, for an Award of Restricted Stock Units that 
is subject to performance-based vesting conditions, dividend equivalents shall be accrued only with respect to the 
target number of Restricted Stock Units, and additional dividend equivalents will not be earned for any Restricted 
Stock Units earned in excess of target.  Dividend equivalents shall be credited as of dividend payment dates during 
the  period  between  the  date  the  Restricted  Stock  Unit  Award is granted  and  the  date  the  Restricted  Stock Unit 
Award  is  vested,  paid  or  expired.  Such  dividend  equivalents  shall  be  converted  to  cash,  Shares  or  additional 
Restricted Stock Units by such formula and at such time and subject to such limitations as may be determined by 
the  Administrator.  Dividend  equivalents  accruing  on  unvested  Restricted  Stock  Units  shall,  as  provided  in  the 
Award Agreement, either (i) be reinvested in the form of additional Shares, which shall be subject to the same 
vesting provisions as provided for in the Restricted Stock Unit Award or (ii) be held by the Company under the 
same vesting provisions in an account allocated to the Participant and accumulated, with or without interest in the 
Administrator’s discretion, until the date upon which the Restricted Stock Unit Award becomes vested. For the 
avoidance of doubt, no dividend equivalents or accrued interest, if any, may be paid before the underlying Restricted
Stock Units vest, and to the extent an Award of Restricted Stock Units is terminated, cancelled or forfeited in whole 
or in part, due to failure to meet performance conditions or otherwise, any dividend equivalents and accrued interest,
A-12

if any, credited with respect to such Award shall be terminated, cancelled or forfeited at the same time and to the 
same extent as such Award.

9.

Stock Appreciation Rights.

(a)

Grant  of  Stock  Appreciation  Rights.    Subject  to  the  terms  and  conditions  of  the  Plan,  a  Stock 
Appreciation Right may be granted to Service Providers at any time and from time to time as determined by the 
Administrator, in its sole discretion. No dividends or dividend equivalents may be granted in respect of any Stock 
Appreciation Right, and holders of Stock Appreciation Rights carry no voting rights.

(b) Number of Shares.  The Administrator will have complete discretion to determine the number of Stock 

Appreciation Rights granted to any Service Provider.

(c)

Exercise Price and Other Terms.  The per share exercise price for the Shares to be issued pursuant to 
exercise of a Stock Appreciation Right will be determined by the Administrator and will be no less than one hundred 
percent (100%) of the Fair Market Value per Share on the date of grant.  Otherwise, the Administrator, subject to 
the  provisions  of  the  Plan,  will  have  complete  discretion  to  determine  the  terms  and  conditions  of  Stock 
Appreciation Rights granted under the Plan. Any vesting period for a Stock Appreciation Right shall be established 
in accordance with Section 4(d) of the Plan.

(d)

Stock Appreciation Right Agreement.  Each Stock Appreciation Right grant will be evidenced by an 
Award Agreement that will specify the exercise price, the term of the Stock Appreciation Right, the conditions of 
exercise, and such other terms and conditions as the Administrator, in its sole discretion, will determine.

(e)

Expiration of Stock Appreciation Rights.  A Stock Appreciation Right granted under the Plan will 
expire upon the date determined by the Administrator, in its sole discretion, and set forth in the Award Agreement 
or as provided by the Administrator.  Notwithstanding the foregoing, Stock Appreciation Rights shall be subject to 
a maximum term of ten (10) years and to the provisions of subsection 6(d) relating to exercise.

(f)

Payment  of  Stock  Appreciation  Right  Amount.    Upon  exercise  of  a  Stock  Appreciation  Right,  a 

Participant will be entitled to receive payment from the Company in an amount determined by multiplying:

(i)

The  difference  between  the  Fair  Market  Value  of  a  Share  on the  date  of  exercise  over  the 

exercise price; times

(ii)

The number of Shares with respect to which the Stock Appreciation Right is exercised.

As provided in the Award Agreement or except as otherwise determined by the Administrator, the 
payment to the Participant upon exercise of a Stock Appreciation Right may be in cash, in Shares of equivalent 
value, or in some combination thereof.

10.

Performance Units and Performance Shares.

(a)

Grant of Performance Units and/or Performance Shares.  Performance Units and Performance Shares 
may be granted to Service Providers at any time and from time to time, as determined by the Administrator, in its 
sole discretion.  The Administrator will have complete discretion in determining the number of Performance Units 
and Performance Shares granted to each Participant.  The Administrator may, in its sole discretion, provide that 
Awards of Performance Shares and Performance Units earn dividends or dividend equivalents, as applicable, in 
accordance with, and subject to the restrictions of, Section 7(g) and Section 8(f), respectively.  For the avoidance of 
doubt, no dividends or dividend equivalents or accrued interest, if any, earned with respect to a Performance Unit Award or a
Performance Share Award may be paid before the underlying Award vests, and to the extent an Award of Performance Units 
or Performance Shares is terminated, cancelled or forfeited in whole or in part, due to failure to meet performance conditions
or otherwise, any dividends, dividend equivalents and accrued interest if any, credited with respect to such Award shall be 
terminated, cancelled or forfeited at the same time and to the same extent as such Award.

A-13

(b)

Performance Objectives and Other Terms.  The Administrator will set performance objectives and/or 
other  vesting  provisions  (including,  without  limitation,  continued  status  as  a  Service  Provider)  in  its  discretion 
which, depending on the extent to which they are met, will determine the number or value of Performance Units or 
Performance Shares that will be paid out to the Service Providers.  The time period during which the performance 
objectives  or  other  vesting  provisions  must  be  met  will  be  called  the  “Performance  Period.”    Each  Award  of 
Performance  Units  and  Performance  Shares  will  be  evidenced  by  an  Award  Agreement  that  will  specify  the 
Performance Period, vesting period (which shall be established in accordance with Section 4(d)) and such other 
terms  and  conditions  as  the  Administrator,  in  its  sole  discretion,  will  determine.    The  Administrator  may  set 
performance objectives, which may be based on financial, strategic or operational goals or any other performance 
goals or metrics determined by the Administrator in its discretion.  Such performance objectives may be based upon 
the achievement of Company-wide, divisional, or individual goals, measured on an absolute or relative basis, or 
any other goals, metrics or bases determined by the Administrator in its discretion.

(c)

Earning of Performance Units and Performance Shares.  After the applicable Performance Period has 
ended, the holder of Performance Units or Performance Shares will be entitled to receive a payout of the number of 
Performance Units or Performance Shares earned by the Participant over the Performance Period, to be determined 
as a function of the extent to which the corresponding performance objectives or other vesting provisions have been 
achieved,  as  determined  by  the  Committee.    After  the  grant  of  a  Performance  Units  or  Performance  Shares, 
notwithstanding  any  provision  of the  Plan  to  the  contrary,  including  but  not  limited  to  Section  4(d),  the 
Administrator may, in its sole discretion, reduce or waive any performance objectives or other vesting provisions 
for such Performance Unit or Performance Share.

(d)

Form  and  Timing  of  Payment  of  Performance  Units  and  Performance  Shares.    Payment  of  earned 
Performance Units and Performance Shares will be made as soon as practicable after the expiration of the applicable 
Performance Period, and in no event later than sixty (60) days after the date(s) set forth in, and otherwise subject to 
the terms and conditions of, the Award Agreement or as provided by the Administrator.  The Administrator, in its 
sole discretion, may pay earned Performance Units and Performance Shares in the form of cash, in Shares, or a 
combination thereof.

(e)

Cancellation of Performance Units and Performance Shares.  On the date set forth in, and otherwise 
subject to the terms and conditions of, the Award Agreement or as otherwise provided by the Administrator, all 
unearned or unvested Performance Units and Performance Shares will be forfeited to the Company.

11.

Compliance With Code Section 409A.

(a)

Awards are intended to operate in a manner that they are either exempt from the application of, or 
comply with, the requirements of Code Section 409A such that the grant, payment, settlement or deferral will not 
be subject to the additional tax or interest applicable under Code Section 409A, except as otherwise determined in 
the sole discretion of the Administrator, provided no warranty of such compliance or exemption is hereby made.
The Plan and each Award Agreement under the Plan is intended to meet the requirements of Code Section 409A 
and will be construed and interpreted in accordance with such intent, except as otherwise determined in the sole 
discretion of the Administrator.  To the extent that an Award or payment, or the settlement or deferral thereof, is 
subject to Code Section 409A, the Award is intended to be granted, paid, settled or deferred in a manner that will 
meet  the requirements  of  Code  Section 409A,  and  the  Plan  and  Award  Agreements  shall  be  interpreted  and 
administered accordingly, though no guarantee or warranty of such compliance is made to any individual.  The 
parties agree that this Plan may be amended, as determined in the discretion of the Administrator, and as may be 
necessary or advisable to comply with Section 409A of the Code and all related rules and regulations in order to 
preserve the payments and benefits provided hereunder.

(b) Notwithstanding anything in the Plan or in any Award Agreement to the contrary, to the extent that 
any amount or benefit that would constitute non-exempt “deferred compensation” for purposes of Section 409A of 
the Code would otherwise be payable or distributable under the Plan or any Award Agreement by reason of the 
occurrence of a Change-in-Control, or the Participant’s Disability or separation from service, such amount or benefit 
will not be payable or distributable to the Participant by reason of such circumstance unless (i) the circumstances 
A-14

giving rise to such Change-in-Control, Disability or separation from service meet any description or definition of 
“change-in-control event”, “disability” or “separation from service,” as the case may be, in Section 409A of the 
Code and applicable regulations (without giving effect to any elective provisions that may be available under such 
definition), or (ii) the payment or distribution of such amount or benefit would be exempt from the application of 
Section 409A of the Code by reason of the short-term deferral exemption or otherwise. This provision does not 
prohibit the vesting of any Award. If this provision prevents or delays the payment or distribution of any amount or 
benefit,  such  payment  or  distribution  shall  be  made  on  the  next  earliest  payment  or  distribution  date  or  event 
specified in the Award Agreement that is permissible under Section 409A of the Code.

(c)

Notwithstanding anything in the Plan or in any Award Agreement to the contrary, if any amount or 
benefit that would constitute non-exempt “deferred compensation” for purposes of Section 409A of the Code would 
otherwise  be  payable  or  distributable  under  this  Plan  or  any  Award  Agreement  by  reason  of  a  Participant’s 
separation  from  service  during  a  period  in  which  the  Participant  is  a  Specified  Employee,  then,  subject  to  any 
permissible acceleration of payment by the Administrator under Treas. Reg. Section 1.409A-3(j)(4)(ii) (domestic 
relations order), (j)(4)(iii) (conflicts of interest), or (j)(4)(vi) (payment of employment taxes):

(i)

if the payment or distribution is payable in a lump sum, the Participant’s right to receive payment 
or distribution of such non-exempt deferred compensation will be delayed until the earlier of the Participant’s death 
or the first day of the seventh month following the Participant’s separation from service; and

(ii)

if the payment or distribution is payable over time, the amount of such non-exempt deferred 
compensation that would otherwise be payable during the six-month period immediately following the Participant’s
separation from service will be accumulated and the Participant’s right to receive payment or distribution of such 
accumulated amount will be delayed until the earlier of the Participant’s death or the first day of the seventh month 
following the Participant’s separation from service, whereupon the accumulated amount will be paid or distributed 
to the Participant and the normal payment or distribution schedule for any remaining payments or distributions will 
resume.

For purposes of this Plan, the term “Specified Employee” has the meaning in Section 2(pp) of the Plan, provided, 
however, that, as permitted in such final regulations, the Company’s Specified Employees and its application of the 
six-month delay rule of Section 409A(a)(2)(B)(i) of the Code shall be determined in accordance with any rules 
adopted  by  the  Board  or  any  committee  of  the  Board,  which  shall  be  applied  consistently  with  respect  to  all 
nonqualified deferred compensation arrangements of the Company, including this Plan.

(d)

If any one or more Awards granted under the Plan to a Participant could qualify for any separation pay 
exemption described in Treas. Reg. Section 1.409A-1(b)(9), but such Awards in the aggregate exceed the dollar 
limit  permitted  for  the  separation  pay  exemptions,  the  Administrator  may  determine  which  Awards  or  portions 
thereof will be subject to such exemptions.

(e)

If, pursuant to an Award, a Participant is entitled to a series of installment payments, such Participant’s 
right to the series of installment payments shall be treated as a right to a series of separate payments and not to a 
single payment. For purposes of the preceding sentence, the term “series of installment payments” has the meaning 
provided in Treas. Reg. Section 1.409A-2(b)(2)(iii) (or any successor thereto).

12.
Leaves of Absence/Transfer Between Locations.  Unless the Administrator provides otherwise, vesting of 
Awards granted hereunder will be suspended during any unpaid leave of absence.  A Participant will not cease to 
be an Employee in the case of:

(a)

any leave of absence approved by the Company; or

(b)

transfers between locations of the Company or between the Company, its Parent, or any Subsidiary.

For purposes of Incentive Stock Options, no such leave may exceed three (3) months, unless reemployment upon 
expiration of such leave is guaranteed by statute or contract.  If reemployment upon expiration of a leave of absence 

A-15

approved  by  the  Company  is  not  so  guaranteed,  then  six  (6) months  following  the  first day  of  such  leave,  any 
Incentive Stock Option held by the Participant will cease to be treated as an Incentive Stock Option and will be 
treated for tax purposes as a Nonstatutory Stock Option.

13.
Transferabilitv of Awards.  Unless determined otherwise by the Administrator, an Award may not be sold, 
pledged, assigned, hypothecated, transferred, or disposed of in any manner other than by will or by the laws of 
descent or distribution or as otherwise provided in this Section 13 and may be exercised, during the lifetime of the 
Participant,  only  by  the  Participant.    If  the  Administrator  makes  an  Award  transferable,  including,  without 
limitation, for estate planning purposes by instrument to an inter vivos or testamentary trust in which the Awards 
are to be passed to beneficiaries upon the death of the trustor (settlor) or by gift to Family Members, or pursuant to 
a domestic relations order (as defined in the Code) or other court-ordered marital settlement agreement, such Award 
shall be subject to the terms of the Plan and the Award Agreement and shall contain such additional terms and 
conditions as the Administrator deems appropriate.  Notwithstanding the foregoing, under no circumstance may 
unvested or unexercised Awards be transferred for value or consideration.

14. Adjustments; Dissolution or Liquidation; Merger or Change-in-Control.

(a)

Adjustments.  In the event that any dividend (other than ordinary cash dividends) or other distribution 
(whether in the form of cash, Shares, other securities, or other property), recapitalization, stock split, reverse stock 
split, reorganization, merger, consolidation, split-up, spin-off, combination, repurchase, or exchange of Shares or 
other securities of the Company, or other change in the corporate structure of the Company affecting the Shares 
occurs,  the  Administrator,  in  order  to  prevent  diminution  or  enlargement  of  the  benefits  or  potential  benefits 
intended to be made available under the Plan, will adjust, in such equitable manner as the Administrator deems 
appropriate, the number and class of Shares issuable under the Plan and/or the number, class and, if applicable, 
exercise price, of Shares subject to each outstanding Award.

(b) Dissolution or Liquidation.  In the event of the proposed dissolution or liquidation of the Company, 
the Administrator shall notify each Participant as soon as practicable prior to the effective date of such proposed 
transaction.  To the extent it has not been previously exercised, an Award will terminate immediately prior to the 
consummation of such proposed action.

(c)

Change-in-Control.

(i)

In the event of a Change-in-Control, then notwithstanding any other provision of the Plan or an 
Award to the contrary, including without limitation Section 4(d), each outstanding Award shall be treated as the 
Administrator determines in its discretion without a Participant’s consent, including, without limitation:

(A) Awards may be assumed, or substantially equivalent Awards may be substituted, by the 
acquiring  or  succeeding  entity  or  an  affiliate thereof  (for  purposes  of  this  Section  14,  the  “successor”)  with 
appropriate adjustments as to the number and kind of shares and prices;

prior to the consummation of such Change-in-Control;

(B)

upon written notice to a Participant, the Participant’s Awards will terminate immediately 

(C) Awards  will  vest  and  become  exercisable,  realizable,  or  payable,  or  restrictions 
applicable to an Award will lapse, in whole or in part, prior to or upon consummation of such Change-in-Control, 
and, to the extent the Administrator determines, terminate upon the effectiveness of such Change-in-Control; 

(D)

(1)  Awards will terminate in exchange for an amount of cash and/or property, if any, 
equal to the amount (if any) that would have been attained upon the exercise of such Award or realization of the 
Participant’s rights as of the date of the occurrence of the transaction (and, for the avoidance of doubt, if as of the 
date of the occurrence of the transaction the Administrator determines in good faith that no amount would have 
been attained upon the exercise of such Award or realization of the Participant’s rights, then such Award may be 

A-16

terminated by the Company without payment), or (2) the replacement of such Award with other rights or property 
selected by the Administrator in its sole discretion; or 

(E)

any combination of the foregoing.

In taking any of the actions permitted under this subsection 14(c), the Administrator will not be obligated to treat 
all Awards, all Awards held by a Participant, or all Awards of the same type, similarly.

(ii)

If,  in  the  event  of  a  Change-in-Control,  the  successor  elects  not  to  assume  or  substitute  an 
Award, as determined by the Administrator, then upon the effective date of the Change-in-Control, the Participant 
shall fully vest in and have the right to exercise all of his or her outstanding Options and Stock Appreciation Rights; 
all restrictions on then outstanding Restricted Stock and Restricted Stock Units will lapse; and, with respect to then 
outstanding Performance Units, Performance Shares and any other Awards subject to performance-based vesting 
conditions,  all  performance  goals  or  other  vesting  conditions  will  be  deemed  achieved  at  one  hundred  percent 
(100%) of target levels and all other terms and conditions met.  In addition, if an Option or Stock Appreciation 
Right is not assumed or substituted by the successor in the event of a  Change-in-Control, as determined by the 
Administrator, the Administrator may notify the Participant in writing or electronically that the Option or Stock 
Appreciation Right shall be exercisable for a period of time determined by the Administrator in its sole discretion 
(but in no event later than the expiration of the term of such Option as set forth in the Award Agreement), and the 
Option or Stock Appreciation Right shall terminate upon the expiration of such period. 

(d) Outside Director Awards.  With respect to Awards granted to an Outside Director that are assumed or 
substituted by a successor (in each case as determined by the Administrator), if, on the date of or following such 
assumption or substitution, the Participant’s status as a Director or a director of the successor, as applicable, is 
terminated other than upon a voluntary resignation by the Participant (unless such resignation is at the request of 
the  successor),  then  the  Participant  will  fully  vest  in  and  have  the  right  to  exercise  Options  and/or  Stock 
Appreciation  Rights  as  to  all  of  the  Shares  underlying  such  Award for  a  period  of  one  year following  such 
termination  (but  in  no  event  later  than  the  expiration  of  the  term  of  such  Option  as  set  forth  in  the  Award 
Agreement);  all  restrictions  on  Restricted  Stock  and  Restricted  Stock  Units  will  lapse;  and,  with  respect  to 
Performance Units, Performance Shares and any other Awards subject to performance-based vesting conditions, all 
performance goals or other vesting conditions will be deemed achieved at one hundred percent (100%) of target 
levels and all other terms and conditions met.

(e)

Assumption, Conversion or Substitution of Awards. For the purposes of Sections 14(c) and 14(d), a
successor  will  be  deemed  to  have  “assumed  or  substituted”  an  Award  under  this  Plan  if  the  surviving  entity 
substitutes  an  Award  under  this  Plan  with  an  award  under  a  plan  of  the  surviving  entity  having  substantially 
equivalent value to and terms and conditions not materially less favorable than the original Award, or otherwise 
assumes the obligations under and/or equitably adjusts such original Award. The Administrator or the Board shall 
have sole and complete authority and discretion (which authority and discretion the Administrator or Board may 
exercise prior to the Change-in-Control, in which case such exercise of authority and discretion shall be final and 
binding)  to  determine  whether  the  proposed  assumption  or  substitution  of  an  Award  by  a  successor  meets  the 
requirements  provided  for  in  this  paragraph. Notwithstanding  anything  in  this  Section 14(e)  to  the  contrary,  an 
Award that vests, is earned or paid out upon the satisfaction of one or more performance goals will not be considered 
assumed or substituted if, as determined by the Administrator or the Board, the Company or its successor modifies 
any  of  such  performance  goals  without  the  Participant’s  consent;  provided,  however,  a  modification  to such 
performance goals only to reflect the successor’s post-Change-in-Control corporate structure will not be deemed to 
invalidate an otherwise valid Award assumption, as determined by the Administrator or the Board.

15.

Tax Withholding.

(a) Withholding  Requirements.    Prior  to  the  delivery  of  any  Shares  or  cash  pursuant  to  an  Award  (or 
exercise thereof), the Company will have the power and the right to deduct or withhold, or require a Participant to 
remit to the Company, an amount sufficient to satisfy any federal, state, local, foreign or other taxes (including the 
Participant’s FICA obligation) required to be withheld with respect to such Award (or exercise thereof).

A-17

(b) Withholding Arrangements.  The Administrator, in its sole discretion and pursuant to such procedures 
as it may specify from time to time, may permit a Participant to satisfy such tax withholding obligation, in whole 
or in part by (without limitation):

(i)

paying cash;

(ii)

electing  to  have  the  Company  withhold  otherwise  deliverable  cash  or  Shares  having  a  Fair
Market  Value  equal  to  the  minimum  statutory  amount  required  to  be  withheld  (or  such  other  amount  in  the 
Administrator’s  discretion that  does  not  cause  the  Award to  be  treated  as  a  liability instrument under  generally 
accepted accounting principles); or

(iii)

delivering  to  the  Company  already-owned  Shares  having  a  Fair  Market  Value  equal  to  the 
minimum statutory amount required to be withheld (or such other amount in the Administrator’s discretion that 
does not cause the Award to be treated as a liability instrument under generally accepted accounting principles).

The Fair Market Value of the Shares to be withheld or delivered will be determined as of the date that the taxes are 
required to be withheld.

16. No Effect on Employment or Service.  Neither the Plan nor any Award shall confer upon a Participant any 
right with respect to continuing the Participant’s relationship as a Service Provider with the Company, nor shall 
they interfere in any way with the Participant’s right or the Company’s right to terminate such relationship at any 
time, with or without cause, to the extent permitted by Applicable Laws.

17. Date of Grant.  The date of grant of an Award shall be, for all purposes, the date on which the Administrator 
(or its delegee, to the extent permitted by the Plan) makes the determination granting such Award, or such other 
later date as is determined by the Administrator (or its delegee, to the extent permitted by the Plan).  Notice of the 
determination shall be provided to each Participant within a reasonable time after the date of such grant.

18.
Term of Plan.  Following the Board’s adoption of the Plan, the Plan will become effective upon its approval 
by the Company’s stockholders (the “Effective Date”).  It will continue in effect for a term of ten (10) years from 
the Effective Date, unless terminated earlier under Section 19 of the Plan.

19. Amendment and Termination of the Plan.

(a)

Amendment and Termination.  The Board may at any time amend, alter, suspend or terminate the Plan.

(i)

Stockholder  Approval.    The  Company  shall  obtain stockholder  approval  of  any  Plan 

amendment to the extent required by Applicable Laws or otherwise in the Board’s discretion.

(ii)

Effect  of  Amendment  or  Termination.    Subject to  Section  19(c), no  amendment,  alteration, 
suspension or termination of the Plan shall impair the rights of any Participant under any then outstanding Award, 
unless  mutually  agreed  otherwise  between  the  Participant  and  the  Administrator,  which  agreement  must  be  in 
writing and signed by the Participant and the Company.  Termination of the Plan shall not affect the Administrator’s 
ability to exercise the powers granted to it hereunder with respect to Awards granted under the Plan prior to the date 
of such termination.

(b) Awards Previously Granted. The Administrator may waive any conditions or restrictions under, amend 
or modify the terms and conditions of, or cancel or terminate any outstanding Award at any time, in connection 
with any termination of service of a Service Provider or otherwise and notwithstanding any provision of the Plan to 
the  contrary,  including  but  not  limited  to  Section  4(d);  provided,  however,  subject  to  Section  19(c)  and  the 
provisions of the applicable Award Agreement, no such amendment, modification, cancellation or termination shall 
impair  the  rights  of  a  Participant  under  an  Award  unless  mutually  agreed  between  the  Participant  and  the 
Administrator, which agreement must be in writing and signed by the Participant and the Company.

A-18

(c)

Compliance Amendments.  Notwithstanding any other provision of this Section 19, the Plan or any 
Award Agreement to the contrary, the Administrator may, in its sole discretion and without the consent of any 
Participant, amend the Plan or any Award Agreement, to take effect retroactively or otherwise, as it deems necessary 
or advisable in order for the Company, the Plan, an Award or an Award Agreement to satisfy or conform to any 
present or future Applicable Law (including, without limitation, Code Section 409A) or to meet the requirements 
of any accounting standard. 

20.

Conditions Upon Issuance of Shares.

(a)

Legal Compliance.  Shares shall not be issued pursuant to the exercise of an Award unless the exercise 
of such Award and the issuance and delivery of such Shares shall comply with Applicable Laws and shall be further 
subject to the approval of counsel for the Company with respect to such compliance.

(b)

Investment Representations.  As a condition to the exercise of an Award, the Company may require 
the person exercising such Award to represent and warrant at the time of any such exercise that the Shares are being 
purchased only for investment and without any present intention to sell or distribute such Shares if, in the opinion 
of counsel for the Company, such a representation is required.

21.
Inability to Obtain Authority.  The inability of the Company to obtain authority from any regulatory body 
having jurisdiction, which authority is deemed by the Company’s counsel to be necessary to the lawful issuance 
and sale of any Shares hereunder, shall relieve the Company of any liability in respect of the failure to issue or sell 
such Shares as to which such requisite authority shall not have been obtained.

22.
Recoupment. A Participant’s rights with respect to any Award hereunder shall in all events be subject to (i) 
any right that the Company may have under any Company clawback or recoupment policy as may be in effect from 
time to time or any other clawback or recoupment agreement or arrangement applicable to a Participant; or (ii) any 
right or obligation that the Company may have regarding the recoupment of “incentive-based compensation” under 
Section 10D of the Exchange Act and any applicable rules and regulations promulgated thereunder from time to 
time by the U.S. Securities and Exchange Commission.

A-19

ONTO INNOVATION INC.

2020 EMPLOYEE STOCK PURCHASE PLAN

Appendix B

1.
Purpose of the Plan. The purpose of the Plan is to provide employees of the Company and its Designated 
Subsidiaries with an opportunity to purchase Common Stock of the Company. It is the intention of the Company to 
have the Plan qualify as an “Employee Stock Purchase Plan” under Section 423 of the Code. The provisions of the 
Plan shall, accordingly, be construed in a manner consistent with the requirements of that section of the Code. 

2.

Definitions. As used herein, the following definitions shall apply:

(a)

(b)

(c)

(d)

“Board” shall mean the Board of Directors of the Company. 

“Code” shall mean the Internal Revenue Code of 1986, as amended. 

“Common Stock” shall mean the common stock of the Company. 

“Company” shall mean Onto Innovations Inc., a Delaware corporation. 

(e)

“Compensation” shall  mean  the  total  compensation  paid  to  an  Employee,  including  all  salary, 
wages (including amounts elected to be deferred by the Employee, that would otherwise have been paid, under any 
cash  or  deferred  arrangement  or  other  deferred  compensation  program  established  by  the  Company  or  the 
Employer),  overtime  pay,  commissions,  bonuses,  and  other  remuneration  paid  directly  to  the  Employee,  but 
excluding referral and hiring bonuses, profit sharing, the cost of employee benefits paid for by the Company or the 
Employer, education, tuition or other similar reimbursements, imputed income arising under any Company group 
insurance or benefit program, traveling expenses, business and moving expense reimbursements, income received 
in connection with stock options, restricted stock grants, or other equity based awards, contributions made by the 
Company or the Employer under any employee benefit plan, and similar items of compensation. 

(f)

“Continuous Status as an Employee” shall mean the absence of any interruption or termination of 
service as an Employee. Continuous Status as an Employee shall not be considered interrupted in the case of sick 
leave or other leave of absence agreed to in writing by the Company or the Employer, provided that such leave is 
for a period of not more than ninety (90) days or reemployment upon the expiration of such leave is guaranteed by 
contract, statute or as a matter of local law. 

(g)

(h)

“Contributions” shall mean all amounts credited to the account of a participant pursuant to the Plan. 

“Designated Subsidiary” shall mean any Subsidiary that has been designated by the Board, or a 

committee named by the Board, from time to time in its sole discretion as eligible to participate in the Plan. 

(i)

“Employee” shall mean any person, including an Officer, who is customarily employed for at least 
twenty (20) hours per week and more than five (5) months in a calendar year by the Company or a Designated 
Subsidiary, provided that, in certain jurisdictions outside the United States, the term “Employee” may, if so provided 
by the Company in writing, also include a person employed for less than twenty (20) hours per week or less than 
five (5) months in a calendar year if such person must be permitted to participate in the Plan pursuant to local laws 
(as determined by the Company). 

(j)

“Employer” shall mean the Designated Subsidiary that employs a participant, if the employer is not 

the Company. 

(k)

“Enrollment Date” shall mean the first Trading Day of each Offering Period. 

B-1

(l)

“Exchange Act” shall mean the U.S. Securities Exchange Act of 1934, as amended. 

(m)

“Exercise Date” shall mean the last Trading Day of each Offering Period. 

(n)

“Fair Market Value” shall mean, as of any date, the value of Common Stock determined as 

follows: 

(i)

If  the  Common  Stock  is  listed  on  any  established  stock  exchange  or  a  national  market 
system, including without limitation the New York Stock Exchange, its Fair Market Value shall be the closing sales 
price for such stock (or the closing bid, if no sales were reported) as quoted on such exchange or system on the date 
of determination, as reported in The Wall Street Journal or such other source as the Board deems reliable; 

(ii)

If the Common Stock is regularly quoted by a recognized securities dealer but selling prices 
are not reported, its Fair Market Value shall be the mean of the closing bid and asked prices for the Common Stock 
on  the  date  of  determination,  as  reported  in  The  Wall  Street  Journal  or  such  other  source  as  the  Board  deems 
reliable; or 

(iii)

In  the  absence  of an  established  market  for the  Common  Stock, the  Fair  Market  Value 

thereof shall be determined in good faith by the Board. 

(o)

“Offering Periods” shall mean the periods of approximately six (6) months during which an option 
granted  pursuant  to  the  Plan  may  be  exercised,  commencing  on  the  first  Trading  Day  on  or  after  May 1st and 
November 1st of each year and terminating on the last Trading Day in the periods ending six (6) months later. The 
duration and timing of Offering Periods may be changed pursuant to Section 4 of this Plan. 

(p)

“Officer” shall mean a person who is an officer of the Company within the meaning of Section 16

of the Exchange Act and the rules and regulations promulgated thereunder. 

(q)

“Parent” shall mean a “parent corporation”, domestic or foreign, whether now or hereafter existing, 

as defined in Section 424(e) of the Code. 

(r)

(s)

“Plan” shall mean this 2020 Employee Stock Purchase Plan. 

“Purchase Price” shall mean an amount equal to 85% of the Fair Market Value of a Share of 

Common Stock on the Exercise Date; provided however that Purchase Price may be adjusted by the Board 
pursuant to Section 19. 

(t)

“Reserves” shall mean the number of Shares covered by each option under the Plan which have not 
yet been exercised and the number of Shares which have been authorized for issuance under the Plan but not yet 
placed under option. 

(u)
of the Plan. 

“Share” shall mean a share of Common Stock, as may be adjusted in accordance with Section 19 

(v)

“Subsidiary” shall mean a “subsidiary corporation”, domestic or foreign, whether now or hereafter 

existing, as defined in Section 424(f) of the Code. 

(w)

“Trading Day” shall mean a day on which national stock exchanges are open for trading. 

3.

Eligibility.

(a)

Any person who is an Employee as of the beginning of any given Offering Period shall be eligible 
to participate in such Offering Period under the Plan, subject to the requirements of Section 5(a) and the limitations 
imposed by Section 423(b) of the Code. 

B-2

(b)

Any provisions of the Plan to the contrary notwithstanding, no Employee shall be granted an option 

under the Plan: 

(i)

if, immediately after the grant, such Employee (or any other person whose stock would be 
attributed to  such  Employee  pursuant to  Section 424(d)  of  the  Code)  would own  stock and/or  hold  outstanding 
options to purchase stock possessing five percent (5%) or more of the total combined voting power or value of all 
classes of stock of the Company, any Subsidiary or any Parent; or 

(ii)

if such option would permit his or her rights to purchase stock under all employee stock 
purchase plans (described in Section 423 of the Code) of the Company, any Subsidiary or any Parent to accrue at a 
rate which exceeds Twenty-Five Thousand Dollars ($25,000) of Fair Market Value of such stock (determined at 
the time such option is granted) for each calendar year in which such option is outstanding at any time. 

Offering Periods. The Plan shall be implemented by consecutive Offering Periods with a new Offering 
4.
Period commencing on the first Trading Day on or after May 1st and November 1st each year, or on such other date 
as the Board shall determine, and continuing thereafter. The Plan shall continue until terminated in accordance with 
Section 19 hereof. The Board shall have the power to change the duration and/or the frequency of Offering Periods 
(including the commencement dates thereof) with respect to future offerings without shareholder approval if such 
change is announced prior to the scheduled beginning of the first Offering Period to be affected. 

5.

Participation.

(a)  

An eligible Employee may become a participant in the Plan by completing a subscription 

agreement on the form provided by the Company and filing it with the Company’s payroll office prior to the 
applicable Enrollment Date, unless an earlier time for filing the subscription agreement is set by the Board for all 
eligible Employees with respect to a given offering. The subscription agreement shall set forth the percentage of 
the participant’s Compensation (subject to Section 6(a) below) to be credited as Contributions pursuant to the 
Plan. 

(b)

An eligible Employee may contribute to the Plan by means of payroll deductions, unless payroll 
deductions are not permitted under local law, as determined by the Company, in which case eligible Employees 
may  be  permitted  to  contribute  to  the  Plan  by  an  alternative  method,  as  determined  by  the  Company.  Payroll 
deductions, or, if payroll deductions are not permitted under local law, payments made under an alternative method, 
shall commence as of the first payday following the Enrollment Date and shall end on the last payday paid on or 
prior  to  the  Exercise  Date of  the  Offering  Period to  which  the  subscription  agreement  is  applicable,  unless  the 
Employee’s participation is sooner terminated as provided in Section 10.

6.

Method of Payment of Contributions.

(a)

Where permitted under local law, the participant shall elect to have payroll deductions made on 
each payday during the Offering Period in an amount not less than one percent (1%) and not more than fifteen 
percent (15%) of such participant’s Compensation on each such payday (or such other maximum percentage as the
Board may establish from time to time before an Enrollment Date). Where payroll deductions are not permitted 
under local law, the participant may be permitted to contribute to the Plan by an alternative method, as determined 
by the Company. All payroll deductions or other payments made by a participant shall be credited to his or her 
account under the Plan. A participant may not make any additional payments into such account. 

(b)

A participant may discontinue his or her participation in the Plan as provided in Section 10, or, 
during  an  Offering  Period,  may  decrease  the  rate  of  his  or  her  Contributions  during  the  applicable  Period  by 
completing and filing with the Company a new subscription agreement. The Board may, in its discretion, limit the 
number of participation rate changes during any Offering Period. The change in rate shall be effective as soon as 
administratively  practicable  following  the  date  of  filing  of  the  new  subscription  agreement;  provided  that  any 
change elected on a new subscription agreement filed within twenty-one (21) days of the end of any Offering Period 
shall not take effect earlier than the beginning of the first new Offering Period to commence after the date of that 
B-3

filing. A participant may change the rate of his or her Contributions effective as of the beginning of any Offering 
Period by filing a new subscription agreement prior to the beginning of such Offering Period; provided that any 
change elected within twenty-one (21) days prior to the beginning of that Offering Period shall be given effect as 
soon as administratively practicable on or after the first day of that Offering Period. A participant’s subscription 
agreement shall remain in effect for successive Offering Periods unless terminated as provided in Section 10 hereof.

(c)

Notwithstanding the foregoing, to the extent necessary to comply with Section 423(b)(8) of the 
Code and Section 3(b) herein, a participant’s payroll deductions or other payments may be decreased to zero percent 
(0%) at any time during an Offering Period, as applicable. Payroll deductions or other payments shall re-commence 
at the rate provided in such participant’s subscription agreement at the beginning of the first Offering Period, as 
applicable,  which  is  scheduled  to  end  in  the  following  calendar  year,  unless  the  participant’s  participation  is 
terminated  as  provided  in  Section 10.  In  addition,  a  participant’s  payroll  deductions  or  other  payments  may  be 
decreased by the Company to zero percent (0%) at any time during an Offering Period in order to avoid contributions 
in excess of the maximum Share limit set forth in Section 7(a), in which case payroll deductions or payments shall 
re-commence at the rate provided in such participant’s subscription agreement at the beginning of the next Offering 
Period, unless terminated by the participant as provided in Section 10. 

(d)

As may be further specified in the subscription agreement, at the time the option is exercised, in 
whole or in part, or at the time some or all of the Company’s Common Stock issued under the Plan is disposed of, 
the participant must make adequate provision for the Company’s and/or the Employer’s federal, state, or other tax 
and social insurance withholding obligations, if any, which arise upon the exercise of the option or the disposition 
of the Common Stock. At any time, the Company and the Employer may, but shall not be obligated to, withhold 
from the participant’s compensation the amount necessary for the Company and/or the Employer to meet applicable 
withholding obligations, including any withholding required to make available to the Company or the Employer 
any tax deductions or benefits attributable to sale or early disposition of Common Stock by the participant. 

7.
Grant of Option. On the Enrollment Date of each Offering Period, each eligible Employee participating in 
such Offering Period shall be granted an option to purchase on each Exercise Date occurring within the Offering 
Period  a  number  of  Shares  determined  by  dividing  such  Employee’s  Contributions  accumulated  prior  to such 
Exercise Date and retained in the participant’s account as of the Exercise Date by the applicable Purchase Price; 
provided however, that the maximum number of Shares an Employee may purchase during any one Offering Period 
shall be 3,000 Shares, subject to adjustment as provided in Section 18, and provided further that such purchase shall 
be subject to the limitations set forth in Sections 3(b) and 12. The Board may, for future Offering Periods, increase 
or  decrease,  in  its  absolute  discretion,  the  maximum  number  of  shares  of  the  Company’s  Common  Stock  an 
Employee may purchase during such Offering Period. The option shall expire on the last day of the Offering Period. 

8.

Exercise of Option.

(a)

Unless a participant’s participation is terminated as provided in Section 10, his or her option for 
the purchase of Shares will be exercised automatically on the Exercise Date of an Offering Period, and the maximum 
number of full Shares subject to the option will be purchased at the applicable Purchase Price with the accumulated 
Contributions in his or her account (subject to such limitations as are specified in the Plan). The Shares purchased 
upon exercise of an option hereunder shall be deemed to be transferred to the participant on the Exercise Date. 
During his or her lifetime, a participant’s option to purchase Shares hereunder is exercisable only by him or her. 

(b)

No fractional Shares shall be purchased. Any payroll deductions or other payments accumulated in 
a participant’s account which are not sufficient to purchase a full Share shall be retained in the participant’s account 
for  the  subsequent  Offering  Period,  subject  to  earlier  withdrawal  by  the  participant  or  termination  of  such 
participant’s participation as provided in Section 10 below. Any other amounts left over in a participant’s account 
after an Exercise Date shall be returned to the participant. 

9.
Delivery. As promptly as practicable after each Exercise Date of each Offering Period, the Company shall 
arrange the delivery to each participant (by electronic or other means), as appropriate, of a certificate representing 
the Shares purchased upon exercise of his or her option. Notwithstanding the foregoing, the Board may require that 
B-4

all Shares purchased under the Plan be held in an account (the participant’s “ESPP Stock Account”) established in 
the name of the participant (or in the name of the participant and his or her spouse, as designated by the participant 
on his or her subscription agreement), subject to such rules as determined by the Board and uniformly applied to all 
participants, including designation of a brokerage or other financial services firm (an “ESPP Broker”) to hold such 
Shares for the participant’s ESPP Stock Account with registration of such Shares in the name of such ESPP Broker 
for the benefit of the participant (or for the benefit of the participant and his or her spouse, as designated by the 
participant on his or her subscription agreement). 

10.

Voluntary Withdrawal: Termination of Employment.

(a)

A participant may withdraw all, but not less than all the Contributions credited to his or her account 
under the Plan, by giving notice of withdrawal from the Plan in accordance with the withdrawal procedures then in 
effect, not less than twenty-one (21) days prior to the last day of the Offering Period for which such election is to 
be  given  effect.  All  of  the  participant’s  Contributions  credited  to  his  or  her  account  will  be  paid  to  him or  her 
promptly  after  receipt  of  his  or  her  notice  of  withdrawal  and  his  or  her option for that  Offering  Period  will  be 
automatically terminated, and no further Contributions for the purchase of Shares may be made by the participant 
for that Offering Period. 

(b)

Upon termination of the participant’s Continuous Status as an Employee prior to the last day of an 
Offering Period for any reason, including retirement or death, the Contributions credited to his or her account will 
be promptly returned to him or her or, in the case of his or her death, to the person or persons entitled thereto under 
Section 14,  if  any;  his  or  her  option  for  that  Offering  Period  will  be  automatically  terminated;  and  no  further 
Contributions for the purchase of Shares may be made by the participant for that Offering Period. If a Subsidiary 
ceases to be a Subsidiary, each person employed by that Subsidiary will be deemed to have terminated employment 
for  purposes  of  the  Plan,  unless  the  person  continues  as  an  employee  of  the  Company  or  another  Designated 
Subsidiary. 

(c)

In the event an Employee fails to remain in Continuous Status as an Employee for at least twenty 
(20) hours per week during an Offering Period in which the Employee is a participant, unless such Employee is on 
an approved leave of absence or a temporary reduction of hours, or unless otherwise required by local law, he or 
she will be deemed to have elected to withdraw from the Plan; the Contributions credited to his or her account will 
be returned to him or her; his or her option for that Offering Period will be automatically terminated; and no further 
Contributions for the purchase of Shares may be made by the participant for that Offering Period. 

(d)

A  participant’s  withdrawal from  an  Offering  Period  will  not  have  any  effect  upon  his  or  her 
eligibility to participate in a succeeding Offering Period or in any similar plan which may hereafter be adopted by 
the Company. 

Interest. No interest shall accrue on the Contributions of a participant in the Plan, unless required by local 

11.
law. 

12.

Stock.

(a)   

Subject to adjustment as provided in Section 18, the maximum number of Shares of the 

Company’s Common Stock which shall be made available for sale under the Plan shall be 1,500,000 Shares.

(b)

If the Board determines that, on a given Exercise Date, the number of Shares with respect to 

which options are to be exercised may exceed: 

(i) the number of Shares that were available for sale under the Plan on the Enrollment Date of the 

applicable Offering Period; or 

(ii) the number of Shares available for sale under the Plan on such Exercise Date, the Board may 

in its sole discretion provide: 

B-5

(x) that  the  Company  shall  make  a  pro  rata  allocation  of  the  Shares  of  Common  Stock 
available for purchase on such Enrollment Date or Exercise Date, as applicable, in as uniform a manner as shall be 
practicable and as it shall determine in its sole discretion to be equitable among all participants exercising options 
to purchase Common Stock on such Exercise Date, and continue the Offering Period then in effect, or 

(y) that the Company shall make a pro rata allocation of the Shares available for purchase 
on such Enrollment Date or Exercise Date, as applicable, in as uniform a manner as shall be practicable and as it 
shall determine in its sole discretion to be equitable among all participants exercising options to purchase Common 
Stock on such Exercise Date, and terminate the Offering Period then in effect pursuant to Section 19 below. 

The  Company  may  make  pro  rata  allocation  of  the  Shares  available  on  the  Enrollment  Date  of  any  applicable 
Offering  Period  pursuant  to  the  preceding  sentence,  notwithstanding  any  authorization  of  additional  Shares  for 
issuance under the Plan by the Company’s stockholders subsequent to such Enrollment Date. 

(c)  The participant will have no interest or voting right in Shares covered by his or her option until such 
option has been exercised and such Shares have actually been delivered to and held of record by the participant. No 
adjustment will be made for dividends or other rights as a stockholder for which a record date is prior to such date 
of delivery. 

(d)  Shares to be delivered (by electronic or other means) to a participant under the Plan will be registered 
in the name of the participant or in the name of the participant and his or her spouse, as designated by the participant 
in his or her subscription agreement; provided that if the Board has determined that Shares shall be held in an ESPP 
Stock Account held by an ESPP Broker in accordance with Section 9, Shares shall be registered in the name of such 
ESPP  Broker  for  the  benefit  of  the  participant  or  the  participant  and  his  or  her  spouse,  as  designated  by  the 
participant in his or her subscription agreement. 

13.

Administration.

(a)  

The Board, or a committee named by the Board, shall supervise and administer the Plan and shall 
have full power to adopt, amend and rescind any rules deemed desirable and appropriate for the administration of 
the Plan and not inconsistent with the Plan, to construe and interpret the Plan, and to make all other determinations 
necessary or advisable for the administration of the Plan. Any action taken by, or inaction of, the Company, any 
Subsidiary, the Board or a Board committee relating or pursuant to the Plan and within its authority hereunder or 
under applicable law shall be within the absolute discretion of that entity or body and shall be conclusive and binding 
upon all persons. 

(b)  

The Board or Board committee has discretion to adopt any rules regarding administration of the 
Plan to conform to local laws. Without limiting the generality of the foregoing, the Board or a Board committee is 
specifically authorized to adopt rules and procedures regarding handling of payroll deductions, payment of interest 
and handling of stock certificates which vary according to local requirements. The Board or a Board committee has 
the authority to suspend or limit participation in the Plan by employees of any particular Subsidiary for any reason, 
including administrative or economic reasons. The Board or a Board committee may also adopt rules, procedures 
or sub-plans applicable to particular Subsidiaries or locations, which sub-plans may be designed to be outside the 
scope of Section 423 of the Code. 

(c)  

In making any determination or in taking or not taking any action under the Plan, the Board or a 
Board  committee  may  obtain  and  may  rely  upon  the  advice  of  experts,  including  professional  advisors  to  the 
Company. No director, officer or agent of the Company or any Subsidiary shall be liable for any such action or 
determination taken or made or omitted in good faith. The Board or a Board committee may delegate ministerial, 
non-discretionary functions relating to the Plan to individuals who are officers or employees of the Company or a 
Subsidiary. 

(d)  

Neither  the  Board  nor  any  Board  committee,  nor  any  member  thereof  or  person  acting  at  the 
direction thereof, shall be liable for any act, omission, interpretation, construction or determination made in good 
B-6

faith in connection with the Plan, and all such persons shall be entitled to indemnification and reimbursement by 
the Company in respect of any claim, loss, damage or expense (including, without limitation, attorneys’ fees) arising 
or  resulting  therefrom  to  the  fullest  extent  permitted  by  law  and/or  under  any  directors  and  officers  liability 
insurance coverage that may be in effect from time to time. 

14.

Designation of Beneficiary.

(a)  

Unless otherwise determined by the Company, a participant may file a written designation of a 
beneficiary who is to receive any Shares and cash, if any, from the participant’s account under the Plan in the event 
of such participant’s death subsequent to the end of an Offering Period, as applicable, but prior to delivery to him 
or her of such Shares and/or cash. In addition, unless otherwise determined by the Company, a participant may file 
a written designation of a beneficiary who is to receive any cash from the participant’s account under the Plan in 
the event of such participant’s death prior to the Exercise Date of an Offering Period. If a participant is married and 
the designated beneficiary is not the spouse, spousal consent shall be required for such designation to be effective. 

(b)

Unless otherwise determined by the Company, such designation of beneficiary may be changed by 
the participant (and his or her spouse, if any) at any time by written notice to the Company in a manner acceptable 
to the Company. In the event of the death of a participant and in the absence of a beneficiary validly designated 
under the Plan who is living at the time of such participant’s death, the Company shall deliver such Shares and/or 
cash to the executor or administrator of the estate of the participant, or if no such executor or administrator has been 
appointed (to the knowledge of the Company), the Company, in its discretion, may deliver such Shares and/or cash 
to the spouse or to any one or more dependents or relatives of the participant, or if no spouse, dependent or relative 
is  known  to  the  Company,  then  to  such  other  person  as  the  Company  may  designate  or  determine  to  be  the 
appropriate recipient of the Shares and/or cash under applicable local law. 

Transferability. Neither Contributions credited to a participant’s account nor any rights with regard to the 
15.
exercise of an option or to receive Shares under the Plan may be assigned, transferred, pledged or otherwise disposed 
of  in  any  way  (other  than  by  will,  the  laws  of  descent  and  distribution,  or  as  provided  in  Section 14) by  the 
participant. Any such attempt at assignment, transfer, pledge or other disposition shall be without effect, except that 
the Company may treat such act as an election to withdraw funds in accordance with Section 10.

16.
Use of Funds. All Contributions received or held by the Company under the Plan may be used by the 
Company for any corporate purpose, and the Company shall not be obligated to segregate such Contributions, unless 
required by local law. 

17.
Reports. Individual accounts will be maintained for each participant in the Plan. Statements of account will 
be given or made available to participating Employees as promptly as practically feasible following the Exercise 
Date, which statements will set forth the amounts of Contributions, the per Share Purchase Price, the number of 
Shares purchased and the remaining cash balance, if any. 

18.

Adjustments Upon Changes in Capitalization: Corporate Transactions.

(a) 

Adjustment. Subject to any required action by the stockholders of the Company, the Reserves, the 
maximum number of Shares an Employee may purchase during each Offering Period as well as the price per Share 
and  the  number  of  Shares  covered  by  each  option  under  the  Plan  which  has  not  yet  been  exercised  shall  be 
proportionately adjusted for any increase or decrease in the number of issued Shares resulting from a stock split, 
reverse stock split, stock dividend, combination or reclassification of the Common Stock, or any other increase or 
decrease in the number of Shares effected without receipt of consideration by the Company; provided, however, 
that conversion of any convertible securities of the Company shall not be deemed to have been “effected without 
receipt of consideration.” Such adjustment shall be made by the Board, whose determination in that respect shall 
be final, binding and conclusive. Except as expressly provided herein, no issue by the Company of shares of stock 
of any class, or securities convertible into shares of stock of any class, shall affect, and no adjustment by reason 
thereof shall be made with respect to, the number or price of Shares subject to an option. 

B-7

(b)

Corporate Transactions. In the event of the proposed dissolution or liquidation of the Company, 
the Plan, any Offering Period then in progress, and any outstanding option granted with respect to such Offering 
Period will terminate immediately prior to the consummation of such proposed action, unless otherwise provided 
by  the  Board.  If  a  participant’s  option is terminated pursuant to  the  preceding sentence,  the  Contributions  then 
credited to such participant’s account will be paid to him or her in cash without interest. In the event of a proposed 
sale of all or substantially all of the assets of the Company, or the merger of the Company with or into another 
corporation, unless otherwise determined by the Board, each option under the Plan shall be assumed or an equivalent 
option shall be substituted by such successor corporation or a parent or subsidiary of such successor corporation, 
or, if not so assumed or substituted, the Offering Period then in progress shall be shortened and the Board shall set 
a  new  Exercise  Date  (the  “New  Exercise  Date”).  The  New  Exercise  Date  shall  be  on  or  before  the  date  of 
consummation of the transaction and the Board shall notify each participant in writing, at least ten (10) days prior 
to the New Exercise Date, that the Exercise Date for his or her option (including for purposes of determining the 
Purchase  Price  of  such  option)  has  been  changed  to  the  New  Exercise  Date  and  that  his  or  her  option  will  be 
exercised automatically on the New Exercise Date, unless prior to such date he or she has withdrawn from the 
Offering Period as provided in Section 10. For purposes of this paragraph, an option granted under the Plan shall 
be deemed to be assumed if, following the sale of assets or merger, the option confers the right to purchase, for each 
Share subject to the option immediately prior to the sale of assets or merger, the consideration (whether stock, cash 
or other securities or property) received in the sale of assets or merger by holders of Common Stock for each Share 
held on the effective date of the transaction (and if such holders were offered a choice of consideration, the type of 
consideration chosen by the holders of a majority of the outstanding Shares of Common Stock); provided, however, 
that if such consideration received in the sale of assets or merger was not solely common stock of the successor 
corporation or its parent (as defined in Section 424(e) of the Code), the Board may, with the consent of the successor 
corporation and the participant, provide for the consideration to be received upon exercise of the option to be solely 
common stock of the successor corporation or its parent equal in Fair Market Value to the per Share consideration 
received by holders of Common Stock and the sale of assets or merger. 

(c)  

The Board may, if it so determines in the exercise of its sole discretion, also make provision for 
adjusting the Reserves, as well as the price per Share covered by each outstanding option, in the event that the 
Company effects one or more reorganizations, recapitalizations, rights offerings or other increases or reductions of 
shares of its outstanding Common Stock, and in the event of the Company being consolidated with or merged into 
any other corporation. 

19.

Amendment or Termination.

(a)

The Board may at any time and for any reason terminate, suspend or amend the Plan. Except as 
provided in Section 13(b) and 18, no such termination of the Plan may affect options previously granted, provided 
that the Plan or an Offering Period may be terminated by the Board on any Exercise Date or by the Board’s setting 
a new Exercise Date with respect to an Offering Period then in progress if the Board determines that termination of 
the Plan and/or the Offering Period is in the best interests of the Company and the stockholders or if continuation 
of the Plan and/or the Offering Period would cause the Company to incur adverse accounting charges as a result of 
a change after the effective date of the Plan in the generally accepted accounting rules applicable to the Plan. If any 
Offering Period is terminated prior to its scheduled expiration (without setting a new Exercise Date), all amounts 
that  have  not  been  used  to  purchase  Shares  will  be  returned  to  participants,  without  interest,  as  soon  as 
administratively practicable. Except as provided in Section 18 and in this Section 19, no amendment to the Plan 
shall make any change in any option previously granted which adversely affects the rights of any participant without 
such participant’s written consent. In addition, to the extent necessary to comply with the requirements of Rule 16b-
3 under the Exchange Act, Section 423 of the Code (or any successor rule or provision or any applicable law or 
regulation)  or  any  stock  exchange  on  which  the  Shares  are  then  listed,  the  Company  shall  obtain  stockholder 
approval in such a manner and to such a degree as so required. 

(b)

Without  stockholder  consent  and  without  regard  to  whether  any  participant  rights  may  be 
considered to have been adversely affected, the Board shall be entitled to change the Offering Periods, limit the 
frequency and/or number of changes in the amount withheld during an Offering Period, establish the exchange ratio 
applicable to amounts withheld in a currency other than U.S. dollars, permit payroll withholding in excess of the 
B-8

amount designated by a participant in order to adjust for delays or mistakes in the Company’s processing of properly 
completed  withholding  elections,  establish  reasonable  waiting  and  adjustment  periods  and/or  accounting  and 
crediting procedures to ensure that amounts applied toward the purchase of Shares for each participant properly 
correspond with amounts withheld from the participant’s Compensation, and establish such other limitations or 
procedures as the Board determines in its sole discretion advisable which are consistent with the Plan. 

20.
Notices. All notices or other communications by a participant to the Company under or in connection with 
the  Plan shall be  deemed to  have been  duly  given  when  received  in the  form specified  by the  Company at the 
location, or by the person, designated by the Company for the receipt thereof. 

21.
Conditions Upon Issuance of Shares. The Company shall have no obligation to issue Shares with respect 
to an option unless the exercise of such option and the issuance and delivery of such Shares pursuant thereto shall 
comply with all applicable provisions of law, domestic or foreign, including, without limitation, the U.S. Securities 
Act of 1933, as amended, the Exchange Act, the rules and regulations promulgated thereunder, and the requirements 
of any stock exchange upon which the Shares may then be listed, and shall be further subject to the approval of 
counsel for the Company with respect to such compliance. 

As a condition to the exercise of an option, the Company may require the person exercising such option to represent 
and warrant at the time of any such exercise that the Shares are being purchased only for investment and without 
any  present  intention  to  sell  or  distribute  such  Shares  if,  in  the  opinion  of  counsel  for  the  Company,  such  a 
representation is required by any of the aforementioned applicable provisions of law. 

22.
Term of Plan; Effective Date. The Plan shall become effective upon the earlier to occur of its adoption by 
the Board or its approval by the stockholders of the Company. The Plan shall continue in effect for a term of ten 
(10) years unless sooner terminated under Section 19. 

23.
Additional Restrictions of Rule 16b-3. The terms and conditions of options granted hereunder to, and the 
purchase  of  Shares  by,  persons  subject  to  Section 16  of  the  Exchange  Act  shall  comply  with  the  applicable 
provisions of Rule 16b-3. This Plan shall be deemed to contain, and such options shall contain, and the Shares 
issued upon exercise thereof shall be subject to, such additional conditions and restrictions as may be required by 
Rule 16b-3  to  qualify  for  the  maximum  exemption  from  Section 16  of  the  Exchange  Act  with  respect  to  Plan 
transactions. 

No Employment Rights. Nothing in the Plan (or in any subscription agreement or other document related 
24.
to this Plan) will confer upon any Employee or participant any right to continue in the employ or other service of 
the Company or any Subsidiary, constitute any contract or agreement of employment or other service or effect an 
employee’s  status as  an  employee  at  will,  nor  shall interfere  in  any  way  with  the  right  of  the  Company  or  any 
Subsidiary to change such person’s compensation or other benefits or to terminate his or her employment or other 
service, with or without cause. Nothing contained in this Section 24, however, is intended to adversely affect any 
express  independent  right  of  any  such  person  under  a  separate  employment  or  service  contract  other  than  a 
subscription agreement. 

25.
No Right to Assets of the Company. No participant or other person will have any right, title or interest in 
any fund or in any specific asset (including Shares) of the Company or any Subsidiary by reason of any option 
hereunder. Neither the provisions of the Plan (or of any subscription agreement or other document related to the
Plan), nor the creation or adoption of the Plan, nor any action taken pursuant to the provisions of the Plan will 
create,  or  be  construed  to  create,  a  trust  of  any  kind  or  a  fiduciary  relationship  between  the  Company  or  any 
Subsidiary and any participant, beneficiary or other person. To the extent that a participant, beneficiary or other 
person acquires a right to receive payment pursuant to the Plan, such right will be no greater than the right of any 
unsecured general creditor of the Company. 

26. Miscellaneous.

B-9

(a)

The Plan, the options, subscription agreements and other documents related to the Plan shall be 
governed by, and construed in accordance with, the laws of the State of Delaware. If any provision of the Plan shall 
be held by a court of competent jurisdiction to be invalid and unenforceable, the remaining provisions of the Plan 
shall continue in effect. 

(b)

Captions and headings are given to the sections of the Plan solely as a convenience to facilitate 
reference. Such captions and headings shall not be deemed in any way material or relevant to the construction of 
interpretation of the Plan or any provision hereof. 

(c)

The  adoption  of  the  Plan  shall  not  affect  any  other  Company  or  Subsidiary  compensation  or 
incentive plans in effect. Nothing in the Plan will limit or be deemed to limit the authority of the Board or a Board 
committee: 

(i)

to establish any other forms of incentives or compensation for employees of the Company 

or any Subsidiary (with or without reference to the Common Stock), or 

to grant or assume options (outside the scope of and in addition to those contemplated by 
the Plan) in connection with any proper corporate purpose, to the extent consistent with any other plan or authority. 

(ii)

Benefits received by a participant under an option granted pursuant to the Plan shall not be deemed a part of the 
participant’s  compensation  for  purposes  of  the  determination  of  benefits  under  any  other  employee  welfare  or 
benefit plans or arrangements, if any, provided by the Company or any Subsidiary, except where the Board or Board 
committee  (or  the  Board  of  Directors  of  the  Subsidiary  that  sponsors  such  plan  or  arrangement,  as  applicable) 
expressly otherwise provides or authorizes in writing. 

B-10

SHAREHOLDER I NFORMATION

LOCATIONS

INVESTOR INFORMATION

HEADQUARTERS
Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts 01887
Phone 978.253.6200
ontoinnovation.com

OTHER LOCATIONS
View all locations on our website:
https://ontoinnovation.com/company/locations

General Shareholder and 
Investor Questions may be
directed to:
Mike Sheaffer
Investor Relations,
Corporate Communications
Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts
01887
investors@ontoinnovation.com

Independent Registered Public
Accounting Firm
Ernst & Young, LLP
Iselin, New Jersey

Registrar and Transfer Agent
Computershare Trust
Company, N.A.
P.O. Box 505000
Louisville, Kentucky 40233
Phone 800.368.5948
www.computershare.com

Stock Symbol
Common stock is traded on the
New York Stock Exchange
under the symbol, ONTO

Annual Meeting
Stockholders are invited to
attend the Annual Meeting
at 1000 am on Tuesday,
May 12, 2020 at our corporate
headquarters, located at 
16 Jonspin Road
Wilmington, Massachusetts
01887

Form 10K
The Annual Report on Form
10K filed with the Securities
and Exchange Commission is
available without charge upon
written request to Investor 
Relations at our corporate 
headquarters address.

BOARD OF DIRECTORS

Christopher A. Seams
Chairman of the Board
Former Chief Executive 
Officer
Deca Technologies

Jeffery A. Aukerman
Former Partner
Deloitte & Touche, LLP

Leo Berlinghieri
Former Chief Executive 
Officer and President
MKS Instruments, Inc.

Edward J. Brown, Jr.
Former Chief Executive 
Officer
Cymer Light Source

Vita A. Cassese
Chief Executive Officer
Mardon Management 
Advisors

Robert G. Deuster
Former Chief Executive 
Officer
Collectors Universe, Inc.

David B. Miller
Former President
DuPont Electronics & 
Communications

Michael P. Plisinski
Chief Executive Officer

Bruce C. Rhine
Former Chief Strategy 
Officer
Nanometrics Incorporated

Timothy J. Stultz, Ph.D.
Former Chief Executive 
Officer
Nanometrics Incorporated

Christine A. Tsingos
Former Executive Vice 
President and Chief Financial 
Officer
Bio-Rad Laboratories

John R. Whitten
Former Chief Financial 
Officer, Vice President and 
Treasurer
Applied Industrial 
Technologies, Inc.

EXECUTIVE OFFICERS

Michael P. Plisinski
Chief Executive Officer

Steven R. Roth
Senior Vice President, 
Finance and Administration 
and Chief Financial Officer

Robert A. Koch
Vice President and General 
Counsel

NYSE 
ONTO

Onto Innovation Inc.
16 Jonspin Road
Wilmington MA 01887
978.253.6200

ontoinnovation.com

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