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Onto Innovation

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FY2023 Annual Report · Onto Innovation
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2024 Proxy

Dear Fellow Stockholders

We are entering a new era for the 
semiconductor value chain.  Artificial 
intelligence (AI) is driving significant advances 
in compute, memory, packaging, and power 
management.  By 2030 McKinsey & Company 
forecasts semiconductor sales will be $1 trillion, 
growing from over $500 billion in 2023, which is 
a compounded annual growth rate of 10%. 
Advanced packaging is a key enabler for much 
of this growth, from the 3D packaging used in 
high bandwidth memory to the 2.5D packaging 
positioning memory much closer to 
high-performance compute engines for AI 
products.  Onto is proud to be serving this entire 
packaging eco-system, resulting in a third 
consecutive record year for our specialty and 
advanced packaging market.    

In addition to the growth in packaging, our 
revenue from power semiconductor customers 
grew 40% in 2023, driven by our expanded 
tool/software footprint at Si, SiC, and GaN 
power customers. Our new portfolio of 
inspection, metrology, and software solutions 
underscores our strategy to support the entire 
value chain from front-end fabs to back-end 
packaging, with a synergistic approach to 
process control solutions.

In our advanced nodes markets, though 
spending was down, we announced several key 
wins for gate-all-around (GAA) R&D and pilot 
lines. These orders represent our qualified 
status of systems for both optical critical 
dimensional (OCD) metrology and planar films 
metrology. We believe our demonstrated value 
proposition in those pilot lines will result in order 
growth when those customers begin ramping 
up production. 

New cost-savings initiatives that were started in 
2023 are now expected to improve gross 
margins in 2024 and beyond, as permanent 
changes are being made to our component 
strategies that are purchased across various 

platforms, along with consolidation of our 
supplier base. These activities are in 
preparation for an expected return to higher 
margins regardless of product mix effects.  

In addition to progressing toward our financial 
and business goals, we made important strides 
in our journey to contribute to a more 
sustainable future.  In 2023, we surpassed our 
2025 goal by reducing our carbon footprint per 
person by 48% compared to our 2020 base 
year. We also increased our use of renewable 
energy to 37%. Additionally, we are helping our 
customers reduce their carbon footprint through 
reductions in overall power consumption per 
wafer and other necessary utilities.  The outlook 
for semiconductors and semiconductor capital 
equipment has never been stronger.  With 
secular drivers in AI and the “electrification of 
everything,” our customers are innovating 
rapidly and depend on companies like Onto 
Innovation to realize their vision.  The 
challenges presented by the increasing 
complexity of our customers’ new products, 
ranging from stringent bare wafer process 
control requirements to intricate new memory 
and logic transistor structures to revolutionary 
new packaging technologies, are creating new 
demands for process control solutions.  Onto 
Innovation is well established across this entire 
value chain, and we are excited to be working 
closely with our customers to ensure we 
continue to provide the mission critical solutions 
necessary to realize their future innovations. 

And finally, on behalf of the entire team at Onto 
Innovation and the board of directors, we thank 
you for your dedicated support and investment.

Sincerely,

Michael P. Plisinski
Chief Executive Officer

Christopher A. Seams
Chairman of the Board

  
Safe Harbor

Certain statements in this document may be considered "forward-looking statements" or may be based on 
"forward-looking statements," including, but not limited to, those concerning: our business momentum and 
future growth; technology development, product introduction and acceptance of our products and services; 
our manufacturing practices and ability to deliver both products and services consistent with our customers' 
demands and expectations and to strengthen our market position, including our ability to source components, 
materials, and equipment due to supply chain delays or shortages; our expectations of the semiconductor 
market outlook; future revenue, gross profits, research and development and engineering expenses, selling, 
general and administrative expenses, and cash requirements; the effects of political, economic, legal, and 
regulatory changes or conflicts on our global operations; the effects of natural disasters or public health 
emergencies, on the global economy and on our customers, suppliers, employees, and business; our 
dependence on certain significant customers and anticipated trends and developments in and management 
plans for our business and the markets in which we operate; and our ability to be successful in managing our 
cost structure and cash expenditures and results of litigation. Statements contained or incorporated by 
reference in this document that are not purely historical are forward-looking statements and are subject to safe 
harbors created under Section 27A of the Securities Act of 1933, as amended, Section 21E of the Securities 
Exchange Act of 1934, as amended (the "Exchange Act"), and the Private Securities Litigation Reform Act of 
1995. Forward-looking statements may be identified by words such as, but not limited to, "anticipate," 
"believe," "continue," "estimate," "expect," "intend," "plan," "should," "may," "could," "will," "would," "forecast," 
"project" and words or phrases of similar meaning, as they relate to our management or us. Forward-looking 
statements contained herein reflect our current expectations, assumptions and projections with respect to 
future events and are subject to certain risks, uncertainties and assumptions, such as those identified in Part I, 
Item 1A. "Risk Factors" of our Form 10-K for the fiscal year ended December 30, 2023. Actual results may differ 
materially and adversely from those included in such forward-looking statements. Forward-looking statements 
reflect our position as of the date hereof and we undertake no obligation to update any forward-looking 
statements, whether as a result of new information, future events or otherwise, except as required by law. 

Stockholder Information

INVESTOR INFORMATION
GENERAL STOCKHOLDER AND INVESTOR QUESTIONS MAY 
BE DIRECTED TO
Onto Innovation
Attn: Investor Relations
16 Jonspin Road
Wilmington, Massachusetts 01887
investors@ontoinnovation.com

INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
Ernst & Young, LLP
Iselin, New Jersey

STOCK SYMBOL
Common stock is traded on the New York Stock 
Exchange under the symbol: ONTO

ANNUAL MEETING
Stockholders are invited to attend the Annual 
Meeting at 8:00 a.m. (PT) on Wednesday, 
May 22, 2024 at our offices, located at: 
1550 Buckeye Drive
Milpitas, CA 95035

LOCATION

HEADQUARTERS

Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts 01887
Phone 978.253.6200
ontoinnovation.com

OTHER LOCATIONS
View all locations on our website:
https://ontoinnovation.com/company/locations

TRANSFER AGENT 
MAIL CORRESPONDENCE TO
Computershare Trust Company, N.A. 
Stockholder Services 
P.O. Box 43006
Providence RI 02940-3006  

SEND OVERNIGHT CORRESPONDENCE TO
Computershare
150 Royall St., Suite 101
Canton, MA 02021

ONLINE INQUIRIES 
www-us.computershare.com/investor/contact 

PHONE

781.575.4223 or 800.368.5948 

 
 
 
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UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549

FORM 10-K

(Mark One)
☒

ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934
For the Fiscal Year Ended December 30, 2023 
OR
TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF
1934

☐

For the transition period from          to
Commission File No. 001-39110

ONTO INNOVATION INC.

(Exact name of registrant as specified in its charter)

Delaware
(State or other jurisdiction of
incorporation or organization)

94-2276314
(I.R.S. Employer
Identification Number)

16 Jonspin Road, Wilmington, MA 01887
(Address of principal executive offices) (Zip Code)
Registrant’s telephone number, including area code: (978) 253-6200

SECURITIES REGISTERED PURSUANT TO SECTION 12(b) OF THE ACT:

Title of Each Class
Common Stock, $0.001 par value per share

Trading Symbol
ONTO

Name of Exchange on Which Registered
New York Stock
Exchange (NYSE)

SECURITIES REGISTERED PURSUANT TO SECTION 12(g) OF THE ACT:
None

Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act.  Yes ☒     No ☐
Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.  Yes ☐     No ☒
Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange 
Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject 
to such filing requirements for the past 90 days.  Yes ☒     No ☐

Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to 

Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).  Yes ☒     
No ☐

Indicate  by  check  mark  whether  the  registrant  is  a  large  accelerated  filer,  an  accelerated  filer,  a  non-accelerated  filer,  a  smaller  reporting 
company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company” and 
“emerging growth company” in Rule 12b-2 of the Exchange Act.:

Large accelerated filer
Non-accelerated filer

☒
☐

Accelerated filer
Smaller reporting company
Emerging growth company

☐
☐
☐

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying 

with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.   ☐

Indicate by check mark whether the registrant has filed a report on and attestation to its management’s assessment of the effectiveness of its 
internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting 
firm that prepared or issued its audit report. ☒

If securities are registered pursuant to Section 12(b) of the Act, indicate by check mark whether the financial statements of the registrant 

included in the filing reflect the correction of an error to previously issued financial statements. ☐

 Indicate  by  check  mark  whether  any  of  those  error  corrections  are  restatements  that  required  a  recovery  analysis  of  incentive-based 

compensation received by any of the registrant’s executive officers during the relevant recovery period pursuant to §240.10D-1(b). ☐
Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Act).  Yes ☐     No ☒
The aggregate market value of the registrant’s voting Common Stock held by non-affiliates of the registrant was approximately $5,659,828,744 

based on the closing price of the Common Stock on the New York Stock Exchange on June 30, 2023.

The number of shares of the registrant’s Common Stock outstanding as of February 5, 2024 was 49,130,018.

DOCUMENTS INCORPORATED BY REFERENCE

Items 10, 11, 12, 13 and 14 of Part III of this Annual Report on Form 10-K incorporate by reference information from the definitive proxy 

statement for the registrant’s annual meeting of stockholders scheduled to be held on May 22, 2024.

Item No.

Page

TABLE OF CONTENTS

PART I
Business .......................................................................................................................................................
Risk Factors .................................................................................................................................................
Unresolved Staff Comments........................................................................................................................
Cybersecurity ...............................................................................................................................................
Properties .....................................................................................................................................................
Legal Proceedings........................................................................................................................................
Mine Safety Disclosures ..............................................................................................................................
PART II

Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity

Securities ..................................................................................................................................................
[Reserved]....................................................................................................................................................
Management’s Discussion and Analysis of Financial Condition and Results of Operations......................
Quantitative and Qualitative Disclosures About Market Risk ....................................................................
Financial Statements and Supplementary Data ...........................................................................................
Changes in and Disagreements with Accountants on Accounting and Financial Disclosure .....................
Controls and Procedures ..............................................................................................................................
Other Information ........................................................................................................................................
Disclosure Regarding Foreign Jurisdictions that Prevent Inspection ..........................................................
PART III
Directors, Executive Officers and Corporate Governance ..........................................................................
Executive Compensation .............................................................................................................................
Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters ...
Certain Relationships and Related Transactions, and Director Independence ............................................
Principal Accountant Fees and Services......................................................................................................
PART IV
Exhibits and Financial Statement Schedules ...............................................................................................

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1B.
1C.
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9C.

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15.
Signatures

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FORWARD-LOOKING STATEMENTS

Certain statements in this Annual Report on Form 10-K (this “Form 10-K”), or incorporated by reference in this Form 
10-K,  of  Onto  Innovation  Inc.  (referred  to  in  this  Form  10-K,  together  with  its  consolidated  subsidiaries,  unless  otherwise
specified or suggested by the context, as the “Company,” “Onto Innovation,” “we,” “our” or “us”) may be considered “forward-
looking statements” or may be based on “forward-looking statements,” including, but not limited to, those concerning:

• our business momentum and future growth;

•

technology development, product introduction and acceptance of our products and services;

• our  manufacturing  practices  and  ability  to  deliver  both  products  and  services  consistent  with  our  customers’
demands  and  expectations  and  to  strengthen  our  market  position,  including  our  ability  to  source  components,
materials, and equipment due to supply chain delays or shortages;

• our expectations of the semiconductor market outlook;

•

•

•

future  revenue,  gross  profits,  research  and  development  and  engineering  expenses,  selling,  general  and
administrative expenses, and cash requirements;

the effects of political, economic, legal, and regulatory changes or conflicts on our global operations;

the effects of natural disasters or public health emergencies on the global economy and on our customers, suppliers,
employees, and business;

• our dependence on certain significant customers and anticipated trends and developments in and management plans

for our business and the markets in which we operate; and

• our ability to be successful in managing our cost structure and cash expenditures and results of litigation.

Statements contained or incorporated by reference in this Form 10-K that are not purely historical are forward-looking 
statements and are subject to safe harbors created under Section 27A of the Securities Act of 1933, as amended (the “Securities 
Act”),  Section  21E  of  the  Securities  Exchange  Act  of  1934,  as  amended  (the  “Exchange  Act”),  and  the  Private  Securities 
Litigation Reform Act of 1995. Forward-looking statements may be identified by words such as, but not limited to, “anticipate,” 
“believe,” “continue,” “estimate,” “expect,” “intend,” “plan,” “should,” “may,” “could,” “will,” “would,” “forecast,” “project” 
and words or phrases of similar meaning, as they relate to our management or us.

Forward-looking statements contained herein reflect our current expectations, assumptions and projections with respect 
to future events and are subject to certain risks, uncertainties and assumptions, such as those identified in Part I, Item 1A. “Risk 
Factors” and elsewhere in this Form 10-K. Actual results may differ materially and adversely from those included in such 
forward-looking statements. Forward-looking statements reflect our position as of the date of this report and we undertake no 
obligation to update any forward-looking statements, whether as a result of new information, future events or otherwise, except 
as required by law.

1

Item 1. Business.

General

PART I

Onto Innovation is a worldwide leader in the design, development, manufacture and support of metrology and inspection 
tools  for  the  semiconductor  industry,  including  process  control  tools  that  perform  optical  metrology  on  patterned  and 
unpatterned  wafers,  wafer  macro-defect  inspection,  including  macro-inspection  of  both  2D  and  3D  wafer  features,  wafer 
substrate and panel substrate lithography systems, and process control analytical software.  Our products are primarily used by 
silicon  wafer  manufacturers,  semiconductor    integrated  circuit  (“IC”)  fabricators,  and  advanced  packaging  manufacturers 
operating in the semiconductor market. Our products are also used for process control in a number of other specialty device 
manufacturing markets, including light emitting diodes (“LED”), vertical-cavity surface-emitting lasers (“VCSEL”), micro-
electromechanical systems (“MEMS”), CMOS image sensors (“CIS”), silicon and compound semiconductor (SiC and GaN) 
power devices, analog devices, RF filters, data storage, and certain industrial and scientific applications.

We provide process and yield management solutions used in bare silicon wafer production and wafer processing facilities, 
often  referred  to  as  “front-end”  manufacturing,  and  advanced  packaging  of  chips  and  test  facilities,  or  “back-end” 
manufacturing,  through  a  portfolio  of  standalone  systems  for  optical  metrology,  macro-defect  inspection,  packaging 
lithography,  as  well  as  transparent  and  opaque  thin  film  measurements.  Our  automated  and  integrated  metrology  systems 
measure  critical  dimensions,  device  structures,  topography,  shape,  and  various  thin  film  compositions,  including  three-
dimensional features and film thickness, as well as optical and material properties. Our primary areas of focus  include products 
that provide critical yield-enhancing and actionable information, which is used by microelectronic device manufacturers to 
improve yield and time to market of their next-generation devices.  Our systems feature sophisticated software and production-
worthy automation. In addition, our advanced process control software portfolio includes powerful solutions for standalone 
tools, groups of tools, and factory-wide and enterprise-wide suites to enhance productivity and achieve significant cost savings. 
Our systems are backed by worldwide customer service and applications support. 

Industry Background

We participate in the sale, design, manufacture, marketing and support of process control systems for optical critical 
dimension (“OCD”) metrology, thin film metrology, silicon wafer inspection, 2D and 3D macro inspection and lithography 
tools for advanced packaging and advanced analytical software for semiconductor manufacturing as well as inspection systems 
for  certain  industrial  applications  and  scientific  research.  Our  principal  market  is  semiconductor  capital  equipment.  
Semiconductors packaged as ICs, or “chips”, are used in consumer electronics, server and enterprise systems, mobile computing 
(including smart phones and tablets), data storage devices, and embedded automotive and control systems. Our core focus is 
the measurement and control of the structure, composition, and geometry of semiconductor devices as they are fabricated on 
silicon wafers to improve device performance and manufacturing yields. Our end customers manufacture many types of ICs 
for  a  multitude  of  applications,  each  having  unique  manufacturing  challenges.  This  includes  ICs  to  enable  information 
processing and management (logic ICs), memory storage (NAND, 3D-NAND, and DRAM), analog devices (e.g., Wi-Fi and 
5G radio ICs, power devices), MEMS sensor devices (accelerometers, pressure sensors, microphones), CMOS image sensors, 
and other specialty end markets including components for hard disk drives, LEDs, and power management devices.

Current Trends

Markets

Advanced Nodes. “Advanced Nodes” refers to leading-edge ICs where the sizes of transistors and other features continue 
to shrink. Advanced nodes are associated with transistor dimensions less than 16 nanometers (nm). Our metrology systems 
used to measure and characterize these small features are generally purchased when a customer is beginning to manufacture at 
a new, smaller node, in order to set up and test new manufacturing equipment being installed for the new node. Our process 
control/metrology equipment  is generally  installed  prior to the  installation  of the  actual  process  equipment for  that  reason. 
Additional process control equipment is normally purchased when the initial process yields have been stabilized and more 
manufacturing  capacity  is  required  to  meet  production  demands.  Therefore,  our  sales  to  customers  for  advanced  nodes  is 
generally higher when manufacturing lines for new nodes are being established and may not represent continuous sales revenue 
until our initial systems reach high levels of utilization driven by the need for greater capacity. 

Demand for our products continues to be driven by our customers’ desire for higher overall chip performance enabled by 
a  greater  number  of  transistors  per  square  millimeter,  while  improving  power  efficiency,  logic  processing  capability,  data 
storage volume and manufacturing yield. To achieve these goals, our customers have increased their use of more complex 

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materials and processing methods in their manufacturing flow. The primary path for performance gains is geometric scaling, 
known as node shrinks, or scaling of transistor dimensions. In some cases, our customers are implementing new materials and 
methods in high volume manufacturing, including materials and device architectures to reduce power consumption. To scale 
NAND  memory,  for  example,  a  3D  layered  architecture  has  been  implemented  for  several  customers  with  more  than  150 
storage cell layers for devices in production. Additional innovation continues in Data Storage, Power Devices, MEMS, and 
Image Sensors. We believe the use of these new materials and manufacturing methods has increased demand for our products 
such as the Atlas® product line, which is capable of measuring advanced nodes as certain features shrink beyond 7nm, to 5nm, 
3nm and in the most advanced of cases, 2 nm or less.  

To  shrink  features,  new  methods,  including  multiple  patterning  lithography  and  extreme  ultra-violet  (“EUV”) 
lithography, have been developed. The EUV process is driving significantly higher requirements for the silicon wafers that are 
entering the EUV chamber. Small particles on the backside of the wafer measuring a few micrometers (microns) can distort 
the  images  being  projected  onto  the  top  side.  Our  NovusEdge®  inspection  tool  has  been  installed  at  major  silicon  wafer 
manufacturers  to  detect  backside  contamination  and  edge  cracking  as  a  final  quality  control  mechanism  before  wafers  are 
shipped to the semiconductor fabrication processes. The top side of wafers used for the EUV process is covered with an epitaxial 
layer, which must also be scanned for any impurities. This compositional analysis may be measured using our Element® system 
using Fourier Transform Infrared (“FTIR”) algorithms.   

Advanced  Packaging.  “Advanced  Packaging”  refers  to  a  variety  of  technologies  that  enable  the  miniaturization  of 
electronic  products,  such  as  smartphones,  watches,  and  tablets.  Historically,  IC  packaging  refers  to  the  final  stage  of 
semiconductor device fabrication, in which a single circuit made from semiconducting material (a die or chip) is encased in a 
molded package using small wires to provide connections to a carrier that can be soldered to a printed circuit board and also 
prevents physical damage and corrosion to the chip.  Advanced Packaging refers loosely to the multi-layer conductors and chip 
structures (other than wires) that often interconnect multiple die, feed them with electric power and create signal paths to and 
from the Printed Circuit (“PC”) board, dissipate their heat, and protect them from damage.  Today, the drive to pack more 
functions into a small space and reduce their power requirements demands that chip packages do much more than ever before 
to combine multiple chips and functions into a single molded package.  

One example of the technology used in Advanced Packaging is the 3D integration of semiconductors. This technology 
involves stacking individual chips in one integrated package. Through-silicon vias (“TSVs”) are vertical copper interconnects 
that are embedded from the bottom surface of a die to the top surface and use small copper/solder “bumps” to connect one chip 
to another. TSVs allow power and communication to be shared among the individually stacked components. This offers the 
advantages of shorter signal paths and, in turn, reduced power consumption, enhanced bandwidths, integration of heterogeneous 
components such as memory and logic chips, and smaller surface area. The processes required for 3D integration vary from 
one manufacturer to another and many continue to be optimized for yield and to ensure the functioning of individual stacked 
chips. 

Heterogeneous integrated (“HI”) packaging is another advanced packaging technology using copper pillars/bumps to 
vertically connect a wide variety of stacked die for 2.5D, and 3D integration techniques as well as horizontally connected chips 
and is considered the next disruptive technology for several reasons. First, HI packages using 3D stacking can significantly 
reduce  the  space  needed  inside  an  electronic  device,  such  as  a  smartphone,  by  combining  multiple  chips/functions  into  a 
“system  in  a  package”  (“SIP”).  Next,  HI  packages  also  improve  a  system’s  performance  by  reducing  power  and  signal 
conductor lengths, which previously were routed from package to package through a PC board using thin redistribution layers 
(“RDLs”) to connect chips that are side-by-side. Lastly, the technology is currently considered the preferred vehicle for next 
generation uses, such as SIP, and package on package formats.  As a result of the small overall form factor, HI packages provide 
the functionality needed in high-end mobile and wearable products. 

Our inspection systems and software are used for process control and detection of potential reliability failures in nearly 
all  of  these  packages.  Inspection  rates  for  advanced  packages  are  high  throughout  the  assembly  process  to  avoid  a  single 
defective chip from being assembled into a relatively expensive package. Thus, unlike the cyclical nature of our metrology 
equipment associated with node shrinks, our sales revenue for advanced packaging is generally driven by assembly volumes.

Panel Substrate Manufacturing. One current  process to  manufacture advanced  packaging involves attaching  known 
good die to a 300mm wafer.  SIP packages can often contain side-by-side die, meaning the package can be large and limit the 
number  of  packages  being  placed  on  a  wafer.  In  order  to  meet  the  growing  demand  at  reduced  average  selling  prices, 
manufacturers are looking to scalable technology. Advanced packaging facilities looking to improve Cost of Ownership and 
increase productivity are transitioning from 300mm wafers to large rectangular panels, which can be as large as 650mm x 
650mm.  This  larger  size  enables  companies  manufacturing  large  area  packages  to  increase  the  number  of  devices  being 
processed at each step as they are no longer limited to operating within the constraints of a round wafer. By responding to 
market opportunities and addressing the stringent demands of customers’ technical roadmaps, we believe that Onto Innovation 
is optimally positioned to capitalize on the emerging market of high-volume manufacturing of advanced IC substrates.  For 

3

example,  the  JetStep®  X500  lithography  system,  having  emerged  from  the  flat  panel  display  market,  is  readily  capable  of 
processing RDLs on very thin advanced organic laminate panels in the semiconductor advanced packaging market. The Firefly® 
series of panel level macro inspection tools, designed for high resolution inspection, can provide defect detection and location 
information  to  the  JetStep  X500  tool  for  each  die,  which  greatly  improves  lithography  throughput  using  our  exclusive 
StepFAST™  process.  It  also  delivers  a  combination  of  defect  classification  and  process  throughput  in  a  single  software 
platform. It reduces capital investment requirements and provides a reliable pathway to transition from wafer to panel-based 
processes.

Technology

We believe that our expertise in our core technologies of optics and software and our combined investment in research 
and development will enable us to rapidly develop new technologies and products in order to quickly respond to emerging 
industry  trends  and  competitive  challenges.  The  breadth  of  our  technology  enables  us  to  offer  a  diverse  combination  of 
metrology, inspection, and process control solutions. Unique features have been designed into our lithography systems to meet 
our  customers’  changing  process  requirements.  Our  metrology  and  inspection  technologies  provide  process  control  for  the 
majority of advanced node wafers processed today in a semiconductor wafer fab. In front-end processes, OCD metrology, thin 
film metrology, wafer stress metrology and macro defect detection and classification technologies allow yield enhancement for 
critical processes such as photolithography, diffusion, etch, chemical mechanical planarization (“CMP”) and outgoing quality 
control. Within the back-end manufacturing processes, our 2D/3D advanced macro defect inspection provides our customers 
with critical quality assurance and process information. Defects may be created during probing, bumping, dicing, assembly 
processes (RDLs, TSVs, copper pillars, etc.) or general handling and can have a major impact on device and process quality. 
Lastly, we turn the gathered data into useful knowledge for our customers to make yield-enhancing decisions, which lower 
their scrap cost and environmental impact and improve their margins. 

Onto Innovation’s Products

Automated  Metrology  Systems.    The  Atlas  family  of  products  represents  our  line  of  high-performance  automated 
metrology  systems  providing  OCD  and  thin  film  metrology  and  wafer  stress  metrology  for  transistor  and  interconnect 
metrology  applications.  The  thin  film  and  OCD  technology  is  supported  by  our  suite  of  solutions  including  our  latest 
introductions of AI Diffract™ software, SpectraProbe™ software and NanoGen™ scalable computing engine, which enables 
visualization, modeling, and analysis of complex structures. 

AI Diffract is a modeling, visualization and analysis software that takes signals from the metrology systems, providing 
critical dimension, thickness, and optical properties from in-line measurements. The software has an intuitive three-dimensional 
modeling interface to provide visualization of today’s advanced and complex semiconductor devices. There are proprietary 
fitting  algorithms  in  AI  Diffract  that  enable  very  accurate  and  very  fast  calculations  for  signal  processing  for  high  fidelity 
model-based measurements. SpectraProbe is a model-less fitting engine that enables fast time to solution for in-line excursion 
detection and control. SpectraProbe complements the high-fidelity modeling of AI Diffract with a simple machine learning 
interface for rapid recipe deployment. The software is supported by NanoGen, an enterprise scale computing hardware system 
that is deployed to run the computing intensive analysis software. NanoGen leverages commercial server chips and networking 
architecture and is optimized to support the workload of AI Diffract and SpectraProbe analysis.    

Integrated Metrology Systems. Our integrated metrology (“IM”) systems are installed directly onto wafer processing 
equipment to provide near real-time measurements for improved process control and maximum throughput. Our IM systems 
are sold directly to end user customers. The IMPULSE® family of products includes the latest technology for OCD, and thin 
film metrology, and has been successfully qualified on multiple independent wafer fabrication equipment suppliers’ platforms. 

Silicon Wafer All-surface Inspection/Characterization. “All-surface” refers to inspection of the wafer frontside, edge, 
and backside as well as wafer’s locator notch. The edge inspection process focuses on the area near the wafer edge, an area that 
poses difficulty for traditional wafer frontside inspection technology due to its varied topography and process variation. Edge 
bevel inspection looks for defects on the side edge of a wafer. Edge bead removal and edge exclusion metrology involve a 
topside  surface  measurement  required  exclusively  in  the  lithography  process,  primarily  to  determine  if  wafers  have  been 
properly  aligned  for  the  edge  exclusion  region.  The  primary  reason  for  wafer  backside  inspection  is  to  determine  if 
contamination has been created that may spread throughout the wafer fab. For instance, it is critical that the wafer backside be 
free of defects prior to the EUV lithography process to prevent focus and exposure problems on the wafer frontside. 

 Our  materials  characterization  products  include  systems  that  are  used  to  monitor  the  physical,  optical,  and  material 
characteristics of discrete electronic industry, opto-electronic, HB-LED (high brightness LEDs), solar PV (solar photovoltaics), 
compound semiconductor, strained silicon and silicon-on-insulator (“SOI”) devices, including composition, crystal structure, 
layer thickness, dopant concentration, contamination and electron mobility.  

4

 We have a broad portfolio of products for materials characterization including photoluminescence mapping and Fourier 
Transform  Infrared  (“FTIR”)  spectroscope  in  automated  and  manual  systems  for  substrate  quality  and  epitaxial  thickness 
metrology. The NanoSpec® line supports thin film measurement across all applications in both low volume production and 
research applications.  

Macro Defect Inspection. Chip manufacturers deploy advanced macro defect inspection throughout the production line 
to  monitor  key  process  steps,  gather  process-enhancing  information  and  ultimately,  lower  manufacturing  costs.  Field-
established tools such as the F30™, NSX®, Firefly®, and the latest Dragonfly® G3 inspection systems are found in the wafer 
fab (front-end) and packaging (back-end) facilities around the world. These high-speed tools incorporate features such as wafer-
less recipe creation, tool-to-tool correlation and multiple inspection resolutions. Using Discover® yield management software, 
the vast amounts of data gathered through automated inspection can be analyzed and classified to determine trends and locate 
root causes that directly affect yield. 

Automated Defect Classification and Pattern Analysis. Automating the defect detection and classification process is 
best done by a system that can mimic, or even extend, the response of the human eye, but at a much higher speed, with higher 
resolution and more consistency. To do this, our systems capture full-color whole wafer images using simultaneous dark and 
bright field illumination. The resulting bright and dark field images are compared to those from an “ideal” wafer having no 
defects using our Automated Defect Classification (“ADC”) software. When a difference is detected, its image is broken down 
into mathematical vectors that allow rapid and accurate comparison with a library of known classified defects stored in the 
tool’s  database.  Patented  and  proprietary  enhancements  of  this  approach  enable  very  fast  and  highly  repeatable  image 
classification. The system is pre-programmed with an extensive library of local, global, and color defects and can also store a 
virtually  unlimited  amount  of  new  defect  classes.  This  allows  customers  to  define  defects  based  on  their  existing  defect 
classification system, provides more reliable automated rework decisions and enables more accurate statistical process control 
data. Reviewing defects using ADC enables automated inspection systems to maintain their utilization for high throughput 
inspection.  Using  defect  image  files  captured  by  automated  inspection  systems,  operators  are  able  to  view  high-resolution 
defect images to determine defects that cause catastrophic failure of a device, known as killer defects. Combining the review 
process with classifying defects enables faster analysis by grouping defects found together as one larger defect, a scratch for 
example, and defects of similar types across a wafer lot to be grouped based on size, repeating defects, and other user-defined 
specifications. 

Yield Analysis. Using wafer maps, charts and graphs, the massive amounts of data gathered through automated inspection 
can be analyzed to determine trends across bumps, die, wafers and lots. This analysis may determine where a process variation 
or deviation has occurred, allowing process engineers to make corrections or enhancements to increase yields. Defect data 
analysis is performed to identify, analyze and locate the source of defects and other manufacturing process excursions. Using 
either a single wafer map or a composite map created from multiple wafer maps, this analysis enables identification of defect 
patterns and distribution. When combined with inspection data from inspection points placed strategically, this analysis may 
pinpoint the source of the defects so corrective action can be taken. 

Opaque  Film  Metrology.  The  MetaPULSE®  and  EchoTM  systems  allow  customers  to  simultaneously  measure  the 
thickness  and  other  properties  of  up  to  six  metal  or  non-metallic  opaque  film  layers  without  physically  contacting  product 
wafers. PULSETM technology uses an ultra-fast laser to generate acoustic waves that pass down through a stack of opaque films 
such as those used in copper or aluminum interconnect processes, as well as the hard mask layer in 3D NAND chips, sending 
back to the surface a reflected signal (echo) that indicates film thickness, density, and other process critical parameters. We 
believe we are a leader in providing systems that can measure opaque thin-film stacks non-destructively with the speed and 
accuracy semiconductor device manufacturers demand in order to achieve high yields with the latest fabrication processes. The 
technology is ideal for characterizing copper interconnect structures. The MetaPULSE and Echo systems, used for fast and 
accurate measurements of metal interconnect in front-end wafer fabs, have now been chosen by back-end manufacturers to 
perform system measurements in new process applications such as RF filters and modules, driven by the need for on-product 
metrology as feature sizes decrease and pattern densities increase. 

Industrial,  Scientific,  and  Research  Markets  ―  4D  Technology®.    The  4D  business  offers  a  line  of  interferometry 
systems for the measurement and inspection of high precision surfaces. End markets include high precision optics surfaces and 
components, aerospace and defense components, and unique research and scientific instrumentation that requires the unique 
high-speed results of the 4D systems.  

Advanced Packaging Lithography.  Our lithography steppers use projection optics to expose circuit patterns from a mask 
or reticle onto a substrate to expose images with optimal fidelity. These systems employ a bright light that is transmitted through 
a mask or reticle containing display circuit patterns. Substrates are aligned on the system and the mask is imaged through a 
projection lens onto photoresist material coated on the substrate. The substrate is then moved, or “stepped,” to a second position 
to expose an adjacent area. The system repeats the step and exposure process until the entire substrate is patterned. Once the 
exposure process has been completed, the substrate is developed with an alkali solution to reveal the underlying material. The 

5

imaged photoresist serves as a stencil barrier that allows for the processing of the underlying metal or insulating layers.  The 
substrates then continue through the etching, stripping and deposition processes until multi-layer circuits are completed. 

In order to deal with increased input/output (“I/O”) resulting from devices with enhanced functionality, increased power 
distribution efficiency, and higher frequency, IDMs and outsourced semiconductor assembly and test (“OSATs”) facilities must 
incorporate  lithography  capabilities  to  create  RDLs  for  their  advanced  packaging  technologies. However,  the  associated 
substrates and processes are significantly different than those used in front-end wafer processing. For advanced packaging, the 
lithography system must perform in a completely different application, with significantly different operating parameters. For 
example, most packaging is an additive process, while wafer processing is subtractive, and thick films, rather than thin films, 
are used to enable the creation of features. In order for equipment to effectively function in this environment, it must overcome 
these challenges. Our JetStep® systems have been specifically designed to meet these challenges head on. The new JetStep 
X500 System is designed for rectangular substrates (panels), which when combined with user-selectable wavelength options, 
maximizes  throughput  while  not  limiting  resolution  when  needed. High-fidelity  optics  are  able  to  image  the  fine  features 
required while at the same time achieving superior depth of field to minimize non-flatness that is typical for advanced packaging 
applications. On-the-fly auto focus and an innovative reticle management system improve yield and utilization. These features 
result in a revolutionary lithography system specifically designed to meet advanced packaging challenges. 

Process  Control  Software.  We  provide  a  wide  range  of  advanced  process  control  solutions,  which  are  designed  to 
improve factory profitability, including run-to-run control, fault detection, classification and tool automation. We are a leading 
provider of process control software in the semiconductor industry. Advanced process control (“APC”) employs software to 
automatically detect or predict tool failure (fault detection) as well as calculate recipe settings for a process that will drive the 
yielded output to meet and exceed the target, despite variations in the incoming material and minor instabilities within the 
process equipment.  Process control software enables the factory to increase capacity and yield while decreasing rework and 
scrap. It enables reduced production costs by lowering consumables, process engineering time and manufacturing cycle time. 

Yield Management Software. Semiconductor manufacturers use yield management software (“YMS”) to obtain valuable 
process yield and equipment productivity information. The data necessary to generate productivity information comes from 
many different sources throughout the wafer fab: inspection and metrology systems, tool sensors, tool recipes, electrical tests 
and the fab environment. As the complexity and cost of manufacturing processes increase, the value of faster, better analysis 
to support critical manufacturing decisions grows. As a result, customers are demanding robust yield management systems that 
can  analyze  large,  complex  data  sets  quickly  and  effectively.  Our  fully  integrated  YMS  is  designed  to  analyze  data  from 
disparate sources and multiple sites to maximize productivity across the entire value chain. 

Customers

Over 220 customers purchased Onto Innovation tools or software in 2023. We support a diverse customer base in terms 
of both geographic location and type of device manufactured. Our customers are located in over 28 countries. The following 
chart identifies our customers that represented 10% or more of total revenue for each of the last three fiscal years:

Samsung Semiconductor......................................................................................
Taiwan Semiconductor Manufacturing Co. Ltd. .................................................
SK Hynix Inc. ......................................................................................................
* The customer accounted for 10% or more of total revenue during the period.
^ The customer accounted for less than 10% of total revenue during the period.

Sales, Customer Service and Application Support

2023
*
*
^

2022
*
*
*

2021
*
*
^

We believe that the capability for direct sales and support is beneficial for developing and maintaining close customer 
relationships  and  for  rapidly  responding  to  changing  customer  requirements.  We  provide  local  direct  sales,  service  and 
application support through our worldwide offices located in the United States, South Korea, Japan, Taiwan, China, Vietnam 
Singapore and Europe, and work with selected dealers and sales representatives on a more limited basis in various countries. 
Our applications team is composed of technically experienced sales engineers who are knowledgeable in the use of metrology 
systems generally and the unique features and advantages of our specific products. Supported by our technical applications 
team, our sales and support teams work closely with our customers to offer cost-effective solutions to complex measurement 
and process problems. 

We believe that customer service and technical support for our systems are crucial factors that distinguish us from our 
competitors  and  are  essential  to  building  and  maintaining  close,  long-term  relationships  with  our  customers.  We  generally 
provide a warranty for our products that ranges from twelve to fourteen months to cover defects in material and workmanship. 
We provide system support to our customers through factory technical support and globally deployed field service personnel. 

6

The factory technical support operations provide customers with telephonic technical support access, direct training programs, 
operating  manuals  and  other  technical  support  information  to  enable  effective  use  of  our  metrology  and  measurement 
instruments  and  systems.  We  have  field  service  operations  based  in  various  locations  throughout  the  United  States,  South 
Korea, Taiwan, China, Japan, Vietnam, Malaysia, Singapore, Israel, and Europe. 

Competition 

The global semiconductor equipment industry is intensely competitive and we have multiple established and potential 
competitors in the markets in which we participate.  Our industry is driven by rapid technological adoption cycles, with new 
entrants from overseas and domestic sources competing for our customers’ business. Our ability to compete effectively depends 
upon  our  ability  to  continuously  improve  our  existing  products,  applications  and  services,  and  our  ability  to  develop  new 
products, applications and services that meet constantly evolving customer requirements. In order to continuously improve and 
develop new products and maintain customer service and support centers worldwide, we believe that we will require significant 
resources; however, some of our competitors may have greater financial, research, engineering, manufacturing and marketing 
resources than we have.

In automated systems for the semiconductor industry, our principal competitors are KLA Corporation (“KLA”) and Nova 
Ltd. (formerly Nova Measuring Instruments Ltd.) (“Nova”) for thin film and critical dimension OCD metrology. Our principal 
competitors  for  advanced  packaging  inspection  are  KLA  and  Camtek  Ltd.  (“Camtek”).  While  the  advanced  packaging 
lithography  market  is  served  by  various  competitors,  our  primary  competitors  are  Ushio,  Inc.  (“Ushio”)  and  Canon,  Inc. 
(“Canon”). Our primary competitor for inspection in the panel market is GigaVis Co. Ltd. The primary competitor for our 
software products is PDF Solutions, Inc. (“PDF Solutions”) and our primary competitor for integrated metrology systems for 
the semiconductor industry is Nova. The opto-electronics, discrete device and industrial and scientific markets are addressed 
primarily by our material characterization and 4D systems, served by numerous competitors, of which no single competitor or 
group of competitors has established a majority position. 

We believe that our competitive position in each of our markets is based on the ability of our products and services to 
address  customer  requirements  related  to  numerous  competitive  factors.  Competitive  selections  are  based  on  many  factors 
involving technological innovation, productivity, total cost of ownership of the system, including impact on end of line yield, 
price, product performance and throughput capability, quality, reliability and customer support.

Manufacturing 

Our manufacturing operations are in Milpitas, California; Tucson, Arizona; Wilmington, Massachusetts; Bloomington, 
Minnesota; and at various contract manufacturers around the world. It is our strategy to outsource the assemblies that do not 
contain elements that we believe lead to a direct competitive advantage. Most of our automated and integrated products are 
currently manufactured at our Milpitas and Bloomington facilities. We currently do not expect our manufacturing operations 
to require additional major investments in capital equipment. 

We  manufacture  key  modular  assemblies  and  integrated  tools  and  make  reasonable  efforts  to  ensure  that  externally 
purchased parts or raw materials are available from multiple suppliers, if possible. Certain components, subassemblies and 
services necessary for the manufacture of our systems are obtained either from a sole supplier or limited group of suppliers. 
We also have long-term supply agreements with strategic suppliers for the supply of key assemblies for use in our products. 
For  more  information,  please  see  “Part  I,  Item  IA  -  Risk  Factors  -  If  we  do  not  manage  our  supply  chain  effectively,  our 
operating results may be adversely affected, and any increases in material, labor, supplier, logistics and other operating costs, 
or supply chain delays and shortages, could lower our margins or result in lost sales”.

Research and Development 

We  continue  to  invest  in  research  and  development  to  provide  our  customers  with  products  that  add  value  to  their 
manufacturing processes and that provide a better and differentiated solution than our competitors so that our products stay in 
the  forefront  of  current  and  future  market  demands.  Whether  it  is  for  an  advancement  of  current  technology,  yield  and 
manufacturing improvement, enabling new end device technology, or the development of a new application in our core or 
emerging markets, we are committed to product excellence and longevity. 

The markets for equipment and systems for manufacturing semiconductor devices and for performing OCD metrology, 
macro-defect inspection, advanced packaging lithography and thin film transparent and opaque process control metrology are 
characterized  by  continuous  technological  development  and  product  innovations.  We  believe  that  the  rapid  and  ongoing 
development of new products and enhancements to existing products are critical to our success. Accordingly, we devote a 
significant portion of our technical, management and financial resources to research and development programs.

7

Intellectual Property

We believe that our success will depend to a great degree upon innovation, technological expertise and our ability to 
adapt our products to new technology. As a result, we have a policy of seeking patents on inventions governing new products 
or technologies as part of our ongoing research, development, and manufacturing activities. As of December 30, 2023, we have 
been granted, or hold exclusive licenses to, 398 U.S. and foreign patents. The patents we own, jointly own or exclusively license 
have expiration dates ranging from 2024 to 2042. We also have 175 pending patent applications in the United States and other 
countries.  Our  patents  and  patent  applications  principally  cover  various  aspects  of  metrology,  macro-defect  detection  and 
classification,  altered  material  characterization,  lithography  techniques,  automation,  artificial  intelligence,  and  machine 
learning. 

To  protect  our  intellectual  property,  we  rely  on  a  combination  of  patents,  copyrights,  trademarks,  trade  secret  laws, 
contractual provisions and licenses and non-disclosure agreements. There can be no assurance that our intellectual property 
will provide us competitive advantage or that we will be able to fully protect our intellectual property.  For more information, 
please see “Part I, Item IA - We may fail to adequately protect our intellectual property and, therefore, lose our competitive 
advantage.” Additionally, others may obtain patents or trademarks and assert them against us. We may find it necessary to 
engage in litigation regarding intellectual property rights or contractual rights, which will be costly and time consuming without 
guarantee that it will yield the result we seek. For more information, please see “Part I, Item IA - Protection of our intellectual 
property rights, or the efforts of third parties to enforce their own intellectual property rights against us, may result in costly 
and time-consuming litigation, substantial damages, lost product sales and/or the loss of important intellectual property rights.” 

Human Capital and Talent 

As  of  December  30,  2023,  we  had  approximately  1,497  staff  globally,  377  in  research  and  development,  280  in 
operations, 181 in administration and 659 in sales, applications and service support. A large percentage of our employees have 
technical  backgrounds  and  undergraduate  and/or  advanced  degrees.  Many  of  our  employees  have  specialized  skills  and 
experience that are of value to our business, products and services. Our future success will depend, in large part, upon our 
ability to attract, motivate and retain our highly skilled, technical, operational and managerial team members, who are in great 
demand in our industry and business communities.

Approximately 59% of our employees are located in the United States, 37% in Asia Pacific and 4% in Europe. None of 
our  employees  are  represented  by  a  union  and  we  have  never  experienced  a  work  stoppage  because  of  union  actions.  We 
consider our employee relations to be favorable. 

Purpose and Culture. All of our employees are expected to uphold the following core values which are foundational to 

our culture:

• Passion – ownership, pride and caring in our work

•

Integrity – honesty, dependable, predictable and accountable

• Collaboration – working together toward a common goal

• Results – meeting and exceeding goals, focused toward innovation and growth 

These core values define the way we do business in our everyday actions and choices. We strive to create a respectful 

work environment characterized by mutual trust and the absence of intimidation, oppression, discrimination and exploitation.

Talent Development and Acquisition. Successful execution of our strategy is dependent on attracting, developing and 
retaining key employees and members of our management and leadership teams. The skills, experience and industry knowledge 
of our employees significantly benefit our operations and performance. We continuously evaluate, modify, and enhance our 
internal processes, tools and technologies to increase employee engagement, productivity, quality and efficiency. We offer 
employees access to internal and external training and development courses to support individual development. We review 
succession plans and focus on promoting internal talent to help grow our employees, both professionally and personally. 

We strive to promote and cultivate an inclusive and diverse culture that welcomes and celebrates everyone without bias. 

In addition, we look to actively engage within our communities to foster and attain social equity.

Compensation Philosophy. Our compensation philosophy creates the framework and building blocks for our rewards 
and recognition programs. We have a pay-for-performance culture that ties compensation to the performance of the individual 
and the Company. We provide balanced compensation programs that focus on the following five key elements:

• Pay-for-performance - Reward those who achieve or exceed set goals and objectives, while also recognizing those 

making significant, impactful contributions;

8

• External market based - Pay levels that are competitive with respect to the labor market in which we compete for

talent;

•

Internal equity - Providing fair compensation programs within the Company;

• Fiscal responsibility - Providing programs which can be responsibly supported by our operations; and

• Legal compliance - Ensure compliance with the applicable laws of the states and countries in which we operate in

all material respects.

Safety,  Health  and  Wellness.  We  strive  to  provide  an  environment  which  is  safe  and  where  our  employees  can  be 
productive. We have rigorous health and safety programs focused on awareness, recognition, risk assessment and management, 
as well as teamwork. 

Our  benefit  plans  are  competitive  and  comprehensive.  We  provide  each  of  our  employees  educational  programs  and 

initiatives focused on holistic wellness supporting nutritional, physical, emotional, mental and financial wellbeing.

Corporate Social Responsibility

Our stakeholders are essential to our business – shareholders, customers, suppliers, employees, communities as well as 
the environment and society. We are working to make our workforce more inclusive, our business more sustainable, and our 
communities more engaged by maintaining strong environmental, social and governance (“ESG”) practices. Actions we have 
taken in pursuit of these commitments include the following environmental and social programs:

• Demanded excellence in our environmental performance, as illustrated in our annual ESG reports.

• Demanded excellence in our quality performance, as demonstrated through our product and process qualification

commitments, including ISO 9001 Quality Management;

• Set goals to reduce our environmental impact, including an increase in our use of renewable energy, a decrease in
hazardous waste landfill, an increase in recycling materials and beneficial reuse, and a reduction in our freshwater
usage;

• Committed  to  RBA  Code  of  Conduct  and  humane  treatment  of  all  at  Onto  Innovation  both  upstream  and
downstream.  We established policies and practices to ensure that: working conditions are safe; workers are treated
with respect and dignity; and manufacturing processes are environmentally responsible.

• Produced systems responsibly by offering tool trade-in, refurbishment and technology upgrade programs;

• Provided corporate matching for employee donations to qualified nonprofit organizations; and

• Engaged in community service projects in our communities globally.

We 

encourage 

at 
https://ontoinnovation.com/company/environmental-social-governance)  for  more  detailed  information  regarding  our  ESG 
initiatives. Nothing on our website, including our ESG Report or sections thereof, is deemed incorporated by reference into 
this Form 10-K.

ESG  Report 

our  website 

(located 

review 

2022 

you 

our 

on 

to 

Compliance with Governmental Regulations 

We are subject to international, federal, state and local regulations that are customary to businesses in the semiconductor 

capital equipment manufacturing industry. Such regulations include, but are not limited to:

• The  Restriction  of  Hazardous  Substances  Directive  (“RoHS”),  which  restricts  the  use  of  certain  hazardous

substances in electrical and electronic equipment;

• General  Data  Protection  Regulation  (“GDPR”),  which  provides  guidelines  for  the  collection  and  processing  of
personal information from individuals who live in the European Union, and similar laws and regulations in other
jurisdictions in which we operate;

• The U.S. Foreign Corrupt Practices Act (“FCPA”), which prohibits companies and their individual officers from

influencing foreign officials with any personal payments or rewards;

• Conflict minerals reporting, which imposes disclosure requirements regarding the use of “conflict” minerals mined

from the Democratic Republic of Congo and adjoining countries in products; and

9

• Export regulations.

Our  compliance  with  export  regulations  has  negatively  impacted  our  ability  to  compete  for  the  business  of  domestic 
customers in China, which has adversely affected our results of operations.  For additional discussion of the impact of trade 
policies and export regulations on our competitive position, see “Part I, Item IA - Risk Factors - Tariffs, export regulations, 
and  other  market  barriers  have  impacted  and  may  continue  to  impact  our  ability  to  compete  for  the  business  of  domestic 
customers in China and other jurisdictions, and our results of operations.”

Available Information

Our Internet website address is http://www.ontoinnovation.com. The information on our website is not incorporated into 
this Form 10-K. Our Annual Report on Form 10-K, Quarterly Reports on Form 10-Q and Current Reports on Form 8-K (and 
any amendments to those reports) are made available free of charge, on or through our Internet website, as soon as reasonably 
practicable  after  such  material  is  electronically  filed  with  or  furnished  to  the    United  States  Securities  and  Exchange 
Commission (the “SEC”). All filings we make with the SEC are also available free of charge via EDGAR through the SEC’s 
website at http://www.sec.gov. In addition, the historic reports and materials that were filed by Nanometrics and Rudolph with 
the  SEC  are  available  at  our  investor  relations  website  at  https://investors.ontoinnovation.com.  These  filings  may  also  be 
obtained through the SEC’s website. Documents that are not available through the SEC’s website may also be obtained by 
submitting an online request to the SEC at http://www.sec.gov.

We also make available, free of charge, through our investor relations website, our corporate governance guidelines, 
Code  of  Business  Conduct  and  Ethics,  charters  of  the  committees  of  our  Board  of  Directors,  and  other  information  and 
materials, including information about how to contact our Board of Directors. 

Investors and others should also note that we announce material financial information to our investors using our investor 
relations website, SEC filings, press releases, public conference calls and webcasts. We use these channels as well as social 
media to communicate with the public about the Company, our products and services and other matters. It is possible that the 
information we post on social media could be deemed to be material information. Therefore, we encourage investors, the media, 
and others interested in the Company to review the information we post on the social media channels listed on our investor 
relations website.

10

 
Item 1A. Risk Factors.

Below is a summary of the principal factors and uncertainties that make investing in our company risky.  You should 

read this summary together with the more detailed description of each risk factor contained further below.

 Risks Related to Our Operations

•

•

•

•

•

•

•

•

•

If  we  do  not  manage  our  supply  chain  effectively,  our  operating  results  may  be  adversely  affected,  and  any
increases in material, labor, supplier, logistics and other operating costs, or supply chain delays and shortages,
could lower our margins or result in lost sales.

Variations in the amount of time it takes for us to sell our systems may cause fluctuations in our operating results,
which could cause our stock price to decline.

We are subject to order and shipment uncertainties. Our profitability will decline if we fail to accurately forecast
customer demand when managing inventory.

If we deliver systems with defects, our credibility  will be harmed, and the sales and  market acceptance of our
systems will decrease.

Our integrated metrology systems are integrated with systems sold independently by wafer fabrication equipment
suppliers, and a decrease in sales by these suppliers, or the development of competing systems by these suppliers,
could harm our business.

We  must  attract  and  retain  experienced  senior  executives  and  other  key  personnel  with  knowledge  of
semiconductor device manufacturing and inspection, metrology or lithography equipment and related software to
help support our future growth, and competition for such personnel in our industry is high.

Any prolonged disruption in the operations of our manufacturing facilities could have a material adverse effect on
our revenue.

We outsource select manufacturing activities to third-party service providers, which decreases our control over the
performance of these functions, may result in lower quality and functionality of our products, and exposes us to
additional supply chain risks.

Our ability to fulfill our backlog may have an effect on our long-term ability to procure contracts and fulfill current
contracts.

Risks Related to Our Customers

•

Our  largest  customers  account  for  a  substantial  portion  of  our  revenue,  and  our  revenue  and  cash  flows  could
decline considerably if one or more of these customers were to purchase significantly fewer of our systems or delay
or cancel a large order.

Risks Related to Product Development

•

•

•

•

If we are not successful in developing new and enhanced products for the semiconductor device manufacturing
industry, we will lose sales and market share to our competitors.

If new products developed by us do not gain general market acceptance, we will be unable to generate revenue and
recover our investments, which may result in a write down of inventory.

Even if we are able to develop new products that gain market acceptance, sales of these new products could impair
our ability to sell existing products.

If our relationships with our large customers deteriorate, our product development activities could be adversely
affected.

Risks Related to Intellectual Property and Data Security

•

•

We may fail to adequately protect our intellectual property and, therefore, lose our competitive advantage.

Protection of our intellectual property rights, or the efforts of third parties to enforce their own intellectual property
rights against us, may result in costly and time-consuming litigation, substantial damages, lost product sales and/or
the loss of important intellectual property rights.

11

•

•

If our network security measures are breached and unauthorized access is obtained to a customer’s data, to our
data, or to our information technology systems, we may incur significant legal and financial exposure and liabilities
and may experience disruptions in our operations.

Compliance with data protection laws may be costly and may impede development of new products, and any failure
to  comply  with,  or  inquiries  under,  these  laws  could  have  a  material  adverse  effect  on  our  business,  results  of
operations and financial condition.

Risks Related to Competition

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Some  of  our  current  and  potential  competitors  have  significantly  greater  resources  than  we  do,  and  increased
competition could impair sales of our products or cause us to reduce our prices.

Because of the high cost of switching equipment vendors in our markets, it is sometimes difficult for us to win new
customers from our competitors even if our systems are superior to theirs.

Risks Related to Our International Operations

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Tariffs,  export  regulations,  and  other  market  barriers  have  impacted  and  may  continue  to  impact  our  ability  to
compete for the business of domestic customers in China and other jurisdictions, which has adversely affected and
may continue to adversely affect our, business, financial condition and results of operations.

We are subject to compliance with domestic and foreign laws and regulations, and the burden of complying with
such laws and regulations, or any failure to comply, has adversely affected and may continue to adversely affect
our business, financial condition and results of operations.

Political and economic instability may result in reduced demand for our products.

Natural disasters, changes in climate, public health crises, and geo-political conflicts could materially adversely
affect our worldwide operations (or those of our business partners).

We may face difficulties in staffing and managing foreign branch operations due to political tensions or cultural
differences.

Currency fluctuations may impact our international sales or expose us to exchange rate risk.

Our internal controls with respect to anti-corruption laws may not be effective, and any failure to comply with such
laws may result in severe sanctions and liabilities, which may negatively affect our business, operating results and
financial condition.

Risks Related to Laws, Legal Proceedings, Financial Markets and the Environment

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Changes in tax rates or tax liabilities could affect results.

Turmoil  or  fluctuations  in  the  credit  markets  and  the  financial  services  industry  may  negatively  impact  our
business, results of operations, financial condition or liquidity, and our factoring arrangements may expose us to
additional risks.

We are subject to various environmental laws and regulations that could impose substantial costs upon us, and
failure to comply with such laws and regulations may harm our business, operating results and financial condition.

Legal  proceedings,  claims  and  investigations  may  expose  us  to  increased  costs  and  may  negatively  affect  our
business and results of operations.

Risks Related to Growth and Acquisitions

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We may choose to acquire new and complementary businesses, products or technologies instead of developing
them ourselves, and we may be unable to complete these acquisitions or may not be able to successfully integrate
an acquired business in a cost-effective and non-disruptive manner.

If we cannot effectively manage growth, our business may suffer.

Risks Related to the Global Economy and the Semiconductor Industry

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Cyclicality in the semiconductor device industry has led to substantial decreases in demand for our systems in the
past and may, from time to time, continue to do so.

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Our future rate of growth is highly dependent on the development and growth of the market for microelectronic
device inspection, lithography and metrology equipment.

General Risk Factors

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Provisions of our charter documents and of Delaware law could discourage potential acquisition proposals and/or
delay, deter or prevent a change in control of our company.

Our stock price is volatile.

Risks Related to Our Operations

If we do not manage our supply chain effectively, our operating results may be adversely affected, and any increases in 
material,  labor,  supplier,  logistics  and  other  operating  costs,  or  supply  chain  delays  and  shortages,  could  lower  our 
margins or result in lost sales.

We  need  to  continually  evaluate  our  global  supply  chains  and  assess  opportunities  to  reduce  costs.  We  must  also 
enhance  quality,  speed  and  flexibility  to  meet  changing  demand  for  our  products  and  product  mix  and  uncertain  market 
conditions. Our success also depends in part on refining our cost structure and supply chains so that we have flexibility and can 
maintain and improve profitability. Deterioration in the tariff environment, political instability or changes in suppliers may 
cause our costs to increase and, if we are not able to offset the increased costs by charging higher sales prices, will cause a 
decline in our margins. To improve margins on our products, we would need to negotiate price reductions with our vendors. 
But we cannot be certain that we will be able to do so in a timely manner, or at all. Failure to achieve the desired level of cost 
reductions  could  adversely  affect  our  financial  results.  Despite  our  efforts  to  control  costs  and  increase  efficiency  in  our 
facilities, changes in demand could still cause us to realize lower operating margins and profitability.

Further, our gross margins and financial performance may be adversely affected by increases in our operating costs, 
such as material, labor, supplier costs, logistics and energy costs, all of which have been and may continue to be subject to 
inflationary  pressures.  Operating  costs  have  increased  and  may  continue  to  increase  further  as  a  result  of  supply  chain 
disruptions  in  connection  with  the  sourcing  of  components,  materials,  equipment,  engineering  support,  and  services,  labor 
shortages, high inflation rates, and cost increases attributable to the COVID-19 pandemic and the effects of the Russia-Ukraine 
conflict.  In addition, we source components for certain of our tools from a supplier in Israel. If the conflict in Israel and the 
surrounding area escalates, it could disrupt our supply chain, resulting in a material adverse impact on our business.  

These risks may be heightened because we obtain some of the components and subassemblies included in our systems 
from a limited group of suppliers and do not have long-term contracts with many of our suppliers. Our dependence on limited-
source suppliers of components and our lack of long-term contracts with certain of our suppliers expose us to several risks, 
including a potential inability to obtain an adequate supply of components, price increases, late deliveries and poor component 
quality.  A significant number of our suppliers are the sole source or single source for certain components or subassemblies.  If 
such a supplier is unable or unwilling to manufacture and deliver components to us on the time schedule and of the quality or 
quantity that we require, we may be forced to seek to engage an additional or replacement supplier or redesign our product to 
use  alternative  components,  which  could  result  in  additional  expenses  and  delays  in  product  development  or  shipment  of 
product to our customers. Disruption or termination of the supply of components has delayed and could in the future delay 
shipments of some of our systems.  Such delays may damage our customer relationships and reduce our sales. The lead time 
required for shipments of some of our components can be greater than six months. In addition, the lead time required to qualify 
new suppliers for lasers and certain optics could be as long as a year, and the lead time required to qualify new suppliers of 
other components could be as long as nine months. In some cases, we may need to purchase components in advance of receiving 
customer  orders  for  product.  If  we  are  unable  to  accurately  predict  our  component  needs,  or  if  our  component  supply  is 
disrupted, we may miss market opportunities by not being able to meet the demand for our systems. Further, a significant 
increase in the price of one or more of these components or subassemblies could seriously harm our results of operations and 
cash flows.

Our efforts to mitigate any cost increases, labor impacts and supply chain delays and shortages may not be successful, 
and we cannot predict the duration of these current trends or other future increases in operating costs. We may not be able to 
pass cost increases through to our customers fully (or at all), and if supply chain delays and shortages delay delivery of our 
products, our customers may seek to purchase from our competitors. Any such occurrence may have a material adverse impact 
on our gross margins and business, financial position, results of operations and cash flows.

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Variations in the amount of time it takes for us to sell our systems may cause fluctuations in our operating results, which 
could cause our stock price to decline.

Variations in the length of our sales cycles could cause our revenue and cash flows, and consequently, our business, 
financial condition, operating results and cash flows to fluctuate widely from period to period. This variation could cause our 
stock price to decline. Our customers generally take a long time to evaluate our inspection and/or film metrology systems and 
many people are involved in the evaluation process. We expend significant resources educating and providing information to 
our prospective customers regarding the uses and benefits of our systems in the semiconductor fabrication process. The length 
of time it takes for us to make a sale depends upon many factors, including, but not limited to:

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the efforts of our sales force;

the complexity of the customer’s fabrication processes;

the internal technical capabilities and sophistication of the customer;

the customer’s budgetary constraints; and

the quality and sophistication of the customer’s current metrology, inspection or lithography equipment.

Because of the number of factors influencing the sales process, the period between our initial contact with a customer
and the time when we recognize revenue from that customer and receive payment, if ever, varies widely in length. Our sales 
cycles, including the time it takes for us to build a product to customer specifications after receiving an order to the time we 
recognize  revenue,  typically  range  from  three  to  twenty-four  months.  Sometimes  our  sales  cycles  can  be  much  longer, 
particularly with customers in Asia. During these cycles, we commit substantial resources to our sales efforts in advance of 
receiving any revenue, and we may never receive any revenue from a customer despite our sales efforts. If we do make a sale, 
our customers often purchase only one of our systems, the performance of which they then evaluate for a lengthy period before 
purchasing any more of our systems. The number of additional products a customer purchases, if any, depends on many factors, 
including  the  customer’s  capacity  requirements.  The  period  between  a  customer’s  initial  purchase  and  any  subsequent 
purchases  can  vary  from  three  months  to  a  year  or  longer,  and  variations  in  the  length  of  this  period  could  cause  further 
fluctuations in our operating results and, possibly, in our stock price.

We  are  subject  to  order  and  shipment  uncertainties.  Our  profitability  will  decline  if  we  fail  to  accurately  forecast 
customer demand when managing inventory.

We  typically  plan  production  and  inventory  levels  based  on  internal  forecasts  of  customer  demand,  which  can  be 
highly unpredictable and can fluctuate substantially, which could lead to excess inventory write-downs and result in negative 
impacts on gross margin and net income. We have limited visibility into our customers’ inventories, future customer demand 
and  the  product  mix  that  our  customers  will  require,  which  could  adversely  affect  our  production  forecasts  and  operating 
margins. Certain of our customers have publicly stated their intent to decrease their memory product inventory levels as lead 
time for components begins to decrease.  This has and could continue to result in a temporary decrease in demand for our 
products as customers delay capacity expansions until inventory levels are sufficiently reduced.  In addition, innovation in our 
industry could render significant portions of our inventory obsolete. If we overestimate our customers’ requirements, we may 
have  excess  inventory,  which  could  lead  to  obsolete  inventory  and  unexpected  costs.  Conversely,  if  we  underestimate  our 
customers’  requirements,  or  if  we  experience  sustained  disruptions  to  our  supply  chain  or  shipping  delays,  we  may  have 
inadequate  inventory,  which  could  lead  to  foregone  revenue  opportunities,  loss  of  potential  market  share  and  damage  to 
customer relationships as product deliveries may not be made on a timely basis, disrupting our customers’ production schedules. 
In  response  to  anticipated  long  lead  times  to  obtain  inventory  and  materials  from  outside  suppliers  and  foundries,  we 
periodically order materials in advance of customer demand. This advance ordering has in the past and may in the future result 
in excess inventory levels or unanticipated inventory write-downs if expected orders fail to materialize, or other factors make 
our products less saleable. In addition, any significant future cancellation or deferral of product orders could adversely affect 
our revenue and margins, increase inventory write-downs due to obsolete inventory, and adversely affect our operating results 
and stock price.

Our earnings could be negatively affected, and our inventory levels could materially increase, if we are unable to 
predict our inventory needs in an accurate and timely manner and adjust our orders for parts and subcomponents in the event 
that  our  needs  increase  or  decrease  materially  due  to  unexpected  increases  or  decreases  in  demand  for  our  products.  Any 
material increase in our inventories could result in an adverse effect on our financial position, while any material decrease in 
our ability to procure needed inventories could result in an inability to supply customer demand for our products, thus adversely 
affecting our revenue.

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If we deliver systems with defects, our credibility will be harmed, and the sales and market acceptance of our systems 
will decrease.

Our systems are complex and have occasionally contained errors, defects and bugs when introduced. Defects may be 
created during probing, bumping, dicing or general handling, and can have a major impact on device and process quality. When 
this occurs, our credibility and the market acceptance and sales of our systems could be harmed. Further, if our systems contain 
errors, defects or bugs, computer viruses or malicious code as a result of cyber-attacks to our computer networks, we may be 
required to expend significant capital and resources to alleviate these problems. Defects could also lead to product liability as 
a result of product liability lawsuits against us or against our customers. We have agreed to indemnify our customers under 
certain circumstances against liability arising from defects in our systems provided that we also include a cap on our liability 
in the related sales agreements. Our product liability insurance policy currently provides both aggregate coverage as well as an 
overall  umbrella  coverage.  In  the  event  of  a  successful  product  liability  claim,  we  could  be  obligated  to  pay  damages 
significantly in excess of our product liability insurance limits.

Our  integrated  metrology  systems  are  integrated  with  systems  sold  independently  by  wafer  fabrication  equipment 
suppliers, and a decrease in sales by these suppliers, or the development of competing systems by these suppliers, could 
harm our business.

We believe that sales of integrated metrology systems will continue to be an important source of our net revenues. 
Sales of our integrated metrology systems depend upon the ability of a small number of wafer fabrication equipment suppliers 
to sell semiconductor manufacturing equipment products that are compatible with our metrology systems as components. If 
these suppliers are unable to sell such products, if they choose to focus their attention on products that do not integrate with 
our systems, or if they choose to develop competing systems, our business could suffer. 

We must attract and retain experienced senior executives and other key personnel with knowledge of semiconductor 
device manufacturing and inspection, metrology or lithography equipment and related software to help support our 
future growth, and competition for such personnel in our industry is high.

Our success depends, to a significant degree, upon the continued contributions of our key executive management, 
engineering,  sales  and  marketing,  customer  support,  finance  and  manufacturing  personnel.  The  loss  of  any  of  these  key 
personnel, each of whom would be extremely difficult to replace, through resignations, retirement or other circumstances, could 
harm our business and operating results. Despite our employment and noncompetition agreements with key members of our 
senior management team, these individuals or other key employees may still leave us, which could have a material adverse 
effect on our business. We do not have key person life insurance on any of our executives. In addition, to support our future 
growth, we will need to attract and retain additional qualified employees. Competition for such personnel in our industry is 
intense, and we may not be successful in attracting and retaining qualified employees.

The expansion of high technology companies worldwide and growth in the demand for semiconductors have increased 
demand and competition for qualified personnel. Competition for engineering and other technical personnel in some of the 
markets  in  which  we  operate  is  especially  intense  due  to  continued  increases  in  the  number  of  technology  companies 
worldwide.  In order to attract and retain executives and other key employees, we must provide a competitive compensation 
package, including cash and stock-based compensation.  If the anticipated value of our stock-based incentive awards does not 
materialize so that they cease to be viewed as valuable, if our profits decrease, or if our total compensation package is not 
viewed as competitive, our ability to attract, retain and motivate executives and key employees could be weakened.

Any prolonged disruption in the operations of our manufacturing facilities could have a material adverse effect on our 
revenue.

We  produce  the  majority  of  our  systems  in  our  manufacturing  facilities  located  in  Wilmington,  Massachusetts, 
Milpitas, California and Bloomington, Minnesota. We also use contract manufacturers in China, Japan and the United States. 
Our  manufacturing  processes  are  highly  complex  and  require  sophisticated  and  costly  equipment  and  a  specially  designed 
facility. As a result, any prolonged disruption in the operations of our manufacturing facilities could seriously harm our ability 
to satisfy our customer order deadlines. Restrictions on our access to or operation of manufacturing facilities or on our support 
operations or workforce, or similar limitations for our vendors and suppliers, may impact our ability to meet customer demand 
and could have a material adverse effect on our financial condition and results of operations. If we cannot timely deliver our 
systems, our results from operations and cash flows could be materially and adversely affected.

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We  outsource  select  manufacturing  activities  to  third-party  service  providers,  which  decreases  our  control  over  the 
performance  of  these  functions,  may  result  in  lower  quality  and  functionality  of  our  products,  and  exposes  us  to 
additional supply chain risks.

We outsource select product manufacturing to third-party service providers. Outsourcing reduces our control over the 
performance  of  the  outsourced  functions.  Dependence  on  outsourcing  may  also  adversely  affect  our  ability  to  bring  new 
products to market. If we do not effectively manage our outsourcing strategy or if third-party service providers do not perform 
as anticipated, we may experience operational difficulties, increased costs, manufacturing interruptions or inefficiencies in the 
operation of our supply chain, any or all of which could delay our delivery of products to our customers, and materially and 
adversely affect our business, financial condition, and results of operations.  

Our third-party service providers could also be, and certain of our service providers have been, subject to cybersecurity 
incidents or other events that negatively impact their operations and their ability to perform services for us in a timely manner 
or at all.  Such disruptions could impact our ability to manufacture products in a timely manner or force us to work with another 
service provider at a higher cost.  Any such event could materially and adversely affect our business, financial condition, and 
results of operations.  In addition, some of our third-party party services providers also have product designs, know-how, data 
files  and  other  important  confidential  information  regarding  our  products.   If  a  third-party  service  provider  experiences  a 
cybersecurity event in which such confidential information is publicly exposed or shared with bad actors, it could materially 
and adversely impact our competitive position in the market. 

Our ability to fulfill our backlog may have an effect on our long-term ability to procure contracts and fulfill current 
contracts.

Our  ability  to  fulfill  our  backlog  may  be  limited  by  our  ability  to  devote  sufficient  financial  and  human  capital 
resources and may be limited by available material supplies and our suppliers’ own supply chain issues. If we do not fulfill our 
backlog in a timely manner, we may experience delays in product delivery, which would postpone receipt of revenue from 
those delayed deliveries.  Delayed fulfillment also increases the risk that a customer may change or cancel an order due to 
evolution of the customer’s technological, production or market needs, which would result in a loss of revenue. Additionally, 
if we are consistently unable to fulfill our backlog, this may be a disincentive to customers to award large contracts to us in the 
future until they are comfortable that we can effectively manage our backlog.

Risks Related to Our Customers

Our largest customers account for a substantial portion of our revenue, and our revenue and cash flows could decline 
considerably if one or more of these customers were to purchase significantly fewer of our systems or delay or cancel a 
large order.

Sales to end user customers that individually represent at least ten percent of our revenue typically account for, in the 
aggregate, a considerable amount of our revenue. We operate in the highly concentrated, capital-intensive semiconductor device 
manufacturing industry. Historically, a substantial portion of our revenue in each quarter and year has been derived from sales 
to relatively few customers, and this trend is expected to continue. If any of our key customers were to purchase significantly 
fewer of our systems in the future, or if they delay or cancel a large order, our revenue and cash flows could meaningfully 
decline. We expect that we will continue to depend on a small number of large customers for a sizable portion of our revenue. 
In addition, as large semiconductor device manufacturers seek to establish closer relationships with their suppliers, we expect 
that our customer base will become even more concentrated.

Risks Related to Product Development

If we are not successful in developing new and enhanced products for the semiconductor device manufacturing industry, 
we will lose sales and market share to our competitors.

We operate in an industry that is highly competitive and subject to evolving industry standards, rapid technological 
changes,  rapid  changes  in  consumer  demands  and  the  rapid  introduction  of  new,  higher  performance  systems  with  shorter 
product life cycles. To be competitive in our demanding market, we must continually design, develop and introduce in a timely 
manner new lithography, inspection and metrology process control systems that meet the performance and price demands of 
semiconductor device manufacturers. We must also continue to refine our current systems so that they remain competitive. We 
expect to continue to make significant investments in our research and development activities and at times may make inventory 
investments prior to commercialization. We may experience difficulties or delays in our development efforts with respect to 
new systems, and we may not ultimately be successful in our product enhancement efforts to improve and advance products or 
in responding effectively to technological change, as not all research and development activities result in viable commercial 

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products. In addition, we cannot provide assurance that we will be able to develop new products for the most opportunistic new 
markets  and  applications.  Any  significant  delay  in  releasing  new  systems  could  cause  our  products  to  become  obsolete, 
adversely affect our reputation, give a competitor a first-to-market advantage or cause a competitor to achieve greater market 
share.   Our  competitors  may  also  develop  products,  including  through  the  use  of  artificial  intelligence,  that  may  have 
performance  advantages  over  systems  we  currently  offer  or  may  offer  in  the  future,  which  could  similarly  weaken  our 
competitive position.

Further, customers that may otherwise desire to purchase our products from us and purchase other products from our 
competitors may nevertheless purchase competing products from our competitors rather than purchase our products due to a 
variety of reasons, including to gain favorable or volume pricing from our competitors.

If new products developed by us do not gain general market acceptance, we will be unable to generate revenue and 
recover our investments, which may result in a write down of inventory.

Inspection,  lithography  and  metrology  product  development  is  inherently  risky  because  it  is  difficult  to  foresee 
developments in semiconductor device manufacturing technology, coordinate technical personnel, and identify and eliminate 
system  design  flaws.  Further,  our  products  are  leading  edge  and  complex,  and  often  the  applications  to  our  customers’ 
businesses are unique. Any new systems we introduce may not achieve or sustain a significant degree of market acceptance 
and sales.

We expect to spend a significant amount of time and resources developing new systems and refining our existing 
systems. In light of the long product development cycles inherent in our industry, these expenditures will be made well in 
advance of the prospect of deriving revenue from the sale of those systems.  The long lead times for some components may 
also require us to place orders for components and accumulate inventory in advance of market acceptance of our products. 

Our ability to commercially introduce and successfully market new systems is subject to a wide variety of challenges 
during the development cycle, including start-up bugs, design defects, and other matters that could delay introduction of these 
systems.  Since our customers are not obligated by long-term contracts to purchase our systems, our anticipated product orders 
may not materialize, or orders that are placed may be canceled.  

If we do not achieve market acceptance of new products, we may be unable to generate sufficient revenue and cash 
flow to recover our research and development costs and may experience a write down of our investments in inventory. As a 
result, our market share, revenue, operating results or stock price could be negatively impacted.

Even if we are able to develop new products that gain market acceptance, sales of these new products could impair our 
ability to sell existing products.

Competition from our new systems could have a negative effect on sales of our existing systems and the prices that 
we could charge for these systems. We may also divert sales and marketing resources from our current systems in order to 
successfully launch and promote our new or next generation systems. This diversion of resources could have a further negative 
effect on sales of our current systems and the value of inventory.

If  our  relationships  with  our  large  customers  deteriorate,  our  product  development  activities  could  be  adversely 
affected.

The  success  of  our  product  development  efforts  depends  on  our  ability  to  anticipate  market  trends  and  the  price, 
performance and functionality requirements of semiconductor device manufacturers. In order to anticipate these trends and 
ensure that critical development projects proceed in a coordinated manner, we must continue to collaborate closely with our 
largest customers. Our relationships with these and other customers provide us with access to valuable information regarding 
trends in the semiconductor device industry, which enables us to better plan our product development activities. If our current 
relationships with our large customers are impaired, or if we are unable to develop similar collaborative relationships with 
important customers in the future, our product development activities could be adversely affected.

Risks Related to Intellectual Property and Data Security

We may fail to adequately protect our intellectual property and, therefore, lose our competitive advantage.

Our  future  success  and  competitive  position  depend  in  part  upon  our  ability  to  obtain  and  maintain  proprietary 
technology  for  our  principal  product  families.  If  we  fail  to  adequately  protect  our  intellectual  property,  it  will  give  our 
competitors a significant advantage. We own or have licensed a number of patents relating to our metrology, lithography, wafer 
and defect inspection systems, as well as artificial intelligence and machine learning systems, and software, including both 

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embedded and application software, and have filed applications for additional patents.  Any of our pending patent applications 
may be rejected, however, and we may be unable to develop additional proprietary technology that is patentable in the future. 
In addition, the patents that we do own or that have been issued or licensed to us may not provide us with competitive advantages 
and/or may be invalidated, enforceable and/or  challenged by third parties. Third parties may also design around our patents or 
copy our patented inventions without our knowledge. 

In addition to patent protection, we rely upon copyrights for protection of our proprietary software and documentation, 
trademarks  for  protection  of  our  brand  and  source  of  goods,  and  trade  secret  law  and  confidentiality  and  non-compete 
agreements for protection of our confidential and proprietary information and technology.  These measures do not guarantee 
protection  of  our  intellectual  property,  however.  We  can  give  no  assurance  that  our  copyrights  will  be  upheld  or  will 
successfully deter infringement by third parties. There can be no assurances that our confidentiality agreements with employees 
and other third parties will be sufficient to protect our trade secrets and proprietary information or that such information will 
not be disclosed, that others will not independently develop substantially equivalent proprietary information and techniques or 
otherwise gain access to our trade secrets, or that we can fully protect our trade secrets and proprietary information. Violations 
by others of our confidentiality agreements and the loss of employees who have specialized knowledge and expertise could 
harm our competitive position and cause our sales and operating results to decline as a result of increased competition.  It is 
also possible that third parties will misappropriate our trade secrets or other confidential information.  We may be subject to 
cybersecurity breaches in which a third party obtains our confidential information.  Third parties may also reverse engineer our 
products to copy our technology. Failure to protect our trademarks can lead to other companies selling products using confusing 
similar names, thereby damaging our brand. In some countries, it can be difficult to register trademarks because of the strict 
examination  process  or  blocking  trademarks  for  other  goods.  Costly  and  time-consuming  litigation  might  be  necessary  to 
enforce and determine the scope of our intellectual property rights, and failure to obtain or maintain trade secret protection 
might adversely affect our ability to continue our research or bring products to market. Any of these circumstances could result 
in harm to our competitive position in the market.

Monitoring and preventing unauthorized use are also difficult and the measures we take to protect our intellectual 
property rights may not be adequate. There is a risk that we may be unable to adequately protect our intellectual property rights 
in  certain  foreign  countries.  For  example,  our  competitors  may  independently  develop  similar  technology  or  duplicate  our 
products. If  this  occurs,  it  could  be  easier  for  our  competitors  to  develop  and  sell  competing  products  in  these  countries. 
Accordingly, infringement of our intellectual property rights poses a serious risk to our ability to conduct business. 

Protection of our intellectual property rights, or the efforts of third parties to enforce their own intellectual property 
rights against us, may result in costly and time-consuming litigation, substantial damages, lost product sales and/or the 
loss of important intellectual property rights.

From time to time, we may be required to initiate litigation in order to enforce our intellectual property rights or to 
determine the noninfringement, scope or validity of a third party’s intellectual property rights. Any litigation, regardless of 
outcome, could be expensive and time consuming and could subject us to significant liabilities or require us to re-engineer our 
products  or  obtain  expensive  licenses  from  third  parties.  There  can  be  no  assurance  that  any  patents,  copyrights  or  other 
intellectual property rights issued to or licensed by us will not be challenged, invalidated or circumvented, or that the rights 
granted thereunder will provide us with a competitive advantage. Furthermore, there is no assurance that any litigation we are 
involved in will yield the result that we seek as (i) the lawsuit may be dismissed or there could be an adverse finding, (ii) we 
may not be able to pursue the lawsuit due to the laws of the applicable country or (iii) there may be a subsequent unfavorable 
change in law that limits our ability to pursue the lawsuit. For example, litigation discovery practice in China, Japan, South 
Korea, continental Europe and Taiwan is not as robust as in the United States, so it can be more difficult to determine if a 
company is infringing on our patents and more challenging to bring a lawsuit.

In addition, our commercial success depends in part on our ability to avoid infringing or misappropriating patents or 
other intellectual property rights owned by third parties. From time to time, we receive communications from third parties 
asserting that our products or systems infringe, or may infringe, on the intellectual property rights of these third parties. These 
claims of infringement may lead to protracted and costly litigation, which could require us to pay substantial damages or have 
the sale of our products or systems stopped by an injunction. Infringement claims could also cause product or system delays or 
require us to redesign our products or systems, and these delays could result in the loss of substantial revenue. We may also be 
required to obtain a license from the third party or cease activities utilizing the third party’s intellectual property rights. We 
may  not  be  able  to  enter  into  such  a  license  or  such  a  license  may  not  be  available  on  commercially  reasonable  terms. 
Accordingly, the loss of an intellectual property dispute could hinder our ability to sell our products or systems or make the 
sale of our products or systems more expensive, which could lead to reduced revenue or lower margins, respectively.

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If our network security measures are breached and unauthorized access is obtained to a customer’s data, to our data, 
or to our information technology systems, we may incur significant legal and financial exposure and liabilities and may 
experience disruptions in our operations.

As  part  of  our  business,  we  store  our  data  and  certain  data  about  our  customers,  vendors  and  employees  in  our 
information technology system. We also rely on our information technology system for business operations. If there is a breach 
as a result of third-party action, including through the use of artificial intelligence, employee error, malfeasance, break-ins or 
otherwise, of our security measures designed to protect this information and prevent data loss and other security breaches, and 
someone obtains unauthorized access to our customers’, vendors’ or employees’ data or disrupts our access to our own data 
and systems, we could face loss of business, regulatory investigations or court orders or damage to our reputation, and we could 
be required to expend significant capital and other resources to alleviate the problem, as well as incur significant costs and 
liabilities, including due to litigation, indemnity obligations, damages for contract breach, penalties for violation of applicable 
laws or regulations, and costs for remediation and other incentives offered to customers. 

Cyber-attacks  and  other  malicious  internet-based  activities  continue  to  increase.  The  Russia–Ukraine  conflict  and 
related sanctions imposed by the U.S. government may expose government entities and public and private U.S. companies to 
attempted or actual cybersecurity attacks launched in retaliation, and these attacks could materially disrupt our supply chain or 
our systems and operations or those of our customers and suppliers.

As the techniques used to obtain unauthorized access or sabotage systems change frequently and generally are not 
identified  until  they  are  launched  against  a  target,  our  ability  to  anticipate  these  techniques  or  to  implement  adequate 
preventative measures is reduced. In addition, third parties have made attempts to fraudulently induce employees or users to 
disclose information to gain access to our data or our customers’ data. As a result of any of these events, our or our customers’ 
and  vendors’  information  could  be  accessed  or  disclosed  improperly.  In  addition,  cybersecurity  incidents  affecting  our 
customers could result in substantial delays in our ability to ship to those customers or install our products, which could result 
in delays in revenue recognition or the cancellation of orders. As discussed herein under the heading “We outsource select 
manufacturing activities to third-party service providers, which decreases our control over the performance of these functions 
and may result in lower quality and functionality of our products,” cybersecurity incidents affecting our service providers could 
negatively impact our ability to timely and cost-effectively produce products and/or negatively impact our competitive position 
in the market.  Likewise, cybersecurity events impacting our suppliers could result in substantial delays in our ability to obtain 
necessary  components  for  our  products  from  those  suppliers,  which  could  hamper  our  ability  to  ship  our  products  to  our 
customers, harming our results of operations and our customer relationships. Any or all of the above issues could negatively 
affect  our  ability  to  attract  new  customers,  cause  existing  customers  to  choose  to  purchase  from  our  competitors,  result  in 
reputational damage or subject us to third-party lawsuits, regulatory fines or other action or liability, which could adversely 
affect our operating results.

Compliance with data protection laws may be costly and may impede development of new products, and any failure to 
comply with, or inquiries under, these laws may could have a material adverse effect on our business, results of 
operations, and financial condition.

The General Data Protection Regulation (“GDPR”) is a regulation in European Union (“EU”) law on data protection 
and  privacy  for  the  individuals  within  the  EU  and  the  European  Economic  Area  (“EEA”).  It  also  addresses  the  export  of 
personal data outside the EU and EEA areas. The United Kingdom has adopted legislation that substantially implements the 
GDPR  and  provides  for  a  similar  penalty  structure.   We  are  also  subject  to  the  California  Consumer  Privacy  Act  of  2018 
(“CCPA”) and the California Privacy Rights  Act (“CPRA”), an amendment and expansion  of the CCPA. We may also be 
subject to other data privacy laws in the United States and the other countries in which we operate.  In many cases, these laws 
apply not only to third-party transactions, but also to transfers of information between us and our subsidiaries, and among the 
subsidiaries and other parties with which we have commercial relations. The introduction of new products or expansion of our 
activities in certain jurisdictions may subject us to additional laws and regulations. These U.S. federal and state and foreign 
laws and regulations, including GDPR which can be enforced by private parties or government entities, are constantly evolving 
and can be subject to significant change. In addition, the application and interpretation of these laws and regulations, including 
GDPR, are often uncertain, particularly in our evolving industry, and may be interpreted and applied differently from country 
to  country.  Appropriate  technical  and  organizational  measures  are  necessary  to  implement  these  data  protection 
principles.  These laws and regulations can be costly to comply with and may delay or impede the development of new products, 
result in negative publicity, increase our operating costs, require significant management time and attention, or subject us to 
inquiries or investigations, claims or other remedies, including fines, which may be significant, or demands that we modify or 
cease existing business practices. A failure by us, our suppliers, or other parties with whom we do business to comply with 
posted privacy policies or with other federal, state, or international privacy-related or data protection laws and regulations, 
including GDPR, CCPA, CPRA and other new or changing privacy laws and regulations, could result in proceedings against 

19

us by governmental entities or others, which could have a material adverse effect on our business, results of operations, and 
financial condition.

Risks Related to Competition

Some  of  our  current  and  potential  competitors  have  significantly  greater  resources  than  we  do,  and  increased 
competition could impair sales of our products or cause us to reduce our prices.

The  market  for  semiconductor  capital  equipment  is  highly  competitive.  We  face  substantial  competition  from 
established companies in each of the markets we serve. We principally compete with KLA, Nova, Camtek, Ushio, Canon, and 
PDF  Solutions.  Each  of  our  products  also  competes  with  products  that  use  different  metrology,  inspection  or  lithography 
techniques.  Some  of  our  competitors  have  greater  financial,  engineering,  manufacturing  and  marketing  resources,  broader 
product offerings and service capabilities and larger installed customer bases than we do. As a result, these competitors may 
be able to respond more quickly to new or emerging technologies or market developments by devoting greater resources to the 
development,  promotion  and  sale  of  products,  which,  in  turn,  could  impair  sales  of  our  products.  Further,  there  may  be 
significant merger and acquisition activity among our competitors and potential competitors, which, in turn, may provide them 
with a competitive advantage over us by enabling them to rapidly expand their product offerings and service capabilities to 
meet a broader range of customer needs.

Many of our existing and potential customers in the semiconductor device manufacturing industry are large companies 
that require global support and service for their semiconductor capital equipment. Some of our competitors have more extensive 
support and service infrastructures than we do, which could place us at a disadvantage when competing for the business of 
global semiconductor device manufacturers. Many of our competitors are investing heavily in the development of new systems 
that will compete directly with our systems. We have, from time to time, selectively reduced prices on our systems in order to 
protect our market share, and competitive pressures may necessitate further price reductions. We expect our competitors in 
each product area to continue to improve the design and performance of their products and to introduce new products with 
competitive prices and performance characteristics. These product introductions would likely require us to decrease the prices 
of our systems and increase the level of discounts that we grant our customers. Price reductions or lost sales as a result of these 
competitive pressures would reduce our total revenue and could adversely impact our financial results.

Because of the high cost of switching equipment vendors in our markets, it is sometimes difficult for us to win new 
customers from our competitors even if our systems are superior to theirs.

We  believe  that  once  a  semiconductor  device  manufacturer  has  selected  one  vendor’s  capital  equipment  for  a 
production-line  application,  the  manufacturer  generally  relies  upon  that  capital  equipment  and,  to  the  extent  possible, 
subsequent generations of the same vendor’s equipment for the life of the application. Once a vendor’s equipment has been 
installed  in  a  production  line  application,  a  semiconductor  device  manufacturer  must  often  make  substantial  technical 
modifications and may experience production-line downtime in order to switch to another vendor’s equipment. Accordingly, 
unless our systems offer performance or cost advantages that outweigh a customer’s expense of switching to our systems, it 
will be difficult for us to achieve significant sales to that manufacturer once it has selected another vendor’s capital equipment 
for an application.

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Risks Related to Our International Operations

Tariffs, export regulations, and other market barriers have impacted and may continue to impact our ability to compete 
for the business of domestic customers in China and other jurisdictions, which has adversely affected and may continue 
to adversely affect our, business, financial condition and results of operations. 

The semiconductor device industry is a high-visibility industry in many of the European and Asian countries in which 
we  sell  our  products.  Because  the  governments  of  these  countries  have  provided  extensive  financial  support  to  our 
semiconductor device manufacturing customers in these countries, we believe that our customers could be disproportionately 
affected by any trade embargoes, excise taxes, tariffs, or other restrictions imposed by their governments on trade with U.S. 
companies such as ourselves, particularly with respect to the ongoing tensions between the United States and China. 

Over the last several years, the U.S. government has significantly expanded export controls on certain technologies 
and commodities to certain markets, particularly with respect to semiconductor and other high technology exports to China. 
For example, the U.S. Department of Commerce (“DoC”) has imposed export controls on the transfer of certain U.S. products 
and technologies to “military end users” in China, as well as restrictions on the transfer of U.S. products to certain companies, 
including Huawei Technologies Co., Ltd., and its affiliates. Most recently, in 2022, the DoC imposed new export controls 
related to the Chinese semiconductor manufacturing, advanced computing, and supercomputer industries.  In 2022, the DoC 
also added a number of companies in China to the Unverified List and Entity List of the Export Administration Regulations 
(“EAR”), including Yangtze Memory Technologies Co., Ltd (YMTC). In October 2023, the DoC revised and expanded the 
2022 export controls.

The effect of these changes, among others, is that Onto Innovation is required to conduct additional end-use diligence 
and in some instances obtain export licenses before providing products to certain customers. There can be no assurance that 
export licenses applied for by us or our customers will be granted in a timely manner or at all.  We have experienced and may 
continue to experience a temporary loss of revenues while we are obtaining licenses with certain customers affected by export 
controls. Failure to obtain any required license could result in a reduction of anticipated revenues until we are able to replace 
unlicensed orders with other customer orders for which a license has been obtained or is not required, and there can be no 
assurance that replacement orders will be obtained on favorable terms, in a timely manner, or at all.  In addition, any licenses 
that are granted to us or to our customers may have a short duration or require us to satisfy various conditions.  Any of these 
occurrences  could  have  a  material  adverse  effect  on  our  revenues,  business,  financial  condition  and  results  of  operations. 
Further, we hold inventory of products that may be affected by these recent U.S. government actions, including potential order 
cancellations.  If  the  sale  of  these  products  is  delayed  or  we  are  unable  to  return  or  dispose  of  our  inventory  on  favorable 
economic terms, we may incur additional carrying costs for the inventory or otherwise record charges associated with this 
inventory.

The administrative processing, attendant delays and risk of ultimately not obtaining required export approvals also put 
us at a disadvantage relative to our non-U.S. competitors who may not be required to comply with U.S. export controls. This 
difficulty and uncertainty has adversely affected our ability to compete for and win business from domestic customers in China. 

It is possible that the U.S. government will impose additional export controls on our products or systems, which could 
lead to further revenue losses.  Such changes could result in additional restrictions on our ability to sell products to customers 
in China and other jurisdictions. Foreign customers affected by current or future U.S. government sanctions, controls or threats 
of sanctions or controls may respond by developing their own solutions to replace our products or by utilizing our foreign 
competitors’ products (who are not subject to the same export controls and can fulfill the orders).  In addition, these export 
controls may also reduce overall global demand for our customers’ products or for other products produced or manufactured 
in the U.S. or based on U.S. technology, in turn reducing demand for our products, which could have a material adverse effect 
on  our  business,  financial  condition  and  results  of  operations.   Increased  restrictions  on  China  exports  may  also  lead  to 
regulatory retaliation by the Chinese government, which may adversely impact our business.  International trade disputes could 
result in increases in tariffs and other trade restrictions and protectionist measures that could adversely impact our operations 
and reduce the competitiveness of our products relative to local and global competitors.

We are subject to compliance with domestic and foreign laws and regulations, and the burden of complying with such 
laws and regulations, or any failure to comply, has adversely affected and may continue to adversely affect our business, 
financial condition and results of operations. 

Our business is subject to risks inherent in doing business internationally, including compliance with, inconsistencies 
among, and unexpected changes in, a wide variety of foreign laws and regulatory environments, including, among other issues, 
with respect to employees, protection of our intellectual property, and a wide variety of operational regulations and trade and 
export controls under domestic, foreign, and international law. 

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We are faced with various risks that may be associated with our compliance with existing, new, different, inconsistent 
or conflicting laws, regulations and rules enacted by governments and/or their regulatory agencies in the countries in which we 
operate as well as rules and policies implemented at our customer sites. These laws, regulations, rules and policies could relate 
to any of an array of issues including, but not limited to, environmental, tax, intellectual property, trade secrets, product liability, 
contracts, antitrust, employment, securities, import/export and unfair competition. The cost of maintaining compliance under 
multiple and changing regulatory regimes may adversely affect our business, financial condition and results of operations, and, 
in  the  case  of  export  controls,  has  adversely  affected  and  may  continue  to  adversely  affect  our  results  of  operations.   As 
discussed herein under the heading “Tariffs, export regulations, and other market barriers have impacted and may continue to 
impact both our ability to compete for the business of domestic customers in China and our results of operations,” the U.S. 
government issued new export control rules in 2022 and 2023 aimed at restricting China’s access to semiconductor equipment 
and advanced computing technology, among other things.  To comply with the new rules, Onto Innovation has had to expend 
time and resources that might otherwise have been used for revenue generating activities. Further regulatory changes could 
require additional diversion of resources to compliance efforts.  In addition, in the event that we fail to comply with or violate 
U.S. or foreign laws or regulations or customer policies, we could be subject to civil or criminal claims or proceedings that 
may result in monetary fines, penalties or other costs against us or our employees, which may adversely affect our operating 
results, financial condition, customer relations and ability to conduct our business.

Political and economic instability may result in reduced demand for our products. 

We are subject to various global risks related to political and economic instabilities in countries in which we derive 
sales. If terrorist activities, armed conflict, civil or military unrest or political instability occurs outside of the United States, 
these events may result in reduced demand for our products or adversely affect our supply chain. For example, the Ukraine–
Russia geographic region is a major source of critical raw materials used for semiconductor manufacturing (such as neon and 
palladium), and any supply chain disruptions or shortages of such materials due to the ongoing conflict in that region could 
impact our customers in a manner that reduces demand for our products. Similarly, if the conflict in Israel and the surrounding 
area escalates further, it could result in disruptions to our supply chain and/or the operations of our customers in a manner that 
reduces demand for our products.

In addition, due to the complex relationships among China, Hong Kong, Taiwan, and the United States, there is risk 
that political, diplomatic, and national security influences might lead to trade, technology, or capital disputes, or disruptions 
affecting the semiconductor industry.  In particular, the escalation of geopolitical tensions between China and Taiwan may 
cause disruptions in the markets in which we operate and lead to a decreased demand for our products, which could adversely 
affect our business in Asia or have a negative impact on the regional or global economy.

Furthermore, an outbreak of hostilities or other political upheaval in China, Taiwan, Japan, or South Korea, or an 
economic downturn in Asia or globally, would likely harm the operations of our customers in these countries. The effect of 
these types of events on our revenue and cash flows could be material because we derive substantial revenue from sales to 
semiconductor device foundries in Taiwan such as Taiwan Semiconductor Manufacturing Company Ltd., from memory chip 
manufacturers in South Korea such as Samsung Electronics Co., Ltd., and from semiconductor device manufacturers in Japan 
such as Toshiba Corporation.

Natural disasters, changes in climate, public health crises, and geo-political conflicts could materially adversely affect 
our worldwide operations (or those of our business partners). 

The  occurrence  of  one  or  more  natural  disasters,  such  as  hurricanes,  tropical  storms,  fires,  cyclones,  earthquakes, 
tsunamis, flooding, typhoons, volcanic eruptions and weather conditions such as major or extended winter storms, droughts 
and tornadoes, whether as a result of climate change or otherwise, may disrupt manufacturing or other operations. For example, 
our  Milpitas  operations  are  located  near  major  earthquake  fault  lines  in  California.  We  cannot  provide  any  assurance  that 
alternate means of conducting our operations (whether through alternate production capacity or service providers or otherwise) 
would be available if a major disruption were to occur or that, if such alternate means were available, they could be obtained 
on favorable terms. 

Our business may also be affected by public health issues (for example, an outbreak of a contagious disease such as 
COVID-19, avian influenza, measles or Ebola).  The effects of the public health crisis caused by the COVID-19 pandemic and 
the resulting economic impact have affected, and may continue to affect, our operations and those of our suppliers, third-party 
service providers, and customers.  The extent to which the economic effects of the COVID-19 pandemic could continue to 
impact our business, results of operations, and financial conditions is difficult to predict and depends on numerous evolving 
factors including any future resurgences of the pandemic and the intensity and duration of any resulting adverse macroeconomic 
conditions. The COVID-19 pandemic exposed our business, results of operations, and financial condition  to the following 
adverse impacts: disruptions to our supply chain in connection with the sourcing of materials, support, and services; disruption 

22

of operations due to unavailability of employees as a result of illness, travel restrictions and other factors; and a decrease in 
demand for our products; Additional sustained or prolonged outbreaks of COVID-19, or any ongoing, worsening or recurring 
supply chain disruptions or macroeconomic effects of the pandemic could have a material adverse effect on our business, results 
of operations, legal exposure, or financial condition and may also heighten many of the other risks described in this “Risk 
Factors” section.

There may also be conflict or uncertainty in the countries in which we operate, including safety issues, , disruptions 
of service from utilities, nuclear power plant accidents or general economic or political unrest, including war, civil unrest or 
terrorist attacks. We have no material operations in Russia, Belarus,  Ukraine, or Israel.  Consequently, to date, our operations 
have not been materially adversely affected by Russia’s invasion of Ukraine, or the Israel-Hamas conflict.  However, if the 
Russia-Ukraine or Israel-Hamas conflicts escalate further and/or the U.S. or other jurisdictions impose additional sanctions on 
the governments or entities involved, this could result in disruptions to the global economy and/or supply chains that could 
adversely affect our business. 

We  may  face  difficulties  in  staffing  and  managing  foreign  branch  operations  due  to  political  tensions  or  cultural 
differences. 

During periods of tension between the governments of the United States and certain other countries, it is often difficult 
for U.S. companies such as ours to staff and manage operations in such countries. Language and other cultural differences may 
also inhibit our sales and marketing efforts and create internal communication problems among our U.S. and foreign research 
and  development  teams,  increasing  the  difficulty  of  managing  multiple  remote  locations  performing  various  development, 
quality assurance, and yield ramp analysis projects.

Currency fluctuations may impact our international sales or expose us to exchange rate risk. 

A substantial portion of our international sales are denominated in U.S. dollars. As a result, if the dollar rises in value 
in relation to foreign currencies, our systems will become more expensive to customers outside the United States and may be 
less competitive with systems produced by competitors outside the United States. These conditions could negatively impact 
our international sales. Foreign sales also expose us to collection risk in the event it becomes more expensive for our foreign 
customers to convert their local currencies into U.S. dollars. Additionally, in the event a larger portion of our revenue becomes 
denominated  in  foreign  currencies,  we  would  be  subject  to  a  potentially  significant  exchange  rate  risk,  and  any  failure  to 
sufficiently hedge or otherwise manage these risks could materially and adversely affect our financial condition, results of 
operations, and liquidity.

Our internal controls with respect to anti-corruption laws may not be effective, and any failure to comply with such 
laws  may  result  in  severe  sanctions  and  liabilities,  which  may  negatively  affect  our  business,  operating  results  and 
financial condition.

We are subject to the Foreign Corrupt Practices Act of 1977, as amended (the “FCPA”), and other laws that prohibit 
improper payments or offers of payments to foreign governments and their officials and political parties by U.S. persons and 
issuers as defined by the statute, for the purpose of obtaining or retaining business. Also, similar worldwide anti-bribery laws, 
such as the U.K. Bribery Act and Chinese anti-corruption laws, generally prohibit companies and their intermediaries from 
making improper payments to non-U.S. officials for the purpose of obtaining or retaining business. Some of our distribution 
partners  are  located  in  parts  of  the  world  that  have  experienced  governmental  corruption  to  some  degree  and,  in  certain 
circumstances,  strict  compliance  with  anti-bribery  laws  may  conflict  with  local  customs  and  practices.  The  policies  and 
procedures  we  have  implemented  to  discourage  these  practices  by  our  employees,  our  existing  safeguards  and  any  future 
improvements may prove to be ineffective, and our employees, consultants, sales agents or distributors may engage in conduct 
for which we might be held responsible. Violations of the FCPA or international anti-corruption laws may result in severe 
criminal or civil sanctions, and we may be subject to other liabilities, which could negatively affect our business, operating 
results  and  financial  condition.  In  addition,  the  U.S.  government  may  seek  to  hold  us  liable  for  successor  liability  FCPA 
violations  committed  by  companies  in  which we  invest  or that we  acquire. We  cannot  assure you  that  our  internal  control 
policies and procedures will protect us from reckless or negligent acts committed by our employees, distributors, partners, 
consultants or agents.

Risks Related to Laws, Legal Proceedings, Financial Markets and the Environment

Changes in tax rates or tax liabilities could affect results.

As a global company, we are subject to taxation in the United States and various other countries. Significant judgment 
is required to determine and estimate worldwide tax liabilities. Our future annual and quarterly tax rates could be affected by 

23

numerous factors, including changes in the (1) applicable tax laws; (2) composition of earnings in countries with differing tax 
rates; or (3) recoverability of our deferred tax assets and liabilities. Beginning in 2022, the U.S. Tax Cuts and Jobs Act of 2017 
(“TCJA”) eliminated the existing option to deduct research and development expenditures and requires taxpayers to amortize 
them  over  five  years  pursuant  to  IRC  Section  174.  Although  Congress  is  considering  legislation  that  would  defer  the 
amortization requirement to later years, we have no assurance that the provision will be repealed or otherwise modified. The 
requirement reduced our cash flows for 2022 and 2023, and may continue to reduce our cash flows unless repealed.  In addition, 
recent proposals to increase the U.S. corporate income tax rate, increase U.S. taxation of international business operations and 
impose a global minimum tax could have a negative impact on our tax position depending upon the terms of the final enacted 
legislation. Based on the nature of the uncertainties around specific legislation to be enacted, we have not quantified the impact 
of this risk.  Many countries and organizations such as the Organization for Economic Cooperation and Development are also 
actively considering changes to existing tax laws or have proposed or enacted new laws that could increase our tax obligations 
in  countries  where  we  do  business  or  cause  us  to  change  the  way  we  operate  our  business.  Any  of  these  developments  or 
changes in federal, state, or international tax laws or tax rulings could adversely affect our effective tax rate and our results of 
operations. 

In addition, we are subject to regular examination of our income tax returns by the Internal Revenue Service and other 
tax authorities. We regularly assess the likelihood of favorable or unfavorable outcomes resulting from these examinations to 
determine the adequacy of our provision for income taxes. Although we believe our tax estimates are reasonable, there can be 
no assurance that any final determination will not be materially different from the treatment reflected in our historical income 
tax provisions and accruals, which could materially and adversely affect our results of operations.

In  December  2021,  the  Organization  for  Economic  Co-operation  and  Development  (“OECD”),  released  guidance 
covering various topics, including country-by-country reporting, definitional changes to permanent establishment and Base 
Erosion and Profit Shifting (“BEPS”), an initiative that aims to standardize and modernize global tax policy. The proposed 
guidance also established a global minimum tax of 15%.  Depending on the final form of guidance adopted by OECD members 
and  legislation  ultimately  enacted,  if  any,  there  may  be  significant  consequences  for  us  due  to  our  international  business 
activities, including, but not limited to, an increase in our tax uncertainty and adverse effects on our provision for income taxes.

Turmoil or fluctuations in the credit markets and the financial services industry may negatively impact our business, 
results of operations, financial condition or liquidity, and our factoring arrangements may expose us to additional risks.

In the past, global credit markets and the financial services industry have experienced periods of turmoil and upheaval 
characterized by the tightening of the credit markets, the weakening of the global economy and an unprecedented level of 
intervention  from  the  United  States  and  other  governments.  Adverse  economic  conditions,  such  as  sustained  periods  of 
economic uncertainty or a crisis in the  financial markets may have a material adverse effect on our liquidity and financial 
condition if our ability to obtain credit from the capital financial markets, or from trade creditors was impaired.  If banks and 
financial institutions with whom we have banking relationships enter receivership or become insolvent in the future, we may 
be unable to access, and we may lose, some or all of our existing cash, cash equivalents and investments to the extent those 
funds are not insured or otherwise protected by the FDIC. In addition, a worsening economy or an economic crisis could also 
adversely impact our customers’ ability to finance the purchase of systems from us or our suppliers’ ability to provide us with 
product, either of which may negatively impact our business and results of operations.

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We are subject to various environmental laws and regulations that could impose substantial costs upon us, and failure 
to comply with such laws and regulations may harm our business, operating results and financial condition.

Some of our operations use substances regulated under various federal, state, local, and international laws governing 
the environment, including those relating to the storage, use, discharge, disposal, labeling, and human exposure to hazardous 
and toxic materials. We could incur costs, fines and civil or criminal sanctions, third-party property damage or personal injury 
claims, or could be required to incur substantial investigation or remediation costs, if we were to violate or become liable under 
environmental  laws.  Liability  under  environmental  laws  can  be  joint  and  several  and  without  regard  to  comparative  fault. 
Compliance  with  current  or  future  environmental  laws  and  regulations  could  restrict  our  ability  to  expand  our  facilities  or 
require us to acquire additional expensive equipment, modify our manufacturing processes, or incur other significant expenses. 
For example, we are or expect to become subject to various new or proposed climate-related and other sustainability laws and 
regulations,  including,  for  example, the  state  of California’s new climate change disclosure  requirements,  the  EU’s  new 
Corporate Sustainability Reporting Directive and proposed climate-change disclosure requirements from the SEC. Compliance 
with such laws and regulations, as well as the overall increased focus and scrutiny from the SEC and other regulators, investors, 
customers, vendors, employees, and other stakeholders concerning environmental, social and governance (“ESG”) and climate 
matters, could impose additional costs on us. We may unintentionally violate environmental laws or regulations in the future 
as  a  result  of  human  error,  equipment  failure  or  other  causes.   In  addition  to  the  potential  adverse  effects  on  our  business 
operations  of  such  an  event,  we  are  committed  to  maintaining  safe  working  conditions  for  our  employees  and  sourcing, 
manufacturing, and distributing our products in a responsible and environmentally friendly manner, and any failure on our part 
to do so may cause reputational harm for the Company.

Legal proceedings, claims and investigations may expose us to increased costs and may negatively affect our business 
and results of operations.

We have been from time to time, and in the future may be, involved in legal proceedings or claims regarding any 
number of matters, including intellectual property infringement, contract disputes, trade compliance, antitrust, environmental 
regulations, privacy and data protection, securities, product performance, product liability, employment and workplace safety, 
and  other  matters.  In  addition,  we  may  receive,  and  have  received,  inquiries,  warrants,  subpoenas,  and  other  requests  for 
information in connection with government investigations of potential or suspected violations of law by our company and/or 
other companies that we work with. We have also received, and may receive in the future, claims from customers who believe 
we owe them product warranty protection, indemnification or other obligations.

Legal proceedings, claims, and government investigations, whether with or without merit, may be time-consuming 
and expensive to respond to and defend.  They may also divert management’s attention and our other resources from day-to-
day operational matters; constrain our ability to sell products and services; result in adverse judgments for damages, injunctive 
relief, penalties and fines; and negatively affect our business and results of operations. We cannot predict the outcome of current 
or future legal proceedings, claims or investigations.

Risks Related to Growth and Acquisitions

We may choose to acquire new and complementary businesses, products or technologies instead of developing them 
ourselves, and we may be unable to complete these acquisitions or may not be able to successfully integrate an acquired 
business in a cost-effective and non-disruptive manner.

Our  success  depends  on  our  ability  to  continually  enhance  and  broaden  our  product  offerings  in  response  to  customer-
anticipated process changes, strategic opportunities for growth, and industry technology trends. To this end, we have, from 
time to time, engaged in the process of identifying, analyzing and negotiating possible acquisition transactions, and, from time 
to time, acquiring one or more businesses, and we expect to continue to do so in the future. We may choose to acquire new and 
complementary businesses, products, technologies and/or services instead of developing them ourselves. We may, however, 
face competition for acquisition targets from larger and more established companies with greater financial resources, making 
it more difficult for us to complete acquisitions. We cannot provide any assurance that we will be successful in consummating 
future acquisitions on favorable terms or that we will realize the benefits that we anticipate from one or more acquisitions that 
we consummate. Integrating any business, product, technology or service into our current operations could be expensive and 
time-consuming  and/or  disrupt  our  ongoing  business.  Further,  there  are  numerous  risks  associated  with  acquisitions  and 
potential acquisitions, including, but not limited to:

•

•

diversion of management’s attention from day-to-day operational matters and current products and customers;

lack of synergy or the inability to successfully integrate the new business or to realize expected synergies;

25

•

•

•

•

•

•

integration of acquired businesses and their operations, including enterprise resource planning systems, may be
costly and time-consuming and divert resources away from other projects;

failure to commercialize the new technology or business;

failure to meet the expected performance of the new technology or business;

failure to retain key employees and customer or supplier relationships;

lower-than-expected market opportunities or market acceptance of any new products; and

unexpected reduction of sales of existing products as a result of the introduction of new products.

Our inability to consummate one or more acquisitions on favorable terms, or our failure to realize the intended benefits
from one or more acquisitions, could have a material adverse effect on our business, liquidity, financial position and/or results 
of  operations,  including  as  a  result  of  our  incurrence  of  indebtedness  and  related  interest  expense  and  our  assumption  of 
unforeseen contingent liabilities. We might need to raise additional funds through public or private equity or debt financings 
to finance any acquisition. In that event, we could be forced to obtain financing on terms that are not favorable to us and, in the 
case of equity financing, that result in dilution to our stockholders. In addition, any impairment of goodwill or other intangible 
assets, amortization of intangible assets, write-down of other assets or charges resulting from the costs of acquisitions and 
purchase accounting could harm our business and operating results.

If we cannot effectively manage growth, our business may suffer.

Over the long-term, we intend to grow our business by increasing our sales efforts and completing strategic acquisitions. To 
effectively manage growth, we must, among other things:

•

•

•

•

•

engage, train and manage a larger sales force and additional service personnel;

expand the geographic coverage of our sales force;

expand our information systems;

identify and successfully integrate acquired businesses into our operations; and

administer appropriate financial and administrative control procedures.

Growth of our business will likely challenge our management, financial, operational, technical, sales, administrative,
and other resources. Any failure to effectively manage our growth may cause our business to suffer and our stock price to 
decline.

Risks Related to the Global Economy and the Semiconductor Industry

Cyclicality in the semiconductor device industry has led to substantial decreases in demand for our systems in the past 
and may, from time to time, continue to do so.

Our operating results are subject to significant variation due to global economic conditions and the cyclical nature of 
the semiconductor device industry. Our business depends upon the capital expenditures of semiconductor device manufacturers, 
which, in turn, depend upon the current and anticipated market demand for semiconductors and products using semiconductors. 
The timing, length and severity of the up-and-down cycles in the semiconductor equipment industry are difficult to predict. In 
recent  history,  the  industry  has  experienced  significant  downturns,  generally  in  connection  with  declines  in  economic 
conditions.  This cyclical nature of the industry in which we operate affects our ability to accurately predict future revenue and, 
thus, future expense levels. When cyclical fluctuations result in lower-than-expected revenue levels, operating results may be 
adversely affected, and cost reduction measures may be necessary in order for us to remain competitive and financially sound. 
During a down cycle, we must be in a position to adjust our cost and expense structure to prevailing market conditions and to 
continue to motivate and retain our key employees. In addition, during periods of rapid growth, we must be able to increase 
manufacturing capacity and personnel to meet customer demand. We can provide no assurance that these objectives can be met 
in a timely manner in response to industry cycles, and we cannot predict when and to what extent sales may normalize, or when 
and to what extent gross margins may improve, following any such occurrence. If we fail to respond to industry cycles, our 
business could be seriously harmed. 

We may also experience supplier or customer issues as a result of adverse macroeconomic conditions. If our customers 
have difficulties in obtaining capital or financing, this could result in lower sales. Customers with liquidity issues could also 

26

result in an increase in bad debt expense. These conditions could also affect our key suppliers, which could affect their ability 
to supply parts and result in delays of our customer shipments.

Our future rate of growth is highly dependent on the development and growth of the market for microelectronic device 
inspection, lithography and metrology equipment.

We target our products to address the needs of microelectronic device manufacturers for defect inspection, metrology 
and lithography. If for any reason the market for microelectronic device inspection, lithography or metrology equipment fails 
to grow in the long term, we may be unable to maintain current revenue levels in the short term and maintain our historical 
growth in the long term. Growth in the inspection market is dependent to a large extent upon microelectronic manufacturers 
replacing manual inspection with automated inspection technology. Growth in the metrology market is dependent to a large 
extent upon new chip designs and capacity expansion of microelectronic manufacturers. Growth in the lithography market is 
dependent on the development of cost-effective packaging with high fine pitch RDLs, ultimately migrating to multi-die, large, 
form-factor packages. There can be no assurance that manufacturers will undertake these actions at the rate we expect.

General Risk Factors

Provisions of our charter documents and of Delaware law could discourage potential acquisition proposals and/or delay, 
deter or prevent a change in control of our company.

Provisions of our certificate of incorporation and by-laws may inhibit changes in control of our company not approved 
by our Board of Directors. These provisions also limit the circumstances in which a premium can be paid for our common stock 
and in which a proxy contest for control of our board may be initiated. These provisions provide for:

•

•

•

•

•

a prohibition on stockholder actions through written consent;

a requirement that special meetings of stockholders be called only by the chairperson of our Board of Directors or
majority of our directors;

advance notice requirements for stockholder proposals and director nominations by stockholders;

the authority of our Board of Directors to issue, without stockholder approval, preferred stock with such terms as
the Board may determine; and

the authority of our board, without stockholder approval, to adopt a stockholder rights plan.

We are also entitled to avail ourselves of the protections of Section 203 of the Delaware General Corporation Law, which

could inhibit changes in control of the Company.

Our stock price is volatile.

The market price of our common stock has fluctuated widely. Consequently, the current market price of our common 
stock may not be indicative of future market prices, and we may be unable to sustain or increase the value of an investment in 
our common stock. Factors affecting our stock price may include:

•

•

•

•

•

•

•

•

•

variations in operating results from quarter to quarter;

changes in earnings estimates by analysts or our failure to meet analysts’ expectations;

changes in the market price per share of our public company customers;

market conditions in the semiconductor and other industries into which we sell products;

general economic conditions;

political changes, hostilities or natural disasters such as hurricanes and floods;

the impact of infectious disease pandemics, on the global economy and on our customers, suppliers, employees,
and business;

low trading volume of our common stock; and

the number of firms making a market in our common stock.

27

In addition, the stock market has experienced periods of significant price and volume fluctuations. These fluctuations 
have  particularly  affected  the  market  prices  of  the  securities  of  high  technology  companies  like  ours.  Any  such  market 
fluctuations in the future could adversely affect the market price of our common stock.

 Item 1B. Unresolved Staff Comments.

None.

Item 1C. Cybersecurity

Cybersecurity Risk Management and Strategy

We  rely  heavily  on  information  technology  (IT)  systems  in  all  aspects  of  our  operations,  and  data  security  plays  an 
important role in the protection of our proprietary information and that of our customers and suppliers. For these reasons, we 
take a number of steps to protect Onto Innovation’s IT systems from internal and external cybersecurity threats.

Identifying  and  assessing  cybersecurity  risk  is  integrated  into  our  overall  risk  management  systems  and  processes. 
Cybersecurity risks related to our business, technical operations, and privacy and compliance issues are identified and addressed 
through a multi-faceted approach including third-party assessments, IT security, governance, risk and compliance reviews. To 
defend,  detect  and  respond  to  cybersecurity  incidents,  we,  among  other  things:  conduct  proactive  cybersecurity  reviews  of 
systems and applications, perform penetration testing using external third-party tools and techniques to test security controls, 
conduct  employee  training,  monitor  emerging  laws  and  regulations  related  to  data  protection  and  information  security  and 
implement appropriate changes.

We have implemented incident response processes which have four overarching and interconnected stages: 1) preparation 
for a cybersecurity incident, 2) detection and review of an incident, 3) containment and remediation, and 4) post-incident review 
and analysis. Cybersecurity incident responses are managed by our Corporate Incident Response Team and overseen by our 
Vice President of IT.

Security  events  and  data  incidents  are  evaluated,  ranked  by  severity  and  prioritized  for  response  and  remediation. 

Incidents are evaluated to determine materiality as well as operational and business impact, and reviewed for privacy impact.

We  also  conduct  tabletop  exercises  to  simulate  responses  to  cybersecurity  incidents.  Our  team  of  cybersecurity 
professionals then collaborate with technical and business stakeholders across our business units to further analyze the risk to 
the company, and form detection, mitigation and remediation strategies.

As part of the above processes, we regularly engage external auditors and subject matter experts to assess our internal 
cybersecurity  programs  and  compliance  with  applicable  practices  and  standards.  Since  2021,  our  Information  Security 
Management System has been certified to conform to the requirements of ISO/IEC 27001:2013.

Our cybersecurity program also includes third-party assessments to identify and mitigate risks from third parties such as 
vendors, suppliers, and other business partners associated with our use of third-party service providers. Cybersecurity risks are 
evaluated when determining the selection and oversight of applicable third-party service providers and potential risks when 
handling and/or processing our employee, business or customer data. In addition to new vendor onboarding, we perform risk 
assessments  during  third-party  cybersecurity  compromise  incidents  to  identify  and  mitigate  risks  to  us  from  third-party 
incidents.

Our individual employees also play an important role in our information security systems. All employees are required to 
familiarize  themselves  with  the  Company’s  information  security  policies  and,  at  least  annually,  employees  are  required  to 
participate in an information security training program, which is designed to help employees identify potentially threats and 
train  them  on  how  to  respond.    Throughout  the  year,  the  IT  department  conducts  phishing  campaigns  and  other  simulated 
hacking attacks with employees as a way of reminding them of their security obligations and ensuing that our SETA (security 
education and training awareness) has been effective.

As of the date of this Form 10-K, no risks from cybersecurity threats, including as a result of any previous cybersecurity 
incidents, have materially affected or are reasonably likely to materially affect us, including our business strategy, results of 
operations, or financial condition.

For more information on the cybersecurity risks we face that could adversely impact us, please see “Part I, Item IA - Risk 
Factors - If our network security measures are breached and unauthorized access is obtained to a customer’s data, to our data, 

28

or  to  our  information  technology  systems,  we  may  incur  significant  legal  and  financial  exposure  and  liabilities  and  may 
experience disruptions in our operations”.

Cybersecurity Governance

The Company’s Board of Directors has oversight of information security matters at the Company, including reviewing 
the  Company’s  cybersecurity  practices.   At  least  annually,  the  Vice  President  of  IT  presents  the  Company’s  information 
security  policies  and  programs  to  the  Board.  Our  Audit  Committee  is  tasked  with  overseeing  the  risks  from  cybersecurity 
threats.  Members  of  the  Audit  Committee  receive  updates  on  cybersecurity  matters  on  a  quarterly  basis  from  one  or  more 
representatives  from the  Company’s  Cyber  Security  Council  (“CSC”),  which  is  composed  of  our  business  unit  general 
managers, other members of senior management, our Vice President of IT and our IT Security Manager. These updates include 
a discussion of existing and new cybersecurity risks (if any), updates on how management is addressing and/or mitigating those 
risks, and the status of information security initiatives. Other Board members also engage in conversations with management 
on cybersecurity-related news events and discuss any updates to our cybersecurity risk management and strategy programs 
outside of the scheduled meetings.

The CSC is also responsible for the executive level supervision of the Company’s cybersecurity risk, information security, 
and technology risk, as well as the IT department’s actions to identify, assess, mitigate, and remediate cyber related issues. The 
CSC receives regular quarterly reports from the Vice President of IT on the Company’s cybersecurity risk profile and enterprise 
cybersecurity program. 

We have also established a process whereby potentially material cybersecurity incidents are escalated to a Cybersecurity 
Disclosure Committee (“CDC”) consisting of our CEO, CFO, Vice President and General Counsel, Vice President of IT and 
Corporate Controller.  The Cybersecurity Disclosure Committee is tasked with evaluating whether such incidents have material 
impact on the Company, and thus require disclosure, as well as any other actions that may be appropriate in response to the 
incident. The CDC promptly notifies the Audit Committee if it determines that an incident is likely to have a material impact 
on the Company and updates the Audit Committee on a quarterly basis of any incidents that it determined were not material.

The Vice President of IT acts as our head of information security in leading our information security organization. Our 
VP of IT has over 20 years of industry experience, including serving in similar roles leading and overseeing cybersecurity 
programs at other public companies. Team members who support our information security program have relevant educational 
and industry experience, including holding similar positions at large technology companies.

29

Item 2. Properties.

Our  principal  executive  office  building  is  located  at  16  Jonspin  Road  in  Wilmington,  Massachusetts.    We  own  our 
Milpitas facility and lease facilities for corporate, engineering, manufacturing, sales and service-related purposes in the United 
States and seven other countries - China, Japan, South Korea, Singapore, Taiwan, Malaysia and Vietnam. The following table 
indicates the location, the general purpose and the square footage of our material facilities. Our leases expire at various times 
through July 1, 2029.

Facility Purpose

Location
Wilmington, Massachusetts.............. Corporate Headquarters, Engineering, Manufacturing and Service
Milpitas, California........................... Engineering, Manufacturing, Service and Administration ..............
Budd Lake, New Jersey .................... Engineering, Service and Administration ........................................
Bloomington, Minnesota .................. Engineering, Manufacturing, Service and Administration ..............
Bend, Oregon.................................... Engineering and Service ..................................................................
Hillsboro, Oregon ............................. Engineering and Service ..................................................................
Snoqualmie, Washington.................. Engineering and Service ..................................................................
Tucson, Arizona ............................... Engineering, Manufacturing and Service.........................................
Taiwan .............................................. Sales and Service .............................................................................
China................................................. Sales, Service and Engineering........................................................
South Korea ...................................... Sales and Service .............................................................................
Japan ................................................. Sales and Service .............................................................................
Singapore.......................................... Sales and Service .............................................................................

Approximate
Square
Footage

77,500
134,600
49,000
98,700
12,700
10,000
20,300
18,900
37,600
26,200
29,200
14,000
9,800

 We also lease office space for other smaller sales and service offices in several locations throughout the world.

We  believe  that  our  existing  facilities  and  capital  equipment  are  adequate  to  meet  our  current  requirements  and  that 

suitable additional or substitute space is available on commercially reasonable terms if needed.

Item 3. Legal Proceedings.

The  information  set  forth  under  the  heading  “Legal  Matters”  in  Note  8,  “Commitments  and  Contingencies”  to  the 

Consolidated Financial Statements is incorporated herein by reference.

 Item 4. Mine Safety Disclosures.

None.

30

PART II

Item  5.  Market  for  Registrant’s  Common  Equity,  Related  Stockholder  Matters  and  Issuer  Purchases  of  Equity 
Securities.

Our common stock, $0.01 par value per share, is quoted on the New York Stock Exchange (“NYSE”) under the symbol 
“ONTO.” As of February 5, 2024, there were approximately 106 stockholders of record.  On October 25, 2019, we became 
Onto  Innovation  Inc.  upon  the  effectiveness  of  the  merger  (the  “2019  Merger”)  between  Nanometrics  Incorporated 
(“Nanometrics”) and Rudolph Technologies, Inc. (“Rudolph”).  Prior to the 2019 Merger, Nanometrics’ common stock was 
quoted on the Nasdaq Global Select Market under the symbol “NANO” and Rudolph’s common stock was quoted on the NYSE 
under the symbol “RTEC.” Set forth below is a line graph comparing the annual percentage change in the cumulative return to 
the stockholders of the Company’s common stock with the cumulative return of the NYSE Composite Index and an industry 
specific index, the PHLX Semiconductor Index, for the period commencing on December 31, 2018 and ending on December 
31, 2023.  Historical data for Onto Innovation in the line graph for the period commencing on December 31, 2018 and ending 
on October 25, 2019 reflects the cumulative return to the stockholders of Nanometrics. 

The information contained in the performance graph shall not be deemed to be “soliciting material” or to be “filed” with 
the SEC, nor shall such information be incorporated by reference into any future filing under the Securities Act or the Exchange 
Act, except to the extent that the Company specifically incorporates it by reference into such filing.

The graph assumes that $100 was invested on December 31, 2018 in the Company’s common stock and in each index.  

Stockholder returns over the indicated period should not be considered indicative of future stockholder returns.

Prepared by Zacks Investment Research, Inc. Used with permission.  All rights reserved.  Copyright 1980-2024.

Onto Innovation Inc...............................................
NYSE Composite ..................................................
PHLX Semiconductor............................................

100.0
100.0
100.0

133.7
125.5
163.3

173.9
134.3
250.9

370.3
162.0
358.4

249.0
146.9
233.4

559.1
167.1
389.7

12/18

12/19

12/20

12/21

12/22

12/23

We have never declared or paid a cash dividend on our common stock and we currently do not intend to do so. The 
declaration  of  any  future  dividends  by  us  is  within  the  discretion  of  our  Board  of  Directors  and  will  be  dependent  on  our 
earnings, financial condition and capital requirements as well as any other factors deemed relevant by our Board of Directors.

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows us 
to repurchase up to $100 million worth of shares of our common stock.  Repurchases may be made through both public market 

31

and private transactions from time to time with shares purchased being subsequently retired.  During the twelve months ended 
December 30, 2023, we repurchased 46 thousand shares of our common stock.  The amount paid to repurchase the shares in 
excess of par value, including transaction costs, is recorded directly as a decrease to additional paid-in capital and accumulated 
earnings. At December 30, 2023, there was $31.6 million available for future share repurchases under the share repurchase 
authorization.

For further information, see Note 16 in the accompanying Notes to the Consolidated Financial Statements included in 

this Form 10-K.

In addition to our share repurchase program, we withhold common stock shares associated with net share settlements to 
cover  tax  withholding  obligations  upon  the  vesting  of  restricted  stock  unit  awards  under  the  Company’s  equity  incentive 
program. During the three and twelve months ended December 30, 2023, we withheld 3 thousand and 125 thousand shares 
through  net  share  settlements,  respectively.  For  the  three  and  twelve  month  periods  ended  December  30,  2023,  net  share 
settlements cost $0.4 million and $10.8 million, respectively. Please refer to Note 10 of the Notes to the Consolidated Financial 
Statements included in this Form 10-K for further discussion regarding our equity incentive plan.

The following table provides details of common stock purchased during the three-month period ended December 30, 

2023 (in thousands, except per share data):

Total Number
of Shares
Purchased (1)
2
1
— $
3

Average
Price
Paid per
Share
$ 121.77
$ 133.33
—

Total Number
of Shares
Purchased as
Part of Publicly
Announced
Program

Maximum
Approximate Dollar Value 
of
Shares that
May Yet Be
Purchased Under
the Program

— $
— $
— $
—

31,577
31,577
31,577

Period
October 1, 2023 - October 30, 2023 .........................
October 31, 2023 - November 30, 2023 ...................
December 1, 2023 - December 30, 2023 ..................
Three Months Ended December 30, 2023 ................

1  Includes shares withheld through net share 
settlements.

Item 6. [Reserved]

32

Item 7. Management’s Discussion and Analysis of Financial Condition and Results of Operations.

Executive Summary

We are a worldwide leader in the design, development, manufacture and support of process control tools that perform 
macro-defect inspection and metrology, lithography systems, and process control analytical software used by semiconductor 
and advanced packaging device manufacturers. We deliver comprehensive solutions throughout the semiconductor fabrication 
process with our families of proprietary products that provide critical yield-enhancing information, enabling microelectronic 
device  manufacturers  to  drive  down  costs  and  time  to  market  of  their  devices.  We  provide  process  and  yield  management 
solutions used in both wafer processing facilities, often referred to as “front-end” manufacturing, and in device packaging and 
test facilities, commonly referred to as “back-end” manufacturing. Our advanced process control software portfolio includes 
powerful solutions for standalone tools, groups of tools, or factory-wide suites to enhance productivity and achieve significant 
cost savings. 

Our principal market is semiconductor capital equipment.  Semiconductors packaged as integrated circuits (“ICs”), or 
“chips”,  are  used  in  consumer  electronics,  server  and  enterprise  systems,  mobile  computing  (including  smart  phones  and 
tablets), data storage devices, and embedded automotive and control systems.  Our core focus is the measurement and control 
of the structure, composition, and geometry of semiconductor devices as they are fabricated on silicon wafers to improve device 
performance and manufacturing yields. 

Our products and services are used by our customers who manufacture many types of ICs for a multitude of applications, 
each having unique manufacturing challenges. This includes ICs to enable information processing and management (logic ICs), 
memory  storage  (NAND,  3D-NAND,  NOR,  and  DRAM),  analog  devices  (e.g.,  Wi-Fi  and  5G  radio  ICs,  power  devices), 
MEMS  sensor  devices  (accelerometers,  pressure  sensors,  microphones),  image  sensors,  and  other  end  markets  including 
components for artificial intelligence, hard disk drives, LEDs, and power management.

The  semiconductor  and  electronics  industries  have  also  been  characterized  by  constant  technological  innovation.  We 
believe that, over the long term, our customers will continue to invest in advanced technologies and new materials to enable 
smaller design rules and higher density applications that fuel demand for process control equipment.

The following table summarizes certain key financial information for the periods indicated below (in thousands, except 

per share and percent data):

 Revenue.....................................................................................$
 Gross profit................................................................................$
 Gross profit as a percent of revenue..........................................
 Total operating expenses...........................................................$
 Net income ................................................................................$
 Diluted earnings per share.........................................................$

Year Ended

December 30,
2023

December 31,
2022

815,868
420,254

52%

304,176
121,159
2.46

$
$

$
$
$

1,005,183
539,221

54%

302,507
223,334
4.49

•

In fiscal 2023, revenue decreased 19% compared to fiscal 2022, primarily due to a decrease in sales to memory and
foundry customers in advanced nodes. The decreases were partially offset by increases in sales to wafer substrate,
memory and discrete & specialty customers in specialty device and advanced packaging applications.

• Gross profit as a percentage of revenue decreased to 52% for fiscal 2023 from 54% for fiscal 2022.  This was primarily
driven by decreased revenue volume, unfavorable product mix, and increased manufacturing costs due to inflationary
pressures.

•

The increase in operating expenses in fiscal 2023 compared to fiscal 2022 was primarily due to higher general and
administrative expenses related to litigation and restructuring charges which included reductions in workforce.

Our  cash,  cash  equivalents  and  marketable  securities  balance  increased  to  $697.8  million  at  the  end  of  fiscal  2023 
compared to $547.8 million at the end of fiscal 2022. This increase was primarily the result of $172.0 million of cash generated 
from operating activities, partially offset by cash used for capital expenditures of $22.6 million and $10.8 million of cash used 
for tax payments related to net share settlement of employee stock-based compensation plans.

In  2022  and  2023,  the  United  States  government  implemented  additional  export  regulations  for  U.S.  semiconductor 
technology sold in China.  We have applied for export licenses to continue doing business with our customers that are affected 

33

by the new export rules.  However, the new export controls have resulted in lower net sales in China for fiscal 2023 compared 
to the prior fiscal year.

For a discussion of the risks related to our business and operations, see Part I, Item 1A – Risk Factors of this Annual 

Report on Form 10-K.

Results of Operations

The following table sets forth, for the periods indicated, our results of operations as percentages of our revenue. Our 

results of operations are reported as one business segment.

Revenue......................................................................................
Cost of revenue ..........................................................................
Gross profit ............................................................................

Operating expenses:

Research and development.....................................................
Sales and marketing ...............................................................
General and administrative ....................................................
Amortization ..........................................................................
Total operating expenses....................................................
Operating income.......................................................................
Interest income, net ....................................................................

Other expense, net......................................................................
Income before provision for income taxes.............................
Provision for income taxes.........................................................
Net income .................................................................................

 Results of Operations for 2023, 2022 and 2021 

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

100.0 %
48.5 %
51.5 %

12.7 %
7.6 %
10.2 %
6.7 %
37.2 %
14.3 %
2.5 %
)
(0.5
%
16.3 %
1.4 %
14.9 %

100.0 %
46.4 %
53.6 %

11.2 %
6.5 %
6.9 %
5.5 %
30.1 %
23.5 %
0.5 %

—%
24.0 %
1.8 %
22.2 %

100.0 %
45.6 %
54.4 %

12.2 %
7.3 %
8.6 %
6.5 %
34.6 %
19.8 %
0.1 %

(0.2)%
19.7 %
1.7 %
18.0 %

Revenue. Our revenue is derived from the sale of our systems and software, spare parts, and services. Our revenue was 
$815.9 million, $1,005.2 million and $788.9 million for the years ended December 30, 2023, December 31, 2022 and January 
1, 2022, respectively.  This represents a decrease of 18.8% from 2022 to 2023 and an increase of 27.4% from 2021 to 2022.

The following table lists, for the periods indicated, the different sources of our revenue in dollars (thousands) and as 

percentages of our total revenue: 

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Systems and software........................... $
Parts .....................................................
Services ................................................

Total revenue ............................... $

683,316
74,604
57,948
815,868

84 % $
9 %
7 %

865,707
84,266
55,210
100 % $ 1,005,183

86 % $ 669,114
72,753
8 %
47,032
6 %
100 % $ 788,899

85 %
9 %
6 %
100 %

Total systems and software revenue decreased $182.4 million for the year ended December 30, 2023, as compared to the 
year ended December 31, 2022, primarily due to a decrease in units shipped of our metrology product lines to customers in 
advanced nodes applications.  This decline was partially offset by an increase in units shipped of our inspection and lithography 
product lines to customers in specialty devices and advanced packaging applications.  Parts and services revenue is generated 
from part sales, maintenance service contracts, and system upgrades, as well as time and material billable service calls. During 
fiscal 2023, the decrease in total parts and services revenue was primarily due to lower factory utilization by several of our 
customers resulting in a decline in their spare parts requirements.

Total systems and software revenue increased $196.6 million for the year ended December 31, 2022, as compared to the 
year ended January 1, 2022, primarily due to an increase in overall demand for our products from semiconductor industry 
customers, particularly in advanced nodes applications, and specialty devices and advanced packaging.  The year-over-year 
change in systems revenue was primarily due to an increase in units shipped in our metrology and inspection product lines.  
Parts and services revenue is generated from part sales, maintenance service contracts, and system upgrades, as well as time 

34

and material billable service calls. During fiscal 2022, the increase in parts and services revenue was primarily due to increased 
spending by our customers on system upgrades and repairs of existing systems. 

The following table sets forth, for the periods indicated, our revenue by geographic region as percentages of our revenue.

Revenue...................................................................................... $
South Korea............................................................................
Taiwan....................................................................................
China ......................................................................................
United States ..........................................................................
Japan.......................................................................................
Southeast Asia........................................................................
Europe ....................................................................................
Total revenue......................................................................

December 30, 
2023

815,868

$

Year Ended
December 31, 
2022
1,005,183

January 1, 
2022

$

788,899

21 %
17 %
17 %
16 %
11 %
11 %
7 %
100 %

22 %
20 %
25 %
12 %
6 %
7 %
8 %
100 %

20 %
25 %
19 %
16 %
8 %
4 %
8 %
100 %

The overall Asia region continues to account for a majority of our revenues as a substantial amount of the worldwide 

capacity investments for semiconductor manufacturing continue to occur in this region and we expect that trend to continue.

Gross  Profit.  Our  gross  profit  has  been  and  will  likely  continue  to  be  affected  by  a  variety  of  factors,  including 
manufacturing  efficiencies,  provision  for  excess  and  obsolete  inventory,  pricing  by  competitors  or  suppliers,  new  product 
introductions, production volume, inventory step-up from purchase accounting, customization and reconfiguration of systems, 
international and domestic sales mix, system and software product mix, and parts and services margins. Our gross profit was 
$420.3 million, $539.2 million and $429.1 million for the years ended December 30, 2023, December 31, 2022, and January 
1, 2022, respectively.  Our gross profit represented 51.5%, 53.6% and 54.4% of our revenue for the years ended December 30, 
2023, December 31, 2022, and January 1, 2022, respectively.  The decrease in gross profit as a percentage of revenue from 
2022 to 2023 was primarily due to decreased revenue volume, unfavorable product mix, and increased manufacturing costs 
due to inflationary pressures during the 2023 fiscal period.  The decrease in gross profit as a percentage of revenue from 2021 
to 2022 was primarily due to supply chain cost increases in the 2022 fiscal period, partially offset by higher factory utilization 
associated with increased sales volume during the 2022 fiscal period.  

Operating Expenses.

Our operating expenses consist of:

• Research and Development. We believe that it is critical to continue to make substantial investments in research
and  development  to  ensure  the  availability  of  innovative  technology  that  meets  the  current  and  projected
requirements  of  our  customers’  most  advanced  designs.  We  have  maintained,  and  intend  to  continue,  our
commitment to investing in research and development in order to continue to offer new products and technologies.
Accordingly, we devote a significant portion of our technical, management and financial resources to research and
development programs. Research and development expenditures consist primarily of salaries and related expenses
of employees engaged in research, design and development activities. They also include consulting fees, the cost
of related supplies and legal costs to defend our intellectual property. Our research and development expenses were
$104.4 million, $112.0 million and $96.1 million in fiscal years 2023, 2022 and 2021, respectively.  The year-over-
year dollar decrease from 2022 through 2023 was primarily due to decreases of $4.6 million for the write-off of
acquired  in-process  research  and  development  assets  and  cost  containment  initiatives  of  $3.3  million,  partially
offset by increases in depreciation expenses of $0.6 million and travel expenses of $0.3 million.  The year-over-
year dollar increase from 2021 through 2022 was primarily due to higher compensation costs of $7.4 million for
increased  headcount  and  variable  compensation  costs,  the  write-off  of  purchased  in  process  research  and
development assets of $4.6 million and increased costs related to new product initiatives of approximately $3.3
million.  We continue to maintain our commitment to investing in new product development and enhancement to
existing products.

• Sales and Marketing. Sales and marketing expenses are primarily comprised of salaries and related costs for sales
and  marketing  personnel,  as  well  as  commissions  and  other  non-personnel  related  expenses.    Our  sales  and
marketing  expenses  were  $61.8  million,  $65.7  million  and  $57.2  million  in  fiscal  years  2023,  2022  and  2021,
respectively.  The year-over-year dollar decrease from 2022 through 2023 was primarily due to a decrease in total
compensation costs of $1.5 million on lower headcount and variable compensation plan elements, a decrease in

35

outside service expenses of $0.8 million and a decrease in depreciation expense of $0.7 million, partially offset by 
an increase in travel expenses of $0.3 million.  The year-over-year dollar increase from 2021 through 2022 was 
primarily due to increased total compensation costs of $5.8 million for higher headcount and variable compensation 
plan costs. Higher travel related expenses of approximately $0.4 million contributed to the overall increase.  

• General and Administrative. General and administrative expenses are primarily comprised of salaries and related
costs  for  general  administrative  personnel,  as  well  as  other  non-personnel  related  expenses.  Our  general  and
administrative expenses were $83.1 million, $69.6 million and $68.0 million in fiscal years 2023, 2022 and 2021,
respectively.  The year-over-year dollar increase from 2022 through 2023 was primarily due increased litigation
expenses of $7.4 million, restructuring charges of $3.6 million for employee severance costs during the 2023 period,
an increase in depreciation expense of $1.9 million and an increase in facilities expenses of $0.4 million. The year-
over-year dollar increase from 2021 through 2022 was primarily due to increased facilities expenses of $5.0 million,
partially offset by a decrease of $3.8 million in depreciation expense.

• Amortization of Identifiable Intangible Assets.  Amortization of identifiable intangible assets, primarily purchased
technology, was $54.8 million, $55.3 million and $51.4 million in fiscal years 2023, 2022 and 2021, respectively.
The year-over-year dollar decrease from 2022 through 2023 was primarily due to certain assets becoming fully
amortized.    The  year-over-year  dollar  increase  from  2021  through  2022  was  primarily  due  to  a  full  year  of
amortization  being  included  in  the  2022  fiscal  period  for  in-process  research  and  development  that  became
classified as an identifiable intangible asset in the second half of 2021.

Interest income, net.  In fiscal years 2023, 2022 and 2021, net interest income was $20.4 million, $5.0 million and $1.2 
million, respectively.  The increases in net interest income from 2022 to 2023 and from 2021 to 2022 were due to higher average 
balances and higher interest rates during both the 2023 and 2022 periods, respectively.   

Income taxes. The following table provides details of income tax (dollars in millions): 

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Income before provision for income taxes................................... $
Provision for income taxes........................................................... $
Effective tax rate ..........................................................................

132.6
11.4
8.6%

$
$

241.6
18.3
7.6%

$
$

155.7
13.3
8.6%

The income tax provision differs from the federal statutory income tax rate of 21% for 2023 primarily due to a benefit 
related  to  the  Foreign  Derived  Intangible  Income  Deduction  (“FDII”)  of  $13.0  million,  excess  benefits  related  to  stock 
compensation of $3.4 million, tax benefits for research and development credits of $6.4 million, and a one-time benefit of $1.6 
million  related  to  the  recognition  of  a  tax  benefit  associated  with  the  lapse  of  a  statute  of  limitations.  These  benefits  were 
partially offset by the inclusion of U.S. tax on foreign source income of $0.5 million and non-deductible officer’s compensation 
of $2.3 million, and an increase to the Company’s valuation allowance of $2.9 million.

The income tax provision differs from the federal statutory income tax rate of 21% for 2022 primarily due to a benefit 
related  to  the  Foreign  Derived  Intangible  Income  Deduction  (“FDII”)  of  $25.4  million,  excess  benefits  related  to  stock 
compensation of $3.5 million, tax benefits for research and development credits of $7.1 million, and a one-time benefit of $1.5 
million  related  to  the  recognition  of  a  tax  benefit  associated  with  the  lapse  of  a  statute  of  limitations.  These  benefits  were 
partially offset by the inclusion of U.S. tax on foreign source income of $1.4 million and non-deductible officer’s compensation 
of $1.9 million.

The income tax provision differs from the federal statutory income tax rate of 21% for 2021 primarily due to a benefit 
related  to  the  Foreign  Derived  Intangible  Income  Deduction  (“FDII”)  of  $11.1  million,  excess  benefits  related  to  stock 
compensation of $3.8 million, tax benefits for research and development credits of $3.6 million, tax benefit from foreign income 
being taxed at lower rates of $3.8 million, and a one-time benefit of $2.0 million from a reduction to recorded tax reserve 
related to a lapse of a statute of limitations. These benefits were partially offset by the inclusion of U.S. tax on foreign source 
income of $1.7 million.

Our future effective income tax rate depends on various factors, such as tax legislation, the geographic composition of 
our pre-tax income, the amount of our pre-tax income as business activities fluctuate, non-deductible expenses incurred in 
connection with acquisitions and research and development credits as a percentage of aggregate pre-tax income.

36

Liquidity and Capital Resources

Our cash, cash equivalents and marketable securities consist of the following:

Year Ended

December 30,
2023

December 31,
2022

 Cash and cash equivalents ...............................................................................$
 Marketable securities.......................................................................................
Total cash, cash equivalents and marketable securities................................$

233,508
464,303
697,811

$

$

175,872
371,912
547,784

Sources and Uses of Cash

A summary of cash provided by (used in) operating, investing, and financing activities is as follows:

December 30,
2023

Year Ended
December 31,
2022

January 1,
2022

 Cash provided by operating activities ...........................................$
 Cash used in investing activities ...................................................$
 Cash (used in) provided by financing activities ............................$

171,973
$
(103,387) $
(9,475) $

136,703
(55,691)
(68,350)

$
$
$

175,281
(141,793)
2,670

Operating Activities

Cash  provided  by  operating  activities  during  fiscal  2023  was  $172.0  million,  which  reflects  net  income,  adjusted  to 
exclude  the  effect  of  non-cash  operating  charges,  of  $204.5  million.  Significant  non-cash  operating  charges  included 
depreciation,  amortization,  share-based  compensation,  provision  for  inventory  valuation  and  deferred  income  taxes.    Cash 
provided  by  operating  activities  in  fiscal  2023  increased  compared  to  fiscal  2022  primarily  due  to  improved  inventory 
management and lower income tax payments.

Our working capital was $1,135.5 million at December 30, 2023 and $974.3 million at December 31, 2022.

Investing Activities

We used $103.4 million, $55.7 million and $141.8 million of cash in investing activities in fiscal 2023, 2022 and 2021, 
respectively. Capital expenditures, net of proceeds in fiscal 2023, 2022 and 2021 were $19.8 million, $18.4 million and $12.0 
million.  Capital expenditures were primarily for investments in facility improvements, demonstration and testing equipment, 
manufacturing  and  network  equipment.  Purchases  of  marketable  securities,  net  of  proceeds  from  sales  and  maturities  of 
marketable securities, for fiscal 2023, 2022 and 2021 was $83.6 million, $4.6 million and $23.8 million, respectively. Net cash 
paid for acquisitions in fiscal 2022 and 2021 were $4.6 million and $23.8 million, respectively.  There were no acquisitions in 
fiscal 2023.

From time to time, we evaluate whether to acquire new or complementary businesses, products or technologies. We may 

fund all of or a portion of the price of these investments or acquisitions in cash, stock, or a combination of cash and stock.

Financing Activities

We used $9.5 million and $68.4 million of cash in financing activities for fiscal 2023 and 2022, respectively.  Financing 
activities provided $2.7 million in fiscal 2021. Repurchases of common stock were $3.2 million and $65.3 million in fiscal 
2023 and 2022, respectively.  There were no repurchases of common stock in 2021.  Tax withholding payments for vested 
equity awards, partially offset by proceeds from sales of shares through share-based compensation plans were $5.5 million and 
$0.8 million for fiscal 2023 and 2022, respectively.  In fiscal 2021 proceeds received from sales of shares through share-based 
compensation  plans,  partially  offset  by  tax  withholding  payments  for  vested  equity  award,  provided  cash  of  $2.7  million.  
Payments for contingent consideration for acquired business were $0.8 million and $2.3 million in fiscal 2023 and 2022.  There 
were no payments for contingent consideration for acquired business in fiscal 2021.

We have a credit agreement with a bank that provides for a line of credit that is secured by the marketable securities we 
have with the bank.  We are permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit 
is accessed.  As of December 30, 2023, the available line of credit was approximately $100.0 million with an available interest 
rate of 7.0%.  The credit agreement is available to us until such time that either party terminates the arrangement at its discretion.   
To date, we have not utilized the line of credit.

37

Our future capital requirements will depend on many factors, including the timing and amount of our revenue and our 
investment  decisions,  which  will  affect  our  ability  to  generate  additional  cash.    We  expect  that  our  existing  cash,  cash 
equivalents,  marketable  securities  and  availability  under  our  line  of  credit  will  be  sufficient  to  meet  our  anticipated  cash 
requirements for working capital, capital expenditures and other cash needs for the next 12 months following the filing of this 
Form 10-Q. Thereafter, if cash generated from operations and financing activities is insufficient to satisfy our working capital 
requirements, we may seek additional funding through bank borrowings, sales of securities or other means.  In addition, a 
reduction in or volatility with respect to our stock price or a general market downturn could materially impact our ability to sell 
securities  on  favorable  terms  or  at  all.  There  can  be  no  assurance  that  we  will  be  able  to  raise  any  such  capital  on  terms 
acceptable to us or at all.

Contractual Obligations

The  following  table  summarizes  our  significant  contractual  obligations  at  December  30,  2023,  and  the  effect  such 
obligations  are  expected  to  have  on  our  liquidity  and  cash  flows  in  future  periods.  We  are  currently  unable  to  provide  a 
reasonably reliable estimate of the amount or periods when cash settlement of this liability may occur (dollars in thousands).

Operating lease obligations ............................................. $
Purchase obligations (1)....................................................

Total
21,673
437,105
Total............................................................................. $ 458,778

Less than 1
year

Payments due by period
1-3
years

3-5
years

More than
5 years

$

5,929
426,087
$ 432,016

$

$

9,429
11,018
20,447

$

$

5,192
—
5,192

$

$

1,123
—
1,123

(1) Represents our agreements to purchase goods and services consisting of outstanding purchase orders for goods and

services.

Critical Accounting Policies and Estimates

Management’s  discussion  and  analysis  of  our  financial  condition  and  results  of  operations  are  based  upon  our 
Consolidated  Financial  Statements  included  in  this  Form  10-K,  which  have  been  prepared  in  accordance  with  accounting 
principles  generally  accepted  in  the  United  States.  Note  2  of  Notes  to  Consolidated  Financial  Statements  describes  the 
significant accounting policies used in the preparation of the consolidated financial statements. Certain of these significant 
accounting policies are considered to be critical accounting policies and involve critical accounting estimates. We review the 
accounting policies we use in reporting our financial results on a regular basis. The preparation of the financial statements 
requires us to make estimates and judgments that affect the reported amounts of assets, liabilities, revenue and expenses and 
related disclosure of contingent assets and liabilities. On an ongoing basis, we evaluate our estimates, including those related 
to revenue recognition, accounts receivable, inventories, business acquisitions, intangible assets, share-based payments, income 
taxes  and  warranty  obligations.  We  base  our  estimates  on  historical  experience  and  on  various  other  assumptions  that  are 
believed to be reasonable under the circumstances, the results of which form the basis for making judgments about the carrying 
value of assets and liabilities that are not readily apparent from other sources. Results may differ from these estimates due to 
actual outcomes being different from those on which we based our assumptions. These estimates and judgments are regularly 
reviewed by management on an ongoing basis at the end of each quarter prior to the public release of our financial results. 

Management believes that the following are critical accounting estimates:

Revenue  Recognition.  Revenue  is  recognized  when  control  of  the  promised  goods  or  services  are  transferred  to  our 
customers  in  an  amount  that  reflects  the  consideration  we  expect  to  be  entitled  to  receive  in  exchange  for  those  goods  or 
services.  We  account  for  a  contract  when  it  has  approval  and  commitment  from  both  parties,  the  rights  of  the  parties  and 
payment terms are identified, the contract has commercial substance and collectability of consideration is probable.

Contracts with customers may include multiple performance obligations. For such arrangements, we allocate revenue to 
each performance obligation based on its relative standalone selling price. We generally determine standalone selling prices 
based on the prices charged to customers or the expected cost-plus margin.

Revenue from systems is recognized when we transfer control of the product to our customer. To indicate transfer of 
control, we must have a present right to payment, legal title must have passed to the customer and the customer must have the 
significant risks and rewards of ownership. We generally transfer control for system sales when the customer or the customer’s 
agent picks up the system at our facility. We provide an assurance warranty on our systems for a period of twelve to fourteen 
months  against  defects  in  material  and  workmanship.  We  provide  for  the  estimated  cost  of  product  warranties  at  the  time 
revenue is recognized.

38

Depending on the terms of the systems arrangement, we may also defer the recognition of a portion of the consideration 
expected to be received because we have to satisfy a future obligation (e.g., installation and extended warranties). We use an 
observable price to determine the standalone selling price for separate performance obligations or a cost-plus margin approach 
when one is not available.

Revenue from software licenses, which is primarily sold without systems, is recognized upfront at the point in time when 
the software is made available to the customer. Software licenses provide the customer with limited rights to use the software. 
Revenue from licensing support and maintenance is recognized as the support and maintenance are provided, which is over the 
contract period.

Revenue from parts is recognized when we transfer control of the product, which typically occurs when we ship the 

product from our facilities to the customer.

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
our assurance warranty on our products, service labor, consulting and training. Revenue from service contracts is recognized 
ratably over the term of the service contract. Revenue from service labor and consulting is recognized as services are performed.

We record contract liabilities when the customer has been billed in advance of completing our performance obligations. 

These amounts are recorded as deferred revenue in the Consolidated Balance Sheets.

Inventory  Valuation.  Inventories  are  stated  at  the  lower  of  cost  or  net  realizable  value.    Net  realizable  value  is  the 
estimated selling prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  
Cost is generally determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. We 
review and set standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to 
approximate actual costs. We maintain reserves for our excess and obsolete inventory equal to the difference between the cost 
of  inventory  and  the  estimated  market  value  based  upon  assumptions  about  future  product  lifecycles,  product  demand  and 
market conditions. If actual product lifecycles, product demand and market conditions are less favorable than those originally 
projected by management, additional inventory write-downs may be required.

Long-Lived Assets.  Goodwill is tested for impairment during the fourth quarter, or whenever events or circumstances 
indicate that its carrying value may not be recoverable. Goodwill impairment is tested at the reporting unit level, which is 
defined as an operating segment or one level below the operating segment.  Goodwill is reviewed for impairment using either 
a qualitative assessment or a quantitative goodwill impairment test. If the Company chooses to perform a qualitative assessment 
and determine the fair value more likely than not exceeds the carrying value, no further evaluation is necessary. When the 
Company performs the quantitative goodwill impairment test, it compares fair value to carrying value, which includes goodwill. 
If fair value exceeds carrying value, the goodwill is not considered impaired. If the carrying value is higher than the fair value, 
the difference would be recognized as an impairment loss.

For  other  long-lived  assets,  we  periodically  review  long-lived  assets,  other  than  goodwill,  for  impairment  whenever 
changes in events or circumstances indicate that the carrying amount of an asset may not be recoverable. Assumptions and 
estimates  used  in  the  determination  of  impairment  losses,  such  as  future  cash  flows  and  disposition  costs,  may  affect  the 
carrying value of long-lived assets and the impairment of such long-lived assets, if any, could have a material effect on our 
consolidated financial statements.

Income Taxes. As part of the process of preparing our consolidated financial statements, we are required to estimate our 
current tax exposure together with our temporary differences resulting from differing treatment of items for tax and accounting 
purposes. These temporary differences result in deferred tax assets and liabilities, which are included within our consolidated 
balance sheet. We must assess the likelihood that our deferred tax assets will be recovered from future taxable income and to 
the extent we believe that recovery is not likely, we must establish a valuation allowance. Management judgment is required 
in determining our provision for income taxes and any valuation allowance recorded against our deferred tax assets. The need 
for a valuation allowance is based on our estimates of taxable income by jurisdiction in which we operate and the period over 
which our deferred taxes will be recoverable. In the event that actual results differ from these estimates or we adjust these 
estimates in future periods, we may need to adjust the valuation allowance, which could materially impact our financial position 
and results of operations.

We recognize liabilities for uncertain tax positions based on a two-step process. The first step requires us to determine if 
the weight of available evidence indicates that the tax position has met the threshold for recognition; therefore, we must evaluate 
whether it is more likely than not that the position will be sustained on audit, including resolution of any related appeals or 
litigation processes. The second step requires us to measure the tax benefit of the tax position taken, or expected to be taken, 
in an income tax return as the largest amount that is more than 50% likely of being realized when effectively settled. This 
measurement step is inherently difficult and requires subjective estimations of such amounts to determine the probability of 
various possible outcomes. We reevaluate the uncertain tax positions each quarter based on factors including, but not limited 

39

to, changes in facts or circumstances, changes in tax law, effectively settled issues, and new audit activity. Such a change in 
recognition or measurement could result in the recognition of a tax benefit or an additional charge to the tax provision in the 
period.

Item 7A. Quantitative and Qualitative Disclosures About Market Risk.

Interest Rate and Credit Market Risk

We are exposed to changes in interest rates and market liquidity including our investments in certain available-for-sale 
securities. Our available-for-sale securities consist of fixed and variable rate income investments, such as municipal notes, 
municipal bonds and corporate bonds. We continually monitor our exposure to changes in interest rates, market liquidity and 
credit ratings of issuers for our available-for-sale securities. It is possible that we are at risk if interest rates, market liquidity or 
credit ratings of issuers change in an unfavorable direction. The magnitude of any gain or loss will be a function of the difference 
between the fixed or variable rate of the financial instrument and the market rate, and our financial condition and results of 
operations  could  be  materially  affected.  Based  on  a  sensitivity  analysis  performed  on  our  financial  investments  held  as  of 
December 30, 2023, a hypothetical increase of 100 basis points in interest rates would result in a decrease of $3.0 million in 
the  fair  value  of  our  available-for-sale  debt  securities  and  would  not  have  a  material  impact  on  our  consolidated  financial 
position, results of operations or cash flows.

Foreign Currency Risk

We enter into foreign currency forward contracts to minimize the short-term impact of exchange rate fluctuations on 
certain  foreign  currency  denominated  monetary  assets  and  liabilities,  primarily  cash  and  intercompany  receivables  and 
payables. In addition, we hedge certain anticipated foreign currency cash flows, primarily on revenues denominated in Japanese 
yen.  These forward contracts are not designated as accounting hedges, so the change in fair value of the forward exchange 
contracts is recognized under the caption “Other expense, net” in the Consolidated Statements of Operations for each reporting 
period.  As  of  December  30,  2023,  and  December  31,  2022,  we  had  thirty-eight  and  six  outstanding  forward  contracts, 
respectively, with a total notional contract value of $51.6 million and $27.9 million, respectively. We do not use derivative 
financial instruments for trading or speculative purposes.

Item 8. Financial Statements and Supplementary Data.

The consolidated financial statements and related information required by this Item are set forth on the pages indicated 

in Item 15(a) of this Form 10-K.

Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure.

None.

Item 9A. Controls and Procedures.

Evaluation of Disclosure Controls and Procedures

We maintain disclosure controls and procedures that are designed to ensure that information we are required to disclose 
in reports that we file or submit under the Exchange Act is recorded, processed, summarized and reported within the time 
period specified in SEC rules and forms. These controls and procedures are also designed to ensure that such information is 
accumulated and communicated to our management, including our principal executive officer and principal financial officer, 
as appropriate, to allow timely decisions regarding required disclosure. In designing and evaluating disclosure controls and 
procedures, we have recognized that any controls and procedures, no matter how well designed and operated, can provide only 
reasonable assurance of achieving the desired control objectives. Management is required to apply judgment in evaluating its 
controls and procedures.

We performed an evaluation under the supervision and with the participation of our management, including our principal 
executive officer and principal financial officer, to assess the effectiveness of the design and operation of our disclosure controls 
and procedures under the Exchange Act as of December 30, 2023. Based on that evaluation, our management, including our 
principal executive officer and principal financial officer, concluded that our disclosure controls and procedures were effective 
as of December 30, 2023 at the reasonable assurance level.

Management’s Report on Internal Control Over Financial Reporting

Our management is responsible for establishing and maintaining adequate internal control over financial reporting, as 
such  term  is  defined  in  Exchange  Act  Rules  13a-15(f)  and  15d-15(f).  Internal  control  over  financial  reporting  is  a  process 

40

designed  to  provide  reasonable  assurance  regarding  the  reliability  of  financial  reporting  and  the  preparation  of  financial 
statements for external purposes in accordance with accounting principles generally accepted in the United States of America. 
Under the supervision and with the participation of our management, including our principal executive officer and principal 
financial officer, we conducted an evaluation of the effectiveness of our internal control over financial reporting based on the 
framework  in  Internal  Control  —  Integrated  Framework  issued  by  the  Committee  of  Sponsoring  Organizations  of  the 
Treadway Commission (2013 framework). Based on our evaluation, our management concluded that our internal control over 
financial reporting was effective as of December 30, 2023.

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. 
Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may be circumvented or 
deteriorate.

Attestation Report of the Registered Public Accounting Firm

Our consolidated financial statements as of and for the year ended December 30, 2023 have been audited by Ernst & 
Young  LLP,  our  independent  registered  public  accounting  firm,  in  accordance  with  the  standards  of  the  Public  Company 
Accounting Oversight Board (United States). Ernst & Young LLP has also audited our internal control over financial reporting 
as of December 30, 2023, as stated in its attestation report included elsewhere in this Form 10-K.

Changes in Internal Control over Financial Reporting

There  have  been  no  changes  in  our  internal  control  over  financial  reporting  (as  defined  in  Rule  13a-15(f)  under  the 
Exchange Act) that occurred during our fiscal quarter ended December 30, 2023 that have materially affected, or are reasonably 
likely to materially affect, our internal control over financial reporting. 

Item 9B. Other Information.

Rule 10b5-1 Plan Elections

The  table  below  provides  the  details  of  all  trading  plans  adopted  or  terminated  by  a  director  or  officer  during  the 
Company’s last fiscal quarter. Each of the trading plans is intended to satisfy the affirmative defense conditions of Rule 10b5-
1(c) of the Exchange Act.

Officer's name

Title

Adoption date

Expiration date

Michael P. Plisinski ... Chief Executive Officer
Yoon Ah Oh .............. Vice President, General Counsel & 

12/13/2023
12/15/2023

9/30/2024
12/13/2024

Corporate Secretary

Aggregate number of 
securities to be sold

40,000
4,370

Item 9C. Disclosure Regarding Foreign Jurisdictions that Prevent Inspection.

Not applicable.

41

PART III

Certain information required by Part III is omitted from this Form 10-K because we expect to file a definitive proxy 
statement  within  one  hundred  twenty  (120)  days  after  the  end  of  our  fiscal  year  pursuant  to  Regulation  14A  (the  “Proxy 
Statement”) for our Annual Meeting of Stockholders currently scheduled for May 22, 2024, and the information included in 
the Proxy Statement is incorporated herein by reference, as specified below.

Item 10. Directors, Executive Officers and Corporate Governance.

The information required by this Item with respect to directors and executive officers is incorporated by reference to the 
information  under  the  headings  “Proposal  1:  Election  of  Directors,”  “Executive  Officer  Biographies”  and  “Corporate 
Governance  Principles  and  Practices”  in  the  Proxy  Statement.  Information  regarding  compliance  with  Section  16  of  the 
Exchange Act is incorporated by reference to the information under the heading “Delinquent Section 16(a) Reports” in the 
Proxy Statement, if any.

Code of Business Conduct and Ethics. We have adopted a code of business conduct and ethics that applies to our principal 
executive officer, principal financial officer and controller. This code of business conduct and ethics is posted on our internet 
website  address  at  http://investors.ontoinnovation.com.    We  will  post  on  our  website  any  amendment  to  or  waiver  from  a 
provision of our code of business conduct and ethics as may be required, and within the time period specified, by applicable 
SEC rules.

Item 11. Executive Compensation.

The information required by this Item is incorporated by reference to the information under the headings “Executive 
Officer Compensation,” “Compensation of Directors,” “Executive Officer Compensation Tables,” “Compensation Committee 
Report  on  Executive  Officer  Compensation,”  “Stock  Ownership/Retention  Guidelines  for  Directors”  and  “Compensation 
Committee Interlocks and Insider Participation” in the Proxy Statement.

Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters.

The  information  required  by  this  Item  is  incorporated  by  reference  to  the  information  under  the  headings  “Security 

Ownership of Certain Beneficial Owners” and “Equity Compensation Plan Information” in the Proxy Statement.

Item 13. Certain Relationships and Related Transactions, and Director Independence.

The information required by this Item is incorporated by reference to the information under the headings “Related Persons 

Transaction Policy” and “Board Independence” in the Proxy Statement.

Item 14. Principal Accountant Fees and Services.

The information required by this Item is incorporated by reference to the information under the heading “Proposal 3: 

Ratification of Appointment of Independent Registered Public Accounting Firm” in the Proxy Statement.

42

PART IV

Item 15. Exhibits and Financial Statement Schedule.

(a)

The following documents are filed as part of this Form 10-K:

1.

Financial Statements

The consolidated financial statements and consolidated financial statement information required by
this Item are included on pages F-1 through F-9 of this report. The Reports of Independent Registered Public
Accounting Firm appear on pages F-2 through F-4 of this report.

2.

Financial Statement Schedule

See Index to financial statements on page F-1 of this report.

3.

Exhibits

Exhibits are as set forth in the “Exhibit Index”, provided below. Where so indicated, exhibits, which 

were previously filed, are incorporated by reference.

Exhibit No.

Exhibit Description

Form

File Number Date of First Filing

3.1

3.2

4.1
4.2
10.1*
10.2*

Amended and Restated Certificate of 
Incorporation of Onto Innovation Inc.
Amended and Restated Bylaws of Onto 
Innovation Inc.
Form of Common Stock Certificate
Description of Securities
Rudolph Technologies, Inc. 2018 Stock Plan
Form of Employee Restricted Stock Unit 
Purchase Agreement pursuant to the Rudolph 
Technologies, Inc. 2018 Stock Plan

10.3* Onto Innovation Inc. 2020 Stock Plan
10.4*

10.5*

10.6*+

10.7*+

10.8*

10.9*

Form of Employee Stock Option Agreement 
for usage under the Onto Innovation Inc. 2020 
Stock Plan
Form of Director Stock Option Agreement for 
usage under the Onto Innovation Inc. 2020 
Stock Plan
Form of Employee Restricted Stock Unit 
Agreement for usage under the Onto 
Innovation Inc. 2020 Stock Plan
Form of Director Restricted Stock Unit 
Purchase Agreement for usage under the Onto 
Innovation Inc. 2020 Stock Plan
Form of Employee Performance Stock Unit 
Purchase Agreement for usage under the Onto 
Innovation Inc. 2020 Stock Plan
Form of Employee Incentive Restricted Stock 
Unit Purchase Agreement for usage under the 
Onto Innovation Inc. 2020 Stock Plan

Exhibit 
No./Appendix 
Reference
3.2

8-K

8-K

10-K
10-K
8-K
10-Q

8-K
8-K

001-39110 October 28, 2019

001-39110 January 27, 2020

3.1

001-39110 February 25, 2020
001-39110 February 25, 2020
001-36226 May 16, 2018
001-36226 August 2, 2018

001-39110 May 14, 2020
001-39110 May 14, 2020

4.2
4.1
10.1
10.1

10.1
10.1

8-K

001-39110 May 14, 2020

10.1

-

-

-

-

-

-

-

-

10-Q

001-39110 August 5, 2021

10.1

10-Q

001-39110 November 4, 2021

10.1

43

Exhibit No.

Exhibit Description

Form

File Number Date of First Filing

Exhibit 
No./Appendix 
Reference
10.2

333-238492 May 19, 2020

001-39110

001-39110

September 13,
2021
September 15,
2023

10.1

10.1

10.10* Onto Innovation Inc. 2020 Employee Stock 

10.11*

Purchase Plan
Form of Onto Innovation Inc. Indemnification 
Agreement

10.12* Employment Agreement, dated as of 

S-8

8-K

8-K

September 15, 2023, by and between Onto 
Innovation Inc. and Michael P. Plisinski* 
incorporated by reference to Exhibit 10.1 to the 
Company’s Form 8-K filed with the SEC on 
September 15, 2023 (File No. 001-39110).

10.13* Offer Letter to Yoon Ah E. Oh, dated October 
4, 2021, by and between Yoon Ah E. Oh and 
Onto Innovation Inc.

10-Q

001-39110

May 3, 2022

10.1

10.14* Offer Letter to Mark Slicer, dated April 1, 

8-K

001-39110 May 17, 2022

10.1

10.15*

21.1+
23.1+

31.1+

31.2+

32.1+

32.2+

97+

2022, by and between Mark Slicer and Onto 
Innovation Inc.
Form of Executive Change in Control 
Agreement
Subsidiaries.
Consent of Ernst & Young LLP, Independent 
Registered Public Accounting Firm.
Rule 13a-14(a) Certification of Chief 
Executive Officer of the Registrant pursuant to 
Section 302 of the Sarbanes-Oxley Act of 
2002.
Rule 13a-14(a) Certification of Chief Financial 
Officer of the Registrant pursuant to Section 
302 of the Sarbanes-Oxley Act of 2002.
Certification of the Chief Executive Officer 
pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002.
Certification of the Chief Financial Officer 
pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002.
Onto Innovation Inc. Incentive Compensation 
Recovery Policy

10-K

001-39110 February 24, 2023

10.13

-
-

-

-

-

-

-

-
-

-

-

-

-

-

-
-

-

-

-

-

-

-
-

-

-

-

-

-

101.INS Inline XBRL Instance Document
101.SCH Inline XBRL Taxonomy Extension Schema Document
101.CAL Inline XBRL Taxonomy Extension Calculation Linkbase Document
101.DEF Inline XBRL Taxonomy Extension Definition Linkbase Document
101.LAB Inline XBRL Taxonomy Extension Label Linkbase Document
101.PRE Inline XBRL Taxonomy Extension Presentation Linkbase Document

104
*
+

Cover Page Interactive Data File (formatted in inline XBRL and contained in Exhibit 101)
Management contract, compensatory plan or arrangement.
Filed herewith

44

ONTO INNOVATION INC.

INDEX TO CONSOLIDATED FINANCIAL STATEMENTS AND
FINANCIAL STATEMENT SCHEDULE

Consolidated Financial Statements:

Reports of Independent Registered Public Accounting Firm (PCAOB ID Number 42) ............................................

Consolidated Statements of Operations for the years ended December 30, 2023, December 31, 2022 and 
    January 1, 2022  ......................................................................................................................................................

Consolidated Statements of Comprehensive Income for the years ended December 30, 2023, December 31, 2022 
and January 1, 2022.................................................................................................................................................

Consolidated Balance Sheets as of December 30, 2023 and December 31, 2022......................................................

Consolidated Statements of Cash Flows for the years ended December 30, 2023, December 31, 2022 and 
    January 1, 2022 .......................................................................................................................................................

Consolidated Statements of Stockholders’ Equity for the years ended December 30, 2023, December 31, 2022 

and January 1, 2022.................................................................................................................................................

Notes to the Consolidated Financial Statements.........................................................................................................
Consolidated Financial Statement Schedule: .........................................................................................................

Schedule of Valuation and Qualifying Accounts........................................................................................................

Page

F-2

F-5

F-6

F-7

F-8

F-9

F-10

F-30

F-1

Report of Independent Registered Public Accounting Firm

To the Stockholders and the Board of Directors of Onto Innovation Inc.

Opinion on the Financial Statements

We have audited the accompanying consolidated balance sheets of Onto Innovation Inc. (the Company) as of December 30, 
2023,and December 31, 2022, the related consolidated statements of operations, comprehensive income, stockholders’ equity 
and cash flows for each of the three years in the period ended December 30, 2023, and the related notes and financial statement 
schedule listed in the Index at Item 15(a) (collectively referred to as the “consolidated financial statements”). In our opinion, 
the consolidated financial statements present fairly, in all material respects, the financial position of the Company at December 
30, 2023 and December 31, 2022, and the results of its operations and its cash flows for each of the three years in the period 
ended December 30, 2023, in conformity with U.S. generally accepted accounting principles.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB), the Company’s internal control over financial reporting as of December 30, 2023, based on criteria established in 
Internal Control-Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission 
(2013 framework), and our report dated February 26, 2024, expressed an unqualified opinion thereon.

Basis for Opinion

These financial statements are the responsibility of the Company’s management. Our responsibility is to express an opinion 
on the Company’s financial statements based on our audits. We are a public accounting firm registered with the PCAOB and 
are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the 
applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.

We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform 
the audit to obtain reasonable assurance about whether the financial statements are free of material misstatement, whether due 
to  error  or  fraud.  Our  audits  included  performing  procedures  to  assess  the  risks  of  material  misstatement  of  the  financial 
statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included 
examining, on a test basis, evidence regarding the amounts and disclosures in the financial statements. Our audits also included 
evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall 
presentation of the financial statements. We believe that our audits provide a reasonable basis for our opinion.

Critical Audit Matter

The critical audit matter communicated below is a matter arising from the current period audit of the financial statements that 
was communicated or required to be communicated to the audit committee and that: (1) relates to accounts or disclosures that 
are material to the financial statements and (2) involved our especially challenging, subjective or complex judgments. The 
communication of the critical audit matter does not alter in any way our opinion on the consolidated financial statements, taken 
as a whole, and we are not, by communicating the critical audit matter below, providing a separate opinion on the critical audit 
matter or on the accounts or disclosure to which it relates.

Reserve for Excess and Obsolete Inventory

Description of
the Matter

As described in Notes 2 and 7 to the consolidated financial statements, the Company records inventory 
net  of  a  reserve  for  excess  and  obsolete  inventory  resulting  in  net  inventories  of  $328  million  as  of 
December 30, 2023. The valuation of certain of the Company’s inventory is subject to risks associated 
with supply and demand. As described in Note 2 to the consolidated financial statements, the Company 
maintains reserves for excess and obsolete inventory equal to the difference between the cost of inventory 
and its estimated net realizable value based upon assumptions about historical and future demand for the 
Company’s products and market conditions.

Auditing management’s estimate of the excess and obsolete inventory reserve was subjective and required 
significant judgment as the excess and obsolete inventory reserve is sensitive to changes in the Company’s 
operations  and  assumptions  used  to  estimate  the  reserve  including  management’s  assumptions  with 
regards to product life-cycles, product demand and market conditions, which includes historical usage, 

F-2

How We
Addressed the
Matter in Our
Audit

expected  future  usage,  on-hand  quantities  of  individual  materials,  and  anticipated  engineering  design 
changes or advancements.

We obtained an understanding, evaluated the design and tested the operating effectiveness of controls 
over the Company’s excess and obsolete inventory reserve process, including those over the validity and 
reasonableness of the data and assumptions used in estimating the excess and obsolete inventory reserve.

To  test  the  adequacy  of  the  Company’s  excess  and  obsolete  inventory  reserve,  we  performed  audit 
procedures  that  included,  among  others,  assessing  methodologies  and  assumptions  used,  testing  the 
completeness and accuracy of the underlying data used by management in its analysis including the usage 
of historical materials, considering potential product obsolescence, observing physical inventory on-hand 
and  inspecting  historical  gross  margins  to  assess  whether  any  items  are  being  sold  at  a  loss  or  lower 
margins that may need to be included in the reserve. We assessed the historical accuracy of management’s 
estimated excess and obsolete inventory reserve and performed sensitivity analyses to evaluate changes 
in the estimate that result from changes in the Company’s significant assumptions. 

/s/ Ernst & Young LLP 

We have served as the Company’s auditor since 2008.

Iselin, New Jersey
February 26, 2024

F-3

Report of Independent Registered Public Accounting Firm

To the Stockholders and the Board of Directors of Onto Innovation Inc.

Opinion on Internal Control Over Financial Reporting

We have audited Onto Innovation Inc.’s internal control over financial reporting as of December 30, 2023, based on criteria 
established in Internal Control—Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway 
Commission (2013 framework) (the COSO criteria). In our opinion, Onto Innovation Inc. (the Company) maintained, in all 
material respects, effective internal control over financial reporting as of December 30, 2023, based on the COSO criteria.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB),  the  consolidated  balance  sheets  of  the  Company  as  of  December  30,  2023  and  December  31,  2022,  the  related 
consolidated statements of operations, comprehensive income, stockholders’ equity and cash flows for each of the three years 
in the period ended December 30, 2023, and the related notes and financial statement schedule listed in the Index at Item 15(a) 
and our report dated February 26, 2024 expressed an unqualified opinion thereon.

Basis for Opinion

The  Company’s  management  is  responsible  for  maintaining  effective  internal  control  over  financial  reporting  and  for  its 
assessment of the effectiveness of internal control over financial reporting included in the accompanying Management’s Report 
on Internal Control Over Financial Reporting. Our responsibility is to express an opinion on the Company’s internal control 
over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be 
independent  with  respect  to  the  Company  in  accordance  with  the  U.S.  federal  securities  laws  and  the  applicable  rules  and 
regulations of the Securities and Exchange Commission and the PCAOB.

We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the 
audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all 
material respects.

Our audit included obtaining an understanding of internal control over financial reporting, assessing the risk that a material 
weakness exists, testing and evaluating the design and operating effectiveness of internal control based on the assessed risk, 
and performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a 
reasonable basis for our opinion.

Definition and Limitations of Internal Control Over Financial Reporting

A  company’s  internal  control  over  financial  reporting  is  a  process  designed  to  provide  reasonable  assurance  regarding  the 
reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally 
accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures 
that  (1)  pertain  to  the  maintenance  of  records  that,  in  reasonable  detail,  accurately  and  fairly  reflect  the  transactions  and 
dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit 
preparation  of  financial  statements  in  accordance  with  generally  accepted  accounting  principles,  and  that  receipts  and 
expenditures  of  the  company  are  being  made  only  in  accordance  with  authorizations  of  management  and  directors  of  the 
company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or 
disposition of the company’s assets that could have a material effect on the financial statements.

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, 
projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.

/s/ Ernst & Young LLP 

Iselin, New Jersey
February 26, 2024

F-4

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF OPERATIONS
(In thousands, except per share data)

Revenue..................................................................................................... $
Cost of revenue .........................................................................................
Gross profit ...........................................................................................

Operating expenses:

Research and development....................................................................
Sales and marketing ..............................................................................
General and administrative ...................................................................
Amortization .........................................................................................
Total operating expenses...................................................................
Operating income......................................................................................
Interest income, net ...................................................................................
Other expense, net.....................................................................................
Income before provision for income taxes............................................
Provision for income taxes........................................................................
Net income ................................................................................................ $
Earnings per share:

Basic...................................................................................................... $
Diluted................................................................................................... $

Weighted average number of shares outstanding:

Basic......................................................................................................
Diluted...................................................................................................

December 30, 
2023

815,868
395,614
420,254

104,442
61,765
83,147
54,822
304,176
116,078
20,356
(3,852)
132,582
11,423
121,159

2.47
2.46

48,971
49,318

Year Ended
December 31, 
2022
1,005,183
465,962
539,221

$

111,953
65,688
69,582
55,284
302,507
236,714
5,011
(141)
241,584
18,250
223,334

4.52
4.49

49,424
49,764

$

$
$

$

$

$
$

January 1, 
2022

788,899
359,813
429,086

96,118
57,235
67,960
51,366
272,679
156,407
1,163
(1,888)
155,682
13,333
142,349

2.89
2.86

49,242
49,728

The accompanying notes are an integral part of these consolidated financial statements.

F-5

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME
(In thousands) 

Net income ................................................................................................ $
Other comprehensive income (loss), net of tax:

Change in net unrealized gains (losses) on available-for-sale 
marketable securities.............................................................................
Change in currency translation adjustments .........................................
Total other comprehensive income (loss), net of tax ............................
Total comprehensive income .................................................................... $

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

121,159

$

223,334

$

142,349

3,660
(1,549)
2,111
123,270

$

(2,447)
(8,879)
(11,326)
212,008

$

(537)
(2,715)
(3,252)
139,097

The accompanying notes are an integral part of these consolidated financial statements.

F-6

ONTO INNOVATION INC.

CONSOLIDATED BALANCE SHEETS
(In thousands, except per share data)

Current Assets:

ASSETS

Cash and cash equivalents......................................................................................... $
Marketable securities ................................................................................................
Accounts receivable, less allowance of $2,659 at December 30, 2023 and 
    $1,572 at December 31, 2022 ...............................................................................
Inventories.................................................................................................................
Prepaid expenses and other current assets ................................................................
Total current assets................................................................................................
Property, plant and equipment, net ...............................................................................
Goodwill........................................................................................................................
Identifiable intangible assets, net ..................................................................................
Deferred income taxes...................................................................................................
Other assets ...................................................................................................................

Total assets ............................................................................................................ $

LIABILITIES AND STOCKHOLDERS’ EQUITY

Current liabilities:

Accounts payable ...................................................................................................... $
Accrued liabilities .....................................................................................................
Deferred revenue .......................................................................................................
Other current liabilities .............................................................................................
Total current liabilities ..........................................................................................
Deferred and other tax liabilities...................................................................................
Other non-current liabilities ..........................................................................................
Total liabilities ......................................................................................................

Commitments and contingencies (Note 8)
Stockholders’ equity:

December 30,
2023

December 31,
2022

233,508
464,303

$

175,872
371,912

226,556
327,773
31,127
1,283,267
103,611
315,811
167,375
18,836
20,812
1,909,712

49,869
42,062
24,763
31,032
147,726
—
25,451
173,177

$

$

241,395
324,282
21,411
1,134,872
91,980
315,811
222,197
4,778
25,225
1,794,863

54,526
48,836
30,163
27,033
160,558
7,366
30,513
198,437

Preferred stock, $0.001 par value, 3,000 shares authorized, no shares
   issued and outstanding ...........................................................................................
Common stock, $0.001 par value, 97,000 shares authorized, 49,086 and 
   48,684 issued and outstanding at December 30, 2023 and December 31, 2022, 
   respectively. ...........................................................................................................
Additional paid-in capital..........................................................................................
Accumulated other comprehensive loss....................................................................
Accumulated earnings ...............................................................................................
Total stockholders’ equity.....................................................................................
Total liabilities and stockholders’ equity .............................................................. $

—

—

49
1,262,029
(7,899)
482,356
1,736,535
1,909,712

$

49
1,243,631
(10,010)
362,756
1,596,426
1,794,863

The accompanying notes are an integral part of these consolidated financial statements.

F-7

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF CASH FLOWS
(In thousands)

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Cash flows from operating activities:

Net income ................................................................................................................ $

121,159

$

223,334

$

142,350

Adjustments to reconcile net income to net cash and cash equivalents provided
     by operating activities:

Depreciation ..............................................................................................................
Amortization of intangibles........................................................................................
Share-based compensation .........................................................................................
Write-off of acquired in-process research and development ........................................
Acquired inventory step-up amortization....................................................................
Provision for inventory valuation ...............................................................................
Deferred income taxes ...............................................................................................
Other, net...................................................................................................................
Change in operating assets and liabilities, net of effects of business acquired:

Accounts receivable ...............................................................................................
Income taxes..........................................................................................................
Inventories.............................................................................................................
Prepaid expenses and other assets...........................................................................
Accounts payable...................................................................................................
Accrued and other liabilities...................................................................................
Net cash and cash equivalents provided by operating activities ...........................

Cash flows from investing activities:

Purchases of marketable securities .............................................................................
Proceeds from maturities and sales of marketable securities........................................
Purchases of property, plant and equipment................................................................
Proceeds from sale of property, plant and equipment ..................................................
Acquisitions, net of cash acquired ..............................................................................
Net cash and cash equivalents used in investing activities...................................

Cash flows from financing activities:

Purchases of common stock .....................................................................................
Tax payments related to shares withheld for share-based compensation plans ...........
Payment of contingent consideration for acquired business.......................................
Issuance of shares through share-based compensation plans......................................
Net cash and cash equivalents (used in) provided by financing activities.............
Effect of exchange rate changes on cash and cash equivalents ........................................
Net increase in cash and cash equivalents .......................................................................
Cash and cash equivalents at beginning of year ..............................................................
Cash and cash equivalents at end of year ........................................................................ $

12,390
54,822
25,513
—
—
10,015
(22,429)
2,991

12,151
1,798
(16,462)
(14,013)
(4,681)
(11,281)
171,973

(480,458)
396,844
(22,573)
2,800
—
(103,387)

(3,197)
(10,762)
(801)
5,285
(9,475)
(1,476)
57,635
175,872
233,508

$

9,378
55,284
24,426
5,652
—
9,313
(33,601)
(563)

(65,140)
(5,006)
(93,905)
(4,954)
1,181
11,304
136,703

(371,287)
338,645
(18,405)
—
(4,644)
(55,691)

(65,257)
(8,874)
(2,287)
8,068
(68,350)
(6,391)
6,270
169,602
175,872

$

14,435
51,366
19,542
—
393
8,175
(12,618)
2,267

(27,829)
1,307
(57,175)
(768)
12,142
21,694
175,281

(361,022)
255,063
(12,039)
—
(23,795)
(141,793)

—
(7,403)
—
10,073
2,670
(3,276)
32,882
136,720
169,602

Supplemental disclosure of cash flow information:

Income taxes paid, net................................................................................................ $

34,104

$

58,687

$

23,766

The accompanying notes are an integral part of these consolidated financial statements.

F-8

ONTO INNOVATION INC.

CONSOLIDATED STATEMENTS OF STOCKHOLDERS’ EQUITY
For the years ended December 30, 2023, 
December 31, 2022 and January 1, 2022 
(In thousands)

Common Stock

Balance at December 26, 2020 .........
Issuance of shares through share-
   based compensation plans, net...
Net income....................................
Share-based compensation ...........
Share-based compensation plan 
    withholdings .............................
Currency translation .....................
Unrealized loss on investments ....
Balance at January 1, 2022 ...............
Issuance of shares through share-
   based compensation plans, net...
Repurchase of common stock.......
Net income....................................
Share-based compensation ...........
Share-based compensation plan 
    withholdings .............................
Currency translation .....................
Unrealized loss on investments ....
Balance at December 31, 2022 .........
Issuance of shares through share-
   based compensation plans, net...
Repurchase of common stock.......
Net income....................................
Share-based compensation ...........
Share-based compensation plan 
    withholdings .............................
Currency translation .....................
Unrealized gain on investments....
Balance at December 30, 2023 .........

Shares
48,758

650
—
—

(108)
—
—
49,300

509
(1,018)
—
—

(107)
—
—
48,684

573
(46)
—
—

(125)
—
—
49,086

$

$

Amount

49

—
—
—

—
—
—
49

1
(1)
—
—

—
—
—
49

—
—
—
—

—
—
—
49

Additional 
Paid-in
Capital
1,233,967

10,072
—
19,542

(7,402)
—
—
1,256,179

8,067
(36,167)
—
24,426

Accumulated
Other
Comprehensive
Income / (Loss)

Accumulated
Earnings

4,568

26,162

—
—
—

—
(2,715)
(537)
1,316

—
—
—
—

—
142,349
—

—
—
—
168,511

—
(29,089)
223,334
—

Total
1,264,746

10,072
142,349
19,542

(7,402)
(2,715)
(537)
1,426,055

8,068
(65,257)
223,334
24,426

(8,874)
—
—
$ 1,243,631

5,285
(1,638)
—
25,513

(10,762)
—
—
$ 1,262,029

$

$

—
(8,879)
(2,447)
(10,010) $

—
—
—
362,756

(8,874)
(8,879)
(2,447)
$ 1,596,426

—
—
—
—

—
(1,559)
121,159
—

5,285
(3,197)
121,159
25,513

—
(1,549)
3,660
(7,899) $

—
—
—
482,356

(10,762)
(1,549)
3,660
$ 1,736,535

 The accompanying notes are an integral part of these consolidated financial statements

F-9

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS
(In thousands, except per share data)

1.

Organization and Nature of Operations:

Onto  Innovation  Inc.  (“Onto  Innovation”  or  the  “Company”)  is  a  worldwide  leader  in  the  design,  development,
manufacture and support of process control tools that perform macro-defect inspection and metrology, lithography systems, 
and process control analytical software used by semiconductor and advanced packaging device manufacturers. The Company 
delivers comprehensive solutions throughout the semiconductor fabrication process with our families of proprietary products 
that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time 
to market of their devices. The Company provides  process and yield management solutions used in both wafer processing 
facilities, often referred to as “front-end” manufacturing, and in device packaging and test facilities, commonly referred to as 
“back-end”  manufacturing.  The  Company’s  advanced  process  control  software  portfolio  includes  powerful  solutions  for 
standalone tools, groups of tools, or factory-wide suites to enhance productivity and achieve significant cost savings. Onto 
Innovation’s systems are backed by worldwide customer service and applications support. The Company has branch sales and 
service  offices  or  subsidiaries  in  Korea,  Japan,  China,  Taiwan,  Singapore,  Malaysia,  Vietnam  and  in  several  countries  in 
Europe. The Company operates in a single reportable segment and is a provider of process characterization equipment and 
software for wafer fabs and advanced packaging facilities. 

2.

Summary of Significant Accounting Policies:

Consolidation. The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. 
All intercompany accounts and transactions have been eliminated.

Fiscal Year.  The fiscal year of 2023 began on January 1, 2023 and ended December 30, 2023.  The fiscal year of 2022 began 
on January 2, 2022 and ended December 31, 2022.  The fiscal year of 2021 began on December 27, 2020 and ended January 
1, 2022.  

Revenue Recognition. Revenue is recognized when control of the promised goods or services is transferred to the Company’s 
customers in an amount that reflects the consideration the Company expects to be entitled to receive in exchange for those 
goods or services. The Company accounts for a contract when it has approval and commitment from both parties, the rights of 
the  parties  and  payment  terms  are  identified,  the  contract  has  commercial  substance  and  collectability  of  consideration  is 
probable.

The  Company  accounts  for  shipping  and  handling  activities  as  the  fulfillment  of  a  promise  to  transfer  goods  to  the 
customer and therefore records these activities under the caption “Cost of revenue.” Sales tax and any other taxes collected 
concurrent with revenue producing activities are excluded from revenue. Incidental items that are immaterial in the context of 
the contract are recognized as expense.

Contracts with customers may include multiple performance obligations. For such arrangements, the Company allocates 
revenue  to  each  performance  obligation  based  on  its  relative  standalone  selling  price.  The  Company  generally  determines 
standalone selling prices based on the prices charged to customers or the expected cost-plus margin.

Systems and Software Revenue

Revenue from systems is recognized when the Company transfers control of the product to the customer. To indicate 
transfer of control, the Company must have a present right to payment, legal title must have passed to the customer and the 
customer must have the significant risks and rewards of ownership. The Company generally transfers control for system sales 
when the customer or the customer’s agent picks up the system at the Company’s facility. The Company provides an assurance 
warranty on its systems for a period of twelve to fourteen months against defects in material and workmanship. The Company 
provides for the estimated cost of product warranties at the time revenue is recognized.

Depending on the terms of the systems arrangement, the Company may also defer the recognition of a portion of the 
consideration expected to be received because the Company has to satisfy a future obligation (e.g., installation and extended 
warranties).  The  Company  uses  an  observable  price  to  determine  the  standalone  selling  price  for  separate  performance 
obligations or a cost-plus margin approach when one is not available.

F-10

 
ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Revenue from software licenses provides the customer with a right to use the software as it exists when made available 
to the customer. Revenue from software licenses, which is primarily sold with our systems, is recognized upfront at the point 
in time when the software is made available to the customer. Revenue from licensing support and maintenance is recognized 
as the support and maintenance are provided, which is over the contract period.

Parts Revenue

Revenue from parts is recognized when the Company transfers control of the product, which typically occurs when the 

Company ships the product from its facilities to the customer.

Services Revenue

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
the Company’s assurance warranty on its products, service labor, consulting and training. Revenue from service contracts is 
recognized ratably over the term of the service contract. Revenue from service labor and consulting is recognized as services 
are performed. Revenue from installation services is recognized at a point in time when installation is complete. 

Practical Expedients

The Company generally expenses sales commissions when incurred because the amortization period is one year or less. 

These costs are recorded within selling, general and administrative expenses.

The Company does not adjust the amount of consideration for the effects of a significant financing components, if any, 

as the payment terms are one year or less.

The Company does not disclose the value of remaining performance obligations for contracts with an original expected 
length of one year or less and contracts for which the Company recognizes revenue in the amount to which it has the right to 
invoice.

For additional information on the Company’s revenue recognition, see Note 9 of Notes to the Consolidated Financial 

Statements.

Business  Combinations.    The  Company  accounts  for  business  combinations  under  the  acquisition  method  of  accounting, 
which requires us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date 
fair  values.  While  the  Company  uses  its  best  estimates  and  assumptions  to  accurately  value  assets  acquired  and  liabilities 
assumed at the acquisition date as well as contingent consideration, where applicable, the Company’s estimates are inherently 
uncertain  and  subject  to  refinement.  As  a  result,  during  the  measurement  period,  which  may  be  up  to  one  year  from  the 
acquisition date, the Company records adjustments to the assets acquired and liabilities assumed with the corresponding offset 
to goodwill. Upon the conclusion of the measurement period or final determination of the values of assets acquired or liabilities 
assumed,  whichever  comes  first,  any  subsequent  adjustments  are  recognized  in  its  consolidated  statements  of  operations. 
Accounting for business combinations requires the Company’s management to make significant estimates and assumptions, 
especially at the acquisition date including its estimates for intangible assets, contractual obligations assumed, restructuring 
liabilities, pre-acquisition contingencies, and contingent consideration, where applicable. Although the Company believes the 
assumptions and estimates it has made in the past have been reasonable and appropriate, they are based, in part, on historical 
experience and information obtained from the management of the acquired companies and are inherently uncertain. Estimates 
in valuing certain acquired intangible assets under the income approach include growth in future expected cash flows from 
product sales, acquired technologies, technology obsolescence rates, estimated cash flows from the projects when completed 
and  discount  rates.  Unanticipated  events  and  circumstances  may  occur  that  may  affect  the  accuracy  or  validity  of  such 
assumptions, estimates or actual results.

Use of Estimates.  The preparation of financial statements in conformity with accounting principles generally accepted in the 
United States of America requires management to make estimates and assumptions that affect the reported amounts of assets 
and  liabilities  and  disclosure  of  contingent  assets  and  liabilities  as  of  the  date  of  the  financial  statements  and  the  reported 
amounts of revenue and expenses during the reporting period. Significant estimates made by management include the allowance 
for credit losses, excess and obsolete inventory, fair value of assets acquired and liabilities assumed in a business combination, 
recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, 

F-11

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-
based payments and liabilities for tax uncertainties. Actual results could differ from those estimates.

These estimates and assumptions are based on historical experience and on various other factors which the Company 
believes to be reasonable under the circumstances. The Company may engage third-party valuation specialists to assist with 
estimates  related  to  the  valuation  of  financial  instruments,  assets  and  stock  awards  associated  with  various  contractual 
arrangements.  Such  estimates  often  require  the  selection  of  appropriate  valuation  methodologies  and  significant  judgment. 
Actual results could differ from these estimates under different assumptions or circumstances and such differences could be 
material.

Cash  and  Cash  Equivalents.  Cash  and  cash  equivalents  include  cash  and  highly  liquid  debt  instruments  with  original 
maturities of three months or less when purchased.

Marketable  Securities.  The  Company  determined  that  its  investment  securities  are  to  be  classified  as  available-for-sale. 
Available-for-sale debt securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity 
under the caption “Accumulated other comprehensive loss.” Realized gains and losses and, interest and dividends on available-
for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets 
regardless  of  their  maturity  date  if  they  are  available  for  use  in  current  operations.  The  Company  reviews  its  investment 
portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining 
whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost 
basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any 
anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses 
on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains 
and losses on marketable securities.

For additional information on the Company’s marketable securities, see Note 4 of Notes to the Consolidated Financial 

Statements.

Allowance for Credit Losses.  The Company maintains an allowance for credit losses that is estimated based on a combination 
of factors including write-off history, aging analysis, forecast of future economic conditions and any specific known troubled 
accounts.  The  Company  believes  the  allowance  is  adequate  to  cover  expected  losses  on  trade  receivables.    Provisions  for 
expected  credit  losses  are  classified  as  selling,  general  and  administrative  expense  in  the  Consolidated  Statements  of 
Operations. If the financial condition of the Company’s customers were to deteriorate, resulting in an impairment of their ability 
to make payments, additional allowances may be required.

Inventories.  Inventories are stated at the lower of cost or net realizable value.  Net realizable value is the estimated selling 
prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  Cost is generally 
determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. The Company reviews 
and sets standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to approximate 
actual costs. 

The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves 
when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions 
about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated 
for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been 
established, it is maintained until the item to which it relates is scrapped or sold. The Company regularly evaluates its ability 
to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted 
sales, product end-of-life dates, estimated current and future market values and new product introductions. When recorded, 
reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual demand for 
the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, additional 
reserves may be required.  

Property,  Plant  and  Equipment.  Property,  plant  and  equipment  are  stated  at  cost.  Depreciation  of  property,  plant  and 
equipment is computed using the straight-line method over the estimated useful lives of the assets, which are five to twenty-
two years for buildings, three to ten years for machinery and equipment, three to ten years for furniture and fixtures, three years 
for computer equipment, and three to seven years for software. Leasehold improvements are amortized using the straight-line 

F-12

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are 
expensed as incurred and major renewals and betterments are capitalized.

Long-Lived Assets and Finite-Lived Acquired Intangible Assets.  Long-lived assets, such as property, plant, and equipment, 
and identifiable acquired intangible assets with finite useful lives, are reviewed for impairment whenever events or changes in 
circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and 
used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to 
be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is 
recognized in the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based 
on discounted cash flows.  

Goodwill and Indefinite Lived Intangible Assets.  Goodwill and indefinite lived intangible assets are tested for impairment 
on  an  annual  basis  or  when  an  event  or  changes  in  circumstances  indicate  that  its  carrying  value  may  not  be  recoverable. 
Goodwill impairment is tested at the reporting unit level, which is defined as an operating segment or one level below the 
operating segment.  The Company has three reporting units and one operating segment. No goodwill impairment occurred in 
fiscal years 2023, 2022, or 2021. Goodwill is reviewed for impairment using either a qualitative assessment or a quantitative 
goodwill impairment test. If the Company chooses to perform a qualitative assessment and determine the fair value more likely 
than not exceeds the carrying value, no further evaluation is necessary. When the Company performs the quantitative goodwill 
impairment test, it compares fair value to carrying value, which includes goodwill. If fair value exceeds carrying value, the 
goodwill is not considered impaired. If the carrying value is higher than the fair value, the difference would be recognized as 
an impairment loss.

Intangible  assets  with  indefinite  lives,  including  in-process  research  and  development  (“IPR&D”),  are  tested  for 
impairment if impairment indicators arise and, at a minimum, annually. However, the Company is permitted to first assess 
qualitative  factors  to  determine  if  a  quantitative  impairment  test  is  necessary.  Further  testing  is  only  required  if  the  entity 
determines, based on the qualitative assessment, that it is more likely than not that an indefinite-lived intangible asset’s fair 
value is less than its carrying amount. Otherwise, no further impairment testing is required. The indefinite-lived intangible asset 
impairment test consists of a one-step analysis that compares the fair value of the intangible asset with its carrying amount. If 
the carrying amount of an intangible asset exceeds its fair value, an impairment loss is recognized in an amount equal to that 
excess.  We  consider  many  factors  in  evaluating  whether  the  value  of  intangible  assets  with  indefinite  lives  may  not  be 
recoverable,  including,  but  not  limited  to  estimates  of  future  cash  flows,  the  discount  rate,  terminal  growth  rates,  general 
economic conditions, our outlook and market performance of our industry and recent and forecasted financial performance.

For  additional  information  on  the  Company’s  goodwill  and  purchased  intangible  assets,  see  Note  5  of  Notes  to  the 

Consolidated Financial Statements.

Concentration of Credit Risk. Financial instruments, which potentially subject the Company to concentrations of credit risk, 
consist primarily of accounts receivable, cash and cash equivalents and marketable securities. 

The  Company  maintains  cash  and  cash  equivalents  and  marketable  securities  with  higher  credit  quality  issuers  and 
monitors the amount of credit exposure to any one issuer. The Company’s investment policy provides guidelines and limits 
regarding  credit  quality,  investment  concentration,  investment  type,  and  maturity  that  the  Company  believes  will  provide 
liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial 
paper, corporate debt securities, asset-backed securities, U.S. Treasury, U.S. Government, and U.S. Agency debt.

The Company’s accounts receivable result primarily from the sale of semiconductor equipment, related accessories and 
replacement  parts.  The  Company’s  customer  base  is  highly  concentrated  and  historically,  a  relatively  small  number  of 
customers have accounted for a significant portion of its revenues. Write-offs of uncollectible accounts have historically not 
been material. The Company actively monitors its customers’ financial strength to reduce the risk of loss.

Warranties. The Company generally provides a warranty on its products for a period of twelve to fourteen months against 
defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue 
is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure 
rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, 
material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations 
would  be  required.  The  warranty  accrual  represents  the  best  estimate  of  the  amount  necessary  to  settle  future  and  existing 

F-13

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty 
reserve and adjusts the amounts in accordance with changes in these factors.

Income Taxes. The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires 
the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized 
in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax 
asset to that portion which more likely than not will be realized.

For  additional  information  on  the  Company’s  income  taxes,  see  Note  12  of  Notes  to  the  Consolidated  Financial 

Statements.

Translation of Foreign Currencies.  The Company’s international branches and subsidiaries primarily generate and expend 
cash in their local functional currency. Accordingly, all balance sheet accounts of these local functional currency branches and 
subsidiaries  are  translated  into  U.S.  dollars  at  the  fiscal  period-end  exchange  rate,  and  income  and  expense  accounts  are 
translated into U.S. dollars using average rates in effect for the period. The resulting translation adjustments are recorded as 
cumulative translation adjustments and are recorded directly as a separate component of stockholders’ equity under the caption, 
“Accumulated other comprehensive loss.” The Company had accumulated exchange losses resulting from the translation of 
foreign operation financial statements of $8,664 and $7,115 as of December 30, 2023 and December 31, 2022, respectively.

Share-based Compensation. The Company measures the cost of employee services received in exchange for the award of 
equity instruments based on the fair value of the award at the date of grant. Compensation expense is recognized using the 
straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments 
recorded for forfeitures as they occur. 

For additional information on the Company’s share-based compensation plans, see Note 10 of Notes to the Consolidated 

Financial Statements.

Research and Development Costs.  Expenditures for research and development are expensed as incurred.

Derivative Instruments and Hedging Activities. The Company’s policy is to mitigate the effect of exchange rate fluctuations 
on certain foreign currency denominated business exposures. The Company has a policy that allows for the use of derivative 
financial instruments to hedge foreign currency exchange rate fluctuations on forecasted revenue and net monetary assets or 
liabilities denominated in various foreign currencies. The Company carries derivative financial instruments (derivatives) on the 
balance  sheet  at  their  fair  values,  in  either  prepaid  expenses  and  other  current  assets  or  other  current  liabilities  in  the 
Consolidated Balance Sheets. The Company does not use derivatives for trading or speculative purposes. The Company does 
not believe that it is exposed to more than a nominal amount of credit risk in its foreign currency hedges, as counterparties are 
large, global and well-capitalized financial institutions. The Company’s exposures are in liquid currencies (Japanese yen, euros, 
Korean  won,  Taiwanese  dollars,  Chinese  renminbi,  Singapore  dollars  and  Israeli  shekel),  so  there  is  minimal  risk  that 
appropriate derivatives to maintain the Company’s hedging program would not be available in the future.

To hedge foreign currency risks, the Company uses foreign currency exchange forward contracts, where possible and 
prudent. These hedge contracts are valued using standard valuation formulas with assumptions about future foreign currency 
exchange rates derived from existing exchange rates, interest rates, and other market factors.

F-14

 
ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 30, 2023 and December 

31, 2022 were as follows:

December 30,
2023

December 31,
2022

Notional amount........................................................................................................... $
Fair value of liability....................................................................................................

51,551
1,370

$

27,923
135

During the year ended December 30, 2023, the Company recognized a gain of $263 on maturities of forward contracts.  
During the years ended December 31, 2022 and January 1, 2022, the Company recognized losses of $3,487 and $1,650 on 
maturities of forward contracts, respectively.  The aggregate notional amounts of matured contracts were $319,370, $365,985 
and $420,460 for 2023, 2022 and 2021, respectively.

Contingencies and Litigation.  The Company is subject to the possibility of losses from various contingencies, including 
certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the 
likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss 
contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are 
probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate 
of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the 
costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See 
Note 8 of the Notes to the Consolidated Financial Statements, “Commitments and Contingencies” for a detailed description.

Recent Accounting Pronouncements.

Recently Adopted or Effective

The Company has not adopted any new accounting standards during the 2023 fiscal year that have a material impact on 

the Company’s Condensed Consolidated Financial Statements.

Updates Not Yet Effective

In November 2023, the Financial Accounting Standards Board (“FASB”) issued Accounting Standards Update (“ASU”) 
2023-07, “Segment Reporting (Topic 280): Improvements to Reportable Segment Disclosures,” which expands disclosures 
about a public entity’s reportable segments and requires more enhanced information about a reportable segment’s expenses, 
interim segment profit or loss, and how a public entity’s chief operating decision maker uses reported segment profit or loss 
information  in  assessing  segment  performance  and  allocating  resources.  The  guidance  is  effective  for  financial  statements 
issued for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 
15, 2024, with early adoption permitted. The Company is required to adopt this standard in the fiscal year 2024 for the annual 
reporting period ending December 28, 2024, with retrospective disclosure of prior periods presented. The Company is currently 
in the process of evaluating the impact of adoption on its Consolidated Financial Statements.

In  December  2023,  the  FASB  issued  ASU  2023-09,  “Income  Taxes  (Topic  740):  Improvements  to  Income  Tax 
Disclosures,” which requires public entities to disclose consistent categories and greater disaggregation of information in the 
rate reconciliation and for income taxes paid. It also includes certain other amendments to improve the effectiveness of income 
tax disclosures. The guidance is effective for financial statements issued for annual periods beginning after December 15, 2024, 
with early adoption permitted. The Company is required to adopt this standard prospectively in fiscal year 2025 for the annual 
reporting period ending December 27, 2025. The Company is currently in the process of evaluating the impact of adoption on 
its Consolidated Financial Statements.

3.

Fair Value Measurements:

Fair Value of Financial Instruments

The Company has evaluated the estimated fair value of financial instruments using available market information and 
valuations as provided by third-party sources. The use of different market assumptions and/or estimation methodologies could 
have  a  significant  effect  on  the  estimated  fair  value  amounts.    The  carrying  value  of  cash  and  cash  equivalents,  accounts 
receivable,  accounts  payable  and  accrued  liabilities  approximates  fair  value  because  of  the  short-term  maturity  of  these 
instruments.

F-15

 
ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Fair Value Hierarchy

The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs 
into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 
2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, 
either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs 
are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial 
asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input 
that is significant to the fair value measurement.

The following table provides the assets and liabilities carried at fair value measured on a recurring basis at December 30, 

2023 and December 31, 2022: 

Assets:

Available-for-sale debt securities:

Government notes and bonds ............................................
Asset-backed securities......................................................
Certificates of deposit ........................................................
Commercial paper..............................................................
Corporate bonds.................................................................
Total assets ....................................................................

Liabilities:

Foreign currency forward contracts.......................................
Total liabilities ...............................................................

$

$

$

Fair Value Measurements Using
Significant Other Observable
Inputs (Level 2)

December 30,
2023

December 31,
2022

195,800
—
67,467
99,635
101,401
464,303

1,370
1,370

$

$

$
$

178,868
1,534
52,095
80,079
59,335
371,912

135
135

Available-for-sale  debt  securities  classified  as  Level  2  are  valued  using  observable  inputs  to  quoted  market  prices, 
benchmark  yields,  reported  trades,  broker/dealer  quotes  or  alternative  pricing  sources  with  reasonable  levels  of  price 
transparency.  The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward 
rates quoted by the banks or foreign currency dealers.  Investment prices are obtained from third party pricing providers, which 
model prices utilizing the above observable inputs, for each asset class.

 See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities.

4. Marketable Securities:

At December 30, 2023 and December 31, 2022, marketable securities are categorized as follows:

Amortized
Cost

Gross
Unrealized
Holding Gains

Gross
Unrealized
Holding Losses

Fair
Value

December 30, 2023
Government notes and bonds................................................... $
Certificates of deposit ..............................................................
Commercial paper....................................................................
Corporate bonds.......................................................................

Total marketable securities .................................................. $

December 31, 2022
Government notes and bonds................................................... $
Asset-backed securities............................................................
Certificates of deposit ..............................................................
Commercial paper....................................................................
Corporate bonds.......................................................................

Total marketable securities .................................................. $

195,733
67,377
99,591
101,146
463,847

181,196
1,555
52,190
80,199
60,334
375,474

$

$

$

$

393
93
54
391
931

27
—
24
16
4
71

$

$

$

$

326
3
10
136
475

2,355
21
118
136
1,003
3,633

$

$

$

$

195,800
67,467
99,635
101,401
464,303

178,868
1,534
52,095
80,079
59,335
371,912

F-16

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, 

regardless of the Consolidated Balance Sheet classification, is as follows at December 30, 2023 and December 31, 2022: 

Due within one year.................................................................... $
Due after one through five years ................................................
Due after five through ten years .................................................
Due after ten years ......................................................................

Total marketable securities ..................................................... $

December 30, 2023

December 31, 2022

Amortized 
Cost
331,136
132,711
—
—
463,847

Fair
 Value
330,937
133,366
—
—
464,303

$

$

Amortized 
Cost
311,934
63,540
—
—
375,474

$

$

Fair
 Value
309,385
62,527
—
—
371,912

$

$

The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, 
aggregated by investment instrument and period of time in an unrealized loss position, at December 30, 2023 and December 
31, 2022. 

In Unrealized Loss Position 
For Less Than 12 Months
Gross
 Unrealized 
Losses

Fair
 Value

In Unrealized Loss Position 
For Greater Than 12 Months

Fair
 Value

Gross
 Unrealized 
Losses

December 30, 2023
Government notes and bonds..................................................... $
Certificates of deposit ................................................................
Commercial paper......................................................................
Corporate bonds .........................................................................

Total marketable securities .................................................... $

December 31, 2022
Government notes and bonds..................................................... $
Asset-backed securities..............................................................
Certificates of deposit ................................................................
Commercial paper......................................................................
Corporate bonds .........................................................................

Total marketable securities .................................................... $

82,776
11,839
20,121
20,268
135,004

96,301
1,555
22,400
50,550
28,975
199,781

$

$

$

$

325
3
10
103
441

1,273
21
118
136
637
2,185

$

$

$

$

180
—
—
5,999
6,179

69,159
—
—
—
28,769
97,928

$

$

$

$

1
—
—
33
34

1,082
—
—
—
366
1,448

 See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.

5.

Goodwill and Purchased Intangible Assets:

Goodwill and purchased intangible assets with indefinite useful lives are not amortized but are reviewed for impairment
annually during the fourth quarter of each fiscal year and whenever events or changes in circumstances indicate that the carrying 
value of an asset may not be recoverable. The process of evaluating the potential impairment of goodwill and intangible assets 
requires  significant  judgment.  The  Company  regularly  monitors  current  business  conditions  and  considers  other  factors 
including, but not limited to, adverse industry or economic trends, restructuring actions and lower projections of profitability 
that may impact future operating results. The Company performed its annual assessment in the fourth quarter of fiscal 2023 
and concluded that no impairment charge was required.

Goodwill

There were no changes to the carrying amount of goodwill for the years ended December 30, 2023 and December 31, 

2022.

F-17

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Purchased Intangible Assets

Purchased intangible assets as of December 30, 2023 and December 31, 2022 are as follows:

Gross Carrying 
Amount

Accumulated 
Amortization

Net

December 30, 2023
Finite-lived intangible assets:
Developed technology .......................................................................... $
Customer and distributor relationships .................................................
Trademarks and trade names ................................................................

Total identifiable intangible assets ................................................... $

December 31, 2022
Finite-lived intangible assets:
Developed technology .......................................................................... $
Customer and distributor relationships .................................................
Trademarks and trade names ................................................................

Total identifiable intangible assets ................................................... $

378,197
73,321
14,171
465,689

378,197
73,321
14,171
465,689

$

$

$

$

254,350
34,782
9,182
298,314

205,386
30,195
7,911
243,492

$

$

$

$

123,847
38,539
4,989
167,375

172,811
43,126
6,260
222,197

Intangible  asset  amortization  expense  amounted  to  $54,822,  $55,284  and  $51,366  for  the  years  ended  December  30, 
2023, December 31, 2022 and January 1, 2022, respectively. Assuming no change in the gross carrying value of identifiable 
intangible assets and estimated lives, estimated amortization expenses are $49,137 for 2024, $32,587 for 2025, $31,394 for 
2026, $23,173 for 2027 and $12,288 for 2028.

6.

Leasing Arrangements:

The  Company  determines  if  an  arrangement  is  a  lease  at  its  inception.  Operating  lease  arrangements  are  comprised
primarily  of  real  estate  and  equipment  agreements  for  which  the  right-of-use  assets  are  included  in  “Other  assets”  and  the 
corresponding lease liabilities, depending on their maturity, are included in “Other current liabilities” or “Other non-current 
liabilities” in the Consolidated Balance Sheets.

Right-of-use assets represent the right to use an underlying asset for the lease term and lease liabilities represent the 
obligation to make lease payments arising from the lease. Right-of-use assets and lease liabilities are recognized at the lease 
commencement  date  based  on  the  estimated  present  value  of  lease  payments  over  the  lease  term.  The  lease  term  includes 
options to extend the lease when it is reasonably certain that the option will be exercised. Lease agreements frequently require 
the Company to pay real estate taxes, insurance and maintenance costs.  Leases with a term of one year or less are not recorded 
on the Consolidated Balance Sheets and lease expense for these leases is recognized on a straight-line basis over the lease term.

The  Company  uses  its  estimated  incremental  borrowing  rate  in  determining  the  present  value  of  lease  payments 
considering  the  term  of  the  lease,  which  is  derived  from  information  available  at  the  lease  commencement  date,  giving 
consideration to publicly available data for instruments with similar characteristics. The Company accounts for the lease and 
non-lease components as a single lease component.

Lease costs for operating leases were $6,527 and $6,368 for the years ended December 30, 2023 and December 31, 2022, 
respectively. Operating lease costs are generally recognized over the lease term.  The Company elected the practical expedient 
to not provide comparable presentation for periods prior to adoption. 

Details of the Company’s operating leases are as follows:

Cash Flow Information
Cash paid for operating lease liabilities ...................................................................... $
Right-of-use assets obtained in exchange for operating lease liabilities..................... $

Year Ended

December 30,
2023

December 31,
2022

6,527
3,678

$
$

6,368
9,295

F-18

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Operating Lease Information
Weighted average remaining lease term .....................................................................
Weighted average discount rate ..................................................................................

December 30,
2023

December 31,
2022

4.2
4.7%

4.5
3.8%

As  of  December  30,  2023,  there  was  an  insignificant  amount  of  commitments  for  operating  leases  that  have  not  yet 
commenced.    The  reconciliation  of  the  maturities  of  operating  leases  to  the  lease  liabilities  recorded  on  the  Consolidated 
Balance Sheet as of December 30, 2023 is as follows:

Fiscal Year
2024..............................................................................................................................................................  $
2025.............................................................................................................................................................. 
2026.............................................................................................................................................................. 
2027.............................................................................................................................................................. 
2028..............................................................................................................................................................
Thereafter ..................................................................................................................................................... 
   Total undiscounted operating lease payments .......................................................................................... 
Less: imputed interest .................................................................................................................................. 
   Present value of operating lease liabilities ................................................................................................  $

5,929
5,572
3,857
2,745
2,447
1,123
21,673
2,152
19,521

7.

Balance Sheet Components:

Inventories

Inventories are comprised of the following:

December 30,
2023

December 31,
2022

Materials ...................................................................................................................... $
Work-in-process ..........................................................................................................
Finished goods.............................................................................................................

Total inventories ...................................................................................................... $

234,471
67,816
25,486
327,773

Property, Plant and Equipment

Property, plant and equipment, net, is comprised of the following:

Land and building........................................................................................................ $
Machinery and equipment ...........................................................................................
Furniture and fixtures ..................................................................................................
Computer equipment and software..............................................................................
Leasehold improvements.............................................................................................

Accumulated depreciation ...........................................................................................

Total property, plant and equipment, net................................................................. $

December 30,
2023

47,889
69,828
3,921
17,790
22,089
161,517
(57,906)
103,611

$

$

$

$

231,029
69,072
24,181
324,282

December 31,
2022

50,344
56,924
2,949
15,415
18,539
144,171
(52,191)
91,980

F-19

 
ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Other assets

Other assets is comprised of the following:

December 30,
2023

December 31,
2022

Operating lease right-of-use assets .............................................................................. $
Other ............................................................................................................................

Total other assets ..................................................................................................... $

18,360
2,452
20,812

Accrued liabilities

Accrued liabilities is comprised of the following:

Payroll and related expenses ....................................................................................... $
Warranty ......................................................................................................................
Other ............................................................................................................................

Total accrued liabilities ........................................................................................... $

33,052
8,934
76
42,062

December 30,
2023

Other current liabilities

Other current liabilities is comprised of the following: 

Customer deposits ....................................................................................................... $
Current operating lease obligations .............................................................................
Income tax payable......................................................................................................
Accrued professional fees............................................................................................
Other accrued taxes .....................................................................................................
Other ............................................................................................................................

Total other current liabilities ................................................................................... $

Other non-current liabilities

Other non-current liabilities is comprised of the following:

Non-current operating lease obligations...................................................................... $
Unrecognized tax benefits (including interest)............................................................
Deferred revenue .........................................................................................................
Other ............................................................................................................................

Total non-current liabilities ..................................................................................... $

December 30,
2023

9,972
5,494
3,210
1,751
3,570
7,035
31,032

December 30,
2023

14,027
7,358
2,462
1,604
25,451

$

$

$

$

$

$

$

$

20,746
4,479
25,225

December 31,
2022

36,529
10,890
1,417
48,836

December 31,
2022

12,482
5,678
1,910
968
2,081
3,914
27,033

December 31,
2022

16,345
7,693
2,852
3,623
30,513

8.

Commitments and Contingencies:

Factoring

The Company maintains arrangements under which eligible accounts receivable in Japan are sold without recourse to 
unrelated third-party financial institutions. The Company sold $29,539 of receivables during the year ended December 30, 
2023. There were no material gains or losses on the sale of such receivables. There were no amounts due from such third-party 
financial institutions at December 30, 2023.

F-20

 
ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Intellectual property Indemnification Obligations

The  Company  has  entered  into  agreements  with  customers  that  include  limited  intellectual  property  indemnification 
obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party 
for certain damages and costs incurred as a result of third-party intellectual property claims arising from these transactions. The 
nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the 
maximum  potential  amount  it  could  be  required  to  pay  to  its  customers.  Historically,  the  Company  has  not  made  any 
indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial 
statements with respect to these indemnification guarantees.

Warranty Reserves

The Company generally provides a warranty on its products for a period of 12 to 14 months against defects in material 
and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in 
the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. 
The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. 
Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 14 months prior to the year-
end and warranty accruals are related to sales during the same year.

Changes in the Company’s warranty reserves are as follows: 

Year Ended

December 30, 
2023

December 31, 
2022

Balance, beginning of the period ................................................................ $
Accruals ..................................................................................................
Usage.......................................................................................................
Balance, end of the period .......................................................................... $

11,830
9,505
(11,955)
9,380

$

$

9,682
16,040
(13,893)
11,830

Legal Matters

From  time  to  time,  the  Company  is  subject  to  legal  proceedings  and  claims  in  the  ordinary  course  of  business.  The 
following reflects an overview of the material developments with regard to the Company’s pending material legal proceedings. 

Optical Solutions Inc. v. Nanometrics Incorporated (Case No. 18-cv-00417-BLF): On August 2, 2017, Nanometrics was 
named as defendant in a complaint filed in New Hampshire Superior Court (the “Complaint”). The Complaint, brought by 
Optical  Solutions,  Inc.  (“OSI”),  alleged  claims  arising  from  a  purported  exclusive  purchase  contract  between  OSI  and 
Nanometrics pertaining to certain products. The relief sought was the award of damages in an amount to be proven at trial, 
attorney’s fees and costs as well as other relief the court deems just and proper. On September 18, 2017, Nanometrics removed 
the  action  to  the  United  States  District  Court  for  the  District  of  New  Hampshire  (the  “District  of  New  Hampshire”).  On 
September 25, 2017, Nanometrics moved to transfer the Complaint to the United States District Court for the Northern District 
of California (the “Northern District of California”). On December 20, 2017, Nanometrics filed its complaint against OSI in 
the California Superior Court for the County of Santa Clara alleging claims arising from OSI’s breach of certain purchase 
orders. The relief sought was the award of damages in an amount to be proven at trial including pre- and post-judgment interest, 
punitive damages, restitution for benefits unjustly received by OSI, attorney’s fees and costs as well as other relief the court 
deems just and proper.  Nanometrics’ complaint was later removed by OSI to the Northern District of California. On May 29, 
2018, the District of New Hampshire issued an order granting Nanometrics’ motion to transfer the Complaint to the Northern 
District of California and denying Nanometrics’ motion to dismiss the Complaint without prejudice. On June 14, 2018, the 
Complaint was consolidated with Nanometrics’ complaint against OSI. On August 9, 2018, OSI filed an Amended Complaint. 
On  September  19,  2018,  Nanometrics  filed  a  motion  to  dismiss  OSI’s  Amended  Complaint  for  failure  to  state  a  claim. 
Nanometrics’ motion to dismiss was heard on February 28, 2019. On March 5, 2019, the Northern District of California granted 
Nanometrics’ motion to dismiss with leave to amend. OSI filed a Second Amended Complaint on March 29, 2019. Nanometrics 
filed a motion to dismiss OSI’s Second Amended Complaint on May 31, 2019. In October 2019, Nanometrics was renamed 
Onto Innovation Inc. as a result of the Merger. Thereafter, the Company’s second motion to dismiss was heard on November 
14, 2019. On November 26, 2019, the Northern District of California granted the Company’s motion to dismiss with leave to 
amend. OSI filed a Third Amended Complaint on January 21, 2020. On March 2, 2020, the Company filed a motion to dismiss 
OSI’s Third Amended Complaint and a hearing on the motion was held on June 11, 2020. On June 23, 2020, the Northern 
District of California granted the Company’s motion to dismiss with prejudice with regard to two claims asserted by OSI and 
dismissed two other claims asserted by OSI with leave to amend. Thereafter, on July 7, 2020, OSI filed a Fourth Amended 
Complaint. On August 14, 2020, the Company filed a motion to dismiss with regard to one of the two remaining claims. On 

F-21

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

December 1, 2020, the Northern District of California denied this final motion to dismiss and as a result the Company filed its 
Answer in this matter on December 22, 2020. Discovery was closed and a trial date set for December 2023. Prior to trial, 
however, the parties resolved all outstanding claims between them in a confidential out-of-court settlement during fiscal 2023. 
The settlement did not have a material impact on the Company’s financial position, results of operations or cash flows.

Open and Committed Purchase Orders

As of December 30, 2023, the Company has open and committed purchase orders of $437,105, of which $426,087 is for 

less than one year.

Line of Credit

The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable 
securities the Company has with the bank.  The Company is permitted to borrow up to 70% of the value of eligible securities 
held at the time the line of credit is accessed.  The available line of credit as of December 30, 2023 was approximately $100,000 
with an available interest rate of 7.0%.  The credit agreement is available to the Company until such time that either party 
terminates the arrangement at their discretion.  The Company has not utilized the line of credit to date.

9.

Revenue

The following table represents a disaggregation of revenue by timing of revenue:

Point-in-time ..................................................................... $
Over-time..........................................................................

Total revenue ............................................................ $

761,797
54,071
815,868

$

$

958,409
46,773
1,005,183

$

$

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

749,276
39,623
788,899

See  Note  14  of  the  Notes  to  the  Consolidated  Financial  Statements  for  additional  discussion  of  the  Company’s 

disaggregated revenue in detail.

Contract Liabilities

The Company records contract liabilities when the customer has been billed in advance of the Company completing its 
performance obligations primarily related to service contracts and installation.  For contracts that have a duration of one year 
or less, these amounts are recorded as current deferred revenue in the Consolidated Balance Sheets.  As of December 30, 2023 
and December 31, 2022, the Company carried a long-term deferred revenue balance of $2,462 and $2,852, respectively, in 
“other non-current liabilities” on the Consolidated Balance Sheets.

Changes in deferred revenue were as follows:

Balance, beginning of the period.......................................................... $
Deferral of revenue...........................................................................
Revenue recognized..........................................................................
Balance, ending of the period ............................................................... $

33,014
75,602
(81,391)
27,225

$

$

31,672
81,772
(80,430)
33,014

Year Ended

December 30, 
2023

December 31, 
2022

F-22

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

10.

Share-Based Compensation and Employee Benefit Plans:

Share-Based Compensation Plans

The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive 
for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth 
of the Company. The Company settles restricted stock unit awards, employee stock purchase option exercises and stock option 
exercises with newly issued common shares.

Onto Innovation Inc. 2020 Stock Plan (the “2020 Plan”). The 2020 Plan provides for the grant of 3,744 stock options 
and other stock awards to employees, directors and consultants at an exercise price equal to the fair market value of the common 
stock on the date of grant. Options granted under the 2020 Plan typically grade vest over a three-year period and expire ten 
years from the date of grant. Restricted stock units granted under the 2020 Plan typically vest over a three-year period for 
employees and one year for directors; however, other vesting periods are allowable under the 2020 Plan. Restricted stock units 
(“RSUs”) granted to employees have time based or performance-based vesting.  As of December 30, 2023, there were 2,868 
shares of common stock available for issuance pursuant to future grants under the 2020 Plan. 

Onto Innovation Inc. 2020 Employee Stock Purchase Plan (the “2020 ESPP”).  Under the terms of the 2020 ESPP, 
eligible employees may have up to 10% of eligible compensation deducted from their pay and applied to the purchase of shares 
of Company common stock. The price the employee pays for each share of stock is 85% of the lesser of the fair market value 
of Company common stock at the beginning or the end of the applicable six-month purchase period. The 2020 ESPP is intended 
to qualify under Section 423 of the Internal Revenue Code and is a compensatory plan as defined by FASB ASC 718, “Stock 
Compensation.” Through the Company’s employee stock purchase plans, employees purchased 91, 142 and 242 shares during 
the twelve months ended December 30, 2023, December 31, 2022 and January 1, 2022, respectively.  As of December 30, 2023 
and  December  31,  2022,  there  were  1,025  and  1,116,  shares  available  for  issuance  under  the  Company’s  employee  stock 
purchase plan, respectively.

The following table reflects share-based compensation expense by type of award:

Share-based compensation expense:

Restricted stock units, including all performance and market 
    based awards .............................................................................. $
Stock options and employee stock purchase options .....................
Total share-based compensation ........................................................
Tax effect on share-based compensation .......................................
Net effect on net income .................................................................... $
Effect on earnings per share:

Basic............................................................................................... $
Diluted............................................................................................ $

Year Ended

December 30,
2023

December 31,
2022

January 1,
2022

22,573
2,940
25,513
5,497
20,016

$

$

21,729
2,697
24,426
5,237
19,189

$

$

17,174
2,368
19,542
4,255
15,287

(0.41) $
(0.41) $

(0.39) $
(0.39) $

(0.31)
(0.31)

F-23

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Restricted Stock Units

During fiscal years 2023, 2022 and 2021, the Company issued both service-based RSUs and market-based performance 
RSUs (“PRSUs”). Service-based RSUs typically vest over a period of 3 years or less. Market-based PRSUs generally vest three 
years from the grant date if certain performance criteria are achieved and require continued employment. Based upon the terms 
of such awards, the number of shares that can be earned over the performance periods is based on the Company’s Common 
Stock price performance compared to the market price performance of a designated benchmark index, ranging from 0% to 
200% of target. The designated benchmark index was the Philadelphia Semiconductor Sector Index for market-based PRSUs 
issued in 2023, 2022 and 2021.  The stock price performance or market price performance is measured using the closing price 
for the 20-trading days prior to the dates the performance period begins and ends. 

The following table summarizes the Company’s combined service-based RSUs and market-based PRSUs:

Nonvested at December 26, 2020 .......................................................................
Granted ...........................................................................................................
Vested .............................................................................................................
Forfeited..........................................................................................................
Nonvested at January 1, 2022 .............................................................................
Granted ...........................................................................................................
Vested .............................................................................................................
Forfeited..........................................................................................................
Nonvested at December 31, 2022 .......................................................................
Granted ...........................................................................................................
Vested .............................................................................................................
Forfeited..........................................................................................................
Nonvested at December 30, 2023 .......................................................................

Number of
Shares

Weighted
Average
Grant Date
Fair Value

$
964
$
338
(441) $
(96) $
$
765
$
410
(373) $
(59) $
743
$
$
319
(415) $
(63) $
$
584

31.37
69.82
30.90
42.40
48.25
82.48
42.87
58.98
69.01
89.23
59.20
84.11
85.41

Of the 584 shares outstanding at December 30, 2023, 494 are service-based RSUs and 90 are market-based PRSUs. The 
fair value of the Company’s service-based RSUs was calculated based on the fair market value of the Company’s stock at the 
date of grant. The fair value of the Company’s market-based PRSUs granted during fiscal years 2023, 2022, and 2021 was 
calculated using a Monte Carlo simulation model at the date of the grant, resulting in a weighted average grant-date fair value 
per share of $100.79, $85.49, and $80.04, respectively.

 As of December 30, 2023, there was $26,559 of total unrecognized compensation cost related to RSUs granted under 

the plans. That cost is expected to be recognized over a weighted average period of 1.4 years.

401(k) Savings Plan

The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation to 
the Plan on a pre-tax or after-tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue Service. 
The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary.  Matching contributions 
to the plan totaled $3,128, $2,965 and $2,544 for the years ended December 30, 2023, December 31, 2022 and January 1, 2022, 
respectively. 

11. Other Expense, Net:

Other expense, net is comprised of the following:

Foreign currency exchange losses, net ........................................$
Other ............................................................................................
Total other expense, net...........................................................$

(4,091) $
239
(3,852) $

(73) $
(68)
(141) $

(2,020)
132
(1,888)

December 30, 
2023

Year Ended

December 31, 
2022

January 1, 
2022

F-24

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

12.

Income Taxes:

The components of income tax expense are as follows:

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Current:

Federal................................................................................................... $
State.......................................................................................................
Foreign ..................................................................................................

Deferred:

Federal...................................................................................................
State.......................................................................................................
Foreign ..................................................................................................

Total income tax expense.................................................................. $

28,326
879
4,647
33,852

(22,429)
242
(242)
(22,429)
11,423

$

$

47,963
987
2,901
51,851

(31,622)
(1,506)
(473)
(33,601)
18,250

$

$

21,791
1,007
3,153
25,951

(9,475)
(540)
(2,603)
(12,618)
13,333

The income before tax is comprised of the following:

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Domestic operations.................................................................................. $
Foreign operations .................................................................................... $

107,640
24,942

$
$

239,527
2,057

$
$

136,143
19,539

The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal 
income tax rate of 21% for the years ended December 30, 2023, December 31, 2022 and January 1, 2022, to income before 
provision for income taxes as follows:

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Federal income tax provision at statutory rate .......................................... $
State taxes, net of federal effect ................................................................
Foreign taxes, net of federal effect............................................................
Foreign Derived Intangible Income (“FDII”) Deduction..........................
US tax on foreign source income..............................................................
Non-deductible officer's compensation.....................................................
Research and development tax credit........................................................
Tax impact of audit and statute closures...................................................
Change in valuation allowance .................................................................
Impact of the CARES Act.........................................................................
Other .........................................................................................................

Provision for income taxes.................................................................... $
Effective tax rate ...................................................................................

27,842
942
(2,323)
(12,958)
513
2,301
(6,430)
(1,563)
2,180
—
919
11,423

$

$

50,732
467
(481)
(25,445)
1,423
1,910
(7,146)
(1,526)
(276)
—
(1,408)
18,250

$

$

32,693
1,066
(3,817)
(11,061)
1,721
689
(3,607)
(1,987)
(178)
(732)
(1,454)
13,333

9 %

8 %

9 %

F-25

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

Deferred tax assets and liabilities are comprised of the following:

Deferred tax assets:
Reserves and accruals ................................................................................................ $
Deferred revenue .......................................................................................................
Share-based compensation.........................................................................................
Tax credit carryforward .............................................................................................
Net operating losses ...................................................................................................
Depreciation and amortization...................................................................................
Capitalized research and development ......................................................................
Operating lease liabilities ..........................................................................................
Other ..........................................................................................................................
Gross deferred tax assets ...........................................................................................
Less: valuation allowance..........................................................................................
Total deferred tax assets after valuation allowance ...................................................
Deferred tax liabilities:
Depreciation and amortization...................................................................................
Operating lease right of use assets.............................................................................
Other ..........................................................................................................................
Gross deferred tax liabilities ......................................................................................
Net deferred tax assets (liabilities) .............................................................................. $

December 30, 
2023

December 31, 
2022

16,658
4,082
3,495
13,960
1,088
156
34,165
3,744
2,875
80,223
(13,960)
66,263

(43,908)
(3,519)
—
(47,427)
18,836

$

$

17,231
3,512
3,942
12,197
1,643
125
20,234
4,162
4,044
67,090
(11,772)
55,318

(52,927)
(4,890)
(89)
(57,906)
(2,588)

At December 30, 2023 and December 31, 2022, the Company had recorded valuation allowances of $13,960 and $11,772, 
respectively, on a certain portion of the Company’s deferred tax assets to reflect the deferred tax assets at the net amount that 
is more likely than not to be realized.  The Company maintains a valuation allowance against its federal foreign tax credit 
carryforwards of $2,317 and state research and development credits of $11,644.

In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined 
that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against 
the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the 
periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of 
deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment.  In 
making the determination that it is more likely than not that the Company’s deferred tax assets will be realized as of December 
30, 2023, the Company relied primarily on the reversal of deferred tax liabilities as well as projected future taxable income.

At December 30, 2023, the Company had tax effected state and foreign net operating loss carryforwards of $860 and 
$228, respectively. The federal, state and foreign net operating loss carryforwards expire on various dates beginning in 2023 
through 2037.

At December 30, 2023, the Company had foreign tax credit carryforwards and state research & development credits of 
$2,317, and $16,213, respectively.  The foreign tax credit carryforwards are set to expire at various dates beginning December 
31, 2029.  The state research & development credits have no expiration dates.

As of December 30, 2023, the Company has not provided U.S. income taxes on all its foreign earnings.  The Company 

continues to permanently reinvest the cash held offshore to support its working capital needs.   

F-26

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

The total amount of unrecognized tax benefits are as follows: 

December 30,
2023

Year Ended
December 31,
2022

January 1,
2022

Balance, beginning of the period .............................................................. $
Gross increases—tax positions in prior period .....................................
Gross decreases—tax positions in prior period.....................................
Gross increases—current-period tax positions .....................................
Closure of audit/statute limitation.........................................................
Balance, end of the period......................................................................... $

13,010
29
(100)
1,785
(1,582)
13,142

$

$

12,373
456
—
1,729
(1,548)
13,010

$

$

13,486
156
(204)
1,193
(2,258)
12,373

The unrecognized tax benefits at December 30, 2023 and December 31, 2022 were $13,142 and $13,010, respectively, 
of which $7,231 and $7,614, respectively, would be reflected as an adjustment to income tax expense if recognized.  The year 
over year increase from 2022 to 2023 is primarily due to additional unrecognized tax benefits related to federal and state tax 
exposures, offset by expiring tax statutes.  It is reasonably possible that certain amounts of unrecognized tax benefits may 
reverse in the next 12 months; however, the Company does not expect such reversals to have a significant impact on its results 
of operations or financial position.

The  Company  recognizes  accrued  interest  and  penalties  related  to  unrecognized  tax  benefits  in  income  tax  expense. 
During the years ended December 30, 2023, December 31, 2022 and January 1, 2022, the Company recognized approximately 
$146, $149 and $(814), respectively, in interest and penalties (benefit) expense associated with uncertain tax positions. As of 
December 30, 2023 and December 31, 2022, the Company had accrued interest and penalties expense included in the table of 
unrecognized tax benefits of $823 and $628, respectively.

The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions.   The 
Company is subject to ordinary statute of limitation rules of three and four years for federal and state returns, respectively.  
However, due to tax attribute carryforwards, the Company is subject to examination for tax years 2015 forward for U.S. federal 
tax purposes with respect to carryforward amounts.  The Company is also subject to examination in various states for tax years 
2003 forward with respect to carryforward amounts.  The Company is subject to examination for tax years 2016 forward for 
various foreign jurisdictions. The Company believes that adequate amounts have been reserved for any adjustments that may 
ultimately result from any future examinations of these years.

In the normal course of business, the Company is subject to tax audits in various jurisdictions, and such jurisdictions may 
assess additional income taxes or other taxes against it. Although the Company believes its tax estimates are reasonable, the 
final determination of tax audits and any related litigation could be materially different from the Company’s historical income 
tax provisions and accruals. The results of an audit or litigation could have a material adverse effect on the Company’s results 
of operations or cash flows in the period or periods for which that determination is made.

13. Accumulated Other Comprehensive Income (Loss):

Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses
on  available-for-sale  debt  securities.    See  the  Consolidated  Statements  of  Comprehensive  Income  for  the  effect  of  the 
components of comprehensive income on the Company’s net income.

The components of accumulated other comprehensive income (loss), net of tax, are as follows: 

Foreign currency
translation
adjustments

Net unrealized
gains (losses) on
marketable
securities

Accumulated
other
comprehensive
income (loss)

Balance at January 1, 2022 .............................................................. $
Net current period other comprehensive loss...............................
Balance at December 31, 2022 ........................................................
Net current period other comprehensive income (loss) ...............
Balance at December 30, 2023 ........................................................ $

$

1,764
(8,879)
(7,115)
(1,549)
(8,664) $

(448) $

(2,447)
(2,895)
3,660
765

$

1,316
(11,326)
(10,010)
2,111
(7,899)

F-27

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

14.

Segment Reporting and Geographic Information:

The Company is engaged in the design, development, manufacture and support of high-performance control metrology,
defect inspection, lithography and data analysis systems used by microelectronics device manufacturers. The Company and its 
subsidiaries  currently  operate  in  a  single  operating  segment:  the  design,  development,  manufacture  and  support  of  high-
performance  process  control  defect  inspection  and  metrology,  lithography  and  process  control  software  systems  used  by 
microelectronics device manufacturers. Therefore, the Company has one reportable segment. The Company’s chief operating 
decision maker is the Chief Executive Officer (the “CEO”). The CEO allocates resources and assesses performance of the 
business and other activities at the reportable segment level. 

The following table lists the different sources of revenue:

Systems and software ...................
Parts..............................................
Services ........................................
Total revenue........................

$

$

December 30, 
2023
683,316
74,604
57,948
815,868

Year Ended

December 31, 
2022

January 1, 
2022

84 % $ 865,707
84,266
9 %
55,210
7 %
100 % $ 1,005,183

86 % $ 669,114
72,753
8 %
47,032
6 %
100 % $ 788,899

85 %
9 %
6 %
100 %

 The Company’s significant operations outside the United States include sales, service and application offices in Asia and 
Europe. For geographical revenue reporting, revenue is attributed to the geographic location to which the product is shipped. 
Revenue by geographic region is as follows:

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

Revenue from third parties:

South Korea............................................................................ $
Taiwan....................................................................................
China ......................................................................................
United States ..........................................................................
Japan.......................................................................................
Southeast Asia........................................................................
Europe ....................................................................................

Total revenue...................................................................... $

169,323
141,915
136,940
130,292
93,831
87,585
55,982
815,868

$

$

224,172
199,104
250,968
121,487
58,133
71,062
80,256
1,005,183

$

$

160,373
194,458
151,027
123,858
61,186
33,054
64,943
788,899

The following chart identifies our customers that represented 10% or more of total revenue for each of the last three fiscal 

years:

Samsung Semiconductor......................................................................................
Taiwan Semiconductor Manufacturing Co. Ltd. .................................................
SK Hynix Inc. ......................................................................................................
^ The customer accounted for less than 10% of total revenue during the period.

2023
19 %
14 %
^

2022
13 %
15 %
11 %

2021
16 %
18 %
^

At December 30, 2023 and December 31,  2022, two customers, Taiwan Semiconductor Manufacturing Co. Ltd. and 

Samsung Semiconductor, accounted for more than 10% of net accounts receivable.  

Substantially all of the Company’s long-lived assets are located within the United States of America.

F-28

ONTO INNOVATION INC.
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued)
(In thousands, except per share data)

15. Earnings Per Share:

Basic income per share is calculated using the weighted average number of shares of common stock outstanding during
the period. Restricted stock units and stock options are included in the calculation of diluted earnings per share, except when 
their effect would be anti-dilutive.

The Company’s basic and diluted earnings per share amounts are as follows: 

Numerator:

Net income ............................................................................................ $

121,159

$

223,334

$

142,349

December 30,
2023

December 31,
2022

January 1,
2022

Denominator:

Basic earnings per share - weighted average shares
   outstanding .........................................................................................
Effect of potential dilutive securities:
Restricted stock units, employee stock purchase grants and stock
   options - dilutive shares .....................................................................
Diluted earnings per share - weighted average shares
   outstanding .........................................................................................

Earnings per share:

48,971

49,424

49,242

347

340

486

49,318

49,764

49,728

Basic...................................................................................................... $
Diluted................................................................................................... $

2.47
2.46

$
$

4.52
4.49

$
$

2.89
2.86

16.

Share Repurchase Authorization:

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows the
Company to repurchase up to $100,000 worth of shares of its common stock.  Repurchases may be made through both public 
market and private transactions from time to time with shares purchased being subsequently retired. During the twelve months 
ended  December  30,  2023,  the  Company  repurchased  and  retired  46  shares  of  its  common  stock  under  this  repurchase 
authorization and those shares were subsequently retired.  At December 30, 2023, there was $31,577 available for future share 
repurchases under this share repurchase authorization.

The following table summarizes the Company’s stock repurchases:

Shares of common stock repurchased ............................................
Cost of stock repurchased .............................................................. $
Average price paid per share.......................................................... $

46
3,197
69.29

$
$

1,018
65,257
64.09

$
$

—
—
-

December 30, 
2023

Year Ended
December 31, 
2022

January 1, 
2022

NOTE 17. Restructuring

The  Company  initiated  a  restructuring  plan  to  streamline  operations  and  align  the  Company’s  cost  structure  with  its 
business outlook for 2023.  During the twelve months ended December 30, 2023, restructuring costs of $3,571 were recorded 
in  operating  expenses  for  employee  severance  and  $7,027 were  recorded  in  cost  of  goods  sold  for  inventory  write-downs 
primarily related to the exit of older product lines.  All employee severance costs were paid during the twelve-month period.

F-29

ONTO INNOVATION INC. AND SUBSIDIARIES

SCHEDULE OF VALUATION AND QUALIFYING ACCOUNTS
(In thousands)

Column A

Description
Fiscal Year 2023:

Allowance for credit losses ... $
Deferred tax valuation 
    allowance...........................

Fiscal Year 2022:

Allowance for credit losses ... $
Deferred tax valuation 
    allowance...........................

Fiscal Year 2021:

Allowance for credit losses ... $
Deferred tax valuation 
    allowance...........................

Column B
Balance at
Beginning of
Period

Column C

Column D

Column E

Charged to (Recovery 
of) Costs and Expense

Charged to Other 
Accounts (net)

Deductions

Balance at
End of Period

1,572 $

245 $

1,200 $

358 $

2,659

11,772

2,188

—

—

13,960

1,303 $

356 $

— $

87 $

1,572

10,948

824

—

—

11,772

784 $

955 $

— $

436 $

1,303

14,238

(3,290)

—

—

10,948

F-30

PURSUANT TO THE REQUIREMENTS OF SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT 
OF 1934, THE REGISTRANT HAS DULY CAUSED THIS REPORT TO BE SIGNED ON ITS BEHALF BY THE 
UNDERSIGNED, THEREUNTO DULY AUTHORIZED.

SIGNATURES

Onto Innovation Inc.
(Registrant)

By:

Date:

/s/  Michael P. Plisinski
Michael P. Plisinski
Chief Executive Officer
February 26, 2024

PURSUANT TO THE REQUIREMENTS OF THE SECURITIES EXCHANGE ACT OF 1934, THIS REPORT 
HAS BEEN SIGNED BELOW BY THE FOLLOWING PERSONS ON BEHALF OF THE REGISTRANT AND IN 
THE CAPACITIES AND ON THE DATES INDICATED.

Signature

Title

/s/ Michael P. Plisinski

Michael P. Plisinski

/s/  Mark R. Slicer

Mark R. Slicer

/s/  Leo Berlinghieri

Leo Berlinghieri

/s/  Stephen D. Kelley

Stephen D. Kelley

/s/  David B. Miller

David B. Miller

/s/  Karen M. Rogge

Karen M. Rogge

/s/  Christopher A. Seams
Christopher A. Seams

/s/ May Su

May Su

Chief Executive Officer (Principal 
Executive Officer)

Senior Vice President, Chief Financial 
Officer (Principal Financial Officer and 
Principal Accounting Officer)

Director

Director

Director

Director

Director

Director

Date

February 26, 2024

February 26, 2024

February 26, 2024

February 26, 2024

February 26, 2024

February 26, 2024

February 26, 2024

February 26, 2024

/s/  Christine A. Tsingos

Director

February 26, 2024

Christine A. Tsingos

SUBSIDIARIES

Exhibit 21.1

Name
Rudolph Technologies, Inc.
4D Technology Corporation
Inspectrology LLC
Onto Innovation Japan Co. Ltd.
Onto Innovation (Shanghai) Trading Co., Ltd.
Nanometrics China Company Ltd.
Onto Innovation Germany GmbH
Onto Innovation Hong Kong Limited
Onto Innovation Europe, B.V.
Onto Innovation Switzerland GmBH
Onto Innovation Korea Ltd.
Onto Innovation Southeast Asia Pte. Limited
Onto Innovation Ireland Limited
Onto Innovation Malaysia Sdn. Bhd.
Onto Innovation Vietnam PTE Company Limited
Neta SAS

Jurisdiction
U.S.A.
U.S.A.
U.S.A.
Japan
China
China
Germany
Hong Kong
Netherlands
Switzerland
Korea
Singapore
Ireland
Malaysia
Vietnam
France

Rule 13a-14(a) Certification of Chief Executive Officer
Pursuant to Section 302 of the Sarbanes-Oxley Act of  2002

Exhibit 31.1

I, Michael P. Plisinski, certify that:

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods 
presented in this report;

4. The  registrant’s  other  certifying  officer  and  I  are  responsible  for  establishing  and  maintaining  disclosure  controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

a. Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed 
under  our  supervision,  to  ensure  that  material  information  relating  to  the  registrant,  including  its  consolidated 
subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is 
being prepared;

b.Designed such internal control over financial reporting, or caused such internal control over financial reporting to be 
designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the 
preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

c. Evaluated  the  effectiveness  of  the  registrant’s  disclosure  controls  and  procedures  and  presented  in  this  report  our 
conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this 
report based on such evaluation; and

d.Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the 
registrant’s  most  recent  fiscal  quarter  (the  registrant’s  fourth  fiscal  quarter  in  the  case  of  an  annual  report)  that  has 
materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; 
and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over 
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons 
performing the equivalent functions):

a. All  significant  deficiencies  and  material  weaknesses  in  the  design  or  operation  of  internal  control  over  financial 
reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report 
financial information; and

b.Any fraud, whether or not material, that involves management or other employees who have a significant role in the 
registrant’s internal control over financial reporting.

Date: February 26, 2024

By:/s/ Michael P. Plisinski
  Michael P. Plisinski
  Chief Executive Officer

 
 
 
 
 
 
 
 
 
 
Exhibit 31.2

Rule 13a-14(a) Certification of Chief Financial Officer
Pursuant to Section 302 of the Sarbanes-Oxley Act of  2002

I, Mark R. Slicer, certify that:

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods 
presented in this report;

4. The  registrant’s  other  certifying  officer  and  I  are  responsible  for  establishing  and  maintaining  disclosure  controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

a. Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed 
under  our  supervision,  to  ensure  that  material  information  relating  to  the  registrant,  including  its  consolidated 
subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is 
being prepared;

b.Designed such internal control over financial reporting, or caused such internal control over financial reporting to be 
designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the 
preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

c. Evaluated  the  effectiveness  of  the  registrant’s  disclosure  controls  and  procedures  and  presented  in  this  report  our 
conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this 
report based on such evaluation; and

d.Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the 
registrant’s  most  recent  fiscal  quarter  (the  registrant’s  fourth  fiscal  quarter  in  the  case  of  an  annual  report)  that  has 
materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; 
and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over 
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons 
performing the equivalent functions):

a. All  significant  deficiencies  and  material  weaknesses  in  the  design  or  operation  of  internal  control  over  financial 
reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report 
financial information; and

b.Any fraud, whether or not material, that involves management or other employees who have a significant role in the 
registrant’s internal control over financial reporting.

Date: February 26, 2024

By:/s/ Mark R. Slicer
  Mark R. Slicer
  Chief Financial Officer

 
 
 
 
 
 
 
 
 
 
CERTIFICATION OF CHIEF EXECUTIVE OFFICER 
PURSUANT TO 18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Exhibit 32.1

I, Michael P. Plisinski, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002, that the Annual Report of Onto Innovation Inc. on Form 10-K for the year ended December 30, 2023 fully 
complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934 and that the 
information contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition and 
results of operations of Onto Innovation Inc.

Date: February 26, 2024

By:/s/ Michael P. Plisinski
  Michael P. Plisinski
  Chief Executive Officer

 
 
 
 
 
 
 
 
 
 
CERTIFICATION OF CHIEF FINANCIAL OFFICER
PURSUANT TO 18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Exhibit 32.2

I, Mark R. Slicer, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act 
of 2002, that the Annual Report of Onto Innovation  Inc. on Form 10-K for the year ended December 30, 2023 fully complies 
with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934 and that the information 
contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition and results of 
operations of Onto Innovation Inc.

Date: February 26, 2024

By:/s/ Mark R. Slicer
  Mark R. Slicer
  Chief Financial Officer

 
 
 
 
 
 
 
 
 
 
UNITED STATES SECURITIES AND EXCHANGE COMMISSION 

Washington, D.C. 20549 

SCHEDULE 14A 

PROXY STATEMENT PURSUANT TO SECTION 14(a) OF 

THE SECURITIES EXCHANGE ACT OF 1934 

Filed by the Registrant  

Filed by a Party other than the Registrant  

Check the appropriate box: 

  Preliminary Proxy Statement 
  Confidential, for Use of the Commission Only (as permitted by Rule 14a-6(e)(2)) 
  Definitive Proxy Statement 
  Definitive Additional Materials 
  Soliciting Material Pursuant to Rule 14a-12 

Onto Innovation Inc. 

(Name of Registrant as specified in its charter) 

(Name of Person(s) Filing Proxy Statement, if other than the Registrant) 

Payment of Filing Fee (Check all boxes that apply): 
 No fee required. 
 Fee paid previously with preliminary materials. 
 Fee computed on table in exhibit required by Item 25(b) per Exchange Act Rules 14a-6(i)(1) and 0-11. 

 
 
 
 
 
 
 
 
 
 
NOTICE OF 2024 ANNUAL MEETING OF STOCKHOLDERS 

Date: 

Time: 

Place: 

Wednesday, May 22, 2024 

8:00 a.m., Pacific Time 

The Company’s offices located at 1550 Buckeye Drive, Milpitas, CA 95035 

Record Date: 

Only stockholders of record at the close of business on March 25, 2024 are entitled to vote at the 
meeting and any adjournment or postponement thereof for which no new record date is set. 

Items of Business:  1.  To elect the Board’s eight nominees for director to serve until the next Annual Meeting and 

until their successors are duly elected and qualified; 

2.  To  approve, on  an  advisory  (non-binding)  basis,  the  compensation  of  our  named  executive 

officers as disclosed in this proxy statement; 

3.  To  ratify  the  appointment  of  Ernst  &  Young  LLP  as  our  independent  registered  public 

accounting firm for the fiscal year ending December 28, 2024; and  

4.  To  transact  such  other  business  as  may  properly  come  before  the  meeting  and  any 

adjournment or postponement thereof. 

These items of business are described more fully below in this proxy statement.  This year we will be providing access 
to  our  proxy  materials  via  the  Internet  in  accordance  with  the  Securities  and  Exchange  Commission’s  “Notice  and 
Access” rules.  On or about April 5, 2024, we will be mailing to our stockholders our Notice of Internet Availability of 
Proxy  Materials,  which  contains  instructions  for  accessing  our  2024  proxy  statement  and  2023  annual  report  to 
stockholders  and  how  to  vote  online.    In  addition,  the  Notice  of  Internet  Availability  of  Proxy  Materials  will  contain 
instructions on how to request a paper copy of the 2024 proxy statement and 2023 annual report to stockholders. 

Your vote is important.  As always, we encourage you to vote your shares as soon as possible and prior to the Annual 
Meeting even if you plan to attend the Annual Meeting.  Voting early will ensure your shares are represented at the 
Annual Meeting, regardless of whether you attend the Annual Meeting.  You may cast your vote via the Internet, by 
telephone, or during the Annual Meeting.  If you receive a paper copy of the proxy card by mail, you may also mark, 
sign, date, and return the proxy card in the accompanying postage-prepaid envelope. 

IMPORTANT NOTICE REGARDING THE AVAILABILITY OF PROXY MATERIALS FOR THE 

ANNUAL MEETING OF STOCKHOLDERS TO BE HELD MAY 22, 2024: 

This notice, the proxy statement, and the 2023 annual report to stockholders are available at: 
https://www.ontoinnovation.com/ar-proxy 

FOR THE BOARD OF DIRECTORS 

Yoon Ah E. Oh 
Corporate Secretary 
Wilmington, Massachusetts 
April 5, 2024

 
 
 
 
 
 
 
 
 
 
 
PROXY STATEMENT  

TABLE OF CONTENTS 

Forward Looking Statements 

Proxy Summary 

Onto Innovation Proxy Statement 

Proposal 1 – Election of Directors 

Nominees For Director 

Corporate Governance Principles and Practices 

Proposal 2 – Advisory Vote to Approve Named Executive Officer Compensation 

Executive Officer Compensation 

Compensation Committee Report on Executive Officer Compensation 

Executive Officer Compensation Tables 

CEO Pay Ratio 

Proposal 3 – Ratification of Appointment of Independent Registered Public Accounting Firm 

Audit Committee Report 

Executive Officer Biographies 

Security Ownership of Certain Beneficial Owners 

Equity Compensation Plan Information 

Other Matters 

Questions and Answers About the Annual Meeting 

Additional Information 

Page 

1 

2 

5 

6 

6 

14 

27 

28 

48 

49 

64 

65 

68 

69 

72 

73 

73 

74 

79 

 
 
 
 
 
 
 
 
 
 
Forward Looking Statements 

Certain statements in this proxy statement of Onto Innovation Inc. (referred to in this proxy statement, together with its 
consolidated  subsidiaries,  unless  otherwise  specified  or  suggested  by  the  context,  as  the  “Company,”  “Onto 
Innovation,”  “we,” “our,” or “us”) may be considered “forward-looking statements” or may be based on “forward-looking 
statements,” including, but not limited to, those concerning: our business momentum and future growth; technology 
development,  product  introduction  and  acceptance  of  our  products  and  services;  our  manufacturing  practices  and 
ability  to  deliver  both  products  and  services  consistent  with  our  customers’  demands  and  expectations  and  to 
strengthen  our  market  position,  including  our  ability  to source  components,  materials,  and  equipment  due  to  supply 
chain  delays  or  shortages;  our  expectations  of  the  semiconductor  market  outlook;  future  revenue,  gross  profits, 
research  and  development  and  engineering  expenses,  selling,  general  and  administrative  expenses,  and  cash 
requirements; the effects of political, economic, legal, and regulatory changes or conflicts on our global operations; the 
effects  of  natural  disasters  or  public  health  emergencies  on  the  global  economy  and  on  our  customers,  suppliers, 
employees, and business; our dependence on certain significant customers and anticipated trends and developments 
in and management plans for our business and the markets in which we operate; and our ability to be successful in 
managing our cost structure and cash expenditures and results of litigation.  Statements contained or incorporated by 
reference in this proxy statement that are not purely historical are forward-looking statements and are subject to safe 
harbors created under Section 27A of the Securities Act of 1933, as amended, Section 21E of the Securities Exchange 
Act  of  1934,  as  amended  (the  “Exchange  Act”),  and  the  Private  Securities  Litigation  Reform  Act  of  1995.    Forward-
looking statements may be identified by words such as, but not limited to, “anticipate,” “believe,” “continue,” “estimate,” 
“expect,” “intend,” “plan,” “should,” “may,” “could,” “will,” “would,” “forecast,” “project” and words or phrases of similar 
meaning, as they relate to our management or us.  Forward-looking statements contained herein reflect our current 
expectations, assumptions and projections with respect to future events and are subject to certain risks, uncertainties 
and assumptions, such as those identified in Part I, Item 1A.  “Risk Factors” of our Form 10-K for the fiscal year ended 
December 30, 2023.  Actual results may differ materially and adversely from those included in such forward-looking 
statements.  Forward-looking statements reflect our position as of the date of this report and we undertake no obligation 
to update any forward-looking statements, whether as a result of new information, future events or otherwise, except 
as required by law.  

PROXY STATEMENT 

1 

 
 
 
 
 
 
 
 
This summary highlights information contained elsewhere in the proxy statement.  This summary does not contain all of 
the information that you should consider, and you should read the entire proxy statement carefully before voting. 

PROXY SUMMARY 

  Stockholder Voting Matters 

Voting Matter 

Proposal 1:  Election of Directors 

Proposal 2:  Advisory Vote to Approve Named Executive 
Officer Compensation 

Proposal 3:  Ratification of Appointment of Independent 
Registered Public Accounting Firm for the Fiscal Year 
Ending December 28, 2024 

CORPORATE GOVERNANCE HIGHLIGHTS 

Snapshot of Board Composition 

Board Vote 
Recommendation 

Page Reference for More 
Information 

FOR ALL 

FOR 

FOR 

6 

27 

65 

The following table presents a snapshot of the expected composition of the Onto Innovation Board of Directors (the 
“Board” or “Board of Directors”) immediately following the 2024 Annual Meeting, assuming the election of all nominees 
named in the proxy statement. 

Board Characteristic 

Onto Innovation 

Total Number of Directors 

Percentage of Independent Directors 

Average Age of Directors (years) 

Average Tenure of Directors (years) 

Separate Chairperson and CEO roles 

Independent Chairperson 

Audit Committee Financial Experts 

Female Director Representation 

Race/Ethnicity Diversity Representation 

8 

87.5% 

63.8 

6.8 

Yes 

Yes 

2 

37.5% 

12.5% 

PROXY STATEMENT 

2 

 
 
 
 
 
 
 
 
 
 
 
 
 
  
 
Snapshot Of Board Governance And Compensation Policies 

The following table presents a snapshot of the Onto Innovation Board governance and compensation policies currently 
in effect. 

Policy 

Onto Innovation 

Majority Voting for All Directors 

Regular Executive Sessions of Independent Directors 

Annual Board, Committee, and Director Evaluations 

Risk Oversight by Full Board and Committees 

Independent Audit, Compensation, and Nominating & Governance Committees 

Code of Business Conduct and Ethics for Employees and Directors 

Financial Information Integrity Policy 

Stock Ownership Requirement for Directors 

Stock Ownership Requirement for CEO 

Stock Ownership Requirement for other NEOs 

Stock-Based Award Grant Date Policy 

Anti-Hedging, Anti-Short Sale & Anti-Pledging Policies 

Incentive Compensation Recovery Policy 

No Tax Gross-Up Provisions 

No Poison Pill 

Stock Buyback Program 

Double Trigger Change-in-Control Provisions for Executive Officers 

Annual Environmental, Social, and Governance Report 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

3x annual retainer 

3x base salary 

1x base salary 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

PROXY STATEMENT 

3 

 
 
 
 
 
 
 
  
 
Snapshot Of Board Governance And Compensation Policies Newly Implemented Or Adjusted In Past 
Year 

The following presents a snapshot of the Onto Innovation Board governance and compensation policies that were newly 
implemented or adjusted in the past year. 

•  After the 2023 Annual Meeting of Stockholders, the following actions were taken with regard to the 

composition and leadership structure of the Board and standing committees of the Board: 

ο  As previously disclosed, in March 2024, the Board elected Susan D. Lynch to the Board and appointed 

her to the Audit and M&A Committees. 

ο  As previously disclosed, Karen M. Rogge announced her decision to retire from the Board following the 

conclusion of her current term, which expires at the 2024 Annual Meeting. 

ο  The Audit Committee was increased to four members.  Leo Berlinghieri and Stephen D. Kelley joined the 
Audit Committee and May Su left the Audit Committee.  Christine A. Tsingos and Ms. Rogge remained on 
the Audit Committee, with Ms. Tsingos serving as Chairperson. 

ο  Ms.  Su  was  appointed  Chairperson  of  the  Compensation  Committee.    Mr.  Kelley  also  joined  the 
Compensation Committee and Mr. Berlinghieri left the Compensation Committee.  David B. Miller and Ms. 
Tsingos remained as members of the Committee. 

ο  The Nominating & Governance Committee was increased to four members, with Ms. Su joining. Messrs. 
Berlinghieri, Miller, and Christopher A. Seams remained on the Committee, with Mr. Berlinghieri serving as 
Chairperson. 

•  The annual review of the charters for the Audit, Compensation, M&A and Nominating & Governance Committees 
was performed and completed.  The Board also reviewed and approved updates to the Company’s Code of 
Business  Conduct  and  Ethics,  Financial  Information  Integrity  Policy,  Investment  Policy,  Stock-Based  Award 
Grant Date Policy, Foreign Corrupt Practices Act Policy, Director Candidate Policy, Stockholder & Interested 
Party Communications Policy, Insider Trading Policy, and Corporate Governance Guidelines. 

•  The Board approved a new Incentive Compensation Recovery Policy that meets the requirements of new rules 
promulgated by the Securities and Exchange Commission (“SEC”) and the New York Stock Exchange (“NYSE”) 
that went into effect in late 2023. 

PROXY STATEMENT 

4 

 
 
 
 
 
 
  
 
__________________________________________ 

PROXY STATEMENT 
__________________________________________ 

The proxy detailed herein is solicited on behalf of the Board of Directors of Onto Innovation for use at the 2024 Annual 
Meeting of Stockholders to be held May 22, 2024 at 8:00 a.m. Pacific Time (the “Annual Meeting”), or at any adjournment 
or  postponement  thereof,  for  the  purposes  set  forth  herein  and  in  the  accompanying  Notice  of  Annual  Meeting  of 
Stockholders.  The Annual Meeting will be held at the Company’s offices located at 1550 Buckeye Drive, Milpitas, CA 
95035.    Directions  to  the  Annual  Meeting  may  be  found  on  our  website  (www.ontoinnovation.com)  by  clicking  on 
“Company,” “Locations,” “California” and then accessing the interactive map.  The Company’s telephone number is (978) 
253-6200. 

On or about April 5, 2024, we will furnish a Notice of Internet Availability of Proxy Materials (“Notice”) to our stockholders 
containing instructions on how to access the proxy materials online at: 

https://www.ontoinnovation.com/ar-proxy 

Instructions on how to vote online and to request a printed copy of the proxy materials may be found in the Notice.  If 
you receive a Notice by mail, you will not receive a paper copy of the proxy materials unless you request such materials 
by following the instructions contained in the Notice.  Your vote is important, regardless of the extent of your holdings.  

Our principal executive offices are located at 16 Jonspin Road, Wilmington, Massachusetts 01887. 

PROXY STATEMENT 

5 

 
 
 
 
 
 
 
 
 
 
PROPOSAL 1 

ELECTION OF DIRECTORS 

Nominees 

The Company’s Amended and Restated Certificate of Incorporation (“Charter”) provides that directors shall be elected 
at each Annual Meeting of Stockholders, and that each director of the Company shall serve until the expiration of the 
term for which he or she is elected and until his or her successor is duly elected and qualified, or until his or her earlier 
death, resignation, disqualification or removal. 

Based on the recommendation of the Nominating & Governance Committee, the eight director nominees approved by 
the Board for inclusion in this proxy statement and for election at the Annual Meeting are: 

Leo Berlinghieri 

Stephen D. Kelley 

Susan D. Lynch 

David B. Miller  

Michael P. Plisinski 

Christopher A. Seams 

May Su 

Christine A. Tsingos 

Each nominee is currently serving as a director of Onto Innovation.  In making its recommendations, the Nominating & 
Governance Committee considered a number of factors, including its criteria for Board membership, which include the 
qualifications that must be possessed by a director candidate in order to be nominated for a position on our Board.  
Each nominee has indicated that he or she will serve if elected.  Unless otherwise instructed, the proxy holders will vote 
the  proxies  received  by  them  for  the  Company’s  eight  nominees.    In  the  event  that  any  nominee  of  the  Company 
becomes unable or unavailable to serve as a director at the time of the Annual Meeting (which we do not anticipate) the 
proxy holders will vote the proxies for any substitute nominee who is designated by the current Board to fill the vacancy.  
Alternatively, the Board, in its discretion, may elect not to nominate a substitute and to reduce the size of the Board.  
We do not have any reason to believe that any of the nominees will be unable or will decline to serve as a director. 

Board Composition and Refreshment 

A priority of the Nominating & Governance Committee and the Board as a whole is making certain that the composition 
of  the  Board  reflects  the  desired  professional  experience,  skills,  and  backgrounds  in  order  to  present  an  array  of 
viewpoints and perspectives, help develop and execute strategy for the future, and effectively represent the long-term 
interests of stockholders.  Further, the Board recognizes the importance of Board refreshment in order to continue to 
achieve an appropriate balance of tenure, turnover, diversity, and skills on the Board. 

Vote Required 

Pursuant to the Company’s Amended and Restated Bylaws (“Bylaws”), our directors are elected by the affirmative vote 
of the majority of the votes cast (provided, however, that if the number of nominees exceeds the number of directors 
to be elected, directors will be elected by a plurality voting standard).  In order for a director in an uncontested election 
to be elected, the number of votes cast “for” his/her election must exceed the number of votes cast “against” his/her 
election (with “abstentions” and “broker non-votes” not counted as a vote cast either “for” or “against” that director’s 
election).  If a nominee who is an incumbent director receives a greater number of “against” votes for election than “for” 
votes in an uncontested election and is not elected, our Corporate Governance Guidelines provide that such director 
must  promptly  tender  a  resignation  to  the  Board.    Our  Nominating  &  Governance  Committee  would  then  make  a 
recommendation to the Board on whether to accept or reject the tendered resignation, or whether other action should 
be  taken.    Within  90  days  after  the  date  of  the  certification  of  the  election  results,  our  Board  will  act  on  any  such 
tendered resignation and publicly disclose (in a press release, a filing with the SEC, or other broadly disseminated means 
of communication) its decision regarding the tendered resignation and the rationale behind the decision. 

PROXY STATEMENT 

6 

 
 
 
 
 
 
 
Information about the Nominees and Continuing Directors 

Our Board and its Nominating & Governance Committee believe that all of the director nominees are highly qualified, 
have demonstrated leadership skills, and have the requisite experience and judgment in areas that are relevant to our 
business.  We believe that their ability to challenge and stimulate management and their dedication to the affairs of the 
Company  collectively  serve  the  interests  of  the  Company  and  its  stockholders.    The  Company  is  unaware  of  any 
arrangements  or  understandings  between  any  director  or  nominee  and  any  other  person(s)  pursuant  to  which  any 
director or nominee was or is to be selected. 

The eight nominees for director are set forth below.  All information is as of the record date.   

Name 

Principal Occupation 

Board Tenure(1) 

Leo Berlinghieri 

Former President and Chief Executive Officer of MKS Instruments, Inc. 

15.5 years 

Stephen D. Kelley 

President and Chief Executive Officer of Advanced Energy Industries, Inc. 

1.2 years 

Susan D. Lynch 

Former Senior Vice President and Chief Financial Officer of V2X, Inc. 

<0.1 years 

David B. Miller 

Former President of DuPont Electronics & Communications 

Michael P. Plisinski 

Chief Executive Officer of Onto Innovation Inc. 

Christopher A. Seams 

Former Chief Executive Officer of Deca Technologies Inc. 

May Su 

Former Chief Executive Officer of Kateeva, Inc. 

Christine A. Tsingos 

Former Executive Vice President and Chief Financial Officer of Bio-Rad 
Laboratories, Inc. 

8.7 years 

8.4 years 

8.7 years 

2.1 years 

9.9 years 

(1)  On  October  25,  2019  (the  “Merger  Date”),  Rudolph  Technologies,  Inc.  merged  with  and  into  Nanometrics 
Incorporated, which was then renamed Onto Innovation Inc. (the “2019 Merger”).  Unless otherwise indicated or 
context otherwise requires, as used herein “Nanometrics” refers to Nanometrics Incorporated and its subsidiaries 
prior to the Merger Date and “Rudolph” refers to Rudolph Technologies, Inc. and its subsidiaries prior to the Merger 
Date. Board tenure includes time served on the Rudolph Board of Directors or the Nanometrics Board of Directors, 
as applicable, prior to the Merger Date.  

There  are  no  family  relationships  between  any  directors  or  executive  officers  of  the  Company.    The  Nominating  & 
Governance  Committee  considered  the  professional  experience,  skills,  and  backgrounds  of  the  nominees  and 
recommended the nominees to the full Board. 

PROXY STATEMENT 

7 

 
 
 
 
 
 
  
 
The  following  reflects  additional  information  regarding  the  background  and  qualifications  of  our  director  nominees, 
including the experience and skills that support the Board’s determination that each director nominee should serve on 
our Board. 

The director nominees for 2024 voluntarily self-identified with the following diversity characteristics: 

•  Gender Self-Identification:   

62.5% Male / 37.5% Female 

•  Race/Ethnicity Identification: 

87.5% White / 12.5% Asian 

• 

LGBTQ+ Identification: 

None 

PROXY STATEMENT 

8 

 
 
 
 
 
 
 
 
 
  
 
   Leo Berlinghieri 

NOMINEES FOR DIRECTOR 

Director Since: 

Age: 

July 2008 

70 

Independent Status: 

Independent Director 

Board Committee(s): 

Audit, Nominating & Governance (Chairperson) 

Other Public Company Boards:  MKS Instruments, Inc. (2005-2013) 

From  July  2005  to  December  2013,  Mr.  Berlinghieri  served  as  President  &  Chief  Executive  Officer  of 
MKS Instruments, Inc., a critical subsystem and instrument provider to the semiconductor industry.  From April 2004 to 
July 2005, Mr. Berlinghieri served as President and Chief Operating Officer and, from July 2003 to April 2004, as Vice 
President and Chief Operating Officer, at MKS Instruments.  Mr. Berlinghieri served on the advisory board of Unipower, 
LLC from 2017 to 2019, as a director on the North America advisory board of Semiconductor Equipment and Materials 
International (SEMI) from 2005 to 2013, holding the role of chairperson in 2012 and 2013, and on the board of directors 
of the Massachusetts High Technology Council, Inc. from 2006 to 2013. 

Key Qualifications, Attributes, Skills and Experience 

Mr. Berlinghieri has over 34 years of experience in the semiconductor industry and extensive international, financial, 
and  operations  experience  through  his  various  roles  with  MKS  Instruments,  including  Chief  Executive  Officer,  Chief 
Operating Officer and Vice President of Global Sales and Service. 

   Stephen D. Kelley 

Director Since: 

January 2023 

Age: 

61 

Independent Status: 

Independent Director 

Board Committee(s): 

Audit, Compensation 

Other Public Company Boards:  Advanced Energy Industries, Inc. (since March 2021) 

Amkor Technology, Inc. (2013-2020) 

Mr. Kelley has served as President & Chief Executive Officer of Advanced Energy Industries, Inc., which designs and 
manufactures  power  delivery  systems  for  semiconductor  wafer  fabrication  equipment  and  other  applications,  since 
March 2021.  Previously, Mr. Kelley served as President and Chief Executive Officer of Amkor Technology, Inc., a leading 
semiconductor packaging and test company, from May 2013 to June 2020.  Prior to joining Amkor, Mr. Kelley served as 
Senior  Advisor  to  Advanced  Technology  Investment  Company,  the  Abu  Dhabi-sponsored  investment  company  that 
owned  GlobalFoundries  Inc.  at  the  time,  from  June  through  November  2012.    Mr.  Kelley  served  as  Executive  Vice 
President and Chief Operating Officer of Cree, Inc. from 2008 to 2011.  Prior to joining Cree, Mr. Kelley held executive 
leadership roles at Texas Instruments Inc. and Philips Semiconductors.  Mr. Kelley holds a B.S. in Chemical Engineering 
from the Massachusetts Institute of Technology and a J.D. from Santa Clara University.  

Key Qualifications, Attributes, Skills and Experience 

With  over  30  years  of  leadership  experience  in  the  semiconductor  industry,  Mr.  Kelley  has  a  comprehensive 
understanding of our industry and extensive management experience.  Mr. Kelley also possesses first-hand knowledge 
of  our  customer  base  and  has  in-depth  experience  in  strategic  planning,  business  development,  technology, 
manufacturing, and operations relevant to our business.  

PROXY STATEMENT 

9 

 
 
 
 
 
 
 
 
 
 
 
   Susan D. Lynch 

Director Since: 

Age: 

March 2024 

62 

Independent Status: 

Independent Director 

Board Committee(s): 

Audit, M&A 

Other Public Company Boards:  Allegro Microsystems, Inc. (since November 2021) 

Ms. Lynch served as the Senior Vice President and Chief Financial Officer at V2X (formerly Vectrus, Inc.) from August 
2019 to September 2023.  From April 2016 to July 2019, Ms. Lynch was the Executive Vice President and Chief Financial 
Officer for Sungard Availability Services.  Before joining Sungard AS, from 2007 to 2015, Ms. Lynch was the Executive 
Vice President and Chief Financial Officer for Hitachi Vantara (formerly Hitachi Data Systems).  From 2005 to 2007, Ms. 
Lynch was Vice President and Chief Financial Officer of Raytheon Technical Services.  Before joining Raytheon, Ms. 
Lynch held a number of roles of increasing financial responsibility with Honeywell International Inc. from 1984 to 2005.  
Ms. Lynch received her B.A. in accounting and business administration from MidAmerica Nazarene University.  In 2023, 
Ms.  Lynch  was  awarded  the  prestigious  Greater  Washington  Technology  Public  Company  CFO  of  the  Year  by  the 
Northern Virginia Technology Council. 

Key Qualifications, Attributes, Skills and Experience 

Ms. Lynch has more than 25 years of financial experience through senior leadership roles in the technology, 
aerospace and defense, and industrial manufacturing industries make her well qualified to serve as a member of our 
Board. 

   David B. Miller 

Director Since: 

Age: 

July 2015 

67 

Independent Status: 

Independent Director 

Board Committee(s): 

Compensation, Nominating & Governance,  
M&A (Chairperson) 

Other Public Company Boards:  Merrimac Industries, Inc. (2002-2008) 

Mr. Miller served as Rudolph’s non-executive Chairperson from August 2018 through the Merger Date.  From June 1981 
to  November  2015,  Mr.  Miller  served  in  various  positions,  most  recently  as  President,  at  DuPont  Electronics  & 
Communications, an electronic materials company.  Mr. Miller previously served as the President of the University of 
Virginia  School  of  Engineering  &  Applied  Science  Foundation  from  2016  to  2018.    Mr.  Miller  served  on  the  board  of 
directors of Semiconductor Equipment and Materials International (SEMI) from 2011 to 2015 and on the board of the 
North  Carolina  Chamber  of  Commerce  from  2010  to  2015.    He  has  also  served  on  several  electronics  joint  venture 
boards in the U.S. and Asia.  Mr. Miller holds a B.S. in Electrical Engineering from the University of Virginia. 

Specific Qualifications, Attributes, Skills and Experience 

Mr. Miller has over 40 years of experience in the electronics industry.  In his prior roles, including as President of DuPont 
Electronics & Communications, he had oversight of technology advancement, complex financial transactions, profit and 
loss responsibility and investor relations, and brings substantial management and market expertise to the Board.  Mr. 
Miller also has substantial international experience, having served on several electronics joint venture boards in the U.S. 
and Asia as well as on the board of SEMI International.   

PROXY STATEMENT 

10 

 
 
 
 
 
 
 
 
 
 
  
 
   Michael P. Plisinski 

Director Since: 

November 2015 

Age: 

54 

Independent Status: 

Non-Independent Director 

Board Committee(s): 

None 

Other Public Company Boards:  None 

Mr.  Plisinski  has  served  as  the  Company’s  Chief  Executive  Officer  since  the  Merger  Date  and  was  previously  Chief 
Executive Officer of Rudolph from November 2015 through the Merger Date.  Prior to his appointment as Rudolph’s CEO, 
Mr. Plisinski served as Rudolph’s Executive Vice President and Chief Operating Officer from October 2014 to November 
2015 and as Vice President and General Manager of its Data Analysis and Review Business Unit from February 2006 
until October 2014.  From February 2004 to February 2006, Mr. Plisinski served as Vice President of Engineering at 
August  Technology,  which  was  acquired  by  Rudolph.    Mr.  Plisinski  joined  August  Technology  in  connection  with  its 
acquisition of Counterpoint Solutions, a supplier of optical review and automated metrology equipment, where he was 
the  sole  founder  and  President  from  June  1999  to  July 2003.    Mr.  Plisinski  has  served  on  the  board  of  directors  of 
Cognizer.AI, a software company that specializes in deep-learning powered natural language intelligence, since August 
2020, and on the board of directors of the Massachusetts High Technology Council, Inc. since May 2022.  Mr. Plisinski 
has a B.S. in Computer Science from the University of Massachusetts and has completed the Advanced Management 
Program from Harvard Business School. 

Key Qualifications, Attributes, Skills and Experience 

Mr.  Plisinski  brings  to  our  Board  of  Directors  insights  based  on  his  leadership  roles  at  the  Company  and  his  deep 
knowledge of our products, markets, customers, culture, and organization. 

  Christopher A. Seams 

Director Since: 

August 2015 

Age: 

61 

Independent Status: 

Independent Director 

Board Committee(s): 

Nominating & Governance, M&A 

Other Public Company Boards:  Xperi Inc. (since October 2013) 

Mr. Seams served as Chief Executive Officer of Deca Technologies Inc., a wafer-level electronic interconnect solutions 
provider to the semiconductor industry, from June 2013 to August 2016.  Prior to Deca Technologies, Mr. Seams served 
as Executive Vice President of Sales and Marketing at Cypress Semiconductor Corporation, a semiconductor design 
and manufacturing company, and held various technical and operational management positions in its manufacturing, 
development, and operations departments.  Prior to joining Cypress in 1990, Mr. Seams worked in process development 
for Advanced Micro Devices, Inc. and Philips Research Laboratories.  Mr. Seams holds a B.S. in Electrical Engineering 
from Texas A&M University and an M.S. in Electrical and Computer Engineering from the University of Texas at Austin.  
Mr. Seams also has a Professional Certificate in Advanced Computer Security from Stanford University and is a senior 
member of the Institute of Electrical and Electronics Engineers.  Mr. Seams is a member of the American College of 
Corporate  Directors  (ACCD)  as  well  as  a  member  and  Certified  Director  of  the  National  Association  of  Corporate 
Directors (NACD). 

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Key Qualifications, Attributes, Skills and Experience 

Mr.  Seams  has  over  30  years  of  experience  within  the  semiconductor  industry.    During  that  time  he  has  gained 
substantial management, financial and international experience as a senior leader at multiple companies.  He also brings 
to the Board technology and innovation experience gained through an array of technical and operational management 
positions in manufacturing, development, operations, and process development.  

  May Su 

Director Since: 

Age: 

March 2022 

66 

Independent Status: 

Independent Director 

Board Committee(s): 

Compensation (Chairperson), Nominating & Governance 

Other Public Company Boards:  Kateeva, Inc. (2020-2022) 

Ms. Su served as Chief Executive Officer of Kateeva, Inc., a company that builds inkjet deposition equipment solutions, 
from  March  2020  to  October  2022.    Prior  to  becoming  Chief  Executive  Officer,  Ms.  Su  served  as  Kateeva’s  Chief 
Marketing Officer starting in January 2018 and added the role of Senior Vice President of Sales in May 2019.  Before 
joining Kateeva, Ms. Su was an independent consultant from 2016 to 2018.  From 2012 to 2016, Ms. Su served in an 
array  of  senior  management  roles,  including  Vice  President,  Strategic  Marketing  and  Vice  President  Strategic  OEM 
Sales,  for  Brooks  Automation,  Inc.,  a  provider  of  automation,  vacuum  and  instrumentation  equipment  for  multiple 
markets, including semiconductor manufacturing.  From 2009 to 2012, Ms. Su served as Vice President and General 
Manager for Crossing Automation Inc., a manufacturer of fabrication and tool automation products, which was acquired 
by Brooks Automation in 2012.  Before her role at Crossing Automation, Ms. Su was President of U.S. & European Field 
Operations for Nova Measuring Instrument, Inc., a provider of metrology devices for advanced process control used in 
semiconductor  manufacturing,  and  held  other  senior  management  roles  with  Aviza  Technology,  Inc.,  New-Wave 
Research, KLA-Tencor Corporation and Lam Research Corporation.  Ms. Su holds a B.S. in Mechanical Engineering from 
Cornell University, an M.S. in Mechanical Engineering from University of California-Berkeley, and an M.B.A. from Santa 
Clara University, Leavey School of Business.  Ms. Su also serves on the board of directors of Applied Engineering, Inc., 
a high-tech contract manufacturing company. 

Key Qualifications, Attributes, Skills and Experience 

Ms. Su has over 40 years of experience within the semiconductor capital equipment industry.  During that time she has 
gained substantial management, international and financial experience in her role as Chief Executive Officer of Kateeva, 
Inc., as well as in other executive and general manager roles. 

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  Christine A. Tsingos 

Director Since: 

Age: 

May 2014 

65 

Independent Status: 

Independent Director 

Board Committee(s): 

Audit (Chairperson), Compensation 

Other Public Company Boards:  Envista Holdings Corporation (since September 2019) 

Varex Imaging Corporation (since February 2017) 
Telesis Bio Inc. (since May 2021) 

Ms. Tsingos served as the Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories, a manufacturer 
and distributor of life science research and clinical diagnostics products, from December 2002 through May 2019.  Prior 
to Bio-Rad, Ms. Tsingos held executive positions at Autodesk, The Cooper Companies, and Attest Systems.  Ms. Tsingos 
holds  a  B.A.  in  International  Studies  from  The  American  University  and  an  M.B.A.  in  International  Business  from  The 
George Washington University.  In 2010, Ms. Tsingos was awarded the prestigious Bay Area CFO of the Year.  

Key Qualifications, Attributes, Skills and Experience 

Ms. Tsingos has over 30 years of financial and operational experience with a series of companies, including 16 years of 
service as Chief Financial Officer of Bio-Rad Laboratories through which she also gained comprehensive international 
experience.  Ms. Tsingos also has significant experience and knowledge of both the Company and the semiconductor 
industry derived from ten years of dedicated service on the boards of directors of Nanometrics and the Company. 

The Board recommends voting “FOR”  
all of the nominees set forth above. 

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13 

 
 
 
 
 
 
 
 
 
 
 
 
  
 
CORPORATE GOVERNANCE PRINCIPLES AND PRACTICES 

Onto Innovation is committed to sound and effective corporate governance practices.  Having such practices is essential 
to  running  our  business  efficiently  and  maintaining  our  integrity  in  the  marketplace.    The  major  components  of  our 
corporate governance practices are described below. 

Board Leadership Structure 

The  roles  of  Chief  Executive  Officer  (“CEO”)  and  Chairperson  of  the  Board  at  Onto  Innovation  are  held  by  separate 
individuals.  Our Board is led by Christopher A. Seams, who is an independent director and has served as Chairperson 
of the Board since the Merger Date.  The Board’s primary responsibility is to oversee management of the Company.  
Company management is led by Michael P. Plisinski, who has served as our CEO and a director since the Merger Date.   

Our Board is currently comprised of one non-independent director, Mr. Plisinski, and eight independent directors, each 
of  whom  has  been  affirmatively  determined  by  our  Board  to  meet  the  criteria  for  independence  established  by  the 
Securities  and  Exchange  Commission  (“SEC”)  and  the  New  York  Stock  Exchange  (“NYSE”).    Following  our  Annual 
Meeting,  our  Board  will  be  composed  of  one  non-independent  director  and  seven  independent  directors.    The 
independent  directors  meet  periodically  in  executive  session  chaired  by  the  Chairperson  without  the  CEO  or  other 
management present.  Furthermore, each director is encouraged to suggest items for the Board agenda in advance of 
any meeting and to raise at any Board meeting subjects that are not on the agenda for that meeting. 

The Board believes that, at the current time, the designation of an independent Chairperson of the Board facilitates the 
functioning of the Board, while leaving the CEO with the responsibility for setting the strategic direction for the Company 
and for the day-to-day leadership and performance of the Company.  The independent Chairperson of the Board: 

•  Presides at all meetings of the stockholders and the Board at which he or she is present; 

• 

Establishes the agenda for each Board and stockholder meeting;  

•  Calls and prepares the agenda for and presides over executive sessions of the independent directors;  

•  Acts as a liaison between the independent directors and the Company’s management; and 

•  Performs such other powers and duties as may from time to time be assigned by the Board or as may be 

prescribed by the Company’s Bylaws.  

Board Meetings 

In 2023, each incumbent director attended 100% of the aggregate of the total number of Board meetings and the total 
number of meetings of Board committees on which such director served during the time such director served on the 
Board.  Although the Company does not currently have a formal policy regarding the attendance of directors at the 
Annual Meeting of Stockholders, directors are encouraged to attend.  All members of the Board who stood for reelection 
at the Company’s 2023 Annual Meeting of Stockholders attended the Annual Meeting. 

In 2023, the Board held a total of five Board meetings.  On four occasions during 2023, the Board met in executive 
session in which only the independent Board members were present. 

The Board makes an annual determination as to the independence of each of our Board members under the current 
standards  for  “independence”  established  by  the  NYSE  and  the  SEC.    The  Board  has  determined  that  the  following 
nominees  for  election  as  directors  to  our  Board  are  independent  under  the  NYSE  Listing  Rules  and  SEC  rules:  Leo 
Berlinghieri, Stephen D. Kelley, Susan D. Lynch, David B. Miller, Christopher A. Seams, May Su, and Christine A. Tsingos.  
Michael P. Plisinski, due to his position as our CEO, is not considered to be independent.  Ms. Rogge, who will not stand 
for re-election in 2024, was also determined by the Board to be independent under applicable NYSE and SEC rules.   

During  2023,  none  of  the  independent  members  of  our  Board  was  a  party  to  any  transactions,  relationships,  or 
arrangements that were considered by the Board to impair his or her independence.  

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Oversight Of Risk 

One  of  the  Board’s  primary  responsibilities  is  reviewing  the  Company’s  strategic  plans  and  objectives,  including 
oversight  of  the principal  risk  exposures  of  the  Company.    In  particular,  the  Board  is  responsible  for  monitoring  and 
assessing strategic risk exposure, including determining the nature and level of risk appropriate for the Company. The 
Board  does  not  have  a  standing  risk  management  committee,  but  rather  administers  this  oversight  function  directly 
through the Board as a whole, as well as through the standing Board committees, which address risks inherent in their 
respective areas of oversight.  

The Audit Committee assists the Board in oversight and monitoring of the financial and legal risks facing the Company, 
management’s approach to addressing these risks and strategies for risk mitigation.  On at least an annual basis, the 
Audit  Committee  reviews,  and  discusses  with  management,  policies  and  systems  pursuant  to  which  management 
addresses  risk,  including  risks  associated  with  our  audit,  financial  reporting,  internal  control,  disclosure  control, 
regulatory  compliance,  and  investment  policies.    Our  Audit  Committee  is  also  tasked  with  overseeing  risks  from 
cybersecurity threats.  Members of the Audit Committee receive updates on cybersecurity matters on a quarterly basis 
from  one  or  more  representatives  from  the  Company’s  Cyber  Security  Council  (“CSC”),  which  is  composed  of  our 
business unit general managers, other members of senior management, our Vice President of IT, and our IT Security 
Manager,  and  provides  executive  level  supervision  of  cybersecurity  risks.    These  updates  include  a  discussion  of 
existing and new cybersecurity risks (if any), updates on how management is addressing and/or mitigating those risks, 
and the status of information security initiatives. 

Our Nominating & Governance Committee oversees risks related to governance issues, such as succession planning.  It 
also monitors and oversees legal compliance and compliance with the Company’s Code of Business Conduct and Ethics, 
including the investigation and enforcement of the provisions of the Code of Business Conduct and Ethics.  In addition, 
our  Compensation  Committee,  at  least  annually,  reviews  our  compensation  program  to  ensure  that  it  does  not 
encourage  excessive  risk-taking.    Each  of  our  Committees  regularly  reviews  with  our  Board  any  issues  that  arise  in 
connection with risk matters within the scope of its responsibilities and, in accordance with our Corporate Governance 
Guidelines, our full Board regularly engages in discussions of risk management to assess major risks facing our Company 
and review options for the mitigation of such risks.  As a result of the foregoing, we believe that our CEO, together with 
the Chairpersons of our Audit, Compensation and Nominating & Governance Committees and our full Board, provide 
effective oversight of Company risk. 

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Board Committees 

The  Board  has  four  standing  committees  with  separate  chairpersons:  the  Audit,  Compensation,  Nominating  & 
Governance, and M&A Committees.  Each of the Board committees is composed solely of independent directors and 
has  adopted  a  written  charter  that  sets  forth  the  specific  responsibilities  and  qualifications  for  membership  on  the 
committee.  The charters of these committees are available on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

In 2023, the composition of and number of meetings held by the Company’s Board committees were as follows: 

Committee Chairperson 

Committee Members 

Number of Meetings 
Held in 2023 

Christine A. Tsingos 

Leo Berlinghieri (1) 

Audit Committee 

Stephen D. Kelley (2) 

Karen M. Rogge 

May Su (3) 

Nominating & Governance Committee 

Leo Berlinghieri 

David B. Miller 

May Su (5) 

Christopher A. Seams 

May Su (1) 

Compensation Committee 

Leo Berlinghieri (3) 

David B. Miller (4) 

Stephen D. Kelley (1) 

Christine A. Tsingos 

M&A Committee 

David B. Miller 

Karen M. Rogge 

Christopher A. Seams 

(1)  Committee member effective as of May 2023. 

(2)  Committee member effective as of January 2023. 

(3)  Committee member until May 2023. 

9 

4 

5 

5 

(4)  Committee chairperson until May 2023, after which Mr. Miller continued serving as a committee 

member. 

(5)  Committee chairperson effective as of May 2023. 

PROXY STATEMENT 

16 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
  
 
Audit Committee 

The current members of the Audit Committee are Leo Berlinghieri, Stephen D. Kelley, Susan D. Lynch, Karen M. Rogge, 
and Christine A. Tsingos, who also serves as the chairperson of the committee.  As previously disclosed, Ms. Rogge will 
be retiring from the Board and the Audit Committee as of the Annual Meeting.  The Audit Committee assists the Board 
in fulfilling its responsibilities for general oversight of the integrity of our financial statements, our accounting policies 
and procedures and our compliance with legal and regulatory requirements.  Among its functions, the Audit Committee 
is responsible for: 

•  The  appointment,  compensation,  performance  evaluation,  retention,  and  oversight  of  the  Company’s 

independent registered public accounting firm; 

•  The approval of services performed by the Company’s independent registered public accounting firm; 

•  Reviewing the responsibilities, functions, and performance of the Company’s internal audit function; 

•  Reviewing  the  scope  and  results  of  internal  audits  and  ongoing  assessments  of  the  Company’s  risk 

management processes and system of internal control; 

•  Reviewing and approving in advance any related party transactions; and 

• 

Evaluating the Company’s system of internal control over financial reporting and disclosure controls and 
procedures.  

The report of our Audit Committee is found below under the caption “Audit Committee Report.” 

The  Board  has  determined  that  each  of  the  Audit  Committee  members  meets  the  Audit  Committee  membership 
requirements  set  forth  by  the  NYSE  and  the  SEC,  including  that  they  be  “independent”  and  financially  literate.  
Furthermore, the Board has determined that Ms. Tsingos, Ms. Rogge, and Ms. Lynch each qualify as an “Audit Committee 
Financial  Expert”  as  that  term  is  defined  under  SEC  rules  and  have  “accounting  or  related  financial  management 
expertise” as contemplated by NYSE rules.  

Compensation Committee 

The current members of the Compensation Committee are Stephen D. Kelley, David B. Miller, Christine A. Tsingos, and 
May Su, who also serves as chairperson of the committee.  The Compensation Committee is responsible for, among 
other things: 

•  Reviewing and approving the compensation of the Company’s officers;  

•  Reviewing and recommending to the Board for approval the compensation policy for the Company’s non-

employee directors; and  

•  Administering the Company’s equity compensation plans. 

With  respect  to  the  compensation  of  the  Company’s  CEO,  the  Compensation  Committee  reviews  and  approves  the 
various elements of the CEO’s compensation.  With respect to other officers, including each of our named executive 
officers  (“NEOs”),  the  Compensation  Committee  reviews  the  compensation  for  such  individuals  presented  to  the 
Compensation  Committee  by  the  CEO  and  the  reasons  therefor  and,  in  its  discretion,  may  approve  or  modify  the 
compensation packages for such individuals.  The Compensation Committee has delegated to the Company’s CEO the 
authority,  within  certain  parameters,  to  approve  the  grant  of  restricted  stock  units  (“RSUs”)  to  employees  and 
consultants who are not directors, executive officers, or officers reporting to the CEO. 

In accordance with its charter, the Compensation Committee may form, and delegate its authority to, subcommittees 
when  appropriate.    Further,  the  Compensation  Committee  has  the  authority  to  retain  independent  compensation 
consultants and to obtain advice from internal or external legal, accounting, and other advisors to assist in the evaluation 
of  director,  officer,  or  employee  compensation  or  other  matters  within  the  scope  of  the  Compensation  Committee’s 
responsibilities and is directly responsible for the appointment, compensation, and oversight of such consultants and 
other outside advisors, including their fees and other retention terms.  From time to time, the Compensation Committee 
engages  the  services  of  such  independent  compensation  consultants  to  provide  advice  on  compensation  plans  and 

PROXY STATEMENT 

17 

 
 
 
 
 
issues related to the Company’s executive officer and non-executive officer employees.  In 2023, the Compensation 
Committee engaged Compensia, Inc. (“Compensia”) to provide such assistance to the Compensation Committee.  

Each current member of our Compensation Committee is a “non-employee” director within the meaning of Rule 16b-3 
under the Exchange Act.  The Board has determined that each of the Compensation Committee members meets the 
Compensation  Committee  membership  requirements  set  forth  by  the  NYSE  and  the  SEC,  including  that  they  be 
“independent.” 

For  further  discussion  of  the  Compensation  Committee  and  its  processes  and  procedures,  please  refer  to  the 
“Compensation Program Objectives, Design, and Practices” section in the Compensation Discussion and Analysis below.  
The  Compensation  Committee  Report  is  included  under  the  caption  “Compensation  Committee  Report  on  Executive 
Officer Compensation” in this proxy statement. 

Nominating & Governance Committee 

The current members of the Nominating & Governance Committee are David B. Miller, Christopher A. Seams, May Su, 
and  Leo  Berlinghieri,  who  also  serves  as  chairperson  of  the  committee. 
  The  responsibilities  of  the 
Nominating & Governance Committee include: 

• 

Identifying prospective director nominees and recommending to the Board director nominees for the next 
Annual Meeting of Stockholders and replacements of a director in the event of a vacancy on the Board; 

•  Recommending to the Board the appointment of directors to Board committees; 

•  Developing and recommending to the Board, and monitoring compliance with, the corporate governance 

guidelines applicable to the Company; 

•  Managing the CEO selection process; 

•  Overseeing evaluation of Company management; and  

•  Conducting an annual review of management succession planning. 

The  Nominating  &  Governance  Committee  also  oversees  the  annual  evaluation  of  the  Board,  the  committees  of  the 
Board and the individual directors.  Among other topics, the evaluation in general assesses: 

• 

For both the Board and the committees: 

ο  Their structure and composition; 

ο  The format and content of meetings; and 

ο  The effectiveness of the Board and the committees, as applicable. 

• 

For each individual director: 

ο  Their performance and approach to their directorship; 

ο  Their understanding of their role as a director; 

ο  Their understanding of critical aspects of the Company’s business, products and strategy; and 

ο  Their skills, experience and ongoing training. 

The goal of the evaluation is to identify and address any performance issues at the Board, committee or individual level, 
should  they  exist,  identify  potential  gaps  in  the  boardroom  and  to  assure  the  maintenance  of  an  appropriate  mix  of 
director skills and qualifications.  Upon completion of the evaluation, the Nominating & Governance Committee provides 
feedback to the Board, the committees and the individual directors regarding the results of the evaluation and raises 
any  issues  that  have  been  identified  which  may  need  to  be  addressed.    In  2023,  the  Nominating  &  Governance 
Committee  engaged  Spencer  Stuart,  an  executive  search  and  leadership  consulting  firm,  to  assist  with  the  Board 
evaluation. 

The  Nominating  &  Governance  Committee  utilizes  a  variety  of  methods  for  identifying  and  evaluating  potential 
candidates  for  joining  the  Board.    For  2023,  the  Nominating  &  Governance  Committee  engaged  ON  Partners,  an 

PROXY STATEMENT 

18 

 
 
 
 
 
executive search and leadership consulting firm, to assist with this process.  The Nominating & Governance Committee’s 
general policy is to assess the appropriate size and needs of the Board and whether any vacancies are expected due 
to  retirement  or  otherwise.    In  addition,  candidates  for  director  are  typically  reviewed  in  the  context  of  the  current 
composition of the Board, the operating requirements of the Company, the current needs of the Board, and the long-
term interests of stockholders, with the goal of maintaining a balance of knowledge, experience and capability.  In the 
event  those  vacancies  are  anticipated,  or  otherwise  arise,  the  Nominating  &  Governance  Committee  will  consider 
recommending various potential candidates to fill such vacancies.  Candidates may also come to the attention of the 
Nominating & Governance Committee through its current members, stockholders or other persons. 

The Board has determined that each of the Nominating & Governance Committee members meets the Nominating & 
Governance Committee membership requirements, including the independence requirements of the NYSE and the SEC. 

M&A Committee 

The current members of the M&A Committee are Susan D. Lynch, Karen M. Rogge, Christopher A. Seams, and David B. 
Miller, who also serves as chairperson of the committee.  As previously disclosed, Ms. Rogge will be retiring from the 
Board and the M&A Committee as of the Annual Meeting.  The Board established the M&A Committee as a standing 
committee in May 2022 to assist the Board in evaluating potential acquisitions, investments, mergers, divestitures, and 
similar  strategic  transactions  and  to  oversee  management’s  execution  of  such  strategic  transactions.    The  M&A 
Committee’s responsibilities include: 

•  Reviewing  and  assessing  strategic  transactions  identified  by  management,  including  the  valuation, 

strategic rationale and integration strategy for any proposed transaction; 

•  Approving non-binding term sheets, letters of intent, indications of interest, and other similar documents 

for strategic transactions; 

•  Overseeing the diligence processes for strategic transactions; and 

•  Providing  guidance  to  management  as  to  the  desired  methodology  and  processes  for  identification, 

development, and presentation of strategic opportunities. 

Our  Board  may  from  time  to  time  establish  other  special  or  standing  committees  to  facilitate  the  oversight  of 
management of the Company or to discharge specific duties delegated to the committee by the full Board. 

Other Committees 

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Compensation Committee Interlocks And Insider Participation 

During fiscal year 2023, Leo Berlinghieri, Stephen D. Kelley, David B. Miller, May Su, and Christine A. Tsingos were each 
a  member  of  the  Compensation  Committee.    Mr.  Berlinghieri  ceased  serving  on  the  committee  as  of  May  2023.  No 
member of our Compensation Committee was at any time during fiscal year 2023, or formerly, an officer or employee 
of  Onto  Innovation  or  any  subsidiary  of  Onto  Innovation.    No  member  of  our  Compensation  Committee  had  any 
relationship with the Company during fiscal year 2023 requiring disclosure under Item 404 of Regulation S-K under the 
Exchange Act.  During fiscal year 2023, none of our executive officers served as a member of the Board of Directors or 
Compensation  Committee  (or  other  committee  serving  an  equivalent  function)  of  any  entity  that  had  one  or  more 
executive officers serving as a member of our Board of Directors or Compensation Committee. 

Board Membership Criteria And Nominee Identification 

The Nominating & Governance Committee of the Board determines the required selection criteria and qualifications of 
director nominees based upon the needs of the Company at the time nominees are considered.  While the Nominating 
&  Governance  Committee  has  no  specific  minimum  qualifications  for  director  candidates,  persons  considered  for 
nomination  to  the  Board  must  demonstrate  the  following  qualifications  to  be  recommended  by  the  Nominating  & 
Governance Committee for election: 

•  The candidate must exhibit proven leadership capabilities, high integrity, and experience with a high level 

of responsibilities within his or her chosen field; 

•  The candidate must possess the ability to apply good business judgment and be of sound mind and high 

moral character; 

•  The candidate must have no personal or financial interest that would conflict or appear to conflict with the 

interests of the Company; 

•  The candidate must be in a position to properly exercise his or her duties of loyalty and care and be willing 

and able to commit the necessary time for Board and committee service; and 

•  The  candidate  must  have  the  ability  to  grasp  complex  principles  of  business,  finance,  international 
transactions and semiconductor inspection, metrology, lithography, and related software technologies. 

The Nominating & Governance Committee retains the right to modify these qualifications from time to time. 

In selecting director nominees, the Nominating & Governance Committee considers, among other factors: 

•  The competencies and skills that the candidate possesses and the candidate’s areas of qualification and 
expertise  that  would  enhance  the  composition  of  the  Board  and  further  its  ability  to  offer  advice  and 
guidance to management; 

•  How  the  candidate  would  contribute  to  the  Board’s  overall  balance  of  expertise,  perspectives, 

backgrounds, and experiences in substantive matters pertaining to the Company’s business; and 

•  The candidate’s demonstrated excellence in his or her field and commitment to rigorously representing the 

long-term interests of the Company’s stockholders. 

When current Board members are considered for nomination for reelection, the Nominating & Governance Committee 
also takes into consideration their prior contributions to and performance on the Board and their record of attendance. 

The  Nominating  &  Governance  Committee  considers  the  above  criteria  for  nominees  identified  by  the  Nominating  & 
Governance Committee itself, by stockholders, or through other sources.  The Nominating & Governance Committee 
uses the same criteria for evaluating all nominees, regardless of the original source of nomination.  The Nominating & 
Governance Committee may use the services of a third-party search firm to assist in the identification or evaluation of 
Board member candidates. 

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Consideration Of Director Nominees 

The  Nominating  &  Governance  Committee  has  a  formal  policy  with  regard  to  consideration  of  director  candidates 
recommended  by  the  Company’s  stockholders,  which  is  contained  within  the  Company’s  Director  Candidate  Policy, 
which may be found on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

In  accordance  with  this  policy,  the  Nominating  &  Governance  Committee  will  consider  recommendations  and 
nominations for director candidates from stockholders holding no less than 1% of the Company’s securities for at least 
12  months  prior  to  the  date  of  the  submission  of  the  recommendation  or  nomination.    Stockholders  wishing  to 
recommend  persons  for  consideration  by  the  Nominating  &  Governance  Committee  as  nominees  for  election  to  the 
Company’s Board can do so by writing to the Office of the General Counsel of the Company at its principal executive 
offices giving: 

•  The candidate’s name, age, business address and residence address; 

•  The  candidate’s  detailed  biographical  data  and  qualifications  including  principal  occupation  and 

employment history; 

•  The class and number of shares of the Company which are beneficially owned by the candidate; 

•  The candidate’s written consent to being named as a nominee and to serving as a director, if elected; 

• 

Information regarding any relationship between the candidate and the Company in the last three years; 

•  Any other information relating to the candidate that is required by law to be disclosed in solicitations of 

proxies for election of directors; 

•  The name and address of the recommending or nominating stockholder; 

•  The class and number of shares of the Company which are beneficially owned by the recommending or 

nominating stockholder; and 

•  A description of all arrangements or understandings between such stockholder and each nominee and any 

other person or persons (naming such person or persons) relating to the nomination. 

Stockholders also have the right to directly nominate director candidates, without any action or recommendation on 
the part of the Nominating & Governance Committee or the Board, by following the procedures set forth in Section 2.5 
of the Company’s Bylaws. 

Corporate Governance Guidelines 

Our Board has adopted Corporate Governance Guidelines, which, along with the Company’s Charter and Bylaws and 
the Board committee charters, provide the framework for the governance of Onto Innovation.  The Board follows the 
procedures  and  standards  in  the  Corporate  Governance  Guidelines  to  fulfill  its  responsibilities  and  discharge  its 
governance duties.  A copy of the Corporate Governance Guidelines is available on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

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Codes Of Ethics 

We have adopted a Code of Business Conduct and Ethics (applicable to all directors, officers, employees, consultants, 
and contractors) and a Financial Information Integrity Policy (applicable to our senior financial officers, including our 
CEO and Chief Financial Officer (“CFO”) and Controller) that each set forth principles of ethical and legally compliant 
conduct and establish procedures for reporting any violations.  Copies of the Code of Business Conduct and Ethics and 
the Financial Information Integrity Policy may be found on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

or may be requested (without charge) by writing to: 

Onto Innovation Inc. 
Attention: Investor Relations 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

The Company will post on its website any amendment or waiver of a provision of our Code of Business Conduct and 
Ethics as may be required, and within the time period specified, by applicable SEC rules. 

Corporate Social Responsibility 

An  important  part  of  advancing  the  semiconductor  industry  through  our  innovation  is  being  a  socially  responsible 
company.  Our Company’s core values of Passion, Integrity, Collaboration, and Results underpin our commitments to 
sustainable growth and to making a positive contribution to people and the planet.  We strive to achieve responsible 
and sustainable business practices and continuous improvement in our own operations, in our partnerships with our 
customers,  across  our  supply  chain,  and  in  our  engagements  with  our  other  stakeholders.    Our  Company  invests  in 
environmental,  social,  and  governance  (“ESG”)  initiatives  across  our  business  and  integrates  ESG  principles  into  our 
day-to-day operations.  

Business and Governance. Our Company has established a cross-functional ESG executive leadership team that is 
responsible  for  proposing  goals,  developing  and  executing  strategy,  and  embedding  ESG  into  our  operations 
management.    This  ESG  leadership  team  provides  regular  updates  to  the  Board  and  engages  them  to  discuss  ESG 
strategy,  gain  alignment  on  goals,  and  report  on  progress.    Our  Board  is  actively  engaged  in  the  Company’s  ESG 
oversight  and  has  the  primary  responsibility  for our  ESG  priorities.    Board  committees  provide  further  guidance  and 
oversight  on  relevant  ESG  topics  including  the  Compensation  Committee  on  human  capital  management,  the  Audit 
Committee on information security and the Nominating & Governance Committee on ethics compliance.   

Workplace. As described in the “Social Programs” section in our 2022 ESG Report, our Company strives to provide a 
work environment that fosters inclusion and diversity, ensures every voice is heard, and enables employees to achieve 
their  full  potential.    Our  Company  aims  to  maintain  a  collaborative,  supportive,  and  opportunity-rich  culture  that 
enhances innovation and employee engagement.  We strive to protect the health and safety of our personnel throughout 
our entire operation, including our offices, manufacturing sites, research and development (“R&D”) centers, and our field 
team working at customer sites.  

Community. Our Company believes that positively involving our employees and giving back to our community is central 
to our culture and an expression of our core values.  In 2021, the Company initiated RISE (Reimagining Initiatives for 
Society  and  the  Environment)  Teams,  which  have  direct  oversight  from  the  ESG  leadership  team.    These  teams  are 
formed  at  each  location  globally  in  order  to  promote  environmental  sustainability,  community  engagements,  local 
charitable  giving  including  employee  volunteer  hours  and  employee  donations.    Our  RISE  Teams’  philanthropy  and 
volunteerism programs provide financial and human services to improve the quality of life in the communities in which 
we operate.  We are committed to creating positive impacts in communities around the world by contributing to local, 
national,  and  international  organizations  that  support  community  needs  such  as  hunger,  food  and  water  security, 
disadvantaged children and senior citizens, health improvement, and environmental protection.  

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Sustainable  Operations.  We  believe  that  incorporating  environmental  sustainability  into  business  leads  to  better 
products, more efficient operations, and added value for our customers.  As the world tackles climate change and other 
critical environmental issues, we seek to do our part by responsibly managing our impact with global goals for renewable 
energy use, carbon footprint per person, water conservation, beneficial use, and landfill hazardous waste reduction and 
elimination.  We carefully monitor and manage our environmental impact across our business and work to implement 
cost-effective best practices, focusing our efforts where we believe we can have the biggest long-term impact.  Our 
Company  looks  at  impacts  from  procurement  to  manufacturing,  during  R&D  and  product  design,  and  throughout  a 
product’s lifecycle.  We carefully manage our environmental impact, set goals, and report progress annually through our 
annual ESG report, which is carefully reviewed and verified by our internal audit function.  

Products  and  Customers.  Our  Company  demands  excellence  in  our  quality  and  environmental  performance,  as 
demonstrated  through  our  product  and  process  qualification  commitments,  which  resulted  in  our  ISO  9001  Quality 
Management certification.  We continuously strive to develop innovative products and solutions that help our customers 
improve  their  product  yields  and  reduce  the  amount  of  scrapped  materials.    We  seek  to  achieve  this  through  our 
monitoring  processes  and  by  alerting  customers  via  our  software  products  before  specification  limits  are  reached, 
thereby helping customers avoid product test failures.  In addition, our equipment meets or exceeds safety requirements 
and incorporates higher throughput to reduce the energy required to process customer products on a per unit basis, 
benefiting  our  customers  and  the  environment.    Our  Company  also  strives  to  extend  the  life  of  our  products  and 
solutions  to  enable  our  customers  to  realize  greater  value  from  our  products  with  a  potentially  lower  environmental 
impact.  

Responsible Supply Chain. Our Company understands the importance of an ethical, responsible, resilient, and diverse 
supply  chain,  and  we  engage  with  our  suppliers  to  address  a  wide  range  of  issues  including  human  rights,  humane 
treatment, freely chosen employment, labor, anti-corruption, supplier diversity, environmental impact, and responsible 
mineral sourcing.  We are a strong proponent of supply-chain-related industry standards and endeavor to uphold the 
guidelines published by the Responsible Business Alliance (“RBA”).  Since joining in 2021, the Company has been an 
affiliate member of the RBA, the world’s largest industry coalition dedicated to corporate responsibility in global supply 
chains.  Beginning in 2022, our direct suppliers are expected to adhere to our Global Supplier Code of Conduct, which 
incorporates the RBA code of conduct and covers topics such as ethics, integrity, transparency, anti-corruption, conflict 
minerals, human trafficking, environmental sustainability, and social responsibility.  Acknowledgment of and consent to 
adhere to our Global Supplier Code of Conduct is a mandatory requirement of our new supplier onboarding process.  

For more information about our ESG efforts, please refer to our Annual ESG Report available in the Company section of 
our  website  at  https://ontoinnovation.com/company/environmental-social-governance.    Our  ESG  Report  shall  not  be 
deemed “filed” with the SEC for purposes of federal securities law, and it shall not be incorporated by reference into 
any  of  the  Company’s  current,  past  or  future  SEC  filings  unless  specifically  noted  in  such  filing.    The  information 
contained on our website is not part of this document and the ESG report shall not be deemed soliciting material. 

Related Person Transactions Policy 

There have been no “related person transactions” from December 31, 2022 to the date of this proxy statement, nor are 
there any currently proposed “related person transactions,” involving any director, director nominee or executive officer 
of the Company, any known 5% stockholder of the Company or any immediate family member of any of the foregoing 
persons  (which  are  referred  to  together  as  “related  persons”).    A  “related  person  transaction”  generally  means  a 
transaction involving more than $120,000 in which the Company (including any of its subsidiaries) is a participant and 
in  which  one  of  our  executive  officers,  directors,  director  nominees  or  5%  stockholders  (or  their  immediate  family 
members), each of whom we refer to as a related person, has a direct or indirect material interest.  

The  Board  has  adopted  written  policies  and  procedures  addressing  the  Company’s  procedures  with  respect  to  the 
review,  approval  and  ratification  of  “related  person  transactions”  that  are  required  to  be  disclosed  pursuant  to  Item 
404(a) of Regulation S-K.  Our related person practices and policies are designed to ensure that our directors, officers, 
and employees are proactively screened from any conflicts of interests that may interfere with their obligations to the 
Company.  Our policies are included in the Company’s Related Parties Transaction Policy. 

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Pursuant  to  the  Related  Parties  Transaction  Policy,  the  Audit  Committee,  which  consists  entirely  of  independent 
directors,  will  review  any  proposed  transaction  in  which  the  Company  or  its  subsidiaries  are  to  participate  if  the 
aggregate amount involved in the transaction will or may exceed $120,000 and any related person may have a direct 
or indirect material interest in the transaction.  The Audit Committee will consider the facts and circumstances and may 
approve or ratify a proposed transaction if the Audit Committee determines that the transaction is not inconsistent with 
the  interests  of  the  Company  and  its  stockholders.    The  Audit  Committee  may  impose  such  conditions  as  it  deems 
appropriate in connection with its approval. 

Communications With The Board Of Directors 

We have a formal policy regarding communications with the Board, our Stockholder & Interested Party Communications 
Policy, which is found on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

Stockholders  may  communicate  with  the  Board,  the  Audit,  Compensation,  M&A,  or  Nominating  &  Governance 
Committees, or any of the Company’s independent directors by writing to: 

Onto Innovation Inc. 
Office of the General Counsel 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

Such communications will be forwarded to the intended recipient(s) to the extent appropriate.  Prior to forwarding any 
communication, the General Counsel will review it and, in his or her discretion, will not forward a communication 
deemed to be of a commercial nature or otherwise inappropriate. 

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Compensation Of Directors 

Directors who are employees of the Company receive no compensation for their services as members of the Board.  
Director compensation for non-employee members of the Board is a mix of cash and equity-based compensation, which 
is meant to align the interests of our directors with the Company’s long-term performance and stockholder interests.  
The compensation during fiscal 2023 for directors who were not employees of the Company is as follows: 

Board Compensation Element 

Annual Retainer 

Annual Equity Grant (in RSUs) 

Committee Chairperson Stipend 

    Audit 

    Compensation 

    Nominating & Governance 

    M&A 

Committee Member Stipend 

    Audit 

    Compensation 

    Nominating & Governance 

    M&A 

Chairperson Stipend 

Initial Equity Grant (in RSUs) 

Amount/Value   

$70,000 

$180,000 

 (1) 

 (2) 

$25,000 

$20,000 

$10,000 

$5,000 

$10,000 

$7,500 

$5,000 

$2,500 

$50,000 

 (1) 

 (1) 

 (1) 

 (1) 

 (1) 

 (1) 

 (1) 

 (1) 

 (1) 

$180,000 

 (3) 

(1)  Paid subsequent to the director election results at the Annual Meeting of Stockholders. 

(2) Granted on or about the date of the Annual Meeting of Stockholders in a number of shares 
calculated by dividing the listed amount by the closing stock price per share of Common Stock 
of the Company, $0.001 par value per share (“Common Stock”) on the date of grant. 

(3) Granted on or about the date of the first Board meeting following election or appointment, or, 
if such date is not in an open trading window under the Company’s Insider Trading Policy, on 
the first day of the next open trading window, and calculated in the same manner as the annual 
equity grant above but prorated by the number of fiscal quarters between such first meeting 
and the date on which the next annual equity grant is scheduled to be awarded. 

Any  initial  equity grants  and/or  annual  equity  grants  typically  vest  on  the  first  anniversary  of  the grant  date.   Equity 
awards granted to directors are granted under and subject to the terms of the Onto Innovation Inc. 2020 Stock Plan 
(the “2020 Stock Plan”) and the Company’s Stock-Based Award Grant Date Policy. 

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For the fiscal year ended December 30, 2023, the non-employee directors received total compensation indicated in the 
table  below.    There  were  no  option  awards,  non-equity  incentive  plan  compensation,  or  pension  and  nonqualified 
deferred compensation earnings granted to such directors.  They did not earn any type of compensation during the 
year other than what is disclosed in the following table: 

Name 

Fees Earned or 
Paid in Cash 

Stock Awards (1) 

All Other 
Compensation 

Leo Berlinghieri 

Stephen D. Kelley (2) 

David B. Miller 

Karen M. Rogge 

Christopher A. Seams 

May Su 

Christine A. Tsingos 

$90,000 

$87,500 

$87,500 

$82,500 

$127,500 

$95,000 

$102,500 

$187,902 

$228,992 

$187,902 

$187,902 

$187,902 

$187,902 

$187,902 

— 

— 

— 

— 

— 

— 

— 

Total 

$277,902 

$316,492 

$275,402 

$270,402 

$315,402 

$282,902 

$290,402 

(1)  Represents the grant date fair value for each share-based compensation award granted during the year, calculated 
in accordance with FASB ASC Topic 718.  The assumptions used in determining the grant date fair value of these 
awards are set forth in Note 10 to our consolidated financial statements, which are included in our Annual Report 
on Form 10-K for the fiscal year ended December 30, 2023 filed with the SEC. As of December 30, 2023, our 
directors had the following stock awards outstanding: Mr. Berlinghieri – 2,200 RSUs; Mr. Kelley - 2,700 RSUs; Mr. 
Miller – 2,200 RSUs; Ms. Rogge – 2,200 RSUs; Mr. Seams – 2,200 RSUs; Ms. Su - 2,200 RSUs; and Ms. Tsingos – 
2,200 RSUs. 

(2) Mr. Kelley joined the Board in January 2023. 

Stock Ownership/Retention Guidelines For Directors 

The  Company  has  established  guidelines  related  to  stock  ownership  and  retention  for  its  non-employee  directors.  
Currently,  the  guidelines  require  that  each  non-employee  director  of  the  Company  maintain  ownership  of  shares  of 
Common  Stock  equal  in  value  to  at  least  three  times  the  amount  of  the  director’s  annual  cash  retainer.    For  a  new 
director, the stock holding requirement must be attained within five years of his or her initial election or appointment to 
the Board. 

Compliance with the Company’s stock ownership and retention guidelines is reviewed annually by the Compensation 
Committee.  As of their last review in February 2024, the Compensation Committee determined that all directors were 
in compliance with the ownership requirements. 

PROXY STATEMENT 

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PROPOSAL 2 

ADVISORY VOTE TO APPROVE NAMED EXECUTIVE OFFICER COMPENSATION 

The  Dodd-Frank  Wall  Street  Reform  and  Consumer  Protection  Act  of  2010,  or  the  Dodd-Frank  Act,  enables  our 
stockholders to vote to approve, on an advisory (non-binding) basis, the compensation of our named executive officers 
as disclosed in this proxy statement in accordance with SEC rules.  Consistent with the recommendation of the Board 
and the preference of our stockholders as reflected in the non-binding advisory vote on the frequency of future advisory 
votes  on  named  executive  officer  compensation  held  at  the  Company’s  2023  Annual  Meeting  of  Stockholders,  the 
Company currently holds an annual “say on pay” vote.  In accordance with this policy, this year we are requesting that 
our stockholders approve an advisory resolution to approve the Company’s named executive officer compensation as 
reported in this proxy statement. 

Our executive officer compensation arrangements are designed, consistent with our compensation philosophy and pay-
for-performance  principles,  to  provide  competitive  compensation  packages  that  enable  the  Company  to  attract  and 
retain talented executive officers, motivate executive officers to achieve the Company’s short- and long-term business 
strategies and objectives, align the interests of executive officers with those of stockholders, and be consistent with 
current market practices and good corporate governance principles.  Please read the Compensation Discussion and 
Analysis beginning on the following page for additional details about our executive officer compensation arrangements, 
including information about the fiscal year 2023 compensation of our named executive officers. 

We are asking our stockholders to indicate their support for our compensation arrangements as described in this proxy 
statement. 

For the reasons discussed above, the Board recommends that stockholders vote in favor of the following resolution: 

“RESOLVED, that the Company’s stockholders APPROVE, on an advisory basis, the compensation paid 
to  the  Company’s  named  executive  officers,  as  disclosed  in  the  proxy  statement  for  this  meeting 
pursuant  to  Item  402  of  Regulation  S-K,  including  the  Compensation  Discussion  and  Analysis, 
compensation tables and narrative discussion and other related tables and disclosures.” 

Because your vote is advisory, it will not be binding upon or overrule any decisions of the Board, nor will it create any 
additional fiduciary duty on the part of the Board.  This advisory vote is not intended to address any specific item of 
compensation, but rather the overall compensation of our named executive officers and our compensation philosophy, 
policies,  and  practices  described  in  this  proxy  statement,  and  does  not  seek  to  have  the  Board  or  Compensation 
Committee take any specific action.  However, the Board and the Compensation Committee value the views expressed 
by our stockholders in their vote on this proposal and will take into account the outcome of the vote when considering 
executive officer compensation matters in the future. 

Vote Required 

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled 
to  vote  will  be  required  to  approve,  on  an  advisory  (non-binding)  basis,  the  compensation  of  our  named  executive 
officers as disclosed in this proxy statement. 

The Board recommends a vote “FOR” the approval,  
on an advisory basis, of the compensation of the named executive officers  
as disclosed in this proxy statement pursuant to Item 402 of Regulation S-K. 

PROXY STATEMENT 

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EXECUTIVE OFFICER COMPENSATION 

COMPENSATION DISCUSSION AND ANALYSIS 

Introduction 

This  Compensation  Discussion  and  Analysis  (“CD&A”)  describes  our  compensation  philosophy,  process,  plans,  and 
practices for our executive officers and contains a discussion of the material elements of compensation awarded to, 
earned by, or paid to the Company’s named executive officers or “NEOs.”  The Company’s NEOs for 2023 were: 

Onto Innovation’s Named Executive Officers (NEOs) 

NEO Name 

Position 

Michael P. Plisinski 

Chief Executive Officer 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

Chief Financial Officer 

Vice President, General Counsel, and Corporate Secretary 

Senior Vice President, Customer Success 

Chief Operating Officer 

EXECUTIVE SUMMARY 

2023 Financial Highlights 

In 2023, the Company achieved important financial accomplishments.  These include, but are not limited to: 

•  Revenue from specialty and advanced packaging markets grew 14% over 2022. 

•  Cash generated from operations of $172 million improved by 26% over 2022. 

•  Full year GAAP diluted earnings per share of $2.46. 

The following reflects our revenue and stock price in fiscal 2023 as compared to fiscal 2022 and 2021: 

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2023 Compensation Highlights 

Executive compensation is a key component of our corporate governance practices and our plans to drive long-term 
profitable growth.  We’ve designed our compensation program to both attract and retain best-in-class executive 
management and to motivate our executive officers to achieve corporate objectives and create value for 
stockholders.  In 2023, key features of our compensation program included the following: 

•  Competitive base salary increases: base salaries for executive officers were set based on several factors, 
including  executive  officers’  unique  qualifications,  role, and  responsibilities,  individual  performance,  and 
measurable contribution to the Company’s profitability and success. 

•  Rigorous annual incentive goals: executive officer cash incentive compensation is tied to overall corporate 
performance, achievement of individual performance goals, and, for those executive officers associated 
with a particular business unit, to individual business unit performance as well. 

•  An  emphasis  on  performance-based  long-term  incentives:  a  substantial  portion  of  executive  officer 
compensation is in the form of long-term equity incentives that incentivize both long-term service at the 
Company and creating shareholder value. 

Results Of The 2023 Stockholder Vote On Executive Officer Compensation 

In  2023,  stockholders  were  provided  with  the  opportunity  to  cast  an  advisory  (non-binding)  vote  (a  “say-on-pay” 
proposal) on the compensation of our NEOs for fiscal 2022.  Our stockholders approved this say-on-pay proposal, with 
96.2% of votes cast voting in favor of our executive compensation program.  Our Compensation Committee and Board 
recognize the fundamental interest our stockholders have in the compensation of our executive officers.  Noting the 
strong support for our 2022 compensation program, the Compensation Committee maintained a consistent approach 
to our executive officer compensation program in 2023. 

The Compensation Committee will continue to consider input from our stockholders as reflected in the outcome of our 
annual say-on-pay vote when making executive compensation program decisions. 

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COMPENSATION PROGRAM OBJECTIVES, DESIGN, AND PRACTICES 

Our Compensation Philosophy And Principles 

Our  compensation  philosophy,  which  serves  as  the  framework  for  the  Company’s  executive  officer  compensation 
program, is defined by two key tenets: (1) rewarding continuous improvement in financial and operating results and (2) 
creation of stockholder value.  The Compensation Committee acts on behalf of the Board and, by extension, on behalf 
of  our  stockholders,  to  establish,  implement,  and  continually  monitor  adherence  to  our  compensation  philosophy.  
Accordingly, the Compensation Committee has developed a set of core objectives and principles that it has used to 
develop the executive officer compensation program.  The specific objectives of our executive officer compensation 
program are to: 

• 

attract and retain executive officer talent; 

•  motivate  executive  officers  to  achieve  the  Company’s  short-  and  long-term  business  strategies  and 

objectives; and 

• 

align the interests of executive officers with those of stockholders. 

Consistent  with  the  foregoing,  the  Compensation  Committee  believes  that  the  most  effective  executive  officer 
compensation program is one that rewards the achievement of specific strategic and operating goals of the Company 
on both an annual and a long-term basis, and that incentivizes executive officers to create value for stockholders.  The 
Compensation Committee  evaluates  both  performance and  compensation  to  ensure  that  the  Company  maintains  its 
ability to attract and retain superior employees in key positions.  Based on that evaluation, the Compensation Committee 
designs the compensation provided to executive officers to remain competitive with the compensation paid to similarly 
situated  executive  officers  at  peer  group  companies.    The  Compensation  Committee  believes  executive  officer 
compensation packages provided by the Company to its executive officers, including the NEOs, should include base 
salary,  annual  cash  incentive  opportunities,  and  long-term  stock-based  compensation,  including  equity  incentive 
opportunities that reward performance as measured against pre-established goals. 

The following principles support the objectives and design of the compensation program: 

•  The  compensation  program  is  designed  to  be  fair  and  competitive,  from  an  internal  and  external 
perspective,  taking  into  account  each  executive  officer’s  unique  qualifications,  role,  responsibilities, 
individual performance, and measurable contribution to the Company’s profitability. 

•  A  substantial  portion  of  an  executive  officer’s  compensation  is  designed  to  be  at  risk  and  linked  to  the 
achievement  of  both  corporate  and  individual  financial,  management  or  other  performance  goals  and 
changes in stockholder value. 

•  All  compensation  program  elements  taken  as  a  whole  are  designed  to  help  focus  executive  officers  on 
achieving the Company’s financial and strategic goals while supporting our culture and core values. 

To underscore the importance of “pay-for-performance” in our compensation philosophy, the Compensation Committee 
has developed incentive arrangements based on performance standards that the Compensation Committee believes, 
at target achievement, will incentivize our executive officers to meet or exceed industry performance. 

The Company also strives to promote an ownership mentality among its key leadership, in part through the guidelines 
described  below  under  the  heading  “Stock  Ownership/Retention  Guidelines.”    To  that  end,  the  CEO  is  required  to 
maintain ownership of Common Stock equal in value to at least three times the CEO’s year-end base salary.  The other 
executive officers are required to maintain a minimum share ownership level equal in value to their current year-end 
base salary.  In further support of this approach, the Company prohibits pledges of Company securities as collateral, as 
well as short sales, derivative and hedging transactions involving Company securities, to ensure that personal interests 
relating to the stock holdings of officers and directors do not conflict with their duties to the Company. 

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Our Compensation Practices 

The  Compensation  Committee  has  adopted  the  following  practices  and  policies  with  respect  to  the  Company’s 
executive officer compensation program: 

What We Do 

Committee 
Independence 

The Compensation Committee consists of independent directors and regularly reserves 
time at its meetings to meet in executive session without management present. 

Independent 
Compensation 
Consultant 

The Compensation Committee has engaged its own independent compensation consultant 
and annually assesses the consultant’s performance, independence, and whether any 
potential conflicts of interest exist. 

Independent Legal 
Advisor 

The Compensation Committee may engage its own independent legal advisor specializing 
in corporate compensation issues, as necessary. 

CEO Goal Setting 
and Performance 
Evaluation 

Peer Group 

The Compensation Committee, with the input of the full Board, engages in formal goal 
setting and performance evaluation processes with the CEO. 

The Compensation Committee selects a set of peer group companies who operate in similar 
markets to the Company's, and have comparable revenue and market caps, to use as a 
competitive reference point with respect to executive officer and director compensation, 
program design and practices. 

Stock Ownership 
Guidelines 

The Company maintains rigorous stock ownership guidelines, which apply to executive 
officers and directors, and serve as a risk-mitigating feature within our compensation 
structure. 

Double Trigger 
Change-in-Control 

The Company has entered into agreements with executive officers, including the CEO, that 
contain change-in-control severance protection.  Executive officers are entitled to 
severance in the event of both a change in control of the Company and a qualifying 
termination of employment (“double trigger”). 

Clawback Policy 

The Company has adopted a policy that provides for mandatory recoupment of certain 
excess incentive compensation that would not have been earned based on the specified 
accounting restatements. 

Grant Date Policy 

The Company does not manipulate the timing of grant dates of any stock-based awards or 
our release of material nonpublic information with the intent of benefitting an award 
recipient, nor do we have any program, plan or practice to do so.  In addition, the Board has 
adopted a specific written policy regarding grant dates of stock-based awards made to our 
directors, officers, and employees. 

What We Do Not Do 

No Pledging, 
Margining, or 
Hedging 

The Company’s insider trading policy prohibits our directors and employees, including 
executive officers, from purchasing Company securities on margin, borrowing against 
Company securities held in a margin account, or pledging Company securities as collateral 
for a loan.  Company directors and employees are also prohibited from engaging in short 
sales, derivative transactions, and hedging transactions involving Company securities. 

No Tax Gross-Ups 
on Perquisites or 
Severance 

PROXY STATEMENT 

The Company does not provide any tax gross-up payments to cover personal income taxes 
on perquisites or severance benefits related to a change in control. 

31 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
COMPENSATION DECISION-MAKING PROCESS 

Determination of Compensation Awards 

The Compensation Committee’s goal is to target elements of compensation within a competitive range, using a balanced 
approach  that  does  not  use  rigid  percentiles  to  target  pay  levels  for  each  compensation  element.    For  2023,  the 
Compensation  Committee  reviewed  each  element  of  compensation  described  below  and  set  the  target  total  direct 
compensation opportunities of our executive officers after taking into consideration the following factors: 

•  Company profitability; 

• 

• 

• 

• 

the executive officer’s unique qualifications; 

the executive officer’s role and responsibilities; 

the executive officer’s individual performance and measurable contribution to the Company’s profitability 
and success; and 

compensation levels of similar positions with comparable companies in the industry.  

The Compensation Committee does not assign relative weights or rankings to any of these factors and does not solely 
use any quantitative formula, target percentile or multiple for establishing compensation among the executive officers 
or in relation to the competitive market data. 

Role of the Compensation Committee 

The  Compensation  Committee  is  charged  with  making  all  final  determinations  regarding  the  compensation  of  our 
executive officers.  In the beginning of each year, the Compensation Committee evaluates the CEO’s performance in 
light of the goals and objectives established at the beginning of the previous fiscal year for measuring his performance.  
The CEO does not participate in the Compensation Committee’s or Board’s deliberations regarding his compensation.  
The  CEO  meets  with  the  Compensation  Committee  to  present  the  proposed  compensation  plans  for  each  of  the 
Company’s executive officers other  than the CEO, including the other NEOs.  Based on these meetings and internal 
deliberations, the Compensation Committee then approves the annual compensation for the Company’s CEO and other 
executive  officers,  including  the  NEOs,  including  base  salary,  cash  incentive  award  opportunity,  and  equity 
compensation. 

In the same time period, the Compensation Committee also reviews and recommends for approval by the Board: 

• 

• 

the Company Compensation Plan for all non-executive employees, including (i) adjustments to base 
compensation and profit-sharing, bonus and other cash incentive plans, and (ii) the annual equity award 
budget; and 

the annual compensation program for non-employee directors. 

In reviewing and setting the annual compensation for each executive officer, the Compensation Committee considers 
the amounts payable under each of the elements of their respective compensation plans, including base salary, annual 
cash incentive awards, and equity grants.  The Compensation Committee takes into consideration both the Company’s 
internal pay equity as well as the competitive environment within which the Company operates.  The Compensation 
Committee then determines whether the base salary and annual and long-term incentive award opportunities for the 
individual executive officers support the Company's compensation objectives and are both competitive and reasonable 
in the context of the Company’s competitive market.  

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32 

 
 
 
 
 
  
 
Role of Management 

With regard to compensation for executive officers other than the CEO, the Compensation Committee seeks input from 
the CEO and the human resources department.  Each year, the CEO is responsible for establishing proposed personal 
and  corporate  objectives  for  the  Company’s  other  executive  officers,  including  the  other  NEOs.    These  objectives, 
subject to the approval of the Compensation Committee, are reviewed and agreed upon by the CEO with the applicable 
executive officer.  In addition, as part of the annual performance review of the Company’s executive officers, the CEO 
assesses the performance of his direct reports and recommends any merit increase to be proposed for each individual.  
These  recommendations  are  compiled  by  the  CEO  into  executive  officer  compensation  plans  which  include  any 
proposed merit increases, each executive officer’s personal and corporate objectives, proposed annual incentive award 
opportunities (expressed as a percentage of their base salary) and equity grant proposals, and are submitted to the 
Compensation Committee for review and consideration for approval.  At the Compensation Committee meeting during 
which  the  executive  officer  compensation  plans  are  reviewed,  the  CEO  attends  the  initial  session  to  present  the 
proposed plans and to answer questions.  Thereafter, the Compensation Committee meets without the CEO present to 
review,  discuss  and  approve  all  executive  officer  compensation  plans,  subject  to  any  modifications  made  by  the 
Compensation Committee. 

Role Of The Compensation Consultant 

The  Compensation  Committee  may  retain  independent  compensation  consultants  to  assist  the  Compensation 
Committee in discharging its duties.  During 2023, the Compensation Committee engaged Compensia, an independent 
executive officer compensation consulting firm, to provide advice on the Company’s executive officer compensation 
arrangements.    Compensia  does  not  provide  any  services  other  than  those  related  to  compensation  consulting  and 
does  not  provide  any  services  to  the  Company's  management.    The  Compensation  Committee  determined  that 
Compensia is independent within the meaning of  the NYSE Listing Rules, and that the work performed by Compensia 
does not raise any conflicts of interest. 

For 2023, the Compensation Committee requested that Compensia: 

• 

• 

• 

evaluate the efficacy of the Company’s existing compensation strategy and practices in supporting and 
reinforcing the Company’s long-term strategic goals; 

assist  in  refining  the  Company’s  compensation  strategy  and  further  implementing  the  executive  officer 
compensation program to execute that strategy; and 

provide market information to assist the Compensation Committee in establishing 2023 executive officer 
compensation. 

PROXY STATEMENT 

33 

 
 
 
 
 
  
 
Peer Companies 

In setting executive officer compensation, the Compensation Committee evaluates compensation levels for executive 
officers at other similarly situated companies.  For 2023, the Compensation Committee engaged Compensia to provide 
peer group data and perform an assessment of compensation levels provided to executive officers.  In addition, the 
Compensation  Committee  obtains  and  evaluates  market  compensation  information  using  third-party  and  internal 
resources.  The Compensation Committee reviews data related to compensation levels and programs of other similar 
companies prior to making its decisions, but only considers such information in a general manner in order to obtain a 
better understanding of the current compensation practices within our industry. 

In the Compensation Committee’s review of executive officer compensation for the 2023 fiscal year, the Compensation 
Committee considered publicly available market data from peer company proxy disclosures and industry compensation 
surveys  for  companies  that  typically  include  similarly  sized  semiconductor  and  semiconductor  capital  equipment 
companies or similar firms for each Company executive officer in a like or similar role.  

In mid-August of 2022, for compensation decisions for the Company’s 2023 fiscal year, Compensia recommended and 
the Compensation Committee approved the Company’s compensation peer group which took into consideration the 
following factors: 

•  Semiconductor capital equipment and other electronics and hardware technology companies; 

•  Revenue between approximately 0.5x and 2x the Company’s revenue run-rate; and 

•  Market cap between approximately 0.3x and 3x the Company’s average market cap. 

The Company’s compensation peer group used to make decisions regarding 2023 compensation consisted of the 
following companies: 

Companies Included in the Company's Compensation Peer Group for 2023 

Advanced Energy Industries Inc. 

Ichor Holdings Ltd. 

Power Integrations, Inc. 

Allegro MicroSystems, Inc. 

Knowles Corporation 

Rambus Incorporated 

Ambarella International LP 

Lattice Semiconductor Corporation 

Semtech Corporation 

Axcelis Technologies, Inc. 

MACOM Technology Solutions 
Holdings, Inc. 

Silicon Laboratories, Inc. 

Cognex Corporation 

MaxLinear, Inc. 

Synaptics Incorporated 

Cohu, Inc. 

Novanta Inc. 

Ultra Clean Holdings, Inc. 

FormFactor, Inc. 

Photronics, Inc. 

Veeco Instruments, Inc. 

The  pay  practices  of  the  foregoing  Company  peer  group  were  analyzed  for  base  salary  and  annual  and  long-term 
incentives.    Periodically,  peer  groups  are  used  to  evaluate  other  programs  such  as  executive  officer  retirement, 
perquisites and severance policies.  Our peer group data is supplemented by broader technology industry data from 
compensation surveys to further facilitate the evaluation of compensation levels and design.  Compensation levels are 
generally developed at the low (25th percentile), middle (50th percentile) and high (75th percentile) end of the market for 
each pay element (base salary and short-term and long-term incentives) and for total compensation. 

While  the  Compensation  Committee  considers  market  data  for  each  pay  element  and  in  total,  the  Compensation 
Committee  does  not  specifically  target  any  particular  market  compensation  level.    Instead,  the  Compensation 
Committee uses its discretion in setting the compensation levels as appropriate. 

PROXY STATEMENT 

34 

 
 
 
 
 
  
 
ELEMENTS OF THE COMPANY’S 2023 COMPENSATION PLAN 

Compensation Program Design 

Our executive officer compensation program, which applies to all executive officers including our NEOs, is composed 
of  three  parts,  each  of  which  is  intended  to  address  different  objectives:  base  salary,  annual  cash  performance 
incentives, and long-term equity incentives. 

Base salaries serve as the foundation of our executive compensation program.  The Compensation Committee uses 
base salary and certain other benefits available to all employees, such as the Onto Innovation Inc. 2020 Employee Stock 
Purchase Plan (“ESPP”), our 401(k) plan with Company matching contributions, and health and welfare benefits, as a 
means for providing base compensation to executive officers commensurate with their knowledge and experience and 
for  fulfilling  their  basic  job  responsibilities.    The  Compensation  Committee  also  derives  the  other  executive 
compensation elements, annual cash incentives and long-term equity incentives, by weighing them against base salary.  
As discussed above, the Compensation Committee generally establishes base salary levels for executive officers at or 
near the start of each year.   

The annual cash incentive component of the Company’s executive officer compensation program rewards executive 
officers for achieving specific corporate, business unit (as applicable) and individual goals.  The Company’s annual cash 
incentive awards are administered through its Management By Objectives (“MBO”) bonus plan.  The MBO bonus plan 
provides  guidelines  for  the  calculation  of  annual  cash  incentive  compensation,  subject  to  the  Compensation 
Committee’s oversight.  At its first meeting each year, the Compensation Committee typically determines final bonuses 
for executive officers earned in the preceding year based on each individual’s performance, the performance of the 
Company  through  its  audited  financial  statements,  business  unit  performance  (as  applicable),  and  the  CEO’s 
recommendations (except with respect to the CEO's own bonus). 

The long-term equity incentive component includes grants of (i) performance-based stock units (“PSUs”), which are 
earned based on the Company's total shareholder return (“TSR”) relative to the top 30 companies in the Philadelphia 
Stock Exchange Semiconductor Index (SOX) over two- and three-year performance periods, and (ii) time-based RSUs, 
which vest in equal annual increments over time.  All grants are made under the Company’s 2020 Stock Plan and shares 
earned and vested are subject to the Company’s stock ownership and retention guidelines and insider trading policy.  
The  Compensation  Committee  generally  approves  the  grant  of  annual  equity  awards  to  officers  at  its  first  regularly 
scheduled meeting each year.  The Compensation Committee does not generally grant equity awards at other times 
during the year, other than in the case of a new hire, promotion or other exceptional circumstances.   

The Compensation Committee aligns both the Company’s annual cash incentive plan and long-term equity incentive 
program  with  the  Company’s  performance  relative  to  pre-established  performance  goals  based  on  the  Company’s 
stated financial objectives, historical performance, and anticipated market and economic conditions for the performance 
period.    The  Compensation  Committee  seeks  to  structure  the  equity  and  cash  incentive  compensation  program  to 
motivate executive officers to achieve the business goals set by the Company and reward the executive officers for 
achieving such goals, which we believe aligns the financial incentives of our executive officers with the interests of our 
stockholders. 

PROXY STATEMENT 

35 

 
 
 
 
 
  
 
The table below summarizes the foregoing key elements of our executive officer compensation structure for 2023. 

Element 

Form 

Description 

Base Salary 

Fixed Cash Compensation 

Annual Cash 
Incentive Plan 

Annual Variable Cash Bonus 

Long-Term Equity 
Incentive Program 

Long-Term Stock-Based 
Compensation 

Competitive cash compensation that takes into consideration the 
scope and complexity of the role, individual qualifications, 
experience, and internal value to the Company. 
Annual variable cash bonus contingent on meeting performance 
criteria related to corporate, business unit/department (as 
applicable), and individual performance objectives. 
PSUs are earned based on Company TSR performance relative to 
a designated peer group.  Time-based RSUs vest incrementally 
over a fixed period. 

In adopting this design, the Compensation Committee considered a number of parameters, including the advice of its 
independent compensation consultant, comparable practices within the industry, and the desire to achieve the goals 
underlying  the  compensation  program.    The  Compensation  Committee  and  Board  further  believe  that  each  of  the 
elements  as  well  as  the  entire  compensation  package  for  Company  executive  officers  is  appropriate  given  the 
Company’s performance, industry, current challenges, and environment. 

The three components of our executive compensation program are commonly used for executive officers at companies 
within the Company’s peer group and, therefore, the Compensation Committee found them to be appropriate in its talent 
attraction and retention strategy.  Given that a substantial portion of an executive officer's overall compensation is tied 
to individual and Company performance through the annual cash incentive and long-term equity incentive components, 
we also think the structure of our executive compensation program meets the Company's other objectives of motivating 
executive officers to achieve the Company's short- and long-term business strategies and objectives and aligning the 
interests of executive officers with those of our stockholders.  The pay-for-performance nature of our compensation 
structure rewards the achievement of strategic, operational and financial goals, thereby enhancing stockholder value.   

The Compensation Committee’s compensation determinations vary for each executive officer depending on a number 
of factors, including but not limited to, the scope of his or her responsibilities, leadership skills and values, and individual 
performance.  The Compensation Committee does not apply formulas or assign specific mathematical weights to any 
of these factors, but rather exercises its business judgment and discretion to make a subjective determination after 
considering all of these measures collectively. 

Annually,  the  Compensation  Committee  reviews  the  elements  of  the  compensation  package  as  well  as  the  overall 
package afforded to the executive officers.  At such time, the Compensation Committee, in its discretion, can approve 
adjustments to the elements of the program.  This review is typically performed coincident with the evaluation of each 
executive  officer’s  performance  in  relation  to  his  or  her  cash  incentive  compensation  goals,  salary  adjustment,  and 
equity grants, if any, as discussed in more detail in the sections below.   

Impact Of Performance On Compensation 

The performance of the Company and of each executive officer has a direct impact on the compensation received by 
such executive officer.  On an annual basis, the CEO reviews the performance and compensation for the Company’s 
other  executive  officers  to  determine  any  potential  salary  adjustment  for  each  individual.    The  CEO  then  proposes 
(except with respect to the CEO’s own compensation) to the Compensation Committee the annual cash incentive payout 
to executive officers, including the NEOs, under the MBO bonus plan, the target cash incentive compensation for the 
upcoming  year,  any  base  salary  adjustments,  and  equity  award  amounts  for  the  upcoming  year.    Each  of  these 
recommendations,  and  the  Compensation  Committee’s  final  compensation  determination  for  executive  officers,  is 
based on each executive's performance and contributions to the Company, as well as overall Company performance. 

The structures of the Company’s annual cash incentive and long-term equity incentive components of the compensation 
program  are  also  both  intended  to  incentivize  performance.    The  MBO  bonus  plan  includes  various  incentive  level 
opportunities  based  on  the executive officer’s  accountability  and  impact  on Company  operations,  with  target  award 
opportunities that are established as a percentage of base salary.  

PROXY STATEMENT 

36 

 
 
 
 
 
Under our MBO bonus plan, payout is based upon achievement of corporate, business unit (as applicable), and personal 
objectives,  with  no  payout  unless  the  Company  meets  the  threshold  level  of  at  least  one  of  the  Board-approved 
corporate  financial  targets  established  as  part  of  the  plan.    Personal  objectives  are  awarded  only  upon  clear 
achievement  of  the  associated  goal.    Failure  to  meet  the  personal  objectives  thereby  has  a  negative  impact  on  the 
ultimate bonus payout, even when the Company achieves its corporate goals. 

The  CEO  recommends  to  the  Compensation  Committee  individual  performance  goals  for  the  executive  officers 
(including the NEOs), other than the CEO, for the current year, which are combined with the corporate and business 
unit (as applicable) targets into an annual cash incentive opportunity proposal.  The personal targets that are established 
are  designed  to  result  in  additional  incremental  value  to  the  Company  if  they  are  achieved.    The  target  level  of  the 
corporate  and  business  unit  components  of  the  bonus  goals  are  set  based  on  the  Company’s  financial  budget 
established by the Board at the beginning of the year.  The determination of these goals is made annually to meet the 
changing nature of the Company’s business. 

Upon  completion  of  the  prior  year’s  results  and  prior  to  implementation  of  the  current  year’s  proposed  executive 
compensation  plan,  the  results  for  each  executive  officer  are  submitted  to,  and  reviewed  by,  the  Compensation 
Committee, which considers the CEO’s recommendations for executive officers, other than the CEO, and determines 
the final bonus earned by each executive officer based on Company and individual performance.  The Compensation 
Committee may exercise discretion in adjusting and approving an individual’s award under the bonus plan based upon 
its review. 

The two elements of the Company’s long-term equity incentive compensation program are also performance-based.  
The PSU grants, which are explained in further detail below, measure the Company’s TSR over two- and three-year 
periods as compared to that of companies in the Philadelphia Semiconductor Index (SOX) and reward executives for 
achieving  TSR  greater  than  that  of  other  Companies  in  the  Index.    In  addition,  because  the  value  of  PSUs  and  the 
service-based  RSUs  granted  to  executive  officers  are  tied  to  the  Company's  stock  price,  their  value  increases  or 
decreases with the performance of the Company stock, further incentivizing executives to manage the Company for 
the benefit of the Company's stockholders.  

Based  upon  the  foregoing,  the  compensation  that  an  executive  officer  may  realize  is  significantly  impacted  by  the 
positive or negative performance of such individual as well as Company performance. 

Compensation Plan Design And Decisions For 2023 

For 2023, the Compensation Committee conducted a review of the compensation program and determined that the 
2023 executive compensation plan would retain the same basic elements as the prior year’s plan as these elements 
aligned the Company’s program with its current business strategy and included the pay for performance aspect of its 
executive compensation program.  Taking into account the Company’s 2022 financial performance and outlook for 2023, 
each executive officer’s performance and responsibilities, and current market compensation rates for each executive 
officer  position,  among  other  criteria,  the  Compensation  Committee  approved  the  program  and  compensation  plan 
structure for the executive officers in 2023 as detailed below. 

Base Salary 

The Company provides executive officers and other employees with a base salary to compensate them for services 
rendered during the fiscal year.  The Compensation Committee supports the compensation philosophy of moderation 
for elements such as base salary and other executive officer benefits.  As noted above under “Impact of Performance 
on  Compensation,”  base  salary  decisions  are  made  as  part  of  the  Company’s  formal  annual  review process  and  are 
influenced by the performance of the Company and the individual. 

For 2023, the Compensation Committee reviewed and determined salaries after reviewing salary data supplied by the 
independent compensation consultant, including data regarding the peer comparison group, as well as consideration of 
the compensation for the executive officers on a company-wide basis, based on their relative duties and responsibilities 
and  the  recommendations  of  the  CEO  (other  than  with  respect  to  his  own  compensation).    The  Compensation 
Committee did not apply formulas or assign specific mathematical weights to any of these factors, but rather exercised 

PROXY STATEMENT 

37 

 
 
 
 
 
its business judgment and discretion to make a subjective determination regarding each executive officer's base salary 
for  2023,  as  applicable,  after  considering  all  of  these  factors  collectively.    The  CEO’s  recommendations  for  salary 
adjustments (other than his own) were reviewed, modified, and approved as deemed appropriate by the Compensation 
Committee. 

The table below shows the increases in NEO base salary for 2023 that were approved by the Compensation Committee.  
Our CEO’s base salary was increased 10% to better align with the practices of our peer group, taking into consideration 
our  strong  performance  relative  to  peers  and  a  finding  that  his  prior  pre-increase  base  salary  was  below  the  25th 
percentile of the peer group market data. 

Named Executive Officer 

2022 Base Salary 

2023 Base Salary 

% Increase 

Michael P. Plisinski 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

$636,892 

$450,000 

$360,500 

$302,175 

$300,000 

$700,000 

$463,500 

$371,315 

$311,240 

$315,000 

10% 

3% 

3% 

3% 

5% 

Annual Cash Incentive Compensation 

For 2023, as in prior years, the annual cash incentive plan was structured such that each NEO’s potential cash award 
was  subject  to  the  achievement  of  2023  corporate  financial  objectives.    These  corporate  financial  objectives  were 
established at levels in excess of the overall industry projections in order to incentivize the Company to outperform the 
industry. 

For our NEOs the 2023 target annual cash bonus opportunities were set as follows: 

Named Executive Officer 

2023 Target Annual Cash Incentive 
As a Percentage of Salary 

Michael P. Plisinski 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

110% 

70% 

60% 

70% 

65% 

PROXY STATEMENT 

38 

 
 
 
 
 
  
 
The 2023 annual cash incentive plan had three components:  corporate goals, business unit goals (if applicable), and 
personal performance goals, each of which is described in more detail below. 

•  The corporate goals relate to corporate revenue and corporate non-GAAP operating income.  For NEOs 
who are not aligned with a particular business unit, 70% of their cash bonus potential is based on corporate 
goals.  For NEOs who are aligned with a particular business unit, 30% of their cash bonus potential is based 
on corporate goals.  The entirety of each executive officer’s cash bonus payout, however, was contingent 
on the Company meeting at least one of the 2023 corporate revenue or corporate non-GAAP operating 
income goals thresholds of 80% of target and 70% of target, respectively.  Should the Company not have 
reached  the  threshold  level  for  both  the  2023  corporate  revenue  and  corporate  non-GAAP  operating 
income goals, then no payout under the plan would have been made to the CEO or the other executive 
officers.  The performance ranges for each metric included a payout level for threshold performance at 
50% of target payout and an established target level to achieve the maximum payout by exceeding the 
corporate performance objectives for each of the corporate financial metrics.  If the corporate goal target 
is exceeded in either or both corporate goal categories, then the cash payout increases as follows: 

ο  Corporate  Revenue:    From  100%  to  120%  of  the  corporate  goal  target,  additional  cash 

compensation is earned linearly up to 200% of the target bonus amount. 

ο  Non-GAAP  Operating  Income:  From  100%  to  130%  of  corporate  goal  target,  additional  cash 

compensation is earned linearly up to 200% of the target bonus amount. 

• 

For those executive officers who were associated with a particular Company business unit, 40% of their 
cash  bonus  potential  was  allocated  to  business  unit  financial  performance  goals.    In  2023,  these  goals 
included achievement of fiscal 2023 business unit revenue and non-GAAP operating income objectives.  
For an executive officer to earn his or her potential cash award apportioned to the business unit goals, his 
or her respective business unit needed to achieve at least 80% of the business unit revenue target and/or 
70%  of  the  business  unit  non-GAAP  operating  income  target.    Additional  cash  payout  of  up  to  200%  is 
realized if either of the business unit goals is exceeded, similar to the Corporate goal parameters above.  
As stated above, the payout of the business unit goal component of the bonus was contingent on achieving 
the threshold for at least one of the Company corporate goals. 

•  The final component of the cash incentive compensation plan was the inclusion of personal performance 
goals that are specific to the individual executive officers.  This portion of the plan accounts for 30% of the 
cash  bonus  potential  for  all  executive  officers.    The  NEO  personal  performance  goals  in  2023  included 
targets  related  to  additional  corporate  financial  measures,  operational  measures  and  activities,  quality, 
product  development  measures  or  marketing  initiatives  and  personnel  development,  depending  on  the 
executive officer involved.  As with the business unit goal component of the bonus, payout of the personal 
performance goal component of the bonus was contingent on achieving the threshold for at least one of 
the Company corporate goals. 

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The following table reflects the structure of the corporate and business unit goal components of the cash incentive 
compensation plan.  The personal goal payout component is fixed -- if achieved, the payout is for the target amount. 

Corporate/Business 
Unit Goal 

Weighting 

Threshold 
(50% Payout) 

Target 
(100% Payout) 

Max 
(200% Payout) 

Revenue 

Operating Income (Non-GAAP) 

50% 

50% 

80% of target 

100% of target 

120% of target 

70% of target 

100% of target 

130% of target 

The following table reflects the Corporate targets, actual results, and percentage payouts for fiscal 2023 for the CEO 
and other executive officers. 

Cash Incentive Compensation Plan - 
Corporate Target Categories 

2023 Target 

2023 Actual 

Corporate Revenue 

Non-GAAP Operating Income 

$852.0M 

$236.6M 

$815.9M 

$195.4M (1) 

2023 Payout 
Percentage 

89% 

71% 

(1)  The following table represents an unaudited reconciliation of GAAP to non-GAAP operating income (in thousands): 

Year Ended December 30, 2023 

Non-GAAP Adjustments 

GAAP Operating 
Income 

Merger & 
Acquisition 
Related 
Expenses 

Restructuring 
Expenses 

Litigation 
Expenses 

Amortization of 
Intangibles 

Non-GAAP 
Operating Income 

$116,078 

$2,607 

$10,599 

$11,337 

$54,822 

$195,443 

In 2023, none of the NEOs included a business unit goal component as part of his or her cash incentive compensation 
plan.  Personal goal achievement for the CEO and other NEOs at the time of the incentive award is shown in the table 
below. 

Name 

Personal % Score 

Michael P. Plisinski 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

83.30% 

56.70% 

100.00% 

63.30% 

73.30% 

Actual amounts paid to the CEO and the other NEOs under their respective annual cash incentive plans are reported 
below in the Non-Equity Incentive Plan Compensation column of the Summary Compensation Table. 

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Long-Term Equity Incentive Plan 

In  2023,  the  structure  of  the  long-term  equity  incentives  was  set  by  the  Compensation  Committee  through  the 
consideration of a number of factors and recommendations from the CEO (except in connection with his own grants).  

The following parameters were included in the design of the long-term equity incentive program in 2023: 

Performance-Based  Stock  Units:  50% of each executive officer’s equity grant was comprised of PSUs.  The relative 
TSR plan design includes the following features: 

• 

50% of the PSU grant will be assessed at each of two performance periods, at two years and at three years 
from the grant date (e.g. for awards granted in early 2023, the performance periods would be 2023 through 
2025 and 2026). 

•  Performance will be assessed using TSR, which measures growth in stock price, plus any dividends paid, 

during the performance period. 

•  TSR performance will be compared to that of other companies in the Philadelphia Semiconductor Index 

(SOX). 

•  The performance and standards to earn the PSU equity awards in 2023 are as follows: 

TSR Performance Relative to Peers 

PSUs Earned as % of Target 

Below 25th Percentile 

25th Percentile 

55th Percentile 

80th Percentile and above 

0% 

50% 

100% 

200% 

•  The PSU award payout will be calculated on a straight-line basis between the 25th & 55th and the 55th & 

80th percentile levels referenced above. 

•  A negative TSR cap has been instituted which limits any PSUs earned to target level if the Company’s TSR 

is negative over the performance period and our TSR ranks above the target performance level. 

• 

Earned PSUs are not subject to additional service-based vesting conditions. 

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Service-Vesting  Restricted  Stock  Units:  50% of each executive officer’s equity grant is comprised of service-based 
RSUs, which vest in equal annual increments over three years. 

The following table summarizes the components of the long-term equity incentive program. 

Long-Term Equity Incentive Compensation Program Provisions 

Performance-based / Service-based grant breakout 

Service-based grant vesting period 

Performance-based grant evaluation period 

Performance-based grant metric(s) 

Performance-based grant vesting period 

Performance threshold for earning grant 

Percent of performance-based grant earned at threshold 

2023 

50%-50% 

33.3% annually over 3 years 

50% of grant at 2 and 3 years 

Relative TSR 

100% upon earning 

25th TSR percentile 

50% 

Measure at which 100% of performance-based grant is earned 

55th TSR percentile 

Maximum performance-based grant upside 

200% 

Measure at which maximum upside of performance-based grant is earned 

80th TSR percentile 

In February 2024, the first tranche of the PSUs awarded in 2022 vested.  The Company’s TSR performance based on 
the  20-day  average  market  value  prior  to  the  vesting  date  was  determined  and  ranked  against  the  participating 
companies in the SOX.  The Company’s TSR for this assessment period was 75.4%, which placed the Company at the 
93rd TSR percentile in the SOX.  Therefore, the PSUs earned as a percent of the target number awarded was 200%. 

Also in February 2024, the second tranche of the PSUs awarded in 2021 vested.  The Company’s TSR performance 
based  on  the  20-day  average  market  value  prior  to  the  vesting  date  was  determined  and  ranked  against  the 
participating  companies  in  the  SOX.    The  Company’s  TSR  for  this  assessment  period  was  178.6%,  which  placed  the 
Company at the 96th TSR percentile in the SOX.  Therefore, the PSUs earned as a percent of the target number awarded 
was 200%. 

The actual number of PSUs and RSUs granted to the NEOs in 2023 and the related value are reported below in the table 
titled Grants Of Plan-Based Awards In 2023. 

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Personal Benefits And Perquisites 

Benefits 

All employees of the Company, including its executive officers, are eligible to participate in the following benefit plans 
and programs: 

• 

• 

• 

health and dental insurance; 

elective vision care program; 

life insurance and accidental death and dismemberment coverage; 

•  401(k) plan; 

• 

• 

• 

• 

• 

• 

short- and long-term disability insurance with supplemental income continuation; 

health care and dependent care flexible spending account programs; 

employee assistance program (EAP); 

employee stock purchase plan; 

employee referral bonus program;  

IP recognition awards; and 

•  matching of charitable donations through the Company-sponsored charitable foundation.  

The Company, in its discretion, may offer to reimburse the expenses that an employee incurs as a result of the Company 
requiring the individual to relocate their primary residence for employment purposes.  The Compensation Committee 
believes that these benefits are consistent with industry practice and are important in recruiting and retaining qualified 
employees. 

Limited Perquisites 

The Company does not offer extensive perquisites to our executive officers.  For 2023, the Compensation Committee 
reviewed the potential perquisites to be offered by the Company to the executive officers and determined that such 
perquisites would be limited to Company-paid tax preparation services and Company-paid membership in one airline 
executive club.  Executive officers are also eligible to participate in the Company’s Charitable Match Program, under 
which  the  Company  will  match,  dollar  for  dollar,  up  to  $1,000  in  donations  to  eligible  charitable  organizations.    The 
Compensation  Committee  believes  that  these  benefits  are  reasonable  and  consistent  with  the  Company’s  overall 
compensation program and enable the Company to attract and retain superior employees for key positions. 

Retirement Provision For Equity Awards 

All employees, including our NEOs, are also eligible to participate in the Company’s post-retirement equity award vesting 
program.  Under that program: 

•  An employee is “retirement eligible” if they achieve a combination of age plus years of service with the 
Company totaling 70, with a base minimum age of 58 years old and a minimum service requirement of five 
years.  

•  Upon retirement by the employee, any equity awards granted by the Company shall remain outstanding 

and vest based on: 

ο  The vesting schedule established for service-based equity awards; or 

ο  The actual performance results for performance-based equity awards.  

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Employee Stock Purchase Plan 

The  Company  (as  successor  to  Nanometrics)  has  maintained  an  Employee  Stock  Purchase  Plan  since  1986.    The 
Company’s 2020 Employee Stock Purchase Plan was approved by stockholders in 2020 and is currently administered 
by the Compensation Committee.  

Under  the  terms  of  our  current  Employee  Stock  Purchase  Plan,  eligible  employees  may  elect  to  have  up  to  fifteen 
percent  (15%)  of  eligible  compensation  deducted  from  their  base  salary  and  applied  to  the  purchase  of  shares  of 
Common Stock.  The price the employee pays for each share of Common Stock is eighty-five percent (85%) of the fair 
market value of Common Stock at the end of the applicable six-month purchase period.  The Employee Stock Purchase 
Plan qualifies as a non-compensatory plan under Section 423 of the Internal Revenue Code of 1986, as amended (“IRC”). 

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CORPORATE AND GOVERNANCE POLICIES 

Employment And Change-In-Control Agreements 

Each of the NEOs, other than Mr. Slicer, is entitled to payments upon a qualifying termination of employment following 
a  change-in-control  event.   The  Compensation  Committee  believes  that  providing  severance  in  a  change-in-control 
situation  is  beneficial  to  stockholders  so  that  executive  officers  may  remain  objectively  neutral  when  evaluating  a 
transaction  that  may  be  beneficial  to  stockholders  yet  could  negatively  impact  the  continued  employment  of  the 
executive officer.  

The Company is party to an employment agreement with Mr. Plisinski that provides for certain benefits upon termination 
or a change in control of the Company.  We have also entered into an Executive Change in Control Agreement with each 
of our other current NEOs, other than Mr. Slicer.   

See  “Potential  Payments  Upon  Termination  Of  Employment  Or  Change  In  Control”  below  for  a  description  of  these 
arrangements and potential payments that the NEOs would have been entitled to receive upon applicable hypothetical 
termination scenarios as of December 30, 2023. 

Other Elements Of Post-Termination Compensation 

The Company does not have a practice of providing retirement benefits, including any supplemental executive officer 
retirement plans (SERP), to  its executive officers, other than through its 401(k) plan and post-retirement vesting for 
equity awards granted by the Company, as described above.  The Company retains the discretion to utilize the offer of 
severance and/or change-in-control protection as an incentive in its hiring and retention of executive officers. 

Non-Solicitation And Non-Competition Policy 

The Company maintains a policy of entering into an agreement with each of its new executive officers, which contains 
both  non-solicitation  and  non-competition  provisions.    Each  of  our  NEOs  is  party  to  such  an  agreement.  The  non-
solicitation provisions apply for one year (or two years in the case of Mr. Plisinski) after termination of the individual’s 
employment while the non-competition provisions are in effect during the individual’s employment and generally for one 
year thereafter, to the extent permitted by applicable law.  In all cases, these covenants have been implemented to 
protect the confidential information, goodwill and other assets of the Company.  For those individuals with employment 
agreements, should a breach of the non-solicitation or non-competition terms of their agreements occur, this could give 
rise to the Company declaring a breach under the agreement and terminating all severance payments thereunder. 

General Termination Benefits 

Upon termination of an executive officer’s employment with the Company, the individual is entitled to receive his or her 
base  salary  earned  through  the  termination  date.    Thereafter,  further  cash  compensation  to  the  executive  officer  is 
discontinued,  except  to  the  extent  that  severance  or  change-in-control  payments  are  required  to  be  made  in 
accordance with individual or Company severance protection arrangements.  Pursuant to his employment agreement 
with the Company, Mr. Plisinski is entitled to elect to continue group health or other group benefits as allowed by COBRA 
with continued Company co-payments for agreed post-termination periods.  The Company retains the right to  offer 
severance and/or payment of COBRA benefits to any individual who is terminated from the Company at its discretion.  
See “Potential  Payments  Upon  Termination  Of  Employment  Or  Change  In Control” below  for  a  further  description  of 
these arrangements. 

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Stock Ownership Policy 

The Company has established a stock ownership policy for its non-employee directors and executive officers subject 
to Section 16 reporting requirements, which is designed to align the interests of Company leadership with the interests 
of stockholders and give Company leadership a stake in the long-term financial future of the Company. 

The stock ownership levels currently in effect under the policy are the following: 

Company Role 

Common Stock Holding Requirement 

Effective Date 

Non-Employee Directors 

3x value of the annual   retainer 

Within 5 years of initial election to 
Board 

CEO 

3x value of CEO’s base salary 

Within 5 years of hire/promotion 

Executive Officers Subject to 
Section 16 Reporting 
Requirements 

1x value of executive officer’s base salary  Within 5 years of hire/promotion 

In assessing compliance with the foregoing guidelines, the Company takes into consideration only the ownership of 
Common  Stock  in  the  Company  and  unexercised  stock  options  that  are  vested  and  “in-the-money.”    As  a  result, 
unearned PSUs, unvested service-based RSUs, and unvested stock options do not qualify as shares for purposes of 
compliance with the Company’s stock ownership and retention guidelines. 

Participants are expected to achieve their ownership guideline target within five years of becoming subject to the policy.  
Existing participants were subject to this policy as of the date of the policy and any new participants will be subject to 
the policy on their hire, promotion, election, or appointment date, as applicable. 

Compliance with the Company’s stock ownership and retention guidelines is reviewed annually by the Compensation 
Committee.  As of its review in February 2024, the Compensation Committee determined that all executive officers and 
directors were in material compliance with the ownership requirements.  There are no specific penalties for failure to 
achieve the ownership guideline target.  However, the Compensation Committee retains the discretion to impose such 
other conditions, restrictions, or limitations on any executive officers or directors as such Committee determines to be 
necessary or appropriate in order to achieve the purposes of the stock ownership policy. 

The Compensation Committee regularly reviews the Company’s stock ownership and retention guidelines.  In the course 
of its annual review for 2025, the Committee will evaluate the appropriateness of the foregoing stock ownership levels 
based in part on the average closing price of a share of the Company’s stock during the 30 consecutive trading days 
ending on and including the last day of the most recently completed fiscal year, as well as other considerations such as 
market conditions and comparable practices within the industry. 

Prohibition On Pledging, Margining or Hedging Of Company Stock 

Our insider trading policy prohibits Company directors and employees, including our executive officers, from purchasing 
Company securities on margin, borrowing against Company securities held in a margin account, or pledging Company 
securities as collateral for a loan.  Company directors and employees are also prohibited from engaging in short sales, 
derivative transactions, and hedging transactions involving Company securities. 

Adjustments Or Recovery Of Prior Compensation 

In August 2023, the Company adopted a policy that requires it to recover from its Covered Executives (which includes 
our  NEOs)  certain  excess  incentive  compensation  that  would  not  have  been  earned  based  on  specified  accounting 
restatements (the “Clawback Policy”).  The Clawback Policy covers any compensation that is granted, earned, or vested 
based wholly or in part upon the attainment of certain financial reporting measures and received by a Covered Executive 
during  the  last  three  completed  fiscal  years  immediately  preceding  the  relevant  accounting  restatement  date.    The 
Clawback Policy is consistent with the requirements of the SEC’s final compensation clawback rules under the Dodd-
Frank Act and NYSE listing standards. 

PROXY STATEMENT 

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Compensation Program Risk Assessment 

In  2023,  the  Compensation  Committee,  with  advice  and  input  from  Compensia,  its  independent  compensation 
consultant, reviewed our compensation program and whether compensation design features may have the potential to 
incentivize executive officers to take risks that are reasonably likely to have a material adverse effect on the Company.  
Among others, the Committee reviewed the following features of our compensation program: compensation philosophy 
and pay mix; performance measures used in incentive plans; goal setting and payout leverage and caps; calculation and 
verification of performance outcomes for incentive payments; and mitigating factors built into the program to reduce 
risk.  Based on this review and the input from Compensia, the Compensation Committee concluded that the Company’s 
compensation  program  does  not  create  risks  that  are  reasonably  likely  to  have  a  material  adverse  effect  on  the 
Company. 

IRS Limits On Deductibility Of Compensation 

Prior to the enactment of the Tax Cuts and Jobs Act of 2017 (the “Tax Act”) in December 2017, Section 162(m) of the 
IRC, limited the tax deductibility of annual compensation in excess of $1 million paid to any public corporation’s CEO 
and three other highest-paid executive officers (other than the chief financial officer).  Certain qualifying performance-
based compensation was not subject to the $1 million deduction limit, however.  With the passage of the Tax Act, only 
qualifying performance-based compensation paid pursuant to a binding written contract in effect on November 2, 2017 
(and not modified in any material respect on or after November 2, 2017) as set forth under the Tax Act will be eligible 
for the deduction exception.  The Tax Act also expanded the executive officers covered by Section 162(m) to include 
the chief financial officer as well as any person who ever was a covered executive officer for any prior taxable year, 
beginning  after  December  31,  2016.    As  a  result  of  these  changes,  starting  in  2018,  compensation  payable  by us  in 
excess of $1 million to any person who was an NEO since fiscal year 2016 is non-deductible, regardless of whether the 
compensation is performance-based. 

Although the Compensation Committee considers deductibility issues when approving executive officer compensation 
elements, the Compensation Committee believes that the other compensation objectives, such as attracting, retaining 
and providing appropriate incentives to executive officers, are important and can supersede the goal of maintaining 
deductibility.  Consequently, the Compensation Committee generally makes compensation decisions without regard to 
deductibility, as the Compensation Committee believes it has appropriately structured its compensation programs to 
provide incentives to our executive officers to increase Company return and stockholder value. 

CONCLUSION 

In reviewing its compensation programs, the Company has concluded that each element of compensation as well as 
the total compensation opportunities for its executive officers, including the NEOs, are reasonable, appropriate and in 
the  interests  of  the  Company  and  its  stockholders.    The  Company  believes  that  this  compensation  program 
appropriately satisfies the Company’s goals of establishing a compensation package that attracts and retains a strong, 
motivated leadership team, aligns the financial incentives of the executive officers with the interests of the stockholders, 
and rewards the achievement of specific annual, long-term, and strategic goals of the Company.  The Company believes 
that the compensation program, which has been established and is reflected herein has enabled it to recruit and secure 
a  talented  and  motivated  leadership  team  by  which  the  Company  drives  toward  the  ultimate  objective of  improving 
stockholder value. 

PROXY STATEMENT 

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COMPENSATION COMMITTEE REPORT ON 

EXECUTIVE OFFICER COMPENSATION 

We,  the  Compensation  Committee  of  the  Board,  have  reviewed  and  discussed  the  Compensation  Discussion  and 
Analysis (“CD&A”) within the Executive Officer Compensation section of this proxy statement with the management of 
the Company.  Based on such review and discussions, we have recommended to the Board that the CD&A be included 
as part of this proxy statement. 

THE COMPENSATION COMMITTEE 

May Su (Chairperson) 
Stephen D. Kelley 
David B. Miller 
Christine A. Tsingos 

PROXY STATEMENT 

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Summary Compensation Table 

The following table summarizes the compensation earned by our NEOs in the fiscal years noted. 

Name and Principal Position 

Year 

Salary ($) 

Bonus ($) 

Michael P. Plisinski 

2023 

$692,718 

Chief Executive Officer 

2022 

$634,751 

Mark R. Slicer (4) 

2023 

$461,942 

2021 

$639,353 

— 

— 

— 

— 

Non-Equity 
Incentive Plan 
Compensation 
($)(2) 

All Other 
Compensation 
($)(3) 

Stock Awards 
($)(1) 

Total ($) 

$4,327,136 

$624,741 

$1,433  $5,646,028 

$3,977,905 

$697,044 

$3,601  $5,313,301 

$3,487,747 

$995,529 

$11,681  $5,134,310 

$834,971 

$237,287 

$10,590  $1,544,790 

Chief Financial Officer 

2022 

$275,192  $150,000  $1,000,038 

$240,334 

$5,652  $1,671,216 

Yoon Ah E. Oh (5) 

2023 

$370,067 

— 

$1,073,669 

$191,900 

$10,590  $1,646,226 

Vice President, General 
Counsel, and Corporate 
Secretary 

2022 

$359,288 

— 

$568,303 

$206,287 

$9,490  $1,143,368 

Srinivas Vedula (6) 

2023 

$310,195 

— 

$500,972 

$163,696 

$9,996 

$984,859 

2021 

$60,577  $250,000 

$600,008 

$54,610 

$115 

$965,310 

Senior Vice President, 
Customer Success 

Ramil Yaldaei (6) 

2023 

$310,961 

— 

$475,049 

$159,982 

$10,019 

$956,011 

Chief Operating Officer 

(1)  Amounts reflect the grant date fair value for each share-based compensation award granted to the NEOs during 
the covered year, calculated in accordance with FASB ASC Topic 718.  The assumptions used in determining the 
grant  date  fair  values  of  awards  are  set  forth  in  Note  2  to  our  consolidated  financial  statements,  which  are 
included in our Annual Report on Form 10-K filed with the SEC on February 26, 2024.  For 2023, the amount 
reported for each NEO includes the grant date fair value attributable to the 2023 awards of (i) time-based RSUs 
and (ii) PSUs, assuming that the performance conditions were satisfied at target at the time of grant.  The grant 
date  fair  value  attributable  to  the  2023  PSU  awards,  assuming  maximum  performance  achievement,  is  as 
follows: Mr. Plisinski, $4,767,158; Mr. Slicer, $919,802; Ms. Oh, $797,242; and Dr. Vedula, $551,926.  The actual 
amounts earned will be determined following the end of the two-year performance period (February 14, 2023 – 
February  14,  2025)  and  the  three-year  performance  period  (February  14,  2023  –  February  14,  2026).    Mr. 
Yaldaei's stock awards in 2023 were entirely in the form of time-based RSUs. 

(2) The amounts for a given year represent the amount earned in respect of that year under the Company’s annual 
cash  performance  incentive  plan,  as  applicable,  notwithstanding  the  year  in  which  it  was  paid.    See 
“Compensation Discussion and Analysis – Annual Cash Incentive Compensation” for further information.  

(3) Refer to the All Other Compensation table for more detailed information about the 2023 compensation reported 

in this column. 

(4) Mr. Slicer joined the Company as Chief Financial Officer effective May 17, 2022. 

(5) Ms. Oh joined the Company as Vice President, General Counsel & Corporate Secretary effective October 25, 

2021. 

(6) Although employed by Onto Innovation prior to 2023, Dr. Vedula and Mr. Yaldaei were not NEOs prior to 2023. 

PROXY STATEMENT 

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All Other Compensation 

Name 

Year 

Michael P. Plisinski 

2023 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

2023 

2023 

2023 

2023 

Matching 
Contribution 
Towards 
401(k) ($) 

Insurance ($)(1) 

Perquisites and 
Other Personal 
 Benefits ($)(2) 

Severance 
Compensation ($) 

Total ($) 

$743 

$9,900 

$9,900 

$9,306 

$9,329 

$690 

$690 

$690 

$690 

$690 

— 

— 

— 

— 

— 

— 

— 

— 

— 

— 

$1,433 

$10,590 

$10,590 

$9,996 

$10,019 

(1)  Insurance is the premium associated with coverage under the group term life insurance and accidental death 
and dismemberment insurance plans.  Coverage is equal to the lesser of two (2) times salary or $500,000. 

(2) The  value  of  aggregate  perquisites  and  personal  benefits for  each  NEO  is  less  than  $10,000,  and  therefore, 

perquisites for these individuals are not required to be disclosed in accordance with SEC rules. 

Grants Of Plan-Based Awards In 2023 

The  following  table  sets  forth  information  with  respect  to  non-equity  and  equity  incentive  plan  awards  that 
were granted during 2023 to the NEOs.  No stock option awards were granted to any NEO in 2023. 

Name 

Estimated Future Payouts Under 
Non-Equity Incentive Plan 
Awards  ($)(1) 

Grant Date 

Estimated Future Payouts 
Under Equity Incentive Plan 
Awards (#)(2) 

Threshold  Target  Maximum  Threshold  Target  Maximum 

 Michael P. Plisinski  2/14/2023  $134,750  $770,000 $1,309,000 

All other Stock 
Awards: Number 
of Shares of 
Stock or Units 
(#)(3) 

Grant Date 
Fair Value of 
Stock and 
Option 
Awards ($) 

2/14/2023 

2/14/2023 

11,825 

23,649  47,298 

$2,383,579 

23,650 

$1,943,557 

 Mark R. Slicer 

2/14/2023  $56,779  $324,450  $551,565 

2/14/2023 

2/14/2023 

2,282 

4,563 

9,126 

$459,901 

4,564 

$375,070 

Yoon Ah E. Oh 

2/14/2023  $38,988  $222,789  $378,741 

2/14/2023 

2/14/2023 

5/15/2023 

1,978 

3,955 

7,910 

$398,621 

3,955 

$325,022 

3,746 

$350,026 

Srinivas Vedula 

2/14/2023  $38,127  $217,868  $370,376 

2/14/2023 

2/14/2023 

1,369 

2,738 

5,476 

$275,963 

2,738 

$225,009 

Ramil Yaldaei 

5/15/2023  $35,831  $204,750  $348,075 

5/15/2023 

5,084 

$475,049 

(1)  The amounts reported in these columns represent the annual cash incentive opportunities under the Company’s 
cash incentive compensation plan for each of our NEOs for the 2023 performance period. The metrics against 
which performance was measured under this plan, as well as other details regarding the plan, are discussed 

PROXY STATEMENT 

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above in the Compensation Discussion and Analysis under “Annual Cash Incentive Compensation.”  The amounts 
actually  earned  by  our  NEOs  under  the  plan  are  reflected  in  the  “Non-Equity  Incentive  Plan  Compensation” 
column of the Summary Compensation Table above. 

(2) The amounts reported in these columns represent the award opportunities under the Company’s PSU program.  
The metrics against which performance will be measured under this program, as well as other details regarding 
the  plan,  are  discussed  above  in  the  Compensation  Discussion  and  Analysis  under  the  heading  “Long-Term 
Equity Incentive Plan.”  The performance periods for these awards are two years and three years with the final 
determinations of the award ultimately earned being made in 2025 and 2026. 

(3) The amounts reported in this column represent the awards of RSUs which are subject to service-based vesting 
conditions, as discussed above in the Compensation Discussion and Analysis under the heading “Long-Term 
Equity Incentive Plan.”  These RSUs vest in  33.3% increments on each of the first three anniversaries of the 
grant date. 

Outstanding Equity Awards At 2023 Fiscal Year-End 

The following table sets forth information with respect to outstanding equity awards held by the NEOs as of December 
30, 2023.  No stock option awards were outstanding as of December 30, 2023. 

Stock Awards 

Name 

Grant Date (1) 

Number of 
Shares or Units 
of Stock That 
Have Not Vested 
(#)(2) 

Market Value 
of Shares or 
Unites of Stock 
That Have Not 
Vested ($)(3) 

Michael P. Plisinski 

2/8/2021 

8,278 

$1,265,706 

Equity Incentive 
Plan Awards:  
Number of  
Unearned Shares, 
Units or Other 
Rights That Have 
Not Vested (#)(4) 

Equity Incentive 
Plan Awards: 
Market or Payout 
Value of Unearned 
Shares, Units or 
Other Rights That 
Have Not Vested 
($)(3) 

12,417 

19,049 

$1,898,559 

$2,912,592 

12,699 

$1,941,677 

23,650 

$2,616,085 

23,649 

$3,615,932 

8,547 

$1,306,836 

4,564 

2,681 

1,814 

3,955 

3,746 

596 

553 

1,088 

2,738 

2,436 

5,084 

$697,836 

$409,925 

$277,361 

$604,720 

$572,763 

$91,128 

$84,554 

$166,355 

$418,640 

$372,464 

$777,344 

4,563 

$697,683 

2,721 

3,955 

$416,041 

$604,720 

1,633 

2,738 

$249,686 

$418,640 

Mark R. Slicer 

2/10/2022 

2/14/2023 

5/17/2022 

2/14/2023 

Yoon Ah E. Oh 

10/25/2021 

Srinivas Vedula 

Ramil Yaldaei 

2/10/2022 

2/14/2023 

5/15/2023 

4/1/2021 

8/30/2021 

2/10/2022 

2/14/2023 

10/3/2022 

5/15/2023 

(1)  For a better understanding of this table, we have included an additional column showing the grant date of each 

stock award. 

(2) Amount includes service-based RSU awards vesting 1/3rd per year on the anniversary of the grant date. 
(3) Based on the Common Stock closing price of $152.90 per share on December 30, 2023. 
(4) PSU awards are reported in this table at number of target shares.  The actual number of shares earned will be 
determined  based  on  performance  achievement  measured  over  two  (2)-  and  three  (3)-year  performance 
periods, and any earned shares will vest on the second and third anniversaries, respectively, of the grant date. 

PROXY STATEMENT 

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 Stock Vested in 2023
Stock Vested In 2023 

The following table sets forth information with respect to the value realized by the NEOs upon vesting of PSUs and 
RSUs during 2023, and such values reflect the total pre-tax value realized by each NEO.  There were no stock option 
exercises by any of the NEOs during 2023. 

Name 

Michael P. Plisinski 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

Stock Awards 

Number of Shares 
Acquired On Vesting (#) 

Value Realized 
On Vesting ($)(1) 

81,073 

$6,747,056 

4,274 

3,589 

3,049 

1,218 

$418,638 

$371,477 

$281,979 

$152,725 

(1)  The aggregate dollar amount realized is based on the fair market value of the shares upon vesting. 

Pay Versus Performance 

We  are  required  by  SEC  rules  to  disclose  the  following  information  regarding  compensation  paid  to  our  NEOs.    The 
amounts set forth below under the headings “Compensation Actually Paid to CEO” and “Average Compensation Actually 
Paid for NEOs” have been calculated in a manner consistent with Item 402(v) of Regulation S-K.  The tables in footnote 
(2) below set forth the adjustments from the Total Compensation for each NEO reported in the Summary Compensation 
Table above. 

The following table sets forth additional compensation information of our Chief Executive Officer (CEO) and our non-
CEO NEOs along with total shareholder return, net income and total revenue performance results for fiscal years 2020, 
2021, 2022 and 2023. 

Value of Initial Fixed $100 
Investment Based On: 

Summary 
Compensation 
Table Total For 
CEO 

Compensation 
Actually Paid 
to CEO (5) 

Year (1) 

Average 
Summary 
Compensation 
Table Total 
 For NEOs 

Average 
Compensation 
Actually Paid 
to NEOs (5)(2) 

Total 
Shareholder 
Return (3) 

Peer Group 
Total 
Shareholder 
Return (3) 

Net  
Income (in 
thousands) 
(4) 

Total 
Revenue (in 
thousands)(4) 

2023 

$5,646,028  $21,220,183  $1,282,972 

$2,783,035 

$318.23 

$165.64 

$121,159 

$815,868 

2022 

$5,313,301 

$2,086,925  $1,129,974 

$711,974 

$86.27 

$42.98  $223,334  $1,005,183 

2021 

$5,134,310  $13,985,674  $1,069,940 

$2,149,621 

$176.97 

$125.09 

$142,349 

$788,899 

2020 

$3,763,688 

$4,453,187 

$934,489 

$1,463,581 

$30.11 

$56.09 

$31,025  $556,496 

(1)  The CEO and NEOs included in the above compensation columns reflect the following: 

Year 

CEO 

NEOs 

2023 

Michael P. Plisinski  Mark R. Slicer, Yoon Ah E. Oh, Srinivas Vedula, Ramil Yaldaei 

2022 

Michael P. Plisinski 

Mark R. Slicer, James (Cody) Harlow, Robert Fiordalice, Yoon Ah E. Oh, 
Steven R. Roth 

2021 

Michael P. Plisinski 

Steven R. Roth, Rollin Kocher, Kevin Heidrich, Robert A. Koch, Yoon Ah E. Oh 

2020 

Michael P. Plisinski 

Steven R. Roth, Rollin Kocher, Kevin Heidrich, Robert A. Koch 

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52 

 
 
 
 
 
 
 
 
 
 
 
 
 
  
 
(2) In 2023, tranches of the TSR-based PSU awards from 2021 and 2020 vested.  None of the NEOs, except for the 
CEO, was in his or her current role in 2020 or 2021 at the time the PSU awards were granted.  Therefore no NEO, 
except for the CEO, received Common Stock from the vesting of PSU awards in 2023. 

(3) Company and Peer Group TSR reflects the Company’s peer group (PHLX Semiconductor Index) as reflected in 
our  Annual  Report  on  the  Form  10-K  pursuant  to  Item  201(e)  of  Regulation  S-K  for  the  fiscal  year  ended 
December 30, 2023.  Each year reflects what the cumulative value of $100 would be, including the reinvestment 
of dividends, if such amount were invested on December 31, 2019. 

(4) The  dollar  amounts  reported  represent  the  amount  of  net  income  and  total  revenue  reflected  in  our  audited 

financial statements for each covered fiscal year. 

(5) Fair value or change in fair value, as applicable, of equity awards in the “Compensation Actually Paid” columns 
was determined by reference to (1) for RSU awards, closing price on applicable year-end dates or, in the case 
of vesting dates, the actual vesting price, (2) for TSR-based PSU awards, the fair value calculated by a Monte 
Carlo simulation model as of the applicable year-end date(s) or, in the case of vesting date, the actual vesting 
price and probability of achievement.  For the portion of “Compensation Actually Paid” that is based on year-
end stock prices, the following prices were used: for 2023 : $152.90 (124.6% increase from prior year) for 2022: 
$68.09 (32.7% reduction from prior year), for 2021: $101.23 (110.8% increase from prior year), and for 2020: 
$48.02 (1.0% increase from prior year).   

“Compensation Actually Paid” to the CEO reflects the following adjustments from Total Compensation reported 
in the Summary Compensation Table: 

CEO 

2023 

2022 

2021 

2020 

 Total Reported in Summary Compensation Table (SCT) 

$5,646,028 

$5,313,301 

$5,134,310 

$3,763,688 

 Less, Value of Stock & Option Awards Reported in SCT 

($4,327,136) 

($3,977,905) 

($3,487,747) 

($2,672,777) 

 Less, Change in Pension Value and Non-Qualified  
   Deferred Compensation Earnings in SCT 
 Plus, Pension Service Cost and impact of Pension Plan 
   Amendments 
 Plus, Year-End value of Awards Granted in Fiscal Year 
   that are Unvested and Outstanding 
 Plus, Change in Fair Value of Prior Year awards that 
   are Outstanding and Unvested 
 Plus, FMV of Awards Granted this Year and that 
  Vested this Year 
 Plus, Change in Fair Value (from Prior Year-End) of 
   Prior Year awards that Vested this year 
 Less, Prior Year Fair Value of Prior Year awards that  
  failed to vest this year 

— 

— 

— 

— 

— 

— 

— 

— 

$10,231,429 

$2,764,863 

$6,761,134 

$2,941,125 

$8,298,325 

($2,584,704) 

$5,241,435 

$318,972 

— 

— 

— 

— 

$1,371,538 

$571,370 

$336,542 

$102,179 

— 

— 

— 

— 

 Total Adjustments 

$15,574,155 

($3,226,376) 

$8,851,364 

$689,499 

 "Compensation Actually Paid" 

$21,220,183 

$2,086,925  $13,985,674 

$4,453,187 

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The  average  “Compensation  Actually  Paid”  to  the  NEOs  reflects  the  following  adjustments  from  Total 
Compensation reported in the Summary Compensation Table: 

NEO Average 

2023 

2022 

2021 

2020 

 Total Reported in Summary Compensation Table (SCT) 

$1,282,972 

$1,129,974 

$1,069,940 

$934,489 

 Less, Value of Stock & Option Awards Reported in SCT 

($721,165) 

($577,372) 

($533,902) 

($435,715) 

 Less, Change in Pension Value and Non-Qualified  
   Deferred Compensation Earnings in SCT 
 Plus, Pension Service Cost and impact of Pension Plan 
   Amendments 
 Plus, Year-End value of Awards Granted in Fiscal Year 
   that are Unvested and Outstanding 
 Plus, Change in Fair Value of Prior Year awards that 
   are Outstanding and Unvested 
 Plus, FMV of Awards Granted this Year and that 
  Vested this Year 
 Plus, Change in Fair Value (from Prior Year-End) of 
   Prior Year awards that Vested this year 
 Less, Prior Year Fair Value of Prior Year awards that  
  failed to vest this year 

— 

— 

— 

— 

— 

— 

— 

— 

$1,508,382 

$436,885 

$879,706 

$479,458 

$613,125 

($143,057) 

$665,069 

$487,384 

— 

— 

— 

— 

$99,722 

($134,457) 

$68,807 

($2,036) 

— 

— 

— 

— 

 Total Adjustments 

$1,500,064 

($418,000) 

$1,079,680 

$529,092 

 "Compensation Actually Paid" 

$2,783,035 

$711,974 

$2,149,621 

$1,463,581 

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Pay versus Performance Descriptive Disclosure 

Compensation Actually Paid and Company TSR and Peer Group TSR 

Our TSR lagged the TSR for our peer group in 2020 but increased significantly in 2021 both in terms of real dollars and 
in relation to our peer group TSR, which our TSR exceeded by approximately 40%.  In 2022, the dollar value of our TSR 
dropped but was nonetheless over 100% greater than our peer group TSR.  From 2022 to 2023 our TSR increased by 
over  250%  and  was  almost  twice  that  of  our  peer  group  TSR.    There  is  a  positive  relationship  between  TSR  and 
“Compensation Actually Paid” to our CEO and the other NEOs between 2020 and 2021, when both metrics increased, 
between 2021 and 2022, when both metrics dropped, despite our TSR equaling approximately twice our peer group 
TSR, and between 2022 and 2023, when both metrics increased again.  The following chart illustrates the relationship 
between our Compensation Actually Paid and TSR: 

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55 

 
 
 
 
 
 
  
 
Compensation Actually Paid and Net Income 

There is a positive relationship between Net Income and “Compensation Actually Paid” to our CEO and the other NEOs 
between  2020  and  2021,  when  both  metrics  increased.    There  is  an  inverse  relationship  between  Net  Income  and 
“Compensation Actually Paid” to our CEO and the other NEOs between 2021 and 2022 when Net Income increased, but 
“Compensation  Actually  Paid”  decreased.    There  is,  again,  an  inverse  relationship  between  Net  Income  and 
“Compensation Actually Paid” to our CEO and other NEOs between 2022 and 2023 when Net Income decreased but 
“Compensation  Actually  Paid”  increased.    The  following  chart  illustrates  the  relationship  between  our  Compensation 
Actually Paid and Net Income: 

PROXY STATEMENT 

56 

 
 
 
 
 
 
  
 
Compensation Actually Paid and Total Revenue 

We chose Total Revenue as our Company Selected Measure for evaluating Pay versus Performance because it is a key 
metric, along with non-GAAP operating income, in determining the annual cash incentive compensation paid to the CEO 
and other NEOs.  From 2020 to 2021 there is a positive relationship between Total Revenue and “Compensation Actually 
Paid,” when both metrics increased, an inverse relationship between 2021 and 2022 when Total Revenue increased, 
but “Compensation Actually Paid” to our CEO and the other NEOs decreased, and an inverse relationship between 2022 
and 2023 when Total Revenue decreased, but “Compensation Actually Paid” to our CEO and the other NEOs increased.  
Much of the increase in CEO and NEO “Compensation Actually Paid” from 2022 to 2023 is attributable to the significant 
increase  in  the  Company’s  stock  price  during  2023.    The  following  chart  illustrates  the  relationship  between  our 
Compensation Actually Paid and Total Revenue: 

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Pay versus Performance Tabular List 

The table below lists our most important performance measures used to link “Compensation Actually Paid” for our NEOs 
to Company performance, over the fiscal year ending December 30, 2023.  Both Total Revenue and non-GAAP operating 
income factor into the annual cash incentive compensation paid to NEOs and Company TSR over two- and three-year 
measurement periods determine the ultimate value of PSUs awarded to NEOs.  For a further discussion of how each of 
these financial measures relates to NEO compensation and for a reconciliation of the non-GAAP measure as compared 
to the GAAP measure reflected in our audited financial statements, see our “Compensation Discussion and Analysis” 
beginning on  page  28  of  this  proxy  statement.    The performance  measures  included  in  this  table  are  not  ranked  by 
relative importance. 

Most Important Financial Measures 

Total Revenue 

Non-GAAP Operating Income (1) 

Total Shareholder Return 

(1)  Refer to footnote (1) on page 40 of this proxy statement for a reconciliation of non-GAAP 

operating income to the most comparable GAAP measure. 

Pension And Nonqualified Deferred Compensation 

The Company does not have a defined benefit pension program, nor does it offer non-qualified deferred compensation. 

Potential Payments Upon Termination Of Employment Or Change In Control 

This section (including the following tables) summarizes each NEO’s estimated payments and other benefits that would 
be received by the NEO or the NEO’s estate if his or her employment had terminated on December 30, 2023, under the 
hypothetical circumstances set forth below. 

Certain of our NEOs are entitled to certain termination payments upon his or her death or Disability, his or her involuntary 
termination without Cause,  or his or  her voluntary termination with Good Reason as described below.  Although the 
definitions of each of these terms is specific to the NEO’s employment agreement or change-in-control agreement with 
the Company, the terms generally have the following meanings: 

• 

• 

“Disability” generally means that the executive officer, due to physical or mental impairment, is unable to 
perform his or her duties to the Company for a specified period of time. 

“Cause” generally means that the executive officer engaged in a crime, willful gross misconduct or other 
serious  act  involving  moral  turpitude;  materially  breached  an  agreement  between  him  or  her  and  the 
Company; or otherwise materially breached his or her obligations to the Company. 

•  A voluntary termination for “Good Reason” generally means, depending on the particular executive officer’s 
agreement, that the executive officer’s duties, responsibilities or status with the Company or its successor 
are materially reduced; his or her primary place of work is moved to a location outside a predetermined 
radius; in particular cases, certain reductions in compensation; or the Company materially breaches the 
terms of his or her agreement with the Company or any successor fails to assume the executive officer’s 
change-in-control agreement. 

In addition to the payments and other benefits described below, under our 2020 Stock Plan, in the event of a change in 
control,  unless  the  Board  or  Compensation  Committee  determine  that  some  other  treatment  is  warranted  in  their 
discretion, if the acquirer elects not to assume or substitute an equity award, then upon the effective date of the change 
in control all RSUs and PSUs held by any employees of the Company (including NEOs) become fully vested and the 
performance goals or other vesting conditions for PSUs shall be deemed achieved at 100% of the target levels. 

PROXY STATEMENT 

58 

 
 
 
 
 
 
  
 
NEO Employment and Change in Control Agreements 

Mr. Plisinski’s employment agreement provides for the following: 

Mr. Plisinski 

• 

• 

In the event of any termination of Mr. Plisinski’s employment, he is entitled to payment of all base salary due 
and owing through the termination date and an amount equal to all earned but unused vacation through the 
termination date. 

In the event Mr. Plisinski’s employment is terminated due to his death, his estate would be entitled to: 

ο  Payment of his then-current base salary as if his employment had continued for three months following 

his death; 

ο  Continued co-payment for a period of six months following his death of amounts due under COBRA for 
continuation of the Company’s group health and other group benefits for his covered dependents, if the 
covered dependents so elect; 

ο  Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the 
time employed preceding his death, to be paid out with the Company’s annual incentive plan payouts; and 

ο 

Immediate vesting of stock options and SARs, and immediate vesting of RSU awards granted after his 
appointment as CEO which by their terms would vest within 12 months after death and, if a performance 
award,  based  on  actual  performance  achievement  for  such  performance  period  completed  within  12 
months after death. 

• 

In the event Mr. Plisinski’s employment is terminated due to his Disability, he would be entitled to: 

ο  Payment of his then-current base salary through the end of the month of such termination; 

ο  Continued co-payment for a maximum period of six months following his Disability of amounts due under 
COBRA  for  continuation  of  the  Company’s  group  health  and  other  group  benefits,  if  he  or  his  covered 
dependents, as appropriate, so elects; 

ο  Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the 
time  employed  preceding  his  termination,  to  be  paid  out  with  the  Company’s  annual  incentive  plan 
payouts; and 

ο 

Immediate vesting of stock options and SARs, and immediate vesting of RSU awards granted after his 
appointment as CEO which by their terms would vest within 12 months after termination for disability and, 
if  a  performance  award,  based  on  actual  performance  achievement  for  such  performance  period 
completed within 12 months after termination. 

• 

In the event Mr. Plisinski’s employment is terminated by the Company without Cause or Mr. Plisinski terminates 
his employment for Good Reason, he would be entitled to: 

ο  Payment of two times his then-current base salary, paid over 24 months (i.e., salary continuation for two 

years); 

ο  Continued co-payment for a period of up to 18 months of amounts due under COBRA for continuation of 

the Company’s group health and other group benefits, if he so elects; and 

ο  Vesting of any equity incentive awards outstanding as of the termination date as follows: 

 

 

For awards granted after the effective date of Mr. Plisinski’s current employment agreement: 

• 

stock options and SARs which would have vested within 12 months following the date of 
termination, become immediately and fully vested and exercisable upon termination and 
remain exercisable until the first to occur of the second (2nd) anniversary of the termination 
date or the original expiration date of such option or stock appreciation right; 

For awards granted before the effective date of Mr. Plisinski’s current employment agreement: 

PROXY STATEMENT 

59 

 
 
 
 
 
• 

• 

vesting of unvested awards which were earned based on a completed performance period 
under  a  performance-based  award  granted  on  or  after  the  employment  agreement 
effective date and which as of the termination date are then subject to time-based vesting 
only, or shares under such an equity incentive award granted on or after the employment 
agreement effective date which will be earned under a performance-based award based 
on actual achievement under a performance period which has been completed on or prior 
to the termination date but as to which performance period the actual number of shares 
earned  against  the  award  performance  goals  has  not  yet  been  determined  by  the 
Company; and 

vesting of unvested awards that would have become vested based solely on the passage 
of  time  within  the  12-month  period  immediately  following  the  termination  date  had  Mr. 
Plisinski continued in employment with the Company. 

 

to the extent not vested, all other equity incentive awards outstanding at the time of termination 
will expire as of the termination date. 

• 

If, within 18 months following the occurrence of a Change in Control, Mr. Plisinski’s employment is terminated 
for any reason other than for Cause or Mr. Plisinski terminates his employment for Good Reason, he would be 
entitled to: 

ο  Payment of two times the sum of his then-current base salary and target annual cash bonus, paid over 24 

months; 

ο  A pro rata incentive compensation payment for the calendar year in which the termination occurred based 

on the actual results for the calendar year; 

ο  Continued co-payment for a period of up to 18 months of amounts due under COBRA for continuation of 

the Company’s group health and other group benefits, if he so elects; and 

ο 

Immediate vesting of all unvested stock options, SARs and all unvested and outstanding performance-
based (at target) and service-based RSUs and other equity awards. 

ο  To the extent that Change in Control termination payments made to Mr. Plisinski under his agreement are 
subject to the excise tax imposed by Section 4999 of the IRC, Mr. Plisinski would either have to pay the 
excise tax or have his benefits reduced so that no portion of his termination payments were subject to the 
excise tax. 

ο 

In order to receive these termination or Change in Control termination payments, Mr. Plisinski would be 
required to sign a general release of all known and unknown claims that he may have against the Company. 

ο  As  part  of  his  employment  agreement,  Mr.  Plisinski  is  subject  to  non-solicitation  and  non-competition 
restrictions  that  limit  his  ability  to  compete  with  the  Company  during  the  term  of  the  agreement  and 
survive his resignation or termination for any reason for periods of two years and one year, respectively. 

• 

For Mr. Plisinski, a “Change in Control” would generally be considered to have occurred if: 

ο 

any person or entity, or multiple persons or entities acting as a group, becomes the beneficial owner of 
more than 50% of our outstanding voting shares; 

ο  Continuing Directors no longer constitute a majority of the Board, where “Continuing Director” means a 
Board member who was a Board member when the Executive Change in Control Agreement was executed 
or who was nominated, elected or approved by at least a majority of Board members who were, at that 
time, Continuing Directors, but excluding any individual whose initial assumption to office occurred as a 
result of any actual or threatened election contest or proxy solicitation, unless such person’s treatment as 
a Continuing Director is subsequently approved by a majority of Continuing Directors; or 

ο 

there  is  consummation  of  a  merger,  consolidation,  reorganization,  recapitalization  or  statutory  share 
exchange involving the Company or a sale or other disposition of all or substantially all of the assets of 
the Company in one or a series of transactions (a “Business Combination”), unless, immediately following 
such Business Combination, each of the following three conditions is satisfied: (A) all or substantially all 

PROXY STATEMENT 

60 

 
 
 
 
 
of the individuals and entities who were the beneficial owners of the then-outstanding shares of Common 
Stock  entitled  to  vote  immediately  prior  to  such  Business  Combination  still beneficially  own  more  than 
75%  of  the  outstanding  securities  of  the  surviving  entity  in  substantially  the  same  proportions  as  their 
ownership immediately prior to such Business Combination; (B) the individuals who were members of the 
Board of Directors of the Company immediately prior to the execution of the agreement providing for such 
Business Combination constitute at least 50% of the members of the board of directors or other governing 
body  of  the  acquiring  entity;  and  (C)  no  person  beneficially  owns,  directly  or  indirectly,  securities  that 
represent immediately after such merger or consolidation more than 50% of the combined voting power 
of the then outstanding voting securities of either the Company or the other surviving entity or its ultimate 
parent, or of the combined voting power of the then-outstanding securities of such entity entitled to vote 
generally in the election of directors or other governing body (except to the extent that such ownership 
existed prior to the Business Combination). 

The  following  table  reflects  the  potential  payments  to  Mr.  Plisinski  in  the  event  of his  termination  or  his  termination 
following a Change in Control as of December 30, 2023: 

Termination Circumstances as of 12/30/2023 

Base Salary 

Management 
Incentive Bonus 

Value of Accelerated 
Unvested Equity (1) 

Benefits 
Continuation 

By the Company without Cause 

$1,400,000 

— 

$6,797,017 

$50,253 

Cash Severance 

Executive officer resignation for Good Reason  $1,400,000 

— 

$6,797,017 

$50,253 

(2x salary) 

Death 

Disability 

(2x salary) 

$175,000 

$624,741 

$15,250,552 

$16,751 

(3 mos. 
salary) 

(1x bonus) 

— 

$624,741 

$6,797,017 

$16,751 

(1x bonus) 

Within 18 months following Change in Control: 

By the Company without Cause 

$1,400,000  $1,540,000 

$15,250,552 

$50,253 

By the executive officer with Good Reason 

$1,400,000  $1,540,000 

$15,250,552 

$50,253 

(2x salary) 

(2x bonus) 

(2x salary) 

(2x bonus) 

(1)  For RSUs and PSUs the value represents the closing price of our Common Stock on the last trading day of the 
fiscal year multiplied by the number of accelerated units. For PSUs, the number of accelerated units assumes 
vesting at the target level. 

PROXY STATEMENT 

61 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
  
 
Ms. Oh, Dr. Vedula and Messrs. Slicer and Yaldaei 

The Executive Change in Control Agreements for Ms.  Oh, Dr. Vedula and Messrs. Slicer and Yaldaei provide for the 
following: 

•  Upon cessation of the executive’s employment at the Company for any reason under the Executive Change in 

Control Agreement, the executive (or his or her estate) shall be entitled to payment of: 

ο  All base salary earned through the executive's termination date but not yet paid; 

ο  Any unreimbursed business expenses that are eligible for reimbursement under the Company’s policies; 

ο  Any accrued but unused vacation pay or paid time off; 

ο  Any amount arising from the executive’s participation in, or benefits, under any employee benefits plans, 

programs or arrangements; and 

ο  Any amounts earned but not yet paid under any applicable bonus or incentive plan. 

•  The executive (or his or her estate) shall also be entitled to any applicable indemnification rights. 

• 

If, within one year following the occurrence of a Change in Control, or within 60 days prior to the occurrence of 
a  Change  in  Control,  the  executive’s  employment  is  terminated  for  any  reason  other  than  for  Cause  or  the 
executive resigns for Good Reason, the executive shall be entitled to the following benefits in exchange for an 
unrevoked general release: 

ο  Payment of his or her then-current base salary for a period of 12 months; 

ο  Accelerated vesting of all unvested stock options, outstanding RSUs and other performance awards;  

ο  Any performance award that was assumed, substituted or continued with the Change in Control that had 
not already satisfied its performance conditions shall be treated as of the termination date as vested at 
the target level and fully vested as to any service conditions; 

ο  Payment of 100% of the executive’s target annual bonus for the fiscal year in which the termination date 

occurs; and 

ο  The  executive  may  elect  to  maintain  the  executive’s  and  his  or  her  dependent’s  health  care  benefit 
coverage  to  the  same  extent  provided  for  by  and  with  the  same  Company/Executive  officer  payment 
contribution percentages under the Company’s group plans at the time of termination.  Such coverage 
shall extend for a term of one year from the termination date unless he or she becomes covered as an 
insured under another employer’s or spousal health care plan. 

•  Under the Executive Change in Control Agreements, a “Change in Control” would generally be considered to 

have occurred if: 

ο 

any person or entity, or multiple persons or entities acting as a group, becomes the beneficial owner of 
more than 50% of our outstanding voting shares; 

ο  Continuing Directors no longer constitute a majority of the Board, where “Continuing Director” means a 
Board member who was a Board member when the Executive Change in Control Agreement was executed 
or who was nominated, elected or approved by at least a majority of Board members who were, at that 
time, Continuing Directors, but excluding any individual whose initial assumption to office occurred as a 
result of any actual or threatened election contest or proxy solicitation, unless such person’s treatment as 
a Continuing Director is subsequently approved by a majority of Continuing Directors; or 

ο 

there  is  consummation  of  a  merger,  consolidation,  reorganization,  recapitalization  or  statutory  share 
exchange involving the Company or a sale or other disposition of all or substantially all of the assets of 
the Company in one or a series of transactions (a “Business Combination”), unless, immediately following 
such Business Combination, each of the following three conditions is satisfied: (A) all or substantially all 
of the individuals and entities who were the beneficial owners of the then-outstanding shares of Common 
Stock  entitled  to  vote  immediately  prior  to  such  Business  Combination  still beneficially  own  more  than 
50%  of  the  outstanding  securities  of  the  surviving  entity  in  substantially  the  same  proportions  as  their 
ownership immediately prior to such Business Combination; (B) the individuals who were members of the 

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Board of Directors of the Company immediately prior to the execution of the agreement providing for such 
Business Combination constitute at least 50% of the members of the board of directors or other governing 
body  of  the  acquiring  entity;  and  (C)  no  person  beneficially  owns,  directly  or  indirectly,  securities  that 
represent immediately after such merger or consolidation more than 50% of the combined voting power 
of the then outstanding voting securities of either the Company or the other surviving entity or its ultimate 
parent, or of the combined voting power of the then-outstanding securities of such entity entitled to vote 
generally in the election of directors or other governing body (except to the extent that such ownership 
existed prior to the Business Combination). 

The  following  table  reflects  the  potential  payments  to Ms.  Oh  and  Dr.  Vedula  and Messrs.  Slicer  and  Yaldaei,  in  the 
event any of them are terminated without cause or resign for good reason within twelve months following a change in 
control as of December 30, 2023: 

Name 

Cash Severance 
(Base Salary) 

Management 
Incentive Bonus 

Value of Accelerated 
Unvested Equity (1) 

Benefits 
Continuation 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

$463,500 

$324,450 

$2,702,355 

$33,502 

$371,315 

$222,789 

$2,885,529 

$8,651 

$311,240 

$217,868 

$1,429,003 

— 

$315,000 

$204,750 

$1,149,808 

$33,502 

(1)  For RSUs and PSUs the value represents the closing price of our Common Stock on the last trading day of the 
fiscal year multiplied by the number of accelerated units. For PSUs, the number of accelerated units assumes 
vesting at the target level. 

Each of Messrs. Slicer and Yaldaei, Ms. Oh and Dr. Vedula also entered into a separate agreement upon employment 
with the Company that subjects him or her to non-competition and non-solicitation restrictions, which limit his or her 
ability to compete with the Company during his or her employment and for a period of one year following his or her 
resignation or termination for any reason. 

Retention Bonus Agreements  

No NEO has entered into a Retention Bonus Agreement with the Company. 

PROXY STATEMENT 

63 

 
 
 
 
 
  
 
CEO Pay Ratio 

As required by Section 953(b) of the Dodd-Frank Wall Street Reform and Consumer Protection Act, and Item 402(u) of 
Regulation  S-K,  we  have  elected  to  identify  our  median  employee  every  three  years  unless  a  significant  change  in 
employee population or employee compensation arrangements has occurred.  Because there has been no change in 
our employee population or employee compensation arrangements in 2023 that we reasonably believe would result in 
a significant change to our pay ratio disclosure for 2023, we are using the same median employee identified in 2022 to 
calculate  our  2023  CEO  pay  ratio.    For  information  regarding  the  process  utilized  to  identify  our  median  employee, 
please refer to our proxy statement for the 2022 Annual Meeting of Stockholders.  Accordingly, we are providing the 
following information about the relationship of our CEO’s compensation to the compensation of all our employees: 

• 

• 

• 

the annual total compensation of the median employee, as determined in 2023, was $123,144; 

the annual total compensation of our CEO, Michael P. Plisinski, as reported in the Summary Compensation 
Table included in this proxy statement, was $5,646,028; and 

the ratio of the annual total compensation of our CEO to the median employee’s annual total compensation 
was 46 to 1. 

This pay ratio is a reasonable estimate calculated in good faith, in a manner consistent with Item 402(u) of Regulation 
S-K, based on our payroll and employment records and the methodology described below.  The SEC rules for identifying 
the  “median  employee”  and  calculating  the  pay  ratio  based  on  that  employee’s  annual  total  compensation  allow 
companies  to  adopt  a  variety  of  methodologies,  to  apply  certain  exclusions,  and  to  make  reasonable  estimates  and 
assumptions that reflect their compensation practices.  As such, the pay ratios reported by other companies may not 
be comparable to the pay ratio set forth above, as other companies may have different employment and compensation 
practices and may utilize different methodologies, exclusions, estimates and assumptions in calculating their own pay 
ratios.

PROXY STATEMENT 

64 

 
 
 
 
 
PROPOSAL 3 

RATIFICATION OF APPOINTMENT OF INDEPENDENT 
REGISTERED PUBLIC ACCOUNTING FIRM 

Although ratification by stockholders is not required by law, the Board is submitting the Audit Committee’s selection of 
Ernst  &  Young  LLP  (“EY”)  as  the  Company’s  independent  registered  public  accounting  firm  for  fiscal  year  2024  for 
ratification as a matter of good corporate governance and recommends that the stockholders vote for ratification of 
such appointment.  In the event of a negative vote on such ratification, the Board will reconsider its selection.  Even if 
the selection is ratified, the Audit Committee may appoint a new independent registered public accounting firm at any 
time during the year if the Audit Committee believes that such a change would be in the best interests of the Company 
and its stockholders.  EY has indicated that representatives of EY, the independent registered public accounting firm 
presented herein, will be in attendance at the Annual Meeting.  Such representatives will have the opportunity to make 
a statement, if they desire to do so, and to respond to appropriate questions. 

Independent Registered Public Accounting Firm Selection Process 

EY served as the independent registered public accounting firm for Rudolph (the accounting acquirer in the merger with 
Nanometrics)  from  2008  through  the  Merger  Date  and  has  been  the  Company’s  independent  registered  public 
accounting  firm  since  the  Merger  Date,  serving  in  this  role  during  fiscal  2023.    During  this  time,  the  firm  has 
demonstrated: 

•  A high degree of independence and professionalism in their audit engagement with the Company; 

•  A solid record of partner and professional staff continuity; 

•  A knowledge of current and emerging accounting and auditing issues affecting the Company; 

•  A deep and ongoing understanding of the Company’s business model and industry; and 

•  A readiness to assist the Company and its audit committee in keeping up to date with the latest accounting 

and auditing pronouncements and their application to the Company’s business. 

In making its selection of an independent registered public accounting firm, the Audit Committee assesses, among other 
factors: 

•  The performance of the independent registered public accounting firm in the prior year; 

•  The anticipated needs of the Company and ability of the accounting firm to address them in the coming 

year; 

•  The proposed fees for the coming year; and 

•  The potential impact of changing auditors for the coming year. 

Ultimately,  the  selection  of  the  independent  registered  public  accounting  firm  is  made  with  the  best  interest  of  the 
Company and its stockholders in mind. 

Factors Used To Assess Independent Registered Public Accounting Firm Quality 

Members of the Audit Committee have experience in dealing with audits of other public companies as well as experience 
with other accounting firms.  After the Merger Date, the Audit Committee’s basis for the selection of EY as the Company’s 
independent  registered  public  accounting  firm  included,  among  other  considerations,  familiarity  with  Rudolph’s 
accounting practices as the accounting acquirer in the 2019 Merger, EY’s breadth of services and international footprint 
as  well  as  expense  considerations.    On  an  ongoing  basis,  EY  has  been  responsive,  reliable  and  professional  in  their 
dealings with the Audit Committee and has appropriately assisted the Audit Committee in its oversight of the Company’s 
financial processes and financial statements.  In addition, EY makes available to the Company specialists within EY to 
assist in the audit when consultation on specific and unique issues is warranted.  These processes appear to be effective 
in assisting EY with their audit engagement. 

PROXY STATEMENT 

65 

 
 
 
 
 
 
 
As a part of the Audit Committee’s review of EY’s qualifications, EY provides the Company with the firm-wide comments 
from the Public Company Accounting Oversight Board (“PCAOB”) regarding PCAOB’s examinations of EY for the prior 
year.  EY also updates the Company with the quality improvements that the firm has made as a result of the PCAOB 
comments as well as other changes to their quality and risk assessment processes. 

Audit Committee’s Involvement In The Lead Partner Selection 

In accordance with SEC and PCAOB independence guidelines, EY employs a regular schedule of rotation of both the 
lead engagement partner (“Lead Partner”) and the concurring partner.  Such a regularly scheduled rotation provides for 
sufficient overlap of the new Lead Partner with the outgoing Lead Partner.  This process allows the members of the 
Audit  Committee  and  Company  management  to  become  familiar  with  the  new  Lead  Partner  and  new  staff  and  to 
introduce them to the Company’s business.  Prior to the new Lead Partner’s full engagement, the Audit Committee and 
Company management meet with EY to review and offer feedback on the industry experience, financial acumen and 
anticipated fit of the new Lead Partner with the Company. 

Public Accounting Firm 

Pursuant to our Audit Committee charter, our Audit Committee must pre-approve all audit and permissible non-audit 
services provided by the Company’s independent registered public accounting firm.  These services may include audit 
services, audit-related services, tax and other services.  Pre-approval is generally provided for up to one year, and any 
pre-approval is detailed as to the particular service or category of services and is generally subject to a specific budget.  
The  independent  registered  public  accounting  firm  and management  are  required  to  periodically  report  to  the  Audit 
Committee  regarding  the  extent  of  services  provided  by  the  independent  registered  public  accounting  firm  in 
accordance with this pre-approval and the fees for the services performed to date.  The Audit Committee may also pre-
approve particular services on a case-by-case basis.  During fiscal 2023, all services provided by EY to the Company 
were pre-approved by the Audit Committee in accordance with this policy, and the Audit Committee has concluded that 
the provision of these services is compatible with the accountants’ independence. 

Audit and Non-Audit Fees 

The following table sets forth the fees billed for the fiscal year ended December 30, 2023 and the fiscal year ended 
December 31, 2022 by EY, the Company’s independent registered public accounting firm. 

Fees 

2023 

2022 

Audit 

$2,190,000 

$2,025,000 

Audit Related 

$48,000 

Tax 

All Other 

Total 

— 

— 

$45,000 

$45,000 

$5,400 

$2,238,000 

$2,120,400 

Audit Fees 

Audit fees for the fiscal years ended December 30, 2023 and December 31, 2022 were for the audit of the Company’s 
annual financial statements including management’s assessment of internal control over financial reporting, the review 
of  the  Company’s  quarterly  financial  statements  and  statutory  and  regulatory  audits,  consents,  and  other  services.  
These fees may include services that are normally provided by the independent registered public accounting firm in 
connection with regulatory filings or engagements including any comfort letters and consents for financings and filings 
made with the SEC.  

PROXY STATEMENT 

66 

 
 
 
 
 
Audit Related Fees 

Audit related fees for the fiscal years ended December 30, 2023 and December 31, 2022 were for assurance and related 
services reasonably related to the performance of the audit or review of the Company’s annual financial statements that 
are not reported under “Audit Fees,” and consisted primarily of fees for employee benefit plan audits. 

Tax Fees 

Tax fees may include fees for tax compliance, tax planning and tax advice.  Tax fees for the fiscal year ended December 
31, 2022 were for tax advice.   

All Other Fees 

All other fees would consist of fees for products and services other than the services described above.  For the fiscal 
year ended December 31, 2022, all other fees included payments for an accounting and auditing information tool. 

Negotiation of the annual independent registered public accounting firm fees is the responsibility of the Audit Committee 
with the support of the Company’s CFO.  All of the EY fees listed in the chart above for fiscal years 2023 and 2022 were 
pre-approved by the Audit Committee, which concluded that the provision of such services by EY was compatible with 
the maintenance of that firm’s independence in the conduct of its audit functions. 

 Vote Required 

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled 
to vote will be required to ratify the appointment of Ernst & Young LLP as the Company’s independent registered public 
accounting firm for the year ending December 28, 2024. 

The Board recommends voting “FOR” the ratification of the appointment of  
Ernst & Young LLP as the Company’s independent registered public accounting firm for the year 
ending December 28, 2024. 

PROXY STATEMENT 

67 

 
 
 
 
 
 
  
 
AUDIT COMMITTEE REPORT 

The following is the Audit Committee’s report submitted to the Board for the fiscal year ended December 30, 2023. 

As  noted  in  the  Audit  Committee’s  charter,  management  is  responsible  for  the  Company’s  internal  controls  and  the 
financial  reporting  process.    The  independent  registered  public  accounting  firm  is  responsible  for  performing  an 
independent audit of the Company’s consolidated financial statements in accordance with the standards of the Public 
Company Accounting Oversight Board (United States) and for issuing a report thereon.  Additionally, the independent 
registered public accounting firm is responsible for performing an independent audit of the Company’s internal control 
over financial reporting and for issuing a report thereon.  The Committee’s responsibility is to monitor and oversee these 
processes.  

In this context, the Audit Committee of the Board has: 

• 

• 

• 

• 

• 

reviewed  and  discussed  with  management  and  with  Ernst  &  Young  LLP,  the  Company’s  independent 
registered public accounting firm, together and separately, the Company’s audited consolidated financial 
statements contained in its Annual Report on Form 10-K for the fiscal year ended December 30, 2023; 

discussed  with  Ernst  &  Young  LLP  the  matters  required  to  be  discussed  by  Statement  on  Auditing 
Standards No. 1301, Communications with Audit Committees; 

received the written disclosures and the letter from Ernst & Young LLP required by applicable requirements 
of  the  Public  Company  Accounting  Oversight  Board  regarding  the  independent  registered  public 
accounting firm’s communications with the Audit Committee concerning independence, and has discussed 
with Ernst & Young LLP its independence; 

discussed and reviewed with Ernst & Young LLP, with and without management present, the Company’s 
work in complying with the requirements of Section 404 under the Sarbanes-Oxley Act of 2002 regarding 
internal control over financial reporting; and 

discussed Ernst & Young LLP’s audit report on internal controls over financial reporting as of December 30, 
2023 with management and Ernst & Young LLP.  

Based  on  the  foregoing  review  and  discussions,  the  Audit  Committee  recommended  to  the  Board  that  the  audited 
financial statements be included in the Company’s Annual Report on Form 10-K for the fiscal year ended December 30, 
2023. 

THE AUDIT COMMITTEE 

Christine A. Tsingos (Chairperson) 
Leo Berlinghieri 
Stephen D. Kelley 
Susan D. Lynch 
Karen Rogge 

PROXY STATEMENT 

68 

 
 
 
 
 
 
 
 
 
 
 
  
 
EXECUTIVE OFFICER BIOGRAPHIES 

Set forth below is certain information regarding the executive officers of the Company and their ages as of April 5, 2024.  
Information  relating  to  Michael  P.  Plisinski  is  set  forth  above  under  the  caption  “PROPOSAL  1  -  ELECTION  OF 
DIRECTORS.”  The individuals listed reflect the Company’s officers designated by the Board as “Executive Officers” for 
the 2024 fiscal year.  The Company is unaware of any arrangements or understandings between the executive officers 
of the Company and other person(s) pursuant to which an executive officer was or is to be selected, except that Mr. 
Plisinski was appointed as CEO of the Company pursuant to the Merger Agreement for the 2019 Merger. 

Named Executive Officers (NEOs) 

Mark R. Slicer     Chief Financial Officer      

Age: 53 

•  Mr. Slicer has served the Company in his current role since May 2022. 

•  Prior Experience: 

ο  September 2019 to May 2022: Senior Vice President and Global Operations Controller at Boston Scientific, 
a global medical technology manufacturer, where he was responsible for the financial performance of the 
global manufacturing and distribution network having a production value of approximately $3 billion. 

ο 

ο 

February 2014 to September 2019: Senior Vice President and Corporate Controller, Boston Scientific, in 
which role he oversaw a team of over 500 finance employees across the globe, managing approximately 
$10 billion in revenue. 

February 2008 to February 2014: Executive roles in finance and internal audit, Boston Scientific. 

ο  Preceding Mr. Slicer’s tenure at Boston Scientific, he served in various finance and audit roles at General 

Electric and PricewaterhouseCoopers.   

•  Mr. Slicer holds a B.S. in Accounting from Providence College and is licensed as a Certified Public Accountant 

in the Commonwealth of Massachusetts. 

Yoon Ah E. Oh    Vice President, General Counsel, and Corporate Secretary  

Age:  42 

•  Ms. Oh has served the Company in her current role since October 2021. 

•  Prior Experience: 

ο 

ο 

ο 

June 2023 to January 2024: Vice President, Interim Global Human Resources, Onto Innovation. 

June 2020 to September 2021: Associate General Counsel and Corporate Secretary, Analog Devices, Inc., 
a semiconductor company, where she led the team responsible for corporate, M&A, and securities law 
matters. 

June  2018  to  May  2020:  Vice  President,  Associate  General  Counsel  and  Corporate  Secretary,  Endo 
International  Plc.,  a  specialty  pharmaceutical  company,  where  she  was  responsible  for  corporate  and 
securities law matters. 

ο  May 2017 to June 2018: Vice President, Associate General Counsel, Endo International Plc. 

ο  September 2015 to April 2017: Senior Counsel, Corporate, Endo International Plc. 

ο  September 2013 to September 2015:  Associate, Dechert LLP, an international law firm. 

ο  September 2007 to August 2013:  Associate, Cahill Gordon & Reindel LLP, an international law firm. 

•  Ms. Oh holds a B.A. in Political Science from Yale University and a J.D. from Harvard Law School. Ms. Oh is 

admitted to practice in the States of Pennsylvania and New York. 

PROXY STATEMENT 

69 

 
 
 
 
 
 
  
 
Srinivas Vedula, Ph.D. Senior Vice President, Customer Success     

Age:  51 

•  Dr. Vedula has served the Company in his current role since September 2021.  

•  Prior Experience: 

ο  October  2019  to  August  2021:    Vice  President,  Business  Development,  Metrology  Business  Unit,  Onto 

Innovation. 

ο  December 2017 to September 2019:  Vice President, Global Sales, Nanometrics. 

ο 

ο 

January 2014 to November 2017:  General Manager, Optical Metrology Solutions, Nanometrics. 

January  2009  to  December  2013:  Director  of  Marketing  and  Applications,  KLA  Corporation,  a  U.S. 
semiconductor capital equipment manufacturer. 

ο  Prior to 2009, Mr. Vedula held additional roles in product marketing and applications engineering over 12 

years with KLA Corporation. 

•  Dr. Vedula holds a Bachelor of Technology degree from the Indian Institute of Technology in Bombay, India and 

a Ph.D. from the University of Tennessee, both in Chemical Engineering. 

Ramil Yaldaei     Chief Operating Officer 

 Age: 60 

•  Mr. Yaldaei has served the Company in his current role since May 2023. 

•  Prior Experience: 

ο  October 2022 to May 2023: Vice President, Global Operations, Metrology and Inspection, Onto Innovation. 

ο  September 2020 to January 2022: Senior Vice President, Global Supply Chain & Transformation, Visby 
Medical, a molecular diagnostics company, where he was responsible for supply chain strategy, including 
commodity  management,  procurement,  sales  and  operations  planning,  and  supplier  quality  and 
engineering. 

ο  November 2017 to November 2020: President, RYCC, LLC, a consulting company, where he served as an 
advisory member on the boards of directors of two leading semiconductor companies and acted as an 
advisor to corporate executives in executing strategic growth plans. 

ο  September 2005 to November 2017: Vice President & GM, Global Part Sourcing & Technology, Applied 
Materials, a U.S. semiconductor capital equipment manufacturer, where he was responsible for a supply 
chain of over $2.2 billion in materials and managed over 550 employees globally. 

ο  September 2003 to October 2005: Managing Director, Global Sourcing and Operations, Lam Research, a 
U.S.  semiconductor  capital  equipment  manufacturer,  where  he  was  responsible  for  the  global 
commodities supply chain and managed over 500 employees globally. 

•  Mr. Yaldaei holds a B.S. and an M.S. in physics from San Jose State University. 

PROXY STATEMENT 

70 

 
 
 
 
 
 
  
 
Other Executive Officers 

Robert Fiordalice    Senior Vice President & General Manager, Metrology Business Unit    

 Age:  61 

•  Mr. Fiordalice has served the Company in his current role since January 2022. 

•  Prior Experience: 

ο  October 2019 to January 2022:  Vice President & General Manager, Wafer Solutions Business Unit, Onto 

Innovation. 

ο  August 2017 to October 2019:  General Manager, Materials Characterization Group, Nanometrics. 

ο  October 2013 to July 2017:  General Manager, Advanced Packaging, Nanometrics. 

ο  August  2006  to  August  2013:    Vice  President,  Account  Technology,  Intermolecular,  Inc.,  an  advanced 

materials innovation company. 

ο  Prior to 2006, Mr. Fiordalice held technology management roles with both KLA Corporation and Motorola 

Inc, a multinational telecommunications company. 

•  Mr. Fiordalice holds a B.S. in Genetics from University of California at Berkeley and an M.S. in Physics from 

Syracuse University. 

David Mayson Brooks    Vice President & General Manager, Inspection Business Unit 

Age: 64 

•  Mr. Brooks has served the Company in his current role since July 2023. 

•  Prior Experience: 

ο  May 2022 to July 2023: Vice President, Business Development - Advanced Packaging, Onto Innovation. 

ο 

January 2020 to May 2022: Independent Consultant, during which time Mr. Brooks provided consulting 
services for semiconductor sales and business analysis for mergers and acquisitions. 

ο  December 2017 to December 2019: Vice, President, Global Sales & Service, Quantum Global Technologies, 
LLC (merged with Ultra Clean Holdings, Inc. in 2018), a company that provides outsourced tool cleaning 
services for the semiconductor industry, where he led the global sales and customer service teams in 10 
countries worldwide.  

ο 

July  2015  to  December  2017:  President,  AkroMetrix,  LLC,  a  global  supplier  of  thermal  warpage  capital 
equipment to the semiconductor industry, where he led all facets of the company’s operations.  

ο  October 2013 to November 2014: Senior Vice President, Worldwide Sales, Marketing & Field Operations, 

Rudolph. 

ο  Prior to October 2013, Mr. Brooks held other management roles at Rudolph for 14 years. 

•  Mr.  Brooks  holds  a  B.S.  from  the  United  States  Naval  Academy  and  an  M.B.A.  from  the  University  of  North 

Carolina at Chapel Hill. 

PROXY STATEMENT 

71 

 
 
 
 
 
 
 
  
 
SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS 

The following table sets forth certain information with respect to beneficial ownership of the Common Stock as of March 
25, 2024 (except as otherwise indicated), by (i) each individual or group known by the Company to own beneficially 
more  than  five  percent  (5%)  of  the  Common  Stock;  (ii)  each  of  the  NEOs;  (iii)  each  of  the  Company’s  directors  and 
director nominees; and (iv) all directors, director nominees and executive officers as a group.  Except as indicated in 
the footnotes to this table, the persons named in the table have sole voting and investment power with respect to all 
shares of Common Stock shown as beneficially owned by them, subject to community property laws where applicable. 

Name and Address of Beneficial Owner 

Amount and Nature of 
Beneficial Ownership 

Percent of 
Class(1) 

BlackRock, Inc.(2), 50 Hudson Yards, New York, NY 10001 

6,145,448 

12.5% 

The Vanguard Group(3), 100 Vanguard Boulevard, Malvern, PA 19355 

5,188,815 

10.6% 

Michael P. Plisinski 

Mark R. Slicer 

Yoon Ah E. Oh 

Srinivas Vedula 

Ramil Yaldaei 

Leo Berlinghieri 

Susan D. Lynch(4) 

Stephen D. Kelley 

David B. Miller 

Karen M. Rogge 

Christopher A. Seams 

May Su 

Christine A. Tsingos 

All directors, director nominees and executive  
   officers as a group (Fifteen (15) persons)(5) 

*  Less than 1% 

201,433 

5,312 

4,309 

15,130 

2,802 

19,401 

- 

2,700 

9,008 

5,150 

34,829 

4,300 

42,109 

352,427 

* 

* 

* 

* 

* 

* 

* 

* 

* 

* 

* 

* 

* 

* 

(1)  Applicable percentage ownership is based on 49,201,979 shares of Common Stock outstanding as of March 25, 
2024.    Beneficial  ownership  of  shares  is  determined  in  accordance  with  the  rules  of  the  SEC  and  generally 
includes shares as to which a person holds sole or shared voting or investment power.  Shares of Common Stock 
subject to RSUs which will vest within sixty (60) days of March 25, 2024 are deemed to be beneficially owned by 
the person holding such RSUs for the purpose of computing the percentage ownership of such person but are 
not treated as outstanding for the purpose of computing the percentage ownership of any other person.  Unless 
otherwise noted, the address for the executive officers and directors named in this table is c/o Onto Innovation 
Inc., 16 Jonspin Road, Wilmington, Massachusetts 01887. 

(2)  Information provided herein is based on the Schedule 13G/A that was filed by BlackRock, Inc. on January 23, 
2024, which reported that BlackRock, Inc. had sole voting power over 6,061,549 shares, shared voting power 
over zero shares, sole dispositive power over 6,145,448 shares and shared dispositive power over zero shares. 

(3)  Information provided herein is based on the Schedule 13G/A that was filed by The Vanguard Group on February 
13, 2024, which reported that The Vanguard Group had sole voting power over zero shares, shared voting power 
over 82,524 shares, sole dispositive power over 5,054,083 shares and shared dispositive power over 134,732 
shares. 

(4)  Ms. Lynch did not become a Company director until March 15, 2024. 

PROXY STATEMENT 

72 

 
 
 
 
 
  
 
(5)  Includes 23,214 shares subject to restricted stock units vesting within 60 days of March 25, 2024 for all directors, 

director nominees, and executive officers as a group. 

EQUITY COMPENSATION PLAN INFORMATION 

The following table sets forth, as of December 30, 2023, certain information related to our equity compensation plans. 

Plan Category 

Equity compensation plans 
   approved by security holders 
Equity compensation plans not 
   approved by security holders 

Total 

(A) 

(B) 

Number of Securities to be 
Issued Upon Exercise of 
Outstanding Options, 
Warrants, and Rights(1) 

Weighted-Average 
Exercise Price of 
Outstanding Options, 
Warrants and Rights 

(C) 
Number of Securities Remaining 
Available For Future Issuance 
Under Equity Compensation Plans 
(Excluding Securities Reflected In 
Column (A))(2) 

583,876 

n/a 

583,876 

— 

n/a 

— 

3,892,182 

n/a 

3,892,182 

(1) 

Includes 583,876 shares issuable upon vesting of outstanding restricted stock units under the Onto Innovation 
Inc. 2020 Stock Plan and the Rudolph Technologies, Inc. 2018 Stock Plan. 

(2)  As of December 30, 2023, 2,867,573 shares were available under the 2020 Stock Plan and 1,024,609 shares 

were available under the ESPP. 

The Company knows of no other matters to be submitted for consideration at the Annual Meeting.  If any other matters 
properly come before the Annual Meeting, it is the intention of the persons acting as proxies to vote the shares they 
represent as the Board may recommend. 

OTHER MATTERS 

PROXY STATEMENT 

73 

 
 
 
 
 
 
 
 
  
 
QUESTIONS AND ANSWERS ABOUT THE ANNUAL MEETING 

What Is The Purpose Of The Annual Meeting? 

At the Annual Meeting, stockholders will be asked to vote upon the matters set forth in the accompanying Notice of 
Annual Meeting, including: 

• 

• 

• 

the election of eight directors;  

an advisory vote to approve named executive officer compensation; and 

the ratification of the appointment of our independent registered public accounting firm for fiscal 2024,  

all of which are more fully described herein. 

Will Other Matters Be Voted On At The Annual Meeting? 

We are not currently aware of any matters to be presented at the Annual Meeting other than those described in this 
proxy statement.  If any other matters not described in the proxy statement are properly presented at the meeting, any 
proxies received by us will be voted in the discretion of the proxy holders. 

Who Is Entitled To Vote? 

If you were a stockholder of record as of the close of business on March 25, 2024, which is referred to in this proxy 
statement  as  the  “record  date,”  you  are  entitled  to  receive  notice  of  the  Annual  Meeting  and  to  vote  the  shares  of 
Common Stock that you held as of the close of business on the record date.  Each stockholder is entitled to one vote 
for each share of Common Stock held by such stockholder on the record date. 

May I Attend The Meeting? 

All stockholders of record as of the record date may attend the Annual Meeting, which will be held at the Company’s 
offices located at 1550 Buckeye Drive, Milpitas, CA 95035.  To obtain directions to attend the Annual Meeting and vote 
in  person,  please  visit  our  website  (www.ontoinnovation.com),  and  click  on  “Company,”  then  “Locations,”  and  then 
“California” to access the interactive map.  As always, we encourage you to vote your shares prior to the Annual Meeting. 

What is Required To Be Admitted To The Annual Meeting? 

If you have a stock certificate or hold shares in an account with our transfer agent, you are considered the “stockholder 
of record” with respect to those shares.  If you are a stockholder of record, you will need valid picture identification and 
proof that you are a stockholder of record of the Company as of the record date to gain admission to the Annual Meeting. 

If you are a beneficial holder, you will be required to present a valid picture identification and proof from your bank, 
broker or other record holder of your shares that you are the beneficial owner of such shares to gain admission to the 
Annual Meeting.  If you are a beneficial holder and wish to vote your shares at the meeting, you will need a legal proxy 
from your bank, broker or other record holder of your shares.  

All attendees will be expected to comply with any health and safety protocols in effect at the Company’s facility at the 
time of the Annual Meeting. 

What Constitutes A Quorum? 

The required quorum for the transaction of business at the Annual Meeting is a majority of the issued and outstanding 
shares of Common Stock, present in person or by proxy and entitled to vote at the Annual Meeting.  On the record date, 
49,201,979 shares of the Common Stock were issued and outstanding, each entitled to one vote on each matter to be 
acted upon at the Annual Meeting.  Your shares will be counted towards the quorum only if you submit a valid proxy (or 
one  is  submitted  on  your  behalf  by  your  broker,  bank  or  other  nominee)  or  if  you  vote  in  person  at  the  meeting.  
Abstentions and broker non-votes will be counted to determine whether there is a quorum present.  If a quorum is not 
present, the Annual Meeting may be adjourned or postponed to a later date. 

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What Are “Broker Non-Votes”? 

A broker non-vote occurs when a bank, broker or other registered holder of record holds shares for a beneficial owner 
but  is  not  empowered  to  vote  on  a  particular  proposal  on  behalf  of  such  beneficial  owner  because  the  proposal  is 
considered “non-routine” and the beneficial owner has not provided voting instructions on that proposal.  The election 
of  directors  and  the  advisory  vote  to  approve  named  executive  officer  compensation  are  treated  as  “non-routine” 
proposals.  This means that if a brokerage firm holds your shares on your behalf, those shares will not be voted with 
respect  to  any  of  these  proposals  unless  you  provide  instructions  to  that  firm.    See  below  under  “What  Is  the  Vote 
Required for Election of Directors?” and “What Is the Vote Required for the Approval of Proposals Other Than Director 
Elections?” for a discussion of the impact of broker non-votes on each of the proposals that will be presented at the 
Annual Meeting.  In order to ensure that any shares held on your behalf by a bank, broker or other registered holder of 
record are voted in accordance with your wishes, we encourage you to provide instructions to that firm or organization 
in accordance with the Notice or voting instruction form provided by the broker, bank or other registered holder or to 
contact your broker, bank or other registered holder to request a proxy form. 

Who Bears The Cost Of Soliciting Proxies? 

The Company will bear the  cost of soliciting proxies.  In addition, the Company may reimburse brokerage firms and 
other persons representing beneficial owners of shares for their expenses in forwarding solicitation material to such 
beneficial  owners.    Solicitation  of  proxies  by  mail  may  be  supplemented  by  telephone,  facsimile,  e-mail  or  other 
electronic  means  or  personal  solicitation by directors, officers  or  regular  employees  of  the  Company.   No  additional 
compensation will be paid to such persons for such services. 

Why Did I Receive A “Notice Of Internet Availability Of Proxy Materials” But No Proxy Materials? 

We are distributing the Company’s proxy materials to stockholders of record via the Internet in accordance with the 
“Notice and Access” approach permitted by rules of the SEC.  This approach benefits the environment, while providing 
a timely and convenient method of accessing the materials and voting.  Accordingly, we have sent you a Notice because 
the Board of the Company is soliciting your proxy to vote at the 2024 Annual Meeting of Stockholders, including at any 
adjournments or postponements of the meeting.  On or about April 5, 2024, the Company will begin mailing the Notice 
to all stockholders of record entitled to vote at the Annual Meeting.  All stockholders will have the ability to access the 
proxy  materials  on  the  website  referred  to  in  the  Notice  or  request  to  receive  a  printed  set  of  the  proxy  materials.  
Instructions on how to access the proxy materials over the Internet or to request a printed copy of the proxy materials 
and the Company’s 2023 Annual Report may be found in the Notice. 

What Does It Mean If I Received More Than One Notice? 

If you receive more than one Notice, your shares may be registered in more than one name or in different accounts.  
Please follow the voting instructions on each of the Notices to ensure that all of your shares are voted. 

How Do I Go About Voting? 

You may vote “For” or “Against” each of the director nominees or you may “Abstain” from voting with respect to any 
nominee.  For each of the other matters to be voted on, you may vote “For” or “Against” or “Abstain” from voting. 

Voting For Shares Registered Directly In The Name Of The Stockholder 

If you are a stockholder of record with shares registered in your name, you can vote by one of the following methods: 

• 

In  Person - To vote in person, come to the Annual Meeting and you will receive a ballot when you arrive.  
You will be required to show valid picture identification and proof that you are a stockholder of record of 
the Company as of the record date to be admitted to the Annual Meeting. 

•  Via the Internet - To submit your proxy by Internet, go to www.proxyvote.com and follow the instructions 
on the secure website.  The deadline for proxy submission via the Internet is 11:59 p.m. (ET) on May 21, 
2024. 

•  Via Telephone – To submit your proxy by telephone, call toll free 1-800-690-6903 within the United States, 

US territories and Canada.  The deadline for voting by phone is 11:59 p.m. (ET) on May 21, 2024. 

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•  By Mail – Stockholders who receive a paper proxy card may complete, sign and date their proxy card and 
mail  it  in  the  pre-addressed  postage-paid  envelope  that  accompanies  the  proxy  card.    Proxy  cards 
submitted by mail must be received prior to the time of the Annual Meeting in order for your shares to be 
voted. 

Even  if  you  plan  to  attend  the  Annual  Meeting,  we  recommend  that  you  submit  your  proxy  in  advance  so  that  your 
shares are represented at the Annual Meeting in the event you are unable to attend the meeting.  Each stockholder of 
record is entitled to one vote for each share of Common Stock owned by such stockholder on all matters presented at 
the Annual Meeting.  Stockholders do not have the right to cumulate their votes in the election of directors. 

If you return a signed and dated proxy card but do not indicate how the shares are to be voted, those shares will be 
voted in accordance with Onto Innovation’s Board’s recommendations.  A valid proxy card also authorizes the individuals 
named therein as proxies to vote your shares in their discretion on any other matters, which, although not described in 
the proxy statement, are properly presented for action at the Annual Meeting.  If you indicate on your proxy card that 
you wish to “abstain” from voting on an item, your shares will not be voted on that item. 

While Internet proxy voting is being provided to allow you to submit your proxy online, with procedures designed to 
ensure the authenticity and correctness of your proxy vote instructions, please be aware that you must bear any costs 
associated with your Internet access, such as usage charges from Internet access providers and telephone companies. 

Voting By Proxy For Shares Registered In Street Name 

If your shares are held in a stock brokerage account or by a bank or other holder of record, you are considered the 
“beneficial owner” of shares held in “street name.”  As the beneficial owner, you have the right to direct your broker, 
bank  or  other  holder  of  record  on  how  to  vote  your  shares  by  submitting  voting  instructions  to  such  person  in 
accordance with the directions that the entity provides.  In the event you are considered the “beneficial owner” of shares 
held in “street name” and you wish to vote in person at the Annual Meeting, you must obtain a legal proxy from your 
broker, bank or another agent.  Your vote also authorizes the person(s) acting as your proxy to vote your shares in their 
discretion.  Follow the instructions from your broker or bank included with these proxy materials or contact your broker 
or bank to request a legal proxy. 

May I Revoke My Proxy Or My Voting Instructions? 

If you are a stockholder of record, you may revoke your proxy or change your vote after submitting your proxy at any 
time before the polls close at the Annual Meeting by doing any of the following: 

•  By  delivering  a  written  notice  of  revocation  or  a  duly  executed  proxy  card  bearing  a  later  date  to  the 
Corporate  Secretary  of  the  Company  at  the  Company’s  principal  executive  offices  prior  to  the  Annual 
Meeting; 

•  By submitting a timely and valid later proxy online at www.proxyvote.com; 

•  By  submitting  a  timely  and  valid  later  proxy  by  telephone  call  to  1-800-690-6903  within  the  USA,  US 

territories and Canada; or 

•  By attending the Annual Meeting and voting in person.  

If  you  are  a  beneficial  owner  of  shares,  please  contact  your  bank,  broker  or  other  holder  of  record  for  specific 
instructions on how to change or revoke your voting instructions. 

What Happens If I Do Not Vote? 
Stockholder Of Record:  Shares Registered In Your Name 

If you are a stockholder of record and do not submit a proxy by mail, telephone, or the Internet or by attending the 
Annual Meeting and voting in person, your shares will not be voted. 

Beneficial Owner:  Shares Registered In The Name Of Broker Or Bank 

If you are a beneficial owner and do not instruct your broker, bank, or other agent how to vote your shares, the question 
of  whether  your  broker  or  nominee  will  still  be  able  to  vote  your  shares  depends  on  whether  the  NYSE  deems  the 
particular proposal to be a “routine” matter.  Brokers and nominees can use their discretion to vote “uninstructed” shares 
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with respect to matters that are considered to be “routine,” but not with respect to “non-routine” matters.  Under the 
rules  and  interpretations  of  the  NYSE,  “non-routine”  matters  are  matters  that  may  substantially  affect  the  rights  or 
privileges  of  stockholders,  such  as  mergers,  stockholder  proposals,  elections  of  directors  (even  if  not  contested), 
executive officer compensation (including any advisory stockholder votes on executive officer compensation and on 
the  frequency  of  stockholder  advisory  votes  on  named  executive  officer  compensation),  and  certain  corporate 
governance proposals, even if management supported.  Accordingly, your broker or nominee may not vote your shares 
on the election of directors or the advisory proposal to approve the named executive officer compensation without your 
instructions, but may vote your shares on the proposal to ratify the appointment of Ernst & Young LLP as the Company’s 
independent registered public accounting firm for the fiscal year ending December 28, 2024 even in the absence of 
your instruction. 

What If I Return A Proxy Card Or Otherwise Submit a Proxy But Do Not Make Specific Choices? 

If you return a signed and dated proxy card or otherwise submit a proxy without marking voting selections, your shares 
will be voted, as applicable, “For” the election of all eight nominees for director, “For” the advisory approval of the named 
executive officer compensation, and “For” the ratification of the appointment of Ernst & Young, LLP as the independent 
registered public accounting firm of the Company for its fiscal year ending December 28, 2024.  If any other matter is 
properly presented at the meeting, your proxyholder will vote your shares using his or her best judgment. 

What Is The Vote Required For Election Of Directors? 

For  the  election  of  directors,  each  director  is  elected  by  a  majority  of  the  votes  cast  (except  that  if  the  number  of 
nominees exceeds the number of directors to be elected, directors will be elected by a plurality voting standard).  This 
means that for a director nominee to be elected to our Board, the number of votes cast “for” a director’s election must 
exceed  the  number  of  votes  cast  “against”  that  director’s  election  (with  “abstentions”  and  “broker  non-votes”  not 
counted as a vote cast either “for” or “against” that director’s election, although abstentions and broker non-votes count 
for the purpose of determining a quorum).  Our Bylaws provide for election of directors by a majority of votes cast in 
uncontested elections, and our Corporate Governance Guidelines provides that any incumbent director nominee in an 
uncontested election who does not receive an affirmative majority of votes cast must promptly tender such director’s 
resignation to our Board.  Further information regarding the process that will be followed if such an event occurs can 
be located under the heading “Proposal 1 - Election of Directors.” 

What Is The Vote Required For The Approval Of Proposals Other Than Director Elections? 

The proposal to approve, on an advisory basis, the compensation of our named executive officers and the proposal to 
ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the fiscal year 
ending December 28, 2024 each requires the affirmative vote, in person or by proxy, of a majority of the shares present 
in person or represented by proxy at the meeting and entitled to vote on the matter to be approved.  For each of these 
two  proposals,  abstentions  in  effect  count  as  negative votes,  because  they  are  shares  represented  in  person  or  by 
proxy that are entitled to vote on the matter and not voted in the affirmative.  Broker non-votes are not counted as part 
of the vote total (because they are not considered “entitled to vote” on the matter) and have no effect on the outcome. 

What Is Householding? 

The  Company  has  adopted  a  procedure  approved  by  the  SEC  called  “householding.”    Under  this  procedure,  when 
multiple  stockholders  of  record  share  the  same  address,  we  may  deliver only  one (1)  Notice  or  set  of  householding 
materials to that address unless we have received contrary instructions from one or more of those stockholders.  The 
same procedure may be followed by brokers and other nominees holding shares of our stock in “street name” for more 
than one beneficial owner with the same address. 

If a stockholder holds shares of stock in multiple accounts (e.g., with our transfer agent and/or banks, brokers or other 
registered stockholders), we may be unable to use the householding procedures and, therefore, that stockholder may 
receive multiple copies of the Notice.  You should follow the instructions on each Notice that you receive in order to 
vote the shares you hold in different accounts. 

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A stockholder that shares an address with another stockholder if such household has received only one Notice, may 
write or call us as specified below: 

•  To request a separate copy of such materials, which will be promptly mailed without charge; and 

•  To request that separate copies of these materials be sent to his or her home for future meetings.  

Conversely, a stockholder of record who shares the same address with another stockholder of record may write or call 
us as specified below to request that a single set of proxy materials be delivered to that address.  Such stockholder 
requests may be made to our Investor Relations Department either via phone at 978-253-6200 or by mail directed to: 

Onto Innovation Inc. 
Attention: Investor Relations 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

If you are a beneficial owner of shares held in street name, please contact your bank, broker or other holder of record 
regarding such requests. 

How Can I Find Out the Results Of The Voting At The Annual Meeting? 

Preliminary voting results will be announced at the Annual Meeting.  Final voting results will be published in a Current 
Report on Form 8-K that we expect to file within four business days after the Annual Meeting.  If final voting results are 
not available to us in time to file a Form 8-K within four business days after the meeting, we intend to file a Form 8-K to 
publish preliminary results and, within four business days after the final results are known to us, file an additional Form 
8-K to publish the final results. 

What Are The Deadlines For Submission Of Stockholder Proposals For The 2025 Annual Meeting? 

Stockholders of the Company are entitled to present proposals for consideration at forthcoming stockholder meetings 
provided that they comply with the proxy rules promulgated by the SEC, if applicable, and the Bylaws of the Company.  
Stockholders wishing to present a proposal at the Company’s 2025 Annual Meeting of Stockholders must submit such 
proposal in writing to the Corporate Secretary at Onto  Innovation Inc., 16 Jonspin Road, Wilmington, Massachusetts 
01887 no later than December 6, 2024 in accordance with Rule 14a-8 under the  Exchange Act, if they wish for it to be 
eligible for inclusion in the proxy statement and form of proxy relating to that meeting.  In addition, under the Company’s 
Bylaws, a stockholder wishing to nominate a director or make a proposal at the 2025 Annual Meeting of Stockholders 
outside of Exchange Act Rule 14a-8 must submit such nomination or proposal in writing to the Corporate Secretary at 
the above address no earlier than January 22, 2025 and no later than February 21, 2025.  In addition, to comply with 
the universal proxy, stockholders who intend to solicit proxies in support of director nominees other than the Company 
nominees  in  connection  with  the  2025  Annual  Meeting  of  Stockholders  must  provide  notice  that  sets  forth  the 
information required by Rule 14a-19 under the Exchange Act, postmarked or submitted electronically to the Company 
at its principal executive office no later than March 24, 2025. 

The Nominating & Governance Committee will also consider qualified director nominees recommended by stockholders.  
Our process for receiving and evaluating Board member nominations from our stockholders is described above under 
the caption “Consideration Of Director Nominees.” 

You are also advised to review the Company’s Bylaws, which contain additional requirements about advance notice of 
stockholder proposals and director nominations. 

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Stockholders may obtain a copy of the Company’s Annual Report on Form 10-K for the fiscal year ended December 30, 
2023, including financial statements and schedules included in the Annual Report on Form 10-K, without charge, by 
visiting the Company’s website at https://investors.ontoinnovation.com/ or by writing to: 

ADDITIONAL INFORMATION 

Onto Innovation Inc. 
Attention: Investor Relations 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

Upon written request to the Company, at the above address for Investor Relations, the exhibits set forth on the exhibit 
index of the Company’s Annual Report on Form 10-K will be made available at reasonable charge (which will be limited 
to our reasonable expenses in furnishing such exhibits). 

BY ORDER OF THE BOARD OF DIRECTORS 

Yoon Ah E. Oh 
Corporate Secretary 

Dated: April 5, 2024 

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79 

 
 
 
 
 
 
 
 
 
 
 
Christopher A. SeamsChairman of the BoardFormer Chief Executive OfficerDeca TechnologiesLeo BerlinghieriFormer Chief Executive Officer and PresidentMKS Instruments, Inc.Stephen D. KelleyPresident and Chief Executive OfficerAdvanced Energy Industries, Inc.Susan D. LynchFormer Senior Vice President and ChiefFinancial OfficerV2X, Inc.David B. MillerFormer PresidentDuPont Electronics & CommunicationsMichael P. PlisinskiChief Executive OfficerKaren M. RoggeFounder and PresidentRYN Group LLCMay SuFormer Chief Executive OfficerKateeva, Inc.Christine A. TsingosFormer Executive Vice President and ChiefFinancial OfficerBio-Rad LaboratoriesMichael P. PlisinskiChief Executive OfficerMark R. SlicerChief Financial OfficerRamil YaldaeiChief Operating OfficerRobert FiordaliceSenior Vice President and General Manager,Metrology Business UnitMayson BrooksVice President and General Manager, Inspection Business UnitSrinivas VedulaSenior Vice President, Customer SuccessYoon Ah OhVice President,General Counsel and Corporate Secretary