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Onto Innovation

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FY2022 Annual Report · Onto Innovation
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Dear Fellow Stockholders

We are incredibly pleased to report that Onto 
Innovation had another record year with 
systems revenue growth of 32% significantly 
exceeding industry estimates of 8-10% 
growth in wafer fab equipment for 2022. With 
relentless focus on driving operational 
efficiencies, our GAAP earnings per share 
increased 57% over the prior year.  

Financial Highlights
While growing earnings over the prior year, 
we simultaneously increased our investments 
in R&D, expanded manufacturing capacity, 
and added infrastructure that established 
new training centers closer to our customers 
in Asia. These investments are in preparation 
for an expected return to growth beyond 
2023 when markets stabilize. 

Our balance sheet remains quite strong, with 
$548 million in total cash and investments 
with no debt. We believe this gives us at a 
competitive advantage as we continue to look 
toward growth through M&A. In addition, our 
strong balance sheet allows us to return 
capital to stockholders. In 2022, we evaluated 
opportunistic market conditions for potential 
repurchases of our stock. Our total share 
repurchases were just over one million shares 
resulting in a return of capital to stockholders 
of $65.3 million dollars. The share 
repurchases were executed under our 
existing $100 million dollar authorization by 
the board of directors, with the balance 
remaining in place. 

Secular Trends Driving Sustainable Growth
The electronics and semiconductor markets 
continue to experience accelerated adoption 
of several industry growth drivers that enable 
the technology that is transforming how we 
live and work. That transformative technology 
is enabling secular demand drivers such as 

high-performance computing (HPC), artificial 
intelligence (AI), machine learning (ML), rapid 
growth in new automotive electronics, and 5G 
communication expansions. These secular 
trends are driving our logic and memory 
customers to continuously manufacture 
next-generation semiconductor wafers as 
well as new and increasingly more complex 
advanced packaging that includes multiple 
devices in a single package to support the 
increasing global demand for data driven 
information. In addition, our automotive and 
compound semiconductor customers 
continue to expand their power and specialty 
device manufacturing to support the growth 
of automotive electronic content, electric 
vehicles, rapid charging, and renewable 
energy infrastructure. We continue to see 
secular growth coming from each of these 
high growth markets as our customers install 
new technologies within their existing fabs 
and build new fabs to keep up with demand in 
the future. 

Perhaps just as important as long-term 
market growth is the increasing need for 
process control solutions that are developed 
by Onto Innovation’s engineering teams. Our 
diverse and unique product portfolio, which 
spans bare wafer manufacturing, wafer fabs, 
and advanced packaging, provides a broad 
understanding of innovative ways to improve 
processes across the value chain. Many of 
those process steps will have increased 
complexity associated with the anticipated 
new transistor architectures and advanced 
packaging methods that require significantly 
more metrology and inspection equipment to 
optimize the manufacturing yields. 

Our Environmental Focus
We made important strides in our 
environmental, social and governance (ESG) 
commitments as we continued to outpace 

our yearly milestones for greenhouse gas 

continuously change how we are all 

reductions and renewable energy usage in 

connected to our families, communities, and 

our facilities. We recognize that a healthy 

the world. As we continue to grow, we remain 

environment is a necessary foundation for a 

confident in the leverage of our business 

stable economy and society. By increasing 

model and financial structure with a 

yields and decreasing cycle times, Onto 

commitment to our long-term operating model 

facilitates higher output while helping 

and an expectation to generate robust cash 

customers reduce their carbon footprint 

flow and returning capital to our stockholders.  

through reductions in overall power 

consumption per wafer and other 

necessary utilities. 

And finally, on behalf of the entire team at 

Onto Innovation and the board of directors, 

we thank you for your dedicated support 

In addition to helping customers reduce 

and investment.

their impact on the environment we also 

seek to reduce our own carbon footprint by 

Sincerely,

at least 30% by 2025. In 2022 we achieved 

significant progress toward that goal as, 

compared to 2021, we reduced our water 

consumption by 55%, increased our use of 

renewable energy to 32%, and reduced our 

carbon footprint per person by 29%.

Looking Ahead

Perhaps the most exciting company record we 

set in 2022 was for awards we received from 

customers. Customers presented four awards 

to Onto Innovation ranging from a “best 

supplier” award to a “novel technology” award. 

In addition, the Atlas® V metrology system 

was acknowledged by the industry as the best 

new product launch at SEMICON® West by 

SEMI® and Semiconductor Digest magazine.

We are becoming a more strategic and critical 

partner for our customers and our role in the 

industry is growing. With processes 

increasing in complexity across that value 

chain, the demand for our process control 

solutions has been growing faster than 

industry. We are excited to contribute to our 

customers’ innovations, which are enabling 

global transitions to HPC, AI, ML, 

electrification of vehicles, and the creation of 

next-generation technologies that 

 
  
We are incredibly pleased to report that Onto 

high-performance computing (HPC), artificial 

Innovation had another record year with 

intelligence (AI), machine learning (ML), rapid 

systems revenue growth of 32% significantly 

growth in new automotive electronics, and 5G 

exceeding industry estimates of 8-10% 

communication expansions. These secular 

growth in wafer fab equipment for 2022. With 

trends are driving our logic and memory 

relentless focus on driving operational 

customers to continuously manufacture 

efficiencies, our GAAP earnings per share 

next-generation semiconductor wafers as 

increased 57% over the prior year.  

Financial Highlights

well as new and increasingly more complex 

advanced packaging that includes multiple 

devices in a single package to support the 

While growing earnings over the prior year, 

increasing global demand for data driven 

we simultaneously increased our investments 

information. In addition, our automotive and 

in R&D, expanded manufacturing capacity, 

compound semiconductor customers 

and added infrastructure that established 

continue to expand their power and specialty 

new training centers closer to our customers 

device manufacturing to support the growth 

in Asia. These investments are in preparation 

of automotive electronic content, electric 

for an expected return to growth beyond 

vehicles, rapid charging, and renewable 

2023 when markets stabilize. 

energy infrastructure. We continue to see 

secular growth coming from each of these 

Our balance sheet remains quite strong, with 

high growth markets as our customers install 

$548 million in total cash and investments 

new technologies within their existing fabs 

with no debt. We believe this gives us at a 

and build new fabs to keep up with demand in 

competitive advantage as we continue to look 

the future. 

toward growth through M&A. In addition, our 

strong balance sheet allows us to return 

Perhaps just as important as long-term 

capital to stockholders. In 2022, we evaluated 

market growth is the increasing need for 

opportunistic market conditions for potential 

process control solutions that are developed 

repurchases of our stock. Our total share 

by Onto Innovation’s engineering teams. Our 

repurchases were just over one million shares 

diverse and unique product portfolio, which 

resulting in a return of capital to stockholders 

spans bare wafer manufacturing, wafer fabs, 

of $65.3 million dollars. The share 

and advanced packaging, provides a broad 

repurchases were executed under our 

understanding of innovative ways to improve 

existing $100 million dollar authorization by 

processes across the value chain. Many of 

the board of directors, with the balance 

those process steps will have increased 

remaining in place. 

complexity associated with the anticipated 

new transistor architectures and advanced 

packaging methods that require significantly 

Secular Trends Driving Sustainable Growth

more metrology and inspection equipment to 

The electronics and semiconductor markets 

optimize the manufacturing yields. 

continue to experience accelerated adoption 

of several industry growth drivers that enable 

Our Environmental Focus

the technology that is transforming how we 

We made important strides in our 

live and work. That transformative technology 

environmental, social and governance (ESG) 

is enabling secular demand drivers such as 

commitments as we continued to outpace 

continuously change how we are all 
connected to our families, communities, and 
the world. As we continue to grow, we remain 
confident in the leverage of our business 
model and financial structure with a 
commitment to our long-term operating model 
and an expectation to generate robust cash 
flow and returning capital to our stockholders.  

And finally, on behalf of the entire team at 
Onto Innovation and the board of directors, 
we thank you for your dedicated support 
and investment.

Sincerely,

Michael P. Plisinski
Chief Executive Officer

Christopher A. Seams
Chairman of the Board

our yearly milestones for greenhouse gas 
reductions and renewable energy usage in 
our facilities. We recognize that a healthy 
environment is a necessary foundation for a 
stable economy and society. By increasing 
yields and decreasing cycle times, Onto 
facilitates higher output while helping 
customers reduce their carbon footprint 
through reductions in overall power 
consumption per wafer and other 
necessary utilities. 

In addition to helping customers reduce 
their impact on the environment we also 
seek to reduce our own carbon footprint by 
at least 30% by 2025. In 2022 we achieved 
significant progress toward that goal as, 
compared to 2021, we reduced our water 
consumption by 55%, increased our use of 
renewable energy to 32%, and reduced our 
carbon footprint per person by 29%.

Looking Ahead
Perhaps the most exciting company record we 
set in 2022 was for awards we received from 
customers. Customers presented four awards 
to Onto Innovation ranging from a “best 
supplier” award to a “novel technology” award. 
In addition, the Atlas® V metrology system 
was acknowledged by the industry as the best 
new product launch at SEMICON® West by 
SEMI® and Semiconductor Digest magazine.

We are becoming a more strategic and critical 
partner for our customers and our role in the 
industry is growing. With processes 
increasing in complexity across that value 
chain, the demand for our process control 
solutions has been growing faster than 
industry. We are excited to contribute to our 
customers’ innovations, which are enabling 
global transitions to HPC, AI, ML, 
electrification of vehicles, and the creation of 
next-generation technologies that 

 
  
Safe Harbor

Certain statements in this document may be considered "forward-looking statements" or may be based on 
"forward-looking statements," including, but not limited to, those concerning: our business momentum and 
future growth; technology development, product introduction and acceptance of our products and services; 
our manufacturing practices and ability to both deliver products and services consistent with our customers' 
demands and expectations and to strengthen our market position, including our ability to source components, 
materials, and equipment due to supply chain delays or shortages; our expectations of the semiconductor 
market outlook; future revenue, gross profits, research and development and engineering expenses, selling, 
general and administrative expenses, and cash requirements; the effects of political, economic, legal, and 
regulatory changes or conflicts on our global operations; the effects of natural disasters or public health 
emergencies, such as the current COVID-19 pandemic, on the global economy and on our customers, 
suppliers, employees, and business; our dependence on certain significant customers and anticipated trends 
and developments in and management plans for our business and the markets in which we operate; our ability 
to be successful in managing our cost structure and cash expenditures and results of litigation; as well as other 
matters that are not purely historical data. Statements contained or incorporated by reference in this document 
that are not purely historical are forward-looking statements and are subject to safe harbors created under 
Section 27A of the Securities Act of 1933, as amended, Section 21E of the Securities Exchange Act of 1934, as 
amended (the "Exchange Act"), and the Private Securities Litigation Reform Act of 1995. Forward-looking 
statements may be identified by words such as, but not limited to, "anticipate," "believe," "continue," "estimate," 
"expect," "intend," "plan," "should," "may," "could," "will," "would," "forecast," "project" and words or phrases of 
similar meaning, as they relate to our management or us. Forward-looking statements contained herein reflect 
our current expectations, assumptions and projections with respect to future events and are subject to certain 
risks, uncertainties and assumptions, such as those identified in Part I, Item 1A. "Risk Factors" of our Form 10-K 
for the fiscal year ended December 31, 2022. Actual results may differ materially and adversely from those 
included in such forward-looking statements. Forward-looking statements reflect our position as of the date 
hereof and we undertake no obligation to update any forward-looking statements, whether as a result of new 
information, future events or otherwise, except as required by law. 

Stockholder Information

LOCATION

HEADQUARTERS

Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts 01887
Phone 978.253.6200
ontoinnovation.com

OTHER LOCATIONS
View all locations on our website:
https://ontoinnovation.com/company/locations

TRANSFER AGENT 
MAIL CORRESPONDENCE TO
Computershare Trust Company, N.A. 
Stockholder Services 
P.O. Box 43078
Providence RI 02940-3078  

SEND OVERNIGHT CORRESPONDENCE TO
Computershare
150 Royall St., Suite 101
Canton, MA 02021

ONLINE INQUIRIES 
www-us.computershare.com/investor/contact 

PHONE

781.575.4223 or 800.368.5948 

INVESTOR INFORMATION
GENERAL STOCKHOLDER AND INVESTOR QUESTIONS MAY 
BE DIRECTED TO
Mike Sheaffer
Investor Relations, ESG Reporting
Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts 01887
investors@ontoinnovation.com

INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
Ernst & Young, LLP
Iselin, New Jersey

STOCK SYMBOL
Common stock is traded on the New York Stock 
Exchange under the symbol: ONTO

ANNUAL MEETING
Stockholders are invited to attend the Annual 
Meeting at 12:00 p.m. (ET) on Tuesday, 
May 9, 2023 at our offices, located at: 
16 Jonspin Road
Wilmington, MA 01887

 
 
 
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UNITED STATES 
SECURITIES AND EXCHANGE COMMISSION 
WASHINGTON, D.C. 20549 

FORM 10-K 

(Mark One) 
☒  ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 

For the Fiscal Year Ended December 31, 2022   
OR 
TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 
1934 

☐ 

For the transition period from          to 
Commission File No. 001-39110 

ONTO INNOVATION INC. 

(Exact name of registrant as specified in its charter) 

Delaware 
(State or other jurisdiction of 
incorporation or organization) 

94-2276314 
(I.R.S. Employer 
Identification Number) 

16 Jonspin Road, Wilmington, MA 01887 
(Address of principal executive offices) (Zip Code) 
Registrant’s telephone number, including area code: (978) 253-6200 

SECURITIES REGISTERED PURSUANT TO SECTION 12(b) OF THE ACT: 

Title of Each Class 
Common Stock, $0.001 par value per share 

Trading Symbol 
ONTO 

Name of Exchange on Which Registered 
New York Stock 
Exchange (NYSE) 

SECURITIES REGISTERED PURSUANT TO SECTION 12(g) OF THE ACT: 
None 

Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act.  Yes ☒     No ☐ 
Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.  Yes ☐     No ☒ 
Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange 
Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject 
to such filing requirements for the past 90 days.  Yes ☒     No ☐ 

Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to 

Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).  Yes ☒     
No ☐ 

Indicate by  check  mark  whether the  registrant is  a  large  accelerated  filer,  an  accelerated  filer,  a non-accelerated  filer,  a  smaller  reporting 
company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company” and 
“emerging growth company” in Rule 12b-2 of the Exchange Act.: 

Large accelerated filer 
Non-accelerated filer 

☒ 
☐ 

Accelerated filer 
Smaller reporting company 
Emerging growth company 

☐ 
☐ 
☐ 

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying 

with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.   ☐ 

Indicate by check mark whether the registrant has filed a report on and attestation to its management’s assessment of the effectiveness of its 
internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting 
firm that prepared or issued its audit report. ☒ 

If securities are registered pursuant to Section 12(b) of the Act, indicate by check mark whether the financial statements of the registrant 

included in the filing reflect the correction of an error to previously issued financial statements. ☐ 

 Indicate  by  check  mark  whether  any  of  those  error  corrections  are  restatements  that  required  a  recovery  analysis  of  incentive-based 

compensation received by any of the registrant’s executive officers during the relevant recovery period pursuant to §240.10D-1(b). ☐ 
Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Act).  Yes ☐     No ☒ 
The aggregate market value of the registrant’s voting Common Stock held by non-affiliates of the registrant was approximately $3,072,410,193 

based on the closing price of the Common Stock on the New York Stock Exchange on July 2, 2022. 

The number of shares of the registrant’s Common Stock outstanding as of February 6, 2023 was 48,754,780. 

DOCUMENTS INCORPORATED BY REFERENCE 

Items 10, 11, 12, 13 and 14 of Part III of this Annual Report on Form 10-K incorporate by reference information from the definitive proxy 

statement for the registrant’s annual meeting of stockholders scheduled to be held on May 9, 2023.

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
  
 
  
  
  
Item No.   

Page 

TABLE OF CONTENTS 

1. 
1A. 
1B. 
2. 
3. 
4. 

5. 

6. 
7. 
7A. 
8. 
9. 
9A. 
9B. 
9C. 

10. 
11. 
12. 
13. 
14. 

PART I 
Business ......................................................................................................................................................  
Risk Factors ................................................................................................................................................  
Unresolved Staff Comments .......................................................................................................................  
Properties ....................................................................................................................................................  
Legal Proceedings ......................................................................................................................................  
Mine Safety Disclosures .............................................................................................................................  
PART II 

Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity 

Securities .................................................................................................................................................  
[Reserved] ..................................................................................................................................................  
Management’s Discussion and Analysis of Financial Condition and Results of Operations .....................  
Quantitative and Qualitative Disclosures About Market Risk ....................................................................  
Financial Statements and Supplementary Data...........................................................................................  
Changes in and Disagreements with Accountants on Accounting and Financial Disclosure .....................  
Controls and Procedures .............................................................................................................................  
Other Information .......................................................................................................................................  
Disclosure Regarding Foreign Jurisdictions that Prevent Inspection .........................................................  
PART III 
Directors, Executive Officers and Corporate Governance..........................................................................  
Executive Compensation ............................................................................................................................  
Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters ...  
Certain Relationships and Related Transactions, and Director Independence ............................................  
Principal Accountant Fees and Services .....................................................................................................  
PART IV 
Exhibits and Financial Statement Schedules ..............................................................................................  

15. 
Signatures 

2 
12 
29 
30 
30 
30 

31 
32 
33 
42 
42 
42 
42 
43 
43 

44 
44 
44 
44 
44 

45 

 
 
 
 
 
FORWARD-LOOKING STATEMENTS 

Certain statements in this Annual Report on Form 10-K (this “Form 10-K”), or incorporated by reference in this Form 
10-K, of  Onto  Innovation  Inc.  (referred  to  in  this  Form  10-K,  together  with  its  consolidated  subsidiaries,  unless  otherwise 
specified or suggested by the context, as the “Company,” “Onto Innovation,” “we,” “our” or “us”) may be considered “forward-
looking statements” or may be based on “forward-looking statements,” including, but not limited to, those concerning: 

•  our business momentum and future growth;  

• 

technology development, product introduction and acceptance of our products and services;  

•  our  manufacturing  practices  and  ability  to  deliver  both  products  and  services  consistent  with  our  customers’ 
demands  and  expectations  and  to  strengthen  our  market  position,  including  our  ability  to  source  components, 
materials, and equipment due to supply chain delays or shortages;  

•  our expectations of the semiconductor market outlook;  

• 

• 

• 

future  revenue,  gross  profits,  research  and  development  and  engineering  expenses,  selling,  general  and 
administrative expenses, and cash requirements; 

the effects of political, economic, legal, and regulatory changes or conflicts on our global operations; 

the effects of natural disasters or public health emergencies, such as the current COVID-19 pandemic, on the global 
economy and on our customers, suppliers, employees, and business;  

•  our dependence on certain significant customers and anticipated trends and developments in and management plans 

for our business and the markets in which we operate; and 

•  our ability to be successful in managing our cost structure and cash expenditures and results of litigation.  

Statements contained or incorporated by reference in this Form 10-K that are not purely historical are forward-looking 
statements and are subject to safe harbors created under Section 27A of the Securities Act of 1933, as amended, Section 21E 
of the Securities Exchange Act of 1934, as amended (the “Exchange Act”), and the Private Securities Litigation Reform Act 
of 1995. Forward-looking statements may be identified by words such as, but not limited to, “anticipate,” “believe,” “continue,” 
“estimate,” “expect,” “intend,” “plan,” “should,” “may,” “could,” “will,” “would,” “forecast,” “project” and words or phrases 
of similar meaning, as they relate to our management or us. 

Forward-looking statements contained herein reflect our current expectations, assumptions and projections with respect 
to future events and are subject to certain risks, uncertainties and assumptions, such as those identified in Part I, Item 1A. “Risk 
Factors” and elsewhere in this Form 10-K. Actual results may differ materially and adversely from those included in such 
forward-looking statements. Forward-looking statements reflect our position as of the date of this report and we undertake no 
obligation to update any forward-looking statements, whether as a result of new information, future events or otherwise, except 
as required by law. 

1 

 
 
 
Item 1. Business. 

General 

PART I 

Onto Innovation is a worldwide leader in the design, development, manufacture and support of metrology and inspection 
tools  for  the  semiconductor  industry,  including  process  control  tools  that  perform  optical  metrology  on  patterned  and 
unpatterned  wafers,  wafer  macro-defect  inspection,  including  macro-inspection  of  both  2D  and  3D  wafer  features,  wafer 
substrate and panel substrate lithography systems, and process control analytical software.  Our products are primarily used by 
silicon  wafer  manufacturers,  semiconductor  device  fabricators,  and  advanced  packaging  manufacturers  operating  in  the 
semiconductor market. Our products are also used for process control in a number of other specialty device manufacturing 
markets, including light emitting diodes (“LED”), vertical-cavity surface-emitting lasers (“VCSEL”), micro-electromechanical 
systems  (“MEMS”),  CMOS  image  sensors  (“CIS”),  silicon  and  compound  semiconductor  (SiC  and  GaN)  power  devices, 
analog devices, RF filters, data storage, and certain industrial and scientific applications. 

We provide process and yield management solutions used in bare silicon wafer production and wafer processing facilities, 
often  referred  to  as  “front-end”  manufacturing,  and  advanced  packaging  of  chips  and  test  facilities,  or  “back-end” 
manufacturing,  through  a  portfolio  of  standalone  systems  for  optical  metrology,  macro-defect  inspection,  packaging 
lithography,  as  well  as  transparent  and  opaque  thin  film  measurements.  Our  automated  and  integrated  metrology  systems 
measure  critical  dimensions,  device  structures,  topography,  shape,  and  various  thin  film  compositions,  including  three-
dimensional  features  and  film  thickness,  as  well  as  optical,  electrical  and  material  properties.  Our  primary  areas  of  focus  
include products that provide critical yield-enhancing and actionable information, which is used by microelectronic device 
manufacturers to improve yield and time to market of their next-generation devices.  Our systems feature sophisticated software 
and production-worthy automation. In addition, our advanced process control software portfolio includes powerful solutions 
for  standalone  tools,  groups  of  tools,  and  factory-wide  and  enterprise-wide  suites  to  enhance  productivity  and  achieve 
significant cost savings. Our systems are backed by worldwide customer service and applications support.  

2019 Merger 

On October 25, 2019, we became Onto Innovation Inc. upon the effectiveness of the merger (the “2019 Merger”) between 
Nanometrics Incorporated (“Nanometrics”) and Rudolph Technologies, Inc. (“Rudolph”).  We accounted for the 2019 Merger 
as a reverse acquisition using the acquisition method of accounting in accordance with generally accepted accounting principles 
(“GAAP”).  GAAP  requires  that  either  Nanometrics  or  Rudolph  is  designated  as  the  acquirer  for  accounting  and  financial 
reporting  purposes  (“Accounting  Acquirer”).  Based  on  the  evidence  available,  Rudolph  was  designated  as  the  Accounting 
Acquirer while Nanometrics was the acquirer for legal purposes. Therefore, Rudolph’s historical results of operations replaced 
Nanometrics’ historical results of operations for all periods prior to the 2019 Merger. However, ONTO stock price and volumes 
prior to October 25, 2019 are Nanometrics (NANO) stock data. 

Industry Background 

We participate in the sale, design, manufacture, marketing and support of process control systems for optical critical 
dimension (“OCD”) metrology, thin film metrology, silicon wafer inspection, 2D and 3D macro inspection and lithography 
tools for advanced packaging and advanced analytical software for semiconductor manufacturing as well as inspection systems 
for  certain  industrial  applications  and  scientific  research.  Our  principal  market  is  semiconductor  capital  equipment.  
Semiconductors packaged as integrated circuits, or “chips”, are used in consumer electronics, server and enterprise systems, 
mobile computing (including smart phones and tablets), data storage devices, and embedded automotive and control systems. 
Our core focus is the measurement and control of the structure, composition, and geometry of semiconductor devices as they 
are fabricated on silicon wafers to improve device performance and manufacturing yields. Our end customers manufacture 
many types of integrated circuits for a multitude of applications, each having unique manufacturing challenges. This includes 
integrated circuits to enable information processing and management (logic integrated circuits), memory storage (NAND, 3D-
NAND,  and  DRAM),  analog devices  (e.g.,  Wi-Fi  and  5G radio  integrated  circuits,  power  devices),  MEMS  sensor devices 
(accelerometers, pressure sensors, microphones), CMOS image sensors, and other specialty end markets including components 
for hard disk drives, LEDs, and power management devices. 

2 

 
 
 
 
 
Current Trends 

Business Environment 

Our metrology systems and software are primarily used for controlling certain manufacturing processes utilized in the 
production of advanced, or leading-edge, wafer designs. The shrinking of features such as the constituents that form a single 
transistor are known as node reductions. The numeric identification of a specific node usually refers to a dimension associated 
with  one  of  the  transistor’s  constituents.  Advanced  nodes  are  associated  with  transistor  dimensions  less  than  16nm.      Our 
metrology systems used to measure and characterize these small features are generally purchased when a customer is beginning 
to manufacture at a new, smaller node, in order to set up and test new manufacturing equipment being installed for the new 
node. Our process control/metrology equipment is generally installed prior to the installation of the actual process equipment 
for that reason. Additional process control equipment is normally purchased when the initial process yields have been stabilized 
and  more  manufacturing  capacity  is  required  to meet  production demands.  Therefore,  our  sales  to  customers for  advanced 
nodes is generally higher when manufacturing lines for new nodes are being established and may not represent continuous sales 
revenue until our initial systems reach high levels of utilization driven by the need for greater capacity.  In 2022 several top 
semiconductor manufacturers entered pilot production at a 3nm node using our Atlas® V products.  

Our inspection systems, lithography systems, and software are primarily used for processing and inspecting advanced 
packaging associated with back-end manufacturing. Advanced packaging techniques comprise a very wide variety of assembly 
methods in order to connect individual chips to a larger printed circuit (“PC”) board, or connecting a group of chips together 
to form a “system in a package” (“SIP”), also known as heterogeneous integration (“HI”), or chiplets. Many of these advanced 
packages require lithographic imaging to produce copper interconnections between the chip and the PC Board or between chips 
in the case of SIP or HI advanced packages. Our inspection systems and software are used for process control and detection of 
potential reliability failures in nearly all of these packages. Unlike the cyclical nature of our metrology equipment associated 
with node shrinks, our sales revenue for advanced packaging is generally driven by assembly volumes. Inspection rates for 
advanced packages are high throughout the assembly process to avoid a single defective chip from being assembled into a 
relatively expensive package, making the inspection process control systems attach rates quite linear with production volumes 
of these devices. 

Several  macro-drivers  continue  to  drive  demand  for  sophisticated  metrology  and  inspection  systems.  In  2020,  a 
significant portion of the global workforce began working from home as part of corporate efforts to isolate and protect workers 
from COVID-19. This transition resulted in extremely high usage of data centers and cloud processing that drove higher demand 
for increased memory and HPC devices. In 2021, wireless 5G networks drove demand for new 5G phones and that demand 
continued in the first half of 2022 as new phones from Apple and Samsung were introduced to the market. The building of the 
5G network over the next several years will also bring more machine-to-machine communications.  In addition, the rise of 
electric  vehicles  and  other  industrial  technologies  is  creating  an  increase  in  demand  for  power  semiconductors.  And 
semiconductor manufacturers are increasingly developing chiplets that include a series of smaller die rather than one larger 
monolithic die. These macro-drivers are increasing the need for high-performance semiconductors and advanced packaging, 
which are then driving the demand for sophisticated metrology and inspection systems in order to achieve the semiconductor 
performance required while achieving a profitable manufacturing yield.   

Since the first fiscal quarter of 2020, Onto Innovation has launched twelve new products that include six new metrology 
systems, two new macro defect inspection system, a panel lithography tool and two new software products. These new products 
were  introduced  as  logic  integrated  device  manufacturers  (“IDMs”)  and  foundries  were  increasing  their  capacity  while 
following  aggressive  plans  to  transition  their  manufacturing  to  smaller  nodes.  Other  customer  interactions  at  memory  and 
specialty device manufacturers as well as providers of advanced packaging centered around satisfying the immediate demand 
for these devices with our existing product portfolio, while partnering with R&D groups to prepare for the process controls 
needed for the next generation of semiconductors and packaging that will require the latest systems from Onto Innovation. We 
believe our strong engineering teams have delivered, and will continue to deliver, new products to our customers, followed by 
our field engineers providing customer support, while simultaneously achieving our gross and operating margin targets that 
were established in our long-term operating models. Revenue reached $1 billion in fiscal 2022 as customers transitioned to 
advanced nodes and increased advanced packaging volumes, and the Company was able to achieve operating margins and 
earnings at the high end of our quarterly guidance and analysts’ estimates. 

3 

 
 
 
 
 
Markets 

Advanced Nodes. “Advanced Nodes” refers to leading-edge integrated circuits where the feature sizes of transistors and 
other features continue to shrink in specified steps, or nodes measured in nanometers (nm). Demand for our products continues 
to be driven by our customers' desire for higher overall chip performance without increasing the chip size, while improving 
power  efficiency,  logic  processing  capability,  data  storage  volume  and  manufacturing  yield.  To  achieve  these  goals,  our 
customers  have  increased  their  use  of  more  complex  materials  and  processing  methods  in  their  manufacturing  flow.  The 
primary paths for performance gains are geometric scaling, known as node shrinks, or scaling of transistor dimensions. In some 
cases, our customers are implementing new materials and methods in high volume manufacturing, including materials and 
device architectures to reduce power consumption, and stacked devices. To scale NAND memory, a 3D stacking architecture 
has  been  implemented  at  several  customers  with  more  than  150  storage  cell  layers  for  devices  in  production.  Additional 
innovation continues in Data Storage, Power Devices, MEMS, and Image Sensors. We believe the use of these new materials 
and manufacturing methods has increased demand for our products such as the Atlas® product line that is capable of measuring 
these advanced nodes as certain features shrink beyond 7nm, to 5nm, 3nm and in the most advanced of cases, 2 nm.   

To  shrink  features,  new  methods,  including  multiple  patterning  lithography  and  extreme  ultra-violet  (“EUV”) 
lithography, have been developed. The EUV process is driving significantly higher requirements for the silicon wafers that are 
entering the EUV chamber. Small, particles on the backside of the wafer measuring a few micrometers (microns) can distort 
the  images  being  projected  onto  the  top  side.  Our  NovusEdge®  inspection  tool  has  been  installed  at  major  silicon  wafer 
manufacturers  to  detect  backside  contamination  and  edge  cracking  as  a  final  quality  control  mechanism  before  wafers  are 
shipped to the semiconductor fabrication processes. The top side of wafers used for the EUV process is covered with an epitaxial 
layer, which must also be scanned for any impurities. This compositional analysis is measured using our Element® system 
using Fourier Transform Infrared (“FTIR”) algorithms.    

Advanced  Packaging.  “Advanced  Packaging”  refers  to  a  variety  of  technologies  that  enable  the  miniaturization  of 
electronic products, such as portable consumer devices, including smartphones, watches, and tablets. Historically, integrated 
circuit  packaging  refers  to  the  final  stage  of  semiconductor  device  fabrication,  in  which  a  single  circuit  made  from 
semiconducting material (a die or chip) is encased in a molded package using small wires to provide connections to a carrier 
that can be soldered to a printed circuit board and also prevents physical damage and corrosion to the chip.  Advanced Packaging 
refers loosely to the multi-layer conductors and chip structures (other than wires) that often interconnect multiple die, feed them 
with electric power and create signal paths to and from the PC board, dissipate their heat, and protect them from damage.  
Today, the drive to pack more functions into a small space and reduce their power requirements demands that chip packages 
do much more than ever before to combine multiple chips and functions into a single molded package.   

One example of the technology used in Advanced Packaging is the 3D integration of semiconductors. This technology 
involves stacking individual chips in one integrated package. Through-silicon vias (“TSVs”) are vertical copper interconnects 
that are embedded from the bottom surface of a die to the top surface and uses small copper/solder “bumps” to connect one 
chip to another, which allows power and communication to be shared among the individually stacked components. This offers 
the  advantages  of  shorter  signal  paths  and,  in  turn,  reduced  power  consumption,  enhanced  bandwidths,  integration  of 
heterogeneous components such as memory and logic chips, and smaller surface area. The processes required for 3D integration 
vary from one manufacturer to another and many continue to be optimized for yield and to ensure the functioning of individual 
stacked chips.  

Heterogeneous packages are another advanced packaging technology using copper pillars/bumps to vertically connect a 
wide variety of stacked die for 2.5D, and 3D integration techniques as well as horizontally connected chips and are considered 
the next disruptive technology for several reasons. First, heterogeneous integrated packages using 3D stacking can significantly 
reduce the space needed inside an electronic device, such as a smartphone, by combining multiple chips/functions into a SIP. 
Next, it improves the system’s performance by reducing power and signal conductor lengths, which previously were routed 
from package to package through a PC board. Using thin redistribution layers (“RDLs”) to connect chips that are side-by-side 
or “fan out” power and signal connections to the larger contacts on the PC board, which accounts for 35 percent of the packaging 
cost. Lastly, the technology is currently considered the preferred vehicle for next generation uses, such as SIP, and package on 
package formats.  As a result of the small overall form factor, heterogeneous integrated packages provide the functionality 
needed in high-end mobile and wearable products.  

The current and projected adoption of 5G-enabled smartphones continues to grow. Even as overall sales of smartphones 
waned in 2022, the demand for 5G chipsets, which are used in both handsets and infrastructure, did not. This trend is driving 
semiconductor manufacturers to increase capacity to support the advanced packaging technologies that are used in production 
of 5G integrated circuits, which continues to create opportunities for our solutions.  

4 

 
 
 
 
 
Panel Substrate Manufacturing. One current process to manufacture advanced packaging involves attaching known 
good  die  to  a  300mm  wafer, used  as  a  temporary  carrier when  adding  components  such  as  RDLs  and  copper  pillars.    SIP 
packages can often contain side-by-side die, meaning the package can be large and limit the number of packages being placed 
on a reconstituted wafer. In order to meet the growing demand at reduced average selling prices, manufacturers are looking to 
scalable  technology.  Advanced  packaging  facilities  looking  to  improve  Cost  of  Ownership  and  increase  productivity  are 
transitioning from 300mm wafers to large rectangular panels, which can be as large as  600mm x 600mm. This larger size 
enables companies manufacturing large area packages to increase the number of devices being processed at each step as they 
are no longer limited to operating within the constraints of a round wafer. By responding to market opportunities and addressing 
the stringent demands of customers’ technical roadmaps, we believe that Onto Innovation is optimally positioned to capitalize 
on the emerging market of high-volume manufacturing of advanced IC substrates.  For example, the JetStep® X500 lithography 
system,  having  emerged  from  the  flat  panel  display  market,  is  readily  capable  of  processing  RDLs  on  very  thin  advanced 
organic laminate panels in the semiconductor advanced packaging market. The Firefly® series of panel level macro inspection 
tools, designed for high resolution inspection, can provide defect detection and location information to the JetStep X500 tool 
for  each  die,  which  greatly  improves  lithography  throughput  using  our  exclusive  StepFAST™  process.  It  also  delivers  a 
combination  of  defect  classification  and  process  throughput  in  a  single  software  platform.  It  reduces  capital  investment 
requirements and provides a reliable pathway to transition from wafer to panel-based processes. 

Technology 

We believe that our expertise in our core technologies of optics and software and our combined investment in research 
and development will enable us to rapidly develop new technologies and products as we have demonstrated over the past  three 
years of operation in order to quickly respond to emerging industry trends and competitive challenges. The breadth of our 
technology enables us to offer a diverse combination of metrology, inspection, and process control solutions. Unique features 
have been designed into our lithography systems to meet our customers’ changing process requirements. Our metrology and 
inspection technologies provide process control for the majority of advanced node wafers processed today in a semiconductor 
wafer fab. In front-end processes, OCD metrology, thin film metrology, wafer stress metrology and macro defect detection and 
classification technologies allow yield enhancement for critical processes such as photolithography, diffusion, etch, chemical 
mechanical planarization (“CMP”) and outgoing quality control. Within the back-end manufacturing processes, our 2D/3D 
advanced macro defect inspection provides our customers with critical quality assurance and process information. Defects may 
be created during probing, bumping, dicing, assembly processes (RDLs, TSVs, copper pillars, etc.) or general handling and 
can  have  a  major  impact  on  device  and  process  quality.  Lastly,  we  turn  the  gathered  data  into  useful  knowledge  for  our 
customers  to  make  yield-enhancing  decisions,  which  lower  their  scrap  cost  and  environmental  impact  and  improve  their 
margins.  

Onto Innovation’s Products 

Automated Metrology Systems. Our automated systems primarily consist of fully automated metrology systems that are 
employed in semiconductor production environments. The Atlas family of products represents our line of high-performance 
metrology  systems  providing  OCD  and  thin  film  metrology  and  wafer  stress  metrology  for  transistor  and  interconnect 
metrology applications. The thin film and OCD technology is supported by our NanoCD™ suite of solutions including our 
latest introductions of AI Diffract™ software, SpectraProbe™ software and NanoGen™ scalable computing engine, which 
enables visualization, modeling, and analysis of complex structures.  

AI Diffract is a modeling, visualization and analysis software that takes signals from the metrology systems, providing 
critical dimension, thickness, and optical properties from in-line measurements. The software has an intuitive three-dimensional 
modeling interface to provide visualization of today’s advanced and complex semiconductor devices. There are proprietary 
fitting  algorithms  in  AI  Diffract  that  enable  very  accurate and very  fast  calculations for  signal  processing  for  high  fidelity 
model-based measurements. SpectraProbe is a model-less fitting engine that enables fast time to solution for in-line excursion 
detection and control. SpectraProbe complements the high-fidelity modeling of AI Diffract with a simple machine learning 
interface for rapid recipe deployment. The software is supported by NanoGen, an enterprise scale computing hardware system 
that is deployed to run the computing intensive analysis software. NanoGen leverages commercial server chips and networking 
architecture and is optimized to support the workload of AI Diffract and SpectraProbe analysis.     

Integrated Metrology Systems. Our integrated metrology (“IM”) systems are installed directly onto wafer processing 
equipment to provide near real-time measurements for improved process control and maximum throughput. Our IM systems 
are sold directly to end user customers. The IMPULSE® family of products includes the latest technology for OCD, and thin 
film  metrology,  and  have  been  successfully  qualified  on  numerous  independent  wafer  fabrication  equipment  suppliers’ 
platforms.  

5 

 
 
 
Silicon Wafer All-surface Inspection/Characterization. “All-surface” refers to inspection of the wafer frontside, edge, 
and backside as well as wafer’s locator notch. The edge inspection process focuses on the area near the wafer edge, an area that 
poses difficulty for traditional wafer frontside inspection technology due to its varied topography and process variation. Edge 
bevel inspection looks for defects on the side edge of a wafer. Edge bead removal and edge exclusion metrology involve a 
topside  surface  measurement  required  exclusively  in  the  lithography  process,  primarily  to  determine  if  wafers  have  been 
properly  aligned  for  the  edge  exclusion  region.  The  primary  reason  for  wafer  backside  inspection  is  to  determine  if 
contamination has been created that may spread throughout the wafer fab. For instance, it is critical that the wafer backside be 
free of defects prior to the EUV lithography process to prevent focus and exposure problems on the wafer frontside.  

 Our materials characterization products include systems that are used to monitor the physical, optical, electrical and 
material  characteristics  of  discrete  electronic  industry,  opto-electronic,  HB-LED  (high  brightness  LEDs),  solar  PV  (solar 
photovoltaics),  compound  semiconductor,  strained  silicon  and  silicon-on-insulator (“SOI”)  devices,  including  composition, 
crystal structure, layer thickness, dopant concentration, contamination and electron mobility.   

 We have a broad portfolio of products for materials characterization including photoluminescence mapping and Fourier 
Transform  Infrared  (“FTIR”)  spectroscope  in  automated  and  manual  systems  for  substrate  quality  and  epitaxial  thickness 
metrology. The NanoSpec® line supports thin film measurement across all applications in both low volume production and 
research applications.   

Macro Defect Inspection. Chip manufacturers deploy advanced macro defect inspection throughout the production line 
to  monitor  key  process  steps,  gather  process-enhancing  information  and  ultimately,  lower  manufacturing  costs.  Field-
established tools such as the F30™, NSX®, and the latest Dragonfly® G3 inspection systems are found in the wafer fab (front-
end)  and  packaging  (back-end)  facilities  around  the  world.  These  high-speed  tools  incorporate  features  such  as  wafer-less 
recipe creation, tool-to-tool correlation and multiple inspection resolutions. Using Discover® yield management software, the 
vast amounts of data gathered through automated inspection can be analyzed and classified to determine trends and locate root 
causes that directly affect yield.  

Automated Defect Classification and Pattern Analysis. Automating the defect detection and classification process is 
best done by a system that can mimic, or even extend, the response of the human eye, but at a much higher speed, with higher 
resolution and more consistency. To do this, our systems capture full-color whole wafer images using simultaneous dark and 
bright field illumination. The resulting bright and dark field images are compared to those from an “ideal” wafer having no 
defects.  When  a  difference  is  detected,  its  image  is  broken  down  into  mathematical  vectors  that  allow  rapid  and  accurate 
comparison with a library of known classified defects stored in the tool’s database. Patented and proprietary enhancements of 
this approach enable very fast and highly repeatable image classification. The system is pre-programmed with an extensive 
library of local, global, and color defects and can also store a virtually unlimited amount of new defect classes. This allows 
customers  to  define  defects  based  on  their  existing  defect  classification  system,  provides  more  reliable  automated  rework 
decisions and enables more accurate statistical process control data. Reviewing defects off-line enables automated inspection 
systems to maintain their utilization for high throughput inspection. Using defect image files captured by automated inspection 
systems,  operators  are  able  to  view  high-resolution  defect  images  to  determine  defects  that  cause  catastrophic  failure  of  a 
device, known as killer defects. Combining the review process with classifying defects enables faster analysis by grouping 
defects found together as one larger defect, a scratch for example, and defects of similar types across a wafer lot to be grouped 
based on size, repeating defects, and other user-defined specifications.  

Yield Analysis. Using wafer maps, charts and graphs, the massive amounts of data gathered through automated inspection 
can be analyzed to determine trends across bumps, die, wafers and lots. This analysis may determine where a process variation 
or deviation has occurred, allowing process engineers to make corrections or enhancements to increase yields. Defect data 
analysis is performed to identify, analyze and locate the source of defects and other manufacturing process excursions. Using 
either a single wafer map or a composite map created from multiple wafer maps, this analysis enables identification of defect 
patterns and distribution. When combined with inspection data from inspection points -placed strategically, this analysis may 
pinpoint the source of the defects so corrective action can be taken.  

6 

 
 
 
 
 
Opaque Film Metrology. The MetaPULSE® systems allow customers to simultaneously measure the thickness and other 
properties  of  up  to  six  metal  or  non-metallic  opaque  film  layers  without  physically  contacting  product  wafers.  PULSE® 
technology uses an ultra-fast laser to generate acoustic waves that pass down through a stack of opaque films such as those 
used in copper or aluminum interconnect processes, as well as the hard mask layer in 3D NAND chips, sending back to the 
surface a reflected signal (echo) that indicates film thickness, density, and other process critical parameters. We believe we are 
a  leader  in  providing  systems  that  can  measure  opaque  thin-film  stacks  non-destructively  with  the  speed  and  accuracy 
semiconductor  device  manufacturers  demand  in  order  to  achieve  high  yields  with  the  latest  fabrication  processes.  The 
technology  is  ideal  for  characterizing  copper  interconnect  structures.  The  MetaPULSE  systems,  used  initially  for  fast  and 
accurate measurements of metal interconnect in front-end wafer fabs, have now been chosen by back-end manufacturers to 
perform system measurements in new process applications such as RF filters and modules, driven by the need for on-product 
metrology as feature sizes decrease and pattern densities increase.  

Industrial, Scientific, and Research Markets ― 4D Technology.  The 4D business offers a line of interferometry systems 
for  the  measurement  and  inspection  of  high  precision  surfaces.  End  markets  include  high  precision  optics  surfaces  and 
components, aerospace and defense components, and unique research and scientific instrumentation that requires the unique 
high-speed results of the 4D systems.   

Advanced Packaging Lithography.  Our lithography steppers use projection optics to expose circuit patterns from a mask 
or reticle onto a substrate to expose images with optimal fidelity. These systems employ a bright light that is transmitted through 
a mask or reticle containing display circuit patterns. Substrates are aligned on the system and the mask is imaged through a 
projection lens onto photoresist material coated on the substrate. The substrate is then moved, or “stepped,” to a second position 
to expose an adjacent area. The system repeats the step and exposure process until the entire substrate is patterned. Once the 
exposure process has been completed, the substrate is developed with an alkali solution to reveal the underlying material. The 
imaged photoresist serves as a stencil barrier that allows for the processing of the underlying metal or insulating layers.  The 
substrates then continue through the etching, stripping and deposition processes until multi-layer circuits are completed.  

In order to deal with increased input/output (“I/O”) resulting from devices with enhanced functionality, increased power 
distribution efficiency, and higher frequency, IDMs and outsourced semiconductor assembly and test (“OSATs”) facilities must 
incorporate  lithography  capabilities  to  create  RDLs  for  their  advanced  packaging  technologies. However,  the  associated 
substrates and processes are significantly different than those used in front-end wafer processing. For advanced packaging, the 
lithography system must perform in a completely different application, with significantly different operating parameters. For 
example, most packaging is an additive process, while wafer processing is subtractive, and thick films, rather than thin films, 
are used to enable the creation of features. In order for equipment to effectively function in this environment, it must overcome 
these challenges. Our JetStep® systems have been specifically designed to meet these challenges head on. The new JetStep 
X500 System is designed for rectangular substrates (panels), which when combined with user-selectable wavelength options, 
maximizes  throughput  while  not  limiting  resolution  when  needed. High-fidelity  optics  are  able  to  image  the  fine  features 
required while at the same time achieving superior depth of field to minimize non-flatness that is typical for advanced packaging 
applications. On-the-fly auto focus and an innovative reticle management system improve yield and utilization. These features 
result in a revolutionary lithography system specifically designed to meet advanced packaging challenges.  

Process  Control  Software.  We  provide  a  wide  range  of  advanced  process  control  solutions,  which  are  designed  to 
improve factory profitability, including run-to-run control, fault detection, classification and tool automation. We are a leading 
provider of process control software in the semiconductor industry. Advanced process control (“APC”) employs software to 
automatically detect or predict tool failure (fault detection) as well as calculate recipe settings for a process that will drive the 
yielded output to meet and exceed the target, despite variations in the incoming material and minor instabilities within the 
process equipment.  Process control software enables the factory to increase capacity and yield while decreasing rework and 
scrap. It enables reduced production costs by lowering consumables, process engineering time and manufacturing cycle time.  

Yield Management Software. Semiconductor manufacturers use yield management software (“YMS”) to obtain valuable 
process yield and equipment productivity information. The data necessary to generate productivity information comes from 
many different sources throughout the wafer fab: inspection and metrology systems, tool sensors, tool recipes, electrical tests 
and the fab environment. As the complexity and cost of manufacturing processes increase, the value of faster, better analysis 
to support critical manufacturing decisions grows. As a result, customers are demanding robust yield management systems that 
can  analyze  large,  complex  data  sets  quickly  and  effectively.  Our  fully  integrated  YMS  is  designed  to  analyze  data  from 
disparate sources and multiple sites to maximize productivity across the entire value chain.  

7 

 
 
 
 
 
Customers 

Over  190  microelectronic  device  manufacturers  purchased  Onto  Innovation  tools  or  software  in  2022.  We  support  a 
diverse customer base in terms of both geographic location and type of device manufactured. Our customers are located in over 
18 countries. The following chart identifies our customers that represented 10% or more of total revenue for each of the last 
three fiscal years: 

Taiwan Semiconductor Manufacturing Co. Ltd..................................................  
Samsung Semiconductor.....................................................................................  
SK Hynix Inc. .....................................................................................................  
* The customer accounted for 10% or more of total revenue during the period. 
^ The customer accounted for less than 10% of total revenue during the period. 

Sales, Customer Service and Application Support 

2022 
* 
* 
* 

2021 
* 
* 
^ 

2020 
* 
* 
^ 

We believe that the capability for direct sales and support is beneficial for developing and maintaining close customer 
relationships  and  for  rapidly  responding  to  changing  customer  requirements.  We  provide  local  direct  sales,  service  and 
application support through our worldwide offices located in the United States, South Korea, Japan, Taiwan, China, Vietnam 
Singapore and Europe, and work with selected dealers and sales representatives on a more limited basis in various countries. 
Our applications team is composed of technically experienced sales engineers who are knowledgeable in the use of metrology 
systems generally and the unique features and advantages of our specific products. Supported by our technical applications 
team, our sales and support teams work closely with our customers to offer cost-effective solutions to complex measurement 
and process problems.  

We believe that customer service and technical support for our systems are crucial factors that distinguish us from our 
competitors  and  are  essential  to  building  and  maintaining  close,  long-term  relationships with  our  customers.  We  generally 
provide a warranty for our products that ranges from twelve to fourteen months to cover defects in material and workmanship. 
We provide system support to our customers through factory technical support and globally deployed field service personnel. 
The factory technical support operations provide customers with telephonic technical support access, direct training programs, 
operating  manuals  and  other  technical  support  information  to  enable  effective  use  of  our  metrology  and  measurement 
instruments  and  systems.  We  have  field  service  operations  based  in  various  locations  throughout  the  United  States,  South 
Korea, Taiwan, China, Japan, Vietnam, Malaysia, Singapore, Israel, and Europe.  

Competition  

We offer various products for various semiconductor manufacturing process steps, and several of our products extend 
across the same process flow. However, for process control of each of these process steps, we have multiple established and 
potential competitors, some of which may have greater financial, research, engineering, manufacturing and marketing resources 
than we have. We may also face future competition from new market entrants from other overseas and domestic sources. We 
expect  our  competitors  to  continue  to  improve  the  design and  performance of  their  current  products  and  processes,  and  to 
introduce new products and processes with improved price and performance characteristics. In order to remain competitive, we 
believe that we will require significant financial resources to offer a broad range of products, and to maintain customer service 
and support centers worldwide, and to invest in product research and development.   

In  every  market  in  which  we  participate,  the  global  semiconductor  equipment  industry  is  intensely  competitive,  and 
driven by rapid technological adoption cycles. Our ability to compete effectively depends upon our ability to continuously 
improve our products, applications and services, and our ability to develop new products, applications and services that meet 
constantly evolving customer requirements.  

In automated systems for the semiconductor industry, our principal competitors are KLA Corporation (“KLA”) and Nova 
Ltd. (formerly Nova Measuring Instruments Ltd.) (“Nova”) for thin film and critical dimension OCD metrology. Our principal 
competitors  for  advanced  packaging  inspection  are  KLA  and  Camtek  Ltd.  (“Camtek”).  While  the  advanced  packaging 
lithography  market  is  served  by  various  competitors,  our  primary  competitors  are  Ushio,  Inc.  (“Ushio”)  and  Canon,  Inc. 
(“Canon”). Our primary competitor for inspection in the panel market is GigaVis Co. Ltd. The primary competitor for our 
software products is PDF Solutions, Inc. (“PDF Solutions”) and our primary competitor for integrated metrology systems for 
the semiconductor industry is Nova. The opto-electronics, discrete device and industrial and scientific markets are addressed 
primarily by our material characterization and 4D systems, served by numerous competitors, of which no single competitor or 
group of competitors has established a majority position.  

8 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
We believe that our competitive position in each of our markets is based on the ability of our products and services to 
address  customer  requirements  related  to  numerous  competitive  factors.  Competitive  selections  are  based  on  many  factors 
involving technological innovation, productivity, total cost of ownership of the system, including impact on end of line yield, 
price, product performance and throughput capability, quality, reliability and customer support. 

Manufacturing  

Our  manufacturing  operations  are  in  Milpitas  California,  Tucson  Arizona,  Wilmington  Massachusetts,  Bloomington 
Minnesota, and at various contract manufacturers around the world. It is our strategy to outsource the assemblies that do not 
contain elements that we believe lead to a direct competitive advantage. Most of our automated and integrated products are 
currently manufactured at our Milpitas and Bloomington facilities. We currently do not expect our manufacturing operations 
to require additional major investments in capital equipment.  

We  manufacture  key  modular  assemblies  and  integrated  tools  and  make  reasonable  efforts  to  ensure  that  externally 
purchased parts or raw materials are available from multiple suppliers, if possible. Certain components, subassemblies and 
services necessary for the manufacture of our systems are obtained either from a sole supplier or limited group of suppliers. 
We also have long-term supply agreements with strategic suppliers for the supply of key assemblies for use in our products.  

We  rely  on  limited  source  suppliers  for  certain parts  and  subassemblies.  This  reliance  creates  a  potential  inability  to 
obtain an adequate supply of required components, and reduced control over pricing and time of delivery of components. An 
inability  to  obtain  adequate  supplies  may  require  us  to  seek  alternative  sources  of  supply  or  redesign  our  systems  to 
accommodate  different  components  or  subassemblies,  which  could  result  in  additional  expenses  and  delays  in  product 
development or shipment of product to our customers.  Disruption or termination of the supply of components has delayed and 
could continue to delay shipments of some of our systems.  Such delays may damage our customer relationships and reduce 
our sales.  

Research and Development  

We  continue  to  invest  in  research  and  development  to  provide  our  customers  with  products  that  add  value  to  their 
manufacturing processes and that provide a better and differentiated solution than our competitors so that our products stay in 
the  forefront  of  current  and  future  market  demands.  Whether  it  is  for  an  advancement  of  current  technology,  yield  and 
manufacturing improvement, enabling new end device technology, or the development of a new application in our core or 
emerging markets, we are committed to product excellence and longevity.  

The markets for equipment and systems for manufacturing semiconductor devices and for performing OCD metrology, 
macro-defect inspection, advanced packaging lithography and thin film transparent and opaque process control metrology are 
characterized  by  continuous  technological  development  and  product  innovations.  We  believe  that  the  rapid  and  ongoing 
development  of  new  products  and  enhancements  to  existing  products  is  critical  to  our  success.  Accordingly,  we  devote  a 
significant portion of our technical, management and financial resources to research and development programs. 

Intellectual Property 

We believe that our success will depend to a great degree upon innovation, technological expertise and our ability to 
adapt our products to new technology. As a result, we have a policy of seeking patents on inventions governing new products 
or technologies as part of our ongoing research, development, and manufacturing activities. As of December 31, 2022, we have 
been granted, or hold exclusive licenses to 411 U.S. and foreign patents. The patents we own, jointly own or exclusively license 
have expiration dates ranging from 2023 to 2040. We also have 117 pending patent applications in the United States and other 
countries.  Our  patents  and  patent  applications  principally  cover  various  aspects  of  metrology,  macro-defect  detection  and 
classification,  altered  material  characterization,  lithography  techniques,  automation,  artificial  intelligence,  and  machine 
learning.  

Our pending patent applications may never be issued, and even if they are, these patents, our existing patents and the 
patents we license may not provide sufficiently broad protection to protect our intellectual property, or they may prove to be 
unenforceable. To protect our intellectual property, we also rely on a combination of patents, copyrights, trademarks, trade 
secret laws, contractual provisions and licenses and non-disclosure agreements. There can be no assurance (i) that any patents 
or  trademarks  issued  to  or  licensed  by  us  will  not  be  challenged,  invalidated  or  circumvented,  (ii)  that  the  rights  granted 
thereunder will provide us with a competitive advantage or (iii) that we will be able to fully protect our intellectual property. 
Additionally,  others  may  obtain  patents  or  trademarks  and  assert  them  against  us.  From  time  to  time,  we  receive 
communications from third parties asserting that our systems, software and/or methods may contain features that such third 
parties claim may infringe upon their intellectual property rights.  

9 

 
 
 
From time to time, we may find it necessary to initiate litigation against other persons or entities to protect and/or enforce 
our intellectual property rights or contractual rights. However, litigation is costly and time consuming and there is no assurance 
that any lawsuit we bring will yield the result that we seek, as (i) the lawsuit may be dismissed or there could be an adverse 
finding, (ii) we may not be able to pursue the lawsuit due to the laws of the applicable country or (iii) there may be a subsequent 
unfavorable change in the laws that limit our ability to pursue the lawsuit. There is a risk that our means of protecting our 
intellectual property may not be adequate. For example, our competitors may independently develop similar technology or 
duplicate our products. If we fail to adequately protect our intellectual property, it would be easier for our competitors to sell 
competing products.  

Human Capital and Talent  

As  of  December  31,  2022,  we  had  approximately  1,636  staff  globally,  411  in  research  and  development,  318  in 
operations, 161 in administration and 746 in sales, applications and service support. A large percentage of our employees have 
technical  backgrounds  and  undergraduate  and/or  advanced  degrees.  Many  of  our  employees  have  specialized  skills  and 
experience that are of value to our business, products and services. Our future success will depend, in large part, upon our 
ability to attract, motivate and retain our highly skilled, technical, operational and managerial team members, who are in great 
demand in our industry and business communities. 

Approximately 59% of our employees are located in the United States, 37% in Asia Pacific and 4% in Europe. None of 
our  employees  are  represented  by  a  union  and  we  have  never  experienced  a  work  stoppage  because  of  union  actions.  We 
consider our employee relations to be favorable.  

Purpose and Culture. All of our employees are expected to uphold the following core values which are foundational to 

our culture: 

•  Passion – ownership, pride and caring in our work 

• 

Integrity – honesty, dependable, predictable and accountable 

•  Collaboration – working together toward a common goal 

•  Results – meeting and exceeding goals, focused toward innovation and growth  

These core values define the way we do business in our everyday actions and choices. We strive to create a respectful 
work environment characterized by mutual trust and the absence of intimidation, oppression, discrimination and exploitation. 

Talent Development and Acquisition. Successful execution of our strategy is dependent on attracting, developing and 
retaining key employees and members of our management and leadership teams. The skills, experience and industry knowledge 
of our employees significantly benefit our operations and performance. We continuously evaluate, modify, and enhance our 
internal processes, tools and technologies to increase employee engagement, productivity, quality and efficiency. We offer 
employees access to internal and external training and development courses to support individual development. We review 
succession plans and focus on promoting internal talent to help grow our employees, both professionally and personally.  

We strive to promote and cultivate an inclusive and diverse culture that welcomes and celebrates everyone without bias. 

In addition, we look to actively engage within our communities to foster and attain social equity. 

In order to ensure that we are meeting our human capital and talent objectives, we frequently utilize employee surveys 
to understand the effectiveness of our employee and Company programs and where we can improve across the Company. Our 
latest survey, completed during fiscal 2022, had a participation rate of over 84% of all our employees. Through the survey, our 
employees indicated that the Company’s greatest strengths include ensuring that managers are communicating performance 
expectations  to  employees  by  providing  feedback  on  performance  and  supporting  development,  providing  a  caring  work 
environment,  and  fostering  an  environment  where  employees  have  the  opportunity  to  do  their  best  and  have  a  sense  of 
accomplishment from their work.  

10 

 
 
 
 
 
Compensation Philosophy. Our compensation philosophy creates the framework and building blocks for our rewards 
and recognition programs. We have a pay-for-performance culture that ties compensation to the performance of the individual 
and the Company. We provide balanced compensation programs that focus on the following five key elements: 

•  Pay-for-performance - Reward those who achieve or exceed set goals and objectives, while also recognizing those 

making significant, impactful contributions; 

•  External market based - Pay levels that are competitive with respect to the labor market in which we compete for 

talent; 

• 

Internal equity - Providing fair compensation programs within the Company; 

•  Fiscal responsibility - Providing programs which can be responsibly supported by our operations; and 

•  Legal compliance - Ensure compliance with the applicable laws of the states and countries in which we operate in 

all material respects. 

Safety,  Health  and  Wellness.  We  strive  to  provide  an  environment  which  is  safe  and  where  our  employees  can  be 
productive. We have rigorous health and safety programs focused on awareness, recognition, risk assessment and management, 
as well as teamwork.  

In response to the COVID-19 pandemic, we implemented a response plan that we believe was in the best interest and 
health of our employees and the communities in which we operate. We continue to follow local statutory safety requirements 
while also monitoring COVID case numbers, in the communities in which operate, to constantly update our safety protocols 
and requirements 

Our  benefit  plans  are  competitive  and  comprehensive.  We  provide  each  of  our  employees  educational programs  and 

initiatives focused on holistic wellness supporting nutritional, physical, emotional, mental and financial wellbeing. 

Corporate Social Responsibility 

Our stakeholders are essential to our business – shareholders, customers, suppliers, employees, communities as well as 
the environment and society. We are working to make our workforce more inclusive, our business more sustainable, and our 
communities more engaged by maintaining strong environmental, social and governance (“ESG”) practices. Actions we have 
taken in pursuit of these commitments include the following environmental and social programs: 

•  Demanded excellence in our environmental performance, as illustrated in our annual ESG reports. 

•  Demanded excellence in our quality performance, as demonstrated through our product and process qualification 

commitments, including ISO 9001 Quality Management; 

•  Set goals to reduce our environmental impact, including an increase in our use of renewable energy, a decrease in 
hazardous waste landfill, an increase in our use of recycled materials and beneficial reuse, and a reduction in our 
freshwater usage; 

•  Commitment  to  RBA  Code  of  Conduct  and  humane  treatment  of  all  at  Onto  Innovation  both  upstream  and 
downstream.  We established policies and practices to ensure that: Working conditions are safe. Workers are treated 
with respect and dignity. Manufacturing processes are environmentally responsible. 

•  Produced systems responsibly by offering tool trade-in, refurbishment and technology upgrade programs; 

•  Provided corporate matching for employee donations to qualified nonprofit organizations; and 

•  Engaged in community service projects in our communities globally. 

We 

encourage 

at 
https://ontoinnovation.com/company/corporate-social-responsibility)  for  more  detailed  information  regarding  our  ESG 
initiatives. Nothing on our website, including our ESG Report or sections thereof, is deemed incorporated by reference into 
this Form 10-K. 

ESG  Report 

our  website 

(located 

review 

2021 

you 

our 

on 

to 

11 

 
 
 
 
 
Compliance with Governmental Regulations  

We are subject to international, federal, state and local regulations that are customary to businesses in the semiconductor 

capital equipment manufacturing industry. Such regulations include, but are not limited to: 

•  The  Restriction  of  Hazardous  Substances  Directive  (“RoHS”),  which  restricts  the  use  of  certain  hazardous 

substances in electrical and electronic equipment;  

•  General  Data  Protection  Regulation  (“GDPR”),  which  provides  guidelines  for  the  collection  and  processing  of 

personal information from individuals who live in the European Union; 

•  The U.S. Foreign Corrupt Practices Act (“FCPA”), which prohibits companies and their individual officers from 

influencing foreign officials with any personal payments or rewards; 

•  Conflict minerals reporting, which imposes disclosure requirements regarding the use of “conflict” minerals mined 

from the Democratic Republic of Congo and adjoining countries in products; and 

•  Export regulations. 

Our compliance with export regulations has negatively impacted our ability to compete for the business of domestic 
customers in China, which has adversely affected our results of operations.  For additional discussion of the impact of trade 
policies and export regulations on our competitive position, see “Part I, Item IA - Risk Factors - Tariffs, export regulations, 
and other market barriers have impacted and may continue to impact ability to compete for the business of domestic customers 
in China, which may adversely affect our results of operations” and “PART I, Item 7 - management’s Discussion and Analysis 
of Financial Condition and Results of Operations - Key Events - Expanded U.S. Export Controls.” 

Available Information 

Our Internet website address is http://www.ontoinnovation.com. The information on our website is not incorporated into 
this Form 10-K. Our Annual Report on Form 10-K, Quarterly Reports on Form 10-Q and Current Reports on Form 8-K (and 
any amendments to those reports) are made available free of charge, on or through our Internet website, as soon as reasonably 
practicable after such material is electronically filed with or furnished to the SEC. All filings we make with the SEC are also 
available free of charge via EDGAR through the SEC’s website at http://www.sec.gov. In addition, the historic reports and 
materials  that  were  filed  by  Nanometrics  and  Rudolph  with  the  SEC  are  available  at  our  investor  relations  website  at 
https://investors.ontoinnovation.com. These filings may also be obtained through the SEC’s website. Documents that are not 
available through the SEC’s website may also be obtained by submitting an online request to the SEC at http://www.sec.gov. 

We also make available, free of charge, through our investor relations website, our corporate governance summary, Code 
of Business Conduct and Ethics, charters of the committees of our Board of Directors, and other information and materials, 
including information about how to contact our Board of Directors.  

Investors and others should also note that we announce material financial information to our investors using our investor 
relations website, SEC filings, press releases, public conference calls and webcasts. We use these channels as well as social 
media to communicate with the public about the Company, our products and services and other matters. It is possible that the 
information we post on social media could be deemed to be material information. Therefore, we encourage investors, the media, 
and others interested in the Company to review the information we post on the social media channels listed on our investor 
relations website. 

Item 1A. Risk Factors. 

Below is a summary the principal factors and uncertainties that make investing in our company risky.  You should read 

this summary together with the more detailed description of each risk factor contained further below. 

 Risks Related to Our Operations 

• 

• 

If  we  do  not  manage  our  supply  chain  effectively,  our  operating  results  may  be  adversely  affected,  and  any 
increases in material, labor, supplier, logistics and other operating costs, or supply chain delays and shortages, 
could lower our margins or result in lost sales. 

Variations in the amount of time it takes for us to sell our systems may cause fluctuations in our operating results, 
which could cause our stock price to decline. 

•  We are subject to order and shipment uncertainties. Our profitability will decline if we fail to accurately forecast 

customer demand when managing inventory. 

12 

 
 
 
• 

• 

If we deliver systems with defects, our credibility will be harmed, and the sales and market acceptance of our 
systems will decrease. 

Our integrated metrology systems are integrated with systems sold independently by wafer fabrication equipment 
suppliers, and a decrease in sales by these suppliers, or the development of competing systems by these suppliers, 
could harm our business. 

•  We  must  attract  and  retain  experienced  senior  executives  and  other  key  personnel  with  knowledge  of 
semiconductor device manufacturing and inspection, metrology or lithography equipment and related software to 
help support our future growth, and competition for such personnel in our industry is high. 

• 

• 

The COVID-19 pandemic and the resulting economic impact and supply chain issues have affected our business 
and could, in the future, adversely affect our business, results of operations, and financial condition. 

Any prolonged disruption in the operations of our manufacturing facilities could have a material adverse effect on 
our revenue. 

•  We may outsource select manufacturing activities to third-party service providers, which decreases our control 
over the performance of these functions and may result in lower quality and functionality of our products. 

• 

Our ability to fulfill our backlog may have an effect on our long-term ability to procure contracts and fulfill current 
contracts. 

Risks Related to Our Customers 

• 

Our  largest  customers  account  for  a  substantial  portion  of our  revenue,  and  our  revenue  and  cash  flows  could 
decline considerably if one or more of these customers were to purchase significantly fewer of our systems or delay 
or cancel a large order. 

Risks Related to Product Development 

• 

• 

• 

• 

If we are not successful in developing new and enhanced products for the semiconductor device manufacturing 
industry, we will lose sales and market share to our competitors. 

If new products developed by us do not gain general market acceptance, we will be unable to generate revenue and 
recover our investments, which may result in a write down of inventory. 

Even if we are able to develop new products that gain market acceptance, sales of these new products could impair 
our ability to sell existing products. 

If our relationships with our large customers deteriorate, our product development activities could be adversely 
affected. 

Risks Related to Intellectual Property and Data Security 

•  We may fail to adequately protect our intellectual property and, therefore, lose our competitive advantage. 

• 

• 

Protection of our intellectual property rights, or the efforts of third parties to enforce their own intellectual property 
rights against us, may result in costly and time-consuming litigation, substantial damages, lost product sales and/or 
the loss of important intellectual property rights. 

If our network security measures are breached and unauthorized access is obtained to a customer’s data, to our 
data, or to our information technology systems, we may incur significant legal and financial exposure and liabilities 
and may experience disruptions in our operations. 

Risks Related to Competition 

• 

• 

Some  of  our  current  and  potential  competitors  have  significantly  greater  resources  than  we  do,  and  increased 
competition could impair sales of our products or cause us to reduce our prices. 

Because of the high cost of switching equipment vendors in our markets, it is sometimes difficult for us to win new 
customers from our competitors even if our systems are superior to theirs. 

13 

 
 
 
 
 
Risks Related to Our International Operations 

•  We are subject to compliance with domestic and foreign laws and regulations, and the burden of complying with 
such laws and regulations, or any failure to comply, has adversely affected and may continue to adversely affect 
our business, financial condition and results of operations.  

• 

• 

• 

Tariffs, export regulations, and other market barriers have impacted and may continue to impact both our ability 
to compete for the business of domestic customers in China and our results of operations.  

Political and economic instability may result in reduced demand for our products.  

Natural disasters, changes in climate and geo-political conflicts could materially adversely affect our worldwide 
operations (or those of our business partners).  

•  We may face difficulties in staffing and managing foreign branch operations due to political tensions or cultural 

differences.  

• 

• 

Currency fluctuations may impact our international sales or expose us to exchange rate risk.  

Our internal controls with respect to anti-corruption laws may not be effective, and any failure to comply with such 
laws may result in severe sanctions and liabilities, which may negatively affect our business, operating results and 
financial condition. 

Risks Related to Tax Laws, Financial Markets and the Environment 

• 

• 

Changes in tax rates or tax liabilities could affect results. 

Turmoil  or  fluctuations  in  the  credit  markets  and  the  financial  services  industry  may  negatively  impact  our 
business, results of operations, financial condition or liquidity, and our factoring arrangements may expose us to 
additional risks. 

•  We are subject to various environmental laws and regulations that could impose substantial costs upon us, and 
failure to comply with such laws and regulations may harm our business, operating results and financial condition. 

• 

Customer and investor focus on our environmental, social and governance responsibility practices and policies, 
and related regulatory requirements, may make our supply chain more complex, and any failure to comply with 
customer  or  investor  guidelines  or  applicable  laws  and  regulations  may  adversely  affect  our  relationship  with 
customers and investors or our reputation and results of operations. 

Risks Related to Growth and Acquisitions 

•  We may choose to acquire new and complementary businesses, products or technologies instead of developing 
them ourselves, and we may be unable to complete these acquisitions or may not be able to successfully integrate 
an acquired business in a cost-effective and non-disruptive manner. 

• 

If we cannot effectively manage growth, our business may suffer. 

Risks Related to the Global Economy and the Semiconductor Industry 

• 

• 

Cyclicality in the semiconductor device industry has led to substantial decreases in demand for our systems in the 
past and may, from time to time, continue to do so. 

Our future rate of growth is highly dependent on the development and growth of the market for microelectronic 
device inspection, lithography and metrology equipment. 

General Risk Factors 

• 

• 

Provisions of our charter documents and of Delaware law could discourage potential acquisition proposals and/or 
delay, deter or prevent a change in control of our company. 

Our stock price is volatile. 

14 

 
 
 
 
 
Risks Related to Our Operations 

If we do not manage our supply chain effectively, our operating results may be adversely affected, and any increases in 
material,  labor,  supplier,  logistics  and  other  operating costs,  or  supply  chain  delays  and  shortages,  could  lower  our 
margins or result in lost sales. 

We need to continually evaluate our global supply chains and assess opportunities to reduce costs. We must also enhance 
quality, speed and flexibility to meet changing demand for our products and product mix and uncertain market conditions. Our 
success also depends in part on refining our cost structure and supply chains so that we have flexibility and can maintain and 
improve profitability. Deteriorations in the tariff environment, political instability or changes in suppliers, may cause our costs 
to increase and, if we are not able to offset the increased costs by charging higher sales prices, will cause a decline in our 
margins. To improve our margins on a product, we will need to establish high volume supply agreements with our vendors. 
We cannot be certain that we will be able to timely negotiate vendor supply agreements on improved terms and conditions, or 
at all. Failure to achieve the desired level of cost reductions could adversely affect our financial results. Despite our efforts to 
control costs and increase efficiency in our facilities, changes in demand could still cause us to realize lower operating margins 
and profitability. 

Further, our gross margins and financial performance may be adversely affected by increases in our operating costs, such 
as  material,  labor,  supplier  costs,  logistics  and  energy  costs,  all  of  which  have  been  and  may  continue  to  be  subject  to 
inflationary  pressures.  Operating  costs  have  increased  and  may  continue  to  increase  further  as  a  result  of  supply  chain 
disruptions  in  connection  with  the  sourcing  of  components,  materials,  equipment,  engineering  support,  and  services,  labor 
shortages and other cost increases due to the COVID-19 pandemic and the effects of the Russia-Ukraine conflict.  We have 
also  experienced,  and  may  continue  to  experience,  production  delays, disruptions  and  cost  increases  due  to  the  worldwide 
shortage of semiconductor components as a result of sharp increases in demand for semiconductor products in general. 

These risks may be heightened because we obtain some of the components and subassemblies included in our systems 
from a limited group of suppliers and do not have long-term contracts with many of our suppliers. Our dependence on limited-
source suppliers of components and our lack of long-term contracts with many of our suppliers expose us to several risks, 
including a potential inability to obtain an adequate supply of components, price increases, late deliveries and poor component 
quality.  A significant number of our suppliers are the sole source or single source for certain components or subassemblies.  If 
such a supplier is unable or unwilling to manufacture and deliver components to us on the time schedule and of the quality or 
quantity that we require, we may be forced to seek to engage an additional or replacement supplier or redesign our product to 
use  alternative  components,  which  could  result  in  additional  expenses  and  delays  in  product  development  or  shipment  of 
product to our customers. Disruption or termination of the supply of components has delayed and could continue to delay 
shipments of some of our systems.  Such delays may damage our customer relationships and reduce our sales. The lead-time 
required for shipments of some of our components can be greater than six months. In addition, the lead time required to qualify 
new suppliers for lasers and certain optics could be as long as a year, and the lead time required to qualify new suppliers of 
other components could be as long as nine months. In some cases, we may need to purchase components in advance of receiving 
customer  orders  for  product.  If  we  are  unable  to  accurately  predict  our  component  needs,  or  if  our  component  supply  is 
disrupted,  as  it  has  been  due  to  supply  chain  disruptions,  logistics  difficulties  and  shipping  delays  due  to  the  COVID-19 
pandemic and global electronic component shortages, we may miss market opportunities by not being able to meet the demand 
for our systems. Further, a significant increase in the price of one or more of these components or subassemblies could seriously 
harm our results of operations and cash flows. 

Our efforts to mitigate any cost increases, labor impacts and supply chain delays and shortages may not be successful, 
and we cannot predict the duration of these current trends or other future increases in operating costs. We may not be able to 
pass cost increases through to our customers fully (or at all), and if supply chain delays and shortages delay delivery of our 
products, our customers may seek to purchase from our competitors. Any such occurrence may have a material adverse impact 
on our gross margins and business, financial position, results of operations and cash flows. 

Variations in the amount of time it takes for us to sell our systems may cause fluctuations in our operating results, which 
could cause our stock price to decline. 

Variations in the length of our sales cycles could cause our revenue and cash flows, and consequently, our business, 
financial condition, operating results and cash flows to fluctuate widely from period to period. This variation could cause our 
stock price to decline. Our customers generally take a long time to evaluate our inspection and/or film metrology systems and 
many people are involved in the evaluation process. We expend significant resources educating and providing information to 
our prospective customers regarding the uses and benefits of our systems in the semiconductor fabrication process. The length 
of time it takes for us to make a sale depends upon many factors, including, but not limited to: 

15 

 
 
 
• 

• 

• 

• 

• 

the efforts of our sales force; 

the complexity of the customer’s fabrication processes; 

the internal technical capabilities and sophistication of the customer; 

the customer’s budgetary constraints; and 

the quality and sophistication of the customer’s current metrology, inspection or lithography equipment. 

Because of the number of factors influencing the sales process, the period between our initial contact with a customer 
and the time when we recognize revenue from that customer and receive payment, if ever, varies widely in length. Our sales 
cycles, including the time it takes for us to build a product to customer specifications after receiving an order to the time we 
recognize  revenue,  typically  range  from  three  to  twenty-four  months.  Sometimes  our  sales  cycles  can  be  much  longer, 
particularly with customers in Asia. During these cycles, we commit substantial resources to our sales efforts in advance of 
receiving any revenue, and we may never receive any revenue from a customer despite our sales efforts. If we do make a sale, 
our customers often purchase only one of our systems, the performance of which they then evaluate for a lengthy period before 
purchasing any more of our systems. The number of additional products a customer purchases, if any, depends on many factors, 
including  the  customer’s  capacity  requirements.  The  period  between  a  customer’s  initial  purchase  and  any  subsequent 
purchases  can  vary  from  three  months  to  a  year  or  longer,  and  variations  in  the  length  of  this  period  could  cause  further 
fluctuations in our operating results and, possibly, in our stock price. 

We  are  subject  to  order  and  shipment  uncertainties.  Our  profitability  will  decline  if  we  fail  to  accurately  forecast 
customer demand when managing inventory. 

We typically plan production and inventory levels based on internal forecasts of customer demand, which can be highly 
unpredictable and can fluctuate substantially, which could lead to excess inventory write-downs and resulting negative impacts 
on gross margin and net income. We have limited visibility into our customers’ inventories, future customer demand and the 
product mix that our customers will require, which could adversely affect our production forecasts and operating margins. 
Recently, certain of our customers have publicly stated their intent to decrease their memory product inventory levels as lead 
time for components begins to decrease.  This could lead to a temporary decrease in demand for our products as customers 
delay capacity expansions until inventory levels are sufficiently reduced.  In addition, innovation in our industry could render 
significant portions of our inventory obsolete. If we overestimate our customers’ requirements, we may have excess inventory, 
which could lead to obsolete inventory and unexpected costs. Conversely, if we underestimate our customers’ requirements, or 
if we experience sustained disruptions to our supply chain or shipping delays, including those we continue to experience due 
to the COVID-19 pandemic, we may have inadequate inventory, which could lead to foregone revenue opportunities, loss of 
potential market share and damage to customer relationships as product deliveries may not be made on a timely basis, disrupting 
our customers’ production schedules. In response to anticipated long lead times to obtain inventory and materials from outside 
suppliers and foundries, we periodically order materials in advance of customer demand. This advance ordering has in the past 
and  may  in  the  future  result  in  excess  inventory  levels  or  unanticipated  inventory  write-downs  if  expected  orders  fail  to 
materialize,  or  other  factors make  our  products  less  saleable.  In  addition,  any  significant  future  cancellation  or deferral  of 
product orders could adversely affect our revenue and margins, increase inventory write-downs due to obsolete inventory, and 
adversely affect our operating results and stock price. 

Our earnings could be negatively affected, and our inventory levels could materially increase, if we are unable to predict 
our inventory needs in an accurate and timely manner and adjust our orders for parts and subcomponents in the event that our 
needs  increase  or  decrease  materially  due  to  unexpected  increases  or  decreases  in  demand  for  our  products.  Any  material 
increase in our inventories could result in an adverse effect on our financial position, while any material decrease in our ability 
to procure needed inventories could result in an inability to supply customer demand for our products, thus adversely affecting 
our revenue. 

16 

 
 
 
 
 
If we deliver systems with defects, our credibility will be harmed, and the sales and market acceptance of our systems 
will decrease. 

Our systems are complex and have occasionally contained errors, defects and bugs when introduced. Defects may be 
created during probing, bumping, dicing or general handling, and can have a major impact on device and process quality. When 
this occurs, our credibility and the market acceptance and sales of our systems could be harmed. Further, if our systems contain 
errors, defects or bugs, computer viruses or malicious code as a result of cyber-attacks to our computer networks, we may be 
required to expend significant capital and resources to alleviate these problems. Defects could also lead to product liability as 
a result of product liability lawsuits against us or against our customers. We have agreed to indemnify our customers under 
certain circumstances against liability arising from defects in our systems provided that we also include a cap on our liability 
in the related sales agreements. Our product liability insurance policy currently provides both aggregate coverage as well as an 
overall  umbrella  coverage.  In  the  event  of  a  successful  product  liability  claim,  we  could  be  obligated  to  pay  damages 
significantly in excess of our product liability insurance limits. 

Our  integrated  metrology  systems  are  integrated  with  systems  sold  independently  by  wafer  fabrication  equipment 
suppliers, and a decrease in sales by these suppliers, or the development of competing systems by these suppliers, could 
harm our business. 

We believe that sales of integrated metrology systems will continue to be an important source of our net revenues. Sales 
of our integrated metrology systems depend upon the ability of a small number of wafer fabrication equipment suppliers to sell 
semiconductor manufacturing equipment products that are compatible with our metrology systems as components. If these 
suppliers, such as Applied Materials, Inc., Ebara Corporation, Lam Research Corporation and Tokyo Electron, are unable to 
sell such products, if they choose to focus their attention on products that do not integrate with our systems, or if they choose 
to develop competing systems, our business could suffer.  

We must attract and retain experienced senior executives and other key personnel with knowledge of semiconductor 
device manufacturing and inspection, metrology or lithography equipment and related software to help support our 
future growth, and competition for such personnel in our industry is high. 

Our  success  depends,  to  a  significant  degree,  upon  the  continued  contributions  of  our  key  executive  management, 
engineering,  sales  and  marketing,  customer  support,  finance  and  manufacturing  personnel.  The  loss  of  any  of  these  key 
personnel, each of whom would be extremely difficult to replace, through resignations, retirement or other circumstances, could 
harm our business and operating results. Despite our employment and noncompetition agreements with key members of our 
senior management team, these individuals or other key employees may still leave us, which could have a material adverse 
effect on our business. We do not have key person life insurance on any of our executives. In addition, to support our future 
growth, we will need to attract and retain additional qualified employees. Competition for such personnel in our industry is 
intense, and we may not be successful in attracting and retaining qualified employees. 

The expansion of high technology companies worldwide and growth in the demand for semiconductors following the 
onset of the COVID-19 pandemic have increased demand and competition for qualified personnel. Competition for engineering 
and other technical personnel in some of the markets in which we operate is especially intense due to continued increases in 
the number of technology companies worldwide.  In order to attract and retain executives and other key employees, we must 
provide a competitive compensation package, including cash and stock-based compensation.  If the anticipated value of our 
stock-based incentive awards does not materialize so that they cease to be viewed as valuable, if our profits decrease, or if our 
total  compensation  package  is  not  viewed  as  competitive,  our  ability  to  attract,  retain  and  motivate  executives  and  key 
employees could be weakened. 

The COVID-19 pandemic and the resulting economic impact and supply chain issues have affected our business and 
could, in the future, adversely affect our business, results of operations, and financial condition. 

The  effects  of  the  public  health  crisis  caused  by  the  COVID-19  pandemic  and  the  resulting  economic  impact  have 
affected, and may continue to affect, our operations and those of our suppliers, third-party service providers, and customers.  
The  extent  to  which  the  COVID-19  pandemic  will  continue  to  impact  our  business,  results  of  operations,  and  financial 
conditions is difficult to predict and depends on numerous evolving factors including the duration and scope of the pandemic; 
government, social, business, and other actions that have been and will be taken in response to the pandemic; appearance of 
new variants of COVID-19; the availability, adoption, and efficacy of vaccines and treatments; and the intensity and duration 
of the resulting macroeconomic conditions.  The COVID-19 pandemic exposes our business, results of operations, and financial 
condition  to the following risks: disruptions to our supply chain in connection with the sourcing of materials, support, and 
services; disruption of operations due to unavailability of employees as a result of illness, risk of illness, travel restrictions or 
other factors; a potential decrease in short-term and/or long-term demand for our products; an increase in potential opportunities 

17 

 
 
 
for the Company to be subject to an adverse cybersecurity event as a result of an increase in employees working from home, 
which could give rise to business disruptions, loss of information, intellectual property and critical data as well as other negative 
impacts; and potential difficulty accessing capital, if needed in the future, either through our credit agreement or through a sale 
of securities, due to market conditions generally or a decline or volatility in the market for our securities.  The effects of these 
risks, alone or taken together, could have a material adverse effect on our business, results of operations, legal exposure, or 
financial condition. Additional sustained or prolonged outbreaks of COVID-19 could exacerbate the adverse impact of the 
conditions and may also heighten many of the other risks described in this “Risk Factors” section. 

Any prolonged disruption in the operations of our manufacturing facilities could have a material adverse effect on our 
revenue. 

We produce the majority of our systems in our manufacturing facilities located in Wilmington, Massachusetts, Milpitas, 
California  and  Bloomington,  Minnesota.  We  use  contract  manufacturers  in  China,  Japan  and  the  United  States.  Our 
manufacturing processes are highly complex and require sophisticated and costly equipment and a specially designed facility. 
As a result, any prolonged disruption in the operations of our manufacturing facilities could seriously harm our ability to satisfy 
our customer order deadlines. For example, shelter-in-place orders and other measures implemented during the COVID-19 
pandemic to protect employees resulted in reduced workforce availability at product manufacturing sites and reduced output at 
some of our vendors and suppliers. Restrictions on our access to or operation of manufacturing facilities or on our support 
operations or workforce, or similar limitations for our vendors and suppliers, may impact our ability to meet customer demand 
and could have a material adverse effect on our financial condition and results of operations.  If we cannot timely deliver our 
systems, our results from operations and cash flows could be materially and adversely affected. 

We  outsource  select manufacturing  activities  to third-party  service  providers,  which  decreases  our  control  over  the 
performance of these functions and may result in lower quality and functionality of our products. 

We  outsource  product  manufacturing  to  third-party  service  providers.  Outsourcing  reduces  our  control  over  the 
performance  of  the  outsourced  functions.  Dependence  on  outsourcing  may  also  adversely  affect  our  ability  to  bring  new 
products to market. If we do not effectively manage our outsourcing strategy or if third party service providers do not perform 
as anticipated, we may experience operational difficulties, increased costs, manufacturing interruptions or inefficiencies in the 
operation of our supply chain, any or all of which could delay our delivery of products to our customers, and materially and 
adversely affect our business, financial condition, and results of operations. 

Our ability to fulfill our backlog may have an effect on our long-term ability to procure contracts and fulfill current 
contracts. 

Our ability to fulfill our backlog may be limited by our ability to devote sufficient financial and human capital resources 
and may be limited by available material supplies. If we do not fulfill our backlog in a timely manner, we may experience 
delays in product delivery, which would postpone receipt of revenue from those delayed deliveries.  Delayed fulfillment also 
increases the risk that a customer may change or cancel an order due to evolution of the customer’s technological, production 
or market needs, which would result in a loss of revenue. Additionally, if we are consistently unable to fulfill our backlog, this 
may be a disincentive to customers to award large contracts to us in the future until they are comfortable that we can effectively 
manage our backlog. 

Risks Related to Our Customers 

Our largest customers account for a substantial portion of our revenue, and our revenue and cash flows could decline 
considerably if one or more of these customers were to purchase significantly fewer of our systems or delay or cancel a 
large order. 

Sales to end user customers that individually represent at least ten percent of our revenue typically account for, in the 
aggregate, a considerable amount of our revenue. We operate in the highly concentrated, capital-intensive semiconductor device 
manufacturing industry. Historically, a substantial portion of our revenue in each quarter and year has been derived from sales 
to relatively few customers, and this trend is expected to continue. If any of our key customers were to purchase significantly 
fewer of our systems in the future, or if they delay or cancel a large order, our revenue and cash flows could meaningfully 
decline. We expect that we will continue to depend on a small number of large customers for a sizable portion of our revenue. 
In addition, as large semiconductor device manufacturers seek to establish closer relationships with their suppliers, we expect 
that our customer base will become even more concentrated. 

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Risks Related to Product Development 

If we are not successful in developing new and enhanced products for the semiconductor device manufacturing industry, 
we will lose sales and market share to our competitors. 

We  operate  in  an  industry  that  is  highly  competitive  and  subject  to  evolving  industry  standards,  rapid  technological 
changes,  rapid  changes  in  consumer  demands  and  the  rapid  introduction  of  new,  higher  performance  systems  with  shorter 
product life cycles. To be competitive in our demanding market, we must continually design, develop and introduce in a timely 
manner new lithography, inspection and metrology process control systems that meet the performance and price demands of 
semiconductor device manufacturers. We must also continue to refine our current systems so that they remain competitive. We 
expect to continue to make significant investments in our research and development activities and at times may make inventory 
investments prior to commercialization. We may experience difficulties or delays in our development efforts with respect to 
new systems, and we may not ultimately be successful in our product enhancement efforts to improve and advance products or 
in responding effectively to technological change, as not all research and development activities result in viable commercial 
products. In addition, we cannot provide assurance that we will be able to develop new products for the most opportunistic new 
markets  and  applications.  Any  significant  delay  in  releasing  new  systems  could  cause  our  products  to  become  obsolete, 
adversely affect our reputation, give a competitor a first-to-market advantage or cause a competitor to achieve greater market 
share. 

In addition, our competitors may provide innovative technology that may have performance advantages over systems we 
currently offer or may offer in the future. They may be able to develop products comparable or superior to those that we offer 
or may adapt more quickly to new technologies or evolving customer requirements. In particular, we currently are developing 
additional product enhancements that we believe will address future customer requirements, but we may fail in a timely manner 
to  complete  the  development  or  introduction  of  these  additional  product  enhancements  successfully,  or  these  product 
enhancements may not achieve market acceptance or be competitive. 

Further, customers that may otherwise desire to purchase our products from us and purchase other products from our 
competitors may nevertheless purchase competing products from our competitors rather than purchase our products due to a 
variety of reasons, including to gain favor or volume pricing from our competitors. 

If new products developed by us do not gain general market acceptance, we will be unable to generate revenue and 
recover our investments, which may result in a write down of inventory. 

Inspection,  lithography  and  metrology  product  development  is  inherently  risky  because  it  is  difficult  to  foresee 
developments in semiconductor device manufacturing technology, coordinate technical personnel, and identify and eliminate 
system  design  flaws.  Further,  our  products  are  leading  edge  and  complex,  and  often  the  applications  to  our  customers’ 
businesses are unique. Any new systems we introduce may not achieve or sustain a significant degree of market acceptance 
and sales. 

We expect to spend a significant amount of time and resources developing new systems and refining our existing systems. 
In light of the long product development cycles inherent in our industry, these expenditures will be made well in advance of 
the prospect of deriving revenue from the sale of those systems.  The long lead times for some components may also require 
us to place orders for components and accumulate inventory in advance of market acceptance of our products.  

Our ability to commercially introduce and successfully market new systems is subject to a wide variety of challenges 
during the development cycle, including start-up bugs, design defects, and other matters that could delay introduction of these 
systems.  Since our customers are not obligated by long-term contracts to purchase our systems, our anticipated product orders 
may not materialize, or orders that are placed may be canceled.   

If we do not achieve market acceptance of new products, we may be unable to generate sufficient revenue and cash flow 
to recover our research and development costs and may result in a write down of our investments in inventory.  As a result, our 
market share, revenue, operating results or stock price would be negatively impacted. 

Even if we are able to develop new products that gain market acceptance, sales of these new products could impair our 
ability to sell existing products. 

Competition from our new systems could have a negative effect on sales of our existing systems and the prices that we 
could  charge  for  these  systems.  We  may  also  divert  sales  and  marketing  resources  from  our  current  systems  in  order  to 
successfully launch and promote our new or next generation systems. This diversion of resources could have a further negative 
effect on sales of our current systems and the value of inventory. 

19 

 
 
 
If  our  relationships  with  our  large  customers  deteriorate,  our  product  development  activities  could  be  adversely 
affected. 

The  success  of  our  product  development  efforts  depends  on  our  ability  to  anticipate  market  trends  and  the  price, 
performance and functionality requirements of semiconductor device manufacturers. In order to anticipate these trends and 
ensure that critical development projects proceed in a coordinated manner, we must continue to collaborate closely with our 
largest customers. Our relationships with these and other customers provide us with access to valuable information regarding 
trends in the semiconductor device industry, which enables us to better plan our product development activities. If our current 
relationships with our large customers are impaired, or if we are unable to develop similar collaborative relationships with 
important customers in the future, our product development activities could be adversely affected. 

Risks Related to Intellectual Property and Data Security 

We may fail to adequately protect our intellectual property and, therefore, lose our competitive advantage. 

Our future success and competitive position depend in part upon our ability to obtain and maintain proprietary technology 
for  our  principal  product  families.  If  we  fail  to  adequately  protect  our  intellectual  property,  it  will  give  our  competitors  a 
significant advantage. We own or have licensed a number of patents relating to our metrology, lithography, wafer and defect 
inspection systems, as well as artificial intelligence and machine learning systems, and software, including both embedded and 
application software, and have filed applications for additional patents.  Any of our pending patent applications may be rejected, 
however, and we may be unable to develop additional proprietary technology that is patentable in the future. In addition, the 
patents that we do own or that have been issued or licensed to us may not provide us with competitive advantages and/or may 
be challenged by third parties. Third parties may also design around our patents or copy our patented inventions without our 
knowledge.  

In addition to patent protection, we rely upon copyrights for protection of our proprietary software and documentation, 
trademarks  for  protection  of  our  brand  and  source  of  goods,  and  trade  secret  law,  and  confidentiality  and  non-compete 
agreements for protection of our confidential and proprietary information and technology.  These measures do not guarantee 
protection  of  our  intellectual  property,  however.  We  can  give  no  assurance  that  our  copyrights  will  be  upheld  or  will 
successfully  deter  infringement  by  third  parties.  Even  though  we  routinely  enter  into  confidentiality  agreements  with  our 
employees and other third parties there can be no assurances that trade secrets and proprietary information will not be disclosed, 
that others will not independently develop substantially equivalent proprietary information and techniques or otherwise gain 
access to our trade secrets, or that we can fully protect our trade secrets and proprietary information. Violations by others of 
our  confidentiality  agreements  and  the  loss  of  employees  who  have  specialized  knowledge  and  expertise  could  harm  our 
competitive position and cause our sales and operating results to decline as a result of increased competition.  It also possible 
that third parties will misappropriate our trade secrets or other confidential information.  We may be subject to cybersecurity 
breaches in which a third party obtains our confidential information.  Third parties may also reverse engineer our products to 
copy our technology. Any of these circumstances could result in harm to our competitive position in the market. Failure to 
protect our trademarks can lead to other companies selling products using confusing similar names, thereby damaging our 
brand.  In  some  countries,  it  can  be  difficult  to  register  trademarks  because  of  the  strict  examination  process  or  blocking 
trademarks for other goods. Costly and time-consuming litigation might be necessary to enforce and determine the scope of 
our intellectual property rights, and failure to obtain or maintain trade secret protection might adversely affect our ability to 
continue our research or bring products to market. 

From time to time, we may find it necessary to initiate litigation against other persons or entities to protect and/or enforce 
our intellectual property or contractual rights. However, litigation is costly and time consuming and there is no assurance that 
any lawsuit we bring will yield the result that we seek, as (i) the lawsuit may be dismissed or there could be an adverse finding, 
(ii)  we  may not be  able  to  pursue  the  lawsuit  due  to  the  laws  of  the  applicable  country or  (iii)  there  may  be  a  subsequent 
unfavorable change in law that limits our ability to pursue the lawsuit. For example, litigation discovery practice in China, 
Japan, South Korea, continental Europe and Taiwan is not as robust as the United States, so it can be more difficult to determine 
if a company is infringing on our patents and more challenging to bring a lawsuit.  Monitoring and preventing unauthorized 
use are also difficult and the measures we take to protect our intellectual property rights may not be adequate. Accordingly, 
infringement of our intellectual property rights poses a serious risk of doing business. There is a risk that we may be unable to 
adequately protect our intellectual property rights in certain foreign countries. For example, our competitors may independently 
develop similar technology or duplicate our products.  If this occurs, it would be easier for our competitors to develop and sell 
competing products in these countries. 

20 

 
 
 
Protection of our intellectual property rights, or the efforts of third parties to enforce their own intellectual property 
rights against us, may result in costly and time-consuming litigation, substantial damages, lost product sales and/or the 
loss of important intellectual property rights. 

We  may  be  required  to  initiate  litigation  in  order  to  enforce  our  intellectual  property  rights  or  to  determine  the 
noninfringement, scope or validity of a third party’s intellectual property rights. Any litigation, regardless of outcome, could 
be expensive and time consuming and could subject us to significant liabilities or require us to re-engineer our products or 
obtain expensive licenses from third parties. There can be no assurance that any patents, copyrights or other intellectual property 
rights issued to or licensed by us will not be challenged, invalidated or circumvented, or that the rights granted thereunder will 
provide us with a competitive advantage.  Furthermore, there is no assurance that any litigation we are involved in will yield 
the result that we seek as (i) the lawsuit may be dismissed or there could be an adverse finding, (ii) we may not be able to 
pursue the lawsuit due to the laws of the applicable country or (iii) there may be a subsequent unfavorable change in law that 
limits our ability to pursue the lawsuit. 

In addition, our commercial success depends in part on our ability to avoid infringing or misappropriating patents or other 
intellectual property rights owned by third parties. From time to time, we receive communications from third parties asserting 
that our products or systems infringe, or may infringe, on the intellectual property rights of these third parties. These claims of 
infringement may lead to protracted and costly litigation, which could require us to pay substantial damages or have the sale 
of our products or systems stopped by an injunction. Infringement claims could also cause product or system delays or require 
us to redesign our products or systems, and these delays could result in the loss of substantial revenue. We may also be required 
to obtain a license from the third party or cease activities utilizing the third party’s intellectual property rights. We may not be 
able to enter into such a license or such a license may not be available on commercially reasonable terms. Accordingly, the loss 
of an intellectual property dispute could hinder our ability to sell our products or systems or make the sale of our products or 
systems more expensive, which could lead to reduced revenue or lower margins, respectively. 

If our network security measures are breached and unauthorized access is obtained to a customer’s data, to our data, 
or to our information technology systems, we may incur significant legal and financial exposure and liabilities and may 
experience disruptions in our operations. 

As part of our business, we store our data and certain data about our customers, vendors and employees in our information 
technology system. We also rely on our information technology system for business operations. If there is a breach as a result 
of third-party action, employee error, malfeasance, break-ins or otherwise, of our security measures designed to protect this 
information and prevent data loss and other security breaches, and someone obtains unauthorized access to our customers’, 
vendors’ or employees’ data or disrupts our access to our own data and systems, we could face loss of business, regulatory 
investigations or court orders, our reputation could be severely damaged, we could be required to expend significant capital 
and  other  resources  to  alleviate  the  problem,  as  well  as  incur  significant  costs  and  liabilities,  including  due  to  litigation, 
indemnity  obligations,  damages  for  contract  breach,  penalties  for violation  of  applicable laws  or  regulations,  and  costs  for 
remediation and other incentives offered to customers. 

Cyber-attacks and other malicious internet-based activities continue to increase. In response to the COVID-19 pandemic, 
our expanded reliance on remote access to our information systems has further increased our exposure to potential cybersecurity 
breaches.  The Russia–Ukraine conflict and related sanctions imposed by the U.S. government may expose government entities 
and public and private U.S. companies to attempted or actual cybersecurity attacks launched in retaliation, and these attacks 
could materially disrupt our supply chain or our systems and operations or those of our customers and suppliers. 

As  the  techniques  used  to  obtain  unauthorized  access  or  sabotage  systems  change  frequently  and  generally  are  not 
identified  until  they  are  launched  against  a  target,  our  ability  to  anticipate  these  techniques  or  to  implement  adequate 
preventative measures is reduced. In addition, third parties have made attempts to fraudulently induce employees or users to 
disclose information to gain access to our data or our customers’ data. As a result of any of these events, our or our customers’ 
and  vendors’  information  could  be  accessed  or  disclosed  improperly.  In  addition,  cybersecurity  incidents  affecting  our 
customers could result in substantial delays in our ability to ship to those customers or install our products, which could result 
in delays in revenue recognition or the cancellation of orders, and cybersecurity incidents affecting our suppliers could result 
in substantial delays in our ability to obtain necessary components for our products from those suppliers, which could hamper 
our ability to ship our products to our customers, harming our results of operations and our customer relationships. Any or all 
of the above issues could negatively affect our ability to attract new customers, cause existing customers to choose to purchase 
from our competitors, result in reputational damage or subject us to third-party lawsuits, regulatory fines or other action or 
liability, which could adversely affect our operating results. 

The General Data Protection Regulation (“GDPR”) is a regulation in European Union (“EU”) law on data protection and 
privacy for the individuals within the EU and the European Economic Area (“EEA”). It also addresses the export of personal 
data outside the EU and EEA areas. The United Kingdom has adopted legislation that substantially implements the GDPR and 

21 

 
 
 
provides for a similar penalty structure.  We are also subject to the California Consumer Privacy Act of 2018 (“CCPA”), which 
became effective January 1, 2020, as well as the California Privacy Rights Act (CPRA), an amendment and expansion of the 
CCPA. Although the CPRA has an effective date of January 1, 2023, many of its provisions will retroactively apply to personal 
information collected from January 1, 2022. We may also be subject to other data privacy laws in the United States and the 
other countries in which we operate.  In many cases, these laws apply not only to third-party transactions, but also to transfers 
of information between us and our subsidiaries, and among the subsidiaries and other parties with which we have commercial 
relations. The introduction of new products or expansion of our activities in certain jurisdictions may subject us to additional 
laws and regulations.  These U.S. federal and state and foreign laws and regulations, including GDPR which can be enforced 
by private parties or government entities, are constantly evolving and can be subject to significant change. In addition, the 
application and interpretation of these laws and regulations, including GDPR, are often uncertain, particularly in our evolving 
industry, and may be interpreted and applied differently from country to country. Appropriate technical and organizational 
measures are necessary to implement these data protection principles.  These laws and regulations can be costly to comply with 
and may delay or impede the development of new products, result in negative publicity, increase our operating costs, require 
significant management time and attention, or subject us to inquiries or investigations, claims or other remedies, including 
fines, which may be significant, or demands that we modify or cease existing business practices. A failure by us, our suppliers, 
or other parties with whom we do business to comply with posted privacy policies or with other federal, state, or international 
privacy-related or data protection laws and regulations, including GDPR, CCPA, CPRA and other new or changing privacy 
laws and regulations, could result in proceedings against us by governmental entities or others, which could have a material 
adverse effect on our business, results of operations, and financial condition. 

Risks Related to Competition 

Some  of  our  current  and  potential  competitors  have  significantly  greater  resources  than  we  do,  and  increased 
competition could impair sales of our products or cause us to reduce our prices. 

The market for semiconductor capital equipment is highly competitive. We face substantial competition from established 
companies in each of the markets we serve. We principally compete with KLA Corporation, Nova Measuring Instruments, 
Camtek, Ushio, Canon, and PDF Solutions. We compete to a lesser extent with Nikon. Each of our products also competes 
with  products  that  use  different  metrology,  inspection  or  lithography  techniques.  Some  of  our  competitors  have  greater 
financial, engineering, manufacturing and marketing resources, broader product offerings and service capabilities and larger 
installed customer bases than we do. As a result, these competitors may be able to respond more quickly to new or emerging 
technologies or market developments by devoting greater resources to the development, promotion and sale of products, which, 
in  turn,  could  impair  sales  of  our  products.  Further,  there  may  be  significant  merger  and  acquisition  activity  among  our 
competitors and potential competitors, which, in turn, may provide them with a competitive advantage over us by enabling 
them to rapidly expand their product offerings and service capabilities to meet a broader range of customer needs. 

Many of our customers and potential customers in the semiconductor device manufacturing industry are large companies 
that  require  global  support  and  service  for  their  semiconductor  capital  equipment.  We  believe  that  our  global  support  and 
service  infrastructure  is  sufficient  to  meet  the  needs  of  our  customers  and  potential  customers.  However,  some  of  our 
competitors have more extensive infrastructures than we do, which could place us at a disadvantage when competing for the 
business of global semiconductor device manufacturers. Many of our competitors are investing heavily in the development of 
new systems that will compete directly with our systems. We have, from time to time, selectively reduced prices on our systems 
in  order  to  protect  our  market  share,  and  competitive  pressures  may  necessitate  further  price  reductions.  We  expect  our 
competitors in each product area to continue to improve the design and performance of their products and to introduce new 
products  with  competitive  prices  and  performance  characteristics.  These  product  introductions  would  likely  require  us  to 
decrease the prices of our systems and increase the level of discounts that we grant our customers. Price reductions or lost sales 
as a result of these competitive pressures would reduce our total revenue and could adversely impact our financial results. 

Because of the high cost of switching equipment vendors in our markets, it is sometimes difficult for us to win new 
customers from our competitors even if our systems are superior to theirs. 

We believe that once a semiconductor device manufacturer has selected one vendor’s capital equipment for a production-
line  application,  the  manufacturer  generally  relies  upon  that  capital  equipment  and,  to  the  extent  possible,  subsequent 
generations of the same vendor’s equipment for the life of the application. Once a vendor’s equipment has been installed in a 
production line application, a semiconductor device manufacturer must often make substantial technical modifications and may 
experience production-line downtime in order to switch to another vendor’s equipment. Accordingly, unless our systems offer 
performance or cost advantages that outweigh a customer’s expense of switching to our systems, it will be difficult for us to 
achieve significant sales to that manufacturer once it has selected another vendor’s capital equipment for an application. 

22 

 
 
 
Risks Related to Our International Operations 

We are subject to compliance with domestic and foreign laws and regulations, and the burden of complying with such 
laws and regulations, or any failure to comply, has adversely affected and may continue to adversely affect our business, 
financial condition and results of operations.  

Our business is subject to risks inherent in doing business internationally, including compliance with, inconsistencies 
among, and unexpected changes in, a wide variety of foreign laws and regulatory environments with which we are not familiar, 
including,  among  other  issues,  with  respect  to  employees,  protection  of  our  intellectual  property,  and  a  wide  variety  of 
operational regulations and trade and export controls under domestic, foreign, and international law.  

We are faced with various risks that may be associated with our compliance with existing, new, different, inconsistent or 
conflicting laws, regulations and rules enacted by governments and/or their regulatory agencies in the countries in which we 
operate as well as rules and policies implemented at our customer sites. These laws, regulations, rules and policies could relate 
to any of an array of issues including, but not limited to, environmental, tax, intellectual property, trade secrets, product liability, 
contracts, antitrust, employment, securities, import/export and unfair competition. The cost of maintaining compliance under 
multiple and changing regulatory regimes may adversely affect our business, financial condition and results of operations, and, 
in  the  case  of  export  controls,  has  adversely  affected  and  may  continue  to  adversely  affect  our  results  of  operations.    As 
discussed below under the heading “Tariffs, export regulations, and other market barriers have impacted and may continue to 
impact both our ability to compete for the business of domestic customers in China and our results of operations,” the U.S. 
government  recently  issued, on  October 7,  2022,  new  export  control  rules  aimed  at  restricting  China’s  access  to  advanced 
computing  technology.    To  comply  with  the  new  rules,  Onto  Innovation has  had  to  expend  time  and resources  that might 
otherwise have been used for revenue generating activities. Further regulatory changes could require additional diversion of 
resources  to  compliance  efforts.    In  addition,  in  the  event  that  we  fail  to  comply  with  or  violate  U.S.  or  foreign  laws  or 
regulations or customer policies, we could be subject to civil or criminal claims or proceedings that may result in monetary 
fines, penalties or other costs against us or our employees, which may adversely affect our operating results, financial condition, 
customer relations and ability to conduct our business. 

Tariffs, export regulations and other market barriers have impacted and may continue to impact both our ability to 
compete for the business of domestic customers in China and our results of operations.  

The semiconductor device industry is a high-visibility industry in many of the European and Asian countries in which 
we  sell  our  products.  Because  the  governments  of  these  countries  have  provided  extensive  financial  support  to  our 
semiconductor device manufacturing customers in these countries, we believe that our customers could be disproportionately 
affected by any trade embargoes, excise taxes, tariffs, or other restrictions imposed by their governments on trade with U.S. 
companies such as ourselves, particularly with respect to the ongoing tensions between the United States and China.  

Over the last several years, the U.S. government has significantly expanded export controls on certain technologies and 
commodities to certain markets, particularly with respect to semiconductor and other high technology exports to China. For 
example, effective June 2020, the U.S. Department of Commerce imposed new export controls on the transfer of many U.S. 
products and technologies, including many commercial-grade electronics, to “military end users” or for “military end use” in 
China, which may include many Chinese commercial companies that sell products to or do business with the Chinese military. 
Likewise, since May 2019, the U.S. Department of Commerce has imposed restrictions on the transfer of any products from 
the U.S., as well as many products produced overseas that incorporate U.S. content or rely on U.S. software or technology, to 
Huawei  Technologies  Co.,  Ltd.,  and  its  overseas  affiliates,  followed  by  a  comparable  action  in  December 2020, related  to 
Semiconductor Manufacturing International Corporation (SMIC) and its overseas affiliates.  Most recently, in October 2022, 
the Bureau of Industry and Security (“BIS”) of the U.S. Department of Commerce implemented new export controls related to 
the  Chinese  semiconductor  manufacturing,  advanced  computing,  and  supercomputer  industries  (the  “October  2022  Export 
Controls”).  In 2022, BIS also added a number of companies in China to the Unverified List and Entity List of the Export 
Administration Regulations (“EAR”), including Yangtze Memory Technologies Co., Ltd (YMTC). 

The effect of these changes, among others, is that Onto Innovation is required to conduct additional end-use diligence 
and in some instances obtain export licenses before providing products to certain customers.  While we are taking appropriate 
measures to comply with all current export control laws and regulations applicable to our business and are applying for export 
licenses when required, there can be no assurance that export licenses applied for by us or our customers, will be granted in a 
timely manner or at all.  We have experienced and may continue to experience a temporary loss of revenues while we are 
obtaining licenses with certain customers affected by export controls.  Failure to obtain any required license could result in a 
reduction of anticipated revenues until we are able to replace unlicensed orders with other customer orders for which a license 
has been obtained or is not required, and there can be no assurance that replacement orders will be obtained on favorable terms, 
in a timely manner, or at all.  In addition, any licenses that are granted to us or to our customers may have a short duration or 

23 

 
 
 
require  us  to  satisfy  various  conditions.    Any  of  these  occurrences  could  have  a  material  adverse  effect  on  our  revenues, 
business, financial condition and results of operations. Further, we hold inventory of products that may be affected by these 
recent U.S. government actions, including potential order cancellations. If the sale of these products is delayed or we are unable 
to return or dispose of our inventory on favorable economic terms, we may incur additional carrying costs for the inventory or 
otherwise record charges associated with this inventory. 

The administrative processing, attendant delays and risk of ultimately not obtaining required export approvals also put 
us at a disadvantage relative to our non-U.S. competitors who may not be required to comply with U.S. export controls. This 
difficulty and uncertainty has adversely affected our ability to compete for and win business from domestic customers in China.  

It is possible that the U.S. government will impose additional export controls on our products or systems, which could 
lead to further revenue losses.  Such changes could result in additional restrictions on our ability to sell products to customers 
in China and other jurisdictions. Foreign customers affected by current or future U.S. government sanctions, controls or threats 
of sanctions or controls may respond by developing their own solutions to replace our products or by utilizing our foreign 
competitors’ products.  In addition, these export controls may also reduce overall global demand for our customers’ products 
or for other products produced or manufactured in the U.S. or based on U.S. technology, in turn reducing demand for our 
products, which could have a material adverse effect on our business, financial condition and results of operations.  Increased 
restrictions on China exports may also lead to regulatory retaliation by the Chinese government, which may adversely impact 
our  business.    International  trade  disputes  could  result  in  increases  in  tariffs  and  other  trade  restrictions  and  protectionist 
measures that could adversely impact our operations and reduce the competitiveness of our products relative to local and global 
competitors. 

Political and economic instability may result in reduced demand for our products.  

We are subject to various global risks related to political and economic instabilities in countries in which we derive sales. 
If terrorist activities, armed conflict, civil or military unrest or political instability occurs outside of the United States, these 
events may result in reduced demand for our products. For example, the Ukraine–Russia geographic region is a major source 
of critical raw materials used for semiconductor manufacturing (such as neon and palladium), and any supply chain disruptions 
or shortages of such materials due to the ongoing conflict in that region could impact our customers in a manner that reduces 
demand for our products.  

In addition, due to the complex relationships among China, Hong Kong, Taiwan, and the United States, there is risk that 
political,  diplomatic,  and  national  security  influences  might  lead  to  trade,  technology,  or  capital  disputes,  or  disruptions 
affecting the semiconductor industry.  In particular, the escalation of geopolitical tensions between China and Taiwan may 
cause disruptions in the markets in which we operate and lead to a decreased demand for our products, which could adversely 
affect our business in Asia or have a negative impact on the regional or global economy. 

Furthermore,  an  outbreak  of  hostilities  or  other  political  upheaval  in  China,  Taiwan,  Japan,  or  South  Korea,  or  an 
economic downturn in Asia or globally, would likely harm the operations of our customers in these countries. The effect of 
these types of events on our revenue and cash flows could be material because we derive substantial revenue from sales to 
semiconductor device foundries in Taiwan such as Taiwan Semiconductor Manufacturing Company Ltd., from memory chip 
manufacturers in South Korea such as Samsung Electronics Co., Ltd., and from semiconductor device manufacturers in Japan 
such as Toshiba Corporation. 

Natural  disasters,  changes  in  climate  and  geo-political  conflicts  could  materially  adversely  affect  our  worldwide 
operations (or those of our business partners).  

The occurrence of one or more natural disasters such as hurricanes, tropical storms, fires, cyclones, earthquakes, tsunamis, 
flooding,  typhoons,  volcanic  eruptions  and  weather  conditions  such  as  major  or  extended  winter  storms,  droughts  and 
tornadoes, whether as a result of climate change or otherwise, may disrupt manufacturing or other operations. For example, our 
Milpitas operations are located near major earthquake fault lines in California. There may also be conflict or uncertainty in the 
countries in which we operate, including public health issues (for example, an outbreak of a contagious disease such as COVID-
19, avian influenza, measles or Ebola), safety issues, natural disasters, fire, disruptions of service from utilities, nuclear power 
plant accidents or general economic or political unrest, including war, civil unrest or terrorist attacks. We cannot provide any 
assurance that alternate means of conducting our operations (whether through alternate production capacity or service providers 
or otherwise) would be available if a major disruption were to occur or that, if such alternate means were available, they could 
be obtained on favorable terms.  We have no operations in Russia, Belarus or Ukraine and do not have significant customers 
or suppliers in any of those countries.  Consequently, to date, our operations have not been materially adversely affected by 
Russia’s invasion of Ukraine.  However, if the Russia-Ukraine conflict escalates and/or the U.S. and other jurisdictions impose 
additional sanctions on Russia and its supporters, there could be a disruption to the global economy and/or supply chains that 

24 

 
 
 
could adversely affect our business. For example, components used in certain of our products use raw materials that may be 
sourced from Russia and Ukraine; if supply of those materials is disrupted it could adversely impact our ability manufacture 
and sell those products, which could adversely affect our results of operations. 

We  may  face  difficulties  in  staffing  and  managing  foreign  branch  operations  due  to  political  tensions  or  cultural 
differences.  

During periods of tension between the governments of the United States and certain other countries, it is often difficult 
for U.S. companies such as ours to staff and manage operations in such countries. Language and other cultural differences may 
also inhibit our sales and marketing efforts and create internal communication problems among our U.S. and foreign research 
and  development  teams,  increasing  the  difficulty  of  managing  multiple  remote  locations  performing  various  development, 
quality assurance, and yield ramp analysis projects. 

Currency fluctuations may impact our international sales or expose us to exchange rate risk.  

A substantial portion of our international sales are denominated in U.S. dollars. As a result, if the dollar rises in value in 
relation to foreign currencies, our systems will become more expensive to customers outside the United States and may be less 
competitive with systems produced by competitors outside the United States. These conditions could negatively impact our 
international  sales.  Foreign  sales  also  expose  us  to  collection  risk  in  the  event  it  becomes  more  expensive  for  our  foreign 
customers to convert their local currencies into U.S. dollars. Additionally, in the event a larger portion of our revenue becomes 
denominated  in  foreign  currencies,  we  would  be  subject  to  a  potentially  significant  exchange  rate  risk,  and  any  failure  to 
sufficiently hedge or otherwise manage these risks could materially and adversely affect our financial condition, results of 
operations, and liquidity. 

Our internal controls with respect to anti-corruption laws may not be effective, and any failure to comply with such 
laws  may  result  in  severe  sanctions  and  liabilities,  which  may  negatively  affect  our  business,  operating  results  and 
financial condition. 

We are subject to the Foreign Corrupt Practices Act of 1977, as amended (the “FCPA”), and other laws that prohibit 
improper payments or offers of payments to foreign governments and their officials and political parties by U.S. persons and 
issuers as defined by the statute, for the purpose of obtaining or retaining business. Also, similar worldwide anti-bribery laws, 
such as the U.K. Bribery Act and Chinese anti-corruption laws, generally prohibit companies and their intermediaries from 
making improper payments to non-U.S. officials for the purpose of obtaining or retaining business. Some of our distribution 
partners  are  located  in  parts  of  the  world  that  have  experienced  governmental  corruption  to  some  degree  and,  in  certain 
circumstances,  strict  compliance  with  anti-bribery  laws  may  conflict  with  local  customs  and  practices.  The  policies  and 
procedures  we  have  implemented  to  discourage  these  practices  by  our  employees,  our  existing  safeguards  and  any  future 
improvements may prove to be ineffective, and our employees, consultants, sales agents or distributors may engage in conduct 
for which we might be held responsible. Violations of the FCPA or international anti-corruption laws may result in severe 
criminal or civil sanctions, and we may be subject to other liabilities, which could negatively affect our business, operating 
results  and  financial  condition.  In  addition,  the  U.S.  government  may  seek  to  hold  us  liable  for  successor  liability  FCPA 
violations committed by companies in which we invest or that we acquire. We cannot assure you that our internal control 
policies and procedures will protect us from reckless or negligent acts committed by our employees, distributors, partners, 
consultants or agents. 

Risks Related to Tax Laws, Financial Markets and the Environment 

Changes in tax rates or tax liabilities could affect results. 

As a global company, we are subject to taxation in the United States and various other countries. Significant judgment is 
required to determine and estimate worldwide tax liabilities. Our future annual and quarterly tax rates could be affected by 
numerous factors, including changes in the (1) applicable tax laws; (2) composition of earnings in countries with differing tax 
rates; or (3) recoverability of our deferred tax assets and liabilities. Beginning in 2022, the U.S. Tax Cuts and Jobs Act of 2017 
(“TCJA”) eliminated the existing option to deduct research and development expenditures and requires taxpayers to amortize 
them  over  five  years  pursuant  to  IRC  Section  174.  Although  Congress  is  considering  legislation  that  would  defer  the 
amortization requirement to later years, we have no assurance that the provision will be repealed or otherwise modified. The 
requirement will reduce our cash flows for 2022, unless repealed.  In addition, recent proposals to increase the U.S. corporate 
income tax rate, increase U.S. taxation of international business operations and impose a global minimum tax could have a 
negative  impact  on  our  tax  position  depending  upon  the  terms  of  the  final  enacted  legislation.  Based  on  the  nature  of  the 
uncertainties around specific legislation to be enacted, we have not quantified the impact of this risk.  Many countries and 

25 

 
 
 
organizations such as the Organization for Economic Cooperation and Development are also actively considering changes to 
existing  tax  laws  or  have  proposed  or  enacted  new  laws  that  could  increase  our  tax  obligations  in  countries  where  we  do 
business or cause us to change the way we operate our business. Any of these developments or changes in federal, state, or 
international tax laws or tax rulings could adversely affect our effective tax rate and our results of operations.  

In addition, we are subject to regular examination of our income tax returns by the Internal Revenue Service and other 
tax authorities. We regularly assess the likelihood of favorable or unfavorable outcomes resulting from these examinations to 
determine the adequacy of our provision for income taxes. Although we believe our tax estimates are reasonable, there can be 
no assurance that any final determination will not be materially different from the treatment reflected in our historical income 
tax provisions and accruals, which could materially and adversely affect our results of operations. 

The Organization for Economic Co-operation and Development (“OECD”), released guidance covering various topics, 
including country-by-country reporting, definitional changes to permanent establishment and Base Erosion and Profit Shifting 
(“BEPS”), an initiative that aims to standardize and modernize global tax policy. Depending on the final form of guidance 
adopted by OECD members and legislation ultimately enacted, if any, there may be significant consequences for us due to our 
international business activities, including, but not limited to, an increase in our tax uncertainty and adverse effects on our 
provision for income taxes. 

Turmoil or fluctuations in the credit markets and the financial services industry may negatively impact our business, 
results of operations, financial condition or liquidity, and our factoring arrangements may expose us to additional risks. 
In the past, global credit markets and the financial services industry have experienced periods of turmoil and upheaval 
characterized by the tightening of the credit markets, the weakening of the global economy and an unprecedented level of 
intervention  from  the  United  States  and  other  governments.  Adverse  economic  conditions,  such  as  sustained  periods  of 
economic uncertainty or a crisis in the financial markets may have a material adverse effect on our liquidity and financial 
condition if our ability to obtain credit from the capital financial markets, or from trade creditors was impaired. In addition, a 
worsening economy or an economic crisis could also adversely impact our customers’ ability to finance the purchase of systems 
from us or our suppliers’ ability to provide us with product, either of which may negatively impact our business and results of 
operations. 

We are subject to various environmental laws and regulations that could impose substantial costs upon us, and failure 
to comply with such laws and regulations may harm our business, operating results and financial condition. 

Some of our operations use substances regulated under various federal, state, local, and international laws governing the 
environment, including those relating to the storage, use, discharge, disposal, labeling, and human exposure to hazardous and 
toxic materials. We could incur costs, fines and civil or criminal sanctions, third-party property damage or personal injury 
claims, or could be required to incur substantial investigation or remediation costs, if we were to violate or become liable under 
environmental  laws.  Liability  under  environmental  laws  can  be  joint  and  several  and  without  regard  to  comparative  fault. 
Compliance  with  current  or future  environmental  laws  and  regulations  could  restrict  our  ability  to  expand our facilities  or 
require us to acquire additional expensive equipment, modify our manufacturing processes, or incur other significant expenses. 
We may unintentionally violate environmental laws or regulations in the future as a result of human error, equipment failure 
or other causes.  In addition to the potential adverse effects on our business operations of such an event, we are committed to 
maintaining  safe  working  conditions  for  our  employees  and  sourcing,  manufacturing,  and  distributing  our  products  in  a 
responsible and environmentally friendly manner, and any failure on our part to do so may cause reputational harm for the 
Company. 

Customer and investor focus on our environmental, social and governance responsibility practices and policies, and 
related regulatory requirements, may make our supply chain more complex, and any failure to comply with customer 
or  investor  guidelines  or  applicable  laws  and  regulations  may  adversely  affect  our  relationship  with  customers  and 
investors or our reputation and results of operations. 

There  is  an  increasing  focus  on  corporate  environmental,  social  and  governance  (“ESG”)  responsibility  in  the 
semiconductor  industry,  particularly  with  OEMs  that  manufacture  consumer  electronics.  A  number  of  our  customers  have 
adopted, or may adopt, procurement policies that include ESG provisions or requirements that their suppliers should comply 
with, or they may seek to include such provisions or requirements in their procurement terms and conditions. An increasing 
number  of  investors  are  also  requiring  companies  to  disclose  corporate  ESG  policies,  practices  and  metrics.  Legal  and 
regulatory requirements, as well as investor expectations, on corporate ESG practices and disclosure, are subject to change, can 
be unpredictable, and may be difficult and expensive for us to comply with, given the complexity of our supply chain and 
manufacturing. If we are unable to comply, or are unable to cause our suppliers or contract manufacturers to comply, with such 
policies or provisions or meet the requirements of our customers and our investors, a customer may stop purchasing products 

26 

 
 
 
from us or an investor may sell their shares, and may take legal action against us, which could harm our reputation, revenue 
and results of operations. 

Risks Related to Growth and Acquisitions 

We may choose to acquire new and complementary businesses, products or technologies instead of developing them 
ourselves, and we may be unable to complete these acquisitions or may not be able to successfully integrate an acquired 
business in a cost-effective and non-disruptive manner. 

Our success depends on our ability to continually enhance and broaden our product offerings in response to changing 
technologies, customer demands and competitive pressures. To this end, we have, from time to time, engaged in the process of 
identifying,  analyzing  and  negotiating  possible  acquisition  transactions,  and,  from  time  to  time,  acquiring  one  or  more 
businesses, and we expect to continue to do so in the future. We may choose to acquire new and complementary businesses, 
products,  technologies  and/or  services  instead  of  developing  them  ourselves.  We  may,  however,  face  competition  for 
acquisition targets from larger and more established companies with greater financial resources, making it more difficult for us 
to complete acquisitions. We cannot provide any assurance that we will be successful in consummating future acquisitions on 
favorable  terms or  that  we  will  realize  the benefits  that  we  anticipate  from  one  or  more  acquisitions  that  we  consummate. 
Integrating any business, product, technology or service into our current operations could be expensive and time-consuming 
and/or disrupt our ongoing business. Further, there are numerous risks associated with acquisitions and potential acquisitions, 
including, but not limited to: 

• 

• 

• 

• 

• 

• 

• 

• 

diversion of management’s attention from day-to-day operational matters and current products and customers; 

lack of synergy or the inability to successfully integrate the new business or to realize expected synergies; 

integration of acquired businesses and their operations, including enterprise resource planning systems, may be 
costly and time-consuming and divert resources away from other projects; 

failure to commercialize the new technology or business; 

failure to meet the expected performance of the new technology or business; 

failure to retain key employees and customer or supplier relationships; 

lower-than-expected market opportunities or market acceptance of any new products; and 

unexpected reduction of sales of existing products as a result of the introduction of new products. 

Our inability to consummate one or more acquisitions on favorable terms, or our failure to realize the intended benefits 
from one or more acquisitions, could have a material adverse effect on our business, liquidity, financial position and/or results 
of  operations,  including  as  a  result  of  our  incurrence  of  indebtedness  and  related  interest  expense  and  our  assumption  of 
unforeseen contingent liabilities. We might need to raise additional funds through public or private equity or debt financings 
to finance any acquisition. In that event, we could be forced to obtain financing on terms that are not favorable to us and, in the 
case of equity financing, that result in dilution to our stockholders. In addition, any impairment of goodwill or other intangible 
assets, amortization of intangible assets, write-down of other assets or charges resulting from the costs of acquisitions and 
purchase accounting could harm our business and operating results. 

If we cannot effectively manage growth, our business may suffer. 

Over the long-term, we intend to grow our business by increasing our sales efforts and completing strategic acquisitions. 

To effectively manage growth, we must, among other things: 

• 

• 

• 

• 

• 

engage, train and manage a larger sales force and additional service personnel; 

expand the geographic coverage of our sales force; 

expand our information systems; 

identify and successfully integrate acquired businesses into our operations; and 

administer appropriate financial and administrative control procedures. 

27 

 
 
 
Growth of our business will likely place a significant strain on our management, financial, operational, technical, sales 
and administrative resources. Any failure to effectively manage our growth may cause our business to suffer and our stock 
price to decline. 

Risks Related to the Global Economy and the Semiconductor Industry 

Cyclicality in the semiconductor device industry has led to substantial decreases in demand for our systems in the past 
and may, from time to time, continue to do so. 

Our operating results are subject to significant variation due to global economic conditions and the cyclical nature of the 
semiconductor device industry. Our business depends upon the capital expenditures of semiconductor device manufacturers, 
which, in turn, depend upon the current and anticipated market demand for semiconductors and products using semiconductors. 
The timing, length and severity of the up-and-down cycles in the semiconductor equipment industry are difficult to predict. In 
recent  history,  the  industry  has  experienced  significant  downturns,  generally  in  connection  with  declines  in  economic 
conditions.  This cyclical nature of the industry in which we operate affects our ability to accurately predict future revenue and, 
thus, future expense levels. When cyclical fluctuations result in lower-than-expected revenue levels, operating results may be 
adversely affected, and cost reduction measures may be necessary in order for us to remain competitive and financially sound. 
During a down cycle, we must be in a position to adjust our cost and expense structure to prevailing market conditions and to 
continue to motivate and retain our key employees. In addition, during periods of rapid growth, we must be able to increase 
manufacturing capacity and personnel to meet customer demand. We can provide no assurance that these objectives can be met 
in a timely manner in response to industry cycles, and we cannot predict when and to what extent sales may normalize, or when 
and to what extent gross margins may improve, following any such occurrence. If we fail to respond to industry cycles, our 
business could be seriously harmed.  

We may also experience supplier or customer issues as a result of adverse macroeconomic conditions. If our customers 
have difficulties in obtaining capital or financing, this could result in lower sales. Customers with liquidity issues could also 
result in an increase in bad debt expense. These conditions could also affect our key suppliers, which could affect their ability 
to supply parts and result in delays of our customer shipments. 

Our future rate of growth is highly dependent on the development and growth of the market for microelectronic device 
inspection, lithography and metrology equipment. 

We target our products to address the needs of microelectronic device manufacturers for defect inspection, metrology 
and lithography.  If for any reason the market for microelectronic device inspection, lithography or metrology equipment fails 
to grow in the long term, we may be unable to maintain current revenue levels in the short term and maintain our historical 
growth in the long term. Growth in the inspection market is dependent to a large extent upon microelectronic manufacturers 
replacing manual inspection with automated inspection technology. Growth in the metrology market is dependent to a large 
extent upon new chip designs and capacity expansion of microelectronic manufacturers. Growth in the lithography market is 
dependent on the development of cost-effective packaging with high fine pitch RDLs, ultimately migrating to multi-die, large, 
form-factor packages. There can be no assurance that manufacturers will undertake these actions at the rate we expect. 

28 

 
 
 
 
 
General Risk Factors 

Provisions of our charter documents and of Delaware law could discourage potential acquisition proposals and/or delay, 
deter or prevent a change in control of our company. 

Provisions of our certificate of incorporation and by-laws may inhibit changes in control of our company not approved 
by our Board of Directors. These provisions also limit the circumstances in which a premium can be paid for our common stock 
and in which a proxy contest for control of our board may be initiated. These provisions provide for: 

• 

• 

• 

• 

• 

a prohibition on stockholder actions through written consent; 

a requirement that special meetings of stockholders be called only by the chairperson of our Board of Directors or 
majority of our directors; 

advance notice requirements for stockholder proposals and director nominations by stockholders; 

the authority of our Board of Directors to issue, without stockholder approval, preferred stock with such terms as 
the Board may determine; and 

the authority of our board, without stockholder approval, to adopt a stockholder rights plan. 

We are also entitled to avail ourselves of the protections of Section 203 of the Delaware General Corporation Law, which 

could inhibit changes in control of the Company. 

Our stock price is volatile. 

The market price of our common stock has fluctuated widely. Consequently, the current market price of our common 
stock may not be indicative of future market prices, and we may be unable to sustain or increase the value of an investment in 
our common stock. Factors affecting our stock price may include: 

• 

• 

• 

• 

• 

• 

• 

• 

• 

variations in operating results from quarter to quarter; 

changes in earnings estimates by analysts or our failure to meet analysts’ expectations; 

changes in the market price per share of our public company customers; 

market conditions in the semiconductor and other industries into which we sell products; 

general economic conditions; 

political changes, hostilities or natural disasters such as hurricanes and floods; 

the impact of the COVID-19 pandemic, or other future infectious disease pandemics, on the global economy and 
on our customers, suppliers, employees, and business; 

low trading volume of our common stock; and 

the number of firms making a market in our common stock. 

In addition, the stock market has experienced periods of significant price and volume fluctuations. These fluctuations 
have  particularly  affected  the  market  prices  of  the  securities  of  high  technology  companies  like  ours.  Any  such  market 
fluctuations in the future could adversely affect the market price of our common stock. 

 Item 1B. Unresolved Staff Comments. 

None. 

29 

 
 
 
 
 
 
Item 2. Properties. 

Our  principal  executive  office  building  is  located  at  16  Jonspin  Road  in  Wilmington,  Massachusetts.    We  own  our 
Milpitas  and  Richardson  facilities  and  lease  facilities  for  corporate,  engineering,  manufacturing,  sales  and  service-related 
purposes in the United States and nine other countries - China, Japan, South Korea, Singapore, Taiwan, Malaysia, Vietnam, 
Germany and France. The following table indicates the location, the general purpose and the square footage of our material 
facilities. Our leases expire at various times through July 1, 2029. 

  Facility Purpose 

Location 
Wilmington, Massachusetts .............    Corporate Headquarters, Engineering, Manufacturing and Service     
Milpitas, California ..........................    Engineering, Manufacturing, Service and Administration ..............     
Budd Lake, New Jersey ...................    Engineering, Service and Administration ........................................     
Bloomington, Minnesota .................    Engineering, Manufacturing, Service and Administration ..............     
Bend, Oregon ...................................    Engineering and Service ..................................................................     
Hillsboro, Oregon ............................    Engineering and Service ..................................................................     
Richardson, Texas ............................    Engineering .....................................................................................     
Snoqualmie, Washington .................    Engineering and Service ..................................................................     
Tucson, Arizona ...............................    Engineering, Manufacturing and Service ........................................     
Taiwan .............................................    Sales and Service .............................................................................     
China ................................................    Sales, Service and Engineering .......................................................     
South Korea .....................................    Sales and Service .............................................................................     
Japan ................................................    Sales and Service .............................................................................     
Singapore .........................................    Sales and Service .............................................................................     

Approximate 
Square 
Footage 

77,500  
134,000  
49,000  
98,600  
12,700  
10,000  
21,000  
20,300  
18,900  
37,700  
34,300  
21,900  
9,000  
9,800  

 We also lease office space for other smaller sales and service offices in several locations throughout the world. 

We  believe  that  our  existing facilities  and  capital  equipment  are  adequate  to  meet  our  current  requirements  and  that 

suitable additional or substitute space is available on commercially reasonable terms if needed. 

Item 3. Legal Proceedings. 

The  information  set  forth  under  the  heading  “Legal  Matters”  in  Note  8,  “Commitments  and  Contingencies”  to  the 

Consolidated Financial Statements is incorporated herein by reference. 

 Item 4. Mine Safety Disclosures. 

None. 

30 

 
 
 
 
 
PART II 

PART II 

Item  5.  Market  for  Registrant’s  Common  Equity,  Related  Stockholder  Matters  and  Issuer  Purchases  of  Equity 
Securities. 

Item  5.  Market  for  Registrant’s  Common  Equity,  Related  Stockholder  Matters  and  Issuer  Purchases  of  Equity 
Securities. 

Our common stock, $0.01 par value per share, is quoted on the New York Stock Exchange (“NYSE”) under the symbol 
“ONTO.”    As  of  February  6,  2023,  there  were  approximately  113  stockholders  of  record.    Prior  to  the  2019  Merger, 
Nanometrics’  common  stock  was  quoted  on  the  Nasdaq  Global  Select  Market  under  the  symbol  “NANO”  and  Rudolph’s 
common stock was quoted on the NYSE under the symbol “RTEC.” Set forth below is a line graph comparing the annual 
percentage change in the cumulative return to the stockholders of the Company’s common stock with the cumulative return of 
the  NYSE  Composite  Index  and  the  industry  specific  index,  PHLX  Semiconductor  Index,  for  the  period  commencing  on 
December 31, 2017 and ending on December 31, 2021.  Historical data for Onto Innovation in the line graph for the period 
commencing  on  December 31,  2017  and  ending  on  October  25, 2019  reflects  the  cumulative  return  to  the  stockholders  of 
Nanometrics.  

Our common stock, $0.01 par value per share, is quoted on the New York Stock Exchange (“NYSE”) under the symbol 
“ONTO.”    As  of  February  6,  2023,  there  were  approximately  113  stockholders  of  record.    Prior  to  the  2019  Merger, 
Nanometrics’  common  stock  was  quoted  on  the  Nasdaq  Global  Select  Market  under  the  symbol  “NANO”  and  Rudolph’s 
common stock was quoted on the NYSE under the symbol “RTEC.” Set forth below is a line graph comparing the annual 
percentage change in the cumulative return to the stockholders of the Company’s common stock with the cumulative return of 
the  NYSE  Composite  Index  and  the  industry  specific  index,  PHLX  Semiconductor  Index,  for  the  period  commencing  on 
December 31, 2017 and ending on December 31, 2021.  Historical data for Onto Innovation in the line graph for the period 
commencing  on  December 31,  2017  and  ending  on  October  25, 2019  reflects  the  cumulative  return  to  the  stockholders  of 
Nanometrics.  

The information contained in the performance graph shall not be deemed to be “soliciting material” or to be “filed” with 
the SEC, nor shall such information be incorporated by reference into any future filing under the Securities Act or the Exchange 
Act, except to the extent that the Company specifically incorporates it by reference into such filing. 

The information contained in the performance graph shall not be deemed to be “soliciting material” or to be “filed” with 
the SEC, nor shall such information be incorporated by reference into any future filing under the Securities Act or the Exchange 
Act, except to the extent that the Company specifically incorporates it by reference into such filing. 

The graph assumes that $100 was invested on December 31, 2017 in the Company’s common stock and in each index.  

The graph assumes that $100 was invested on December 31, 2017 in the Company’s common stock and in each index.  

Stockholder returns over the indicated period should not be considered indicative of future stockholder returns. 

Stockholder returns over the indicated period should not be considered indicative of future stockholder returns. 

Prepared by Zacks Investment Research, Inc. Used with permission.  All rights reserved.  Copyright 1980-2023. 

Prepared by Zacks Investment Research, Inc. Used with permission.  All rights reserved.  Copyright 1980-2023. 

12/17 

12/18 

12/19 

12/20 

12/21 

12/22 

12/17 
Onto Innovation Inc. .............................................     
NYSE Composite..................................................     
PHLX Semiconductor ...........................................     

Onto Innovation Inc. .............................................     
NYSE Composite..................................................     
PHLX Semiconductor ...........................................     

109.7      
91.1      
94.0      
We have never declared or paid a cash dividend on our common stock and we currently do not intend to do so. The 
declaration  of  any  future  dividends  by  us  is  within  the  discretion  of  our  Board  of  Directors  and  will  be  dependent  on  our 
earnings, financial condition and capital requirements as well as any other factors deemed relevant by our Board of Directors. 

We have never declared or paid a cash dividend on our common stock and we currently do not intend to do so. The 
declaration  of  any  future  dividends  by  us  is  within  the  discretion  of  our  Board  of  Directors  and  will  be  dependent  on  our 
earnings, financial condition and capital requirements as well as any other factors deemed relevant by our Board of Directors. 

12/20 
146.6      
114.3      
153.4      

12/19 
109.7      
91.1      
94.0      

12/18 
100.0      
100.0      
100.0      

190.7      
122.3      
235.7      

146.6      
114.3      
153.4      

100.0      
100.0      
100.0      

406.0      
147.5      
336.7      

190.7      
122.3      
235.7      

406.0      
147.5      
336.7      

273.1  
133.8  
219.3  

273.1  
133.8  
219.3  

12/22 

12/21 

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows us 
to repurchase up to $100 million worth of shares of our common stock.  Repurchases may be made through both public market 
and private transactions from time to time.  During the twelve months ended December 31, 2022, we repurchased 1.0 million, 

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows us 
to repurchase up to $100 million worth of shares of our common stock.  Repurchases may be made through both public market 
and private transactions from time to time.  During the twelve months ended December 31, 2022, we repurchased 1.0 million, 

31 

31 

 
 
 
 
 
 
 
  
  
  
  
  
 
 
 
 
 
 
 
 
  
  
  
  
  
 
shares of common stock under the repurchase authorization and those shares were subsequently retired.  At December 31, 2022, 
there was $34.8 million available for future share repurchases under the share repurchase authorization. 

For further information, see Note 16 in the accompanying Notes to the Consolidated Financial Statements included in 

this Form 10-K. 

In addition to our share repurchase program, we withhold common stock shares associated with net share settlements to 
cover  tax  withholding  obligations  upon  the  vesting  of  restricted  stock  unit  awards  and  stock  option  exercises  under  the 
Company’s equity incentive program. During the three and twelve months ended December 31, 2022, we withheld 4 thousand 
and 107 thousand shares through net share settlements, respectively.  For the three and twelve month periods ended December 
31, 2022, net share settlements cost $0.3 million and $8.9 million, respectively. Please refer to Note 10 of the Notes to the 
Consolidated Financial Statements included in this Form 10-K for further discussion regarding our equity incentive plan. 

The following table provides details of common stock purchased during the three month period ended December 31, 

2022 (in thousands, except per share data): 

Total Number 
of Shares 
Purchased (1) 

Average 
Price 
Paid per 
Share 

Total Number 
of Shares 
Purchased as 
Part of Publicly 
Announced 
Program 

Maximum 
Approximate Dollar 
Value of 
Shares that 
May Yet Be 
Purchased Under 
the Program 

667     $ 
109     $ 
79     $ 
855     $ 

62.15      
66.71      
66.81      
63.16      

665     $ 
105     $ 
76     $ 

846      

47,137  
39,961  
34,773  

Period 

October 2, 2022 - October 31, 2022 
November 1, 2022 - November 30, 2022    
December 1, 2022 - December 31, 2022     
Three Months Ended December 31, 2022    

1  Includes shares withheld through net 
share settlements. 

Item 6. [Reserved] 

32 

 
 
 
 
   
   
   
 
   
 
 
   
     
     
     
 
   
     
     
     
 
 
Item 7. Management’s Discussion and Analysis of Financial Condition and Results of Operations. 

Executive Summary 

We are a worldwide leader in the design, development, manufacture and support of process control tools that perform 
macro-defect inspection and metrology, lithography systems, and process control analytical software used by semiconductor 
and advanced packaging device manufacturers. We deliver comprehensive solutions throughout the semiconductor fabrication 
process with our families of proprietary products that provide critical yield-enhancing information, enabling microelectronic 
device manufacturers to drive down costs and time to market of their devices. We provide process and yield management 
solutions used in both wafer processing facilities, often referred to as “front-end” manufacturing, and in device packaging and 
test facilities, commonly referred to as “back-end” manufacturing. Our advanced process control software portfolio includes 
powerful solutions for standalone tools, groups of tools, or factory-wide suites to enhance productivity and achieve significant 
cost savings.  

Our principal market is semiconductor capital equipment.  Semiconductors packaged as integrated circuits, or “chips”, 
are used in consumer electronics, server and enterprise systems, mobile computing (including smart phones and tablets), data 
storage devices, and embedded automotive and control systems.  Our core focus is the measurement and control of the structure, 
composition, and geometry of semiconductor devices as they are fabricated on silicon wafers to improve device performance 
and manufacturing yields.  

Our products and services are used by our customers who manufacture many types of integrated circuits for a multitude 
of  applications,  each  having  unique  manufacturing  challenges.  This  includes  integrated  circuits  to  enable  information 
processing  and  management  (logic  integrated  circuits),  memory  storage  (NAND,  3D-NAND,  NOR,  and  DRAM),  analog 
devices (e.g., Wi-Fi and 5G radio integrated circuits, power devices), MEMS sensor devices (accelerometers, pressure sensors, 
microphones), image sensors, and other end markets including components for hard disk drives, LEDs, and power management. 

The semiconductor and electronics industries have also been characterized by constant technological innovation. We 
believe that, over the long term, our customers will continue to invest in advanced technologies and new materials to enable 
smaller design rules and higher density applications that fuel demand for process control equipment. 

The following table summarizes certain key financial information for the periods indicated below (in thousands, except 

per share and percent data): 

Year Ended 

December 31, 
2022 

January 1, 
2022 

 Revenue ....................................................................................  $ 
 Gross profit ...............................................................................  $ 
 Gross profit as a percent of revenue .........................................   
 Total operating expenses ..........................................................  $ 
 Net income ................................................................................  $ 
 Diluted earnings per share ........................................................  $ 

1,005,183  
539,221  

  $ 
  $ 

54 %  

302,507  
223,334  
4.49  

  $ 
  $ 
  $ 

788,899  
429,086  

54 % 

272,679  
142,349  
2.86  

• 

In  fiscal  2022,  revenue  increased  27%  compared  to  fiscal  2021,  primarily  due  to  an  increase  in  sales  to  memory 
customers  in  advanced  nodes  applications  and  OSAT  customers  in  specialty  device  and  advanced  packaging 
applications, partially offset by an increase in sales to foundry customers for advanced node applications. 

•  Gross margin as a percentage of revenue was relatively flat at 54% for both fiscal 2022 and 2021 years.  This was 
primarily driven by increased revenue volume, offset by unfavorable product mix and increased manufacturing costs 
due to inflationary pressures. 

•  The increase in operating expenses in fiscal 2022 compared to fiscal 2021 was primarily due to increases in research 
and development, and sales and marketing expenses related to increased headcount, travel expenses and the write-off 
of purchased in process research and development assets. 

Our  cash,  cash  equivalents  and  marketable  securities  balance  increased  to  $547.8  million  at  the  end  of  fiscal  2022 
compared to $511.3 million at the end of fiscal 2021. This increase was primarily the result of $136.7 million of cash generated 
from operating activities.  This source of cash was partially offset of $65.3 million of cash used for the purchase of our common 
stock, $18.4 million used for capital expenditures and $4.6 million used for the purchase of acquired research and development 
assets. 

33 

 
 
 
 
 
 
   
 
 
   
 
 
The  demand  environment,  particularly  in  memory  and  advanced  nodes,  has  weakened,  and  as  a  result,  we  expect  a 
reduction in wafer fabrication equipment spending in fiscal year 2023.  We expect the regulatory conditions, and the slowing 
economic  environment,  to  negatively  impact  our  financial  results  in  fiscal  year  2023.    We  believe  that  the  semiconductor 
industry macroeconomics have not changed and anticipate that the industry’s long-term growth projections will normalize, but 
in  the  short-term,  the  industry  is  seeing  volatility  and  disruption  due  to  inflationary  pressures,  geopolitical  unrest  and  the 
lingering effects of the pandemic. 

Key Events 

Expanded U.S. Export Controls 

In October 2022, BIS issued the October 2022 Export Controls related to the Chinese semiconductor manufacturing, 
advanced  computing,  and  supercomputer  industries.  The  October  2022  Export  Controls  include  restrictions  on  certain 
semiconductor  integrated  circuits,  commodities  containing  such  integrated  circuits,  and  semiconductor  manufacturing 
equipment and restrict the ability of U.S. persons to support the development or production of integrated circuits at certain 
semiconductor fabrication facilities in China.  The primary impact of the October 2022 Export Controls on Onto Innovation is 
that  we  are  now  required  to obtain  a  license  to  do  business  with  certain  Chinese  customers  that  produce  certain  advanced 
computing integrated circuits. The October 2022 Export Controls also expanded the scope of foreign-produced items subject 
to license requirements to entities on the Entity List that are located in China. In 2022, BIS also added a number of Chinese 
companies to the Unverified List and Entity List, including Yangtze Memory Technologies Co., Ltd.  

 We may experience a temporary loss of revenues while we apply for licenses needed to continue doing business with 
certain customers affected by the new export rules.  A failure to obtain required license could result in a reduction of anticipated 
revenues. We have assessed and will continue to assess the impact of the October 2022 Export Controls and the addition of 
new entities to the Unverified List and Entity List on our business, financial condition and results of operations.  We have 
estimated these new restrictions will negatively impact our revenue by approximately $80.0 million for fiscal year 2023. 

 Impact of COVID-19 and the Global Semiconductor Supply Shortage 

To date, the COVID-19 pandemic has disrupted the way that we conduct business but has not had a material adverse 
impact on our operations.  We have experienced some delays in customer deliveries.  Additionally, we are impacted by the 
global  shortage  in  electronic  components  and  inflationary  pressures.    Our  supply  chain  is  strained  in  some  cases  as  the 
availability of materials, logistics and freight options are challenging in many jurisdictions, which have resulted in long lead 
times, rising prices and supply chain disruptions. We expect supply chain shortages as well as inflationary cost pressures to 
persist into fiscal year 2023.  While demand for our products has remained strong, further disruptions to our supply chain in 
connection  with  the  sourcing  of  materials,  inflationary  pressures,  equipment  and  engineering  support,  and  services  from 
geographic areas that have been impacted by COVID-19 may pose risks to our business, results of operations and financial 
condition.  We are continuing to serve our customers while taking appropriate precautionary measures to provide a safe work 
environment for our employees and customers. 

For a discussion of certain risks related to the international nature of our business and our operations and the COVID-
19 pandemic and the resulting economic impact and supply chain issues, see Part I, Item 1A – Risk Factors of this 2022 Form 
10-K. 

34 

 
 
 
 
 
Results of Operations 

The following table sets forth, for the periods indicated, our results of operations as percentages of our revenue. Our 

results of operations are reported as one business segment. 

Revenue ....................................................................................    
Cost of revenue .........................................................................    
Gross profit ...........................................................................    
Operating expenses: ..................................................................    
Research and development ...................................................    
Sales and marketing ..............................................................    
General and administrative ...................................................    
Amortization .........................................................................    
Total operating expenses ..................................................    
Operating income ......................................................................    
Interest income, net ...................................................................    
Other expense, net ....................................................................    
Income before provision (benefit) for income taxes .............    
Provision (benefit) for income taxes .........................................    
Net income ................................................................................    

 Results of Operations for 2022, 2021 and 2020  

December 31,  
2022 

Year Ended 

January 1,  
2022 

December 26,  
2020 

100.0 %   
46.4 %   
53.6 %   

11.2 %   
6.5 %   
6.9 %   
5.5 %   
30.1 %   
23.5 %   
0.5 %   
— %   
24.0 %   
1.8 %   
22.2 %   

100.0 %    
45.6 %    
54.4 %    

12.2 %    
7.3 %    
8.6 %    
6.5 %    
34.6 %    
19.8 %    
0.1 %    
(0.2 )%    
19.7 %    
1.7 %    
18.0 %    

100.0 % 
50.0 % 
50.0 % 

15.2 % 
8.6 % 
11.7 % 
9.7 % 
45.2 % 
4.8 % 
0.5 % 
(0.5 )% 
4.8 % 
(0.7 )% 
5.5 % 

Revenue. Our revenue is derived from the sale of our systems and software, spare parts, and services. Our revenue was 
$1,005.2 million, $788.9 million and $556.5 million for the years ended December 31, 2022, January 1, 2022 and December 
26, 2020, respectively.  This represents an increase of 27.4% from 2021 to 2022 and an increase of 41.8% from 2020 to 2021. 

The following table lists, for the periods indicated, the different sources of our revenue in dollars (thousands) and as 

percentages of our total revenue:  

December 31,  
2022 
Systems and software ......................................     $  865,707      
84,266      
Parts .................................................................      
55,210      
Services ............................................................      
Total revenue ...........................................     $ 1,005,183      

Year Ended 
January 1,  
2022 
86 %   $ 669,114      
72,753      
8 %    
47,032      
6 %    
100 %   $ 788,899      

December 26,  
2020 
85 %   $ 450,459      
65,444      
9 %    
40,593      
6 %    
100 %   $ 556,496      

80 % 
12 % 
8 % 
100 % 

Total systems and software revenue increased $196.6 million for the year ended December 31, 2022, as compared to the 
year ended January 1, 2022, primarily due to an increase in overall demand for our products from semiconductor industry 
customers, particularly in advanced nodes applications, and specialty devices and advanced packaging.  The year-over-year 
change in systems revenue was primarily due to an increase in units shipped in our metrology and inspection product lines.  
Parts and services revenue is generated from part sales, maintenance service contracts, and system upgrades, as well as time 
and material billable service calls. During fiscal 2022, the increase in parts and services revenue was primarily due to increased 
spending by our customers on system upgrades and repairs of existing systems.   

Total systems and software revenue increased $218.7 million for the year ended January 1, 2022, as compared to the year 
ended  December  26,  2020,  primarily  due  to  an  increase  in  overall  demand  for  our  products  from  semiconductor  industry 
customers, particularly in specialty devices and advanced packaging and advanced nodes applications, and the inclusion of 
$22.3 million of revenue from the Inspectrology acquisition.  The year-over-year change in systems revenue was primarily due 
to an increase in units shipped in our metrology and inspection product lines.  Parts and services revenue is generated from part 
sales, maintenance service contracts, and system upgrades, as well as time and material billable service calls. During fiscal 
2021, the increase in parts and services revenue was primarily due to increased spending by our customers on system upgrades 
and repairs of existing systems.   

35 

 
 
 
 
 
 
 
 
   
   
 
 
  
 
   
 
 
 
 
 
 
 
 
 
 
 
 
 
The following table sets forth, for the periods indicated, our revenue by geographic region as percentages of our revenue. 

Revenue .....................................................................................    $ 
China ......................................................................................     
South Korea ...........................................................................     
Taiwan ...................................................................................     
United States ..........................................................................     
Europe ....................................................................................     
Japan ......................................................................................     
Southeast Asia .......................................................................     
Total revenue .....................................................................     

December 31,  
2022 
1,005,183  

Year Ended 
January 1,  
2022 

December 26,  
2020 

  $ 

788,899  

  $ 

556,496  

25 %    
22 %    
20 %    
12 %    
8 %    
6 %    
7 %    
100 %    

19 %    
20 %    
25 %    
16 %    
8 %    
8 %    
4 %    
100 %    

22 % 
16 % 
22 % 
15 % 
9 % 
11 % 
5 % 
100 % 

The overall Asia region continues to account for a majority of our revenues as a substantial amount of the worldwide 

capacity investments for semiconductor manufacturing continue to occur in this region and we expect that trend to continue. 

Gross  Profit.  Our  gross  profit  has  been  and  will  likely  continue  to  be  affected  by  a  variety  of  factors,  including 
manufacturing  efficiencies,  provision  for  excess  and  obsolete  inventory,  pricing  by  competitors  or  suppliers,  new  product 
introductions, production volume, inventory step-up from purchase accounting, customization and reconfiguration of systems, 
international and domestic sales mix, system and software product mix, and parts and services margins. Our gross profit was 
$539.2 million, $429.1 million and $278.5 million for the years ended December 31, 2022, January 1, 2022, and December 26, 
2020, respectively.  Our gross profit represented 53.6%, 54.4% and 50.0% for the years ended December 31, 2022, January 1, 
2022, and December 26, 2020, respectively.  The decrease in gross profit as a percentage of revenue from 2021 to 2022 was 
primarily due to continued supply chain cost increases in the 2022 fiscal period, partially offset by higher factory utilization 
associated with increased sales volume during the 2022 fiscal period.  The increase in gross profit as a percentage of revenue 
from 2020 to 2021 was primarily due to higher factory utilization associated with stronger sales levels in the 2021 fiscal period, 
inventory  reserve  charges  for  a  discontinued product  line and  the  sale  of  inventory  written-up  to  fair  value  upon  the 2019 
Merger in the 2020 fiscal period.  This increase in gross profit was partially offset by supply chain cost increases in the 2021 
fiscal period.   

Operating Expenses. 

Our operating expenses consist of: 

•  Research and Development. We believe that it is critical to continue to make substantial investments in research 
and  development  to  ensure  the  availability  of  innovative  technology  that  meets  the  current  and  projected 
requirements  of  our  customers’  most  advanced  designs.  We  have  maintained,  and  intend  to  continue,  our 
commitment to investing in research and development in order to continue to offer new products and technologies.  
Accordingly, we devote a significant portion of our technical, management and financial resources to research and 
development programs. Research and development expenditures consist primarily of salaries and related expenses 
of employees engaged in research, design and development activities. They also include consulting fees, the cost 
of related supplies and legal costs to defend our intellectual property. Our research and development expenses were 
$112.0 million, $96.1 million and $84.6 million in fiscal years 2022, 2021 and 2020, respectively.  The year-over-
year dollar increase from 2021 through 2022 was primarily due to increased costs related to new product initiatives, 
increased headcount and the write-off of purchased in process research and development assets.  The year-over-
year dollar increase from 2020 through 2021 was primarily due to increased costs related to new product initiatives 
and increased variable compensation plan costs.  We continue to maintain our commitment to investing in new 
product development and enhancement to existing products. 

•  Sales and Marketing. Sales and marketing expenses are primarily comprised of salaries and related costs for sales 
and  marketing  personnel,  as  well  as  commissions  and  other  non-personnel  related  expenses.    Our  sales  and 
marketing  expenses  were  $65.7  million,  $57.2  million  and  $48.1  million  in  fiscal  years  2022,  2021  and  2020, 
respectively.  The year-over-year dollar increase from 2021 through 2022 was primarily due to increased headcount, 
including variable compensation plan costs and higher travel related expenses.  The year-over-year dollar increase 
from 2020  through  2021  was  primarily  due  to  increased  personnel  costs,  including variable  compensation  plan 
costs.   

36 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
   
 
   
 
   
 
 
 
•  General and Administrative. General and administrative expenses are primarily comprised of salaries and related 
costs  for  general  administrative  personnel,  as  well  as  other  non-personnel  related  expenses.  Our  general  and 
administrative expenses were $69.6 million, $68.0 million and $65.3 million in fiscal years 2022, 2021 and 2020, 
respectively.  The year-over-year dollar increase from 2021 through 2022 was primarily due to increased headcount, 
including  variable  compensation  plan  costs.    The  year-over-year  dollar  increase  from  2020  through  2021  was 
primarily due to increased personnel costs, including variable compensation plan costs.   

•  Amortization of Identifiable Intangible Assets.  Amortization of identifiable intangible assets, primarily purchased 
technology, was $55.3 million, $51.4 million and $53.7 million in fiscal years 2022, 2021 and 2020, respectively.  
The year-over-year dollar increase from 2021 through 2022 was primarily due to a full year of amortization being 
included in the 2022 fiscal period for IPR&D that became classified as identifiable intangible assets in second half 
of 2021.  The year-over-year dollar decrease from 2020 through 2021 was primarily due to certain intangible assets 
becoming fully amortized, partially offset by amortization for newly acquired intangible assets in 2021.    

Interest income, net.  In fiscal years 2022, 2021 and 2020, net interest income was $5.0 million, $1.2 million and $2.9 
million, respectively.  The increase in net interest income from 2021 to 2022 was due to higher average balances and higher 
interest rates during the 2022 period.  The decrease in net interest income from 2020 to 2021 was due to lower interest rates 
during the 2021 period.   

Income taxes. The following table provides details of income tax (dollars in millions):  

December 31,  
2022 

Year Ended 
January 1,  
2022 

December 26,  
2020 

Income before provision (benefit) for income taxes ....................  
Provision (benefit) for income taxes ............................................  
Effective tax rate ..........................................................................  

 $ 
 $ 

241.6  
18.3  

 $ 
 $ 

7.6 %    

155.7  
13.3  

 $ 
 $ 

8.6 %    

26.9  
(4.2 ) 
(15.5 )% 

The income tax provision differs from the federal statutory income tax rate of 21% for 2022 primarily due to a benefit 
related  to  the  Foreign  Derived  Intangible  Income  Deduction  (“FDII”)  of  $25.4  million,  excess  benefits  related  to  stock 
compensation of $3.5 million, tax benefits for research and development credits of $7.1 million, and a one-time benefit of $1.5 
million  related  to  the recognition  of  a  tax  benefit  associated  with  the  lapse  of  a  statute of  limitations. These  benefits  were 
partially offset by the inclusion of U.S. tax on foreign source income of $1.4 million and non-deductible officer’s compensation 
of $1.9 million. 

The income tax provision differs from the federal statutory income tax rate of 21% for 2021 primarily due to a benefit 
related  to  the  Foreign  Derived  Intangible  Income  Deduction  (“FDII”)  of  $11.1  million,  excess  benefits  related  to  stock 
compensation of $3.8 million, tax benefits for research and development credits of $3.6 million, tax benefit from foreign income 
being taxed at lower rates of $3.8 million, and a one-time benefit of $2.0 million from a reduction to recorded tax reserve 
related to a lapse of statute of limitations. These benefits were partially offset by the inclusion of U.S. tax on foreign source 
income of $1.7 million. 

The income tax provision differs from the federal statutory income tax rate of 21% for 2020 primarily due to a benefit 
related to the FDII of $4.3 million, tax benefits for research and development credits of $4.9 million, and a one-time benefit 
related to the closure of an IRS audit for tax years 2016 through 2018 of $2.9 million.  These benefits were partially offset by 
the inclusion of Global Intangible Low-Taxed Income (“GILTI”) of $2.0 million. 

Our future effective income tax rate depends on various factors, such as future impacts of the Tax Act, possible further 
tax legislation, the geographic composition of our pre-tax income, the amount of our pre-tax income as business activities 
fluctuate,  non-deductible  expenses  incurred  in  connection  with  acquisitions  and  research  and  development  credits  as  a 
percentage of aggregate pre-tax income. 

On March 27, 2020, the “Coronavirus Aid, Relief and Economic Security Act” (the “CARES Act”) was enacted. The 
CARES Act includes provisions relating to refundable payroll tax credits, deferral of the employer portion of certain payroll 
taxes, net operating loss carryback periods, alternative minimum tax credit refunds, modifications to the net interest deduction 
limitations and technical corrections to tax depreciation methods for qualified improvement property.  The Company filed a 
claim for a refund of prior years’ income taxes paid under the provisions of the CARES Act which resulted in a tax benefit of 
$1.9 million as the 2019 net operating loss was carried back to a year with higher tax rates. 

Unanticipated changes in our tax provisions or exposure to additional tax liabilities could affect our profitability and cash 
flow.  We are subject to income and other taxes in the United States and foreign jurisdictions. Changes in applicable U.S. 
(federal, state and local) or foreign tax laws and regulations, or their interpretation and application, including the possibility of 
retroactive effect, have affected and could continue to affect our tax expense and profitability as, for example, they did in 2017 

37 

 
 
 
 
 
 
 
 
   
   
 
   
upon passage of the Tax Cuts and Jobs Act. In addition, the final determination of any state or federal tax audits or related 
litigation, in particular with regard to the sustainment of our positions on research credits and timing of revenue recognition 
under IRC Section 451(b), could be materially different from our historical income tax provisions and accruals. 

Beginning in 2022, the TCJA eliminates the existing option to deduct research and development expenditures and requires 
taxpayers to amortize them over five years for U.S. incurred expenditures and fifteen years for non-U.S. expenditures pursuant 
to IRC Section 174. Although Congress has considered legislation that would defer the amortization requirement to later years, 
we have no assurance that the provision will be repealed or otherwise modified. If the requirement is not modified, it will 
continue to reduce our cash flows for 2023.  Changes in our tax provisions or an increase in our tax liabilities, whether due to 
changes in applicable laws and regulations, the interpretation or application thereof, or a final determination of tax audits or 
litigation or agreements, could have a material adverse effect on our financial position, results of operations and/or cash flows. 

Liquidity and Capital Resources 

At December 31, 2022, we had $547.8 million of cash, cash equivalents and marketable securities and $974.3 million in 
working capital.  At January 1, 2022, we had $511.3 million of cash, cash equivalents and marketable securities and $793.6 
million in working capital. 

Net cash and cash equivalents provided by operating activities for the years ended December 31, 2022, January 1, 2022 

and December 26, 2020 totaled $136.7 million, $175.3 million and $106.0 million, respectively.   

•  Cash provided by operating activities decreased in fiscal 2022 compared to fiscal 2021 primarily due to an increase 
in inventories of $36.7 million, an increase in accounts receivable of $37.3 million, an increase in income taxes of 
$6.3 million, and an increase in prepaid expenses and other assets of $4.2 million, partially offset by higher net 
income, adjusted to exclude the effect of non-cash charges, of $67.3 million, an increase in accounts payable of 
$11.0 million and an increase in accrued and other liabilities of $10.4 million. 

•  Cash provided by operating activities increased in fiscal 2021 compared to fiscal 2020 primarily due to higher net 
income,  adjusted  to  exclude  the  effect  of  non-cash  charges  of  $91.2  million,  an  increase  in  accrued  and  other 
liabilities  of  $3.8  million  and  an  increase  in  income  taxes  of  $2.5  million,  partially  offset  by  an  increase  in 
inventories of $14.7 million, an increase in prepaid expenses and other assets of $12.2 million and an increase in 
accounts receivable of $2.0 million. 

Net cash and cash equivalents used in investing activities for the years ended December 31, 2022, January 1, 2022 and 

December 26, 2020 was $55.7 million, $141.8 million and $48.6 million, respectively. 

•  During the year ended December 31, 2022, net cash used in investing activities included purchases of marketable 
securities, net of proceeds from sales of marketable securities of $32.6 million, purchase of business net of cash 
acquired of $4.6 million, and purchases of property, plant and equipment of $18.4 million. 

•  During  the  year  ended  January  1,  2022,  net  cash  used  in  investing  activities  included  purchases  of  marketable 
securities, net of proceeds from sales of marketable securities of $106.0 million, purchase of business net of cash 
acquired of $23.8 million, and purchases of property, plant and equipment of $12.0 million.   

•  During the year ended December 26, 2020, net cash used in investing activities included purchases of marketable 
securities, net of proceeds from sales of marketable securities of $47.6 million and purchases of property, plant and 
equipment of $3.8 million, partially offset by cash received from convertible note receivable of $2.8 million.       

Net cash used in financing activities was $68.4 million and $53.7 million for the year ended December 31, 2022 and 

December 26, 2020, respectively.  For the year ended January 1, 2022 financing activities provided $2.7 million.   

•  During the year ended December 31, 2022, financing activities primarily used cash for repurchases of common 
stock of $65.3 million, tax payments related to shares withheld to satisfy employee tax obligations in connection 
with the vesting of awards under share-based compensation plans of $8.9 million and payments related to contingent 
consideration for acquired business of $2.3 million, partially offset by proceeds from sale of shares through share-
based compensation plans of $8.1 million. 

•  During the year ended January 1, 2022, financing activities provided cash from shares issued through share-based 
compensation plans of $10.1 million, partially offset by cash used to pay taxes related to shares withheld to satisfy 
employee tax obligations in connection with the vesting of awards under share-based compensation plans of $7.4 
million. 

•  During  the  year  ended  December  26,  2020,  financing  activities  used  cash  primarily  to  purchase  shares  of  our 

38 

 
 
 
common stock under the share repurchase authorization of $52.0 million.  

From time to time, we evaluate whether to acquire new or complementary businesses, products or technologies. We may 
fund all of or a portion of the price of these investments or acquisitions in cash, stock, or a combination of cash and stock. In 
the first quarter of 2021, the Company acquired Inspectrology, LLC for $24.0 million in cash. 

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows us 
to repurchase up to $100 million worth of shares of our common stock.  Repurchases may be made through both public market 
and private transactions from time to time.  During the twelve months ended December 31, 2022, we repurchased 1.0 million 
shares of common stock under this repurchase authorization and those shares were subsequently retired.  At December 31, 
2022, there was $34.7 million available for future share under this share repurchase authorization. 

For further information regarding our share repurchases, see Note 16 in the accompanying Notes to the Consolidated 

Financial Statements included in this Form 10-K. 

We have a credit agreement with a bank that provides for a line of credit that is secured by the marketable securities we 
have with the bank.  We are permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit 
is accessed.  As of December 31, 2022, the available line of credit was approximately $108.4 million with an available interest 
rate of 6.0%.  The credit agreement is available to us until such time that either party terminates the arrangement at its discretion.   
To date, we have not utilized the line of credit. 

Our future capital requirements will depend on many factors, including the timing and amount of our revenue and our 
investment  decisions,  which  will  affect  our  ability  to  generate  additional  cash.    We  expect  that  our  existing  cash,  cash 
equivalents,  marketable  securities  and  availability  under  our  line  of  credit  will  be  sufficient  to  meet  our  anticipated  cash 
requirements for working capital, capital expenditures and other cash needs for the next 12 months following the filing of this 
Form 10-Q. Thereafter, if cash generated from operations and financing activities is insufficient to satisfy our working capital 
requirements, we may seek additional funding through bank borrowings, sales of securities or other means.  In addition, a 
reduction in or volatility with respect to our stock price or a general market downturn could materially impact our ability to sell 
securities  on  favorable  terms  or  at  all.  There  can  be  no  assurance  that  we  will  be  able  to  raise  any  such  capital  on  terms 
acceptable to us or at all. 

Contractual Obligations 

The  following  table  summarizes  our  significant  contractual  obligations  at  December  31,  2022,  and  the  effect  such 
obligations  are  expected  to  have  on  our  liquidity  and  cash  flows  in  future  periods.  We  are  currently  unable  to  provide  a 
reasonably reliable estimate of the amount or periods when cash settlement of this liability may occur (dollars in thousands). 

Less than 1 
year 

Payments due by period 
1-3
years 

3-5
years 

Total 

More than 
5 years 

Operating lease obligations .............................................  
Purchase obligations (1) ...................................................  
Total ............................................................................  

  $  25,232   $ 
    417,148  
348,984  
  $  442,380   $  355,860   $  79,111   $ 

6,876   $  10,946   $ 

68,165  

4,891   $ 
—  
4,891   $ 

2,519  
—  
2,519  

(1) Represents our agreements to purchase goods and services consisting of outstanding purchase orders for goods and

services.

Critical Accounting Policies and Estimates 

Management’s  discussion  and  analysis  of  our  financial  condition  and  results  of  operations  are  based  upon  our 
Consolidated  Financial  Statements  included  in  this  Form  10-K,  which  have  been  prepared  in  accordance  with  accounting 
principles generally accepted in the United States. We review the accounting policies we use in reporting our financial results 
on a regular basis. The preparation of these financial statements requires us to make estimates and judgments that affect the 
reported amounts of assets, liabilities, revenue and expenses and related disclosure of contingent assets and liabilities. On an 
ongoing  basis,  we  evaluate  our  estimates,  including  those  related  to  revenue  recognition,  accounts  receivable,  inventories, 
business acquisitions, intangible assets, share-based payments, income taxes and warranty obligations. We base our estimates 
on historical experience and on various other assumptions that are believed to be reasonable under the circumstances, the results 
of which form the basis for making judgments about the carrying value of assets and liabilities that are not readily apparent 
from other sources. Results may differ from these estimates due to actual outcomes being different from those on which we 
based our assumptions. These estimates and judgments are regularly reviewed by management on an ongoing basis at the end 
of each quarter prior to the public release of our financial results. We believe the following critical accounting policies affect 
our more significant judgments and estimates used in the preparation of our Consolidated Financial Statements. 

39 

Revenue  Recognition.  Revenue  is  recognized  when  control  of  the  promised  goods  or  services  are  transferred  to  our 
customers  in  an  amount  that  reflects  the  consideration  we  expect  to  be  entitled  to  receive  in  exchange  for  those  goods  or 
services.  We  account  for  a  contract  when  it  has  approval and  commitment  from  both  parties,  the  rights  of  the  parties  and 
payment terms are identified, the contract has commercial substance and collectability of consideration is probable. 

We account for shipping and handling activities as the fulfillment of a promise to transfer goods to the customer and 
therefore record these activities under the caption “Cost of revenue.” Sales tax and any other taxes collected concurrent with 
revenue producing activities are excluded from revenue. Incidental items that are immaterial in the context of the contract are 
recognized as expense. 

Contracts with customers may include multiple performance obligations. For such arrangements, we allocate revenue to 
each performance obligation based on its relative standalone selling price. We generally determine standalone selling prices 
based on the prices charged to customers or the expected cost-plus margin. 

Revenue from systems is recognized when we transfer control of the product to our customer. To indicate transfer of 
control, we must have a present right to payment, legal title must have passed to the customer and the customer must have the 
significant risks and rewards of ownership. We generally transfer control for system sales when the customer or the customer’s 
agent picks up the system at our facility. We provide an assurance warranty on our systems for a period of twelve to fourteen 
months  against  defects  in  material  and  workmanship.  We  provide  for  the  estimated  cost  of  product  warranties  at  the  time 
revenue is recognized. 

Depending on the terms of the systems arrangement, we may also defer the recognition of a portion of the consideration 
expected to be received because we have to satisfy a future obligation (e.g., installation and extended warranties). We use an 
observable price to determine the standalone selling price for separate performance obligations or a cost-plus margin approach 
when one is not available. 

Revenue from software licenses, which is primarily sold without systems, is recognized upfront at the point in time when 
the software is made available to the customer. Software licenses provide the customer with limited rights to use the software. 
Revenue from licensing support and maintenance is recognized as the support and maintenance are provided, which is over the 
contract period. 

Revenue from parts is recognized when we transfer control of the product, which typically occurs when we ship the 

product from our facilities to the customer. 

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
our assurance warranty on our products, service labor, consulting and training. Revenue from service contracts is recognized 
ratably over the term of the service contract. Revenue from service labor and consulting is recognized as services are performed. 

We record contract liabilities when the customer has been billed in advance of completing our performance obligations. 

These amounts are recorded as deferred revenue in the Consolidated Balance Sheets. 

Business  combinations.  We  account  for  business  combinations  under  the  acquisition  method  of  accounting,  which 
requires us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date fair 
values. While we use our best estimates and assumptions to accurately value assets acquired and liabilities assumed at the 
acquisition date as well as contingent consideration, where applicable, our estimates are inherently uncertain and subject to 
refinement. As a result, during the measurement period, which may be up to one year from the acquisition date, we record 
adjustments to the assets acquired and liabilities assumed with the corresponding offset to goodwill. Upon the conclusion of 
the measurement period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, 
any subsequent adjustments are recognized in our consolidated statements of operations. Accounting for business combinations 
requires  our  management  to  make  significant  estimates  and  assumptions,  especially  at  the  acquisition  date  including  our 
estimates  for  intangible  assets,  contractual  obligations  assumed,  restructuring  liabilities,  pre-acquisition  contingencies,  and 
contingent consideration, where applicable. Although we believe the assumptions and estimates we have made in the past have 
been  reasonable  and  appropriate,  they  are  based,  in  part,  on  historical  experience  and  information  obtained  from  the 
management of the acquired companies and are inherently uncertain. Estimates in valuing certain acquired intangible assets 
under the income approach include growth in future expected cash flows from product sales, acquired technologies, technology 
obsolescence  rates,  estimated  cash  flows  from  the  projects  when  completed  and  discount  rates.  Unanticipated  events  and 
circumstances may occur that may affect the accuracy or validity of such assumptions, estimates or actual results. 

Excess and Obsolete Inventory. Inventories are stated at the lower of cost or net realizable value.  Net realizable value is 
the estimated selling prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  
Cost is generally determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. We 
review and set standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to 

40 

 
 
 
approximate actual costs. We maintain reserves for our excess and obsolete inventory equal to the difference between the cost 
of  inventory  and  the  estimated  market  value  based  upon  assumptions  about  future product  lifecycles,  product  demand  and 
market conditions. If actual product lifecycles, product demand and market conditions are less favorable than those originally 
projected by management, additional inventory write-downs may be required. 

Goodwill and Indefinite Lived Intangible Assets.  Goodwill is tested for impairment during the fourth quarter, or whenever 
events or circumstances indicate that its carrying value may not be recoverable. Goodwill impairment is tested at the reporting 
unit level, which is defined as an operating segment or one level below the operating segment.  The Company has three reporting 
units and one operating segment. Goodwill is reviewed for impairment using either a qualitative assessment or a quantitative 
goodwill impairment test. If the Company chooses to perform a qualitative assessment and determine the fair value more likely 
than not exceeds the carrying value, no further evaluation is necessary. When the Company performs the quantitative goodwill 
impairment test, it compares fair value to carrying value, which includes goodwill. If fair value exceeds carrying value, the 
goodwill is not considered impaired. If the carrying value is higher than the fair value, the difference would be recognized as 
an impairment loss. 

Intangible  assets  with  indefinite  lives,  including  in-process  research  and  development  (“IPR&D”),  are  tested  for 
impairment if impairment indicators arise and, at a minimum, annually. However, the Company is permitted to first assess 
qualitative  factors  to  determine  if  a  quantitative  impairment  test  is  necessary.  Further  testing  is  only  required  if  the  entity 
determines, based on the qualitative assessment, that it is more likely than not that an indefinite-lived intangible asset’s fair 
value is less than its carrying amount. Otherwise, no further impairment testing is required. The indefinite-lived intangible asset 
impairment test consists of a one-step analysis that compares the fair value of the intangible asset with its carrying amount. If 
the carrying amount of an intangible asset exceeds its fair value, an impairment loss is recognized in an amount equal to that 
excess.  We  consider  many  factors  in  evaluating  whether  the  value  of  intangible  assets  with  indefinite  lives  may  not  be 
recoverable,  including,  but  not  limited  to  estimates  of  future  cash  flows,  the  discount  rate,  terminal  growth  rates,  general 
economic conditions, our outlook and market performance of our industry and recent and forecasted financial performance. 

There was no impairment of goodwill or IPR&D for the years presented. 

Long-Lived  Assets  and  Finite-Lived  Acquired  Intangible  Assets.  We  periodically  review  long-lived  assets,  other  than 
goodwill, for impairment whenever changes in events or circumstances indicate that the carrying amount of an asset may not 
be  recoverable.  Assumptions  and  estimates  used  in  the  determination  of  impairment  losses,  such  as  future  cash  flows  and 
disposition costs, may affect the carrying value of long-lived assets and the impairment of such long-lived assets, if any, could 
have a material effect on our consolidated financial statements.   No such indicators were noted in 2022, 2021 or 2020. 

Accounting for Income Taxes. As part of the process of preparing our consolidated financial statements, we are required 
to estimate our current tax exposure together with our temporary differences resulting from differing treatment of items for tax 
and accounting purposes. These temporary differences result in deferred tax assets and liabilities, which are included within 
our consolidated balance sheet. We must then assess the likelihood that our deferred tax assets will be recovered from future 
taxable income and to the extent we believe that recovery is not likely, we must establish a valuation allowance. Management 
judgment is required in determining our provision for income taxes and any valuation allowance recorded against our deferred 
tax assets. The need for a valuation allowance is based on our estimates of taxable income by jurisdiction in which we operate 
and the period over which our deferred taxes will be recoverable. In the event that actual results differ from these estimates or 
we adjust these estimates in future periods, we may need to adjust the valuation allowance, which could materially impact our 
financial position and results of operations. At December 31, 2022 and January 1, 2022, we had recorded valuation allowances 
of $11.8 million and $10.9 million on certain of our deferred tax assets to reflect the deferred tax assets at the net amount that 
is more likely than not to be realized.  We evaluated the realizability of the deferred tax assets based on positive earnings as 
well as the projected earnings in future years and believe it is more likely than not that the substantial majority of our deferred 
tax asset will be realized in the future years.  We will continue to monitor the realizability of the deferred tax assets and evaluate 
the valuation allowance. 

We recognize liabilities for uncertain tax positions based on a two-step process. The first step requires us to determine if 
the weight of available evidence indicates that the tax position has met the threshold for recognition; therefore, we must evaluate 
whether it is more likely than not that the position will be sustained on audit, including resolution of any related appeals or 
litigation processes. The second step requires us to measure the tax benefit of the tax position taken, or expected to be taken, 
in an income tax return as the largest amount that is more than 50% likely of being realized when effectively settled. This 
measurement step is inherently difficult and requires subjective estimations of such amounts to determine the probability of 
various possible outcomes. We reevaluate the uncertain tax positions each quarter based on factors including, but not limited 
to, changes in facts or circumstances, changes in tax law, effectively settled issues, and new audit activity. Such a change in 
recognition or measurement could result in the recognition of a tax benefit or an additional charge to the tax provision in the 
period. 

41 

 
 
 
Although we believe the measurement of our liabilities for uncertain tax positions is reasonable, no assurance can be 
given that the final outcome of these matters will not be different than what is reflected in the historical income tax provisions 
and accruals. If additional taxes are assessed as a result of an audit or litigation, it could have a material effect on our income 
tax provision and net income in the period or periods for which that determination is made. 

Item 7A. Quantitative and Qualitative Disclosures About Market Risk. 

Interest Rate and Credit Market Risk 

We are exposed to changes in interest rates and market liquidity including our investments in certain available-for-sale 
securities. Our available-for-sale securities consist of fixed and variable rate income investments, such as municipal notes, 
municipal bonds and corporate bonds. We continually monitor our exposure to changes in interest rates, market liquidity and 
credit ratings of issuers for our available-for-sale securities. It is possible that we are at risk if interest rates, market liquidity or 
credit ratings of issuers change in an unfavorable direction. The magnitude of any gain or loss will be a function of the difference 
between the fixed or variable rate of the financial instrument and the market rate, and our financial condition and results of 
operations  could be  materially  affected.  Based  on  a  sensitivity  analysis  performed  on  our  financial  investments  held as  of 
December 31, 2022, a hypothetical increase of 100 basis points in interest rates would result in a decrease of $2.0 million in 
the  fair  value  of  our  available-for-sale  debt  securities  and  would  not  have  a  material  impact  on  our  consolidated  financial 
position, results of operations or cash flows. 

Foreign Currency Risk 

We enter into foreign currency forward contracts to minimize the short-term impact of exchange rate fluctuations on 
certain  foreign  currency  denominated  monetary  assets  and  liabilities,  primarily  cash  and  intercompany  receivables  and 
payables. In addition, we hedge certain anticipated foreign currency cash flows, primarily on revenues denominated in Japanese 
yen.  These forward contracts are not designated as accounting hedges, so the change in fair value of the forward exchange 
contracts is recognized under the caption “Other expense, net” in the Consolidated Statements of Operations for each reporting 
period. As of December 31, 2022, and January 1, 2022, we had six and seven outstanding forward contracts, respectively, with 
a total notional contract value of $27.9 million and $32.3 million, respectively. We do not use derivative financial instruments 
for trading or speculative purposes. 

Item 8. Financial Statements and Supplementary Data. 

The consolidated financial statements and related information required by this Item are set forth on the pages indicated 

in Item 15(a) of this Form 10-K. 

Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure. 

None. 

Item 9A. Controls and Procedures. 

Evaluation of Disclosure Controls and Procedures 

We maintain disclosure controls and procedures that are designed to ensure that information we are required to disclose 
in reports that we file or submit under the Exchange Act is recorded, processed, summarized and reported within the time 
period specified in SEC rules and forms. These controls and procedures are also designed to ensure that such information is 
accumulated and communicated to our management, including our principal executive officer and principal financial officer, 
as appropriate, to allow timely decisions regarding required disclosure. In designing and evaluating disclosure controls and 
procedures, we have recognized that any controls and procedures, no matter how well designed and operated, can provide only 
reasonable assurance of achieving the desired control objectives. Management is required to apply judgment in evaluating its 
controls and procedures. 

We performed an evaluation under the supervision and with the participation of our management, including our principal 
executive officer and principal financial officer, to assess the effectiveness of the design and operation of our disclosure controls 
and procedures under the Exchange Act as of December 31, 2022. Based on that evaluation, our management, including our 
principal executive officer and principal financial officer, concluded that our disclosure controls and procedures were effective 
as of December 31, 2022 at the reasonable assurance level. 

42 

 
 
 
Management’s Report on Internal Control Over Financial Reporting 

Our management is responsible for establishing and maintaining adequate internal control over financial reporting, as 
such term is defined in Exchange Act Rules 13a-15(f) and 15d-15(f). Internal control over financial reporting is a process 
designed  to  provide  reasonable  assurance  regarding  the  reliability  of  financial  reporting  and  the  preparation  of  financial 
statements for external purposes in accordance with accounting principles generally accepted in the United States of America. 
Under the supervision and with the participation of our management, including our principal executive officer and principal 
financial officer, we conducted an evaluation of the effectiveness of our internal control over financial reporting based on the 
framework  in  Internal  Control  —  Integrated  Framework  issued  by  the  Committee  of  Sponsoring  Organizations  of  the 
Treadway Commission (2013 framework) (“COSO”). Based on our evaluation, our management concluded that our internal 
control over financial reporting was effective as of December 31, 2022. 

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. 
Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may be circumvented or 
deteriorate. 

Attestation Report of the Registered Public Accounting Firm 

Our consolidated financial statements as of and for the year ended December 31, 2022 have been audited by Ernst & 
Young  LLP,  our  independent  registered  public  accounting  firm,  in  accordance  with  the  standards  of  the  Public  Company 
Accounting Oversight Board (United States). Ernst & Young LLP has also audited our internal control over financial reporting 
as of December 31, 2022, as stated in its attestation report included elsewhere in this Form 10-K. 

Changes in Internal Control over Financial Reporting 

There  have  been  no  changes  in  our  internal  control  over  financial  reporting  (as  defined  in  Rule  13a-15(f)  under  the 
Exchange Act) that occurred during our fiscal quarter ended December 31, 2022 that have materially affected, or are reasonably 
likely to materially affect, our internal control over financial reporting.  

Item 9B. Other Information. 

None. 

Item 9C. Disclosure Regarding Foreign Jurisdictions that Prevent Inspection. 

Not applicable. 

43 

 
 
 
PART III 

Certain information required by Part III is omitted from this Form 10-K because we expect to file a definitive proxy 
statement  within  one  hundred  twenty  (120)  days  after  the  end  of  our  fiscal  year  pursuant  to  Regulation  14A  (the  “Proxy 
Statement”) for our Annual Meeting of Stockholders currently scheduled for May 9, 2023, and the information included in the 
Proxy Statement is incorporated herein by reference. 

Item 10. Directors, Executive Officers and Corporate Governance. 

The information required by this Item with respect to directors and executive officers is incorporated by reference to the 
information  under  the  headings  “Proposal  1:  Election  of  Directors,”  “Executive  Officers”  and  “Corporate  Governance 
Principles and Practices” in the Proxy Statement. Information regarding compliance with Section 16 of the Exchange Act is 
incorporated by reference to the information under the heading “Delinquent Section 16(a) Reports” in the Proxy Statement, if 
any. 

Code of Business Conduct and Ethics. We have adopted a code of business conduct and ethics that applies to our principal 
executive officer, principal financial officer and controller. This code of business conduct and ethics is posted on our internet 
website  address  at  http://investors.ontoinnovation.com.    We  will  post  on  our  website  any  amendment  to  or  waiver  from  a 
provision of our code of business conduct and ethics as may be required, and within the time period specified, by applicable 
SEC rules. 

Item 11. Executive Compensation. 

The information required by this Item is incorporated by reference to the information under the headings “Executive 
Officer Compensation,” “Compensation of Directors,” “Executive Officer Compensation Tables,” “Compensation Committee 
Report  on  Executive  Officer  Compensation,”  “Stock  Ownership/Retention  Guidelines  for  Directors”  and  “Compensation 
Committee Interlocks and Insider Participation” in the Proxy Statement. 

Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters. 

The  information  required  by  this  Item  is  incorporated  by  reference  to  the  information  under  the  headings  “Security 

Ownership of Certain Beneficial Owners” and “Equity Compensation Plan Information” in the Proxy Statement. 

Item 13. Certain Relationships and Related Transactions, and Director Independence. 

The information required by this Item is incorporated by reference to the information under the headings “Related Persons 

Transaction Policy” and “Board Independence” in the Proxy Statement. 

Item 14. Principal Accountant Fees and Services. 

The information required by this Item is incorporated by reference to the information under the heading “Proposal 3: 

Ratification of Appointment of Independent Registered Public Accounting Firm” in the Proxy Statement. 

44 

 
 
 
PART IV 

Item 15. Exhibits and Financial Statement Schedule. 

(a)  The following documents are filed as part of this Form 10-K: 

1. 

Financial Statements 

The consolidated financial statements and consolidated financial statement information required by 
this Item are included on pages F-1 through F-9 of this report. The Reports of Independent Registered Public 
Accounting Firm appear on pages F-2 through F-4 of this report. 

2. 

Financial Statement Schedule 

See Index to financial statements on page F-1 of this report. 

3. 

Exhibits 

Exhibits are as set forth in the “Exhibit Index”, provided below. Where so indicated, exhibits, which 

were previously filed, are incorporated by reference. 

Exhibit No. 

2.1 

3.1 

3.2 

4.1 
4.2 

10.1* 

10.1.1* 

Exhibit Description 
Agreement and Plan of Merger, dated as of June 
23, 2019, by and among Nanometrics 
Incorporated, Rudolph Technologies, Inc. and 
PV Equipment Inc. 
Amended and Restated Certificate of 
Incorporation of Onto Innovation Inc. 
Amended and Restated Bylaws of Onto 
Innovation Inc. 
Form of Common Stock Certificate 
Description of Securities 
Nanometrics Incorporated Amended and 
Restated 2005 Equity Incentive Plan 
Form of Performance-Based Restricted Stock 
Unit Agreement 

10.1.2*  Nanometrics Incorporated Amended and 

Restated 2005 Equity Incentive Plan forms of 
Stock Option and Restricted Stock Unit 
Agreements 

10.2*  Rudolph Technologies, Inc. 2009 Stock Plan 
10.2.1*  Amended form of Employee Restricted Stock 

Unit Purchase Agreement pursuant to the 
Rudolph Technologies, Inc. 2009 Stock Plan 
10.3*  Rudolph Technologies, Inc. 2018 Stock Plan 
10.3.1*  Form of Employee Performance Stock Unit 

Purchase Agreement pursuant to the Rudolph 
Technologies, Inc. 2018 Stock Plan 

Form 

File Number  Date of First Filing 

Exhibit 
No./Appendix 
Reference 

8-K 

000-13470 

June 24, 2019 

2.1 

8-K 

001-39110  October 28, 2019 

8-K 

10-K 
10-K 

001-39110  January 27, 2020 

001-39110  February 25, 2020 
001-39110  February 25, 2020 

3.2 

3.1 

4.1 
4.2 

DEF14A 

000-13470  April 4, 2017  Appendix B 

8-K 

10-K 

000-13470  March 24, 2015 

000-13470  March 13, 2008 

99.1 

10.8 

DEFR14A 
10-Q 

000-27965  May 8, 2009 
001-36226  August 3, 2017 

Appendix A 
10.12 

8-K 
10-Q 

001-36226  May 16, 2018 
001-36226  August 2, 2018 

10.1 
10.1 

45 

 
 
 
  
 
Exhibit No. 

Exhibit Description 

10.4*  Onto Innovation Inc. 2020 Stock Plan 
10.4.2*  Form of Employee Stock Option Agreement for 
usage under the Onto Innovation Inc. 2020 Stock 
Plan 

Form 
8-K 
8-K 

File Number  Date of First Filing 
001-39110  May 14, 2020 
001-39110  May 14, 2020 

Exhibit 
No./Appendix 
Reference 
10.1 
10.1 

10.4.3*  Form of Director Stock Option Agreement for 

8-K 

001-39110  May 14, 2020 

10.1 

usage under the Onto Innovation Inc. 2020 Stock 
Plan 

10.4.5*  Form of Employee Restricted Stock Unit 

10-Q 

001-39110  August 5, 2021 

10.1 

Agreement for usage under the Onto Innovation 
Inc. 2020 Stock Plan 

10.4.6*  Form of Director Restricted Stock Unit Purchase 
Agreement for usage under the Onto Innovation 
Inc. 2020 Stock Plan 

10-Q 

001-39110  August 5, 2021 

10.1 

10.4.7*  Form of Employee Performance Stock Unit 

10-Q 

001-39110  August 5, 2021 

10.1 

Purchase Agreement for usage under the Onto 
Innovation Inc. 2020 Stock Plan 

10.4.8*  Form of Employee Incentive Restricted Stock 
Unit Purchase Agreement for usage under the 
Onto Innovation Inc. 2020 Stock Plan 

10.5*  Onto Innovation Inc. 2020 Employee Stock 

10.6* 
10.7* 

Purchase Plan 
Form of Indemnification Agreement 
Form of Onto Innovation Inc. Indemnification 
Agreement 

10.8*  Management Agreement, dated as of July 24, 
2000 by and between Rudolph Technologies, 
Inc. and Steven R. Roth as restated and amended 
on July 29, 2014. 

10.9*  Employment Agreement, dated as of November 
9, 2015, by and between Rudolph Technologies, 
Inc. and Michael Plisinski. 

10.10*  Offer Letter to Yoon Ah E. Oh, dated October 4, 
2021, by and between Yoon Ah E. Oh and Onto 
Innovation Inc. 

10.11*  Offer Letter to Mark Slicer, dated April 1, 2022, 
by and between Mark Slicer and Onto 
Innovation Inc. 

10.12*  Executive Change in Control Agreement, dated 
July 5, 2022, by and between Onto Innovation 
Inc. and Yoon Ah Oh 

10-Q 

001-39110  November 4, 2021 

10.1 

S-8 

8-K 
8-K 

333-238492  May 19, 2020 

001-39110  November 6, 2019 
001-39110 

September 13, 
2021 

10.2 

10.1 
10.1 

10-Q 

001-36226  August 6, 2014 

10.2 

8-K 

001-36226  November 9, 2015 

10.1 

10-Q 

001-39110  May 3, 2022 

10.1 

8-K 

001-39110  May 17, 2022 

10.1 

10-Q 

001-39110  November 10, 

10.1 

2022 

― 

― 

10.13*+  Form of Executive Change in Control 

― 

― 

Agreement 

46 

 
 
 
 
 
 
Subsidiaries. 

Exhibit Description 

Exhibit No. 
21.1+ 
23.1+  Consent of Ernst & Young LLP, Independent 
Registered Public Accounting Firm. 
31.1+  Rule 13a-14(a) Certification of Chief Executive 
Officer of the Registrant pursuant to Section 302 
of the Sarbanes-Oxley Act of 2002. 
31.2+  Rule 13a-14(a) Certification of Chief Financial 

Officer of the Registrant pursuant to Section 302 
of the Sarbanes-Oxley Act of 2002. 
32.1+  Certification of the Chief Executive Officer 

pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002. 

32.2+  Certification of the Chief Financial Officer 

pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002. 

File Number  Date of First Filing 

― 
― 

― 

― 

― 

― 

― 
― 

― 

― 

― 

― 

Exhibit 
No./Appendix 
Reference 
― 
― 

― 

― 

― 

― 

Form 
― 
― 

― 

― 

― 

― 

101.INS  Inline XBRL Instance Document 
101.SCH Inline XBRL Taxonomy Extension Schema Document 
101.CAL Inline XBRL Taxonomy Extension Calculation Linkbase 

Document 

101.DEF Inline XBRL Taxonomy Extension Definition Linkbase Document  
101.LAB Inline XBRL Taxonomy Extension Label Linkbase Document 
101.PRE Inline XBRL Taxonomy Extension Presentation Linkbase 

104 

* 
+ 

Document 
Cover Page Interactive Data File (formatted in inline XBRL and 
contained in Exhibit 101) 
Management contract, compensatory plan or arrangement. 
Filed herewith. 

47 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
ONTO INNOVATION INC. 

INDEX TO CONSOLIDATED FINANCIAL STATEMENTS AND 
FINANCIAL STATEMENT SCHEDULE 

Consolidated Financial Statements: 

Reports of Independent Registered Public Accounting Firm (PCAOB ID Number 42)............................................  

Consolidated Statements of Operations for the years ended December 31, 2022, January 1, 2022 and  
    December 26, 2020  ...............................................................................................................................................  

Consolidated Statements of Comprehensive Income for the years ended December 31, 2022, January 1, 2022 and 
December 26, 2020 ................................................................................................................................................  

Consolidated Balance Sheets as of December 31, 2022 and January 1, 2022 ...........................................................  

Consolidated Statements of Cash Flows for the years ended December 31, 2022, January 1, 2022 and  
    December 26, 2020 ................................................................................................................................................  

Consolidated Statements of Stockholders’ Equity for the years ended December 31, 2022, January 1, 2022 and 

December 26, 2020 ................................................................................................................................................  

Notes to the Consolidated Financial Statements ........................................................................................................  
Consolidated Financial Statement Schedule: 

Schedule of Valuation and Qualifying Accounts .......................................................................................................  

Page 

F-2 

F-5 

F-6 

F-7 

F-8 

F-9 

F-10 

F-31 

F-1 

 
 
 
 
 
 
 
Report of Independent Registered Public Accounting Firm 

To the Stockholders and the Board of Directors of Onto Innovation Inc.  

Opinion on the Financial Statements 

We have audited the accompanying consolidated balance sheets of Onto Innovation Inc. (the Company) as of December 31, 
2022, and January 1, 2022, the related consolidated statements of operations, comprehensive income, stockholders’ equity and 
cash flows for each of the three years in the period ended December 31, 2022, and the related notes and financial statement 
schedule listed in the Index at Item 15(a) (collectively referred to as the “consolidated financial statements”). In our opinion, 
the consolidated financial statements present fairly, in all material respects, the financial position of the Company at December 
31, 2022 and January 1, 2022, and the results of its operations and its cash flows for each of the three years in the period ended 
December 31, 2022, in conformity with U.S. generally accepted accounting principles. 

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB), the Company's internal control over financial reporting as of December 31, 2022, based on criteria established in 
Internal Control-Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission 
(2013 framework), and our report dated February 24, 2023, expressed an unqualified opinion thereon. 

Basis for Opinion 

These financial statements are the responsibility of the Company's management. Our responsibility is to express an opinion on 
the Company’s financial statements based on our audits. We are a public accounting firm registered with the PCAOB and are 
required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable 
rules and regulations of the Securities and Exchange Commission and the PCAOB. 

We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform 
the audit to obtain reasonable assurance about whether the financial statements are free of material misstatement, whether due 
to  error  or  fraud.  Our  audits  included  performing  procedures  to  assess  the  risks  of  material  misstatement  of  the  financial 
statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included 
examining, on a test basis, evidence regarding the amounts and disclosures in the financial statements. Our audits also included 
evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall 
presentation of the financial statements. We believe that our audits provide a reasonable basis for our opinion. 

Critical Audit Matter  

 The critical audit matter communicated below is a matter arising from the current period audit of the financial statements that 
was communicated or required to be communicated to the audit committee and that: (1) relates to accounts or disclosures that 
are material to the financial statements and (2) involved our especially challenging, subjective or complex judgments. The 
communication of the critical audit matter does not alter in any way our opinion on the consolidated financial statements, taken 
as a whole, and we are not, by communicating the critical audit matter below, providing a separate opinion on the critical audit 
matter or on the accounts or disclosure to which it relates. 

Reserve for Excess and Obsolete Inventory 

Description of the Matter  As  described  in  Notes  2  and  7  to  the  consolidated  financial  statements,  the  Company  records 
inventory net of a reserve for excess and obsolete inventory resulting in net inventories of $324.3 
million as of December 31, 2022. The valuation of certain of the Company's inventory is subject 
to risks associated with supply and demand. As described in Note 2 to the consolidated financial 
statements,  the  Company  maintains  reserves  for  excess  and  obsolete  inventory  equal  to  the 
difference  between  the  cost  of  inventory  and  its  estimated  net  realizable  value  based  upon 
assumptions about historical and future demand for the Company’s products and market conditions 

Auditing management’s estimate of the excess and obsolete inventory reserve was subjective and 
required significant judgment as the excess and obsolete inventory reserve is sensitive to changes 
in the Company’s operations and assumptions used to estimate the reserve including management’s 
assumptions  with  regards  to  product  life-cycles,  product  demand  and  market  conditions,  which 
includes historical usage, expected future usage, on-hand quantities of individual materials, and 
anticipated engineering design changes or advancements. 
We  obtained  an  understanding,  evaluated  the  design  and  tested  the  operating  effectiveness  of 
controls over the Company’s excess and obsolete inventory reserve process, including those over 

How We Addressed the 
Matter in Our Audit 

F-2 

 
 
 
      
  
  
the  validity  and  reasonableness  of  the  data  and  assumptions  used  in  estimating  the  excess  and 
obsolete inventory reserve.   
To test the adequacy of the Company’s excess and obsolete inventory reserve, we performed audit 
procedures that included, among others, assessing methodologies and assumptions used, testing the 
completeness and accuracy of the underlying data used by management in its analysis including 
the usage of historical materials, considering potential product obsolescence, observing physical 
inventory on-hand and inspecting historical gross margins to assess whether any items are being 
sold  at  a  loss  or  lower  margins  that  may  need  to  be  included  in  the  reserve.  We  assessed  the 
historical  accuracy  of  management’s  estimated  excess  and  obsolete  inventory  reserve  and 
performed sensitivity analyses to evaluate changes in the estimate that result from changes in the 
Company’s significant assumptions. 

/s/ Ernst & Young LLP  

We have served as the Company’s auditor since 2008. 

Iselin, New Jersey 
February 24, 2023 

F-3 

 
 
  
 
  
  
  
Report of Independent Registered Public Accounting Firm 

To the Stockholders and the Board of Directors of Onto Innovation Inc. 

Opinion on Internal Control Over Financial Reporting 

We have audited Onto Innovation Inc.’s internal control over financial reporting as of December 31, 2022, based on criteria 
established in Internal Control—Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway 
Commission (2013 framework) (the COSO criteria). In our opinion, Onto Innovation Inc. (the Company) maintained, in all 
material respects, effective internal control over financial reporting as of December 31, 2022, based on the COSO criteria. 

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB),  the  consolidated  balance  sheets  of  the  Company  as  of  December  31,  2022  and  January  1,  2022,  the  related 
consolidated statements of operations, comprehensive income, stockholders’ equity and cash flows for each of the three years 
in the period ended December 31, 2022, and the related notes and financial statement schedule listed in the Index at Item 15(a) 
and our report dated February 24, 2023 expressed an unqualified opinion thereon. 

Basis for Opinion 

The  Company’s  management  is  responsible  for  maintaining  effective  internal  control  over  financial  reporting  and  for  its 
assessment of the effectiveness of internal control over financial reporting included in the accompanying Management’s Report 
on Internal Control Over Financial Reporting. Our responsibility is to express an opinion on the Company’s internal control 
over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be 
independent  with  respect  to  the  Company  in  accordance  with  the  U.S.  federal  securities  laws  and  the  applicable  rules  and 
regulations of the Securities and Exchange Commission and the PCAOB. 

We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the 
audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all 
material respects. 

Our audit included obtaining an understanding of internal control over financial reporting, assessing the risk that a material 
weakness exists, testing and evaluating the design and operating effectiveness of internal control based on the assessed risk, 
and performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a 
reasonable basis for our opinion. 

Definition and Limitations of Internal Control Over Financial Reporting 

A  company’s  internal  control  over  financial  reporting  is  a process  designed  to  provide  reasonable  assurance  regarding  the 
reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally 
accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures 
that  (1)  pertain  to  the  maintenance  of  records  that,  in  reasonable  detail,  accurately  and  fairly  reflect  the  transactions  and 
dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit 
preparation  of  financial  statements  in  accordance  with  generally  accepted  accounting  principles,  and  that  receipts  and 
expenditures  of  the  company  are  being  made  only  in  accordance  with  authorizations  of  management  and  directors  of  the 
company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or 
disposition of the company’s assets that could have a material effect on the financial statements. 

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, 
projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate. 

 /s/ Ernst & Young LLP  

Iselin, New Jersey 
February 24, 2023 

F-4 

 
 
 
  
  
  
ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF OPERATIONS 
(In thousands, except per share data) 

Revenue ...................................................................................................  
Cost of revenue ........................................................................................  
Gross profit ..........................................................................................  

Operating expenses: 

Research and development ..................................................................  
Sales and marketing .............................................................................  
General and administrative ..................................................................  
Amortization ........................................................................................  
Total operating expenses .................................................................  
Operating income .....................................................................................  
Interest income, net ..................................................................................  
Other expense, net ...................................................................................  
Income before provision (benefit) for income taxes ............................  
Provision (benefit) for income taxes ........................................................  
Net income ...............................................................................................  
Earnings per share: 

  $ 

December 31,  
2022 
1,005,183     $ 
465,962      
539,221      

Year Ended 
January 1,  
2022 
788,899     $ 
359,813      
429,086      

December 26,  
2020 
556,496  
278,043  
278,453  

111,953      
65,688      
69,582      
55,284      
302,507      
236,714      
5,011      
(141 )    
241,584      
18,250      
223,334     $ 

96,118      
57,235      
67,960      
51,366      
272,679      
156,407      
1,163      
(1,888 )    
155,682      
13,333      
142,349     $ 

84,584  
48,136  
65,310  
53,746  
251,776  
26,677  
2,899  
(2,708 ) 
26,868  
(4,157 ) 
31,025  

  $ 

Basic ....................................................................................................  
Diluted .................................................................................................  

  $ 
  $ 

4.52     $ 
4.49     $ 

2.89     $ 
2.86     $ 

0.63  
0.63  

Weighted average number of shares outstanding: 

Basic ....................................................................................................  
Diluted .................................................................................................  

49,424      
49,764      

49,242      
49,728      

49,136  
49,475  

The accompanying notes are an integral part of these consolidated financial statements.

F-5 

 
 
 
 
 
 
 
  
  
 
   
   
   
     
     
 
   
   
   
   
   
   
   
   
   
   
   
     
     
 
   
     
     
 
   
   
 
   
     
     
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME 
(In thousands)  

Year Ended 
January 1,  
2022 
142,349     $ 

December 26,  
2020 

31,025  

123  
5,043  
5,166  
36,191  

Net income ............................................................................................... 
Other comprehensive income (loss), net of tax: 

December 31,  
2022 
223,334     $ 

$ 

Change in net unrealized gains (losses) on available-for-sale marketable 
securities .............................................................................................. 
Change in currency translation adjustments ........................................ 
Total other comprehensive income (loss), net of tax ........................... 
Total comprehensive income ................................................................... 

$ 

(2,447 )  
(8,879 )  
(11,326 )  
212,008     $ 

(537 )  
(2,715 )  
(3,252 )  
139,097     $ 

The accompanying notes are an integral part of these consolidated financial statements. 

F-6

ONTO INNOVATION INC. 

CONSOLIDATED BALANCE SHEETS 
(In thousands, except per share data) 

Current Assets: 

ASSETS 

Cash and cash equivalents ....................................................................................... 
Marketable securities ............................................................................................... 
Accounts receivable, less allowance of $1,572 at December 31, 2022 and 
    $1,303 at January 1, 2022 .................................................................................... 
Inventories ............................................................................................................... 
Prepaid expenses and other current assets ............................................................... 
Total current assets .............................................................................................. 
Property, plant and equipment, net .............................................................................. 
Goodwill ...................................................................................................................... 
Identifiable intangible assets, net ................................................................................. 
Deferred income taxes ................................................................................................. 
Other assets .................................................................................................................. 
Total assets........................................................................................................... 
LIABILITIES AND STOCKHOLDERS’ EQUITY 

Current liabilities: 

Accounts payable ..................................................................................................... 
Accrued liabilities .................................................................................................... 
Deferred revenue ..................................................................................................... 
Other current liabilities ............................................................................................ 
Total current liabilities ......................................................................................... 
Deferred and other tax liabilities.................................................................................. 
Other non-current liabilities ......................................................................................... 
Total liabilities ..................................................................................................... 

Commitments and contingencies (Note 8) 
Stockholders’ equity: 

Preferred stock, $0.001 par value, 3,000 shares authorized, no shares 

 issued and outstanding .......................................................................................... 

Common stock, $0.001 par value, 97,000 shares authorized, 48,684 and 
   49,300 issued and outstanding at December 31, 2022 and January 1, 2022, 
   respectively. .......................................................................................................... 
Additional paid-in capital ........................................................................................ 
Accumulated other comprehensive income ............................................................. 
Accumulated earnings .............................................................................................. 
Total stockholders’ equity ................................................................................... 
Total liabilities and stockholders’ equity.............................................................. 

December 31, 
2022 

January 1, 
2022 

$ 

175,872   $ 
371,912  

169,602  
341,741  

241,395  
324,282  
21,411  
1,134,872  
91,980  
315,811  
222,197  
4,778  
25,225  
1,794,863   $ 

54,526   $ 
48,836  
30,163  
27,033  
160,558  
7,366  
30,513  
198,437  

177,205  
243,108  
16,433  
948,089  
82,094  
315,811  
277,281  
4,822  
21,716  
1,649,813  

53,345  
43,042  
29,979  
28,160  
154,526  
40,281  
28,951  
223,758  

—  

—  

49  
1,243,631  

(10,010 )  
362,756  
1,596,426  
1,794,863     $ 

49  
1,256,179  
1,316  
168,511  
1,426,055  
1,649,813  

$ 

$ 

$ 

The accompanying notes are an integral part of these consolidated financial statements.

F-7

ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF CASH FLOWS 
(In thousands) 

Cash flows from operating activities: 

Net income ...............................................................................................................  

  $ 

223,334     $ 

142,350     $ 

31,025  

December 31,  
2022 

Year Ended 
January 1,  
2022 

December 26,  
2020 

Adjustments to reconcile net income to net cash and cash equivalents provided 
     by operating activities: 

Depreciation .............................................................................................................  
Amortization of intangibles ......................................................................................  
Share-based compensation ........................................................................................  
Write-off of acquired in-process research and development .......................................  
Acquired inventory step-up amortization ...................................................................  
Provision for inventory valuation ..............................................................................  
Deferred income taxes ..............................................................................................  
Other, net .................................................................................................................  
Change in operating assets and liabilities, net of effects of business acquired: 

Accounts receivable .............................................................................................  
Income taxes ........................................................................................................  
Inventories ...........................................................................................................  
Prepaid expenses and other assets .........................................................................  
Accounts payable .................................................................................................  
Accrued and other liabilities .................................................................................  
Net cash and cash equivalents provided by operating activities ..........................  

Cash flows from investing activities: 

9,378      
55,284      
24,426      
5,652      
—      
9,313      
(33,601 )    
(563 )    

(65,140 )    
(5,006 )    
(93,905 )    
(4,954 )    
1,181      
11,304      
136,703      

14,435      
51,366      
19,542      
—      
393      
8,175      
(12,618 )    
2,267      

(27,829 )    
1,307      
(57,175 )    
(768 )    
12,142      
21,694      
175,281      

13,832  
53,746  
17,662  
—  
10,678  
14,703  
(11,631 ) 
4,711  

(25,816 ) 
(1,196 ) 
(42,409 ) 
11,409  
11,403  
17,867  
105,984  

Purchases of marketable securities ............................................................................  
Proceeds from maturities and sales of marketable securities .......................................  
Purchases of property, plant and equipment ...............................................................  
Acquisitions, net of cash acquired .............................................................................  
Cash received from convertible note receivable .........................................................  
Net cash and cash equivalents used in investing activities ..................................  

(371,287 )    
338,645      
(18,405 )    
(4,644 )    
—      
(55,691 )    

(361,022 )    
255,063      
(12,039 )    
(23,795 )    
—      
(141,793 )    

(313,027 ) 
265,409  
(3,829 ) 
—  
2,848  
(48,599 ) 

Cash flows from financing activities: 

Purchases of common stock ....................................................................................  
Tax payments related to shares withheld for share-based compensation plans ..........  
Payment of contingent consideration for acquired business ......................................  
Issuance of shares through share-based compensation plans.....................................  
Net cash and cash equivalents provided by (used in) financing activities ............  
Effect of exchange rate changes on cash and cash equivalents .......................................  
Net increase in cash and cash equivalents ......................................................................  
Cash and cash equivalents at beginning of year .............................................................  
Cash and cash equivalents at end of year .......................................................................  

  $ 

(65,257 )    
(8,874 )    
(2,287 )    
8,068      
(68,350 )    
(6,391 )    
6,270      
169,602      
175,872     $ 

—      
(7,403 )    
—      
10,073      
2,670      
(3,276 )    
32,882      
136,720      
169,602     $ 

(52,000 ) 
(4,052 ) 
(569 ) 
2,919  
(53,702 ) 
2,364  
6,047  
130,673  
136,720  

Supplemental disclosure of cash flow information: 

Income taxes paid, net ..............................................................................................  

  $ 

58,687     $ 

23,766     $ 

6,415  

The accompanying notes are an integral part of these consolidated financial statements. 

F-8 

 
 
 
 
 
 
 
   
   
 
   
     
     
 
   
     
     
 
   
   
   
   
   
   
   
   
   
     
     
 
   
   
   
   
   
   
   
   
     
     
 
   
   
   
   
   
   
   
     
     
 
   
   
   
   
   
   
   
   
 
   
     
     
 
   
     
     
 
 
 
 
 
 
 
 
 
ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF STOCKHOLDERS’ EQUITY 
For the years ended December 31, 2022,  
January 1, 2022 and December 26, 2020  
(In thousands) 

Balance at December 31, 2019 ..........       50,184  

 $ 

50  

Common Stock 

  Shares 

    Amount     

Additional 
Paid-in 
Capital 
 $  1,269,437  

Accumulated 
Other 
Comprehensive 
    Income / (Loss) 

Accumulated 
Earnings / 
(Deficit) 

Total 

 $ 

(598 )   $ 

(4,863 )   $  1,264,026  

668      
(1,882 )    
—  
—  

1      
(2 )    
—  
—  

2,918      
(51,998 )    
—  
17,662      

Issuance of shares through share- 
   based compensation plans, net ....      
Repurchase of common stock ........      
Net income .....................................      
Share-based compensation .............      
Share-based compensation plan  
    withholdings ..............................      
Other ..............................................      
Currency translation .......................      
Unrealized gain on investments .....      

(118 )    
(94 )    
—  
—  
Balance at December 26, 2020 ..........       48,758  

Issuance of shares through share- 
   based compensation plans, net ....      
Net income .....................................      
Share-based compensation .............      
Share-based compensation plan  
    withholdings ..............................      
Currency translation .......................      
Unrealized loss on investments ......      

(108 )    
—  
—  
Balance at January 1, 2022 ................       49,300  

650      
—  
—  

—  
—  
—  
—  
49  

—  
—  
—  

—  
—  
—  
49  

(4,052 )    
—      
—  
—  
1,233,967  

10,072      
—  
19,542      

(7,402 )    
—  
—  
1,256,179  

—      
—  
—  
—  

—  
—  
5,043  

123      
4,568      

—      
—  
31,025      
—  

—  
—  
—      
—  
26,162  

2,919  
(52,000 ) 
31,025  
17,662  

(4,052 ) 
—  
5,043  
123  
1,264,746  

—  
—  
—  

—  

142,349      

—  

10,072  
142,349  
19,542  

—  
(2,715 )    
(537 )    
1,316      

—      
—  
—  
168,511  

(7,402 ) 
(2,715 ) 
(537 ) 
1,426,055  

Issuance of shares through share- 
   based compensation plans, net ....      
Repurchase of common stock ........      
Net income .....................................      
Share-based compensation .............      
Share-based compensation plan  
    withholdings ..............................      
Currency translation .......................      
Unrealized loss on investments ......      

509      
(1,018 )    
—  
—  

(107 )    
—  
—  

Balance at December 31, 2022 ..........       48,684     $ 

1  
(1 )    
—  
—  

8,067      
(36,167 )    
—  
24,426      

—  
—  
—  
—  

—  
(29,089 )    
223,334      

—  

8,068  
(65,257 ) 
223,334  
24,426  

—  
—  
—  
49     $  1,243,631     $ 

(8,874 )    
—  
—  

—  
(8,879 )    
(2,447 )    
(10,010 )   $ 

—      
—  
—  

(8,874 ) 
(8,879 ) 
(2,447 ) 
362,756     $  1,596,426  

The accompanying notes are an integral part of these consolidated financial statements

F-9 

 
 
 
 
   
   
   
   
 
 
 
   
   
 
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
 
 
 
 
 
 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS 
(In thousands, except per share data) 

1.  Organization and Nature of Operations: 

Onto  Innovation  Inc.  (“Onto  Innovation”  or  the  “Company”)  is  a  worldwide  leader  in  the  design,  development, 
manufacture and support of process control tools that perform macro-defect inspection and metrology, lithography systems, 
and process control analytical software used by semiconductor and advanced packaging device manufacturers. The Company 
delivers comprehensive solutions throughout the semiconductor fabrication process with our families of proprietary products 
that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time 
to market of their devices. The Company provides process and yield management solutions used in both wafer processing 
facilities, often referred to as “front-end” manufacturing, and in device packaging and test facilities, commonly referred to as 
“back-end”  manufacturing.  The  Company’s  advanced  process  control  software  portfolio  includes  powerful  solutions  for 
standalone tools, groups of tools, or factory-wide suites to enhance productivity and achieve significant cost savings. Onto 
Innovation’s systems are backed by worldwide customer service and applications support. The Company has branch sales and 
service  offices  or  subsidiaries  in  Korea,  Japan,  China,  Taiwan,  Singapore,  Malaysia,  Vietnam  and  in  several  countries  in 
Europe. The Company operates in a single reportable segment and is a provider of process characterization equipment and 
software for wafer fabs and advanced packaging facilities.  

2. 

Summary of Significant Accounting Policies:  

Consolidation. The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. 
All intercompany accounts and transactions have been eliminated. 

Fiscal Year.  The fiscal year of 2022 began on January 2, 2022 and ended December 31, 2022.  The fiscal year of 2021 began 
on December 27, 2020 and ended January 1, 2022.  The fiscal year of 2020 began on January 1, 2020 and ended December 26, 
2020. 

Revenue Recognition. Revenue is recognized when control of the promised goods or services are transferred to the Company’s 
customers in an amount that reflects the consideration the Company expects to be entitled to receive in exchange for those 
goods or services. The Company accounts for a contract when it has approval and commitment from both parties, the rights of 
the  parties  and  payment  terms  are  identified,  the  contract  has  commercial  substance  and  collectability  of  consideration  is 
probable. 

The Company has elected to account for shipping and handling activities as the fulfillment of a promise to transfer goods 
to  the  customer  and  therefore  records  these  activities  under  the  caption  “Cost  of  revenue.”  Sales  tax  and  any  other  taxes 
collected concurrent with revenue producing activities are excluded from revenue. Incidental items that are immaterial in the 
context of the contract are recognized as expense. These accounting policy elections are consistent with the manner in which 
the Company has historically recorded these items. 

Contracts with customers may include multiple performance obligations. For such arrangements, the Company allocates 
revenue  to  each  performance  obligation  based  on  its  relative  standalone  selling  price.  The  Company  generally  determines 
standalone selling prices based on the prices charged to customers or the expected cost-plus margin. 

Systems and Software Revenue 

Revenue from systems is recognized when the Company transfers control of the product to the customer. To indicate 
transfer of control, the Company must have a present right to payment, legal title must have passed to the customer and the 
customer must have the significant risks and rewards of ownership. The Company generally transfers control for system sales 
when the customer or the customer’s agent picks up the system at the Company’s facility. The Company provides an assurance 
warranty on its systems for a period of twelve to fourteen months against defects in material and workmanship. The Company 
provides for the estimated cost of product warranties at the time revenue is recognized. 

Depending on the terms of the systems arrangement, the Company may also defer the recognition of a portion of the 
consideration expected to be received because the Company has to satisfy a future obligation (e.g., installation and extended 
warranties).  The  Company  uses  an  observable  price  to  determine  the  standalone  selling  price  for  separate  performance 
obligations or a cost-plus margin approach when one is not available. 

F-10 

 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Revenue from software licenses provides the customer with a right to use the software as it exists when made available 
to the customer. Revenue from software licenses, which is primarily sold with our systems, is recognized upfront at the point 
in time when the software is made available to the customer. Revenue from licensing support and maintenance is recognized 
as the support and maintenance are provided, which is over the contract period. 

Parts Revenue 

Revenue from parts is recognized when the Company transfers control of the product, which typically occurs when the 

Company ships the product from its facilities to the customer. 

Services Revenue 

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
the Company’s assurance warranty on its products, service labor, consulting and training. Revenue from service contracts is 
recognized ratably over the term of the service contract. Revenue from service labor and consulting is recognized as services 
are performed. Revenue from installation services is recognized at a point in time when installation is complete.  

Practical Expedients 

The Company generally expenses sales commissions when incurred because the amortization period is one year or less. 

These costs are recorded within selling, general and administrative expenses. 

The Company does not adjust the amount of consideration for the effects of a significant financing components, if any, 

as the payment terms are one year or less. 

The Company does not disclose the value of remaining performance obligations for contracts with an original expected 
length of one year or less and contracts for which the Company recognizes revenue in the amount to which it has the right to 
invoice. 

For additional information on the Company’s revenue recognition, see Note 9 of Notes to the Consolidated Financial 

Statements. 

Business  Combinations.    The  Company  accounts  for  business  combinations  under  the  acquisition  method  of  accounting, 
which requires us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date 
fair  values.  While  the  Company  uses  its  best  estimates  and  assumptions  to  accurately  value  assets  acquired  and  liabilities 
assumed at the acquisition date as well as contingent consideration, where applicable, the Company’s estimates are inherently 
uncertain  and  subject  to  refinement.  As  a  result,  during  the  measurement  period,  which  may  be  up  to  one  year  from  the 
acquisition date, the Company records adjustments to the assets acquired and liabilities assumed with the corresponding offset 
to goodwill. Upon the conclusion of the measurement period or final determination of the values of assets acquired or liabilities 
assumed,  whichever  comes  first,  any  subsequent  adjustments  are  recognized  in  its  consolidated  statements  of  operations. 
Accounting for business combinations requires the Company’s management to make significant estimates and assumptions, 
especially at the acquisition date including its estimates for intangible assets, contractual obligations assumed, restructuring 
liabilities, pre-acquisition contingencies, and contingent consideration, where applicable. Although the Company believes the 
assumptions and estimates it has made in the past have been reasonable and appropriate, they are based, in part, on historical 
experience and information obtained from the management of the acquired companies and are inherently uncertain. Estimates 
in valuing certain acquired intangible assets under the income approach include growth in future expected cash flows from 
product sales, acquired technologies, technology obsolescence rates, estimated cash flows from the projects when completed 
and  discount  rates.  Unanticipated  events  and  circumstances  may  occur  that  may  affect  the  accuracy  or  validity  of  such 
assumptions, estimates or actual results. 

F-11 

 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Use of Estimates.  The preparation of financial statements in conformity with accounting principles generally accepted in the 
United States of America requires management to make estimates and assumptions that affect the reported amounts of assets 
and  liabilities  and  disclosure  of  contingent  assets  and  liabilities  as  of  the  date  of  the  financial  statements  and  the  reported 
amounts of revenue and expenses during the reporting period. Significant estimates made by management include the allowance 
for credit losses, excess and obsolete inventory, fair value of assets acquired and liabilities assumed in a business combination, 
recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, 
recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-
based payments and liabilities for tax uncertainties. Actual results could differ from those estimates. 

These estimates and assumptions are based on historical experience and on various other factors which the Company 
believes to be reasonable under the circumstances. The Company may engage third-party valuation specialists to assist with 
estimates  related  to  the  valuation  of  financial  instruments,  assets  and  stock  awards  associated  with  various  contractual 
arrangements.  Such  estimates  often  require  the  selection  of  appropriate  valuation methodologies  and  significant  judgment. 
Actual results could differ from these estimates under different assumptions or circumstances and such differences could be 
material. 

Cash  and  Cash  Equivalents.  Cash  and  cash  equivalents  include  cash  and  highly  liquid  debt  instruments  with  original 
maturities of three months or less when purchased. 

Marketable Securities. The Company determined that all of its investment securities are to be classified as available-for-sale. 
Available-for-sale debt securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity 
under the caption “Accumulated other comprehensive loss.” Realized gains and losses and, interest and dividends on available-
for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets 
regardless  of  their  maturity  date  if  they  are  available  for  use  in  current  operations.  The  Company  reviews  its  investment 
portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining 
whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost 
basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any 
anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses 
on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains 
and losses on marketable securities. 

For additional information on the Company’s marketable securities, see Note 4 of Notes to the Consolidated Financial 

Statements. 

Allowance for Credit Losses.  The Company maintains an allowance for credit losses that is estimated based on a combination 
of factors including write-off history, aging analysis, forecast of future economic conditions and any specific known troubled 
accounts.  The  Company  believes  the  allowance  is  adequate  to  cover  expected  losses  on  trade  receivables.    Provisions  for 
expected  credit  losses  are  classified  as  selling,  general  and  administrative  expense  in  the  Consolidated  Statements  of 
Operations. If the financial condition of the Company’s customers were to deteriorate, resulting in an impairment of their ability 
to make payments, additional allowances may be required. 

Inventories.  Inventories are stated at the lower of cost or net realizable value.  Net realizable value is the estimated selling 
prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  Cost is generally 
determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. The Company reviews 
and sets standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to approximate 
actual costs.  

The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves 
when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions 
about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated 
for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been 
established, it is maintained until the item to which it relates is scrapped or sold. The Company regularly evaluates its ability 
to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted 
sales, product end-of-life dates, estimated current and future market values and new product introductions. When recorded, 
reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual demand for 
the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, additional 
reserves may be required.   

F-12 

 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Property,  Plant  and  Equipment.  Property,  plant  and  equipment  are  stated  at  cost.  Depreciation  of  property,  plant  and 
equipment is computed using the straight-line method over the estimated useful lives of the assets, which are five to twenty-
two years for buildings, three to ten years for machinery and equipment, three to ten years for furniture and fixtures, three years 
for computer equipment, and three to seven years for software. Leasehold improvements are amortized using the straight-line 
method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are 
expensed as incurred and major renewals and betterments are capitalized. 

Long-Lived Assets and Finite-Lived Acquired Intangible Assets.  Long-lived assets, such as property, plant, and equipment, 
and identifiable acquired intangible assets with finite useful lives, are reviewed for impairment whenever events or changes in 
circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and 
used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to 
be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is 
recognized in the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based 
on discounted cash flows.  There were no impairments of long-lived assets for the years ended December 31, 2022, January 1, 
2022 and December 26, 2020.   

Goodwill and Indefinite Lived Intangible Assets.  Goodwill and indefinite lived intangible assets are tested for impairment 
on  an  annual  basis  or  when  an  event  or  changes  in  circumstances  indicate  that  its  carrying  value  may not  be  recoverable. 
Goodwill impairment is tested at the reporting unit level, which is defined as an operating segment or one level below the 
operating segment.  The Company has three reporting units and one operating segment. No goodwill impairment occurred in 
fiscal years 2022, 2021, or 2020. Goodwill is reviewed for impairment using either a qualitative assessment or a quantitative 
goodwill impairment test. If the Company chooses to perform a qualitative assessment and determine the fair value more likely 
than not exceeds the carrying value, no further evaluation is necessary. When the Company performs the quantitative goodwill 
impairment test, it compares fair value to carrying value, which includes goodwill. If fair value exceeds carrying value, the 
goodwill is not considered impaired. If the carrying value is higher than the fair value, the difference would be recognized as 
an impairment loss. 

Intangible  assets  with  indefinite  lives,  including  in-process  research  and  development  (“IPR&D”),  are  tested  for 
impairment if impairment indicators arise and, at a minimum, annually. However, the Company is permitted to first assess 
qualitative  factors  to  determine  if  a  quantitative  impairment  test  is  necessary.  Further  testing  is  only  required  if  the  entity 
determines, based on the qualitative assessment, that it is more likely than not that an indefinite-lived intangible asset’s fair 
value is less than its carrying amount. Otherwise, no further impairment testing is required. The indefinite-lived intangible asset 
impairment test consists of a one-step analysis that compares the fair value of the intangible asset with its carrying amount. If 
the carrying amount of an intangible asset exceeds its fair value, an impairment loss is recognized in an amount equal to that 
excess.  We  consider  many  factors  in  evaluating  whether  the  value  of  intangible  assets  with  indefinite  lives  may  not  be 
recoverable,  including,  but  not  limited  to  estimates  of  future  cash  flows,  the  discount  rate,  terminal  growth  rates,  general 
economic conditions, our outlook and market performance of our industry and recent and forecasted financial performance. 

There was no impairment of goodwill or IPR&D for the years ended December 31, 2022, January 1, 2022 and December 

26, 2020. 

For  additional  information  on  the  Company’s  goodwill  and  purchased  intangible  assets,  see  Note  5  of  Notes  to  the 

Consolidated Financial Statements. 

Concentration of Credit Risk. Financial instruments, which potentially subject the Company to concentrations of credit risk, 
consist primarily of accounts receivable, cash and cash equivalents and marketable securities.  

The  Company  maintains  cash  and  cash  equivalents  and  marketable  securities  with  higher  credit  quality  issuers  and 
monitors the amount of credit exposure to any one issuer. The Company's investment policy provides guidelines and limits 
regarding  credit  quality,  investment  concentration,  investment  type,  and  maturity  that  the  Company  believes  will  provide 
liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial 
paper, corporate debt securities, asset-backed securities, U.S. Treasury, U.S. Government, and U.S. Agency debt. 

The Company’s accounts receivable result primarily from the sale of semiconductor equipment, related accessories and 
replacement  parts.  The  Company’s  customer  base  is  highly  concentrated  and  historically,  a  relatively  small  number  of 
customers have accounted for a significant portion of its revenues. Write-offs of uncollectible accounts have historically not 
been material. The Company actively monitors its customers' financial strength to reduce the risk of loss. 

F-13 

 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Warranties. The Company generally provides a warranty on its products for a period of twelve to fourteen months against 
defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue 
is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure 
rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, 
material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations 
would be required. The warranty accrual represents the best estimate of the amount necessary to settle future and existing 
claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty 
reserve and adjusts the amounts in accordance with changes in these factors. 

Income Taxes. The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires 
the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized 
in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax 
asset to that portion which more likely than not will be realized. 

For  additional  information  on  the  Company’s  income  taxes,  see  Note  12  of  Notes  to  the  Consolidated  Financial 

Statements. 

Translation of Foreign Currencies.  The Company’s international branches and subsidiaries primarily generate and expend 
cash in their local functional currency. Accordingly, all balance sheet accounts of these local functional currency branches and 
subsidiaries  are  translated  into  U.S.  dollars  at  the  fiscal  period-end  exchange  rate,  and  income  and  expense  accounts  are 
translated into U.S. dollars using average rates in effect for the period. The resulting translation adjustments are recorded as 
cumulative translation adjustments and are recorded directly as a separate component of stockholders’ equity under the caption, 
“Accumulated other comprehensive loss.” The Company had accumulated exchange losses resulting from the translation of 
foreign operation financial statements of $7,115 and $1,764 as of December 31, 2022 and January 1, 2022, respectively. 

Share-based Compensation. The Company measures the cost of employee services received in exchange for the award of 
equity instruments based on the fair value of the award at the date of grant. Compensation expense is recognized using the 
straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments 
recorded for forfeitures as they occur.  

For additional information on the Company’s share-based compensation plans, see Note 10 of Notes to the Consolidated 

Financial Statements. 

Research and Development Costs.  Expenditures for research and development are expensed as incurred. 

Derivative Instruments and Hedging Activities. The Company’s policy is to mitigate the effect of exchange rate fluctuations 
on certain foreign currency denominated business exposures. The Company has a policy that allows for the use of derivative 
financial instruments to hedge foreign currency exchange rate fluctuations on forecasted revenue and net monetary assets or 
liabilities denominated in various foreign currencies. The Company carries derivative financial instruments (derivatives) on the 
balance  sheet  at  their  fair  values,  in  either  prepaid  expenses  and  other  current  assets  or  other  current  liabilities  in  the 
Consolidated Balance Sheets. The Company does not use derivatives for trading or speculative purposes. The Company does 
not believe that it is exposed to more than a nominal amount of credit risk in its foreign currency hedges, as counterparties are 
large, global and well-capitalized financial institutions. The Company’s exposures are in liquid currencies (Japanese yen, euros, 
Korean  won,  Taiwanese  dollars,  Chinese  renminbi,  Singapore  dollars  and  Israeli  shekel),  so  there  is  minimal  risk  that 
appropriate derivatives to maintain the Company’s hedging program would not be available in the future. 

To hedge foreign currency risks, the Company uses foreign currency exchange forward contracts, where possible and 
prudent. These hedge contracts are valued using standard valuation formulas with assumptions about future foreign currency 
exchange rates derived from existing exchange rates, interest rates, and other market factors. 

F-14 

 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2022 and January 

1, 2022 were as follows: 

  December 31, 

2022 

January 1, 
2022 

Notional amount .........................................................................................................  
Fair value of liability ..................................................................................................  

  $ 

27,923     $ 
135      

32,293  
26  

During the years ended December 31, 2022 and January 1, 2022, the Company recognized losses of $3,487 and $1,650 
on maturities of forward contracts, respectively.  During the year ended December 26, 2020, the Company recognized a gain 
of $510 on maturities of forward contracts.  The aggregate notional amounts of matured contracts were $365,985, $420,460 
and $373,749 for 2022, 2021 and 2020, respectively. 

Contingencies and  Litigation.  The Company is subject to the possibility of losses from various contingencies, including 
certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the 
likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss 
contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are 
probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate 
of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the 
costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See 
Note 8 of the Notes to the Consolidated Financial Statements, “Commitments and Contingencies” for a detailed description. 

Recent Accounting Pronouncements. 

Recently Adopted and Issued 

Recently adopted and issued accounting guidance is not applicable or did not have, or is not expected to have, a material 

impact to the Company. 

3. 

Fair Value Measurements: 

Fair Value of Financial Instruments 

The Company has evaluated the estimated fair value of financial instruments using available market information and 
valuations as provided by third-party sources. The use of different market assumptions and/or estimation methodologies could 
have  a  significant  effect  on  the  estimated  fair  value  amounts.    The  carrying  value  of  cash  and  cash  equivalents,  accounts 
receivable,  accounts  payable  and  accrued  liabilities  approximates  fair  value  because  of  the  short-term  maturity  of  these 
instruments. 

Fair Value Hierarchy 

The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs 
into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 
2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, 
either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs 
are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial 
asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input 
that is significant to the fair value measurement. 

F-15 

 
 
 
   
 
 
 
   
 
   
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 

2022 and January 1, 2022:  

Fair Value Measurements Using 
Significant 
Other  
Observable 
Inputs (Level 2) 

Quoted Prices in 
Active Markets 
for Identical 
Assets (Level 1) 

Significant 
Unobservable 
Inputs (Level 3)   

Carrying 
Value 

December 31, 2022 
Assets: 

Available-for-sale debt securities: 

Municipal notes and bonds ................................    $ 
Asset-backed securities ......................................     
Certificates of deposit ........................................     
Commercial paper ..............................................     
Corporate bonds .................................................     

Total assets .....................................................    $ 

178,868     $ 
1,534      
52,095      
80,079      
59,335      
371,912     $ 

Liabilities: 

Foreign currency forward contracts .......................     

Total liabilities ...............................................    $ 

135     $ 
135     $ 

—     $ 
—      
—      
—      
—      
—  

 $ 

—      
—     $ 

178,868     $ 
1,534      
52,095      
80,079      
59,335      
371,912     $ 

135     $ 
135     $ 

—  
—  
—  
—  
—  
—  

—  
—  

Fair Value Measurements Using 
Significant 
Other  
Observable 
Inputs (Level 2) 

Quoted Prices in 
Active Markets 
for Identical 
Assets (Level 1) 

Significant 
Unobservable 
Inputs (Level 3)   

Carrying 
Value 

January 1, 2022 
Assets: 

Available-for-sale debt securities: 

Municipal notes and bonds ................................    $ 
Asset-backed securities ......................................     
Certificates of deposit ........................................     
Commercial paper ..............................................     
Corporate bonds .................................................     

Total assets .....................................................    $ 

170,980     $ 
2,009      
33,192      
73,113      
62,447      
341,741     $ 

Liabilities: 

Foreign currency forward contracts .......................    $ 
Total liabilities ...............................................    $ 

26     $ 
26     $ 

—     $ 
—      
—      
—      
—      
—  

 $ 

—     $ 
—     $ 

170,980     $ 
2,009      
33,192      
73,113      
62,447      
341,741     $ 

26     $ 
26     $ 

—  
—  
—  
—  
—  
—  

—  
—  

Available-for-sale  debt  securities  classified  as  Level  2  are  valued  using  observable  inputs  to  quoted  market  prices, 
benchmark  yields,  reported  trades,  broker/dealer  quotes  or  alternative  pricing  sources  with  reasonable  levels  of  price 
transparency.  The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward 
rates quoted by the banks or foreign currency dealers.  Investment prices are obtained from third party pricing providers, which 
model prices utilizing the above observable inputs, for each asset class. 

 See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities. 

F-16 

 
 
 
 
 
 
 
   
   
   
 
    
    
    
   
   
     
     
     
 
   
     
     
     
 
   
     
     
     
 
 
 
 
 
 
 
   
   
   
 
    
    
    
   
   
     
     
     
 
   
     
     
     
 
   
     
     
     
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

4.  Marketable Securities: 

At December 31, 2022 and January 1, 2022, marketable securities are categorized as follows:  

Amortized 
Cost 

Gross 
Unrealized 

Holding Gains     

Gross 
Unrealized 
Holding Losses    

Fair 
Value 

December 31, 2022 
Municipal notes and bonds ........................................................     $ 
Asset-backed securities ..............................................................      
Certificates of deposit ................................................................      
Commercial paper ......................................................................      
Corporate bonds .........................................................................      

Total marketable securities ....................................................     $ 

January 1, 2022 
Municipal notes and bonds ........................................................     $ 
Asset-backed securities ..............................................................      
Certificates of deposit ................................................................      
Commercial paper ......................................................................      
Corporate bonds .........................................................................      

Total marketable securities ....................................................     $ 

181,196     $ 
1,555      
52,190      
80,199      
60,334      
375,474     $ 

171,203     $ 
2,009      
33,200      
73,152      
62,634      
342,198     $ 

27     $ 
—      
24      
16      
4      
71     $ 

38     $ 
—      
2      
2      
29      
71     $ 

 $ 

2,355  
21  
118  
136  
1,003  
3,633     $ 

 $ 

261  
—  
10  
41  
216  
528     $ 

178,868  
1,534  
52,095  
80,079  
59,335  
371,912  

170,980  
2,009  
33,192  
73,113  
62,447  
341,741  

 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, 

regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2022 and January 1, 2022:  

December 31, 2022 

January 1, 2022 

Fair 
 Value 
219,211  
122,530  
—  
—  
341,741  

Due within one year ...................................................................     $ 
Due after one through five years ................................................      
Due after five through ten years.................................................      
Due after ten years .....................................................................      

Amortized  
Cost 
311,934     $ 
63,540      
—  
—      

Fair 
 Value 
309,385     $ 
62,527      
—  
—      

Amortized  
Cost 
219,353     $ 
122,845      

—  
—      

Total marketable securities ....................................................     $ 

375,474     $ 

371,912     $ 

342,198     $ 

F-17 

 
 
 
 
 
   
 
 
    
    
    
   
  
  
  
  
 
    
    
    
   
  
  
  
  
 
 
   
 
 
 
   
   
   
 
  
  
  
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities,  
aggregated by investment instrument and period of time in an unrealized loss position, at December 31, 2022 and January 1, 
2022.  

In Unrealized Loss Position  
For Less Than 12 Months 
Gross 
 Unrealized  
Losses 

Fair 
 Value 

In Unrealized Loss Position  
For Greater Than 12 Months 

Fair 
 Value 

Gross 
 Unrealized  
Losses 

December 31, 2022 
Municipal notes and bonds ........................................................     $ 
Asset-backed securities ..............................................................      
Certificates of deposit ................................................................      
Commercial paper ......................................................................      
Corporate bonds .........................................................................      

Total marketable securities ....................................................     $ 

January 1, 2022 
Municipal notes and bonds ........................................................     $ 
Certificates of deposit ................................................................      
Commercial paper ......................................................................      
Corporate bonds .........................................................................      

Total marketable securities ....................................................     $ 

96,301     $ 
1,555      
22,400      
50,550      
28,975      
199,781     $ 

113,790     $ 
16,300      
58,681      
53,661      
242,432     $ 

1,273     $ 
21      
118      
136      
637      
2,185     $ 

262     $ 
10      
40      
150      
462     $ 

69,159     $ 

—      
—      
—      
28,769      
97,928     $ 

—     $ 
—      
—      
2,587      
2,587     $ 

1,082  
—  
—  
—  
366  
1,448  

—  
—  
—  
66  
66  

 See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities. 

5.  Goodwill and Purchased Intangible Assets: 

Goodwill and purchased intangible assets with indefinite useful lives are not amortized but are reviewed for impairment 
annually during the fourth quarter of each fiscal year and whenever events or changes in circumstances indicate that the carrying 
value of an asset may not be recoverable. The process of evaluating the potential impairment of goodwill and intangible assets 
requires  significant  judgment.  The  Company  regularly  monitors  current  business  conditions  and  considers  other  factors 
including, but not limited to, adverse industry or economic trends, restructuring actions and lower projections of profitability 
that may impact future operating results. The Company performed its annual assessment in the fourth quarter of fiscal 2022 
and concluded that no impairment charge was required. 

Goodwill 

The changes in the carrying amount of goodwill are as follows: 

Balance at December 26, 2020 ..............................................................................................................     $ 
Goodwill from Inspectrology acquisition ..........................................................................................    
Balance at January 1, 2022 ....................................................................................................................    
Goodwill adjustment ..........................................................................................................................    
Balance at December 31, 2022 ..............................................................................................................     $ 

306,632  
9,179  
315,811  
—  
315,811  

F-18 

 
 
 
 
  
 
 
 
   
  
   
 
 
    
    
    
   
 
    
    
    
   
 
 
 
 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Purchased Intangible Assets 

Purchased intangible assets as of December 31, 2022 and January 1, 2022 are as follows: 

Gross Carrying 
Amount 

Accumulated 
Amortization 

Net 

December 31, 2022 

Finite-lived intangible assets: 
Developed technology .........................................................................  
Customer and distributor relationships ................................................  
Trademarks and trade names ...............................................................  
Total identifiable intangible assets ...................................................  

January 1, 2022 

Finite-lived intangible assets: 
Developed technology .........................................................................  
Customer and distributor relationships ................................................  
Trademarks and trade names ...............................................................  
Total identifiable intangible assets ...................................................  

  $ 

  $ 

  $ 

  $ 

378,197     $ 
73,321      
14,171      
465,689     $ 

205,386     $ 
30,195      
7,911      
243,492     $ 

172,811  
43,126  
6,260  
222,197  

377,997     $ 
73,321      
14,171      
465,489     $ 

155,976     $ 
25,608      
6,624      
188,208     $ 

222,021  
47,713  
7,547  
277,281  

Intangible  asset  amortization expense  amounted  to  $55,284,  $51,366  and  $53,746 for  the  years  ended  December  31, 
2022, January 1, 2022 and December 26, 2020, respectively. Assuming no change in the gross carrying value of identifiable 
intangible assets and estimated lives, estimated amortization expenses are $54,823 for 2023, $49,137 for 2024, $32,587 for 
2025, $31,394 for 2026 and $23,173 for 2027. 

6. 

Leasing Arrangements: 

The  Company  determines  if  an  arrangement  is  a  lease  at  its  inception.  Operating  lease  arrangements  are  comprised 
primarily of  real  estate  and  equipment  agreements  for  which  the  right-of-use  assets  are included  in  “Other  assets”  and  the 
corresponding lease liabilities, depending on their maturity, are included in “Other current liabilities” or “Other non-current 
liabilities” in the Consolidated Balance Sheets. 

Right-of-use assets represent the right to use an underlying asset for the lease term and lease liabilities represent the 
obligation to make lease payments arising from the lease. Right-of-use assets and lease liabilities are recognized at the lease 
commencement  date  based  on  the  estimated  present  value  of  lease  payments  over  the  lease  term.  The  lease  term  includes 
options to extend the lease when it is reasonably certain that the option will be exercised. Lease agreements frequently require 
the Company to pay real estate taxes, insurance and maintenance costs.  Leases with a term of one year or less are not recorded 
on the Consolidated Balance Sheets and lease expense for these leases is recognized on a straight-line basis over the lease term. 

 The  Company  uses  its  estimated  incremental  borrowing  rate  in  determining  the  present  value  of  lease  payments 
considering  the  term  of  the  lease,  which  is  derived  from  information  available  at  the  lease  commencement  date,  giving 
consideration to publicly available data for instruments with similar characteristics. The Company accounts for the lease and 
non-lease components as a single lease component. 

Lease costs for operating leases were $6,368 and $5,964 for the years ended December 31, 2022 and January 1, 2022, 
respectively. Operating lease costs are generally recognized over the lease term.  The Company elected the practical expedient 
to not provide comparable presentation for periods prior to adoption.  

Details of the Company’s operating leases are as follows: 

Cash Flow Information 
Cash paid for operating lease liabilities ......................................................................     $ 
Right-of-use assets obtained in exchange for operating lease liabilities .....................     $ 

Operating Lease Information 
Weighted average remaining lease term ....................................................................      
Weighted average discount rate .................................................................................      

Year Ended 

December 31, 
2022 

January 1, 
2022 

6,368     $ 
9,295     $ 

6,247  
304  

December 31, 
2022 

January 1, 
2022 

4.5  
3.8 %    

5.3  
4.5 % 

F-19 

 
 
 
 
   
   
 
 
    
      
 
 
    
      
 
   
   
 
   
     
     
 
 
    
      
 
 
    
      
 
   
   
 
 
 
 
   
 
 
 
 
 
 
 
 
 
 
 
   
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

As  of  December  31,  2022,  there  was  an  insignificant  amount  of  commitments  for  operating  leases  that  have  not  yet 
commenced.    The  reconciliation  of  the  maturities  of  operating  leases  to  the  lease  liabilities  recorded  on  the  Consolidated 
Balance Sheet as of December 31, 2022 is as follows: 

Fiscal Year 
2023 ............................................................................................................................................................     $ 
2024 ............................................................................................................................................................      
2025 ............................................................................................................................................................      
2026 ............................................................................................................................................................      
2027 ............................................................................................................................................................      
Thereafter ....................................................................................................................................................      
   Total undiscounted operating lease payments .........................................................................................      
Less: imputed interest .................................................................................................................................      
   Present value of operating lease liabilities ...............................................................................................     $ 

6,721  
5,799  
4,646  
2,905  
1,905  
2,399  
24,375  
2,030  
22,345  

7. 

Balance Sheet Components: 

Inventories 

Inventories are comprised of the following: 

Materials .....................................................................................................................  
Work-in-process .........................................................................................................  
Finished goods ............................................................................................................  
Total inventories .....................................................................................................  

  $ 

231,029     $ 

69,072    
24,181    

  $ 

324,282     $ 

157,343  
60,415  
25,350  
243,108  

  December 31, 

2022 

January 1, 
2022 

Property, Plant and Equipment 

Property, plant and equipment, net, is comprised of the following: 

Land and building .......................................................................................................   $ 
Machinery and equipment ..........................................................................................    
Furniture and fixtures .................................................................................................    
Computer equipment and software .............................................................................    
Leasehold improvements ............................................................................................    

Accumulated depreciation ..........................................................................................    

Total property, plant and equipment, net ................................................................   $ 

December 31, 
2022 

January 1, 
2022 

50,344     $ 
56,924    
2,949    
15,415    
18,539    
144,171    
(52,191 )  
91,980     $ 

48,297  
50,226  
2,534  
13,856  
13,710  
128,623  
(46,529 ) 
82,094  

F-20 

 
 
  
  
 
 
 
 
 
 
 
 
 
 
 
   
 
   
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
   
 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Other assets 

Other assets is comprised of the following: 

Operating lease right-of-use assets .............................................................................  
Other ...........................................................................................................................  
Total other assets ....................................................................................................  

  $ 

  $ 

20,746     $ 
4,479    
25,225     $ 

17,488  
4,228  
21,716  

December 31, 
2022 

January 1, 
2022 

Accrued liabilities 

Accrued liabilities is comprised of the following: 

Payroll and related expenses .......................................................................................  
Warranty .....................................................................................................................  
Other ...........................................................................................................................  
Total accrued liabilities ...........................................................................................  

  $ 

  $ 

36,529     $ 
10,890    
1,417    
48,836     $ 

32,581  
9,093  
1,368  
43,042  

December 31, 
2022 

January 1, 
2022 

Other current liabilities 

Other current liabilities is comprised of the following:  

Customer deposits .......................................................................................................  
Current operating lease obligations ............................................................................  
Income tax payable .....................................................................................................  
Accrued professional fees ...........................................................................................  
Other ...........................................................................................................................  
Total other current liabilities ...................................................................................  

  $ 

  $ 

12,482     $ 
5,678    
1,910    
968    
5,995    
27,033     $ 

9,459  
3,968  
6,315  
912  
7,506  
28,160  

December 31, 
2022 

January 1, 
2022 

Other non-current liabilities 

Other non-current liabilities is comprised of the following: 

Non-current operating lease obligations .....................................................................   $ 
Unrecognized tax benefits (including interest) ...........................................................    
Deferred revenue ........................................................................................................    
Other ...........................................................................................................................    

Total non-current liabilities.....................................................................................   $ 

16,345     $ 
7,693    
2,852    
3,623    
30,513     $ 

13,754  
7,861  
1,693  
5,643  
28,951  

December 31, 
2022 

January 1, 
2022 

8.  Commitments and Contingencies: 

Factoring 

The Company maintains arrangements under which eligible accounts receivable in Japan are sold without recourse to 
unrelated third-party financial institutions. The Company sold $32,385 of receivables during the year ended December 31, 
2022. There were no material gains or losses on the sale of such receivables. There were no amounts due from such third-party 
financial institutions at December 31, 2022. 

F-21 

 
 
 
 
 
 
 
 
 
 
 
 
 
   
 
 
 
 
 
 
 
 
 
 
 
   
 
   
 
 
 
 
 
 
 
 
 
 
 
   
 
   
 
   
 
   
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Intellectual property Indemnification Obligations 

The  Company  has  entered  into  agreements  with  customers  that  include  limited  intellectual  property  indemnification 
obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party 
for certain damages and costs incurred as a result of third-party intellectual property claims arising from these transactions. The 
nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the 
maximum  potential  amount  it  could  be  required  to  pay  to  its  customers.  Historically,  the  Company  has  not  made  any 
indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial 
statements with respect to these indemnification guarantees. 

Warranty Reserves 

The Company generally provides a warranty on its products for a period of 12 to 14 months against defects in material 
and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in 
the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. 
The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. 
Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 14 months prior to the year-
end and warranty accruals are related to sales during the same year. 

Changes in the Company’s warranty reserves are as follows:  

Year Ended 

December 31,  
2022 

January 1,  
2022 

Balance, beginning of the period ...............................................................     $ 
Accruals .................................................................................................      
Warranty liability assumed from Inspectrology acquisition ..................      
Usage .....................................................................................................      
Balance, end of the period .........................................................................     $ 

9,682     $ 
16,040      
—      
(13,893 )    
11,830     $ 

6,485  
11,892  
407  
(9,102 ) 
9,682  

Legal Matters 

From  time  to  time,  the  Company  is  subject  to  legal  proceedings  and  claims  in  the  ordinary  course  of  business.  The 
following reflects an overview of the material developments with regard to the Company’s pending material legal proceedings.  

Optical Solutions Inc. v. Nanometrics Incorporated (Case No. 18-cv-00417-BLF): On August 2, 2017, Nanometrics was 
named as defendant in a complaint filed in New Hampshire Superior Court (the “Complaint”). The Complaint, brought by 
Optical  Solutions,  Inc.  (“OSI”),  alleges  claims  arising  from  a  purported  exclusive  purchase  contract  between  OSI  and 
Nanometrics  pertaining  to  certain  products.  The  relief  sought  is  the  award  of  damages  in  an  amount  to  be proven  at  trial, 
attorney’s fees and cost as well as other relief the court deems just and proper. On September 18, 2017, Nanometrics removed 
the  action  to  the  United  States  District  Court  for  the  District  of  New  Hampshire  (the  “District  of  New  Hampshire”).  On 
September 25, 2017, Nanometrics moved to transfer the Complaint to the United States District Court for the Northern District 
of California (the “Northern District of California”). On December 20, 2017, Nanometrics filed its complaint against OSI in 
the California Superior Court for the County of Santa Clara alleging claims arising from OSI’s breach of certain purchase 
orders. The relief sought is the award of damages in an amount to be proven at trial including pre- and post-judgment interest, 
punitive damages, restitution for benefits unjustly received by OSI, attorney’s fees and cost as well as other relief the court 
deems just and proper.  Nanometrics’ complaint was later removed by OSI to the Northern District of California. On May 29, 
2018, the District of New Hampshire issued an order granting Nanometrics’ motion to transfer the Complaint to the Northern 
District of California and denying Nanometrics’ motion to dismiss the Complaint without prejudice. On June 14, 2018, the 
Complaint was consolidated with Nanometrics’ complaint against OSI. On August 9, 2018, OSI filed an Amended Complaint. 
On  September  19,  2018,  Nanometrics  filed  a  motion  to  dismiss  OSI’s  Amended  Complaint  for  failure  to  state  a  claim. 
Nanometrics’ motion to dismiss was heard on February 28, 2019. On March 5, 2019, the Northern District of California granted 
Nanometrics’ motion to dismiss with leave to amend. OSI filed a Second Amended Complaint on March 29, 2019. Nanometrics 
filed a motion to dismiss OSI’s Second Amended Complaint on May 31, 2019. In October 2019, Nanometrics was renamed 
Onto Innovation Inc. as a result of the Merger. Thereafter, the Company’s second motion to dismiss was heard on November 
14, 2019. On November 26, 2019, the Northern District of California granted the Company’s motion to dismiss with leave to 
amend. OSI filed a Third Amended Complaint on January 21, 2020. On March 2, 2020, the Company filed a motion to dismiss 
OSI’s Third Amended Complaint and a hearing on the motion was held on June 11, 2020. On June 23, 2020, the Northern 
District of California granted the Company’s motion to dismiss with prejudice with regard to two claims asserted by OSI and 
dismissed two other claims asserted by OSI with leave to amend. Thereafter, on July 7, 2020, OSI filed a Fourth Amended 
Complaint. On August 14, 2020, the Company filed a motion to dismiss with regard to one of the two remaining claims. On 

F-22 

 
 
 
 
 
 
 
   
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

December 1, 2020, the Northern District of California denied this final motion to dismiss and as a result the Company filed its 
Answer in this matter on December 22, 2020. Discovery is now closed and the trial date is set for December 4, 2023. At this 
time, the loss contingency in this matter is remote and the Company does not anticipate the outcome of the matter to have a 
material impact on its financial position, results of operations, or cash flows. 

Open and Committed Purchase Orders 

As of December 31, 2022, the Company has open and committed purchase orders of $417,148, of which $348,984 is for 

less than one year. 

Line of Credit 

The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable 
securities the Company has with the bank.  The Company is permitted to borrow up to 70% of the value of eligible securities 
held at the time the line of credit is accessed.  The available line of credit as of December 31, 2022 was approximately $108,375 
with an available interest rate of 6.0%.  The credit agreement is available to the Company until such time that either party 
terminates the arrangement at their discretion.  The Company has not utilized the line of credit to date. 

9.  Revenue 

The following table represents a disaggregation of revenue by timing of revenue: 

Point-in-time ......................................................................................    $ 
Over-time ...........................................................................................     

Total revenue .............................................................................    $ 

958,409     $ 
46,773      
1,005,183     $ 

749,276  
39,623  
788,899  

See  Note  14  of  the  Notes  to  the  Consolidated  Financial  Statements  for  additional  discussion  of  the  Company’s 

Year Ended 

December 31,  
2022 

January 1,  
2022 

disaggregated revenue in detail. 

Contract Liabilities 

The Company records contract liabilities when the customer has been billed in advance of the Company completing its 
performance obligations primarily related to service contracts and installation.  For contracts that have a duration of one year 
or less, these amounts are recorded as current deferred revenue in the Consolidated Balance Sheets.  As of December 31, 2022 
and January 1, 2022, the Company carried a long-term deferred revenue balance of $2,852 and $1,693, respectively, in “other 
non-current liabilities” on the Consolidated Balance Sheets. 

Changes in deferred revenue were as follows: 

Balance, beginning of the period .......................................................    $ 
Deferred revenue assumed from Inspectrology acquisition ...........     
Deferral of revenue ........................................................................     
Recognition of deferred revenue ....................................................     
Balance, ending of the period ............................................................    $ 

31,672     $ 

—      
81,772      
(80,430 )    
33,014     $ 

15,627  
386  
69,656  
(53,997 ) 
31,672  

Year Ended 

December 31,  
2022 

January 1,  
2022 

F-23 

 
 
 
 
 
 
 
   
 
 
 
 
 
 
   
 
  
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

10.  Share-Based Compensation and Employee Benefit Plans: 

Share-Based Compensation Plans 

The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive 
for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth 
of the Company. The Company settles restricted stock unit awards, employee stock purchase option exercises and stock option 
exercises with newly issued common shares. 

Onto Innovation Inc. 2020 Stock Plan (the “2020 Plan”). The 2020 Plan provides for the grant of 3,744 stock options 
and other stock awards to employees, directors and consultants at an exercise price equal to the fair market value of the common 
stock on the date of grant. Options granted under the 2020 Plan typically grade vest over a three-year period and expire ten 
years from the date of grant. Restricted stock units granted under the 2020 Plan typically vest over a three-year period for 
employees and one year for directors; however, other vesting periods are allowable under the 2020 Plan. Restricted stock units 
(“RSU”) granted to employees have time based or performance-based vesting.  As of December 31, 2022, there were 3,086 
shares of common stock available for issuance pursuant to future grants under the 2020 Plan.  

Onto Innovation Inc. 2020 Employee Stock Purchase Plan (the “2020 ESPP”).  Under the terms of the 2020 ESPP, 
eligible employees may have up to 10 % of eligible compensation deducted from their pay and applied to the purchase of shares 
of Company common stock. The price the employee pays for each share of stock is 85 % of the lesser of the fair market value 
of Company common stock at the beginning or the end of the applicable six-month purchase period. The 2020 ESPP is intended 
to qualify under Section 423 of the Internal Revenue Code and is a compensatory plan as defined by FASB ASC 718, “Stock 
Compensation.” Through the Company’s employee stock purchase plans, employees purchased 142, 242 and 91 shares during 
the twelve months ended December 31, 2022, January 1, 2022 and December 26, 2020, respectively.  As of December 31, 2022 
and January 1, 2022, there were 1,116 and 1,258, shares available for issuance under the Company’s employee stock purchase 
plan, respectively. 

The following table reflects share-based compensation expense by type of award: 

Share-based compensation expense: 

Restricted stock units, including all performance and market  
    based awards ..............................................................................    $ 
Stock options and employee stock purchase options .....................     
Total share-based compensation ........................................................     
Tax effect on share-based compensation .......................................     
Net effect on net income ....................................................................    $ 
Effect on earnings per share: 

Basic ..............................................................................................    $ 
Diluted ...........................................................................................    $ 

Year Ended 

December 31, 
2022 

January 1, 
2022 

December 26,  
2020 

21,729     $ 
2,697      
24,426      
5,237      
19,189     $ 

17,174     $ 
2,368      
19,542      
4,255      
15,287     $ 

15,780  
1,882  
17,662  
3,849  
13,813  

(0.39 )   $ 
(0.39 )   $ 

(0.31 )   $ 
(0.31 )   $ 

(0.28 ) 
(0.28 ) 

F-24 

 
 
 
 
 
 
 
 
  
  
 
 
    
    
   
 
    
    
   
  
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Restricted Stock Units 

During fiscal years 2022, 2021 and 2020, the Company issued both service-based RSUs and market-based performance 
RSUs (“PRSUs”). Service-based RSUs typically vest over a period of 3 years or less. Market-based PRSUs generally vest three 
years from the grant date if certain performance criteria are achieved and require continued employment. Based upon the terms 
of such awards, the number of shares that can be earned over the performance periods is based on the Company’s Common 
Stock price performance compared to the market price performance of a designated benchmark index, ranging from 0% to 
200% of target. The designated benchmark index was the Philadelphia Semiconductor Sector Index for market-based PRSUs 
issued in 2022, 2021 and 2020.  The stock price performance or market price performance is measured using the closing price 
for the 20-trading days prior to the dates the performance period begins and ends.  

The following table summarizes the Company’s combined service-based RSUs and market-based PRSUs: 

Nonvested at December 31, 2019 ......................................................................      
Granted ..........................................................................................................      
Vested ............................................................................................................      
Forfeited .........................................................................................................      
Nonvested at December 26, 2020 ......................................................................      
Granted ..........................................................................................................      
Vested ............................................................................................................      
Forfeited .........................................................................................................      
Nonvested at January 1, 2022 ............................................................................      
Granted ..........................................................................................................      
Vested ............................................................................................................      
Forfeited .........................................................................................................      
Nonvested at December 31, 2022 ......................................................................      

Number of 
Shares 

Weighted 
Average 
Grant Date 
Fair Value 

1,107     $ 
498     $ 
(498 )   $ 
(143 )   $ 
964     $ 
338     $ 
(441 )   $ 
(96 )   $ 
765     $ 
410     $ 
(373 )   $ 
(59 )   $ 
743     $ 

28.89  
34.71  
29.46  
29.99  
31.37  
69.82  
30.90  
42.40  
48.25  
82.48  
42.87  
58.98  
69.01  

Of the 743 shares outstanding at December 31, 2022, 644 are service-based RSUs and 99 are market-based PRSUs. The 
fair value of the Company’s service-based RSUs was calculated based on the fair market value of the Company’s stock at the 
date of grant. The fair value of the Company’s market-based PRSUs granted during fiscal years 2022, 2021, and 2020 was 
calculated using a Monte Carlo simulation model at the date of the grant, resulting in a weighted average grant-date fair value 
per share of $85.49, $80.04, and $47.86, respectively. 

 As of December 31, 2022, there was $28,653 of total unrecognized compensation cost related to restricted stock units 

granted under the plans. That cost is expected to be recognized over a weighted average period of 1.5 years. 

401(k) Savings Plan 

The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation to 
the Plan on a pre-tax or after-tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue Service. 
The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary.  Matching contributions 
to the plan totaled $2,965, $2,544 and $2,315 for the years ended December 31, 2022, January 1, 2022 and December 26, 2020, 
respectively.  

11.  Other Expense, Net: 

Other expense, net is comprised of the following:  

Foreign currency exchange losses, net .........................................  $ 
Other ............................................................................................   

Total other expense, net ...........................................................  $ 

(73 )   $ 
(68 )    
(141 )   $ 

(2,020 )   $ 
132      
(1,888 )   $ 

(3,070 ) 
362  
(2,708 ) 

Year Ended 

December 31,  
2022 

January 1,  
2022 

December 26,  
2020 

F-25 

 
 
 
 
  
 
 
 
 
   
   
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

12. 

Income Taxes: 

The components of income tax expense are as follows:  

December 31,  
2022 

Year Ended 
January 1,  
2022 

December 26,  
2020 

Current: 

Federal .................................................................................................  
State .....................................................................................................  
Foreign .................................................................................................  

  $ 

Deferred: 

Federal .................................................................................................  
State .....................................................................................................  
Foreign .................................................................................................  

Total income tax expense (benefit) ..................................................  

  $ 

The income before tax is comprised of the following: 

47,963     $ 
987      
2,901      
51,851      

(31,622 )    
(1,506 )    
(473 )    
(33,601 )    
18,250     $ 

21,791     $ 
1,007      
3,153      
25,951      

(9,475 )    
(540 )    
(2,603 )    
(12,618 )    
13,333     $ 

1,466  
371  
5,637  
7,474  

(10,355 ) 
(1,036 ) 
(240 ) 
(11,631 ) 
(4,157 ) 

Domestic operations ................................................................................  
Foreign operations ...................................................................................  

December 31,  
2022 
239,527     $ 
2,057     $ 

  $ 
  $ 

Year Ended 
January 1,  
2022 
136,143     $ 
19,539     $ 

December 26,  
2020 

(120 ) 
26,988  

The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal 
income tax rate of 21% for the years ended December 31, 2022, January 1, 2022 and December 26, 2020, to income before 
provision for income taxes as follows: 

December 31,  
2022 

Year Ended 
January 1,  
2022 

December 26,  
2020 

  $ 

50,732  
467  
(481 )     
(25,445 )    
1,423  
1,910  
(7,146 )     
(1,526 )     
—  
(1,684 )     
18,250  

  $ 

  $ 

32,693  
1,066  
(3,817 )     
(11,061 )    
1,721  
689  
(3,607 )     
(1,987 )     
(732 )     
(1,632 )     
13,333  

  $ 

5,642  
126  
596  
(4,262 ) 
2,013  
213  
(4,858 ) 
(2,905 ) 
(1,141 ) 
(419 ) 
(4,157 ) 

8 %    

9 %    

(16 )% 

Federal income tax provision at statutory rate .........................................  
State taxes, net of federal effect ...............................................................  
Foreign taxes, net of federal effect ..........................................................  
Foreign Derived Intangible Income (“FDII”) Deduction .........................  
US tax on foreign source income .............................................................  
Non-deductible officer's compensation....................................................  
Research and development tax credit ......................................................  
Tax impact of audit and statue closures ...................................................  
Impact of the CARES Act .......................................................................  
Other ........................................................................................................  
Provision (benefit) for income taxes ....................................................  
Effective tax rate ..................................................................................  

  $ 

  $ 

F-26 

 
 
 
 
 
 
 
   
   
 
 
    
    
   
   
   
 
   
 
    
    
   
   
   
   
 
   
 
 
 
 
 
 
   
   
 
 
 
 
 
 
   
 
 
 
   
   
   
   
   
   
  
  
   
   
   
   
   
   
   
   
   
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

Deferred tax assets and liabilities are comprised of the following: 

December 31,  
2022 

January 1,  
2022 

Deferred tax assets: 

  $ 

Reserves and accruals ...............................................................................................  
Deferred revenue ......................................................................................................  
Share-based compensation ........................................................................................  
Tax credit carryforward ............................................................................................  
Net operating losses ..................................................................................................  
Depreciation and amortization ..................................................................................  
Operating lease liabilities..........................................................................................  
Other .........................................................................................................................  
Gross deferred tax assets...........................................................................................  
Less: valuation allowance .........................................................................................  
Total deferred tax assets after valuation allowance ..................................................  

Deferred tax liabilities: 

Depreciation and amortization ..................................................................................  
Operating lease right of use assets ............................................................................  
Other .........................................................................................................................  
Gross deferred tax liabilities .....................................................................................  
Net deferred tax liabilities ...........................................................................................  

17,231     $ 
3,512      
3,942      
12,197      
1,643      
125      
4,162      
4,044      
46,856      
(11,772 )    
35,084      

(32,693 )    
(4,890 )    
(89 )    
(37,672 )    

15,084  
4,729  
3,023  
10,339  
3,254  
368  
3,575  
2,364  
42,736  
(10,948 ) 
31,788  

(63,554 ) 
(3,469 ) 
(224 ) 
(67,247 ) 
(35,459 ) 

  $ 

(2,588 )   $ 

At December 31, 2022 and January 1, 2022, the Company had recorded valuation allowances of $11,772 and 10,948, 
respectively, on a certain portion of the Company’s deferred tax assets to reflect the deferred tax assets at the net amount that 
is more likely than not to be realized.  The Company maintains a valuation allowance against a portion of its federal and foreign 
tax  credit  carryforwards  and  state  net  operating  losses  and  research  and  development  credits  of  $1,601  and  $10,171, 
respectively. 

In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined 
that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against 
the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the 
periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of 
deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment.  In 
making the determination that it is more likely than not that the Company’s deferred tax assets will be realized as of December 
31, 2022, the Company relied primarily on the reversal of deferred tax liabilities as well as projected future taxable income. 

At December 31, 2022, the Company had tax effected state and foreign net operating loss carryforwards of $1,168 and 
$475, respectively. The federal, state and foreign net operating loss carryforwards expire on various dates beginning in 2023 
through 2037. 

At December 31, 2022, the Company had foreign tax credit carryforwards and state research & development credits of 
$1,601, and $14,797, respectively.  The foreign tax credit carryforwards are set to expire at various dates beginning December 
31, 2029.  The state research & development credits have no expiration dates. 

As  of  December 31, 2022,  the  Company has  provided  U.S.  income  taxes  on  all  its  foreign  earnings.    The  Company 
continues to permanently reinvest the cash held offshore to support its working capital needs.  The Company has accrued $82 
for additional foreign withholding taxes that may be required from its United Kingdom and China entities in the event of a cash 
distribution.   

F-27 

 
 
 
 
 
   
 
 
 
 
   
 
 
    
   
   
   
   
   
   
   
   
   
   
   
 
    
   
   
   
   
   
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

The total amount of unrecognized tax benefits are as follows:  

December 31, 
2022 

Year Ended 
January 1, 
2022 

December 26,  
2020 

Balance, beginning of the period .............................................................  
Gross increases—tax positions in prior period ....................................  
Gross decreases—tax positions in prior period ....................................  
Gross increases—current-period tax positions.....................................  
Closure of audit/statute limitation ........................................................  
Balance, end of the period .......................................................................  

  $ 

  $ 

12,373     $ 
456      
—      
1,729      
(1,548 )    
13,010     $ 

13,486     $ 
156      
(204 )    
1,193      
(2,258 )    
12,373     $ 

15,143  
347  
—  
1,048  
(3,052 ) 
13,486  

The unrecognized tax benefits at December 31, 2022 and January 1, 2022 were $13,010 and $12,373, respectively, of 
which $7,614 and $7,832, respectively, would be reflected as an adjustment to income tax expense if recognized.  The year 
over year increase from 2021 to 2022 is primarily due to additional unrecognized tax benefits related to federal and state tax 
exposures,  offset  by  expiring  tax  statues.    It  is  reasonably  possible  that  certain  amounts  of  unrecognized  tax  benefits  may 
reverse in the next 12 months; however, the Company does not expect such reversals to have a significant impact on its results 
of operations or financial position. 

The  Company  recognizes  accrued  interest  and  penalties  related  to  unrecognized  tax  benefits  in  income  tax  expense. 
During the years ended December 31, 2022, January 1, 2022 and December 26, 2020, the Company recognized approximately 
$149, $(814) and $(193), respectively, in interest and penalties (benefit) expense associated with uncertain tax positions. As of 
December 31, 2022 and January 1, 2022, the Company had accrued interest and penalties expense included in the table of 
unrecognized tax benefits of $628 and $430, respectively. 

The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions.   The 
Company is subject to ordinary statute of limitation rules of three and four years for federal and state returns, respectively.  
However, due to tax attribute carryforwards, the Company is subject to examination for tax years 2012 forward for U.S. federal 
tax purposes with respect to carryforward amounts.  The Company is also subject to examination in various states for tax years 
2003 forward with respect to carryforward amounts.  The Company is subject to examination for tax years 2014 forward for 
various foreign jurisdictions. The Company believes that adequate amounts have been reserved for any adjustments that may 
ultimately result from any future examinations of these years. 

In the normal course of business, the Company is subject to tax audits in various jurisdictions, and such jurisdictions may 
assess additional income taxes or other taxes against it. Although the Company believes its tax estimates are reasonable, the 
final determination of tax audits and any related litigation could be materially different from the Company’s historical income 
tax provisions and accruals. The results of an audit or litigation could have a material adverse effect on the Company’s results 
of operations or cash flows in the period or periods for which that determination is made. 

13.  Accumulated Other Comprehensive Income (Loss): 

Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses 
on  available-for-sale  debt  securities.    See  the  Consolidated  Statements  of  Comprehensive  Income  for  the  effect  of  the 
components of comprehensive income on the Company’s net income. 

The components of accumulated other comprehensive income (loss), net of tax, are as follows:  

Foreign currency 
translation 
adjustments 

Net unrealized 
gains (losses) on 
marketable 
securities 

Accumulated 
other 
comprehensive 
income (loss) 

Balance at December 26, 2020 .........................................................  
Net current period other comprehensive income ..........................  
Reclassifications ...........................................................................  
Balance at January 1, 2022 ...............................................................  
Net current period other comprehensive loss ................................  
Reclassifications ...........................................................................  
Balance at December 31, 2022 .........................................................  

  $ 

  $ 

4,479     $ 
(2,715 )    
—      
1,764      
(8,879 )    
—      

(7,115 )   $ 

89     $ 

(537 )    
—      
(448 )    
(2,447 )    
—      

(2,895 )   $ 

4,568  
(3,252 ) 
—  
1,316  
(11,326 ) 
—  
(10,010 ) 

F-28 

 
 
 
 
 
 
 
   
   
 
   
   
   
   
 
 
   
   
 
   
   
   
   
   
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

14.  Segment Reporting and Geographic Information: 

The Company is engaged in the design, development, manufacture and support of high-performance control metrology, 
defect inspection, lithography and data analysis systems used by microelectronics device manufacturers. The Company and its 
subsidiaries  currently  operate  in  a  single  operating  segment:  the  design,  development,  manufacture  and  support  of  high-
performance  process  control  defect  inspection  and  metrology,  lithography  and  process  control  software  systems  used  by 
microelectronics device manufacturers. Therefore, the Company has one reportable segment. The Company’s chief operating 
decision maker is the Chief Executive Officer (the “CEO”). The CEO allocates resources and assesses performance of the 
business and other activities at the reportable segment level.  

The following table lists the different sources of revenue: 

December 31,  
2022 
Systems and software ..................................     $  865,707      
84,266      
Parts .............................................................      
55,210      
Services ........................................................      
Total revenue .......................................     $ 1,005,183      

Year Ended 
January 1,  
2022 
86 %   $ 669,114      
72,753      
8 %    
47,032      
6 %    
100 %   $ 788,899      

December 26,  
2020 
85 %   $  450,459      
65,444      
9 %    
40,593      
6 %    
100 %   $  556,496      

80 % 
12 % 
8 % 
100 % 

 The Company’s significant operations outside the United States include sales, service and application offices in Asia and 
Europe. For geographical revenue reporting, revenue is attributed to the geographic location to which the product is shipped. 
Revenue by geographic region is as follows: 

December 31,  
2022 

Year Ended 
January 1,  
2022 

December 26,  
2020 

Revenue from third parties: 

China ......................................................................................    $ 
South Korea ...........................................................................     
Taiwan ...................................................................................     
United States ..........................................................................     
Europe ....................................................................................     
Japan ......................................................................................     
Southeast Asia .......................................................................     

Total revenue .....................................................................    $ 

250,968     $ 
224,172      
199,104      
121,487      
80,256      
58,133      
71,062      
1,005,183     $ 

151,027     $ 
160,373      
194,458      
123,858      
64,943      
61,186      
33,054      
788,899     $ 

125,023  
90,193  
120,959  
81,708  
49,697  
59,295  
29,621  
556,496  

The following chart identifies our customers that represented 10% or more of total revenue for each of the last three fiscal 

years: 

Taiwan Semiconductor Manufacturing Co. Ltd..................................................  
Samsung Semiconductor.....................................................................................  
SK Hynix Inc. .....................................................................................................  
^ The customer accounted for less than 10% of total revenue during the period. 

2022 
15 % 
13 % 
11 % 

2021 
18 % 
16 % 
^ 

2020 
14 % 
15 % 
^ 

At December 31, 2022, two customers, Samsung Semiconductor and Taiwan Semiconductor Manufacturing Co. Ltd., 
accounted  for  more  than  10%  of  net  accounts  receivable.    At  January  1,  2022,  one  customer,  Taiwan  Semiconductor 
Manufacturing Co. Ltd., accounted for more than 10% of net accounts receivable. 

Substantially all of the Company’s long-lived assets are located within the United States of America. 

F-29 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
   
   
 
 
    
    
   
 
   
     
     
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
ONTO INNOVATION INC. 
NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS - (Continued) 
(In thousands, except per share data) 

15.  Earnings Per Share: 

Basic income per share is calculated using the weighted average number of shares of common stock outstanding during 
the period. Restricted stock units and stock options are included in the calculation of diluted earnings per share, except when 
their effect would be anti-dilutive. 

The Company’s basic and diluted earnings per share amounts are as follows:  

Numerator: 

Net income ...........................................................................................  

  $ 

223,334     $ 

142,349     $ 

31,025  

December 31, 
2022 

January 1, 
2022 

December 26,  
2020 

Denominator: 

Basic earnings per share - weighted average shares 
   outstanding ........................................................................................  
Effect of potential dilutive securities: 
Restricted stock units, employee stock purchase grants and stock 
   options - dilutive shares ....................................................................  
Diluted earnings per share - weighted average shares 
   outstanding ........................................................................................  

Earnings per share: 

49,424      

49,242      

49,136  

340      

486      

339  

49,764      

49,728      

49,475  

Basic ....................................................................................................  
Diluted .................................................................................................  

  $ 
  $ 

4.52     $ 
 $ 
4.49  

2.89     $ 
 $ 
2.86  

0.63  
0.63  

16.  Share Repurchase Authorization: 

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows the 
Company to repurchase up to $100,000 worth of shares of its common stock.  Repurchases may be made through both public 
market and private transactions from time to time with shares purchased being subsequently retired. During the twelve months 
ended  December  31,  2022,  the  Company  repurchased  and  retired  1,018  shares  of  its  common  stock  under  this  repurchase 
authorization and those shares were subsequently retired.  At December 31, 2022, there was $34,773 available for future share 
repurchases under this share repurchase authorization. 

The following table summarizes the Company’s stock repurchases: 

Shares of common stock repurchased ................................      
Cost of stock repurchased ..................................................     $ 
Average price paid per share .............................................     $ 

1,018      
65,257     $ 
64.09     $ 

—      
—     $ 
—     $ 

1,882  
52,000  
27.62  

Year Ended 

December 31,  
2022 

January 1,  
2022 

December 26,  
2020 

F-30 

 
 
 
 
 
   
   
 
   
     
     
 
 
    
    
   
   
 
    
    
   
   
   
 
    
    
   
 
 
 
 
 
 
   
   
 
 
ONTO INNOVATION INC. AND SUBSIDIARIES 

SCHEDULE OF VALUATION AND QUALIFYING ACCOUNTS 
(In thousands) 

Column A 

Description 
Fiscal Year 2022: 

Column B 
Balance at 
Beginning of 
Period 

Column C 

    Column D 

Column E 

Charged to (Recovery  
of) Costs and Expense     

Charged to Other  
Accounts (net) 

    Deductions 

Balance at 
End of Period 

Allowance for credit losses ....    $ 
Deferred tax valuation  
    allowance ...........................     

Fiscal Year 2021: 

Allowance for credit losses ....    $ 
Deferred tax valuation  
    allowance ...........................     

Fiscal Year 2020: 

Allowance for credit losses ....    $ 
Deferred tax valuation  
    allowance ...........................     
Allowance for convertible  
    notes receivable..................     

1,303     $ 

10,948      

784     $ 

356     $ 

824      

955     $ 

—  

 $ 

87  

 $ 

1,572  

—      

—      

11,772  

—  

 $ 

436  

 $ 

1,303  

14,238      

(3,290 )    

—      

—      

10,948  

1,247     $ 

327     $ 

—  

 $ 

790  

 $ 

784  

14,160      

2,000      

78      

—      

—      

—      

14,238  

—      

2,000      

—  

F-31 

 
 
  
 
   
   
 
 
   
   
 
 
    
    
    
    
   
 
    
    
    
    
   
 
    
    
    
    
   
PURSUANT TO THE REQUIREMENTS OF SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT 
OF 1934, THE REGISTRANT HAS DULY CAUSED THIS REPORT TO BE SIGNED ON ITS BEHALF BY THE 
UNDERSIGNED, THEREUNTO DULY AUTHORIZED. 

SIGNATURES 

Onto Innovation Inc. 
(Registrant) 

By: 

Date: 

/s/  Michael P. Plisinski 
Michael P. Plisinski 
Chief Executive Officer 
February 24, 2023 

PURSUANT TO THE REQUIREMENTS OF THE SECURITIES EXCHANGE ACT OF 1934, THIS REPORT 
HAS BEEN SIGNED BELOW BY THE FOLLOWING PERSONS ON BEHALF OF THE REGISTRANT AND IN 
THE CAPACITIES AND ON THE DATES INDICATED. 

Signature 

Title 

Date 

/s/ Michael P. Plisinski 

Michael P. Plisinski 

/s/  Mark R. Slicer 

Mark R. Slicer 

/s/  Leo Berlinghieri 

Leo Berlinghieri 

Chief Executive Officer (Principal 
Executive Officer) 

February 24, 2023 

  Senior Vice President, Chief Financial 
Officer (Principal Financial Officer and 
Principal Accounting Officer) 

February 24, 2023 

  Director 

February 24, 2023 

/s/  Stephen D. Kelley 

  Director 

February 24, 2023 

Stephen D. Kelley 

/s/  David B. Miller 

David B. Miller 

  Director 

February 24, 2023 

/s/  Karen M. Rogge 

  Director 

February 24, 2023 

Karen M. Rogge 

/s/  Christopher A. Seams 
Christopher A. Seams 

/s/ May Su 

May Su 

  Director 

  Director 

February 24, 2023 

February 24, 2023 

/s/  Christine A. Tsingos 

  Director 

February 24, 2023 

Christine A. Tsingos 

F-32 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
   
 
 
 
   
 
 
SUBSIDIARIES 

Exhibit 21.1 

Name 
Rudolph Technologies, Inc. 
4D Technology Corporation 
Inspectrology LLC 
Onto Innovation Japan Co. Ltd. 
Onto Innovation (Shanghai) Trading Co., Ltd. 
Nanometrics China Company Ltd. 
Onto Innovation Germany GmbH 
Onto Innovation Hong Kong Limited 
Onto Innovation Europe, B.V. 
Onto Innovation Switzerland GmBH 
Nanometrics U.K. Ltd. 
Nanometrics Israel, Ltd. 
Onto Innovation Korea Ltd. 
Onto Innovation Southeast Asia Pte. Limited 
Onto Innovation Ireland Limited 
Onto Innovation Malaysia Sdn. Bhd. 
Onto Innovation Vietnam PTE Company Limited 
Neta SAS 

Jurisdiction 
U.S.A. 
U.S.A. 
U.S.A. 
Japan 
China 
China 
Germany 
Hong Kong 
Netherlands 
Switzerland 
United Kingdom 
Israel 
Korea 
Singapore 
Ireland 
Malaysia 
Vietnam 
France 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
Rule 13a-14(a) Certification of Chief Executive Officer 
Pursuant to Section 302 of the Sarbanes-Oxley Act of  2002 

Exhibit 31.1 

I, Michael P. Plisinski, certify that: 

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.; 

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report; 

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods 
presented in this report; 

4. The  registrant’s  other  certifying  officer  and  I  are  responsible  for  establishing  and  maintaining  disclosure  controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have: 

a. 
Designed  such  disclosure  controls  and  procedures,  or  caused  such  disclosure  controls  and 
procedures to be designed under our supervision, to ensure that material information relating to the registrant, including 
its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which 
this report is being prepared; 

b. 
Designed  such  internal  control  over  financial  reporting,  or  caused  such  internal  control  over 
financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of 
financial  reporting  and  the  preparation  of  financial  statements  for  external  purposes  in  accordance  with  generally 
accepted accounting principles; 

c. 
Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented 
in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the 
period covered by this report based on such evaluation; and 

Disclosed in this report any change in the registrant’s internal control over financial reporting 
d. 
that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an 
annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control 
over financial reporting; and 

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over 
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons 
performing the equivalent functions): 

All significant deficiencies and material weaknesses in the design or operation of internal control 
a. 
over  financial  reporting  which  are  reasonably  likely  to  adversely  affect  the  registrant’s  ability  to  record,  process, 
summarize and report financial information; and 

b. 
significant role in the registrant’s internal control over financial reporting. 

Any fraud, whether or not material, that involves management or other employees who have a 

Date: February 24, 2023 

By: /s/ Michael P. Plisinski 
   Michael P. Plisinski 
   Chief Executive Officer 

 
 
 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
Exhibit 31.2 

Rule 13a-14(a) Certification of Chief Financial Officer 
Pursuant to Section 302 of the Sarbanes-Oxley Act of  2002 

I, Mark R. Slicer, certify that: 

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.; 

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report; 

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods 
presented in this report; 

4. The  registrant’s  other  certifying  officer  and  I  are  responsible  for  establishing  and  maintaining  disclosure  controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have: 

a. 
Designed  such  disclosure  controls  and  procedures,  or  caused  such  disclosure  controls  and 
procedures to be designed under our supervision, to ensure that material information relating to the registrant, including 
its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which 
this report is being prepared; 

b. 
Designed  such  internal  control  over  financial  reporting,  or  caused  such  internal  control  over 
financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of 
financial  reporting  and  the  preparation  of  financial  statements  for  external  purposes  in  accordance  with  generally 
accepted accounting principles; 

c. 
Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented 
in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the 
period covered by this report based on such evaluation; and 

d. 
Disclosed in this report any change in the registrant’s internal control over financial reporting 
that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an 
annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control 
over financial reporting; and 

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over 
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons 
performing the equivalent functions): 

All significant deficiencies and material weaknesses in the design or operation of internal control 
a. 
over  financial  reporting  which  are  reasonably  likely  to  adversely  affect  the  registrant’s  ability  to  record,  process, 
summarize and report financial information; and 

b. 
significant role in the registrant’s internal control over financial reporting. 

Any fraud, whether or not material, that involves management or other employees who have a 

Date: February 24, 2023 

By: /s/ Mark R. Slicer 
   Mark R. Slicer 
   Chief Financial Officer 

 
 
 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
CERTIFICATION OF CHIEF EXECUTIVE OFFICER 
PURSUANT TO 18 U.S.C. SECTION 1350, 
AS ADOPTED PURSUANT TO 
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 

Exhibit 32.1 

I, Michael P. Plisinski, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002, that the Annual Report of Onto Innovation Inc. on Form 10-K for the year ended December 31, 2022 fully 
complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934 and that the 
information contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition and 
results of operations of Onto Innovation Inc. 

Date: February 24, 2023 

By: /s/ Michael P. Plisinski 
   Michael P. Plisinski 
   Chief Executive Officer 

 
 
 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
CERTIFICATION OF CHIEF FINANCIAL OFFICER 
PURSUANT TO 18 U.S.C. SECTION 1350, 
AS ADOPTED PURSUANT TO 
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 

Exhibit 32.2 

I, Mark R. Slicer, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act 
of 2002, that the Annual Report of Onto Innovation  Inc. on Form 10-K for the year ended December 31, 2022 fully complies 
with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934 and that the information 
contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition and results of 
operations of Onto Innovation Inc. 

Date: February 24, 2023 

By: /s/ Mark R. Slicer 
   Mark R. Slicer 
   Chief Financial Officer 

 
 
 
 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
 
UNITED STATES SECURITIES AND EXCHANGE COMMISSION

Washington, D.C. 20549

SCHEDULE 14A

PROXY STATEMENT PURSUANT TO SECTION 14(a) OF

THE SECURITIES EXCHANGE ACT OF 1934

Filed by the Registrant 

Filed by a Party other than the Registrant 

Check the appropriate box:

 Preliminary Proxy Statement
 Confidential, for Use of the Commission Only (as permitted by Rule 14a-6(e)(2))
 Definitive Proxy Statement
 Definitive Additional Materials
 Soliciting Material Pursuant to Rule 14a-12

Onto Innovation Inc.

(Name of Registrant as specified in its charter)

(Name of Person(s) Filing Proxy Statement, if other than the Registrant)

Payment of Filing Fee (Check all boxes that apply):
 No fee required.
 Fee paid previously with preliminary materials.
 Fee computed on table in exhibit required by Item 25(b) per Exchange Act Rules 14a-6(i)(1) and 0-11.

NOTICE OF 2023 ANNUAL MEETING OF STOCKHOLDERS

Date:

Time:

Place:

Tuesday, May 9, 2023

12:00 p.m., Eastern Time

The Company’s offices located at 16 Jonspin Road, Wilmington, MA 01887

Record Date:

Only stockholders of record at the close of business on March 13, 2023 are entitled to vote at the 
meeting and any adjournment or postponement thereof for which no new record date is set.

Items of Business: 1.

To elect the Board’s eight nominees for director to serve until the next Annual Meeting and until 
their successors are duly elected and qualified;

2.

3.

4.

5.

To approve, on an advisory (non-binding) basis, the compensation of our named executive officers 
as disclosed in this proxy statement;

To  hold  an  advisory  (non-binding)  vote  on  the  frequency  of  advisory  votes  on  named  executive 
officer compensation;

To ratify the appointment of Ernst & Young LLP as our independent registered public accounting 
firm for the fiscal year ending December 30, 2023; and 

To transact such other business as may properly come before the meeting and any adjournment or 
postponement thereof.

These items of business are described more fully below in this proxy statement.  This year we will be providing access to our 
proxy materials via the Internet in accordance with the Securities and Exchange Commission’s “Notice and Access” rules.  On 
or about March 30, 2023, we will be mailing to our stockholders our Notice of Internet Availability of Proxy Materials, which 
contains instructions for accessing our 2023 proxy statement and 2022 annual report to stockholders and how to vote online.  
In addition, the Notice of Internet Availability of Proxy Materials will contain instructions on how to request a paper copy of 
the 2023 proxy statement and 2022 annual report to stockholders.

Your vote is important.  As always, we encourage you to vote your shares as soon as possible and prior to the Annual Meeting 
even if you plan to attend the Annual Meeting.  Voting early will ensure your shares are represented at the Annual Meeting, 
regardless of whether you attend the Annual Meeting.  You may cast your vote via the Internet, by telephone, or during the 
Annual Meeting.  If you receive a paper copy of the proxy card by mail, you may also mark, sign, date, and return the proxy 
card in the accompanying postage-prepaid envelope.

IMPORTANT NOTICE REGARDING THE AVAILABILITY OF PROXY MATERIALS FOR THE 

ANNUAL MEETING OF STOCKHOLDERS TO BE HELD MAY 9, 2023:

This notice, the proxy statement, and the 2022 Annual Report to Stockholders are available at:

https://www.ontoinnovation.com/ar-proxy

FOR THE BOARD OF DIRECTORS

Yoon Ah E. Oh
Corporate Secretary

Wilmington, Massachusetts
March 30, 2023

PROXY STATEMENT

TABLE OF CONTENTS

Forward Looking Statements
Proxy Summary
Onto Innovation Proxy Statement
Proposal 1 – Election of Directors
Nominees For Director
Corporate Governance Principles and Practices

Proposal 2 – Advisory Vote to Approve Executive Officer Compensation

Executive Officer Compensation
Compensation Committee Report on Executive Officer Compensation
Executive Officer Compensation Tables
CEO Pay Ratio

Proposal 3 -- Advisory Vote on the Frequency of  Advisory Votes on Named Executive Officer Compensation
Proposal 4 – Ratification of Appointment of Independent Registered Public Accounting Firm

Audit Committee Report
Executive Officer Biographies
Security Ownership of Certain Beneficial Owners
Equity Compensation Plan Information
Other Matters
Questions and Answers About the Annual Meeting
Additional Information

Page
1
2
5
6
9
14
25
26
44
45
54
56
57
60
61
63
64
64
65
70

Forward Looking Statements

Certain  statements  in  this  proxy  statement  of  Onto  Innovation  Inc.  (referred  to  in  this  proxy  statement,  together  with  its 
consolidated subsidiaries, unless otherwise specified or suggested by the context, as the “Company,” “Onto Innovation,”  “we,” 
“our,” or “us”) may be considered “forward-looking statements” or may be based on “forward-looking statements,” including, 
but not limited to, those concerning: our business momentum and future growth; technology development, product introduction 
and acceptance of our products and services; our manufacturing practices and ability to both deliver products and services 
consistent with our customers’ demands and expectations and to strengthen our market position, including our ability to source 
components, materials, and equipment due to supply chain delays or shortages; our expectations of the semiconductor market 
outlook; future revenue, gross profits, research and development and engineering expenses, selling, general and administrative 
expenses, and cash requirements; the effects of political, economic, legal, and regulatory changes or conflicts on our global 
operations; the effects of natural disasters or public health emergencies, such as the current COVID-19 pandemic, on the global 
economy  and  on  our  customers,  suppliers,  employees,  and  business;  our  dependence  on  certain  significant  customers  and 
anticipated trends and developments in and management plans for our business and the markets in which we operate; our ability 
to be successful in managing our cost structure and cash expenditures and results of litigation; as well as other matters that are 
not purely historical data. Statements contained or incorporated by reference in this proxy statement that are not purely historical 
are forward-looking statements and are subject to safe harbors created under Section 27A of the Securities Act of 1933, as 
amended, Section 21E of the Securities Exchange Act of 1934, as amended (the “Exchange Act”), and the Private Securities 
Litigation Reform Act of 1995. Forward-looking statements may be identified by words such as, but not limited to, “anticipate,” 
“believe,” “continue,” “estimate,” “expect,” “intend,” “plan,” “should,” “may,” “could,” “will,” “would,” “forecast,” “project” 
and words or phrases of similar meaning, as they relate to our management or us. Forward-looking statements contained herein 
reflect  our  current  expectations,  assumptions  and  projections  with  respect  to  future  events  and  are  subject  to  certain  risks, 
uncertainties and assumptions, such as those identified in Part I, Item 1A. “Risk Factors” of our Form 10-K for the fiscal year 
ended December 31, 2022. Actual results may differ materially and adversely from those included in such forward-looking 
statements. Forward-looking statements reflect our position as of the date of this report and we undertake no obligation to 
update any forward-looking statements, whether as a result of new information, future events or otherwise, except as required 
by law. 

1

PROXY SUMMARY
This summary highlights information contained elsewhere in the proxy statement. This summary does not contain all of the 
information that you should consider, and you should read the entire proxy statement carefully before voting.

 Stockholder Voting Matters

Voting Matter

Proposal 1:   Election of Directors

Proposal 2:   Advisory Vote to Approve Named Executive Officer 
Compensation

Proposal 3:   Advisory Vote on the Frequency of Advisory Votes on 
Named Executive Officer Compensation

EVERY 1 YEAR

Proposal 4:   Ratification of Appointment of Independent Registered 
Public Accounting Firm for the Fiscal Year Ending December 30, 2023

FOR

 Corporate Governance Highlights

Snapshot Of Board Composition

Board Vote 
Recommendation

Page Reference for 
more information

FOR ALL

FOR

6

25

56

57

The following table presents a snapshot of the expected composition of the Onto Innovation Board of Directors (the “Board”) 
immediately following the 2023 Annual Meeting, assuming the election of all nominees named in the proxy statement.

 Board Characteristic

Total Number of Directors

Percentage of Independent Directors

Average Age of Directors (years)

Average Tenure of Directors (years)

Separate Chairperson and CEO roles

Independent Chairperson

Audit Committee Financial Experts

Female Director Representation

Race/Ethnicity Diversity Representation

2

Onto 
Innovation

8

87.5%

63.4

6.1

Yes

Yes

2

37.5%

12.5%

 
 
 
 
 
 
 
 
Snapshot Of Board Governance And Compensation Policies

The following table presents a snapshot of the Onto Innovation Board governance and compensation policies currently in effect.

Policy

Majority Voting for All Directors

Regular Executive Sessions of Independent Directors

Annual Board, Committee, and Director Evaluations

Risk Oversight by Full Board and Committees

Independent Audit, Compensation, and Nominating & Governance Committees

Code of Business Conduct and Ethics for Employees and Directors

Financial Information Integrity Policy

Stock Ownership Requirement for Directors

Stock Ownership Requirement for CEO

Stock Ownership Requirement for other NEOs

Stock-Based Award Grant Date Policy

Anti-Hedging, Anti-Short Sale & Anti-Pledging Policies

Incentive Compensation Clawback Policy

No Tax Gross-Up Provisions

No Poison Pill

Stock Buyback Program

Double Trigger Change-in-Control Provisions for Executive Officers

Annual Environmental, Social, and Governance Report

3

Onto Innovation

Yes

Yes

Yes

Yes

Yes

Yes

Yes

3x annual retainer

3x base salary

1x base salary

Yes

Yes

Yes

Yes

Yes

Yes

Yes

Yes

Snapshot Of Board Governance And Compensation Policies Newly Implemented Or Adjusted In Past Year

The  following  presents  a  snapshot  of  the  Onto  Innovation  Board  governance  and  compensation  policies  that  were  newly 
implemented or adjusted in the past year.

•  After the 2022 Annual Meeting of Stockholders, the following actions were taken with regard to the composition 

and leadership structure of the Board and standing committees of the Board:
◦  As previously disclosed, Edward J. Brown Jr. and Bruce C. Rhine each retired from the Board following the 

conclusion of their terms as of the 2022 Annual Meeting.

◦  The Audit Committee was reduced to three members: Karen M. Rogge, May Su, and Christine A. Tsingos, with 

Ms. Tsingos serving as Chairperson.

◦  David B. Miller was appointed Chairperson of the Compensation Committee following Mr. Brown’s retirement.  

The other members of the Compensation Committee are currently Leo Berlinghieri, and Mses. Su, and Tsingos.
◦  The Nominating & Governance Committee was reduced to three members: Messrs. Berlinghieri, Miller, and 

Seams, with Mr. Berlinghieri serving as Chairperson.

•  The Board formed a new standing M&A Committee with the following members: Christopher A. Seams, Ms. Rogge 

and Mr. Miller, with Mr. Miller serving as Chairperson.

•  The  annual  review  of  the  charters  for  the  Audit,  Compensation  and  Nominating  &  Governance  Committees  was 
performed  and  completed.    The  Board  also  reviewed  and  approved  updates  to  the  Company’s  Code  of  Business 
Conduct and Ethics, Related Parties Transaction Policy, Financial Information Integrity Policy, Investment Policy, 
Incentive  Compensation  Clawback  Policy,  and  Corporate  Governance  Guidelines  (formerly,  the  Summary  of 
Corporate Governance Policies).

•  The  Board  approved  a  new  Insider  Trading  Policy  which,  includes,  among  other  things,  a  prohibition  against  all 
pledging  of  company  securities  as  collateral  for  loans  by  directors,  employees  and  other  individuals  and  entities 
covered by the Insider Trading Policy.

•  The Compensation Committee approved a new Stock-Based Award Grant Date Policy, which establishes the dates 
upon which the Company will grant stock-based awards to directors, officers, and other employees of the Company, 
including annual grants as well as grants for promotions, new hires, retention and other special circumstances.

• 

In January 2023, the Board appointed Stephen D. Kelley to the Board and to the Audit Committee.

4

__________________________________________

PROXY STATEMENT
__________________________________________

The  proxy  detailed  herein  is  solicited  on  behalf  of  the  Board  of  Directors  (the  “Board”  or  “Board  of  Directors”)  of  Onto 
Innovation for use at the 2023 Annual Meeting of Stockholders to be held May 9, 2023 at 12:00 p.m. Eastern Time (the “Annual 
Meeting”), or at any adjournment or postponement thereof, for the purposes set forth herein and in the accompanying Notice 
of Annual Meeting of Stockholders. The Annual Meeting will be held at the Company’s principal executive offices located at 
16  Jonspin  Road,  Wilmington,  MA  01887.  Directions  to  the  Annual  Meeting  may  be  found  on  our  website 
(www.ontoinnovation.com) by clicking on “Company,” “Locations,” “Massachusetts” and then accessing the interactive map. 
The Company’s telephone number is (978) 253-6200.

On or about March 30, 2023, we will furnish a Notice of Internet Availability of Proxy Materials (“Notice”) to our stockholders 
containing instructions on how to access the proxy materials online at:

https://www.ontoinnovation.com/ar-proxy

Instructions on how to vote online and to request a printed copy of the proxy materials may be found in the Notice.  If you 
receive a Notice by mail, you will not receive a paper copy of the proxy materials unless you request such materials by following 
the instructions contained in the Notice.  Your vote is important, regardless of the extent of your holdings. 

5

PROPOSAL 1

ELECTION OF DIRECTORS

 Nominees

The Company’s Amended and Restated Certificate of Incorporation provides that directors shall be elected at each Annual 
Meeting of Stockholders, and that each director of the Company shall serve until the expiration of the term for which he or she 
is elected and until his or her successor is duly elected and qualified, or until his or her earlier death, resignation, disqualification 
or removal.

Based on the recommendation of the Nominating & Governance Committee, the eight director nominees approved by the Board 
for inclusion in this proxy statement and for election at the Annual Meeting are:

Leo Berlinghieri

Stephen D. Kelley   David B. Miller Michael P. Plisinski

Karen M. Rogge Christopher A. Seams May Su Christine A. Tsingos

Each  nominee  is  currently  serving  as  a  director  of  Onto  Innovation.  In  making  its  recommendations,  the  Nominating  & 
Governance  Committee  considered  a  number  of  factors,  including  its  criteria  for  Board  membership,  which  include  the 
qualifications that must be possessed by a director candidate in order to be nominated for a position on our Board. Each nominee 
has indicated that he or she will serve if elected. Unless otherwise instructed, the proxy holders will vote the proxies received 
by them for the Company’s eight nominees.  In the event that any nominee of the Company becomes unable or unavailable to 
serve as a director at the time of the Annual Meeting (which we do not anticipate) the proxy holders will vote the proxies for 
any substitute nominee who is designated by the current Board to fill the vacancy.  Alternatively, the Board, in its discretion, 
may elect not to nominate a substitute and to reduce the size of the Board.  We do not have any reason to believe that any of 
the nominees will be unable or will decline to serve as a director.

 Board Composition And Refreshment

A priority of the Nominating & Governance Committee and the Board as a whole is making certain that the composition of the 
Board  reflects  the  desired  professional  experience,  skills,  and  backgrounds  in  order  to  present  an  array  of  viewpoints  and 
perspectives, help develop and execute strategy for the future, and effectively represent the long-term interests of stockholders. 
Further, the Board recognizes the importance of Board refreshment in order to continue to achieve an appropriate balance of 
tenure, turnover, diversity, and skills on the Board.

 Vote Required

Pursuant to the Company’s Amended and Restated Bylaws (“Bylaws”), our directors are elected by the affirmative vote of the 
majority of the votes cast (provided, however, that if the number of nominees exceeds the number of directors to be elected, 
directors will be elected by a plurality voting standard). In order for a director in an uncontested election to be elected, the 
number of votes cast “for” his/her election must exceed the number of votes cast “against” his/her election (with “abstentions” 
and “broker non-votes” not counted as a vote cast either “for” or “against” that director’s election). If a nominee who is an 
incumbent director receives a greater number of “against” votes for election than “for” votes in an uncontested election and is 
not elected, our Corporate Governance Guidelines provide that such director must promptly tender a resignation to the Board. 
Our Nominating & Governance Committee would then make a recommendation to the Board on whether to accept or reject 
the  tendered  resignation,  or  whether  other  action  should  be  taken.  Within  90  days  after  the  date  of  the  certification  of  the 
election results, our Board will act on any such tendered resignation and publicly disclose (in a press release, a filing with the 
SEC or other broadly disseminated means of communication) its decision regarding the tendered resignation and the rationale 
behind the decision.

6

 Information About The Nominees And Continuing Directors

Our Board and its Nominating & Governance Committee believe that all of the director nominees are highly qualified, have 
demonstrated leadership skills, and have the requisite experience and judgment in areas that are relevant to our business. We 
believe that their ability to challenge and stimulate management and their dedication to the affairs of the Company collectively 
serve the interests of the Company and its stockholders.  The Company is unaware of any arrangements or understandings 
between any director or nominee and any other person(s) pursuant to which any director or nominee was or is to be selected.

The eight nominees for director are set forth below. All information is as of the record date.  

Name
Nominee Directors:

Principal Occupation

Board Tenure(1)

Leo Berlinghieri

Former President and Chief Executive Officer of MKS Instruments, Inc.

14.5 years

Stephen D. Kelley

President and Chief Executive Officer of Advanced Energy Industries, Inc.

       <0.2 year

David B. Miller

Former President of DuPont Electronics & Communications

Michael P. Plisinski

Chief Executive Officer of Onto Innovation Inc.

Karen M. Rogge

President of RYN Group LLC, and Former Senior Vice President and 
Chief Financial Officer of Extreme Networks, Inc.

Christopher A. Seams

Former Chief Executive Officer of Deca Technologies Inc.

May Su

Former Chief Executive Officer of Kateeva, Inc.

Christine A. Tsingos

Former Executive Vice President and Chief Financial Officer of 
Bio-Rad Laboratories, Inc.

7.7 years

7.4 years

1.5 years

7.6 years

1.1 years

8.9 years

(1) On October 25, 2019 (the “Merger Date”), Rudolph Technologies, Inc. merged with and into Nanometrics Incorporated, which was then 
renamed  Onto  Innovation  Inc.  (the  “2019  Merger”).  Unless  otherwise  indicated  or  context  otherwise  requires,  as  used  herein 
“Nanometrics”  refers  to  Nanometrics  Incorporated  and  its  subsidiaries  prior  to  the  Merger  Date  and  “Rudolph”  refers  to  Rudolph 
Technologies, Inc. and its subsidiaries prior to the Merger Date. Board tenure includes time served on the Rudolph Board of Directors or 
the Nanometrics Board of Directors, as applicable, prior to the Merger Date. 

There are no family relationships between any directors or executive officers of the Company.  The Nominating & Governance 
Committee considered the professional experience, skills, and backgrounds of the nominees and recommended the nominees 
to the full Board.

7

  
  
The following reflects additional information regarding the background and qualifications of our director nominees, including 
the experience and skills that support the Board’s determination that each director nominee should serve on our Board.

The director nominees for 2023 voluntarily self-identified with the following diversity characteristics:

• Gender Self-Identification:  
•
•

Race/Ethnicity Identification:
LGBTQ+ Identification:

62.5% Male / 37.5% Female
87.5% White / 12.5% Asian
None

8

NOMINEES FOR DIRECTOR

 Leo Berlinghieri

Director Since:

Age:

Independent Status:

Board Committee(s):

July 2008

69

Independent Director

Nominating & Governance (Chairperson), Compensation

Other Public Company Boards: MKS Instruments, Inc. (2005-2013)

From July 2005 to December 2013, Mr. Berlinghieri served as President and Chief Executive Officer of MKS Instruments, 
Inc., a critical subsystem and instrument provider to the semiconductor industry. From April 2004 to July 2005, Mr. Berlinghieri 
served as President and Chief Operating Officer, and prior to that served as Vice President and Chief Operating Officer from 
July 2003 to April 2004, at MKS Instruments, Inc.  Mr. Berlinghieri also served on the Advisory Board of Unipower, LLC 
from  2017  to  2019,  as  a  director  on  the  North  America  Advisory  Board  of  Semiconductor  Equipment  and  Materials 
International (SEMI) from 2005 to 2013, holding the role of chairperson in 2012 and 2013, and on the Board of Directors of 
the Massachusetts High Technology Council, Inc. from 2006 to 2013.

Key Qualifications, Attributes, Skills and Experience

Mr.  Berlinghieri  has  over  34  years  of  experience  in  the  semiconductor  industry  and  extensive  international,  financial,  and 
operations  experience  through  his  various  roles  with  MKS  Instruments,  Inc.,  including  Chief  Executive  Officer,  Chief 
Operating Officer and Vice President of Global Sales and Service.

 Stephen D. Kelley

Director Since:

Age:

Independent Status:

Board Committee(s):

January 2023

60

Independent Director

Audit

Other Public Company Boards: Advanced Energy Industries, Inc. (since March 2021)

Amkor Technology, Inc. (2013-2020)

Mr.  Kelley  has  served  President  &  Chief  Executive  Officer  of  Advanced  Energy  Industries,  Inc.,  which  designs  and 
manufactures highly engineered power delivery systems for semiconductor wafer fabrication equipment and other mission-
critical applications, since March 2021. Previously, Mr. Kelley served as President and Chief Executive Officer of Amkor 
Technology, Inc., a leading semiconductor package and test company, from May 2013 to June 2020. Prior to joining Amkor, 
Mr. Kelley served as Senior Advisor to Advanced Technology Investment Company, the Abu Dhabi-sponsored investment 
company that owned GlobalFoundries Inc. at the time, from June through November 2012. Mr. Kelley served as Executive 
Vice President and Chief Operating Officer of Cree, Inc. from 2008 to 2011. Previously, Mr. Kelley held executive leadership 
roles  at  Texas  Instruments  Inc.  and  Philips  Semiconductors.  Mr.  Kelley  holds  a  Bachelor  of  Science  degree  in  Chemical 
Engineering from the Massachusetts Institute of Technology and a Juris Doctor degree from Santa Clara University. 

Key Qualifications, Attributes, Skills and Experience

With over 30 years of leadership experience in the semiconductor industry, Mr. Kelley has a comprehensive understanding of 
our industry and extensive management experience, and also possesses first-hand knowledge of our customer base and has 
in-depth experience in strategic planning, business development, technology, manufacturing, and operations relevant to our 
business.  Mr. Kelley was recommended to serve on our Board by a third-party search firm.

9

 David B. Miller

Director Since:

Age:

Independent Status:

Board Committee(s):

July 2015

66

Independent Director

Compensation (Chairperson), Nominating & Governance, 
M&A (Chairperson)

Other Public Company Boards: Merrimac Industries, Inc. (2002-2008)

Mr. Miller served as Rudolph’s non-executive Chairperson from August 2018 through the Merger Date. From June 1981 to 
November 2015, Mr. Miller served in various positions, most recently as President, at DuPont Electronics & 
Communications, an electronic materials company.  Mr. Miller previously served as the President of the University of 
Virginia School of Engineering & Applied Science Foundation from 2016 to 2018.  Mr. Miller served on the board of 
directors of Semiconductor Equipment and Materials International (SEMI) from 2011 to 2015 and on the board of the North 
Carolina Chamber of Commerce from 2010 to 2015.  He has also served on several electronics joint venture boards in the 
U.S. and Asia.  Mr. Miller holds a Bachelor of Science degree in Electrical Engineering from the University of Virginia.

Specific Qualifications, Attributes, Skills and Experience

Mr. Miller has over 40 years of experience in the electronics industry.  In his prior roles, including as President of DuPont 
Electronics & Communications, he had oversight of technology advancement, complex financial transactions, profit and loss 
responsibility and investor relations, and brings substantial management and market expertise to the Board.  Mr. Miller also 
has substantial international experience, having served on several electronics joint venture boards in the U.S. and Asia as well 
as on the board of SEMI International.  

 Michael P. Plisinski

Director Since:

Age:

Independent Status:

Board Committee(s):

November 2015

53

Non-Independent Director

None

Other Public Company Boards: None

Mr. Plisinski has served as the Company’s Chief Executive Officer since the Merger Date and was previously Chief Executive 
Officer of Rudolph from November 2015 through the Merger Date.  Prior to his appointment as Rudolph’s CEO, Mr. Plisinski 
served as Rudolph’s Executive Vice President and Chief Operating Officer from October 2014 to November 2015 and as Vice 
President and General Manager, Data Analysis and Review Business Unit from February 2006, when Rudolph merged with 
August  Technology  Corporation,  a  provider  of  process  control  equipment  for  thin  film  measurement  and  macro  defect 
inspection,  until  October  2014.  From  February  2004  to  February  2006,  Mr.  Plisinski  served  as  August  Technology’s  Vice 
President of Engineering and, from July 2003 to February 2004, as its Director of Strategic Marketing for review and analysis 
products. Mr. Plisinski joined August Technology in connection with its acquisition of Counterpoint Solutions, a supplier of 
optical  review  and  automated  metrology  equipment  to  the  semiconductor  industry,  where  he  was  both  sole  founder  and 
President from June 1999 to July 2003.  Since August 2020, Mr. Plisinski has served on the Board of Cognizer.AI, a software 
company  that  specializes  in  deep-learning  powered  natural  language  intelligence.  Mr.  Plisinski  has  a  Bachelor  of  Science 
degree in Computer Science from the University of Massachusetts and has completed the Advanced Management Program 
from Harvard Business School.

Key Qualifications, Attributes, Skills and Experience

Mr. Plisinski brings to our Board of Directors insights based on his leadership roles at the Company and his deep knowledge 
of our products, markets, customers, culture, and organization.

10

 Karen M. Rogge

Director Since:

Age:

Independent Status:

Board Committee(s):

September 2021

68

Independent Director

Audit, M&A

Other Public Company Boards: GigCapital5, Inc. (since February 2023)

Rambus Inc. (since April 2021)
Kemet Corporation (2018-2020)
AeroCentury Corp. (2017-2018)

Ms. Rogge is president of the RYN Group LLC, a management consulting business, which she founded in 2010. She served as 
the Interim Vice President and Chief Financial Officer of Applied Micro Circuits Corporation, a semiconductor company, from 
2015 to 2016. Previously, Ms. Rogge served as the Senior Vice President and Chief Financial Officer of Extreme Networks, a 
computer network company, from 2007 to 2009. Earlier in her career, she held executive financial and operations management 
positions at Hewlett Packard Company and Seagate Technology. Ms. Rogge holds a Master of Business Administration degree 
from Santa Clara University, and a Bachelor of Science degree in business administration from California State University, 
Fresno. She maintains a National Association of Corporate Directors (NACD) Board Leadership Fellow credential and has 
attended the Stanford Directors College.  Ms. Rogge also serves as a director of GigCapital6, Inc., a privately held special 
purpose acquisition company.

Key Qualifications, Attributes, Skills and Experience

Ms. Rogge has substantial financial and  international experience gained in her roles as Chief Financial Officer of Applied 
Micro Circuits Corporation and Extreme Networks as well as in executive financial and operations roles at Hewlett Packard 
Company and Seagate Technology.  From her prior roles she also gained a broad array of technological exposure, interaction, 
and understanding.

 Christopher A. Seams

Director Since:

Age:

Independent Status:

Board Committee(s):

August 2015

60

Independent Director

Nominating & Governance, M&A

Other Public Company Boards: Xperi Inc. (since October 2013)

Mr.  Seams  served  as  Chief  Executive  Officer  of  Deca  Technologies  Inc.,  a  wafer-level  electronic  interconnect  solutions 
provider to the semiconductor industry, from June 2013 to August 2016. Prior to Deca Technologies, Mr. Seams served as 
Executive  Vice  President  of  sales  and  marketing  at  Cypress  Semiconductor,  a  semiconductor  design  and  manufacturing 
company, and held various technical and operational management positions in its manufacturing, development, and operations. 
Prior to joining Cypress in 1990, Mr. Seams worked in process development for Advanced Micro Devices and Philips Research 
Laboratories. Mr. Seams earned his Bachelor of Science degree in electrical engineering from Texas A&M University and his 
master’s degree in electrical and computer engineering from the University of Texas at Austin. Mr. Seams has a Professional 
Certificate in Advanced Computer Security from Stanford University and is a senior member of the Institute of Electrical and 
Electronics Engineers. Mr. Seams is a member of the American College of Corporate Directors (ACCD) as well as a member 
and Certified Director of the National Association of Corporate Directors (NACD).

Key Qualifications, Attributes, Skills and Experience

Mr. Seams has over 30 years of experience within the semiconductor industry.  During that time he has gained substantial 
management, financial and international experience as a senior leader at multiple companies.  He also brings to the Board 
technology  and  innovation  experience  gained  through  an  array  of  technical  and  operational  management  positions  in 
manufacturing, development, operations, and process development. 

11

 May Su

Director Since:

Age:

Independent Status:

Board Committee(s):

March 2022

65

Independent Director

Audit, Compensation

Other Public Company Boards: Kateeva, Inc. (2020-2022)

Ms. Su served as Chief Executive Officer of Kateeva, Inc., a company that builds inkjet deposition equipment solutions, from 
March 2020 to October 2022.  Prior to becoming Chief Executive Officer, Ms. Su served as Kateeva’s Chief Marketing Officer 
starting in January 2018 and added the role of Senior Vice President of Sales in May 2019.  Before joining Kateeva, Ms. Su 
was an independent consultant from 2016 to 2018. From 2012 to 2016, Ms. Su served in an array of senior management roles, 
including Vice President, Strategic Marketing and Vice President Strategic OEM Sales, for Brooks Automation, Inc., a provider 
of automation, vacuum and instrumentation equipment for multiple markets, including semiconductor manufacturing. From 
2009  to  2012,  Ms.  Su  served  as  Vice  President  and  General  Manager  for  Crossing  Automation  Inc.,  a  manufacturer  of 
fabrication and tool automation products, which was acquired by Brooks Automation in 2012.  Before her role at Crossing 
Automation, Ms. Su was President of U.S. & European Field Operations for Nova Measuring Instrument, Inc., a provider of 
metrology devices for advanced process control used in semiconductor manufacturing, and held other senior management roles 
with Aviza Technology, Inc., New-Wave Research, KLA-Tencor Corporation and Lam Research Corporation.  Ms. Su holds 
a Bachelor of Science degree in mechanical engineering from Cornell University, a Master of Science degree in mechanical 
engineering  from  University  of  California-Berkeley,  and  a  Master  of  Business  Administration  degree  from  Santa  Clara 
University, Leavey School of Business. Ms. Su also serves on the board of directors of Applied Engineering, Inc., a high-tech 
contract manufacturing company.

Key Qualifications, Attributes, Skills and Experience
Ms. Su has over 40 years of experience within the semiconductor capital equipment industry.  During that time she has 
gained substantial management, international and financial experience in her role as Chief Executive Officer of Kateeva, Inc., 
as well as in other executive and general manager roles.

 Christine A. Tsingos

Director Since:

Age:

Independent Status:

Board Committee(s):

May 2014

64

Independent Director

Audit (Chairperson), Compensation

Other Public Company Boards: Envista Holdings Corporation (since September 2019)

Varex Imaging Corporation (since February 2017)
Telesis Bio Inc. (since May 2021)

Ms. Tsingos served as the Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories, a manufacturer and 
distributor of life science research and clinical diagnostics products, from December 2002 through May 2019. Prior to Bio-
Rad, Ms. Tsingos held executive positions at Autodesk, The Cooper Companies, and Attest Systems. Ms. Tsingos earned a 
Bachelor of Arts degree in International Studies from the American University in Washington, D.C. and a Master of Business 
Administration degree in International Business from the George Washington University. In 2010, Ms. Tsingos was awarded 
the prestigious Bay Area CFO of the Year. 

Key Qualifications, Attributes, Skills and Experience
Ms. Tsingos has over 30 years of financial and operational experience with a series of companies, including 16 years of service 
as Chief Financial Officer of Bio-Rad Laboratories through which she also gained comprehensive international experience.  
Ms. Tsingos also has significant experience and knowledge of both the Company and the semiconductor industry derived from 
nine years of dedicated service on the Boards of Directors of Nanometrics and the Company.

12

The Board recommends voting “FOR” 
all of the nominees set forth above.

13

CORPORATE GOVERNANCE PRINCIPLES AND PRACTICES

Onto  Innovation  is committed  to  sound  and effective  corporate  governance  practices.  Having such  practices  is essential to 
running  our  business  efficiently  and  maintaining  our  integrity  in  the  marketplace.  The  major  components  of  our  corporate 
governance practices are described below.

 Board Leadership Structure

In accordance with our sound and effective corporate governance practices, the roles of Chief Executive Officer (“CEO”) and 
Chairperson of the Board are held by separate individuals.  Our Board is led by Christopher A. Seams, who is an independent 
director and has served as Chairperson of the Board since the Merger Date.  The Board’s primary responsibility is to oversee 
management of the company.  Company management is led by Michael P. Plisinski, who has served as our CEO and a director 
since the Merger Date.  

Our Board is currently comprised of one non-independent director, Mr. Plisinski, and seven independent directors, each of 
whom has been affirmatively determined by our Board to meet the criteria for independence established by the Securities and 
Exchange Commission (“SEC”) and the New York Stock Exchange (“NYSE”).  The independent directors meet periodically 
in executive session chaired by the Chairperson without the CEO or other management present. Furthermore, each director is 
encouraged to suggest items for the Board agenda in advance of any meeting and to raise at any Board meeting subjects that 
are not on the agenda for that meeting.

The  Board  believes  that,  at  the  current  time,  the  designation  of  an  independent  Chairperson  of  the  Board  facilitates  the 
functioning of the Board, while leaving the CEO with the responsibility for setting the strategic direction for the Company and 
for the day-to-day leadership and performance of the Company.  The independent Chairperson of the Board:

• 

Presides at all meetings of the stockholders and the Board at which he or she is present;

•  Establishes the agenda for each Board and stockholder meeting; 

•  Calls and prepares the agenda for and presides over separate executive sessions of the independent directors; 

•  Acts as a liaison between the independent directors and the Company’s management; and

• 

Performs such other powers and duties as may from time to time be assigned by the Board or as may be prescribed by 
the Company’s Bylaws. 

 Board Meetings

In 2022, each incumbent director attended at least 96% of the aggregate of the total number of Board meetings and the total 
number of meetings of Board committees on which such director served during the time such director served on the Board. 
Edward J. Brown, Jr. and Bruce C. Rhine both attended 75% or more of the Board meetings and meetings of committees on 
which they served that were held during 2022 until the Company’s 2022 Annual Meeting date at which Messrs. Brown and 
Rhine did not stand for reelection to the Board.  While the Company does not currently have a formal policy regarding the 
attendance of directors at the Annual Meeting of stockholders, directors are encouraged to attend. All members of the Board 
who stood for reelection at the Company’s 2022 Annual Meeting of Stockholders attended the Annual Meeting.

In 2022, the Board held a total of six Board meetings.  On four occasions during 2022 the Company’s Board met in executive 
session in which only the independent Board members were present.

14

 Board Independence

The Board makes an annual determination as to the independence of each of our Board members under the current standards 
for “independence” established by the NYSE and the SEC. The Board has determined that the following nominees for election 
as directors to our Board are independent under the NYSE Listing Rules and SEC rules: Leo Berlinghieri, Stephen  D. Kelley, 
David B. Miller, Karen M. Rogge, Christopher A. Seams, May Su, and Christine A. Tsingos.  Michael P. Plisinski, due to his 
position as our CEO, is not considered to be independent.  The two directors who did not stand for re-election in 2022, Edward 
J. Brown, Jr. and Bruce C. Rhine were both determined by the Board to be independent under applicable NYSE and SEC rules.  

During 2022, none of the independent members of our Board was a party to any transactions, relationships, or arrangements 
that were considered by the Board to impair his or her independence. 

 Oversight Of Risk

One of the Board’s primary responsibilities is reviewing the Company’s strategic plans and objectives, including oversight of 
the principal risk exposures of the Company. In particular, the Board is responsible for monitoring and assessing strategic risk 
exposure, including determining the nature and level of risk appropriate for the Company. The Board does not have a standing 
risk management committee, but rather administers this oversight function directly through the Board as a whole, as well as 
through  the  standing  Board  committees,  which  address  risks  inherent  in  their  respective  areas  of  oversight.  The  Audit 
Committee,  along  with  the  Nominating  and  Governance  Committee,  assists  the  Board  in  oversight  and  monitoring  of  the  
financial  and  legal  risks  facing  the  Company,  management’s  approach  to  addressing  these  risks  and  strategies  for  risk 
mitigation.  On at least an annual basis, the Audit Committee reviews, and discusses with management, policies and systems 
pursuant to which management addresses risk, including risks associated with our audit, financial reporting, internal control, 
disclosure  control,  cybersecurity,  regulatory  compliance  and  investment  policies.  Our  Compensation  Committee,  at  least 
annually, reviews our compensation program to ensure that it does not encourage excessive risk-taking.  Our Nominating & 
Governance Committee oversees risks related to governance issues, such as succession planning.  It also monitors and oversees 
legal compliance and compliance with the Company’s Code of Business Conduct and Ethics, including the investigation and 
enforcement of the provisions of the Code of Business Conduct and Ethics.  Each of our Committees regularly reviews with 
our Board any issues that arise in connection with the risk matters within the scope of its responsibilities and, in accordance 
with our Corporate Governance Guidelines, our full Board regularly engages in discussions of risk management to assess major 
risks facing our Company and review options for the mitigation of such risks. As a result of the foregoing, we believe that our 
CEO, together with the Chairpersons of our Audit, Compensation and Nominating & Governance Committees and our full 
Board, provide effective oversight of Company risk.

As part of the Company’s cybersecurity initiatives, we have established the Cyber Security Council (“CSC”), a cybersecurity 
oversight committee composed of members of the management team.  The CSC oversees and is responsible for the executive 
level supervision of the Company’s cybersecurity risk, information security, and technology risk, as well as the Information 
Technology department’s actions to identify, assess, mitigate, and remediate cyber related issues. The CSC receives regular 
quarterly reports from the Vice President of Information Technology on the Company’s cybersecurity risk profile and enterprise 
cybersecurity program and meets with the Board’s Audit Committee on at least a quarterly basis. The CSC annually reviews 
and recommends the Company’s information security policy and information security program to the Board for approval. The 
Board reviews and discusses the Company’s technology strategy with the Vice President of Information Technology on an 
annual basis and approves the Company’s technology strategic plan. 

15

 Board Committees

The Board has four standing committees with separate chairpersons: the Audit, Compensation, Nominating & Governance, and 
M&A Committees. Each of the Board committees is composed solely of independent directors and has adopted a written charter 
that  sets  forth  the  specific  responsibilities  and  qualifications  for  membership  on  the  committee.  The  charters  of  these 
committees are available on our website at https://investors.ontoinnovation.com/governance/governance-documents/.

In 2022, the composition of and number of meetings held by the Company’s Board committees were as follows:

Committee Chairperson

Committee Members

Number of Meetings
Held in 2022

Christine A. Tsingos

Audit Committee

Edward J. Brown, Jr.1
Bruce C. Rhine1
Karen M. Rogge
Christopher A. Seams2
May Su3

Nominating & Governance Committee

Leo Berlinghieri

David B. Miller6

David B. Miller

David B. Miller
Bruce C. Rhine1
Christopher A. Seams
Compensation Committee
Edward J. Brown, Jr.4
Leo Berlinghieri
May Su5
Christine A. Tsingos

M&A Committee

Karen M. Rogge
Christopher A. Seams

10

6

6

2

1

2

3

4

5

6

Committee member until his retirement from the Board effective at the 2022 Annual Meeting.
Committee member from January 2022 until May 2022.
Committee member effective as of May 2022.
Committee chairperson until his retirement from the Board effective at the 2022 Annual Meeting.
Committee member effective as of appointment to the Board in March 2022.
Committee chairperson effective as of May 2022.

Audit Committee

The current members of the Audit Committee are Stephen D. Kelley, Karen M. Rogge, May Su, and Christine A. Tsingos, who 
also serves as the chairperson of the committee.  The Audit Committee assists the Board in fulfilling its responsibilities for 
general oversight of the integrity of our financial statements, our accounting policies and procedures and our compliance with 
legal and regulatory requirements. Among its functions, the Audit Committee is responsible for:

•  The  appointment,  compensation,  performance  evaluation,  retention,  and  oversight  of  the  Company’s  independent 

registered public accounting firm;

•  The approval of services performed by the Company’s independent registered public accounting firm;
•  Reviewing the responsibilities, functions, and performance of the Company’s internal audit function;
•  Reviewing  the  scope  and  results  of  internal  audits  and  ongoing  assessments  of  the  Company’s  risk  management 

processes and system of internal control;

•  Reviewing and approving in advance any related party transactions; and
•  Evaluating the Company’s system of internal control over financial reporting and disclosure controls and procedures. 

The report of our Audit Committee is found below under the caption “Audit Committee Report.”

The Board has determined that each of the Audit Committee members meets the Audit Committee membership requirements 
set forth by the NYSE and the SEC, including that they be “independent” and financially literate.  Furthermore, the Board has 

16

determined that Ms. Tsingos and Ms. Rogge each qualify as an “Audit Committee Financial Expert” as that term is defined 
under SEC rules and have “accounting or related financial management expertise” as contemplated by NYSE rules. 

Compensation Committee

The  current  members  of  the  Compensation  Committee  are  Leo  Berlinghieri,  May  Su,  Christine  A.  Tsingos,  and  David  B.  
Miller,  who  also  serves  as  chairperson  of  the  committee.  The  Compensation  Committee  is  responsible  for  reviewing  and 
approving  the  compensation  of  the  Company’s  officers,  reviewing  and  recommending  to  the  Board  for  approval  the 
compensation policy for the Company’s non-employee directors, and administering the Company’s equity compensation plans, 
among other things.  With respect to the compensation of the Company’s CEO, the Compensation Committee reviews and 
approves  the  various  elements  of  the  CEO’s  compensation.  With  respect  to  other  officers,  including  each  of  our  named 
executive officers (“NEOs”), the Compensation Committee reviews the compensation for such individuals presented to the 
Compensation Committee by the CEO and the reasons therefor and, in its discretion, may approve or modify the compensation 
packages for such individuals. The Compensation Committee has delegated to the Company’s CEO the authority, within certain 
parameters,  to  approve  the  grant  of  restricted  stock  units  (“RSUs”)  to  employees  and  consultants  who  are  not  directors  or 
executive officers subject Section 16 reporting obligations.

In accordance with its charter, the Compensation Committee may form, and delegate its authority to, subcommittees when 
appropriate. Further, the Compensation Committee has the authority to retain independent compensation consultants and to 
obtain advice from internal or external legal, accounting, and other advisors to assist in the evaluation of director, officer, or 
employee compensation or other matters within the scope of the Compensation Committee’s responsibilities and is directly 
responsible for the appointment, compensation, and oversight of such consultants and other outside advisors, including their 
fees and other retention terms. From time to time, the Compensation Committee engages the services of such independent 
compensation consultants to provide advice on compensation plans and issues related to the Company’s executive officer and 
non-executive officer employees. In 2022, the Compensation Committee engaged Compensia, Inc. (“Compensia”) to provide 
such assistance to the Compensation Committee. 

Each current member of our Compensation Committee is a “non-employee” director within the meaning of Rule 16b-3 under 
the Exchange Act. The Board has determined that each of the Compensation Committee members meets the Compensation 
Committee membership requirements set forth by the NYSE and the SEC, including that they be “independent.”

For further discussion of the Compensation Committee and its processes and procedures, please refer to the “Compensation 
Program Objectives, Design, and Practices” section in the Compensation Discussion and Analysis below.  The Compensation 
Committee Report is included under the caption “Compensation Committee Report on Executive Officer Compensation” in 
this Proxy Statement.

Nominating & Governance Committee

The  current  members  of  the  Nominating  &  Governance  Committee  are  David  B.  Miller,  Christopher  A.  Seams,  and  Leo 
Berlinghieri,  who  also  serves  as  chairperson  of  the  committee.  The  responsibilities  of  the  Nominating  &  Governance 
Committee include:

• 

Identifying prospective director nominees and recommending to the Board director nominees for the next Annual 
Meeting of Stockholders and replacements of a director in the event of a vacancy on the Board;

•  Recommending to the Board the appointment of directors to Board committees;
•  Developing and recommending to the Board, and monitoring compliance with, the corporate governance guidelines 

applicable to the Company;

•  Managing the CEO selection process;
•  Overseeing evaluation of Company management; and 
•  Conduct an annual review of management succession planning.

The Nominating & Governance Committee also oversees the annual evaluation of the Board, the committees of the Board and 
the individual directors.  Among other topics, the evaluation in general assesses:

• 

For both the Board and the committees:
◦  Their structure and composition;
◦  The format and content of meetings; and
◦  The effectiveness of the Board and the committees, as applicable.

17

• 

For each individual director:
◦  Their performance and approach to their directorship;
◦  Their understanding of their role as a director;
◦  Their understanding of critical aspects of the Company’s business, products and strategy; and
◦  Their skills, experience and ongoing training.

The goal of the evaluation is to identify and address any performance issues at the Board, committee or individual level, should 
they exist, identify potential gaps in the boardroom and to assure the maintenance of an appropriate mix of director skills and 
qualifications.  Upon completion of the evaluation, the Nominating & Governance Committee provides feedback to the Board, 
the committees and the individual directors regarding the results of the evaluation and raises any issues that have been identified 
which may need to be addressed.

The Nominating & Governance Committee utilizes a variety of methods for identifying and evaluating potential candidates for 
joining the Board.  For 2022, the Nominating & Governance Committee engaged both Spencer Stuart and ON Partners, each 
an executive search and leadership consulting firm, to assist with this process. The Nominating & Governance Committee’s 
general policy is to assess the appropriate size and needs of the Board and whether any vacancies are expected due to retirement 
or otherwise. In addition, candidates for director are typically reviewed in the context of the current composition of the Board, 
the operating requirements of the Company, the current needs of the Board, and the long-term interests of stockholders, with 
the goal of maintaining a balance of knowledge, experience and capability. In the event those vacancies are anticipated, or 
otherwise arise, the Nominating & Governance Committee will consider recommending various potential candidates to fill 
such vacancies. Candidates may also come to the attention of the Nominating & Governance Committee through its current 
members, stockholders or other persons.

The  Board  has  determined  that  each  of  the  Nominating  &  Governance  Committee  members  meets  the  Nominating  & 
Governance Committee membership requirements, including the independence requirements of the NYSE and the SEC.

M&A Committee

The current members of the M&A Committee are Karen M. Rogge, Christopher A. Seams, and David B. Miller, who also 
serves as chairperson of the committee.  The Board established the M&A Committee as a standing committee in May 2022 to 
assist the Board in evaluating potential acquisitions, investments, mergers, divestitures, and similar strategic transactions and 
to oversee management’s execution of such strategic transactions.  The M&A Committee’s responsibilities include:

•  Reviewing and assessing strategic transactions identified by management, including the valuation, strategic rationale 

and integration strategy for any proposed transaction;

•  Approving non-binding term sheets, letters of intent, indications of interest, and other similar documents for strategic 

transactions;

•  Overseeing the diligence processes for strategic transactions; and
• 

Providing guidance to management as to the desired methodology and processes for identification, development, and 
presentation of strategic opportunities.

Other Committees

Our Board may from time to time establish other special or standing committees to facilitate the oversight of management of 
the Company or to discharge specific duties delegated to the committee by the full Board.

 Compensation Committee Interlocks And Insider Participation

During fiscal year 2022, Leo Berlinghieri, Edward J. Brown, Jr., David B. Miller, May Su, and Christine A. Tsingos were each 
a member of the Compensation Committee.  Mr. Brown ceased serving on the committee as of his retirement from the Board 
at the 2022 Annual Meeting. No member of our Compensation Committee was at any time during fiscal year 2022, or formerly, 
an officer or employee of Onto Innovation or any subsidiary of Onto Innovation. No member of our Compensation Committee 
had any relationship with us during fiscal year 2022 requiring disclosure under Item 404 of Regulation S-K under the Exchange 
Act. During fiscal year 2022, none of our executive officers served as a member of the board of directors or compensation 
committee (or other committee serving an equivalent function) of any entity that had one or more executive officers serving as 
a member of our Board of Directors or Compensation Committee.

18

 Board Membership Criteria And Nominee Identification

The Nominating & Governance Committee of the Board determines the required selection criteria and qualifications of director 
nominees based upon the needs of the Company at the time nominees are considered. While the Nominating & Governance 
Committee has no specific minimum qualifications for director candidates, persons considered for nomination to the Board 
must demonstrate the following qualifications to be recommended by the Nominating & Governance Committee for election:

•  The  candidate  must  exhibit  proven  leadership  capabilities,  high  integrity,  and  experience  with  a  high  level  of 

responsibilities within his or her chosen field;

•  The  candidate  must  possess  the  ability  to  apply  good  business  judgment  and  be  of  sound  mind  and  high  moral 

character;

•  The candidate must have no personal or financial interest that would conflict or appear to conflict with the interests 

of the Company;

•  The candidate must be in a position to properly exercise his or her duties of loyalty and care and be willing and able 

to commit the necessary time for Board and committee service; and

•  The candidate must have the ability to grasp complex principles of business, finance, international transactions and 

semiconductor inspection, metrology, lithography, and related software technologies.

The Nominating & Governance Committee retains the right to modify these qualifications from time to time.

In selecting director nominees, the Nominating & Governance Committee considers, among other factors:

•  The competencies and skills that the candidate possesses and the candidate’s areas of qualification and expertise that 
would enhance the composition of the Board and further its ability to offer advice and guidance to management;
•  How  the  candidate  would  contribute  to  the  Board’s  overall  balance  of  expertise,  perspectives,  backgrounds,  and 

experiences in substantive matters pertaining to the Company’s business; and

•  The candidate’s demonstrated excellence in his or her field and commitment to rigorously representing the long-term 

interests of the Company’s stockholders.

When current Board members are considered for nomination for reelection, the Nominating & Governance Committee also 
takes into consideration their prior contributions to and performance on the Board and their record of attendance.

The  Nominating  &  Governance  Committee  considers  the  above  criteria  for  nominees  identified  by  the  Nominating  & 
Governance Committee itself, by stockholders, or through other sources. The Nominating & Governance Committee uses the 
same  criteria  for  evaluating  all  nominees,  regardless  of  the  original  source  of  nomination.  The  Nominating  &  Governance 
Committee  may  use  the  services  of  a  third-party  search  firm  to  assist  in  the  identification  or  evaluation  of  Board  member 
candidates.

 Consideration Of Director Nominees

The  Nominating  &  Governance  Committee  has  a  formal  policy  with  regard  to  consideration  of  director  candidates 
recommended by the Company’s stockholders, which is contained within the Company’s Director Candidate Policy, which 
may be found on our website at:

https://investors.ontoinnovation.com/governance/governance-documents/

In  accordance  with  this  policy,  the  Nominating  &  Governance  Committee  will  consider  recommendations  for  director 
candidates from stockholders holding no less than 1% of the Company’s securities for at least 12 months prior to the date of 
the submission of the recommendation. Stockholders wishing to recommend persons for consideration by the Nominating & 
Governance Committee as nominees for election to the Company’s Board can do so by writing to the Office of the General 
Counsel of the Company at its principal executive offices giving:

•  The candidate’s name, age, business address and residence address;

•  The candidate’s detailed biographical data and qualifications including principal occupation and employment history;

•  The class and number of shares of the Company which are beneficially owned by the candidate;

•  The candidate’s written consent to being named as a nominee and to serving as a director, if elected;

• 

Information regarding any relationship between the candidate and the Company in the last three years;

19

•  Any other information relating to the candidate that is required by law to be disclosed in solicitations of proxies for 

election of directors;

•  The name and address of the recommending or nominating stockholder;

•  The class and number of shares of the Company which are beneficially owned by the recommending or nominating 

stockholder; and

•  A description of all arrangements or understandings between such stockholder and each nominee and any other person 

or persons (naming such person or persons) relating to the nomination.

Stockholders also have the right to directly nominate director candidates, without any action or recommendation on the 
part of the Nominating & Governance Committee or the Board, by following the procedures set forth in Section 2.5 of 
the Company’s Bylaws.

 Corporate Governance Guidelines

Our Board has adopted Corporate Governance Guidelines, which, along with the Company’s Certificate of Incorporation and 
Bylaws and the Board committee charters, provide the framework for the governance of Onto Innovation. The Board follows 
the procedures and standards in the Corporate Governance Guidelines to fulfill its responsibilities and discharge its governance 
duties.  A copy of the Corporate Governance Guidelines is available on our website at:

https://investors.ontoinnovation.com/governance/governance-documents/

 Codes Of Ethics

We have adopted a Code of Business Conduct and Ethics (applicable to all directors, officers, employees, consultants, and 
contractors) and a Financial Information Integrity Policy (applicable to our financial officers, including our CEO and Chief 
Financial Officer (“CFO”)) that each set forth principles of ethical and legally compliant conduct and establish procedures for 
reporting any violations. Copies of the Code of Business Conduct and Ethics and the Financial Information Integrity Policy 
may be found on our website at:

https://investors.ontoinnovation.com/governance/governance-documents

or may be requested (without charge) by writing to:

Onto Innovation Inc.
Attention: Investor Relations
16 Jonspin Road
Wilmington, Massachusetts 01887

The Company will post on its website any amendment or waiver of a provision of our Code of Business Conduct and Ethics as 
may be required, and within the time period specified, by applicable SEC rules.

Corporate Social Responsibility

An important part of advancing the semiconductor industry through our innovation is being a socially responsible company. 
Our Company’s core values of Passion, Integrity, Collaboration, and Results underpin our commitments to sustainable growth 
and  to  making  a  positive  contribution  to  people  and  the  planet.  We  strive  to  achieve  responsible  and  sustainable  business 
practices and continuous improvement in our own operations, in our partnerships with our customers, across our supply chain 
and in our engagements with our other stakeholders. Our Company invests in environmental, social, and governance (“ESG”) 
initiatives across our business and integrates ESG principles into our day-to-day operations. 

Business and Governance. Our Company has established a cross-functional ESG executive leadership team that is responsible 
for  proposing  goals,  developing  and  executing  strategy,  and  embedding  ESG  into  our  operations  management.  This  ESG 
leadership team provides regular updates to the Board and engages them to discuss ESG strategy, gain alignment on goals, and 
report on progress.  Our Board is actively engaged in the Company’s ESG oversight and has the primary responsibility for our 
ESG priorities.  Board committees provide further guidance and oversight on relevant ESG topics including the Compensation 
Committee on human capital management, the Audit Committee on information security and the Nominating & Governance 
Committee on ethics compliance.  

20

Workplace. As described in the “Social Programs” section in our 2021 ESG Report, our Company strives to provide a work 
environment  that  fosters  inclusion  and  diversity,  ensures  every  voice  is  heard,  and  enables  employees  to  achieve  their  full 
potential. Our Company aims to maintain a collaborative, supportive, and opportunity-rich culture that enhances innovation 
and employee engagement. We strive to protect the health and safety of our personnel throughout our entire operation, including 
our offices, manufacturing sites, research and development (“R&D”) centers, and our field team working at customer sites. 

Community. Our Company believes that positively involving our employees and giving back to our community is central to 
our culture and an expression of our core values. In 2021, the Company initiated RISE (Reimagining Initiatives for Society and 
the Environment) Teams, which have direct oversight from the ESG leadership team. These teams are formed at each location 
globally in order to promote local charitable giving including employee volunteer hours and employee donations. Our RISE 
Teams’ philanthropy and volunteerism programs provide financial and human services to improve the quality of life in the 
communities  in  which  we  operate.  We  are  committed  to  creating  positive  impacts  in  communities  around  the  world  by 
contributing to local, national, and international organizations that support community needs such as hunger, food and water 
security, disadvantaged children and senior citizens, health improvement, and environmental protection. 

Sustainable Operations. We believe that incorporating environmental sustainability into business leads to better products, 
more  efficient  operations,  and  added  value  for  our  customers.  As  the  world  tackles  climate  change  and  other  critical 
environmental issues, we seek to do our part by responsibly managing our impact with global goals for energy efficiency, 
greenhouse  gas  emissions,  carbon  footprint  per  employee,  water  conservation,  and  landfill  hazardous  waste  reduction  and 
elimination. We carefully monitor and manage our environmental impact across our business and work to implement cost-
effective best practices, focusing our efforts where we believe we can have the biggest long-term impact. Our Company looks 
at impacts from procurement to manufacturing, during R&D and product design, and throughout a product’s lifecycle. We 
carefully manage our environmental impact, set goals, and report progress annually through our annual ESG report, which is 
carefully reviewed and verified by our internal audit function. 

Products and Customers. Our Company demands excellence in our quality and environmental performance, as demonstrated 
through our product and process qualification commitments, which resulted in our ISO 9001 Quality Management certification. 
We continuously strive to develop innovative products and solutions that help our customers improve their product yields and 
reduce the amount of scrapped materials.  We seek to achieve this through our monitoring processes and by alerting customers 
via  our  software  products  before  specification  limits  are  reached,  thereby  helping  customers  avoid  product  test  failures.  In 
addition, our equipment meets or exceeds safety requirements and incorporates higher throughput to reduce the energy required 
to process customer products on a per unit basis, benefiting our customers and the environment. Our Company also strives to 
extend the life of our products and solutions to enable our customers to realize greater value from our products with a potentially 
lower environmental impact. 

Responsible Supply Chain. Our Company understands the importance of an ethical, responsible, resilient, and diverse supply 
chain, and we engage with our suppliers to address a wide range of issues including human rights, humane treatment, freely 
chosen employment, labor, anti-corruption, supplier diversity, environmental impact, and responsible mineral sourcing. We are 
a  strong  proponent  of  supply-chain-related  industry  standards  and  endeavor  to  uphold  the  guidelines  published  by  the 
Responsible Business Alliance (“RBA”). Since joining in 2021, the Company has been an affiliate member of the RBA, the 
world’s largest industry coalition dedicated to corporate responsibility in global supply chains. Beginning in 2022, our direct 
suppliers are expected to adhere to our Global Supplier Code of Conduct, which incorporates the RBA code of conduct and 
covers  topics  such  as  ethics,  integrity,  transparency,  anti-corruption,  conflict  minerals,  human  trafficking,  environmental 
sustainability, and social responsibility. Acknowledgment of and consent to adhere to our Global Supplier Code of Conduct is 
a mandatory requirement of our new supplier onboarding process. 

For more information about our ESG efforts, please refer to our Annual ESG Report available in the Company section of our 
website  at  https://ontoinnovation.com/company/environmental-social-governance.  Our  ESG  Report  shall  not  be  deemed 
“filed”  with  the  SEC  for  purposes  of  federal  securities  law,  and  it  shall  not  be  incorporated  by  reference  into  any  of  the 
Company’s current, past or future SEC filings unless specifically noted in such filing. The information contained on our website 
is not part of this document and the ESG report shall not be deemed soliciting material.

Related Person Transactions Policy

There have been no “related person transactions” from January 1, 2022 to the date of this proxy statement, nor are there any 
currently proposed “related person transactions,” involving any director, director nominee or executive officer of the Company, 
any known 5% stockholder of the Company or any immediate family member of any of the foregoing persons (which are 
referred to together as “related persons”). A “related person transaction” generally means a transaction involving more than 
$120,000 in which the Company (including any of its subsidiaries) is a participant and in which one of our executive officers, 
directors, director nominees or 5% shareholders (or their immediate family members), each of whom we refer to as a related 
person, has a direct or indirect material interest. 

21

The  Board  has  adopted  written  policies  and  procedures  addressing  the  Company’s  procedures  with  respect  to  the  review, 
approval and ratification of “related person transactions” that are required to be disclosed pursuant to Item 404(a) of Regulation 
S-K. Our related person practices and policies are designed to ensure that our directors, officers and employees are proactively 
screened from any conflicts of interests that may interfere with their obligations to the Company. Our policies are included in 
the Company’s Related Parties Transaction Policy.

Pursuant to the Related Parties Transaction Policy, the Audit Committee, which consists entirely of independent directors, will 
review any proposed transaction in which the Company or its subsidiaries are to participate if the aggregate amount involved 
in the transaction will or may exceed $120,000 and any related person may have a direct or indirect material interest in the 
transaction. The Audit Committee will consider the facts and circumstances and may approve or ratify a proposed transaction 
if the Audit Committee determines that the transaction is not inconsistent with the interests of the Company and its stockholders.  
The Audit Committee may impose such conditions as it deems appropriate in connection with its approval.

Communications With The Board Of Directors

We  have  a  formal  policy  regarding  communications  with  the  Board,  our  Stockholder  &  Interested  Party  Communications 
Policy, which is found on our website at https://investors.ontoinnovation.com/governance/governance-documents/.

Stockholders may communicate with the Board, the Audit, Compensation, or Nominating & Governance Committee, or any 
of the Company’s directors by writing to:

Onto Innovation Inc.
Office of the General Counsel
16 Jonspin Road
Wilmington, Massachusetts 01887

Such communications will be forwarded to the intended recipient(s) to the extent appropriate. Prior to forwarding any 
communication, the General Counsel will review it and, in his or her discretion, will not forward a communication deemed to 
be of a commercial nature or otherwise inappropriate.

22

 Compensation Of Directors

Directors who are employees of the Company receive no compensation for their services as members of the Board. Director 
compensation for non-employee members of the Board is a mix of cash and equity-based compensation, which is meant to 
align the interests of our directors with the Company’s long-term performance and stockholder interests.  The compensation 
during fiscal 2022 for directors who were not employees of the Company is as follows:

Board Compensation Element

Annual Retainer

Annual Equity Grant (in RSUs)

Committee Chairperson Stipend

    Audit

    Compensation

    Nominating & Governance

    M&A

Committee Member Stipend

    Audit

    Compensation

    Nominating & Governance

    M&A

Chairperson Stipend

Initial Equity Grant (in RSUs)

Amount/Value

$70,000 (1)

$150,000 (2)

$20,000 (1)
$15,000 (1)
$10,000 (1)
$5,000 (1)

$10,000 (1)

$7,500 (1)

$5,000 (1)

$2,500 (1)

$50,000 (1)

$150,000 (3)

(1) Paid subsequent to the director election results at the Annual Meeting of Stockholders.

(2) Awarded at the second quarter Board meeting in a number of shares calculated by dividing the listed amount by the 

closing stock price per share of Company Common Stock on the date of grant.

(3) Awarded as of the first Board meeting following election or appointment and calculated in the same manner as the 
annual equity grant above but prorated by the number of quarters between such first meeting and the date on which 
the next annual equity grant is scheduled to be awarded.

Any initial equity grants and/or annual equity grants typically vest on the first anniversary of the grant date.  Equity awards 
granted to directors are granted under and subject to the terms of the Onto Innovation Inc. 2020 Stock Plan (the “2020 Stock 
Plan”).

23

 
 
 
 
 
 
 
For the fiscal year ended December 31, 2022, the non-employee directors received total compensation indicated in the table 
below.    There  were  no  option  awards,  non-equity  incentive  plan  compensation,  or  pension  and  nonqualified  deferred 
compensation earnings granted to such directors.  They did not earn any type of compensation during the year other than what 
is disclosed in the following table:

Name
Leo Berlinghieri
Edward J. Brown, Jr.(2)
Stephen D. Kelley(3)
David B. Miller
Bruce C. Rhine(2)
Karen M. Rogge
Christopher A. Seams
May Su
Christine A. Tsingos

Fees Earned or
Paid in Cash

Stock
Awards (1)

All Other
Compensation

Total

$87,500
—
N/A
$95,000
—
$82,500
$127,500
$87,500
$97,500

$151,116
—
N/A
$151,116
—
$151,116
$151,116
$151,116
$151,116

—
—
N/A
—
—
—
—
—
—

$238,616
—
N/A
$246,116
—
$233,616
$278,616
$238,616
$248,616

(1) Represents the grant date fair value for each share-based compensation award granted during the year, calculated in accordance 
with FASB ASC Topic 718. The assumptions used in determining the grant date fair value of these awards are set forth in Note 10 
to our consolidated financial statements, which are included in our Annual Report on Form 10-K for the fiscal year ended December 
31, 2022 filed with the SEC. As of December 31, 2022, our directors had the following stock awards outstanding: Mr. Berlinghieri 
– 2,100 RSUs; Mr. Miller – 2,100 RSUs; Ms. Rogge – 2,100 RSUs; Mr. Seams – 2,100 RSUs; Ms. Su - 2,100 RSUs ; and Ms. 
Tsingos – 2,100 RSUs.

(2) Messrs. Brown and Rhine did not stand for re-election to the Board on May 10, 2022.
(3) Mr. Kelley did not join the Board until January 2023.

 Stock Ownership/Retention Guidelines For Directors

The Company has established guidelines related to stock ownership and retention for its non-employee directors. Currently, 
the  guidelines  require  that  each  non-employee  director  of  the  Company  maintain  ownership  of  shares  of  the  Company’s 
Common Stock equal in value to at least three times the amount of the director’s annual cash retainer.  For a new director, the 
stock holding requirement must be attained within five years of his or her initial election or appointment to the Board.

Compliance  with  the  Company’s  stock  ownership  and  retention  guidelines  is  reviewed  annually  by  the  Compensation 
Committee. As of their last review in January 2023, the Compensation Committee determined that all directors who were with 
the Company for more than one year were in compliance with the ownership requirements.

24

PROPOSAL 2

ADVISORY VOTE TO APPROVE NAMED EXECUTIVE OFFICER 
COMPENSATION

The Dodd-Frank Wall Street Reform and Consumer Protection Act of 2010, or the Dodd-Frank Act, enables our stockholders 
to vote to approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed in this 
proxy statement in accordance with SEC rules. Consistent with the recommendation of the Board and the preference of our 
stockholders as reflected in the non-binding advisory vote on the frequency of future advisory votes on named executive officer 
compensation held at the Nanometrics 2017 Annual Meeting of Stockholders, the Company currently holds an annual “say on 
pay” vote.  In accordance with this policy, this year we are requesting our stockholders to approve an advisory resolution to 
approve the Company’s named executive officer compensation as reported in this Proxy Statement.

Our  executive officer  compensation arrangements  are  designed,  consistent  with  our  compensation philosophy  and  pay-for-
performance principles, to provide competitive compensation packages that enable the Company to attract and retain talented 
executive  officers,  motivate  executive  officers  to  achieve  the  Company’s  short-  and  long-term  business  strategies  and 
objectives,  align the interests of executive officers with those of stockholders, and are consistent with current market practices 
and good corporate governance principles.  Please read the Compensation Discussion and Analysis beginning on the following 
page for additional details about our executive officer compensation arrangements, including information about the fiscal year 
2022 compensation of our named executive officers.

We  are  asking  our  stockholders  to  indicate  their  support  for  our  compensation  arrangements  as  described  in  this  proxy 
statement.

For the reasons discussed above, the Board recommends that stockholders vote in favor of the following resolution:

“RESOLVED, that the Company’s stockholders APPROVE, on an advisory basis, the compensation paid to 
the Company’s named executive officers, as disclosed in the proxy statement for this meeting pursuant to Item 
402  of  Regulation  S-K,  including  the  Compensation  Discussion  and  Analysis,  compensation  tables  and 
narrative discussion and other related tables and disclosures.”

Because your vote is advisory, it will not be binding upon or overrule any decisions of the Board, nor will it create any additional 
fiduciary duty on the part of the Board.  This advisory vote is not intended to address any specific item of compensation, but 
rather  the  overall  compensation  of  our  named  executive  officers  and  our  compensation  philosophy,  policies,  and  practices 
described in this proxy statement, and does not seek to have the Board or Compensation Committee take any specific action. 
However, the Board and the Compensation Committee value the views expressed by our stockholders in their vote on this 
proposal and will take into account the outcome of the vote when considering executive officer compensation matters in the 
future.

 Vote Required

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to 
vote will be required to approve, on an advisory (non-binding) basis, the compensation of our named executive officers as 
disclosed in this proxy statement.

The Board recommends a vote “FOR” the approval of the compensation of the 
named executive officers as disclosed in this proxy statement pursuant to Item 402 
of Regulation S-K.

25

EXECUTIVE OFFICER COMPENSATION

COMPENSATION DISCUSSION AND ANALYSIS

 Introduction

This Compensation Discussion and Analysis (“CD&A”) describes our compensation philosophy, process, plans, and practices 
for our executive officers and contains a discussion of the material elements of compensation awarded to, earned by, or paid to 
the Company’s named executive officers or “NEOs.”  The Company’s NEOs for 2022 were:

Onto Innovation’s Named Executive Officers (NEOs)

NEO Name
Michael P. Plisinski

Mark R. Slicer

James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh

Chief Executive Officer

Chief Financial Officer

Position

Chief Operating Officer
Sr. Vice President & General Manager, Metrology Business Unit
Vice President, General Counsel, and Corporate Secretary

Former Officers

Steven R. Roth

Former Sr. Vice President & Chief Financial Officer

EXECUTIVE SUMMARY

 2022 Financial Highlights

In 2022, the Company realized record financial results in critical metrics.  These include, but are not limited to:

•
•

Record full year revenue of $1.005 billion reflecting growth of over 27% year-over-year.
Record full year GAAP diluted earnings per share of $4.49 increased 57% year-over-year.

26

The following reflects some of our financial accomplishments in fiscal 2022 as compared to fiscal 2021 and 2020:

27

 2022 Compensation Highlights

Executive compensation is a key component of our corporate governance practices and our plans to drive long-term 
profitable growth.  We’ve designed our compensation program to both attract and retain best-in-class executive management 
and to motivate our executive officers to achieve corporate objectives and create value for shareholders.  In 2022, key 
features of our compensation program included the following:

•

•

•

Competitive base salary increases: base salaries for executive officers were set based on several factors, 
including executive officers’ unique qualifications, role, and responsibilities, individual performance, and 
measurable contribution to the Company’s profitability and success.

Rigorous annual incentive goals: executive officer cash incentive compensation is tied to overall corporate 
performance, achievement of individual performance goals, and, for those executive officers associated with a 
particular business unit, to individual business unit performance as well.

An emphasis on performance-based long-term incentives: a substantial portion of executive officer compensation 
is in the form of long-term equity incentives that incentivize both long-term service at the Company and creating 
shareholder value.

 Results Of The 2022 Stockholder Vote On Executive Officer Compensation

In 2022, stockholders were provided with the opportunity to cast an advisory (non-binding) vote (a “say-on-pay” proposal) on 
the compensation of our NEOs for fiscal 2021. Our stockholders approved this say-on-pay proposal, with 94.2% of votes cast 
voting in favor of our executive compensation program. Our Compensation Committee and Board recognize the fundamental 
interest  our  stockholders  have  in  the  compensation  of  our  executive  officers.  Noting  the  strong  support  for  our  2021 
compensation program, the Compensation Committee maintained a consistent approach to our executive officer compensation 
program in 2022.

The Compensation Committee will continue to consider input from our stockholders as reflected in the outcome of our annual 
say-on-pay vote when making executive compensation program decisions.

COMPENSATION PROGRAM OBJECTIVES, DESIGN, AND PRACTICES

 Our Compensation Philosophy And Principles

Our compensation philosophy, which serves as the framework for the Company’s executive officer compensation program, is 
defined  by  two  key  tenets:  (1)  rewarding  continuous  improvement  in  financial  and  operating  results  and  (2)  creation  of 
stockholder value.  The Compensation Committee acts on behalf of the Board and, by extension, on behalf of our stockholders, 
to establish, implement and continually monitor adherence to our compensation philosophy. Accordingly, the Compensation 
Committee has developed a set of core objectives and principles that it has used to develop the executive officer compensation 
program. The specific objectives of our executive officer compensation program are to:

• 

attract and retain executive officer talent;

•  motivate executive officers to achieve the Company’s short- and long-term business strategies and objectives, and

• 

align the interests of executive officers with those of stockholders.

Consistent with the foregoing, the Compensation Committee believes that the most effective executive officer compensation 
program is one that rewards the achievement of specific strategic and operating goals of the Company on both an annual and a 
long-term  basis,  and  that  incentivizes  executive  officers  to  create  value  for  stockholders.    The  Compensation  Committee 
evaluates both performance and compensation to ensure that the Company maintains its ability to attract and retain superior 
employees in key positions.  Based on that evaluation, the Compensation Committee designs the compensation provided to 
executive  officers  to  remain  competitive  with  the  compensation  paid  to  similarly  situated  executive  officers  at  peer  group 
companies. The Compensation Committee believes executive officer compensation packages provided by the Company to its 
executive officers, including the NEOs, should include base salary, annual cash incentive opportunities, and long-term stock-
based  compensation,  including  equity  incentive  opportunities  that  reward  performance  as  measured  against  pre-established 
goals.

28

The following principles support the objectives and design of the compensation program:

•  The compensation program is designed to be fair and competitive, from an internal and external perspective, taking 
into  account  each  executive  officer’s  unique  qualifications,  role,  responsibilities,  individual  performance,  and 
measurable contribution to the Company’s profitability;

•  A substantial portion of an executive officer’s compensation is designed to be at risk and linked to the achievement 
of both corporate and individual financial, management or other performance goals and changes in stockholder value; 
and

•  All compensation program elements taken as a whole are designed to help focus executive officers on achieving the 

Company’s financial and strategic goals while supporting our culture and core values.

To underscore the importance of “pay-for-performance” in our compensation philosophy, the Compensation Committee has 
developed  incentive  arrangements  based  on  performance  standards  that  the  Compensation  Committee  believes,  at  target 
achievement, will incentivize our executive officers to meet or exceed industry performance.

The Company also strives to promote an ownership mentality among its key leadership, in part through the guidelines described 
below under the heading “Stock Ownership/Retention Guidelines.” To that end, the CEO is required to maintain ownership of 
the Company’s  Common  Stock  equal  in  value  to at  least  three  times the  CEO’s year-end  base salary.  The  other  executive 
officers  are  required  to  maintain  a  minimum  share  ownership  level  equal  in  value  to  their  current  year-end  base  salary.  In 
further support of this approach, our Board has established an anti-pledging policy to ensure that personal interests relating to 
the stock holdings of officers and directors do not conflict with their duties to the Company.

29

 Our Compensation Practices

The Compensation Committee has adopted the following practices and policies with respect to the Company’s executive officer 
compensation program:

What We Do

Committee 
Independence

The Compensation Committee consists of independent directors and reserves time at each 
meeting to meet in executive session without management present.

Independent 
Compensation 
Consultant

The Compensation Committee has engaged its own independent compensation consultant and 
annually assesses the consultant’s performance, independence, and whether any potential 
conflicts of interest exist.

Independent Legal 
Advisor

The Compensation Committee may engage its own independent legal advisor specializing in 
corporate compensation issues, as necessary.

CEO Goal Setting 
and Performance
Evaluation

Peer Group

The Compensation Committee, with the input of the full Board, engages in formal goal setting 
and performance evaluation processes with the CEO.

The Compensation Committee has established formal criteria for the selection of peer groups 
used as a competitive reference point with respect to executive officer and director compensation, 
program design and practices, and financial and stock performance.

Stock Ownership 
Guidelines

The Company maintains rigorous stock ownership guidelines, which apply to executive officers 
and directors, and serve as a risk-mitigating feature within our compensation structure.

Double Trigger 
Change-in-Control

The Company has entered into agreements with executive officers, including the CEO, that 
contain change-in-control severance protection.  Executive officers are entitled to severance in the 
event of both a change in control of the Company and a qualifying termination of employment 
(“double trigger”).

Clawback Policy

The Company has adopted a policy that provides for the reimbursement of incentive 
compensation (including equity awards granted as compensation) previously awarded or paid to 
an executive officer in the event that financial results or other performance measures on which the 
award or payment were determined are restated or adjusted.

Grant Date Policy

The Company has adopted a policy on stock-based awards made to our directors, officers, and 
employees that prohibits manipulation of award grant dates or the timing of our release of 
material nonpublic information with the intent of benefitting an award recipient.

What We Do Not Do

No Pledging

Tax Gross-Ups on 
Perquisites or 
Severance

The Company’s insider trading policy prohibits our directors, officers and employees from 
purchasing Company securities on margin, borrowing against Company securities held in a 
margin account, or pledging Company securities as collateral for a loan.

The Company does not provide any tax gross-up payments to cover personal income taxes on 
perquisites or severance benefits related to a change in control.

30

COMPENSATION DECISION-MAKING PROCESS

 Determination of Compensation Awards

The  Compensation  Committee’s  goal  is  to  target  elements  of  compensation  within  a  competitive  range,  using  a  balanced 
approach that does not use rigid percentiles to target pay levels for each compensation element. For 2022, the Compensation 
Committee reviewed each element of compensation described below and set the target total direct compensation opportunities 
of our executive officers after taking into consideration the following factors:

•  Company profitability;
•  The executive officer’s unique qualifications;
•  The executive officer’s role and responsibilities;
•  The  executive  officer’s  individual  performance  and  measurable  contribution  to  the  Company’s  profitability  and 

success; and

•  Compensation levels of similar positions with comparable companies in the industry. 

The Compensation Committee does not assign relative weights or rankings to any of these factors and does not solely use any 
quantitative formula, target percentile or multiple for establishing compensation among the executive officers or in relation to 
the competitive market data.

 Role of the Compensation Committee

The Compensation Committee is charged with making all final determinations regarding the compensation of our executive 
officers. In the beginning of each year, the Compensation Committee evaluates the CEO’s performance in light of the goals 
and objectives established  at  the beginning of  the  previous  fiscal year  for measuring  his performance.   The CEO  does  not 
participate in the Compensation Committee’s or Board’s deliberations regarding his compensation. In addition,  the CEO meets 
with the Compensation Committee to present the proposed compensation plans for each of the Company’s executive officers 
other  than  the  CEO,  including  the  other  NEOs.    Based  on  these  meetings  and  internal  deliberations,  the  Compensation 
Committee then approves the annual compensation for the Company’s CEO and other executive officers, including the NEOs, 
including base salary, cash incentive award opportunity, and equity compensation.

In the same time period, the Compensation Committee also reviews and recommends for approval by the Board:

• 

• 

the Company Compensation Plan for all non-executive employees, including (i) adjustments to base compensation 
and profit-sharing, bonus and other cash incentive plans, and (ii) the annual equity award budget; and

the annual compensation program for non-employee directors.

In  reviewing  and  setting  the  annual  compensation  for  each  executive  officer,  the  Compensation  Committee  considers  the 
amounts payable under each of the elements of their respective compensation plans, including base salary, annual cash incentive 
awards, and equity grants. The Compensation Committee takes into consideration both the Company’s internal pay equity as 
well  as  the  competitive  environment  within  which  the  Company  operates.    The  Compensation  Committee  then  determines 
whether the base salary and annual and long-term incentive award opportunities for the individual executive officers support 
the Company's compensation objectives and are both competitive and reasonable in the context of the Company’s competitive 
market. 

 Role of Management

With regard to compensation for executive officers other than the CEO, the Compensation Committee seeks input from the 
CEO and the human resources department.  Each year, the CEO is responsible for establishing proposed personal and corporate 
objectives for the Company’s other executive officers, including the other NEOs. These objectives, subject to the approval of 
the Compensation Committee, are reviewed and agreed upon by the CEO with the applicable executive officer. In addition, as 
part of the annual performance review of the Company’s executive officers, the CEO assesses the performance of his direct 
reports and recommends any merit increase to be proposed for each individual. These recommendations are compiled by the 
CEO into executive officer compensation plans which include any proposed merit increases, each executive officer’s personal 
and corporate objectives, proposed annual incentive award opportunities (expressed as a percentage of their base salary) and 
equity grant proposals, and are submitted to the Compensation Committee for review and consideration for approval. At the 
Compensation Committee meeting during which the executive officer compensation plans are reviewed, the CEO attends the 
initial session to present the proposed plans and to answer questions. Thereafter, the Compensation Committee meets without 
the CEO present to review, discuss and approve all executive officer compensation plans, subject to any modifications made 
by the Compensation Committee.

31

 Role Of The Compensation Consultant

The Compensation Committee may retain independent compensation consultants to assist the Compensation Committee in 
discharging  its  duties.    During  2022,  the  Compensation  Committee  engaged  Compensia,  an  independent  executive  officer 
compensation consulting firm, to provide advice on the Company’s executive officer compensation arrangements. Compensia 
does not provide any services other than those related to compensation consulting and does not provide any services to the 
Company's management.  The Compensation Committee determined that Compensia is independent within the meaning of  the 
NYSE Listing Rules, and that the work performed by Compensia does not raise any conflicts of interest.

For 2022, the Compensation Committee requested that Compensia:

• 

• 

• 

evaluate the efficacy of the Company’s existing compensation strategy and practices in supporting and reinforcing the 
Company’s long-term strategic goals;

assist in refining the Company’s compensation strategy and further implementing the executive officer compensation 
program to execute that strategy; and

provide  market  information  to  assist  the  Compensation  Committee  in  establishing  2022  executive  officer 
compensation.

 Peer Companies

In setting executive officer compensation, the Compensation Committee evaluates compensation levels for executive officers 
at other similarly situated companies.  For 2022, the Compensation Committee engaged Compensia to provide peer group data 
and perform an assessment of compensation levels provided to executive officers.  In addition, the Compensation Committee 
obtains and evaluates market compensation information using third-party and internal resources. The Compensation Committee 
reviews data related to compensation levels and programs of other similar companies prior to making its decisions, but only 
considers such information in a general manner in order to obtain a better understanding of the current compensation practices 
within our industry.

In  the  Compensation  Committee’s  review  of  executive  officer  compensation  for  the  2022  fiscal  year,  the  Compensation 
Committee considered publicly available market data from peer company proxy disclosures and industry compensation surveys 
for companies that typically include similarly sized semiconductor and semiconductor capital equipment companies or similar 
firms for each Company executive officer in a like or similar role. 

In mid-2021, for compensation decisions for the Company’s 2022 fiscal year, Compensia recommended and the Compensation 
Committee approved the Company’s compensation peer group which took into consideration the following factors:

• 

Semiconductor capital equipment and other electronics and hardware technology companies;

•  Revenue between approximately 0.5x and 2x the Company’s revenue run-rate; and

•  Market cap between approximately 0.3x and 3x the Company’s average market cap.

The Company’s compensation peer group for the 2021 review (which was used to make decisions regarding 2022 
compensation) consisted of the following companies:

Companies Included In The Company’s Compensation Peer Group For 2022

Advanced Energy Industries Inc.

Knowles Electronics, LLC

Rambus Incorporated

Ambarella International LP

Lattice Semiconductor Corporation

Semtech

Axcelis Technologies Inc.

MACOM Technology Solutions Holdings, Inc.

Silicon Laboratories

Azenta, Inc.

Cohu, Inc.

FormFactor, Inc.

Ichor Holdings Ltd.

MaxLinear, Inc.

Novanta Inc.

Photronics, Inc.

Power Integrations, Inc.

32

Ultra Clean Holdings, Inc.

Veeco Instruments, Inc.

The pay practices of the foregoing Company peer group were analyzed for base salary and annual and long-term incentives. 
Periodically, peer groups are used to evaluate other programs such as executive officer retirement, perquisites and severance 
policies.  Our  peer  group  data  is  supplemented  by  broader  technology  industry  data  from  compensation  surveys  to  further 
facilitate  the  evaluation  of  compensation  levels  and  design.  Compensation  levels  are  generally  developed  at  the  low  (25th 
percentile), middle (50th percentile) and high (75th percentile) end of the market for each pay element (base salary and short-
term and long-term incentives) and for total compensation.

While the Compensation Committee considers market data for each pay element and in total, the Compensation Committee 
does not specifically target any particular market compensation level. Instead, the Compensation Committee uses its discretion 
in setting the compensation levels as appropriate.

ELEMENTS OF THE COMPANY’S 2022 COMPENSATION PLAN

 Compensation Program Design

Our  executive  officer  compensation  program,  which  applies  to  all  executive  officers  including  our  NEOs,  is  generally 
composed  of  three  parts,  each  of  which  is  intended  to  address  different  objectives:  base  salary,  annual  cash  performance 
incentives, and long-term equity incentives.

Base salaries serve as the foundation of our executive compensation program.  The Compensation Committee uses base salary 
and certain other benefits available to all employees, such as the Onto Innovation Inc. 2020 Employee Stock Purchase Plan 
(“ESPP”), our 401(k) plan with Company matching contributions, and health and welfare benefits, as a means for providing 
base compensation to executive officers commensurate with their knowledge and experience and for fulfilling their basic job 
responsibilities.  The Compensation Committee also derives the other executive compensation elements, annual cash incentives 
and long-term equity incentives, by weighing them against base salary.  As discussed above, the Compensation Committee 
generally establishes base salary levels for executive officers at or near the start of each year.  

The annual cash incentive component of the Company’s executive officer compensation program rewards executive officers 
for  achieving  specific  corporate,  business  unit,  as  applicable,  and  individual  goals.    The  Company’s  annual  cash  incentive 
awards  are  administered  through  its  Management  By  Objectives  (“MBO”)  bonus  plan.  The  MBO  bonus  plan  provides 
guidelines for the calculation of annual cash incentive compensation, subject to the Compensation Committee’s oversight. At 
its first meeting each year, the Compensation Committee typically determines final bonuses for executive officers earned in 
the  preceding  year  based  on  each  individual’s  performance,  the  performance  of the  Company through  its  audited  financial 
statements, business unit performance (as applicable), and the CEO’s recommendations (except with respect to the CEO's own 
bonus).

The long-term equity incentive component includes grants of (i) performance-based stock units (“PSUs”), which are earned 
based on the Company's total shareholder return (“TSR”) relative to the top 30 companies in the Philadelphia Stock Exchange 
Semiconductor Index over two- and three-year performance periods, and (ii) time-based RSUs, which vest in equal annual 
increments over time. All grants are made under the Company’s 2020 Stock Plan and shares earned and vested are subject to 
the Company’s stock ownership and retention guidelines and insider trading policy.  The Compensation Committee generally 
approves the grant of annual equity awards to officers at its first regularly scheduled meeting each year. The Compensation 
Committee does not generally grant equity awards at other times during the year, other than in the case of a new hire, promotion 
or other exceptional circumstances.  

The Compensation Committee aligns both the Company’s annual cash incentive plan and long-term equity incentive program 
with  the  Company’s  performance  relative  to  pre-established  performance  goals  based  on  the  Company’s  stated  financial 
objectives,  historical  performance,  and  anticipated  market  and  economic  conditions  for  the  performance  period.    The 
Compensation Committee seeks to structure the equity and cash incentive compensation program to motivate executive officers 
to achieve the business goals set by the Company and reward the executive officers for achieving such goals, which we believe 
aligns the financial incentives of our executive officers with the interests of our stockholders.

33

The table below summarizes the foregoing key elements of our executive officer compensation structure for 2022.

Executive Officer Compensation Elements

Element

Form

Description

Base Salary

Fixed Cash Compensation

Competitive cash compensation that takes into consideration the 
scope and complexity of the role, individual qualifications, 
experience, and internal value to the Company.

Annual Cash
Incentive Plan

Annual Variable Cash Bonus

Annual variable cash bonus contingent on meeting performance 
criteria related to corporate, business unit/department (as applicable), 
and individual performance objectives.

Long-Term Equity 
Incentive Program

Long-Term Stock-Based 
Compensation

PSUs are earned based on Company TSR performance relative to a 
designated peer group.  Time-based RSUs vest incrementally over a 
fixed period.

In  adopting  this  design,  the  Compensation  Committee  considered  a  number  of  parameters,  including  the  advice  of  its 
independent compensation consultant, comparable practices within the industry, and the desire to achieve the goals underlying 
the compensation program. The Compensation Committee and Board further believe that each of the elements as well as the 
entire  compensation  package  for  Company  executive  officers  is  appropriate  given  the  Company’s  performance,  industry, 
current challenges and environment.

The three components of our executive compensation program are commonly used for executive officers at companies within 
the Company’s peer group and, therefore, the Compensation Committee found them to be appropriate in its talent attraction 
and retention strategy.  Given that a substantial portion of an executive officer's overall compensation is tied to individual and 
Company  performance  through  the  annual  cash  incentive  and  long-term  equity  incentive  components,  we  also  think  the 
structure of our executive compensation program meets the Company's other objectives of motivating executive officers to 
achieve the Company's short- and long-term business strategies and objectives and aligning the interests of executive officers 
with those of our stockholders.  The pay-for-performance nature of our compensation structure rewards the achievement of 
strategic, operational and financial goals, thereby enhancing stockholder value.  

The  Compensation  Committee’s  compensation  determinations  vary  for  each  executive  officer  depending  on  a  number  of 
factors,  including  but  not  limited  to,  the  scope  of  his  or  her  responsibilities,  leadership  skills  and  values,  and  individual 
performance. The Compensation Committee does not apply formulas or assign specific mathematical weights to any of these 
factors, but rather exercises its business judgment and discretion to make a subjective determination after considering all of 
these measures collectively.

Annually, the Compensation Committee reviews the elements of the compensation package as well as the overall package 
afforded to the executive officers. At such time, the Compensation Committee, in its discretion, can approve adjustments to the 
elements  of  the  program.  This  review  is  typically  performed  coincident  with  the  evaluation  of  each  executive  officer’s 
performance  in  relation  to  his  or  her  cash  incentive  compensation  goals,  salary  adjustment,  and  equity  grants,  if  any,  as 
discussed in more detail in the sections below.  

 Impact Of Performance On Compensation

The performance of the Company and of each executive officer has a direct impact on the compensation received by such 
executive  officer.  On  an  annual  basis,  the  CEO  reviews  the  performance  and  compensation  for  the  Company’s  non-CEO 
executive officers to determine any potential salary adjustment for each individual. The CEO then proposes (except with respect 
to  the  CEO’s  own  compensation)  to  the  Compensation  Committee  the  annual  cash  incentive  payout  to  executive  officers, 
including the NEOs, under the MBO bonus plan, the target cash incentive compensation for the upcoming year, any base salary 
adjustments,  and  equity  award  amounts  for  the  upcoming  year.    Each  of  these  recommendations,  and  the  Compensation 
Committee’s  final  compensation  determination  for  executive  officers,  is  based  on  each  executive's  performance  and 
contributions to the Company, as well as overall Company performance.

34

The structure of the Company’s annual cash incentive and long-term equity incentive components of the compensation program 
are also both intended to incentivize performance. The MBO bonus plan includes various incentive level opportunities based 
on  the  executive  officer’s  accountability  and  impact  on  Company  operations,  with  target  award  opportunities  that  are 
established as a percentage of base salary. 

Under  our  MBO  bonus  plan,  payout  is  based  upon  achievement  of  corporate,  business  unit  (as  applicable),  and  personal 
objectives,  with  no  payout  unless  the  Company  meets  the  threshold  level  of  at  least  one  of  the  Board-approved  corporate 
financial targets established as part of the plan. Personal objectives are awarded only upon clear achievement of the associated 
goal.  Failure  to  meet  the  personal  objectives  thereby  has  a  negative  impact  on  the  ultimate  bonus  payout,  even  when  the 
Company achieves its corporate goals.

The CEO recommends to the Compensation Committee individual performance goals for the executive officers (including the 
NEOs), other than the CEO, for the current year, which are combined with the corporate and business unit (as applicable) 
targets into an annual cash incentive opportunity proposal. The personal targets that are established are designed to result in 
additional  incremental  value  to  the  Company  if  they  are  achieved.    The  target  level  of  the  corporate  and  business  unit 
components of the bonus goals are set based on the Company’s financial budget established by the Board at the beginning of 
the year. The determination of these goals is made annually to meet the changing nature of the Company’s business.

Upon completion of the prior year’s results and prior to implementation of the current year’s proposed executive compensation 
plan, the results for each executive officer are submitted to, and reviewed by, the Compensation Committee, which considers 
the CEO’s recommendations for executive officers other than the CEO and determines the final bonus earned by each executive 
officer based on Company and individual performance. The Compensation Committee may exercise discretion in adjusting and 
approving an individual’s award under the bonus plan based upon its review.

The two elements of the Company’s  long-term equity incentive compensation program are also performance-based.  The PSU 
grants, which are explained in further detail below, measure the Company’s TSR over two- and three-year periods as compared 
to that of companies in the Philadelphia Semiconductor Index (SOX) and reward executives for achieving TSR greater than 
that of other Companies in the Index.  In addition, because the value of PSUs and the service-based RSUs granted to executive 
officers are tied to the Company's stock price, their value increases or decreases with the performance of the Company stock, 
further incentivizing executives to manage the Company for the benefit of the Company's stockholders. 

Based upon the foregoing, the compensation that an executive officer may realize is significantly impacted by the positive or 
negative performance of such individual as well as Company performance.

 Compensation Plan Design And Decisions For 2022

For  2022,  the  Compensation  Committee  conducted  a  review  of  the  compensation  program  and  determined  that  the  2022 
executive  compensation  plan  would  retain  the  same  basic  elements  as  the  prior  year’s  plan  as  these  elements  aligned  the 
Company’s  program  with  its  current  business  strategy  and  included  the  pay  for  performance  aspect  of  its  executive 
compensation program.  Taking into account the Company’s 2021 financial performance and outlook for 2022, each executive 
officer’s performance and responsibilities, and current market compensation rates for each executive officer position, among 
other criteria, the Compensation Committee approved the program and compensation plan structure for the executive officers 
in 2022 as detailed below.

 Base Salary

The Company provides executive officers and other employees with a base salary to compensate them for services rendered 
during the fiscal year.  The Compensation Committee supports the compensation philosophy of moderation for elements such 
as base salary and other executive officer benefits. As noted above under “Impact of Performance on Compensation,” base 
salary decisions are made as part of the Company’s formal annual review process and are influenced by the performance of the 
Company and the individual.

For  2022,  the  Compensation  Committee  reviewed  and  determined  salaries  after  reviewing  salary  data  supplied  by  the 
independent  compensation  consultant,  including  data  regarding  the  peer  comparison  group,  as  well  as  consideration  of  the 
compensation for the executive officers on a company-wide basis, based on their relative duties and responsibilities and the 
recommendations of the CEO (other than with respect to his own compensation). The Compensation Committee did not apply 
formulas  or  assign  specific  mathematical  weights  to  any  of  these  factors,  but  rather  exercised  its  business  judgment  and 
discretion  to  make  a  subjective  determination  regarding  each  executive  officer's  base  salary  for  2022,  as  applicable,  after 

35

considering all of these factors collectively.  The CEO’s recommendations for salary adjustments (other than his own) were 
reviewed, modified and approved as deemed appropriate by the Compensation Committee.

The table below shows the increases in NEO base salary for the 2022 that were approved by the Compensation Committee.

Named Executive Officer

2021 Base Salary

2022 Base Salary

% Increase

Michael P. Plisinski
Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh
Steven R. Roth

 Annual Cash Incentive Compensation

$618,341
N/A
$300,000
$270,783
$350,000
$418,862

$636,892
$450,000
$309,000
$308,693
$360,500
$436,800

3%
N/A
3%
14%
3%
4%

For 2022, as in prior years, the annual cash incentive plan was structured such that each NEO’s potential cash award was subject 
to the achievement of 2022 corporate financial objectives.  These corporate financial objectives were established at levels in 
excess of the overall industry projections in order to incentivize the Company to outperform the industry.

The 2022 annual cash incentive plan had three components:  corporate goals, business unit goals (if applicable), and personal 
performance goals, each of which is described in more detail below.

•  The corporate goals relate to corporate revenue and corporate non-GAAP operating income. For NEOs who are not 
aligned with a particular business unit, 70% of their cash bonus potential is based on corporate goals.  For NEOs who 
are aligned with a particular business unit, 30% of their cash bonus potential is based on corporate goals.  The entirety 
of each executive officer’s cash bonus payout, however, was contingent on the Company meeting at least one of the 
2022 corporate revenue or corporate non-GAAP operating income goals thresholds of 80% of target and 70% of target, 
respectively.    Should  the  Company  not  have  reached  the  threshold  level  for  both  the  2022  corporate  revenue  and 
corporate non-GAAP operating income goals, then no payout under the plan would have been made to the CEO or the 
executive officers.  The performance ranges for each metric included a payout level for threshold performance at 50% 
of target payout and an established target level to achieve the maximum payout by exceeding the corporate performance 
objectives for each of the corporate financial metrics. If the corporate goal target is exceeded in either or both corporate 
goal categories, then the cash payout increases as follows:

◦  Corporate Revenue:  From 100% to 120% of the corporate goal target, additional cash compensation is earned 

linearly up to 200% of the target bonus amount.

◦  Non-GAAP Operating Income: From 100% to 130% of corporate goal target, additional cash compensation is 

earned linearly up to 200% of the target bonus amount.

For our NEOs the 2022  target annual cash bonus opportunities were set as follows:

Named Executive Officer

Michael P. Plisinski
Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh
Steven R. Roth

2022 Target Annual Cash Incentive As a 
Percentage of Base Salary
100%
70%
60%
50%
50%
65%

• 

For those executive officers who were associated with a particular Company business unit, 40% of their cash bonus 
potential was allocated to business unit financial performance goals.  In 2022, these goals included achievement of 
fiscal 2022 business unit revenue and non-GAAP operating income objectives. For an executive officer to earn his or 
her potential cash award apportioned to the business unit goals, his or her respective business unit needed to achieve at 
least 80% of the business unit revenue target and/or 70% of the business unit non-GAAP operating income target.  
Additional cash payout of up to 200% is realized if either of the business unit goals is exceeded, similar to the Corporate 
goal parameters above.  As stated above, the payout of the business unit goal component of the bonus was contingent 
on achieving the threshold for at least one of the Company corporate goals.

36

 
 
 
 
 
 
 
 
•  The final component of the cash incentive compensation plan was the inclusion of personal performance goals that are 
specific to the individual executive officers.  This portion of the plan accounts for 30% of the cash bonus potential for 
all executive officers.  The NEO personal performance goals in 2022 included targets related to additional corporate 
financial measures, operational measures and activities, quality, product development measures or marketing initiatives 
and personnel development, depending on the executive officer involved.  As with the business unit goal component 
of  the  bonus,  payout  of  the  personal  performance  goal  component  of  the  bonus  was  contingent  on  achieving  the 
threshold for at least one of the Company corporate goals.

The  following  table  reflects  the  structure  of  the  corporate  and  business  unit  goals  components  of  the  cash  incentive 
compensation plan.  The personal goal payout component is fixed -- if achieved, the payout is for the target amount.

Corporate/Business 
Unit Goal
Revenue
Operating Income (Non-
GAAP)

Weighting

50%
50%

Threshold
(50% Payout)

80% of target
70% of target

Target
(100% Payout)

100% of target
100% of target

Max
(200% Payout)

120% of target
130% of target

The following table reflects the Corporate targets, actual results, and percentage payouts for fiscal 2022 for the CEO and  other 
executive officers.

Cash Incentive Compensation Plan -
Corporate Target Categories
Corporate Revenue
Non-GAAP Operating Income

2022
Target
$950.8M
$290.1M

2022
Actual
$1,005.2M
$301.7M

2022
Payout Percentage
129%
113% 

Of the NEOs in 2022, only Mr. Fiordalice included a Business Unit Goal component as part of his cash incentive compensation 
plan.

Personal  goal  achievement  for  the  CEO  and  other  NEOs  at  the  time  of  the  incentive  award  ranged  from  76%  to  100%  of 
personal goals achieved in 2022.

Actual amounts paid to the CEO and the other NEOs under their respective annual cash incentive plans are reported below in 
the Non-Equity Incentive Plan Compensation column of the Summary Compensation Table.

 Long-Term Equity Incentive Plan

In 2022, the structure of the long-term equity incentives was set by the Compensation Committee through the consideration of 
a number of factors and recommendations from the CEO (except in connection with his own grants). 

The following parameters were included in the design of the long-term equity incentive program in 2022:

Performance-Based Stock Units: 50% of each executive officer’s equity grant was comprised of PSUs. The relative TSR plan 
design includes the following features:

• 

• 

50% of the PSU grant will be assessed at each of two performance periods, at two years and at three years from the 
grant date (e.g. for awards granted in early 2022, the performance periods would be 2022 through 2024 and 2025).

Performance will be assessed using TSR, which measures growth in stock price, plus any dividends paid, during the 
performance period.

•  TSR performance will be compared to that of other companies in the Philadelphia Semiconductor Index (SOX).

37

 
•  The performance and standards to earn the PSU equity awards in 2022 are as follows:

TSR Performance Relative to Peers
Below 25th Percentile
25th Percentile
55th Percentile
80th Percentile and above

PSUs Earned as % of Target
0%
50%
100%
200%

•  The  PSU  award  payout  will  be  calculated  on  a  straight-line  basis  between  the  25th  &  55th  and  the  55th  &  80th 

percentile levels referenced above.

•  A negative TSR cap has been instituted which limits any PSUs earned to target level if the Company’s TSR is negative 

over the performance period and our TSR ranks above the target performance level.

•  Earned PSUs are not subject to additional service-based vesting conditions.

Service-Vesting Restricted Stock Units: 50% of each executive officer’s equity grant is comprised of service-based RSUs, 
which vest in equal annual increments over three years.

The following table summarizes the components of the long-term equity incentive program.

Long- Term Equity Incentive Compensation Program Provisions
Performance-based / Service-based grant breakout

Service-based grant vesting period

Performance-based grant evaluation period

Performance-based grant metric(s)
Performance-based grant vesting period
Performance threshold for earning grant
Percent of performance-based grant earned at threshold
Measure at which 100% of performance-based grant is earned
Maximum performance-based grant upside
Measure at which maximum upside of performance-based grant is 
earned

2022
50%-50%
33.3% annually
over 3 years
50% of grant 
at 2 and 3 years
 Relative TSR
100% upon earning
25th TSR percentile
50%
55th TSR percentile
200%

80th TSR percentile

In February 2023, the first tranche of the PSUs awarded in 2021 vested.  The Company’s TSR performance based on the 20-
day average market value prior to the vesting date was determined and ranked against the participating companies in the SOX.  
The Company’s TSR for this assessment period was 40.1%, which placed the Company at the 89th TSR percentile in the SOX.  
Therefore, the PSUs earned as a percent of the target number awarded was 200%.

Also in February 2023, the second tranche of the PSUs awarded in 2020 vested.  The Company’s TSR performance based on 
the 20-day average market value prior to the vesting date was determined and ranked against the participating companies in the 
SOX.  The Company’s TSR for this assessment period was 104.9%, which placed the Company at the 85th TSR percentile in 
the SOX.  Therefore, the PSUs earned as a percent of the target number awarded was 200%.

The actual number of PSUs and RSUs granted to the NEOs in 2022 and the related value are reported below in the table titled 
Grants Of Plan-Based Awards In 2022.

 Personal Benefits And Perquisites

Benefits

All employees of the Company, including its executive officers, are eligible to participate in the following benefit plans and 
programs:

•  Health and dental insurance;

•  Elective vision care program;

38

 
 
 
 
 
 
 
 
 
 
 
•  Life insurance and accidental death and dismemberment coverage;

• 

• 

401(k) plan;

Short- and long-term disability insurance with supplemental income continuation;

•  Health care and dependent care flexible spending account programs;

•  Employee assistance program (EAP);

•  Employee stock purchase plan;

•  Employee referral bonus program; 

• 

IP recognition awards; and

•  Matching of charitable donations through the Company-sponsored charitable foundation. 

The  Company,  in  its  discretion,  may  offer  to  reimburse  the  expenses  that  an  employee  incurs  as  a  result  of  the  Company 
requiring the individual to relocate their primary residence for employment purposes.  The Compensation Committee believes 
that these benefits are consistent with industry practice and are important in recruiting and retaining qualified employees.

Limited Perquisites

The Company does not offer extensive perquisites to our executive officers.  For 2022, the Compensation Committee reviewed 
the potential perquisites to be offered by the Company to the executive officers and determined that such perquisites would be 
limited to Company-paid tax preparation services and Company-paid membership in one airline executive club.  Executive 
officers are also eligible to participate in the Company’s Charitable Match Program, under which the Company will match, 
dollar for dollar, up to $1,000 in donations to eligible charitable organizations. The Compensation Committee believes that 
these benefits are reasonable and consistent with the Company’s overall compensation program and enable the Company to 
attract and retain superior employees for key positions.

Retirement Provision For Equity Awards

All employees, including our NEOs, are also eligible to participate in the Company’s post-retirement equity award vesting 
program.  Under that program:

•  An employee is “retirement eligible” if they achieve a combination of age plus years of service with the Company 

totaling 70, with a base minimum age of 58 years old and a minimum service requirement of five years. 

•  Upon retirement by the employee, any equity awards granted by the Company shall vest based on:

◦  The vesting schedule established for service-based equity awards; or

◦  The actual performance results for performance-based equity awards. 

Employee Stock Purchase Plan

The Company (as successor to Nanometrics) has maintained an Employee Stock Purchase Plan since 1986. The Company’s 
2020 Employee Stock Purchase Plan was approved by stockholders in 2020 and is currently administered by the Compensation 
Committee. 

Under the terms of our current Employee Stock Purchase Plan, eligible employees may elect to have up to fifteen percent (15%) 
of eligible compensation deducted from their base salary and applied to the purchase of shares of Company Common Stock. 
The price the employee pays for each share of stock is eighty-five percent (85%) of the fair market value of the Company 
Common Stock at the end of the applicable six-month purchase period. The Employee Stock Purchase Plan qualifies as a non-
compensatory plan under Code Section 423.

39

CORPORATE AND GOVERNANCE POLICIES

 Employment And Change-In-Control Agreements

Each of the NEOs is entitled to payments upon a qualifying termination of employment following a change-in-control event. 
The Compensation Committee believes that providing severance in a change-in-control situation is beneficial to stockholders 
so that executive officers may remain objectively neutral when evaluating a transaction that may be beneficial to stockholders 
yet could negatively impact the continued employment of the executive officer. 

The Company is party to an employment agreement with Mr. Plisinski that provides for certain benefits upon termination or a 
change in control of the Company.  Upon the appointment of Mr. Plisinski to the position of CEO of Rudolph, he entered into 
a new employment agreement with Rudolph, which was assumed by the Company in connection with the 2019 Merger. 

We have also entered into the same form of Executive Change in Control Agreement with each of our other current NEOs.  Mr. 
Roth was party to a management agreement with the Company that provided for certain benefits in the event of termination or 
a change in control of the Company.  Mr. Roth voluntarily resigned at the end of 2022, however, and therefore no termination 
or change in control benefits were paid to him.

See  “Potential  Payments  Upon  Termination  of  Employment  or  Change  in  Control”  below  for  a  description  of  these 
arrangements  and  potential  payments  that  the  NEOs  would  have  been  entitled  to  receive  upon  applicable  hypothetical 
termination scenarios as of December 31, 2022.

 Other Elements Of Post-Termination Compensation

The  Company  does  not  have  a  practice  of  providing  retirement  benefits,  including  any  supplemental  executive  officer 
retirement plans (SERP), to its executive officers, other than through its 401(k) plan and post-retirement vesting for equity  
awards granted by the Company, as described above. The Company retains the discretion to utilize the offer of severance and/or 
change-in-control protection as an incentive in its hiring and retention of executive officers.

 Non-Solicitation And Non-Competition Policy

The Company maintains a policy of entering into an agreement with each of its new executive officers, which contains both 
non-solicitation  and  non-competition  provisions.    Each  of  our  NEOs  is  party  to  such  an  agreement.  The  non-solicitation 
provisions apply for one year after termination of the individual’s employment while the non-competition provisions are in 
effect during the individual’s employment and generally for one year thereafter, except for Mr. Plisinski, whose non-solicitation 
and non-competition provisions are in place during and extend for two years after the end of his employment with the Company.  
In all cases, these covenants have been implemented to protect the confidential information, goodwill and other assets of the 
Company. For those individuals with employment agreements, should a breach of the non-solicitation or non-competition terms 
of their agreements occur, this could give rise to the Company declaring a breach under the agreement and terminating all 
severance payments thereunder.

 General Termination Benefits

Upon termination of an executive officer’s employment with the Company, the individual is entitled to receive his or her base 
salary  earned  through  the  termination  date.  Thereafter,  further  cash  compensation  to  the  executive  officer  is  discontinued, 
except to the extent that severance or change-in-control payments are required to be made in accordance with individual or 
Company  severance  protection  arrangements.    Pursuant  to  his  employment  agreement  with  the  Company,  Mr.  Plisinski  is 
entitled to elect to continue group health or other group benefits as allowed by COBRA with continued Company co-payments 
for agreed post-termination periods. The Company retains the right to offer severance and/or payment of COBRA benefits to 
any  individual  who  is  terminated  from  the  Company  at  its  discretion.    See  “Potential  Payments  Upon  Termination  of 
Employment or Change in Control” below for a further description of these arrangements.

40

 Stock Ownership Policy

The Company has established a stock ownership policy for its non-employee directors and executive officers subject to Section 
16 reporting requirements, which is designed to align the interests of Company leadership with the interests of stockholders 
and give Company leadership a stake in the long-term financial future of the Company.

The stock ownership levels currently in effect under the policy are the following:

Company Role

Non-Employee Directors

CEO

Company Common Stock 
Holding Requirement

Effective Date

3x value of the annual 
retainer

Within 5 years of initial election 
to Board

3x value of CEO’s
base salary

Within 5 years of hire/promotion

Executive Officers Subject to 
Section 16 Reporting Requirements

1x value of executive officer’s
base salary

Within 5 years of hire/promotion

In assessing compliance with the foregoing guidelines, the Company takes into consideration only the ownership of Common 
Stock in the Company and unexercised stock options that are vested and “in-the-money.” As a result, unearned PSUs, unvested 
service-based RSUs and unvested stock options do not qualify as shares for purposes of compliance with the Company’s stock 
ownership and retention guidelines.

Participants  are  expected  to  achieve  their  ownership  guideline  target  within  five  years  of  becoming  subject  to  the  policy. 
Existing participants were subject to this policy as of the date of the policy and any new participants will be subject to the 
policy on their hire, promotion, election or appointment date, as applicable.

Compliance  with  the  Company’s  stock  ownership  and  retention  guidelines  is  reviewed  annually  by  the  Compensation 
Committee. As of its last review in January 2023, the Compensation Committee determined that all executive officers and 
directors who were with the Company and acting in their executive officer/director capacities for periods in excess of one year 
were in compliance with the ownership requirements. Should any individual in the future not own the minimum number of 
required shares after notice by the Compensation Committee, additional action, including possible removal from the executive 
officer role or a determination to not nominate the director for election, would be considered by the Board.

The Compensation Committee has scheduled its review of the Company’s stock ownership and retention guidelines for its 
January 2024 meeting and at this annual review will evaluate the appropriateness of the foregoing stock ownership levels for 
2024 based in part on the average closing price of a share of the Company’s stock during the 30 consecutive trading days 
ending on and including the last day of the most recently completed fiscal year, as well as other considerations such as market 
conditions and comparable practices within the industry.

 Prohibition On Pledging, Margining or Hedging Of Company Stock

Our  insider  trading  policy  prohibits  Company  directors  and  employees,  including  our  executive  officers,  from  purchasing 
Company  securities  on  margin,  borrowing  against  Company  securities  held  in  a  margin  account,  or  pledging  Company 
securities as collateral for a loan. Company directors and employees are also prohibited from engaging in short sales, derivative 
transactions, and hedging transactions involving Company securities.

 Adjustments Or Recovery Of Prior Compensation

The Company has also adopted an incentive compensation clawback policy that provides for the recovery or adjustment of 
performance-based compensation awarded  or paid  to current or former executive officers  during the prior  three completed 
fiscal years in the event that the financial results on which an award or payment was determined are restated to correct a material 
non-compliance with any financial reporting requirements under applicable securities laws. 

In addition, if the Company is required to restate its financial results due to material noncompliance with any financial reporting 
requirements as a result of misconduct, the Sarbanes-Oxley Act of 2002 requires the CEO and CFO to disgorge:

41

•  Any bonus or other incentive-based or equity-based compensation received from the Company during the 12-month 

period following the first public issuance of the non-compliant financial reporting document; and

•  Any profits realized from the sale of Company stock during that 12-month period. 

 Compensation Program Risk Assessment

In  2022,  the  Compensation  Committee,  with  advice  and  input  from  Compensia,  its  independent  compensation  consultant, 
reviewed our compensation program and whether compensation design features may have the potential to incentivize executive 
officers to take risks that are reasonably likely to have a material adverse effect on the Company.  Among others, the Committee 
reviewed the following features of our compensation program: compensation philosophy and pay mix; performance measures 
used in incentive plans; goal setting and payout leverage and caps; calculation and verification of performance outcomes for 
incentive payments; and mitigating factors built into the program to reduce risk.  Based on this review and the input from 
Compensia, the Compensation Committee concluded that the Company’s compensation program does not create risks that are 
reasonably likely to have a material adverse effect on the Company.

 IRS Limits On Deductibility Of Compensation

Prior to the enactment of the Tax Cuts and Jobs Act of 2017 (the “Tax Act”) in December 2017, Section 162(m) of the Internal 
Revenue Code of 1986, as amended (“IRC”), limited the tax deductibility of annual compensation in excess of $1 million paid 
to any public corporation’s CEO and three other highest-paid executive officers (other than the chief financial officer).  Certain 
qualifying performance-based compensation was not subject to the $1 million deduction limit, however.  With the passage of 
the  Tax  Act,  only  qualifying  performance-based  compensation  paid  pursuant  to  a  binding  written  contract  in  effect  on 
November 2, 2017 (and not modified in any material respect on or after November 2, 2017) as set forth under the Tax Act will 
be eligible for the deduction exception.  The Tax Act also expanded the executive officers covered by Section 162(m) to include 
the chief financial officer as well as any person who ever was a covered executive officer for any prior taxable year, beginning 
after December 31, 2016.  As a result of these changes, starting in 2018, compensation payable by us in excess of $1 million 
to  any  person  who  was  an  NEO  since  fiscal  year  2016  is  non-deductible,  regardless  of  whether  the  compensation  is 
performance-based.

Although  the  Compensation  Committee  considers  deductibility  issues  when  approving  executive  officer  compensation 
elements,  the  Compensation  Committee  believes  that  the  other  compensation  objectives,  such  as  attracting,  retaining  and 
providing appropriate incentives to executive officers, are important and can supersede the goal of maintaining deductibility. 
Consequently, the Compensation Committee generally makes compensation decisions without regard to deductibility, as the 
Compensation  Committee  believes  it  has  appropriately  structured  its  compensation  programs  to  provide  incentives  to  our 
executive officers to increase Company return and stockholder value.

42

CONCLUSION

In reviewing its compensation programs, the Company has concluded that each element of compensation as well as the total 
compensation opportunities for its executive officers, including the NEOs, are reasonable, appropriate and in the interests of 
the  Company  and  its  stockholders.  The  Company  believes  that  this  compensation  program  appropriately  satisfies  the 
Company’s goals of establishing a compensation package that attracts and retains a strong, motivated leadership team, aligns 
the financial incentives of the executive officers with the interests of the stockholders, and rewards the achievement of specific 
annual, long-term, and strategic goals of the Company. The Company believes that the compensation program, which has been 
established and is reflected herein has enabled it to recruit and secure a talented and motivated leadership team by which the 
Company drives toward the ultimate objective of improving stockholder value.

43

COMPENSATION COMMITTEE REPORT ON
EXECUTIVE OFFICER COMPENSATION

We,  the  Compensation  Committee  of  the  Board,  have  reviewed  and  discussed  the  Compensation  Discussion  and  Analysis 
(“CD&A”) within the Executive Officer Compensation section of this proxy statement with the management of the Company. 
Based on such review and discussions, we have recommended to the Board that the CD&A be included as part of this proxy 
statement.

THE COMPENSATION COMMITTEE

David B. Miller (Chairperson)
Leo Berlinghieri
May Su
Christine A. Tsingos

44

 Summary Compensation Table

The following table summarizes the compensation earned by our NEOs in the fiscal years noted.

Name and Principal Position

  Michael P. Plisinski

Chief Executive Officer

  Mark R. Slicer (4)

Chief Financial Officer
  James (Cody) Harlow (5)
Chief Operating Officer
  Robert Fiordalice (5)

Senior Vice President & General Manager, 
Metrology Business Unit

  Yoon Ah E. Oh (6)

Vice President, General Counsel, and
Corporate Secretary
  Steven R. Roth (7)

Former Senior Vice President, Finance &
Administration and Chief Financial Officer

Year
2022
2021
2020
2022

Salary ($)
$634,751
$639,353
$592,089
$275,192

Bonus ($)
—
—
—

$150,000

Stock Awards 
($)(1)

$3,977,905
$3,487,747
$2,672,777
$1,000,038

Non-Equity 
Incentive Plan 
Compensation 
($)(2)
$697,044
$995,529
$489,408
$240,334

All Other 
Compensation 
($)(3)

$3,601
$11,681
$9,414
$5,652

Total ($)
$5,313,301
$5,134,310
$3,763,688
$1,671,216

2022

$307,962

2022

$308,276

2022
2021

2022
2021
2020

$359,288
$60,577

$225,606
$433,095
$400,975

—

—

—

$250,000

—
—
—

$397,810

$202,910

$98,384

$1,007,066

$363,773

$202,381

$7,999

$882,429

$568,303
$600,008

$556,934
$755,707
$545,698

$206,287
$54,610

$155,794
$462,843
$215,489

$9,490
$115

$1,143,368
$965,310

$7,458
$11,844
$9,414

$945,792
$1,663,489
$1,171,576

(1) Amounts  reflect  the  grant  date  fair  value  for  each  share-based  compensation  award  granted  to  the  NEOs  during  the  covered  year, 
calculated in accordance with FASB ASC Topic 718. The assumptions used in determining the grant date fair values of awards are set 
forth in Note 2 to our consolidated financial statements, which are included in our Annual Report on Form 10-K filed with the SEC on 
February 24, 2023. For 2022, the amount reported for each NEO includes the grant date fair value attributable to the 2022 awards of 
(i) time-based RSUs and (ii) PSUs, assuming that the performance conditions were satisfied at target at the time of grant. The grant 
date  fair  value  attributable  to  the  2022  PSU  awards,  assuming  maximum  performance  achievement,  is  as  follows:  Mr.  Plisinski, 
$4,455,747; Mr. Harlow, $445,594; Mr. Fiordalice, $407,471; Ms. Oh, $636,465; and Mr. Roth, $623,834.  Mr. Slicer's stock awards 
in 2022 were entirely in the form of time-based RSUs. The actual amounts earned will be determined following the end of the two-
year performance period (February 10, 2022 – February 10, 2024) and the three-year performance period (February 10, 2022 – February 
10, 2025).

(2) The  amounts  for  a  given  year  represent  the  amount  earned  in  respect  of  that  year  under  the  Company’s  annual  cash  performance 
incentive plan, as applicable, notwithstanding the year in which it was paid.  See “Compensation Discussion and Analysis – Annual 
Cash Incentive Compensation” for further information. 

(3) Refer to the All Other Compensation table for more detailed information about the 2022 compensation reported in this column.
(4) Mr. Slicer joined the Company as Chief Financial Officer effective May 17, 2022.
(5) Although employed by Onto Innovation prior to 2022, Mr. Harlow and Mr. Fiordalice were not NEOs prior to 2022.
(6) Ms. Oh joined the Company as Vice President & General Counsel effective October 25, 2021.

(7) Mr. Roth served as Principal Financial Officer of the Company from the Merger Date until May 17, 2022.

45

 All Other Compensation

Name

Michael P. Plisinski
Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh
Steven R. Roth

Year
2022
2022
2022
2022
2022
2022

Matching
Contribution
to 401(k) ($)
$2,911
$5,192
$8,530
$7,309
$8,800
$6,768

Insurance
($)(1)
$690
$460
$690
$690
$690
$690

Perquisites and
Other Personal
Benefits ($)(2)
—
—
$89,164
—
—
—

Severance
Compensation ($)
—
—
—
—
—
—

Total
($)
$3,601
$5,652
$98,384
$7,999
$9,490
$7,458

(1)

Insurance  is  the  premium  associated  with  coverage  under  the  group  term  life  insurance  and  accidental  death  and  dismemberment 
insurance plans. Coverage is equal to the lesser of two (2) times salary or $500,000.

(2) The value of aggregate perquisites and benefits for each NEO except Mr. Harlow is less than $10,000, and therefore, perquisites for 
these individuals are not required to be disclosed in accordance with SEC rules. Mr. Harlow's perquisites included income tax return 
preparation fees of $785, executive airline club fees of $695 and moving/relocation expense reimbursements of $87,684.

 Grants Of Plan-Based Awards In 2022

The  following  table  sets  forth  information  with  respect  to  non-equity  and  equity  incentive  plan  awards  that  were 
granted during 2022 to the NEOs. No stock option awards were granted to any NEO in 2022.

Name

$32,445

$55,125

 Mark R. Slicer

 Michael P. Plisinski

Grant Date Threshold
$111,456
2/10/2022
2/10/2022
2/10/2022
5/17/2022
5/17/2022
 James (Cody) Harlow 2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022
2/10/2022

 Robert Fiordalice

 Yoon Ah E. Oh

 Steven R. Roth

$11,678

$31,544

$47,646

Estimated Future Payouts Under
Non-Equity Incentive Plan
Awards ($) (1)
Target

Maximum
$636,891 $1,082,715

Estimated Future Payouts Under
Equity Incentive Plan Awards (#)(2)
Target

Threshold

Maximum

$315,000

$535,500

$185,400

$315,180

$155,700

$264,690

$180,250

$306,425

$272,260

$462,843

9,525

19,049

38,098

953

1,905

3,810

871

1,742

3,484

1,361

2,721

5,442

1,334

2,667

5,334

All Other

Stock

Awards:

Grant Date

Number of
Shares of
Stock or
Units (#) (3)

Fair Value
of Stock
and Option
Awards ($)

19,049

$2,227,874
$1,750,032

12,821

$1,000,038

1,905

1,742

2,722

2,667

$222,797
$175,012

$203,736
$160,038

$318,232
$250,070

$311,917
$245,017

(1) The  amounts  reported  in  these  columns  represent  the  annual  cash  incentive  opportunities  under  the  Company’s  cash  incentive 
compensation plan for each of our NEOs for the 2022 performance period. The metrics against which performance was measured under 
this plan, as well as other details regarding the plan, are discussed above in the Compensation Discussion and Analysis under “Annual 
Cash Incentive Compensation.” The amounts actually earned by our NEOs under the plan are reflected in the “Non-Equity Incentive 
Plan Compensation” column of the Summary Compensation Table above.

(2) The amounts reported in these columns represent the award opportunities under the Company’s PSU program. The metrics against 
which  performance  will  be  measured  under  this  program,  as  well  as  other  details  regarding  the  plan,  are  discussed  above  in  the 
Compensation Discussion and Analysis under the heading “Long-Term Equity Incentive Plan.” The performance periods for these 
awards are two years and three years with the final determinations of the award ultimately earned being made in 2024 and 2025.

46

(3) The amounts reported in this column represent the awards of RSUs which are subject to service-based vesting conditions, as discussed 
above in the Compensation Discussion and Analysis under the heading “Long-Term Equity Incentive Plan.” These RSUs vest in 33.3% 
increments on each of the first three anniversaries of the grant date.

 Outstanding Equity Awards At 2022 Fiscal Year-End

The following table sets forth information with respect to outstanding equity awards held by the NEOs as of December 31, 
2022. No stock option awards were outstanding as of December 31, 2022.

Stock Awards

Name
 Michael P. Plisinski

 Mark R. Slicer
 James (Cody) 
Harlow

 Robert Fiordalice

 Yoon Ah E. Oh

 Steven R. Roth(5)

Grant
Date (1)

2/7/2020
2/8/2021
2/10/2022
5/17/2022

10/1/2021

2/10/2022
2/7/2020
2/8/2021
2/10/2022
10/25/2021
2/10/2022
2/7/2020
2/8/2021
2/10/2022

Number of Shares
or Units of Stock
That Have Not
Vested (#)(2)
10,403
16,556
19,049
12,821

Market Value of
Shares or Units of
Stock That Have
Not Vested ($)(3)
$708,340
$1,127,298
$1,297,046
$872,982

2,738

1,905
563
938
1,742
5,362
2,722
2,124
3,587
2,667

$186,430

$129,711
$38,335
$63,868
$118,613
$365,099
$185,341
$144,623
$244,239
$181,596

Equity Incentive Plan
Awards: Number of Unearned
Shares, Units or Other
Rights That Have Not
Vested (#)(4)
15,604
24,834
19,049

Equity Incentive Plan
Awards: Market or Payout
Value of Unearned
Shares, Units or Other
Rights That Have Not
Vested ($) (3)
$1,062,476
$1,690,947
$1,297,046

1,905
845
1,407
1,742

2,721
3,186
5,381
2,667

$129,711
$57,536
$95,803
$118,613

$185,273
$216,935
$366,392
$181,596

(1) For a better understanding of this table, we have included an additional column showing the grant date of each stock award.

(2) Amount includes service-based RSU awards vesting 1/3rd per year on the anniversary of the grant date.

(3) Based on the Company’s common stock closing price of $68.09 per share on December 31, 2022.

(4) PSU awards are reported in this table at number of target shares. The actual number of shares earned will be determined based on 
performance  achievement  measured  over  two  (2)-  and  three  (3)-year  performance  periods,  and  any  earned  shares  will  vest  on  the 
second and third anniversaries, respectively, of the grant date.

(5) Mr. Roth participates in the Company’s post-retirement equity award vesting program.

 Stock Vested In 2022

The following table sets forth information with respect to the value realized by the NEOs upon vesting of PSUs and RSUs 
during 2022, and such values reflect the total pre-tax value realized by each NEO.  There were no stock option exercises by 
any of the NEOs during 2022.

Name

 Michael P. Plisinski
 Mark R. Slicer
 James (Cody) Harlow
 Robert Fiordalice
 Yoon Ah E. Oh
 Steven R. Roth

Stock Awards

Number of
Shares Acquired
on Vesting (#)

Value
Realized on
Vesting ($)(1)

56,453
—
1,369
4,117
2,681
12,616

$5,124,158
—
$87,684
$359,528
$180,431
$1,144,668

(1) The aggregate dollar amount realized is based on the fair market value of the shares upon vesting.

47

 Pay Versus Performance

We are required by SEC rules to disclose the following information regarding compensation paid to our NEOs.  The amounts 
set  forth  below  under  the  headings  “Compensation  Actually  Paid  to  CEO”  and  “Average  Compensation  Actually  Paid  for 
NEOs” have been calculated in a manner consistent with Item 402(v) of Regulation S-K. Footnotes (4), (5) and (6) below set 
forth the adjustments from the Total Compensation for each NEO reported in the Summary Compensation Table above.

The following table sets forth additional compensation information of our Chief Executive Officer (CEO) and our non-CEO 
NEOs along with total shareholder return, net income and total revenue performance results for fiscal years 2020, 2021 and 
2022.

Summary 
Compensation 
Table for CEO

$5,313,301
$5,134,310
$3,763,688

Compensation 
Actually Paid to 
CEO(2)(3)
$2,086,925
$13,985,674
$4,453,187

Year (1)
2022
2021
2020

Average 
Summary
Compensation 
Table Total for 
NEOs
$1,129,974
$1,069,940
$934,489

Average
Compensation 
Actually Paid to 
NEOs(2)(3)

$711,974
$2,149,621
$1,463,581

Value of Initial Fixed $100 
Investment Based on:

Total Shareholder 
Return(7)

Peer Group Total 
Shareholder 
Return(7)

$86.27
$176.97
$30.11

$42.98
$125.09
$56.09

(1)  The CEO and NEOs included in the above compensation columns reflect the following:

Net Income

Total Revenue

$223,334
$142,349
$31,025

$1,005,183
$788,899
$556,496

CEO

Year
2022 Michael P. Plisinski
2021 Michael P. Plisinski
2020 Michael P. Plisinski

Mark R. Slicer, James (Cody) Harlow, Robert Fiordalice, Yoon Ah E. Oh, Steven R. Roth
Steven R. Roth, Rollin Kocher, Kevin Heidrich, Robert A. Koch, Yoon Ah E. Oh
Steven R. Roth, Rollin Kocher, Kevin Heidrich, Robert A. Koch

NEOs

(2)  Fair value or change in fair value, as applicable, of equity awards in the “Compensation Actually Paid” columns was 
determined by reference to (1) for RSU awards, closing price on applicable year-end dates or, in the case of vesting dates, 
the actual vesting price, (2) for TSR-based PSU awards, the fair value calculated by a Monte Carlo simulation model as 
of the applicable year-end date(s) or, in the case of vesting date, the actual vesting price and probability of achievement.

(3)  For the portion of “Compensation Actually Paid” that is based on year-end stock prices, the following prices were used: 
for 2022: $68.09 (32.7% reduction from prior year), for 2021: $101.23 (110.8% increase from prior year), and for 2020: 
$48.02 (1.0% increase from prior year).

(4)  2022 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the 

following adjustments from Total Compensation reported in the Summary Compensation Table:

 Total Reported in 2022 Summary Compensation Table (SCT)
 Less, Value of Stock & Option Awards Reported in SCT
 Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT
 Plus, Pension Service Cost and impact of Pension Plan Amendments
 Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding
 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested
 Plus, FMV of Awards Granted this Year and that Vested this Year
 Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year
 Less, Prior Year Fair Value of Prior Year awards that failed to vest this year
 Total Adjustments
 “Compensation Actually Paid” for Fiscal Year 2022

CEO

Average of NEOs

$5,313,301
($3,977,905)
—
—
$2,764,863
($2,584,704)
—
$571,370
—
($3,226,376)
$2,086,925

$1,129,974
($577,372)
—
—
$436,885
($143,057)
—
($134,457)
—
($418,000)
$711,974

48

(5)  2021 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the 

following adjustments from Total Compensation reported in the Summary Compensation Table:

 Total Reported in 2021 Summary Compensation Table (SCT)
 Less, Value of Stock & Option Awards Reported in SCT
 Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT
 Plus, Pension Service Cost and impact of Pension Plan Amendments
 Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding
 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested
 Plus, FMV of Awards Granted this Year and that Vested this Year
 Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year
 Less, Prior Year Fair Value of Prior Year awards that failed to vest this year
 Total Adjustments
 “Compensation Actually Paid” for Fiscal Year 2021

CEO

Average of NEOs

$5,134,310
($3,487,747)
—
—
$6,761,134
$5,241,435
—
$336,542
—
$8,851,364
$13,985,674

$1,069,940
($533,902)
—
—
$879,706
$665,069
—
$68,807
—
$1,079,680
$2,149,621

(6)  2021 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the 

following adjustments from Total Compensation reported in the Summary Compensation Table:

 Total Reported in 2020 Summary Compensation Table (SCT)
 Less, Value of Stock & Option Awards Reported in SCT
 Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT
 Plus, Pension Service Cost and impact of Pension Plan Amendments
 Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding
 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested
 Plus, FMV of Awards Granted this Year and that Vested this Year
 Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year
 Less, Prior Year Fair Value of Prior Year awards that failed to vest this year
 Total Adjustments
 “Compensation Actually Paid” for Fiscal Year 2020

CEO

Average of NEOs

$3,763,688
($2,672,777)
—
—
$2,941,125
$318,972
—
$102,179
—
$689,499
$4,453,187

$934,489
($435,715)
—
—
$479,458
$487,384
—
($2,036)
—
$529,092
$1,463,581

(7)    Company  and  Peer  Group  TSR  reflects  the  Company’s  peer  group  (PHLX  Semiconductor  Index)  as  reflected  in  our 
Annual Report on the Form 10-K pursuant to Item 201(e) of Regulation S-K for the fiscal year ended December 31, 2022. 
Each year reflects what the cumulative value of $100 would be, including the reinvestment of dividends, if such amount 
were invested on December 31, 2019.

Pay versus Performance Descriptive Disclosure

We chose Total Revenue as our Company Selected Measure for evaluating Pay versus Performance because it is a key metric, 
along with operating income, in determining the annual cash incentive compensation paid to the CEO and other NEOs.  It also 
highlights the rapid growth of the Company over the last three years.

Our TSR lagged the TSR for our peer group in 2020 but increased significantly in 2021 both in terms of real dollars and in 
relation to our peer group TSR, which our TSR exceeded by approximately 40%.  In 2022, the dollar value of our TSR dropped 
but  was  nonetheless  over  100%  greater  than  our  peer  group  TSR.    There  is  a  positive  relationship  between  TSR  and 
“Compensation Actually Paid” to our CEO and the other NEOs between 2020 and 2021, when both metrics increased, and 
between 2021 and 2022, when both metrics dropped, despite our TSR equaling approximately twice our peer group TSR.  
There is a positive relationship between Net Income and “Compensation Actually Paid” to our CEO and the other NEOs 
between  2020  and  2021,  when  both  metrics  increased.    There  is  an  inverse  relationship  between  Net  Income  and 
“Compensation Actually Paid” to our CEO and the other NEOs between 2021 and 2020 when Net Income increased, but 
“Compensation Actually Paid” decreased.  Similarly, from 2020 to 2021 there is a positive relationship between Total Revenue 
and “Compensation Actually Paid”, when both metrics increased, and an inverse relationship between 2021 and 2020 when 
Total Revenue increased, but “Compensation Actually Paid” to our CEO and the other NEOs decreased.

49

Pay versus Performance Tabular List

The table below lists our most important performance measures used to link “Compensation Actually Paid” for our NEOs to 
company performance, over the fiscal year ending December 31, 2022.  Both Total Revenue and Operating Income factor into 
the  annual  cash  incentive  compensation  paid  to  NEOs  and  Company  TSR  over  two-  and  three-year  measurement  periods 
determine the ultimate value of PSUs awarded to NEOs.  For a further discussion of how each of these financial measures 
relates to NEO compensation, see our “Compensation Discussion and Analysis” beginning on page 26 of this Proxy Statement.  
The performance measures included in this table are not ranked by relative importance.

 Total Revenue
 Operating Income
 TSR

Most Important Financial Measures

 Pension And Nonqualified Deferred Compensation

The Company does not have a defined benefit pension program, nor does it offer non-qualified deferred compensation.

 Potential Payments Upon Termination Of Employment Or Change In Control

This section (including the following tables) summarizes each NEO’s estimated payments and other benefits that would be 
received by the NEO or the NEO’s estate if his or her employment had terminated on December 31, 2022, under the hypothetical 
circumstances set forth below.  As Mr. Roth voluntarily resigned from the Company in December 2022, he did not receive any 
termination payments (other than post-retirement equity award vesting) from the Company and we do not include discussion 
of potential payments upon his termination or a change in control below.

Certain of our NEOs are entitled to certain termination payments upon his or her death or Disability, his or her involuntary 
termination without Cause, or his or her voluntary termination with Good Reason as described below.  Although the definitions 
of each of these terms is specific to the NEO’s employment agreement or change-in-control agreement with the Company, the 
terms generally have the following meanings:

• 

• 

“Disability” generally means that the executive officer, due to physical or mental impairment, is unable to perform his 
or her duties to the Company for a specified period of time.

“Cause” generally means that the executive officer engaged in a crime, willful gross misconduct or other serious act 
involving  moral  turpitude;  materially  breached  an  agreement  between  him  or  her  and  the  Company;  or  otherwise 
materially breached his or her obligations to the Company.

•  A  voluntary  termination  for  “Good  Reason”  generally  means,  depending  on  the  particular  executive  officer’s 
agreement,  that  the  executive  officer’s  duties,  responsibilities  or  status  with  the  Company  or  its  successor  are 
materially reduced; his or her primary place of work is moved to a location outside a predetermined radius; in particular 
cases, certain reduction in compensation; or the Company materially breaches the terms of his or her agreement with 
the Company or any successor fails to assume the executive officer’s change-in-control agreement.

In addition to the payments and other benefits described below, under our 2020 Stock Plan, in the event of a change in control, 
unless  the  Board  or  Compensation  Committee  determine  that  some  other  treatment  is  warranted  in  their  discretion,  if  the 
acquiror elects not to assume or substitute an equity award, then upon the effective date of the change in control all RSUs and 
PSUs held by any employees of the Company (including NEOs) become fully vested and the performance goals or other vesting 
conditions for PSUs shall be deemed achieved at 100% of the target levels.

50

 NEO Employment and Change in Control Agreements

Mr. Plisinski’s employment agreement provides for the following:

Mr. Plisinski

•

•

In the event of any termination of Mr. Plisinski’s employment, he is entitled to payment of all base salary due and 
owing through the termination date and an amount equal to all earned but unused vacation through the termination 
date.

In the event Mr. Plisinski’s employment is terminated due to his death, his estate would be entitled to:



Payment of his then-current base salary as if his employment had continued for three months following his death;

 Continued  co-payment  for  a  period  of  six  months  following  his  death  of  amounts  due  under  COBRA  for 
continuation of the Company’s group health and other group benefits for his covered dependents, if the covered 
dependents so elect;





Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the time 
employed preceding his death, to be paid out with the Company’s annual incentive plan payouts; and

Immediate  vesting  of  stock  options  and  SARs,  and  immediate  vesting  of  RSU  awards  granted  after  his 
appointment as CEO which by their terms would vest within 12 months after death and, if a performance award, 
based on actual performance achievement for such performance period completed within 12 months after death.

•

In the event Mr. Plisinski’s employment is terminated due to his Disability, he would be entitled to:



Payment of his then-current base salary through the end of the month of such termination;

 Continued  co-payment  for  a  maximum  period  of  six  months  following  his  Disability  of  amounts  due  under 
COBRA  for  continuation  of  the  Company’s  group  health  and  other  group  benefits,  if  he  or  his  covered 
dependents, as appropriate, so elects;





Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the time 
employed preceding his termination, to be paid out with the Company’s annual incentive plan payouts; and

Immediate  vesting  of  stock  options  and  SARs,  and  immediate  vesting  of  RSU  awards  granted  after  his 
appointment as CEO which by their terms would vest within 12 months after termination for disability and, if a 
performance award, based on actual performance achievement for such performance period completed within 
12 months after termination.

•

In the event Mr. Plisinski’s employment is terminated by the Company without Cause or Mr. Plisinski terminates his 
employment for Good Reason, he would be entitled to:



Payment of two times his then-current base salary, paid over 24 months (i.e., salary continuation for two years);

 Continued co-payment for a period of up to 18 months of amounts due under COBRA for continuation of the 

Company’s group health and other group benefits, if he so elects; and

 Vesting of any equity incentive awards outstanding as of the termination date that, by their terms:

(1) represent  either  unvested  shares  which  were  earned  based  on  a  completed  performance  period  under  a 
performance-based award granted on or after the employment agreement effective date and which as of the 
termination date are then subject to time-based vesting only, or shares under such an equity incentive award 
granted on or after the employment agreement effective date which will be earned under a performance-based 
award based on actual achievement under a performance period which has been completed on or prior to the 
termination date but as to which performance period the actual number of shares earned against the award 
performance goals has not yet been determined by the Company; and 

(2) would  have  become  vested  based  solely  on  the  passage  of  time  within  the  12-month  period  immediately 

following the termination date had Mr. Plisinski continued in employment with the Company.

51

•

If, within 18 months following the occurrence of a Change in Control, Mr. Plisinski’s employment is terminated for 
any reason other than for Cause or Mr. Plisinski terminates his employment for Good Reason, he would be entitled 
to:



Payment of two times the sum of his then-current base salary and target annual cash bonus, paid over 24 months;

 Continued co-payment for a period of up to 18 months of amounts due under COBRA for continuation of the 

Company’s group health and other group benefits, if he so elects; and







Immediate vesting of all unvested stock options, SARs and all unvested and outstanding performance-based (at 
target) and service-based RSUs and other equity awards.

To the extent that Change in Control termination payments made to Mr. Plisinski under his agreement are subject 
to the excise tax imposed by Section 4999 of the IRC, Mr. Plisinski would either have to pay the excise tax or 
have his benefits reduced so that no portion of his termination payments were subject to the excise tax.

In order to receive these termination or Change in Control termination payments, Mr. Plisinski would be required 
to sign a general release of all known and unknown claims that he may have against the Company.

 As  part  of  his  employment  agreement,  Mr.  Plisinski  is  subject  to  non-solicitation  and  non-competition 
restrictions that limit his ability to compete with the Company during the term of the agreement and for a period 
of two years following his resignation or termination for any reason.

•

For Mr. Plisinski, a “Change in Control” would generally be considered to have occurred if:











a merger or consolidation of the Company or an acquisition by the Company involving the issuance of its securities 
as  consideration  for  the  acquired  business  results  in  the  stockholders  of  the  Company  following  such  transactions 
having less than 50% of combined voting power of the surviving entity;

any person or persons becomes the beneficial owner of 30% or more of our outstanding shares;

all or substantially all assets of the Company are disposed of pursuant to a plan of liquidation of the Company;

all or substantially all of our assets are sold; or

during any 12 month consecutive period the individuals who presently make up our Board or who become members 
of our Board with the approval of at least a majority of our existing Board cease to constitute at least a majority of the 
Board; provided any transaction or event described above will not constitute a change in control under the agreement 
unless it qualifies as a “change in control” under Section 409A of the IRC.

The following table reflects the potential payments to Mr. Plisinski in the event of his termination or his termination following 
a Change in Control as of December 31, 2022:

Potential Payments To Mr. Plisinski Upon Termination Or Change in Control
Value of
Accelerated
Unvested
Equity
$7,183,155

Management
Incentive
Bonus
—

Cash Severance

Base Salary

Benefits
Continuation

$48,538

Termination Circumstance as of 12/31/2022

By the Company without Cause

Executive officer resignation for Good Reason

Death

Disability

Within 18 months following Change in Control:

By the Company without Cause

By the executive officer with Good Reason

—

$7,183,155

$48,538

$697,044
(1x bonus)
$697,044
(1x bonus)

$1,394,088
(2x bonus)
$1,394,088
(2x bonus)

$7,183,155

$16,179

$7,183,155

$16,179

$7,183,155

$48,538

$7,183,155

$48,538

$1,273,782
(2x salary)
$1,273,782
(2x salary)
$159,223
(3 mos. salary)
—

$1,273,782
(2x salary)
$1,273,782
(2x salary)

52

Messrs. Slicer, Harlow, and Fiordalice and Ms. Oh

The Executive Change in Control Agreements for Messrs. Slicer, Harlow, and Fiordalice and Ms. Oh provide for the following:

• Upon cessation of the executive’s employment at the Company for any reason under the Executive Change in Control 

Agreement, the executive (or his or her estate) shall be entitled to payment of:

•

•

 All base salary earned through the executive's termination date but not yet paid;

 Any unreimbursed business expenses that are eligible for reimbursement under the Company’s policies;

 Any accrued but unused vacation pay or paid time off;

 Any  amount  arising  from  the  executive’s  participation  in,  or  benefits,  under  any  employee  benefits  plans, 

programs or arrangements; and

 Any amounts earned but not yet paid under any applicable bonus or incentive plan.

The executive (or his or her estate) shall also be entitled to any applicable indemnification rights.

If, within one year following the occurrence of a Change in Control, or within 60 days prior to the occurrence of a 
Change in Control, the executive’s employment is terminated for any reason other than for Cause or the executive 
resigns for Good Reason, the executive shall be entitled to the following benefits in exchange for an unrevoked general 
release:



Payment of his or her then-current base salary for a period of 12 months;

 Accelerated vesting of all unvested stock options, outstanding RSUs and other performance awards; 

 Any performance award that was assumed, substituted or continued with the Change in Control that had not 
already satisfied its performance conditions shall be treated as of the termination date as vested at the target level 
and fully vested as to any service conditions;





Payment of 100% of the executive’s target annual bonus for the fiscal year in which the termination date occurs; 
and

The executive may elect to maintain the executive’s and his or her dependent’s health care benefit coverage to 
the same extent provided for by and with the same Company/Executive officer payment contribution percentages 
under Company’s group plans at the time of termination. Such coverage shall extend for a term of one year from 
the termination date unless she becomes covered as an insured under another employer’s or spousal health care 
plan.

• Under the Executive Change in Control Agreements, a “Change in Control” would generally be considered to have 

occurred if:



any person or entity, or multiple persons or entities acting as a group, becomes the beneficial owner of more than 
50% of our outstanding voting shares;

 Continuing Directors no longer constitute a majority of the Board, where “Continuing Director” means a Board 
member who was a Board member when the Executive Change in Control Agreement was executed or who was 
nominated, elected or approved by at least a majority of Board members were, at that time, Continuing Directors, 
but excluding any individual whose initial assumption to office occurred as a result of any actual or threatened 
election contest or proxy solicitation, unless such person’s treatment as a Continuing Director is subsequently 
approved by a majority of Continuing Directors; or



there is consummation of a merger, consolidation, reorganization, recapitalization or statutory share exchange 
involving the Company or a sale or other disposition of all or substantially all of the assets of the Company in 
one  or  a  series  of  transactions  (a  “Business  Combination”),  unless,  immediately  following  such  Business 
Combination, each of the following three conditions is satisfied: (A) all or substantially all of the individuals 
and entities who were the beneficial owners of the then-outstanding shares of common stock entitled to vote 
immediately  prior  to  such  Business  Combination  still  beneficially  own  more  than  50%  of  the  outstanding 
securities of the surviving entity in substantially the same proportions as their ownership immediately prior to 
such Business Combination; (B) the individuals who were members of the Board of Directors of the Company 
immediately prior to the execution of the agreement providing for such Business Combination constitute at least 
50% of the members of the board of directors or other governing body of the acquiring entity; and (C) no person 

53

beneficially owns, directly or indirectly, securities that represent immediately after such merger or consolidation 
more than 50% of the combined voting power of the then outstanding voting securities of either the Company 
or the other surviving entity or its ultimate parent, or  of the combined voting power of the then-outstanding 
securities of such entity entitled to vote generally in the election of directors or other governing body (except to 
the extent that such ownership existed prior to the Business Combination).

The following table reflects the potential payments to Messrs. Slicer, Harlow, and Fiordalice and Ms. Oh in the event  any of 
them is terminated following a change in control as of December 31, 2022:

Potential Payments Within 12 Months Following Change in Control

Termination Circumstance as of 12/31/2022
By the Company without cause

Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh

By the executive officer with good reason

Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh

Cash Severance
(Base Salary)

Management
Incentive Bonus

Value of Accelerated
Unvested Equity

Benefits
Continuation

$450,000
$309,000
$311,400
$360,500

$450,000
$309,000
$311,400
$360,500

$315,000
$185,400
$155,700
$180,250

$315,000
$185,400
$155,700
$180,250

$872,982
$445,853
$492,767
$735,712

$872,982
$445,853
$492,767
$735,712

$32,358
$23,611
$32,358
$8,490

$32,358
$23,611
$32,358
$8,490

The following table reflects the potential payments to Messrs. Slicer, Harlow, and Fiordalice and Ms. Oh in the event  any of 
them is terminated following reasons other than change in control as of December 31, 2022:

Potential Payments Following Termination Circumstance as of 12/31/2022
Management Incentive Bonus

Name

Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh

Involuntary Without 
Cause Termination
$240,334
$202,910
$202,381
$206,287

Executive Resignation 
for Good Reason
$240,334
$202,910
$202,381
$206,287

Death
$240,334
$202,910
$202,381
$206,287

Disability
$240,334
$202,910
$202,381
$206,287

Each of Messrs. Slicer, Harlow, and Fiordalice and Ms. Oh has also entered into a separate agreement upon employment with 
the Company that subjects him or her to non-competition and non-solicitation restrictions, which limit his or her ability to 
compete with the Company during his or her employment and for a period of one year following his or her resignation or 
termination for any reason.

 Retention Bonus Agreements 

No NEO has entered into a Retention Bonus Agreement with the Company.

 CEO Pay Ratio

In  accordance  with  the  Dodd-Frank  Act  and  applicable  SEC  rules,  we  are  providing  the  following  information  about  the 
relationship of our CEO’s compensation to the compensation of all our employees. For 2022:

• the annual total compensation of the median employee was $131,080;

• the annual total compensation of our CEO, Michael P. Plisinski, as reported in the Summary Compensation Table included 

in this proxy statement, was $5,313,301; and

• the ratio of the annual total compensation of our CEO to the median employee’s annual total compensation was 41 to 1.

This pay ratio is a reasonable estimate calculated in good faith, in a manner consistent with Item 402(u) of Regulation S-K, 
based on our payroll and employment records and the methodology described below. The SEC rules for identifying the “median 
employee” and calculating the pay ratio based on that employee’s annual total compensation allow companies to adopt a variety 
of methodologies, to apply certain exclusions, and to make reasonable estimates and assumptions that reflect their compensation 

54

practices.  As such, the pay ratios reported by other companies may not be comparable to the pay ratio set forth above, as other 
companies may have different employment and compensation practices and may utilize different methodologies, exclusions, 
estimates and assumptions in calculating their own pay ratios.

To identify the employee with the median of the annual total compensation of all our employees that is used for the year ended 
2022, we used the following methodology and made the following material assumptions, adjustments and estimates:

•

•

We  determined  that  as  of  December  31,  2022,  our  employee  population  consisted  of  approximately  1,600 
individuals located in the U.S. and in countries in Europe and Asia.  This population consisted of our full-time, 
part-time  and  temporary  employees.  We  excluded  a  limited  number  of  temporary  agency  employees  and 
independent contractors, who are employees of, and whose compensation is determined by third parties unaffiliated 
with the Company and as such are not considered our employees for the purposes of the pay ratio calculation.

To identify the “median employee” from our employee population, we used a consistently applied compensation 
measure which included annual salary as reflected in our payroll records, as well as stock awards and non-equity 
incentive plan compensation earned in 2022, which was our measurement period. We applied a foreign currency 
to U.S. dollar exchange rate to the compensation paid in foreign currency and we did not make any cost-of-living 
adjustments.  We selected this compensation measure because it is readily available in our existing payroll records 
and because it is a reasonable proxy for total compensation for purposes of determining the “median employee.”

Once  we  identified  our  “median  employee,”  we  calculated  the  elements  of  such  employee’s  compensation  for  2022  in 
accordance with the requirements of Item 402(c)(2)(x) of Regulation S-K.  The median employee’s annual total compensation 
of $131,080 may include as applicable salary, stock awards and non-equity incentive plan compensation, as well as Company 
matching contributions to the 401(k) employee savings plan, and the cost of Company paid premiums associated with coverage 
under the group term life insurance and accidental death and dismemberment insurance plan.

55

PROPOSAL 3

ADVISORY VOTE ON THE FREQUENCY OF ADVISORY VOTES ON 
NAMED EXECUTIVE OFFICER COMPENSATION

Pursuant  to  Rule  14a-21(b)  of  the  Exchange  Act,  we  are  required  to  submit  a  non-binding,  advisory  vote  to 
stockholders at least once every six years to determine whether future advisory votes on the compensation paid to our 
NEOs  should  be  held  every  one  year,  every  two  years,  or  every  three  years.  At  the  2017  Annual  Meeting  of 
Stockholders of Nanometrics, our stockholders indicated their preference that the Company solicit an advisory vote 
on NEO compensation every one year. In accordance with the results of that vote, our Board of Directors implemented 
a policy of taking an advisory vote on NEO compensation each year. 

We are once again asking stockholders to advise us as to how frequently they wish to cast an advisory vote on the 
compensation of our NEOs.  After careful consideration, our Board of Directors has determined that an advisory vote 
on the compensation of our NEOs should continue to be held every one year. Although our executive compensation 
program  is  designed  to  promote  a  long-term  correlation  between  pay  and  performance,  the  Board  of  Directors 
recognizes that executive compensation disclosures are made annually. Holding an annual advisory vote on executive 
compensation provides us with more direct and immediate feedback on our compensation decisions. We believe that 
an annual advisory vote on executive compensation is therefore consistent with our philosophy on good corporate 
governance practices and our executive compensation philosophy, policies, and practices.  

In arriving at our recommendation on the frequency vote, we reviewed the results of our previous shareholder vote in 
2017, when an annual vote was approved by a majority of the stockholders. As required by the Dodd-Frank Act, this 
is an advisory vote, which means that this proposal is not binding on us. Regardless, our Board of Directors values the 
opinions expressed by stockholders and will take into account the outcome of this advisory vote when considering the 
frequency of future advisory votes on the compensation of our NEOs. 

Vote Required

For the proposal to approve, on any advisory basis, the frequency of votes on named executive officer compensation, 
stockholders will select from four options: to hold the advisory vote on named executive officer compensation every 
“1 Year,” “2 Years,” or “3 Years,” or to abstain from voting.  The frequency (”1 Year,” “2 Years,” or “3 Years”) 
receiving the greatest number of votes will be considered the frequency recommended by stockholders to the Board.

The Board recommends that stockholders vote that future advisory votes on 
named executive officer compensation be held every “1 Year.”

56

PROPOSAL 4

RATIFICATION OF APPOINTMENT OF INDEPENDENT
REGISTERED PUBLIC ACCOUNTING FIRM

Although ratification by stockholders is not required by law, the Board is submitting the Audit Committee’s selection 
of Ernst & Young LLP (“EY”) as the Company’s independent registered public accounting firm for fiscal year 2023 
for ratification as a matter of good corporate governance and recommends that the stockholders vote for ratification 
of such appointment. In the event of a negative vote on such ratification, the Board will reconsider its selection. Even 
if the selection is ratified, the Audit Committee may appoint a new independent registered public accounting firm at 
any time during the year if the Audit Committee believes that such a change would be in the best interests of the 
Company  and  its  stockholders.    EY  has  indicated  that  representatives  of  EY,  the  independent  registered  public 
accounting firm presented herein, will be in attendance at the Annual Meeting. Such representatives will have the 
opportunity to make a statement, if they desire to do so, and to respond to appropriate questions.

 Independent Registered Public Accounting Firm Selection Process

EY served as the independent registered public accounting firm for Rudolph (the accounting acquirer in the merger 
with Nanometrics) from 2008 through the Merger Date and has been the Company’s independent registered public 
accounting  firm  since  the  Merger  Date,  serving  in  this  role  during  fiscal  2022.  During  this  time,  the  firm  has 
demonstrated:

•  A high degree of independence and professionalism in their audit engagement with the Company;

•  A solid record of partner and professional staff continuity;

•  A knowledge of current and emerging accounting and auditing issues affecting the Company;

•  A deep and ongoing understanding of the Company’s business model and industry; and

•  A readiness to assist the Company and its audit committee in keeping up to date with the latest accounting and 

auditing pronouncements and their application to the Company’s business.

In making its selection of an independent registered public accounting firm, the Audit Committee assesses, among 
other factors:

•  The performance of the independent registered public accounting firm in the prior year;

•  The anticipated needs of the Company and ability of the accounting firm to address them in the coming year;

•  The proposed fees for the coming year; and

•  The potential impact of changing auditors for the coming year.

Ultimately, the selection of the independent registered public accounting firm is made with the best interest of the 
Company and its stockholders in mind.

Factors Used To Assess Independent Registered Public Accounting Firm Quality

Members  of  the  Audit  Committee  have  experience  in  dealing  with  audits  of  other  public  companies  as  well  as 
experience with other accounting firms. After the Merger Date, the Audit Committee’s basis for the selection of EY 
as the Company’s independent registered public accounting firm included, among other considerations, familiarity 
with Rudolph’s accounting practices as the accounting acquirer in the 2019 Merger, EY’s breadth of services and 
international footprint as well as expense considerations. On an ongoing basis, EY has been responsive, reliable and 
professional in their dealings with the Audit Committee and has appropriately assisted the Audit Committee in its 
oversight  of  the  Company’s  financial  processes  and  financial  statements.    In  addition,  EY  makes  available  to  the 

57

Company specialists within EY to assist in the audit when consultation on specific and unique issues is warranted. 
These processes appear to be effective in assisting EY with their audit engagement.

As  a  part  of  the  Audit  Committee’s  review  of  EY’s  qualifications,  EY  provides  the  Company  with  the  firm-wide 
comments from the Public Company Accounting Oversight Board (“PCAOB”) regarding PCAOB’s examinations of 
EY for the prior year. EY also updates the Company with the quality improvements that the firm has made as a result 
of the PCAOB comments as well as other changes to their quality and risk assessment processes.

Audit Committee’s Involvement In The Lead Partner Selection

In accordance with SEC and PCAOB independence guidelines, EY employs a regular schedule of rotation of both the 
lead engagement partner (“Lead Partner”) and the concurring partner. Such a regularly scheduled rotation provides 
for sufficient overlap of the new Lead Partner with the outgoing Lead Partner. This process allows the members of 
the Audit Committee and the Company management to become familiar with the new Lead Partner and new staff and 
to introduce them to the Company’s business.  Prior to the new Lead Partner’s full engagement, the Audit Committee 
and Company management meet with EY to review and offer feedback on the industry experience, financial acumen 
and anticipated fit of the new Lead Partner with the Company.

Audit Committee Pre-Approval Of Audit And Permissible Non-Audit Services Of Independent Registered 
Public Accounting Firm

Pursuant to our Audit Committee charter, our Audit Committee must pre-approve all audit and permissible non-audit 
services provided by the Company’s independent registered public accounting firm. These services may include audit 
services, audit-related services, tax and other services. Pre-approval is generally provided for up to one year, and any 
pre-approval is detailed as to the particular service or category of services and is generally subject to a specific budget. 
The independent registered public accounting firm and management are required to periodically report to the Audit 
Committee  regarding  the  extent  of  services  provided  by  the  independent  registered  public  accounting  firm  in 
accordance with this pre-approval and the fees for the services performed to date. The Audit Committee may also pre-
approve particular services on a case-by-case basis. During fiscal 2022, all services provided by EY to the Company 
were pre-approved by the Audit Committee in accordance with this policy, and the Audit Committee has concluded 
that the provision of these services is compatible with the accountants’ independence.

 Audit and Non-Audit Fees

The following table sets forth the fees billed for the fiscal year ended December 31, 2022 and the fiscal year ended 
January 1, 2022 by EY, the Company’s independent registered public accounting firm.

 Fees
Audit
Audit Related
Tax
All Other
Total

Audit Fees

2022

2021

$2,025,000
45,000
45,000
5,400
$2,120,400

$1,816,000
42,000
—
5,200
$1,863,200

Audit fees for the fiscal years ended December 31, 2022 and January 1, 2022 were for the audit of the Company’s 
annual financial statements including management’s assessment of internal control over financial reporting, the review 
of  the  Company’s  quarterly  financial  statements  and  statutory  and  regulatory  audits,  consents,  and  other  services. 
These fees may include services that are normally provided by the independent registered public accounting firm in 
connection with regulatory filings or engagements including any comfort letters and consents for financings and filings 
made with the SEC. 

58

Audit Related Fees

Audit related fees for the fiscal years ended December 31, 2022 and January 1, 2022 were for assurance and related 
services reasonably related to the performance of the audit or review of the Company’s annual financial statements 
that are not reported under “Audit Fees,” and consisted primarily of fees for employee benefit plan audits.

Tax Fees

Tax fees may include fees for tax compliance, tax planning and tax advice. Tax fees for the fiscal year ended December 
31, 2022 were for tax advice.  

All Other Fees

All other fees would consist of fees for products and services other than the services described above. For the fiscal 
year ended December 31, 2022 and January 1, 2022, all other fees included payments for an accounting and auditing 
information tool.

Negotiation  of  the  annual  independent  registered  public  accounting  firm  fees  is  the  responsibility  of  the  Audit 
Committee with the support of the Company’s CFO.  All of the EY fees listed in the chart above for fiscal years 2021 
and 2022 were pre-approved by the Audit Committee, which concluded that the provision of such services by EY was 
compatible with the maintenance of that firm’s independence in the conduct of its audit functions.

 Vote Required

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and 
entitled  to  vote  will  be  required  to  ratify  the  appointment  of  Ernst  &  Young  LLP  as  the  Company’s  independent 
registered public accounting firm for the year ending December 30, 2023.

The Board recommends voting “FOR” the ratification of the appointment of 
Ernst & Young LLP as the Company’s independent registered public accounting 
firm for the year ending December 30, 2023.

59

AUDIT COMMITTEE REPORT

The following is the Audit Committee’s report submitted to the Board for the fiscal year ended December 31, 2022.

As noted in the Audit Committee’s charter, management is responsible for the Company’s internal controls and the 
financial  reporting  process.  The  independent  registered  public  accounting  firm  is  responsible  for  performing  an 
independent audit of the Company’s consolidated financial statements in accordance with the standards of the Public 
Company Accounting Oversight Board (United States) and for issuing a report thereon. Additionally, the independent 
registered public accounting firm is responsible for performing an independent audit of the Company’s internal control 
over financial reporting and for issuing a report thereon. The Committee’s responsibility is to monitor and oversee 
these processes. 

In this context, the Audit Committee of the Board has:

• 

• 

• 

• 

reviewed and discussed with management and with Ernst & Young LLP, the Company’s independent registered 
public  accounting  firm,  together  and  separately,  the  Company’s  audited  consolidated  financial  statements 
contained in its Annual Report on Form 10-K for the fiscal year ended December 31, 2022;

discussed with Ernst & Young LLP the matters required to be discussed by Statement on Auditing Standards No. 
1301, Communications with Audit Committees;

received the written disclosures and the letter from Ernst & Young LLP required by applicable requirements of 
the Public Company Accounting Oversight Board regarding the independent registered public accounting firm’s 
communications with the Audit Committee concerning independence, and has discussed with Ernst & Young 
LLP its independence; and

discussed and reviewed with the Company’s manager - internal audit (“Mgr-IA”) and Ernst & Young LLP, with 
and without management present, the Company’s work in complying with the requirements of Section 404 under 
the Sarbanes-Oxley Act of 2002 regarding internal control over financial reporting. In connection therewith, the 
Audit  Committee  also  discussed  with  the  Mgr-IA,  with  and  without  other  members  of  management  present, 
management’s assessment of the effectiveness of internal control over financial reporting as of December 31, 
2022. The Audit Committee also discussed Ernst & Young LLP’s audit report on internal controls over financial 
reporting as of December 31, 2022 with management and Ernst & Young LLP. 

Based on the foregoing review and discussions, the Audit Committee recommended to the Board that the audited 
financial statements be included in the Company’s Annual Report on Form 10-K for the fiscal year ended December 
31, 2022.

THE AUDIT COMMITTEE

Christine A. Tsingos (Chairperson)
Stephen D. Kelley
Karen Rogge
May Su

60

EXECUTIVE OFFICER BIOGRAPHIES
Set forth below is certain information regarding the executive officers of the Company and their ages as of March 30, 
2023. Information relating to Michael P. Plisinski is set forth above under the caption “PROPOSAL 1 - ELECTION 
OF  DIRECTORS.”  The  individuals  listed  reflect  the  Company’s  officers  designated  by  the  Board  as  “Executive 
Officers”  for  the  2023  fiscal  year.  The  Company  is  unaware  of  any  arrangements  or  understandings  between  the 
executive officers of the Company and other person(s) pursuant to which an executive officer was or is to be selected, 
except that Mr. Plisinski was appointed as CEO of the Company pursuant to the Merger Agreement for the 2019 
Merger.

Named Executive Officers (NEOs)

Mark R. Slicer     Chief Financial Officer     Age: 52

•  Mr. Slicer has served the Company in his current role since May 2022.
•  Prior Experience:

◦ 

◦ 

◦ 
◦ 

September  2019  to  May  2022:  Senior  Vice  President  and  Global  Operations  Controller  at  Boston 
Scientific,  a  global  medical  technology  manufacturer,  where  he  was  responsible  for  the  financial 
performance  of  the  global  manufacturing  and  distribution  network  having  a  production  value  of 
approximately $3 billion.
February 2014 to September 2019: Senior Vice President and Corporate Controller, Boston Scientific, in 
which role he oversaw a team of over 500 finance employees across the globe, managing approximately 
$10 billion in revenue.
February 2008 to February 2014: Executive roles in finance and internal audit, Boston Scientific.
Preceding Mr. Slicer’s tenure at Boston Scientific, he served in various finance and audit roles at General 
Electric and PricewaterhouseCoopers.  

•  Mr. Slicer earned a Bachelor of Science in Accounting from Providence College and is licensed as a Certified 

Public Accountant in the Commonwealth of Massachusetts.

James (Cody) Harlow    Chief Operating Officer    Age:  50

•  Mr. Harlow has served the Company in his current role since October 2021.
•  Prior Experience:

◦  December  2019  to  September  2021:    Managing  Director,  Operations  and  Supply  Chain,  Applied 
Materials, a provider of manufacturing equipment, services and software to the semiconductor, display 
and related industries.

◦  December 2017 to December 2019:  Senior Director, Operations and Supply Chain, Applied Materials.
◦ 
September 2013 to December 2017:  Director, Worldwide Operations, Applied Materials.
◦  March 2013 to September 2013:  Chief Operating Officer, Semiconductor Support Services.
◦ 

Prior to 2013, Mr. Harlow held an array of manufacturing management roles in 14 years with Applied 
Materials. 

•  Mr. Harlow holds a B.S. in Nuclear Engineering Technology from Thomas Edison State University, a M.S. in 
organizational  and  human  resource  development  from  Abilene  Christian  University  and  an  M.B.A.  from  the 
University of Phoenix.  In addition, Mr. Harlow served as a nuclear propulsion supervisor in the U.S. Navy.

Robert Fiordalice    Senior Vice President & General Manager, Metrology Business Unit    Age:  61

•  Mr. Fiordalice has served the Company in his current role since January 2022.
•  Prior Experience:

◦  October 2019 to January 2022:  Vice President & General Manager, Wafer Solutions Business Unit, Onto 

Innovation Inc.

◦  August 2017 to October 2019:  General Manager, Materials Characterization Group, Nanometrics.
◦  October 2013 to July 2017:  General Manager, Advanced Packaging, Nanometrics.
◦  August 2006 to August 2013:  Vice President, Account Technology, Intermolecular, Inc.

61

◦ 

Prior to 2006, Mr. Fiordalice held technology management roles with both KLA Tencor Corporation and 
Motorola Inc.

•  Mr.  Fiordalice  holds  a  B.S.  in  Genetics  from  University  of  California  at  Berkeley  and  a  M.S.  in  Physics  from 

Syracuse University.

Yoon Ah E. Oh    Vice President, General Counsel, and Corporate Secretary    Age:  41

•  Ms. Oh has served the Company in her current role since October 2021.
•  Prior Experience:

◦ 

◦ 

June 2020 to September 2021: Associate General Counsel and Corporate Secretary, Analog Devices, Inc., 
a semiconductor company.
June  2018  to  May  2020:    Vice  President,  Associate  General  Counsel  and  Corporate  Secretary,  Endo 
International Plc., a specialty pharmaceutical company.

◦  May 2017 to June 2018: Vice President, Associate General Counsel, Endo International Plc.
◦ 
◦ 
◦ 

September 2015 to April 2017: Senior Counsel, Corporate, Endo International Plc.
September 2013 to September 2015:  Associate, Dechert LLP.
September 2007 to August 2013:  Associate, Cahill Gordon & Reindel LLP.

•  Ms. Oh holds a B.S. in Political Science from Yale University and earned her J.D. from Harvard Law School. Ms. 

Oh is admitted to practice in the States of Pennsylvania and New York.

Other Executive Officers

Srinivas Vedula, Ph.D.    Senior Vice President, Customer Success Group    Age:  50

•  Dr. Vedula has served the Company in his current role since September 2021. 
•  Prior Experience:

◦  October 2019 to August 2021:  Vice President, Business Development, Metrology Business Unit, Onto 

Innovation Inc.

◦  December 2017 to September 2019:  Vice President, Global Sales, Nanometrics, Inc.
◦ 
◦ 
◦ 

January 2014 to November 2017:  General Manager, Optical Metrology Solutions, Nanometrics, Inc.
January 2009 to December 2013: Director of Marketing and Applications, KLA Corporation.
Prior to 2009, Mr. Vedula held additional roles in product marketing and applications engineering over 
12 years with KLA Tencor Corporation.

•  Dr. Vedula holds a Bachelor of Technology degree from the Indian Institute of Technology in Bombay, India and 

a Ph.D. from the University of Tennessee, both in Chemical Engineering.

Ju Jin, Ph.D.    Senior Vice President & General Manager, Inspection Business Unit    Age:  58

•  Dr. Jin has served the Company in his current role since March 2021.
•  Prior Experience:

◦  October  2019  to  March  2021:    Vice  President  &  General  Manager,  Inspection  Business  Unit,  Onto 

◦ 

Innovation Inc.
July  2019  to  October  2019:    Vice  President  &  General  Manager,  Inspection  Business  Unit,  Rudolph 
Technologies, Inc.

◦  August 2016 to July 2019:  Sr. Director of Marketing & Business Development, Orbotech Ltd., a supplier 
of  yield-enhancing  and  process-enabling  solutions  for  the  manufacture  of  electronics  products  and  a 
subsidiary of KLA Corporation.

◦  April 2009 to August 2016:  President and CEO, Applied Electro-Optics Inc.
◦  March 2004 to April 2009:  Director and General Manager, Accretech USA.

•  Dr. Jin holds a B.S. from Xian Jiatong University in China, a M.S. from Nagaoka University of Technology in 

Japan and a Ph.D. from the University of Tokyo in Japan, all in Mechanical Engineering.

62

SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS

The following table sets forth certain information with respect to beneficial ownership of the Company’s Common 
Stock as of March 13, 2023 (except as otherwise indicated), by (i) each individual or group known by the Company 
to  own  beneficially  more  than  five  percent  (5%)  of  the  Common  Stock;  (ii)  each  of  the  NEOs;  (iii)  each  of  the 
Company’s directors and director nominees; and (iv) all directors, director nominees and executive officers as a group. 
Except as indicated in the footnotes to this table, the persons named in the table have sole voting and investment power 
with respect to all shares of Common Stock shown as beneficially owned by them, subject to community property 
laws where applicable.

Name and Address of Beneficial Owner

Amount and Nature of 
Beneficial Ownership

Percent of Class(1)

BlackRock, Inc. (2)

55 East 52nd Street, New York, NY 10055

The Vanguard Group (3)

100 Vanguard Boulevard, Malvern, PA 19355

Michael P. Plisinski
Mark R. Slicer
James (Cody) Harlow
Robert Fiordalice
Yoon Ah E. Oh
Steven R. Roth (4)
Leo Berlinghieri
Stephen D. Kelley (5)
David B. Miller
Karen M. Rogge
Christopher A. Seams
May Su
Christine A. Tsingos
All directors, director nominees and executive 
   officers as a group (fifteen (15) persons) (6)

*  Less than 1%

8,009,729

5,605,334

238,166
-
1,627
12,768
2,484
14,665
17,201
-
14,608
2,950
32,629
2,100
39,909

396,923

16.4%

11.5%

*
*
*
*
*
*
*
*
*
*
*
*
*

*

(1) Applicable  percentage  ownership  is  based  on  48,845,513  shares  of  Common  Stock  outstanding  as  of  March  13,  2023. 
Beneficial ownership of shares is determined in accordance with the rules of the SEC and generally includes shares as to 
which a person holds sole or shared voting or investment power. Shares of Common Stock subject to RSUs which will vest 
within sixty (60) days of March 13, 2023 are deemed to be beneficially owned by the person holding such RSUs for the 
purpose  of  computing  the  percentage  ownership  of  such  person  but  are  not  treated  as  outstanding  for  the  purpose  of 
computing the percentage ownership of any other person. Unless otherwise noted, the address for the executive officers and 
directors named in this table is c/o Onto Innovation Inc., 16 Jonspin Road, Wilmington, Massachusetts 01887.

(2)

(3)

Information provided herein is based on the Schedule 13G/A that was filed by BlackRock, Inc. on January 23, 2023, which 
reported  that  BlackRock,  Inc.  had  sole  voting  power  over  7,950,008  shares,  shared  voting  power  over  zero  shares,  sole 
dispositive power over 8,009,729 shares and shared dispositive power over zero shares.

Information provided herein is based on the Schedule 13G/A that was filed by The Vanguard Group on February 9, 2023, 
which reported that The Vanguard Group had sole voting power over zero shares, shared voting power over 84,195 shares, 
sole dispositive power over 5,472,717 shares and shared dispositive power over 132,617 shares.

(4) The number of shares held by Mr. Roth is based on his response to the Company’s Director & Officer questionnaire as of 

December 31, 2022 .

(5) Mr. Kelley did not become a Company director until January 24, 2023.

(6)

Includes 14,550 shares subject to restricted stock units vesting within 60 days of March 13, 2023 for all directors, director 
nominees, and executive officers as a group.

63

EQUITY COMPENSATION PLAN INFORMATION

The following table sets forth, as of December 31, 2022, certain information related to our equity compensation plans.

(a)

(b)

(c)

Plan Category

Equity compensation plans approved
   by security holders
Equity compensation plans not approved
   by security holders

Total

Number of Securities
to be Issued Upon Exercise
of Outstanding Options,
Warrants and Rights (1)

743,034

n/a

743,034

Weighted-Average
Exercise Price of
Outstanding Options,
Warrants and Rights
—

n/a

—

Number of Securities

Remaining Available for

Future Issuance Under
Equity Compensation
Plans (Excluding
Securities Reflected in
Column (a))(2)

4,201,733

n/a

4,201,733

(1) Includes 743,034 shares issuable upon vesting of outstanding restricted stock units under the Onto Innovation Inc. 2020 
Stock Plan, the Rudolph Technologies, Inc. 2018 Stock Plan and the Nanometrics Incorporated 2005 Equity Incentive 
Plan.

(2) As  of  December  31,  2022,  3,085,817  shares  were  available  under  the  2020  Stock  Plan  and  1,115,916  shares  were 

available under the ESPP.

OTHER MATTERS

The Company knows of no other matters to be submitted for consideration at the Annual Meeting. If any other matters 
properly come before the Annual Meeting, it is the intention of the persons acting as proxies to vote the shares they 
represent as the Board may recommend.

64

QUESTIONS AND ANSWERS ABOUT THE ANNUAL MEETING

 What Is The Purpose Of The Annual Meeting?

At the Annual Meeting, stockholders will be asked to vote upon the matters set forth in the accompanying Notice of 
Annual Meeting, including:

• 
• 
• 
• 

the election of eight directors; 
an advisory vote to approve named executive officer compensation; 
an advisory vote on the frequency of advisory votes on named executive officer compensation; and
the ratification of the appointment of our independent registered public accounting firm for fiscal 2023, 

all of which are more fully described herein.

 Will Other Matters Be Voted On At The Annual Meeting?

We are not currently aware of any matters to be presented at the Annual Meeting other than those described in this 
proxy statement. If any other matters not described in the proxy statement are properly presented at the meeting, any 
proxies received by us will be voted in the discretion of the proxy holders.

 Who Is Entitled To Vote?

If you were a stockholder of record as of the close of business on March 13, 2023, which is referred to in this proxy 
statement as the “record date,” you are entitled to receive notice of the Annual Meeting and to vote the shares of 
common stock that you held as of the close of business on the record date. Each stockholder is entitled to one vote for 
each share of common stock held by such stockholder on the record date.

 May I Attend The Meeting?

All stockholders of record as of the record date may attend the Annual Meeting, which will be held at the Company’s 
offices located at 16 Jonspin Road, Wilmington, MA 01887. To obtain directions to attend the Annual Meeting and 
vote in person, please visit our website (www.ontoinnovation.com), and click on “Company,” then “Locations,” and 
then “Massachusetts” to access the interactive map. As always, we encourage you to vote your shares prior to the 
Annual Meeting.

 What is Required To Be Admitted To The Annual Meeting?

If you have a stock certificate or hold shares in an account with our transfer agent, you are considered the “stockholder 
of record” with respect to those shares.  If you are a stockholder of record, you will need valid picture identification 
and proof that you are a stockholder of record of the Company as of the record date to gain admission to the Annual 
Meeting.

If you are a beneficial holder, you will be required to present a valid picture identification and proof from your bank, 
broker or other record holder of your shares that you are the beneficial owner of such shares to gain admission to the 
Annual Meeting. If you are a beneficial holder and wish to vote your shares at the meeting, you will need a legal proxy 
from your bank, broker or other record holder of your shares. 

All attendees will be expected to comply with any health and safety protocols in effect at the Company’s facility at 
the time of the Annual Meeting.

 What Constitutes A Quorum?

The required quorum for the transaction of business at the Annual Meeting is a majority of the issued and outstanding 
shares of Common Stock of the Company, $0.001 par value per share (“Common Stock”), present in person or by 
proxy and entitled to vote at the Annual Meeting.  On the record date, 48,845,513 shares of the Company’s Common 

65

Stock were issued and outstanding, each entitled to one vote on each matter to be acted upon at the Annual Meeting.  
Your shares will be counted towards the quorum only if you submit a valid proxy (or one is submitted on your behalf 
by your broker, bank or other nominee) or if you vote in person at the meeting.  Abstentions and broker non-votes will 
be counted to determine whether there is a quorum present.  If a quorum is not present, the Annual Meeting may be 
adjourned or postponed to a later date.

 What Are “Broker Non-Votes”?

A broker non-vote occurs when a bank, broker or other registered holder of record holds shares for a beneficial owner 
but is not empowered to vote on a particular proposal on behalf of such beneficial owner because the proposal is 
considered “non-routine” and the beneficial owner has not provided voting instructions on that proposal.  The election 
of  directors,  the  advisory  vote  to  approve  named  executive  officer  compensation,  and  the  advisory  vote  on  the  
frequency of advisory votes on named executive officer compensation are treated as “non-routine” proposals. This 
means that if a brokerage firm holds your shares on your behalf, those shares will not be voted with respect to any of 
these proposals unless you provide instructions to that firm.  See below under “What Is the Vote Required for Election 
of Directors?” and “What Is the Vote Required for the Approval of Proposals Other Than Director Elections?” for a 
discussion of the impact of broker non-votes on each of the proposals that will be presented at the Annual Meeting.  
In order to ensure that any shares held on your behalf by a bank, broker or other registered holder of record 
are voted in accordance with your wishes, we encourage you to provide instructions to that firm or organization 
in  accordance  with  the  Notice  or  voting  instruction  form  provided  by  the  broker,  bank  or  other  registered 
holder or to contact your broker, bank or other registered holder to request a proxy form.

 Who Bears The Cost Of Soliciting Proxies?

The Company will bear the cost of soliciting proxies. In addition, the Company may reimburse brokerage firms and 
other persons representing beneficial owners of shares for their expenses in forwarding solicitation material to such 
beneficial  owners.  Solicitation  of  proxies  by  mail  may  be  supplemented  by  telephone,  facsimile,  e-mail  or  other 
electronic means or personal solicitation by directors, officers or regular employees of the Company. No additional 
compensation will be paid to such persons for such services.

 Why Did I Receive A “Notice Of Internet Availability Of Proxy Materials” But No Proxy Materials?

We are distributing the Company’s proxy materials to stockholders of record via the Internet in accordance with the 
“Notice and Access” approach permitted by rules of the SEC. This approach benefits the environment, while providing 
a  timely  and  convenient  method  of  accessing  the  materials  and  voting.    Accordingly,  we  have  sent  you  a  Notice 
because  the  Board  of  the  Company  is  soliciting  your  proxy  to  vote  at  the  2023  Annual  Meeting  of  Stockholders, 
including at any adjournments or postponements of the meeting.  On or about March 30, 2023, the Company will 
begin mailing the Notice to all stockholders of record entitled to vote at the Annual Meeting.  All stockholders will 
have the ability to access the proxy materials on the website referred to in the Notice or request to receive a printed 
set of the proxy materials. Instructions on how to access the proxy materials over the Internet or to request a printed 
copy of the proxy materials and the Company’s 2022 Annual Report may be found in the Notice.

 What Does It Mean If I Received More Than One Notice?

If you receive more than one Notice, your shares may be registered in more than one name or in different accounts. 
Please follow the voting instructions on each of the Notices to ensure that all of your shares are voted.

 How Do I Go About Voting?

You may vote “For” or “Against” each of the director nominees or you may “Abstain” from voting with respect to 
any nominee.  For the advisory vote on the frequency of advisory votes on named executive officer compensation, 
you may vote for every “1 Year,” “2 Years,” or “3 Years,” or you may “Abstain” from voting.   For each of the other 
matters to be voted on, you may vote “For” or “Against” or “Abstain” from voting.

66

Voting For Shares Registered Directly In The Name Of The Stockholder

If you are a stockholder of record with shares registered in your name, you can vote by one of the following methods:

•

In Person - To vote in person, come to the Annual Meeting and you will receive a ballot when you arrive.  
You will be required to show valid picture identification and proof that you are a stockholder of record of the 
Company as of the record date to be admitted to the Annual Meeting.

• Via the Internet - To submit your proxy by Internet, go to www.investorvote.com/ONTO and follow the 
instructions on the secure website.  The deadline for proxy submission via the Internet is 11:59 p.m. (EDT) 
on May 8, 2023.

• Via  Telephone  –  To  submit  your  proxy  by  telephone,  call  toll  free  1-800-652-VOTE  (8683)  within  the 

•

United States, US territories and Canada.  
By Mail – Stockholders who receive a paper proxy card may complete, sign and date their proxy card and 
mail it in the pre-addressed postage-paid envelope that accompanies the proxy card.  Proxy cards submitted 
by mail must be received prior to the time of the Annual Meeting in order for your shares to be voted.

Even if you plan to attend the Annual Meeting, we recommend that you submit your proxy in advance so that your 
shares are represented at the Annual Meeting in the event you are unable to attend the meeting.  Each stockholder of 
record is entitled to one vote for each share of Common Stock owned by such stockholder on all matters presented at 
the Annual Meeting. Stockholders do not have the right to cumulate their votes in the election of directors.

If you return a signed and dated proxy card but do not indicate how the shares are to be voted, those shares will be 
voted  in  accordance  with  Onto  Innovation’s  Board’s  recommendations.    A  valid  proxy  card  also  authorizes  the 
individuals named therein as proxies to vote your shares in their discretion on any other matters, which, although not 
described in the proxy statement, are properly presented for action at the Annual Meeting.  If you indicate on your 
proxy card that you wish to “abstain” from voting on an item, your shares will not be voted on that item.

While Internet proxy voting is being provided to allow you to submit your proxy online, with procedures designed to 
ensure the authenticity and correctness of your proxy vote instructions, please be aware that you must bear any costs 
associated with your Internet access, such as usage charges from Internet access providers and telephone companies.

Voting By Proxy For Shares Registered In Street Name

If your shares are held in a stock brokerage account or by a bank or other holder of record, you are considered the 
“beneficial owner” of shares held in “street name.”  As the beneficial owner, you have the right to direct your broker, 
bank  or  other  holder  of  record  on  how  to  vote  your  shares  by  submitting  voting  instructions  to  such  person  in 
accordance with the directions that the entity provides.  In the event you are considered the “beneficial owner” of 
shares held in “street name” and you wish to vote in person at the Annual Meeting, you must obtain a legal proxy 
from your broker, bank or another agent. Your vote also authorizes the person(s) acting as your proxy to vote your 
shares in their discretion.  Follow the instructions from your broker or bank included with these proxy materials or 
contact your broker or bank to request a legal proxy.

 May I Revoke My Proxy Or My Voting Instructions?

If you are a stockholder of record, you may revoke your proxy or change your vote after submitting your proxy at any 
time before the polls close at the Annual Meeting by doing any of the following:

•

•

•

•

By delivering a written notice of revocation or a duly executed proxy card bearing a later date to the Corporate 
Secretary of the Company at the Company’s principal executive offices prior to the Annual Meeting;

By submitting a timely and valid later proxy online at www.investorvote.com/ONTO;

By submitting a timely and valid later proxy by telephone call to 1-800-652-VOTE (8683) within the USA, 
US territories and Canada; or

By attending the Annual Meeting and voting in person. 

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If  you  are  a  beneficial  owner  of  shares,  please  contact  your  bank,  broker  or  other  holder  of  record  for  specific 
instructions on how to change or revoke your voting instructions.

 What Happens If I Do Not Vote?

Stockholder Of Record:  Shares Registered In Your Name

If you are a stockholder of record and do not submit a proxy by mail, telephone, or the Internet or by attending the 
Annual Meeting and voting in person, your shares will not be voted.

Beneficial Owner:  Shares Registered In The Name Of Broker Or Bank

If you are a beneficial owner and do not instruct your broker, bank, or other agent how to vote your shares, the question 
of whether your broker or nominee will still be able to vote your shares depends on whether the NYSE deems the 
particular proposal to be a “routine” matter. Brokers and nominees can use their discretion to vote “uninstructed” 
shares with respect to matters that are considered to be “routine,” but not with respect to “non-routine” matters. Under 
the rules and interpretations of the NYSE, “non-routine” matters are matters that may substantially affect the rights or 
privileges  of  stockholders,  such  as  mergers,  stockholder  proposals,  elections  of  directors  (even  if  not  contested), 
executive officer compensation (including any advisory stockholder votes on executive officer compensation and on 
the  frequency  of  stockholder  advisory  votes  on  named  executive  officer  compensation),  and  certain  corporate 
governance proposals, even if management supported. Accordingly, your broker or nominee may not vote your shares 
on  the  election  of  directors,  the  advisory  proposal  to  approve  the  named  executive  officer  compensation,  or  the 
advisory  proposal  on  the  frequency  of  advisory  votes  on  named  executive  officer  compensation  without  your 
instructions,  but  may  vote  your  shares  on  the  proposal  to  ratify  the  appointment  of  Ernst  &  Young  LLP  as  the 
Company’s independent registered public accounting firm for the fiscal year ending December 30, 2023 even in the 
absence of your instruction.

 What If I Return A Proxy Card Or Otherwise Submit a Proxy But Do Not Make Specific Choices?

If you return a signed and dated proxy card or otherwise submit a proxy without marking voting selections, your shares 
will be voted, as applicable, “For” the election of all seven nominees for director, “For” the advisory approval of the 
named executive officer compensation, for future advisory votes on named executive office compensation to be held 
every “1 Year,” and “For” the ratification of the appointment of Ernst & Young, LLP as the independent registered 
public accounting firm of the Company for its fiscal year ending December 30, 2023. If any other matter is properly 
presented at the meeting, your proxyholder will vote your shares using his or her best judgment.

 What Is The Vote Required For Election Of Directors?

For the election of directors, each director is elected by a majority of the votes cast (except that if the number of 
nominees exceeds the number of directors to be elected, directors will be elected by a plurality voting standard). This 
means that for a director nominee to be elected to our Board, the number of votes cast “for” a director’s election must 
exceed  the  number  of  votes  cast  “against”  that  director’s  election  (with  “abstentions”  and  “broker  non-votes”  not 
counted as a vote cast either “for” or “against” that director’s election, although abstentions and broker non-votes 
count for the purpose of determining a quorum). Our Bylaws provide for election of directors by a majority of votes 
cast in uncontested elections, and our Corporate Governance Guidelines provides that any incumbent director nominee 
in  an  uncontested  election  who  does  not  receive  an  affirmative  majority  of  votes  cast  must  promptly  tender  such 
director’s resignation to our Board. Further information regarding the process that will be followed if such an event 
occurs can be located under the heading “Proposal 1 - Election of Directors.”

 What Is The Vote Required For The Approval Of Proposals Other Than Director Elections?

The proposal to approve, on an advisory basis, the compensation of our named executive officers and the proposal to 
ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the fiscal year 

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ending December 30, 2023 each requires the affirmative vote, in person or by proxy, of a majority of the shares present 
in person or represented by proxy at the meeting and entitled to vote on the matter to be approved. For  each of these 
two proposals, abstentions in effect count as negative votes, because they are shares represented in person or by proxy 
that are entitled to vote on the matter and not voted in the affirmative. For the proposal to approve, on any advisory 
basis, the frequency of advisory votes on named executive officer compensation, the frequency (“1 Year,” “2 Years,” 
or “3 Years”) receiving the greatest number of votes will be considered the frequency recommended by stockholders 
to the Board.  For this proposal, abstentions will have no impact on outcome, since approval by a percentage of the 
shares present in person or represented by proxy at the meeting and entitled to vote on the matter is not required.  For 
all other proposals, broker non-votes are not counted as part of the vote total (because they are not considered “entitled 
to vote” on the matter) and have no effect on the outcome.

 What Is Householding?

The  Company  has  adopted  a  procedure  approved  by  the  SEC  called  “householding.”  Under  this  procedure,  when 
multiple stockholders of record share the same address, we may deliver only one (1) Notice or set of householding 
materials to that address unless we have received contrary instructions from one or more of those stockholders. The 
same procedure may be followed by brokers and other nominees holding shares of our stock in “street name” for more 
than one beneficial owner with the same address.

If a stockholder holds shares of stock in multiple accounts (e.g., with our transfer agent and/or banks, brokers or other 
registered stockholders), we may be unable to use the householding procedures and, therefore, that stockholder may 
receive multiple copies of the Notice. You should follow the instructions on each Notice that you receive in order to 
vote the shares you hold in different accounts.

A stockholder that shares an address with another stockholder if such household has received only one Notice, may 
write or call us as specified below:

(i)
(ii)

To request a separate copy of such materials, which will be promptly mailed without charge; and
To request that separate copies of these materials be sent to his or her home for future meetings. 

Conversely, a stockholder of record who shares the same address with another stockholder of record may write or call 
us as specified below to request that a single set of proxy materials be delivered to that address. Such stockholder 
requests may be made to our Investor Relations Department either via phone at 978-253-6200 or by mail directed to:

Investor Relations Department
Onto Innovation Inc.
16 Jonspin Road
Wilmington, Massachusetts 01887

If you are a beneficial owner of shares held in street name, please contact your bank, broker or other holder of record 
regarding such requests.

 How Can I Find Out the Results Of The Voting At The Annual Meeting?

Preliminary voting results will be announced at the Annual Meeting. Final voting results will be published in a Current 
Report on Form 8-K that we expect to file within four business days after the Annual Meeting. If final voting results 
are not available to us in time to file a Form 8-K within four business days after the meeting, we intend to file a Form 
8-K  to  publish  preliminary  results  and,  within  four  business  days  after  the  final  results  are  known  to  us,  file  an 
additional Form 8-K to publish the final results.

 What Are The Deadlines For Submission Of Stockholder Proposals For The 2024 Annual Meeting?

Stockholders of the Company are entitled to present proposals for consideration at forthcoming stockholder meetings 
provided  that  they  comply  with  the  proxy  rules  promulgated  by  the  SEC,  if  applicable,  and  the  Bylaws  of  the 
Company. Stockholders wishing to present a proposal at the Company’s 2024 Annual Meeting of Stockholders must 
submit such proposal in writing to the Corporate Secretary at Onto Innovation Inc., 16 Jonspin Road, Wilmington, 
Massachusetts 01887 no later than December 1, 2023 in accordance with Rule 14a-8 under the  Exchange Act, if they 
wish for it to be eligible for inclusion in the proxy statement and form of proxy relating to that meeting. In addition, 

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under the Company’s Bylaws, a stockholder wishing to nominate a director or make a proposal at the 2024 Annual 
Meeting of Stockholders outside of Exchange Act Rule 14a-8 must submit such nomination or proposal in writing to 
the Corporate Secretary at the above address no earlier than January 10, 2024 and no later than February 9, 2024. In 
addition, to comply with the universal proxy, stockholders who intend to solicit proxies in support of director nominees 
other than the Company nominees in connection with the 2024 Annual Meeting of Stockholders must provide notice 
that  sets  forth  the  information  required  by  Rule  14a-19  under  the  Exchange  Act,  postmarked  or  submitted 
electronically to the Company at its principal executive office no later than March 11, 2024.

The  Nominating  &  Governance  Committee  will  also  consider  qualified  director  nominees  recommended  by 
stockholders. Our process for receiving and evaluating Board member nominations from our stockholders is described 
above under the caption “Consideration Of Director Nominees.”

You are also advised to review the Company’s Bylaws, which contain additional requirements about advance notice 
of stockholder proposals and director nominations.

ADDITIONAL INFORMATION

Stockholders may obtain a copy of the Company’s Annual Report on Form 10-K for the fiscal year ended December 
31, 2022, including financial statements and schedules included in the Annual Report on Form 10-K, without charge, 
by visiting the Company’s website at https://investors.ontoinnovation.com/ or by writing to:

Michael Sheaffer
Sr. Director, Investor Relations & ESG Reporting
16 Jonspin Road
Wilmington, Massachusetts 01887

Upon written request to the Company, at the above address for Investor Relations, the exhibits set forth on the exhibit 
index of the Company’s Annual Report on Form 10-K will be made available at reasonable charge (which will be 
limited to our reasonable expenses in furnishing such exhibits).

BY ORDER OF THE BOARD OF DIRECTORS

Dated: March 30, 2023

Yoon Ah E. Oh
Corporate Secretary

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