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Onto Innovation

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FY2020 Annual Report · Onto Innovation
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2020

Annual Report + 
2021 Proxy

Dear Shareholders

We want to begin by expressing our gratitude to the Onto Innovation team and 
the inspiring way this team came together in 2020 to overcome the many 
challenges throughout the year while meeting and exceeding the commitments 
we made to customers, shareholders, and each other. As a result, we finished 
2020 with a solid financial foundation, and in 2021 we expect to deliver our 
gross and operating margins within our long-term operating model. In addition 
to our margins, we expect cash from operations in 2021 to exceed the $106 
million that we generated in 2020. We finished the year with record revenue in 
the fourth quarter and guided the first half of 2021 to be more than 20% greater 
than the first half of 2020. 

More importantly, we have expanded our product portfolio, which results in an 
estimated $700 million in new addressable market opportunities for 2021, across 
the entire semiconductor value chain. In addition, we see continued market 
growth as a result of our broader position within our customers and also the 
broader reach the semiconductor industry is having across the globe. Industry 
analysts forecast another record year for wafer fab equipment expected to grow 
15%-17% in 2021. This growth is driven by multiple inflections converging all at 
once.  New high performance compute engines are needed to enable a new 
wave of artificial intelligence applications in vision, security, commerce, 
conversational speech, and more. We are in the early stages of a 
transformational conversion to 5G communications with the bandwidth and low 
latency to enable applications such as autonomous driving, intelligent factories, 
and collaborative robots. We also see markets increasing investments in green 
technology such as smart grids to support more flexible and efficient power 
distribution from traditional sources as well as distributed solar and wind energy 
sites. Multiple nations are announcing bans on the sale of new combustion 
engines over the next 10-15 years and the automobile industry is responding 
with significant electric vehicle (EV) investments and the introduction of new EV 
models. This is expected to result in a 25% CAGR for the compound 
semiconductor market.

Given the more important role semiconductors are playing in helping to create a 
smarter, greener, and more sustainable planet, we are also focused on our social 
responsibility and sustainability. Our growing role in the industry means we share 
a growing responsibility to our communities and environment. We are proud to 
be publishing our first Corporate Social Responsibility report for 2020. Our vision 
is to transform our entire business to help drive a more efficient, and low-carbon 
future, and to support our customers and communities to achieve more, with less 
impact. We’re reducing our impact on climate change by using clean power 
sources and driving energy efficiency in our operations. Our 2025 goals are to 
reduce our comprehensive carbon footprint by 30%, increase our renewable 
energy use by 30%, and reduce hazardous waste landfill by over 30%. 

We started by thanking our passionate and talented team and we will conclude 
with a sincere thank you and appreciation to our loyal shareholders, customers, 
suppliers, and all who contributed to Onto Innovation’s success as we look 
forward to continued growth and a very bright future in 2021 and beyond. 

Sincerely, 

Michael P. Plisinski
Chief Executive Officer

Christopher A. Seams
Chairman of the Board

 
SAFE HARBOR STATEMENT

This Annual Report contains forward-looking statements, including those regarding anticipated growth and trends in our businesses and markets, 
industry outlooks, market share, technology transitions, our business, strategies and financial performance, our development of new products, 
technologies and capabilities, and other statements that are not historical fact, and actual results could differ materially. Risk factors that could 
cause actual results to differ are set forth in the “Risk Factors” section of, and elsewhere in, our 2020 Annual Report on Form 10-K included in this 
report and other filings with the Securities and Exchange Commission. All forward-looking statements are based on management’s estimates, 
projections and assumptions as of the date hereof, and Onto Innovation undertakes no obligation to update any such statements.

1

UNITED STATES 
SECURITIES AND EXCHANGE COMMISSION 
WASHINGTON, D.C. 20549 

FORM 10-K 

(Mark One) 
☒  ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 

For the Fiscal Year Ended December 26, 2020  
OR 
TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 
1934 

☐ 

For the transition period from          to 

Commission File No. 001-39110 

ONTO INNOVATION INC. 

(Exact name of registrant as specified in its charter) 

Delaware 
(State or other jurisdiction of 
incorporation or organization) 

94-2276314 
(I.R.S. Employer 
Identification Number) 

16 Jonspin Road, Wilmington, MA 01887 
(Address of principal executive offices) (Zip Code) 

Registrant’s telephone number, including area code: (978) 253-6200 

SECURITIES REGISTERED PURSUANT TO SECTION 12(b) OF THE ACT: 

Title of Each Class 
Common Stock, $0.001 par value per share 

Trading Symbol 
ONTO 

Name of Exchange on Which Registered 
New York Stock 
Exchange (NYSE) 

SECURITIES REGISTERED PURSUANT TO SECTION 12(g) OF THE ACT: 
None 

Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act.  Yes ☒     No ☐ 
Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.  Yes ☐     No ☒ 
Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange 
Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject 
to such filing requirements for the past 90 days.  Yes ☒     No ☐ 

Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to 
Rule 405  of  Regulation S-T  during  the  preceding  12 months  (or  for  such  shorter  period  that  the  registrant  was  required  to  submit  such 
files).  Yes ☒     No ☐ 

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting 
company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company” and 
“emerging growth company” in Rule 12b-2 of the Exchange Act.: 

Large accelerated filer 
Non-accelerated filer 

☒ 
☐ 

Accelerated filer 
Smaller reporting company 
Emerging growth company 

☐ 
☐ 
☐ 

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying 

with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.   ☐ 

Indicate by check mark whether the registrant has filed a report on and attestation to its management’s assessment of the effectiveness of its 
internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting 
firm that prepared or issued its audit report. ☒ 

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Act).  Yes ☐     No ☒ 
The  aggregate  market  value  of  the  registrant’s  voting  Common  Stock  held  by  non-affiliates  of  the  registrant  was  approximately 

$1,568,582,829 based on the closing price of the Common Stock on the New York Stock Exchange on June 26, 2020. 

The number of shares of the registrant’s Common Stock outstanding as of February 4, 2021 was 48,883,050. 

DOCUMENTS INCORPORATED BY REFERENCE 

Items 10, 11, 12, 13 and 14 of Part III of this Annual Report on Form 10-K incorporate by reference information from the definitive proxy 

statement for the registrant’s annual meeting of stockholders scheduled to be held on May 11, 2021. 

 
 
 
 
 
 
 
 
 
 
 
 
 
  
 
  
  
  
Item No.   

TABLE OF CONTENTS 

PART I 

1. 
1A. 
1B. 
2. 
3. 
4. 

5. 

6. 
7. 
7A. 
8. 
9. 
9A. 
9B. 

10. 
11. 
12. 
13. 
14. 

Business  ...............................................................................................................................  
Risk Factors  .........................................................................................................................  
Unresolved Staff Comments  ................................................................................................  
Properties  .............................................................................................................................  
Legal Proceedings  ...............................................................................................................  
Mine Safety Disclosures  ......................................................................................................  

PART II 

Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity 

Securities  ..........................................................................................................................  
Selected Financial Data  .......................................................................................................  
Management’s Discussion and Analysis of Financial Condition and Results of Operations 
Quantitative and Qualitative Disclosures About Market Risk  .............................................  
Financial Statements and Supplementary Data ....................................................................  
Changes in and Disagreements with Accountants on Accounting and Financial Disclosure 
Controls and Procedures  ......................................................................................................  
Other Information  ................................................................................................................  

PART III 

Directors, Executive Officers and Corporate Governance  ...................................................  
Executive Compensation  .....................................................................................................  
Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters 
Certain Relationships and Related Transactions, and Director Independence  .....................  
Principal Accountant Fees and Services  ..............................................................................  

15. 
Signatures 

Exhibits, Financial Statement Schedules  .............................................................................  

PART IV 

Page 

3 
14 
26 
27 
27 
27 

28 
29 
30 
38 
39 
39 
39 
40 

41 
41 
41 
41 
41 

42 

 
 
 
FORWARD-LOOKING STATEMENTS 

Certain statements in this Annual Report on Form 10-K (this “Form 10-K”) of Onto Innovation Inc. (referred to in this 
Form  10-K,  together  with  its  consolidated  subsidiaries,  unless  otherwise  specified  or  suggested  by  the  context,  as  the 
“Company,”  “Onto  Innovation,”  “we,”  “our”  or  “us”)  may  be  considered  “forward-looking  statements”,  including  those 
concerning: 

•  anticipated effects of, and future actions to be taken in response to the COVID-19 pandemic,   
•  our business momentum and future growth,  
•  acceptance of our products and services,  
•  our ability to deliver both products and services consistent with our customers’ demands and expectations and to 

strengthen our market position,  

•  our expectations of the semiconductor market outlook,  
• 

future revenue, gross profits, research and development and engineering expenses, selling, general and 
administrative expenses,  

•  product introductions,  
• 
technology development,  
•  manufacturing practices,  
•  cash requirements,  
•  our dependence on certain significant customers and anticipated trends and developments in and management 

plans for our business and the markets in which we operate,  

•  our anticipated revenue as a result of acquisitions, and  
•  our ability to be successful in managing our cost structure and cash expenditures and results of litigation.  

The  statements  contained  in  this  Form  10-K  that  are  not  purely  historical  are  forward-looking  statements  within  the 
meaning of Section 27A of the Securities Act of 1933 and Section 21E of the Securities Exchange Act of 1934, as amended 
(the  “Exchange  Act”),  and  within  the  meaning  of  the  Private  Securities  Litigation  Reform  Act  of  1995.  Forward-looking 
statements may be identified by words such as, but not limited to, “anticipate,” “believe,” “continue,” “estimate,” “expect,” 
“intend,” “plan,” “should,” “may,” “could,” “will,” “would,” “forecast,” “project” and words or phrases of similar meaning, as 
they relate to our management or us. 

The forward-looking statements contained herein reflect our expectations with respect to future events and are subject to 
certain risks, uncertainties and assumptions. Actual results may differ materially from those included in such forward-looking 
statements for a number of reasons including, but not limited to, the following:  

•  effects of the COVID-19 pandemic and the measures being taken to limit the spread of COVID-19, including 
impact on demand for our products, reduction in production levels, R&D activities, and qualification activities 
with our customers, increased costs, disruptions to our supply chain and a decrease in availability under our credit 
agreement;  

•  variations in the level of orders which can be affected by general economic conditions;  
•  seasonality and growth rates in the semiconductor manufacturing industry and in the markets served by our 

customers;  
the global economic and political climates;  

the delivery performance of sole source vendors;  
the timing of future product releases;  
failure to respond adequately to either changes in technology or customer preferences;  

• 
•  difficulties or delays in product functionality or performance;  
• 
• 
• 
•  changes in pricing by us or our competitors;  
•  our ability to manage growth; changes in management;  
• 
•  changes in budgeted costs;  
•  our ability to leverage our resources to improve our position in our core markets, to weather difficult economic 

risk of nonpayment of accounts receivable;  

• 
• 

• 

environments, to open new market opportunities and to target high-margin markets;  
the strength/weakness of the back-end and/or front-end semiconductor market segments;  
the imposition of tariffs or trade restrictions and costs, burdens and restrictions associated with other 
governmental actions;  
the ability to successfully complete the integration of the businesses of Rudolph Technologies, Inc. (“Rudolph”) 
and Nanometrics Incorporated (“Nanometrics”) and to maintain the anticipated synergies and value-creation 
contemplated by the merger of Rudolph and Nanometrics (the “2019 Merger”) within the expected time frame;  

1 

 
 
•  unanticipated difficulties or expenditures relating to the completion of integration of the Rudolph and 

Nanometrics businesses;  
the response of business partners and retention as a result of the 2019 Merger;  
the diversion of management time in connection with the integration; and 
the “Risk Factors” set forth in Item 1A.  

• 
• 
• 

You should carefully review the cautionary statements and “Risk Factors” contained in this Form 10-K. You should also 
review any additional disclosures and cautionary statements and “Risk Factors” we include from time to time in our quarterly 
reports on Form 10-Q, current reports on Form 8-K and other filings we make with the Securities and Exchange Commission 
(the “SEC”). The forward-looking statements reflect our position as of the date of this report and we undertake no obligation 
to update any forward-looking statements, whether as a result of new information, future events or otherwise, except as required 
by law. 

2 

 
 
 
Item 1. 

Business. 

General 

PART I 

Onto Innovation is a worldwide leader in the design, development, manufacture and support of process control tools that 
perform  macro  defect  inspection  and  metrology,  lithography  systems,  and  process  control  analytical  software  used  by 
semiconductor wafer and advanced packaging device manufacturers. Our products are also used in a number of other high 
technology industries including: silicon wafer; light emitting diode (“LED”); vertical-cavity surface-emitting laser (VCSEL”); 
micro-electromechanical system (“MEMS”); CMOS image sensor (“CIS”); power device; RF filter; data storage; and certain 
industrial and scientific applications. 

We provide process and yield management solutions used in bare silicon wafer production and wafer processing facilities, 
often  referred  to  as  “front-end”  manufacturing  and  device  packaging  and  test  facilities,  (or  “back-end”  manufacturing), 
respectively through a portfolio of standalone systems for macro-defect inspection, packaging lithography, probe card test and 
analysis, as well as transparent and opaque thin film measurements. Our automated and integrated metrology systems measure 
critical dimensions, device structures, topography, shape, and various thin film properties, including three-dimensional features 
and film thickness, as well as optical, electrical and material properties. Our primary area of focus are products that provide 
critical  yield-enhancing  information,  which  is  used  by  microelectronic  device  manufacturers  to  drive  down  costs  and  to 
decrease  the  time  to  market  of  their  devices.  All  of  our  systems  feature  sophisticated  software  and  production-worthy 
automation.  In  addition,  our  advanced  process  control  software  portfolio  includes  powerful  solutions  for  standalone  tools, 
groups of tools, factory-wide, and enterprise-wide suites to enhance productivity and achieve significant cost savings. Our 
systems are backed by worldwide customer service and applications support.  

2019 Merger 

On October 25, 2019, we became Onto Innovation Inc. upon the effectiveness of the 2019 Merger.  We accounted for the 
2019  Merger  as  a  reverse  acquisition  using  the  acquisition  method  of  accounting  in  accordance  with  generally  accepted 
accounting  principles  (“GAAP”).  GAAP  requires  that  either  Nanometrics  or  Rudolph  is  designated  as  the  acquirer  for 
accounting  and  financial  reporting  purposes  (“Accounting  Acquirer”).  Based  on  the  evidence  available,  Rudolph  was 
designated as the Accounting Acquirer while Nanometrics was the acquirer for legal purposes. Therefore, Rudolph’s historical 
results of operations replaced Nanometrics’ historical results of operations for all periods prior to the 2019 Merger. See Note 3 
in Part II, Item 8 of this Form 10-K for more details regarding the 2019 Merger. 

Key Events in Fiscal 2020  

Impact of COVID-19. The spread of COVID-19 during 2020 has caused an economic downturn on a global scale, as 
well as significant volatility in the financial markets. As of December 26, 2020, our operations have been impacted by our 
pandemic response, as described below. However, we have not experienced significant financial impact directly related to the 
pandemic.   

We have prioritized the health and safety of our employees and customers in our pandemic response. As governmental 
authorities  have  implemented  restrictions  on  commercial  operations,  we  have  continued  to  ensure  compliance  with  these 
directives while also maintaining business continuity for our essential operations. We have a global workforce and we maintain 
offices in the U.S., South Korea, Japan, Taiwan, China, Singapore and Europe. Our operations at these offices are subject to 
various governmental directives and, as a result thereof, we have instituted a work-from-home policy for these employees to 
the extent practical.  Our manufacturing operations are conducted solely in the U.S. Where our essential employees are required 
to continue to report to work to perform their responsibilities, we have implemented staggered shifts or otherwise adjusted 
work  schedules  to  maximize  our  operating  capacity  while  adhering  to  applicable  restrictions,  including  recommended 
distancing between persons.  We have also provided our essential employees with appropriate protective equipment and have 
enhanced and increased cleanings at our facilities. At this time, we have not experienced any reduction in productivity, though 
we have incurred certain costs related to the implementation of these policies and practices.  We may take further actions that 
we determine to be in the best interests of our employees or that may be required by federal, state, or local authorities.  

We  cannot  at  this  time  predict  the  impact  that  the  COVID-19  pandemic  will  have  on  our  financial  condition  and 
operations, although we are continuing to monitor our supply chain and orders from customers for COVID-19-related changes. 
Disruptions to our supply chain in connection with the sourcing of materials, equipment and engineering support, and services 
from geographic areas that have been impacted significantly by COVID-19 may pose risks to our business, results of operations 
and financial condition. In this time of uncertainty as a result of the COVID-19 pandemic, we are continuing to serve our 
customers while taking every precaution to provide a safe work environment for our employees and customers.   

3 

 
 
To date, the COVID-19 pandemic has disrupted the way that we conduct business, but it has not had a material adverse 
impact on our operations, though we have implemented operational changes to protect the health and safety of our employees 
and customers as part of our pandemic response.  However, the extent of the pandemic’s effect on our operational and financial 
performance will depend in large part on future developments, which cannot be predicted with confidence at this time. Future 
developments include, but are not limited to: (i) the ultimate duration, scope and severity of the pandemic, including seasonal 
resurgences or sporadic resurgences that may follow periods of containment, (ii) restrictive actions taken to contain or mitigate 
the impact of COVID-19, such as the extent of restrictions on gatherings and travel, (iii) the impact on governmental programs 
and budgets, (iv) the severity of newly identified strains of the virus, (v) the timing, availability and efficacy of the various 
COVID-19 vaccines, and (vi) the resumption of widespread economic activity. Trade tensions between the United States and 
China  may  escalate  as  a  result  of  COVID-19  or  otherwise  and  could  result  in  the  imposition  of  additional  tariffs,  trade 
restrictions or policy changes, any of which could increase costs of our product components and pricing of, and consumer 
demand for, our products, which could have a negative effect on our results of operations.  

Although the inherent uncertainty of the unprecedented and rapidly evolving crisis makes it difficult to predict with any 
confidence the likely impact on our future operations, the COVID-19 pandemic could have a material adverse impact on our 
consolidated business, results of operations and financial condition. For a discussion of certain risks related to COVID-19 and 
the international nature of our business and our operations, see Part II, Item 1A – Risk Factors of this Form 10-K.   

Trade  Restriction  and  Emerging  Regulation.  In  2020,  the  U.S.  Department  of  Commerce’s  Bureau  of  Industry  and 
Security (“BIS”) announced new Export Administration Regulations (“EAR”) specifically applicable to: Huawei Technologies 
Co., Ltd.; Semiconductor Manufacturing International Corporation (SMIC) and their affiliates. We have assessed the potential 
impact of the new BIS rules and EAR, and do not believe that they will have a material direct impact on our business, financial 
condition or results of operations, but they could have indirect impacts, including increasing tensions in U.S. and Chinese trade 
relations, potentially leading to negative sentiments towards U.S.-based companies among Chinese consumers. For additional 
information, please see Part II Item 1A. Risk Factors – Risks Related to Our Business. 

Share Repurchase Program. On November 23, 2020, our Board of Directors approved a share repurchase authorization 
to repurchase up to $100 million of our common stock. This authorization replaces the remaining balance of $28 million from 
the prior repurchase authorization. Repurchases may be made through both public market and private transactions. For the 
fiscal year ended December 26, 2020, approximately 1.9 million shares were cumulatively repurchased for a total value of $52 
million. We ended our 2020 fiscal year with shares outstanding totaling 48.8 million.   

The  new  share  repurchase  authorization  does  not  obligate  Onto  Innovation  to  repurchase  any  particular  amount  of 
common  stock  during  any  period  and  the  program  may  be  modified  or  suspended  at  any  time  at  our  discretion.  Stock 
repurchases may be made from time to time and the actual amount repurchased will depend on a variety of factors including 
market conditions. 

Industry Background 

We participate in the sale, design, manufacture, marketing and support of process control systems for optical critical 
dimension metrology, thin film metrology, wafer inspection, 2D and 3D macro inspection and lithography tools for advanced 
packaging as well as advanced analytical software for semiconductor manufacturing and certain industrial applications and 
scientific research. Our principal market is semiconductors.  Semiconductors, primarily packaged as integrated circuits within 
electronic devices, include consumer electronics, server and enterprise systems, mobile computing (including smart phones 
and  tablets),  data  storage devices,  and  embedded  automotive  and  control  systems.  Our core  focus  is  the  measurement  and 
control of the structure, composition, and geometry of the devices as they are fabricated on silicon wafers to improve device 
performance and manufacturing yields. Our end customers manufacture many types of integrated circuits for a multitude of 
applications, each having unique manufacturing challenges. This includes integrated circuits to enable information processing 
and management (logic integrated circuits), memory storage (NAND, 3D-NAND, NOR, and DRAM), analog devices (e.g., 
Wi-Fi and 5G radio integrated circuits, power devices) MEMS sensor devices (accelerometers, pressure sensors, microphones), 
image sensors, and other end markets including components for hard disk drives, LEDs, and power management. 

Current Trends 

Business Environment 

Our metrology systems and software are primarily used for controlling certain manufacturing processes utilized in the 
production of advanced, or leading-edge, wafer designs. The shrinking of features such as the constituents that form a single 
transistor are known as node reductions. The identification of a specific node usually refers to the dimension associated with 
one of the transistor’s constituents. Advanced nodes are associated with transistor dimensions less than 16nm, with high volume 
manufacturing at one of our largest customers extending advanced nodes to as small as 5nm in 2020. Our metrology systems 

4 

 
 
used  to  measure  and  characterize  these  small  features  are  generally  purchased  when  a  customer  is  beginning  to  establish 
manufacturing at a new, smaller node, in order to set up and test new manufacturing equipment being installed for the new 
node. Our process control/metrology equipment is generally installed prior to the installation of the actual process equipment 
for that reason. Additional process control equipment is normally purchased when the initial process yields have been stabilized 
and  more manufacturing  capacity  is  required  to  meet production demands. Therefore,  our  sales  to  customers  for  advanced 
nodes is generally higher when manufacturing lines new nodes are being established and may not represent continuous sales 
revenue until our initial systems reach high levels of utilization driven by the need for greater capacity.  

Our inspection systems, lithography systems, and software are primarily used for processing and inspecting advanced 
packaging associated with the back-end described above. The advanced packaging techniques represent a very wide variety of 
assembly methods in order to connect individual chips to a larger PC Board, or connecting a group of chips together to form a 
“system in a package” (“SIP”), also known as heterogeneous integration (“HI”), or chiplets. Many of these advanced packages 
require lithographic imaging to produce copper interconnections between the chip and the PC Board or between chips in the 
case  of  SIP  or  HI  advanced  packages.  Our  inspection  systems  and  software  are  used  for  process  control  and  detection  of 
potential reliability failures in nearly all of these packages. Unlike the cyclical nature of our metrology equipment associated 
with node shrinks, our sales revenue for advanced packaging is generally driven by assembly volumes. Inspection of the chips 
being integrated remains as a very high rate in order to avoid a single defective chip from being assembled into a relatively 
expensive package, making the inspection process control systems attach rates quite linear with production volumes of these 
devices. The introduction of 5G handsets and high-performance computing (“HPC”) continue to drive demand for advanced 
packaging; however, macroeconomic conditions, including COVID-19 and U.S-China trade disputes could curtail demand for 
higher volumes in the future.  

A significant portion of the global workforce began working from home as part of corporate efforts to isolate and protect 
workers from COVID-19. This resulted in extremely high usage of data centers and cloud processing that drove higher demand 
for increased memory and HPC devices that were rapidly installed. In addition, the wireless 5G networks were already starting 
to drive demand for new, 5G phones in 2020. That demand is expected to increase in the first half of 2021 as new phones from 
Apple and Samsung were introduced to the market in 2020. The building of the 5G network over the next several years will 
also bring more machine-to-machine communications, called IoT. These macro-drivers all increase the need for semiconductors 
and  packaging  to  deliver  higher  computing  power  in  a  single  package,  faster  speeds  for  memory  and  logic  devices,  while 
reducing power consumption and cost. These advances generally can be achieved by node reductions/shrinks and by advanced 
packaging  for  high  bandwidth  memory  and  HI  packaging.  As  discussed  above,  these  trends  in  front-end  and  back-end 
complexity are driving the demand for sophisticated metrology and inspection systems in order to achieve the semiconductor 
performance required while achieving a profitable manufacturing yield.   

In 2020, Onto Innovation completed certain integration activities and launched four new metrology systems and one new 
macro  defect  inspection  system  into  the  marketplace.  These  new  products  were  introduced  as  logic  and  foundries  were 
increasing  their  capacity  while  following  aggressive  plans  to  transition  their  manufacturing  to  smaller  nodes. Other 
customer interactions at  memory  and  specialty  device  manufacturers  as  well  as  providers  of  advanced  packaging centered 
around  satisfying  the  immediate  demand  for these devices  with  our  existing  product  portfolio,  while  partnering  with R&D 
groups to prepare for the process controls needed for the next generation of semiconductors and packaging that will require the 
latest systems from Onto Innovation. We believe our strong engineering teams have, and will continue to, deliver new products 
to our customers, followed by our field engineers providing customer support, while simultaneously achieving and surpassing 
our cost synergy targets that were established at the onset of our merger. While revenues in the four quarters of 2020 fluctuated 
as customers transitioned to advanced nodes, the Company was able to achieve operating margins and earnings at the high end 
of our quarterly guidance and analysts’ estimates.  

Advanced  Nodes refers  to  leading-edge  integrated  circuits  where  the  feature  sizes  of  transistors and  other 
features continue to shrink in specified steps, or nodes measured in nanometers (nm). Demand for our products continues to be 
driven by our customers' desire for higher overall chip performance without increasing the chip size, while improving power 
efficiency, logic processing capability, data storage volume and manufacturing yield. To achieve these goals, our customers 
have increased their use of more complex materials and processing methods in their manufacturing flow. The primary paths for 
performance gains are geometric scaling, known as node shrinks, or scaling in three dimensions. In some cases, our customers 
are implementing new materials and methods in high volume manufacturing, including materials and device architectures to 
reduce  power  consumption,  and  stacked  devices.  To  scale  NAND  memory,  a  new  3D  stacking  architecture  has  been 
implemented with as many as 96 device layers for a device in production. Additional innovation continues in Data Storage, 
Power  Devices,  MEMS,  and  Image  Sensors.  We  believe  the  use  of  these  new  materials  and  manufacturing  methods  has 
increased demand for our products such as the Atlas® product line that is capable of measuring these advanced nodes as certain 
features shrink to 7nm, 5nm and 3nm.   

To  shrink 

lithography  and  extreme  ultra-violet 
(“EUV”) lithography, have been developed. The EUV process is driving significantly higher requirements for the silicon wafers 

including  multiple  patterning 

features,  new  methods, 

5 

 
 
that are entering the EUV chamber. Small, particles on the backside of the wafer measuring a few micrometers (microns) can 
distort the images being projected onto the top side. The NovusEdge® inspection tool has been installed at major silicon wafer 
manufacturers  to  detect  backside  contamination  and  edge  cracking  as  a  final  quality  control  mechanism  before  wafers  are 
shipped  to  the  semiconductor  fabrication  processes. The  top  side  of  these  wafers  must  also  be  scanned  for  any  impurities 
contained in the silicon. This compositional analysis is measured using our Fourier Transform Infrared (“FTIR”) systems.    

Advanced Packaging refers to a variety of technologies that enable the miniaturization of electronic products, such as 
portable  consumer  devices,  including  smartphones,  watches,  and  tablets.  In  electronics  manufacturing,  integrated  circuit 
packaging is the final stage of semiconductor device fabrication, in which a single circuit made from semiconducting material 
(a die or chip) is encased in a molded package that provides external connections to a printed circuit board and also prevents 
physical damage to the chip and corrosion.  Advanced Packaging refers loosely to the conductors and other structures that often 
interconnect multiple die, feed them with electric power and create signal paths to and from the PC board, dissipate their heat, 
and protect them from damage.  Today, the drive to pack more functions into a small space and reduce their power requirements 
demands that chip packages do much more than ever before to combine multiple chips and functions into a single molded 
package.   

One example of the technology used in Advanced Packaging is the 3D integration of semiconductors and other devices. 
The technology involves stacking individual die in one integrated package. Through-silicon vias (“TSVs”) are vertical copper 
interconnects that are embedded from the bottom surface of a die to the top surface, which allows power and communication 
to be shared among the individually stacked components. This offers the advantages of shorter signal paths and, in turn, reduced 
power consumption, enhanced bandwidths, integration of heterogeneous components such as memory and logic chips, and 
smaller surface area. The processes required for 3D integration vary from one manufacturer to another and many continue to 
be optimized for yield and to ensure the functioning of individual stacked chips.  

Fan-out  wafer  level  packages  are  another  advanced  packaging  technology  using  copper  pillars/bumps  to  vertically 
connect a wide variety of stacked die for 2.5D, and 3D integration techniques and are considered the next disruptive technology 
for several reasons. First, fan-out wafer level packages significantly reduce the space needed inside an electronic device, such 
as a smartphone, by combining multiple chips/functions into a single package, often called a System-in-Package (“SIP”). Next, 
it improves the system’s performance by reducing power and signal conductor lengths, which previously were routed from 
package to package through a printed circuit (“PC”) board. Using thin redistribution layers (“RDLs”) to “fan out” power and 
signal  connections  to  the  larger  contacts  on  the  PC  board  eliminates  the  need  for  a  ceramic  or  laminated  substrate,  which 
accounts for 35 percent of the packaging cost. Lastly, the technology is currently considered the preferred vehicle for next 
generation uses, such as SIP, and package on package formats.  As a result of the small overall form factor, fan-out wafer level 
packages provide the functionality needed in high-end mobile and wearable products.  

The current and projected adoption of smart mobile devices with designed-in capability to enable multiple functions in a 
single device continues to grow. In reality, there are no longer single function devices, but instead, a combined single device 
provides multiple functions such as phone, GPS, camera, and internet browser.  Aided by a myriad of available “apps,” the 
potential  uses  seem  endless. As  a  result,  these  added  functions  in  mobile  products  are  driving  semiconductor  advanced 
packaging and display manufacturers to implement next-generation technologies, such as 5G communications, to meet these 
requirements. These  technology  shifts  encompass  multiple  high-value  process  steps  that  are  creating  opportunities 
for our solutions.  

Panel Manufacturing. The current process to manufacture advanced packaging involves attaching known good die to a 
300mm wafer, used as a temporary carrier when adding components such as RDLs and copper pillars.  SIP packages can often 
contain side-by-side die, meaning the package can be large and limit the number of packages being placed on a reconstituted 
wafer. In order to meet the growing demand at reduced average selling prices, manufacturers are looking to scalable technology. 
Advanced packaging facilities looking to improve Cost of Ownership (“CoO”) and increase productivity are transitioning from 
300mm wafers to large rectangular panels, which can be as large as 600mm x 600mm. This larger size enables companies 
manufacturing large area packages to increase the number of devices being processed at each step as they are no longer limited 
to  operating  within  the  constraints  of  a  round  wafer.  By  responding  to  market  opportunities  and  addressing  the 
stringent demands of customers’ technical roadmaps, we believe that Onto Innovation is optimally positioned to capitalize on 
the emerging market of high volume panel manufacturing.  For example, the JetStep® S lithography system, having emerged 
from the flat panel display market, is readily capable of processing RDLs on both glass and organic laminate panels in the 
semiconductor advanced packaging market. The Firefly® series, designed for high resolution inspection, can provide location 
information to the JetStep S tool for each die, which greatly improves lithography throughput using our exclusive StepFAST™ 
process.  It  also  delivers  a  combination  of  defect  detection  and  substrate  flexibility  in  a  single  platform.  It  reduces  capital 
investment requirements and provides a reliable pathway to transition from wafer to panel-based processes. 

6 

 
 
 
Technology 

We believe that our expertise in our core technologies of optics and software and our combined investment in research 
and development will enable us to rapidly develop new technologies and products in order to quickly respond to emerging 
industry trends and competitive challenges. The breadth of our technology enables us to offer a diverse combination of process 
and  process  control  solutions.  Unique  features  have  been  designed  into  our  lithography  systems  to  meet  our  customers’ 
changing process requirements. Our metrology and inspection technologies provide process control for the majority of wafers 
processed  today  in  a  semiconductor  wafer  fab.  In  front-end  processes, optical  critical  dimension  (“OCD”)  metrology, thin 
film metrology, wafer stress metrology and macro defect detection and classification technologies allow yield enhancement for 
critical processes such as photolithography, diffusion, etch, chemical mechanical planarization (“CMP”) and outgoing quality 
control.  Within  the  final  manufacturing  (back-end)  processes,  our  2D/3D  advanced  macro  defect  inspection  provides  our 
customers with critical quality assurance and process information. Defects may be created during probing, bumping, dicing, 
assembly processes (RDLs, TSVs, copper pillars, etc.) or general handling and can have a major impact on device and process 
quality. Lastly, we turn all of the data gathered into useful knowledge for our customers to make yield-enhancing decisions, 
which lower their cost of goods sold (“COGS”) and improve their margins.  

Onto Innovation’s Products 

Automated Metrology Systems. Our automated systems primarily consist of fully automated metrology systems that are 
employed in semiconductor production environments. The Atlas family of products represent our line of high-performance 
metrology  systems  providing OCD  and thin  film  metrology  and  wafer  stress  metrology  for  transistor  and  interconnect 
metrology  applications.  The  thin  film  and  OCD  technology  is  supported  by  our NanoCD™ suite  of  solutions  including 
our NanoDiffract® software, SpectraProbe™ software and NanoGen™ scalable computing engine that enables visualization, 
modeling, and analysis of complex structures.  

NanoDiffract is a modeling, visualization and analysis software that takes signals from the metrology systems, providing 
critical  dimension,  thickness,  and  optical  properties  from  in-line  measurements.  The  software  has  an  intuitive 
three- dimensional modeling interface to provide visualization of today’s advanced and complex semiconductor devices. There 
are proprietary fitting algorithms in NanoDiffract that enable very accurate and very fast calculations for signal processing for 
high fidelity model-based measurements. SpectraProbe is a model-less fitting engine that enables fast time to solution for in-
line  excursion  detection  and  control. SpectraProbe complements  the  high-fidelity  modeling  of NanoDiffract with  a  simple 
machine learning interface for rapid recipe deployment. The software is supported by NanoGen, an enterprise scale computing 
hardware  system  that  is  deployed  to run  the  computing  intensive  analysis  software. NanoGen leverages  commercial server 
chips and networking architecture and is optimized to support the workload of NanoDiffract and SpectraProbe analysis.     

Integrated Metrology Systems. Our  integrated  metrology  (“IM”)  systems  are  installed  directly  onto  wafer  processing 
equipment to provide near real-time measurements for improved process control and maximum throughput. Our IM systems 
are sold directly to end user customers. The IMPULSE® family of products include the latest technology for OCD, and thin 
film  metrology,  and  have  been  successfully  qualified  on  numerous  independent  Wafer  Fabrication  Equipment  Suppliers’ 
platforms. Our NanoCD suite of solutions is sold in conjunction with our IMPULSE systems.  

Silicon Wafer All-surface Inspection/Characterization. All-surface refers to inspection of the wafer frontside, edge, and 
backside as well as wafer’s locator notch. The edge inspection process focuses on the area near the wafer edge, an area that 
poses  difficulty  for  traditional  wafer  frontside  inspection  technology  due  to  its  varied  topography  and  process  variation. 
Edge bevel inspection looks for defects on the side edge of a wafer. Edge bead removal and edge exclusion metrology involve 
a topside surface measurement required exclusively in the lithography process, primarily to determine if wafers have been 
properly  aligned  for  the  edge  exclusion  region.  The  primary  reason  for  wafer  backside  inspection  is  to  determine  if 
contamination has been created that may spread throughout the wafer fab. For instance, it is critical that the wafer backside be 
free of defects prior to the EUV lithography process to prevent focus and exposure problems on the wafer frontside.  

 Our materials characterization products include systems that are used to monitor the physical, optical, electrical and 
material  characteristics  of  discrete  electronic  industry,  opto-electronic,  HB-LED  (high  brightness  LEDs),  solar  PV  (solar 
photovoltaics),  compound  semiconductor,  strained  silicon  and  silicon-on-insulator  (“SOI”)  devices,  including  composition, 
crystal structure, layer thickness, dopant concentration, contamination and electron mobility.   

 We  have  a  broad  portfolio  of  products  for  materials  characterization  including  photoluminescence  mapping  and 
Fourier Transform  Infrared  (“FTIR”)  spectroscope  in  automated  and  manual  systems  for  substrate  quality  and  epitaxial 
thickness metrology. The NanoSpec® line supports thin film measurement across all applications in both low volume production 
and research applications.   

Macro Defect Inspection. Chip manufacturers deploy advanced macro defect inspection throughout the production line 
to  monitor  key  process  steps,  gather  process-enhancing  information  and  ultimately,  lower  manufacturing  costs.  Field-

7 

 
 
established tools such as the F30™, NSX®, and the latest Dragonfly® G2 inspection systems are found in the wafer fab (front-
end) and packaging (back-end) facilities around the world. These high-speed tools incorporate features such as wafer-less recipe 
creation, tool-to-tool correlation and multiple inspection resolutions. Using Discover® yield management software, the vast 
amounts of data gathered through automated inspection can be analyzed and classified to determine trends and locate root 
causes that directly affect yield.  

Automated Defect Classification and Pattern Analysis. Automating the defect detection and classification process is 
best done by a system that can mimic, or even extend, the response of the human eye, but at a much higher speed, with higher 
resolution and more consistency. To do this, our systems capture full-color whole wafer images using simultaneous dark and 
bright field illumination. The resulting bright and dark field images are compared to those from an “ideal” wafer having no 
defects. When  a  difference  is  detected,  its  image  is  broken  down  into  mathematical  vectors  that  allow  rapid  and  accurate 
comparison with a library of known classified defects stored in the tool’s database. Patented and proprietary enhancements of 
this approach enable very fast and highly repeatable image classification. The system is pre-programmed with an extensive 
library of local, global, and color defects and can also store a virtually unlimited amount of new defect classes. This allows 
customers  to  define  defects  based  on  their  existing  defect  classification  system,  provides  more  reliable  automated  rework 
decisions and enables more accurate statistical process control data. Reviewing defects off-line enables automated inspection 
systems to maintain their utilization for high throughput inspection. Using defect image files captured by automated inspection 
systems,  operators  are  able  to  view  high-resolution  defect  images  to  determine  defects  that  cause  catastrophic  failure  of  a 
device, known as killer defects. Combining the review process with classifying defects enables faster analysis by grouping 
defects found together as one larger defect, a scratch for example, and defects of similar types across a wafer lot to be grouped 
based on size, repeating defects, and other user-defined specifications.  

Yield Analysis. Using wafer maps, charts and graphs, the massive amounts of data gathered through automated inspection 
can be analyzed to determine trends across bumps, die, wafers and lots. This analysis may determine where a process variation 
or deviation has occurred, allowing process engineers to make corrections or enhancements to increase yields. Defect data 
analysis is performed to identify, analyze and locate the source of defects and other manufacturing process excursions. Using 
either a single wafer map or a composite map created from multiple wafer maps, this analysis enables identification of defect 
patterns and distribution. When combined with inspection data from strategically-placed inspection points, this analysis may 
pinpoint the source of the defects so corrective action can be taken.  

Opaque Film Metrology. The MetaPULSE® systems allow customers to simultaneously measure the thickness and other 
properties  of  up  to  six  metal  or  non-metallic  opaque  film  layers  without  physically  contacting  product  wafers  in  a  non-
destructive manner. PULSE® technology uses an ultra-fast laser to generate acoustic waves that pass down through a stack of 
opaque  films  such  as  those  used  in  copper  or  aluminum  interconnect  processes,  as  well  as  the  hard  mask  layer  in  3D 
NAND chips, sending back to the surface a reflected signal (echo) that indicates film thickness, density, and other process 
critical parameters. We believe we are a leader in providing systems that can measure opaque thin-film stacks non-destructively 
with  the  speed  and  accuracy  semiconductor  device  manufacturers  demand  in  order  to  achieve  high  yields  with  the  latest 
fabrication processes. The technology is ideal for characterizing copper interconnect structures. The MetaPULSE systems, used 
initially for fast and accurate measurements of metal interconnect in front-end wafer fabs, have now been chosen by back-end 
manufacturers to perform system measurements in new process applications such as RF filters and modules, driven by the need 
for on-product metrology as feature sizes decrease and pattern densities increase.  

Probe  Card  Test  and Analysis. The  combination  of  fast  3D-OCM  (optical  comparative  metrology)  technology  with 
improved testing accuracy and repeatability is designed to reduce total test time for even the most advanced large area probe 
cards. The 3D capabilities enable users to analyze probe marks and probe tips in a rapid and information-rich format.  

 Industrial,  Scientific,  and  Research  Markets ―  4D  Technology.   In  November  of  2018, Nanometrics acquired  4D 
Technology Corporation, based in Tucson Arizona. The 4D business offers a line of interferometry systems for the measurement 
and inspection of high precision surfaces. End markets include high precision optics surfaces and components, aerospace and 
defense components, and unique research and scientific instrumentation that requires the unique high-speed results of the 4D 
systems.   

Advanced Packaging Lithography.  Our lithography steppers use projection optics to expose circuit patterns from a mask 
or reticle onto a substrate to expose images with optimal fidelity. These systems employ light from a mercury arc lamp that is 
transmitted through a mask or reticle containing display circuit patterns. Substrates are aligned on the system and the mask is 
imaged through a projection lens onto photoresist material coated on the substrate. The substrate is then moved, or “stepped,” 
to a second position to expose an adjacent area. Images can be “stitched” together precisely to form larger circuit patterns 
without any noticeable change in circuit performance. The system repeats the step and exposure process until the entire substrate 
is patterned. Once the exposure process has been completed, the substrate is developed with an alkali solution to reveal the 
underlying material. The imaged photoresist serves as a stencil barrier that allows for the processing of the underlying metal or 

8 

 
 
insulating layers.  The substrates then continue through the etching, stripping and deposition processes until multi-layer circuits 
are completed.  

incorporate 

to  create  RDLs  for 

lithography  capabilities 

In order to deal with increased input/output (“I/O”) resulting from devices with enhanced functionality, power distribution 
efficiency, and higher frequency, integrated device manufacturers (“IDMs”) and outsourced semiconductor assembly and test 
(“OSATs”)  facilities  must 
their  advanced  packaging 
technologies. However, the associated substrates and processes are significantly different than those used in front-end wafer 
processing. For  advanced  packaging,  the  lithography  system  must  perform  in  a  completely  different  application,  with 
significantly different operating parameters. For example, most packaging is an additive process, while wafer processing is 
subtractive,  and  thick  films,  rather  than  thin  films,  are  used  to  enable  the  creation  of  features. In  order  for  equipment  to 
effectively  function  in  this  environment,  it  must  overcome  these  challenges. Our  JetStep®  systems  have  been  specifically 
designed to meet these challenges head on. The JetStep X700 System is designed for rectangular substrates (panels), which 
when  combined  with  user-selectable  wavelength  options,  maximizes  throughput  while  not  limiting  resolution  when 
needed. High-fidelity optics are able to image the fine features required while at the same time achieving superior depth of field 
to minimize non-flatness that is typical for advanced packaging applications. On-the-fly auto focus and an innovative reticle 
management  system  improve  yield  and  utilization. These  features  result  in  a  revolutionary  lithography  system  specifically 
designed to meet advanced packaging challenges.  

Flat  Panel  Display  (“FPD”)  Lithography. A  critical  aspect  of  any  leading  mobile  device  is  the  display. The  display 
serves as the window to the user. Therefore, it must effectively present graphics from a variety of apps, such as detailed maps, 
high resolution photos, and streaming video in order to provide an enhanced user experience. To accomplish this, the display’s 
thin film transistor (“TFT”) backplane, which controls the individual pixels, must operate at a high frequency and not limit the 
pixel resolution.  As a result, the transistors must have high mobility and only use a small portion of the pixel aperture. The 
backplane is manufactured on a sheet of glass; like the packaging substrate, it is non-flat and tends to distort further during 
processing. Additionally, the displays are getting larger. Manufacturers are looking to utilize larger glass substrates, making 
throughput a challenge for the lithography equipment.  To overcome this, our JetStep G Series uses high-fidelity optics and the 
largest printable stepper field available, enabling more displays per exposure. This feature, combined with on-the-fly auto-
focus and magnification compensation, maximizes throughput and yield.  Finally, our patented grid stage allows the system to 
be easily configurable to meet the customer desired substrate size.  

Process  Control  Software. We  provide  a  wide  range  of  advanced  process  control  solutions,  all  designed  to  improve 
factory profitability, including run-to-run control, fault detection, classification and tool automation. We are a leading provider 
of  process  control  software  in  the  semiconductor  industry.  Advanced  process  control  (“APC”)  employs  software  to 
automatically detect or predict tool failure (fault detection) as well as calculate recipe settings for a process that will drive the 
yielded output to meet and exceed the target, despite variations in the incoming material and minor instabilities within the 
process equipment.  Process control software enables the factory to increase capacity and yield while decreasing rework and 
scrap. It enables reduced production costs by lowering consumables, process engineering time and manufacturing cycle time.  

Yield Management Software. Semiconductor manufacturers use yield management software (“YMS”) to obtain valuable 
process yield and equipment productivity information. The data necessary to generate productivity information comes from 
many different sources throughout the wafer fab: inspection and metrology systems, tool sensors, tool recipes, electrical tests 
and the fab environment. As the complexity and cost of manufacturing processes increase, the value of faster, better analysis 
to support critical manufacturing decisions grows. As a result, customers are demanding robust yield management systems that 
can  analyze  large,  complex  data  sets  quickly  and  effectively. Our fully-integrated  YMS is designed  to  analyze  data  from 
disparate sources and multiple sites to maximize productivity across the entire value chain.  

Customers 

Over 150 microelectronic device manufacturers have purchased Onto Innovation tools and software for installation at 
multiple sites. We support a diverse customer base in terms of both geographic location and type of device manufactured. Our 
customers are located in over 20 countries. We do not have purchase contracts with any of our customers that obligate them to 
continue to purchase our products. The following chart identifies our customers that represented 10% or more of total revenue 
for each of the last three years: 

Samsung Semiconductor............................................................  
Taiwan Semiconductor Manufacturing Co. Ltd.  .......................  
SK Hynix Inc.  ...........................................................................  
* The customer accounted for more than 10% of total revenue during the period. 
^ The customer accounted for less than 10% of total revenue during the period. 

2020 
* 
* 
^ 

2019 
^ 
* 
* 

2018 
^ 
^ 
* 

9 

 
 
  
  
  
  
  
  
  
  
  
  
  
  
  
Sales, Customer Service and Application Support 

We believe that the capability for direct sales and support is beneficial for developing and maintaining close customer 
relationships  and  for  rapidly  responding  to  changing  customer  requirements.  We  provide  local  direct  sales,  service  and 
application  support  through our  worldwide  offices  located in  the  U.S.,  South  Korea,  Japan, Taiwan,  China,  Singapore  and 
Europe, and work with selected dealers and sales representatives on a more limited basis in various countries. Our applications 
team is composed of technically experienced sales engineers who are knowledgeable in the use of metrology systems generally 
and the unique features and advantages of our specific products. Supported by our technical applications team, our sales and 
support teams work closely with our customers to offer cost-effective solutions to complex measurement and process problems.  

We believe that customer service and technical support for our systems are crucial factors that distinguish us from our 
competitors  and  are  essential  to  building  and  maintaining  close,  long-term  relationships  with  our  customers. We  generally 
provide a warranty for our products which range from twelve to fourteen months to cover defects in material and workmanship. 
We provide system support to our customers through factory technical support and globally deployed field service personnel. 
The factory technical support operations provide customers with telephonic technical support access, direct training programs, 
operating  manuals  and  other  technical  support  information  to  enable  effective  use  of  our  metrology  and  measurement 
instruments and systems. We have field service operations based in various locations throughout the U.S., South Korea, Taiwan, 
China, Japan, Singapore, Israel, and European locations.  

Competition  

We offer various products for various semiconductor manufacturing process steps, and several of our products extend 
across the same process flow. However, for process control of each of these process steps, we have multiple established and 
potential competitors, some of which may have greater financial, research, engineering, manufacturing and marketing resources 
than we have. We may also face future competition from new market entrants from other overseas and domestic sources. We 
expect  our  competitors  to  continue  to  improve  the  design and  performance of  their  current  products  and  processes,  and  to 
introduce new products and processes with improved price and performance characteristics. In order to remain competitive, we 
believe that we will require significant financial resources to offer a broad range of products, and to maintain customer service 
and support centers worldwide, and to invest in product research and development.   

In  every  market  in  which  we  participate,  the  global  semiconductor  equipment  industry  is  intensely  competitive,  and 
driven by rapid technological adoption cycles. Our ability to compete effectively depends upon our ability to continuously 
improve our products, applications and services, and our ability to develop new products, applications and services that meet 
constantly evolving customer requirements.  

In automated systems for the semiconductor industry, our principal competitors are KLA Corporation (“KLA”) and Nova 
Measuring  Instruments  Ltd.  (“Nova”)  for  thin  film  and  critical  dimension  OCD  metrology.  Our  principal  competitor  for 
advanced packaging inspection is Camtek Ltd. (“Camtek”). While the advanced packaging lithography market is served by 
various competitors, our primary competitors are Veeco Instruments, Inc. (“Veeco Instruments”) and, to a lesser extent, Nikon 
Corporation (“Nikon”). Our primary competitor for integrated metrology systems for the semiconductor industry is Nova. The 
opto-electronics, discrete device and industrial and scientific markets are addressed primarily by our material characterization 
and 4D systems, served by numerous competitors, of which no single competitor or group of competitors has established a 
majority position.  

We believe that our competitive position in each of our markets is based on the ability of our products and services to 
address  customer  requirements  related  to  numerous  competitive  factors.  Competitive  selections  are  based  on  many  factors 
involving technological innovation, productivity, total cost of ownership of the system, including impact on end of line yield, 
price, product performance and throughput capability, quality, reliability and customer support. 

Manufacturing  

Our  manufacturing  operations  are  in  Milpitas  California,  Tucson Arizona,  Wilmington  Massachusetts,  Bloomington 
Minnesota, and at various contract manufacturers around the world. It is our strategy to outsource all assemblies that do not 
contain elements that we believe lead to a direct competitive advantage. Most of our automated and integrated products are 
currently manufactured at our Milpitas and Bloomington facilities. We currently do not expect our manufacturing operations 
to require additional major investments in capital equipment.  

We  manufacture  key  modular  assemblies  and  integrated  tools  and  make  reasonable  efforts  to  ensure  that  externally 
purchased parts or raw materials are available from multiple suppliers, if possible. Certain components, subassemblies and 
services necessary for the manufacture of our systems are obtained either from a sole supplier or limited group of suppliers. 
We also have long-term supply agreements with strategic suppliers for the supply of key assemblies for use in our products.  

10 

 
 
We rely on a number of limited source suppliers for certain parts and subassemblies. This reliance creates a potential 
inability  to  obtain  an  adequate  supply  of  required  components,  and  reduced  control  over  pricing  and  time  of  delivery  of 
components. An inability to obtain adequate supplies would require us to seek alternative sources of supply or might require 
us to redesign our systems to accommodate different components or subassemblies. To date, we have not experienced any 
significant delivery delays. However, if we were forced to seek alternative sources of supply, manufacture such components or 
subassemblies internally, or redesign our products, this could prevent us from shipping our products to our customers on a 
timely basis, which could have a material adverse effect on our operations. 

The  impacts  of  the  COVID-19  pandemic  on  our  suppliers  are  uncertain,  evolving  and  dependent  on  numerous 
unpredictable factors outside of our control. If our suppliers experience closures or reductions in their capacity utilization levels 
in the future, we may have difficulty sourcing materials necessary to fulfill production requirements. Disruptions to our business 
and supply chain (and the business and supply chains of our customers) could cause significant delays in shipments of our 
products until we are able to shift our manufacturing, assembling or testing from the affected subcontractor to another third-
party vendor. Capacity is currently limited at certain of our third-party foundry, assembly and test subcontractors due to a spike 
in semiconductor demand.  

Research and Development  

We  continue  to  invest  in  research  and  development  to  provide  our  customers  with  products  that  add  value  to  their 
manufacturing processes and that provide a better and differentiated solution than our competitors so that our products stay in 
the  forefront  of  current  and  future  market  demands.  Whether  it  is  for  an  advancement  of  current  technology,  yield  and 
manufacturing improvement, enabling new end device technology, or the development of a new application in our core or 
emerging markets, we are committed to product excellence and longevity.  

The markets for equipment and systems for manufacturing semiconductor devices and for performing OCD metrology, 
macro-defect inspection, advanced packaging lithography and thin film transparent and opaque process control metrology are 
characterized  by  continuous  technological  development  and  product  innovations.  We  believe  that  the  rapid  and  ongoing 
development  of  new  products  and  enhancements  to  existing  products  is  critical  to  our  success. Accordingly,  we  devote  a 
significant portion of our technical, management and financial resources to research and development programs. 

Intellectual Property 

We believe that our success will depend to a great degree upon innovation, technological expertise and our ability to 
adapt our products to new technology. As a result, we have a policy of seeking patents on inventions governing new products 
or technologies as part of our ongoing research, development, and manufacturing activities. As of December 26, 2020, we have 
been granted, or hold exclusive licenses to 466 U.S. and foreign patents. The patents we own, jointly own or exclusively license 
have expiration dates ranging from 2021 to 2039. We also have 87 pending regular and provisional applications in the U.S. and 
other  countries.  Our  patents  and  applications  principally  cover  various  aspects  of  metrology,  macro-defect  detection  and 
classification, altered material characterization, lithography techniques and automation.  

Our pending patents may never be issued, and even if they are, these patents, our existing patents and the patents we 
license may not provide sufficiently broad protection to protect our proprietary rights, or they may prove to be unenforceable. 
To  protect  our  proprietary  rights,  we  also  rely  on  a  combination  of  copyrights,  trademarks,  trade  secret  laws,  contractual 
provisions and licenses and non-disclosure agreements. There can be no assurance (i) that any patents issued to or licensed by 
us will not be challenged, invalidated or circumvented, (ii) that the rights granted thereunder will provide us with a competitive 
advantage or (iii) that we will be able to fully protect our technology. Additionally, others may obtain patents and assert them 
against us. From time to time, we receive communications from third parties asserting that our systems may contain design 
features that such third parties claim may infringe upon their proprietary rights.  

The laws of some foreign countries do not protect our proprietary rights to the same degree as do the laws of the United 
States, and many U.S. companies have encountered substantial infringement problems in protecting their proprietary rights 
against infringement in such countries, some of which are countries in which we have sold and continue to sell products. There 
is  a  risk  that  our  means  of  protecting  our  proprietary  rights  may  not  be  adequate.  For  example,  our  competitors  may 
independently develop similar technology or duplicate our products. If we fail to adequately protect our intellectual property, 
it would be easier for our competitors to sell competing products.  

Human Capital and Talent  

As of December 26, 2020, we had approximately 1,247 staff globally, 353 in research and development, 187 in operations, 
124 in administration and 583 in sales, applications and service support. A large percentage of our employees have technical 
backgrounds and undergraduate and/or advanced degrees. Many of our employees have specialized skills and experience that 
are of value to our business, products and services. Our future success will depend, in large part, upon our ability to attract, 

11 

 
 
motivate and retain our highly skilled, technical, operational and managerial team members, who are in great demand in our 
industry and business communities. 

Approximately  60%  of  our  employees  are  located  in  the  U.S.,  36%  in Asia  Pacific  and  4%  in  Europe.  None  of  our 
employees are represented by a union and we have never experienced a work stoppage because of union actions. We consider 
our employee relations to be favorable.  

Purpose and Culture. All of our employees are expected to uphold the following core values which are foundational to 

our culture: 

Integrity – honesty, dependable, predictable and accountable 

•  Passion – ownership, pride and caring in our work 
• 
•  Collaboration – working together toward a common goal 
•  Results – meeting and exceeding goals, focused toward innovation and growth  

These core values define the way we do business in our everyday actions and choices. We strive to create a respectful 
work environment characterized by mutual trust and the absence of intimidation, oppression, discrimination and exploitation. 

Talent Development and Acquisition. Successful execution of our strategy is dependent on attracting, developing and 
retaining key employees and members of our management and leadership teams. The skills, experience and industry knowledge 
of our employees significantly benefit our operations and performance. We continuously evaluate, modify, and enhance our 
internal  processes,  tools  and  technologies  to  increase  employee  engagement,  productivity,  quality  and  efficiency. We  offer 
employees access to internal and external training and development courses to support individual development. We review 
succession plans and focus on promoting internal talent to help grow our employees, both professionally and personally.  

We are committed to promoting and cultivating an inclusive and diverse culture that welcomes and celebrates everyone 

without bias. In addition, we look to actively engage within our communities to foster and attain social equity. 

In order to ensure that we are meeting our human capital and talent objectives, we frequently utilize employee surveys 
to understand the effectiveness of our employee and Company programs and where we can improve across the Company. Our 
latest survey, completed during fiscal 2020, had a participation rate of over 81% of all our employees. Through the survey, our 
employees indicated that the Company’s greatest strengths include ensuring that employees know what is expected of them, 
providing  a caring work environment, fostering an environment where employees have the opportunity to do their best and 
commitment to quality.   

Compensation Philosophy. Our compensation philosophy creates the framework and building blocks for our rewards 
and recognition programs. We have a pay-for-performance culture that ties compensation to the performance of the individual 
and the Company. We provide balanced compensation programs that focus on the following five key elements: 

•  Pay-for-performance - Reward those who achieve or exceed set goals and objectives, while also recognizing those 

making significant, impactful contributions; 

•  External market based - Pay levels that are competitive with respect to the labor market in which we compete for 

talent; 

Internal equity - Providing fair compensation programs within the Company; 

• 
•  Fiscal responsibility - Providing programs which can be responsibly supported by our operations; and 
•  Legal compliance - Ensure the organization is legally compliant in all states and countries in which we operate. 

Safety, Health and Wellness. We are committed to providing an environment which is safe and where our employees can 
be  productive.  We  have  rigorous  health  and  safety  programs  focused  on  awareness,  recognition,  risk  assessment  and 
management, as well as teamwork.  

In response to the COVID-19 pandemic, we implemented a response plan that we believe was in the best interest and 
health of our employees and the communities in which we operate. This included largely transitioning our global workforce to 
a remote work model, while implementing additional safety measures for essential employees continuing critical on-site work.  

Our  benefit  plans  are  competitive  and  comprehensive. We provide  each  of  our  employees  educational  programs  and 

initiatives focused on holistic wellness supporting nutritional, physical, emotional, mental and financial wellbeing. 

12 

 
 
 
 
Corporate Social Responsibility 

All of our stakeholders are essential to our business – shareholders, customers, suppliers, employees, communities as 
well as the environment and society. We are working to make our workforce more inclusive, our business more sustainable, 
and our communities more engaged by maintaining strong environmental, social and governance (“ESG”) practices. Actions 
we have taken in pursuit of these commitments include the following environmental and social programs: 

•  Demanded excellence in our quality and environmental performance, as demonstrated through our product and 

process qualification commitments, including ISO 9001 Quality Management; 

•  Produce systems responsibly by offering tool trade-in, refurbishment and technology upgrade programs; 
•  Provided corporate matching for employee donations to qualified nonprofit organizations; and 
•  Engaged in community service projects in our communities globally. 

We  encourage  you  to  review  our  2020  Interim  Corporate  Social  Responsibility  Report  (located  on  our  website  at 
https://ontoinnovation.com/company/corporate-social-responsibility)  for  more  detailed  information  regarding  our  ESG 
initiatives.  Nothing  on  our  website,  including  our  Corporate  Social  Responsibility  Report  or  sections  thereof,  is  deemed 
incorporated by reference into this Form 10-K. 

Compliance with Governmental Regulations  

We are subject to international, federal, state and local regulations that are customary to businesses in the semiconductor 

capital equipment manufacturing industry. Such regulations include: 

•  The Restriction of Hazardous Substances Directive (“RoHS”), which restricts the use of certain hazardous 

substances in electrical and electronic equipment;  

•  General Data Protection Regulation (“GDPR”), which provides guidelines for the collection and processing of 

personal information from individuals who live in the European Union; 

•  The U.S. Foreign Corrupt Practices Act (“FCPA”), which prohibits companies and their individual officers from 

influencing foreign officials with any personal payments or rewards; and 

•  Conflict minerals reporting, which imposes disclosure requirements regarding the use of “conflict” minerals 

mined from the Democratic Republic of Congo and adjoining countries in products. 

Our  compliance  with  these  laws  and  regulations  has  not  had  a  material  impact  on  our  financial  position,  results  of 

operations, capital expenditures, earnings or competitive position. 

Available Information 

Our Internet website address is http://www.ontoinnovation.com. The information on our website is not incorporated into 
this Form 10-K. Our Annual Report on Form 10-K, Quarterly Reports on Form 10-Q and Current Reports on Form 8-K (and 
any amendments to those reports) are made available free of charge, on or through our Internet website, as soon as reasonably 
practicable after such material is electronically filed with or furnished to the SEC. All filings we make with the SEC are also 
available free of charge via EDGAR through the SEC’s website at http://www.sec.gov. In addition, the historic reports and 
materials  that  were  filed  by  Nanometrics  and  Rudolph  with  the  SEC  are  available  at  our  investor  relations  website  at 
https://investors.ontoinnovation.com. These filings may also be obtained through the SEC’s website. Documents that are not 
available through the SEC’s website may also be obtained by submitting an online request to the SEC at http://www.sec.gov. 

We also make available, free of charge, through our investor relations website, our corporate governance summary, Code 
of Business Conduct and Ethics, charters of the committees of our Board of Directors, and other information and materials, 
including information about how to contact our Board of Directors.  

Investors and others should also note that we announce material financial information to our investors using our investor 
relations website, SEC filings, press releases, public conference calls and webcasts. We use these channels as well as social 
media to communicate with the public about the Company, our products and services and other matters. It is possible that the 
information we post on social media could be deemed to be material information. Therefore, we encourage investors, the media, 
and others interested in the Company to review the information we post on the social media channels listed on our investor 
relations website. 

13 

 
 
 
 
 
Item 1A.  Risk Factors. 

The risks and uncertainties described below are not the only ones we face. If any of the following risks actually occurs, 
our  business,  financial  condition  or  results  of  operations  could  be  materially  adversely  affected.  Many  of  the  risks  and 
uncertainties described below may be exacerbated by the COVID-19 pandemic and any worsening of the global business and 
economic environment as a result. 

Risks Related to Our Business 

The effects of the COVID-19 pandemic have affected our business and could in the future adversely affect our business, 
results of operations, and financial condition. 

The effects of a public health crisis caused by the COVID-19 pandemic and the measures being taken to limit the spread 
of  COVID-19  are  uncertain  and  difficult  to  predict,  but  pose  the  following  risks  to  our business,  results  of  operations  and 
financial condition: 

•  A likely decrease in short-term and/or long-term demand for our products and disruptions to our operations resulting 
from the immediate consequences of and responses to the pandemic, including precautionary measures instituted 
by  governments  and  businesses  to  mitigate  its  spread,  which  have  raised  the  prospect  of  an  extended  global 
recession, which would adversely impact the businesses of our customers, suppliers and partners; 

•  Changes in our operations in response to COVID-19 and employee illnesses resulting from the pandemic, which 
have impacted the way that we operate and conduct business, and may result in inefficiencies or delays and/or 
negatively impact our operations, including, but not limited to, the following: 

 
 
 

reduction in sales and qualification activities with our customers;  
reduction in product development efforts; and 
reduction in production levels. 

In addition there may be incremental costs related to business continuity initiatives, which cannot be avoided or 
alleviated through succession planning, employees working remotely or teleconferencing technologies as well as 
inefficiencies, delays, and increased costs resulting from our efforts to mitigate the impact and spread of COVID-
19 through the changes in our operations which we have enacted at certain of our locations around the world in an 
effort to protect our employees’ health and well-being (including the implementation of work-from-home policies, 
social-distancing measures, modified work schedules and shifts, the suspension of employee travel, and limits  on 
the number of employees attending in-person meetings and the number of people permitted to be present at our 
facilities at any one time); 

•  Management focus on mitigating the impact of the COVID-19 pandemic, which has required and will continue to 
require a substantial investment of time and resources across our enterprise, which has resulted and can be expected 
to continue to result in a diversion of management attention and resources; 

•  Disruptions to our supply chain in connection with the sourcing of materials, equipment and engineering support, 
and services from geographic areas that have been impacted by COVID-19 and by efforts to contain the spread of 
COVID-19; 

•  A decrease in availability under our credit agreement, which permits us to borrow up to 70% of the value of eligible 
securities held at the time the line of credit is accessed, due a decrease in the value of eligible securities resulting 
from the impact of COVID-19 on global markets; and 

•  Difficulty accessing capital, if needed in the future, through a sale of securities, or in obtaining favorable terms of 

such securities, due to market conditions generally or a decline or volatility in the market for our securities. 

The resumption of normal business operations after such interruptions may be delayed or constrained by lingering effects 
of COVID-19 on our suppliers, third-party service providers, and/or customers. These effects, alone or taken together, could 
have a material adverse effect on our business, results of operations, legal exposure, or financial condition. The duration of the 
COVID-19 pandemic, resurgences, the severity of newly identified strains of the virus and the timing, availability and efficacy 
of vaccines cannot be determined. A sustained or prolonged outbreak, or a delayed or slower-than-anticipated vaccine rollout, 
could exacerbate the adverse impact of such measures. 

14 

 
 
 
Our largest customers account for a substantial portion of our revenue, and our revenue and cash flows could decline 
considerably if one or more of these customers were to purchase significantly fewer of our systems or delay or cancel a 
large order. 

Sales to end user customers that individually represent at least five percent of our revenue typically account for, in the 
aggregate, a considerable amount of our revenue. We operate in the highly concentrated, capital-intensive semiconductor device 
manufacturing industry. Historically, a substantial portion of our revenue in each quarter and year has been derived from sales 
to relatively few customers, and this trend is expected to continue. If any of our key customers were to purchase significantly 
fewer of our systems in the future, or if they delay or cancel a large order, our revenue and cash flows could meaningfully 
decline. We expect that we will continue to depend on a small number of large customers for a sizable portion of our revenue. 
In addition, as large semiconductor device manufacturers seek to establish closer relationships with their suppliers, we expect 
that our customer base will become even more concentrated. 

Our customers may be unable to pay us for our products and services. 

Our  customers  include  some companies  that  may,  from  time  to  time,  encounter financial  difficulties.  If  a  customer’s 
financial difficulties become severe, the customer may be unwilling or unable to pay our invoices in the ordinary course of 
business,  which  could  adversely  affect  collections  of  both  our  accounts  receivable  balance  and  unbilled  services.  The 
bankruptcy of a customer with a substantial account balance owed to us could have a material adverse effect on our financial 
condition and results of operations. In addition, if a customer declares bankruptcy after paying us certain invoices, a court may 
determine that we are not properly entitled to that payment and may require repayment of some or all of the amount we received, 
which could adversely affect our financial condition and results of operations. 

Variations in the amount of time it takes for us to sell our systems may cause fluctuations in our operating results, which 
could cause our stock price to decline. 

Variations in the length of our sales cycles could cause our revenue and cash flows, and consequently, our business, 
financial condition, operating results and cash flows to fluctuate widely from period to period. This variation could cause our 
stock price to decline. Our customers generally take a long time to evaluate our inspection and/or film metrology systems and 
many people are involved in the evaluation process. We expend significant resources educating and providing information to 
our prospective customers regarding the uses and benefits of our systems in the semiconductor fabrication process. The length 
of time it takes for us to make a sale depends upon many factors, including, but not limited to: 

• 
• 
• 
• 
• 

the efforts of our sales force; 

the complexity of the customer’s fabrication processes; 

the internal technical capabilities and sophistication of the customer; 

the customer’s budgetary constraints; and 

the quality and sophistication of the customer’s current metrology, inspection or lithography equipment. 

Because of the number of factors influencing the sales process, the period between our initial contact with a customer 
and the time when we recognize revenue from that customer and receive payment, if ever, varies widely in length. Our sales 
cycles, including the time it takes for us to build a product to customer specifications after receiving an order to the time we 
recognize  revenue,  typically  range  from  three  to  twenty-four months.  Sometimes  our  sales  cycles  can  be  much  longer, 
particularly with customers in Asia. During these cycles, we commit substantial resources to our sales efforts in advance of 
receiving any revenue, and we may never receive any revenue from a customer despite our sales efforts. If we do make a sale, 
our customers often purchase only one of our systems, the performance of which they then evaluate for a lengthy period before 
purchasing any more of our systems. The number of additional products a customer purchases, if any, depends on many factors, 
including the customer’s capacity requirements. The period between a customer’s initial purchase and any subsequent purchases 
can vary from three months to a year or longer, and variations in the length of this period could cause further fluctuations in 
our operating results and, possibly, in our stock price. 

We  are  subject  to  order  and  shipment  uncertainties.  Our  profitability  will  decline  if  we  fail  to  accurately  forecast 
customer demand when managing inventory. 

We typically plan production and inventory levels based on internal forecasts of customer demand, which can be highly 
unpredictable and can fluctuate substantially, which could lead to excess inventory write-downs and resulting negative impacts 
on gross margin and net income. We have limited visibility into our customers’ inventories, future customer demand and the 
product mix that our customers will require, which could adversely affect our production forecasts and operating margins. In 
addition,  innovation  in  our  industry  could  render  significant  portions  of  our  inventory  obsolete.  If  we  overestimate  our 
customers’  requirements,  we  may  have  excess  inventory,  which  could  lead  to  obsolete  inventory  and  unexpected  costs. 

15 

 
 
Conversely, if we underestimate our customers’ requirements, we may have inadequate inventory, which could lead to foregone 
revenue opportunities, loss of potential market share and damage to customer relationships as product deliveries may not be 
made on a timely basis, disrupting our customers’ production schedules. In response to anticipated long lead times to obtain 
inventory and materials from outside suppliers and foundries, we periodically order materials in advance of customer demand. 
This advance ordering has in the past and may in the future result in excess inventory levels or unanticipated inventory write-
downs if expected orders fail to materialize, or other factors make our products less saleable. In addition, any significant future 
cancellation or deferral of product orders could adversely affect our revenue and margins, increase inventory write-downs due 
to obsolete inventory, and adversely affect our operating results and stock price. 

Our earnings could be negatively affected and our inventory levels could materially increase if we are unable to predict 
our inventory needs in an accurate and timely manner and adjust our orders for parts and subcomponents in the event that our 
needs  increase  or  decrease  materially  due  to  unexpected  increases  or  decreases  in  demand  for  our  products. Any  material 
increase in our inventories could result in an adverse effect on our financial position, while any material decrease in our ability 
to procure needed inventories could result in an inability to supply customer demand for our products, thus adversely affecting 
our revenue. 

Most of our revenue has been derived from customers outside of the United States, subjecting us to operational, financial 
and political risks, such as unexpected changes in regulatory requirements, tariffs, political and economic instability, 
outbreaks of hostilities, natural disasters, climate change and difficulties in managing foreign sales representatives and 
foreign branch operations, as well as risks associated with foreign currency fluctuations. 

Due to the significant level of our international sales, we are subject to a number of material risks, including: 

Compliance  with  foreign  laws. Our  business  is  subject  to  risks  inherent  in  doing  business  internationally,  including 
compliance  with,  inconsistencies  among,  and  unexpected  changes  in,  a  wide  variety  of  foreign  laws  and  regulatory 
environments  with  which  we  are  not  familiar,  including,  among  other  issues,  with  respect  to  employees,  protection of  our 
intellectual property, and a wide variety of operational regulations and trade and export controls under domestic, foreign, and 
international law. 

Unexpected  changes  in  legal  and  regulatory  requirements  including  tariffs  and  other  market  barriers. The 
semiconductor device industry is a high-visibility industry in many of the European and Asian countries in which we sell our 
products. Because the governments of these countries have provided extensive financial support to our semiconductor device 
manufacturing customers in these countries, we believe that our customers could be disproportionately affected by any trade 
embargoes, excise taxes, tariffs or other restrictions imposed by their governments on trade with United States companies such 
as ourselves, particularly with respect to the ongoing trade negotiations between the United States and China.  

Over the last several years and accelerating in 2020, the U.S. government has significantly expanded export controls on 
certain technologies and commodities to certain markets, particularly with respect to semiconductor and other high technology 
exports to China. For example, effective June 29, 2020, the U.S. Department of Commerce imposed new export controls on 
the transfer of many U.S. products and technologies, including many commercial-grade electronics, to “military end users” or 
for “military end use” in China, which may include many Chinese commercial companies that sell products to or do business 
with  the  Chinese  military.  Likewise,  beginning  in  May  2019,  the  U.S.  Department  of  Commerce  has  imposed  significant 
restrictions on the transfer of any products from the United States, as well as many products produced overseas that incorporate 
U.S. content or rely on U.S. software or technology, to Huawei Technologies Co., Ltd., and a large number of its overseas 
affiliates, including HiSilicon, followed by a comparable action in December of 2020, related to Semiconductor Manufacturing 
International Corporation (SMIC)., and a large number of its overseas affiliates, including Ningbo Semiconductor International 
Corporation  (NSIC).  The  U.S.  government  is  also  engaged  in  an  ongoing  process  of  assessing  which  “emerging  and 
foundational technologies” warrant new or additional controls, which could subject additional U.S.-origin products and services 
to more stringent export restrictions. It is possible that these modified regulations, and any future regulations could reduce 
demand for our products. In particular, these restrictive measures may reduce overall global demand for our customers’ products 
or for other products produced or manufactured in the United States or based on United States technology, in turn reducing 
demand  for  our  products,  which  could  have  a  material  adverse  effect  on  our  business,  financial  condition  and  results  of 
operations. 

We are faced with various risks that may be associated with our compliance with existing, new, different, inconsistent or 
conflicting laws, regulations and rules enacted by governments and/or their regulatory agencies in the countries in which we 
operate as well as rules and policies implemented at our customer sites. These laws, regulations, rules and policies could relate 
to any of an array of issues including, but not limited to, environmental, tax, intellectual property, trade secrets, product liability, 
contracts, antitrust, employment, securities, import/export and unfair competition. In the event that we fail to comply with or 
violate U.S. or foreign laws or regulations or customer policies, we could be subject to civil or criminal claims or proceedings 

16 

 
 
that may result in monetary fines, penalties or other costs against us or our employees, which may adversely affect our operating 
results, financial condition, customer relations and ability to conduct our business. 

Political and economic instability. We are subject to various global risks related to political and economic instabilities 
in countries in which we derive sales. If terrorist activities, armed conflict, civil or military unrest or political instability occurs 
outside of the U.S., these events may result in reduced demand for our products. There is considerable political instability in 
Taiwan related to its disputes with China and in South Korea related to its disputes with North Korea. In addition, several Asian 
countries, particularly Japan, have experienced significant economic instability. An outbreak of hostilities or other political 
upheaval  in  China, Taiwan  or  South  Korea,  or  an  economic  downturn  in  Japan  or  other  countries,  would  likely  harm  the 
operations of our customers in these countries. The effect of these types of events on our revenue and cash flows could be 
material  because  we  derive  substantial  revenue  from  sales  to  semiconductor  device  foundries  in  Taiwan  such  as  Taiwan 
Semiconductor Manufacturing Company Ltd., from memory chip manufacturers in South Korea such as Samsung Electronics 
Co., Ltd., and from semiconductor device manufacturers in Japan such as Toshiba Corporation. 

Natural disasters and climate change. Natural disasters, changes in climate and geo-political events could materially 
adversely affect our worldwide operations (or those of our business partners). The occurrence of one or more natural disasters 
such as hurricanes, tropical storms, fires, cyclones, earthquakes, tsunamis, flooding, typhoons, volcanic eruptions and weather 
conditions such as major or extended winter storms, droughts and tornadoes, whether as a result of climate change or otherwise, 
may disrupt manufacturing or other operations. For example, our Milpitas operations are located near major earthquake fault 
lines in California. There may also be conflict or uncertainty in the countries in which we operate, including public health issues 
(for example, an outbreak of a contagious disease such as COVID-19, avian influenza, measles or Ebola), safety issues, natural 
disasters,  fire,  disruptions  of  service  from  utilities,  nuclear  power  plant  accidents  or  general  economic  or  political  unrest, 
including war, civil unrest or terrorist attacks.  

Difficulties in staffing and managing foreign branch operations. During periods of tension between the governments 
of the United States and certain other countries, it is often difficult for United States companies such as ours to staff and manage 
operations in such countries. Language and other cultural differences may also inhibit our sales and marketing efforts and create 
internal communication problems among our U.S. and foreign research and development teams, increasing the difficulty of 
managing multiple remote locations performing various development, quality assurance, and yield ramp analysis projects. 

Currency fluctuations as compared to the U.S. Dollar. A substantial portion of our international sales are denominated 
in U.S. dollars. As a result, if the dollar rises in value in relation to foreign currencies, our systems will become more expensive 
to customers outside the United States and less competitive with systems produced by competitors outside the United States. 
These conditions could negatively impact our international sales. Foreign sales also expose us to collection risk in the event it 
becomes more expensive for our foreign customers to convert their local currencies into U.S. dollars. Additionally, in the event 
a larger portion of our revenue becomes denominated in foreign currencies, we would be subject to a potentially significant 
exchange rate risk. 

FCPA and Other Anti-Corruption Laws. We are subject to the Foreign Corrupt Practices Act of 1977 ("FCPA"), and 
other laws that prohibit improper payments or offers of payments to foreign governments and their officials and political parties 
by U.S. persons and issuers as defined by the statute, for the purpose of obtaining or retaining business. Also, similar worldwide 
anti-bribery  laws,  such  as  the  U.K.  Bribery Act  and  Chinese  anti-corruption  laws,  generally  prohibit  companies  and  their 
intermediaries from making improper payments to non-U.S. officials for the purpose of obtaining or retaining business. Some 
of our distribution partners are located in parts of the world that have experienced governmental corruption to some degree 
and,  in  certain  circumstances,  strict  compliance  with  anti-bribery  laws  may  conflict  with  local  customs  and  practices. The 
policies and procedures we have implemented to discourage these practices by our employees, our existing safeguards and any 
future improvements may prove to be less than effective, and our employees, consultants, sales agents or distributors may 
engage in conduct for which we might be held responsible. Violations of the FCPA or international anti-corruption laws may 
result in severe criminal or civil sanctions, and we may be subject to other liabilities, which could negatively affect our business, 
operating results and financial condition. In addition, the U.S. government may seek to hold us liable for successor liability 
FCPA violations committed by companies in which we invest or that we acquire. We cannot assure you that our internal control 
policies and procedures will protect us from reckless or negligent acts committed by our employees, distributors, partners, 
consultants or agents. 

If we deliver systems with defects, our credibility will be harmed and the sales and market acceptance of our systems 
will decrease. 

Our systems are complex and have occasionally contained errors, defects and bugs when introduced. Defects may be 
created during probing, bumping, dicing or general handling, and can have a major impact on device and process quality. When 
this occurs, our credibility and the market acceptance and sales of our systems could be harmed. Further, if our systems contain 
errors, defects or bugs, computer viruses or malicious code as a result of cyber-attacks to our computer networks, we may be 

17 

 
 
required to expend significant capital and resources to alleviate these problems. Defects could also lead to product liability as 
a result of product liability lawsuits against us or against our customers. We have agreed to indemnify our customers under 
certain  circumstances  against  liability  arising  from defects  in  our  systems.  Our  product  liability  insurance  policy  currently 
provides $2.0 million of aggregate coverage, with an overall umbrella limit of $14.0 million. In the event of a successful product 
liability claim, we could be obligated to pay damages significantly in excess of our product liability insurance limits. 

If we are not successful in developing new and enhanced products for the semiconductor device manufacturing industry, 
we will lose sales and market share to our competitors. 

We  operate  in  an  industry  that  is  highly  competitive  and  subject  to  evolving  industry  standards,  rapid  technological 
changes,  rapid  changes  in  consumer  demands  and  the  rapid  introduction  of  new,  higher  performance  systems  with  shorter 
product life cycles. To be competitive in our demanding market, we must continually design, develop and introduce in a timely 
manner new lithography, inspection and metrology process control systems that meet the performance and price demands of 
semiconductor device manufacturers. We must also continue to refine our current systems so that they remain competitive. We 
expect to continue to make significant investments in our research and development activities. We may experience difficulties 
or delays in our development efforts with respect to new systems, and we may not ultimately be successful in our product 
enhancement efforts to improve and advance products or in responding effectively to technological change, as not all research 
and development activities result in viable commercial products. In addition, we cannot provide assurance that we will be able 
to  develop  new  products  for  the  most  opportunistic  new  markets  and  applications. Any  significant  delay  in  releasing  new 
systems  could  cause  our  products  to  become  obsolete,  adversely  affect  our  reputation,  give  a  competitor  a  first-to-market 
advantage or cause a competitor to achieve greater market share. 

In addition, our competitors may provide innovative technology that may have performance advantages over systems we 
currently offer or may offer in the future. They may be able to develop products comparable or superior to those that we offer 
or  may  adapt  more  quickly  to  new  technologies  or  evolving  customer  requirements.  In  particular,  while  we  currently  are 
developing additional product enhancements that we believe will address future customer requirements, we may fail in a timely 
manner to complete the development or introduction of these additional product enhancements successfully, or these product 
enhancements may not achieve market acceptance or be competitive. 

Further, customers that may otherwise desire to purchase our products from us and purchase other products from our 
competitors may nevertheless purchase competing products from our competitors rather than purchase our products due to a 
variety of reasons, including to gain favor or volume pricing from our competitors. 

If new products developed by us do not gain general market acceptance, we will be unable to generate revenue and 
recover our research and development costs. 

Inspection,  lithography  and  metrology  product  development  is  inherently  risky  because  it  is  difficult  to  foresee 
developments in semiconductor device manufacturing technology, coordinate technical personnel, and identify and eliminate 
system design flaws. Further, our products are complex and often the applications to our customers’ businesses are unique. Any 
new systems we introduce may not achieve or sustain a significant degree of market acceptance and sales. 

We expect to spend a significant amount of time and resources developing new systems and refining our existing systems. 
In light of the long product development cycles inherent in our industry, these expenditures will be made well in advance of 
the prospect of deriving revenue from the sale of those systems. Our ability to commercially introduce and successfully market 
new systems are subject to a wide variety of challenges during the development cycle, including start-up bugs, design defects, 
and other matters that could delay introduction of these systems. In addition, since our customers are not obligated by long-
term contracts to purchase our systems, our anticipated product orders may not materialize, or orders that are placed may be 
canceled. As a result, if we do not achieve market acceptance of new products, we may be unable to generate sufficient revenue 
and cash flow to recover our research and development costs and our market share, revenue, operating results or stock price 
would be negatively impacted. 

Even if we are able to develop new products that gain market acceptance, sales of these new products could impair our 
ability to sell existing products. 

Competition from our new systems could have a negative effect on sales of our existing systems and the prices that we 
could  charge  for  these  systems.  We  may  also  divert  sales  and  marketing  resources  from  our  current  systems  in  order  to 
successfully launch and promote our new or next generation systems. This diversion of resources could have a further negative 
effect on sales of our current systems and the value of inventory. 

18 

 
 
Our  integrated  metrology  systems  are  integrated  with  systems  sold  independently  by  wafer  fabrication  equipment 
suppliers, and a decrease in sales by these suppliers, or the development of competing systems by these suppliers, could 
harm our business. 

We believe that sales of integrated metrology systems will continue to be an important source of our net revenues. Sales 
of our integrated metrology systems depend upon the ability of a small number of wafer fabrication equipment suppliers to sell 
semiconductor manufacturing equipment products that are compatible with our metrology systems as components. If these 
suppliers, such as Applied Materials, Inc., Ebara Corporation, Lam Research Corporation and Tokyo Electron, are unable to 
sell such products, if they choose to focus their attention on products that do not integrate our systems, or if they choose to 
develop competing systems, our business could suffer.  

If  our  relationships  with  our  large  customers  deteriorate,  our  product  development  activities  could  be  adversely 
affected. 

The  success  of  our  product  development  efforts  depends  on  our  ability  to  anticipate  market  trends  and  the  price, 
performance and functionality requirements of semiconductor device manufacturers. In order to anticipate these trends and 
ensure that critical development projects proceed in a coordinated manner, we must continue to collaborate closely with our 
largest customers. Our relationships with these and other customers provide us with access to valuable information regarding 
trends in the semiconductor device industry, which enables us to better plan our product development activities. If our current 
relationships with our large customers are impaired, or if we are unable to develop similar collaborative relationships with 
important customers in the future, our product development activities could be adversely affected. 

We may fail to adequately protect our intellectual property and, therefore, lose our competitive advantage. 

Our future success and competitive position depend in part upon our ability to obtain and maintain proprietary technology 
for our principal product families, and we rely, in part, on patent and trade secret law and confidentiality agreements to protect 
that technology. If we fail to adequately protect our intellectual property, it will give our competitors a significant advantage. 
We  own  or  have  licensed  a number  of  patents relating  to our  transparent  and opaque  thin  film  metrology,  lithography  and 
macro-defect inspection systems, and have filed applications for additional patents.  Any of our pending patent applications 
may be rejected, and we may be unable to develop additional proprietary technology that is patentable in the future. 

In addition, the patents that we do own or that have been issued or licensed to us may not provide us with competitive 
advantages and may be challenged by third parties. Further, third parties may also design around these patents. In addition to 
patent protection, we rely upon trade secret protection for our confidential and proprietary information and technology. We 
routinely enter into confidentiality agreements with our employees and other third parties. Even though these agreements are 
in place, there can be no assurances that trade secrets and proprietary information will not be disclosed, that others will not 
independently develop substantially equivalent proprietary information and techniques or otherwise gain access to our trade 
secrets, or that we can fully protect our trade secrets and proprietary information. Violations by others of our confidentiality 
agreements and the loss of employees who have specialized knowledge and expertise could harm our competitive position and 
cause our sales and operating results to decline as a result of increased competition. Costly and time-consuming litigation might 
be  necessary  to  enforce  and  determine  the  scope  of  our  proprietary  rights,  and  failure  to  obtain  or  maintain  trade  secret 
protection might adversely affect our ability to continue our research or bring products to market. 

The laws of some foreign countries, including China, Japan, South Korea and Taiwan, where we do business, do not 
protect  our  proprietary  rights  to  as  great  an  extent  as  do  the  laws  of  the  United  States,  and  many  U.S.  companies  have 
encountered substantial problems in protecting their proprietary rights against infringement abroad. For example, litigation 
discovery practice in China, Japan, South Korea, and Taiwan is not as robust as the U.S., so it can be more difficult to determine 
if a company is infringing on our patents and more challenging to bring a lawsuit. Similarly, China’s protection of intellectual 
property  rights  historically  has  been  less  stringent  and  robust  compared  to  other  countries  such  as  the  United  States,  and 
consequently intellectual property rights and confidentiality protections in China may not be as effective as in the United States 
or other countries.  Monitoring and preventing unauthorized use are also difficult and the measures we take to protect our 
intellectual property rights may not be adequate.  Accordingly, infringement of our intellectual property rights poses a serious 
risk of doing business in China. Consequently, there is a risk that we may be unable to adequately protect our proprietary rights 
in certain foreign countries. If this occurs, it would be easier for our competitors to develop and sell competing products in 
these countries. 

19 

 
 
Protection of our intellectual property rights, or the efforts of third parties to enforce their own intellectual property 
rights against us, may result in costly and time-consuming litigation, substantial damages, lost product sales and/or the 
loss of important intellectual property rights. 

We may be required to initiate litigation in order to enforce any patents issued to or licensed by us or to determine the 
scope or validity of a third party’s patent or other proprietary rights. Any litigation, regardless of outcome, could be expensive 
and time consuming and could subject us to significant liabilities or require us to re-engineer our products or obtain expensive 
licenses  from  third  parties. There  can  be no  assurance  that  any  patents  issued  to  or  licensed  by  us  will  not  be  challenged, 
invalidated or circumvented, or that the rights granted thereunder will provide us with a competitive advantage. 

In addition, our commercial success depends in part on our ability to avoid infringing or misappropriating patents or other 
proprietary rights owned by third parties. From time to time, we receive communications from third parties asserting that our 
products or systems infringe, or may infringe, on the proprietary rights of these third parties. These claims of infringement may 
lead to protracted and costly litigation, which could require us to pay substantial damages or have the sale of our products or 
systems stopped by an injunction. Infringement claims could also cause product or system delays or require us to redesign our 
products or systems, and these delays could result in the loss of substantial revenue. We may also be required to obtain a license 
from the third party or cease activities utilizing the third party’s proprietary rights. We may not be able to enter into such a 
license or such a license may not be available on commercially reasonable terms. Accordingly, the loss of important intellectual 
property rights could hinder our ability to sell our systems or to make the sale of these systems more expensive. 

Some  of  our  current  and  potential  competitors  have  significantly  greater  resources  than  we  do,  and  increased 
competition could impair sales of our products or cause us to reduce our prices. 

The market for semiconductor capital equipment is highly competitive. We face substantial competition from established 
companies in each of the markets we serve. We principally compete with KLA Corporation, Nova Measuring Instruments, 
Camtek and Veeco Instruments. We compete to a lesser extent with Nikon. Each of our products also competes with products 
that use different metrology, inspection or lithography techniques. Some of our competitors have greater financial, engineering, 
manufacturing and marketing resources, broader product offerings and service capabilities and larger installed customer bases 
than we do. As a result, these competitors may be able to respond more quickly to new or emerging technologies or market 
developments by devoting greater resources to the development, promotion and sale of products, which, in turn, could impair 
sales of our products. Further, there may be significant merger and acquisition activity among our competitors and potential 
competitors, which, in turn, may provide them with a competitive advantage over us by enabling them to rapidly expand their 
product offerings and service capabilities to meet a broader range of customer needs. 

Many of our customers and potential customers in the semiconductor device manufacturing industry are large companies 
that require global support and service for their semiconductor capital equipment. We believe that our global support and service 
infrastructure is sufficient to meet the needs of our customers and potential customers. However, some of our competitors have 
more extensive infrastructures than we do, which could place us at a disadvantage when competing for the business of global 
semiconductor device manufacturers. Many of our competitors are investing heavily in the development of new systems that 
will compete directly with our systems. We have, from time to time, selectively reduced prices on our systems in order to 
protect our market share, and competitive pressures may necessitate further price reductions. We expect our competitors in 
each product area to continue to improve the design and performance of their products and to introduce new products with 
competitive prices and performance characteristics. These product introductions would likely require us to decrease the prices 
of our systems and increase the level of discounts that we grant our customers. Price reductions or lost sales as a result of these 
competitive pressures would reduce our total revenue and could adversely impact our financial results. 

Because of the high cost of switching equipment vendors in our markets, it is  sometimes difficult for us to win new 
customers from our competitors even if our systems are superior to theirs. 

We believe that once a semiconductor device manufacturer has selected one vendor’s capital equipment for a production-
line  application,  the  manufacturer  generally  relies  upon  that  capital  equipment  and,  to  the  extent  possible,  subsequent 
generations of the same vendor’s equipment for the life of the application. Once a vendor’s equipment has been installed in a 
production line application, a semiconductor device manufacturer must often make substantial technical modifications and may 
experience production-line downtime in order to switch to another vendor’s equipment. Accordingly, unless our systems offer 
performance or cost advantages that outweigh a customer’s expense of switching to our systems, it will be difficult for us to 
achieve significant sales to that manufacturer once it has selected another vendor’s capital equipment for an application. 

20 

 
 
We must attract and retain experienced senior executives and other key personnel with knowledge of semiconductor 
device manufacturing and inspection, metrology or lithography equipment and related software to help support our 
future growth, and competition for such personnel in our industry is high. 

Our  success  depends,  to  a  significant  degree,  upon  the  continued  contributions  of  our  key  executive  management, 
engineering,  sales  and  marketing,  customer  support,  finance  and  manufacturing  personnel.  The  loss  of  any  of  these  key 
personnel through resignations, retirement or other circumstances, each of whom would be extremely difficult to replace, could 
harm our business and operating results. Although we have employment and noncompetition agreements with key members of 
our senior management team, these individuals or other key employees may still leave us, which could have a material adverse 
effect on our business. We do not have key person life insurance on any of our executives. In addition, to support our future 
growth, we will need to attract and retain additional qualified employees. Competition for such personnel in our industry is 
intense, and we may not be successful in attracting and retaining qualified employees. 

In order to attract and retain executives and other key employees, we must provide a competitive compensation package, 
including  cash  and  stock-based  compensation.  If  the  anticipated  value  of  the  our  stock-based  incentive  awards  does  not 
materialize so that they cease to be viewed as valuable, if our profits decrease, or if our total compensation package is not 
viewed as competitive, our ability to attract, retain and motivate executives and key employees could be weakened. 

Any prolonged disruption in the operations of our manufacturing facilities could have a material adverse effect on our 
revenue. 

We produce the majority of our systems in our manufacturing facilities located in Milpitas, California and Bloomington, 
Minnesota. We  use  contract  manufacturers  in  China,  Israel,  Japan  and  the  United  States.  Our  manufacturing processes  are 
highly complex and require sophisticated and costly equipment and a specially designed facility. As a result, any prolonged 
disruption  in  the  operations  of  our  manufacturing  facilities  could  seriously  harm  our  ability  to  satisfy  our  customer  order 
deadlines. If we cannot timely deliver our systems, our results from operations and cash flows could be materially and adversely 
affected. 

We may outsource select manufacturing activities to third-party service providers, which decreases our control over the 
performance of these functions and may result in lower quality and functionality of our products. 

We  may  outsource  product  manufacturing  to  third-party  service  providers.  Outsourcing  reduces  our  control  over  the 
performance  of  the  outsourced  functions.  Dependence  on  outsourcing  may  also  adversely  affect  our  ability  to  bring  new 
products to market. If we do not effectively manage our outsourcing strategy or if third party service providers do not perform 
as anticipated, we may experience operational difficulties, increased costs, manufacturing interruptions or inefficiencies in the 
operation of our supply chain, any or all of which could delay our delivery of products to our customers, and materially and 
adversely affect our business, financial condition, and results of operations. 

We are in the process of consolidating a world-wide enterprise resource planning (“ERP”) system, and problems with 
the design or implementation of this ERP system could interfere with our business and operations. 

We  are  currently  engaged  in a  multi-year  process  of  conforming  all  our  operations  to  one  global  enterprise  resource 
planning (“ERP”) system. The ERP system is designed to accurately maintain the Company’s books and records and enhance 
the speed and quality of information provided to our management team for use in the operation and management of our business.  
The Company’s ERP transition has required, and will continue to require, the investment of significant human and financial 
resources. We may not be able to successfully implement the ERP transition without experiencing delays, increased costs and 
other difficulties. Beyond cost and scheduling, if there are flaws in the implementation of the ERP system, or if the ERP system 
does not operate as expected, this may pose risks to the Company’s ability to operate successfully and efficiently, including the 
risk  that  the  effectiveness  of  our  disclosure  controls  and  procedures  or    internal  controls  over  financial  reporting  may  be 
negatively impacted, affecting our ability to make timely and accurate SEC filings. If we are unable to successfully implement 
the  consolidated  ERP  system  as  planned,  our  financial  position,  results  of  operations  and  cash  flows  could  be  negatively 
impacted. 

If our network security measures are breached and unauthorized access is obtained to a customer’s data, to our data, 
or to our information technology systems, we may incur significant legal and financial exposure and liabilities. 

As part of our business, we store our data and certain data about our customers, vendors and employees in our information 
technology system.  While we have security measures in place that are designed to protect this information and prevent data 
loss and other security breaches, if these measures are breached as a result of third-party action, employee error, malfeasance, 
break-ins or otherwise, and someone obtains unauthorized access to our customers’, vendors’ or employees’ data, we could 
face loss of business, regulatory investigations or court orders, our reputation could be severely damaged, we could be required 

21 

 
 
to  expend  significant  capital and  other  resources  to  alleviate  the  problem,  as  well  as  incur  significant  costs  and  liabilities, 
including due to litigation, indemnity obligations, damages for contract breach, penalties for violation of applicable laws or 
regulations, and costs for remediation and other incentives offered to customers. 

Cyber-attacks and other malicious internet-based activities continue to increase. In response to the COVID-19 pandemic, 
our expanded reliance on remote access to our information systems has further increased our exposure to potential cybersecurity 
breaches.  As the techniques used to obtain unauthorized access or sabotage systems change frequently and generally are not 
identified until they are launched against a target, we may be unable to anticipate these techniques or to implement adequate 
preventative measures. In addition, third parties may attempt to fraudulently induce employees or users to disclose information 
to gain access to our data or our customers’ data. If any of these events occur, our or our customers’ and vendors’ information 
could be accessed or disclosed improperly. Any or all of these issues could negatively affect our ability to attract new customers, 
cause existing customers to choose to purchase from our competitors, result in reputational damage or subject us to third-party 
lawsuits, regulatory fines or other action or liability, which could adversely affect our operating results. 

The General Data Protection Regulation (“GDPR”) is a regulation in European Union (“EU”) law on data protection and 
privacy for all individuals within the EU and the European Economic Area (“EEA”). It also addresses the export of personal 
data outside the EU and EEA areas. Appropriate technical and organizational measures are necessary to implement these data 
protection principles.  We may also be subject to other data privacy laws in the United States and the other countries in which 
we operate. 

Our ability to fulfill our backlog may have an effect on our long-term ability to procure contracts and fulfill current 
contracts. 

Our ability to fulfill our backlog may be limited by our ability to devote sufficient financial and human capital resources 
and may be limited by available material supplies. If we do not fulfill our backlog in a timely manner, we may experience 
delays in product delivery, which would postpone receipt of revenue from those delayed deliveries. Additionally, if we are 
consistently unable to fulfill our backlog, this may be a disincentive to customers to award large contracts to us in the future 
until they are comfortable that we can effectively manage our backlog. 

If we do not manage our supply chain effectively, our operating results may be adversely affected. 

We need to continually evaluate our global supply chains and assess opportunities to reduce costs. We must also enhance 
quality, speed and flexibility to meet changing demand for our products and product mix and uncertain market conditions. Our 
success also depends in part on refining our cost structure and supply chains so that we have flexibility and can maintain and 
improve profitability. Although the current tariff environment has not had a material adverse effect on our costs to date, further 
deterioration in the tariff environment, or changes in suppliers, may cause our costs to increase, which if we are not able to 
offset by charging higher sales prices, will cause a decline in our margins. To improve our margins on a product, we will need 
to establish high volume supply agreements with our vendors. We cannot be certain that we will be able to timely negotiate 
vendor supply agreements on improved terms and conditions, or at all. Failure to achieve the desired level of cost reductions 
could adversely affect our financial results. Despite our efforts to control costs and increase efficiency in our facilities, changes 
in demand could still cause us to realize lower operating margins and profitability. 

We obtain some of the components and subassemblies included in our systems from a limited group of suppliers and do 
not have long-term contracts with many of our suppliers. Our dependence on limited source suppliers of components and our 
lack of long-term contracts with many of our suppliers expose us to several risks, including a potential inability to obtain an 
adequate supply of components, price increases, late deliveries and poor component quality. Disruption or termination of the 
supply of these components could delay shipments of our systems, damage our customer relationships and reduce our sales. 
From time to time in the past, we have experienced temporary difficulties in receiving shipments from our suppliers. The lead-
time required for shipments of some of our components can be as long as six months. In addition, the lead time required to 
qualify new suppliers for lasers and certain optics could be as long as a year, and the lead time required to qualify new suppliers 
of other components could be as long as nine months. If we are unable to accurately predict our component needs, or if our 
component supply is disrupted, we may miss market opportunities by not being able to meet the demand for our systems. 
Further, a significant increase in the price of one or more of these components or subassemblies could seriously harm our results 
of operations and cash flows. 

We may choose to acquire new and complementary businesses, products or technologies instead of developing them 
ourselves, and we may be unable to complete these acquisitions or may not be able to successfully integrate an acquired 
business in a cost-effective and non-disruptive manner. 

Our success depends on our ability to continually enhance and broaden our product offerings in response to changing 
technologies, customer demands and competitive pressures. To this end, we have, from time to time, engaged in the process of 

22 

 
 
identifying,  analyzing  and  negotiating  possible  acquisition  transactions,  and,  from  time  to  time,  acquiring  one  or  more 
businesses, and we expect to continue to do so in the future. We may choose to acquire new and complementary businesses, 
products, technologies and/or services instead of developing them ourselves. We may, however, face competition for acquisition 
targets from larger and more established companies with greater financial resources, making it more difficult for us to complete 
acquisitions. We cannot provide any assurance that we will be successful in consummating future acquisitions on favorable 
terms or that we will realize the benefits that we anticipate from one or more acquisitions that we consummate. Integrating any 
business, product, technology or service into our current operations could be expensive and time-consuming and/or disrupt our 
ongoing business. Further, there are numerous risks associated with acquisitions and potential acquisitions, including, but not 
limited to: 

failure to commercialize the new technology or business; 

•  diversion of management’s attention from day-to-day operational matters and current products and customers; 
• 
lack of synergy or the inability to successfully integrate the new business or to realize expected synergies; 
• 
• 
• 
• 
•  unexpected reduction of sales of existing products as a result of the introduction of new products. 

lower-than-expected market opportunities or market acceptance of any new products; and 

failure to meet the expected performance of the new technology or business; 

failure to retain key employees and customer or supplier relationships; 

Our inability to consummate one or more acquisitions on favorable terms, or our failure to realize the intended benefits 
from one or more acquisitions, could have a material adverse effect on our business, liquidity, financial position and/or results 
of  operations,  including  as  a  result  of  our  incurrence  of  indebtedness  and  related  interest  expense  and  our  assumption  of 
unforeseen contingent liabilities. We might need to raise additional funds through public or private equity or debt financings to 
finance any acquisition. In that event, we could be forced to obtain financing on terms that are not favorable to us and, in the 
case of equity financing, that result in dilution to our stockholders. In addition, any impairment of goodwill or other intangible 
assets, amortization of intangible assets,  write-down of other assets or charges resulting  from the costs of acquisitions and 
purchase accounting could harm our business and operating results. 

If we cannot effectively manage growth, our business may suffer. 

Over the long-term, we intend to grow our business by increasing our sales efforts and completing strategic acquisitions. 

To effectively manage growth, we must, among other things: 

•  engage, train and manage a larger sales force and additional service personnel; 
•  expand the geographic coverage of our sales force; 
•  expand our information systems; 
• 
•  administer appropriate financial and administrative control procedures. 

identify and successfully integrate acquired businesses into our operations; and 

Growth of our business will likely place a significant strain on our management, financial, operational, technical, sales 
and administrative resources. Any failure to effectively manage our growth may cause our business to suffer and our stock price 
to decline. 

Risks Related to Tax Laws, Financial Markets and the Environment 

Changes in tax rates or tax liabilities could affect results. 

As a global company, we are subject to taxation in the United States and various other countries. Significant judgment is 
required to determine and estimate worldwide tax liabilities. Our future annual and quarterly tax rates could be affected by 
numerous factors, including changes in the (1) applicable tax laws; (2) composition of earnings in countries with differing tax 
rates; or (3) recoverability of our deferred tax assets and liabilities.  In addition, we are subject to regular examination of our 
income tax returns by the Internal Revenue Service and other tax authorities. We regularly assess the likelihood of favorable or 
unfavorable outcomes resulting from these examinations to determine the adequacy of our provision for income taxes. Although 
we  believe  our  tax  estimates  are  reasonable,  there  can  be  no  assurance  that  any  final  determination  will  not  be  materially 
different from the treatment reflected in our historical income tax provisions and accruals, which could materially and adversely 
affect our results of operations. 

The Organization for Economic Co-operation and Development (“OECD”), released guidance covering various topics, 
including country-by-country reporting, definitional changes to permanent establishment and Base Erosion and Profit Shifting 

23 

 
 
(“BEPS”), an initiative that aims to standardize and modernize global tax policy. Depending on the final form of guidance 
adopted by OECD members and legislation ultimately enacted, if any, there may be significant consequences for us due to our 
international business activities, including, but not limited to, an increase in our tax uncertainty and adverse effects on our 
provision for income taxes. 

Turmoil or fluctuations in the credit markets and the financial services industry may negatively impact our business, 
results of operations, financial condition or liquidity, and our factoring arrangements may expose us to additional risks. 

In the past, global credit markets and the financial services industry have experienced a period of unprecedented turmoil 
and upheaval characterized by the tightening of the credit markets, the weakening of the global economy and an unprecedented 
level of intervention from the United States and other governments. Adverse economic conditions, such as sustained periods 
of economic uncertainty or a crisis in the financial markets may have a material adverse effect on our liquidity and financial 
condition if our ability to obtain credit from the capital financial markets, or from trade creditors was impaired. In addition, a 
worsening economy or an economic crisis could also adversely impact our customers’ ability to finance the purchase of systems 
from us or our suppliers’ ability to provide us with product, either of which may negatively impact our business and results of 
operations. In addition, we enter into factoring arrangements with certain financial institutions to sell a certain portion of our 
trade receivables. If we were to stop entering into these factoring arrangements, our operating results, financial condition and 
cash flows could be adversely impacted by delays or failure to collect the trade receivables. However, by entering into these 
arrangements, we are exposed to additional risks.  If any of these financial institutions experiences financial difficulties or is 
otherwise unable to honor the terms of our factoring arrangements, we may experience material financial losses due to the 
failure of such arrangements, which could have an adverse impact upon our operating results, financial condition and cash 
flows. 

We are subject to various environmental laws and regulations that could impose substantial costs upon us and may 
harm our business, operating results and financial condition. 

Some of our operations use substances regulated under various federal, state, local, and international laws governing the 
environment, including those relating to the storage, use, discharge, disposal, labeling, and human exposure to hazardous and 
toxic  materials. We  could  incur  costs,  fines  and  civil  or  criminal  sanctions,  third-party  property  damage or  personal  injury 
claims, or could be required to incur substantial investigation or remediation costs, if we were to violate or become liable under 
environmental  laws.  Liability  under  environmental  laws  can  be  joint  and  several  and  without  regard  to  comparative  fault. 
Compliance  with  current  or future  environmental  laws  and  regulations  could  restrict  our  ability  to  expand our facilities  or 
require us to acquire additional expensive equipment, modify our manufacturing processes, or incur other significant expenses. 
We may unintentionally violate environmental laws or regulations in the future as a result of human error, equipment failure or 
other causes. 

Risks Related to the 2019 Merger 

Any ongoing actions related to the combination of the businesses of Rudolph and Nanometrics may be more difficult, 
costly or time-consuming than expected and we may fail to realize the anticipated benefits of the 2019 Merger, which 
may adversely affect our business results and negatively affect the value of our common stock. 

The success of the 2019 Merger depends on, among other things, our ability to combine the businesses of Rudolph and 

Nanometrics in a manner that realizes cost savings and facilitates growth opportunities.  

In addition, we must achieve the anticipated growth and cost savings without adversely affecting current revenues and 
investments in future growth. If we are not able to successfully achieve these objectives, the anticipated benefits of the 2019 
Merger may not be realized fully, or at all, or may take longer to realize than expected. 

An inability to realize the full extent of the anticipated benefits of the 2019 Merger, as well as any delays encountered in 
any remaining activities which are part of the integration process, could have an adverse effect upon our revenues, level of 
expenses and operating results, which may adversely affect the value of our common stock. 

In addition, any remaining integration activities may result in additional and unforeseen expenses, and the anticipated 
benefits of the integration plan may not be realized. Actual growth and cost savings, if achieved, may be lower than what we 

24 

expect and may take longer to achieve than anticipated. If we are not able to adequately address any remaining integration 
challenges, we may be unable to realize the anticipated benefits of the integration of Rudolph and Nanometrics. 

The failure to complete the successful integration of the businesses and operations of Rudolph and Nanometrics in the 
expected time frame may adversely affect our future results. 

Prior to completion of the 2019 Merger, Rudolph and Nanometrics operated independently. There can be no assurances 
that their businesses can be fully integrated successfully. It is possible that the ongoing integration process could result in the 
loss of key employees, the loss of customers, the disruption of our ongoing businesses, inconsistencies in standards, controls, 
procedures and policies, unexpected integration issues, higher than expected integration costs or an overall post-completion 
integration process that takes longer than originally anticipated. Specifically, the following issues, among others, continue to 
be addressed in integrating the operations of Rudolph and Nanometrics in order to realize the anticipated benefits of the 2019 
Merger so we perform as expected: 

integrating and unifying the offerings and services available to customers;

•
• harmonizing the companies’ operating practices, employee development and compensation programs, internal

controls and other policies, procedures and processes;

•

•

consolidating the companies’ administrative and information technology infrastructure; and

coordinating geographically dispersed organizations.

In addition, at times the attention of certain members of management and resources may be focused on the integration of 
the businesses of the two companies and diverted from day-to-day business operations or other opportunities that may have 
been beneficial, which may disrupt our business. 

Risks Related to the Global Economy and Semiconductor Industry 

Cyclicality in the semiconductor device industry has led to substantial decreases in demand for our systems and may, 
from time to time, continue to do so. 

Our operating results are subject to significant variation due to global economic conditions and the cyclical nature of the 
semiconductor device industry. Our business depends upon the capital expenditures of semiconductor device manufacturers, 
which, in turn, depend upon the current and anticipated market demand for semiconductors and products using semiconductors. 
The timing, length and severity of the up-and-down cycles in the semiconductor equipment industry are difficult to predict. In 
recent years, the industry has experienced significant downturns, generally in connection with declines in economic conditions. 
This cyclical nature of the industry in which we operate affects our ability to accurately predict future revenue and, thus, future 
expense levels. When cyclical fluctuations result in lower than expected revenue levels, operating results may be adversely 
affected, and cost reduction measures may be necessary in order for us to remain competitive and financially sound. During a 
down cycle, we must be in a position to adjust our cost and expense structure to prevailing market conditions and to continue 
to  motivate  and  retain  our  key  employees.  In  addition,  during  periods  of  rapid  growth,  we  must  be  able  to  increase 
manufacturing capacity and personnel to meet customer demand. We can provide no assurance that these objectives can be met 
in a timely manner in response to industry cycles. If we fail to respond to industry cycles, our business could be seriously 
harmed. 

We may also experience supplier or customer issues as a result of adverse macroeconomic conditions. If our customers 
have difficulties in obtaining capital or financing, this could result in lower sales. Customers with liquidity issues could also 
result in an increase in bad debt expense. These conditions could also affect our key suppliers, which could affect their ability 
to supply parts and result in delays of our customer shipments. 

Our future rate of growth is highly dependent on the development and growth of the market for microelectronic device 
inspection, lithography and metrology equipment. 

We target our products to address the needs of microelectronic device manufacturers for defect inspection, metrology 
and lithography.  If for any reason the market for microelectronic device inspection, lithography or metrology equipment fails 
to grow in the long term, we may be unable to maintain current revenue levels in the short term and maintain our historical 
growth in the long term. Growth in the inspection market is dependent to a large extent upon microelectronic manufacturers 
replacing manual inspection with automated inspection technology. Growth in the metrology market is dependent to a large 
extent upon new chip designs and capacity expansion of microelectronic manufacturers. Growth in the lithography market is 
dependent on the development of cost-effective packaging with high fine pitch RDLs, ultimately migrating to multi-die, large, 
form-factor packages. There can be no assurance that manufacturers will undertake these actions at the rate we expect. 

25 

General Risk Factors 

Provisions of our charter documents and of Delaware law could discourage potential acquisition proposals and/or delay, 
deter or prevent a change in control of our company. 

Provisions of our certificate of incorporation and by-laws may inhibit changes in control of our company not approved 
by our Board of Directors. These provisions also limit the circumstances in which a premium can be paid for our common stock 
and in which a proxy contest for control of our board may be initiated. These provisions provide for: 

•

•

•

•

•

a prohibition on stockholder actions through written consent;

a requirement that special meetings of stockholders be called only by our chief executive officer or Board of
Directors;

advance notice requirements for stockholder proposals and director nominations by stockholders;

limitations on the ability of stockholders to amend, alter or repeal our by-laws; and

the authority of our board to issue, without stockholder approval, preferred stock with such terms as the board
may determine; and

• The authority of our board, without stockholder approval, to adopt a stockholder rights plan.

We are also entitled to avail ourselves of the protections of Section 203 of the Delaware General Corporation Law, which 

could inhibit changes in control of the Company. 

Our stock price is volatile. 

The market price of our common stock has fluctuated widely. Consequently, the current market price of our common 
stock may not be indicative of future market prices, and we may be unable to sustain or increase the value of an investment in 
our common stock. Factors affecting our stock price may include: 
• variations in operating results from quarter to quarter;
•

changes in earnings estimates by analysts or our failure to meet analysts’ expectations;

changes in the market price per share of our public company customers;

•
• market conditions in the semiconductor and other industries into which we sell products;
• general economic conditions;
• political changes, hostilities or natural disasters such as hurricanes and floods;
•

the impact of the COVID-19 pandemic, or other future infectious disease pandemics, on the global economy and
on our customers, suppliers, employees, and business

•

•

low trading volume of our common stock; and

the number of firms making a market in our common stock.

In addition, the stock market has experienced periods of significant price and volume fluctuations. These fluctuations 
have  particularly  affected  the  market  prices  of  the  securities  of  high  technology  companies  like  ours. Any  such  market 
fluctuations in the future could adversely affect the market price of our common stock. 

Item 1B.  Unresolved Staff Comments. 

None. 

26 

Item 2. 

Properties. 

Our principal executive office building is located at 16 Jonspin Road in Wilmington, Massachusetts.  We own our Milpitas 
and Richardson facilities and lease facilities for corporate, engineering, manufacturing, sales and service-related purposes in 
the  United  States  and  seven  other  countries -  China,  Japan,  South  Korea,  Singapore,  Taiwan,  Germany  and  France.  The 
following table indicates the location, the general purpose and the square footage of our material facilities. Our leases expire at 
various times through July 1, 2029. 

Facility Purpose 

Location 
Wilmington, Massachusetts ............   Corporate Headquarters, Engineering, Manufacturing and Service 
Milpitas, California .........................   Engineering, Manufacturing, Service and Administration 
Budd Lake, New Jersey ..................   Engineering, Service and Administration ....................  
Bloomington, Minnesota ................   Engineering, Manufacturing, Service and Administration 
Bend, Oregon ..................................   Engineering and Service ..............................................  
Hillsboro, Oregon ...........................   Engineering and Service ..............................................  
Richardson, Texas ...........................   Engineering .................................................................  
Snoqualmie, Washington ................   Engineering and Service ..............................................  
Tucson, Arizona ..............................   Engineering, Manufacturing and Service ....................  
Taiwan ............................................   Sales and Service .........................................................  
China ...............................................   Sales, Service and Engineering ...................................  
South Korea ....................................   Sales and Service .........................................................  
Japan ...............................................   Sales and Service .........................................................  
Singapore ........................................   Sales and Service .........................................................  

Approximate 
Square 
Footage 

50,000  
134,000  
49,000  
98,500  
13,000  
27,000  
21,000  
20,500  
19,000  
27,500  
26,700  
26,000  
20,000  
12,000  

We also lease office space for other smaller sales and service offices in several locations throughout the world. 

We  believe  that  our  existing  facilities  and  capital  equipment  are  adequate  to  meet  our  current  requirements  and  that 

suitable additional or substitute space is available on commercially reasonable terms if needed. 

Item 3. 

Legal Proceedings. 

The information set forth under Note 9, “Commitments and Contingencies” to the Consolidated Financial Statements is 

incorporated herein by reference. 

 Item 4.  Mine Safety Disclosures. 

None. 

27 

PART II 

Item 5.  Market  for  Registrant’s  Common  Equity,  Related  Stockholder  Matters  and  Issuer  Purchases  of  Equity 

Securities. 

Our common stock is quoted on the New York Stock Exchange (“NYSE”) under the symbol “ONTO.” Prior to the 2019 
Merger,  Nanometrics’  common  stock  was  quoted  on  the  Nasdaq  Global  Select  Market  under  the  symbol  “NANO”  and 
Rudolph’s common stock was quoted on the NYSE under the symbol “RTEC.” Set forth below is a line graph comparing the 
annual percentage change in the cumulative return to the stockholders of the Company’s common stock with the cumulative 
return of the NYSE Composite Index and the industry specific index, PHLX Semiconductor Index, for the period commencing 
on December 31, 2015 and ending on December 31, 2020.  Historical data for Onto Innovation in the line graph for the period 
commencing  on  December 31,  2015  and  ending  on  October  25, 2019  reflects  the  cumulative  return  to  the  stockholders  of 
Nanometrics.  

The information contained in the performance graph shall not be deemed to be “soliciting material” or to be “filed” with 
the SEC, nor shall such information be incorporated by reference into any future filing under the Securities Act or the Exchange 
Act, except to the extent that the Company specifically incorporates it by reference into such filing. 

The graph assumes that $100 was invested on December 31, 2015 in the Company’s common stock and in each index. 
No cash dividends have been declared or paid on the Company’s common stock. Stockholder returns over the indicated period 
should not be considered indicative of future stockholder returns. 

Onto Innovation Inc. ..................................... 
NYSE Composite.......................................... 
PHLX Semiconductor ................................... 

12/15 
100.00  
100.00  
100.00  

12/16 
165.52  
111.94  
139.32  

12/17 
164.60  
132.90  
195.81  

12/18 
180.52  
121.01  
183.97  

12/19 
241.35  
151.87  
300.35  

12/20 
314.07  
162.49  
461.53  

As of February 4, 2021, there were 123 stockholders of record of our common stock and approximately 20,277 beneficial 

stockholders.  

28 

We have never declared or paid a cash dividend on our common stock and we currently do not intend to. The declaration 
of any future dividends by us is within the discretion of our Board of Directors and will be dependent on our earnings, financial 
condition and capital requirements as well as any other factors deemed relevant by our Board of Directors. 

In November 2020, the Onto Innovation Board of Directors approved a new share repurchase authorization, which allows 
us to repurchase up to $100 million worth of shares of our common stock.  This share repurchase authorization replaces the 
remaining balance of $28 million from the prior share repurchase authorization.  Repurchases may be made through both public 
market and private transactions from time to time.  At December 26, 2020, there was $100 million available for future share 
repurchases. 

For further information, see Note 17 in the accompanying Notes to the Consolidated Financial Statements included in 

this Form 10-K. 

In addition to our share repurchase program, we withhold common stock shares associated with net share settlements to 
cover  tax  withholding  obligations  upon  the  vesting  of  restricted  stock  unit  awards  and  stock  option  exercises  under  the 
Company’s equity incentive program. During the three and twelve months ended December 26, 2020, we withheld 12 thousand 
and 118 thousand shares through net share settlements, respectively.  For the three and twelve month periods ended December 
26, 2020, net share settlements cost $0.5 million and $4.1 million, respectively. Please refer to Note 11 of the Notes to the 
Consolidated Financial Statements included in this Form 10-K for further discussion regarding our equity incentive plan. 

The following table provides details of common stock purchased during the three month period ended December 26, 

2020 (in thousands, except per share data): 

Total Number 
of Shares 
Purchased (1) 

Average 
Price 
Paid per 
Share 

5   $ 
1     $ 
6     $ 
12   $ 

40.21  
37.66  
44.54  
42.22  

Total Number 
of Shares 
Purchased as 
Part of Publicly 
Announced 
Program 

Maximum 
Approximate 
Dollar Value of 
Shares that 
May Yet Be 
Purchased Under 
the Program 

—     $ 
—     $ 
—     $ 
—  

28,000  
100,000  
100,000  

Period 
September 27, 2020 to October 26, 2020.............. 
October 27, 2020 to November 26, 2020 .............. 
November 27, 2020 to December 26, 2020 .......... 
Three Months Ended December 26, 2020 ............ 

1  Includes shares withheld through net share 
settlements. 

Item 6. 

Selected Financial Data. 

Not required. 

29 

Item 7. 

Management’s Discussion and Analysis of Financial Condition and Results of Operations. 

Executive Summary 

We are a worldwide leader in the design, development, manufacture and support of process control tools that perform 
macro-defect inspection and metrology, lithography systems, and process control analytical software used by semiconductor 
and advanced packaging device manufacturers. We deliver comprehensive solutions throughout the semiconductor fabrication 
process with our families of proprietary products that provide critical yield-enhancing information, enabling microelectronic 
device  manufacturers  to  drive  down  costs  and  time  to  market  of  their  devices. We  provide  process  and yield  management 
solutions used in both wafer processing facilities, often referred to as “front-end,” and in device packaging and test facilities, 
commonly  referred  to  as  “back-end”  manufacturing.  Our  advanced  process  control  software  portfolio  includes  powerful 
solutions  for  standalone  tools,  groups  of  tools,  or  factory-wide  suites  to  enhance  productivity  and  achieve  significant  cost 
savings. 

Our  principal  market  is  semiconductors,  primarily  semiconductors  packaged  as  integrated  circuits  within  electronic 
devices, including consumer electronics, server and enterprise systems, mobile computing (including smart phones and tablets), 
data storage devices, and embedded automotive and control systems. Our core focus is the measurement and control of the 
structure, composition, and geometry of the devices as they are fabricated on silicon wafers to improve device performance 
and manufacturing yields. 

Our products and services are used by our customers who manufacture many types of integrated circuits for a multitude 
of  applications,  each  having  unique  manufacturing  challenges.  This  includes  integrated  circuits  to  enable  information 
processing  and  management  (logic  integrated  circuits),  memory  storage  (NAND,  3D-NAND,  NOR,  and  DRAM),  analog 
devices  (Wi-Fi  and  5G  radio  integrated  circuits,  power  devices)  MEMS  sensor  devices  (accelerometers,  pressure  sensors, 
microphones), image sensors, and other end markets including components for hard disk drives, LEDs, and power management. 

The  semiconductor  and  electronics  industries  have  also  been  characterized by  constant  technological  innovation. We 
believe that, over the long term, our customers will continue to invest in advanced technologies and new materials to enable 
smaller design rules and higher density applications that fuel demand for process control equipment. 

During 2020, we completed certain integration activities and launched four new metrology systems into the marketplace. 
These new products were introduced as logic and foundry customers were increasing their capacity while following aggressive 
plans  to  transition  their  manufacturing  to  smaller  nodes.  Customer  interactions  centered  around  satisfying  the  immediate 
demand for logic devices with our existing product portfolio, while partnering with R&D groups to prepare for the process 
controls needed for the next generation of semiconductors that will require the latest systems from us. Our strong engineering 
teams have, and will continue to, deliver new products to our customers, followed by our field engineers providing customer 
support, while simultaneously achieving and surpassing our cost synergy targets that were established at the onset of the 2019 
Merger. 

On February 28, 2020, our Board of Directors determined that it is in the best interests of the Company to change its 
fiscal year end from December 31 to a 52-53 week fiscal year ending on the Saturday closest to December 31. The change is 
intended to align our fiscal periods more closely with industry peers and improve comparability. We made the fiscal year change 
on a prospective basis and have not adjusted operating results for prior periods. The fiscal year of 2020 began on January 1, 
2020 and ended December 26, 2020. 

The following table summarizes certain key financial information for the periods indicated below (in thousands, except 

per share and percent data): 

December 26, 
2020 

Year Ended 
December 31, 
2019(1) 

December 31, 
2018(1) 

 Revenue ....................................................... 
 Gross profit .................................................. 
 Gross profit as a percent of revenue ............ 
 Total operating expenses .............................. 
 Net income ................................................... 
 Diluted earnings per share ........................... 

$ 
$ 

$ 
$ 
$ 

556,496  
278,453  

50 %  

251,776  
31,025  
0.63  

  $ 
  $ 

  $ 
  $ 
  $ 

305,896  
135,028  

44 %  

140,071  
1,910  
0.06  

 $ 
 $ 

 $ 
 $ 
 $ 

273,784  
148,279  

54 % 

97,195  
45,096  
1.74  

(1) On October 25, 2019, the merger of Nanometrics with Rudolph was consummated and resulted in the combined

company, which was renamed Onto Innovation Inc. Rudolph is treated as the accounting acquirer in the 2019 Merger and

30 

therefore the financial results include Rudolph for all periods presented and the financial results of the former 
Nanometrics for the periods on or after October 26, 2019.  

Our  business  is  affected  by  the  annual  spending  patterns  of  our  customers  on  semiconductor  capital  equipment. The 
amount that our customers devote to capital equipment spending depends on a number of factors, including general worldwide 
economic conditions as well  as other economic drivers such as personal computers, mobile devices, data centers, artificial 
intelligence and automotive sales. Current forecasts by industry analysts for the semiconductor device manufacturing industry 
project capital equipment spending to increase approximately 14% to 16% for 2021 as compared to 2020. Our revenue and 
profitability tend to follow the trends of certain segments within the semiconductor market.  

Historically, a significant portion of our revenue in each quarter and year has been derived from sales to relatively few 
customers, and we expect this trend to continue. For the years ended December 26, 2020, December 31, 2019 and December 
31, 2018, aggregate sales to customers that individually represented at least five percent of our revenue accounted for 54.6%, 
42.7%, and 18.3% of our revenue, respectively. 

Our  cash,  cash  equivalents  and  marketable  securities  balance  increased  to  $373.7  million  at  the  end  of  fiscal  2020 
compared to $320.2 million at the end of the fiscal 2019. This increase was primarily the result of $106.0 million of cash 
generated  from  operating  activities.  In  addition,  the  Company  used  approximately  $52.0  million  to  repurchase  1.9  million 
shares of common stock during 2020. 

Results of Operations 

The following table sets forth, for the periods indicated, our results of operations as percentages of our revenue. Our 

results of operations are reported as one business segment. 

Revenue ............................................................................................  
Cost of revenue .................................................................................  
Gross profit ..................................................................................  

100.0 %      
50.0 %      
50.0 %      

100.0 %      
55.9 %      
44.1 %      

100.0 % 
45.8 % 
54.2 % 

Year Ended 
December 26,    
2020 

Year Ended December 31, 
2018 
2019 

Operating expenses: 

Research and development ..........................................................  
Sales and marketing ....................................................................  
General and administrative ..........................................................  
Amortization................................................................................  
Total operating expenses ........................................................  
Operating income (loss) ....................................................................  
Interest income, net ...........................................................................  
Other income (expense), net .............................................................  
Income (loss) before provision (benefit) for income taxes ..........  
Provision (benefit) for income taxes .................................................  
Net income ........................................................................................  

Results of Operations for 2020, 2019 and 2018  

15.2 %      
8.6 %      
11.7 %      
9.7 %      
45.2 %      
4.8 %      
0.5 %      
(0.5 )%     
4.8 %      
(0.7 )%     
5.5 %      

15.8 %      
9.2 %      
17.4 %      
3.4 %      
45.8 %      
(1.7 )%     
1.2 %      
0.3 %      
(0.2 )%     
(0.8 )%     
0.6 %      

14.6 % 
8.0 % 
12.3 % 
0.6 % 
35.5 % 
18.7 % 
0.8 % 
— % 
19.5 % 
3.0 % 
16.5 % 

Revenue. Our revenue is derived from the sale of our systems and software, spare parts, and services. Our revenue was 
$556.5 million, $305.9 million and $273.8 million for the years ended December 26, 2020, December 31, 2019 and December 
31, 2018, respectively. This represents an increase of 81.9% from 2019 to 2020 and an increase of 11.7% from 2018 to 2019. 
The increase in revenue of 81.9% in the fiscal year ended December 26, 2020 compared to the prior year is primarily attributable 
to revenue from the 2019 Merger now including revenue from the legacy Nanometrics business for the full fiscal year and 
increased investments from our foundry and logic customers. The increase in revenue from 2018 to 2019 was primarily due to 
the inclusion of revenue from legacy Nanometrics business for the period from October 25, 2019, the effective date of the 2019 
Merger, through December 31, 2019.   

31 

 
 
  
  
  
  
  
  
  
  
  
  
  
  
    
    
    
      
  
      
  
      
  
    
    
    
    
    
    
    
    
    
    
    
 
The following table lists, for the periods indicated, the different sources of our revenue in dollars (thousands) and as 

percentages of our total revenue:  

Systems and software ..................................................  
Parts .............................................................................  
Services ........................................................................  
Total revenue .....................................................  

Year Ended 
December 26, 
2020 
 $ 450,459  
65,444  
40,593  
 $ 556,496  

Year Ended December 31, 

2019 
80 %   $ 255,723  
34,892  
12 %  
15,281  
8 %  
100 %   $ 305,896  

2018 
84 %   $ 234,241  
28,658  
11 %  
10,885  
5 %  
100 %   $ 273,784  

86 % 
10 % 
4 % 
100 % 

Total systems and software revenue increased $194.7 million for the year ended December 26, 2020 as compared to the 
year ended December 31, 2019 primarily due to the inclusion of revenue from legacy Nanometrics for the period.  The year-
over-year change in systems revenue was primarily due to an increase of $178.6 million of revenue from legacy Nanometrics 
for the period and increased investment from our foundry and logic customers. The year-over-year increase in parts and services 
revenue in absolute dollars from 2019 to 2020 was primarily due to an increase of $54.3 million of parts and service revenue 
from legacy Nanometrics for 2020.  Parts and services revenue is generated from part sales, maintenance service contracts, 
system upgrades, as well as time and material billable service calls. 

Total systems and software revenue increased $21.5 million for the year ended December 31, 2019 as compared to the 
year ended December 31, 2018 primarily due to the inclusion of revenue from legacy Nanometrics for the period from the 
effective date of the 2019 Merger.  The year-over-year change in systems revenue was driven by an increase of $29.9 million 
in process control systems revenue due to inclusion of $56.0 million of revenue from legacy Nanometrics for the period from 
the effective date of the 2019 Merger. This increase was partially offset by decreased demand for our products in both advanced 
packaging and front-end systems.  Software licensing, support and maintenance revenue decreased $4.0 million, primarily due 
to a decrease in revenue from our process control and yield management software. The year-over-year increase in parts and 
services revenue in absolute dollars from 2018 to 2019 was primarily due to the inclusion of $10.3 million of parts and service 
revenue from legacy Nanometrics for the period from the effective date of the 2019 Merger.  Parts and services revenue is 
generated from part sales, maintenance service contracts, system upgrades, as well as time and material billable service calls. 

The following table sets forth, for the periods indicated, our revenue by geographic region as percentages of our revenue. 

Revenue .......................................................................  
China ......................................................................  
Taiwan ....................................................................  
South Korea ............................................................  
United States ..........................................................  
Japan .......................................................................  
Europe ....................................................................  
Southeast Asia ........................................................  
Total revenue .....................................................  

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

  $ 

556,496       $ 

305,896      $ 

273,784  

22 % 
22 % 
16 % 
15 % 
11 % 
9 % 
5 % 
100 % 

26 % 
22 % 
14 % 
15 % 
10 % 
8 % 
5 % 
100 % 

23 % 
17 % 
19 % 
16 % 
8 % 
10 % 
7 % 
100 % 

The overall Asia region continues to account for a majority of our revenues as a substantial amount of the worldwide 

capacity investments for semiconductor manufacturing continue to occur in this region and we expect that trend to continue. 

Gross Profit. Our gross profit has been and will continue to be affected by a variety of factors, including  inventory step-
up from purchase accounting, manufacturing efficiencies, provision for excess and obsolete inventory, pricing by competitors 
or suppliers, new product introductions, production volume, customization and reconfiguration of systems, international and 
domestic sales mix, system and software product mix, and parts and services margins. Our gross profit was $278.5 million, 
$135.0  million  and  $148.3  million  for  the  years  ended  December  26,  2020,  December  31,  2019  and  December  31,  2018, 
respectively.  Our gross profit represented 50.0%, 44.1% and 54.2% for the years ended December 26, 2020, December 31, 
2019 and December 31, 2018, respectively.  The increase in gross profit as a percentage of revenue from 2019 to 2020 was 
primarily due to a favorable impact from higher revenue volume of products and services from the 2019 Merger with inclusion 
of legacy Nanometrics results for the full fiscal year, partially offset by additional charges for excess and obsolete inventory. 
During the fourth quarter of the year ended December 26, 2020, we recognized a write-down of inventory in the amount of 
$8.1 million for our JetStep X300 product line to net realizable value based on future demand and market conditions.  The 
decrease in gross profit as a percentage of revenue from 2018 to 2019 was primarily due to charges to cost of goods sold 

32 

including a $15.4 million charge for the sale of inventory written-up to fair value upon the 2019 Merger and $7.8 million in 
additional charges related to excess and obsolete inventory.   

Operating Expenses. 

Our operating expenses consist of: 
•  Research and Development. We believe that it is critical to continue to make substantial investments in research 
and  development  to  ensure  the  availability  of  innovative  technology  that  meets  the  current  and  projected 
requirements  of  our  customers’  most  advanced  designs.  We  have  maintained  and  intend  to  continue  our 
commitment to investing in research and development in order to continue to offer new products and technologies.  
Accordingly, we devote a significant portion of our technical, management and financial resources to research and 
development programs. Research and development expenditures consist primarily of salaries and related expenses 
of employees engaged in research, design and development activities. They also include consulting fees, the cost 
of  related  supplies  and  legal  costs  to  defend  our  patents.  Our  research  and  development  expenses  were  $84.6 
million, $48.4 million and $40.0 million in fiscal years 2020, 2019 and 2018, respectively.  The year-over-year 
dollar increases from 2018 through 2020 were primarily due to the 2019 Merger where research and development 
expenses for legacy Nanometrics was included for the full 2020 fiscal year and in 2019 included from October 25, 
2019 to December 31, 2019.  We continue to maintain our commitment to investing in new product development 
and enhancement to existing products. 

•  Sales and Marketing. Sales and marketing expenses are primarily comprised of salaries and related costs for sales 
and  marketing  personnel,  as  well  as  commissions  and  other  non-personnel  related  expenses.    Our  sales  and 
marketing  expenses  were  $48.1  million,  $28.3  million  and  $22.0  million  in  fiscal  years  2020,  2019  and  2018, 
respectively.  The year-over-year dollar increases from 2018 through 2020 were primarily due to the 2019 Merger 
where sales and marketing expenses for legacy Nanometrics was included for the full 2020 fiscal year and in 2019 
included from October 25, 2019 to December 31, 2019. 

•  General and Administrative. General and administrative expenses are primarily comprised of salaries and related 
costs  for  general  administrative  personnel,  as  well  as  other  non-personnel  related  expenses.  Our  general  and 
administrative expenses were $65.3 million, $53.0 million and $33.7 million in fiscal years 2020, 2019 and 2018, 
respectively.  The year-over-year dollar increases from 2018 through 2020 were primarily due to the 2019 Merger 
where general and administrative expenses for legacy Nanometrics was included for the full 2020 fiscal year and 
in 2019 included from October 25, 2019 to December 31, 2019.   

•  Amortization of Identifiable Intangible Assets.  Amortization of identifiable intangible assets was $53.7 million, 
$10.4  million  and  $1.5  million  in  fiscal  years  2020,  2019  and  2018,  respectively.    The  year-over-year  dollar 
increases from 2018 through 2020 were primarily due to additional amortization recorded associated with additional 
purchased intangible assets recorded as a result of the 2019 Merger where such amortization expense was included 
for the full 2020 fiscal year and in 2019 included from October 25, 2019 to December 31, 2019.   

Interest income (expense), net.  In fiscal years 2020, 2019 and 2018, net interest income was $2.9 million, $3.7 million 
and $2.2 million, respectively.  The decrease in net interest income from 2019 to 2020 was due to lower interest rates during 
the 2020 period, partially offset by additional interest income on a higher marketable securities balance following the 2019 
Merger.  The increase in net interest income from 2018 to 2019 was due to interest earned on our marketable securities and 
additional interest income on a higher marketable securities balance following the 2019 Merger.   

Income taxes. The following table provides details of income tax (dollars in millions): 

Income (loss) before provision (benefit) for income taxes ........     $ 
Provision (benefit) for income taxes ..........................................     $ 
Effective tax rate ........................................................................      

26.9   
(4.2 ) 

  $ 
  $ 
(15.5 )%     

  $ 
(0.6 ) 
(2.5 ) 
  $ 
(419.9 )%     

53.3   
8.3   
15.5 % 

Year Ended 
December 26, 
2020 

Year Ended December 31, 

2019 

2018 

The income tax provision differs from the federal statutory income tax rate of 21% for 2020 primarily due to a benefit 
related to the Foreign Derived Intangible Income Deduction (“FDII”) of $4.3 million, tax benefits for research and development 
credits of $4.9 million, and a one-time benefit related to the closure of an IRS audit for tax years 2016 through 2018 of $2.9 
million.   These  benefits  were  partially  offset  by  the  inclusion  of  Global  Intangible  Low-Taxed  Income  (“GILTI”)  of  $2.0 
million. 

33 

 
 
  
  
  
  
  
  
  
  
  
  
  
  
  
  
The income tax provision differs from the federal statutory income tax rate of 21% for 2019 primarily due to a benefit 
related to the FDII of $2.3 million and tax benefits for research and development credits of $2.1 million, partially offset by 
non-deductible transaction costs of $1.1 million and Section 162(m) limitation on the deductibility of executive compensation 
of $0.8 million. 

The income tax provision differs from the federal statutory income tax rate of 21% for 2018 primarily due to FDII from 
Public law No. 115-97, known as the Tax Cuts and Jobs Act (the “Tax Act”) of $2.2 million, tax benefits for research and 
development credits of $2.3 million, offset by a Section 162(m) limitation on the deductibility of executive compensation of 
$0.5 million and additional Accounting Standards Codification (“ASC”) 740-10 tax reserves of $0.6 million. 

Our future effective income tax rate depends on various factors, such as future impacts of the Tax Act, possible further 
tax legislation, the geographic composition of our pre-tax income, the amount of our pre-tax income as business activities 
fluctuate,  non-deductible  expenses  incurred  in  connection  with  acquisitions  and  research  and  development  credits  as  a 
percentage of aggregate pre-tax income. 

On March 27, 2020, the “Coronavirus Aid, Relief and Economic Security Act” (the “CARES Act”) was enacted. The 
CARES Act includes provisions relating to refundable payroll tax credits, deferral of the employer portion of certain payroll 
taxes, net operating loss carryback periods, alternative minimum tax credit refunds, modifications to the net interest deduction 
limitations and technical corrections to tax depreciation methods for qualified improvement property.  The Company filed a 
claim for a refund of prior years’ income taxes paid under the provisions of the CARES Act which resulted in a tax benefit of 
$1.1 million as the 2019 net operating loss was carried back to a year with higher tax rates. 

Liquidity and Capital Resources 

At December 26, 2020, we had $373.7 million of cash, cash equivalents and marketable securities and $611.6 million in 
working capital.  At December 31, 2019, our cash, cash equivalents and marketable securities totaled $320.2 million, while 
working capital amounted to $555.9 million. 

Net cash and cash equivalents provided by operating activities for the years ended December 26, 2020, December 31, 

2019 and December 31, 2018 totaled $106.0 million, $18.1 million and $35.1 million, respectively.   

•  Cash provided by operating activities increased in fiscal 2020 compared to fiscal 2019 primarily due to higher net 
income,  adjusted  to  exclude  the  effect  of  non-cash  charges,  of  $81.3  million,  an  increase  in  accrued  and  other 
liabilities of $24.5 million, a decrease in prepaid expenses and other assets of $16.5 million and an increase in 
accounts payable of $23.5 million, partially offset by an increase in inventories of $33.1 million, an increase in 
accounts receivable of $16.1 million and a decrease in income taxes of $8.8 million. 

•  Net cash and cash equivalents provided by operating activities decreased in fiscal 2019 compared to fiscal 2018 
primarily due to lower net income, adjusted to exclude the effect of non-cash charges, of $10.8 million, a decrease 
in accounts payable of $15.7 million, an increase in accounts receivable of $10.4 million and  a decrease in accrued 
and other liabilities of $6.8 million and an increase in prepaid expenses and other assets of $2.0 million, which were 
partially offset by an increase in inventories of $22.2 million and a decrease in income taxes of $6.6 million. 

Net cash and cash equivalents used in investing activities for the year ended December 26, 2020 was $48.6 million. For 
the years ended December 31, 2019 and December 31, 2018, investing activities provided net cash and cash equivalents of $4.1 
million and $33.8 million, respectively.  

•  During the year ended December 26, 2020, net cash used in investing activities included purchases of marketable 
securities, net of proceeds from sales of marketable securities  of $47.6 million and purchases of property, plant 
and equipment of $3.8 million, partially offset by cash received from convertible note receivable of $2.8 million.   
•  During the year ended December 31, 2019, net cash provided by investing activities included cash acquired in the 
2019  Merger  of  $43.9  million,  partially  offset  by  purchases  of  marketable  securities,  net  of  proceeds  from 
marketable securities of $33.0 million and purchases of property, plant and equipment of $6.8 million.   

•  During the year ended December 31, 2018, net cash provided by investing activities included proceeds from sales 
of marketable securities, net of purchases of marketable securities of $46.3 million, partially offset by purchases of 
property, plant and equipment of $7.5 million and cash advanced on a convertible note receivable of $5.0 million.   

Net cash used in financing activities was $53.7 million, $4.2 million and $23.9 million for the years ended December 26, 

2020, December 31, 2019 and December 31, 2018, respectively.   

•  During  the  year  ended  December  26,  2020,  financing  activities  used  cash  to  primarily  purchase  shares  of  our 

common stock under the share repurchase authorization of $52.0 million.   

•  During the year ended December 31, 2019, financing activities used cash to primarily pay taxes related to shares 
withheld for share based compensation plans of $2.5 million and pay contingent consideration for acquired business 

34 

 
 
of $1.8 million.   

•  During  the  year  ended  December  31,  2018,  financing  activities  used  cash  to  primarily  purchase  shares  of  our 
common stock under share repurchase authorizations of $21.1 million and pay taxes related to shares withheld for 
share based compensation plans of $1.9 million.   

From time to time, we evaluate whether to acquire new or complementary businesses, products and/or technologies. We 
may fund all of or a portion of the price of these investments or acquisitions in cash, stock, or a combination of cash and stock. 

In  November  2020,  the  Company’s  Board  of  Directors  approved  a  share  repurchase  authorization,  which  allows  the 
Company to repurchase up to $100 million worth of shares of its common stock.  This share repurchase authorization replaces 
the remaining balance of $28 million from the prior share repurchase authorization.  Repurchases may be made through both 
public market and private transactions from time to time. At December 26, 2020, there was $100 million available for future 
share repurchases.   

 For further information regarding our share repurchases, see Note 17 in the accompanying Notes to the Consolidated 

Financial Statements included in this Form 10-K. 

We have a credit agreement with a bank that provides for a line of credit that is secured by the marketable securities we 
have with the bank.  We are permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit 
is accessed.  As of December 26, 2020, the available line of credit was approximately $78.4 million with an available interest 
rate of 1.8%.  The credit agreement is available to us until such time that either party terminates the arrangement at its discretion.   
To date, we have not utilized the line of credit. 

Our future capital requirements will depend on many factors, including the timing and amount of our revenue and our 
investment decisions, which will affect our ability to generate additional cash. In addition, although the ultimate impact of the  
COVID-19 pandemic on our future results remains uncertain, we believe our business model and our current cash reserves 
leave us well-positioned to manage our business through this crisis as it continues to unfold. We expect that our existing cash, 
cash equivalents, marketable securities and availability under our line of credit will be sufficient to meet our anticipated cash 
requirements for working capital, capital expenditures and other cash needs for the next 12 months following the filing of this 
Form 10-K. Thereafter, if cash generated from operations and financing activities is insufficient to satisfy our working capital 
requirements, we may seek additional funding through bank borrowings, sales of securities or other means. Market conditions 
due to the COVID-19 pandemic may have an impact on our ability to access such additional funding. Our borrowing capacity 
under our existing line of credit is tied to the value of eligible securities held at the time of borrowing, which may be negatively 
impacted by market conditions due to COVID-19 and government responses thereto. In addition, a reduction in or volatility 
with respect to our stock price or a general market downturn could materially impact our ability to sell securities on favorable 
terms or at all. There can be no assurance that we will be able to raise any such capital on terms acceptable to us or at all. 

Contractual Obligations 

The  following  table  summarizes  our  significant  contractual  obligations  at  December 26,  2020,  and  the  effect  such 
obligations  are  expected  to  have  on  our  liquidity  and  cash  flows  in  future  periods.  This  table  excludes  the  liability  for 
unrecognized tax benefits that totaled approximately $8.9 million at December 26, 2020. We are currently unable to provide a 
reasonably reliable estimate of the amount or periods when cash settlement of this liability may occur (dollars in thousands). 

Operating lease obligations ..........................................  
Open and committed purchase orders ..........................  
Total ........................................................................  

  $  24,242     $ 
     137,819        136,526       
  $  162,061     $  141,711     $ 

5,185     $  10,850     $ 
273        
11,123     $ 

4,832     $ 
—        
4,832     $ 

3,375   
1,020   
4,395   

Less than 1 
year 

Payments due by period 
1-3 
years 

3-5 
years 

Total 

More than 
5 years 

Off-Balance Sheet Arrangements 

The Company does not have any off balance sheet arrangements that have or are reasonably likely to have a material 
current or future effect on our financial condition, changes in financial condition, revenues or expenses, results of operations, 
liquidity, capital expenditures or capital resources. 

Critical Accounting Policies 

Management’s  discussion  and  analysis  of  our  financial  condition  and  results  of  operations  are  based  upon  our 
Consolidated  Financial  Statements  included  in  this  Form  10-K,  which  have  been  prepared  in  accordance  with  accounting 
principles generally accepted in the United States. We review the accounting policies we use in reporting our financial results 

35 

 
 
  
  
  
  
  
  
     
     
     
     
  
on a regular basis. The preparation of these financial statements requires us to make estimates and judgments that affect the 
reported amounts of assets, liabilities, revenue and expenses and related disclosure of contingent assets and liabilities. On an 
ongoing  basis,  we  evaluate  our  estimates,  including  those  related  to  revenue  recognition,  accounts  receivable,  inventories, 
business acquisitions, intangible assets, share-based payments, income taxes and warranty obligations. We base our estimates 
on historical experience and on various other assumptions that are believed to be reasonable under the circumstances, the results 
of which form the basis for making judgments about the carrying value of assets and liabilities that are not readily apparent 
from other sources. Results may differ from these estimates due to actual outcomes being different from those on which we 
based our assumptions. These estimates and judgments are regularly reviewed by management on an ongoing basis at the end 
of each quarter prior to the public release of our financial results. We believe the following critical accounting policies affect 
our more significant judgments and estimates used in the preparation of our Consolidated Financial Statements. 

Revenue  Recognition.  Revenue  is  recognized  when  control  of  the  promised  goods  or  services  are  transferred  to  our 
customers  in  an  amount  that  reflects  the  consideration  we  expect  to  be  entitled  to  receive  in  exchange  for  those  goods  or 
services. We  account  for  a  contract  when  it  has  approval  and  commitment  from  both  parties,  the  rights  of  the  parties  and 
payment terms are identified, the contract has commercial substance and collectability of consideration is probable. 

We account for shipping and handling activities as the fulfillment of a promise to transfer goods to the customer and 
therefore record these activities under the caption “Cost of revenue.” Sales tax and any other taxes collected concurrent with 
revenue producing activities are excluded from revenue. Incidental items that are immaterial in the context of the contract are 
recognized as expense. 

Contracts with customers may include multiple performance obligations. For such arrangements, we allocate revenue to 
each performance obligation based on its relative standalone selling price. We generally determine standalone selling prices 
based on the prices charged to customers or the expected cost-plus margin. 

Revenue from systems is recognized when we transfer control of the product to our customer. To indicate transfer of 
control, we must have a present right to payment, legal title must have passed to the customer and the customer must have the 
significant risks and rewards of ownership. We generally transfer control for system sales when the customer or the customer’s 
agent picks up the system at our facility. We provide an assurance warranty on our systems for a period of twelve to fourteen 
months  against  defects  in  material  and  workmanship. We  provide  for  the  estimated  cost  of  product  warranties  at  the  time 
revenue is recognized. 

Depending on the terms of the systems arrangement, we may also defer the recognition of a portion of the consideration 
expected to be received because we have to satisfy a future obligation (e.g., installation, training and extended warranties). We 
use an observable price to determine the standalone selling price for separate performance obligations or a cost-plus margin 
approach when one is not available. 

Revenue from software licenses is recognized upfront at the point in time when the software is made available to the 
customer. Software licenses provide the customer with limited rights to use the software. Revenue from licensing support and 
maintenance is recognized as the support and maintenance are provided, which is over the contract period. 

Revenue from parts is recognized when we transfer control of the product, which typically occurs when we ship the 

product from our facilities to the customer. 

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
our assurance warranty on our products, service labor, consulting and training. Revenue from service contracts is recognized 
ratably over the term of the service contract. Revenue from service labor, consulting and training is recognized as services are 
performed. 

We record contract liabilities when the customer has been billed in advance of completing our performance obligations. 

These amounts are recorded as deferred revenue in the Consolidated Balance Sheets. 

Business  combinations.  We  account  for  business  combinations  under  the  acquisition  method  of  accounting,  which 
requires us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date fair 
values. While we use our best estimates and assumptions to accurately value assets acquired and liabilities assumed at the 
acquisition date as well as contingent consideration, where applicable, our estimates are inherently uncertain and subject to 
refinement. As a result, during the measurement period, which may be up to one year from the acquisition date, we record 
adjustments to the assets acquired and liabilities assumed with the corresponding offset to goodwill. Upon the conclusion of 
the measurement period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, 
any subsequent adjustments are recognized in our consolidated statements of operations. Accounting for business combinations 
requires  our  management  to  make  significant  estimates  and  assumptions,  especially  at  the  acquisition  date  including  our 
estimates  for  intangible  assets,  contractual  obligations  assumed,  restructuring  liabilities,  pre-acquisition  contingencies,  and 
contingent consideration, where applicable. Although we believe the assumptions and estimates we have made in the past have 

36 

been  reasonable  and  appropriate,  they  are  based,  in  part,  on  historical  experience  and  information  obtained  from  the 
management of the acquired companies and are inherently uncertain. Estimates in valuing certain acquired intangible assets 
under the income approach include growth in future expected cash flows from product sales, acquired technologies, technology 
obsolescence  rates,  estimated  cash  flows  from  the  projects  when  completed  and  discount  rates.  Unanticipated  events  and 
circumstances may occur that may affect the accuracy or validity of such assumptions, estimates or actual results. 

Excess and Obsolete Inventory. Inventories are stated at the lower of cost or net realizable value.  Net realizable value is 
the estimated selling prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  
Cost is generally determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. We 
review and set standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to 
approximate actual costs. We maintain reserves for our excess and obsolete inventory equal to the difference between the cost 
of  inventory  and  the  estimated  market  value  based  upon  assumptions  about  future product  lifecycles,  product  demand  and 
market conditions. If actual product lifecycles, product demand and market conditions are less favorable than those originally 
projected by management, additional inventory write-downs may be required. 

Goodwill and Indefinite Lived Intangible Assets.  Goodwill is tested for impairment during the fourth quarter, or whenever 
events or circumstances indicate that its carrying value may not be recoverable. Goodwill impairment is tested at the reporting 
unit level, which is defined as an operating segment or one level below the operating segment.  The Company has one operating 
segment. Goodwill is reviewed for impairment using either a qualitative assessment or a quantitative goodwill impairment test. 
If the Company chooses to perform a qualitative assessment and determine the fair value more likely than not exceeds the 
carrying value, no further evaluation is necessary. When the Company performs the quantitative goodwill impairment test, it 
compares  fair  value  to  carrying  value,  which  includes  goodwill.  If  fair  value  exceeds  carrying  value,  the  goodwill  is  not 
considered impaired. If the carrying value is higher than the fair value, the difference would be recognized as an impairment 
loss. 

Intangible  assets  with  indefinite  lives,  including  in-process  research  and  development  (“IPR&D”),  are  tested  for 
impairment if impairment indicators arise and, at a minimum, annually. However, the Company is permitted to first assess 
qualitative  factors  to  determine  if  a  quantitative  impairment  test  is  necessary.  Further  testing  is  only  required  if  the  entity 
determines, based on the qualitative assessment, that it is more likely than not that an indefinite-lived intangible asset’s fair 
value is less than its carrying amount. Otherwise, no further impairment testing is required. The indefinite-lived intangible asset 
impairment test consists of a one-step analysis that compares the fair value of the intangible asset with its carrying amount. If 
the carrying amount of an intangible asset exceeds its fair value, an impairment loss is recognized in an amount equal to that 
excess.  We  consider  many  factors  in  evaluating  whether  the  value  of  intangible  assets  with  indefinite  lives  may  not  be 
recoverable,  including,  but  not  limited  to  estimates  of  future  cash  flows,  the  discount  rate,  terminal  growth  rates,  general 
economic conditions, our outlook and market performance of our industry and recent and forecasted financial performance. 

There was no impairment of goodwill or IPR&D for the years presented. 

Long-Lived Assets  and  Finite-Lived Acquired  Intangible Assets. We  periodically  review  long-lived  assets,  other  than 
goodwill, for impairment whenever changes in events or circumstances indicate that the carrying amount of an asset may not 
be  recoverable. Assumptions  and  estimates  used  in  the  determination  of  impairment  losses,  such  as  future  cash  flows  and 
disposition costs, may affect the carrying value of long-lived assets and the impairment of such long-lived assets, if any, could 
have a material effect on our consolidated financial statements.  During the year ended December 31, 2019, we recognized a 
$0.5 million impairment loss on long-lived assets.  No such indicators were noted in 2020 or 2018. 

Accounting for Income Taxes. As part of the process of preparing our consolidated financial statements, we are required 
to estimate our actual current tax exposure together with our temporary differences resulting from differing treatment of items 
for tax and accounting purposes. These temporary differences result in deferred tax assets and liabilities, which are included 
within our consolidated balance sheet. We must then assess the likelihood that our deferred tax assets will be recovered from 
future  taxable  income  and  to  the  extent  we  believe  that  recovery  is  not  likely,  we  must  establish  a  valuation  allowance. 
Management judgment is required in determining our provision for income taxes and any valuation allowance recorded against 
our deferred tax assets. The need for a valuation allowance is based on our estimates of taxable income by jurisdiction in which 
we operate and the period over which our deferred taxes will be recoverable. In the event that actual results differ from these 
estimates or we adjust these estimates in future periods, we may need to adjust the valuation allowance, which could materially 
impact  our  financial  position  and  results  of  operations. At  December 26,  2020  and  December  31,  2019,  we  had  recorded 
valuation allowances of $14.2 million and $14.2 million on certain of our deferred tax assets to reflect the deferred tax assets 
at the net amount that is more likely than not to be realized.  We evaluated the realizability of the deferred tax assets based on 
positive earnings as well as the projected earnings in future years and believe it is more likely than not that the substantial 
majority of our deferred tax asset will be realized in the future years.  We will continue to monitor the realizability of the 
deferred tax assets and evaluate the valuation allowance. 

37 

 
 
We recognize liabilities for uncertain tax positions based on a two-step process. The first step requires us to determine if 
the weight of available evidence indicates that the tax position has met the threshold for recognition; therefore, we must evaluate 
whether it is more likely than not that the position will be sustained on audit, including resolution of any related appeals or 
litigation processes. The second step requires us to measure the tax benefit of the tax position taken, or expected to be taken, 
in an income tax return as the largest amount that is more than 50% likely of being realized when effectively settled. This 
measurement step is inherently difficult and requires subjective estimations of such amounts to determine the probability of 
various possible outcomes. We reevaluate the uncertain tax positions each quarter based on factors including, but not limited 
to, changes in facts or circumstances, changes in tax law, effectively settled issues, and new audit activity. Such a change in 
recognition or measurement could result in the recognition of a tax benefit or an additional charge to the tax provision in the 
period. 

Although we believe the measurement of our liabilities for uncertain tax positions is reasonable, no assurance can be 
given that the final outcome of these matters will not be different than what is reflected in the historical income tax provisions 
and accruals. If additional taxes are assessed as a result of an audit or litigation, it could have a material effect on our income 
tax provision and net income in the period or periods for which that determination is made. 

Item 7A.   Quantitative and Qualitative Disclosures About Market Risk. 

Interest Rate and Credit Market Risk 

We are exposed to changes in interest rates and market liquidity including our investments in certain available-for-sale 
securities. Our available-for-sale securities consist of fixed and variable rate income investments, such as municipal notes, 
municipal bonds and corporate bonds. We continually monitor our exposure to changes in interest rates, market liquidity and 
credit ratings of issuers for our available-for-sale securities. It is possible that we are at risk if interest rates, market liquidity or 
credit ratings of issuers change in an unfavorable direction. The magnitude of any gain or loss will be a function of the difference 
between the fixed or variable rate of the financial instrument and the market rate, and our financial condition and results of 
operations  could  be  materially  affected.  Based  on  a  sensitivity  analysis  performed  on  our  financial  investments  held  as  of 
December 26, 2020, an immediate adverse change of 10% in interest rates (e.g. 1.00% to 1.10%) would result in a decrease of 
$1.5 million in the fair value of our available-for-sale debt securities and would not have a material impact on our consolidated 
financial position, results of operations or cash flows. 

Foreign Currency Risk 

A substantial portion of our systems and software revenues are denominated in U.S. dollars.  However, our international 
operations  are  exposed  to  foreign  currency  exchange  rate  fluctuations  arising  from  U.S.  dollar  denominated  intercompany 
balances between our U.S. headquarters and that of our foreign owned entities. Since each foreign entity’s functional currency 
is generally denominated in its local currency, there is exposure to foreign exchange risk when the foreign entity’s intercompany 
balance is remeasured at a reporting date, resulting in transaction gains or losses. The intercompany balance, exposed to foreign 
currency risk, as of December 26, 2020 was approximately $29.6 million. A hypothetical change of 10% in the relative value 
of the U.S. dollar versus local functional currencies could result in approximately $0.5 million in foreign currency exchange 
losses / (gains). 

We enter into foreign currency forward contracts to minimize the short-term impact of exchange rate fluctuations on 
certain  foreign  currency  denominated  monetary  assets  and  liabilities,  primarily  cash  and  intercompany  receivables  and 
payables. In addition, we hedge certain anticipated foreign currency cash flows, primarily on revenues denominated in Japanese 
yen.  These forward contracts are not designated as accounting hedges, so the change in fair value of the forward exchange 
contracts is recognized under the caption “Other (income) expense” in the Consolidated Statements of Operations for each 
reporting period. As of December 26, 2020, and December 31, 2019, we had eight and seventeen outstanding forward contracts 
with  a  total  notional  contract  value  of  $37.6  million  and  $38.9  million,  respectively.  We  do  not  use  derivative  financial 
instruments for trading or speculative purposes. 

38 

 
 
 
 
 
Item 8.  

Financial Statements and Supplementary Data. 

The consolidated financial statements and related information required by this Item are set forth on the pages indicated 

in Item 15(a) of this Form 10-K. 

Item 9.  

Changes in and Disagreements with Accountants on Accounting and Financial Disclosure. 

None. 

Item 9A.   Controls and Procedures. 

Evaluation of Disclosure Controls and Procedures 

We maintain disclosure controls and procedures that are designed to ensure that information we are required to disclose 
in reports that we file or submit under the Exchange Act is recorded, processed, summarized and reported within the time period 
specified  in  SEC  rules  and  forms.  These  controls  and  procedures  are  also  designed  to  ensure  that  such  information  is 
accumulated and communicated to our management, including our principal executive officer and principal financial officer, 
as appropriate, to allow timely decisions regarding required disclosure. In designing and evaluating disclosure controls and 
procedures, we have recognized that any controls and procedures, no matter how well designed and operated, can provide only 
reasonable assurance of achieving the desired control objectives. Management is required to apply judgment in evaluating its 
controls and procedures. 

We performed an evaluation under the supervision and with the participation of our management, including our principal 
executive officer and principal financial officer, to assess the effectiveness of the design and operation of our disclosure controls 
and procedures under the Exchange Act as of December 26, 2020. Based on that evaluation, our management, including our 
principal executive officer and principal financial officer, concluded that our disclosure controls and procedures were effective 
as of December 26, 2020 at the reasonable assurance level. 

Management’s Report on Internal Control Over Financial Reporting 

Our management is responsible for establishing and maintaining adequate internal control over financial reporting, as 
such  term  is  defined  in  Exchange Act  Rules 13a-15(f)  and  15d-15(f).  Internal  control  over  financial  reporting  is  a  process 
designed  to  provide  reasonable  assurance  regarding  the  reliability  of  financial  reporting  and  the  preparation  of  financial 
statements for external purposes in accordance with accounting principles generally accepted in the United States of America. 
Under the supervision and with the participation of our management, including our principal executive officer and principal 
financial officer, we conducted an evaluation of the effectiveness of our internal control over financial reporting based on the 
framework in Internal Control — Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway 
Commission (2013 framework) (“COSO”). Based on our evaluation, our management concluded that our internal control over 
financial reporting was effective as of December 26, 2020. 

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. 
Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may be circumvented or 
deteriorate. 

Attestation Report of the Registered Public Accounting Firm 

Our consolidated financial statements as of and for the year ended December 26, 2020 have been audited by Ernst & 
Young  LLP,  our  independent  registered  public  accounting  firm,  in  accordance  with  the  standards  of  the  Public  Company 
Accounting Oversight Board (United States). Ernst & Young LLP has also audited our internal control over financial reporting 
as of December 26, 2020, as stated in its attestation report included elsewhere in this Form 10-K. 

Changes in Internal Control over Financial Reporting 

In October 2019, we completed the merger with Nanometrics which operated under its own set of systems and internal 
controls. During the year ended December 26, 2020, we completed the integration of Nanometrics into our financial reporting 
processes and procedures and internal control over financial reporting.  In addition, in January 2020, we implemented a new 
enterprise  resource  planning  (“ERP”)  system  in  our  domestic  legacy  Rudolph  business  to  provide  better  support  for  our 
changing business needs and plans for future growth.  As a result of this implementation, we modified certain existing internal 
controls over financial reporting and implemented certain new controls relating to the ERP system. We will continue to evaluate 
the design and operating effectiveness of our internal controls during subsequent periods. 

39 

 
 
Other than noted above, there have been no additional changes in the Company’s internal control over financial reporting 
(as defined in Rule 13a-15(f) under the Exchange Act) that occurred during the Company’s year ended December 26, 2020 that 
have materially affected, or are reasonably likely to materially affect, its internal control over financial reporting. We have not 
experienced any material impact to our internal controls over financial reporting due to the fact that most of our employees 
responsible for financial reporting are working remotely during the COVID-19 pandemic. We are continually monitoring and 
assessing the impact of the COVID-19 pandemic on our internal controls to minimize the impact to their design and operating 
effectiveness. 

Item 9B.   Other Information. 

None. 

40 

 
 
 
PART III 

Certain information required by Part III is omitted from this Form 10-K because we expect to file a definitive proxy 
statement  within  one  hundred  twenty  (120) days  after  the  end  of  our  fiscal  year  pursuant  to  Regulation 14A  (the  “Proxy 
Statement”) for our Annual Meeting of Stockholders currently scheduled for May 11, 2021, and the information included in 
the Proxy Statement is incorporated herein by reference. 

Item 10.    Directors, Executive Officers and Corporate Governance. 

The information required by this Item with respect to directors and executive officers is included under the headings 
“Proposal One: Election of Directors,” “Executive Officers” and “Corporate Governance Principles and Practices” in the Proxy 
Statement, which is incorporated herein by reference. Information regarding compliance with Section 16 of the Exchange Act 
is incorporated by reference to the information under the heading “Delinquent Section 16(a) Reports” in the Proxy Statement. 

Code of Business Conduct and Ethics. We have adopted a code of business conduct and ethics that applies to our principal 
executive officer, principal financial officer and controller. This code of business conduct and ethics is posted on our internet 
website  address  at  http://investors.ontoinnovation.com.   We  will  post  on  our  website  any  amendment  to  or  waiver  from  a 
provision of our code of business conduct and ethics as may be required, and within the time period specified, by applicable 
SEC rules. 

Item 11. 

 Executive Compensation. 

The  information required  by this  Item  is  included  under  the  headings  “Executive  Compensation,”  “Compensation of 
Directors,”  “Compensation  Committee  Report  on  Executive  Compensation,”  “Stock  Ownership/Retention  Guidelines  for 
Directors” and “Compensation Committee Interlocks and Insider Participation” in the Proxy Statement, which is incorporated 
herein by reference. 

Item 12. 

 Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters. 

The information required by this Item is included under the headings “Security Ownership of Certain Beneficial Owners” 

and “Equity Compensation Plan Information” in the Proxy Statement, which is incorporated herein by reference. 

Item 13. 

 Certain Relationships and Related Transactions, and Director Independence. 

The information required by this Item is included under the headings “Related Persons Transactions Policy” and “Board 

Independence” in the Proxy Statement, which is incorporated herein by reference. 

Item 14. 

 Principal Accountant Fees and Services. 

The  information  required  by  this  Item  is  included  under  the  heading  “Proposal  3:  Ratification  of  Appointment  of 

Independent Registered Public Accounting Firm” in the Proxy Statement, which is incorporated herein by reference. 

41 

 
 
PART IV 

Item 15. 

Exhibits and Financial Statement Schedule. 

(a)

The following documents are filed as part of this Form 10-K:

1.

Financial Statements

The consolidated financial statements and consolidated financial statement information required by
this Item are included on pages F-1 through F-10 of this report. The Reports of Independent Registered Public 
Accounting Firm appear on pages F-2 through F-4 of this report.

2.

Financial Statement Schedule

See Index to financial statements on page F-1 of this report. 

3.

Exhibits

Exhibits are as set forth in the “Exhibit Index”, provided below. Where so indicated, exhibits, which 

were previously filed, are incorporated by reference. 

Exhibit 
No. 
2.1 

3.1 

3.2 

4.1 
4.2 
10.1 

Exhibit Description 

Agreement and Plan of Merger, dated as of 
June 23, 2019, by and among Nanometrics 
Incorporated, Rudolph Technologies, Inc. and 
PV Equipment Inc. 
Amended and Restated Certificate of 
Incorporation of Onto Innovation Inc. 
Amended and Restated Bylaws of Onto 
Innovation Inc. 
Form of Common Stock Certificate 
Description of Securities 
Nanometrics Incorporated Amended and 
Restated 2003 Employee Stock Purchase Plan 

Form 
8-K

File 
Number 
000-13470 

Date of First 
Filing 
June 24, 2019

Exhibit 
No./Appendix 
Reference 
2.1 

8-K

8-K

001-39110  October 28, 2019

001-39110  January 27, 2020

3.2 

3.1 

10-K
10-K
DEF14A 

001-39110  February 25, 2020
001-39110  February 25, 2020
000-13470 

April 4, 2016 

4.1 
4.2 
Appendix 1

10.1.1  Form of Subscription Agreement Under the 

S-8

333-40866 

June 24, 2019

4.1 

Nanometrics Incorporated Amended and 
Restated 2003 Employee Stock Purchase Plan 

10.2*  Nanometrics Incorporated Amended and 

DEF14A 

000-13470 

April 4, 2017 

Appendix B

Restated 2005 Equity Incentive Plan 
10.2.1*  Form of Performance-Based Restricted Stock 

Unit Agreement 

8-K

000-13470  March 24, 2015

10.2.2*  Nanometrics Incorporated Amended and 

10-K

000-13470  March 13, 2008

99.1 

10.8 

Restated 2005 Equity Incentive Plan forms of 
Stock Option and Restricted Stock Unit 
Agreements 

10.3*  Rudolph Technologies, Inc. 2009 Stock Plan 
10.3.1*  Amended form of Employee Restricted Stock 

DEFR14A 
10-Q

000-27965  May 8, 2009 
001-36226  August 3, 2017

Appendix A
10.12 

Unit Purchase Agreement pursuant to the 
Rudolph Technologies, Inc. 2009 Stock Plan 
10.4*  Rudolph Technologies, Inc. 2018 Stock Plan 
10.4.1*  Form of Employee Performance Stock Unit 

Purchase Agreement pursuant to the Rudolph 
Technologies, Inc. 2018 Stock Plan 

8-K
10-Q

001-36226  May 16, 2018
001-36226  August 2, 2018

10.1 
10.1 

42 

Exhibit 
No. 
10.4.2*  Form of Employee Stock Option Agreement 

Exhibit Description 

Form 
10-Q

File 
Number 
001-36226  August 2, 2018

Date of First 
Filing 

Exhibit 
No./Appendix 
Reference 
10.2 

pursuant to the Rudolph Technologies, Inc. 
2018 Stock Plan 

10.5*  Onto Innovation Inc. 2020 Stock Plan and 

8-K

001-39110  May 14, 2020

10.1 

forms of restricted stock units purchase 
agreements, performance stock unit purchase 
agreements and stock option agreements. 

10.6*  Onto Innovation Inc. 2020 Employee Stock 

Purchase Plan 

10.7*  Compensation Arrangements with Named 

Executive Officers 

10.8*  Form of Indemnification Agreement between 
the Nanometrics Incorporated and each of its 
directors and executive officers 
10.9*  Form of Indemnity Agreement 
10.10*  Form of Indemnification Agreement 
10.11*  General Severance Benefits and Change in 

Control Severance Benefits Agreement 
between Kevin Heidrich and Nanometrics 
Incorporated, dated May 19, 2015. 
10.12*  General Severance Benefits and Change in 

Control Severance Benefits Agreement 
between Rollin Kocher and Nanometrics 
Incorporated, dated November 10, 2016. 

10.13*  Management Agreement, dated as of July 24, 
2000 by and between Rudolph Technologies, 
Inc. and Steven R. Roth as restated and 
amended on July 29, 2014. 

S-8

8-K

8-K

8-K
8-K
8-K

333-238492  May 19, 2020

000-13470  March 1, 2018

10.2 

5.02 

000-13470  February 20, 2013

10.1 

June 24, 2019

001-36226 
001-39110  November 6, 2019 
000-13470  May 22, 2015

10.1 
10.1 
10.4 

10-K

000-13470  March 3, 2017

10.22 

10-Q

001-36226  August 6, 2014

10.2 

10.14*  Employment Agreement, dated as of November 

8-K

001-36226  November 9, 2015 

10.1 

9, 2015, by and between Rudolph 
Technologies, Inc. and Michael Plisinski. 

43 

Exhibit No. 

Exhibit Description 

10.15*  Executive Change of Control Agreement, dated 

Form 
10-Q 

File 
Number 
000-27965  November 6, 2009 

Date of First 
Filing 

Exhibit 
No./Appendix 
Reference 
10.3 

S-1 

333-86821  September 9, 1999 

10.1 

― 
― 

― 

― 

― 

― 

― 
― 

― 

― 

― 

― 

― 
― 

― 

― 

― 

― 

10.16 

August 20, 2009, by and between Rudolph 
Technologies, Inc. and Robert A. Koch. 
License Agreement, dated June 28, 1995, 
between Rudolph Technologies Inc. and Brown 
University Research Foundation. 
Subsidiaries. 

21.1+ 
23.1+  Consent of Ernst & Young LLP, Independent 
Registered Public Accounting Firm. 

31.1+  Rule 13a-14(a) Certification of Chief 

Executive Officer of the Registrant pursuant to 
Section 302 of the Sarbanes-Oxley Act of 
2002. 

― 
― 

― 

31.2+  Rule 13a-14(a) Certification of Chief Financial 

― 

Officer of the Registrant pursuant to Section 
302 of the Sarbanes-Oxley Act of 2002. 

32.1+  Certification of the Chief Executive Officer 

― 

pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002. 

32.2+  Certification of the Chief Financial Officer 

― 

pursuant to 18 U.S.C. Section 1350, as adopted 
pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002. 

101.INS  Inline XBRL Instance Document 
101.SCH Inline XBRL Taxonomy Extension Schema Document 
101.CAL Inline XBRL Taxonomy Extension Calculation Linkbase 

Document 

101.DEF Inline XBRL Taxonomy Extension Definition Linkbase 

Document 

101.LAB Inline XBRL Taxonomy Extension Label Linkbase Document 
101.PRE Inline XBRL Taxonomy Extension Presentation Linkbase 

104 

* 
+ 

Document 
Cover Page Interactive Data File (formatted in inline XBRL and 
contained in Exhibit 101) 
Management contract, compensatory plan or arrangement. 
Filed herewith. 

44 

 
 
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
 
 
 
 
 
 
ONTO INNOVATION INC. 

INDEX TO CONSOLIDATED FINANCIAL STATEMENTS AND 
FINANCIAL STATEMENT SCHEDULE 

Consolidated Financial Statements: 

Reports of Independent Registered Public Accounting Firm ............................................................................  

Consolidated Statements of Operations for the years ended December 26, 2020, December 31, 2019 and 
December 31, 2018  ..........................................................................................................................................  

Consolidated Statements of Comprehensive Income for the years ended December 26, 2020, December 31, 
2019 and December 31, 2018 ........................................................................................................................  

Consolidated Balance Sheets as of December 26, 2020 and December 31, 2019 ............................................  

Consolidated Statements of Cash Flows for the years ended December 26, 2020, December 31, 2019 and 
December 31, 2018 ...........................................................................................................................................  

Consolidated Statements of Stockholders’ Equity for the years ended December 26, 2020, December 31, 

2019 and December 31, 2018 ........................................................................................................................  

Notes to the Consolidated Financial Statements ...............................................................................................  

Consolidated Financial Statement Schedule: 

Schedule of Valuation and Qualifying Accounts...............................................................................................  

Page 

F-2 

F-5 

F-6 
F-7 

F-8 

F-9 
F-10 

F-34 

F-1 

 
 
 
 
 
 
 
Report of Independent Registered Public Accounting Firm 

To the Shareholders and the Board of Directors of Onto Innovation Inc. 

Opinion on the Financial Statements 

We have audited the accompanying consolidated balance sheets of Onto Innovation Inc. (the Company) as of December 26, 
2020 and December 31, 2019, the related consolidated statements of operations, comprehensive income, shareholders' equity 
and cash flows for each of the three years in the period ended December 26, 2020, and the related notes and financial statement 
schedule listed in the Index at Item 15(a) (collectively referred to as the “consolidated financial statements”). In our opinion, 
the consolidated financial statements present fairly, in all material respects, the financial position of the Company at December 
26, 2020 and December 31, 2019, and the results of its operations and its cash flows for each of the three years in the period 
ended December 26, 2020, in conformity with U.S. generally accepted accounting principles. 

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB), the Company's internal control over financial reporting as of December 26, 2020, based on criteria established in 
Internal Control-Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission 
(2013 framework), and our report dated February 19, 2021 expressed an unqualified opinion thereon. 

Basis for Opinion 

These financial statements are the responsibility of the Company's management. Our responsibility is to express an opinion on 
the Company’s financial statements based on our audits. We are a public accounting firm registered with the PCAOB and are 
required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable 
rules and regulations of the Securities and Exchange Commission and the PCAOB. 

We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform 
the audit to obtain reasonable assurance about whether the financial statements are free of material misstatement, whether due 
to  error  or  fraud.  Our  audits  included  performing  procedures  to  assess  the  risks  of  material  misstatement  of  the  financial 
statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included 
examining, on a test basis, evidence regarding the amounts and disclosures in the financial statements. Our audits also included 
evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall 
presentation of the financial statements. We believe that our audits provide a reasonable basis for our opinion. 

Critical Audit Matter

The critical audit matter communicated below is a matter arising from the current period audit of the financial statements that 
was communicated or required to be communicated to the audit committee and that: (1) relates to accounts or disclosures that 
are material to the financial statements and (2) involved our especially challenging, subjective or complex judgments. The 
communication of the critical audit matter does not alter in any way our opinion on the consolidated financial statements, taken 
as a whole, and we are not, by communicating the critical audit matter below, providing a separate opinion on the critical audit 
matter or on the accounts or disclosure to which it relates. 

     Excess Inventory Reserve 

Description of the 
Matter 

As  described  in  Note  8  to  the  consolidated  financial  statements,  the  Company  had  net  inventories  of 
$191.2 million as of December 26, 2020, which included materials of $124.9 million, work-in-progress 
of $44.8 million, and finished goods of $21.5 million. The valuation of certain of the Company's inventory 
is subject to risks associated with supply and demand. As described in Note 2 to the consolidated financial 
statements, the Company maintains reserves for excess and obsolete inventory equal to the difference 
between  the  cost  of  inventory  and  its  estimated  net  realizable  value  based  upon  assumptions  about 
historical and future demand for the Company’s products and market conditions. 

Auditing management’s estimate of the excess and obsolete inventory reserve was subjective and required 
significant judgment as the excess and obsolete inventory reserve is sensitive to changes in the Company’s 
operations  and  assumptions  used  to  estimate  the  reserve  including  management’s  assumptions  with 
regards to product life-cycles, product demand and market conditions, which includes historical usage, 
expected  future  usage,  on-hand  quantities  of  individual  materials,  and  anticipated  engineering  design 
changes or advancements. 

F-2

How We Addressed 
the Matter in Our 
Audit 

We obtained an understanding, evaluated the design and tested the operating effectiveness of controls 
over the Company’s excess and obsolete inventory reserve process, including those over the validity and 
reasonableness of the data and assumptions used in estimating the excess and obsolete inventory reserve. 

To  test  the  adequacy  of  the  Company’s  excess  and  obsolete  inventory  reserve,  we  performed  audit 
procedures  that  included,  among  others,  assessing  methodologies  and  assumptions  used,  testing  the 
completeness and accuracy of the underlying data used by management in its analysis including the usage 
of historical materials, considering potential product obsolescence, observing physical inventory on-hand 
and  inspecting  historical  gross  margins  to  assess  whether  any  items  are  being  sold  at  a  loss  or  lower 
margins that may need to be included in the reserve. We assessed the historical accuracy of management’s 
estimated excess and obsolete inventory reserve and performed sensitivity analyses to evaluate changes 
in the estimate that result from changes in the Company’s significant assumptions.  

/s/ Ernst & Young LLP 

We have served as the Company’s auditor since 2008. 

Iselin, New Jersey 
February 19, 2021 

F-3

Report of Independent Registered Public Accounting Firm 

To the Shareholders and the Board of Directors of Onto Innovation Inc. 

Opinion on Internal Control Over Financial Reporting 

We have audited Onto Innovation Inc.’s internal control over financial reporting as of December 26, 2020, based on criteria 
established in Internal Control—Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway 
Commission (2013 framework) (the COSO criteria). In our opinion, Onto Innovation Inc. (the Company) maintained, in all 
material respects, effective internal control over financial reporting as of December 26, 2020, based on the COSO criteria. 

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) 
(PCAOB),  the  consolidated  balance  sheets  of  the  Company  as  of  December 26, 2020  and  December  31,  2019,  the related 
consolidated statements of operations, comprehensive income, stockholders’ equity and cash flows for each of the three years 
in the period ended December 26, 2020, and the related notes and financial statement schedule listed in the Index at Item 15(a) 
and our report dated February 19, 2021 expressed an unqualified opinion thereon. 

Basis for Opinion 

The  Company’s  management  is  responsible  for  maintaining  effective  internal  control  over  financial  reporting  and  for  its 
assessment of the effectiveness of internal control over financial reporting included in the accompanying Management’s Report 
on Internal Control Over Financial Reporting. Our responsibility is to express an opinion on the Company’s internal control 
over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be 
independent  with  respect  to  the  Company  in  accordance  with  the  U.S.  federal  securities  laws  and  the  applicable  rules  and 
regulations of the Securities and Exchange Commission and the PCAOB. 

We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the 
audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all 
material respects. 

Our audit included obtaining an understanding of internal control over financial reporting, assessing the risk that a material 
weakness exists, testing and evaluating the design and operating effectiveness of internal control based on the assessed risk, 
and performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a 
reasonable basis for our opinion. 

Definition and Limitations of Internal Control Over Financial Reporting 

A  company’s  internal  control  over  financial  reporting  is  a  process  designed  to  provide  reasonable  assurance  regarding  the 
reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally 
accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures 
that  (1)  pertain  to  the  maintenance  of  records  that,  in  reasonable  detail,  accurately  and  fairly  reflect  the  transactions  and 
dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit 
preparation  of  financial  statements  in  accordance  with  generally  accepted  accounting  principles,  and  that  receipts  and 
expenditures  of  the  company  are  being  made  only  in  accordance  with  authorizations  of  management  and  directors  of  the 
company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or 
disposition of the company’s assets that could have a material effect on the financial statements. 

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, 
projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate 
because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate. 

/s/ Ernst & Young LLP 

Iselin, New Jersey 
February 19, 2021 

F-4

ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF OPERATIONS 
(In thousands, except per share data) 

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

Revenue ............................................................................................  
Cost of revenue .................................................................................  
Gross profit ..................................................................................  

$ 

556,496   $ 
278,043  
278,453  

305,896   $ 
170,868  
135,028  

273,784  
125,505  
148,279  

Operating expenses: 

Research and development ..........................................................  
Sales and marketing ....................................................................  
General and administrative ..........................................................  
Amortization................................................................................  
Total operating expenses ........................................................  
Operating income (loss) ....................................................................  
Interest income, net ...........................................................................  
Other income (expense), net .............................................................  
Income (loss) before provision (benefit) for income taxes ..........  
Provision (benefit) for income taxes .................................................  
Net income ........................................................................................  
Earnings per share: 

Basic ............................................................................................  
Diluted .........................................................................................  

Weighted average number of shares outstanding: 

84,584  
48,136  
65,310  
53,746  
251,776  
26,677  
2,899  
(2,708 )  
26,868  
(4,157 )  
31,025   $ 

48,358  
28,251  
53,017  
10,445  
140,071  
(5,043 )  
3,666  
780  
(597 )
(2,507 )  
1,910   $ 

0.63   $ 
0.63   $ 

0.06   $ 
0.06   $ 

$ 

$ 
$ 

Basic ............................................................................................  
Diluted .........................................................................................  

49,136  
49,475  

29,729  
30,007  

39,953  
22,010  
33,698  
1,534  
97,195  
51,084  
2,206  
56  
53,346 
8,250 
45,096  

1.77  
1.74  

25,470  
25,895  

The accompanying notes are an integral part of these consolidated financial statements. 

F-5

ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME 
(In thousands) 

Net income ........................................................................................  
Other comprehensive income (loss), net of tax: 

Change in net unrealized gains (losses) on available-for-sale 
marketable securities ...................................................................  
Change in currency translation adjustments ................................  
Total other comprehensive income (loss), net of tax ...................  
Total comprehensive income ............................................................  

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

$ 

31,025   $ 

1,910      $ 

45,096  

123  
5,043  
5,166  
36,191   $ 

(44 )
709  
665  
2,575      $ 

136 
(194 ) 
(58 ) 
45,038  

$ 

The accompanying notes are an integral part of these consolidated financial statements. 

F-6

ONTO INNOVATION INC. 

CONSOLIDATED BALANCE SHEETS 
(In thousands, except per share data) 

Current Assets: 

ASSETS 

Cash and cash equivalents ................................................................................. 
Marketable securities ......................................................................................... 
Accounts receivable, less allowance of $784 in 2020 and $1,247 in 2019........ 
Inventories ......................................................................................................... 
Prepaid expenses and other current assets ......................................................... 
Total current assets ....................................................................................... 
Property, plant and equipment, net ......................................................................... 
Goodwill ................................................................................................................. 
Identifiable intangible assets, net ............................................................................ 
Deferred income taxes ............................................................................................ 
Other assets ............................................................................................................. 
Total assets ................................................................................................... 

LIABILITIES AND STOCKHOLDERS’ EQUITY 

Current liabilities: 

Accounts payable .............................................................................................. 
Accrued liabilities ............................................................................................. 
Deferred revenue ............................................................................................... 
Other current liabilities ...................................................................................... 
Total current liabilities ................................................................................. 
Deferred and other tax liabilities............................................................................. 
Other non-current liabilities .................................................................................... 
Total liabilities ............................................................................................. 

Commitments and contingencies (Note 9) 
Stockholders’ equity: 

December 26, 
2020 

December 31, 
2019 

$ 

$ 

$ 

$ 

$ 

$ 

136,720  
237,002  
149,251  
191,217  
17,471  
731,661  
87,950  
306,632  
318,357  
2,235  
21,337  
1,468,172  

40,183  
37,075  
14,334  
28,499  
120,091  
55,623  
27,712  
203,426  

130,673  
189,563  
123,656  
176,134  
21,638  
641,664  
98,420  
307,148  
371,953  
1,456  
27,939  
1,448,580  

27,738  
26,204  
12,629  
19,172  
85,743  
67,040  
31,771  
184,554  

Preferred stock, $0.001 par value, 3,000 shares authorized, no shares 

 issued and outstanding.................................................................................... 

—  

—  

Common stock, $0.001 par value, 97,000 shares authorized, 48,758 

 and 50,184 issued and outstanding at December 26, 2020 and 
 December 31, 2019, respectively. ................................................................... 
Additional paid-in capital .................................................................................. 
Accumulated other comprehensive income (loss) ............................................. 
Accumulated earnings (deficit) ......................................................................... 
Total stockholders’ equity ............................................................................ 
Total liabilities and stockholders’ equity ...................................................... 

49  
1,233,967  
4,568  
26,162  
1,264,746  
1,468,172  

$ 

50  
1,269,437  
(598 ) 
(4,863 ) 
1,264,026  
1,448,580  

$ 

The accompanying notes are an integral part of these consolidated financial statements. 

F-7

ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF CASH FLOWS 
(In thousands) 

Cash flows from operating activities: 

Net income ..............................................................................................................  

$ 

31,025  

$ 

1,910  

$ 

45,096  

Year Ended 
December 26,  
2020 

Year Ended December 31, 

2019 

2018 

Adjustments to reconcile net income to net cash and cash equivalents provided 
     by operating activities: 

Depreciation ............................................................................................................  
Amortization of intangibles .....................................................................................  
Share-based compensation ......................................................................................  
Acquired inventory step-up amortization ................................................................  
Provision for inventory valuation ............................................................................  
Deferred income taxes ............................................................................................  
Other, net .................................................................................................................  
Change in operating assets and liabilities net of assets acquired and liabilities 
     assumed in merger: 

Accounts receivable ..........................................................................................  
Income taxes ......................................................................................................  
Inventories .........................................................................................................  
Prepaid expenses and other assets .....................................................................  
Accounts payable ..............................................................................................  
Accrued and other liabilities ..............................................................................  
Net cash and cash equivalents provided by operating activities ..................  

Cash flows from investing activities: 

Purchases of marketable securities ..........................................................................  
Proceeds from sales of marketable securities ..........................................................  
Purchases of property, plant and equipment ............................................................  
Cash acquired from merger .....................................................................................  
Cash received from (advanced on) convertible note receivable ..............................  
Net cash and cash equivalents provided by (used in) investing activities ....  

Cash flows from financing activities: 

Purchases of common stock .................................................................................  
Tax payments related to shares withheld for share-based compensation plans ....  
Payment of contingent consideration for acquired business .................................  
Issuance of shares through share-based compensation plans ...............................  
Net cash and cash equivalents used in financing activities ..........................  
Effect of exchange rate changes on cash and cash equivalents .....................................  
Net increase in cash and cash equivalents.....................................................................  
Cash and cash equivalents at beginning of year ............................................................  
Cash and cash equivalents at end of year ......................................................................  
Supplemental disclosure of cash flow information: 

Income taxes paid (received), net ............................................................................  

13,832  
53,746  
17,662  
10,678  
14,703  
(11,631 ) 
4,711  

(25,816 ) 
(1,196 ) 
(42,409 ) 
11,409  
11,403  
17,867  
105,984  

(313,027 ) 
265,409  
(3,829 ) 
—  
2,848  
(48,599 ) 

5,965  
10,445  
10,585  
15,370  
10,841  
(4,116 ) 
2,459  

(9,721 ) 
7,648  
(9,338 ) 
(5,079 ) 
(12,138 ) 
(6,685 ) 
18,146  

(127,462 ) 
94,486  
(6,802 ) 
43,882  
—  
4,104  

(52,000 ) 
(4,052 ) 
(569 )
2,919        

(53,702 ) 
2,364  
6,047  
130,673  
136,720      $ 

(744 )
(2,540 ) 
(1,758 )
844 
(4,198 ) 
233  
18,285  
112,388  
130,673      $ 

4,848  
1,534  
6,062  
—  
3,042  
2,163  
1,558  

706  
1,056  
(31,545 ) 
(3,101 ) 
3,512  
163  
35,094  

(140,018 ) 
186,332  
(7,542 ) 
—  
(5,000 ) 
33,772  

(21,069 )
(1,921 )
(1,543 )
624 
(23,909 )
(339 ) 
44,618  
67,770  
112,388  

6,415      $ 

(3,848 )    $ 

4,301  

$ 

$ 

The accompanying notes are an integral part of these consolidated financial statements. 

F-8

ONTO INNOVATION INC. 

CONSOLIDATED STATEMENTS OF STOCKHOLDERS’ EQUITY 
For the years ended December 26, 2020,  
December 31, 2019 and December 31, 2018 
(In thousands) 

Balance at December 31, 2017 ..................... 
Issuance of shares through share-based 
   compensation plans, net ....................... 
Repurchase of common stock .................. 
Net income .............................................. 
Share-based compensation ...................... 
Share-based compensation plan 
    withholdings ........................................ 
Currency translation ................................ 
Unrealized gain on investments............... 
Balance at December 31, 2018 ..................... 
Effect of merger ....................................... 
Issuance of shares through share-based 
   compensation plans, net ....................... 
Repurchase of common stock .................. 
Net income .............................................. 
Share-based compensation ...................... 
Share-based compensation plan 
    withholdings ........................................ 
Currency translation ................................ 
Unrealized loss on investments ............... 
Balance at December 31, 2019 ..................... 
Issuance of shares through share-based 
   compensation plans, net ....................... 
Repurchase of common stock .................. 
Net income .............................................. 
Share-based compensation ...................... 
Share-based compensation plan 
    withholdings ........................................ 
Other ........................................................ 
Currency translation ................................ 
Unrealized gain on investments............... 
Balance at December 26, 2020 ..................... 

Common Stock 

Shares 
 25,416    $ 

 Amount  

Additional 
Paid-in 
Capital 
32    $  386,196    $ 

Accumulated 
Other 
Comprehensive  
  Income / (Loss)  

Accumulated 
Earnings / 
(Deficit) 

Total 

358  
(853 )
—  
—  

(66 )
—  
—  
 24,855  
 25,060  

377  
(30 )
—  
—  

(78 )
—  
—  
 50,184  

668  
  (1,882 ) 
—  
—  

—  
(1 )
—  
—  

—
—  
—  
31  
19  

—  
—
—  
—  

—
—  
—  
50  

1  
(2 )
—  
—  

624  
(21,068 ) 
—  
6,062  

(1,921 )  
—  
—  
369,893  
890,112  

2,131  
(744 )
—  
10,585  

(2,540 )  
—  
—  
  1,269,437  

2,918  
(51,998 )
—  
17,662  

(1,205 )   $ 

(51,869 )   $  333,154  

—  
—  
—  
—  

—  
(194 )
136       

(1,263 )  
—  

—  
— 
—  
—  

—  
709  
(44 )
(598 )

—  
—  
—  
—  

—  
—  
45,096  
—  

—  
— 
— 
(6,773 ) 
—  

—  
—  
1,910  
—  

624  
(21,069 ) 
45,096  
6,062  

(1,921 ) 
(194 ) 
136  
361,888  
890,131  

2,131  
(744 ) 
1,910  
10,585  

—  
—  
— 

(2,540 ) 
709  
(44 ) 
(4,863 )       1,264,026 

—  
—  
31,025  
—  

2,919  
(52,000 ) 
31,025  
17,662  

(118 )
(94 )
—  
—  
 48,758     $ 

—
—
—  
—  
49    $ 1,233,967    $ 

(4,052 ) 
—  
—  
—  

—  
—  
5,043  
123  
4,568     $ 

—  
—  
—  
—  

(4,052 ) 
—  
5,043  
123  
26,162    $ 1,264,746  

The accompanying notes are an integral part of these consolidated financial statements 

F-9

  
ONTO INNOVATION INC. 

NOTES TO THE CONSOLIDATED FINANCIAL STATEMENTS 
(In thousands, except per share data) 

1.

Organization and Nature of Operations:

Onto  Innovation  Inc.  (“Onto  Innovation”  or  the  “Company”)  is  a  worldwide  leader  in  the  design,  development,
manufacture and support of process control tools that perform macro-defect inspection and metrology, lithography systems, 
and process control analytical software used by semiconductor and advanced packaging device manufacturers. The Company 
delivers comprehensive solutions throughout the semiconductor fabrication process with our families of proprietary products 
that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time 
to market of their devices. The Company provides process and yield management solutions used in both wafer processing 
facilities, often referred to as “front-end,” and in device packaging and test facilities, commonly referred to as “back-end” 
manufacturing. The Company’s advanced process control software portfolio includes powerful solutions for standalone tools, 
groups of tools, or factory-wide suites to enhance productivity and achieve significant cost savings. Onto Innovation’s systems 
are backed by worldwide customer service and applications support. The Company has branch sales and service offices or 
subsidiaries in Korea, Japan, China, Taiwan, Singapore and in several countries in Europe. The Company operates in a single 
reportable segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging 
facilities.  

2.

Summary of Significant Accounting Policies:

Consolidation. The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. 
All intercompany accounts and transactions have been eliminated. 

Fiscal Year.  In the first quarter of 2020, the Company changed its fiscal year end from December 31 to a 52-53 week fiscal 
year ending on the Saturday closest to December 31. The Company made the fiscal year change on a prospective basis and has 
not adjusted operating results for prior periods. The fiscal year of 2020 began on January 1, 2020 and ended December 26, 
2020. Financial statements for 2019 and 2018 continue to be presented on the basis of our previous calendar year end. 

Revenue Recognition. Revenue is recognized when control of the promised goods or services are transferred to the Company’s 
customers in an amount that reflects the consideration the Company expects to be entitled to receive in exchange for those 
goods or services. The Company accounts for a contract when it has approval and commitment from both parties, the rights of 
the  parties  and  payment  terms  are  identified,  the  contract  has  commercial  substance  and  collectability  of  consideration  is 
probable. 

The Company has elected to account for shipping and handling activities as the fulfillment of a promise to transfer goods 
to  the  customer  and  therefore  records  these  activities  under  the  caption  “Cost  of  revenue.”  Sales  tax  and  any  other  taxes 
collected concurrent with revenue producing activities are excluded from revenue. Incidental items that are immaterial in the 
context of the contract are recognized as expense. These accounting policy elections are consistent with the manner in which 
the Company has historically recorded these items. 

Contracts with customers may include multiple performance obligations. For such arrangements, the Company allocates 
revenue  to  each  performance  obligation  based  on  its  relative  standalone  selling  price. The  Company  generally  determines 
standalone selling prices based on the prices charged to customers or the expected cost-plus margin. 

Systems and Software Revenue 

Revenue from systems is recognized when the Company transfers control of the product to the customer. To indicate 
transfer of control, the Company must have a present right to payment, legal title must have passed to the customer and the 
customer must have the significant risks and rewards of ownership. The Company generally transfers control for system sales 
when the customer or the customer’s agent picks up the system at the Company’s facility. The Company provides an assurance 
warranty on its systems for a period of twelve to fourteen months against defects in material and workmanship. The Company 
provides for the estimated cost of product warranties at the time revenue is recognized. 

Depending on the terms of the systems arrangement, the Company may also defer the recognition of a portion of the 
consideration expected to be received because the Company has to satisfy a future obligation (e.g., installation, training and 
extended warranties). The Company uses an observable price to determine the standalone selling price for separate performance 
obligations or a cost-plus margin approach when one is not available. 

F-10

Revenue from software licenses provides the customer with a right to use the software as it exists when made available 
to the customer. Revenue from software licenses are recognized upfront at the point in time when the software is made available 
to the customer. Revenue from licensing support and maintenance is recognized as the support and maintenance are provided, 
which is over the contract period. 

Parts Revenue 

Revenue from parts is recognized when the Company transfers control of the product, which typically occurs when the 

Company ships the product from its facilities to the customer. 

Services Revenue 

Revenue from services primarily consists of service contracts, which provide additional maintenance coverage beyond 
the Company’s assurance warranty on its products, service labor, consulting and training. Revenue from service contracts is 
recognized ratably over the term of the service contract. Revenue from service labor, consulting and training is recognized as 
services are performed. Revenue from installation services is recognized at a point in time when installation is complete.  

Practical Expedients 

The Company generally expenses sales commissions when incurred because the amortization period is one year or less. 

These costs are recorded within selling, general and administrative expenses. 

The Company does not adjust the amount of consideration for the effects of a significant financing component as the 

payment terms are generally one year or less. 

The Company does not disclose the value of remaining performance obligations for contracts with an original expected 
length of one year or less and contracts for which the Company recognizes revenue in the amount to which it has the right to 
invoice. 

For additional information on the Company’s revenue recognition, see Note 10 of Notes to the Consolidated Financial 

Statements. 

Business  Combinations.    The  Company  accounts  for  business  combinations  under  the  acquisition  method  of  accounting, 
which requires us to recognize separately from goodwill the assets acquired, and the liabilities assumed at their acquisition date 
fair  values. While  the  Company  uses  its  best  estimates  and  assumptions  to  accurately  value  assets  acquired  and  liabilities 
assumed at the acquisition date as well as contingent consideration, where applicable, the Company’s estimates are inherently 
uncertain  and  subject  to  refinement. As  a  result,  during  the  measurement  period,  which  may  be  up  to  one  year  from  the 
acquisition date, the Company records adjustments to the assets acquired and liabilities assumed with the corresponding offset 
to goodwill. Upon the conclusion of the measurement period or final determination of the values of assets acquired or liabilities 
assumed,  whichever  comes  first,  any  subsequent  adjustments  are  recognized  in  its  consolidated  statements  of  operations. 
Accounting for business combinations requires the Company’s management to make significant estimates and assumptions, 
especially at the acquisition date including its estimates for intangible assets, contractual obligations assumed, restructuring 
liabilities, pre-acquisition contingencies, and contingent consideration, where applicable. Although the Company believes the 
assumptions and estimates it has made in the past have been reasonable and appropriate, they are based, in part, on historical 
experience and information obtained from the management of the acquired companies and are inherently uncertain. Estimates 
in valuing certain acquired intangible assets under the income approach include growth in future expected cash flows from 
product sales, acquired technologies, technology obsolescence rates, estimated cash flows from the projects when completed 
and  discount  rates.  Unanticipated  events  and  circumstances  may  occur  that  may  affect  the  accuracy  or  validity  of  such 
assumptions, estimates or actual results. 

For additional information on the Company’s business combinations, see Note 3 of Notes to the Consolidated Financial 

Statements. 

Use of Estimates.  The preparation of financial statements in conformity with accounting principles generally accepted in the 
United States of America requires management to make estimates and assumptions that affect the reported amounts of assets 
and  liabilities  and  disclosure  of  contingent  assets  and  liabilities  as  of  the  date  of  the  financial  statements  and  the  reported 
amounts of revenue and expenses during the reporting period. Significant estimates made by management include the allowance 
for credit losses, excess and obsolete inventory, fair value of assets acquired and liabilities assumed in a business combination, 
recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, 

F-11 

 
 
 
recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-
based payments and liabilities for tax uncertainties. Actual results could differ from those estimates. 

These estimates and assumptions are based on historical experience and on various other factors which the Company 
believes to be reasonable under the circumstances. The Company may engage third-party valuation specialists to assist with 
estimates  related  to  the  valuation  of  financial  instruments,  assets  and  stock  awards  associated  with  various  contractual 
arrangements.  Such  estimates  often  require  the  selection  of  appropriate  valuation methodologies  and  significant  judgment. 
Actual results could differ from these estimates under different assumptions or circumstances and such differences could be 
material. 

The Company also assessed the impacts of COVID-19 on the above accounting matters as of December 26, 2020 and 
through the date of this report. While there was not a material impact as of and for the year ended December 26, 2020 and 
through the date of this report, future actual magnitude and duration of COVID-19, as well as other associated factors, could 
result in material negative impacts to the Company’s condensed consolidated financial statements in future reporting periods. 

Cash  and  Cash  Equivalents.  Cash  and  cash  equivalents  include  cash  and  highly  liquid  debt  instruments  with  original 
maturities of three months or less when purchased. 

Marketable Securities. The Company determined that all of its investment securities are to be classified as available-for-sale. 
Available-for-sale debt securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity 
under the caption “Accumulated other comprehensive loss.” Realized gains and losses and, interest and dividends on available-
for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets 
regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio 
to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether 
a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit 
quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated 
recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-
for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on 
marketable securities. 

For additional information on the Company’s marketable securities, see Note 5 of Notes to the Consolidated Financial 

Statements. 

Allowance for Credit Losses.  The Company maintains an allowance for credit losses that is estimated based on a combination 
of factors including write-off history, aging analysis, forecast of future economic conditions and any specific known troubled 
accounts. The  Company  believes  the  allowance  is  adequate  to  cover  expected  losses  on  trade  receivables.    Provisions  for 
expected  credit  losses  are  classified  as  selling,  general  and  administrative  expense  in  the  Consolidated  Statements  of 
Operations. If the financial condition of the Company’s customers were to deteriorate, resulting in an impairment of their ability 
to make payments, including as a result of COVID-19, additional allowances may be required. 

Inventories.  Inventories are stated at the lower of cost or net realizable value.  Net realizable value is the estimated selling 
prices in the ordinary course of business, less predictable costs of completion, disposal and transportation.  Cost is generally 
determined on a first-in, first-out basis, and includes material, labor and manufacturing overhead costs. The Company reviews 
and sets standard costs as needed, but at a minimum, on an annual basis, at current manufacturing costs in order to approximate 
actual costs.  

The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves 
when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions 
about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated 
for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been 
established, it is maintained until the item to which it relates is scrapped or sold. The Company regularly evaluates its ability 
to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted 
sales of usage, product end-of-life dates, estimated current and future market values and new product introductions. When 
recorded, reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual 
demand for the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, 
additional reserves may be required.   

Property,  Plant  and  Equipment.  Property,  plant  and  equipment  are  stated  at  cost.  Depreciation  of  property,  plant  and 
equipment is computed using the straight-line method over the estimated useful lives of the assets, which are five to twenty-

F-12 

 
 
 
two years for buildings, three to ten years for machinery and equipment, three to ten years for furniture and fixtures, three years 
for computer equipment, and three to seven years for software. Leasehold improvements are amortized using the straight-line 
method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are 
expensed as incurred and major renewals and betterments are capitalized. 

Long-Lived Assets and Finite-Lived Acquired Intangible Assets.  Long-lived assets, such as property, plant, and equipment, 
and identifiable acquired intangible assets with finite useful lives, are reviewed for impairment whenever events or changes in 
circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and 
used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to 
be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is 
recognized in the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based 
on discounted cash flows. For the year ended December 31, 2019, there was an impairment to an item in property, plant and 
equipment of $507, which was recorded in general and administrative expenses in the Consolidated Statements of Operations.  
There were no impairments of long-lived assets for the years ended December 26, 2020 and December 31, 2018.   

Goodwill and Indefinite Lived Intangible Assets.  Goodwill and indefinite lived intangible assets are tested for impairment 
on  an  annual  basis  or  when  an  event  or  changes  in  circumstances  indicate  that  its  carrying  value  may not  be  recoverable. 
Goodwill impairment is tested at the reporting unit level, which is defined as an operating segment or one level below the 
operating segment.  The Company has one operating segment. No goodwill impairment occurred in fiscal years 2020, 2019, or 
2018. Goodwill is reviewed for impairment using either a qualitative assessment or a quantitative goodwill impairment test. If 
the Company chooses to perform a qualitative assessment and determine the fair value more likely than not exceeds the carrying 
value, no further evaluation is necessary. When the Company performs the quantitative goodwill impairment test, it compares 
fair  value  to  carrying  value,  which  includes  goodwill.  If  fair  value  exceeds  carrying  value,  the  goodwill  is  not  considered 
impaired. If the carrying value is higher than the fair value, the difference would be recognized as an impairment loss. 

Intangible  assets  with  indefinite  lives,  including  in-process  research  and  development  (“IPR&D”),  are  tested  for 
impairment if impairment indicators arise and, at a minimum, annually. However, the Company is permitted to first assess 
qualitative  factors  to  determine  if  a  quantitative  impairment  test  is  necessary.  Further  testing  is  only  required  if  the  entity 
determines, based on the qualitative assessment, that it is more likely than not that an indefinite-lived intangible asset’s fair 
value is less than its carrying amount. Otherwise, no further impairment testing is required. The indefinite-lived intangible asset 
impairment test consists of a one-step analysis that compares the fair value of the intangible asset with its carrying amount. If 
the carrying amount of an intangible asset exceeds its fair value, an impairment loss is recognized in an amount equal to that 
excess.  We  consider  many  factors  in  evaluating  whether  the  value  of  intangible  assets  with  indefinite  lives  may  not  be 
recoverable,  including,  but  not  limited  to  estimates  of  future  cash  flows,  the  discount  rate,  terminal  growth  rates,  general 
economic conditions, our outlook and market performance of our industry and recent and forecasted financial performance. 

There  was  no  impairment  of  goodwill  or  IPR&D  for  the  years  ended  December  26,  2020,  December  31,  2019  and 

December 31, 2018. 

For  additional  information  on  the  Company’s  goodwill  and  purchased  intangible  assets,  see  Note 6  of  Notes  to  the 

Consolidated Financial Statements. 

Concentration of Credit Risk. Financial instruments, which potentially subject the Company to concentrations of credit risk, 
consist primarily of accounts receivable, cash and cash equivalents and marketable securities.  

The  Company  maintains  cash  and  cash  equivalents  and  marketable  securities  with  higher  credit  quality  issuers  and 
monitors the amount of credit exposure to any one issuer. The Company's investment policy provides guidelines and limits 
regarding  credit  quality,  investment  concentration,  investment  type,  and  maturity  that  the  Company  believes  will  provide 
liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial 
paper, corporate debt securities, asset-backed securities, U.S. Treasury, U.S. Government, and U.S. Agency debt. 

The Company’s accounts receivable result primarily from the sale of semiconductor equipment, related accessories and 
replacement  parts.  The  Company’s  customer  base  is  highly  concentrated  and  historically,  a  relatively  small  number  of 
customers have accounted for a significant portion of its revenues. Write-offs of uncollectible accounts have historically not 
been material. The Company actively monitors its customers' financial strength to reduce the risk of loss, including as a result 
of COVID-19. 

Warranties. The Company generally provides a warranty on its products for a period of twelve to fourteen months against 
defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue 
is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure 

F-13 

 
 
 
rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, 
material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations 
would be  required. The  warranty  accrual  represents  the  best  estimate  of  the  amount  necessary  to  settle  future  and  existing 
claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty 
reserve and adjusts the amounts in accordance with changes in these factors. 

Income Taxes. The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires 
the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized 
in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax 
asset to that portion which more likely than not will be realized. 

For  additional  information  on  the  Company’s  income  taxes,  see  Note 13  of  Notes  to  the  Consolidated  Financial 

Statements. 

Translation of Foreign Currencies.  The Company’s international branches and subsidiaries primarily generate and expend 
cash in their local functional currency. Accordingly, all balance sheet accounts of these local functional currency branches and 
subsidiaries  are  translated  into  U.S.  dollars  at  the  fiscal  period-end  exchange  rate,  and  income  and  expense  accounts  are 
translated into U.S. dollars using average rates in effect for the period. The resulting translation adjustments are recorded as 
cumulative translation adjustments and are recorded directly as a separate component of stockholders’ equity under the caption, 
“Accumulated other comprehensive loss.” The Company had accumulated exchange losses resulting from the translation of 
foreign operation financial statements of $4,479 and $564 as of December 26, 2020 and December 31, 2019, respectively. 

Share-based Compensation. The Company measures the cost of employee services received in exchange for the award of 
equity instruments based on the fair value of the award at the date of grant. Compensation expense is recognized using the 
straight-line attribution method to recognize share-based compensation over the service period of the award, with adjustments 
recorded for forfeitures as they occur.  

For additional information on the Company’s share-based compensation plans, see Note 11 of Notes to the Consolidated 

Financial Statements. 

Research and Development Costs.  Expenditures for research and development are expensed as incurred. 

Derivative Instruments and Hedging Activities. The Company’s policy is to mitigate the effect of exchange rate fluctuations 
on  certain  foreign  currency  denominated  business  exposures. The  Company  has  a  policy  that  allows  the  use  of  derivative 
financial instruments to hedge foreign currency exchange rate fluctuations on forecasted revenue and net monetary assets or 
liabilities denominated in various foreign currencies. The Company carries derivative financial instruments (derivatives) on the 
balance  sheet  at  their  fair  values,  in  either  prepaid  expenses  and  other  current  assets  or  other  current  liabilities  in  the 
Consolidated Balance Sheets. The Company does not use derivatives for trading or speculative purposes. The Company does 
not believe that it is exposed to more than a nominal amount of credit risk in its foreign currency hedges, as counterparties are 
large, global and well-capitalized financial institutions. The Company’s exposures are in liquid currencies (Japanese yen, euros, 
Korean won, Taiwanese dollars, Chinese renminbi, British pound sterling, Singapore dollars and Israeli shekel), so there is 
minimal risk that appropriate derivatives to maintain the Company’s hedging program would not be available in the future. 

To hedge foreign currency risks, the Company uses foreign currency exchange forward contracts, where possible and 
prudent. These hedge contracts are valued using standard valuation formulas with assumptions about future foreign currency 
exchange rates derived from existing exchange rates, interest rates, and other market factors. 

The  dollar  equivalent  of  the  U.S. dollar  forward  contracts  and  related  fair  values  as  of  December  26,  2020  and 

December 31, 2019 were as follows: 

   December 26, 

2020 

December 31, 
2019 

Notional amount ..................................................................................................... 
Fair value of asset (liability) ................................................................................... 

   $ 

37,580      $ 
(36 )      

38,887   
120   

 During the year ended December 26, 2020 and December 31, 2019, the Company recognized a gain of $510 and $343 
on maturities of forward contracts, respectively.  During the year ended December 31, 2018, the Company recorded a loss of 
$81 on maturities of forward contracts.  The aggregate notional amounts of matured contracts were $373,749, $58,522 and 
$8,465 for 2020, 2019 and 2018, respectively. 

F-14 

 
 
 
  
  
  
  
  
  
  
  
  
     
 
Contingencies and  Litigation.  The Company is subject to the possibility of losses from various contingencies, including 
certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the 
likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss 
contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are 
probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate 
of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the 
costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See 
Note 9 of the Notes to the Consolidated Financial Statements, “Commitments and Contingencies” for a detailed description. 

Recent Accounting Pronouncements. 

Recently Adopted 

Effective  January  1,  2020,  the  Company  adopted Accounting  Standards  Update  (“ASU”)  No.  2018-13,  “Fair  Value 
Measurement (Topic 820): Disclosure Framework – Changes to the Disclosure Requirements for Fair Value Measurement.”  
This ASU  is  part  of  the  Financial Accounting  Standard  Board’s  (“FASB”)  larger  disclosure  framework  project  intended  to 
improve the effectiveness of financial statement footnote disclosure.  ASU No. 2018-13 modifies required fair value disclosures 
related primarily to Level 3 investments.  This ASU is effective for annual periods beginning after December 15, 2019 and 
interim  periods  within  those  annual  periods.    The  adoption  of ASU  No.  2018-13  did  not  have  a  material  impact  on  the 
Company’s consolidated financial position, results of operations, and cash flows.  

Effective January 1, 2020, the Company adopted ASU No. 2017-09, “Compensation - Stock Compensation (Topic 718): 
Scope  of  Modification  Accounting.”    This  ASU  amends  the  scope  of  modification  accounting  for  share-based  payment 
arrangements and provides guidance on the types of changes to the terms or conditions of share-based payment awards to which 
an entity would be required to apply modification accounting under Accounting Standards Codification (“ASC”) 718.  The 
ASU is effective for the fiscal years beginning after December 15, 2019 and for interim periods within those fiscal years.  The 
adoption of ASU No. 2017-09 did not have a material impact on the Company’s consolidated financial position, results of 
operations, and cash flows.  

Effective January 1, 2020, the Company adopted ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326): 
Measurement of Credit Losses on Financial Instruments,” which represents a credit loss standard that changes the impairment 
model for most financial assets and certain other financial instruments. Specifically, this guidance requires entities to utilize a 
new “expected loss” model as it relates to trade receivables, notes receivable and other commitments to extend credit held by 
a reporting entity. In addition, entities are required to recognize an allowance for estimated credit losses on available-for-sale 
debt securities, regardless of the length of time that a security has been in an unrealized loss position. This guidance is effective 
for  annual  reporting  periods  beginning  after  December  15,  2019,  including  interim  periods  within  those  annual  reporting 
periods, with early adoption permitted. The adoption of ASU No. 2016-13 did not have a material impact on the Company’s 
consolidated financial position, results of operations, and cash flows. 

Recently Issued 

In December 2019, the FASB issued ASU No. 2019-12, “Income Taxes (Topic 740): Simplifying the Accounting for 
Income Taxes.” This standard simplifies the accounting for income taxes by eliminating certain exceptions to the guidance in 
Topic 740 related to the approach for intraperiod tax allocation, the methodology for calculating income taxes in an interim 
period and the recognition of deferred tax liabilities for outside basis differences. The new guidance also simplifies aspects of 
the accounting for franchise taxes and enacted changes in tax laws or rates and clarifies the accounting for transactions that 
result in a step-up in the tax basis of goodwill and allocating consolidated income taxes to separate financial statements of 
entities not subject to income tax. ASU No. 2019-12 is effective for fiscal years beginning after December 15, 2020, with early 
adoption permitted. Upon adoption, the Company must apply certain aspects of this standard retrospectively for all periods 
presented while other aspects are applied on a modified retrospective basis through a cumulative-effect adjustment to retained 
earnings as of the beginning of the fiscal year of adoption. The Company is currently evaluating the impact of this new standard 
on its consolidated financial position, results of operations, and cash flows.  

Recently issued accounting guidance not discussed above is not applicable or did not have, or is not expected to have, a 

material impact to the Company. 

3. 

Business Combination: 

On October 25, 2019, the Company became Onto Innovation Inc. and accounted for the merger (“2019 Merger”) as a 
reverse acquisition using the acquisition method of accounting in accordance with generally accepted accounting principles 

F-15 

 
 
 
(“GAAP”). GAAP requires that either Nanometrics Incorporated (“Nanometrics”) or Rudolph Technologies, Inc. (“Rudolph”) 
is designated as the acquirer for accounting and financial reporting purposes (“Accounting Acquirer”). Based on the evidence 
available,  Rudolph  was  designated  as  the  Accounting  Acquirer  while  Nanometrics  was  the  acquirer  for  legal  purposes. 
Therefore, Rudolph’s historical results of operations replaced Nanometrics’ historical results of operations for all periods prior 
to the 2019 Merger.  

The aggregate purchase price of $890,131 consisted of 25,060 shares of common stock valued at $884,801 and the fair 
value of assumed Nanometrics equity awards of $5,330.  Under ASC 805, acquisition-related transaction costs (e.g., advisory, 
legal, investment banking and other professional fees) are not included as a component of consideration transferred but are 
accounted for as expenses in the periods in which such costs are incurred. Total transaction costs incurred by the Company 
were  $9,907  during  the  year  ended  December  31,  2019  and  are  included  in  general  and  administrative  expense  in  the 
Consolidated Statements of Operations. 

During the quarter ended December 26, 2020, the Company finalized its fair value determination of the assets acquired 
and the liabilities assumed.  The following table summarizes the final allocation of the total purchase consideration to the fair 
values of the assets acquired and liabilities assumed at the merger date. 

Cash and cash equivalents ..................................................................................................................  
Marketable securities ..........................................................................................................................  
Account receivables ............................................................................................................................  
Inventories ..........................................................................................................................................  
Prepaid expenses and other current assets ..........................................................................................  
Property, plant and equipment ............................................................................................................  
Operating lease right-of-use assets .....................................................................................................  
Identifiable intangible assets ...............................................................................................................  
Deferred income taxes ........................................................................................................................  
Other assets .........................................................................................................................................  
   Total assets acquired ........................................................................................................................  
Accounts payable ................................................................................................................................  
Payroll and related expenses ...............................................................................................................  
Deferred revenue ................................................................................................................................  
Other current liabilities .......................................................................................................................  
Income taxes payable ..........................................................................................................................  
Other non-current liabilities ................................................................................................................  
   Net assets acquired ..........................................................................................................................  
Goodwill .............................................................................................................................................  
Total purchase consideration ......................................................................................................  

$43,882 
94,389 
49,917 
98,478 
6,659 
77,451 
9,658 
374,900 
2,191 
850 
758,375 
(23,361) 
(20,290) 
(5,931) 
(10,679) 
(2,007) 
(90,113) 
605,994 
284,137 
$890,131 

The inventory acquired consisted primarily of work in process, for which fair value was measured based on determining 
its net realizable value as such value represents an exit price in an orderly transaction between market participants, and raw 
materials.  Factors  that  required  judgment  in  determining  the  net  realizable  value  for  the  inventory  included  determining 
estimated selling prices, cost to complete, costs to dispose, operating profit, and discount rates, among others. The Company 
recorded a $26,486 step-up of inventory to its fair value as of the 2019 Merger date. 

The allocation of the intangible assets subject to amortization is as follows: 

Developed technology ...............................................................  
In-process research and development ........................................  
Customer relationships ..............................................................  
Backlog ......................................................................................  
Trademarks and trade names......................................................  
Total intangible assets .............................................................  

Estimated 
Fair Value 

$260,500   
46,600   
53,000   
6,700   
8,100   
$374,900   

Weighted Average 
Useful Life (years) 
6.6 
indefinite 
13.1 
1.1 
7.5 

Acquired intangible assets reported above are being amortized using the straight-line method over their estimated useful 
lives, which approximates the pattern of how the economic life is expected to be used. This includes amounts allocated to 

F-16 

 
 
 
  
  
 
  
  
  
customer  relationships  because  of  anticipated  high  customer  retention  rates  that  are  common  in  the  semiconductor  capital 
equipment industry. 

Developed technology relates to Nanometrics’ product family and was valued using the multi-period excess earnings 
method under the income approach. This method reflects the present value of the projected cash flows that are expected to be 
generated  by  the  developed  technology  less  charges  representing  the  contribution  of  other  assets  to  those  cash  flows. The 
average estimated useful life of developed technologies was determined to be 6.6 years and was based on the technology cycle 
related to each developed technology, as well as the cash flows over the respective forecast period. 

The  fair  value  of  the  in-process  research  and  development  (“IPRD”)  was  determined  using  the  multi-period  excess 
earnings  method  under  the  income  approach.  Such  method  reflects  the  present  value  of  the  projected  cash  flows  that  are 
expected to be generated by the IPRD, less costs to complete the development and charges representing the contribution of 
other assets to those cash flows. The Company has determined that the estimated useful life of the acquired in-process research 
and  development  is  currently  indeterminate;  thus,  it  has  been  categorized  as  indefinite  and  will  be  reviewed  annually  for 
impairment, along with the Company’s other long-lived assets with indefinite lives, unless its estimated useful life is known. 

Customer relationships represent the fair value of future projected revenue that will be derived from sales of products to 
new and existing customers and was valued using the distributor method under the income approach. This method reflects the 
present  value  of projected distributor  margins  to be  derived  from  sales  to  existing  customers  less  charges  representing  the 
contribution of other assets to those cash flows. The estimated useful life of the customer relationships was determined to be 
13.1 years and was based on historical customer turnover rates. 

Order backlog represents the fair value of future projected revenue that will be derived from outstanding orders from 
customers that have not yet been shipped and was valued using the multi-period excess earnings method under the income 
approach, which reflects the present value of such outstanding orders less charges representing the contribution of other assets 
to those cash flows. The estimated useful life of the order backlog was determined to be 1.1 years and was based on historical 
order fulfilment rates. 

Trademarks and trade names relate to the “Nanometrics” trademarks and trade names and were fair valued by applying 
the  relief-from-royalty  method  under  the  income  approach.  This  method  is  based  on  the  application  of  a  royalty  rate  to 
forecasted revenue under the trademarks and trade names. The estimated useful life of the trademarks and trade names was 
determined to be 7.5 years and was based on the expected life of the trademarks and trade names and the cash flows anticipated 
over the forecast period. 

The results of operations of Nanometrics are reported in the Company’s consolidated financial statements from the date 
of the 2019 Merger and included $66,261 of total net sales and an operating loss of $7,065 for the year ended December 31, 
2019. 

Unaudited Pro Forma Financial Information 

The following unaudited pro forma financial information summarizes the combined results of operations of Rudolph and 
Nanometrics, on a pro forma basis, as if the companies had combined at the beginning of fiscal year 2018. The pro forma 
financial  information  is  presented  for  informational  purposes  only  and  may  not  necessarily  reflect  the  actual  results  of 
operations that would have been achieved if the 2019 Merger had taken place on January 1, 2018, nor are they necessarily 
reflective  of  future  results  of operations. The  pro forma  information  for  all  periods  presented  also  includes  adjustments  to 
amortization charges for acquired intangible assets, depreciation charges for stepped-up fair value of acquired fixed assets, 
related tax effects and other adjustments. 

The reported financial information for the year ended December 31, 2019 includes the results of Rudolph for the year 
then-ended and the results of Nanometrics from the merger date through December 31, 2019. The reported financial information 
for the year ended December 31, 2018 is the historical results of Rudolph: 

Net revenue ...................................................  
Net income attributable to Onto Innovation .  

$ 

305,896      $ 
1,910        

525,455      $ 
901        

273,784      $ 
45,096        

598,307   
36,246   

Year Ended 

December 31, 2019 

December 31, 2018 

Reported 

Pro Forma 

Reported 

Pro Forma 

F-17 

 
 
 
 
  
  
  
    
  
  
  
  
    
  
  
  
  
 
 
 
 
4. 

Fair Value Measurements: 

Fair Value of Financial Instruments 

The Company has evaluated the estimated fair value of financial instruments using available market information and 
valuations as provided by third-party sources. The use of different market assumptions and/or estimation methodologies could 
have  a  significant  effect  on  the  estimated  fair  value  amounts.   The  carrying  value  of  cash  and  cash  equivalents,  accounts 
receivable,  accounts  payable  and  accrued  liabilities  approximates  fair  value  because  of  the  short-term  maturity  of  these 
instruments. 

Fair Value Hierarchy 

The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs 
into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 
inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, 
either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs 
are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial 
asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input 
that is significant to the fair value measurement. 

The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 26, 

2020 and December 31, 2019:  

Fair Value Measurements Using 

Quoted Prices in 
Active Markets 
for Identical 
Assets (Level 1)      

Significant 
Other 
Observable 
Inputs (Level 2)      

Significant 
Unobservable 
Inputs (Level 3)   

Carrying 
Value 

December 26, 2020 
Assets: 

Available-for-sale debt securities: 

Municipal notes and bonds ...............................  
Asset-backed securities .....................................  
Certificates of deposit .......................................  
Commercial paper .............................................  
Corporate bonds ................................................  
Total assets ..................................................  

  $  124,640     $ 
11,708       
36,373       
32,699       
31,582       
  $  237,002     $ 

Liabilities: 

Foreign currency forward contracts ........................  
Total liabilities .............................................  

  $ 
  $ 

36     $ 
36     $ 

December 31, 2019 
Assets: 

Available-for-sale debt securities: 

Municipal notes and bonds ...............................  
Asset-backed securities .....................................  
Certificates of deposit .......................................  
Commercial paper .............................................  
Corporate bonds ................................................  
Foreign currency forward contracts ........................  
Total assets ..................................................  

  $ 

81,108     $ 
10,779       
30,507       
30,708       
36,461       
120       
  $  189,683     $ 

Liabilities: 

Contingent consideration – acquisitions .................  
Total liabilities .............................................  

  $ 
  $ 

569     $ 
569     $ 

—     $ 
—       
—       
—       
—       
—     $ 

—     $ 
—     $ 

—     $ 
—       
—       
—       
—       
—       
—     $ 

—     $ 
—     $ 

124,640     $ 
11,708       
36,373       
32,699       
31,582       
237,002     $ 

36     $ 
36     $ 

81,108     $ 
10,779       
30,507       
30,708       
36,461       
120       
189,683     $ 

—   
—   
—   
—   
—   
—   

—   
—   

—   
—   
—   
—   
—   
—   
—   

—     $ 
—     $ 

569   
569   

Available-for-sale  debt  securities  classified  as  Level 2  are  valued  using  observable  inputs  to  quoted  market  prices, 
benchmark  yields,  reported  trades,  broker/dealer  quotes  or  alternative  pricing  sources  with  reasonable  levels  of  price 
transparency.  The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward 

F-18 

 
 
 
  
  
  
  
  
     
    
        
        
        
    
      
        
        
        
  
      
        
        
        
  
    
    
    
    
      
        
        
        
  
    
        
        
        
    
      
        
        
        
  
      
        
        
        
  
    
    
    
    
    
      
        
        
        
  
rates quoted by the banks or foreign currency dealers.  Investment prices are obtained from third party pricing providers, which 
model prices utilizing the above observable inputs, for each asset class. 

Level 3 liabilities consisted of contingent consideration related to an acquisition for which the Company uses a discounted 
cash flow model to value these liabilities.  The Level 3 assumptions used in the discounted cash flow model for the contingent 
consideration included projected revenue, timing of cash flows and estimates of discount rates.   

 See Note 5 for additional discussion regarding the fair value of the Company’s marketable securities. 

5.  Marketable Securities: 

At December 26, 2020 and December 31, 2019, marketable securities are categorized as follows: 

Amortized 
Cost 

Gross 
Unrealized 

Gross 
Unrealized 

Holding Gains      

Holding Losses      

December 26, 20120 
Municipal notes and bonds ..........................................  
Asset-backed securities ................................................  
Certificates of deposit ..................................................  
Commercial paper ........................................................  
Corporate bonds ...........................................................  
Total marketable securities .....................................  

December 31, 2019 
Municipal notes and bonds ..........................................  
Asset-backed securities ................................................  
Certificates of deposit ..................................................  
Commercial paper ........................................................  
Corporate bonds ...........................................................  
Total marketable securities .....................................  

   $ 

   $ 

   $ 

   $ 

124,387      $ 
11,679        
36,349        
32,690        
31,544        
236,649      $ 

80,926      $ 
10,767        
30,500        
30,707        
36,409        
189,309      $ 

257      $ 
29        
24        
12        
50        
372      $ 

188      $ 
12        
7        
1        
52        
260      $ 

4      $ 
—        
—        
3        
12        
19      $ 

6      $ 
—        
—        
—        
—        
6      $ 

Fair 
Value 

124,640   
11,708   
36,373   
32,699   
31,582   
237,002   

81,108   
10,779   
30,507   
30,708   
36,461   
189,563   

The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, 

regardless of the Consolidated Balance Sheet classification, is as follows at December 26, 2020 and December 31, 2019: 

December 26, 2020 

December 31, 2019 

Due within one year .....................................................  
Due after one through five years ..................................  
Due after five through ten years...................................  
Due after ten years .......................................................  
Total marketable securities .....................................  

Amortized 
Cost 
170,099      $ 
66,550        
—        
—        
236,649      $ 

   $ 

   $ 

Fair 
Value 
170,321      $ 
66,681        
—        
—        
237,002      $ 

Amortized 
Cost 
152,649      $ 
36,660        
—        
—        
189,309      $ 

Fair 
Value 
152,852   
36,711   
—   
—   
189,563   

F-19 

 
 
 
  
  
  
     
  
     
         
         
         
    
     
     
     
     
     
         
         
         
    
     
     
     
     
  
  
  
  
     
  
  
  
     
     
     
  
     
     
     
  
The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, 
aggregated by investment instrument and period of time in an unrealized loss position, at December 26, 2020 and December 31, 
2019. 

December 26, 2020 
Municipal notes and bonds ..........................................  
Asset-backed securities ................................................  
Certificates of deposit ..................................................  
Commercial paper ........................................................  
Corporate bonds ...........................................................  
Total marketable securities .....................................  

December 31, 2019 
Municipal notes and bonds ..........................................  
Total marketable securities .....................................  

In Unrealized Loss Position 
For Less Than 12 Months 
Gross 
Unrealized 
Losses 

Fair 
Value 

In Unrealized Loss Position 
For Greater Than 12 Months 

Fair 
Value 

Gross 
Unrealized 
Losses 

   $ 

   $ 

   $ 
   $ 

8,641      $ 
—        
—        
8,862        
14,947        
32,450      $ 

14,166      $ 
14,166      $ 

4      $ 
—        
—        
3        
12        
19      $ 

6      $ 
6      $ 

—      $ 
—        
—        
—        
—        
—      $ 

—      $ 
—      $ 

—   
—   
—   
—   
—   
—   

—   
—   

See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities. 

6.  Goodwill and Purchased Intangible Assets: 

Goodwill and purchased intangible assets with indefinite useful lives are not amortized, but are reviewed for impairment 
annually during the fourth quarter of each fiscal year and whenever events or changes in circumstances indicate that the carrying 
value of an asset may not be recoverable. The process of evaluating the potential impairment of goodwill and intangible assets 
requires  significant  judgment.  The  Company  regularly  monitors  current  business  conditions  and  considers  other  factors 
including, but not limited to, adverse industry or economic trends, restructuring actions and lower projections of profitability 
that may impact future operating results. The Company performed its annual assessment in the fourth quarter of fiscal 2020 
and concluded that no impairment charge was required. 

Goodwill 

The changes in the carrying amount of goodwill are as follows: 

Balance at December 31, 2018 .............................................................................................  
Acquired goodwill (Note 3) ............................................................................................  
Balance at December 31, 2019 .............................................................................................  
Goodwill adjustments (Note 3) .......................................................................................  
Balance at December 26, 2020 .............................................................................................  

   $ 

   $ 

22,495   
284,653   
307,148   
(516 ) 
306,632   

F-20 

 
 
 
  
  
  
    
  
  
  
     
    
     
  
     
         
         
         
    
     
     
     
     
     
         
         
         
    
  
 
  
  
  
  
  
  
  
  
    
  
 
 
 
Purchased Intangible Assets 

Purchased intangible assets as of December 26, 2020 and December 31, 2019 are as follows: 

Gross Carrying 
Amount 

Accumulated 
Amortization 

Net 

December 26, 2020 

Finite-lived intangible assets: 

Developed technology ..........................................................  
Customer and distributor relationships .................................  
Trademarks and trade names ................................................  
Total finite-lived intangible assets...........................................  
In-process research and development .....................................  
Total identifiable intangible assets ..................................  

December 31, 2019 

Finite-lived intangible assets: 

Developed technology ..........................................................  
Customer and distributor relationships .................................  
Trademarks and trade names ................................................  
Total finite-lived intangible assets...........................................  
In-process research and development .....................................  
Total identifiable intangible assets ..................................  

   $ 

   $ 

   $ 

   $ 

326,877      $ 
69,261        
12,461        
408,599        
46,600        
455,199      $ 

110,851      $ 
20,654        
5,337        
136,842        
—        
136,842      $ 

216,026   
48,607   
7,124   
271,757   
46,600   
318,357   

326,726      $ 
69,261        
12,461        
408,448        
46,600        
455,048      $ 

67,861      $ 
11,078        
4,156        
83,095        
—        
83,095      $ 

258,865   
58,183   
8,305   
325,353   
46,600   
371,953   

Intangible asset amortization expense amounted to $53,746, $10,445 and $1,534 for the years ended December 26, 2020, 
December 31,  2019  and  December  31,  2018,  respectively. Assuming  no  change  in  the  gross  carrying  value  of  identifiable 
intangible assets and estimated lives, estimated amortization expenses are $48,024 for 2021, $47,625 for 2022, $47,150 for 
2023, $41,465 for 2024, and $24,915 for 2025. 

7.   Leasing Arrangements: 

The  Company  determines  if  an  arrangement  is  a  lease  at  its  inception.  Operating  lease  arrangements  are  comprised 
primarily of  real  estate  and  equipment  agreements  for  which  the  right-of-use  assets  are included  in  “Other  assets”  and  the 
corresponding lease liabilities, depending on their maturity, are included in “Other current liabilities” or “Other non-current 
liabilities” in the Consolidated Balance Sheets. 

Right-of-use assets represent the right to use an underlying asset for the lease term and lease liabilities represent the 
obligation to make lease payments arising from the lease. Right-of-use assets and lease liabilities are recognized at the lease 
commencement  date  based  on  the  estimated  present  value  of  lease  payments  over  the  lease  term.  The  lease  term  includes 
options to extend the lease when it is reasonably certain that the option will be exercised. Lease agreements frequently require 
the Company to pay real estate taxes, insurance and maintenance costs.  Leases with a term of one year or less are not recorded 
on the Consolidated Balance Sheets and lease expense for these leases is recognized on a straight-line basis over the lease term. 

 The  Company  uses  its  estimated  incremental  borrowing  rate  in  determining  the  present  value  of  lease  payments 
considering  the  term  of  the  lease,  which  is  derived  from  information  available  at  the  lease  commencement  date,  giving 
consideration to publicly available data for instruments with similar characteristics. The Company accounts for the lease and 
non-lease components as a single lease component. 

Lease costs for operating leases were $6,756 and $4,124 for the years ended December 26, 2020 and December 31, 2019, 
respectively. Operating lease costs are generally recognized over the lease term.  The Company elected the practical expedient 
to not provide comparable presentation for periods prior to adoption.  

F-21 

 
 
 
  
  
  
     
     
  
     
         
           
  
     
         
           
  
     
     
     
     
  
       
         
         
  
     
         
           
  
     
         
           
  
     
     
     
     
 
 
 
Details of the Company’s operating leases are as follows: 

Cash Flow Information 
Cash paid for operating lease liabilities .................................................................. 
Right-of-use assets obtained in exchange for operating lease liabilities ................. 

Year Ended 

   December 26, 2020    
  $ 
  $ 

6,700      $ 
725      $ 

   December 31, 2019    
3,872   
2,946   

Operating Lease Information 
Weighted average remaining lease term ................................................................. 
Weighted average discount rate .............................................................................. 

   December 26, 

   December 31, 

2020 

2019 

6.0         
4.7 %      

6.7   
4.5 % 

As of December 26, 2020, there was an insignificant amount of commitments for operating leases that have not yet 
commenced.  The reconciliation of the maturities of operating leases to the lease liabilities recorded on the Consolidated 
Balance Sheet as of December 26, 2020 is as follows: 

Fiscal Year 
2021 .....................................................................................................................................  
2022 ........................................................................................................................ 
2023 ........................................................................................................................ 
2024 ........................................................................................................................ 
2025 ........................................................................................................................ 
Thereafter ................................................................................................................ 
   Total undiscounted operating lease payments ...................................................... 
Less: imputed interest ............................................................................................. 
   Present value of operating lease liabilities ........................................................... 

   $ 

   $ 

5,186   
4,446   
3,460   
2,943   
2,912   
5,295   
24,242   
3,317   
20,925   

8. 

Balance Sheet Components: 

Inventories 

Inventories are comprised of the following: 

Materials ................................................................................................................. 
Work-in-process ...................................................................................................... 
Finished goods ........................................................................................................ 
Total inventories ................................................................................................ 

   $ 

   $ 

124,926      $ 
44,829     
21,462     
191,217      $ 

108,492   
42,694   
24,948   
176,134   

December 26, 
2020 

December 31, 
2019 

Property, Plant and Equipment 

Property, plant and equipment, net, is comprised of the following: 

Land and building ................................................................................................... 
Machinery and equipment ...................................................................................... 
Furniture and fixtures ............................................................................................. 
Computer equipment and software ......................................................................... 
Leasehold improvements ........................................................................................ 

   $ 

Accumulated depreciation ...................................................................................... 
Total property, plant and equipment, net ........................................................... 

   $ 

December 26, 
2020 

December 31, 
2019 

47,544      $ 
52,833     
4,013     
15,549     
12,927     
132,866     
(44,916 )   
87,950      $ 

47,222   
56,504   
3,968   
15,770   
13,069   
136,533   
(38,113 ) 
98,420   

F-22 

 
 
 
 
  
  
  
 
 
 
     
  
  
     
     
     
     
     
     
     
 
  
  
  
  
  
  
  
  
  
  
     
  
     
  
 
  
  
  
  
  
  
  
  
  
  
     
  
     
  
     
  
     
  
  
     
  
     
  
 
  
  
  
  
  
  
  
    
    
Depreciation expense amounted to $13,832, $5,965 and $4,848 for the years ended December 26, 2020, December 31, 

2019 and December 31, 2018, respectively. 

Other assets 

Other assets is comprised of the following: 

Convertible notes receivable, net of allowance of $2,000 at December 31, 2019 .. 
Operating lease right-of-use assets ......................................................................... 
Other ....................................................................................................................... 
Total other assets ............................................................................................... 

   $ 

   $ 

—      $ 

19,669     
1,668     
21,337      $ 

3,000   
23,588   
1,351   
27,939   

December 26, 
2020 

December 31, 
2019 

Accrued liabilities 

Accrued liabilities is comprised of the following: 

Payroll and related expenses ................................................................................... 
Warranty ................................................................................................................. 
Other ....................................................................................................................... 
Total accrued liabilities ..................................................................................... 

   $ 

   $ 

30,270      $ 
6,062     
743     
37,075      $ 

19,365   
6,348   
491   
26,204   

December 26, 
2020 

December 31, 
2019 

Other current liabilities 

Other current liabilities is comprised of the following:  

December 26, 
2020 

December 31, 
2019 

Contingent consideration – acquisitions ................................................................. 
Income tax payable ................................................................................................. 
Current operating lease obligations ........................................................................ 
Customer deposits ................................................................................................... 
Accrued professional fees ....................................................................................... 
Other ....................................................................................................................... 
Total other current liabilities ............................................................................. 

   $ 

   $ 

—      $ 

4,109     
4,470     
15,177     
1,184     
3,559     
28,499      $ 

569   
2,783   
4,906   
1,994   
1,520   
7,400   
19,172   

Other non-current liabilities 

Other non-current liabilities is comprised of the following: 

Unrecognized tax benefits (including interest) ....................................................... 
Non-current operating lease obligations ................................................................. 
Deferred revenue .................................................................................................... 
Other ....................................................................................................................... 
Total non-current liabilities ............................................................................... 

   $ 

   $ 

3,812      $ 
16,455     
1,292     
6,153     
27,712      $ 

6,384   
19,970   
2,464   
2,953   
31,771   

December 26, 
2020 

December 31, 
2019 

9. 

Commitments and Contingencies: 

Factoring 

The Company maintains arrangements under which eligible accounts receivable in Japan are sold without recourse to 
unrelated third-party financial institutions. These receivables were not included in the consolidated balance sheets as the criteria 
for sale treatment had been met. The Company sold $17,703 of receivables during the year ended December 26, 2020. There 
were no material gains or losses on the sale of such receivables. There were no amounts due from such third-party financial 
institutions at December 26, 2020. 

F-23 

 
 
 
 
  
  
  
  
  
  
  
  
  
  
     
  
     
  
 
  
  
  
  
  
  
  
  
  
  
     
  
     
  
 
       
    
    
  
 
  
  
  
  
  
  
  
  
  
  
     
  
     
  
     
  
     
  
     
  
 
  
  
  
  
  
  
  
  
  
  
     
  
     
  
     
  
 
 
 
Intellectual property Indemnification Obligations 

The  Company  has  entered  into  agreements  with  customers  that  include  limited  intellectual  property  indemnification 
obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party 
for certain damages and costs incurred as a result of third-party intellectual property claims arising from these transactions. The 
nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the 
maximum  potential  amount  it  could  be  required  to  pay  to  its  customers.  Historically,  the  Company  has  not  made  any 
indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial 
statements with respect to these indemnification guarantees. 

Warranty Reserves 

The Company generally provides a warranty on its products for a period of 12 to 14 months against defects in material 
and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in 
the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. 
The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. 
Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 14 months prior to the year-
end and warranty accruals are related to sales during the same year. 

Changes in the Company’s warranty reserves are as follows:  

Balance, beginning of the period ......................................................  
Accruals .......................................................................................  
Warranty liability assumed in Merger .........................................  
Usage ...........................................................................................  
Balance, end of the period ................................................................  

   $ 

   $ 

6,348      $ 
7,707        
—        
(7,570 )      
6,485      $ 

2,441   
4,265   
4,227   
(4,585 ) 
6,348   

December 26, 2020 

December 31, 2019 

Year Ended 

Legal Matters 

From  time  to  time,  the  Company  is  subject  to  legal  proceedings  and  claims  in  the  ordinary  course  of  business. The 

following reflects an overview of the material activities with regard to these matters.  

Optical Solutions Inc. v. Nanometrics Incorporated (Case No. 18-cv-00417-BLF): On August 2, 2017, Nanometrics was 
named as defendant in a complaint filed in New Hampshire Superior Court (the “Complaint”). The Complaint, brought by 
Optical  Solutions,  Inc.  (“OSI”),  alleges  claims  arising  from  a  purported  exclusive  purchase  contract  between  OSI  and 
Nanometrics  pertaining  to  certain  products.  On  September 18, 2017,  Nanometrics  removed  the  action  to  the  United  States 
District Court for the District of New Hampshire (the “District of New Hampshire”). On September 25, 2017, Nanometrics 
moved  to  transfer  the  Complaint  to  the  United  States  District  Court  for  the  Northern  District  of  California  (the  “Northern 
District of California”). On December 20, 2017, Nanometrics filed its complaint against OSI in the California Superior Court 
for the County of Santa Clara alleging claims arising from OSI’s breach of certain purchase orders. Nanometrics’ complaint 
was later removed by OSI to the Northern District of California.  On May 29, 2018, the District of New Hampshire issued an 
order granting Nanometrics’ motion to transfer the Complaint to the Northern District of California and denying Nanometrics’ 
motion to dismiss the Complaint without prejudice. On June 14, 2018, the Complaint was consolidated with Nanometrics’ 
complaint against OSI. On August 9, 2018, OSI filed an Amended Complaint.  On September 19, 2018, Nanometrics filed a 
motion to dismiss OSI’s Amended Complaint for failure to state a claim.  Nanometrics’ motion to dismiss was heard on February 
28, 2019.  On March 5, 2019, the Northern District of California granted Nanometrics’ motion to dismiss with leave to amend. 
OSI filed a Second Amended Complaint on March 29, 2019. Nanometrics filed a motion to dismiss OSI’s Second Amended 
Complaint on May 31, 2019. In October 2019, Nanometrics was renamed Onto Innovation Inc. as a result of the 2019 Merger.  
Thereafter, the Company’s second motion to dismiss was heard on November 14, 2019.  On November 26, 2019, the Northern 
District of California granted the Company’s motion to dismiss with leave for OSI to amend the Complaint. OSI filed a Third 
Amended Complaint on January 21, 2020.  On March 2, 2020, the Company filed a motion to dismiss OSI’s Third Amended 
Complaint and a hearing on the motion was held on June 11, 2020.  On June 23, 2020, the Northern District of California 
granted the Company’s motion to dismiss with prejudice with regard to two claims asserted by OSI and dismissed two other 
claims asserted by OSI with leave to amend.  Thereafter, on July 7, 2020, OSI filed a Fourth Amended Complaint.  On August 
14, 2020, the Company filed a motion to dismiss with regard to one of the two remaining claims.  On December 1, 2020, the 
Northern District of California denied this final motion to dismiss and as a result the Company filed its Answer in this matter 
on December 22, 2020.  This matter is currently in discovery which is stipulated to extend to September of 2021.  Trial has 
been set for May 16, 2022.  At this time, the loss contingency in this matter is remote and the Company does not anticipate the 
outcome of the matter to have a material impact on its financial position, results of operations, or cash flows. 

F-24 

 
 
 
  
  
  
  
  
     
  
     
     
     
Royalty Agreements 

Under various licensing agreements, the Company is obligated to pay royalties based on net sales of products sold. There 
are  no  minimum  annual  royalty  payments.  Royalty  expense  amounted  to  $1,329,  $1,429  and  $1,904  for  the  years  ended 
December 26, 2020, December 31, 2019 and December 31, 2018, respectively. 

Open and Committed Purchase Orders 

The Company has open and committed purchase orders of $137,819 as of December 26, 2020. 

Line of Credit 

The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable 
securities the Company has with the bank.  The Company is permitted to borrow up to 70% of the value of eligible securities 
held at the time the line of credit is accessed.  The available line of credit as of December 26, 2020 was approximately $78,366 
with an available interest rate of 1.8%.  The credit agreement is available to the Company until such time that either party 
terminates the arrangement at their discretion.  The Company has not utilized the line of credit to date. 

10.  Revenue 

The following table represents a disaggregation of revenue by timing of revenue: 

Point-in-time .....................................................................................     $ 
Over-time ..........................................................................................       
Total revenue ..........................................................................     $ 

527,677     $ 
28,819       
556,496     $ 

286,130   
19,766   
305,896   

December 26, 2020 

December 31, 2019 

Year Ended 

See  Note  15  of  the  Notes  to  the  Consolidated  Financial  Statements  for  additional  discussion  of  the  Company’s 

disaggregated revenue in detail. 

Contract Liabilities 

The Company records contract liabilities when the customer has been billed in advance of the Company completing its 

performance obligations. These amounts are recorded as deferred revenue in the Consolidated Balance Sheets. 

Changes in deferred revenue were as follows: 

Balance, beginning of the period ......................................................     $ 
Deferred revenue assumed in Merger ..........................................       
Deferral of revenue ......................................................................       
Recognition of deferred revenue .................................................       
Balance, ending of the period ...........................................................     $ 

15,093     $ 
—       
43,398       
(42,864 )     
15,627     $ 

8,080   
5,931   
28,651   
(27,569 ) 
15,093   

December 26, 2020 

December 31, 2019 

Year Ended 

11.  Share-Based Compensation and Employee Benefit Plans: 

Share-Based Compensation Plans 

The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive 
for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth 
of  the  Company. The  Company  settles  restricted  stock  unit  awards  and  stock  option  exercises  with  newly  issued  common 
shares. 

F-25 

 
 
 
 
  
  
  
  
  
     
  
  
  
  
  
  
     
  
 
 
 
 
Onto Innovation Inc. 2020 Stock Plan (the “2020 Plan”). The 2020 Plan provides for the grant of 3,613 stock options 
and other stock awards to employees, directors and consultants at an exercise price equal to the fair market value of the common 
stock on the date of grant. Options granted under the 2020 Plan typically grade vest over a three-year period and expire ten 
years from the date of grant. Restricted stock units granted under the 2020 Plan typically vest over a three-year period for 
employees and one year for directors; however, other vesting periods are allowable under the 2020 Plan. Restricted stock units 
granted to employees have time based or performance based vesting.  As of December 26, 2020, there were 3,555 shares of 
common stock available for issuance pursuant to future grants under the 2020 Plan.  

The following table reflects share-based compensation expense by type of award: 

Share-based compensation expense: 

Restricted stock units, including all performance and market 
    based awards ....................................................................  
Stock options and employee stock purchase options ............  
Total share-based compensation ................................................  
Tax effect on share-based compensation ..............................  
Net effect on net income ............................................................  
Effect on earnings per share: 

Basic .....................................................................................  
Diluted ..................................................................................  

   $ 

   $ 

   $ 
   $ 

Restricted Stock Unit Activity 

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

15,780      $ 
1,882        
17,662        
3,849        
13,813      $ 

10,421      $ 
164        
10,585        
2,283        
8,302      $ 

(0.28 )    $ 
(0.28 )    $ 

(0.28 )    $ 
(0.28 )    $ 

6,062   
—   
6,062   
1,362   
4,700   

(0.18 ) 
(0.18 ) 

A  summary  of  the  Company’s  restricted  stock  unit  activity  with  respect  to  the  years  ended  December  26,  2020, 

December 31, 2019 and December 31, 2018 follows: 

Nonvested at December 31, 2017 ..............................................  
Granted .................................................................................  
Vested ...................................................................................  
Forfeited ...............................................................................  
Nonvested at December 31, 2018 ..............................................  
Granted .................................................................................  
Assumed in Merger ..............................................................  
Vested ...................................................................................  
Forfeited ...............................................................................  
Nonvested at December 31, 2019 ..............................................  
Granted .................................................................................  
Vested ...................................................................................  
Forfeited ...............................................................................  
Nonvested at December 26, 2020 ..............................................  

Number of 
Shares 

Weighted 
Average 
Grant Date 
Fair Value 

816      $ 
228      $ 
(325 )    $ 
(80 )    $ 
639      $ 
271      $ 
598      $ 
(366 )    $ 
(35 )    $ 
1,107      $ 
498      $ 
(498 )    $ 
(143 )    $ 
964      $ 

18.50   
34.80   
17.73   
22.12   
24.26   
29.58   
31.43   
25.69   
26.44   
28.89   
34.71   
29.46   
29.99   
31.37   

 As of December 26, 2020, there was $19,135 of total unrecognized compensation cost related to restricted stock units 

granted under the plans. That cost is expected to be recognized over a weighted average period of 1.7 years. 

F-26 

 
 
 
  
  
  
     
  
  
  
     
    
  
     
         
         
    
     
     
     
     
         
         
    
 
  
  
     
  
     
     
     
     
     
     
     
     
     
     
     
     
     
     
 
 
 
Stock Option Activity 

A summary of the Company’s stock option activity with respect to the years ended December 26, 2020, December 31, 

2019 and December 31, 2018 follows: 

Weighted 
Average 
Exercise 
Price 
Per Share 

Weighted 
Average 
Remaining 
Contractual 
Term (years)     

Aggregate 
Intrinsic Value   

Shares 

Outstanding at December 31, 2017 ..............................  
Granted ...................................................................  
Exercised ................................................................  
Expired ...................................................................  
Forfeited .................................................................  
Outstanding at December 31, 2018 ..............................  
Granted ...................................................................  
Assumed in Merger ................................................  
Exercised ................................................................  
Expired ...................................................................  
Forfeited .................................................................  
Outstanding at December 31, 2019 ..............................  
Granted ...................................................................  
Exercised ................................................................  
Expired ...................................................................  
Forfeited .................................................................  
Outstanding at December 26, 2020 ..............................  
Vested or expected to vest at December 26, 2020 ........  
Exercisable at December 26, 2020 ...............................  

59     $ 
—       
(22 )     
—       
—       
37       
—       
12       
(2 )     
—       
—       
47     $ 
—       
(19 )     
—       
—       
28     $ 
28     $ 
28     $ 

15.20       
—       
15.20       
—       
—       
15.20       
—       
16.27       
14.96       
—       
—       
15.49         
—       
15.84       
—       
—       
15.25       
15.25       
15.25       

1.9     $ 
1.9     $ 
1.9     $ 

915   
915   
915   

The total intrinsic value of the stock options exercised during fiscal years 2020, 2019 and 2018 was $420, $51 and $384, 
respectively.  As of December 26, 2020, there was no unrecognized compensation cost related to stock options granted under 
the plans. 

The options outstanding and exercisable at December 26, 2020 were in the following exercise price ranges: 

Options Outstanding 

Options Exercisable 

Range of Exercise Prices 

Shares 

Weighted 
Average 
Remaining 
Contractual 
Life (years)     

Weighted 
Average 
Exercise Price     

Shares 

                              $15.20 - $18.79 ....................... 

28       

1.9     $ 

15.25       

28     $ 

Weighted 
Average 
Exercise Price   
15.25   

Employee Stock Purchase Plan 

Onto  Innovation  Inc.  2020  Employee  Stock  Purchase  Plan  (the  “2020  ESPP”).    Under the  terms  of  the  2020  ESPP, 
eligible employees may have up to 10% of eligible compensation deducted from their pay and applied to the purchase of shares 
of Company common stock. The price the employee pays for each share of stock is 85% of the lesser of the fair market value 
of Company common stock at the beginning or the end of the applicable six-month purchase period. The 2020 ESPP is intended 
to qualify under Section 423 of the Internal Revenue Code and is a compensatory plan as defined by FASB ASC 718, “Stock 
Compensation.” 

Through the Company’s employee stock purchase plans, employees purchased 91, 72 and 13 shares during the twelve 
months ended December 26, 2020, December 31, 2019 and December 31, 2018, respectively.  As of December 26, 2020 and 
December 31, 2019, there were 1,500 and 236, shares available for issuance under the Company’s employee stock purchase 
plans, respectively. 

F-27 

 
 
 
  
  
    
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
    
    
        
  
    
        
    
    
        
    
    
        
    
    
        
    
    
    
    
  
 
  
  
    
  
  
    
    
    
 
 
 
401(k) Savings Plan 

The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation to 
the Plan on a pre-tax or after-tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue Service. 
The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary.  Matching contributions 
to the plan totaled $2,315, $1,317 and $1,118 for the years ended December 26, 2020, December 31, 2019 and December 31, 
2018, respectively.  

12.  Other Income (Expense), Net: 

Other income (expense), net is comprised of the following: 

Foreign currency exchange gains (losses), net ....................  
Gain on casualty insurance claim .......................................  
Other ...................................................................................  
Total other income (expense), net .................................  

$ 

$ 

(3,070 )    $ 
—        
362        
(2,708 )    $ 

676      $ 
—        
104        
780      $ 

(255 ) 
302   
9   
56   

Year Ended December 26,      

2020 

Year Ended December 31, 
2018 
2019 

13. 

Income Taxes: 

The components of income tax expense are as follows: 

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

Current: 

Federal ...........................................................................  
State ...............................................................................  
Foreign ..........................................................................  

   $ 

Deferred: 

Federal ...........................................................................  
State ...............................................................................  
Foreign ..........................................................................  

Total income tax expense (benefit) ..........................  

   $ 

The income before tax is comprised of the following: 

1,466      $ 
371        
5,637        
7,474        

(10,355 )      
(1,036 )      
(240 )      
(11,631 )      
(4,157 )    $ 

(27 )    $ 
88        
1,548        
1,609        

(4,730 )      
506        
108        
(4,116 )      
(2,507 )    $ 

4,423   
1,038   
626   
6,087   

1,961   
(73 ) 
275   
2,163   
8,250   

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

Domestic operations ...........................................................  
Foreign operations ..............................................................  

   $ 
   $ 

(120 )    $ 
26,988      $ 

(7,087 )    $ 
6,490      $ 

49,089   
4,257   

F-28 

 
 
 
  
  
  
  
  
  
  
  
  
  
  
 
  
  
  
     
  
  
  
     
     
  
     
         
         
    
     
     
  
     
     
         
         
    
     
     
     
  
     
 
  
  
    
  
  
  
     
     
  
 
 
 
The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal 
income tax rate of 21% for the years ended December 26, 2020, December 31, 2019 and December 31, 2018, to income before 
provision for income taxes as follows: 

Year Ended 
December 26,    
2020 

Year Ended December 31, 
2018 
2019 

  $ 

  $ 

Federal income tax provision (benefit) at statutory rate ............  
State taxes, net of federal effect .................................................  
Foreign taxes, net of federal effect.............................................  
Foreign Derived Intangible Income ("FDII") Deduction ...........  
Global Intangible Low-Taxes Income ("GILTI") inclusion .......  
Non-deductible officer's compensation ......................................  
Research & development tax credit ...........................................  
Tax impact of IRS audit closure .................................................  
Impact of the Tax Act .................................................................  
Impact of the CARES Act ..........................................................  
Other ..........................................................................................  
Provision (benefit) for income taxes ....................................  
Effective tax rate ..................................................................  

  $ 

  $ 

Deferred tax assets and liabilities are comprised of the following: 

Deferred Tax Assets: 

Reserves and accruals .............................................................  
Deferred revenue .....................................................................  
Share-based compensation ......................................................  
Tax credit carryforward ...........................................................  
Net operating losses ................................................................  
Depreciation and amortization ................................................  
Operating lease liabilities ........................................................  
Other .......................................................................................  
Gross deferred tax assets .........................................................  
Less: valuation allowance .......................................................  
Total deferred tax assets after valuation allowance .................  

Deferred Tax Liabilities: 

Depreciation and amortization ................................................  
Operating lease right of use assets ..........................................  
Other .......................................................................................  
Gross deferred tax liabilities ...................................................  
Net deferred tax liabilities ..........................................................  

5,642   
126   
596   
(4,262 ) 
2,013   
213   
(4,858 ) 
(2,905 ) 
—   
(1,141 ) 
419   
(4,157 ) 

(125 ) 
113   
(1,277 ) 
(2,278 ) 
1,786   
826   
(2,126 ) 
—   
—   
—   
574   
(2,507 ) 

  $ 
(16 )%     

  $ 
(420 )%     

11,203   
747   
17   
(2,217 ) 
113   
526   
(2,298 ) 
—   
105   
—   
54   
8,250   

15 % 

December 26, 
2020 

December 31, 
2019 

   $ 

   $ 

13,874      $ 
1,648        
2,556        
10,801        
4,849        
687        
4,261        
1,877        
40,553        
(14,238 )      
26,315        

(75,608 )      
(3,960 )      
(135 )      
(79,703 )      
(53,388 )    $ 

8,254   
1,219   
2,955   
11,307   
6,008   
946   
4,965   
772   
36,426   
(14,160 ) 
22,266   

(83,082 ) 
(4,709 ) 
(59 ) 
(87,850 ) 
(65,584 ) 

At December 26, 2020 and December 31, 2019, the Company had recorded valuation allowances of $14,238 and $14,160, 
respectively, on a certain portion of the Company’s deferred tax assets to reflect the deferred tax assets at the net amount that 
is more likely than not to be realized.  The Company maintained a full valuation allowance against its Switzerland and United 
Kingdom deferred tax assets of $2,797 and $467, respectively.  The Company also maintained a valuation allowance against a 
portion of its federal and California deferred tax assets of $3,150 and $7,824, respectively. 

In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined 
that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against 
the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the 
periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of 
deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment.  In 
making  the  determination  that  it  is  more  likely  than  not  that  the  Company’s  deferred  tax  assets  will  be  realized  as  of 

F-29 

 
 
 
  
  
  
  
  
  
  
  
  
  
  
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
 
  
  
  
  
  
  
  
  
  
  
     
         
    
     
     
     
     
     
     
     
     
     
     
     
         
    
     
     
     
     
 
December 26, 2020, the Company relied primarily on the reversal of deferred tax liabilities as well as projected future taxable 
income. 

At December 26, 2020, the Company had federal, state and foreign net operating loss carryforwards of $85, $1,892 and 
$2,873, respectively. The federal, state and foreign net operating loss carryforwards expire on various dates beginning in 2020 
through 2035. 

At  December 26,  2020,  the  Company  had  federal  and  state  research &  development  credits  and  foreign  tax  credit 
carryforwards of $5,731, $10,664 and $3,150, respectively.  The state research & development credits are set to expire at various 
dates beginning in 2039. The foreign tax credit is set to expire at various dates through December 31, 2029. 

As  of  December  26,  2020,  the  Company has  provided  U.S.  income  taxes  on  all  its  foreign  earnings.   The  Company 
continues  to  permanently  reinvest  the  cash  held  offshore  to  support  its  working  capital  needs.   Accordingly,  no  additional 
foreign withholding taxes that may be required from certain jurisdictions in the event of a cash distribution have been provided 
for.   

The total amount of unrecognized tax benefits are as follows: 

Balance, beginning of the period ...............................................  
Gross increases—tax positions in prior period .....................  
Gross decreases—tax positions in prior period ....................  
Gross increases—current-period tax positions .....................  
Closure of audit/statute limitation ........................................  
Balance, end of the period .........................................................  

   December 26, 

December 31, 

2020 

2019 

2018 

   $ 

   $ 

15,143      $ 
347        
—        
1,048        
(3,052 )      
13,486      $ 

5,528      $ 
9,989        
(932 )      
558        
—        
15,143      $ 

4,880   
496   
(61 ) 
213   
—   
5,528   

The unrecognized tax benefit at December 26, 2020 and December 31, 2019 were $13,486 and $15,143, respectively, of 
which $8,863 and $10,649, respectively, would be reflected as an adjustment to income tax expense if recognized.  The year 
over year decrease from 2019 to 2020 is primarily due to the closure of IRS audit for tax years 2016 through 2018, offset by 
additional  unrecognized  tax  benefits  related  to  federal  tax  exposures.    It  is  reasonably  possible  that  certain  amounts  of 
unrecognized tax benefits may reverse in the next 12 months; however, the Company does not expect such reversals to have a 
significant impact on its results of operations or financial position. 

The  Company  recognizes  accrued  interest  and  penalties  related  to  unrecognized  tax  benefits  in  income  tax  expense. 
During  the  years  ended  December 26,  2020,  December  31,  2019  and  December  31,  2018,  the  Company  recognized 
approximately $(193), $236 and $199, respectively, in interest and penalties (benefit) expense associated with uncertain tax 
positions. As of December 26, 2020 and December 31, 2019, the Company had accrued interest and penalties expense included 
in the table of unrecognized tax benefits of $1,487 and $1,681, respectively. 

The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions.   The 
Company is subject to ordinary statute of limitation rules of three and four years for federal and state returns, respectively.  
However, due to tax attribute carryforwards, the Company is subject to examination for tax years 2003 forward for U.S. federal 
tax purposes with respect to carryforward amounts.  The Company is also subject to examination in various states for tax years 
2002 forward with respect to carryforward amounts.  The Company is subject to examination for tax years 2010 forward for 
various foreign jurisdictions. The Company believes that adequate amounts have been reserved for any adjustments that may 
ultimately result from any future examinations of these years. 

In the normal course of business, the Company is subject to tax audits in various jurisdictions, and such jurisdictions may 
assess additional income taxes or other taxes against it. Although the Company believes its tax estimates are reasonable, the 
final determination of tax audits and any related litigation could be materially different from the Company’ s historical income 
tax provisions and accruals. The results of an audit or litigation could have a material adverse effect on the Company’ s results 
of operations or cash flows in the period or periods for which that determination is made. 

F-30 

 
 
 
  
  
    
  
  
  
     
     
  
     
     
     
     
 
 
 
14.  Accumulated Other Comprehensive (Income) Loss: 

Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses 
on  available-for-sale  debt  securities.    See  the  Consolidated  Statements  of  Comprehensive  Income  for  the  effect  of  the 
components of comprehensive income on the Company’s net income. 

The components of accumulated other comprehensive (income) loss, net of tax, are as follows: 

Foreign currency 
translation 
adjustments 

Net unrealized 
(gains) losses on 
marketable 
securities 

Accumulated 
other 
comprehensive 
loss (income) 

Balance at December 31, 2018 ..................................................  
Net current period other comprehensive (income) loss ........  
Reclassifications ...................................................................  
Balance at December 31, 2019 ..................................................  
Net current period other comprehensive income ..................  
Reclassifications ...................................................................  
Balance at December 26, 2020 ..................................................  

   $ 

   $ 

1,273      $ 
(709 )      
—        
564        
(5,043 )      
—        
(4,479 )    $ 

(10 )    $ 
44        
—        
34        
(123 )      
—        
(89 )    $ 

1,263   
(665 ) 
—   
598   
(5,166 ) 
—   
(4,568 ) 

15.  Segment Reporting and Geographic Information: 

The Company is engaged in the design, development, manufacture and support of high-performance control metrology, 
defect inspection, lithography and data analysis systems used by microelectronics device manufacturers. The Company and its 
subsidiaries  currently  operate  in  a  single  operating  segment:  the  design,  development,  manufacture  and  support  of  high-
performance  process  control  defect  inspection  and  metrology,  lithography  and  process  control  software  systems  used  by 
microelectronics device manufacturers. Therefore, the Company has one reportable segment. The Company’s chief operating 
decision maker is the Chief Executive Officer (the “CEO”). The CEO allocates resources and assesses performance of the 
business and other activities at the reportable segment level.  

The following table lists the different sources of revenue: 

Systems and software .........................................................  
Parts ....................................................................................  
Services ...............................................................................  
Total revenue ............................................................  

Year Ended 
December 26, 
2020 

Year Ended December 31, 

2019 
  $ 450,459        80 %   $ 255,723        84 %   $ 234,241        86 % 
     65,444        12 %      34,892        11 %      28,658        10 % 
4 % 
     40,593       
  $ 556,496        100 %   $ 305,896        100 %   $ 273,784        100 % 

8 %      15,281       

5 %      10,885       

2018 

 The Company’s significant operations outside the United States include sales, service and application offices in Asia and 
Europe. For geographical revenue reporting, revenue is attributed to the geographic location to which the product is shipped. 
Revenue by geographic region is as follows: 

Year Ended 
December 26, 
2020 

Year Ended December 31, 
2018 
2019 

Revenue from third parties: 

China .............................................................................  
Taiwan ...........................................................................  
South Korea ...................................................................  
United States .................................................................  
Japan ..............................................................................  
Europe ...........................................................................  
Southeast Asia ...............................................................  
Total revenue ............................................................  

  $ 

  $ 

125,023      $ 
120,959        
90,193        
81,708        
59,295        
49,697        
29,621        
556,496      $ 

80,017      $ 
66,601        
43,997        
46,717        
29,816        
23,023        
15,725        
305,896      $ 

63,243   
45,312   
51,750   
43,944   
22,361   
27,173   
20,001   
273,784   

F-31 

 
 
 
  
  
  
  
  
  
  
  
     
     
     
     
     
 
  
  
  
     
  
  
  
  
  
  
  
  
 
  
  
    
  
  
  
  
  
     
  
    
         
         
    
    
    
    
    
    
    
 
      
         
         
  
 
The following chart identifies our customers that represented 10% or more of total revenue for each of the last three fiscal 

years:  

Samsung Semiconductor..........................................................................  
Taiwan Semiconductor Manufacturing Co. Ltd. ......................................  
SK Hynix Inc. ..........................................................................................  

^ The customer accounted for less than 10% of total revenue during the period. 

2020 

2019 

2018 

15 %    
14 %      

^   

^   
13 %    
13 %      

^   
^   
12 % 

At December 26, 2020, three customers, Samsung Semiconductor, Taiwan Semiconductor Manufacturing Co. Ltd., and 
SK  Hynix  Inc.,  accounted  for  more  than  10%  of  net  accounts  receivable. At  December 31,  2019,  one  customer,  Taiwan 
Semiconductor Manufacturing Co. Ltd., accounted for more than 10% of net accounts receivable. 

Substantially all of the Company’s long-lived assets are located within the United States of America. 

16.  Earnings Per Share: 

Basic income per share is calculated using the weighted average number of shares of common stock outstanding during 
the period. Restricted stock units and stock options are included in the calculation of diluted earnings per share, except when 
their effect would be anti-dilutive. 

The Company’s basic and diluted earnings per share amounts are as follows: 

Numerator: 

Net income ..................................................................................  

   $ 

31,025      $ 

1,910      $ 

45,096   

   December 26, 

December 31, 

2020 

2019 

2018 

Denominator: 

Basic earnings per share - weighted average shares 
   outstanding ...............................................................................  
Effect of potential dilutive securities: 
Restricted stock units, employee stock purchase grants and stock 
   options - dilutive shares ............................................................  
Diluted earnings per share - weighted average shares 
   outstanding ...............................................................................  

Earnings per share: 

49,136        

29,729        

25,470   

339        

278        

426   

49,475        

30,007        

25,895   

Basic ............................................................................................  
Diluted .........................................................................................  

   $ 
   $ 

0.63      $ 
0.63      $ 

0.06      $ 
0.06      $ 

1.77   
1.74   

17.  Share Repurchase Authorization: 

In November 2020, the Onto Innovation Board of Directors approved a new share repurchase authorization, which allows 
the Company to repurchase up to $100,000 worth of shares of its common stock.  This share repurchase authorization replaces 
the remaining balance of $28,000 from the prior share repurchase authorization.  Repurchases may be made through both public 
market  and  private  transactions  from  time  to  time. At  December  26,  2020,  there  was  $100,000  available  for  future  share 
repurchases. 

The following table summarizes the Company’s stock repurchases: 

Shares of common stock repurchased ..........................  
Cost of stock repurchased ............................................  
Average price paid per share ........................................  

   $ 
   $ 

1,882        
52,000      $ 
27.62      $ 

37        
744      $ 
19.85      $ 

1,061   
21,069   
19.86   

Year Ended 
December 26, 
2020 

Year Ended December 31, 

2019 

2018 

F-32 

 
 
 
  
  
  
  
  
  
  
  
  
  
  
  
  
    
 
  
  
     
  
  
  
     
     
  
       
         
         
  
     
         
         
    
     
     
         
         
    
     
     
     
         
         
    
 
  
  
  
    
  
  
  
  
  
  
  
  
     
  
18.  Subsequent Event 

On  December  31,  2020,  the  Company  acquired  Inspectrology,  LLC,  headquartered  in  Sudbury,  Massachusetts. 
Inspectrology, LLC.  is a leading supplier of overlay metrology for controlling lithography and etch processes in the compound 
semiconductor market.  The impact of the acquisition is not expected to be material to the Company’s consolidated financial 
position, results of operations and operating cash flows. 

F-33 

 
 
 
ONTO INNOVATION INC. AND SUBSIDIARIES 

SCHEDULE OF VALUATION AND QUALIFYING ACCOUNTS 
(In thousands) 

Column A 

Description 
Fiscal Year 2020: 

Allowance for credit losses 
Deferred tax valuation 
    allowance .................  
Allowance for convertible 
    notes receivable .......  

Fiscal Year 2019: 

Allowance for doubtful 
    accounts ...................  
Deferred tax valuation 
    allowance .................  
Allowance for convertible 
    notes receivable .......  

Fiscal Year 2018: 

Allowance for doubtful 
    accounts ...................  
Deferred tax valuation 
    allowance .................  

Column B 
Balance at 
Beginning of 
Period 

Column C 

      Column D 

      Column E 

Charged to (Recovery 
of) Costs and Expense      

Charged to Other 
Accounts (net) 

      Deductions 

Balance at 
End of Period    

  $ 

1,247     $ 

327     $ 

—      $ 

790      $ 

784   

14,160       

2,000       

78       

—       

—       

—       

14,238   

—       

2,000       

—   

  $ 

691     $ 

363     $ 

—      $ 

(193 )   $ 

1,247   

3,172       

942       

10,046       

—       

14,160   

—       

2,000       

—       

—       

2,000   

  $ 

460     $ 

2,447       

293     $ 

725       

—      $ 

62      $ 

691   

—       

—       

3,172   

F-34 

 
 
 
  
  
     
  
  
     
     
     
        
        
        
        
    
    
    
     
        
        
        
        
    
    
    
     
        
        
        
        
    
    
 
PURSUANT TO THE REQUIREMENTS OF SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT 
OF 1934, THE REGISTRANT HAS DULY CAUSED THIS REPORT TO  BE  SIGNED ON ITS  BEHALF  BY THE 
UNDERSIGNED, THEREUNTO DULY AUTHORIZED. 

SIGNATURES 

Onto Innovation Inc. 
(Registrant) 

By: 

/s/  Michael P. Plisinski 
Michael P. Plisinski 
Chief Executive Officer 

Date: 

February 19, 2021 

PURSUANT TO THE REQUIREMENTS OF THE SECURITIES EXCHANGE ACT OF 1934, THIS REPORT 
HAS BEEN SIGNED BELOW BY THE FOLLOWING PERSONS ON BEHALF OF THE REGISTRANT AND IN 
THE CAPACITIES AND ON THE DATES INDICATED. 

Signature 

Title 

/s/ Michael P. Plisinski 
Michael P. Plisinski 

/s/  Steven R. Roth 
Steven R. Roth 

/s/ Jeffrey A. Aukerman 
Jeffrey A. Aukerman 

/s/  Leo Berlinghieri 
Leo Berlinghieri 

/s/  Edward J. Brown, Jr. 
Edward J. Brown Jr. 

/s/  Vita A Cassese 
Vita A. Cassese 

/s/  David B. Miller 
David B. Miller 

/s/  Bruce C. Rhine 
Bruce C. Rhine 

/s/  Christopher A. Seams 
Christopher A. Seams 

/s/  Christine A. Tsingos 
Christine A. Tsingos 

Chief Executive Officer (Principal 
Executive Officer) 

Senior Vice President, Chief Financial 
Officer (Principal Financial Officer and 
Principal Accounting Officer) 

  Director 

  Director 

  Director 

  Director 

  Director 

  Director 

  Director 

  Director 

Date 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

February 19, 2021 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
   
 
 
 
SUBSIDIARIES 

Exhibit 21.1 

Name 
Rudolph Technologies, Inc. 
4D Technology Corporation 
Onto Innovation Japan Co. Ltd. 
Onto Innovation (Shanghai) Trading Co., Ltd. 
Nanometrics China Company Ltd. 
Onto Innovation Germany GmbH 
Accent Optical Technologies (Germany) GmbH 
Rudolph Technologies Hong Kong Limited 
Onto Innovation Europe, B.V. 
Nanometrics France S.A.S. 
Nanometrics (Switzerland) GmbH 
Nanometrics U.K. Ltd. 
Nanometrics Israel, Ltd. 
Onto Innovation Korea Ltd. 
Onto Innovation Southeast Asia Pte. Limited 
Onto Innovation Ireland Limited 

Jurisdiction 
U.S.A. 
U.S.A. 
Japan 
China 
China 
Germany 
Germany 
Hong Kong 
Netherlands 
France 
Switzerland 
United Kingdom 
Israel 
Korea 
Singapore 
Ireland 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
Rule 13a-14(a) Certification of Chief Executive Officer 
Pursuant to Section 302 of the Sarbanes-Oxley Act of  2002 

Exhibit 31.1 

I, Michael P. Plisinski, certify that: 

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.; 

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report; 

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all  material  respects  the  financial  condition,  results  of  operations  and  cash  flows  of  the  registrant  as  of,  and  for,  the 
periods presented in this report; 

4. The  registrant’s  other  certifying  officer  and  I  are  responsible  for  establishing  and  maintaining  disclosure  controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have: 

a.  Designed  such  disclosure  controls  and  procedures,  or  caused  such  disclosure  controls  and  procedures  to  be 
designed under our supervision, to ensure that material information relating to the registrant, including its consolidated 
subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is 
being prepared; 

b.  Designed such internal control over financial reporting, or caused such internal control over financial reporting to be 
designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the 
preparation of financial statements for external purposes in accordance with generally accepted accounting principles; 

c.  Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report  our 
conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by 
this report based on such evaluation; and 

d.  Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during 
the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has 
materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; 
and 

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control  over 
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or  persons 
performing the equivalent functions): 

a.  All  significant  deficiencies  and  material  weaknesses  in  the  design  or  operation  of  internal  control over  financial 
reporting  which  are  reasonably  likely  to  adversely  affect  the  registrant’s  ability  to  record,  process,  summarize  and 
report financial information; and 

b.  Any fraud, whether or not material, that involves management or other employees who have a significant role in the 
registrant’s internal control over financial reporting. 

Date: February 19, 2021 

By: /s/ Michael P. Plisinski 
   Michael P. Plisinski 
   Chief Executive Officer 

 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
 
Exhibit 31.2 

Rule 13a-14(a) Certification of Chief Financial Officer 
Pursuant to Section 302 of the Sarbanes-Oxley Act of  2002 

I, Steven R. Roth, certify that: 

1. I have reviewed this annual report on Form 10-K of Onto Innovation  Inc.; 

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact 
necessary  to  make  the  statements  made,  in  light  of  the  circumstances  under  which  such  statements  were  made,  not 
misleading with respect to the period covered by this report; 

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in 
all  material  respects  the  financial  condition,  results  of  operations  and  cash  flows  of  the  registrant  as  of,  and  for,  the 
periods presented in this report; 

4. The  registrant’s  other  certifying  officer  and  I  are  responsible  for  establishing  and  maintaining  disclosure  controls  and 
procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as 
defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have: 

a.  Designed  such  disclosure  controls  and  procedures,  or  caused  such  disclosure  controls  and  procedures  to  be 
designed under our supervision, to ensure that material information relating to the registrant, including its consolidated 
subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is 
being prepared; 

b.  Designed such internal control over financial reporting, or caused such internal control over financial reporting to be 
designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the 
preparation of financial statements for external purposes in accordance with generally accepted accounting principles; 

c.  Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report  our 
conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by 
this report based on such evaluation; and 

d.  Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during 
the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has 
materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; 
and 

5. The registrant’s other certifying officer  and I have disclosed, based on our most recent evaluation of internal control  over 
financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or  persons 
performing the equivalent functions): 

a.  All  significant  deficiencies  and  material  weaknesses  in  the  design  or  operation  of  internal  control over  financial 
reporting  which  are  reasonably  likely  to  adversely  affect  the  registrant’s  ability  to  record,  process,  summarize  and 
report financial information; and 

b.  Any fraud, whether or not material, that involves management or other employees who have a significant role in the 
registrant’s internal control over financial reporting. 

Date: February 19, 2021 

By: /s/ Steven R. Roth 
   Steven R. Roth 
   Senior Vice President and Chief Financial Officer 

 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
 
CERTIFICATION OF CHIEF EXECUTIVE OFFICER 
PURSUANT TO 18 U.S.C. SECTION 1350, 
AS ADOPTED PURSUANT TO 
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 

Exhibit 32.1 

I, Michael P. Plisinski, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley 
Act of 2002, that the Annual Report of Onto Innovation Inc. on Form 10-K for the year ended December 26, 2020 fully complies 
with  the  requirements  of  Section  13(a)  or  15(d),  as  applicable,  of  the  Securities  Exchange  Act  of  1934  and  that  the 
information contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition  and 
results of operations of Onto Innovation Inc. 

Date: February 19, 2021 

By: /s/ Michael P. Plisinski 
   Michael P. Plisinski 
   Chief Executive Officer 

 
 
 
 
 
  
 
  
  
  
  
 
  
  
  
  
  
 
CERTIFICATION OF CHIEF FINANCIAL OFFICER 
PURSUANT TO 18 U.S.C. SECTION 1350, 
AS ADOPTED PURSUANT TO 
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 

Exhibit 32.2 

I, Steven R. Roth, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act 
of 2002, that the Annual Report of Onto Innovation  Inc. on Form 10-K for the year ended December 26, 2020 fully complies 
with  the  requirements  of  Section  13(a)  or  15(d),  as  applicable,  of  the  Securities  Exchange  Act  of  1934  and  that  the 
information contained in the Annual Report on Form 10-K fairly presents in all material respects the financial condition and 
results of operations of Onto Innovation Inc. 

Date: February 19, 2021 

By: /s/ Steven R. Roth 
Steven R. Roth 
Senior Vice President and Chief Financial Officer 

Forward Looking Statements 

This proxy statement contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act 
of 1995 (the “Act”) which include those concerning Onto Innovation’s business momentum and future growth; acceptance of 
Onto Innovation’s products and services; Onto Innovation’s ability to both deliver products and services consistent with its 
customers’ demands and expectations and strengthen its market position; as well as other matters that are not purely historical 
data. Onto Innovation wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results 
may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are 
beyond Onto Innovation’s control.  Such factors include, but are not limited to, the following: variations in the level of orders, 
which  can  be  affected  by  general  economic  conditions;  seasonality  and  growth  rates  in  the  semiconductor  manufacturing 
industry and in the markets served by Onto Innovation’s customers; the global economic and political climates; the impact on 
supply, production, sales and delivery of our products and services due to the global spread of the coronavirus (COVID-19); 
difficulties or delays in product functionality or performance; the delivery performance of sole source vendors; the timing of 
future  product  releases;  failure  to  respond  to  changes  in  technology  or  customer  preferences;  changes  in  pricing  by  Onto 
Innovation or its competitors; Onto Innovation’s ability to leverage its resources to improve its position in its core markets, to 
weather  difficult  economic  environments,  to  open  new  market  opportunities  and  to  target  high-margin  markets;  the 
strength/weakness  of  the  back-end  and/or  front-end  semiconductor  market  segments;  the  imposition  of  tariffs  or  trade 
restrictions and costs, burdens and restrictions associated with other governmental actions; the ability to successfully complete 
the integration of the businesses of Rudolph and Nanometrics and to maintain the anticipated synergies and value-creation 
contemplated  by  the  merger  of  Rudolph  and  Nanometrics  within  the  expected  time  frame;  unanticipated  difficulties  or 
expenditures relating to the completion of integration of the Rudolph and Nanometrics businesses; and the response of business 
partners and retention as a result of the merger. Additional information and considerations regarding the risks faced by Onto 
Innovation are available in the Company’s Annual Report on Form 10-K for the year ended December 26, 2020  and other 
filings  with  the  Securities  and  Exchange  Commission. As  the  forward-looking  statements  are  based  on  Onto  Innovation’s 
current expectations, the Company cannot guarantee any related future results, levels of activity, performance or achievements. 
Onto Innovation does not assume any obligation to update the forward-looking information contained in this proxy statement. 

Date: 

Time: 

Place: 

NOTICE OF 2021 ANNUAL MEETING OF STOCKHOLDERS 

Tuesday, May 11, 2021 

10:00 a.m., Eastern Time 

Company principal executive offices located at 16 Jonspin Road, Wilmington, Massachusetts, 01887* 

Record Date: 

Only stockholders of record at the close of business on March 12, 2021 are entitled to vote at the 
meeting and any adjournment or postponement thereof for which no new record date is set. 

Items of Business:  1.  To elect the Board’s seven nominees for director to serve until the next annual meeting and until 

their successors are duly elected and qualified; 

2.

3.

4.

To approve, on an advisory (non-binding) basis, the compensation of our named executive officers 
as disclosed in this proxy statement;

To ratify the appointment of Ernst & Young LLP as our independent registered public accounting 
firm for the fiscal year ending January 1, 2022; and

To transact such other business as may properly come before the meeting and any adjournment or 
postponement thereof.

These items of business are described more fully in the accompanying proxy statement.  This year we will be providing access 
to our proxy materials via the internet in accordance with the Securities and Exchange Commission’s “Notice and Access” 
rules.  On or about April 1, 2021, we will be mailing our Notice of Internet Availability of Proxy Materials to our stockholders, 
which contains instructions for accessing our 2021 proxy statement and 2020 annual report to stockholders and how to vote 
online.  In addition, the Notice of Internet Availability of Proxy Materials contains instructions on how to request a paper copy 
of the 2021 proxy statement and 2020 annual report to stockholders. 

Your vote is important.  As always, but especially now given the uncertainties posed by the coronavirus (COVID-19) pandemic, 
we encourage you to vote your shares as soon as possible and prior to the Annual Meeting via the internet or by phone even if 
you plan to attend the Annual Meeting.  Voting early will ensure your shares are represented at the Annual Meeting, regardless 
of whether you attend the Annual Meeting.  You may cast your vote via the internet, by telephone, by mail or during the Annual 
Meeting.  If you receive a paper copy of the proxy card by mail, you may also mark, sign, date, and return the proxy card 
promptly in the accompanying postage-prepaid envelope. 

* We intend to hold our annual meeting in person. However, we are sensitive to the public health and travel concerns our
stockholders may have and recommendations that public health officials have issued in light of the COVID-19 pandemic. As a
result,  we  will  require  all  attendees  to  comply  with  certain  health  and  safety  protocols,  which  are  described  in  the  proxy
statement, and we may decide to hold the meeting in a different location or solely by means of remote communication (i.e., a
virtual-only  meeting).  In  such  an  event,  we  would  announce  any  such  updates  in  additional  proxy materials  filed  with  the
Securities  and  Exchange  Commission  and  in  a  press  release  that  we  would  make  available  on  our  website  at
https://investors.ontoinnovation.com. We encourage you to check this website prior to the meeting if you plan to attend.

IMPORTANT NOTICE REGARDING THE AVAILABILITY OF PROXY MATERIALS FOR THE 

ANNUAL MEETING OF STOCKHOLDERS TO BE HELD MAY 11, 2021: 

This notice, the proxy statement, and the 2020 Annual Report to Stockholders are available at: 

https://www.ontoinnovation.com/ar-proxy 

FOR THE BOARD OF DIRECTORS 

Robert A. Koch 
Secretary 

Wilmington, Massachusetts 
April 1, 2021 

PROXY SUMMARY 

On October 25, 2019 (the “Merger Date”), Rudolph Technologies, Inc. merged with and into Nanometrics Incorporated, which 
was then renamed Onto Innovation Inc. (the “2019 Merger”). Unless otherwise indicated or context otherwise requires, as used 
herein “Nanometrics” refers to Nanometrics Incorporated and its subsidiaries prior to the 2019 Merger and “Rudolph” refers 
to Rudolph Technologies, Inc. and its subsidiaries prior to the 2019 Merger. 

This summary highlights information contained elsewhere in the proxy statement. This summary does not contain all of the 
information that you should consider, and you should read the entire proxy statement carefully before voting. 

 Stockholder Voting Matters 

Voting Matter 

Board Vote 
Recommendation 

Page Reference for 
more information 

Proposal 1:   Election of Directors 

FOR ALL 

Proposal 2:   Advisory Vote on Named Executive Officer Compensation 

FOR 

Proposal 3:   Ratification of Appointment of Independent Registered 

Public Accounting Firm for the Fiscal Year Ending January 
1, 2022 

FOR 

18 

28 

29 

 Corporate Governance Highlights 

Snapshot Of Board Composition 

The following table presents a snapshot of the expected composition of the Onto Innovation Board of Directors (the “Board”) 
immediately following the 2021 Annual Meeting, assuming the election of all nominees named in the proxy statement. 

 Board Characteristic 

Total Number of Directors 

Percentage of Independent Directors 

Average Age of Directors (years) 

Average Tenure of Directors (years) 

Separate Chairman and CEO roles 

Independent Chairman 

Audit Committee Qualified Financial Experts 

1 

Onto 
Innovation 

7 

85.7% 

61.1 

8.4 

Yes 

Yes 

1 

  
Snapshot Of Board Governance And Compensation Policies 

The following table presents a snapshot of the Onto Innovation Board Governance and Compensation Policies currently in 
effect. 

Policy 

Majority Voting for All Directors 

Regular Executive Sessions of Independent Directors 

Annual Board, Committee and Director Evaluations 

Risk Oversight by Full Board and Committees 

Independent Audit, Compensation and Nominating & Governance Committees 

Code of Business Conduct and Ethics for Employees and Directors 

Financial Information Integrity Policy 

Stock Ownership Requirement for Directors 

Stock Ownership Requirement for CEO 

Stock Ownership Requirement for other NEOs 

Anti-Hedging, Anti-Short Sale & Anti-Pledging Policy 

Compensation Clawback Policy 

No Future Tax Gross-Up Provisions 

No Poison Pill 

Stock Buyback Program 

Double Trigger Change-in-Control Provisions for Executive Officers 

Onto Innovation 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

3x annual retainer 

3x base salary 

1x base salary 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

2 

Snapshot Of Board Governance And Compensation Policies Newly Implemented Or Adjusted In Past Year 

The  following  presents  a  snapshot  of  the  Onto  Innovation  Board  Governance  and  Compensation  Policies  that  were  newly 
implemented or adjusted in the past year. 

•

•

•

•

•

After the 2020 Annual Meeting of Stockholders, the following actions were taken with regard to the composition
and leadership structure of the Board and standing committees of the Board:
◦
◦
◦

Board size of ten (10) Directors.
Board Chairman: Christopher A. Seams
Audit Committee:
- Four (4) members
- Chairperson:  Christine A. Tsingos
Compensation Committee:
- Four (4) members
- Chairperson:  Edward J. Brown, Jr.
Nominating & Governance Committee:
- Four (4) members
- Chairperson:  Leo Berlinghieri

◦

◦

At the 2020 Annual Meeting of Stockholders, the Onto Innovation Inc. 2020 Stock Plan and Onto Innovation 2020
Employee Stock Purchase Plan were approved by the stockholders.

The annual review of the charters for the Audit, Compensation and Nominating & Governance Committees, the Code
of  Business  Conduct  and  Ethics  and  the  Financial  Information  Integrity  Policy  and  the  Summary  of  Corporate
Governance Policies for the Company was performed and completed.

Regrettably in January of 2021 one of our Directors, Robert G. Deuster, passed away.  Mr. Deuster had served on the
Nanometrics  Board  of  Directors  (“Nanometrics  Board”)  since  2017  and  continued  his  service  to  the  Company
following the 2019 Merger.  His insights and contributions to the Board and the Company will be greatly missed.

The Board determined that, effective as of the 2021 Annual Meeting of Stockholders, the size of the Board would be
reduced to seven (7) members.

3 

__________________________________________ 

PROXY STATEMENT 
__________________________________________ 

The  proxy  detailed  herein  is  solicited  on  behalf  of  the  Board  of  Directors  (the  “Board”  or  “Board  of  Directors”)  of  Onto 
Innovation Inc. (“Onto Innovation,” the “Company,” “we,” “us” or “our”) for use at the 2021 Annual Meeting of Stockholders 
to be held May 11, 2021 at 10:00 a.m. Eastern Time (the “Annual Meeting”), or at any adjournment or postponement thereof, 
for the purposes set forth herein and in the accompanying Notice of Annual Meeting of Stockholders. The Annual Meeting will 
be held at the Company’s principal executive offices, located at 16 Jonspin Road, Wilmington, Massachusetts 01887. Directions 
to  the  annual  meeting  may  be  found  on  our  website  www.ontoinnovation.com  by  clicking  on  “Company,”  “Locations,” 
“Massachusetts” and then accessing the interactive map. The Company’s telephone number is (978) 253-6200. 

We  intend  to  hold  the Annual  Meeting  in  person.  However,  we  are  sensitive  to  the  public  health  and  travel  concerns  our 
stockholders may have and recommendations that public health officials have issued in light of the coronavirus (COVID-19) 
pandemic. As a result, we will require all attendees to comply with certain health and safety protocols, which are described in 
this proxy statement under “Questions and Answers About the Annual Meeting – What Is Required To Be Admitted To The 
Annual Meeting?”, and we may decide to hold the meeting in a different location or solely by means of remote communication 
(i.e., a virtual-only meeting). In such an event, we would announce any such updates in additional proxy materials filed with 
the SEC and in a press release that would be available on our website at https://investors.ontoinnovation.com. We encourage 
you to check this website prior to the meeting if you plan to attend. 

On or about Thursday, April 1, 2021, we will furnish a Notice of Internet Availability of Proxy Materials (“Notice”) to our 
stockholders containing instructions on how to access the proxy materials online at: 

https://www.ontoinnovation.com/ar-proxy 

Instructions on how to vote online and to request a printed copy of the proxy materials may be found in the Notice.  If you 
received a Notice by mail, you will not receive a paper copy of the proxy materials, unless you request such materials by 
following the instructions contained in the Notice.  Your vote is important, regardless of the extent of your holdings.  

QUESTIONS AND ANSWERS ABOUT THE ANNUAL MEETING 

 What Is The Purpose Of The Annual Meeting? 

At the Annual Meeting, stockholders will be asked to vote upon the matters set forth in the accompanying Notice of Annual 
Meeting, including: 

•
•
•

the election of seven (7) directors;
an advisory resolution on named executive officer compensation; and
the ratification of the appointment of our independent registered public accounting firm for fiscal 2021,

all of which are more fully described herein. 

 Will Other Matters Be Voted On At The Annual Meeting? 

We are not currently aware of any other matters to be presented at the Annual Meeting other than those described in this proxy 
statement. If any other matters not described in the proxy statement are properly presented at the meeting, any proxies received 
by us will be voted in the discretion of the proxy holders. 

4 

 Who Is Entitled To Vote? 

If you were a stockholder of record as of the close of business on March 12, 2021, which is referred to in this proxy statement 
as the “record date,” you are entitled to receive notice of the Annual Meeting and to vote the shares of common stock that you 
held as of the close of business on the record date. Each stockholder is entitled to one (1) vote for each share of common stock 
held by such stockholder on the record date. 

 May I Attend The Meeting? 

All stockholders of record as of the record date may attend the Annual Meeting, which will be held at the Company’s principal 
executive offices, located at 16 Jonspin Road, Wilmington, Massachusetts 01887. To obtain directions to attend the Annual 
Meeting and vote in person, please contact Investor Relations at 978-253-6200. We currently intend to hold the Annual Meeting 
in  person.  In  the  event  it  is  not  possible  or  advisable  to  hold  the Annual  Meeting  in  person,  we  will  announce  alternative 
arrangements for the meeting as promptly as practicable, which may include holding the meeting partially or solely by means 
of remote communication (i.e., a virtual-only meeting). Please monitor our website at https://investors.ontoinnovation.com for 
updated information. If you are planning to attend the Annual Meeting, please check the website prior to the Annual Meeting 
date. As always, we encourage you to vote your shares prior to the Annual Meeting. 

 What is Required To Be Admitted To The Annual Meeting? 

If you are a stockholder of record, you will need valid picture identification and proof that you are a stockholder of record of 
the Company as of the record date to gain admission to the Annual Meeting. 

If you are a beneficial holder, you will be required to present a valid picture identification and proof from your bank, broker or 
other record holder of your shares that you are the beneficial owner of such shares to gain admission to the Annual Meeting. If 
you are a beneficial holder and wish to vote your shares at the meeting, you will need a legal proxy from your bank, broker or 
other record holder of your shares.  

All attendees will be expected to comply with important health and safety protocols, including wearing an appropriate face 
covering at all times, hand washing and/or applying hand sanitizer upon arrival, and practicing social distancing by maintaining 
at least a six-foot distance from other attendees. You should not attend if you feel unwell or if you have been exposed to COVID-
19. Additionally, there will be a mandatory health screening and temperature check required for entry to the building. If you 
have a fever or other symptoms of COVID-19, you will not be permitted to attend the Annual Meeting in person. We reserve 
the right to take any additional precautionary measures, and may ask attendees to leave the Annual Meeting if they are not 
following our procedures. 

 What Constitutes A Quorum? 

The required quorum for the transaction of business at the Annual Meeting is a majority of the issues and outstanding shares 
of Common Stock of the Company, $0.001 par value per share (“Common Stock”), present in person or by proxy and entitled 
to  vote  at  the Annual  Meeting.    On  the record  date,  48,956,481  shares  of  the  Company’s  Common  Stock  were  issued  and 
outstanding, each entitled to one vote on each matter to be acted upon at the Annual Meeting.  Your shares will be counted 
towards the quorum only if you submit a valid proxy (or one is submitted on your behalf by your broker, bank or other nominee) 
or if you vote in person at the meeting.  Abstentions and broker non-votes will be counted to determine whether there is a 
quorum present.  If a quorum is not present, the Annual Meeting may be adjourned or postponed to a later date. 

 What Are “Broker Non-Votes”? 

A broker non-vote occurs when a bank, broker or other registered holder of record holds shares for a beneficial owner but is 
not empowered to vote on a particular proposal on behalf of such beneficial owner because the proposal is considered “non-
routine”  and  the  beneficial  owner  has  not  provided voting  instructions  on  that proposal.   The  election of directors  and  the 
advisory vote on named executive officer compensation are treated as “non-routine” proposals. This means that if a brokerage 
firm holds your shares on your behalf, those shares will not be voted with respect to any of these proposals unless you provide 
instructions to that firm by voting your proxy.  See below under “What Is the Vote Required for Election of Directors?” and 
“What Is the Vote Required for the Approval of Proposals Other Than Director Elections?” for a discussion of the impact of 
broker non-votes on each of the proposals that will be presented at the Annual Meeting.  In order to ensure that any shares 
held on your behalf by a bank, broker or other registered holder of record are voted in accordance with your wishes, 
5 

 
 
we encourage you to provide instructions to that firm or organization in accordance with the Notice of voting instruction 
form provided by the broker, bank or other registered holder or to contact your broker, bank or other registered holder 
to request a proxy form. 

 Who Bears The Cost Of Soliciting Proxies? 

The Company will bear the cost of soliciting proxies. In addition, the Company may reimburse brokerage firms and other 
persons representing beneficial owners of shares for their expenses in forwarding solicitation material to such beneficial owners. 
Solicitation of proxies by mail may be supplemented by telephone, facsimile, e-mail or other electronic means or personal 
solicitation by directors, officers or regular employees of the Company. No additional compensation will be paid to such persons 
for such services.  We have engaged The Proxy Advisory Group, LLC to assist in the solicitation of proxies and provide related 
advice and informational support, for a services fee and the reimbursement of customary disbursements, which are not expected 
to exceed $10,000 in total. 

Why Did I Receive A “Notice Of Internet Availability Of Proxy Materials” But No Proxy Materials? 

We are distributing the Company’s proxy materials to stockholders of record via the internet in accordance with the “Notice 
and Access” approach permitted by rules of the Securities and Exchange Commission (“SEC”). This approach benefits the 
environment, while providing a timely and convenient method of accessing the materials and voting.  Accordingly, we have 
sent  you  a  Notice  because  the  Board  of  the  Company  is  soliciting  your  proxy  to  vote  at  the  2021  Annual  Meeting  of 
Stockholders, including at any adjournments or postponements of the meeting.  On or about April 1, 2021, the Company will 
begin mailing the Notice to all stockholders of record entitled to vote at the annual meeting.  All stockholders will have the 
ability to access the proxy materials on the website referred to in the Notice or request to receive a printed set of the proxy 
materials. Instructions on how to access the proxy materials over the Internet or to request a printed copy of the proxy materials 
and the Company’s 2020 Annual Report may be found in the Notice. 

What Does It Mean If I Received More Than One Notice? 

If you receive more than one Notice, your shares may be registered in more than one name or in different accounts. Please 
follow the voting instructions on each of the Notices to ensure that all of your shares are voted. 

 How Do I Go About Voting? 

You may either vote “For” all the nominees to the Board or you may “Withhold” your vote for any nominee you specify.  For 
each of the other matters to be voted on, you may vote “For” or “Against” or “Abstain” from voting. 

Voting For Shares Registered Directly In The Name Of The Stockholder 

If you have a stock certificate or hold shares in an account with our transfer agent, you are considered the “stockholder of 
record” with respect to those shares. You can submit your proxy online by following the instructions on the Notice.  You may 
opt to submit your proxy by requesting a full set of proxy materials be mailed to you and completing and returning the proxy 
in the postage-paid envelope provided.  Stockholders of record may also vote in person at the Annual Meeting. Whether or not 
you plan to attend the meeting, we urge you to vote by proxy to ensure your vote is counted. You may still attend the meeting 
and vote in person even if you have already submitted a proxy. 

If you are a stockholder of record with shares registered in your name, you can vote by one of the following methods: 

In Person - To vote in person, come to the annual meeting and you will receive a ballot when you arrive. 

• 
•  Via the Internet - To submit your proxy by internet, go to www.investorvote.com/ONTO and follow the instructions 
on the secure website.  The deadline for proxy submission via the internet is 11:59 p.m. (EDT) on May 10, 2021. 
•  Via Telephone – To submit your proxy by telephone, call toll free 1-800-652-VOTE (8683) within the United States, 

US territories and Canada.   

•  By Mail – Stockholders who receive a paper proxy card may complete, sign and date their proxy card and mail it in 
the pre-addressed postage-paid envelope that accompanies the proxy card.  Proxy cards submitted by mail must be 
received by the Secretary of the Company at the Company’s principal executive offices prior to the time of the Annual 
Meeting in order for your shares to be voted. 

6 

 
Even if you plan to attend the meeting, we recommend that you submit your proxy in advance so that your shares are represented 
at the Annual Meeting in the event you are unable to attend the meeting.  Each stockholder of record is entitled to one (1) vote 
for each share of Common Stock owned by such stockholder on all matters presented at the Annual Meeting. Stockholders do 
not have the right to cumulate their votes in the election of directors. 

If you return a signed and dated proxy card but do not indicate how the shares are to be voted, those shares will be voted in 
accordance with Onto Innovation’s Board’s recommendations. A valid proxy card also authorizes the individuals named therein 
as proxies to vote your shares in their discretion on any other matters, which, although not described in the proxy statement, 
are properly presented for action at the Annual Meeting. If you indicate on your proxy card that you wish to “abstain” from 
voting on an item, your shares will not be voted on that item. 

While internet proxy voting is being provided to allow you to submit your proxy online, with procedures designed to ensure 
the authenticity and correctness of your proxy vote instructions, please be aware that you must bear any costs associated with 
your internet access, such as usage charges from internet access providers and telephone companies. 

Voting By Proxy For Shares Registered In Street Name 

If your shares are held in a stock brokerage account or by a bank or other holder of record, you are considered the “beneficial 
owner” of shares held in “street name.”  In that case, you may receive a separate voting instruction form, or you may need to 
contact your broker, bank, or other stockholder of record to determine whether you will be able to provide voting instructions 
electronically via the internet.  As the beneficial owner, you have the right to direct your broker, bank or other holder of record 
on how to vote your shares by submitting voting instructions to such person in accordance with the directions that the entity 
provides.  In the event you are considered the “beneficial owner” of shares held in “street name” and you wish to vote in person 
at the annual meeting, you must obtain a legal proxy from your broker, bank or another agent. Follow the instructions from 
your broker or bank included with these proxy materials or contact your broker or bank to request a legal proxy. 

 May I Revoke My Proxy Or My Voting Instructions? 

Any proxy given pursuant to this solicitation may be revoked by the person giving it at any time before it is voted at the Annual 
Meeting. If you are a stockholder of record, you may change your vote after submitting your proxy: 

• 

• 

If you submitted your proxy by mail – By delivering a written notice of revocation or a duly executed proxy card 
bearing a later date to the Secretary of the Company at the Company’s principal executive offices prior to the Annual 
Meeting; 
If  you  submitted  your  proxy  over  the  internet  –  By  submitting  a  timely  and  valid  later  proxy  online  at 
www.investorvote.com/ONTO; 

•  By  submitting  a  timely  and  valid  later  proxy  by  telephone  call  to  1-800-652-VOTE  (8683)  within  the  USA,  US 

territories and Canada; or 

•  By attending the meeting and voting in person.  

If you are a beneficial owner of shares, please contact your bank, broker or other holder of record for specific instructions on 
how to change or revoke your voting instructions. 

 What Happens If I Do Not Vote? 

Stockholder Of Record:  Shares Registered In Your Name 

If you are a stockholder of record and do not submit a proxy by mailing your proxy card, by telephone, over the internet or by 
attending the Annual Meeting and voting in person, your shares will not be voted. 

Beneficial Owner:  Shares Registered In The Name Of Broker Or Bank 

If you are a beneficial owner and do not instruct your broker, bank, or other agent how to vote your shares, the question of 
whether  your  broker  or nominee  will  still  be  able  to  vote  your  shares  depends  on  whether  the  New York  Stock  Exchange 
(“NYSE”)  deems  the  particular  proposal  to  be  a  “routine”  matter.  Brokers  and  nominees  can  use  their  discretion  to  vote 
“uninstructed” shares with respect to matters that are considered to be “routine,” but not with respect to “non-routine” matters. 
Under the rules and interpretations of the NYSE, “non-routine” matters are matters that may substantially affect the rights or 

7 

 
 
 
privileges of stockholders, such as mergers, stockholder proposals, elections of directors (even if not contested), executive 
officer compensation (including any advisory stockholder votes on executive officer compensation and on the frequency of 
stockholder  advisory  votes  on  executive  officer  compensation),  and  certain  corporate  governance  proposals,  even  if 
management supported. Accordingly, your broker or nominee may not vote your shares on the election of directors and the 
advisory proposal to approve the named executive officer compensation without your instructions, but may vote your shares 
on the proposal to ratify the appointment of Ernst & Young LLP as the Company’s independent registered public accounting 
firm for the fiscal year ending January 1, 2022 even in the absence of your instruction. 

What If I Return A Proxy Card Or Otherwise Submit a Proxy But Do Not Make Specific Choices? 

If you return a signed and dated proxy card or otherwise submit a proxy without marking voting selections, your shares will be 
voted,  as  applicable,  “For”  the  election  of  all  seven  (7)  nominees  for  director,  “For”  the  advisory  approval  of  the  named 
executive  officer  compensation  and  “For”  the  ratification  of  the  appointment  of  Ernst  & Young,  LLP  as  the  independent 
registered public accounting firm of the Company for its fiscal year ending January 1, 2022. If any other matter is properly 
presented at the meeting, your proxyholder (one of the individuals named on the proxy card) will vote your shares using his or 
her best judgment. 

 What Is The Vote Required For Election Of Directors? 

For the election of directors, each director is elected by a majority of the votes cast (except that if the number of nominees 
exceeds the number of directors to be elected, directors will be elected by a plurality voting standard). This means that in order 
for a director nominee to be elected to our Board, the number of votes cast “for” a director’s election must exceed the number 
of votes cast “against” that director’s election (with “abstentions” and “broker non-votes” not counted as a vote cast either “for” 
or “against” that director’s election, although abstentions and broker non-votes count for the purpose of determining a quorum). 
Our Amended and Restated Bylaws (“Bylaws”) provide for election of directors by a majority of votes cast in uncontested 
elections, and our Summary of Corporate Governance Policies provides that any incumbent director nominee in an uncontested 
election who does not receive an affirmative majority of votes cast must promptly tender such director’s resignation to our 
Board. Further information regarding the process that will be followed if such an event occurs can be located under the heading 
“Proposal 1 - Election of Directors.” 

 What Is The Vote Required For The Approval Of Proposals Other Than Director Elections? 

The proposal to approve, on an advisory basis, the compensation of our named executive officers and the proposal to ratify the 
appointment of Ernst & Young LLP as our independent registered public accounting firm for the fiscal year ending January 1, 
2022 each requires the affirmative vote, in person or by proxy, of a majority of the shares present in person or represented by 
proxy  at  the  meeting  and  entitled  to  vote  on  the  matter  to be  approved.  For  such proposals,  abstentions  in  effect  count  as 
negative votes, because they are shares represented in person or by proxy that are entitled to vote on the matter and not voted 
in the affirmative. Broker non-votes are not counted as part of the vote total (because they are not considered “entitled to vote” 
on the matter) and have no effect on the outcome of those proposals. 

 What Is Householding? 

The  Company  has  adopted  a procedure  approved  by  the  SEC  called  “householding.”  Under  this  procedure,  when  multiple 
stockholders of record share the same address, we may deliver only one (1) Notice to that address unless we have received 
contrary  instructions  from  one  or  more  of  those  stockholders. The  same  procedure  may  be  followed  by  brokers  and  other 
nominees holding shares of our stock in “street name” for more than one (1) beneficial owner with the same address. 

If a stockholder holds shares of stock in multiple accounts (e.g., with our transfer agent and/or banks, brokers or other registered 
stockholders), we may be unable to use the householding procedures and, therefore, that stockholder may receive multiple 
copies of the Notice. You should follow the instructions on each Notice that you receive in order to vote the shares you hold in 
different accounts. 

8 

 
 
 
A stockholder that shares an address with another stockholder if such household has received only one (1) Notice, may write 
or call us as specified below: 

(i) 
(ii) 

To request a separate copy of such materials, which will be promptly mailed without charge; and 
To request that separate copies of these materials be sent to his or her home for future meetings.  

Conversely, a stockholder of record who shares the same address with another stockholder of record may write or call us as 
specified below to request that a single set of the proxy materials be delivered to that address. Such stockholder requests may 
be made to our Investor Relations Department either via phone at 978-253-6200 or by mail directed to: 

Investor Relations Department 
Onto Innovation Inc. 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

If you are a beneficial owner of shares held in street name, please contact your bank, broker or other holder of record regarding 
such requests. 

 How Can I Find Out the Results Of The Voting At The Annual Meeting? 

Preliminary voting results will be announced at the Annual Meeting. In addition, final voting results will be published in a 
current report on Form 8-K that we expect to file within four (4) business days after the Annual Meeting. If final voting results 
are not available to us in time to file a Form 8-K within four (4) business days after the meeting, we intend to file a Form 8‑K 
to publish preliminary results and, within four (4) business days after the final results are known to us, file an additional Form 
8-K to publish the final results. 

 What Are The Deadlines For Submission Of Stockholder Proposals For The 2022 Annual Meeting? 

Stockholders of the Company are entitled to present proposals for consideration at forthcoming stockholder meetings provided 
that they comply with the proxy rules promulgated by the SEC, if applicable, and the Bylaws of the Company. Stockholders 
wishing to present a proposal at the Company’s 2022 Annual Meeting of Stockholders must submit such proposal in writing to 
the Company Secretary at Onto Innovation Inc., 16 Jonspin Road, Wilmington, Massachusetts 01887 no later than December 
2, 2021 in accordance with Rule 14a-8 under the Securities Exchange Act of 1934, as amended (“Exchange Act”), if they wish 
for  it  to  be  eligible for  inclusion  in  the  proxy  statement  and  form  of  proxy  relating  to  that  meeting.  In  addition,  under  the 
Company’s  Bylaws,  a  stockholder  wishing  to  nominate  a  director  or  make  a  proposal  at  the  2022  Annual  Meeting  of 
Stockholders  outside  of  Exchange Act  Rule  14a-8  must  submit  such  nomination  or  proposal  in  writing  to  the  Company 
Secretary  at  the  above  address  no  earlier  than  January  11,  2022  and  no  later  than  February  10,  2022. The  Nominating  & 
Governance Committee will also consider qualified director nominees recommended by stockholders. Our process for receiving 
and  evaluating  Board  member  nominations from  our  stockholders  is  described below under  the  caption  “Consideration  Of 
Director Nominees.” 

You are also advised to review Company’s Bylaws, which contain additional requirements about advance notice of stockholder 
proposals and director nominations. 

9 

 
 
CORPORATE GOVERNANCE PRINCIPLES AND PRACTICES 

Onto Innovation is committed to sound and effective corporate governance practices. Having such principles is essential to 
running our business efficiently and to maintaining our integrity in the marketplace. The major components of our corporate 
governance practices are described below. 

 Board Leadership Structure 

Our  Company  management  is  led  by  Michael  P.  Plisinski,  who  has  served  as  our  Chief  Executive  Officer  (“CEO”)  and  a 
director since the Merger Date and Christopher A. Seams, who is an independent director and has served as the Chairman of 
the Company’s Board since the Merger Date.   

Our Board is currently comprised of one (1) non-independent director, Mr. Plisinski, and eight (8) directors each of whom has 
been affirmatively determined by our Board to meet the criteria for independence established by the SEC and the NYSE. The 
independent directors meet periodically in executive session chaired by the Chairman without the CEO or other management 
present. Furthermore, each director is encouraged to suggest items for the Board agenda and to raise at any Board meeting 
subjects that are not on the agenda for that meeting. 

In accordance with our sound and effective corporate governance practice, the roles of CEO and Chairman of the Board are 
held by separate individuals, with the independent Chairman of the Board being designated by the Board. The Board believes 
that, at the current time, the designation of an independent Chairman of the Board facilitates the functioning of the Board, while 
leaving  the  CEO  responsible  for  setting  the  strategic  direction  for  the  Company  and  for  the  day-to-day  leadership  and 
performance of the Company.  The independent Chairman of the Board: 

•   Presides at all meetings of the stockholders and the Board at which he or she is present; 

•   Establishes the agenda for each Board meeting;  

•   Sets the schedule and annual agenda, to the extent foreseeable;  

•   Calls and prepares the agenda for and presides over separate executive sessions of the independent directors;  

•   Acts as a liaison between the independent directors and the Company’s management; 

•   Serves as a point of communications with stockholders; and 

•   Performs such other powers and duties as may from time to time be assigned by the Board or as may be prescribed by 

the Company’s Bylaws.  

 Board Meetings 

Each  director  nominee  attended  at  least  75%  of  the  aggregate  of  the  total  number of  Board  meetings  and  total  number  of 
meetings of Board committees on which such director served during the time such director served on the Board or committees. 
Timothy J. Stultz, Ph.D. attended 67% of the Board meetings held during 2020 until the Company’s 2020 Annual Meeting date 
in which Dr. Stultz did not stand for reelection to the Board.  While the Company does not currently have a formal policy 
regarding the attendance of directors at the annual meeting of stockholders, directors are encouraged to attend. All members of 
the Board attended the Company’s 2020 Annual Meeting of Stockholders. 

On  five  (5)  occasions  during  2020,  the  Company’s  Board  met  in  executive  session  in  which  only  the  independent  Board 
members were present. 

 Board Independence 

The Board makes an annual determination as to the independence of each of our Board members under the current standards 
for “independence” established by the NYSE and the SEC. The Board has determined that the following nominees for election 
as directors to our Board are independent under the NYSE Corporate Governance Rules: Leo Berlinghieri, Edward J. Brown, 
Jr., David B. Miller, Bruce C. Rhine, Christopher A. Seams and Christine A. Tsingos.  Michael P. Plisinski, due to his position 
as our CEO, is not considered to be independent.  The two (2) directors not standing for re-election in 2021, Jeffrey A. Aukerman 
and Vita A. Cassese are both considered to be independent.   

From July 2006 to February 2008, Mr. Rhine served as Nanometrics Chief Strategy Officer, and from March 2007 to August 
2007, Mr. Rhine served as Nanometrics Chief Executive Officer. Prior to the 2019 Merger, the Nanometrics Board determined 

10 

 
 
 
 
that Mr. Rhine became an independent member of the Board effective February 2011 under the Nasdaq Listing Rules due to 
the passage of time subsequent to his previous management role with Nanometrics and this designation was confirmed under 
the NYSE Listing Rules by the Company Board.   

During 2020, none of the independent members of our Board was a party to any transactions, relationships or arrangements 
that were considered by the Board to impair his or her independence.  

 Oversight Of Risk 

One of the Board’s primary responsibilities is reviewing the Company’s strategic plans and objectives, including oversight of 
the principal risk exposures of the Company. In particular, the Board is responsible for monitoring and assessing strategic risk 
exposure, including a determination of the nature and level of risk appropriate for the Company. The Board does not have a 
standing risk management committee, but rather administers this oversight function directly through the Board as a whole, as 
well as through various Board standing committees that address risks inherent in their respective areas of oversight. The Audit 
Committee assists the Board in oversight and monitoring of the legal and financial risks facing the Company, management's 
approach to addressing these risks and strategies for risk mitigation, and serves as the contact point for employees to report 
corporate compliance issues.  On at least an annual basis, the Audit Committee reviews and discusses with management policies 
and  systems  pursuant  to  which  management  addresses  risk,  including  risks  associated  with  our  audit,  financial  reporting, 
internal  control,  disclosure  control,  cybersecurity,  legal  and  regulatory  compliance,  and  investment  policies.  Our  Audit 
Committee regularly reviews with our Board any issues that arise in connection with such topics and, in accordance with our 
Summary of Corporate Governance Guidelines, our full Board regularly engages in discussions of risk management to assess 
major risks facing our Company and review options for the mitigation of such risks. Our Compensation Committee periodically 
reviews  our  compensation  programs  to  ensure  that  they  do  not  encourage  excessive  risk-taking  and  our  Nominating  & 
Governance Committee oversees risks related to governance issues, such as succession planning.  As a result of the foregoing, 
we believe that our CEO, together with the Chairman of our Audit Committee and our full Board, provides effective oversight 
of the Company’s risk management function. 

 Board Committees 

The  Board  has  three  standing  committees  with  separate  chairs  -  the Audit,  Compensation,  and  Nominating  &  Governance 
Committees. Each of the Board committees is comprised solely of independent directors. The Audit Committee, Compensation 
Committee  and  Nominating  &  Governance  Committee  have  each  adopted  a  written  charter  that  sets  forth  the  specific 
responsibilities and qualifications for membership on the committee. The charters of each of these committees are available on 
our website at https://investors.ontoinnovation.com/governance/governance-documents/. 

In 2020, the composition of and number of meetings held by the Company’s Board committees were as follows: 

Committee Chairperson 

Committee Members 

Number of Meetings 
Held in 2020 

Christine A. Tsingos 

Audit Committee 

Jeffrey A. Aukerman 
Vita A. Cassese 
Christopher A. Seams1 
John R. Whitten1 
Robert G. Deuster2 

Nominating & Governance Committee 

Leo Berlinghieri 

Edward J. Brown, Jr. 

David B. Miller 
Bruce C. Rhine 
Christopher A. Seams 
Christine A. Tsingos1 
Compensation Committee 
Jeffrey A. Aukerman 
Leo Berlinghieri1 
Robert G. Deuster 
David B. Miller 

1 
2 

Committee member through the 2020 Annual Meeting 
Committee member effective as of the conclusion of the 2020 Annual Meeting 

11 

10 

9 

5 

 
 
 
 
 
 
 
 
 
Audit Committee 

The Audit Committee assists the Board in fulfilling its responsibilities for general oversight of the integrity of our financial 
statements, our accounting policies and procedures and our compliance with legal and regulatory requirements. Among its 
functions, the Audit Committee is responsible for: 

•   The appointment, compensation, retention and oversight of the Company’s independent registered public accounting 

firm; 

•   The approval of services performed by the Company’s independent registered public accounting firm; 

•   Reviewing the responsibilities, functions and performance of the Company’s internal audit function; 

•   Reviewing  the  scope  and  results  of  internal  audits  and  ongoing  assessments  of  the  Company’s  risk  management 

processes; 

•   Monitoring possible transactions between the Company and our officers and directors for any potential conflicts of 

interest; and 

•   Evaluating the Company’s system of internal control over financial reporting and disclosure controls and procedures.  

The report of our Audit Committee is found below under the caption “Audit Committee Report.” 

The Board has determined that each of the Audit Committee members meet the Audit Committee membership requirements 
set forth by the NYSE and the SEC, including that they be “independent.” Furthermore, the Board has determined that Ms. 
Tsingos qualifies as an “Audit Committee Financial Expert” as that term is defined under SEC rules.  

Compensation Committee 

The Compensation Committee is responsible for the establishment of the policies upon which compensation of and incentives 
for the Company’s executive officers will be based, the review and recommendation for approval by the independent members 
of  the  Board  of  the  compensation  of  the  Company’s  executive  officers,  and  the  administration  of  the  Company’s  equity 
compensation plans. 

In general, the Compensation Committee reviews and recommends for approval by the independent members of the Board the 
Company’s compensation policies and practices, including executive officer salary levels and variable compensation programs, 
both cash-based and equity-based, benefits, severance and equity-based and other compensation plans, policies and programs. 
With respect to the compensation of the Company’s CEO, the Compensation Committee reviews and recommends for approval 
by the independent members of the Board the various elements of the CEO’s compensation. With respect to other executive 
officers, including each of our named executive officers (“NEOs”), the Compensation Committee reviews the recommendations 
for compensation for such individuals presented to the Compensation Committee by the CEO and the reasons therefor and, in 
its discretion, may modify the compensation packages for any such individuals. The Compensation Committee has delegated 
to  the  Company’s  CEO  the  authority,  within  certain  parameters,  to  approve  the  grant of  restricted  stock  units  (“RSUs”)  to 
employees and consultants who are not executive officers for purposes of Section 16 of the Exchange Act and hold positions 
below the level of vice president.  All such grants are thereafter reviewed and ratified by the Compensation Committee. 

In  accordance  with  its  charter,  the  Compensation  Committee  may  form  and  delegate  its  authority  to  subcommittees  when 
appropriate. Further, the Compensation Committee has the authority to retain, and to terminate, any compensation consultants 
or other advisors to assist in the evaluation of director, CEO or executive officer compensation or other matters within the scope 
of the Compensation Committee’s responsibilities and is directly responsible for the appointment, compensation and oversight 
of such consultants and other advisors, including their fees and other retention terms. From time to time, the Compensation 
Committee engages the services of such outside compensation consultants to provide advice on compensation plans and issues 
related  to  the  Company’s  executive  officer  and  non-executive  officer  employees.  In  2020,  the  Compensation  Committee 
engaged  Compensia,  Inc.  (“Compensia”)  to  provide  such  assistance  to  the  Compensation  Committee.  The  Compensation 
Committee also has authority to obtain advice and assistance from internal or external legal, accounting and other advisors. 

Each current member of our Compensation Committee is an “outside” director as defined in Section 162(m) of the Internal 
Revenue  Code  of  1986,  as  amended (“IRC”),  and a  “non-employee” director  within  the  meaning  of  Rule  16b-3 under  the 
Exchange  Act.  The  Board  has  determined  that  each  of  the  Compensation  Committee  members  meet  the  Compensation 
Committee membership requirements set forth by the NYSE and the SEC, including that they be “independent.” 

For further discussion of the Compensation Committee and its processes and procedures, please refer to the “Compensation 
Program Objectives, Design and Practices” section in the Compensation Discussion and Analysis below.  The Compensation 

12 

 
 
Committee Report is included under the caption “Compensation Committee Report on Executive Officer Compensation” in 
this Proxy Statement. 

Nominating & Governance Committee 

The responsibilities of the Nominating & Governance Committee include: 

•  

Identifying prospective director nominees and recommending to the Board director nominees for the next annual 
meeting of stockholders and replacements of a director in the event of a vacancy on the Board; 

•   Recommending to the Board the appointment of directors to Board committees; 

•   Developing and recommending to the Board, and monitoring compliance with, the corporate governance principles 

and standards applicable to the Company; 

•   Managing the CEO selection process; and 

•   Together with our CEO, overseeing our Company’s management succession planning. 

The Nominating & Governance Committee also oversees the annual evaluation of the Board, the committees of the Board and 
the individual directors.  In 2020, the Nominating & Governance Committee engaged Spencer Stuart, a global executive search 
and leadership consulting firm, to provide assistance to the Nominating & Governance Committee in the evaluation of the 
Board.  Typically, this evaluation is performed during the first quarter by each of the directors and reflects an assessment of the 
Board,  the  Committees  of  the  Board  and  each  individual  director  in  the prior  year.   Among  other  topics,  the  evaluation  in 
general assesses: 

•   For both the Board and the committees: 

◦   Their structure and composition; 
◦   The format and content of meetings; and 
◦   The effectiveness of the Board and the committees, as applicable. 

•   For each individual director: 

◦   Their performance and approach to their directorship; 
◦   Their understanding of their role as a director; 
◦   Their understanding of critical aspects of the Company’s business, products and strategy; and 
◦   Their skills, experience and ongoing training. 

In addition, the Board reviews the issues faced during the past year, assesses its response and makes determinations whether 
additional resources or approaches might be applied to further optimize the handling of the issues.  The goal of the evaluation 
is  to  identify  and  address  any  performance  issues  at  the  Board,  committee  or  individual  level,  should  they  exist,  identify 
potential gaps in the boardroom and to assure the maintenance of an appropriate mix of director skills and qualifications.  Upon 
completion of the evaluation, the Nominating & Governance Committee provides feedback to the Board, the committees and 
the individual directors regarding the results of the evaluation and raises any issues that have been identified which may need 
to be addressed. 

The Nominating & Governance Committee utilizes a variety of methods for identifying and evaluating nominees and for 2021, 
utilized the services of Spencer Stuart to assist in this process. Its general policy is to assess the appropriate size and needs of 
the Board and whether any vacancies are expected due to retirement or otherwise. In addition, candidates for director nominees 
are typically reviewed in the context of the current composition of the Board, the operating requirements of the Company, the 
current needs of the Board, and the long-term interests of stockholders, with the goal of maintaining a balance of knowledge, 
experience  and  capability.  In  the  event  those  vacancies  are  anticipated,  or  otherwise  arise,  the  Nominating  &  Governance 
Committee  will  consider  recommending  various  potential  candidates  to  fill  such  vacancies.  Candidates  may  come  to  the 
attention of the Nominating & Governance Committee through its current members, stockholders or other persons. 

The  Board  has  determined  that  each  of  the  Nominating  &  Governance  Committee  members  meets  the  Nominating  & 
Governance Committee membership requirements, including the independence requirements of the NYSE. 

Other Committees 

Our Board may from time to time establish other special or standing committees to facilitate the management of the Company 
or to discharge specific duties delegated to the committee by the full Board. 

13 

 
 
 
 
 Compensation Committee Interlocks And Insider Participation 

In 2020, no member serving on the Compensation Committee (Edward J Brown, Jr., Jeffrey A. Aukerman, Leo Berlinghieri, 
Robert G. Deuster, David B. Miller) at any time during the year had any form of interlocking relationship as described in Item 
407(e)(4) of Regulation S-K with the Company.  Further, no member of the Compensation Committee as currently constituted 
in 2021 (Edward J Brown, Jr., Jeffrey A. Aukerman, David B. Miller) has any form of interlocking relationship as described in 
Item 407(e)(4) of Regulation S-K as of the date of this proxy statement. 

 Board Membership Criteria And Nominee Identification 

The Nominating & Governance Committee of the Board determines the required selection criteria and qualifications of director 
nominees based upon the needs of the Company at the time nominees are considered. While the Nominating & Governance 
Committee has no specific minimum qualifications for director candidates, persons considered for nomination to the Board  
must demonstrate the following qualifications to be recommended by the Nominating & Governance Committee for election: 

•   The  candidate  must  exhibit  proven  leadership  capabilities,  high  integrity  and  experience  with  a  high  level  of 

responsibilities within his or her chosen field; 

•   The  candidate  must  possess  the  ability  to  apply  good  business  judgment  and  be  of  sound  mind  and  high  moral 

character; 

•   The candidate must have no personal or financial interest that would conflict or appear to conflict with the interests 

of the Company; 

•   The candidate must be in a position to properly exercise his or her duties of loyalty and be willing and able to commit 

the necessary time for Board and committee service; and 

•   The candidate must have the ability to grasp complex principles of business, finance, international transactions and 

semiconductor inspection, metrology, lithography and related software technologies. 

The Nominating & Governance Committee retains the right to modify these qualifications from time to time. 

The Nominating & Governance Committee has not adopted a formal diversity policy with regard to the selection of director 
nominees. Diversity is one of the factors that the Nominating & Governance Committee considers in identifying nominees for 
director. In selecting director nominees, the Nominating & Governance Committee considers, among other factors: 

•   The competencies and skills that the candidate possesses and the candidate’s areas of qualification and expertise that 
would enhance the composition of the Board and further its ability to offer advice and guidance to management; 

•   How  the  candidate  would  contribute  to  the  Board’s  overall  balance  of  expertise,  perspectives,  backgrounds  and 

experiences in substantive matters pertaining to the Company’s business; and 

•   The candidate’s demonstrated excellence in his or her field and commitment to rigorously representing the long-term 

interests of the Company’s stockholders. 

In its identification of director nominees, the Nominating & Governance Committee will consider how the candidate would 
contribute to the Board’s overall balance of diversity of expertise, perspectives, backgrounds and experiences in substantive 
matters pertaining to the Company’s business. When current Board members are considered for nomination for reelection, the 
Nominating & Governance Committee also takes into consideration their prior contributions to and performance on the Board 
and their record of attendance. 

The  Nominating  &  Governance  Committee  will  consider  the  above  criteria  for  nominees  identified  by  the  Nominating  & 
Governance Committee itself, by stockholders, or through some other source. The Nominating & Governance Committee uses 
the same process for evaluating all nominees, regardless of the original source of nomination. The Nominating & Governance 
Committee  may  use  the  services  of  a  third-party  search  firm  to  assist  in  the  identification  or  evaluation  of  Board  member 
candidates. 

 Consideration Of Director Nominees 

The  Nominating  &  Governance  Committee  has  a  formal  policy  with  regard  to  consideration  of  director  candidates 
recommended by the Company’s stockholders, the Director Candidate Policy, which may be found on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

14 

 
 
 
In accordance with the policy, the Nominating & Governance Committee will consider recommendations for candidates to the 
Board from stockholders of the Company holding no less than 1% of the Company’s securities for at least twelve (12) months 
prior to the date of the submission of the recommendation. Stockholders wishing to recommend persons for consideration by 
the Nominating & Governance Committee as nominees for election to the Company’s Board can do so by writing to the Office 
of the General Counsel of the Company at its principal executive offices giving: 

•   Candidate’s name, age, business address and residence address; 

•   Candidate’s  detailed  biographical  data  and  qualifications  including  his/her  principal  occupation  and  employment 

history; 

•   The class and number of shares of the Company which are beneficially owned by the candidate; 

•   The candidate’s written consent to being named as a nominee and to serving as a director, if elected; 

•  

Information regarding any relationship between the candidate and the Company in the last three (3) years; 

•   Any other information relating to the candidate that is required by law to be disclosed in solicitations of proxies for 

election of directors; 

•   The name and address of the recommending or nominating stockholder; 

•   The class and number of shares of the Company which are beneficially owned by the recommending or nominating 

stockholder; 

•   A description of all arrangements or understandings between such stockholder and each nominee and any other person 

or persons (naming such person or persons) relating to the nomination; and 

•   Any other information specified under Section 2.5 of the Company’s Bylaws.  

 Corporate Governance Guidelines 

Our Board adopted corporate governance guidelines, a copy of which is available on our website under “Corporate Governance 
Summary” at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

 Codes Of Ethics 

We have adopted a Code of Business Conduct and Ethics (applicable to all employees, executive officers and directors) and a 
Financial Information Integrity Policy (applicable to our financial officers, including our CEO and Chief Financial Officer 
(“CFO”)) that set forth principles to guide all employees, executive officers and directors and establish procedures for reporting 
any violations of these principles. Copies of the Code of Business Conduct and Ethics and the Financial Information Integrity 
Policy may be found on our website at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

or may be requested by writing to: 

Onto Innovation Inc. 
Attention: Investor Relations 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

The Company will disclose any amendment to the Code of Business Conduct and Ethics and any waiver of a provision thereof 
applicable to its officers or directors, including the name of the officer or director to whom the waiver was granted, on our 
website at www.ontoinnovation.com, on the Investors page. 

Corporate Social Responsibility 

Our  Company  recognizes  the  importance  of  environmental  and  social  responsibility  programs  in  the  advancement  of  our 
Company’s corporate mission and the delivering of value to our stakeholders.  Consistent with our established core values of 
Passion, Integrity, Collaboration and Results, we are committed to upholding the highest levels of integrity and are dedicated 
to  working  with  our  stockholders  to  drive  and  improve  our  environmental,  social  and  governance  (“ESG”)  initiatives  and 
outcomes across our Company. 

15 

 
 
 
Environmental:  Our  Company  strives  to  improve  our  operations  and  minimize  our  impact  on  the  environment.  Our 
commitment to sustainability requires a sound strategy and a broad portfolio of efforts. We realize that our strategy and efforts 
need to continuously improve in order for us to excel in an increasingly resource-constrained world.  To this end, our Company 
has endeavored to monitor and manage our environmental impact across our business.  We have established goals in order to 
minimize  adverse  effects  on  the  community,  protect  natural  resources  and  to  manage  our  energy  efficiency  and  impact  on 
greenhouse gas emissions, water conservation and waste reduction.  We also strive to protect the health and safety of our team 
members whether they are working at our offices, manufacturing facilities or in the field at our customer’s locations.  

Quality:  Our  Company  demands  excellence  in  our  quality  and  environmental  performance,  as  demonstrated  through  our 
product and process qualification commitments, which resulted in our ISO 9001 Quality Management certification. It is our 
intent that each of our employees be accountable for driving quality in all that they do and seek continual improvement in order 
to meet or exceed our customers’ needs and expectations. In addition, our products and solutions are designed to meet or exceed 
safety requirements and reflect energy efficiency features in order to confer benefits to our customers and the environment. We 
also produce our systems responsibly and offer tool trade-ins, refurbishments and technology upgrade programs in order to 
help assure that our customers receive the optimal value from our products with a potentially lower environmental impact.  

Social. It is our Company’s goal to provide a work environment that encourages a diverse and motivated workforce in order 
that employees may achieve their full potential. Our commitment is to ensure that our work environment reflects fair treatment 
and equal opportunity and is free from unlawful discrimination.  We seek the development of our talent, both from a personal 
and professional perspective, in order to assure that they are afforded the opportunity to advance their careers and personal 
well-being.  And during the COVID-19 pandemic, we have implemented numerous practices and policies to help ensure the 
continued health, safety, and well-being of our employees. 

We also believe in giving back to our community.  Our Company engages in service projects in our communities globally, 
established  a  charitable  giving  program  which  includes  corporate  matching  for  employee  donations  to  qualified  nonprofit 
organizations as well as engaged in mentoring of students looking to pursue science, technology, engineering and math, or 
“STEM,” careers. With the COVID-19 pandemic, we donated face masks and other items to our worldwide communities in 
order to help provide both short-term assistance and support the longer-term recovery. We believe that these efforts help to 
advance the involvement of our employees and our Company in the various communities in which we operate and hopefully 
make a difference.  

Governance. Our Company is committed to ethical and sustainable business practices.  Our Code of Busines Conduct and 
Ethics underpins and guides these efforts. As ESG goals and objectives are proposed, they are reviewed and set by the ESG 
management team, who then measures the progress made toward achieving such goals on a quarterly basis.  In addition, our 
ESG management team meets periodically with the Board to appraise it of the ESG strategy, ensure alignment on plans and 
goals, and report on the ongoing progress toward these goals.  

We  encourage  you  to  review  our  2020  Interim  Corporate  Social  Responsibility  Report  and  2020 Annual  Corporate  Social 
Responsibility Report (located on our website at https://ontoinnovation.com/company/corporate-social-responsibility) for more 
detailed  information  regarding  our  ESG  initiatives.  Nothing  on  our  website,  including  our  Corporate  Social  Responsibility 
Reports or sections thereof, is deemed incorporated by reference into this proxy statement or other filings with the SEC, and 
the information contained on our website is not part of this document. 

Related Person Transactions Policy 

There have been no “related person transactions” since the beginning of 2020 to present, nor are there any currently proposed 
“related person transactions,” involving any director, director nominee or executive officer of the Company, any known 5% 
stockholder of the Company or any immediate family member of any of the foregoing persons (which are referred to together 
as “related persons”). A “related person transaction” generally means a transaction involving more than $120,000 in which the 
Company (including any of its subsidiaries) is a participant and in which a related person has a direct or indirect material 
interest.  

The Board has adopted policies addressing the Company’s procedures with respect to the review, approval and ratification of 
“related person transactions” that are required to be disclosed pursuant to Item 404(a) of Regulation S-K. Our related person 
practices and policies ensure that our directors, officers and employees are proactively screened from any conflicts of interests 
interfering with their obligations to the Company. Our policies are included in our corporate governance documents, including 
our Code of Business Conduct and Ethics, the Audit Committee Charter and Summary of Corporate Governance Policies, each 
of which is available on the Investors section of our website located at: 

https://investors.ontoinnovation.com/governance/governance-documents/ 

16 

 
•   Pursuant to our Code of Business Conduct and Ethics, our directors, officers and employees are required to avoid any 
actual  or  apparent  conflicts  of  interest  (other  than  conflicts  of  interest  that  have  received  appropriate  approval  as 
described below), which includes taking actions or having interests that may interfere with the objective or efficient 
performance of such person’s duties to the Company or that may result in such person receiving improper personal 
benefits as a result of their position with the Company.  

•   Pursuant to our Summary of Corporate Governance Policies, if a director becomes involved in any activity or interest 
that may result in an actual or potential conflict (or the appearance of a conflict) with the interests of the Company, 
that  director  is  required  to disclose  such  information  promptly  to  the  Board,  which  will  determine  an  appropriate 
resolution  on  a  case-by-case basis. This  policy  further reflects  that  all  directors  must  recuse  themselves  from  any 
discussion or decision affecting their personal, business or professional interests. Similarly, our Board will determine 
the appropriate resolution of any actual or potential conflict of interest involving our CEO and our CEO will determine 
the appropriate resolution of any conflict-of-interest issue involving any other officer of the Company. When necessary 
and appropriate, resolution of such issues may require consideration of the matter by the Audit Committee.  

Pursuant  to  both  the  Board’s  Summary  of  Corporate  Governance  Policies  and  the  Audit  Committee  Charter,  the  Audit 
Committee, which consists entirely of independent directors, will review any proposed transaction in which the Company or 
its subsidiaries are to participate if the amount involved in the transaction exceeds $120,000 and we are aware that any related 
person  may  have  a  direct  or  indirect  material  interest  in  the  transaction. The Audit  Committee  will  consider  the  facts  and 
circumstances and will approve or ratify a proposed transaction if the Audit Committee considers it appropriate and believes 
that such transaction will serve the long-term interests of our stockholders. The Compensation Committee of the Board reviews 
and recommends to the Board for approval compensation decisions for Board members and our executive officers (and such 
other employees of the Company as directed by the Board) pursuant to the Compensation Committee Charter. 

Communications With The Board Of Directors 

We  have  a  formal  policy  regarding  communications  with  the  Board,  our  Stockholder  &  Interested  Party  Communications 
Policy, which is found on our website at https://investors.ontoinnovation.com/governance/governance-documents/. 

Stockholders may communicate with the Board, any of the Company’s Board committees (Audit, Compensation or Nominating 
& Governance) or any of the Company’s directors by writing to: 

Onto Innovation Inc. 
Office of the General Counsel 
550 Clark Drive 
Budd Lake, New Jersey 07828 

and  such  communications  will  be  forwarded  to  the  intended  recipient(s)  to  the  extent  appropriate.  Prior  to  forwarding  any 
communication, the General Counsel will review it and, in his or her discretion, will not forward a communication deemed to 
be of a commercial nature or otherwise inappropriate. 

17 

 
 
PROPOSAL 1 

ELECTION OF DIRECTORS 

 Nominees 

The Board currently has nine (9) members.  Effective as of the conclusion of the 2021 Annual Meeting of Stockholders, the 
authorized number of directors for the Board shall be reduced to seven (7) members. All current directors are standing for 
election at the Annual Meeting with the exception of Jeffrey A. Aukerman and Vita A. Cassese.  

The Company’s Amended and Restated Certificate of Incorporation provides that at each annual meeting of stockholders, each 
director of the Company shall be elected to hold office, and shall serve, until the expiration of the term for which he or she is 
elected and until his or her successor is duly elected and qualified or until his or her death, resignation, or removal; except that 
if any such election shall not be so held, such election shall take place at a stockholders' meeting called and held in accordance 
with the DGCL. 

Based on the recommendation of the Nominating & Governance Committee, the seven (7) director nominees approved by the 
Board for inclusion in this proxy statement are: 

Leo Berlinghieri 

Edward J. Brown, Jr. 

David B. Miller  Michael P. Plisinski 

Bruce C. Rhine 

Christopher A. Seams 

Christine A. Tsingos 

Each  nominee  is  currently  serving  as  a  director  of  Onto  Innovation.  In  making  its  recommendations,  the  Nominating  & 
Governance  Committee  considered  a  number  of  factors,  including  its  criteria  for  Board  membership,  which  include  the 
qualifications that must be possessed by a director candidate in order to be nominated for a position on our Board. Each nominee 
has indicated that he or she will serve if elected. Unless otherwise instructed, the proxy holders will vote the proxies received 
by them for the Company’s seven (7) nominees.  In the event that any nominee of the Company becomes unable or unavailable 
to serve as a director at the time of the Annual Meeting (which we do not anticipate), the proxy holders will vote the proxies 
for any substitute nominee who is designated by the current Board to fill the vacancy.  Alternatively, the Board, in its discretion, 
may elect to reduce the number of directors serving on the Board.  We do not have any reason to believe that any of the nominees 
will be unable or will decline to serve as a director. 

 Board Composition And Refreshment 

A priority of the Nominating & Governance Committee and the Board as a whole is making certain that the composition of the 
Board  reflects  the  desired  professional  experience,  skills  and  backgrounds  in  order  to  present  an  array  of  viewpoints  and 
perspectives, help develop and execute strategy for the future and effectively represent the long-term interests of stockholders. 
Further, the Board recognizes the importance of Board refreshment in order to continue to achieve an appropriate balance of 
tenure, turnover, diversity and skills on the Board. 

 Vote Required 

Pursuant to the Company’s Bylaws, our directors are elected by the affirmative vote of the majority of the votes cast (provided, 
however, that if the number of nominees exceeds the number of directors to be elected, directors will be elected by a plurality 
voting standard). In order for a director in an uncontested election to be elected, the number of votes cast “for” his/her election 
must exceed the number of votes cast “against” his/her election (with “abstentions” and “broker non-votes” not counted as a 
vote cast either “for” or “against” that director’s election). If a nominee who is an incumbent director in an uncontested election 
receives a greater number of “Withhold” votes for election than “For” votes in an uncontested election and is not elected, our 
Summary of Corporate Governance Policies provides that such director must promptly tender a resignation to the Board. Our 
Nominating & Governance Committee would then make a recommendation to the Board on whether to accept or reject the 
tendered resignation, or whether other action should be taken. Within ninety (90) days after the date of the certification of the 
election results, our Board will act on any such tendered resignation and publicly disclose (in a press release, a filing with the 
SEC or other broadly disseminated means of communication) its decision regarding the tendered resignation and the rationale 
behind the decision. 

18 

 
 
 
 
 
 
 
 
 
 Information About The Nominees And Continuing Directors 

Our Board and its Nominating & Governance Committee believe that all of the directors and nominees are highly qualified and 
have demonstrated leadership skills and have experience and judgment in areas that are relevant to our business. We believe 
that their ability to challenge and stimulate management and their dedication to the affairs of the Company collectively serve 
the interests of the Company and its stockholders. 

The seven (7) nominees for director are set forth below. All information is as of the record date. 

  Position 

Name 
Nominee Directors: 
Leo Berlinghieri 
Edward J. Brown, Jr. 
Michael P. Plisinski 
David B. Miller 
Bruce C. Rhine 
Christopher A. Seams 
Christine A. Tsingos 
(1)  Board Tenure includes time served on the Rudolph Board of Directors or the Nanometrics Board, as applicable, prior to the Merger 

  Former Chief Executive Officer and President, MKS Instruments, Inc.     
  Former CEO, Cymer Light Source 
  Chief Executive Officer, Onto Innovation Inc. 
  Former President, DuPont Electronics & Communications 
  Former CEO, Nanometrics Incorporated 
  Former CEO, Deca Technologies 
  Former Executive Vice President and CFO, Bio-Rad Laboratories 

12.50 years 
8.08 years 
5.33 years 
5.67 years 
14.50 years 
5.58 years 
6.83 years 

Board Tenure(1) 

Date. 

Except as discussed below, each nominee and each incumbent director has been engaged in the principal occupation set forth 
above  during  the  past  five  (5)  years. There  are  no  family  relationships  between  any  directors  or  executive  officers  of  the 
Company.    The  Nominating  &  Governance  Committee  thereafter  considered  the  professional  experience,  skills  and 
backgrounds of the nominees and recommended the nominees to the full Board. 

The following reflects additional information regarding the background and qualifications of our director nominees, including 
the experience and skills that support the Board’s determination that each director should serve on our Board. 

BOARD SKILLS MATRIX

RELEVANT SENIOR LEADERSHIP / CEO EXPERIENCE

HIGH LEVEL OF FINANCIAL EXPERIENCE

EXTENSIVE KNOWLEDGE OF COMPANY 
BUSINESS / INDUSTRY

INNOVATION / TECHNOLOGY EXPERIENCE

BROAD INTERNATIONAL EXPERIENCE

0

1

2

3

4

5

6

7

Number of Directors Reflecting Trait

Nominee Directors

19 

 
 
   
   
     
     
   
   
   
 
 
 
 
 
NOMINEES FOR DIRECTOR 

 Leo Berlinghieri 

Director Since: 

September 2008 

Age: 

67 

Independent Status: 

Independent Director 

Board Committee(s): 

Nominating & Governance (Chair) 

Other Boards Served: 

Unipower, LLC (2017-2019) 
MKS Instruments, Inc. (2005-2013) 
Massachusetts High Technology Council, Inc. (2006-2013) 

From July 2005 to December 2013, Mr. Berlinghieri served as Chief Executive Officer and President of MKS Instruments, 
Inc., a critical subsystem and instrument provider to the semiconductor industry. From April 2004 to July 2005, Mr. Berlinghieri 
served as President and Chief Operating Officer and prior to that served as Vice President and Chief Operating Officer from 
July 2003 to April 2004 for MKS Instruments, Inc. 

Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

•   Served for over eight (8) years as Chief Executive Officer and President of MKS Instruments, Inc. Additional 
prior experience as Vice President and Chief Operating Officer of the company, among other senior management 
roles. 

High Level of Financial Experience 

•   Substantial  financial  experience  gained  in  roles  as  Chief  Executive  Officer,  President  and Vice  President  and 

Chief Operating Officer with MKS Instruments, Inc. 

Broad International Exposure 

•   Gained  extensive  international  experience  in  various  roles  with  MKS  Instruments,  including  Chief  Executive 

Officer, Chief Operating Officer and Vice President of Global Sales and Service. 

Extensive Knowledge of Company Business/Industry 

•   Over thirty-three (33) years of experience in the semiconductor industry, including eight (8) years at the helm of 
MKS Instruments, Inc. a public corporation. Also served on the SEMI North America Advisory Board (NAAB) 
including as its chairman in 2009. 

Innovation/Technology Experience 

•   Broad array of technological experience with MKS Instruments, Inc., including roles in manufacturing, customer 

support, and sales all in addition to his roles as Chief Executive Officer and Chief Operating Officer. 

 Edward J. Brown, Jr. 

Director Since: 

February 2013 

Age: 

63 

Independent Status: 

Independent Director 

Board Committee(s): 

Compensation (Chair) 

Other Boards Served: 

Astrodyne TDI (2015-present) 

From May 2013 until September 2015, Mr. Brown was the Chief Executive Officer of Cymer Light Source, following the 
merger of Cymer, Inc. with ASML Holding Ltd., prior to which Mr. Brown served as President and Chief Operating Officer of 
Cymer, Inc. from September 2005 until May 2013. From 1984 to 2005, Mr. Brown was employed at Applied Materials, Inc., 
where he held numerous high-level management positions including group vice president and senior advisor to the president, 
vice president and general manager of the Intel business unit, as well as managing director heading up their largest product 
20 

 
 
 
 
 
 
 
 
 
division, Global Operations. Prior to Applied Materials Inc., Mr. Brown held key engineering positions at TRW Corporation 
and Burroughs Corporation.  Mr. Brown received a master’s degree in business administration from National University and a 
bachelor’s degree in industrial studies from San Diego State University.  

Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

•   Served  as  Chief  Executive  Officer  for  Cymer  Light  Source.    Further,  he  served  for  over  seven  (7)  years  as 
President and Chief Operating Officer of Cymer, Inc. as well as held various senior management positions with 
Applied Materials, Inc. and key engineering positions at TRW Corporation and Burroughs Corporation. 

High Level of Financial Experience 

•   Substantial financial experience gained as Chief Executive Officer of Cymer Light Source, as President and Chief 
Operating Officer of Cymer, Inc. as well as high-level management positions with Applied Materials, Inc., among 
others. 

Broad International Exposure 

•   Gained extensive international experience as Chief Executive Officer of Cymer Light Source, President and Chief 
Operating Officer of Cymer, Inc. and Global Vice President of Worldwide Business Operations as well as other 
roles including vice president of Applied Material, Inc.’s largest product division, Global Operations. 

Extensive Knowledge of Company Business/Industry 

•   Over forty (40) years of employment experience within an array of fields in the semiconductor industry. Also 

served on the SEMI North America Advisory Board (NAAB). 

Innovation/Technology Experience 

•   Expansive scope of technological and innovative experience from over forty (40) years of semiconductor industry 

employment in key management, operations, development and engineering positions. 

David B. Miller 

Director Since: 

Age: 

July 2015 

64 

Independent Status: 

Independent Director 

Board Committee(s): 

Compensation, Nominating & Governance 

Other Boards Served: 

President, University of Virginia School of Engineering & 
Applied Science Foundation (since 2011) 
Merrimac Industries, Inc. (2002-2008) 
SEMI International (2011-2015) 
North Carolina Chamber of Commerce (2010-2015) 

Mr. Miller served as the Rudolph non-executive Chairman from August 2018 through the Merger Date.  From June 1981 to 
November  2015,  Mr.  Miller  served  in  various  positions,  most  recently  as  President,  with  DuPont  Electronics  & 
Communications, an electronic materials company.  Mr. Miller holds a B.S. in Electrical Engineering from the University of 
Virginia. 

Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

•   Served as President of DuPont Electronics & Communications. 

High Level of Financial Experience 

•   Substantial  financial  experience  gained  in  roles  with  DuPont  Electronics  &  Communications  including  as 
President of the company. Oversight of complex financial transactions, profit and loss responsibility and investor 
relations during prior operations and leadership roles with this company. 

21 

 
 
 
 
 
 
 
Broad International Exposure 

•   Served as President of DuPont Electronics & Communications, a global electronic materials company.  Served 
on several joint venture boards in the U.S. and Asia while with DuPont Electronics & Communications as well 
as on the board of SEMI International.  Resided in Tokyo, Japan for three (3) years. 

Extensive Knowledge of Company Business/Industry 

•   Forty  (40)  years  of  experience  within  the  electronics  industry  including  six  (6)  years  at  the  helm  of  DuPont 

Electronics & Communications, which in addition to other markets, served the semiconductor industry. 

Innovation/Technology Experience 

•   Significant  experience  and  leadership  roles  with  DuPont  Electronics  &  Communications,  overseeing  the 

company’s technology advancement, breadth of process expertise and ongoing innovation. 

Michael P. Plisinski 

Director Since: 

November 2015 

Age: 

51 

Independent Status: 

Non-Independent Director 

Board Committee(s): 

Other Boards Served: 

None 

None 

Mr. Plisinski has served as the Company’s Chief Executive Officer since the Merger Date and was previously Chief Executive 
Officer  of  Rudolph  beginning  in  November  2015.    Prior  to  his  appointment  as  Rudolph’s  CEO,  Mr.  Plisinski  served  as 
Rudolph’s Executive Vice President and Chief Operating Officer from October 2014 to November 2015 and as Vice President 
and  General  Manager,  Data Analysis  and  Review  Business  Unit  from  February  2006  when  Rudolph  merged  with August 
Technology  Corporation  (“August Technology”)  until  October  2014.  From  February  2004  to  February  2006,  Mr.  Plisinski 
served as August Technology’s Vice President of Engineering and, from July 2003 to February 2004, as its Director of Strategic 
Marketing for review and analysis products. Mr. Plisinski joined August Technology as part of the acquisition of Counterpoint 
Solutions, a supplier of optical review and automated metrology equipment to the semiconductor industry, where he was both 
sole founder and President from June 1999 to July 2003. Mr. Plisinski has a B.S. in Computer Science from the University of 
Massachusetts and has completed the Advanced Management Program from Harvard Business School. 

Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

•   Serving  as  Chief  Executive  Officer  of  Onto  Innovation  with  prior  experience  as  Chief  Executive  Officer  of 
Rudolph,  Chief  Operating  Officer  and  Vice  President  of  Rudolph,  General  Manager  of  the  Rudolph’s  Data 
Analysis and Review Business Unit, among other senior management positions. 

High Level of Financial Experience 

•   Substantial financial experience gained in roles as Chief Executive Officer of the Company and Rudolph and 
Chief Operating Officer and Vice President, General Manager of the Data Analysis and Review Business Unit of 
Rudolph. 

Broad International Exposure 

•   Extensive experience working with the Asian and European customers of the Company through the various roles 

held with Rudolph, August Technology and the Company. 

Extensive Knowledge of Company Business/Industry 

•   Over fifteen (15) years of dedicated experience with Rudolph and August Technology and an additional four (4) 
years as founder of an optical review and automated metrology start-up company, each serving the semiconductor 
industry. 

Innovation/Technology Experience 

•   Technological and innovative experience includes leadership roles in both engineering and software development 
while with Rudolph and August Technology.  Prior entrepreneurial experience in the founding of optical review 
and automated metrology equipment company, Counterpoint Solutions. 

22 

 
 
 
 
 Bruce C. Rhine 

Director Since: 

Age: 

July 2006 

63 

Independent Status: 

Independent Director 

Board Committee(s): 

Nominating & Governance, Audit 

Other Boards Served: 

Snap2Insights (since 2018) 

Shape.io (since 2015) 

Columbia Nutritional LLC (since 2014) 

Phoseon Technology, Inc. (since 2012) 

Jama Software (2008-2018) 

NEXX Systems (2002-2012) 

Nor-Cal Products, Inc. (2010-2017) 

Accent Optical Technologies Inc. (2000-2006) 

Mr. Rhine served as the Chairman of the Board of Nanometrics from August 2009 through the Merger Date. From July 2006 
to  February  2008,  Mr.  Rhine  served  as  Nanometrics’  Chief  Strategy  Officer  and  from  March  2007  to  August  2007,  as 
Nanometrics Chief Executive Officer. From 2000 to 2006, Mr. Rhine served as Chairman and Chief Executive Officer of Accent 
Optical Technologies, Inc. (acquired by Nanometrics in July 2006) and as its President from January 2003 to April 2005 and 
from  August  2000  to  September  2001.  Prior  to  2000  Mr.  Rhine  was  an  executive  at  Applied  Materials,  Lam  Research 
Corporation, Asyst Technologies and Air Products and Chemicals.  Mr. Rhine holds a B.S. degree in Chemical Engineering 
and an M.B.A. in Finance from The Pennsylvania State University. Mr.  Rhine is a member of the National Association of 
Corporate Directors (“NACD”) and the American College of Corporate Directors (“ACCD”). 

Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

•   Served as Chief Executive Officer of Nanometrics and of Accent Optical Technologies with additional prior senior 
leadership experience with Applied Materials, Lam Research Corporation, Asyst Technologies and Air Products 
and Chemicals. 

High Level of Financial Experience 

•   Substantial financial experience gained in roles as Chief Executive Officer of Nanometrics and of Accent Optical 

Technologies as well as with executive roles held in several semiconductor industry companies. 

Broad International Exposure 

•   Gained  extensive  international  experience  as  Chief  Executive  Officer  of  Nanometrics  and  of Accent  Optical 

Technology as well as through array of other executive roles within the semiconductor industry. 

Extensive Knowledge of Company Business/Industry 

•   Over thirty-seven (37) years of dedicated experience within the semiconductor industry. 

Innovation/Technology Experience 

•   Broad and comprehensive array of technological experience with multiple companies within the semiconductor 

space including serving as the Chief Strategy Officer of Nanometrics. 

23 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 Christopher A. Seams 

Director Since: 

August 2015 

Age: 

58 

Independent Status: 

Independent Director 

Board Committee(s): 

Nominating & Governance 

Other Boards Served: 

Xperi Corporation (since 2016) 

Tessera Technologies, Inc. (2013-2016) 

Mr. Seams served as Chief Executive Officer of Deca Technologies from June 2013 to August 2016. Prior to Deca Technologies, 
Mr. Seams served as Executive Vice President of sales and marketing at Cypress Semiconductor and held various technical and 
operational management positions in its manufacturing, development and operations. Prior to joining Cypress in 1990, Mr. 
Seams worked in process development for Advanced Micro Devices and Philips Research Laboratories. Mr. Seams earned his 
bachelor’s degree in electrical engineering from Texas A&M University and his master’s degree in electrical and computer 
engineering from the University of Texas at Austin. Mr. Seams has a Professional Certificate in Advanced Computer Security 
from Stanford University and is a senior member of the Institute of Electrical and Electronics Engineers. Mr. Seams is a member 
of the ACCD as well as a member and Certified Director of the NACD. 

Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

•   Served as Chief Executive Officer of Deca Technologies as well as in additional senior leadership roles within 

the semiconductor industry including with Cypress Semiconductor. 

High Level of Financial Experience 

•   Substantial financial experience gained in roles as Chief Executive Officer of Deca Technologies as well as with 

executive roles held in the semiconductor industry. 

Broad International Exposure 

•   Extensive international experience as Chief Executive Officer of Deca Technologies, Executive Vice President of 
sales and marketing at Cypress Semiconductor as well as through other management roles with both Cypress and 
other semiconductor companies with which he worked. 

Extensive Knowledge of Company Business/Industry 

•   Over thirty (30) years of dedicated experience within the semiconductor industry. 

Innovation/Technology Experience 

•   Technological  and  innovative  experience  gained  through  an  array  of  technical  and  operational  management 
positions  in  manufacturing,  development  and  operations  for  Cypress  Semiconductor  as  well  as  in  process 
development for Advanced Micro Devices and Philips Research Laboratories. 

 Christine A. Tsingos 

Director Since: 

May 2014 

Age: 

62 

Independent Status: 

Independent Director 

Board Committee(s): 

Audit (Chair) 

Other Boards Served: 

Envista Holdings Corporation (since September 2019) 

Varex Imaging Corporation (since February 2017) 

Ms. Tsingos served as the Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories from December 2002 
through May 2019. Prior to Bio-Rad, Ms. Tsingos held executive positions at Autodesk, The Cooper Companies, and Attest 
Systems. Ms. Tsingos earned her Bachelor of Arts in International Studies from the American University in Washington D.C. 
and  an  M.B.A  in  International  Business  from  the  George  Washington  University.  In  2010,  Ms.  Tsingos  was  awarded  the 
prestigious Bay Area CFO of the Year.  

24 

 
 
 
 
 
 
 
 
 
 
Specific Qualifications, Attributes, Skills and Experience 

Relevant Senior Leadership / CEO Experience 

• 

Served as Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories. 

High Level of Financial Experience 

•   Over thirty (30) years of financial and operational experience with a series of companies including sixteen (16) 

years of service as Chief Financial Officer of Bio-Rad Laboratories. 

Broad International Exposure 

•   Comprehensive international experience through service as Chief Financial Officer of Bio-Rad Laboratories. 

The Board unanimously recommends voting 
“FOR ALL” of the nominees set forth above. 

25 

 
 
 
 
 
 
 
 Compensation Of Directors 

Directors who are employees of the Company receive no compensation for their services as members of the Board. Director 
compensation  for  non-employee  members  of  the  Board  is  a  mix  of  cash  and  equity-based  compensation,  which  is  largely 
comprised  of  the  equity  component  to  align  the  interests  of  our  directors  with  the  Company’s  long-term  performance  and 
stockholder interests.  The components of the compensation for 2020 Board service of directors who are not employees of the 
Company are as follows: 

Board Compensation Element 

Annual Retainer 

Annual Equity Grant (in RSUs) 

Committee Chair Stipend 

    Audit 

    Compensation 

    Nominating & Governance 

Committee Member Stipend 

    Audit 

    Compensation 

    Nominating & Governance 

Board Chair Stipend 

Initial Equity Grant (in RSUs) 

Amount/Value 

$70,000  1 

$150,000  2 

$20,000  1 
$15,000  1 
$10,000  1 

$10,000  1 

$7,500  1 

$5,000  1 

$50,000  1 

$150,000  3 

1 

Paid subsequent to the director election results at the Annual Meeting of Stockholders. 

2  Awarded at the second quarter Board meeting in a number of shares calculated by dividing the listed amount by the 
closing stock price per share of Company Common Stock on the date of grant, rounded to the nearest 100 shares. 

3  Awarded as of the first Board meeting following election or appointment and calculated in the same manner as the 
annual equity grant above but prorated by the number of quarters between such first meeting and the date on which 
the next annual equity grant is scheduled to be awarded. 

Any initial equity grants and/or annual equity grants typically vest on the first anniversary of the grant date.  Equity awards 
granted to directors are granted under and subject to the terms of the Onto Innovation Inc. 2020 Stock Plan (the “2020 Stock 
Plan”). 

26 

 
 
  
  
  
  
  
   
 
 
 
 
   
 
 
 
  
  
 
 
For  the  fiscal  year  ended  December 26,  2020,  the  directors,  excluding  the  directors  who  are  employees,  received  total 
compensation indicated in the table below.  There were no option awards, non-equity incentive plan compensation, or pension 
and nonqualified deferred compensation earnings granted to such directors.  They did not earn any type of compensation during 
the year other than what is disclosed in the following table: 

Name 
Jeffrey A. Aukerman2 
Leo Berlinghieri 
Edward J. Brown, Jr. 
Vita A. Cassese2 
Robert G. Deuster 
David B. Miller 
Bruce C. Rhine 
Christopher A. Seams 
Timothy J. Stultz, Ph.D.3 
Christine A. Tsingos 
John R. Whitten3 

Fees Earned or 
Paid in Cash 
$113,750 
$111,875 
$85,000 
$106,250 
$87,500 
$108,750 
$75,000 
$125,000 
$0 
$90,000 
$26,250 

Stock 
Awards (1) 
$150,432 
$150,432 
$150,432 
$150,432 
$150,432 
$150,432 
$150,432 
$150,432 
$0 
$150,432 
$0 

All Other 
Compensation 
$0 
$0 
$0 
$0 
$0 
$0 
$0 
$0 
$0 
$0 
$0 

Total 
$264,182 
$262,307 
$235,432 
$256,682 
$237,932 
$259,182 
$225,432 
$275,432 
$0 
$240,432 
$26,250 

(1)  Represents the grant date fair value for each share-based compensation award granted during the year, calculated in accordance 
with FASB ASC Topic 718. The assumptions used in determining the grant date fair value of these awards are set forth in Note 9 
to our consolidated financial statements, which are included in our Annual Report on Form 10-K for the fiscal year ended December 
26, 2020 filed with the SEC. As of December 26, 2020, our directors had the following stock awards outstanding: Mr. Aukerman 
– 4,800 RSUs; Mr. Berlinghieri – 4,800 RSUs; Mr. Brown, Jr. – 4,800 RSUs, Ms. Cassese – 4,800 RSUs; Mr. Deuster – 4,800 
RSUs; Mr. Miller – 4,800 RSUs; Mr. Rhine – 4,800 RSUs; Mr. Seams – 4,800 RSUs; and Ms. Tsingos – 4,800 RSUs. 

(2)  Mr. Aukerman and Ms. Cassese are not standing for re-election at the Annual Meeting. 
(3)  Mr. Stultz and Mr. Whitten did not stand for re-election to the Board on May 12, 2020. 

 Stock Ownership/Retention Guidelines For Directors 

The Company has established guidelines related to stock ownership and retention for its non-employee directors. Currently, 
the guidelines require that each non-employee director of the Company own shares of Company Common Stock valued at a 
minimum of three (3) times the amount of the director’s annual cash retainer.  For a new director, the stock holding requirement 
is to be attained within five (5) years of his or her initial election or appointment to the Board. 

27 

 
 
  
  
  
  
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
ADVISORY VOTE ON EXECUTIVE OFFICER COMPENSATION 

PROPOSAL 2 

The Dodd-Frank Wall Street Reform and Consumer Protection Act of 2010, or the Dodd-Frank Act, enables our stockholders 
to vote to approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed in this 
proxy statement in accordance with SEC rules. Consistent with the recommendation of the Board and the preference of our 
stockholders as reflected in the non-binding advisory vote on the frequency of future advisory votes on named executive officer 
compensation held at the Nanometrics 2017 Annual Meeting of Stockholders, the Company currently holds an annual “say on 
pay” vote.  In accordance with this policy, this year we are requesting our stockholders to approve an advisory resolution on 
the Company’s executive officer compensation as reported in this Proxy Statement, and as required by Section 14A(a)(1) of 
the Exchange Act. 

Our executive officer compensation arrangements are designed to enhance stockholder value on an annual and long-term basis.  
These arrangements are consistent with our compensation philosophy and pay-for-performance principles and, as such, have 
been designed to provide competitive compensation packages that enable the Company to attract and retain talented executive 
officer officers, motivate executive officers to achieve the Company’s short- and long-term business strategies and objectives,  
align the interests of executive officers with those of stockholders, and are consistent with current market practices and good 
corporate governance principles.  Please read the Compensation Discussion and Analysis beginning on page 34 of this proxy 
statement and the tabular and additional narrative disclosures on executive officer compensation beginning on page 55 of this 
proxy statement for additional details about our executive officer compensation arrangements, including information about the 
fiscal year 2020 compensation of our named executive officers. 

We  are  asking  our  stockholders  to  indicate  their  support  for  our  compensation  arrangements  as  described  in  this  proxy 
statement. 

For the reasons discussed above, the Board recommends that stockholders vote in favor of the following resolution: 

“RESOLVED, that the Company’s stockholders APPROVE, on an advisory basis, the compensation paid to 
the Company’s named executive officers, as disclosed in the proxy statement for this meeting pursuant to Item 
402  of  Regulation  S-K,  including  the  Compensation  Discussion  and  Analysis,  compensation  tables  and 
narrative discussion and other related tables and disclosures.” 

Because your vote is advisory, it will not be binding upon or overrule any decisions of the Board, nor will it create any additional 
fiduciary duty on the part of the Board.  This advisory vote is not intended to address any specific item of compensation, but 
rather  the  overall  compensation  of  our  named  executive  officers  and  our  compensation  philosophy,  policies  and  practices 
described in this proxy statement, and does not seek to have the Board or Compensation Committee take any specific action. 
However, the Board and the Compensation Committee value the views expressed by our stockholders in their vote on this 
proposal and will take into account the outcome of the vote when considering executive officer compensation matters in the 
future. 

 Vote Required 

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to 
vote will be required to approve, on an advisory (non-binding) basis, the compensation of our named executive officers as 
disclosed in this proxy statement. 

The Board recommends a vote “FOR” the approval of the compensation of the 
named executive officers as disclosed in this proxy statement pursuant to Item 402 
of Regulation S-K as required by Section 14A(a)(1) of the Exchange Act. 

28 

 
 
 
 
 
PROPOSAL 3 

RATIFICATION OF APPOINTMENT OF INDEPENDENT 
REGISTERED PUBLIC ACCOUNTING FIRM 

Although ratification by stockholders is not required by law, the Board is submitting the Audit Committee’s selection of Ernst 
& Young LLP (“E&Y”) as the Company’s independent registered public accounting firm for fiscal year 2021 for ratification as 
a matter of good corporate governance and recommends that the stockholders vote for ratification of such appointment. In the 
event of a negative vote on such ratification, the Board will reconsider its selection. Even if the selection is ratified, the Audit 
Committee may appoint a new independent registered public accounting firm at any time during the year if the Audit Committee 
believes  that  such  a  change  would  be  in  the  best  interests  of  the  Company  and  its  stockholders.    E&Y  has  indicated  that 
representatives of E&Y, the independent registered public accounting firm presented herein, will be in attendance at the Annual 
Meeting.  Such  representatives  will  have  the  opportunity  to  make  a  statement,  if  they  desire  to  do  so,  and  to  respond  to 
appropriate questions. 

 Change In Independent Registered Public Accounting Firm 

Prior to the 2019 Merger, E&Y was the independent registered public accounting firm of Rudolph, and PricewaterhouseCoopers 
LLP (“PwC”) was the independent registered accounting firm of Nanometrics. 

As  previously  reported  on  our  Current  Report  on  Form 8-K  filed  with  the  SEC  on  November  13,  2019,  PwC  resigned  on 
November 11, 2019, and E&Y was engaged by the Company as its independent registered public accounting firm for the year 
ending December 31, 2019. The decision to change the independent registered accounting firm was approved by the Audit 
Committee. 

PwC’s reports on Nanometrics’ financial statements for the fiscal years ended December 29, 2018 and December 30, 2017 
contained no adverse opinion or disclaimer of opinion, and were not qualified or modified as to uncertainty, audit scope or 
accounting principle. 

During the fiscal years ended December 29, 2018 and December 30, 2017 and the subsequent interim period through November 
11, 2019, there have been no disagreements (as defined in Item 304(a)(1)(iv) of Regulation S-K and the related instructions) 
with PwC on any matter of accounting principles or practices, financial statement disclosure, or auditing scope or procedure, 
which disagreements, if not resolved to the satisfaction of PwC, would have caused PwC to make reference thereto in their 
reports on the financial statements for such years. 

During the fiscal years ended December 29, 2018 and December 30, 2017 and subsequent interim period through November 
11, 2019, there have been no reportable events (as defined in S-K 304(a)(1)(v)), except that as disclosed in the Company's 
Quarterly Report on Form 10-Q for the quarterly periods ended April 1, 2017, July 1, 2017 and September 30, 2017 (the “2017 
Form 10-Qs”), management concluded that a material weakness existed related to ineffective controls over the existence of 
inventories  subject  to  the  cycle  count  programs.   The  material  weakness  was  remediated  and  described  in  Item  9A  of  the 
Company’s annual report on Form 10-K for the year ended December 30, 2017. 

The Company requested that PwC furnish it with a letter addressed to the SEC stating whether or not it agrees with the above 
statements.  A copy of the letter from PwC, dated November 12, 2019, is filed as Exhibit 16.1 to such Form 8-K. 

During  the  fiscal  years  ended  December  29,  2018  and  December  30,  2017,  and  the  subsequent  interim  periods  through 
November 11, 2019, neither Onto Innovation nor anyone on its behalf consulted with E&Y, regarding either: (i) the application 
of accounting principles to a specific transaction, completed or proposed, or the type of audit opinion that might be rendered 
on Onto Innovation’s financial statements, and neither a written report nor oral advice was provided to Onto Innovation that 
EY concluded was an important factor considered by Onto Innovation in reaching a decision as to any accounting, auditing or 
financial reporting issue, or (ii) any matter that was either the subject of a disagreement (as defined in Item 304(a)(1)(iv) of 
Regulation S-K and the related instructions) or a reportable event (as described in Item 304(a)(1)(v) of Regulation S-K). 

 Independent Registered Public Accounting Firm Selection Process 

E&Y served as Rudolph’s independent registered public accounting firm since March 2008, was selected as the accounting 
firm  for  the  Company  after  the  Merger  Date  and  served  in  this  role  during  fiscal  2020.  During  this  time,  the  firm  has 
demonstrated: 

29 

 
 
 
 
 
•   A high degree of independence and professionalism in their audit engagement with the Company; 

•   A solid record of partner and professional staff continuity; 

•   A knowledge of current and emerging accounting and auditing issues affecting the Company; 

•   A deep and ongoing understanding of the Company’s business model and industry; and 

•   A readiness to assist the Company and its audit committee in keeping up to date with the latest accounting and auditing 

pronouncements and their application to the Company’s business. 

In making its selection of an independent registered public accounting firm, the Audit Committee assesses, among other factors: 

•   The performance of the independent registered public accounting firm in the prior year; 

•   The anticipated needs of the Company and ability of the accounting firm to address them in the coming year; 

•   The proposed fees for the coming year; and 

•   The potential impact of changing auditors for the coming year. 

Ultimately, the selection of the independent registered public accounting firm is made with the best interest of the Company 
and its stockholders in mind. 

Factors Used To Assess Independent Registered Public Accounting Firm Quality 

Members of the Audit Committee have experience in dealing with audits of other public companies as well as experience with 
other  accounting  firms. After  the  Merger  Date,  the Audit  Committee’s  basis  for  the  selection  of  E&Y  as  the  Company’s 
independent  registered  public  accounting  firm  included,  among  other  considerations,  familiarity  of  Rudolph’s  accounting 
practices  as  the  accounting  acquirer  in  the  2019  Merger,  E&Y’s  breadth  of  services  and  international  footprint  as  well  as 
expense considerations. On an ongoing basis, E&Y has been responsive, reliable and professional in their dealings with the 
Audit Committee and has appropriately assisted the Audit Committee in its oversight of the Company’s financial processes and 
financial statements.  In addition, E&Y makes available to the Company specialists within their firm to assist in the audit when 
consultation  on  specific  and  unique  issues  arise. These  processes  appear  to  be  effective  in  assisting  E&Y  with  their  audit 
engagement. 

As a part of the Audit Committee’s review of E&Y’s qualifications, E&Y provides the Company with the firm-wide comments 
from the Public Company Accounting Oversight Board (PCAOB) regarding PCAOB’s examinations of E&Y for the prior year. 
E&Y also updates the Company with the quality improvements that the firm has made as a result of the PCAOB comments as 
well as other changes to their quality and risk assessment processes. 

Audit Committee’s Involvement In The Lead Partner Selection 

In keeping with their independence policy, E&Y employs a regular schedule of rotation of the both the lead engagement partner 
(“Lead Partner”) and the support staff. This rotation provides for sufficient overlap of the new Lead Partner with the outgoing 
Lead Partner. This process allows for the members of the Audit Committee and the Company management to become familiar 
with the new Lead Partner and new staff and to introduce them to the Company’s business.  Prior to the new Lead Partner’s 
full engagement, the Audit Committee and Company management meet with E&Y to review and offer feedback on the industry 
experience, financial acumen and anticipated fit of the new Lead Partner with the Company. 

Policy On Audit Committee Pre-Approval Of Audit And Permissible Non-Audit Services Of Independent Registered 
Public Accounting Firm 

Pursuant to our Audit Committee charter, our Audit Committee must pre-approve all audit and permissible non-audit services 
provided by the Company’s independent registered public accounting firm. These services may include audit services, audit-
related  services,  tax  and other  services.  Pre-approval  is  generally  provided  for up  to  one  (1) year,  and  any  pre-approval  is 
detailed  as  to  the  particular  service  or  category  of  services  and  is  generally  subject  to  a  specific  budget. The  independent 
registered public accounting firm and management are required to periodically report to the Audit Committee regarding the 
extent of services provided by the independent registered public accounting firm in accordance with this pre-approval and the 
fees for the services performed to date. The Audit Committee may also pre-approve particular services on a case-by-case basis. 
During 2020, all services provided by Ernst & Young LLP to the Company were pre-approved by the Audit Committee in 

30 

 
 
 
 
accordance with this policy, and the Audit Committee has concluded that the provision of these services is compatible with the 
accountants’ independence. 

 Audit and Non-Audit Fees 

The following table sets forth the fees billed for the fiscal year ended December 26, 2020 and the fiscal year ended December 
31, 2019 by the Company’s independent registered public accounting firm, Ernst & Young LLP, for 2019, and Nanometrics’ 
independent registered public accounting firm, PricewaterhouseCoopers LLP (“PwC”), prior to the 2019 Merger. 

Fees 

Audit 
Audit Related 
Tax 
All Other 
Total 

E&Y 
2020 
$1,908,000 
$39,000 
$44,000 
$62,000 
$2,053,000 

E&Y 
2019 
$1,006,202 
- 
$43,770 
$2,000 
$1,051,972 

PwC 
2019 

$900,800   
$83,755   
$114,000   
$2,700   
$1,101,255   

Audit Fees 

Audit  fees  for  the  fiscal  year  ended  December  26,  2020  were  for  the  audit  of  the  Company’s  annual  financial  statements 
including  management’s  assessment  of  internal  controls  over  financial  reporting,  the  review  of  the  Company’s  quarterly 
financial statements and statutory and regulatory audits, consents and other services. These fees may include services that are 
normally provided by the independent registered public accounting firm in connection with regulatory filings or engagements 
including any comfort letters and consents for financings and filings made with the SEC.  

Audit fees for the year ended December 31, 2019 were for the aggregate fees billed for professional services rendered to the 
Company  subsequent  to  the  2019  Merger  and  Nanometrics  prior  to  the  2019  Merger  for  the  audit  of  the  annual  financial 
statements and a review of financial statements included in the quarterly reports on Form 10-Q.   

Audit Related Fees 

Audit related fees for the fiscal year ended December 26, 2020 were for assurance and related services that are reasonably 
related to the performance of the audit or review of the Company’s annual financial statements and are not reported under 
“Audit Fees,” and consisted primarily of fees for employee benefit plan audits.   

Audit  related  fees  paid  to  PwC  for  the  fiscal  year  ended  December  31,  2019  were  for  professional  services  rendered  to 
Nanometrics prior to the 2019 Merger that were reasonably related to the performance of the audit or review of Nanometrics’ 
financial statements. Audit related fees paid to E&Y for the fiscal year ended December 31, 2019 were for professional services 
rendered to Rudolph prior to the 2019 Merger and to the Company after the 2019 Merger that were reasonably related to the 
performance of the audit or review of Nanometrics’ financial statements. In both instances, this category includes fees related 
to  assistance  in  financial  due  diligence  related  to  the  2019  Merger  and  general  assistance  with  implementation  of  SEC 
requirements.  

Tax Fees 

Tax fees may include fees for tax compliance, tax planning and tax advice. Tax fees for the fiscal years ended December 26, 
2020 and December 31, 2019 were for tax advice.   

All Other Fees 

All other fees would consist of fees for products and services other than the services described above. For the fiscal year ended 
December 26, 2020, all other fees included payments for an assessment of key segregation of duties related considerations and 
risks  in  the  SAP  environment  after  the  hyper  care  period post  implementation,  as  well  as  payments  for  an  accounting  and 
auditing information tool. 

For the fiscal year ended December 31, 2019, all other fees included payments for an accounting and auditing information tool. 

31 

 
 
 
 
  
 
 
Negotiation of the annual independent registered public accounting firm fees is the responsibility of the Audit Committee with 
the support of the Company’s CFO.  All of the Ernst & Young LLP fees listed in the chart above for 2020 were pre-approved 
by the Audit Committee of the Company, which concluded that the provision of such services by Ernst & Young LLP was 
compatible with the maintenance of that firm’s independence in the conduct of its audit functions.  All of the Ernst & Young 
LLP fees listed in the chart above for 2019 were pre-approved by the Audit Committee of Rudolph prior to the 2019 Merger 
and, after the Merger Date, the Company, each of which concluded that the provision of such services by Ernst & Young LLP 
was  compatible  with  the  maintenance  of  that  firm’s  independence  in  the  conduct  of  its  audit  functions.  All  of  the 
PricewaterhouseCoopers LLP fees listed above were pre-approved by the Audit Committee of Nanometrics prior to the 2019 
Merger, each of which concluded that the provision of such services by PricewaterhouseCoopers LLP was compatible with the 
maintenance of that firm’s independence in the conduct of its audit functions. 

 Vote Required 

The affirmative vote, in person or by proxy, of a majority of the shares present or represented at the meeting and entitled to 
vote  will  be  required  to  ratify  the  appointment  of  Ernst  &  Young  LLP  as  the  Company’s  independent  registered  public 
accounting firm for the year ending January 1, 2022. 

The Company’s Board unanimously recommends voting “FOR” the 
ratification of the appointment of Ernst & Young LLP as the Company’s independent 
registered public accounting firm for the year ending January 1, 2022. 

32 

 
 
 
 
 
 
 
AUDIT COMMITTEE REPORT 

The following is the Audit Committee’s report submitted to the Board for the fiscal year ended December 26, 2020. 

As noted in the Audit Committee’s charter, management is responsible for the Company’s internal controls and the financial 
reporting process. The independent registered public accounting firm is responsible for performing an independent audit of the 
Company’s consolidated financial statements in accordance with the standards of the Public Company Accounting Oversight 
Board  (United  States)  and  for  issuing  a  report  thereon. Additionally,  the  independent  registered  public  accounting  firm  is 
responsible for performing an independent audit of the Company’s internal controls over financial reporting and for issuing a 
report thereon. The Committee’s responsibility is to monitor and oversee these processes.  

In this context, the Audit Committee of the Board has: 

•  

reviewed and discussed with management and with Ernst & Young LLP, the Company’s independent registered public 
accounting firm, together and separately, the Company’s audited consolidated financial statements contained in its 
Annual Report on Form 10-K for the fiscal year ended December 26, 2020; 

•   discussed with Ernst & Young LLP the matters required to be discussed by Statement on Auditing Standards No. 1301, 

Communications with Audit Committees; 

•  

received the written disclosures and the letter from Ernst & Young LLP required by applicable requirements of the 
Public  Company  Accounting  Oversight  Board  regarding  the  independent  registered  public  accounting  firm’s 
communications with the Audit Committee concerning independence, and has discussed with Ernst & Young LLP its 
independence; and 

•   discussed and reviewed with the Company’s manager - internal audit (“Mgr-IA”) and Ernst & Young LLP, with and 
without  management  present,  the  Company’s  work  in  complying  with  the  requirements  of  Section  404  under  the 
Sarbanes-Oxley Act of 2002 regarding internal controls over financial reporting. In connection therewith, the Audit 
Committee also discussed with the Mgr-IA, with and without other members of management present, management’s 
assessment  of  the  effectiveness  of  internal  controls  over  financial  reporting  as  of  December  26,  2020. The Audit 
Committee  also  discussed  Ernst  &  Young  LLP’s  audit  report  on  internal  controls  over  financial  reporting  as  of 
December 26, 2020 with management and Ernst & Young LLP.  

Based on the foregoing review and discussions, the Audit Committee recommended to the Board that the audited financial 
statements be included in the Company’s Annual Report on Form 10-K for the fiscal year ended December 26, 2020. 

 THE AUDIT COMMITTEE 

Christine A. Tsingos (Chairperson) 
Jeffrey A. Aukerman 
Vita A. Cassese 
Bruce C. Rhine 

33 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
EXECUTIVE OFFICER COMPENSATION 

COMPENSATION DISCUSSION AND ANALYSIS 

 Introduction 

This  Compensation  Discussion  and Analysis  describes  our  compensation  philosophy,  process,  plans  and  practices  for  our 
executive officers and contains a discussion of the material elements of compensation awarded to, earned by, or paid to the 
Company’s “Named Executive Officers” listed in the table below (“NEOs”), including: 

•  Our principal executive officer 
•  Our principal financial officer 
•  The next three (3) most highly compensated executive officers of the Company in 2020 

Based on the foregoing, the Company’s NEOs for 2020 are: 

Onto Innovation’s Named Executive Officers (NEOs) 

NEO Name 

Michael P. Plisinski 

CEO 

Position 

Steven R. Roth 

Sr. Vice President & CFO 

Rollin Kocher 

Kevin Heidrich 

Robert A. Koch 

Sr. Vice President, Field Operations 

Sr. Vice President, Marketing & Corporate Development 

Vice President & General Counsel 

EXECUTIVE SUMMARY 

 Our Business 

We are a global leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that 
include  unpatterned  wafer  quality,  3D  metrology  spanning  the  chip  from  nanometer-scale  transistors  to  micron-level  die-
interconnects,  macro  defect  inspection  of  wafers  and  packages,  metal  interconnect  composition,  factory  analytics,  and 
lithography for advanced semiconductor packaging. We also provide services relating to the maintenance and repair of our 
products, installation services and training. Semiconductor capital equipment is our primary served market. 

 2020 Financial Highlights 

On October 25, 2019, Nanometrics Incorporated and Rudolph Technologies, Inc. merged to form Onto Innovation Inc.  Onto 
Innovation accounts for the 2019 Merger as a reverse acquisition using the acquisition method of accounting in accordance 
with generally accepted accounting principles, with Rudolph being treated as the acquiring entity for accounting purposes. 
Because Rudolph is treated as the accounting acquirer in the 2019 Merger, the financial statements filed with the SEC in Onto 
Innovation’s Form 10-K include the financial results of Rudolph for all periods presented and the financial results of the former 

34 

 
 
Nanometrics for the periods on or after October 26, 2019.  Based on the foregoing, Onto Innovation reported revenue of $305.9 
million as of year-end 2019 as reflected in the table below. 

The following reflects some of our financial accomplishments in fiscal 2020 as compared to fiscal 2019: 

Results Of The 2020 Stockholder Vote On Executive Officer Compensation 

Our Board recognizes the fundamental interest our stockholders have in the compensation of our executive officers.  At the 
2020 Annual Meeting, 96.8% of stockholders present at the meeting voted in favor of the advisory vote on executive officer 
compensation. 

35 

 
 
 
 
COMPENSATION PROGRAM OBJECTIVES, DESIGN AND PRACTICES 

 Our Compensation Philosophy And Principles 

Rewarding continuous improvement in financial and operating results and the creation of stockholder value are key attributes 
of our compensation philosophy, which serves as the framework for the Company’s executive officer compensation program.  
The Compensation Committee of the Board of the Company (referred to as the “Compensation Committee”), acts on behalf of 
the Board and, by extension, on behalf of our stockholders, to establish, implement and continually monitor adherence to our 
compensation philosophy. Accordingly, the Compensation Committee has developed a set of core objectives and principles that 
it  has  used  to  develop  the  executive  officer  compensation  program.  The  specific  objectives  of  our  executive  officer 
compensation program are to: 

•   Attract, retain, and motivate executive officer talent; 

•   Align compensation with Company and individual performance; and 

•   Foster an ownership mentality that aligns our executive officers’ interests with stockholder interests. 

Consistent  with  the  foregoing,  the  Compensation  Committee  believes  that  the  most  effective  executive  officer  compensation 
program is one that is designed to reward the achievement of specific strategic and operating goals of the Company on both an 
annual and a long-term basis, and which aligns our executive officers’ interests with those of our stockholders.  The Compensation 
Committee evaluates both performance and compensation to ensure that the Company maintains its ability to attract and retain 
superior employees in key positions.  Based on that evaluation, the Compensation Committee designs the compensation provided 
to  key  employees  to  remain  competitive  with  the  compensation  paid  to  similarly  situated  executive  officers  at  competitor 
companies. The  Compensation Committee believes  executive officer compensation packages provided by the Company to its 
executive officers, including the NEOs, should include base salary, annual cash incentive opportunities, select perquisites and 
stock-based  compensation,  including  equity  incentive  opportunities  which  reward  performance  as  measured  against  pre-
established goals. 

The following principles support the objectives and design of the compensation program: 

•   The compensation program is designed to be fair and competitive, from an internal and external perspective, taking 

into account the role, unique qualifications and distinct responsibilities of each executive officer; 

•   A substantial portion of an executive officer’s compensation is designed to be at risk and linked to the achievement of 

both corporate and individual financial, management or other performance goals and changes in stockholder value; 

•   A retirement provision has been implemented which is designed to provide financial stability following employment 

but will not be the focal point of why executive officers choose to work for the Company; 

•   Select, limited perquisites and other executive officer benefits have been employed to serve a business purpose; and 

•   All compensation program elements taken as a whole are designed to help focus executive officers to achieve the 

Company’s financial and strategic goals while supporting our culture and core values. 

To  underscore  the  importance  of  “pay-for-performance”  in  our  compensation  philosophy  and  our  Company’s  culture,  the 
Compensation Committee has developed incentive arrangements based on performance standards which the Compensation 
Committee believes, at target achievement, will incentivize our executive officers to meet or exceed industry performance.  The 
incentive  component  of  the  Company’s  executive  officer  compensation  program,  also  referred  to  as  the  “Tier  I  Incentive 
Compensation  Plan”  or    the  “Tier  I  Plan”,  rewards  executive  officers  for  achieving  specific  corporate,  business  unit  and 
individual goals as well as strategic and operational measures depending on the executive officer involved. 

Our long-term incentive program includes grants of performance-based stock units (“PSUs”) which are earned based on the 
achievement  of  total  shareholder  return  (“TSR”)  performance  relative  to  the  top  30  companies  in  the  Philadelphia  Stock 
Exchange Semiconductor Index over a two and three-year performance period.   Our long-term incentive program also includes 
service-based RSUs, which vest in equal annual increments over time. All grants are currently made under Company’s 2020 
Stock Plan and shares earned and vested are subject to the Company’s stock ownership and retention guidelines. 

The Company strives to promote an ownership mentality among its key leadership, in part through the guidelines described 
below  under  the heading  “Stock  Ownership/Retention  Guidelines  for  Executive  Officers.” The  stock  ownership  guidelines 
applicable to our non-employee directors are discussed above under the heading “Stock Ownership/Retention Guidelines for 
Directors.” To that end, the CEO is required to maintain ownership of the Company’s Common Stock equal in value to at least 
three (3) times the CEO’s year-end base salary. As for the other NEOs, the stock ownership requirement reflects a minimum 
share ownership equal to the NEO’s current year-end base salary. In further support of this approach, our Board established an 
36 

 
anti-pledging and anti-hedging policy to ensure that personal interests relating to the stock holdings of officers and directors 
do not conflict with their duties to the Company. 

 NEO Compensation Elements 

Our executive officer compensation program is generally comprised of four parts, each intended to address different objectives: 
base  salary,  annual  cash  performance  incentives,  long-term  equity  incentives,  which  generally  are  in  the  form  of  both 
performance-based vesting and service-based vesting RSU grants, and limited perquisites. 

The table below highlights the foregoing key elements of our executive officer compensation structure for 2020. 

Element 

Form 

Description 

NEO Compensation Elements 

Base Salary 

Fixed Cash Compensation 

Competitive cash compensation that takes into consideration the 
scope and complexity of the role, individual qualifications, 
experience, and internal value to the Company. 

Annual Cash 
Incentive Plan 

Annual Performance-Based 
Cash Compensation 

Annual cash incentive contingent on meeting performance criteria 
related to corporate, business unit/department, and individual 
performance objectives. 

Long-Term Equity 
Incentive Program 

Performance- and Time-Based 
Restricted Stock 
Units 

A set percentage of PSUs that are earned based on TSR performance 
relative to a designated peer group, with remaining percentage of the 
RSUs vesting incrementally over a fixed period. 

Executive Officer 
Perquisites 

Income tax preparation 
Airline club membership 

Limited perquisites, consistent with market practice, that promote 
efficient use of executive officers’ time and attract and retain 
executive officer talent. 

The Compensation Committee aligns the Company’s Tier I Incentive Compensation Plan, which encompasses our annual cash 
incentive  plan  and  long-term  incentive  equity  program,  with  the  Company’s  performance  relative  to  pre-established 
performance goals  based on  the  Company’s  stated  financial  objectives,  historical performance,  and  anticipated  market  and 
economic conditions for the performance period. 

In  adopting  this  design,  the  Compensation  Committee  considered  a  number  of  parameters,  including  the  advice  of  its 
independent compensation consultant, comparable practices within the industry and the desire to achieve the goals underlying 
the compensation program. The Compensation Committee believes that as a result of this program the Company has been able 
to  attract,  retain  and  motivate  executive  officers  and  reward  the  achievement  of  strategic,  operational  and  financial  goals, 
thereby enhancing stockholder value. 

37 

 
 
 
 
 Our Compensation Practices 

The Compensation Committee has adopted the following practices and policies with respect to the Company’s executive officer 
compensation program: 

What We Do 

Committee 
Independence 

The Compensation Committee consists of independent directors and reserves time at each 
meeting to meet in executive session without management present. 

Independent 
Compensation 
Consultant 

The Compensation Committee has engaged its own independent compensation consultant and 
annually assesses the consultant’s performance, independence, and whether any potential 
conflicts of interest exist. 

Independent Legal 
Advisor 

The Compensation Committee may engage its own independent legal advisor specializing in 
corporate compensation issues, as necessary. 

CEO Goal Setting  
and Performance 
Evaluation 

Peer Group 

The Compensation Committee, with the input of the full Board, engages in formal goal setting 
and performance evaluation processes with the CEO. 

The Compensation Committee has established formal criteria for the selection of peer groups 
used as a competitive reference point with respect to executive officer and director compensation, 
program design and practices, and financial and stock performance. 

Stock Ownership 
Guidelines 

The Company maintains rigorous stock ownership guidelines, which apply to executive officers 
and directors, and serve as a risk-mitigating feature within our compensation structure. 

Double Trigger  
Change-in-Control 

Employment agreements have been entered into with senior executive officers, including the 
CEO, that contain change-in-control severance protection.  Executive officers are entitled to 
severance in the event of both a change-in-control of the Company and a qualifying termination 
of employment (“double trigger”). 

Clawback Policy 

The Company has adopted a policy that provides for the recovery or adjustment of amounts 
previously awarded or paid to an executive officer in the event that financial results or other 
performance measures on which the award or payment were determined are restated or adjusted. 

What We Do Not Do 

Hedging and Pledging  

The Company’s insider trading policy prohibits our directors, officers and employees from 
entering into hedging transactions related to our Common Stock.  Additionally, under the 
Company’s anti-pledging policy, non-employee directors and executive officers are prohibited 
from making any new pledges of Company securities as collateral for a loan, or otherwise 
making a new transfer of Company securities to a margin account. 

Tax Gross-Ups on 
Perquisites or  
Severance 

The Company does not provide any tax gross-up payments to cover personal income taxes on 
perquisites or severance benefits related to a change-in-control. 

38 

 
 
 
 
 
Role Of The Compensation Consultant 

During 2020, the Compensation Committee engaged Compensia, an independent executive officer compensation consulting 
firm,  to  provide  advice  on  the  Company’s  executive  officer  compensation  arrangements.  Compensia  does  not  provide  any 
services other than those related to compensation consulting and does not provide any services to Company management.  The 
Compensation  Committee  determined  that  Compensia  is  independent  within  the  meaning  of  the  Compensation  Committee 
Charter and the NYSE listing standards, and the work performed by Compensia does not raise any conflicts of interest. 

Compensia had advised the Compensation Committee of Nanometrics for several years prior to the 2019 Merger and is very 
familiar with the industry and geographies in which the Company operates. For 2020, the Compensation Committee requested 
that Compensia: 

•  

•  

evaluate the efficacy of the Company’s existing compensation strategy and practices in supporting and reinforcing the 
Company’s long-term strategic goals; 

assist  in  refining  the  Company’s  compensation  strategy  and  in  developing  and  implementing  an  executive  officer 
compensation program to execute that strategy; and 

•   provide  market  information  to  assist  the  Compensation  Committee  in  establishing  2020  executive  officer 

compensation. 

Similarly,  for  2021,  the  Compensation  Committee  also  engaged  Compensia  to  provide  further  advice  and  insight  on  the 
Company’s executive officer compensation arrangements consistent with what was established in 2020. 

 Role Of Executive Officers In Establishing Compensation 

With regard to compensation for executive officers other than the CEO, the Compensation Committee seeks input from the 
CEO with the support of the human resources department.  Each year, the CEO is responsible for establishing proposed personal 
and corporate objectives for the Company’s other executive officers, including the other NEOs. These objectives, subject to the 
approval of the Compensation Committee, are reviewed and agreed upon by the CEO with the executive officer. In addition, 
as part of the annual performance review of the Company’s executive officers, the CEO assesses the performance of his or her 
direct reports and recommends any merit increase to be proposed for each individual. These recommendations are compiled by 
the  CEO  into  executive  officer  compensation  plans  which  include  any  proposed  merit  increases,  each  executive  officer’s 
personal  and  corporate  objectives,  proposed  annual  incentive  award  opportunities  (expressed  as  a  percentage  of  their  base 
salary)  and  equity  grant  proposals,  and  are  submitted  to  the  Compensation  Committee  for  review  and  consideration  for 
approval. At the Compensation Committee meeting during which the executive officer compensation plans are reviewed, the 
CEO attends the initial session to present the proposed plans and to answer questions. Thereafter, the Compensation Committee 
meets without the CEO present to review, discuss and recommend for approval all executive officer compensation plans, subject 
to  any  modifications  made  by  the  Compensation  Committee.  The  Compensation  Committee  then  recommends  such 
compensation packages to the independent members of the Board for approval. 

 Role Of The Compensation Committee 

The Compensation Committee is charged with making all determinations regarding executive officer compensation subject to 
approval by the independent members of the Board. On an annual basis, the Compensation Committee evaluates the CEO’s 
performance  in  light  of  the  goals  and  objectives  established  for  measuring  his  or  her  performance  at  the  beginning  of  the 
previous  fiscal  year.  The  results  of  this  evaluation  guide  the  Compensation  Committee  in  setting  the  CEO’s  salary,  cash 
incentive  award  opportunity  and  equity  compensation. The CEO  does  not  participate  in  the  Compensation  Committee’s  or 
Board’s deliberations regarding his or her compensation. 

During 2020, the Compensation Committee of the Company met five (5) times.  In 2020, the Compensation Committee met 
regularly in executive session, without the presence of the CEO or any other Company executive officers, to review the relevant 
compensation matters. 

In early 2020, the Company’s CEO met with the Compensation Committee to present the proposed compensation plans for 
each of the Company’s executive officers as well as the proposed incentive award opportunities under the Company’s Tier I 
Incentive Compensation Plan.   As a result of this and the Compensation Committee’s own deliberations, the Compensation 

39 

 
Committee took a number of actions in 2020. These included reviewing and recommending for approval by the independent 
members of the Board: 

•  

•  

•  

•  

the annual compensation of the Company’s CEO for 2020; 

the annual compensation for each of the Company’s other executive officers for 2020; 

the Tier I Incentive Compensation Plan and cash incentive programs for non-executive officers 2020; and 

the service-based and performance-based equity incentive awards and related performance targets for the Company’s 
executive officers for 2020. 

In  reviewing  and  setting  the annual  compensation  for  each  executive  officer,  the  Compensation  Committee  considered  the 
amounts payable under each of the elements of their respective compensation plans, including base salary, annual cash incentive 
awards, equity grants and perquisites. The Compensation Committee took into consideration both the Company’s internal pay 
equity  as  well  as  the  competitive  environment  within  which  the  Company  operates.  In  each  instance,  the  Compensation 
Committee determined that the base salary and annual and long-term incentive award opportunities for the individual executive 
officers were at an acceptable level for 2020 and that the perquisites were appropriate for the related positions. 

In late 2020, the Compensation Committee reviewed the Company’s annual and long-term incentive programs for 2020.  At 
that time, measures were again selected that were determined to be consistent with advancing the interests of the Company’s 
stockholders and aligning and supporting the Company’s business strategy.  

Based on this review, in early 2021, the Compensation Committee met and took a number of actions. These included the review 
and recommendation for approval by the independent members of the Board of: 

•  

•  

•  

•  

the annual compensation of the Company’s CEO for 2021; 

the annual compensation for each of our other executive officers for 2021; 

the Tier I Incentive Compensation Plan and Employee Profit Sharing Plan for 2021; and 

the service-based and performance-based equity incentive awards and related performance targets for the Company’s 
executive officers for 2021. 

Peer Companies 

In order to meet its objective of maintaining competitive executive compensation packages, the Compensation Committee has 
engaged independent compensation consultants to advise on the development and evaluation of the Company’s compensation 
programs. For 2020 and 2021, the Compensation Committee engaged Compensia to provide peer group data and perform an 
assessment  of  compensation  levels  provided  to  executive  officers.    In  addition,  the  Compensation  Committee  obtains  and 
evaluates market compensation information using third-party and internal resources. The Compensation Committee reviews 
data related to compensation levels and programs of other similar companies prior to making its decisions, but only considers 
such information in a general manner in order to obtain a better understanding of the current compensation practices within our 
industry.   

In the Compensation Committee’s review of executive compensation for the 2020 fiscal year, the Compensation Committee 
considered  publicly  available  market  data  from  peer  company  proxy  disclosures  and  industry  compensation  surveys  for 
companies that typically include similarly sized semiconductor and semiconductor capital equipment or similar firms for each 
Company executive officer in a like or similar role.  

In late 2019, for compensation decisions for the Company’s 2020 fiscal year, Compensia recommended and the Compensation 
Committee approved the Company’s compensation peer group which took into consideration the following factors: 

•   Semiconductor capital equipment and other electronics and hardware technology companies; 

•   Revenue between approximately 0.5x and 2x the Company’s revenue run-rate; and 

•   Market cap between approximately 0.5x and 2x the Company’s market cap. 

40 

 
 
 
The Company’s compensation peer group for the 2020 review (which was used to make decisions regarding 2020 
compensation) consisted of the following companies. 

Companies Included In The Company’s Compensation Peer Group For 2020 

Advanced Energy Industries Inc. 

Inphi Corporation 

Photronics, Inc. 

Axcelis Technologies Inc. 

Knowles Electronics, LLC. 

Power Integrations, Inc. 

Brooks Automation, Inc. 

Lattice Semiconductor Corporation 

Veeco Instruments, Inc. 

Cabot Microelectronics Corporation  MACOM Technology Solutions Holdings, Inc.  Vishay Precision Group, Inc. 

Cohu, Inc. 

FormFactor, Inc. 

MaxLinear, Inc. 

Novanta Inc. 

Xperi Corporation 

The pay practices of the foregoing Company peer group were analyzed for base salary and annual and long-term incentives. 
Periodically, peer groups are used to evaluate other programs such as executive officer retirement, perquisites and severance 
policies.  Our  peer  group  data  is  supplemented  by  broader  technology  industry  data  from  compensation  surveys  to  further 
facilitate  the  evaluation  of  compensation  levels  and  design.  Compensation  levels  are  generally  developed  at  the  low  (25th 
percentile), middle (50th percentile) and high (75th percentile) end of the market for each pay element (base salary and short-
term and long-term incentives) and for total compensation. 

While the Compensation Committee considers market data for each pay element and in total, the Compensation Committee 
does not specifically target any particular market compensation level. Instead, the Compensation Committee uses its discretion 
in setting the compensation levels as appropriate. 

Consistent with the foregoing approach, in late 2020, Compensia re-assessed the peer group based on the established criteria 
and recommended some minor adjustments to the companies included in the compensation peer group.  Compensia proposed 
the  removal  of  Cabot  Microelectronics  Corporation  (now  CMC  Materials  Inc.),  Vishay  Precision  Group,  Inc.  and  Xperi 
Corporation  and  the  addition  of Ambarella  International  LP,  Ichor  Holdings  Ltd.,  Rambus  Incorporated  and  Ultra  Clean 
Holdings, Inc.  The Compensation Committee reviewed these adjustments and approved the compensation peer group for the 
2021 fiscal year, which consists of the following companies: 

Companies Included In The Company’s Compensation Peer Group For 2021 

Advanced Energy Industries Inc. 

Ichor Holdings Ltd. 

Ambarella International LP 

Inphi Corporation 

Novanta Inc. 

Photronics, Inc. 

Axcelis Technologies Inc. 

Knowles Electronics, LLC 

Power Integrations, Inc. 

Brooks Automation, Inc. 

Lattice Semiconductor Corporation 

Rambus Incorporated 

Cohu, Inc. 

FormFactor, Inc. 

MACOM Technology Solutions Holdings, Inc.  Ultra Clean Holdings, Inc. 

MaxLinear, Inc. 

Veeco Instruments, Inc. 

41 

 
 
 
 
 
 
 
ELEMENTS OF THE COMPANY’S 2020 AND 2021 COMPENSATION PLANS 

Compensation Program Design 

The Company’s executive officer compensation packages for the 2020 fiscal year were generally comprised of four parts, each 
intended  to  address  different  objectives:  base  salary,  annual  cash  performance  incentive  awards,  long-term  incentives  that 
generally are in the form of both performance-based stock units (“PSUs”) and service-vesting restricted stock units (“RSUs”), 
and  limited  perquisites.  Executive  officers  are  also  entitled  to  participate  in  benefit  programs  available  to  all  Company 
employees,  such  as  the  Onto  Innovation  Inc.  2020  Employee  Stock  Plan  (“ESPP”),  our  401(k)  plan,  including  matching 
contributions,  as  well  as  health  and  welfare  benefits. This  design  was  adopted  for  executive  officers  by  the  Compensation 
Committee  taking  into  consideration  a  number  of  parameters  including  the  independent compensation  consultant’s  advice, 
comparable  practices  within  the  industry  and  the  desire  to  achieve  the  goals  underlying  the  compensation  program.  The 
Compensation Committee believes that as a result of this program the Company can attract, retain, and motivate employees 
and  reward  the  achievement  of  strategic  operational  and  financial  goals,  thereby  enhancing  stockholder  value.    The 
Compensation Committee and Board further believe that each of the elements as well as the entire compensation package for 
Company  executive  officers  is  appropriate  for  the  Company  given  its  performance,  industry,  current  challenges  and 
environment. 

In developing this program, the Compensation Committee considered the four primary components, individually and in the 
aggregate, to assess their competitiveness and effectiveness in achieving the desired intent of the compensation program.  The 
Compensation Committee chose these components because it believed that each supports the realization of one or more of the 
Company’s compensation objectives, and that together they would be effective in achieving the overall objectives. Additionally, 
these components are commonly used for executive officers at companies within the Company’s peer group and, therefore, the 
Compensation  Committee  found  them  to  be  appropriate  in  its  talent  retention  strategy.  The  Compensation  Committee’s 
determination varied for each executive officer depending on a number of factors, including but not limited to, the scope of his 
or her responsibilities, leadership skills and values, and individual performance. The Compensation Committee did not apply 
formulas  or  assign  specific  mathematical  weights  to  any  of  these  factors,  but  rather  exercised  its  business  judgment  and 
discretion to make a subjective determination after considering all of these measures collectively. 

For 2021, the compensation program provided to the Company’s executive officers retains the same structure and elements as 
the 2020 program based on the foregoing rationale. 

Annually, the Compensation Committee will review the elements of the compensation package as well as the overall package 
afforded to the executive officers. At such time, the Compensation Committee, in its discretion, can recommend adjustments 
to the elements of the program to the independent members of the Board for review and approval. This review would typically 
be performed coincident with the evaluation of the individual executive officer’s performance in relation to their Tier I Incentive 
Compensation Plan goals, salary adjustment and equity grants, if any, as discussed below. 

Based on the objectives discussed in the foregoing section, the Compensation Committee seeks to structure our equity and cash 
incentive compensation program to motivate executive officers to achieve the business goals set by the Company and reward the 
executive officers for achieving such goals, which we believe aligns the financial incentives of our executive officers with the interests 
of our stockholders. The Compensation Committee primarily uses salary, perquisites and other executive officer benefits as a means 
for providing base compensation to executive officers commensurate with their knowledge and experience and for fulfilling their 
basic job responsibilities. 

In establishing these components of the executive officer compensation package, it is the Compensation Committee’s intention 
to set total executive officer compensation at a sufficient level to attract and retain a strong motivated leadership team, while 
remaining reasonable and in line with stockholder perception of overall fairness of executive officer compensation. 

Base salaries serve as the foundation of the compensation programs detailed herein. The Compensation Committee derives 
other executive compensation elements, including annual cash incentives and long-term equity incentives by weighing them 
against base salary.  Base salary levels for executive officers of the Company are generally established at or near the start of 
each year. The Company’s annual cash incentive bonuses are administered through its Tier I Incentive Compensation Plan. The 
plan  provides  guidelines  for  the  calculation  of  annual  cash  incentive-based  compensation,  subject  to  the  Compensation 
Committee’s oversight and the Company’s and executive’s achievement of corporate and individual goals. Generally, at its first 
meeting each year, the Compensation Committee determines final bonuses for executive officers earned in the preceding year 
based on each individual’s performance and the performance of the Company through its audited financial statements, and also 
reviews the incentive program to be established for the current year and approves the group of executives eligible to participate 
in the Tier I Incentive Compensation Plan for that year. 

42 

 
All full-time and part-time employees, including the Company’s executive officers, are eligible participants in the 2020 Stock 
Plan. The Compensation Committee believes that through the Company’s broad-based equity compensation plan, the economic 
interests of all employees, including the executive officers, are more closely aligned with those of our stockholders. It is also 
believed  that  this  approach  will  allow  the  Company  to  use  equity  as  an  incentive  in  a  balanced  manner  that  supports  the 
recruitment and retention of top talent. 

The  Compensation  Committee  generally  recommends  for approval  by  the  independent members  of  the  Board  the  grant  of 
equity awards at the first regularly scheduled meeting of the Board or upon completion of the Compensation Committee’s 
review and approval process. The Compensation Committee and the Board do not generally grant equity awards at other times 
during the year, other than in the case of a new hire, promotion or other exceptional circumstances. 

Impact Of Performance On Compensation 

The  performance  of  the  Company  and  of  the  executive  officer  has  a  direct  impact  on  the  compensation  received  by  such 
executive  officer  from  the  Company.  On  an  annual  basis,  the  CEO  reviews  the  performance  and  compensation  for  the 
Company’s  executive officers  to  determine  any potential  salary  adjustment  for  each  individual. This  assessment  takes  into 
consideration a number of factors, including the Company’s profitability; the performance of applicable business units; the 
executive officer’s individual performance and measurable contribution to the Company’s success; and pay levels of similar 
positions with comparable companies in the industry and within similar technology industries. 

In  addition,  both  Company  and  individual  performance  are  assessed  by  the  CEO  when  proposing  to  the  Compensation 
Committee any annual cash incentive payout to the NEOs (other than the CEO) under the annual cash incentive component of 
their Tier I Incentive Compensation Plan. The Tier I Plan includes various incentive level opportunities based on the executive 
officer’s accountability and impact on Company operations, with target award opportunities that are established as a percentage 
of base salary. For our NEOs, 2020 and 2021 target annual cash bonus opportunities were set as follows: 

Name 
Michael P. Plisinski 
Steven R. Roth 
Rollin Kocher 
Kevin Heidrich 
Robert A. Koch 

Target Annual Cash Incentive Percentage 

2021 
100% 
65% 
60% 
50% 
40% 

2020 
100% 
65% 
60% 
50% 
40% 

Under the annual cash incentive component of our Tier I Incentive Compensation Plan, payout is based upon achievement of 
corporate and personal objectives with no payout unless the Company meets the threshold level of at least one of the Board 
approved  corporate  financial  targets  established  as  part  of  the  plan.  Personal  objectives  are  awarded  only  upon  clear 
achievement of the associated goal. Failure to meet the personal objectives thereby has a negative impact on the ultimate bonus 
payout. 

In  addition  to  a  review  of  the  prior  year’s  objectives,  the  CEO  and  each  executive  officer  also  confer  to  propose  to  the 
Compensation Committee new individual performance targets for the executive officers (including the NEOs, other than the 
CEO) for the current year, which are combined with the corporate targets into an annual cash incentive opportunity proposal. 
The  personal  targets  that  are established  are  designed  to  result  in  additional  incremental  value  to  the  Company  if  they  are 
achieved.  These  personal  performance  targets  in  2020  included  goals  related  to  additional  corporate  and/or  business  unit 
financial measures, operational measures and activities, transactional activities, and marketing initiatives, depending on the 
executive officer involved. The target level of the corporate component to the bonus goals was set based on the Company’s 
financial budget established by the Board at the beginning of the year. The determination of these goals is made annually to 
meet the changing nature of the Company’s business. 

Upon  completion  of  the  prior  year’s  results  and  prior  to  implementation  of  the  current  year’s  proposed  Tier  I  Incentive 
Compensation Plan, the results for each participating executive officer are submitted to, and reviewed by, the Compensation 
Committee, which considers the CEO’s recommendations for executive officers other than the CEO and determines the final 
bonus earned by each executive officer based on Company and individual performance. The Compensation Committee then 
establishes the Company and individual metrics applicable to the current year’s Tier I Incentive Compensation Plan. Thereafter, 
the Compensation Committee’s recommendations are presented to the independent members of the Board for approval of the 
achieved incentive payment, if any, and of the new plan for the current year. If, during the year, there are changes to the Tier I 
Incentive  Compensation  Plan  that  are  proposed,  such  changes  are  presented  to  the  Compensation  Committee  for  its 

43 

 
 
  
  
  
  
  
  
  
  
consideration. The Compensation Committee may exercise discretion in relation to its recommendation to the independent 
members of the Board regarding an individual’s award under the Tier I Incentive Compensation Plan based upon its review. 

An executive officer’s role, responsibilities, individual performance and contribution to the Company are factors considered in 
determining  the  size  of  any  discretionary  equity  grant  that  may  be  recommended  by  the  Compensation  Committee  to  the 
independent members of the Board for approval as long-term incentive to the individual. 

Based upon the foregoing, the compensation that an executive officer may realize in the course of a year can be impacted by 
the  positive  or  negative  performance  of  such  individual  as  well  as  Company  performance.  We  intend  for  an  individual’s 
compensation under the Tier I Incentive Compensation Plan to be proportionate to the Company’s and his or her performance 
against  established  goals.  Similarly,  equity  awards  that  are  performance-based  are  intended  to  be  proportionate  to  the 
Company’s  performance  under  goals  established  for  the  Company.  This  review  and  evaluation  are  more  subjective  when 
applied to salary adjustments. In this case, an executive officer’s performance is evaluated by taking into consideration the 
executive officer’s contribution to the Company, the significance of the individual’s achievements in relation to the overall 
corporate goals and mission, and the executive officer’s effectiveness in his or her role within the Company and then weighed 
against the performance of other executive officers. Industry norms and reference to comparative company data are considered 
to the extent appropriate. Thus, there is no precise, objective formula that is applied in determining salary adjustments. 

 Compensation Plan Design And Decisions For 2020 And 2021 

For 2020, the Compensation Committee conducted a review of the compensation program and determined that the 2020 Tier I 
Compensation Plan would retain the same basic elements as the prior year’s plan as these elements aligned the Company’s 
program with its current business strategy and included the pay for performance aspect of its executive compensation program.  
Taking into account the Company’s 2019 financial performance and outlook for 2020, each executive officer’s performance 
and  responsibilities,  and  current  market  compensation  rates  for  each  executive  officer  position,  among  other  criteria,  the 
Compensation Committee recommended, and the Board approved, the updated program and compensation plan structure for 
the executive officers in 2020 as detailed below. 

For 2021, the Compensation Committee determined that the 2021 Tier I Compensation Plan would retain the basic elements 
reflected in the 2020 plan.  Considering the Company’s 2020 performance and the Company’s outlook for 2021, each executive 
officer’s performance and responsibilities, and current market compensation rates for each executive officer position, among 
other  criteria,  the  Compensation  Committee  recommended,  and  the  Board  approved  the  program  and  compensation  plan 
structure for our executive officers in 2021 also as detailed below. 

Base Salary 

The Company provides executive officers and other employees with base salary to compensate them for services rendered 
during  the  fiscal  year.  Base  salaries  for  executive  officers  are  established  considering  a  number  of  factors,  including  the 
executive officer’s: 

Individual performance; 

•  
•   Unique qualifications; 
•   Role and responsibilities; 
•   Measurable contribution to the Company’s profitability and success; and 
•   The base salary levels of similar positions with comparable companies in the industry.  

The  Compensation  Committee  supports  the  compensation  philosophy  of  moderation  for  elements  such  as  base  salary  and 
perquisites and other executive officer benefits. As noted above, under “Impact of Performance on Compensation,” base salary 
decisions  are  made  as  part  of  the  Company’s  formal  annual  review  process  and  are  influenced  by  the  performance  of  the 
Company and the individual. 

Salary levels are considered annually as part of the performance review process as well as upon a promotion or other change 
in job responsibility. The Compensation Committee reviews and determines salaries after reviewing salary data supplied by the 
compensation consultant, including data regarding the peer comparison group, as well as consideration of the compensation 
for the executive officers on a company-wide basis, based on their relative duties and responsibilities and the recommendations 
of the CEO (other than with respect to his or her compensation) as it relates to the executive officers who report to the CEO. 
The Compensation Committee also considers comparisons of peer group compensation to peer group performance as provided 
by  the  independent  compensation  consultant.  The  Compensation  Committee  did  not  apply  formulas  or  assign  specific 
mathematical weights to any of these factors, but rather exercised its business judgment and discretion to make a subjective 

44 

 
determination regarding each executive officer's base salary for 2020 and 2021, as applicable, after considering all of these 
measures collectively. 

The  CEO’s  recommendations  for  salary  adjustments  (other  than  his  or  her  own)  are  reviewed  and  modified  as  deemed 
appropriate by the Compensation Committee and presented to the independent members of the Board for approval. 

Base Salary For 2020 

For 2020, the Compensation Committee approved a 10% increase to the CEO’s base salary and increases ranging from 3% to 
10% to the base salaries of each of our other NEOs. 

Base Salary For 2021 

For 2021, the Compensation Committee approved a 3% increase to the CEO’s base salary and increases of 3% to the base 
salaries of each of our other NEOs. 

 Annual Cash Incentive Compensation 

The Compensation Committee views cash bonuses as part of its performance-based compensation program designed to align 
the recipient’s interests with the Company’s annual goals and objectives and its stockholders’ interests. An executive officer’s 
annual  cash  incentive  award  under  the  Tier  I  Compensation  Plan  generally  depends  on  the  financial  performance  of  the 
Company relative to profit, revenue and other financial targets and the executive officer’s individual performance. The incentive 
opportunity is generally set at a higher percentage for more senior officers, with the result that such officers have a higher 
percentage of their potential total cash compensation at risk. Executive officers reporting to the CEO, including all of our NEOs, 
participate in the Tier I Plan, which is designed to generate additional incentive for maximizing the employee’s performance in 
realizing the corporate strategic and financial goals and mission.  The Compensation Committee may, but is not required to, 
establish a Tier I Plan for any given year. 

Upon  completion  of  the  year,  the  individual’s  and  the  Company’s  results  with  respect  to  the  performance  targets  are  then 
assessed  and presented  to  the  Compensation  Committee. The  Compensation  Committee reviews  the  proposed  payouts  and 
suggests changes to the extent it deems such action necessary. Tier I Plan awards are paid out following completion of the 
annual audit by the Company’s independent registered public accounting firm. This generally occurs in the first quarter of each 
year. 

Annual Cash Incentive Plan For 2020 

For 2020, the Compensation Committee adopted an annual cash incentive plan as part of the Tier I Plan that is structured such 
that each NEO’s potential cash award was subject to the achievement of 2020 corporate financial objectives consistent with the 
Board approved annual operating plan for 2020.  These corporate financial objectives are established at levels in excess of the 
overall industry projections in order that the Company drive to outperform the industry. 

The annual cash incentive portion of the Tier I Plan has up to three (3) components:  Corporate Goals, Business Unit Goals (if 
applicable) and personal performance goals. 

•   The Corporate Goals of the Tier I Plan relate to corporate revenue and corporate non-GAAP operating income. The 
performance  ranges  for  each  metric  included  a  payout  level  for  threshold  performance  at  50%  of  target  and  an 
established target level to achieve the maximum payout by exceeding the corporate performance objectives for each of 
the corporate financial metrics. The cash bonus payout was contingent on meeting at least one of the 2020 corporate 
revenue or corporate non-GAAP operating income goals.  Should the Company not have reached the threshold level 
for either the 2020 corporate revenue or corporate non-GAAP operating income goal, then no payout under the plan 
would have been made to executive officers. 

•   For those NEOs who were associated with a particular Company business unit or department, a portion of their cash 
bonus potential was allocated to business unit/department financial performance goals.  In 2020, these goals were the 
achievement of fiscal 2020 business unit revenue and non-GAAP operating income objectives (“Business Unit Goals”). 
Earning of the potential cash award apportioned to the Business Unit Goals began upon achieving 80% of the business 
unit revenue target and/or 70% of the business unit non-GAAP operating income target. 

45 

 
•   The final component of the Tier I Plan was the inclusion of personal performance goals that are specific to the individual 
NEO.  The NEO personal performance goals in 2020 included targets related to senior management planning, additional 
corporate  financial  measures,  operational  measures  and  activities,  product  development  measures  or  marketing 
initiatives, depending on the executive officer involved.  Cash bonuses arising from the personal performance goals 
were drafted to be awarded on an “each or nothing” basis. 

Provided that either of the Corporate Goal thresholds was met, the cash bonus potential of the Tier I Plan could be realized.  
The annual cash incentive component of the Tier I Plan was designed and administered as follows: 

•   Cash bonuses arising from the Corporate Goals and the Business Unit Goals are awarded starting at a 50% level at the 

respective goal threshold and increasing linearly up to the Tier I Plan target amounts. 

•  

If  the Tier  I  Plan  target  is  exceeded  in  either  or  both  Corporate  Goal  categories,  then  the  cash  payout  increases  as 
follows: 

◦   Corporate Revenue:  From 100% to 120% of target, additional cash compensation is earned linearly up to 200% 

of this target. 

◦   Non-GAAP Operating Income: From 100% to 130% of target, additional cash compensation is earned linearly up 

to 200% of this target. 

•   Upon achieving either of the Corporate Goals, the Business Unit Goals, if applicable, and personal performance goals 

could be earned in full. 

•   Additional  cash  payout  is  realized  if  either  of  the  Business  Unit  Goals  is  exceeded,  similar  to  the  Corporate  goal 

parameters above. 

The following table reflects the structure of the annual cash incentive components of the Tier I Plan. 

Tier I Incentive Compensation Plan - 
Annual Cash Incentive Provisions 
Payout if both financial metric thresholds are not reached 
Corporate revenue threshold 

Corporate non-GAAP operating income threshold 

Payout upon attaining corporate financial metrics' threshold levels 
Payout upon attaining corporate financial metrics' target goals 
Payout upon attaining corporate financial metrics' maximum goals 
Corporate revenue metric upside performance range 

Corporate non-GAAP operating income metric upside performance range 

Business unit/department goal payout 
Personal goal payout 

2020 
0% 
80% of corporate revenue target 
70% of corporate non-GAAP operating 
income target 
50% 
100% 
200% 
  100%-120% of corporate revenue target 
100%-130% of corporate non-GAAP 
operating income target 
Variable 
Fixed 

Actual amounts paid to the NEOs under their respective annual cash incentive plans are reported below in the Non-Equity 
Incentive Plan Compensation column of the Summary Compensation Table. 

Annual Cash Incentive Plan For 2021 

For 2021, the Compensation Committee has  adopted  the same Tier I Plan structure as implemented in 2020 and described 
above.  Corporate and business unit financial goals were established consistent with the Board approved annual operating plan 
for 2021.  In addition, personal performance goals specific to the individual NEO have been included for 2021 which include 
targets related to additional corporate financial measures, operational measures and activities, quality, product development 
measures or marketing initiatives and personnel development depending on the executive officer involved. 

Long-Term Equity Incentive Plan 

Our equity compensation plans are an essential tool to link the long-term interests of the Company’s stockholders and our 
employees, particularly our executive officers, and serve to motivate executive officers to make decisions that will, in the long 
run, optimize returns to our stockholders. Equity compensation plans also enable us to provide an opportunity for increased 

46 

 
  
  
  
  
  
  
  
  
  
  
equity ownership by executive officers, thereby increasing the link between the incentives of our executive officers and the 
interests of our stockholders and maintain competitive levels of total compensation.  

Employees and members of management, including the Company’s NEOs, generally receive annual equity grants issued under 
the  Company’s  2020  Stock  Plan  at  or  about  the  time  of  their  performance  reviews  each  year.  The  Company’s  long-term 
incentive compensation program seeks to align the executive officers’ interests with the Company’s stockholders by rewarding 
successes in stockholder returns. Additionally, the Compensation Committee desires to foster an ownership mentality among 
executive officers by providing stock-based incentives as a portion of compensation. 

For the Company’s long-term incentive compensation program, the Compensation Committee grants performance-based and 
service-based RSUs. 

The number of Grants awarded to each executive officer is initially determined on a discretionary rather than formula basis by 
the Compensation Committee. 

Long-Term Equity Incentive Program For 2020 

The long-term equity incentive component of the Tier I Plan is divided between PSU grants and service-based RSU grants.  
The Compensation Committee determined for 2020 that the portion of our NEOs’ long-term incentive awards granted in the 
form of PSUs and service-vesting RSUs shall be split at 50% each. 

In 2020, the Compensation Committee granted equity awards to our NEOs with the dollar value allocated to each NEO.  The 
structure of the long-term equity incentive component was determined by the CEO (except in connection with his own grants) 
and the Compensation Committee through the consideration of a number of subjective factors, including the executive officer’s 
position and responsibilities at the Company, the executive officer’s individual performance, the number of grants held (if any) 
and  other  factors  that  they  may  deem  relevant.  The  2020  performance-based  long-term  equity  incentive  of  our  NEO 
compensation program is based on the metric of TSR.  The following parameters are included in the design of the long-term 
equity incentive program in 2020: 

Performance-Based Stock Units: For 2020, fifty percent (50%) of each NEO’s equity grant is comprised of PSUs. The relative 
TSR plan design includes the following features: 

•   Fifty percent (50%) of the PSU grant will be assessed at each of two (2) performance periods; at two years and at three 

years from the grant date (2020 through 2022 and 2023, for awards granted in early 2020). 

•   Performance will be assessed using TSR, which measures growth in stock price, plus any dividends paid, during the 

performance period. 

•   TSR performance will be compared to the Philadelphia Semiconductor Index (SOX). 

•   The performance and standards to earn the PSU equity awards in 2020 are as follows: 

TSR Performance Relative to Peers 

PSUs Earned as % of Target 

Below 25th Percentile 

25th Percentile 

55th Percentile 

80th Percentile and above 

0% 

50% 

100% 

200% 

•   The  PSU  award  payout  will  be  calculated  on  a  straight-line  basis  between  the  25th  &  55th  and  the  55th  &  80th 

percentile levels referenced above. 

•   A negative TSR cap has been instituted which limits any PSUs earned to target level if the Company’s TSR is negative 

over the performance period and our TSR ranks above the target performance level. 

•   Earned PSUs are not subject to additional service-based vesting conditions. 

Service-Vesting Restricted Stock Units: For 2020, fifty percent (50%) of each NEO’s equity grant is comprised of service-
based RSUs.  The time required for the RSUs to fully vest is three (3) years from the date of grant.  As a result, each service-
based RSU award is subject solely to service-based vesting in equal annual increments over the three (3) year vesting period. 

47 

 
 
 
The following table reflects the long-term equity incentive components of the Tier I Plan. 

Tier I Incentive Compensation Plan - 
Long-Term Equity Incentive Provisions 
Performance-based / Service-based grant breakout 

Service-based grant vesting period 

Performance-based grant evaluation period 

Performance-based grant metric(s) 
Performance-based grant vesting period 
Performance threshold for earning grant 
Percent of grant earned at threshold 
Measure at which 100% of grant is earned 
Maximum grant upside 
Measure at which maximum upside of grant is earned 

2020 
50%-50% 
33.3% annually 
over 3 years 
50% of grant  
at 2 and 3 years 
TSR 

   100% upon earning 
   25th TSR percentile 

50% 

   55th TSR percentile 

200% 

   80th TSR percentile 

Actual number of PSUs and RSUs granted to the NEOs in 2020 and the related value are reported below in the Grants Of Plan-
Based Awards In 2020 table. 

Long-Term Equity Incentive Program For 2021 

For 2021, the Compensation Committee has adopted the same structure for the long-term equity incentive component for the 
Tier I Plan as outlined above.  No changes were effectuated in the PSU grant/service-based RSU grant split, earning thresholds 
or TSR comparison group from what was implemented in 2020.  With regard to the PSU grant, fifty percent (50%) of the PSU 
grant performance will be assessed at each of two (2) performance periods; at two years and at three years from the grant date 
(2021 through 2023 and 2024, for awards granted in early 2021). 

Personal Benefits And Perquisites 

Benefits 

All employees of the Company, including its executive officers, are eligible to participate in the following benefit plans and 
programs (“Benefit Package”): 

•   Health and dental insurance; 

•   Elective vision care program; 

•   Life insurance and accidental death and dismemberment coverage; 

•   401(k) plan; 

•   Short- and long-term disability insurance with supplemental income continuation; 

•   Health care and dependent care flexible spending account programs; 

•   Employee assistance program (EAP); 

•   Employee stock purchase plan; 

•   Employee referral bonus program;  

•  

IP recognition awards; and 

•   Length of service awards.  

The  Company,  in  its  discretion,  may  offer  to  reimburse  the  expenses  that  an  employee  incurs  as  a  result  of  the  Company 
requiring the individual to relocate their primary residence for employment purposes.  The Compensation Committee believes 
that these benefits are consistent with industry practice and are important in recruiting and retaining qualified employees. 

48 

 
  
  
  
  
  
  
  
 
 
Perquisites 

The Compensation Committee reviewed the perquisites offered by both Nanometrics and Rudolph prior to the 2019 Merger 
and determined that executive officer perquisites would be limited to Company-paid tax preparation services and Company-
paid membership in one (1) airline executive club.  The Compensation Committee believes that these benefits are reasonable 
and  consistent  with  the  Company’s  overall  compensation  program  and  enable  the  Company  to  attract  and  retain  superior 
employees for key positions. 

The foregoing perquisites are determined and evaluated annually as part of the compensation review. 

Executive Officer Perquisites For 2020 

Consistent  with  the  Compensation  Committee’s  determination  prior  to  the  2019  Merger,  in  2020,  each  of  the  NEOs  were 
provided with perquisites limited to tax preparation fee payment and an airline club membership. 

Executive Officer Perquisites For 2021 

As of the date of this proxy statement, the Compensation Committee has not approved any new or additional perquisites to 
provide to the NEOs in 2021. 

Retirement Provision For Equity Awards 

As part of its review of the overall compensation program for all Company employees, including the NEOs, the Compensation 
Committee determined that the implementation of a retirement provision related to equity awards would continue to incentivize 
individuals as they near the end of their employment with the Company.  The alternative under the 2020 Stock Plan is that upon 
retirement of an employee any equity grants that had not vested would be forfeited. Thus, any incentive realized through the 
service-vesting  schedule  for  Company  equity  grants  was  diminished. As  a  result,  the  Compensation  Committee  assessed 
retirement provision alternatives and recommended to the Board, and the Board approved, the following retirement provision: 

•   An employee is “retirement eligible” if they achieve a combination of age plus years of service with the Company 

totaling 70, with a base minimum age of 58 years old and a minimum service requirement of five years.  

•   Retirement under the provision then would occur when an employee has become retirement eligible and has formally 
notified the Company of his/her intention to retire from the employ of the Company on a date certain and does so 
retire or as otherwise approved by the Compensation Committee. 

•   Upon such retirement by the employee, any equity awards granted by the Company shall vest based on: 

◦   The vesting schedule established for service-based equity awards; or 

◦   The actual performance results for performance-based equity awards.  

Employee Stock Purchase Plan 

The Company (as successor to Nanometrics) has maintained an Employee Stock Purchase Plan since 1986. The Company’s 
2020 Employee Stock Purchase Plan was approved by stockholders in 2020 and is currently administered by the Compensation 
Committee.  

Under the terms of our current Employee Stock Purchase Plan, eligible employees may elect to have up to fifteen percent (15%) 
of eligible compensation deducted from their base salary and applied to the purchase of shares of Company Common Stock. 
The price the employee pays for each share of stock is eighty-five percent (85%) of the fair market value of the Company 
Common Stock at the end of the applicable six-month purchase period. The Employee Stock Purchase Plan qualifies as a non-
compensatory plan under Code Section 423. 

The Company does not offer a non-qualified deferred compensation plan. 

49 

 
CORPORATE AND GOVERNANCE POLICIES 

 Employment And Change-In-Control Agreements 

While the Company utilizes employment agreements on a limited basis, we currently maintain employment agreements or 
arrangements with each of our NEOs. 

In 2000, Rudolph entered into a management agreement with Mr. Roth, effective as of July 24, 2000, which was assumed by 
the Company in connection with the 2019 Merger. Mr. Roth previously had employment agreements with Rudolph when it was 
a private entity, and, at the time of Rudolph’s initial public offering, his agreement was redrafted to reflect terms believed to be 
appropriate for such officer’s service in his capacity with a publicly held corporation. 

Upon the appointment of Mr. Plisinski to the position of CEO of Rudolph, he entered into a new employment agreement with 
Rudolph, which was assumed by the Company in connection with the 2019 Merger.  This agreement superseded the executive 
officer employment agreement that Mr. Plisinski had entered into with August Technology Corporation which was assumed by 
Rudolph upon its merger with August Technology in 2006. 

Mr. Plisinski’s employment agreement provides for a term of two (2) years with automatic renewals for additional two-year 
terms and Mr. Roth’s agreement provides for a term of one (1) year with automatic renewals for additional one-year terms 
unless  the  Company or  the  applicable  executive  officer delivers  a  notice  of  non-renewal  to  the  other  party.  Mr.  Plisinski’s 
agreement  prohibits  him  from  competing  with  the  Company  in  any  way  or  soliciting  its  employees  during  his  term  of 
employment and for two (2) years after termination of his employment.  Mr. Roth’s agreement prohibits him from competing 
with the Company in any way or soliciting its employees during his term of employment and for one (1) year after termination 
of his employment. 

Certain  of  our  executive  officers  are  also  entitled  to  payments  upon  a  qualifying  termination  of  employment  following  a 
Change-in-Control event. The Compensation Committee believes that providing severance in a Change-in-Control situation is 
beneficial to stockholders so that executive officers may remain objectively neutral when evaluating a transaction that may be 
beneficial to stockholders yet could negatively impact the continued employment of the executive officer.  

The Nanometrics Compensation Committee authorized Nanometrics to enter into a Change-in-Control Agreement with Mr. 
Heidrich in May 2015 and with Mr. Kocher in November 2016.  Further, Mr. Plisinski’s and Mr. Roth’s employment agreements 
also contain Change-in-Control terms. Rudolph entered into a Change-in-Control Agreement with Mr. Koch in August 2009. 

See  “Potential  Payments  Upon  Termination  of  Employment  or  Change-in-Control”  below  for  a  description  of  these 
arrangements  and  potential  payments  that  the  NEOs  would  have  been  entitled  to  receive  upon  applicable  hypothetical 
termination scenarios as of December 31, 2020. 

 Other Elements Of Post-Termination Compensation 

The  Company  does  not  have  a  practice  of  providing  retirement  benefits,  including  any  supplemental  executive  officer 
retirement plans (SERP), to its executive officers, other than through its 401(k) plan and the retirement provision for equity 
grants awarded by the Company. The Company retains the discretion to utilize the offer of severance and/or change-in-control 
protection as an incentive in its hiring and retention of executive officers. 

 Non-Solicitation And Non-Competition Policy 

The Company maintains a policy of entering into an agreement with each of its new executive officers, which contains both 
non-solicitation and non-competition provisions. The non-solicitation provisions apply for one (1) year after termination of the 
individual’s employment while the non-competition provisions are in effect during the individual’s employment and generally 
for one (1) year thereafter, except for Mr. Plisinski, whose non-solicitation and non-competition provisions are in place during 
and extend for two (2) years after the end of, his employment with the Company. Each of the Company’s executive officers 
had previously entered into these covenants on the foregoing terms with either Nanometrics or Rudolph and these agreements 
were assumed by the Company in connection with the 2019 Merger. In all cases, these covenants have been implemented to 
protect  the  confidential  information,  goodwill  and  other  assets  of  the  Company.  For  those  individuals  with  employment 
agreements, should a breach of the non-solicitation or non-competition terms of their agreements occur, this could give rise to 
the Company declaring a breach under the agreement and terminating all severance payments thereunder. 

50 

 
 General Termination Benefits 

Upon termination of an executive officer’s employment with the Company, the individual is entitled to receive his or her base 
salary earned through the termination date, along with a payout for all accrued but unused vacation time earned though such 
date. Thereafter, further cash compensation to the executive officers is discontinued, except to the extent that severance or 
change-in-control  payments  are  required  to  be  made  in  accordance  with  individual  or  Company  severance  protection 
arrangements.  Certain executive officers with the Company who have entered into employment agreements are entitled to elect 
to continue group health or other group benefits as allowed by COBRA with continued Company co-payments for agreed post-
termination periods. The Company retains the right to offer severance and/or payment of COBRA benefits to any individual 
who is terminated from the Company at its discretion. 

 Stock Ownership/Retention Guidelines 

The  Company  has  established  guidelines  related  to  stock ownership  and  retention for  its  executive  officers  and  its  outside 
directors to further align the interest of the executive officers and non-employee directors with the interests of stockholders, to 
have a stake in the long-term financial future of the Company and to further promote the Company’s commitment to sound 
corporate governance while allowing them to prudently manage their personal financial affairs. 

To that end, the Board established the Company’s stock ownership policy such that the stock ownership and retention levels 
currently in effect are the following: 

Company Role 

Non-Employee Directors 

CEO 

Company Common Stock  
Holding Requirement 

Effective Date 

3x value of the annual  
Board retainer 

Within 5 years of initial election 
to Board 

3x value of CEO’s 
base annual salary 

Within 5 years of hire/promotion 

Executive Officers Subject to 
Section 16 Reporting Requirements 

1x value of executive officer’s 
base annual salary 

Within 5 years of hire/promotion 

In assessing compliance with the foregoing guidelines, the Company takes into consideration only the ownership of Common 
Stock in the Company. As a result, unearned PSUs, unvested service-based RSUs and vested or unvested stock options do not 
qualify as shares for purposes of compliance with the Company’s stock ownership and retention guidelines. 

Participants are expected to achieve their ownership guideline target within five (5) years of becoming subject to the policy. 
Existing participants were subject to this policy as of the date of the policy and any new participants will be subject to the 
policy on their hire, promotion, election or appointment date, as applicable. 

Compliance  with  the  Company’s  stock  ownership  and  retention  guidelines  is  reviewed  annually  by  the  Compensation 
Committee. At their last review on January 25, 2021, the Compensation Committee determined that all executive officers and 
directors who were with the Company and acting in their executive officer/director capacities for periods in excess of one (1) 
year were in compliance with the ownership requirements. Should any individual in the future not own the minimum number 
of  required  shares  after  notice  by  the  Compensation  Committee,  additional  action,  including  possible  removal  from  the 
executive officer role or a determination to not nominate the director for election, would be considered by the Board. 

The Compensation Committee has scheduled its review of the Company’s stock ownership and retention guidelines for its 
January 2022 meeting and at this annual review will evaluate the appropriateness of the foregoing stock ownership levels for 
2022 based in part on the average closing price of a share of the Company’s stock during the thirty (30) consecutive trading 
days ending on and including the last day of the most recently completed fiscal year, as well as other considerations such as 
market conditions and comparable practices within the industry. 

 Prohibition On Hedging And Pledging Of Company Stock 

In order to ensure that our executive officers, including our NEOs, and our directors bear the full risk of the Company’s stock 
ownership, our  insider  trading  policy  prohibits  directors  and  executive officers  of  the Company from  engaging  in hedging 
transactions related to our Common Stock. Additionally, under the Company’s anti-pledging policy, non-employee directors 

51 

 
 
 
and executive officers are prohibited from making any new pledges of Company securities as collateral for a loan, or otherwise 
making a new transfer of Company securities to a margin account, provided that non-employee directors may pledge their 
securities when obligated to do so to realize the consummation of potential mergers, acquisitions and similar transactions with 
which the Company may be involved from time to time. 

 Adjustments Or Recovery Of Prior Compensation 

The Company adopted a policy which provides for the recovery or adjustment of amounts previously awarded or paid to a 
NEO in the event that financial results or other performance measures on which an award or payment was determined are 
materially  restated  or  adjusted.  In  addition,  if  the  Company  is  required  to  restate  its  financial  results  due  to  material 
noncompliance with any financial reporting requirements as a result of misconduct, the Sarbanes-Oxley Act of 2002 requires 
the CEO and CFO to disgorge: 

•   Any bonus or other incentive-based or equity-based compensation received from the Company during the 12-month 

period following the first public issuance of the non-compliant financial reporting document; and 

•   Any profits realized from the sale of Company stock during that 12-month period.  

In addition, Section 954 of the Dodd-Frank Wall Street Reform and Consumer Protection Act requires the SEC to direct the 
national securities exchanges to prohibit the listing of any security of an issuer that does not develop and implement a clawback 
policy. The SEC has not finalized its rules related to these clawback policies. Once the final rules are in place, the Company 
will adjust its policy, as necessary, to comply with SEC regulations. 

 Compensation Program Risk Assessment 

As part of the engagement with the Compensation Committee’s compensation consultant, in association with the development 
of  and  advice  concerning  our  executive  officer  compensation  program  and  practices,  Compensia  takes  into  consideration 
whether possible compensation design features may have the potential to incentivize the NEOs to take risks that are reasonably 
likely  to  have  a  material  adverse  effect  on  the  Company.   As  part  of  the  Compensation  Committee’s  compensation  risk 
assessment, potential risks and risk mitigating features are addressed in the following areas: compensation philosophy and pay 
mix; performance measures used in incentive plans; goal setting and payout leverage and caps; calculation and verification of 
performance outcomes for incentive payments; and other features.  Based on this framework and the input from Compensia, 
the Compensation Committee evaluated our current compensation policies, practices and programs and believes they do not 
create risks that are reasonably likely to have a material adverse effect on the Company. 

 IRS Limits On Deductibility Of Compensation 

Prior  to  the  2018  tax  year,  Section 162(m)  of  the  Internal  Revenue  Code  of  1986,  as  amended  (“IRC”),  limited  the  tax 
deductibility of annual compensation paid to any publicly held corporation’s CEO and three other highest compensated officers 
excluding  the  CFO,  to  the  extent  that  the  officer’s  compensation  (other  than  qualified  performance-based  compensation) 
exceeded $1 million.  Although the Compensation Committee considers deductibility issues when approving executive officer 
compensation  elements,  the  Compensation  Committee  believes  that  the  other  compensation  objectives,  such  as  attracting, 
retaining and providing appropriate incentives to executive officers, are important and can supersede the goal of maintaining 
deductibility.  Consequently,  the  Compensation  Committee  generally  makes  compensation  decisions  without  regard  to 
deductibility, as the Compensation Committee believes it has appropriately structured its compensation programs to provide 
incentives to our executive officers to increase Company return and stockholder value.  Subsequent changes in the tax laws 
eliminated the “performance-based” exception, and the limitation on deductibility was expanded to include all named executive 
officers. As a result, the Company does not deduct compensation paid to our NEOs in excess of $1 million. 

52 

 
 
 
CONCLUSION 

In reviewing its compensation programs, the Company has concluded that each element of compensation as well as the total 
compensation opportunities for its NEOs and its other executive officers are reasonable, appropriate and in the interests of the 
Company and its stockholders. The Company believes that this compensation program appropriately satisfies the Company’s 
goals of establishing a compensation package that attracts and retains a strong motivated leadership team, aligns the financial 
incentives of the executive officers with the interests of the stockholders, and rewards the achievement of specific annual, long-
term and strategic goals of the Company. The Company believes that the compensation program which has been established 
and is reflected herein has enabled it to recruit and secure a talented and motivated leadership team by which the Company 
drives toward the ultimate objective of improving stockholder value. 

53 

 
 
COMPENSATION COMMITTEE REPORT ON EXECUTIVE OFFICER 
COMPENSATION 

We,  the  Compensation  Committee  of  the  Board,  have  reviewed  and  discussed  the  Compensation  Discussion  and Analysis 
(“CD&A”) within the Executive Officer Compensation section of this proxy statement with the management of the Company. 
Based on such review and discussions, we have recommended to the Board that the CD&A be included as part of this proxy 
statement. 

THE COMPENSATION COMMITTEE 

Edward J. Brown, Jr. (Chairman) 
Jeffrey A. Aukerman 
David B. Miller 

54 

 
 
 
 
 
 
 
 
 Summary Compensation Table 

The following table summarizes the compensation earned by our NEOs in the fiscal years noted.  

Name and Principal Position 

Michael P. Plisinski (4) 
Chief Executive Officer 

Steven R. Roth (5) 
Senior Vice President, Finance & Administration and 
Chief Financial Officer 

Rollin Kocher 
Senior Vice President, Field Operations 

Kevin Heidrich (6) 
Senior Vice President, Marketing & 
Corporate Development Leadership 
Robert A. Koch 
Vice President & General Counsel 

Bonus ($) 

Salary ($) 
$592,089  — 
$83,192  — 

$400,975  — 

Non-Equity 
All Other 
Incentive Plan 
Compensation 
Compensation 
($)(3) 
($)(2) 
$489,408 
$9,414     $3,763,688 
$540,750  $1,752,211     $2,376,153 

Total ($) 

Stock Awards 
($)(1) 
$2,672,777 
— 

$545,698 

$215,489 

$9,414     $1,171,576 

$55,953  — 

— 

$218,216 

$606,995    

$881,164 

$330,327  — 
$324,712  — 
$309,615  — 
$305,173  — 

$299,615  — 

$584,664 
$492,022 
$630,085 
$334,082 

$171,793 
$162,500 
$357,120 
$127,583 

$2,841     $1,089,625 
$984,234 
$5,000    
$8,641     $1,305,461 
$769,468 
$2,631 

$292,872 

$125,000 

$3,800 

$721,287 

Year 
2020 
2019 

2020 

2019 

2020 
2019 
2018 
2020 

2019 

2020 

$312,224  — 

$278,416 

$108,544 

$8,102   

$707,286 

(1)  Amounts reflect the grant date fair value for each share-based compensation award granted to the executive officer during the covered 
year, calculated in accordance with FASB ASC Topic 718. The assumptions used in determining the grant date fair values of awards 
are set forth in Note 2 to our consolidated financial statements, which are included in our Annual Report on Form 10-K filed with the 
SEC on February 19, 2021. For 2020, the amount reported for each NEO includes the grant date fair value attributable to the 2020 
awards of (i) time-based RSUs and (ii) PSUs, assuming that the performance conditions were satisfied at target at the time of grant. 
The grant date fair value attributable to the 2020  PSUs assuming maximum performance achievement is as follows: Mr. Plisinski, 
$2,945,505; Mr. Roth, $601,389; Mr. Kocher, $644,332; Mr. Heidrich, $368,176; and Mr. Koch, $306,829. The actual amounts earned 
will be determined following the end of the two (2) year performance period (February 7, 2020 – February 7, 2022) and the three (3) 
year performance period (February 7, 2020 – February 7, 2023). 

(2)  Reflects the amounts for a given year represent the amount earned in respect of that year under the Company’s annual cash performance 
incentive plan, as applicable, notwithstanding the year in which it was paid.  See “Compensation Discussion and Analysis – Annual 
Cash Incentive Compensation” for further information.  

(3)  Refer to the All Other Compensation table for more detailed information about the 2020 compensation reported in this column.  2019 
amounts for Mr. Plisinski and Mr. Roth reflect the value of equity awards that vested upon the change in control on the Merger Date. 
(4)  The total compensation earned by Mr. Plisinski during 2019 while serving as Rudolph’s CEO, when added to the amount reported in 
the Summary Compensation Table, results in total compensation for the full calendar year of $3,391,035. This adjustment included (i) 
increasing his salary ($455,741), (ii) including the grant date fair value of a time-based equity award Mr. Plisinski received for Rudolph 
prior  to  the  2019  Merger  ($550,021),  (iii)  including  401(k)  matching  contributions  earned  prior  to  the  2019  Merger  ($8,400)  and 
including insurance coverage paid by Rudolph prior to the 2019 Merger ($720). 

(5)  The total compensation earned by Mr. Roth during 2019 while serving as Rudolph’s CFO, when added to the amount reported in the 
Summary Compensation Table, results in total compensation for the full calendar year of $1,391,819. This adjustment included (i) 
increasing his salary ($306,518), (ii) including the grant date fair value of a time-based equity award Mr. Roth received for Rudolph 
prior  to  the  2019  Merger  ($195,017),  (iii)  including  401(k)  matching  contributions  earned  prior  to  the  2019  Merger  ($8,400)  and 
including insurance coverage paid by Rudolph prior to the 2019 Merger ($720). 

(6)  Although employed by Nanometrics prior to 2019, Mr. Heidrich was not an NEO prior to 2019. 

55 

 
 
 
 
 
 
 
 
All Other Compensation 

Name 
Michael P. Plisinski 
Steven R. Roth 
Rollin Kocher 
Kevin Heidrich 
Robert A. Koch 

Matching 
Contribution 
to 401(k) ($) 
$8,550 
$8,550 
$1,703 
$1,579 
$7,238 

Year 
2020 
2020 
2020 
2020 
2020 

Perquisites 
and Other 
Personal 
Benefits ($)(2) 
— 
— 
— 
— 
— 

Insurance 
($)(1) 
$864 
$864 
$1,138 
$1,058 
$864 

Severance Compensation 
($) 
— 
— 
— 
— 
— 

Total 
($) 
$9,414 
$9,414 
$2,841 
$2,631 
$8,102 

(1)  Insurance  is  the  premium  associated  with  coverage  under  the  group  term  life  insurance  and  accidental  death  and  dismemberment 
insurance plans. Coverage is equal to the lesser of two (2) times salary or $450,000 for former Rudolph employees. Coverage is equal 
to the lesser of two (2) times salary or $1,000,000 for former Nanometrics employees. 

(2)  Value of aggregate perquisites and benefits for each NEO is less than $10,000, and therefore, perquisites for these individuals are not 

required to be disclosed in accordance with SEC rules. 

 Grants Of Plan-Based Awards In 2020 

The  following  table  sets  forth  information  with  respect  to  non-equity  and  equity  incentive  plan  awards  that  were 
granted during 2020 to the NEOs. No stock option awards were granted to any NEO in 2020. 

Estimated Future Payouts Under 
Non-Equity Incentive Plan 
Awards ($) (1) 

Estimated Future Payouts Under 
Equity Incentive Plan Awards (#) 
(2) 

    $105,058    $600,332    $1,200,664     

  Maximum      Threshold     Target 

  Maximum      

    15,605 

31,209 

62,418 

  $264,330    $528,661 

Name 

Michael P. Plisinski 

Steven R. Roth 

Rollin Kocher 

Kevin Heidrich 

Robert A. Koch 

    $46,258 

  Grant Date      Threshold     Target 
  2/7/2020 
  2/7/2020 
  2/7/2020 
  2/7/2020 
  2/7/2020 
  2/7/2020 
   2/7/2020 
  2/7/2020 
   2/7/2020 
   2/7/2020 
  2/7/2020 
   2/7/2020 
   2/7/2020 
  2/7/2020 
   2/7/2020 

    $35,569    $203,250    $406,500     

    $27,388    $156,500    $313,000     

    $21,954    $125,452    $250,903     

3,186 

6,372 

12,744 

3,414 

6,827 

13,654 

1,951 

3,901 

7,802 

1,626 

3,251 

6,502 

All Other 
Stock 
Awards: 
Number of      
Shares of 
Stocks or 
Units (#) (3)     

Grant Date 
Fair Value    
of Stock 
and Option 
Awards ($)    

31,210 

    $1,472,753   
    $1,200,024   

6,372 

    $300,695 
    $245,003 

    $322,166   
    $262,498    

6,827 

    $184,088   
    $149,994    

3,901 

    $153,415   
    $125,001    

3,251 

(3)  The  amounts  reported  in  these  columns  represent  the  annual  cash  incentive  opportunities  under  the  Company’s  Tier  I  Incentive 
Compensation Plan for each of our NEOs for the 2020 performance period. The metrics against which performance was measured 
under this plan, as well as other details regarding the plan, are discussed above in the Compensation Discussion and Analysis under 
“Annual Cash Incentive Compensation.” The amounts actually earned by our NEOs under the plan are reflected in the “Non-Equity 
Incentive Plan Compensation” column of the Summary Compensation Table above. 

(4)  The amounts reported in these columns represent the award opportunities under the Company’s PSU program. The metrics against 
which  performance  was  measured  under  this  program,  as  well  as  other  details  regarding  the  plan,  are  discussed  above  in  the 
Compensation  Discussion  and Analysis under  the heading  “Long-Term  Equity  Incentive  Plan.” The  performance  periods  for  these 
awards is two years and three years with the final determinations of the award ultimately earned being made in 2022 and 2023. 

(5)  The amounts reported in this column represent the awards of RSUs which are subject to service-based vesting conditions, as discussed 
above in the Compensation Discussion and Analysis under the heading “Long-Term Equity Incentive Plan.” These RSUs vest in 33.3% 
increments on each of the first three (3) anniversaries of the grant date. 

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 Outstanding Equity Awards At 2020 Year-End 

The following table sets forth information with respect to outstanding equity awards held by the NEOs as of December 26, 
2020. No stock option awards were outstanding as of December 26, 2020. 

Stock Awards  

Name 

Michael P. Plisinski 

Steven R. Roth 

Rollin Kocher 

Kevin Heidrich 

Robert A. Koch 

Number of Shares 
or Units of Stock 
That Have Not 
Vested (#)(2) 
8,506 
6,156 
13,123 
31,210 
2,616 
2,182 
4,653 
6,372 
8,079 
11,318 
6,827 
4,201 
6,737 
3,901 
2,681 
2,047 
3,276 
3,251 

Grant 
Date (1) 
1/27/2016 
2/8/2018 
2/6/2019 
2/7/2020 
1/27/2016 
2/8/2018 
2/6/2019 
2/7/2020 
2/23/2018 
3/11/2019 
2/7/2020 
2/23/2018 
3/11/2019 
2/7/2020 
1/27/2016 
2/8/2018 
2/6/2019 
2/7/2020 

Market Value of 
Units of Stock That 
Have Not Vested 
($)(3) 
$408,458 
$295,611 
$630,166 
$1,498,704 
$125,620 
$104,780 
$223,437 
$305,983 
$387,954 
$543,490 
$327,833 
$201,732 
$323,511 
$187,326 
$128,742 
$98,297 
$157,314 
$156,113 

Equity Incentive 
Plan Awards: 
Number of Unearned 
Shares, Units 
or Other Rights That 
Have Not 
Vested (#)(4) 

Equity Incentive 
Plan Awards: 
Number of Unearned 
Shares, Units 
or Other Rights That 
Have Not 
Vested (#)(3) 

31,209 

$1,498,656 

6,372 

6,827 

3,901 

$305,983 

$327,833 

$187,326 

3,251 

$156,113 

(1)  For better understanding of this table, we have included an additional column showing the grant date of each stock award. 

(2)  Amount includes (i) service-based RSU awards and (ii) PSU awards that have been earned and remain subject to service-based vesting 

requirements. PSUs and RSUs vest in accordance with the schedule below: 

Grant Date 

1/27/2016 

1/27/2016 

Grant Type 
Service-based RSU  1/5th per year on the anniversary of the grant date 

Vesting 

Earned PSU 

1/5th on February 16, 2017 and 1/5th per year on the anniversary of the grant date 

2/8/2018 to 2/7/2020 

Service-based RSU  1/3rd per year on the anniversary of the grant date 

(3)  Based on the Company’s common stock closing price of $48.02 per share on December 26, 2020. 

(4)  PSUs granted in 2020 are reported in this table at target. The actual number of PSUs earned will be determined based on performance 
achievement measured over a two (2) two and three (3) year performance period, and any earned PSUs will vest on February 7, 2022 
and February 7, 2023, respectively. 

57 

 
  
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 Stock Vested In 2020 

The following table sets forth information with respect to the value realized by the NEOs upon vesting of PSUs and RSUs 
during 2020, and such values reflect the total pre-tax value realized by each NEO.  There were no stock option exercises by 
any of the NEOs during 2020. 

Name 
Michael P. Plisinski 
Steven R. Roth 
Rollin Kocher 
Kevin Heidrich 
Robert A. Koch 

Stock Awards 

Number of 
Shares Acquired 
on Vesting (#) 
34,527 
11,760 
18,972 
10,840 
6,161 

Value 
Realized on 
Vesting ($)(1) 
$1,363,796 
$464,529 
$655,312 
$373,427 
$242,754 

(1) The aggregate dollar amount realized is based on the fair market value of the shares upon vesting. 

 Pension And Nonqualified Deferred Compensation 

The Company does not have a defined benefit pension program, nor does it offer non-qualified deferred compensation. 

 Potential Payments Upon Termination Of Employment Or Change-In-Control 

This section (including the following tables) summarizes each NEO’s estimated payments and other benefits that would be 
received by the NEO or the NEO’s estate if his or her employment had terminated on December 26, 2020, under the hypothetical 
circumstances set forth below.  

Each of our NEOs would be entitled to certain termination payments upon his or her death or Disability, his or her involuntary 
termination without Cause, or his or her voluntary termination with Good Reason as described below.  Although the definitions 
of each of these terms is specific to the NEO’s employment agreement or change-in-control agreement with the Company, the 
terms generally have the following meanings: 

•  

•  

“Disability” generally means that the executive officer, due to physical or mental impairment, is unable to perform his 
or her duties to the Company for a specified period of time. 

“Cause” generally means that the executive officer engaged in a crime, willful gross misconduct or other serious act 
involving  moral  turpitude;  materially  breached  an  agreement  between  him  or  her  and  the  Company;  or otherwise 
materially breached his or her obligations to the Company. 

•   A  voluntary  termination  for  “Good  Reason”  generally  means,  depending  on  the  particular  executive  officer’s 
agreement,  that  the  executive  officer’s  duties,  responsibilities  or  status  with  the  Company  or  its  successor  are 
materially reduced; his or her primary place of work is moved to a location outside a predetermined radius; in particular 
cases, certain reduction in compensation; or the Company materially breaches the terms of his or her agreement with 
the Company or any successor fails to assume the executive officer’s change-in-control agreement. 

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 NEO Employment Agreements 

Mr. Plisinski’s employment agreement provides for the following: 

Mr. Plisinski 

•  

In the event of any termination of Mr. Plisinski’s employment, he is entitled to payment of all base salary due and 
owing through the termination date and an amount equal to all earned but unused vacation through the termination 
date. 

•  

In the event Mr. Plisinski’s employment is terminated due to his death, his estate would be entitled to: 

◦   Payment of his then-current base salary as if his employment had continued for three (3) months following his 

death; 

◦   Continued co-payment for a period of six (6) months following his death of amounts due under COBRA for 
continuation of Company’s group health and other group benefits for his covered dependents, if the covered 
dependents so elect; 

◦   Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the time 

employed preceding his death, to be paid out with the Company’s annual incentive plan payouts; and 

◦  

Immediate  vesting  of  stock  options  and  SARs,  and  immediate  vesting  of  RSU  awards  granted  after  his 
appointment as CEO which by their terms would vest within twelve (12) months after death and, if a performance 
award, based on actual performance achievement for such performance period completed within twelve (12) 
months after death. 

•  

In the event Mr. Plisinski’s employment is terminated due to his Disability, he would be entitled to: 

◦   Payment of his then-current base salary through the end of the month of such termination; 

◦   Continued co-payment for a maximum period of six (6) months following his Disability of amounts due under 
COBRA for continuation of Company’s group health and other group benefits, if he or his covered dependents, 
as appropriate, so elects; 

◦   Payment of his annual incentive cash bonus based on actual performance achievement, prorated for the time 
employed preceding his termination, to be paid out with the Company’s annual incentive plan payouts; and 

◦  

Immediate  vesting  of  stock  options  and  SARs,  and  immediate  vesting  of  RSU  awards  granted  after  his 
appointment as CEO which by their terms would vest within twelve (12) months after termination for disability 
and, if a performance award, based on actual performance achievement for such performance period completed 
within twelve (12) months after termination. 

•  

In the event Mr. Plisinski’s employment is terminated by the Company without Cause or Mr. Plisinski terminates his 
employment for Good Reason, he would be entitled to: 

◦   Payment of two (2) times his then-current base salary for a period of twenty-four (24) months; 

◦   Continued co-payment for a period of up to eighteen (18) months of amounts due under COBRA for continuation 

of Company’s group health and other group benefits, if he so elects; and 

◦   Vesting of any equity incentive awards outstanding as of the termination date that, by their terms: 

(1)  represent  either  unvested  shares  which  were  earned  based  on  a  completed  performance  period  under  a 
performance-based award granted on or after the employment agreement effective date and which as of the 
termination date are then subject to time-based vesting only, or shares under such an equity incentive award 
granted on or after the employment agreement effective date which will be earned under a performance-based 
award based on actual achievement under a performance period which has been completed on or prior to the 
termination date but as to which performance period the actual number of shares earned against the award 
performance goals has not yet been determined by the Company; and  

(2)  would  have  become  vested  based  solely  on  the  passage  of  time  within  the  twelve  (12)  month  period 
immediately following the termination date had Mr. Plisinski continued in employment with the Company. 

59 

 
 
 
 
•  

If,  within  eighteen  (18)  months  following  the  occurrence  of  a  Change-in-Control1,  Mr.  Plisinski’s  employment  is 
terminated for any reason other than for Cause or Mr. Plisinski terminates his employment for Good Reason, he would 
be entitled to: 

◦   Payment of two (2) times the sum of his then-current base salary and target annual cash bonus for a period of 

twenty-four (24) months; 

◦   Continued co-payment by Company for a period of up to eighteen (18) months of amounts due under COBRA 

for continuation of Company’s group health and other group benefits, if he so elects; and 

◦  

Immediate vesting of all unvested stock options, SARs and all unvested and outstanding performance-based (at 
target) and service-based RSUs and other equity awards. 

◦   To the extent that change-in-control termination payments made to Mr. Plisinski under his agreement are subject 
to the excise tax imposed by Section 4999 of the IRC, Mr. Plisinski would either have to pay the excise tax or 
have his benefits reduced so that no portion of his termination payments were subject to the excise tax. 

◦  

In order to receive these termination or change-in-control termination payments, Mr. Plisinski would be required 
to sign a general release of all known and unknown claims that he may have against the Company. 

◦   As  part  of  his  employment  agreement,  Mr.  Plisinski  is  subject  to  non-solicitation  and  non-competition 
restrictions that limit his ability to compete with the Company during the term of the agreement and for a period 
of two (2) years following his resignation or termination for any reason. 

The following table reflects the potential payments to Mr. Plisinski in the event of his termination or his termination following 
a change-in-control: 

Potential Payments To Mr. Plisinski Upon Termination Or Change-In-Control 

Cash Severance 

   Value of 

  Termination Circumstance as of 12/26/2020 

By the Company without Cause 

Executive officer resignation for Good Reason 

   Base Salary    
$1,200,664 
(2x salary) 
$1,200,664 
(2x salary) 
$150,083 
(3 mos. salary)   

Death 

   Within 18 months following Change-in-Control: 

Disability 

$ - 

By the Company without Cause 

By the executive officer with Good Reason 

$1,200,664 
(2x salary) 
$1,200,664 
(2x salary) 

Management 
Incentive 
Bonus 

Accelerated 
Unvested 
Equity 

Benefits 
Continuation    

$ - 

$ - 

$489,408 
(1x bonus) 
$489,408 
(1x bonus) 

$978,816 
(2x bonus) 
$978,816 
(2x bonus) 

$4,331,596 

$54,393 

$4,331,596 

$54,393 

$4,331,596 

$18,131 

   $4,331,596    

$18,131 

$4,331,596 

$54,393 

   $4,331,596    

$54,393 

1 For Mr. Plisinski, a “Change-in-Control” would generally be considered to have occurred if: 

• 

• 
• 
• 
• 

a merger or consolidation of the Company or an acquisition by the Company involving the issuance of its securities as consideration 
for the acquired business results in the stockholders of the Company following such transactions having less than fifty percent (50%) 
of combined voting power of the surviving entity; 
any person or persons becomes the beneficial owner of thirty percent (30%) or more of our outstanding shares; 
all or substantially all assets of the Company are disposed of pursuant to a plan of liquidation of the Company; 
all or substantially all of our assets are sold; or 
during any twelve (12) month consecutive period the individuals who presently make up our Board or who become members of our 
Board with the approval of at least a majority of our existing Board cease to constitute at least a majority of the Board; provided any 
transaction or event described above will not constitute a change-in-control under the agreement unless it qualifies as a “change-in-
control” under Section 409A of the IRC. 

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Mr. Roth’s employment agreement provides for the following: 

Mr. Roth 

•  

In the event Mr. Roth’s employment is terminated as a result of his death or Disability, he or his estate would be 
entitled to: 

◦   Payment of all base salary due and owing through the termination date and amount equal to all earned but unused 

vacation through the termination date; 

◦   Payment of an amount equal to Mr. Roth’s bonus as was paid or payable for the most recent completed bonus 

period; and 

◦   Accelerated vesting of all outstanding and unvested stock options, performance-based and service-based RSUs 

or other equity awards. 

•  

In the event Mr. Roth’s employment is terminated without Cause or Mr. Roth terminates his employment for Good 
Reason, he would be entitled to: 

◦   Payment of all base salary due and owing through the termination date and an amount equal to all earned but 

unused vacation through the termination date; 

◦   Payment for over a period of one (1) year of one (1) times Mr. Roth’s: 

*  Then-current base salary; and 

*  Bonus as was paid or payable for the most recent completed bonus period; 

◦   Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance-based  and 

service-based RSUs and other equity awards. 

•  

If, within one (1) year following the occurrence of a change-in-control2, Mr. Roth’s employment is terminated for any 
reason other than for Cause or Mr. Roth terminates his employment for Good Reason, he would be entitled to: 

◦   Payment of all base salary due and owing through the termination date and including an amount equal to all 

earned but unused vacation through the termination date; 

◦   Payment over a period of one (1) year of one (1) times Mr. Roth’s: 

*  Then-current base salary; and 

*  Bonus as was paid for the most recent completed bonus period; 

◦   Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance-based  and 

service-based RSUs and other equity awards; and 

◦   Maintenance of Mr. Roth’s and his dependents’ health care benefit coverage to the same extent provided for by 
and with the same Company/Executive officer payment contribution percentages under Company’s group plans 

2 For Mr. Roth, a “Change-in-Control” would generally be considered to have occurred if: 

• 
• 

• 

• 
• 

any person or persons becomes the beneficial owner of twenty-five percent (25) or more of our outstanding voting shares; 
during any two (2) consecutive year period individuals who presently make up our Board or who become members of our Board 
with the approval of at least two-thirds of our existing Board (other than a new director who assumes office in connection with an 
actual or threatened election contest) cease to be at least a majority of the Board; 
a merger or consolidation of the Company is consummated with another entity (unless outstanding voting securities of the Company 
immediately prior to the termination would continue to represent more than fifty-one percent (51%) of the combined voting power 
of the surviving entity and had the power to elect as least a majority of the board of the surviving entity); 
our stockholders approve a plan of liquidation of the company or an agreement for the sale of all or substantially all of our assets; or 
any other event occurs of a nature that would be required to be reported as a “change-in-control” under Schedule 14A of the Exchange 
Act, provided any transaction or event described above will not constitute a change-in-control under the agreement unless it qualifies 
as a “change-in-control” under Section 409A of the IRC. 

61 

 
 
 
at the time of termination. Such coverage shall extend for a term of one (1) year from the Termination Date 
unless he becomes covered as an insured under another employer’s or spousal health care plan. 

•   To the extent that termination or change-in-control payments made to Mr. Roth under his agreement are subject to the 
excise tax imposed by Section 4999 of the IRC, Mr. Roth would either have to pay the excise tax or have his benefits 
reduced so that no portion of his termination payments were subject to the excise tax. 

•  

In order to receive these termination or change-in-control payments, Mr. Roth would be required to sign a general 
release of all known and unknown claims that he may have against the Company. 

•   As part of his employment agreement, Mr. Roth is subject to non-competition and non-solicitation restrictions that 
limit his ability to compete with the Company during the term of the Agreement and for a period of one (1) year 
following his resignation or termination for any reason. 

The following table reflects the potential payments to Mr. Roth in the event of his termination or his termination following a 
change-in-control: 

Potential Payments To Mr. Roth Upon Termination Or Change-In-Control 

Cash Severance 

   Value of 

  Termination Circumstance as of 12/26/2020 

By the Company without Cause 

Executive officer resignation for Good Reason 

   Base Salary    
$406,662 
(1x salary) 
$406,662 
(1x salary) 

Death 

Disability 

$ - 

$ - 

Management 
Incentive 
Bonus 
$215,489 
(1x bonus) 
$215,489 
(1x bonus) 
$215,489 
(1x bonus) 
$215,489 
(1x bonus) 

Accelerated 
Unvested 
Equity 

$1,065,804 

$1,065,804 

$1,065,804 

$1,065,804 

Benefits 
Continuation    

$ - 

$ - 

$ - 

$ - 

   Within 12 months following Change-in-Control: 

By the Company without cause 

By the executive officer with good reason 

$406,662 
(1x salary) 
$406,662 
(1x salary) 

$215,489 
(1x bonus) 
$215,489 
(1x bonus) 

$1,065,804 

$36,262 

$1,065,804 

$36,262 

Messrs. Kocher and Heidrich 

The executive officer general severance and change-in-control agreements for Messrs. Kocher and Heidrich provide for the 
following: 

•  

In the event Mr. Kocher’s and Mr. Heidrich’s employment is terminated as a result of a “Covered Termination”3, the 
executive officer or his estate would be entitled to: 

◦   Payment of all base salary due and owing through the termination date, any unreimbursed business expenses and 

an amount equal to all earned but unused vacation through the termination date; 

◦   Payment of his then-current base salary for a period of six (6) months (paid over a period of six (6) months); and 

◦   Provided that the executive officer is eligible and has made the necessary elections for continuation coverage 
pursuant to COBRA under a health, dental, or vision plan sponsored by the Company, payment of his and his 
dependent’s applicable premiums for such continued benefits. Such coverage shall extend for a term of six (6) 
months from the termination date. 

3 For Messrs. Kocher and Heidrich, a “Covered Termination” would generally be considered to have occurred in the event of the executive’s: 

• 
• 

dismissal or discharge by the Company for reasons other than Cause and other than as a result of death or disability; or 
resignation for Good Reason within ninety (90) days of the occurrence of the Good Reason action, which occurs outside of twelve 
(12) months of a Change-in-Control event. 

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•  

If,  within  one  (1)  year  following  the  occurrence  of  a  Change-in-Control4,  Mr.  Kocher’s  and  Mr.  Heidrich’s 
employment  is  terminated  for  any  reason  other  than  for  Cause  or  Mr.  Kocher  and  Mr.  Heidrich  terminates  his 
employment for Good Reason, the executive officer would be entitled to: 

◦   Payment of all base salary due and owing through the termination date, any unreimbursed business expenses and 

an amount equal to all earned but unused vacation through the termination date; 

◦   Payment in a single lump sum following the effective date for his Release of his: 

*  Then-current annual base salary; and 

*  100% of his target annual bonus in effect for the fiscal year in which the termination date occurs; 

◦   Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance-based  and 

service-based RSUs and other equity awards; and 

◦   Provided  that  executive  officer  is  eligible  and  has  made  the  necessary  elections  for  continuation  coverage 
pursuant to COBRA under a health, dental, or vision plan sponsored by the Company, payment of his and his 
dependent’s applicable premiums for such continued benefits. Such coverage shall extend for a term of twelve 
(12) months from the termination date. 

•   To the extent that change-in-control termination payments made to Mr. Kocher and Mr. Heidrich are subject to the 
excise tax imposed by Section 4999 of the IRC, Mr. Kocher or Mr. Heidrich would either have to pay the excise tax 
or have his benefits reduced so that no portion of his termination payments were subject to the excise tax. 

•  

In order to receive these change-in-control termination payments, Mr. Kocher and Mr. Heidrich would be required to 
sign a general release of all known and unknown claims that he may have against the Company. 

Each of Mr. Kocher and Mr. Heidrich have entered into a separate agreement upon employment with the Company that subjects 
the executive officer to non-competition and non-solicitation restrictions, which limit his ability to compete with the Company 
during his employment and for a period of one (1) year following his resignation or termination for any reason. 

The following table reflects the potential payments to Mr. Kocher in the event of his termination or his termination following 
a change-in-control: 

Potential Payments To Mr. Kocher Upon Termination Or Change-In-Control 

Cash Severance 

   Value of 

  Termination Circumstance as of 12/26/2020 

By the Company without Cause 

Management 
Incentive 
Bonus 

Accelerated 
Unvested 
Equity 

Benefits 
Continuation    

n/a 

n/a 

$17,664 

   Base Salary    
$169,375 
(6 months’ 
salary) 

   Within 12 months following Change-in-Control: 

By the Company without Cause 

By the executive officer with Good Reason 

$338,750 
(1x salary) 
$338,750 
(1x salary) 

$203,250 
(1x bonus) 
$203,250 
(1x bonus) 

$1,587,109 

$35,328 

$1,587,109 

$35,328 

4 For Messrs. Kocher and Heidrich, a “Change-in-Control” would generally be considered to have occurred upon any of the following: 

• 

• 

• 

any person or persons becomes the beneficial owner of fifty percent (50%) or more of the total voting power represented by the 
Company’s then outstanding voting securities; 
during any two (2) year, any action or event occurs in which less than a majority of the directors who are either (A) directors of the 
Company as of the date of the executive’s agreement, or (B) elected, or nominated for election, to the Board with the affirmative 
votes of a majority of the incumbent directors at the time of such election or nomination (but does not include an individual whose 
election  or  nomination  is  in  connection  with  an  actual  or  threatened  proxy  contest  relating  to  the  election  of  directors  to  the 
Company); 
the consummation of a merger or consolidation of the Company with any other corporation, other than a merger or consolidation 
which would result in the outstanding voting securities of the Company immediately prior thereto continuing to represent at least 
fifty percent (50%) of the outstanding voting securities of the Company or such surviving or resulting entity immediately after such 
merger or consolidation; or  
the consummation of the sale, lease or other disposition by the Company of all or substantially all the Company’s assets.   

• 
To the extent required for compliance with Code Section 409A, in no event will a change-in-control be deemed to have occurred if such 
transaction is not also a “change in the ownership or effective control of” the Company or a “change in the ownership of a substantial 
portion of the assets of” the Company, as determined under Treasury Regulations Section 1.409A-3(i)(5) 

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 The following table reflects the potential payments to Mr. Heidrich in the event of his termination or his termination following 
a change-in-control: 

Potential Payments To Mr. Heidrich Upon Termination Or Change-In-Control 

Cash Severance 

   Value of 

  Termination Circumstance as of 12/26/2020 

By the Company without Cause 

Management 
Incentive 
Bonus 

Accelerated 
Unvested 
Equity 

Benefits 
Continuation    

n/a 

n/a 

$17,664 

   Base Salary    
$156,500 
(6 months’ 
salary) 

   Within 12 months following Change-in-Control: 

By the Company without Cause 

By the executive officer with Good Reason 

$313,000 
(1x salary) 
$313,000 
(1x salary) 

$156,500 
(1x bonus) 
$156,500 
(1x bonus) 

$899,895 

$35,328 

$899,895 

$35,328 

The executive officer change-in-control agreement for Mr. Koch provides for the following: 

Mr. Koch 

•  

In the event Mr. Koch’s employment is terminated as a result of his death or “Disability”, the executive officer or his 
estate would be entitled to: 

◦   Payment of all base salary due and owing through the termination date and an amount equal to all earned but 

unused vacation through the termination date; and 

◦   Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance-based  and 

service-based RSUs and other equity awards. 

•  

If, within one (1) year following the occurrence of a change-in-control5, Mr. Koch’s employment is terminated for any 
reason other than for Good Cause or Mr. Koch terminates his employment for Good Reason, the executive officer 
would be entitled to: 

◦   Payment of all base salary due and owing through the termination date and an amount equal to all earned but 

unused vacation through the termination date; 

◦   Payment of his then-current base salary for a period of twelve (12) months (paid over a period of twelve (12) 

months); 

◦   Accelerated  vesting  of  all  unvested  stock  options  and  all  unvested  and  outstanding  performance-based  and 

service-based RSUs and other equity awards; and 

◦   Maintenance of his and his dependent’s health care benefit coverage to the same extent provided for by and with 
the same Company/Executive officer payment contribution percentages under Company’s group plans at the 
time of termination. Such coverage shall extend for a term of one (1) year from the termination date unless he 
becomes covered as an insured under another employer’s or spousal health care plan. 

•   To the extent that change-in-control termination payments made to Mr. Koch are subject to the excise tax imposed by 
Section 4999 of the IRC, Mr. Koch would either have to pay the excise tax or have his benefits reduced so that no 
portion of his termination payments were subject to the excise tax. 

5 For Mr. Koch, a “Change-in-Control” would generally be considered to have occurred if: 

• 
• 

• 

any person or persons becomes the beneficial owner of fifty percent (50%) or more of our outstanding voting shares; 
during any twelve (12) month period a majority of the Board is replaced by directors whose appointment or election is not endorsed 
by a majority of the members of the Board prior to the date of the appointment or election; or 
there is a change in the ownership of Company assets that occurs with a person or group over a twelve (12) month period if the 
subject assets have a total gross fair market value equal to or more than forty percent (40%) of the total gross fair market value of 
all  of the  assets  of  Company immediately  prior to  such  acquisition or  acquisitions  (subject  to  certain  exceptions),  provided  any 
transaction or event described above will not constitute a change-in-control under the agreement unless it qualifies as a “change-in-
control” under Section 409A of the IRC. 

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•  

In order to receive these change-in-control termination payments, Mr. Koch would be required to sign a general release 
of all known and unknown claims that he may have against the Company. 

Mr. Koch has entered into a separate agreement upon employment with the Company that subjects him to non-competition and 
non-solicitation restrictions, which limit his ability to compete with the Company during his employment and for a period of 
one (1) year following his resignation or termination for any reason. 

The following table reflects the potential payments to Mr. Koch in the event of his termination or his termination following a 
change-in-control: 

Potential Payments To Mr. Koch Upon Termination Or Change-In-Control 

  Termination Circumstance as of 12/26/2020 

  Within 12 months following sale or change-in-control: 

Cash Severance 
(Base Salary)    
$ - 
$ - 

Death   
Disability   

Value of 
Accelerated 
Unvested 
Equity 
   $530,573    
   $530,573    

Benefits 
Continuation   
$ - 
$ - 

By the Company without cause 

By the executive officer with good reason 

$313,629 
(1x salary) 
$313,629 
(1x salary) 

$530,573 

$30,504 

$530,573 

$30,504 

 Retention Bonus Agreements  

No NEO entered into a Retention Bonus Agreement with the Company. 

 Executive Officers 

Set forth below is certain information regarding the executive officers of the Company and their ages as of March 31, 2021. 
Information  relating  to  Michael  P.  Plisinski  is  set  forth  above  under  the  caption  “PROPOSAL  1  -  ELECTION  OF 
DIRECTORS”.  The  Company  is  unaware  of  any  arrangements  or  understandings  between  the  executive  officers  of  the 
Company and other person(s) pursuant to which an executive officer was or is to be selected, except that Mr. Plisinski was 
appointed as CEO of the Company pursuant to the Merger Agreement for the 2019 Merger. 

Named Executive Officers (NEOs) 

Steven R. Roth    Senior Vice President, Finance and Administration and Chief Financial Officer    Age:  60 

•   Mr. Roth has served the Company in his current role since the Merger Date and previously served in the same role at 

Rudolph since February 2002.  

•   Prior Experience: 

◦   September 1996 to February 2002: Vice President, Finance and Administration and Chief Financial Officer, Rudolph 

Technologies, Inc. 

◦   August 1991 to August 1996:  Director of Corporate Finance, Bell Communications Research. 

•   Mr. Roth is a C.P.A. and holds a B.S. in Accounting from Villanova University. 

Rollin Kocher    Senior Vice President, Field Operations    Age:  55 

•   Mr. Kocher has served the Company in his current role since the Merger Date and previously with Nanometrics as Senior 

Vice President, Sales and Marketing since January 2018.  

•   Prior Experience: 

◦   September 2016 to January 2018:  Senior Vice President, Commercial Operations, Nanometrics 
◦   March 2013 to September 2016:  Vice President, Global Sales, Nanometrics 
◦   Prior to joining Nanometrics in 2013, Mr. Kocher spent thirteen (13) years at KLA Tencor Corporation in a variety 
of senior management roles including Director of Business Development for Films and Optical Critical Dimension 

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Business  Unit,  Senior  Account  Manager  for  Texas  Instruments  Business  Unit,  his  last  position  being  General 
Manager of the Samsung Business Unit. 

•   Mr. Kocher holds a B.S. degree in Electrical and Electronic Engineering from the University of North Texas and an A.S. 
degree in Laser Electro Optics Technology from Texas State Technical College, holds a Finance for Senior Executives 
Certification from Harvard Business School and served in the U.S Army from 1983 to 1986. 

Kevin Heidrich    Senior Vice President, Marketing & Corporate Development    Age:  50 

•   Mr. Heidrich has served the  Company in his current role since the Merger Date and previously with Nanometrics as 

Senior Vice President, Corporate Development since January 2018. 

•   Prior Experience: 

◦   September 2012 to January 2018: Senior Vice President, Strategic Marketing & Business Development, Nanometrics 
◦   May 2009 to September 2012:  Vice President, Business Development & Marketing, Nanometrics 
◦   May 2007 to May 2009:  Sr. Director, Business Development, Nanometrics 
◦   April 2006 to May 2007:  Director, New Product Development, Nanometrics 
◦   Prior to joining Nanometrics in 2006, Mr. Heidrich spent a decade at Intel Corporation in a variety of roles including 

in process research and development at Intel’s Technology Development facility. 

•   Mr. Heidrich holds a B.S. and M.S. degree from the Colorado School of Mines in Chemical Engineering. 

Robert A. Koch    Vice President & General Counsel    Age:  59 

•   Mr. Koch has served the Company in his current role since the Merger Date and previously with Rudolph since May 

2003. 

•   Prior Experience: 

◦   April 1986 to May 2003: In-house counsel, last serving as Director of Legal Affairs, Howmedica Osteonics Corp., 

the subsidiary of Stryker Corporation. 

•   Mr. Koch holds a B.S. in Chemical Engineering and a M.S. in Biomedical Engineering, both from Rutgers University. 
Mr. Koch earned his J.D. from Rutgers School of Law - Newark in 1991 and is admitted to practice in New Jersey and 
New York. 

Other Executive Officers 

Elvino da Silveira    Vice President & General Manager, Lithography Business Unit    Age:  61 

•   Mr. da Silveira has served the Company in his current role since the Merger Date and previously served in the same role 

at Rudolph since June 2019.   

•   Prior Experience: 

◦   August 2017 to June 2019:  Vice President, Business Development, Rudolph Technologies, Inc. 
◦   November 2015 to July 2017: Vice President, Marketing and Product Management, Rudolph Technologies, Inc. 
◦   December 2012 to October 2015:  Vice President and General Manager of the Display Products Lithography Business 

Unit and Chief Technical Officer of the Lithography Systems Group, Rudolph Technologies, Inc. 

◦   March 1999 to December 2012:  President and Chief Executive Officer, Azores Corporation. 
◦   Other prior roles included various senior management roles with the latest being Vice President of Operations and 
Worldwide Customer Support for MRS Technology, Inc., a former manufacturer of capital equipment for the flat 
panel display industry. 

•   Mr. da Silveira holds a B.S. in Mechanical Engineering from Northeastern University. 

66 

 
 
 
 
 
Robert Fiordalice    Vice President & General Manager, Wafer Business Unit    Age:  59 

•   Mr. Fiordalice has served the Company in his current role since the Merger Date and previously with Nanometrics as 

General Manager, Materials Characterization Group since August 2017. 

•   Prior Experience: 

◦   October 2013 to July 2017:  General Manager, Advanced Packaging, Nanometrics 
◦   August 2006 to August 2013:  Vice President, Account Technology, Intermolecular, Inc. 
◦   Prior to 2006, Mr. Fiordalice held technology management roles with both KLA Tencor Corporation and Motorola 

Inc. 

•   Mr. Fiordalice holds a B.S. in Genetics from University of California at Berkley and a M.S. in Physics from Syracuse 

University. 

Barry Hartunian    Global Vice President Human Resources     Age:  58 

•   Mr. Hartunian has served the Company in his current role since joining the Company in December 2019. 
•   Prior Experience: 

◦   October 2016 to May 2018:  Vice President, People & Culture, Toast, Inc. 
◦   December 2013 to April 2016:  Chief People Officer, Veson Nautical Corporation 
◦   February 2010 to January 2014:  Chief Talent Officer/Advisor, Communispace Corporation 
◦   Prior roles since 1989 have included various director and vice-presidential roles in Human Resources for an array of 
companies including GenRad, Inc., Art Technology Group (ATG), Digimarc Corporation, Spotfire, Inc. and Vanue, 
Inc. 

•   Mr. Hartunian holds a B.A. in Psychology from Boston College and has received a Graduate Business Certification from 
Harvard University and an Executive Program Certification from the Tuck School of Business, Dartmouth College. 

Dean Iacopetti    Senior Vice President, Manufacturing Operations    Age:  65 

•   Mr. Iacopetti has served the Company in his current role since March 2021. 
•   Prior Experience: 

◦   October 2019 to March 2021:  Vice President, Manufacturing Operations, Onto Innovation Inc. 
◦   September 2018 to October 2019:  Vice President, Supply Chain, Nanometrics 
◦   May 2013 to October 2015:  Vice President, EUV Operations, Cymer Inc., a subsidiary of ASML Holding N.V. 
◦  
◦   May 2009 to May 2011:  President, Paragon Prime Consulting 
◦   Prior roles since 1979 have included various vice-presidential and senior vice-presidential roles in Operations and in 
Finance with Ingersoll Rand, Honeywell Aerospace and Mattel as well as other positions in Finance with Mattel. 

June 2011 to May 2013:  Vice President, Supply Chain, Cymer Inc. 

•   Mr. Iacopetti holds a B.S. in Business Administration (Finance/Accounting) from California University at Long Branch. 

Ju Jin, Ph.D.    Senior Vice President & General Manager, Inspection Business Unit    Age:  56 

•   Dr. Jin has served the Company in his current role since March 2021. 
•   Prior Experience: 

◦   October 2019 to March 2021:  Vice President and General Manager, Onto Innovation Inc. 
◦  

July 2019 to October 2019:  Vice President and General Manager, Rudolph Technologies, Inc.August 2016 to July 
2019:  Sr. Director of Marketing & Business Development, Orbotech Ltd., a subsidiary of KLA Corporation. 

◦   April 2009 to August 2016:  President and CEO, Applied Electro-Optics Inc. 
◦   March 2004 to April 2009:  Director and General Manager, Accretech USA 

•   Dr. Jin holds a B.S. from Xian Jiatong University in China, a M.S. from Nagaoka University of Technology in Japan and 

a Ph.D. from the University of Tokyo in Japan, all in Mechanical Engineering. 

67 

 
 
 
 
 
Danielle Baptiste    Vice President and General Manager, Enterprise Business Unit    Age:  48 

•   Ms. Baptiste has served the Company in her current role since joining the Company in August 2020. 
•   Prior Experience: 

July 2019 – August 2020:  Associate Vice President, Product Management, HCL – Digital Solutions 
June 2016 – June 2019:  Executive Director, Product Management, IBM – Collaboration Solutions  

◦  
◦  
◦   March 2015 – May 2016:  Principal Consultant, Ceatro Group 
◦   September  2002  –  June  2013:  Various  management  and  senior  management  roles  with  the  last  being  Executive 

Director, Market/Segment Management, IBM 

◦   Ms.  Baptiste  also  previously  held  positions  with  several  other  corporations  including  JP  Morgan  &  Chase  & 

Company, State Street Bank, Pfizer, Inc., PCS Revenue Control Systems, Inc. and McAfee, Inc.  

Rodney Smedt    Senior Vice President & General Manager, Metrology Business Unit    Age:  58 

•   Mr. Smedt has served the Company in his current role since the Merger Date and previously with Nanometrics as Senior 

Vice President, R&D since March 2018.  

•   Prior Experience: 

◦   November 2014 to March 2018:  Vice President, R&D, Nanometrics 
◦   April 2005 to November 2014:  Vice President, Engineering, ReVera Incorporated 
◦   Prior  to  2005,  Mr.  Smedt  served  as Vice  President,  Engineering  for  both Therma-Wave  Corporation  and  Sensys 
Instrument as well as held several senior management and engineering roles with several companies including KLA 
Tencor Corporation and Trigon-Adcotech Industries.    

•   Mr. Smedt attended San Jose State University and studied mechanical engineering. 

 CEO Pay Ratio 

As  required  by  Section  953(b)  of  the  Dodd-Frank  Wall  Street  Reform  and  Consumer  Protection Act,  and  Item  402(u)  of 
Regulation S-K, we have elected to identify our median employee every three years unless a significant change in employee 
population  or  employee  compensation  arrangements  has  occurred.  Because  there  has  been  no  change  in  our  employee 
population or employee compensation arrangements in 2020 that we reasonably believe would result in a significant change to 
our pay ratio disclosure for 2020, we are using the same median employee identified in 2019 to calculate our 2020 CEO pay 
ratio. For information regarding the process utilized to identify our median employee, please refer to our proxy statement for 
the 2020 Annual Meeting of Stockholders. 

For 2020, our last completed year, we determined that: 

•  The annual total compensation of the median employee was $108,513;  

•  The  annual  total  compensation  of  our  CEO,  Michael  P.  Plisinski,  as  reported  in  the  Summary  Compensation  Table 

included in this proxy statement, was $3,763,688; and 

The ratio of the annual total compensation of our CEO to the median employee’s annual total compensation is 35 to 1. 

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SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS 

The following table sets forth certain information with respect to beneficial ownership of the Company’s Common Stock as of 
March 12, 2021 (except as otherwise indicated), by (i) each individual or group known by the Company to own beneficially 
more than five percent (5%) of the Common Stock; (ii) each of the NEOs; (iii) each of the Company’s directors and director 
nominees; and (iv) all directors, director nominees and executive officers as a group. Except as indicated in the footnotes to 
this table, the persons named in the table have sole voting and investment power with respect to all shares of Common Stock 
shown as beneficially owned by them, subject to community property laws where applicable. 

  Name and Address of Beneficial Owner 
BlackRock, Inc. (3) 
   55 East 52nd Street, New York, NY 10055 
The Vanguard Group (4) 
   100 Vanguard Boulevard, Malvern, PA 19355 

   Michael P. Plisinski 
   Steven R. Roth 
   Rollin Kocher 
   Kevin Heidrich 
  Robert A. Koch 
   Jeffrey A. Aukerman (5) 
   Leo Berlinghieri 
   Edward J. Brown, Jr. 
   Vita A. Cassese 
   David B. Miller 
  Bruce C. Rhine 
  Christopher A. Seams 
  Christine A. Tsingos 
   All directors and executive officers as a group (seventeen (17) persons) 

*  Less than 1% 

Amount and Nature of 
Beneficial Ownership    

Percent of Class(2) 

7,533,940   

15.4% 

3,116,062   

205,440   
31,850   
35,527   
31,365   
30,360  
23,760   
18,576   
37,439   
6,433   
10,708   
275,988  
23,229  
30,509  
788,519 (1)  

6.4% 

* 
* 
* 
* 
* 
* 
* 
* 
* 
* 
* 
* 
* 
1.6% 

(1)  Includes 9,028 shares subject to restricted stock units vesting within 60 days of March 12, 2021 for all directors and executive officers as 

a group. 

(2)  Applicable percentage ownership is based on 48,956,481 shares of Common Stock outstanding as of March 12, 2021. Beneficial 
ownership of shares is determined in accordance with the rules of the SEC and generally includes shares as to which a person holds 
sole or shared voting or investment power. Shares of Common Stock subject to RSUs which will vest within sixty (60) days of March 
12,  2021  are  deemed  to  be  beneficially  owned  by  the  person  holding  such  RSUs  for  the  purpose  of  computing  the  percentage 
ownership of such person but are not treated as outstanding for the purpose of computing the percentage ownership of any other 
person. Unless otherwise noted, the address for the executive officers and directors named in this table is c/o Onto Innovation Inc., 
16 Jonspin Road, Wilmington, Massachusetts 01887. 

(3)  Information provided herein is based on the Schedule 13G/A that was filed by BlackRock, Inc. on January 25, 2021. 
(4)  Information provided herein is based on the Schedule 13G/A that was filed by The Vanguard Group on February 10, 2021. 
(5)  Includes shares held by Aukerman Investments LLC. 

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EQUITY COMPENSATION PLAN INFORMATION 

The following table sets forth, as of December 26, 2020, certain information related to our equity compensation plans. 

(a) 

(b) 

Plan Category 
Equity compensation plans approved by 
security holders 
Equity compensation plans not approved 
by security holders 

Total 

Number of Securities 
to be Issued Upon Exercise 
of Outstanding Options, 
Warrants and Rights (1) 

Weighted-Average 
Exercise Price of 
Outstanding Options, 
Warrants and Rights 

992,537 

n/a 

992,537 

$0.43 

n/a 

$0.43 

(c) 
Number of Securities 
Remaining Available for 
Future Issuance Under 
Equity Compensation 
Plans (Excluding 
Securities Reflected in 
Column (a)) (2) 

5,054,355 

n/a 

5,054,355 

(1)  Includes 964,621 shares issuable upon vesting of outstanding restricted stock units under the Onto Innovation Inc. 2020 Stock Plan, 

the Rudolph Technologies, Inc. 2018 Stock Plan and the Nanometrics Incorporated 2005 Equity Incentive Plan. 

(2)  As of December 26, 2020, 3,554,355 shares were available under the 2020 Stock Plan and 1,500,000 shares were available under 

the ESPP. 

DELINQUENT SECTION 16(A) REPORTS 

Section 16(a) of the Exchange Act requires the Company’s executive officers, directors and persons who own more than ten 
percent (10%) of a registered class of the Company’s equity securities to file an initial report of ownership on Form 3 and 
changes in ownership on Form 4 or Form 5 with the SEC. Based solely on its review of Section 16 filings made with the SEC, 
or written representations from certain reporting persons that no Section 16 filings were required, the Company believes that, 
during the fiscal year ended December 26, 2020, all officers, directors and greater than ten percent (10%) beneficial owners 
complied with all Section 16(a) filing requirements, except that Ju Jin filed one Form 4 on June 10, 2020 with respect to one 
share purchase transaction on February 28, 2020, Steven R. Roth filed one Form 4 on November 12, 2020 with respect to one 
10b5-1 sale transaction on November 9, 2020 and Rodney Smedt filed one Form 4 on June 10, 2020 with respect to withholding 
of shares upon the vesting of equity grants on June 2, 2020. 

OTHER MATTERS 

The Company knows of no other matters to be submitted to the Annual Meeting. If any other matters properly come before the 
Annual Meeting, it is the intention of the persons named in the enclosed proxy to vote the shares they represent as the Board 
may recommend. 

70 

 
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
  
 
 
ADDITIONAL INFORMATION 

Stockholders may obtain a copy of the Company’s Annual Report on Form 10-K for the fiscal year ended December 26, 2020, 
including  financial  statements  and  schedules  included  in  the Annual  Report  on  Form  10-K,  without  charge,  by  visiting  the 
Company’s website at https://investors.ontoinnovation.com/ or by writing to: 

Michael Sheaffer 
Sr. Director, Investor Relations & Market Research 
16 Jonspin Road 
Wilmington, Massachusetts 01887 

Upon written request to the Company, at the above address for Investor Relations, the exhibits set forth on the exhibit index of 
the  Company’s Annual  Report  on  Form  10-K  will  be  made  available  at  reasonable  charge  (which  will  be  limited  to  our 
reasonable expenses in furnishing such exhibits). 

BY ORDER OF THE BOARD OF DIRECTORS 

Robert A. Koch 
Secretary 

Dated: April 1, 2021 

71 

 
 
 
 
 
 
SHAREHOLDER I NFORMATION

LOCATIONS

INVESTOR INFORMATION

HEADQUARTERS
Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts 01887
Phone 978.253.6200
ontoinnovation.com

OTHER LOCATIONS
View all locations on our website:
https://ontoinnovation.com/company/locations

General Shareholder and 
Investor Questions may be
directed to:
Mike Sheaffer
Investor Relations,
Corporate Communications
Onto Innovation
16 Jonspin Road
Wilmington, Massachusetts
01887
investors@ontoinnovation.com

Independent Registered Public
Accounting Firm
Ernst & Young, LLP
Iselin, New Jersey

Registrar and Transfer Agent
Computershare Trust
Company, N.A.
P.O. Box 505000
Louisville, Kentucky 40233
Phone 800.368.5948
www.computershare.com

Stock Symbol
Common stock is traded on the
New York Stock Exchange
under the symbol, ONTO

Annual Meeting
Stockholders are invited to
attend the Annual Meeting
at 10:00 am on Tuesday,
May 11, 2021 at our corporate
headquarters, located at 
16 Jonspin Road
Wilmington, Massachusetts
01887

Form 10-K
The Annual Report on Form
10-K filed with the Securities
and Exchange Commission is
available without charge upon
written request to Investor 
Relations at our corporate 
headquarters address.

BOARD OF DIRECTORS

Christopher A. Seams
Chairman of the Board
Former Chief Executive 
Officer
Deca Technologies

Jeffery A. Aukerman
Former Partner
Deloitte & Touche, LLP

Leo Berlinghieri
Former Chief Executive 
Officer and President
MKS Instruments, Inc.

Edward J. Brown, Jr.
Former Chief Executive 
Officer
Cymer Light Source

Vita A. Cassese
Chief Executive Officer
Mardon Management 
Advisors

David B. Miller
Former President
DuPont Electronics & 
Communications

Michael P. Plisinski
Chief Executive Officer

Bruce C. Rhine
Former Chief Strategy 
Officer
Nanometrics Incorporated

Christine A. Tsingos
Former Executive Vice 
President and Chief Financial 
Officer
Bio-Rad Laboratories

EXECUTIVE OFFICERS

Michael P. Plisinski
Chief Executive Officer

Steven R. Roth
Senior Vice President, 
Finance and Administration 
and Chief Financial Officer

Robert A. Koch
Vice President and General 
Counsel